JP5207950B2 - Magnetic field measurement array sensor - Google Patents

Description

  The present invention relates to a magnetic field measurement array sensor for measuring a magnetic field distribution generated by electromagnetic noise radiated from a measurement object such as an electronic device.

  Currently, when measures against EMI (Electro Magnetic Interference) such as an electronic device that emits electromagnetic noise, a magnetic field existing in the vicinity of the conductor surface of the electronic device is measured. And by calculating | requiring current distribution from the measurement result of a magnetic field, the place which functions as three noise elements (wave source, propagation path, antenna) is visualized as a radiation source, and the noise countermeasure is performed efficiently.

  Conventionally, measurement of the magnetic field distribution in the vicinity of such an electronic device has been performed by attaching a loop sensor to the tip of the arm of the orthogonal robot and mechanically scanning it. However, in the above method, in order to visualize the magnetic field distribution on the entire target surface, it is necessary to scan one point at a time, and therefore, it takes several seconds to measure one point, and it is impossible to grasp the temporal variation of the magnetic field distribution. there were.

  Thus, in recent years, a magnetic field measurement array sensor in which a plurality of loop sensors for detecting a magnetic field are arranged in an array has been proposed in order to quickly measure the magnetic field distribution in the vicinity of the entire surface of the measurement object (see Patent Document 1). FIG. 22 is an explanatory diagram of a conventional magnetic field measurement array sensor. This magnetic field measurement array sensor includes a loop sensor 1501 that detects a magnetic field in the x direction and a plurality of loop sensors 1502 that detect a magnetic field in the y direction and that are orthogonal to the loop sensor 1501 and are arranged in an array. . The loop sensors 1501 and 1502 are connected to output lines 1503 and 1504, respectively, so that signals corresponding to the detected magnetic field can be output. Accordingly, the entire magnetic field distribution can be measured by electrically switching each loop sensor without mechanically scanning the loop sensor.

  In this method, the switching operation of the loop sensor by electrical signals can be performed in a shorter time than mechanical scanning, so the magnetic field distribution near the entire surface of the measurement object can be visualized faster than the method of measuring by mechanical scanning. can do.

JP 2000-97878 A

  However, in the above conventional example, if a loop sensor is downsized to increase its number in order to obtain more detailed information and its number is increased, and the magnetic field distribution in the vicinity of the entire surface of the measurement object is to be measured with high resolution, the amount of data is enormous. Therefore, it takes time to process the data. For this reason, it is difficult to grasp the temporal variation of the magnetic field distribution in the vicinity of the entire surface of the measurement object.

  In order to solve this problem, two types of magnetic field measurement array sensors, one with high resolution and one with low resolution, are prepared, and the magnetic field in the vicinity of the measurement object is partially measured with high resolution and the part with low resolution. It is possible to measure separately. That is, it is possible to measure the magnetic field of the entire measurement object with a magnetic field measurement array sensor with a low resolution, and measure the magnetic field with a magnetic field measurement array sensor with a high resolution only at a location where detailed information is required.

  However, in this method, it is necessary to accurately specify where the high-resolution magnetic field measurement array sensor is arranged with respect to the low-resolution magnetic field measurement array sensor. The data measured using the high-resolution magnetic field measurement array sensor must be incorporated into the data measured using the low-resolution magnetic field measurement array sensor, and this operation is difficult. Therefore, in the measured magnetic field distribution, it is impossible to know in real time the relationship between the part measured with high resolution and the part measured with low resolution, and know the exact behavior of the magnetic field distribution of the measurement object. I can't.

  As an alternative method, when measuring the magnetic field distribution of a certain measurement object, use a small loop sensor only for the part you want to measure with high resolution, and measure the other part with a low resolution as a larger loop sensor. It is conceivable to use a magnetic field measurement array sensor. According to this, since only a necessary portion can be measured with high resolution, the amount of data can be reduced, and the temporal variation of the magnetic field distribution can be grasped. However, since the location to be measured with high resolution differs depending on the measurement object, a magnetic field measurement array sensor corresponding to each measurement object must be prepared individually. In addition, there are cases where the position to be measured with high resolution cannot be grasped unless it is measured once.

  Therefore, the present invention provides a magnetic field measurement array sensor that can detect a magnetic field at an arbitrary position with an arbitrary resolution and can grasp temporal variations in the magnetic field distribution in the vicinity of the entire surface of the measurement object. It is the purpose.

  To achieve the above object, a plurality of output conductors capable of outputting a signal corresponding to the detected magnetic field, a plurality of linear conductors disposed on one end side of the plurality of output conductors, and the plurality of output conductors A ground conductor arranged on the end side, and adjacent linear lines to form a magnetic field detection loop of an arbitrary size with the ground conductor and two output conductors of the plurality of output conductors interposed therebetween A plurality of linear inter-conductor switches for switching the connection / non-connection state between the conductors are provided.

  According to the present invention, since a magnetic field detection loop having an arbitrary size can be formed at an arbitrary position by a switch between linear conductors, a magnetic field distribution in the vicinity of the entire surface of the measurement object can be measured with a high resolution and a low resolution. Measurement can be performed by changing arbitrarily to the part to be measured. Thereby, the amount of data can be reduced, and the temporal variation of the magnetic field distribution in the vicinity of the entire surface of the measurement object can be grasped.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

[First Embodiment]
FIG. 1 is an explanatory diagram showing a schematic configuration of a magnetic field measurement array sensor 101 according to the first embodiment. FIG. 2 is an explanatory diagram showing a schematic configuration of the magnetic field measurement array sensor 101 in which the GND 107 and the resistance element 106 in FIG. 1 are omitted.

  In FIG. 1, a magnetic field measurement array sensor 101 includes a plurality of linear conductors 103, a plurality of input / output conductors 105 as a plurality of output conductors, and a GND 107 as a ground conductor. The plurality of linear conductors 103 are disposed on one end side of the plurality of input / output conductors 105, and the GND 107 is disposed on the other end side of the plurality of input / output conductors 105.

  As shown in FIG. 2, the plurality of linear conductors 103 are two-dimensionally arranged in a lattice shape. More specifically, among the plurality of linear conductors 103, L-shaped linear conductors 103L are arranged at four corners, T-shaped linear conductors 103T are arranged at four sides, and a + -shaped line The linear conductor 103X is disposed on the inner side surrounded by the linear conductor 103L and the linear conductor 103T.

  The input / output conductor 105 is formed in an I-shaped line. One end 105 a of the input / output conductor 105 is electrically connected to the linear conductor 103.

  The GND 107 shown in FIG. 1 is a plate-like conductor, and a plurality of holes 107h are formed in which the other end 105b of each input / output conductor 105 is inserted in a non-contact state.

  The magnetic field measurement array sensor 101 can be switched between a connected state and a non-connected state (on / off state), and includes a plurality of linear inter-conductor switches 104 that can electrically connect two adjacent linear conductors. ing. Further, the magnetic field measurement array sensor 101 includes a plurality of resistance elements 106 that connect the other end 105 b of the input / output conductor 105 and the GND 107.

  With the above configuration, the magnetic field distribution is measured by arranging the plurality of linear conductors 103 of the magnetic field measurement array sensor 101 so as to face the electronic device M that is a measurement object that emits electromagnetic wave noise. Then, by switching the switch 104 between the linear conductors, the GND 107, any two input / output conductors among the plurality of input / output conductors 105, and the linear conductor 103 connected by the switch 104 between the linear conductors are interposed. A magnetic field detection loop having an arbitrary size can be formed. Thereby, the magnetic field at each position can be detected.

  The principle of detecting a magnetic field by forming a magnetic field detection loop by the magnetic field measurement array sensor 101 will be specifically described below.

  FIG. 3 is an explanatory diagram showing a part of the magnetic field measurement array sensor 101. 3 is in a connected state (on state), and two adjacent linear conductors 103 are electrically connected to each other. As a result, a magnetic field detection loop 301 for detecting a magnetic field configured by interposing the GND 107, the two input / output conductors 105, and the two linear conductors 103 is formed. In the magnetic field detection loop 301, when a magnetic flux passing in the vicinity of the electronic device M intersects, an induced current due to inductive coupling is generated. More specifically, the induced current is expressed as follows: GND 107 → resistance element 106 → input / output conductor 105 → linear conductor 103 → interlinear conductor switch 104 → linear conductor 103 → input / output conductor 105 → resistance element 106 → GND 107. Flowing. Since this induced current is proportional to the magnetic field strength (magnetic field), the magnetic field can be detected by the magnetic field detection loop 301.

  A detection signal corresponding to the magnetic field (inductive current) detected in this way can be output from the input / output conductor 105. More specifically, the induced current generated in the magnetic field detection loop 301 is proportional to the voltage drop of the resistance element 106. Therefore, the voltage drop of the two resistance elements 106 or one resistance element 106 interposed in the magnetic field detection loop 301 may be output as a detection signal. Here, the voltage drop of the two resistance elements 106 is a potential difference between the two input / output conductors 105, and the voltage drop of the one resistance element 106 is a potential difference between the input / output conductor 105 and the GND 107.

  Since the two input / output conductors 105 interposed in the magnetic field detection loop 301 are switched in accordance with the switch 104 between the linear conductors turned on, the voltage of the input / output conductor 105 with respect to the GND 107 is measured. Easy. Therefore, the detection signal is output as a potential difference (voltage drop of the resistance element 106) between the other end 105b of the input / output conductor 105 forming the magnetic field detection loop 301 and the GND 107. That is, the voltage at the other end 105b of the input / output conductor 105 with respect to the GND 107 is measured by a detection device (not shown). A detection device (not shown) can be connected to the other end 105 b of the input / output conductor 105 through the hole 107 h of the GND 107. Therefore, since a detection device (not shown) does not disturb the magnetic field that intersects the magnetic field detection loop 301, the magnetic field can be detected with high accuracy.

  Here, the linear inter-conductor switch 104 is a diode element, and the linear inter-conductor switch 104 can be turned on when a DC bias voltage is applied by the DC power source E. If the application of the DC bias voltage is stopped, the switch between linear conductors 104 is disconnected (off state). Since the linear interconductor switch 104 is switched by the DC bias voltage in this manner, the linear interconductor switch 104 does not require a control line that may disturb the magnetic field.

  Since the electromagnetic wave radiated from the electronic device M has a high frequency, the output detection signal is obtained by superimposing an AC voltage due to an induced current on a DC voltage. Therefore, the DC bias voltage has little influence on the magnetic field detection accuracy.

  Further, the wiring for applying the voltage of the DC power supply E may be connected to the other end 105b of the input / output conductor 105 through the hole 107h of the GND 107, and the magnetic field intersecting the magnetic field detection loop 301 is not disturbed. It can be detected with high accuracy.

  Next, an operation for changing the formation position of the magnetic field detection loop of the magnetic field measurement array sensor 101 will be described.

  FIG. 4 is an explanatory diagram showing a magnetic field detection loop when a magnetic field is detected with high resolution.

  First, when detecting a magnetic field with high resolution, the switch between linear conductors 104A is turned on, and the switches between other linear conductors 104 including the linear conductor switches 104B, 104C, 104D are turned off. The linear conductor 103A and the linear conductor 103B become conductive. Another linear conductor 103 is non-conductive. As a result, the magnetic field detection loop 403A capable of detecting the magnetic field with high resolution by the two input / output conductors 105A and 105B and the linear conductors 103A and 103B is formed. That is, the magnetic field detection loop 403A having the minimum size is formed. Then, after detecting the magnetic field, another magnetic field detection loop can be formed at another position by switching the switch between linear conductors 104. For example, it is possible to detect at another position with high resolution by turning on the switch between linear conductors 104C and turning off the other linear conductor switches 104 including the linear conductor switches 104A, 104B, and 104D. A magnetic field detection loop 403B is formed. Thus, by switching the linear inter-conductor switch 104, a magnetic field detection loop can be formed at an arbitrary position. The portion of the linear conductor 103A → the linear conductor switch 104A → the linear conductor 103B interposed in the magnetic field detection loop 403A is as long as the linear conductor switch 104B adjacent to the linear conductor 103B is on. A conductive state is established with the linear conductor 103C connected thereto. As a result, the length of the path varies depending on the number of on-line linear conductor switches 104.

  FIG. 5 is an explanatory diagram showing a magnetic field detection loop when a magnetic field is detected with a lower resolution than the magnetic field detection loop of FIG.

  The linear conductors 103A, 103B, and 103C are turned on by setting the switches between the linear conductors 104A and 104B to the on state and the other linear conductor switches 104C and 104D to the off state. As a result, the GND 107 (see FIG. 1), the magnetic field detection loop 503A that can detect the magnetic field with low resolution by the two input / output conductors 105A and 105C and the linear conductors 103A, 103B, and 103C is formed. That is, a magnetic field detection loop 503A having a larger area than the magnetic field detection loop 403A shown in FIG. 4 is formed. As the loop area increases as in the magnetic field detection loop 503A, the intersecting magnetic flux increases, so a wide range of magnetic fields are detected. As described above, the size of the loop area of the magnetic field detection loop can be changed and the resolution can be changed depending on the control method of the switch between linear conductors 104.

  Then, after detecting the magnetic field, another magnetic field detection loop can be formed at another position by switching the switch between linear conductors 104. For example, by turning on the linear inter-conductor switches 104C and 104D and turning off the other inter-linear conductor switches 104A and 104B, a magnetic field detection loop 503B that can be detected at a low resolution at another position is formed. .

  FIG. 6 is an explanatory diagram showing magnetic field detection loops formed in different directions.

  In the first embodiment, since the plurality of linear conductors 103 are arranged in a lattice shape, it is possible to detect magnetic fields in two directions, the x direction and the y direction perpendicular to the x direction.

  For example, the magnetic field detection loop 403A that can be detected with high resolution is formed by turning on the switch between linear conductors 104A and turning off the other linear conductor switches 104C, 104E, and 104F. As a result, a magnetic field in the y direction is detected.

  Then, after the magnetic field detection, the linear inter-conductor switch 104F is turned on and the other linear inter-conductor switches 104A, 104C, 104E are turned off, thereby forming the magnetic field detection loop 403C orthogonal to the magnetic field detection loop 403A. Is done. Thereby, a magnetic field in the x direction is detected.

  In this way, by switching the on / off state of the switch between linear conductors 104, it is possible to form a magnetic field detection loop with an arbitrary resolution at an arbitrary position and in an arbitrary direction.

  The inter-linear conductor switch 104 is controlled to be in an on state when it is interposed in the magnetic field detection loop, and is controlled to be in an off state for all other switches. As a result, it is possible to reduce a conductor that is not necessary for forming the magnetic field detection loop from being in a non-conductive state with the conductor that forms the magnetic field detection loop, and affecting the detection result at the time of magnetic field detection.

  Then, the linear conductor switch 104 is controlled so that the position of the formed magnetic field detection loop moves with time, and the magnetic field detection loop is scanned across the magnetic field measurement array sensor 101 to measure the magnetic field distribution. be able to.

  If a plurality of detection devices (not shown) are prepared and a plurality of data can be taken simultaneously, a plurality of magnetic field detection loops can be formed simultaneously at different positions. Thus, the measurement speed is increased by a multiple of the number of detection devices (not shown).

  Further, an output selection switch circuit (not shown) may be provided between the resistance element 106 and a detection device (not shown) to measure the output (detection signal) at each resistance element 106. Then, in synchronization with the control of the switch 104 between the linear conductors, if the resistance element 106 that takes in a signal is selected by an output selection switch circuit (not shown), the number of detection devices (not shown) is compared with the resistance element 106. Can be less.

  Here, when the resolution is changed, the magnetic field detection sensitivity changes depending on the size of the magnetic field detection loop. Therefore, a sensitivity correction function may be added to a detection device (not shown).

  Next, it was verified by electromagnetic field simulation that the resolution changes depending on the size of the magnetic field detection loop.

  FIG. 7 is an explanatory diagram showing a model of a magnetic field measurement array sensor in which two adjacent input / output conductors are connected by a linear conductor.

  As shown in FIG. 7, a microstrip line M1 to which a voltage of 1 V is applied from one side and the other is terminated with 50Ω is a measurement object, and a linear conductor 103 is disposed at a position 5 mm away from the microstrip line M1. . The microstrip line M1 has a line width of 3 mm and a distance from GND of 1.6 mm.

  In this model, two input / output conductors 105 out of three input / output conductors 105 are connected by a linear conductor 103. In this model, a resistance element 106 is disposed between each of the three input / output conductors 105 and the GND 107. The linear conductor 103 and the input / output conductor 105 have a diameter of 1 mm, the length of the input / output conductor 105 is 30 mm, and the distance between the input / output conductors 105 is 7.5 mm.

  FIG. 8 is an explanatory diagram showing a model of a magnetic field measurement array sensor in which three adjacent input / output conductors are connected by linear conductors.

  In the model shown in FIG. 8, three input / output conductors 105 are connected by a linear conductor 103. Also in this model, the resistive element 106 is disposed between each of the three input / output conductors 105 and the GND 107.

  That is, the model of FIG. 7 represents the case where the magnetic field detection loop is minimized and the resolution is high, and the model of FIG. 8 is the case where the magnetic field detection loop is enlarged and the resolution is low.

  FIG. 9 is a graph showing frequency characteristics of signals of respective detection results based on models of each magnetic field measurement array sensor.

  An output curve 801 shown in FIG. 9 shows an output result by the model shown in FIG. 7, and an output curve 802 shown in FIG. 9 shows an output result by the model shown in FIG.

  From this result, it is confirmed that the detection signal (output voltage) is larger in the magnetic field detection loop of the model shown in FIG. 8 having a larger loop area than the magnetic field detection loop of the model shown in FIG. It was. That is, it was confirmed that the detection signal (output voltage) increases as the magnetic field detection loop increases. Therefore, it has been confirmed that the resolution is changed by changing the magnetic field detection loop by switching the linear conductor switch 104.

  Next, regarding the validity of the result of measuring the distribution of the magnetic field radiated from the microstrip line when the input / output conductors and linear conductors are arranged two-dimensionally and the resolution is changed by switching the switches between the linear conductors. It was verified by electromagnetic field simulation.

  FIG. 10 is an explanatory diagram showing a model of a magnetic field measurement array sensor in which a total of 182 input / output conductors 105, which are arranged vertically 7 and 26 horizontally, are connected by two linear conductors 103. As shown in FIG. 10, two microstrip lines M2 and M3, which are applied with a voltage of 1V at a frequency of 30 MHz from one side and terminated with 50Ω on the other side, are measured objects, and are separated from the microstrip lines M2 and M3 by 1 mm. The linear conductor 103 was arranged at the position. The two microstrip lines M2 and M3 have a line width of 0.5 mm and a distance from GND of 1.6 mm.

  A resistance element 106 is disposed between each input / output conductor 105 and the GND 107. The linear conductor 103 and the input / output conductor 105 have a diameter of 0.15 mm, the length of the input / output conductor 105 is 30 mm, and the distance between adjacent input / output conductors 105 is 1 mm. In FIG. 10, the resistor element 106 and the GND 107 are not shown for simplicity.

  FIG. 11 is a diagram showing the positional relationship between the magnetic field measurement array sensor of FIG. 10 and the microstrip lines M2 and M3.

  FIG. 12 is an explanatory diagram showing a model of a magnetic field measurement array sensor in which a total of 182 input / output conductors 105 arranged in a vertical direction and 26 in a horizontal direction are connected by two or three linear conductors 103, respectively. is there. A part of the linear conductors 103a is lengthened and the number of input / output conductors 105 to be connected is three, so that the formed magnetic field detection loop is enlarged.

  That is, the model shown in FIG. 10 corresponds to a state where the resolution is increased, and the model shown in FIG. 12 corresponds to a state where the resolution is decreased.

  The model shown in FIG. 12 considers the range to be measured in detail as microstrip lines M2 and M3, and two input / output conductors 105 arranged around the microstrip lines M2 and M3 are connected by two linear conductors 103. . The other input / output conductors 105 arranged in a range far from the microstrip lines M2 and M3 are connected by three linear conductors 103a, and the magnetic field detection loop is made larger than when two are connected.

  The induced current generated in the linear conductor 103 and the input / output conductor 105 by the magnetic field generated from the microstrips M2 and M3 causes a potential difference in the resistance element 107 of each input / output conductor 105. At this time, a potential difference was detected by the left resistance element 107 among the resistance elements 107 of the two or three input / output conductors 105 connected by the linear conductor 103. Detection was performed simultaneously for a plurality of magnetic field detection loops.

  FIG. 13 is a diagram showing the positional relationship between the magnetic field measurement array sensor of FIG. 12 and the microstrip lines M2 and M3.

  FIG. 14 is a graph showing the magnetic field distribution obtained by plotting the detection result of the magnetic field measurement array sensor model of FIG. 10 in a two-dimensional manner. Similarly, FIG. 15 is a graph showing the magnetic field distribution obtained by plotting the detection result of the magnetic field measurement array sensor model of FIG. 12 in a two-dimensional manner. The directions of the graphs in FIGS. 14 and 15 are the same as those in FIGS. 11 and 13.

  As a result of the comparison between the magnetic field distribution detected by the model with the high resolution shown in FIG. 14 and the magnetic field distribution detected by the model with the low resolution shown in FIG. 15, the microstrip line M2 which is the part to be measured in detail , It was confirmed that the magnetic field distribution near M3 was almost equal.

  The magnetic field distribution in the range where three input / output conductors 105 are connected by the linear conductor 103 in FIG. 15 has a higher detection result than the magnetic field distribution in FIG. This is because the magnetic field detection loop is enlarged as a result of connecting three input / output conductors 105 with the linear conductor 103 in order to reduce the resolution. This effect can be reduced by using the sensitivity correction function described above.

  As described above, by increasing the magnetic field detection loop in the range other than the portion to be measured in detail and reducing the resolution of the range, the magnetic field distribution of the portion to be measured in detail can be obtained with high resolution and the amount of data can be reduced. It was confirmed that it was possible.

  As described above, in the first embodiment, a magnetic field detection loop having an arbitrary size can be formed at an arbitrary position by switching the linear interconductor switch 104. Therefore, it is possible to arbitrarily change the magnetic field distribution in the vicinity of the entire surface of the electronic device M into a portion that measures at a high resolution and a portion that measures at a low resolution.

  And, by measuring the magnetic field with low resolution for the places where the generation of electromagnetic waves is low and measuring the magnetic fields with high resolution for the places where the electromagnetic waves are generated, the amount of data is larger than when measuring the whole with high resolution. Can be reduced. Thereby, the temporal variation of the magnetic field distribution in the vicinity of the entire surface of the electronic device M can be grasped.

[Second Embodiment]
Next, the magnetic field measurement array sensor of the second embodiment will be described. Note that in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 16 is an explanatory diagram showing a schematic configuration of the magnetic field measurement array sensor 1101 according to the second embodiment. The ground conductor GND and the resistance element have the same configuration as in the first embodiment and are not shown.

  In the magnetic field measurement array sensor 101 of the first embodiment, the case where the one end 105a of the input / output conductor 105 is directly connected to the linear conductor 103 has been described. In the second embodiment, the magnetic field measurement array sensor 1101 includes a plurality of linear conductor-input / output conductor switches 901 as inter-conductor switches capable of disconnecting the connection state between the input / output conductors 105 and the linear conductors 103. Yes.

  The linear conductor-input / output conductor switch 901 is a switch that can be switched between a connected state and a disconnected state (on / off state). The linear conductor-input / output conductor switch 901 is disposed between the one end 105 a of the input / output conductor 105 and the linear conductor 103. The input / output conductor 105 is connected to the linear conductor 103 via the linear conductor-input / output conductor switch 901. By turning on the linear conductor-input / output conductor switch 901, the input / output conductor 105 and the linear conductor 103 are brought into conduction, and by turning off the linear conductor-input / output conductor switch 901. The input / output conductor 105 and the linear conductor 103 are in a non-conducting state. Therefore, the input / output conductor 105 unnecessary for the magnetic field detection loop can be separated from the conductor forming the magnetic field detection loop at an arbitrary moment.

  FIG. 17 is an explanatory diagram showing a part of the magnetic field measurement array sensor 1101 of the second embodiment. When the line conductor switches 104A and 104B shown in FIG. 17 are turned on and the other line conductor switches 104 are turned off, the magnetic field detection loop 503A including the two input / output conductors 105A and 105C is formed. It is formed. At this time, the black-outed input / output conductor 105B is an unnecessary conductor for the magnetic field detection loop 503A.

  Therefore, by turning off the linear conductor-input / output conductor switch 901A, the unnecessary input / output conductor 105B is electrically disconnected from the magnetic field detection loop 503A, and the influence on measurement can be reduced. .

  Similarly, a magnetic field detection loop 503B having two input / output conductors 105D and 105F is formed by turning on the switch between linear conductors 104C and 104D and turning off the other switch between linear conductors 104. Is done. At this time, the black-outed input / output conductor 105E is an unnecessary conductor for the magnetic field detection loop 503B.

  Therefore, by turning off the linear conductor-input / output conductor switch 901B, the unnecessary input / output conductor 105E is electrically disconnected from the magnetic field detection loop 503B, and the influence on measurement can be reduced. .

  Here, the linear conductor-input / output conductor switch 901 is a diode element, and applies a DC bias voltage between the two input / output conductors 105 constituting the magnetic field detection loop in the same manner as the linear conductor switch 104. It can be turned on.

[Third Embodiment]
Next, a magnetic field measurement array sensor according to a third embodiment will be described. Note that in the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  Here, FIG. 18 is an explanatory view showing a part of the magnetic field measurement array sensor of the first embodiment. When magnetic field detection loops 503A and 503B are formed as shown in FIG. 18, linear conductors are formed. A portion 103 filled with black is a conductor unnecessary for the loop.

  FIG. 19 is an explanatory diagram showing a schematic configuration of the magnetic field measurement array sensor 2101 according to the third embodiment. The ground conductor GND and the resistance element have the same configuration as in the first embodiment and are not shown.

  In the third embodiment, the magnetic field measurement array sensor 2101 has a configuration in which one linear conductor 2103 and two inter-linear conductor switches 2104 are arranged between two adjacent input / output conductors 105. The linear conductor 2103 is formed in an I-shaped linear shape. The linear conductor 2103 is connected to the adjacent input / output conductor 105 via the inter-linear conductor switch 2104. Accordingly, the linear conductor 2103 at an arbitrary position unnecessary for the magnetic field detection loop can be disconnected from the magnetic field detection loop at an arbitrary moment.

  FIG. 20 is an explanatory diagram showing a part of the magnetic field measurement array sensor 2101 of the third embodiment. By turning off the inter-linear conductor switch 2104, the unnecessary linear conductor 2103 painted black can be electrically disconnected from the magnetic field detection loop, and the influence on measurement can be reduced.

  In addition, if it arrange | positions together with the linear conductor-input / output conductor switch 901 of the said 2nd Embodiment, a pure loop without an unnecessary conductor can be comprised in a magnetic field detection loop, and a measurement precision improves further.

[Fourth Embodiment]
Next, a magnetic field measurement array sensor according to a fourth embodiment will be described. Note that in the fourth embodiment, identical symbols are assigned to configurations identical to those in the first embodiment and descriptions thereof are omitted.

  FIG. 21 is an explanatory diagram showing a schematic configuration of a magnetic field measurement array sensor 3101 according to the fourth embodiment.

  In the first to third embodiments, the case where the input / output conductor and GND are connected by the resistance element has been described. However, in the fourth embodiment, the magnetic field measurement array sensor 3101 is switched instead of the resistance element. An input / output conductor-GND switch 3106 is provided as a switch.

  The input / output conductor-GND switch 3106 has a resistance element and a short-circuit line, and one of the resistance element and the short-circuit line is connected to the input / output conductor 105 so that one resistance element is interposed in the magnetic field detection loop. The terminal 105b and the GND 107 are configured to be electrically connectable.

  When forming the magnetic field detection loop, one of the two input / output conductor-GND switches 3106 forming the magnetic field detection loop is used as a resistance element, and the other is switched to a short-circuit line. Thereby, the induced current due to the magnetic field detected by the magnetic field detection loop can be detected as a voltage by this resistance element.

  Therefore, only one resistance element is interposed in the magnetic field detection loop, so that the detected voltage is doubled and the detection sensitivity is improved as compared with the case where two resistance elements are interposed.

  By controlling the input / output conductor-GND switch 3106 in synchronization with the control of the linear conductor switch 104, a magnetic field detection loop of an arbitrary size is provided at an arbitrary position where only one resistance element is interposed. Can be configured.

  The input / output conductor-GND switch 3106 may be configured to be switched by applying a DC potential difference.

  As mentioned above, although this invention was demonstrated based on the said 1st-4th embodiment, this invention is not limited to this.

  In the first to fourth embodiments, the case where the linear conductors 103 and 2103 are arranged in a two-dimensional lattice shape has been described. However, the present invention is not limited to this. In other words, the lattice shape allows the magnetic field detection in the x direction and the y direction to be performed, but an array capable of detecting the magnetic field only in one of the directions may be used. For example, the linear conductors may be arranged in a straight line.

  In the first to fourth embodiments, the case where the linear inter-conductor switches 104 and 2104 are diode elements has been described. However, the present invention is not limited to this, and the linear inter-conductor switches are electromagnetic switches. Also good. In the second embodiment, the case where the linear conductor-input / output conductor switch 901 is a diode element has been described. However, the present invention is not limited to this, and the linear conductor-input / output conductor switch is an electromagnetic switch. It may be.

It is explanatory drawing which shows schematic structure of the magnetic field measurement array sensor which concerns on 1st Embodiment. It is explanatory drawing which shows schematic structure of the magnetic field measurement array sensor which abbreviate | omitted illustration of GND and a resistive element of FIG. It is explanatory drawing which shows a part of magnetic field measurement array sensor. It is explanatory drawing which shows the magnetic field detection loop in the case of detecting a magnetic field with high resolution. It is explanatory drawing which shows the magnetic field detection loop in the case of detecting a magnetic field with lower resolution than the magnetic field detection loop of FIG. It is explanatory drawing which shows the magnetic field detection loop formed in a different direction. It is explanatory drawing which shows the model of the magnetic field measurement array sensor which connected two adjacent input-output conductors with the linear conductor. It is explanatory drawing which shows the model of the magnetic field measurement array sensor which connected three adjacent input-output conductors with the linear conductor. It is a graph which shows the frequency characteristic of the signal of each detection result by the model of each magnetic field measurement array sensor. It is explanatory drawing which shows the model of the magnetic field measurement array sensor which connected the 182 input / output conductors 105 by the linear conductor 103 2 each. It is a figure which shows the arrangement | positioning relationship of the model of the magnetic field measurement array sensor shown in FIG. 10, and microstrip line M2, M3. It is explanatory drawing which shows the model of the magnetic field measurement array sensor which connected the 182 input-output conductors 105 by the linear conductor 103 2 or 3 each. It is a figure which shows the arrangement | positioning relationship of the model of the magnetic field measurement array sensor shown in FIG. 12, and microstrip line M2, M3. It is a graph which shows the magnetic field distribution obtained from the detection result by the model of the magnetic field measurement array sensor shown in FIG. It is a graph which shows the magnetic field distribution obtained from the detection result by the model of the magnetic field measurement array sensor shown in FIG. It is explanatory drawing which shows schematic structure of the magnetic field measurement array sensor which concerns on 2nd Embodiment. It is explanatory drawing which shows a part of magnetic field measurement array sensor of 2nd Embodiment. It is explanatory drawing which shows a part of magnetic field measurement array sensor of 1st Embodiment. It is explanatory drawing which shows schematic structure of the magnetic field measurement array sensor which concerns on 3rd Embodiment. It is explanatory drawing which shows a part of magnetic field measurement array sensor of 3rd Embodiment. It is explanatory drawing which shows schematic structure of the magnetic field measurement array sensor which concerns on 4th Embodiment. It is explanatory drawing of the conventional magnetic field measurement array sensor.

Explanation of symbols

101, 1101, 2101, 3101 Magnetic field measurement array sensors 103, 2103 Linear conductors 104, 2104 Switch between linear conductors 105 Input / output conductors (output conductors)
106 resistance element 107 GND (ground conductor)
901 Switch between linear conductor and input / output conductor (switch between conductors)
3106 Input / output conductor-GND switch (changeover switch)

Claims (7)

A plurality of output conductors capable of outputting a signal corresponding to the detected magnetic field;
A plurality of linear conductors disposed on one end side of the plurality of output conductors;
A ground conductor disposed on the other end side of the plurality of output conductors,
A linear conductor that switches between connection / disconnection states of adjacent linear conductors so as to form a magnetic field detection loop of an arbitrary size with the ground conductor and two output conductors of the plurality of output conductors interposed therebetween With multiple switches between
Magnetic field measurement array sensor characterized by the above. A resistance element connected to the other end of the output conductor and the ground conductor;
The signal is output as a potential difference between the other end of the output conductor forming the magnetic field detection loop and the ground conductor.
The magnetic field measurement array sensor according to claim 1. One of the resistance element and the short-circuit line is connected to the other end of the output conductor and the ground conductor so as to have a resistance element and a short-circuit line, and one resistance element is interposed in the magnetic field detection loop. It has a connectable changeover switch,
The signal is output as a potential difference between the other end of the output conductor to which the resistance element is connected and the ground conductor among the two output conductors forming the magnetic field detection loop.
The magnetic field measurement array sensor according to claim 1. The linear inter-conductor switch is a diode element and is connected by application of a DC bias voltage.
The magnetic field measurement array sensor according to claim 1, wherein the magnetic field measurement array sensor is a magnetic field measurement array sensor. An interconductor switch capable of disconnecting the connection state between the output conductor and the linear conductor;
The magnetic field measurement array sensor according to claim 1, wherein the magnetic field measurement array sensor is a magnetic field measurement array sensor. The linear conductor is disposed between two adjacent output conductors, and is connected to the adjacent output conductor via the switch between the linear conductors.
The magnetic field measurement array sensor according to claim 1, wherein the magnetic field measurement array sensor is a magnetic field measurement array sensor. The plurality of linear conductors are arranged in a lattice shape,
The magnetic field measurement array sensor according to claim 1, wherein the magnetic field measurement array sensor is a magnetic field measurement array sensor.

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