JP5199720B2 - Electrostatic levitation gyroscope - Google Patents

Description

The present invention relates to an electrostatic levitation type gyro apparatus including a gyro mechanism part and an electronic circuit part.
The gyro mechanism unit includes a gyro rotor and a gyro case, and supports the gyro rotor in a floating manner in the gyro case by electrostatic support force. The gyro rotor is placed in a vacuum for proper operation.
The electronic circuit unit is connected to the gyro mechanism unit, detects the relative displacement between the gyro rotor and the gyro case, and controls the attitude of the gyro rotor.

  Electrostatic levitation type gyros suitable for downsizing are used not only for ships and aircraft but also for moving objects such as automobiles. Gyro mechanism consisting of mechanical parts with inertia to detect acceleration to inertial space etc. And an electronic circuit unit for controlling electrostatic support force and detecting relative displacement. The gyro mechanism unit accommodates the gyro rotor in the vacuum space (cavity) of the gyro case, and supports the gyro rotor by floating electrostatically from the gyro case electrode to the gyro rotor. Some gyro rotors have an annular shape so that a large electrostatic attractive force can be produced in all directions even if they are made (see, for example, Patent Documents 1 to 5).

As for the electronic circuit unit, a basic displacement detection method in which a displacement detection signal is applied to the electrostatic support electrode and detected from the displacement detection electrode (see, for example, Patent Document 1), is used for displacement detection. There is a reverse displacement detection method in which a signal is applied to the displacement detection electrode and detected from the electrostatic support electrode (see, for example, Patent Documents 2 to 5).
5A and 5B show a schematic configuration of a conventional annular rotor type electrostatic levitation gyro device, in which FIG. 5A is an overall block diagram of a basic displacement detection method, and FIG. 5B is an overall block diagram of a reverse displacement detection method. It is. These conventional devices will be described below by scratching on matters useful for explaining the present invention.

  Since the gyro mechanism part is common to both types, the explanation will be given first. The annular gyro rotor 10 is built in the gyro case 20 so as to be electrostatically levitated and rotatable. The gyro case 20 is made of an insulating material such as glass, and an annular vacuum space is formed inside. The gyro rotor 10 is made of a conductor such as silicon imparted with conductivity by ion implantation or the like, and is formed in an annular shape so as to rotate stably around one spin axis. In order to apply an electrostatic support force and a rotational driving force from the gyro case 20 to the gyro rotor 10, a large number of electrodes 21 to 24 (multiple electrodes) made of a metal film pattern or the like are formed on the inner surface of the gyro case 20. Yes. These electrodes 21 to 24 are arranged at appropriate positions according to their roles, surround the gyro rotor 10, and are connected to an electronic circuit by lead wires.

The large number of electrodes 21 to 24 are divided into a plurality of opposed pairs that are opposed to each other with the gyro rotor 10 interposed therebetween.
Among the plurality of electrodes, the rotor driving electrodes 21 are arranged in a circular shape at a constant pitch on the lower surface of the upper bottom member of the gyro case 20, and are arranged in a circular shape at a uniform pitch on the upper surface of the lower bottom member of the gyro case 20. Are in an opposing pair.
In addition, among the plurality of electrodes, the displacement detection electrodes 22 are also arranged so that the ones distributed on the lower surface of the upper bottom member of the gyro case 20 and the ones distributed on the upper surface of the lower bottom member of the gyro case 20 are opposed to each other. Paired.

Among the plurality of electrodes, the electrostatic support electrodes 23 are also arranged in a distributed manner in which the electrodes distributed on the lower surface of the upper bottom member of the gyro case 20 and those distributed on the upper surface of the lower bottom member of the gyro case 20 are opposed to each other. I am doing.
In addition, among the plurality of electrodes, the electrostatic support electrodes 24 are dispersed on the inner peripheral surface of the cylindrical body at the outer peripheral portion of the gyro case 20 and on the outer peripheral surface of the columnar body at the central portion of the gyro case 20. The arranged one forms an opposing pair.
Further, these electrostatic support electrodes 23 to 24 are divided into adjacent pairs that are further arranged adjacent to each other.

  In order to specifically explain the role of the electrostatic support electrodes 23 to 24, the three axes orthogonal to each other in the space are defined as an X axis, a Y axis, and a Z axis, respectively. In FIG. The Y axis is placed in a direction penetrating the paper surface, the Z axis is placed in the vertical direction of the paper surface, rotation around the X axis is φ, and rotation around the Y axis is θ. Then, the electrostatic support electrode 24 is applied with a control voltage to generate an electrostatic support force in the X direction according to the applied voltage, and the electrostatic capacity with the surface of the gyro rotor 10 is changed according to the displacement of the gyro rotor 10 in the X direction. It is something to change. An electrostatic support electrode (not shown) which is divided in the Y direction and is disposed opposite to the inner peripheral surface and the outer peripheral surface of the gyro case 20 performs the same function in the Y direction, and is divided in the X direction to form an upper bottom portion of the gyro case 20. The electrostatic support electrode 23 disposed opposite to the material and the lower bottom member performs the same function in the Z ± θ direction, and is divided into the Y direction to form an upper bottom member and a lower bottom member of the gyro case 20. Electrostatic support electrodes (not shown) arranged opposite to each other exhibit the same function with respect to Z ± φ.

Next (see FIG. 5A), a basic displacement detection type electronic circuit unit will be described (see, for example, Patent Documents 1 and 2). The electronic circuit section includes a control arithmetic circuit 32 (control circuit) that constitutes a restraint control system together with the electrostatic support electrodes 23 to 24 and the like, and a rotor control circuit 31 (control) that constitutes a rotor drive system together with the rotor drive electrode 21. Circuit) and a signal detection circuit which constitutes a displacement detection system together with the displacement detection electrode 22.
The control arithmetic circuit 32 generates a control voltage for attitude control by performing a known calculation (see, for example, Patent Document 1) from the relative displacement of the gyro rotor 10 and the gyro case 20 other than around the Z axis, and each of them generates a plurality of control voltages. By applying the voltage to the electrodes 23 to 24 for electrostatic support among the electrodes, the posture control is performed so that the relative displacement thereof becomes zero. These relative displacements are detected from capacitance changes of the electrostatic support electrodes 23 to 24 and the like (see, for example, Patent Document 1).

The rotor control circuit 31 performs a known calculation (see, for example, Patent Document 1) from the rotational state of the gyro rotor 10 around the Z-axis to generate a control voltage for rotational driving, such as a three-phase pulse signal, and outputs them to the rotor. Rotation control for rotating the gyro rotor 10 at a constant speed is performed by cyclically applying the driving electrode 21 or the like. The rotational state of the gyro rotor 10 is detected from a change in the capacity of the rotor driving electrode 21.
Unlike the electrostatic support electrodes 23 to 24 and the like and the rotor driving electrode 21 to which such a control voltage is directly applied, the displacement detecting electrode 22 among the plurality of electrodes is caused to move the gyro rotor 10. No control voltage is applied that affects it.

The signal detection circuit uses several displacement detection signals that have a frequency that is high enough to not affect the motion of the gyro rotor 10 and that can be frequency-discriminated in order to detect the relative displacement between the gyro rotor 10 and the gyro case 20. The displacement detection signal applying circuit 33 for superimposing and applying these displacement detection signals to the electrostatic support electrodes 23 to 24 and the like, and the signal components related to the displacement detection signals from the displacement detection electrodes 22 are detected. And a displacement detection signal detection circuit 34 for generating a detection signal Vp.
Then, the input circuit of the control arithmetic circuit 32 inputs, for example, the detection signal Vp and the reference sine wave signal to the subordinate connection circuit of the synchronous detector and the band pass filter, and converts the component of the sine wave signal from the detection signal Vp. The displacement in each direction is detected by extracting and the like.

Furthermore (see FIG. 5B), the electronic circuit unit of the reverse displacement detection method will be described (for example, see Patent Documents 2 to 5). The reverse displacement detection method follows the basic displacement detection method in the superordinate concept of detecting the displacement detection signal after passing through the displacement detection electrode, but the direction in which the displacement detection signal flows is reversed. In addition, a displacement detection signal is applied to the displacement detection electrode 22, and detection is performed closer to the control arithmetic circuit than the electrostatic support electrode.
Specifically, the electronic circuit unit applies a common displacement detection signal to the rotor control circuit 31 described above, the control arithmetic circuit 36 obtained by modifying the input circuit of the control arithmetic circuit 32, and the displacement detection electrode 22. The displacement detection signal applying circuit 37 and the displacement detection signal application circuit 37 are separated and extracted from the electrostatic support electrodes 23 to 24 and the like and sent to the control arithmetic circuit 36. And a signal detection circuit 38.

A method of detecting a differential current corresponding to electrode capacitance using a triangular wave as a displacement detection signal (see, for example, Patent Documents 2 and 3), or a method of detecting a common mode voltage corresponding to electrode capacitance using a rectangular wave as a displacement detection signal (For example, refer to Patent Document 4), and there are also those using a digital system such as pulse width modulation (PWM) (for example, refer to Patent Document 5). Such displacement detection signal application circuit 37 and displacement detection signal detection are also available. The input circuit of the control arithmetic circuit 36 is also modified so as to adapt to the improvement of the circuit 38.
When the displacement detection signal passes through the displacement detection electrode 22 and the electrostatic support electrodes 23 to 24, the relative displacement between the gyro rotor 10 and the gyro case 20 is displaced at each electrostatic support electrode. Reflected in the detection signal, such a displacement detection signal is taken into the control arithmetic circuit 36. The control arithmetic circuit 36 detects the displacement in each direction, and an appropriate control voltage for posture control based on the detected displacement. Is generated and applied to the electrostatic support electrodes 23 to 24 and the like.

JP 2001-235329 A JP 2004-191296 A JP 2004-257911 A JP 2004-309187 A JP 2005-140708 A JP 2004-333327 A

The accumulation of improvements related to the conventional electrostatic levitation type gyro apparatus relates to rotation drive control and attitude control in a steady state (see Patent Documents 1 to 5), but the rotor levitation control sequence at startup There is also an improved version (see, for example, Patent Document 6).
However, with such an improvement of the control method, even if the performance is improved as such, a dramatic improvement in performance cannot be expected. For this reason, it is required to return to the gyro mechanism and try a new improvement. Specifically, while further remodeling the shape of the gyro rotor and gyro case so as to improve the control capability related to levitation control and attitude control, while promoting the weight reduction of the gyro rotor that contributes to the improvement of the control capability, It is required to avoid the reduction in the area of the control electrode and the reduction in the area of the electrode facing portion against the improvement of the control capability.
Therefore, it is a technical problem to devise the shape of the gyro mechanism so as to reduce the mass of the gyro rotor without reducing the facing area of the control electrode.

  The electrostatic levitation type gyro apparatus of the present invention (Solution 1) has been devised to solve such problems, and includes a gyro rotor and a gyro case in which the electrostatic levitation gyro apparatus is electrostatically levitated and rotatable. A control circuit for generating and applying control voltages for attitude control and rotation drive of the gyro rotor to the electrostatic support electrode and the rotation drive electrode among the plurality of electrodes formed thereon, and An electrostatic levitation gyro comprising a signal detection circuit for detecting a signal for detecting a relative displacement between the gyro rotor and the gyro case after passing through a displacement detection electrode to which the control voltage is not applied among a plurality of electrodes. In the apparatus, the gyro rotor is formed in a bobbin shape having hook-like protrusions at both ends of the cylindrical portion.

  The electrostatic levitation type gyro apparatus of the present invention (Solution means 2) is the electrostatic levitation type gyro apparatus of the above solution means 1, wherein the gyro case has an inner diameter smaller than the outer diameter of the gyro rotor. A peripheral portion and a case outer portion located outside the case inner peripheral portion, and the case inner peripheral portion is located between the gutter-like overhang of the gyro rotor and the hook-like overhang ( And the electrostatic support electrode is formed on the inner peripheral portion of the case.

  Furthermore, the electrostatic levitation type gyro apparatus of the present invention (Solution means 3) is the electrostatic levitation type gyro apparatus of the above solution means 2, and is arranged at a regular pitch radial arrangement on the peripheral edge of the gutter-like projection of the gyro rotor. A plurality of protrusions are formed, and the rotation drive electrode includes a portion that covers the surface of a portion of the inner peripheral portion of the case that can face the protrusions, and a portion that rises after extending outward. It is characterized by being three-dimensionally formed.

  Further, the electrostatic levitation type gyro apparatus of the present invention (Solution means 4) is the electrostatic levitation type gyro apparatus of the above solution means 2-3, wherein the lead lines of the plurality of electrodes are drawn out only on one side of the gyro case. It is characterized by being.

  Moreover, the electrostatic levitation type gyro apparatus of the present invention is (the solution means 5), the electrostatic levitation type gyro apparatus of the solution means 4, wherein the gyro case is vacuum-sealed from the opposite side of the one side. It is characterized by.

  Further, the electrostatic levitation type gyro apparatus of the present invention (solution 6) is the electrostatic levitation type gyro apparatus of the above solution 2 to 5, wherein the hook-like overhang is an intermediate portion of the cylindrical portion of the gyro rotor. A plurality of inner peripheral portions of the case where the electrostatic support electrodes are formed are provided in the gyro case, and the hook-like overhang of the gyro rotor and the inside of the case of the gyro case It is characterized in that peripheral portions are arranged alternately.

  In such an electrostatic levitation type gyro apparatus of the present invention (Solution 1), the gyro rotor is changed from an annular shape to a bobbin shape, so that the peripheral portion of the cylindrical portion is eliminated and thinned. The mass of decreases. On the other hand, since the surface area does not decrease so much even when the wall thickness is reduced, a reduction in the facing area of the control electrode in the cylindrical portion of the gyro rotor is generally avoided. Further, since both end portions of the cylindrical portion remain as hook-like protrusions, the opposing surfaces of the control electrode at both ends of the gyro rotor are maintained without being lost. And, by reducing the weight of the gyro rotor as described above, the control ability regarding the ascent control and the attitude control is improved.

In contrast to projecting both ends of the cylindrical part like a bobbin in a bowl shape, it is conceivable to reduce the weight of the gyro rotor by changing the shape of both ends to a hollow side, When the gyro rotor's collar is turned inward, the field through structure is concentrated on the central cylindrical part of the gyro case when the electrode lead-out of the gyro case is embodied in the field through structure. This makes the gyro rotor's buttocks outward. If the gyro case is enlarged, the area for the electrodes and the field through area can be easily secured on the outer part of the case, but the surface area of the case inner periphery depends on the diameter of the gyro rotor. As a result, the area for electrodes and the area for field through cannot be secured immediately, so the number of electrodes cannot be increased. Therefore, in the present invention, the gyro rotor has a bobbin shape.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation type gyro apparatus that can reduce the mass of the gyro rotor while maintaining the facing surface of the control electrode and can be easily manufactured.

  In the electrostatic levitation type gyro apparatus of the present invention (solution 2), an electrostatic support electrode is formed on the inner peripheral portion of the gyro case, and this is formed into a hook-like protrusion and hook-like tension of the gyro rotor. Because of the loose fit between the protrusion and the ring rotor type, the electrostatic capacity that can be newly controlled with respect to the outer surface of the cylindrical portion of the gyro rotor on both sides An attractive force can be applied. Such an electrostatic attractive force contributes to levitation control and attitude control.

  Furthermore, in the electrostatic levitation type gyro apparatus of the present invention (solution 3), the peripheral edge of the flange-like overhang of the bobbin-like gyro rotor is the outer periphery of the cylindrical part facing the end surface of the inner peripheral part of the gyro case. Focusing on the fact that it has an outer peripheral surface of a hook-like protrusion perpendicular to it in addition to having a side surface, the rotation drive electrode is three-dimensionalized so as to be able to face both surfaces, and the rotation drive electrode The rotational driving force of the gyro rotor is enhanced by the fact that the rotational driving control voltage is applied to the radial protrusions on the peripheral edge of the flange-like protrusion from both directions. For this reason, it is possible to easily compensate for the decrease in the inertial force detection ability due to the weight reduction of the gyro rotor by improving the rotation speed of the gyro rotor.

In the electrostatic levitation gyro apparatus of the present invention (solution 4), since the lead wires of the plurality of electrodes are drawn only on one side of the gyro case, the gyro is sealed by vacuum sealing from the side without the lead wire. It is easy to vacuum seal the mechanism unit alone.
Moreover, in the electrostatic levitation type gyro apparatus of the present invention (Solution 5), the gyro case is vacuum sealed from the side without the lead wire, and the gyro mechanism part is vacuum sealed alone. Since the control circuit unit integrated on the LSI chip or the like and the gyro mechanism unit can be easily molded by resin sealing, it can be mass-produced at a low cost.

  Further, in the electrostatic levitation type gyro apparatus of the present invention (solution 6), a plurality of gyro rotor saddle-like projections and gyro case inner peripheral portions are arranged alternately and arranged electrostatically. The number of locations where the electrostatic support electrode that generates attraction and the saddle-shaped overhang increases, and the electrostatic attraction increases accordingly. Therefore, the control capability for levitation control and attitude control is coupled with the performance improvement by reducing the weight of the gyro rotor. Further improvement.

About the electrostatic levitation type gyro apparatus of such this invention, the specific form for implementing this is demonstrated by the following Examples 1-2.
The embodiment 1 shown in FIGS. 1 to 3 embodies the above-described solving means 1 to 5 (claims 1 to 5 as originally filed), and the embodiment 2 shown in FIG. Means 6 (claim 6 as originally filed) is embodied.
In the drawings, the same reference numerals are given to the same components as those in the prior art, and therefore, repeated explanations are omitted. Hereinafter, the differences from the prior art will be mainly described.

  A specific configuration of the electrostatic levitation gyro apparatus according to the first embodiment of the present invention will be described with reference to the drawings. 1A is a plan view, FIG. 1B is a front view, FIG. 1C is a longitudinal sectional view (front view) of a gyro mechanism, and FIG. 1D is a perspective view of a gyro rotor. 2A is a cross-sectional view (plan view) taken along the line AA of the gyro mechanism, FIG. 2B is a cross-sectional view (plan view) taken along the line BB of the gyro mechanism, and FIG. 3A is a gyro mechanism. It is CC arrow sectional drawing (plan view) of a part. FIG. 3B is an overall block diagram of the reverse displacement detection method.

  In this gyro device 40 (see FIGS. 1A and 1B), an LSI chip 42 and a gyro mechanism 50 are sealed with a resin in a plastic package 41, and a large number of pins 43 protrude from the lower surface. A plastic package 41 is mounted on the upper surface of the bases 44 arranged in a row, and is integrated into, for example, a PGA (Pin Grid Array) type IC package. An electronic circuit unit is integratedly mounted on the LSI chip 42, and a signal line connecting the LSI chip 42 and the gyro mechanism unit 50 and a signal line connecting the LSI chip 42 and the pin 43 are formed on the upper surface of the base 44. It is formed with a wiring pattern. The LSI chip 42 and the gyro mechanism part 50 are placed on the base 44 and then molded with the plastic package 41, whereby the LSI chip 42, the gyro mechanism part 50 and the wiring are fixed and protected.

  The gyro mechanism 50 has a disk shape as in the conventional product, and has an outer dimension of a few millimeters or less as in the conventional product. The gyro rotor accommodates the gyro rotor in the vacuum space (cavity) of the gyro case. The gyro rotor is lifted and supported by applying an electrostatic attractive force to the gyro rotor from the electrode of the gyro case, but the internal structure is changed from the conventional product to reduce the rotor weight. The gyro case 20 in which the case outer portion has a cylindrical shape longer than the gyro rotor includes a case outer portion 52 that is shorter than the gyro rotor and a case inner peripheral portion 53 that extends inward from the case outer portion 52. The case 51 is formed (see FIG. 1B). To compensate for the shortening, the upper bottom member and the lower bottom member are changed from a flat plate shape to a shallow plate shape, and the gyro rotor 10 which is annular is formed. , It has become a bobbin shape of the gyro rotor 60 equipped with a flange-like overhang at both ends of the cylindrical portion (see FIG. 1 (b), (c)).

The gyro mechanism unit 50 is manufactured as a kind of MEMS (Micro Electro Mechanical Systems) by micromachining in which a sacrificial layer etching process is added to a semiconductor process, but the gyro case 51 and the gyro rotor 60 are nested. So both are created at the same time.
Hereinafter, each part of the gyro mechanism 50 will be described in detail assuming that the direction of the rotation center axis is the Z direction and the other directions X, Y, φ, and θ are the same as described above.

  The gyro rotor 60 (see FIG. 1 (d)) is made of a conductor such as high-concentration ion-implanted silicon as is conventional, but the shape is different from the conventional one, and the cylindrical portion 62 that forms the peripheral wall of the hollow 61 is a conventional annular rotor. The height is the same, but the thickness is reduced to a fraction of a fraction to a few tenths. At the both ends of the cylindrical portion 62, the hook-shaped overhang 63 remains thin. The saddle-like projection 63 has neither an inner diameter nor an outer diameter that is significantly different from the conventional one, and the inner diameter of the cylindrical portion 62 is not much different from the conventional one. A large number of radial protrusions 64 that receive the action of electrostatic attraction of the rotor driving electrode 21 are arranged in an alternating manner with notches at equal pitches on the circular edge on the outer peripheral side, not on the inner periphery of the flange-shaped protrusion 63. Has been.

  The gyro case 51 (refer to FIG. 1C, FIG. 2A, FIG. 2B, and FIG. 3A) is made of an electrical insulator such as intrinsic silicon or glass, like the conventional gyro case 20. Alternatively, an electric insulating film is formed on the surface of the same conductor as that of the gyro rotor 60, and the cylindrical portion 55 located in the center in the state of loose insertion in the hollow 61 of the gyro rotor 60 and the lower end face are closed. It includes a side bottom member 56, an upper bottom member 57 that closes the upper end surface, and an annular portion (52 + 53) that is formed so as to surround the outer periphery of the gyro rotor 60. In contrast, the inner diameter of the annular portion (52 + 53) is smaller than the maximum outer diameter of the gyro rotor 60.

  Since the outer diameter of the annular portion (52 + 53) is still larger than the maximum outer diameter of the gyro rotor 60, the annular portion (52 + 53) is connected to the case inner peripheral portion 53 whose inner diameter is smaller than the maximum outer diameter of the gyro rotor 60, and the inside of the case. The case outer part 52 located outside the peripheral part 53 is called separately. The case inner peripheral portion 53 and the case outer portion 52 are made as a continuous single body. The case inner peripheral portion 53 is loosely fitted to the gyro rotor 60 between the hook-shaped protrusion 63 at one end and the hook-shaped protrusion 63 at the other end, and surrounds the outer periphery of the cylindrical portion 62 slightly apart. Yes. The case outer portion 52 is located on the outer peripheral side from the radial protrusions 64 of the flange-like protrusion 63 of the gyro rotor 60.

  The large number of electrodes 21 to 26 are also formed in a distributed manner on the surface of the gyro case 51 as in the conventional case, but the arrangement of the electrodes and the arrangement of the lead lines is different from the conventional one. Specifically, first (see FIG. 1 (c), FIG. 2 (a), FIG. 2 (b)), a large number of rotor driving electrodes 21 for producing a rotational driving force around the Z axis are arranged at an equal pitch. The electrode 21 surrounds the radial protrusion 64 of the flange-like protrusion 63 of the gyro rotor 60, but any electrode 21 faces the radial protrusion 64 of both end surfaces of the case inner peripheral portion 53 of the gyro case 51. It has a portion that crawls the surface of a possible portion and a portion that extends to the outside and rises, and is formed into a three-dimensional shape having an L-shaped cross section. The arrangement pitch and the number of the rotor driving electrodes 21 and the arrangement pitch and the number of the radial protrusions 64 satisfy, for example, a condition that enables rotational driving similar to that of a three-phase motor (see, for example, FIG. 7 of Patent Document 1). It is set in correspondence.

  In addition, the electrostatic support electrode 23 that applies an attitude control voltage and produces an electrostatic support force in the Z ± θ direction is applied to the X + direction and the X− direction (see FIGS. 1C and 2B). Are formed on the surface of the case inner peripheral portion 53, the upper surface and the lower surface of the case inner peripheral portion 53 form a facing pair, and are arranged adjacent to each other on the upper and lower surfaces of the case inner peripheral portion 53. They are adjacent pairs. Electrostatic support electrodes 25 that apply an attitude control voltage and generate an electrostatic support force in the Z ± φ direction are formed on the surface of the case inner peripheral portion 53 in a Y + direction and a Y− direction. The upper surface and the lower surface of the inner peripheral portion 53 form an opposing pair, and those arranged adjacent to each other on the upper and lower surfaces of the case inner peripheral portion 53 form an adjacent pair.

  Further (see FIG. 1C and FIG. 3A), the electrostatic support electrode 24 that applies the attitude control voltage and generates the electrostatic support force in the X direction is arranged in the X + direction and the X− direction. It is divided and formed on the inner peripheral surface of the case inner peripheral portion 53 and the outer peripheral surface of the cylindrical portion 55, and the inner peripheral surface of the case inner peripheral portion 53 and the outer peripheral surface of the cylindrical portion 55 form a facing pair, Those adjacently disposed on the inner peripheral surface of the case inner peripheral portion 53 form an adjacent pair, and those adjacently disposed on the outer peripheral surface of the cylindrical portion 55 form an adjacent pair. The electrostatic support electrode 26 that applies an attitude control voltage and generates an electrostatic support force in the Y direction is divided into a Y + direction and a Y− direction, and the inner peripheral surface of the case inner peripheral portion 53 and the cylindrical portion 55. Are formed on the outer peripheral surface, the inner peripheral surface of the case inner peripheral portion 53 and the outer peripheral surface of the cylindrical portion 55 form an opposing pair, and are arranged adjacent to each other on the inner peripheral surface of the case inner peripheral portion 53 Form an adjacent pair, and those arranged adjacent on the outer peripheral surface of the cylindrical portion 55 form an adjacent pair.

  Further, (see FIGS. 2B and 3A), the displacement detection electrode 22 to which neither the attitude control control voltage nor the rotation drive control voltage is applied is the upper surface, the lower surface, and the inner peripheral surface of the case inner peripheral portion 53. Between the electrostatic support electrode 23 and the electrostatic support electrode 25, or between the electrostatic support electrode 24 and the electrostatic support electrode 26. Has been.

  The lead lines 54 connected to these electrodes 21 to 26 (see FIG. 1C) all extend from the electrode pattern on the surface of the case inner peripheral portion 53 to the surface of the case outer portion 52, and are directed downward there. The upper surface penetrates the case outer portion 52 and reaches the lower surface of the case outer portion 52, and the cylindrical portion 55 reaches the lower surface and further penetrates the lower bottom member 56, The gyro case 51 is pulled out only to the lower surface (one surface). In such a gyro case 51, the lower bottom member 56 is attached first, and then the upper bottom member 57 is attached later. At that time, the upper bottom member 57 is vacuum-sealed from the side (opposite side of one side). Is made. As a result, the gyro mechanism 50 is vacuum-sealed as a single unit, and thus the resin sealing of the gyro mechanism 50 with the plastic package 41 described above becomes possible (see FIGS. 1A and 1B). .

The electronic circuit unit mounted on the LSI chip 42 may be the basic displacement detection type electronic circuit unit (31, 32 to 34) shown in FIG. 5A, but in this example, the electronic circuit unit shown in FIG. The electronic circuit part (31, 36 to 38) of the reverse displacement detection system shown in FIG.
Specifically (see FIG. 3B), the electronic circuit unit includes the rotor control circuit 31, the control arithmetic circuit 36, the displacement detection signal application circuit 37, and the displacement detection signal detection circuit 38, all of which have already been described. A common displacement detection signal is applied to the displacement detection electrode 22 from the displacement detection signal application circuit 37, and a signal component related to the displacement detection signal is detected from the electrostatic support electrodes 23 to 26. The signal detection circuit 38 separates and extracts the signal and sends it to the control arithmetic circuit 36. The control arithmetic circuit 36 calculates the relative displacement between the gyro rotor 60 and the gyro case 51 and generates a control voltage for posture control corresponding to the relative displacement. It is applied to the electrostatic support electrodes 23 to 26, and a control voltage for rotational driving is applied from the rotor control circuit 31 to the rotor driving electrode 21.

  About the electrostatic levitation-type gyro apparatus 40 of this Example 1, the use aspect and operation | movement are demonstrated. The basic usage may be the same as that of the conventional product (see also Patent Documents 1 to 6). The basic operation is the same as the conventional one. That is, since it is a reverse displacement detection method, when the displacement detection signal passes through the displacement detection electrode 22 and the electrostatic support electrodes 23 to 26, the gyro rotor 60 and the gyro case 51 at each electrostatic support electrode. Is reflected in the displacement detection signal, and the displacement detection signal is taken into the control arithmetic circuit 36 to detect the displacement in each direction. Further, based on this, an appropriate control voltage for posture control is generated and applied to the electrostatic support electrodes 23 to 26, and the gyro rotor 60 maintains the floating state in the gyro case 51. Further, acceleration relative to the inertial space is detected from the relative displacement between the gyro rotor 60 and the gyro case 51 and the control voltage for attitude control.

  In such basic operation, detailed operations and characteristics different from the conventional ones will be described in detail. Since the gyro rotor 60 has a light bobbin shape instead of an annular shape, the flanges at both ends on the outer peripheral side of the cylindrical portion 62 are not provided. Since the portion located between the overhangs 63 is omitted and the cylindrical portion 62 is thinned, the mass of the gyro rotor 60 is reduced accordingly. For example, while the gyro rotor 10 is about 70 μg, the gyro rotor 60 is several μg, which is about 1/20 of the conventional one, while ensuring a controllable electrode area. On the other hand, among the plurality of electrodes 21 to 26 dispersedly formed in the gyro case 51, the electrostatic support electrodes 23 to 26 are formed on the surface of the new case inner peripheral portion 53. The electrode area, which is the main factor, is maintained at the same level as before. Thus, since the gyro rotor 60 is reduced in weight without reducing the area of the electrostatic support electrodes 23 to 26, the control capability relating to flying control and attitude control is improved.

Of the plurality of electrodes 21 to 26, the displacement detection electrode 22 is also formed on the surface of a new case inner peripheral portion 53 as in the case of the electrostatic support electrodes 23 to 26. Since the electrode area that is the cause is maintained at the same level as the conventional one, the relative displacement detection performance between the gyro rotor 60 and the gyro case 51 is also appropriately maintained.
Of the plurality of electrodes 21 to 26, the rotor driving electrode 21 extends over both the portion of the gyro case 51 that covers the upper and lower end surfaces of the case inner peripheral portion 53 and the portion that rises from the case outer portion 52. There is an increase compared to the past. Then, since the rotational driving control voltage acts on the radial protrusion 64 at the peripheral edge of the flange-like protrusion 63 of the gyro rotor 60 from the widened rotor driving electrode 21, the rotational driving force of the gyro rotor 60 is enhanced. .

  A specific configuration of the electrostatic levitation gyro apparatus according to the second embodiment of the present invention will be described with reference to the drawings. 4A is a longitudinal sectional view (front view) of the gyro mechanism, and FIG. 4B is a perspective view of the gyro rotor. In addition, illustration of the leader line 54 is omitted.

This electrostatic levitation type gyro device differs from that of the first embodiment described above in that the gyro mechanism portion 50 is partially modified to become the gyro mechanism portion 70. The gyro mechanism portion 70 is changed to the gyro mechanism portion 50. The difference is that the gyro case 51 is changed to a gyro case 71 due to the multiple / multiple cases of the case inner peripheral portion 53, and the gyro rotor 60 is so-called multiple because of the multiple / multiple girder-like projections 63. This is a point where a continuous bobbin-like gyro rotor 72 is formed.
The gyro rotor 72 has a cylindrical portion 62 that extends in the Z-axis (center axis) direction, and the above-described hook-like protrusion 63 is provided at an intermediate portion in addition to both ends of the cylindrical portion 62. In the example shown in the figure, two hook-shaped overhangs 63 are provided in the middle part of the cylindrical portion 62, and the total four hook-shaped overhangs 63 are not essential in the Z-axis direction but are usually arranged at equal pitches. Yes.

In the gyro case 71, the cylindrical portion 55 and the case outer portion 52 are stretched in the Z-axis (spin axis) direction, but the case inner peripheral portion 53 is not stretched but increases in number in the Z-axis direction. Are lined up. Each case inner peripheral portion 53 is formed with the above-described rotor driving electrode 21, displacement detection electrode 22, and electrostatic support electrodes 23 and 25, and each case inner peripheral portion of the outer peripheral surface of the cylindrical portion 55. Electrostatic support electrodes 24 and 26 described above are formed at a portion facing 53. The number of the case inner peripheral portions 53 is one less than the hook-shaped protrusion 63 of the gyro rotor 72, and the three case inner peripheral portions 53 are arranged in the Z-axis direction in total.
Since the case inner peripheral portion 53 is loosely fitted one by one between the adjacent hook-like protrusions 63, 63 in the gyro rotor 72, the hook-like protrusion 63 of the gyro rotor 72 and the inner periphery of the gyro case 71 are The portions 53 are alternately arranged.

In this case, the electrostatic support electrode 23 that outputs the electrostatic support force in the Z ± θ direction when the posture control control voltage is applied is also applied with the electrostatic support force in the Z ± φ direction. Since the electrostatic support electrode 25 to be provided is also increased from two locations to six locations in the Z direction, the electrostatic attractive force in the corresponding direction is almost tripled. Since the electrostatic support electrodes 24 and 26 are also increased three times, the electrostatic support force in the X direction and the Y direction is also increased approximately three times.
On the other hand, the mass of the gyro rotor 72 only increases more than twice.
Therefore, the control capability in the corresponding direction is strengthened.

Example 1 of the present invention shows the structure of an electrostatic levitation type gyro device, in which (a) is a plan view, (b) is a front view, and (c) is a longitudinal sectional view (front view) of a gyro mechanism. d) is a perspective view of the gyro rotor. (A) is AA arrow sectional drawing (plan view) of a gyro mechanism part, (b) is BB arrow sectional drawing (plan view) of a gyro mechanism part. (A) is CC arrow sectional drawing (plan view) of a gyro mechanism part, (b) is a whole block diagram of a reverse displacement detection system. The structure of an electrostatic levitation type gyro apparatus is shown about Example 2 of this invention, (a) is a longitudinal cross-sectional view (front view) of a gyro mechanism part, (b) is a perspective view of a gyro rotor. A conventional annular rotor type electrostatic levitation type gyro device is shown, in which (a) is an overall block diagram of a basic displacement detection system, and (b) is an overall block diagram of a reverse displacement detection system.

Explanation of symbols

10: Gyro rotor (gyro mechanism),
20 ... Gyro case (gyro mechanism)
21 ... Rotor driving electrode (rotating electrode, rotor driving system),
22 ... Displacement detection electrode (detection electrode, displacement detection system),
23 to 26: Electrostatic support electrodes (attitude control, control electrodes, constraint control system),
31 ... Rotor control circuit (control circuit, rotor drive system),
32 ... control arithmetic circuit (control circuit, constraint control system),
33 ... Displacement detection signal application circuit (displacement detection system),
34 ... Displacement detection signal detection circuit (displacement detection system),
36 ... control arithmetic circuit (control circuit, constraint control system),
37 ... Displacement detection signal application circuit (displacement detection system),
38 ... Displacement detection signal detection circuit (displacement detection system),
40: Gyro device (electrostatic levitation type gyro device),
41 ... Plastic package (resin sealing),
42 ... LSI chip, 43 ... pin, 44 ... base,
50: Gyro mechanism,
51 ... Gyro case,
52 ... Case outer part, 53 ... Case inner peripheral part, 54 ... Leader line,
55 ... Cylindrical part, 56 ... Lower bottom member, 57 ... Upper bottom member,
60 ... Gyro rotor,
61 ... hollow, 62 ... cylindrical part,
63 ... saddle-like overhang, 64 ... radial protrusion (end peripheral edge),
70 ... Gyro mechanism, 71 ... Gyro case

Claims (6)

  A gyro rotor, a gyro case incorporating the gyro rotor so as to be electrostatically levitated and rotatable, and an electrode for electrostatic support and a rotation driving electrode among the plurality of electrodes formed on the gyro rotor for controlling the attitude of the gyro rotor and Relative displacement detection between the gyro rotor and the gyro case after passing through a control circuit that generates and applies a control voltage for rotation drive and a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes In an electrostatic levitation gyro apparatus including a signal detection circuit for detecting a signal for use, the gyro rotor is formed in a bobbin shape with hook-like protrusions at both ends of a cylindrical portion. An electrostatic levitation gyro device.   The gyro case includes a case inner peripheral portion whose inner diameter is smaller than an outer diameter of the gyro rotor, and a case outer portion located outside the case inner peripheral portion, and the case inner peripheral portion is 2. The gyro rotor is loosely fitted between a hook-like overhang and the hook-like overhang, and the electrostatic support electrode is formed on an inner peripheral portion of the case. An electrostatic levitation gyroscope.   A large number of protrusions are formed in a radially-arranged peripheral portion of the gutter-like overhang of the gyro rotor, and the rotation driving electrode is a portion of the inner peripheral portion of the case that can face the protrusions. 3. The electrostatic levitation type gyro apparatus according to claim 2, wherein the electrostatic levitation type gyro apparatus is formed in a three-dimensional manner, comprising a part that crawls on the surface and a part that rises after extending outward.   4. The electrostatic levitation type gyro apparatus according to claim 2, wherein lead wires of the plurality of electrodes are led out only on one side of the gyro case.   5. The electrostatic levitation type gyro apparatus according to claim 4, wherein the gyro case is vacuum-sealed from the opposite side of the one side.   A hook-like overhang is also provided at an intermediate portion of the cylindrical portion of the gyro rotor, and a plurality of inner peripheral portions of the case where the electrostatic support electrodes are formed are provided in the gyro case, and the gyro 6. The electrostatic levitation type gyro apparatus according to claim 2, wherein the flange-like protrusion of the rotor and the inner peripheral portion of the gyro case are alternately arranged.

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