JP5217665B2 - Liquid stain prevention jig and liquid filling method - Google Patents

Description

  The present invention relates to a liquid stain prevention jig and a liquid filling method. More specifically, the present invention relates to a liquid stain prevention jig and a liquid filling method for preventing liquid dripping from a filling nozzle from adhering to an end face of a filling container after filling.

  Conventionally, in a semiconductor manufacturing process, various chemical materials such as a resist composition, a protective film composition, and an insulating film composition have been used (see, for example, Patent Document 1). This chemical material is generally filled in a filling container such as a bag-in-bottle or a bag-in can and stored, transported, or the like.

Japanese Patent Laid-Open No. 10-260309

  As said filling container, the canister can (bag in can) 200 shown in FIG. 3 can be illustrated, for example. The canister 200 is connected to a columnar container body 210 having a filling port 213 formed on one end face 212 in the longitudinal direction, and to the one end face 212 side of the container body 210, and the outer diameter is the same as the outer diameter of the container body 210. A cylindrical protective wall 211 having the same central axis in the longitudinal direction as the central axis in the longitudinal direction of the container main body 210 is provided. FIG. 3 shows a part of the protective wall 211 cut away.

  The canister 200 has a filling nozzle inserted into the filling port 213, and after the canister 200 has been filled with a predetermined amount of liquid, the filling nozzle is pulled out from the filling port 213 (canister can 200), so that Filling with a liquid such as a chemical material is completed. When the canister 200 is filled with the liquid in such a procedure, when the filling nozzle is pulled out after filling with the liquid, the liquid drips from the filling nozzle (so-called “liquid splash” occurs), as shown in FIG. In addition, the liquid 215 may adhere to the one end surface 212 of the canister 200.

  Therefore, a tray device (for example, the tray device 30 shown in FIG. 5) is used for the purpose of preventing the liquid from adhering to the end surface of the filling container. In this saucer device, immediately after the filling nozzle is extracted, a saucer (for example, the saucer device 31 shown in FIG. 5) is disposed between the filling nozzle and the filling container to receive the liquid dripping from the filling nozzle. However, even when such a tray apparatus is used, it has been difficult to sufficiently prevent liquid splashing.

  Therefore, after the filling, an operation of wiping off the liquid adhering to the end face is performed. For example, it has been difficult to sufficiently wipe off the liquid that has entered the gap between the protective wall 211 and the container main body 210. The liquid that could not be sufficiently wiped off was one of the factors that deteriorated the appearance of the canister can. Moreover, the operation of wiping off the liquid is time-consuming and has a problem that productivity is deteriorated.

  The present invention has been made to solve the above-described problems of the prior art, and a liquid for preventing the liquid dripping from the filling nozzle from adhering to the end face of the filling container after filling. A dirt prevention jig and a liquid filling method are provided.

  The present invention provides the following liquid stain prevention jig and liquid filling method.

[1] A filling container comprising a columnar container body having a filling port formed on one end face in the longitudinal direction is used so as to cover the one end face. A bowl-shaped jig body having a through-hole formed in a portion corresponding to the mouth, the jig body disposed on the jig body, abutting against a part of the filling container, and the jig body to the filling container A substantially U-shaped locking portion that is detachably locked, and the filling container is connected to the one end face side of the container body, and has an outer diameter that is the same as the outer diameter of the container body. And a cylindrical protective wall whose longitudinal central axis coincides with the longitudinal central axis of the container body, the jig body being inserted inside the protective wall, and stop portion, the liquid contamination preventing jig that abolish engaging the jig body in contact with the open end of the protective wall.

[2] The liquid stain prevention jig according to [1], wherein the bowl-shaped jig body has a depth that increases toward the outside from the through hole.

[3] the locking portion of the substantially U-shaped, liquid-fouling preventing jig according to the end portion of the hand is fixed to the bottom surface [1] or [2].

[ 4 ] The liquid according to any one of [1] to [ 3 ], so as to cover the one end face of a filling container including a columnar container body having a filling port formed on one end face in the longitudinal direction. A liquid filling method comprising: a step of attaching a dirt prevention jig; and a step of filling a liquid into the filling container equipped with the liquid dirt prevention jig.

[ 5 ] The filling container is connected to the one end face side of the container body, and has an outer diameter that is the same as the outer diameter of the container body, and a central axis in the longitudinal direction is the center in the longitudinal direction of the container body. A cylindrical protective wall coinciding with the shaft; and the jig body is inserted inside the protective wall, and the locking portion abuts against an opening end of the protective wall to fix the jig. The liquid filling method according to [ 4 ], wherein the tool body is locked.

[ 6 ] The liquid filling method according to [ 4 ] or [ 5 ], wherein the filling port and the liquid contamination preventing jig are not in contact with each other.

[ 7 ] The liquid filling method according to [ 5 ] or [ 6 ], wherein an inner surface of the protective wall and an outer surface of the liquid contamination prevention jig are close to each other.

  The liquid contamination preventing jig of the present invention has an effect that it is possible to prevent the liquid dripping from the filling nozzle from being attached to the end face of the filling container after filling.

  The liquid filling method of the present invention has an effect that the liquid dripping from the filling nozzle after filling can be prevented from adhering to the end face of the filling container.

  Hereinafter, the best mode for carrying out the present invention will be described, but the present invention is not limited to the following embodiment. That is, it is understood that modifications and improvements as appropriate to the following embodiments are also within the scope of the present invention based on ordinary knowledge of those skilled in the art without departing from the spirit of the present invention. Should be.

[1] Liquid stain prevention jig:
One embodiment of the liquid contamination preventing jig of the present invention is used by being arranged so as to cover one end surface of a filling container including a columnar container body in which a filling port is formed on one end surface in the longitudinal direction. A jig-shaped jig body having a through-hole formed in a portion corresponding to the filling port on the bottom surface thereof, and a jig body disposed on the jig body and contacting a part of the filling container. And a substantially U-shaped locking part that detachably locks the container to the filling container. By using such a liquid contamination prevention jig, it is possible to prevent the liquid dripping from the filling nozzle from being attached to the end face of the filling container after filling.

[1-1] Jig body:
The jig main body provided in the liquid contamination prevention jig of the present embodiment has a bowl shape in which a through hole is formed in a portion of the bottom surface corresponding to the filling port. Since the jig body can catch the liquid dripping from the filling nozzle after filling, it is possible to prevent the liquid from adhering to one end surface of the filling container.

  The shape of the jig body can be appropriately selected according to the filling container, and can be, for example, a cylindrical shape, an elliptical cylindrical shape, a rectangular cylindrical shape, a polygonal cylindrical shape, or the like. Among these, since it is easy to produce, a cylindrical shape as shown in FIG. 1 is preferable. Moreover, since many filling containers are columnar, it is preferable that it is cylindrical according to the shape of the filling container. FIG. 1 is a perspective view showing the liquid contamination preventing jig of the present embodiment.

  The bottom surface of the jig body may be planar, or the shape of the bottom surface in the cross section including the central axis in the longitudinal direction of the jig body is a C-shape, that is, the jig body (liquid contamination prevention jig ) May be deeper from the through hole toward the outside. As described above, when the cross-sectional shape of the bottom surface is a letter C, the liquid dripping from the filling nozzle to the bottom surface of the antifouling jig flows to the outside of the through hole, that is, to the wall surface side. The liquid dripping on the bottom surface of the antifouling jig can be effectively prevented from adhering to one end surface of the filling container through the through hole.

  Examples of the material of the jig body include stainless steel, iron, and synthetic resin. Among these, stainless steel is preferable because it is excellent in solvent resistance and can be used in a clean room.

  Specifically, the outer diameter of the jig body is preferably 210 to 240 mm, more preferably 220 to 240 mm, and more preferably 230 to 240 mm when it is for a 19-liter canister can. Particularly preferred.

  When the bottom surface of the jig body is planar, the length (depth) of the jig body is preferably 43 to 50 mm, more preferably 44 to 49 mm, and more preferably 46 to 49 mm. Particularly preferred is 47 mm.

  The shape of the through hole can be appropriately selected according to the shape of the filling port of the filling container, and examples thereof include a circle, an ellipse, a triangle, a square, a rectangle, and a polygon. Among these, in filling, the distance from the filling nozzle to the bottom surface of the jig body is constant, and in many cases, the shape of the filling port is circular.

  When the through hole is circular, the diameter of the through hole is preferably 30 to 90 mm, more preferably 40 to 80 mm, and particularly preferably 50 to 70 mm. If the diameter of the through hole is less than 30 mm, the area of the through hole becomes too small, and foreign matter is generated due to the contact between the bottom surface and the filling port, and this foreign matter may be mixed into the filling container. There is. On the other hand, if it exceeds 90 mm, the area of the through hole becomes too large, so that the gap between the bottom surface and the filling port becomes large. Therefore, there is a possibility that the liquid enters from the gap and the liquid adheres to the end face of the filling container.

  Here, the “part corresponding to the filling port” means the same part as the part where the filling port is located when the liquid contamination preventing jig is mounted on the filling container. 1 has a through hole 11a formed at the center of the bottom surface 11, but depending on the position of the filling port of the filling container to be attached, the side of the bottom side is more than the center of the bottom surface. In addition, a through hole may be formed. The position where the through hole is formed in this way is not particularly limited, but it is preferably formed at the center of the bottom surface of the liquid contamination prevention jig, and as in the liquid contamination prevention jig 100 shown in FIG. More preferably, the outer peripheral edge of the bottom surface 11 and the edge of the through hole 11a are formed to be concentric.

[1-2] Locking part:
The locking portion provided in the liquid contamination prevention jig of the present embodiment is disposed on the jig main body, abuts against a part of the filling container, and detachably locks the jig main body to the filling container. Is. Since the position of the liquid stain preventing jig can be fixed by the locking portion, for example, it is possible to prevent the liquid stain preventing jig from being displaced during filling. Moreover, since the liquid stain prevention jig is locked to the filling container by the locking portion, there is an advantage that it can be easily attached and detached.

  FIG. 2 is a perspective view showing a state in which the liquid contamination preventing jig 100 shown in FIG. 1 is mounted on the filling container 200, and the locking portion 12 is locked to the opening end of the protective wall 211 of the filling container 200. By doing so, the jig body 10 is in a floating state, that is, the filling port 213 and the jig body 10 are not in contact with each other, and the protective wall 211 and the jig body 10 are not in contact with each other. This is a fixed example.

  There is no restriction | limiting in particular in the shape of a latching | locking part, For example, L shape, U shape, substantially U shape etc. can be mentioned. Among these, since the installation area with the canister can body (container body) is wide and stable, it is preferably substantially U-shaped. When the locking portion is substantially U-shaped, it is preferable that one end portion is fixed to the bottom surface. That is, as shown in FIG. 1, the substantially U-shaped locking portion 12 is arranged so as to sandwich the side wall of the jig body 10, and one end is fixed to the bottom surface 11 of the jig body 10. Is preferred. For example, FIG. 1 shows an example in which three substantially U-shaped locking portions 12 are provided, and one end portion of these locking portions 12 is fixed to the bottom surface 11.

  Although the number of latching | locking parts can be selected suitably, it is preferable that it is 2-4 pieces, and it is still more preferable that it is 3-4 pieces. If the number of the locking portions is one, there is a possibility that the jig body cannot be brought into a floating state. On the other hand, if the number exceeds four, the number of locking portions projecting outward from the jig body increases, which may cause problems such as being caught on unnecessary portions during storage.

  Examples of the material of the locking portion include stainless steel, iron, and synthetic resin. Among these, stainless steel is preferable because it is excellent in solvent resistance and can be used in a clean room.

  It is preferable that a handle portion into which a user's finger can be inserted is formed in the locking portion. When the handle portion is formed in this manner, the liquid stain prevention jig can be easily attached and detached, and is easy to carry. Furthermore, there is an advantage that the liquid stain prevention jig can be stored in a clean environment by hooking the handle portion on the hook for storing the liquid stain prevention jig.

  There is no restriction | limiting in particular in the shape of a handle part, Semicircle shape, L shape, circle shape, square shape, etc. can be mentioned. Among these, since it is easy to put a finger, a semicircular shape and a circular shape are preferable. FIG. 1 shows an example in which a semicircular handle portion 13 is disposed on each of the three locking portions 12.

  The liquid contamination preventing jig of the present embodiment is used by being disposed so as to cover one end surface of a filling container including a columnar container main body having a filling port formed on one end surface in the longitudinal direction. .

  The container body provided in the filling container has a metal or resin outer container in which a filling port is formed, and a resin inner bag having an opening which is accommodated inside the outer container. It can be illustrated. And this container main body has the filling port of an exterior container and the inside of an inner bag connected, and can fill a liquid in an inner bag through a filling port.

The filling container is connected to one end surface side of the container body, the outer diameter is the same as the outer diameter of the container body, and the central axis in the longitudinal direction coincides with the central axis in the longitudinal direction of the container body Ru der which further comprises a protective wall. This protective wall is for protecting the filling port from being damaged during transportation. As shown in FIG. 5, the protective wall can be provided with a through-hole 211a for transportation as a handle portion in transportation or the like. In addition, the filling container 200 shown in FIGS. 2, 3, 4 and 8 omits the through-hole for transportation.

  FIG. 3 is a perspective view of the filling container 200 with a part cut away. The filling container 200 includes a columnar container body 210 having a filling port 213 formed on one end face 212 in the longitudinal direction, and a container. A cylindrical protection which is connected to the one end surface 212 side of the main body 210 and has the same outer diameter as the outer diameter of the container main body 210 and whose central axis in the longitudinal direction coincides with the central axis in the longitudinal direction of the container main body 210. And a wall 211.

  In the case of using a filling container having a protective wall, as shown in FIG. 2, the liquid stain prevention jig 100 has a jig main body 10 inserted inside the protective wall 211, and a locking portion 12. The jig body 10 is attached to the filling container 200 by being brought into contact with the opening end of the protective wall 211 and locking the jig body 10.

  Examples of the liquid filled in the filling container include photosensitive compositions such as a colored resist composition, a protective film composition, and an insulating film composition.

  Examples of the color resist composition include a color filter containing a azo pigment and / or a diketone compound-containing colorant, an alkali-soluble resin, a polyfunctional monomer, and a photopolymerization initiator. A radiation composition etc. can be mentioned.

  Examples of the protective film composition include copolymerization of an unsaturated carboxylic acid and / or unsaturated carboxylic acid anhydride, an epoxy group-containing unsaturated compound, and a specific olefinic unsaturated compound, and an ethylenically unsaturated bond. And a radiation-sensitive resin composition containing a polymerizable compound, a radiation-sensitive polymerization initiator, and cyclohexanone.

  Examples of the insulating film composition include copolymers of unsaturated carboxylic acid and / or unsaturated carboxylic acid anhydride, epoxy group-containing unsaturated compound, maleimide monomer, and other olefinic unsaturated compounds, and 1 , 2-quinonediazide compounds, and the like.

[2] Liquid filling method:
In one embodiment of the liquid filling method of the present invention, the liquid contamination prevention treatment of the present invention is provided so as to cover one end surface of a filling container including a columnar container body having a filling port formed on one end surface in the longitudinal direction. And a step of filling the container into a filling container equipped with a liquid contamination prevention jig. With such a process, it is possible to prevent the liquid dripping from the filling nozzle from adhering to the end face of the filling container after filling.

  In the liquid filling method of the present embodiment, first, the liquid contamination prevention jig of the present invention is provided so as to cover one end face of a filling container including a columnar container body having a filling port formed on one end face in the longitudinal direction. The process of mounting is performed.

  Here, it is preferable that the filling port and the liquid antifouling jig do not come into contact with each other when the liquid antifouling jig is attached to the filling container. If it does in this way, it can prevent that the foreign material produced by contacting with a filling port and a liquid stain | pollution | contamination prevention jig | tool mixes in the container for filling. Specifically, the distance between the filling port and the liquid contamination prevention jig (shown as “d1” in FIG. 2) is preferably 0.5 to 2.0 mm, and preferably 0.5 to 1.5 mm. More preferably, it is 0.5-1.0 mm. If the distance d1 is less than 0.5 mm, the filling port and the liquid contamination prevention jig may come into contact with each other when the liquid contamination prevention jig is attached to the filling container. On the other hand, if it exceeds 2.0 mm, liquid may enter between the filling port and the liquid contamination prevention jig, and the liquid may adhere to the end surface of the filling container.

  Moreover, when using the filling container which has a protective wall, it is preferable that the inner surface of a protective wall and the outer surface of a liquid stain prevention jig | tool are adjoining. In this way, it is possible to prevent liquid from entering between the protective wall and the liquid contamination prevention jig. Specifically, the distance (indicated as “d2” in FIG. 2) between the protective wall and the liquid contamination preventing jig is preferably 3 to 20 mm, more preferably 3 to 15 mm. Particularly preferred is 10 mm. When the distance d2 is less than 3 mm, foreign matter generated due to the contact between the protective wall and the liquid contamination prevention jig when the liquid contamination prevention jig is attached to the filling vessel is contained in the filling container. There is a risk of mixing. On the other hand, if it exceeds 20 mm, the liquid may enter between the protective wall and the liquid contamination prevention jig, and the liquid may adhere to the end face of the filling container.

  Next, in the liquid filling method of the present embodiment, a step of filling a liquid into a filling container equipped with a liquid contamination prevention jig is performed. There is no restriction | limiting in particular in the liquid to fill, The liquid similar to the liquid already mentioned above can be illustrated.

  The method of filling the liquid is not particularly limited and can be performed by a conventionally known method. For example, it can be performed as shown below.

  First, as shown in FIG. 5, a filling container 200 equipped with a liquid contamination prevention jig 100 is disposed at a predetermined position of the filling machine. The filling machine has a base having a mark for determining the position of the filling container 200, a support orthogonal to the base, and a filling nozzle 21 for filling the filling container 200 with liquid. It is possible to exemplify an apparatus provided with a filling portion 20, a lifting device that is disposed on a support and can drive the filling portion 20, and a tray device that is disposed on the support and has a tray.

  Next, as shown in FIG. 6, the filling unit 20 is lowered by the lifting device and the filling nozzle 21 of the filling unit 20 is inserted into the filling port of the filling container 200. Thereafter, the filling container 200 is filled with a liquid. After filling, as shown in FIG. 7, immediately after raising the filling unit 20, the tray 31 of the tray device 30 is extended. Thereafter, a cap can be attached to the filling port of the filling container 200, and the liquid contamination preventing jig 100 can be removed from the filling container 200 to complete the filling.

  In addition, even if the liquid drips from the filling nozzle after filling, the liquid can be received by the tray 31. And even if it is a case where it cannot be received with the saucer 31, as shown in FIG. 8, the liquid stain | pollution | contamination prevention jig 100 can receive the liquid 115. As shown in FIG. Even if the tray apparatus 30 is not used, the liquid 115 can be received by the liquid contamination prevention jig 100.

  EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, this invention is not limited to these Examples.

Example 1
First, a filling container and a liquid stain prevention jig were prepared. As a filling container, a canister 200 made of stainless steel having a shape as shown in FIG. 3 (can total height: 461 mm, outer diameter: 278 mm, capacity: 19 liters, filling port diameter: 51 mm, protective wall height: 100 mm) Prepared. Moreover, as a liquid stain | pollution | contamination prevention jig | tool, as shown in FIG. 1, the cylindrical jig | tool main body 10 made from stainless steel in which the through-hole 11a (diameter: 60 mm) was formed in the center part of the bottom face 11, and a jig | tool. Three substantially U-shaped locking portions 12 made of stainless steel welded to the bottom surface 11 of the main body 10 and handle portions 13 disposed on the respective locking portions 12 (outer diameter: 230 mm, Length (depth): 47 mm) was prepared. The three locking portions 12 were arranged so that the angle formed by the adjacent locking portions was 120 °.

  Next, the jig body 10 of the liquid stain prevention jig 100 is inserted inside the protective wall 211 and the jig body 10 is locked by bringing the locking portion 12 into contact with the opening end of the protective wall 211. The canister 200 was equipped with the liquid stain prevention jig 100. At this time, the distance d1 between the filling port 213 and the opening end of the through hole 11a of the liquid contamination preventing jig 100 was 0.5 mm. The distance d2 between the inner surface of the protective wall 211 and the outer surface of the liquid contamination preventing jig 100 was 5 mm. When the liquid contamination prevention jig 100 was mounted on the filling container 200, the opening end of the side wall of the jig body 10 protruded 28 mm from the opening end of the protective wall 211 of the filling container 200.

  Next, the filling container 200 equipped with the liquid contamination prevention jig 100 was filled with a liquid using a filling machine. As the liquid, a resist composition, specifically, a composition (viscosity: 29 mPa · s) capable of forming an interlayer insulating film for a liquid crystal display was used.

  After the filling, a cap is attached to the filling port 213 of the filling container 200, the liquid contamination preventing jig 100 is removed from the filling container 200, and the liquid adheres to the end surface 212 of the filling container 200 (there is a liquid splash) Whether or not) was observed visually.

  In this example, the above filling operation was performed 10,000 times (can). As a result, no splashes were observed on the end face of the filling container.

  As described above, according to the liquid contamination preventing jig of Example 1, it was confirmed that the liquid dripping from the filling nozzle after filling can be prevented from adhering to the end face of the filling container.

  The liquid stain prevention jig of the present invention is suitable as a jig for use in a filling container used in a semiconductor manufacturing process.

  The liquid filling method of the present invention can be suitably used as a filling method for a filling container used in a semiconductor manufacturing process.

It is a perspective view which shows one Embodiment of the liquid dirt prevention jig | tool of this invention. It is a perspective view which shows the state which mounted | wore the container for filling with the liquid contamination prevention jig | tool shown in FIG. It is a perspective view which cuts and shows a part of container for filling. It is a perspective view which shows the state which mounts | wears with the container for filling with the liquid dirt prevention jig | tool shown in FIG. It is a schematic diagram for demonstrating one Embodiment of the liquid filling method of this invention. It is a schematic diagram for demonstrating one Embodiment of the liquid filling method of this invention. It is a schematic diagram for demonstrating one Embodiment of the liquid filling method of this invention. It is a perspective view which shows the filling container equipped with the liquid dirt prevention jig | tool shown in FIG.

Explanation of symbols

100: Liquid stain prevention jig, 10: Jig body, 11: Bottom surface, 11a: Through hole, 12: Locking part, 13: Handle part, 20: Filling machine, 21: Filling nozzle, 30: Dish device, 31 : Receiving tray, 200: container for filling, 210: container body, 211: protective wall, 211a: through hole for transportation, 212: one end surface, 213: filling port, 115, 215: liquid.

Claims (7)

A filling container provided with a columnar container body in which a filling port is formed on one end face in the longitudinal direction is used so as to cover the one end face,
A bowl-shaped jig body in which a through hole is formed in a portion corresponding to the filling port on the bottom surface,
A substantially U-shaped locking portion disposed on the jig body, abutting against a part of the filling container, and detachably locking the jig body to the filling container ;
The filling container is connected to the one end face side of the container main body, and has an outer diameter that is the same as the outer diameter of the container main body, and a longitudinal central axis that is the same as a longitudinal central axis of the container main body. It is further equipped with a cylindrical protective wall,
The jig main body, while being inserted inside of the protective wall, the locking portion is a liquid stain preventing jig that abolish engaging the jig body in contact with the open end of the protective wall.   2. The liquid stain prevention jig according to claim 1, wherein a depth of the bowl-shaped jig main body becomes deeper toward the outside from the through hole. The locking portion of the substantially U-shaped, liquid-fouling preventing jig according to claim 1 or 2 end of hand is fixed to the bottom surface. The liquid contamination prevention jig according to any one of claims 1 to 3 , so as to cover the one end face of a filling container including a columnar container body having a filling port formed on one end face in the longitudinal direction. Attaching the
Filling the liquid into the filling container equipped with the liquid contamination prevention jig. The filling container is connected to the one end face side of the container main body, and has an outer diameter that is the same as the outer diameter of the container main body, and a longitudinal central axis that is the same as a longitudinal central axis of the container main body. It is further equipped with a cylindrical protective wall,
The liquid filling method according to claim 4 , wherein the jig main body is inserted inside the protective wall, and the locking portion contacts the opening end of the protective wall to lock the jig main body. . Liquid filling method according to claim 4 or 5 wherein the liquid antifouling jig and the filling port is not in contact. The liquid filling method according to claim 5 or 6 , wherein an inner surface of the protective wall and an outer surface of the liquid contamination prevention jig are close to each other.

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