JP5216725B2 - Substrate processing apparatus and substrate processing method - Google Patents

Description

  The present invention relates to a substrate processing apparatus and a substrate processing method, and more particularly, a substrate processing apparatus and a substrate processing capable of reducing warpage deformation and the like of a disk substrate such as a compact disk and a DVD. Regarding the method.

  A disk substrate such as a compact disk is formed by injection molding. Since injection molding is obtained by filling the mold cavity with heat-melted resin, it is in an uncured state immediately after removal from the mold and until it is cured during subsequent processing. Deformation such as warpage is likely to occur.

  Patent Document 1 discloses a substrate processing apparatus that prevents a disk substrate from warping. The apparatus includes a disk cradle that supports the central portion of the disk substrate, a rotation drive device that rotates the disk cradle, and a gas blowing unit that ejects gas from the lower surface side of the disk cradle. Yes. In this substrate processing apparatus, curing is promoted while preventing warpage by the centrifugal force of the disk substrate generated by driving the rotary drive device and the cooling air blown from the gas blowing means.

Japanese Patent No. 3593660

  However, in the substrate processing apparatus described in Patent Document 1, since the rotation driving device and the gas blowing means are independent from each other, the two systems of the rotation driving device and the gas blowing means are driven. An apparatus is required, and there is an inconvenience that the apparatus is increased in size and energy is wasted.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to effectively use a drive device for rotating a disk substrate to achieve a simplified structure and to warp the disk substrate. It is an object of the present invention to provide a substrate processing apparatus and a substrate processing method capable of promoting curing of the disk while preventing the above-described problem.

  In order to achieve the above object, the present invention provides a substrate processing apparatus for curing a disk substrate before curing while rotating the disk substrate in a plane while reducing warpage of the disk substrate. Supporting means for supporting, driving means for applying a rotational force to the supporting means, and airflow generating means connected to the output shaft of the driving means and attracting air to the surface of the disk substrate by rotation of the output shaft. It has the structure of preparing.

  In the present invention, it is preferable to further include a cylindrical air guide means for securing the air passage.

  Moreover, the said air guide means is good to take the structure by which the funnel part which curves outward is provided in the entrance of air.

  Further, the air guide means may be constituted by a cylindrical case whose both ends are closed, an exhaust hole provided in a part of the cylindrical case, and an intake hole for drawing air into the cylindrical case. .

  The airflow generating means is constituted by a rotating blade, and the rotating blade rotates integrally with the supporting means.

  Furthermore, the present invention reduces warpage of the disk substrate using a substrate processing apparatus comprising a support means for supporting the central portion of the disk substrate before curing and a drive means for applying a rotational force to the support means. A substrate processing method for curing while providing an airflow generating means connected to the output shaft of the driving means to form an airflow, and rotating the output shaft simultaneously rotates the disk substrate and the airflow generating means. Thus, a technique is adopted in which air is applied to the disk substrate and the disk substrate is cured while being cooled.

According to the present invention, since the airflow generating means is connected to the output shaft of the driving means for rotating the disk substrate, the centrifugal force is applied to the disk substrate to prevent or reduce the warpage of the disk substrate, and at the same time The disk substrate is cooled by the flow of air drawn toward the disk to accelerate curing. Therefore, since the drive device which conventionally required two systems of the rotation drive device and the gas blowing means can be covered by one system, the problem that the device becomes large can be solved and only the rotation of the disk substrate can be solved. The energy used for the disk can also be used for cooling the disk substrate, and the inconvenience of wasting energy can be solved.
Further, by providing the air guiding means, it is possible to secure a passage of air as cooling air and ensure that the air hits the disk substrate.
Further, when a funnel portion is provided on the air inlet side of the air guiding means, the air intake resistance is reduced, the efficiency of air suction can be increased, and air is effectively introduced into the air guiding means. The disk substrate can be cooled.
Further, in the air guiding means provided with the exhaust hole and the intake hole in the cylindrical case, it is possible to avoid an increase in the temperature of the air in the cylindrical case, and the inner surface shape of the cylindrical case is a curved surface, even if it is a substantially closed structure. By adopting the shape or the like, it is possible to generate a swirling flow or a vortex flow and promote the air flow to further promote the hardening of the disk substrate.
Furthermore, by constructing the airflow generating means with rotating blades, air can be drawn in at the same rotational speed as that of the disk substrate.

The front view of the substrate processing apparatus which concerns on embodiment. Plan view of FIG. The front view which shows the modification of a substrate processing apparatus. The schematic diagram which shows another modification.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  1 and 2, the substrate processing apparatus 10 rotates a compact disk D (hereinafter simply referred to as “disk D”) as a disk substrate before curing obtained by injection molding in a plane, and It is comprised as an apparatus which hardens | cures, reducing the curvature of D. The substrate processing apparatus 10 is connected to a support means 11 for supporting the central portion of the disk D, a drive means 13 for applying a rotational force to the support means 11, and an output shaft 23 of the drive means 13 and the output shaft. An airflow generating means 15 for attracting air to the surface of the disk D by rotation of the disk 23 and a cylindrical airflow guiding means 17 for securing a passage of air toward the surface of the disk D are provided.

  The support means 11 is located in a hole D1 provided in the central portion of the disk D, and moves in a direction away from each other by a biasing means such as a spring (not shown). A support 21 that supports the chuck 20 in a movable manner and supports the central region of the disk D from below in FIG.

  The driving means 13 includes a motor M, and a support means 11 is connected to an output shaft 23 of the motor M. The driving means 13 is held at the center inside the air guiding means 17 through a substantially cross-shaped frame F.

  The air flow generating means 15 is constituted by a rotating blade 27 fixed to the outer periphery of the support 21 and is provided so as to be able to rotate integrally with the disk D by the rotation of the output shaft 23. Although there are no particular limitations on the rotary blades 27, three blades are used in the present embodiment and are arranged at intervals of 120 degrees in the circumferential direction of the output shaft 23, but the number of rotary blades 27 is There is no limit. Further, the rotary blade 27 is provided such that the outer peripheral edge when the output shaft 23 is the center is positioned outside the outer peripheral edge of the disk D in a plan view, but is larger than the outer peripheral edge of the disk D. You may provide in the magnitude | size located inside.

  The air guide means 17 is constituted by a cylindrical member 30 having open ends 30A and 30B at the upper and lower ends. When the rotary blade 27 rotates, the tubular member 30 draws outside air from the upper opening 30A and discharges air from the lower opening 30B to the outside. Thereby, as indicated by an arrow GA in FIG. 1, a passage of air as cooling air is secured so that the air reliably hits the disk substrate D, and the disk D is cooled to accelerate hardening. It is like that. A funnel portion 30 </ b> C is provided in the opening 30 </ b> A at the top of the cylindrical member 30. As a result, the air intake resistance is reduced, the air intake efficiency can be increased, and the disk substrate D can be cooled by effectively introducing air into the air guide means.

  Next, the effect | action which processes the disk D with the substrate processing apparatus 10 which concerns on this embodiment is demonstrated.

  The uncured disc D that is taken out by opening the mold of the injection molding machine is delivered to the support 21 of the substrate processing apparatus 10 by a conveying means (not shown) having an appropriate holding mechanism, and is inside the hole D1 of the disc D. The chuck 20 enters and is held so as not to rotate with respect to the support 21. At this time, since the disk substrate D is in a state before being cured, as shown by a two-dot chain line in FIG. 1, the outer peripheral edge is relatively hung down by its own weight. Then, by driving the motor M of the driving means 13 and rotating the disk D in the direction of the arrow R at a predetermined rotational speed (for example, 4000 rpm) via the support member 21, a centrifugal force f is applied to the disk D, The disk D is maintained in a flat posture.

  Simultaneously with the rotation of the disk D, the rotating blades 27 fixed to the support 21 rotate integrally, thereby drawing air from the upper opening 30A of the cylindrical member 30 and releasing it from the lower opening 30B to the outside. An air current is generated. As a result, the air drawn into the cylindrical member 30 is blown against the upper surface of the disk D to perform cooling. Therefore, the disk D is hardened while being prevented from warping due to its own weight due to centrifugal force.

Therefore, according to such an embodiment, the airflow for cooling the disk can be generated by simultaneously rotating the rotating blades 27 using the driving means 13 that rotates the disk D, and the air is individually supplied. It is possible to provide a substrate processing apparatus that has a simpler structure than a conventional apparatus that sprays on a disk and that does not consume useless energy.
Further, since a passage of air as cooling air can be secured inside the cylindrical member 30 constituting the air guiding means 17, air can be reliably applied to the upper surface of the disk D.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

  For example, in the above embodiment, the cylindrical member 30 of the air guide means 17 is an open top and bottom type, but is not limited to this. For example, as shown in FIG. 3, a cylindrical case 43 whose lower side is closed by a base 40, a lid 41 is detachably provided on the upper side and both ends are closed, and the cylindrical case 43 The exhaust hole 45 formed on the outer periphery of the lower portion and the intake hole 46 for drawing air into the cylindrical case 43 can be configured close to a closed type. In this case, the base 40 and the lid body 41 are formed in a dome shape having a substantially m-shaped cross-sectional view, so that it becomes easy to form a swirl flow in the cylindrical case 43 when the rotary blade rotates. In addition, air in the cylindrical case 43 is exhausted to the outside through the exhaust hole 45, while outside air is introduced from the intake hole 46 and blown against the upper surface of the disk D.

  Moreover, in the said embodiment, although the compact disk D was made into the process target, various disk substrates, such as DVD, can be made into a process target. In this case, it is sufficient to prevent warping by taking measures such as changing the rotational speed in accordance with the diameter of the disk.

  Furthermore, the substrate processing apparatus of the present invention may be a substrate processing apparatus that applies spin coating to a disk substrate. In this case, the object to be treated is a disk substrate after curing, and the disk substrate is rotated in a plane to perform centrifugation (stretching) of the coating agent, and to accelerate the curing of the coating agent by the airflow generating means. it can.

  In addition to the rotating blades 27, a compressor or the like can be employed as the airflow generation means. In this case, air may be blown onto the disk substrate by driving a compressor or the like by the output of the driving means for rotating the disk substrate.

  Further, an air filter can be provided in the opening 30A of the cylindrical member in FIG. 1 or the intake hole 46 of the cylindrical case 43 in FIG. 3 to add a function of removing dust or the like contained in the air.

  Further, the disk processing device 10 shown in FIG.

  Further, as schematically shown in FIG. 4, an output direction conversion means DC that can be configured by appropriately combining gears, pulleys, sprockets, etc., and an output transmission means OT such as a shaft, belt, chain, etc., are appropriately combined. The rotational force of the output shaft 23 of the motor M may be transmitted to the rotary blade 27.

DESCRIPTION OF SYMBOLS 10 Substrate processing apparatus 11 Support means 13 Drive means 15 Airflow generation means 17 Air guide means 23 Output shaft 27 Rotating blade 30C Funnel part 43 Cylindrical case 45 Exhaust hole 46 Intake hole D Compact disc (disc substrate)

Claims (5)

A substrate processing apparatus that cures while reducing warpage of the disk substrate by rotating the disk substrate before curing in a plane,
A support means for supporting a central portion of the disk substrate;
Drive means for applying a rotational force to the support means;
An apparatus for processing a substrate, comprising: an airflow generating means coupled to the output shaft of the drive means and for attracting air to the surface of the disk substrate by rotation of the output shaft.   2. The substrate processing apparatus according to claim 1, further comprising a cylindrical air guide means for securing the air passage.   3. The substrate processing apparatus according to claim 2, wherein the air guide means is provided with a funnel portion that warps outward at an air inlet.   The air guide means includes a cylindrical case whose both ends are closed, an exhaust hole provided in a part of the cylindrical case, and an intake hole that draws air into the cylindrical case. The substrate processing apparatus according to claim 2. A substrate processing method for curing while reducing warpage of the disk substrate using a substrate processing apparatus comprising a support means for supporting the central portion of the disk substrate before curing and a driving means for applying a rotational force to the support means. Because
An airflow generating means connected to the output shaft of the driving means to form an airflow;
A substrate processing method comprising: simultaneously rotating the disk substrate and the air flow generating means by rotating the output shaft to attract air to the disk substrate and curing the disk substrate while cooling.

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