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JP5202421B2 - Manufacturing method of inner electrode of ozone generating electrode - Google Patents
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JP5202421B2 - Manufacturing method of inner electrode of ozone generating electrode - Google Patents

Manufacturing method of inner electrode of ozone generating electrode Download PDF

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JP5202421B2
JP5202421B2 JP2009096938A JP2009096938A JP5202421B2 JP 5202421 B2 JP5202421 B2 JP 5202421B2 JP 2009096938 A JP2009096938 A JP 2009096938A JP 2009096938 A JP2009096938 A JP 2009096938A JP 5202421 B2 JP5202421 B2 JP 5202421B2
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wall portion
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JP2010248016A (en
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正樹 田口
茂充 河井
英治 酒井
秀明 西井
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Metawater Co Ltd
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Description

本発明は、水処理などに用いられるオゾン発生装置のオゾン発生電極に使用する内側電極の製造方法に関する。更に詳しくは、内側電極内に流路規制部材を挿入し、オゾン発生中に電極で生ずる放電発熱を効率よく冷却することのできるオゾン発生電極の内側電極の製造方法に関する。   The present invention relates to a method for producing an inner electrode used for an ozone generating electrode of an ozone generator used for water treatment or the like. More specifically, the present invention relates to a method for manufacturing an inner electrode of an ozone generating electrode, in which a flow path regulating member is inserted into the inner electrode, and discharge heat generated by the electrode during ozone generation can be efficiently cooled.

オゾン発生装置は、上下水道における水処理に用いられる装置である。   An ozone generator is an apparatus used for water treatment in water and sewage.

従来から使用されているオゾン発生装置としては、二つの平板状の電極を対向させ、対向した電極の少なくとも一方に誘電体が配置され、その間に放電空間を形成して、この放電空間に酸素を含む原料ガスを流しつつ、二つの電極に交流高電圧を印加して酸素からオゾンを発生させる方法がある。また、図2に示すように、電極として円筒形状のものを用い、外側に円筒状の接地電極(外側電極)を設け、この接地電極の内部に円筒形状の高電圧電極(内側電極)を配置し、対向した電極の少なくとも一方に誘電体が配置された同軸円筒型のオゾン発生電極も使用されている。   Conventionally used ozone generators have two flat electrodes facing each other, a dielectric is disposed on at least one of the opposed electrodes, a discharge space is formed between them, and oxygen is introduced into this discharge space. There is a method in which ozone is generated from oxygen by applying an alternating high voltage to two electrodes while flowing a raw material gas. In addition, as shown in FIG. 2, a cylindrical electrode is used, a cylindrical ground electrode (outer electrode) is provided outside, and a cylindrical high voltage electrode (inner electrode) is disposed inside the ground electrode. A coaxial cylindrical ozone generating electrode in which a dielectric is disposed on at least one of the opposed electrodes is also used.

同軸円筒型のオゾン発生電極の場合には、図2に示すように、酸素を含む原料ガス20を接地電極1と高電圧電極3の間の放電空間6に流通させる。接地電極1と高電圧電極3を交流高電圧の電源装置(図示していない)に接続し、この電源装置から供給される電力により放電空間6に無声放電を発生させる。放電による電子衝突により、放電空間6を流れる原料ガス20に含まれる酸素分子から酸素原子が生成され、酸素原子とその周辺にあるほかの酸素分子とが再結合することでオゾンが生成される。生成したオゾン化ガスは放電空間6から図示していないオゾンと接触する被処理物質のある装置や場所に供給される。   In the case of a coaxial cylindrical ozone generating electrode, a source gas 20 containing oxygen is circulated in the discharge space 6 between the ground electrode 1 and the high voltage electrode 3 as shown in FIG. The ground electrode 1 and the high voltage electrode 3 are connected to an AC high voltage power supply device (not shown), and silent discharge is generated in the discharge space 6 by the electric power supplied from the power supply device. Oxygen atoms are generated from oxygen molecules contained in the source gas 20 flowing through the discharge space 6 due to electron collision caused by discharge, and ozone is generated by recombination of oxygen atoms and other oxygen molecules in the vicinity thereof. The generated ozonized gas is supplied from the discharge space 6 to an apparatus or a place having a substance to be treated that comes into contact with ozone (not shown).

高電圧電極3には、放電で発生した熱を除去するために、電極を冷却する冷媒の流路が設けられており、ここに冷媒を流通させて高電圧電極3を冷却する。或いは、接地電極1の外側に、図示していないが、接地電極1に隣接して電極を冷却する冷媒の流路を設け、接地電極1を冷却しても良い。   The high voltage electrode 3 is provided with a refrigerant flow path for cooling the electrode in order to remove the heat generated by the discharge, and the high voltage electrode 3 is cooled by circulating the refrigerant therethrough. Alternatively, although not shown, a coolant channel for cooling the electrode may be provided adjacent to the ground electrode 1 outside the ground electrode 1 to cool the ground electrode 1.

このように電極を冷却する目的は、放電により電極が発熱し、この発熱で放電空間6の中で生成したオゾンが再び分解してしまうおそれがあるため、このオゾンの熱分解を防止するためである。   The purpose of cooling the electrode in this way is to prevent the thermal decomposition of ozone because the electrode generates heat by discharge and ozone generated in the discharge space 6 may be decomposed again by this heat generation. is there.

同軸円筒型のオゾン発生電極として、従来からさまざまなものが提案されている。例えば、先行特許文献1には、内部に冷却体を有する同軸円筒型のオゾン発生電極を示している(特許文献1参照)。ここでは発熱による温度上昇や冷却による膨張や収縮によって、ガラスなどの誘電体の管の破損などが破損しないように伸縮ギャップを設けたものを開示している。ところで、高電圧電極又は接地電極である筒状の内側電極を冷却するために、その内部に空間部を設け、ここに冷却用の冷媒を流して電極を冷却する方法が採用されている。そして、この場合における内側電極の冷却効率を向上させるために、内側電極内に、冷媒の流路をその筒壁内周部側に規制する柱状の流路規制部材を設けたオゾン発生電極が提案されている(特許文献2及び3参照)。   Various types of coaxial cylindrical ozone generating electrodes have been proposed. For example, Patent Document 1 discloses a coaxial cylindrical ozone generating electrode having a cooling body inside (see Patent Document 1). Here, there is disclosed a structure in which an expansion gap is provided so as to prevent breakage of a dielectric tube such as glass due to temperature rise due to heat generation or expansion or contraction due to cooling. By the way, in order to cool the cylindrical inner electrode which is a high-voltage electrode or a ground electrode, a method is employed in which a space is provided in the inner electrode, and a cooling refrigerant is passed through the space to cool the electrode. In order to improve the cooling efficiency of the inner electrode in this case, an ozone generating electrode is proposed in which a columnar flow path regulating member for regulating the flow path of the refrigerant to the inner peripheral side of the cylindrical wall is provided in the inner electrode. (See Patent Documents 2 and 3).

特開昭61−14105号公報Japanese Patent Laid-Open No. 61-14105 特開平7−223805号公報JP-A-7-223805 特開平10−182111号公報JP-A-10-182111

このような柱状の流路規制部材を内臓するオゾン発生電極用の内側電極では、柱状の流路規制部材として樹脂性のものを用い、しかも、この内側電極の製造方法には、一方の端壁部付の筒壁部内に流路規制部材を収容しながら、この一方の端壁部付の筒壁部に対し他方の端壁部を溶接により取り付ける溶接工程を含む。それゆえ、溶接工程を行うことにより内側電極を製造するに当たっては、溶接の熱により樹脂性の流路規制部材が溶けるという問題がある。また、樹脂性以外の流路規制部材を用いる場合でも、溶接の際の熱による流路規制部材の変形やひずみが問題となる場合も少なくない。   In the inner electrode for an ozone generating electrode that incorporates such a columnar flow path regulating member, a resin-like one is used as the columnar flow path regulating member, and one end wall is used for the manufacturing method of this inner electrode. A welding step is included in which the other end wall portion is attached to the cylindrical wall portion with one end wall portion by welding while the flow path regulating member is accommodated in the cylindrical wall portion with the portion. Therefore, when the inner electrode is manufactured by performing the welding process, there is a problem that the resinous flow path regulating member is melted by the heat of welding. Even when a flow path regulating member other than resin is used, deformation and distortion of the flow path regulating member due to heat during welding often become a problem.

本発明の目的は、一方の端壁部付の筒壁部に対し他方の端壁部を溶接により取り付ける際に溶接熱が発生する溶接工程を含む場合でも、流路規制部材に変形やひずみを生じないオゾン発生電極用の内側電極の製造方法を提供することにある。   Even if the object of the present invention includes a welding process in which welding heat is generated when the other end wall part is attached to the cylindrical wall part with one end wall part by welding, deformation or strain is applied to the flow path regulating member. It is providing the manufacturing method of the inner side electrode for ozone generation electrodes which does not arise.

即ち、本発明は、以下の内容をその要旨とする発明である。
(1)筒状の筒壁部、及びその両端部をそれぞれ閉塞させる一対の端壁部であって各々に冷媒の入口及び出口が設けられた端壁部を有し、内部に冷媒の流路をその筒壁内周部側に規制する柱状の流路規制部材が収容された内側電極であり、外側電極に対し空間を介して対向するようにその内側に配置され、両電極の互いに対向する面の少なくとも何れか一方に誘電体を配置することによりオゾン発生電極を形成する、オゾン発生電極用の内側電極の製造方法であって、一方の端壁部付の筒壁部内に、一方の端壁部を筒壁部よりも下側に位置させた状態で流路規制部材を収容するとともに、この一方の端壁部付の筒壁部に対し他方の端壁部を溶接により取り付ける溶接工程を含み、この溶接工程が、収容された流路規制部材における一方の端壁部付の筒壁部と接続する部分が液面の下側に位置するように冷却液内に浸した状態で行うものである、オゾン発生電極用の内側電極の製造方法。
That is, the present invention has the following contents.
(1) A cylindrical cylindrical wall portion and a pair of end wall portions that respectively close both ends thereof, each having an end wall portion provided with an inlet and an outlet for the refrigerant, and a refrigerant flow path therein Is an inner electrode that accommodates a columnar flow path regulating member that regulates the inner wall of the cylindrical wall, and is disposed on the inner side so as to face the outer electrode through a space, and the two electrodes face each other. A method of manufacturing an inner electrode for an ozone generating electrode, wherein an ozone generating electrode is formed by disposing a dielectric on at least one of the surfaces, wherein one end of the inner electrode is provided in the cylindrical wall with one end wall. A welding step of accommodating the flow path regulating member in a state where the wall portion is positioned below the cylindrical wall portion and attaching the other end wall portion to the cylindrical wall portion with the one end wall portion by welding. This welding process includes one end wall of the accommodated flow path regulating member Portion connecting the cylindrical wall portion of the biasing is made in a state immersed in the coolant inside so as to be positioned below the liquid surface, the manufacturing method of the inner electrode for an ozone generating electrode.

(2)前記溶接工程が、収容された流路規制部材の頂部が液面の下側に位置する状態で一方の端壁部付の筒壁部を冷却液内に浸した状態で行うものである、前記(1)に記載のオゾン発生電極用の内側電極の製造方法。 (2) The welding process is performed in a state in which the cylindrical wall portion with one end wall portion is immersed in the cooling liquid in a state where the top portion of the accommodated flow path regulating member is located below the liquid surface. The manufacturing method of the inner electrode for ozone generation electrodes as described in said (1) which exists.

(3)前記溶接工程が、一方の端壁部付の筒壁部内に冷媒の入口又は出口を通じて冷却液が流入することを防止しながら行うものである、前記(1)又は(2)に記載のオゾン発生電極用の内側電極の製造方法。 (3) The welding process described in (1) or (2), wherein the welding step is performed while preventing the coolant from flowing into the cylindrical wall portion with one end wall portion through the inlet or the outlet of the refrigerant. Of manufacturing inner electrode for ozone generating electrode.

本発明に係るオゾン発生電極用の内側電極の製造方法によれば、内側電極の端部を溶接加工することによる封止加工のためのひずみや変形の影響を回避することができる。特に、内部に装入する流路規制部材の材質が合成樹脂製のものの場合には、溶接による封止加工を行う場合に、溶接の際の熱による流路規制部材の熱変形やひずみなどが大きな問題となるが、本発明の方法によってこのような問題を解消することができる。   According to the method for manufacturing an inner electrode for an ozone generating electrode according to the present invention, it is possible to avoid the influence of strain and deformation for sealing processing by welding the end portion of the inner electrode. In particular, when the material of the flow path regulating member inserted in the inside is made of synthetic resin, when performing sealing processing by welding, there is thermal deformation or distortion of the flow path regulating member due to heat during welding. Although this is a big problem, such a problem can be solved by the method of the present invention.

本発明に係るオゾン発生電極の内側電極の製造方法の一実施例を示す説明図である。It is explanatory drawing which shows one Example of the manufacturing method of the inner side electrode of the ozone generation electrode which concerns on this invention. 従来のオゾン発生電極の、冷媒流通方向の断面図の一例である。It is an example of sectional drawing of the refrigerant | coolant distribution direction of the conventional ozone generation electrode.

次に、本発明をさらに詳しく説明する。図1は、本発明に係るオゾン発生電極の内側電極の製造方法の一実施例を示す説明図である。   Next, the present invention will be described in more detail. FIG. 1 is an explanatory view showing an embodiment of a method for producing an inner electrode of an ozone generating electrode according to the present invention.

図1、図2に示すように、オゾン発生電極は、筒状の筒壁部3a、及びその両端部をそれぞれ閉塞させる一対の端壁部7a,7bであって各々に冷媒の入口10及び出口11が設けられた端壁部7a,7bを有し、内部に冷媒流路4をその筒壁内周部側に規制する柱状の流路規制部材5が収容された内側電極3であって、外側電極1に対し空間を介して対向するようにその内側に配置され、両電極1,3の互いに対向する面の少なくとも何れか一方に誘電体2を配置することにより形成されている。   As shown in FIGS. 1 and 2, the ozone generating electrode is composed of a cylindrical cylindrical wall portion 3a and a pair of end wall portions 7a and 7b that respectively close both ends thereof, and a refrigerant inlet 10 and an outlet respectively. 11 is an inner electrode 3 having end wall portions 7a, 7b provided with a columnar flow passage regulating member 5 for restricting the refrigerant flow passage 4 to the inner peripheral side of the cylindrical wall therein. The outer electrode 1 is disposed on the inner side so as to be opposed to each other through a space, and the dielectric 2 is disposed on at least one of the mutually facing surfaces of the electrodes 1 and 3.

本発明は、上記したオゾン発生電極に用いる内側電極の製造方法であって、図1に示すように、一方の端壁部7b付の筒壁部3a内に、一方の端壁部7bを筒壁部3aよりも下側に位置させた状態で流路規制部材5を収容するとともに、この一方の端壁部7b付の筒壁部3aに対し他方の端壁部7aを溶接により取り付ける溶接工程を有するものである。本発明では、この溶接工程を、収容された流路規制部材5における一方の端壁部7b付の筒壁部3aと接触する部分が液面の下側に位置するように冷却液A内に浸した状態で行うことにその特徴を有するものである。ここで、一方の端壁部付の筒壁部とは、筒壁部に対し当該筒壁部とは別部材としての一方の端壁部を溶接等により取り付けたもののほか、筒壁部及び一方の端壁部を一体的に成形してなるものを包含する概念である。   The present invention is a manufacturing method of an inner electrode used for the above-mentioned ozone generating electrode, and as shown in FIG. 1, one end wall portion 7b is formed in a cylindrical wall portion 3a with one end wall portion 7b. A welding step in which the flow path regulating member 5 is accommodated in a state of being positioned below the wall portion 3a, and the other end wall portion 7a is attached to the cylindrical wall portion 3a with the one end wall portion 7b by welding. It is what has. In the present invention, this welding step is performed in the coolant A so that the portion of the accommodated flow path regulating member 5 that contacts the cylindrical wall portion 3a with one end wall portion 7b is located below the liquid level. It is characterized by being performed in a dipped state. Here, the cylindrical wall portion with one end wall portion refers to the cylindrical wall portion and the one other than the one in which one end wall portion as a separate member from the cylindrical wall portion is attached to the cylindrical wall portion by welding or the like. It is a concept including what is formed by integrally molding the end wall portion of.

具体的には、図1に示すように、同軸円筒型のオゾン発生電極に使用する、円筒形状の内部に冷媒の流通空間4を有する内側電極3において、まず円筒形状の内側電極3の円筒状の一方の端部を冷媒の出口11を取り付けた一方の端壁部7bで封止し、次いでこの冷媒の流通空間4に流路規制部材5を収容する。次に、内側電極3の円筒状の他方の端部を冷媒の入口10を取り付けた他方の端壁部7aで封止して冷媒の流通空間4を密封状態にする。   Specifically, as shown in FIG. 1, in the inner electrode 3 having a refrigerant circulation space 4 in a cylindrical shape used for a coaxial cylindrical ozone generating electrode, the cylindrical shape of the cylindrical inner electrode 3 is first set. One end portion of the refrigerant is sealed with one end wall portion 7b to which the refrigerant outlet 11 is attached, and then the flow path regulating member 5 is accommodated in the refrigerant circulation space 4. Next, the other cylindrical end portion of the inner electrode 3 is sealed with the other end wall portion 7a to which the refrigerant inlet 10 is attached, so that the refrigerant circulation space 4 is sealed.

この内側電極3の円筒状の端部の封止は、溶接装置40を用いた溶接方式によって両端部の端壁部7a、7bを溶着する方法が加工が容易であり好ましい。   For the sealing of the cylindrical end portion of the inner electrode 3, a method of welding the end wall portions 7 a and 7 b at both end portions by a welding method using the welding device 40 is easy and preferable.

この内側電極3の端部の溶接による封止に際しては、溶接に伴う内側電極3の高温度の加熱による熱変形やひずみなどが発生することがあり、このために内側電極3と流路規制部材5との間の寸法に狂いが生じて、予定した通りの冷媒の冷却効率が得られない場合がある。また、流路規制部材5の材料が合成樹脂製のものである場合には、溶接による高熱のために流路規制部材5そのものが熱変形したり、一部溶融するなどの悪影響を受けることもある。   When sealing the end portion of the inner electrode 3 by welding, thermal deformation or strain due to high temperature heating of the inner electrode 3 accompanying welding may occur. For this reason, the inner electrode 3 and the flow path regulating member may be generated. There is a case where the dimension between 5 and 5 is out of order and the cooling efficiency of the refrigerant as planned cannot be obtained. In addition, when the material of the flow path regulating member 5 is made of a synthetic resin, the flow path regulating member 5 itself may be adversely affected by heat deformation or partial melting due to high heat caused by welding. is there.

本発明の方法においては、このような問題を解決するために、溶接工程を、収容された流路規制部材5における一方の端壁部7b付の筒壁部3aと接触する部分が液面の下側に位置するように冷却液A内に浸した状態で行う。   In the method of the present invention, in order to solve such a problem, the welding process is performed so that the portion of the accommodated flow path regulating member 5 that comes into contact with the cylindrical wall portion 3a with one end wall portion 7b is the liquid level. It is performed in a state where it is immersed in the coolant A so as to be positioned on the lower side.

更に、本発明の方法においては、溶接工程を、収容された流路規制部材5の頂部が冷却液Aの液面の下側に位置する状態で、一方の端壁部7b付の筒壁部3aを冷却液A内に浸した状態で行うことが好ましい。具体的には、図1に示すように、内側電極3の溶接部以外の部分を冷却液Aを入れた容器30に浸漬しながら、その外に出ている内側電極3の筒壁部3aの他方の端部に端壁部7aを溶接によって水密状態・気密状態になるように溶着する。   Furthermore, in the method of the present invention, the welding step is performed with the cylindrical wall portion with one end wall portion 7b in a state where the top of the accommodated flow path regulating member 5 is located below the liquid level of the coolant A. It is preferable to perform in a state where 3a is immersed in the coolant A. Specifically, as shown in FIG. 1, while immersing a portion other than the welded portion of the inner electrode 3 in the container 30 containing the coolant A, the cylindrical wall portion 3 a of the inner electrode 3 that is exposed to the outside is immersed. The end wall 7a is welded to the other end so as to be in a watertight state or an airtight state by welding.

この筒壁部3aの他方の端部に端壁部7aを溶着する前記溶着工程において、一方の端壁部7b付の筒壁部3a内に冷媒の入口10又は出口11を通じて冷却液が流入することを防止しながら行うことが好ましい。   In the welding step of welding the end wall portion 7a to the other end portion of the cylindrical wall portion 3a, the coolant flows into the cylindrical wall portion 3a with one end wall portion 7b through the refrigerant inlet 10 or the outlet 11. It is preferable to carry out while preventing this.

このように一方の端壁部7bが取り付けられた筒壁部3aの中に、該端壁部7bを筒壁部3aよりも下側に位置させた状態で流路規制部材5を収容するとともに、流路規制部材5が収容された内側電極3における一方の端壁部7b付の筒壁部と接触する部分が液面の下側に位置するように冷却液A内に浸した状態で行うことによって、溶接による封止加工を行なう内側電極3の他方の端部と流路規制部材5の間に一定の距離を確保することができるとともに、この他方の端部の溶接加工による熱によるひずみや変形の発生を防止することができ、上述したようなさまざまな影響を回避することができる。   In this manner, the flow path regulating member 5 is accommodated in the cylindrical wall portion 3a to which the one end wall portion 7b is attached, with the end wall portion 7b positioned below the cylindrical wall portion 3a. In the inner electrode 3 in which the flow path regulating member 5 is accommodated, the inner electrode 3 is immersed in the coolant A so that the portion in contact with the cylindrical wall portion with the one end wall portion 7b is positioned below the liquid surface. As a result, a certain distance can be secured between the other end of the inner electrode 3 that performs the sealing process by welding and the flow path regulating member 5, and the strain due to heat by the welding process of the other end. And deformation can be prevented, and various effects as described above can be avoided.

内側電極3の冷媒の流通空間4の中に装入する流路規制部材5の材料は、吸水性のない材料であれば特に制限されないが、金属、合成樹脂、セラミックス等が好ましい。特に、耐久性に優れる点や重量が軽いなどの点から合成樹脂製のものが好ましく、更には内部を空洞として両端を塞いだ構造のものが好ましい。特に、流路規制部材5が合成樹脂製のものである場合には、上記のように流路規制部材5を装入した後の内側電極3の残りの端部を溶接によって封止する際に本発明の方法が優れた効果を発揮する。   The material of the flow path regulating member 5 inserted into the refrigerant circulation space 4 of the inner electrode 3 is not particularly limited as long as it is a material that does not absorb water, but metals, synthetic resins, ceramics, and the like are preferable. In particular, those made of synthetic resin are preferred from the viewpoint of excellent durability and light weight, and further, those having a structure in which both ends are closed with a hollow inside are preferred. In particular, when the flow path regulating member 5 is made of a synthetic resin, when the remaining end of the inner electrode 3 after the flow path regulating member 5 is inserted as described above is sealed by welding. The method of the present invention exhibits excellent effects.

本発明の方法によってオゾン発生電極の内側電極を製造することにより、内側電極3本体や流路規制部材5に変形やひずみが発生することがなく、精度よく製作することができる。従って、本発明の方法により製造したオゾン発生電極の内側電極では、内部に流路規制部材を精度よく装入することができるため、冷媒の冷却効率がよくなり、その結果オゾンの生成効率を向上させることができる。従って、従来からオゾンの利用されている水処理設備などのさまざまな産業分野で、より有効に本発明を利用することができる。   By manufacturing the inner electrode of the ozone generating electrode by the method of the present invention, the inner electrode 3 main body and the flow path regulating member 5 are not deformed or distorted, and can be manufactured with high accuracy. Therefore, in the inner electrode of the ozone generating electrode manufactured by the method of the present invention, the flow path regulating member can be accurately inserted therein, so that the cooling efficiency of the refrigerant is improved, and as a result, the ozone generation efficiency is improved. Can be made. Therefore, the present invention can be used more effectively in various industrial fields such as water treatment facilities where ozone is conventionally used.

1.外側電極、2.誘電体、3.内側電極、3a.筒壁部、4.冷媒の流通空間、5.流路規制部材、6.放電空間、7a.他方の端壁部、7b.一方の端壁部、10.冷媒入口、11.冷媒出口、20.原料ガス、21.オゾン化ガス、30.冷却槽、40.溶接装置、A.冷却液。 1. Outer electrode, 2. 2. dielectric, Inner electrode, 3a. 3. Tube wall part 4. Refrigerant distribution space 5. a flow path regulating member; Discharge space, 7a. The other end wall, 7b. One end wall, 10. 10. refrigerant inlet, Refrigerant outlet, 20. Source gas, 21. Ozonized gas, 30. Cooling tank, 40. Welding equipment, A. Coolant.

Claims (3)

筒状の筒壁部、及びその両端部をそれぞれ閉塞させる一対の端壁部であって各々に冷媒の入口及び出口が設けられた端壁部を有し、内部に冷媒の流路をその筒壁内周部側に規制する柱状の流路規制部材が収容された内側電極であり、外側電極に対し空間を介して対向するようにその内側に配置され、両電極の互いに対向する面の少なくとも何れか一方に誘電体を配置することによりオゾン発生電極を形成する、オゾン発生電極用の内側電極の製造方法であって、
一方の端壁部付の筒壁部内に、一方の端壁部を筒壁部よりも下側に位置させた状態で流路規制部材を収容するとともに、この一方の端壁部付の筒壁部に対し他方の端壁部を溶接により取り付ける溶接工程を含み、
この溶接工程が、収容された流路規制部材における一方の端壁部付の筒壁部と接触する部分が液面の下側に位置するように冷却液内に浸した状態で行うものである、オゾン発生電極用の内側電極の製造方法。
A cylindrical tubular wall portion and a pair of end wall portions that respectively close both ends thereof, each having an end wall portion provided with an inlet and an outlet for the refrigerant, and the refrigerant flow path therein It is an inner electrode in which a columnar flow restricting member that restricts to the inner wall side of the wall is accommodated, and is arranged on the inner side so as to face the outer electrode through a space. A method for producing an inner electrode for an ozone generating electrode, wherein an ozone generating electrode is formed by disposing a dielectric on either side,
The flow path regulating member is accommodated in the cylindrical wall portion with one end wall portion in a state where the one end wall portion is positioned below the cylindrical wall portion, and the cylindrical wall with this one end wall portion Including a welding step of attaching the other end wall portion to the portion by welding,
This welding process is performed in a state where the portion of the accommodated flow path regulating member that is in contact with the cylindrical wall portion with one end wall portion is immersed in the cooling liquid so as to be positioned below the liquid surface. The manufacturing method of the inner side electrode for ozone generation electrodes.
前記溶接工程が、収容された流路規制部材の頂部が液面の下側に位置する状態で一方の端壁部付の筒壁部を冷却液内に浸した状態で行うものである、請求項1に記載のオゾン発生電極用の内側電極の製造方法。   The welding process is performed in a state in which the cylindrical wall portion with one end wall portion is immersed in the cooling liquid in a state where the top portion of the accommodated flow path regulating member is located below the liquid surface. Item 2. A method for producing an inner electrode for an ozone generating electrode according to Item 1. 前記溶接工程が、一方の端壁部付の筒壁部内に冷媒の入口又は出口を通じて冷却液が流入することを防止しながら行うものである、請求項1又は2に記載のオゾン発生電極用の内側電極の製造方法。   The ozone generating electrode for an ozone generating electrode according to claim 1 or 2, wherein the welding step is performed while preventing the coolant from flowing into the cylindrical wall portion with one end wall portion through the inlet or the outlet of the refrigerant. Manufacturing method of inner electrode.
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