JP5203685B2 - Liquid dropping device and substrate processing apparatus - Google Patents

Description

  The present invention relates to a liquid agent dropping device that drops a liquid agent in a transport container that is filled and transported to a target from a nozzle, and a substrate processing apparatus that includes the liquid agent dropping device.

Conventionally, as such a liquid agent dropping device, a syringe for storing a liquid agent supplied from a transport container, a dropping valve for opening and closing a flow path for supplying the liquid agent from the syringe to the nozzle, and a liquid agent stored in the syringe Some dispensers include a plunger that applies pressure, and drops liquid crystal as a liquid agent. For example, the liquid crystal dropping device described in Patent Document 1 includes a barrel capable of storing a larger amount of liquid crystal supplied from a transfer container than a syringe, and a supply valve that opens and closes a tube that connects the barrel and the syringe. ing. Then, the plunger is raised while the supply valve is opened and the dropping valve is closed to supply the liquid crystal stored in the barrel into the syringe, and the plunger is lowered while the supply valve is closed and the dropping valve is opened. The liquid crystal is dripped from the nozzle by applying pressure to the liquid crystal stored in the syringe. Furthermore, in patent document 1, the liquid crystal stored in the barrel is supplied to the syringe without waste by connecting a tube to the lower end of the barrel.
JP 2005-125186 A

  By the way, the liquid crystal is provided by the liquid crystal material manufacturer in a state where it is filled in a transport container such as a glass bottle. For example, when the liquid crystal in the barrel is exhausted, the liquid crystal filled in the transport container is transferred to the barrel. It is necessary to change. For this reason, work efficiency is reduced, and dust or the like may be mixed during the work of transferring the liquid crystal. Therefore, it is conceivable that a tube or the like is inserted from above the transport container and the liquid crystal is sucked up and supplied to the syringe, but the liquid crystal tends to remain on the bottom of the transport container, and the liquid crystal cannot be supplied to the syringe without waste. There was a problem. Such a problem occurs not only when liquid crystal is dropped as a liquid agent but also when a liquid agent such as an adhesive or solder paste is dropped.

  This invention is made | formed in view of such a situation, The objective is to provide the liquid agent dripping apparatus which can supply a liquid agent from the container for conveyance to a syringe, without wasting a liquid agent.

In order to solve the above-mentioned problem, the invention according to claim 1 is a liquid agent dropping device for dropping a liquid agent in a conveyance container to an object from a nozzle, and the liquid agent supplied from the conveyance container A dispenser that drops the liquid from the nozzle, a closing member that closes the opening of the transfer container, and the transfer container fixed to the dispenser so that the opening of the transfer container faces downward. A support member that removably supports the closing member, and a conduit for supplying the liquid agent from the transport container to the dispenser, wherein the dispenser stores the liquid agent supplied from the transport container. And a drip valve that opens and closes a flow path for supplying the liquid agent from the syringe to the nozzle, and a plunger that applies pressure to the liquid crystal stored in the syringe. The closing member includes a main body that closes the opening, a fixing unit that fixes the opening to the main body, a through hole that communicates the inside of the transfer container and the inside of the conduit, and the through A supply valve that opens and closes the hole, and the fixing means includes a bottomed housing member, a fastening member provided on one of the closing member and the housing member, the closing member, and the A locking member that is provided on any one of the housing members and that latches on the fastening member, and the transport container is in contact with the main body and the bottom of the housing member It was made to be accommodated in the accommodating member .

According to this configuration, the closing member is attached to the transport container filled with liquid crystal provided by a liquid crystal material manufacturer and the supply valve is closed, so that the opening of the transport container is directed downward. The liquid crystal does not leak even if it is in a state. And since this closing member is supported with the opening facing downward, a tube or the like is inserted from above the transport container, and the liquid crystal is sucked up and supplied to the syringe. The liquid crystal can be supplied to the syringe without waste. Further, when replacing the transport container, the transport container and the closing member are detached from the support member, and the transport member is supported by attaching the close member to the new transport container in which the liquid crystal is stored and supporting the support member. Exchanged. Therefore, unlike the conventional case, it is not necessary to transfer the liquid crystal from the transfer container to the barrel, so that the work efficiency can be prevented from being lowered, and dust and the like can be prevented from being mixed during the operation of transferring the liquid crystal.
In general, the transport container is often an inexpensive glass bottle with excellent corrosion resistance against liquid agents such as liquid crystal. However, since glass is a material that is easily damaged, it is difficult to carry it with a metal robot hand or the like. In this respect, according to the same configuration, since the transport container is accommodated in the housing member and the opening is fixed to the main body of the closing member, the transport container can be easily held by the robot hand, etc. It is possible to carry it around and can be easily automated. Moreover, even if the screw part is not formed in the container for conveyance, the opening part can be fixed to the main body part.

  According to a second aspect of the present invention, in the liquid dropping apparatus according to the first aspect, a male screw portion is formed on the outer peripheral surface of the opening of the transport container, and the fixing means is formed on the closing member and the male screw portion. Is a female screw portion into which is inserted. According to this configuration, since the opening is fixed to the main body of the closing member by screwing the closing member into the transfer container, for example, the storage member that stores the entire transfer container and fixes the opening is provided. Compared to the case of using, the number of parts can be reduced.

According to a third aspect of the present invention, in the liquid agent dropping apparatus according to the first or second aspect , the housing member is formed in a bottomed cylindrical shape, and an opening window is formed in a cylindrical portion of the housing member. It was done. According to this configuration, since the opening is formed in the cylindrical portion of the housing member, the remaining amount of liquid crystal in the transport container can be easily recognized.

According to a fourth aspect of the present invention, in the liquid agent dropping device according to the first or second aspect , the storage member includes a lock portion provided with any one of the fastening member and the locking member, and the lock And a rod-shaped connecting part that connects the part and the bottom part. According to this configuration, the remaining amount of liquid crystal in the transport container can be easily visually recognized from the gap between the connecting portions. In addition, it becomes possible to carry the transport container by gripping the rod-shaped connecting portion, and it is not necessary to grip the entire storage member, so that it can be easily carried even when the capacity of the transport container is large. it can.

According to a fifth aspect of the present invention, in the liquid agent dropping device according to any one of the first to fourth aspects, an air supply hole for supplying an inert gas into the transfer container is provided in the closing member. Been formed. According to the same configuration, when supplying the liquid agent into the syringe, the liquid agent is supplied into the syringe only by making the inside of the syringe negative pressure with the plunger by supplying the inert gas into the transport container. Unlike the above, it is possible to quickly supply the liquid without generating bubbles.

Invention of Claim 6 is the liquid agent dripping apparatus as described in any one of Claims 1-5. WHEREIN: The said through-hole is a fixed surface to which the said opening part in the said obstruction | occlusion member is fixed, and the said A vertical portion formed to open to a support surface that contacts the support member, and the pipe line is formed to open to a support surface that supports the contact surface of the support member so as to be connected to the through hole. And a horizontal portion formed on the support member so as to communicate the vertical portion with the inside of the syringe, and the blocking member is placed and fixed on the support member. According to this configuration, since the inside of the transport container to which the closing member is attached and the inside of the syringe are communicated via the conduit formed in the support member, for example, the inside of the transport container and the inside of the syringe are connected by a tube. Unlike the case of connection, a joint or the like is unnecessary, and the efficiency of the attaching operation of the closing member can be improved.

A seventh aspect of the present invention is the liquid agent dropping apparatus according to the sixth aspect, wherein a large-diameter portion larger in diameter than the through hole is formed on the fixed surface side of the through hole, and the through hole A small diameter portion smaller in diameter than the through hole is formed on the abutting surface side, and the supply valve includes a ball member disposed on the abutting surface side in the through hole, and the ball member more than the ball member. It is composed of a coil spring arranged on the fixed surface side, and a pressing member that is press-fitted into the large-diameter portion and presses the coil spring. It was inserted so that it could move up and down. According to this configuration, the ball member is moved by moving the rod inserted into the vertical part up and down to open and close the supply valve. For example, the inside of the transport container and the inside of the syringe are connected by a tube, and the tube The liquid agent dropping device can be downsized compared to the case of opening and closing the device with a pinch valve.

According to an eighth aspect of the present invention, in the liquid agent dropping device according to the sixth aspect, a large-diameter portion larger in diameter than the through-hole is formed on the fixed surface side of the through-hole, and the through-hole is formed. A small-diameter portion having a smaller diameter than the through hole is formed on the contact surface side of the hole, and the supply valve includes a ball member disposed on the contact surface side in the through hole, and the ball member. The coil spring is arranged on the fixed surface side, and a pressing member that is press-fitted into the large-diameter portion and presses the coil spring, and is inserted into the small-diameter portion around the vertical portion on the support surface. A protrusion for pushing up the ball member was formed, and the support member was provided with an opening / closing valve for opening and closing the pipe line. According to this configuration, by placing the closing member on the support member, the protrusion is inserted into the small diameter portion, the ball member is pushed up, and the supply valve is always open. Further, other valves can be used as the on-off valve constituting the pipeline, and the manufacturing cost can be reduced by using the existing valve.

According to a ninth aspect of the present invention, in the liquid agent dropping device according to the eighth aspect , the first and second flange portions are accommodated in the support member, and the first and second flange portions extend radially outward at both axial ends. And a tube having annular projections formed on end faces of the first and second flange portions, wherein the horizontal portion is connected to the first flow path connected to the vertical portion and the syringe. The support member includes a cavity portion that is open to one side surface between the first channel and the second channel, and the first channel and the cavity portion. A first accommodating portion in which the first flange portion is accommodated and a second accommodating portion in which the second flange portion is accommodated between the second flow path and the cavity portion are formed. And a smaller diameter than the first flange portion between the first housing portion and the cavity portion, and A first flange portion larger in diameter than the cylindrical portion of the tube extends radially inward, and has a smaller diameter than the second flange portion between the cavity portion and the second housing portion, and A second flange portion having a diameter larger than that of the cylindrical portion extends radially inward, and the tube is accommodated in a state where the first flange portion is pressed in the axial direction by the first accommodating portion, The on-off valve that is accommodated in a state in which the second flange portion is pressed in the axial direction in the second accommodating portion, communicates the first flow path and the second flow path, and opens and closes the tube in the hollow portion. Was placed. According to this configuration, the first and second flange portions (convex portions) are pressed and accommodated in the first and second accommodating portions, respectively, so that the convex portions and the first and second accommodating portions are in close contact with each other. Liquid crystal can be prevented from leaking. Therefore, by forming the support member in this manner, the tube can be attached without using a joint, and the efficiency of the attaching operation can be improved. Further, by configuring the dropping valve in the same manner, it becomes possible to share parts, and the manufacturing cost can be reduced.

The invention according to claim 10, in the liquid dropping device according to any one of claims 6-9, comprising a holding means for holding the closing member on the support member. According to this configuration, since the closing member is held on the support member by the holding means, it is possible to prevent the transport container and the closing member from falling from the support member even if the liquid agent dropping device is moved.

The invention according to claim 11 is the liquid agent dropping apparatus according to claim 10 , wherein the holding means includes a fastening member provided on one of the closing member and the support member, the closing member, The locking member is provided on any one of the support members and is locked to the fastening member. According to this configuration, for example, the closing member is held by the support member by locking the link-like locking member to the fastening member having a hook, and the transport container and the closing member can be prevented from falling from the support member. .

According to a twelfth aspect of the present invention, in the invention according to the tenth aspect , the holding means includes a fixing member fixed above the bottom of the transporting container supported by the supporting member, and a tip. Is constituted by a bolt screwed into the fixing member so as to be exposed to the support member side, and a pressing member provided at the tip of the bolt and in contact with the bottom of the transport container. According to this configuration, the pressing member moves together with the bolt by turning the bolt screwed into the fixing member. The blocking member is held by the support member by pressing the transport container against the support member by the pressing member, and the transport container and the blocking member can be prevented from falling from the support member. Further, since the closing member can be held or released by turning the bolt, holding of the closing member can be easily automated by a motor or the like.

The invention according to claim 1 3, in the liquid dropping device according to any one of claims 1 to 1 2, a housing is provided at the lower end of the syringe is accommodated in the housing, the shaft First and second flange portions extending radially outward at both ends in the direction, and tubes having annular convex portions formed on end surfaces of the first and second flange portions, the housing Includes a first insertion hole to which the syringe is fixed, a second insertion hole to which the nozzle is fixed, and a hollow portion opened on one side surface between the first insertion hole and the second insertion hole. And a first collar portion having a smaller diameter than the first flange portion and a larger diameter than the cylindrical portion of the tube is radially inward between the first insertion hole and the cavity portion. Between the cavity and the second insertion hole. A second flange part having a smaller diameter than the flange part and a diameter larger than the cylindrical part extends radially inward, and the tube has the first flange part between the first flange part and the syringe. Between the second flange portion and the nozzle in a state of being axially pressed between the second flange portion and the nozzle. The dripping valve that communicates with the nozzle and opens and closes the tube is disposed in the cavity. According to this configuration, the syringe and the nozzle are fixed to the casing, whereby the first and second flange portions (convex portions) are pressed, the syringe and the convex portion, and the nozzle and the convex portion are in close contact with each other, and the liquid crystal leaks. Can be prevented. Therefore, by using such a housing, the tube can be attached without using a joint, and the efficiency of the attaching operation can be improved.

The invention described in claim 1 4, in liquid dropping device according to any one of claims 1 to 1 3, a detecting means for detecting the remaining amount of the liquid of the transport container, wherein When it is determined by the output means from the moving means that moves the transfer container and the detection means that the liquid agent is no longer in the transfer container, the moving means is driven to move the transfer container and the closing member. A control device that is removed from the support member, and that supports the transport container filled with the liquid agent and attached with the closing member. According to this configuration, when the liquid crystal in the transport container is exhausted, it can be automatically replaced with a new transport container.

The invention according to claim 1 5, a liquid dropping device according to any one of claims 1 to 14, a stage on which the substrate is fixed to the upper surface, the liquid dropping device above the substrate And a moving means for moving the liquid agent dropping device relative to the substrate in the horizontal direction.

  According to this configuration, liquid crystal is dropped at a predetermined position of the substrate fixed on the stage by moving the liquid agent dropping device, and the substrate is processed. And since a liquid agent can be supplied from a container for conveyance to a dispenser (syringe) without wasting a liquid agent, the cost reduction of a board | substrate can be achieved.

  ADVANTAGE OF THE INVENTION According to this invention, the liquid agent dripping apparatus which can supply a liquid crystal from a container for conveyance to a syringe can be provided, without wasting a liquid crystal.

Hereinafter, an embodiment in which the present invention is embodied in a liquid crystal dropping device of a bonded substrate manufacturing apparatus will be described with reference to the drawings.
A substrate processing apparatus 1 shown in FIG. 1 is provided in a production line (not shown) for manufacturing an active matrix liquid crystal display panel or the like by enclosing liquid crystal between two types of substrates (lower substrate and upper substrate). . The substrate processing apparatus 1 is used in a step of dropping liquid crystal as a liquid agent on the opposing surfaces of the two substrates (in the present embodiment, the lower substrate W) in the liquid crystal display panel manufacturing process.

  A rectangular parallelepiped stage 12 is placed on a rectangular parallelepiped base 11 constituting the substrate processing apparatus 1. The upper surface 12a of the stage 12 is formed horizontally. The lower substrate W as an object is staged by a vacuum suction force generated by sucking a gas interposed between the lower substrate W and the stage 12 by a suction device (not shown) provided in the stage 12. 12 is fixed.

  A gantry 13 is provided across the stage 12 on the base 11 on which the stage 12 is placed. The gantry 13 includes a pair of support legs 13a extending parallel to each other upward from the base 11, and a connecting part 13b that spans between the two support legs 13a and connects the upper ends of the support legs 13a. It has a letter shape. The base end portions of the pair of support legs 13 a are respectively inserted into a pair of guide grooves 11 a formed in parallel along the stage 12 on both sides of the stage 12 on the upper surface of the base 11. The gantry 13 is moved in the y direction (perpendicular to the paper surface in FIG. 1) along the guide groove 11a by a y-axis actuator 14 provided in the base 11 corresponding to the pair of support legs 13a. . The connecting portion 13 b of the gantry 13 is provided with an x-axis base 16 that moves in the x direction along the connecting portion 13 b by the driving force of the x-axis actuator 15. In this embodiment, the gantry 13 and the x-axis base 16 constitute a support member, and the y-axis actuator 14 and the x-axis actuator 15 constitute a moving means. Note that the x direction is a direction orthogonal to the y direction, and in FIG. 1, the left-right direction is the x direction.

  A liquid crystal dropping device 21 is attached to the x-axis base 16 so as to be movable together with the x-axis base 16. In the liquid crystal dropping device 21, a dispenser 23 is attached to an attachment member 22 fixed to the x-axis base 16. As shown in FIG. 2, the syringe 24 of the dispenser 23 is formed in a hollow and substantially cylindrical shape, and liquid crystal is stored in the syringe 24. A supply hole 25 is formed in the syringe 24 so as to open to the side surface and the inside of the syringe 24, and a support member 26 is fixed to a position corresponding to the supply hole 25. The support member 26 is fixed with a closing member 29 that closes the opening 28 of the transport container 27 in which the liquid crystal is stored. In addition, an inert gas (for example, nitrogen gas) is supplied into the transfer container 27 from the outside. Then, in a state where the closing member 29 is supported by the support member 26, the conduit for supplying the liquid crystal into the syringe 24 and the inside of the transport container 27 communicate with each other. Thereby, the liquid crystal stored in the transport container 27 can be supplied into the syringe 24.

  A plunger 31 formed in a cylindrical shape is inserted into the syringe 24 through the opening 30 at the upper end of the syringe 24. The plunger 31 is formed to have a diameter slightly smaller than the inner diameter of the syringe 24, and the liquid crystal may overflow from the opening 30 due to the seal member 32 and the spacer 33 being interposed between the syringe 24 and the plunger 31. It is prevented. The plunger 31 is connected to a drive mechanism 41 that moves the plunger 31 relative to the syringe 24 along the z direction.

  The drive mechanism 41 is fixed to the x-axis base 16 above the attachment member 22. In this embodiment, the drive mechanism 41 employs a ball screw drive device that rotates a ball screw (not shown) to move a bracket 42 screwed to the ball screw to an arbitrary position. The ball screw is connected to a plunger driving portion 44 made of a motor or the like via a coupling 43, and the bracket 42 is connected to a grip portion 31a of the plunger 31, and the plunger driving portion 44 rotates to rotate the plunger. 31 moves along the z direction. The z direction is a direction (vertical direction in FIG. 2) perpendicular to both the x direction and the y direction.

  A rectangular cylindrical casing 51 is fixed to the lower end of the syringe 24, and a tube 53 as a flow path that connects the syringe 24 and the discharge port 52 a of the nozzle 52 in the casing 51. Is housed. The tube 53 is formed of a synthetic rubber having flexibility and corrosion resistance to liquid crystals, such as silicon rubber. As shown in FIG. 3, the tube 53 has first and second flange portions 54, 55 extending radially outward at both axial ends thereof, and the first and second flange portions 54, 55. Ring-shaped convex portions 56 and 57 are formed on the end face.

  A first insertion hole 58 to which the syringe 24 is fixed is formed at the upper end of the casing 51, and a second insertion hole 59 to which the nozzle 52 is fixed is formed at the lower end of the casing 51. In addition, a cavity 60 that opens to one side surface is formed between the first insertion hole 58 and the second insertion hole 59, and the tube 53 is accommodated in the housing 51 in a state where the tube 53 is accommodated. The cylindrical part 61 is exposed. Between the first insertion hole 58 and the cavity portion 60, a first flange portion 62 having a smaller diameter than the first flange portion 54 and a larger diameter than the cylindrical portion 61 extends radially inward. Between the cavity 60 and the second insertion hole 59, a second flange 63 having the same diameter as the first flange 62 extends radially inward. The tube 53 is accommodated in the housing 51 such that the first flange portion 54 is closer to the syringe 24 than the first flange portion 62 and the second flange portion 55 is closer to the nozzle 52 than the second flange portion 63. ing. Accordingly, the first flange portion 54 is interposed between the syringe 24 and the first flange portion 62, and the second flange portion 55 is interposed between the second flange portion 63 and the nozzle 52. Then, the syringe 24 and the nozzle 52 are screwed to the housing 51, whereby the first and second flange portions 54 and 55 (convex portions 56 and 57) are pressed, and the syringe 24, the convex portion 56, and the nozzle 52 are pressed. The convex portion 57 is in close contact, and the liquid crystal is prevented from leaking.

  In addition, a drip valve 64 composed of a pinch valve is disposed in the cavity 60. Specifically, in the dropping valve 64, an arm 66 protrudes from a dropping valve driving unit 65 made of a solenoid or the like, and three sandwiching pieces 67a to 67c protrude in parallel from the arm. The sandwiching pieces 67a and 67c on both sides of the sandwiching pieces 67a to 67c are fixed to the arm 66, and the central sandwiching piece 67b is configured to be movable toward the sandwiching piece 67a or the sandwiching piece 67c. . The tube 53 is inserted between the sandwiching pieces 67a and 67b. The dropping valve 64 closes the flow path by sandwiching the tube 53 by moving the sandwiching piece 67b toward the sandwiching piece 67a, and moves the sandwiching piece 67b toward the sandwiching piece 67c. 53 is released and the flow path is opened. Thus, by using the drip valve 64 composed of a pinch valve, bubbles are less likely to be generated when the flow path is opened and closed.

  As shown in FIG. 1, the control device 71 is connected to the y-axis actuator 14 and the x-axis actuator 15. The y-axis actuator 14 and the x-axis actuator 15 move the liquid crystal dropping device 21 in the y direction or the x direction, respectively, according to a signal from the control device 71, so that the liquid crystal dropping device 21 moves to a predetermined position above the lower substrate W. It is supposed to be. As shown in FIG. 2, the control device 71 is connected to the plunger drive unit 44 and the drip valve drive unit 65. The plunger drive unit 44 moves the plunger 31 by a signal from the control device 71, and the drip valve drive unit 65 opens and closes the flow path of the tube 53 by a signal from the control device 71.

  The liquid crystal dropping device 21 has a plunger 31 in a state in which a pipe line communicating the inside of the syringe 24 and the inside of the transport container 27 is opened and a flow path communicating the inside of the syringe 24 and the discharge port 52a of the nozzle 52 is closed. The liquid crystal is supplied into the syringe 24 by the inert gas being supplied into the transport container 27. Note that the liquid crystal can be quickly supplied into the syringe 24 by supplying the inert gas into the transfer container 27. Further, in a state where the pipe line is closed and the flow path is opened, the plunger 31 moves downward, whereby the liquid crystal in the syringe 24 is supplied to the nozzle 52 via the tube 53, and the liquid crystal is discharged from the discharge port 52a. It has become so.

  Next, the closing member 29 and the support member 26 that close the transfer container 27 will be described. The transport container 27 is formed of, for example, a transparent glass bottle or the like, and a lid (not shown) is screwed onto a male screw portion 28a formed on the outer peripheral surface of the opening 28, so that the inside of the transport container 27 Is to be sealed. Then, the liquid crystal is provided in a state where the liquid crystal material manufacturer is filled in the transport container 27.

  As shown in FIGS. 4A and 4B, the closing member 29 is formed in a substantially rectangular parallelepiped shape, and a concave portion as a main body portion closing the opening portion 28 of the transport container 27 is formed on the upper surface 81 thereof. 82 is formed. Further, an annular seal member 84 is attached to the peripheral portion of the bottom surface 83 as a fixing surface of the recess 82, and the external thread portion 28 a of the transport container 27 is attached to the inner peripheral surface of the recess 82. A female screw portion 85 is formed as a fixing means corresponding to. Then, the closing member 29 is screwed into the transport container 27, so that the opening 28 is closely fixed to the recess 82 via the seal member 84.

  Further, the closing member 29 has a linear through hole 87 that opens to the bottom surface 83 and the contact surface 86 that contacts the support member 26, and an L-shaped supply that opens to the bottom surface 83 and the side surface 88 of the closing member 29. A pore 89 is formed.

  A large diameter portion 90 larger in diameter than the through hole 87 is formed on the bottom surface 83 side of the through hole 87, and a small diameter portion 91 smaller in diameter than the through hole 87 is formed on the contact surface 86 side. Yes. The closing member 29 includes a supply valve 92 that opens and closes the through hole 87. The supply valve 92 includes a ball member 93 disposed on the contact surface 86 side in the through hole 87, a coil spring 94 disposed on the bottom surface 83 side of the ball member 93, and a large-diameter portion 90 that is press-fitted into the coil spring. And a holding member 95 for holding 94. The ball member 93 has a larger diameter than the small diameter portion 91 and a smaller diameter than the through hole 87. That is, when the ball member 93 is pressed toward the contact surface 86 by the coil spring 94, the ball member 93 closes the through hole 87, and the through hole 87 is opened unless a force is applied to the ball member 93 from the outside. It is supposed not to. The supply valve 92 is configured as a so-called normally closed valve that is closed when no force is applied from the outside. Therefore, the liquid crystal does not leak even when the opening 28 of the transport container 27 to which the closing member 29 is attached is directed downward. The coil spring 94 is configured such that the supply valve 92 does not open with the pressure applied to the liquid crystal as the plunger 31 descends.

  An inlet 96 with a check valve is attached to the side surface 88 of the air supply hole 89, and a hose 97 for supplying an inert gas (for example, nitrogen gas) is attached to the inlet 96. Connected. A control device 71 is connected to the hose 97, and the hose 97 is attached to and detached from the introduction port 96 by a drive mechanism (not shown) in response to a signal from the control device 71. Further, a conduit 98 made of a synthetic rubber, such as silicon rubber, having corrosion resistance against the liquid crystal is attached to the bottom surface 83 side of the air supply hole 89, and an inert gas supplied from the outside passes through the conduit 98. Then, it is introduced into the transfer container 27.

  As shown in FIG. 5, the support member 26 is formed in a substantially rectangular parallelepiped shape, and its side surface is fixed to the syringe 24. Further, a fitting portion 102 having substantially the same shape as the contact surface 86 of the closing member 29 is recessed in the upper surface 101 of the support member 26. The support member 26 has an L-shaped flow path composed of a straight vertical portion 103 connected to the through hole 87 and a horizontal portion 104 communicating the vertical portion 103 with the inside of the syringe 24. Is formed. In the present embodiment, the vertical portion 103 and the horizontal portion 104 constitute a pipe line. Specifically, the vertical portion 103 opens to the support surface 102a of the fitting portion 102 and is connected to the through-hole 87, and the horizontal portion 104 is formed in the horizontal direction from the vertical portion 103 and the side surface of the support member 26. And is connected to the supply hole 25. Further, a linear insertion hole 106 is formed that penetrates between the intersection of the vertical portion 103 and the horizontal portion 104 and the lower surface 105 of the support member 26. A rod-shaped rod 107 having a smaller diameter than the small-diameter portion 91 and the vertical portion 103 is inserted into the insertion hole 106 so as to be movable in the z direction, and a seal member 108 is interposed between the rod 107 and the insertion hole 106. Is intervened. The seal member 108 prevents the liquid crystal from leaking from the insertion hole 106. The rod 107 is moved in the z direction by the rod driving unit 109 provided on the lower surface 105, thereby pushing up the ball member 93 against the urging force of the coil spring 94 so that the through hole 87 is opened. It has become.

  In addition, as shown in FIG. 6, a plurality of (four in this embodiment) pillars 111 are provided on the upper surface 101 of the support member 26 so as to sandwich the fitting portion 102, and the pillars 111. A top plate 112 as a fixing member is fixed to the upper end of the head. Note that the upper end portion of the column 111 is located above the bottom portion of the transport container 27 supported by the support member 26, and the top plate 112 is fixed above the bottom portion of the transport container 27. The top plate 112 is formed with a screw hole 113 in which a thread groove is formed, and a bolt 114 is inserted so that the tip is exposed to the support member 26 side. Further, a disc-shaped holding plate 115 that contacts the bottom of the transport container 27 is provided at the front end (lower side in FIG. 6) of the bolt 114, and held at the base end (upper side in FIG. 6) of the bolt 114. A plate driving unit 116 is provided. Then, when the bolt 114 is rotated by the holding plate driving unit 116, the holding plate 115 moves in the vertical direction together with the bolt 114. The holding plate 115 is moved downward in a state where the transport container 27 and the closing member 29 are supported by the support member 26, thereby pressing the transport container 27 and the closing member 29 against the support member 26, and the closing member 29 is supported. It is held on the member 26. In this embodiment, the pillar 111, the top plate 112, the bolt 114, the holding plate 115, and the holding plate driving unit 116 constitute a holding means.

  As shown in FIG. 2, a rod drive unit 109 and a holding plate drive unit 116 are connected to the control device 71. The rod drive unit 109 moves the rod 107 in response to a signal from the control device 71 to open and close the supply valve 92. In response to a signal from the control device 71, the holding plate driving unit 116 rotates the bolt 114 to move the holding plate 115 in the vertical direction, and holds or releases the transfer container 27 and the closing member 29. ing. The control device 71 is connected to a robot arm 117 as a moving means for holding the transfer container 27 and a photoelectric sensor 118 as a detecting means. In this embodiment, the robot arm 117 is gripped by sandwiching the transfer container 27, and an elastic material having a high friction coefficient is provided at a contact portion of the robot arm 117 with the transfer container 27. As a result, the transfer container 27 is prevented from falling off the robot arm 117 and being damaged by the force applied when the transfer container 27 is gripped by the robot arm 117. The photoelectric sensor 118 is provided in the vicinity of the opening 28 of the transport container 27 and detects the remaining amount of liquid crystal in the transport container 27.

Next, replacement of the transport container 27 will be described.
When the control device 71 determines that the liquid crystal in the transport container 27 has run out based on the output signal from the photoelectric sensor 118, the control device 71 removes the hose 97 from the introduction port 96 and drives the holding plate driving unit 116 to raise the holding plate 115. The holding container 26 and the closing member 29 are released from the holding member 26. Next, the control device 71 drives the robot arm 117 to hold the transfer container 27, removes the transfer container 27 and the closing member 29 from the support member 26, and uses the transfer container 27 and the closing member 29. Place on a finished shelf (not shown). Subsequently, the control device 71 drives the robot arm 117 to take out the transport container 27 filled with liquid crystal and attached with the closing member 29 from the unused shelf (not shown), and the opening 28 is moved downward. It is placed on the support member 26 so as to face. In addition, the container 27 for conveyance with which the liquid crystal was filled and the closure member 29 was attached is mounted in the unused shelf. Then, the control device 71 drives the holding plate driving unit 116 to move the holding plate 115 downward, holds the transport container 27 and the closing member 29 on the support member 26, and connects the hose 97 to the introduction port 96. The container 27 for conveyance is replaced by attaching.

  Accordingly, since the opening 28 of the transport container 27 is supported by the support member 26 in a state of facing downward, a tube or the like is inserted from above the transport container 27 to suck up the liquid crystal and supply it to the syringe 24. The liquid crystal does not remain on the bottom of the transport container 27, and the liquid crystal is supplied to the syringe 24 without waste. Further, unlike the conventional case, it is not necessary to transfer the liquid crystal from the transport container 27 to the barrel, and the work efficiency is prevented from being lowered, and dust and the like are prevented from being mixed during the operation of transferring the liquid crystal. .

  Moreover, since the opening part 28 is being fixed to the recessed part 82 of the closure member 29 by the internal thread part 85, the number of parts is reduced compared with the case where the accommodation member which accommodates the whole container for conveyance is used, for example. In addition, the transport container 27 can be easily visually recognized, and the remaining amount of liquid crystal can be easily grasped.

  Furthermore, since the liquid crystal dropping device 21 is moved by the x-axis actuator 15 and the y-axis actuator 14 to drop the liquid crystal at a predetermined position on the substrate, the transport container 27 may drop. In this regard, in the present embodiment, since the holding plate 115 holds the liquid, the transport container is prevented from falling even if the liquid crystal dropping device 21 moves.

As described above, according to the present embodiment, the following effects can be obtained.
(1) The liquid crystal dropping device 21 is fixed to the syringe 24 and the closing member 29 that closes the opening 28 of the transport container 27 so that the transport container 27 is in a state in which the opening 28 faces downward. A support member 26 that removably supports the closing member 29 and a conduit that supplies liquid crystal from the transport container 27 to the syringe 24 are provided. The closing member 29 includes a recess 82 as a main body that closes the opening 28 of the transport container 27, a female screw portion 85 that fixes the transport container 27 to the recess 82, the inside of the transport container 27, and the pipeline. And a supply valve 92 that opens and closes the through hole 87. Accordingly, since the opening 28 of the transport container 27 is supported by the support member 26 in a state of facing downward, a tube or the like is inserted from above the transport container 27 to suck up the liquid crystal and supply it to the syringe 24. The liquid crystal does not remain on the bottom of the transport container 27, and the liquid crystal can be supplied to the syringe 24 without waste. Further, unlike the conventional case, it is not necessary to transfer the liquid crystal from the transport container 27 to the barrel, so that it is possible to prevent a decrease in work efficiency and to prevent dust and the like from being mixed during the operation of transferring the liquid crystal.

  (2) Since the opening portion 28 is fixed to the concave portion 82 of the closing member 29 by the female screw portion 85, for example, the number of parts can be reduced as compared with the case where accommodation for accommodating the entire transport container 27 is used. In addition, the transport container 27 can be easily visually recognized, and the remaining amount of liquid crystal can be easily grasped.

  (3) Since the air supply hole 89 for supplying the inert gas into the transfer container 27 is formed, the plunger is supplied by supplying the inert gas into the transfer container 27 when supplying the liquid crystal into the syringe 24. Unlike the case where the liquid crystal is supplied into the syringe 24 only by setting the inside of the syringe 24 to a negative pressure by 31, the liquid crystal can be supplied quickly without generating bubbles.

  (4) Since the inside of the transport container 27 to which the closing member 29 is attached communicates with the inside of the syringe 24 via the vertical portion 103 and the horizontal portion 104 formed on the support member 26, for example, in the transport container 27 Unlike the case where the tube is connected to the inside of the syringe 24, a joint or the like is not necessary, and the efficiency of attaching the closing member 29 can be improved.

  (5) Since the ball member 93 is moved by moving the rod 107 inserted into the vertical portion 103 up and down to open and close the supply valve 92, for example, the inside of the transport container 27 and the inside of the syringe 24 are connected by a tube. And compared with the case where this tube is opened and closed with a pinch valve etc., size reduction of the liquid crystal dropping device 21 can be achieved.

  (6) Since the holding plate 115 holds the transfer container 27 and the closing member 29 by pressing the transfer container 27 and the closing member 29 against the support member 26, the transfer container 27 is moved even if the liquid crystal dropping device 21 is moved. In addition, the closing member 29 can be prevented from falling from the support member 26.

  (7) Since the holding plate 115 is moved by turning the bolt 114, and the holding container 27 and the closing member 29 can be held or released, the holding of the transferring container 27 and the closing member 29 is held. Release can be easily automated by a motor or the like.

  (8) The tube 53 is accommodated in a state where the first flange portion 54 is pressed in the axial direction between the syringe 24 and the first flange portion 62, and the second flange portion 55 is accommodated in the second flange portion 63 and the nozzle 52. Between the syringe 24 and the nozzle 52 are accommodated in the casing 51 while being pressed in the axial direction. Therefore, it can prevent that the syringe 24 and the convex part 56, the nozzle 52, and the convex part 57 closely_contact | adhere, and a liquid crystal leaks. Further, by using such a casing 51, the tube 53 can be attached without using a joint, and the efficiency of the attaching work can be improved.

  (9) When the control device 71 determines that the liquid crystal is no longer in the transfer container 27 based on the output signal from the photoelectric sensor 118, the controller 71 drives the robot arm 117 to move the transfer container 27 and the closing member 29 to the support member 26. The transfer container 27 filled with liquid crystal and having the closing member 29 fixed thereto is placed on the support member 26. For this reason, when the liquid crystal in the transport container 27 runs out, it can be automatically replaced with a new transport container 27.

  (10) When the liquid crystal dropping device 21 moves, the liquid crystal is dropped at a predetermined position of the lower substrate W fixed on the stage 12 and the lower substrate W is processed. Since the liquid crystal can be supplied from the transport container 27 to the dispenser 23 (syringe 24) without wasting the liquid crystal, the cost of the lower substrate W can be reduced.

In addition, you may implement this embodiment in the following aspects.
In the present embodiment, the opening 28 is fixed to the recess 82 by screwing the closing member 29 into the transport container 27. However, the present invention is not limited to this, and as shown in FIG. 7, the transport container 27 is accommodated in the closing member 121 and the bottomed cylindrical accommodating member 122, and the opening 28 is fixed to the recess 82 of the closing member 121. You may make it do. Specifically, the transport container 27 is accommodated such that the opening 28 abuts against the recess 82 of the closing member 121 and the bottom of the transport container 27 abuts the bottom 123 of the accommodation member 122. Then, as shown in FIG. 8, the annular locking member 125 provided in the accommodation member 122 is engaged with the fastening member 124 having the hook provided in the closure member 121, whereby the closure member 121 and the accommodation member 122. And are fixed. Further, as shown in FIG. 7, an opening window 127 is formed in the cylindrical portion 126 of the housing member 122. In this case, the closing member 121, the housing member 122, the fastening member 124, and the locking member 125 constitute a fixing means. Further, the closing member 121 is configured in the same manner as the closing member 29.

  In general, the transport container 27 is often an inexpensive glass bottle with excellent corrosion resistance against liquid agents such as liquid crystal. However, since glass is a material that is easily damaged, it is difficult to carry it with a metal robot hand or the like. In this regard, in the configuration in which the transport container 27 is housed in the closing member 121 and the housing member 122, the transport container 27 can be easily carried by a robot hand or the like by gripping the housing member 122, and is easily automated. can do. Even if the male container 28 a is not formed in the transport container 27, the opening 28 can be fixed to the recess 82 of the closing member 121. Furthermore, since the opening window 127 is formed in the cylindrical portion 126 of the housing member 122, the remaining amount of liquid crystal in the transport container 27 can be easily visually confirmed.

  In addition, as shown in FIG. 9, the housing member 131 may include a lock portion 132 provided with the locking member 125, and a rod-like connection portion 134 that connects the lock portion 132 and the bottom portion 133. By doing so, in addition to the effect of the configuration shown in FIG. 8, it becomes possible to carry the transport container 27 by gripping the connecting portion 134, and it is not necessary to grip the entire storage member 131. Even when the capacity of the transport container 27 is large, it can be easily carried. In this case, the closing member 121, the fastening member 124, the locking member 125, and the housing member 131 constitute a fixing means.

  In the present embodiment, the holding plate 115 holds the transfer container 27 and the closing member 29 by pressing the transfer container 27 and the closing member 29 against the support member 26. However, the present invention is not limited to this. For example, as shown in FIG. 10, the locking member 141 provided with the fastening member 124 is fixed to the outer periphery of the closing member 29, and the locking member 125 is provided on the support member 26, whereby the closing member 29 is supported by the support member 26. You may make it hold | maintain on. Further, the closing member 29 may be formed of a magnetic material such as iron, and the supporting member 26 may be provided with a magnet so that the closing member 29 is held on the supporting member 26 by a magnetic force.

  In this embodiment, the rod 107 is inserted into the vertical portion 103 so as to be movable in the z direction, and the ball valve 93 is pushed up to open and close the supply valve 92. However, the present invention is not limited to this. For example, as shown in FIG. 11, the supply valve 92 is always open in a state where the closing member 29 is placed on the support member 26, and the pipeline (the vertical portion 103 and the horizontal portion) An on-off valve for opening and closing the portion 104) may be provided. Specifically, the support member 151 is formed in a substantially rectangular parallelepiped shape, and its side surface is fixed to the syringe 24. In addition, a fitting portion 153 having substantially the same shape as the contact surface 86 of the closing member 29 is recessed in the upper surface 152 of the support member 151. The support member 151 has an L-shaped flow path including a straight vertical portion 154 connected to the through hole 87 and a horizontal portion 155 communicating the vertical portion 154 and the inside of the syringe 24. Is formed. More specifically, as shown in FIG. 12, the vertical portion 154 opens to the support surface 156 of the fitting portion 153 and is connected to the through hole 87. A plurality of protrusions 157 that can be inserted into the small diameter portion 91 are formed around the vertical portion 154 of the support surface 156. As a result, when the closing member 29 is placed on the support member 151, the protrusion 157 is inserted into the small diameter portion 91, the ball member 93 is pushed up, and the supply valve 92 is always open and adjacent. The liquid crystal flows into the vertical portion 154 from the gap between the protrusions 157. The horizontal portion 155 is provided between the first flow path 158 connected to the vertical portion 154, the second flow path 159 connected to the inside of the syringe 24, and the first flow path 158 and the second flow path 159. And a cylindrical tube 160 to be formed. The tube 160 is formed in the same manner as the tube 53.

  The support member 151 includes a hollow portion 161 that opens below the support member 151 between the first flow path 158 and the second flow path 159, and a tube between the first flow path 158 and the hollow portion 161. A first accommodating portion 163 that accommodates the 160 first flange portions 162 and a second accommodating portion 165 that accommodates the second flange portion 164 are formed between the second flow path 159 and the cavity portion 161. ing. Further, a first flange portion 167 having a smaller diameter than the first flange portion 162 and a larger diameter than the cylindrical portion 166 extends between the first housing portion 163 and the cavity portion 161 toward the radially inner side. A second flange 168 having a smaller diameter than the second flange portion 164 and a larger diameter than the cylindrical portion 166 extends radially inward between the hollow portion 161 and the second accommodating portion 165. Yes. The tube 160 is accommodated in the first accommodating portion 163 in a state where the first flange portion 162 is pressed in the axial direction by the first accommodating portion 163, and the second flange portion 164 is axially accommodated in the second accommodating portion 165. The first flow path 158 and the second flow path 159 are communicated with each other in a pressed state. In the hollow portion 161, an on-off valve 169 composed of a pinch valve configured in the same manner as the dropping valve 64 is disposed. The on-off valve 169 is connected to the control device 71. When supplying liquid crystal into the syringe 24 and when dropping liquid crystal from the nozzle 52, the on-off valve 169 is the same as the supply valve 92 in the present embodiment. The action of.

  By configuring in this way, the first and second flange portions 162 and 164 are pressed and accommodated in the first and second accommodating portions 165, respectively, so that the convex portions 170 and 171 are first and second respectively. The liquid crystal can be prevented from leaking due to close contact with the housing portions 163 and 165. Therefore, the tube 160 can be attached without using a joint, and the efficiency of attachment work can be improved. Also, for example, unlike the case where the supply valve is opened and closed by moving the rod inserted into the vertical portion 154 up and down, the tube 160 has the same configuration as the tube 53 and the on-off valve 169 is the same pinch valve as the dropping valve 64. Since the parts are shared, the manufacturing cost can be reduced. Note that the tube 160 may not be provided in the horizontal portion 155 but may be provided in the vertical portion 154. The on-off valve 169 may not be a pinch valve, but may be another valve such as a diaphragm valve.

  In this embodiment, the transport container 27 and the closing member 29 are held on the support member 26. However, the present invention is not limited to this, and the transport container 27 and the closing member 29 are not held on the support member 26. Also good.

  -In this embodiment, although the external thread part 28a was formed in the opening part 28 of the container 27 for conveyance, not only this but a liquid crystal is supplied to a syringe from the container for conveyance in which the external thread part is not formed in the opening part. May be. In this case, it is desirable to use a configuration in which the transfer container 27 is stored in the storage members 122 and 131 shown in FIG.

  In the present embodiment, an L-shaped flow path is formed in the support member 26 and the closing member 29 is placed and fixed on the support member 26. However, the present invention is not limited to this. The container 27 may be suspended and supported, and the inside of the transport container 27 and the inside of the syringe 24 may be communicated with each other by a tube or the like as a conduit.

  In the present embodiment, the robot arm 117 is provided with the elastic material having a high friction coefficient at the contact portion between the robot arm 117 and the transfer container 27. However, the present invention is not limited thereto, and the elastic material may not be provided. In particular, as shown in FIGS. 8 and 9, when the transport container 27 is housed in the housing members 122 and 131, the transport container 27 is damaged without providing an elastic material for the robot arm 117. It is prevented.

  In the present embodiment, the robot arm 117 is gripped by sandwiching the transfer container 27. However, the present invention is not limited to this, and if the transfer container 27 can be held and moved, the robot arm 117 may not be a robot arm. Any moving means may be used.

  In the present embodiment, the photoelectric sensor 118 is used as the detection means. However, the present invention is not limited to this, and it is sufficient that the remaining amount in the transport container can be detected. May be detected.

  In the present embodiment, the substrate processing apparatus 1 is configured such that the liquid crystal dropping device 21 can move in the y direction and the x direction. However, the present invention is not limited thereto, and the lower substrate W is configured to be movable in the y direction and the x direction. Also good.

  In the present embodiment, the liquid crystal dropping device for dropping the liquid crystal is embodied, but a liquid agent other than the liquid crystal may be dropped, for example, an apparatus for dropping an adhesive or a solder paste may be realized.

The schematic block diagram of a substrate processing apparatus. The schematic block diagram of a liquid crystal dropping apparatus. The expanded sectional view of a housing | casing. (A) The expanded sectional view of the closure member attached to the container for conveyance, (b) The bottom view of the closure member. The expanded sectional view of a supporting member. The side view of a liquid crystal dropping apparatus. Sectional drawing which shows the container for conveyance accommodated in another closure member and accommodation member. The side view of FIG. 7 which shows a fastening member and a locking member. Sectional drawing which shows the container for conveyance accommodated in another closure member and accommodation member. The partial side view of another liquid crystal dropping apparatus. The schematic block diagram of another liquid crystal dropping apparatus. The expanded sectional view of FIG. 11 which shows another support member.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus, 12 ... Stage, 12a ... Upper surface, 13 ... Gantry, 13a ... Support leg, 13b ... Connection part, 16 ... X-axis base, 21 ... Liquid crystal dropping device, 23 ... Dispenser, 24 ... Syringe, 26, DESCRIPTION OF SYMBOLS 151 ... Support member, 27 ... Container for conveyance, 28 ... Opening part, 28a ... Male screw part, 29, 121 ... Closure member, 31 ... Plunger, 51 ... Housing, 52 ... Nozzle, 53, 160 ... Tube, 54, 162 ... 1st flange part, 55,164 ... 2nd flange part, 56, 57, 170, 171 ... Convex part, 58 ... 1st insertion hole, 59 ... 2nd insertion hole, 60, 161 ... Cavity part, 61,166 ... Cylindrical part, 62,167 ... 1st collar part, 63,168 ... 2nd collar part, 64 ... Drip valve, 71 ... Control device, 85 ... Female thread part, 86 ... Abutting surface, 87 ... Through hole, 89 ... Air supply hole, 90 ... large diameter portion, 91 ... Diameter part, 92 ... Supply valve, 93 ... Ball member, 94 ... Coil spring, 95 ... Holding member, 102a, 156 ... Support surface, 103, 154 ... Vertical part, 104, 155 ... Horizontal part, 107 ... Rod, 111 ... Pillar, 112 ... top plate, 114 ... bolt, 115 ... holding plate, 116 ... holding plate drive unit, 117 ... robot arm, 118 ... photoelectric sensor, 122,131 ... housing member, 123,133 ... bottom, 124 ... fastening member , 125 ... locking member, 126 ... cylindrical part, 127 ... opening window, 132 ... lock part, 134 ... connecting part, 157 ... projection part, 158 ... first flow path, 159 ... second flow path, 163 ... first Housing part, 165... Second housing part, 169.

Claims (15)

A liquid agent dropping device for dropping the liquid agent in the transport container from the nozzle to the object,
A dispenser for dropping the liquid agent supplied from the transport container from the nozzle;
A closing member for closing the opening of the transport container;
A support member fixed to the dispenser, and removably supporting the closing member so that the opening of the transfer container faces downward.
A conduit for supplying the liquid agent from the transport container to the dispenser;
With
The dispenser includes a syringe for storing the liquid agent supplied from the transport container;
A dropping valve that opens and closes a flow path for supplying the liquid agent from the syringe to the nozzle, and a plunger that applies pressure to the liquid crystal stored in the syringe,
The closing member includes a main body portion that closes the opening portion, a fixing unit that fixes the opening portion to the main body portion, a through hole that communicates the inside of the transfer container and the inside of the conduit, and the through hole And a supply valve that opens and closes ,
The fixing means is provided on the other of the bottomed housing member, the fastening member provided on one of the closing member and the housing member, and the other of the closing member and the housing member. And a locking member that locks to the fastening member,
The liquid container dropping device , wherein the transport container is accommodated in the accommodating member in a state of being in contact with the main body and the bottom of the accommodating member . A male screw part is formed on the outer peripheral surface of the opening of the transport container,
The liquid agent dripping device according to claim 1, wherein the fixing means is a female screw portion formed in the closing member and into which the male screw portion is screwed. The housing member is formed into a bottomed cylindrical shape, the cylindrical portion of said housing member, liquid dropping device according to claim 1 or 2, characterized in that the opening window is formed. The said accommodating member is provided with the lock part in which any one of the said fastening member and the said locking member is provided, and the rod-shaped connection part which connects this lock part and the said bottom part. Item 3. The liquid agent dropping device according to Item 1 or 2 . The liquid agent dripping device according to any one of claims 1 to 4 , wherein an air supply hole for supplying an inert gas into the transfer container is formed in the closing member. The through hole is formed to open to a fixed surface to which the opening of the closing member is fixed, and a contact surface that contacts the support member,
The conduit is connected to the through-hole so as to communicate with a vertical portion formed by opening in a support surface that supports the closing member in the support member, and the vertical portion and the inside of the syringe. A horizontal portion formed on the support member,
The closure member is liquid dropping device according to any one of claims 1-5, characterized in that fixed is placed on the support member. A large diameter portion larger in diameter than the through hole is formed on the fixed surface side of the through hole, and a small diameter portion smaller in diameter than the through hole is formed on the contact surface side of the through hole. Formed,
The supply valve includes a ball member disposed on the contact surface side in the through-hole, a coil spring disposed on the fixed surface side with respect to the ball member, and press-fitted into the large-diameter portion. It consists of a pressing member that holds down,
The liquid agent dripping device according to claim 6 , wherein a rod-like rod having a smaller diameter than the small diameter portion is inserted into the vertical portion so as to be movable up and down. A large diameter portion larger in diameter than the through hole is formed on the fixed surface side of the through hole, and a small diameter portion smaller in diameter than the through hole is formed on the contact surface side of the through hole. Formed,
The supply valve includes a ball member disposed on the contact surface side in the through-hole, a coil spring disposed on the fixed surface side with respect to the ball member, and press-fitted into the large-diameter portion. It consists of a pressing member that holds down,
Around the vertical portion of the support surface is formed a protrusion that is inserted into the small diameter portion and pushes up the ball member,
The liquid dripping device according to claim 6 , wherein the support member is provided with an on-off valve that opens and closes the pipe line. The first and second flange portions are accommodated in the support member and extend radially outward at both ends in the axial direction, and annular convex portions are formed on the end surfaces of the first and second flange portions. With tubes,
The horizontal portion is composed of a first flow channel connected to the vertical portion and a second flow channel connected to the syringe,
The support member includes a hollow portion opened to one side surface between the first flow path and the second flow path, and the first flange between the first flow path and the hollow portion. A first accommodating portion that accommodates the first flange, and a second accommodating portion that accommodates the second flange portion between the second flow path and the cavity, and the first accommodating portion. The first flange portion having a smaller diameter than the first flange portion and a larger diameter than the cylindrical portion of the tube extends radially inward between the hollow portion and the hollow portion. Between the second housing portion, a second flange portion having a smaller diameter than the second flange portion and a larger diameter than the cylindrical portion extends radially inward,
The tube is accommodated in a state in which the first flange portion is pressed in the axial direction by the first accommodating portion, and is accommodated in a state in which the second flange portion is pressed in the axial direction by the second accommodating portion. The first flow path and the second flow path are communicated,
The liquid agent dripping device according to claim 8 , wherein the on-off valve for opening and closing the tube is disposed in the hollow portion. The liquid agent dropping device according to any one of claims 6 to 9 , further comprising holding means for holding the closing member on the support member. The holding means is provided on one of the closing member and the support member, and on the other of the closing member and the support member and is locked to the fastening member. It is comprised from a locking member, The liquid agent dripping apparatus of Claim 10 characterized by the above-mentioned. The holding means is screwed into the fixing member such that the fixing member is fixed above the bottom of the transport container supported by the supporting member and the tip is exposed to the supporting member side. The liquid agent dropping device according to claim 10 , comprising a bolt and a pressing member provided at a tip of the bolt and abutting against a bottom portion of the transport container. A housing provided at the lower end of the syringe, and the first and second flange portions that are accommodated in the housing and extend radially outward at both axial ends. A tube having an annular convex portion formed on the end surface thereof,
The housing has a first insertion hole to which the syringe is fixed, a second insertion hole to which the nozzle is fixed, and an opening on one side surface between the first insertion hole and the second insertion hole. And a first flange portion having a smaller diameter than the first flange portion and a larger diameter than the cylindrical portion of the tube is formed between the first insertion hole and the cavity portion. A second flange portion extending radially inward and having a smaller diameter than the second flange portion and a larger diameter than the cylindrical portion is provided between the cavity portion and the second insertion hole in the radial direction. Extended inward,
The tube is accommodated in a state where the first flange portion is axially pressed between the first flange portion and the syringe, and the second flange portion is interposed between the second flange portion and the nozzle. In the state pressed in the axial direction in the housing and communicated with the inside of the syringe and the nozzle,
Liquid dropping device according to any one of claims 1 to 1 2, characterized in that the dropping valve for opening and closing said tube in said cavity is disposed. Detecting means for detecting the remaining amount of the liquid agent in the transport container;
Moving means for moving the transport container;
When it is determined by the output signal from the detection means that the liquid agent has run out in the transport container, the moving means is driven to remove the transport container and the closing member from the support member, and the liquid agent is filled. It is and liquid dropping device according to the closing member the carrying container attached to any one of claims 1 to 1 3, characterized in that a control device for supporting said support member . A liquid dropping device according to any one of claims 1 to 14, a stage on which a substrate on the top surface is fixed, and the bearing member for supporting said liquid dropping device at above the substrate, the liquid dripping And a moving means for moving the apparatus in the horizontal direction relative to the substrate.

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