JP5221402B2 - Electronic component mounting state inspection apparatus and inspection method - Google Patents

Description

  The present invention relates to an inspection apparatus and an inspection method for a mounting state of an electronic component that is determined by imaging the mounting state of an electronic component mounted on a substrate from below the substrate.

  For example, a plurality of TABs (Tape Automated Bonding) as electronic components are finally bonded (mounted) at a predetermined interval by an adhesive anisotropic conductive tape on the upper surface of a side part of a liquid crystal display panel made of transparent glass as a substrate. )

  A plurality of first terminals having a minute width dimension are provided at a minute interval on a side portion of the liquid crystal display panel, and a plurality of first terminals are provided on the TAB at intervals facing the first terminals provided on the liquid crystal display panel. A second terminal is provided. The TAB is mounted with the second terminal precisely aligned with the first terminal of the liquid crystal display panel.

  When a plurality of TABs are mounted on the upper surface of the side portion of the liquid crystal display panel at a predetermined interval, it is checked whether the TABs are precisely positioned and mounted on the liquid crystal display panel.

  When inspecting the mounting state of the TAB, the part of the liquid crystal display panel where the TAB is mounted is imaged from the lower surface side by the imaging camera via the transparent liquid crystal display panel. Then, by performing image processing on the image pickup signal, it is determined whether or not a positional deviation has occurred between the TAB and the terminal of the liquid crystal display panel.

  As described above, the TAB and the terminals provided on the liquid crystal display panel are extremely fine with the width dimension and the interval being in units of μm. Therefore, a camera having a low resolution is used as an imaging camera for imaging the mounting state of the TAB. An imaging camera with a small resolution has a small viewing angle and a shallow depth of focus, so that it may not be easy to align the focus with the imaging site.

  On the other hand, the liquid crystal display panel is placed with a side portion on which the TAB is mounted on the upper surface of the transfer stage protruding outward from the upper surface of the transfer stage, and mounted on the side portion at a predetermined interval. The TAB is sequentially positioned above the imaging camera by intermittently driving the transport stage in a predetermined direction.

  When the TAB is positioned above the imaging camera, the part is imaged by the imaging camera. The imaging signal from the imaging camera is subjected to image processing. Thereby, it is determined whether or not the TAB mounting state, that is, whether or not the second terminal of the TAB precisely matches the first terminal of the liquid crystal display panel.

  The side portion on which the TAB of the liquid crystal display panel is mounted protrudes outward from the upper surface of the transfer stage. For this reason, it is inevitable that the side portion of the liquid crystal display panel bends downward, and the amount of bending depends on the position in the longitudinal direction of the side portion of the liquid crystal display panel, that is, the position where each TAB is mounted. Different.

  Therefore, every time the part where each TAB is mounted on the side of the liquid crystal display panel is positioned above the imaging camera, the imaging camera is focused, and then the mounting state of the TAB is captured. I have to.

  Patent Document 1 shows a mounting device for mounting a TAB on a side part of a liquid crystal display panel, and Patent Document 2 shows a TAB that is dropped out of a plurality of TABs mounted on a side part of the liquid crystal display panel. However, these patent documents show that when a plurality of TABs are mounted on the side part of the liquid crystal display panel, the quality of the mounting state is inspected. It has not been.

JP 2003-234373 A Japanese Patent No. 3885963

  By the way, when the TAB mounted on the side portion of the liquid crystal display panel is positioned above the imaging camera as described above, if the imaging camera is focused, it takes a lot of time for the focusing. Not only that, it is difficult to perform the inspection of the mounting state of the TAB efficiently and surely because the variation occurs depending on the operator.

  According to the present invention, when a plurality of electronic components mounted on the side of the substrate at a predetermined interval are sequentially imaged, it is possible to reliably capture images without adjusting the focal position of the imaging unit in accordance with each electronic component. It is an object of the present invention to provide an inspection apparatus and inspection method for the mounted state of electronic parts.

This invention is an inspection apparatus for inspecting the mounted state of a plurality of electronic components mounted at predetermined intervals on the side portion of the substrate,
A transport means for mounting the substrate and transporting the substrate in a horizontal direction at a predetermined height;
An upper supporting roller and a lower support roller for holding the side portion of the placed above the substrate to the transport means,
The upper support roller and the lower support roller are provided so as to be able to be driven in the vertical direction, and a vertical drive means for holding the side portion of the substrate at the same height as the height placed on the transport means,
Imaging means for imaging the mounted state of the electronic components of the substrate which is held between the upper support roller and the lower support rollers
The electronic component mounting state inspection apparatus is characterized by comprising:

This invention is an inspection method for inspecting a plurality of mounting state of the electronic component mounted at predetermined intervals on the side portion of the substrate,
A step of horizontally conveying the substrate placed on the conveying means at a predetermined height;
A step of clamping to the predetermined height side portions of the placed above the substrate to said conveying means by a rotatable upper support rollers and the lower support roller,
Determining the mounting state of the electronic component to the image shooting the upper support roller and the lower support rollers and clamping has been the electronic component mounted on the substrate positioned in a state of being supported at a predetermined height Process and
There is provided an electronic component mounting state inspection method characterized by comprising:

  According to the present invention, the side portion of the substrate is held between the upper support roller and the lower support roller that are driven in the vertical direction and is prevented from bending downward, and the image pickup position by the image pickup means is kept constant. Therefore, if the focal position of the image pickup means is set to the same height as the substrate supported by the upper support roller and the lower support roller, it is not necessary to set the focus position of the image pickup means each time.

  In addition, since the upper support roller and the lower support roller that sandwich the substrate are rotated in synchronization with the transport of the substrate by the transport means, a plurality of electrons are not released without releasing the sandwiched state of the substrate by the upper support roller and the lower support roller. The parts can be imaged sequentially.

  Therefore, even if the board is transported, the side part of the board does not shake in the vertical direction, so that the imaging means can quickly image the mounting state of a plurality of electronic components, and the board and each support Since no slip occurs between the rollers, each support roller does not damage the substrate.

The schematic block diagram of the test | inspection apparatus which shows one embodiment of this invention. The enlarged view which follows the AA line of FIG. The enlarged view which follows the BB line of FIG. The block diagram of a control system. The top view which shows a part of liquid crystal display panel.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 to 5 show an embodiment of the present invention. FIG. 1 is a schematic configuration diagram showing an inspection apparatus according to the present invention, and this inspection apparatus includes a conveyance table 1 constituting a conveyance means. The transport table 1 is driven by an X / Y / Z drive source 4 in the X and Y directions as horizontal directions and the Z direction as vertical directions.

  On the upper surface of the transfer table 1, a liquid crystal display panel 2 is placed as a substrate with the side portions protruding outward from the upper surface of the transfer table 1, and is held by means such as vacuum suction.

  As shown in FIG. 5, a plurality of TABs 3 as electronic components are finally press-bonded, that is, mounted at predetermined intervals on an upper surface of the side portion of the liquid crystal display panel 2 through an anisotropic conductive tape (not shown). A direction in which a plurality of TABs 3 are mounted at a predetermined interval with respect to the side portion is defined as a Y direction indicated by an arrow in FIG.

  The TAB 3 mounted on the side portion of the liquid crystal display panel 2 is in a state where the mounting state, that is, the terminals provided on the liquid crystal display panel 2 and the terminals (not shown) provided on the TAB 3 are reliably aligned. Whether the conductive material included in the anisotropic conductive tape having the TAB 3 mounted on the liquid crystal display panel 2 is disposed below the side portion of the liquid crystal display panel 2. Imaging is performed by a camera 5 (shown in FIG. 1) as described later.

  The imaging signal of the imaging camera 5 is output to the image processing unit 6 as shown in FIG. 4, and is subjected to image processing here before being output to the control device 7. The control device 7 performs an arithmetic process on the image-processed imaging signal, determines whether or not the terminal provided on the TAB 3 matches the terminal provided on the liquid crystal display panel 2 and the conductive material included in the anisotropic conductive tape. The mounting state of the TAB 3 with respect to the side portion of the liquid crystal display panel 2 is determined based on the collapsed state or the like.

  A monitor 8 is connected to the control device 7 so that the imaged signal subjected to the calculation process can be projected onto the monitor 8. Therefore, the determination of the mounting state of the TAB 3 on the liquid crystal display panel 2 can also be made visually by the monitor 8.

  When the mounting state of the TAB 3 is imaged by the imaging camera 5, the side portion of the liquid crystal display panel 2 on which the TAB 3 is mounted is not bent downward by the holding device 11, and the side side of the liquid crystal display panel 2 is The lower surface of the part is held so as to be the same height as the upper surface of the transfer table 1.

  The holding device 11 has a device main body 12 that is shown only in part by a chain line in FIG. A rotation drive source 13 constituting a rotation drive means is provided on the side surface of the apparatus main body 12 opposite to the side surface facing the transport table 1 with the axis of the rotation shaft 14 being horizontal.

  A first gear 15 constituting a gear train is fitted in the middle of the rotating shaft 14. The first gear 15 is engaged with a second gear 17 fitted to one end of a first support shaft 16 that is rotatably supported by the apparatus main body 12 with its axis line horizontal.

  As shown in FIG. 2, auxiliary support shafts 14a and 16a rotate on the apparatus main body 12 with the shafts 14 and 16 being parallel to the sides of the rotary shaft 14 and the first support shaft 16, respectively. It is provided as possible. A first pulley 18 is fitted to each of the pair of auxiliary support shafts 14 a and 16 a, the distal end portion of the rotating shaft 14, and the other end portion of the first support shaft 16.

  As shown in FIG. 1, the apparatus main body 12 includes an upper movable body 21 and a lower movable body 22 facing the lower side of the upper movable body 21 and guided by linear guides (not shown) so as to be movable in the vertical direction. Is provided.

  The upper movable body 21 is connected to a rod 23a of an upper drive cylinder 23 fixed to a portion indicated by oblique lines of the apparatus main body 12, and is driven in the vertical direction by the upper drive cylinder 23. The lower movable body 22 Is connected to a rod 24a of a lower drive cylinder 24 fixed to the portion indicated by the oblique lines of the apparatus main body 12, and is driven in the vertical direction by the lower drive cylinder 24.

  Upper support portions 21a are provided at both ends of the upper movable body 21, and upper rotation shafts 25 are provided on the upper support portions 21a so as to be rotatable with the axis line horizontal. Lower support portions 22a are provided at both ends of the lower movable body 22, and lower rotation shafts 26 are provided on the lower support portions 21a so as to be rotatable with the axis line horizontal.

  As shown in FIG. 2, one end portions of the upper rotating shaft 25 and the lower rotating shaft 26 are respectively positioned below and above the middle portion of each pair of first pulleys 18, and each of the one end portions has a second end. A pulley 27 is fitted. A first belt 28 such as a timing belt is stretched between a pair of first pulley 18 and one second pulley 27 in each of the upper and lower groups.

  The upper movable body 21 is driven in the downward direction by the upper drive cylinder 23, the lower movable body 22 is driven in the upward / downward direction by the lower drive cylinder 24, the upper second pulley 27 is lowered, and the lower second pulley 27 is lowered. When the two pulleys 27 are raised, the distance between the pair of first pulleys 18 and one second pulley 27 is reduced, so the first belt stretched around the three pulleys 18 and 27 of each pair. 28 is slack.

  The slack generated in the first belt 28 is removed by a pair of upper and lower slack removing means 31 shown in FIG. The slack removing means 31 has two tension rollers 32 which are in pressure contact with the outer surface of the first belt 28 stretched between a pair of first pulley 18 and one second pulley 27. Each tension roller 32 is elastically biased by one end of a spring 32a in a direction in which it is pressed against the first belt 28. The other end of the spring 32a is held by the apparatus main body 12 indicated by a chain line.

  Accordingly, one second pulley 27 moves in the approaching direction with respect to the pair of first pulleys 18, and when the first belt 28 is slackened along with the movement, each of the two slacks is loosened. Since the tension roller 32 elastically displaces and presses the first belt 28, the slack generated in the first belt 28 is removed and a constant tension is maintained.

  The other upper support portion 21a and lower support portion 22a provided at the other end portion of the upper movable body 21 and the lower movable body 22 located on the transport table 1 side are provided as one upper support provided at one end portion. It is formed longer than the portion 21a and the lower support portion 22a.

  The other ends of the upper rotating shaft 25 and the lower rotating shaft 26 protrude from the other support portions 21a and 22a, and third pulleys 33 are fitted to the protruding ends of the rotating shafts 25 and 26, respectively. ing.

  As shown in FIGS. 1 and 3, a pair of second support shafts 34 whose axes are set in the horizontal direction are spaced apart from each other at the same height position at predetermined intervals in the horizontal direction. And is provided so as to be rotatable. A fourth pulley 35 is fitted to one end of the pair of second support shafts 34 projecting outward from the outer surfaces of the support portions 21a and 22a.

  A pair of upper support rollers 36 are fitted to the other end portion of the second support shaft 34 that protrudes toward the inner surface side of the upper support portion 21a, and the second support shaft 36 protrudes toward the inner surface side of the lower support portion 22a. A pair of lower support rollers 37 are fitted to the other end of the support shaft 34. That is, each of the pair of upper support rollers 36 and the lower support rollers 37 is positioned so that the outer peripheral surfaces thereof have the same height by the pair of second support shafts 34 provided at the same height in the horizontal direction.

  A second belt 38 such as a timing belt is stretched between one third pulley 33 and two fourth pulleys 35 provided on the outer surface sides of the support portions 21a and 22a.

  With the above configuration, when the rotary shaft 14 of the rotary drive source 13 is rotationally driven, the rotation is divided into two by the first gear 15 and the second gear 17, and the first and second pulleys 18. , 27 and the first belt 28 are transmitted to the upper rotary shaft 25 and the lower rotary shaft 26.

  The rotation of the upper rotary shaft 25 and the lower rotary shaft 26 is transmitted to the second support shaft 34 provided in each support portion 21a, 22a via the third pulley 33, the fourth pulley 35, and the second belt 38. Is done. When the second support shaft 34 is rotationally driven, each pair of upper support roller 36 and lower support roller 37 provided at the other end of the second support shaft 34 is rotationally driven. Note that the rotation directions of the upper support roller 36 and the lower support roller 37 are opposite to each other.

  As shown by the solid line in FIG. 1, the upper movable body 21 in the raised position is driven in the downward direction by the upper drive cylinder 23, and the lower movable body 22 in the lowered position is driven in the upward direction by the lower drive cylinder 24. Then, the upper support roller 36 and the lower support roller 37 provided on the support portions 21a and 22a of the movable bodies 21 and 22 are placed on the upper surface of the transport table 1 as shown by a chain line in FIGS. The upper and lower surfaces of the portion slightly inside the portion where the TAB 3 on the side portion of the placed liquid crystal display panel 2 is mounted are sandwiched. Thereby, the side part of the liquid crystal display panel 2 is held in a horizontal state without bending downward.

  The moving distance in the downward direction of the upper support roller 36 by the upper drive cylinder 23 and the moving distance in the upward direction of the lower support roller 37 by the lower drive cylinder 24 are the liquid crystal display panel 2 placed on the upper surface of the transport table 1. It is set so that it may press-contact with the upper surface and lower surface of a side part. As a result, when the upper support roller 36 is driven in the downward direction and the lower support roller 37 is driven in the upward direction, the side edges of the liquid crystal display panel 2 are sandwiched by the support rollers 36 and 37 without being bent in the vertical direction. It has become.

  As indicated by an arrow X in FIG. 1, the liquid crystal display panel 2 is positioned by the transfer table 1 with the side portion on which the TAB 3 is mounted entering between the upper support roller 36 and the lower support roller 37. After that, the upper support roller 36 is lowered and the lower support roller 37 is raised.

  After imaging one TAB 3 from below the side of the liquid crystal display panel 2 by the imaging camera 5, when imaging the next TAB 3, the X / Y / Z drive source 4 that drives the transport table 1 and the above The rotational drive source 13 that rotationally drives the upper support roller 36 and the lower support roller 37 is driven by the control device 7 in synchronization.

  That is, the liquid crystal display panel 2 has a predetermined distance in the Y direction shown in FIG. 3 by the transport table 1, that is, a distance corresponding to the distance P (shown in FIG. 5) of TAB 3 provided on the side of the liquid crystal display panel 2. When driven, the upper support roller 36 and the lower support roller 37 that sandwich the side portion of the liquid crystal display panel 2 are rotationally driven in synchronization with the drive of the transport table 1. That is, the support rollers 36 and 37 are rotationally driven so that the rotational speed is the same as the moving speed of the transport table 1.

  As a result, the side portion of the liquid crystal display panel 2 on which the TAB 3 is mounted is sandwiched between the upper support roller 36 and the lower support roller 37, so that the liquid crystal display panel 2 is fed in the Y direction without swinging up and down at a predetermined height. It is done. In addition, the upper support roller 36 and the lower support roller 37 rotate without slipping with respect to the liquid crystal display panel 2.

  The imaging camera 5 is positioned below the side of the liquid crystal display panel 2 and at an intermediate position between the pair of lower support rollers 37, and is disposed in the apparatus main body 12. The arrow L in FIG. As shown in FIG. 3, the side of the liquid crystal display panel 2 on which the TAB 3 is mounted is imaged from the lower surface.

  When inspecting the mounting state of the plurality of TABs 3 mounted on the side portion of the liquid crystal display panel 2 by the inspection device configured as described above, the upper support roller 36 is driven in the ascending direction together with the upper movable body 21 to support the lower support. With the roller 37 driven in the downward direction together with the lower movable body 22, the conveyance table 1 is driven in the X direction, and the liquid crystal display panel 2 has the upper side support roller 36 and the lower side support roller on the side where the plurality of TABs 3 are mounted. 37, and is positioned so as to be sandwiched between the two.

  Next, the upper support roller 36 is lowered and the lower support roller 37 is raised, so that the side portion of the liquid crystal display panel 2 is sandwiched between the pair of support rollers 36 and 37. At this time, the liquid crystal display panel 2 is positioned in advance with respect to the Y direction so that the first one of the plurality of TABs 3 mounted on the side portion can be imaged by the imaging camera 5. That is, the first TAB 3 is positioned on the optical axis above the imaging camera 5.

  In this way, the liquid crystal display panel 2 is positioned with respect to the X and Y directions, the first TAB 3 is imaged while the side portion is sandwiched between the pair of upper and lower support rollers 36 and 37, and the mounting state is determined. Then, the liquid crystal display panel 2 is driven in the Y direction by the transport table 1 at a distance corresponding to the interval P of the TAB 3. At this time, the control device 7 rotates the pair of upper and lower support rollers 36 and 37 in synchronization with the driving of the transport table 1.

  Thereby, the liquid crystal display panel 2 is transported in a state where the side portions are sandwiched between the pair of upper and lower support rollers 36 and 37. Therefore, even if the liquid crystal display panel 2 is transported, the side portions are There is no swinging up and down.

  Therefore, after the first TAB 3 is imaged, when the next TAB 3 is positioned above the imaging camera 5, the TAB 3 is immediately received without waiting for the shake of the side portion of the liquid crystal display panel 2 to settle. Can be imaged by the imaging camera 5 to determine the mounting state.

  The side portion of the liquid crystal display panel 2 is held between a pair of upper and lower support rollers 36 and 37, so that the liquid crystal display panel 2 is always maintained at a constant height and conveyed. Therefore, the focal position of the imaging camera 5 is set in advance so that the mounting state of the TAB 3 can be imaged by the imaging camera 5 with the height of the side edge of the liquid crystal display panel 2 maintained by the pair of upper and lower support rollers 36 and 37. Then, when the liquid crystal display panel 2 is sent in the Y direction and a plurality of TABs 3 are sequentially positioned above the imaging camera 5 and imaged, the imaging camera 5 is focused on the imaging site each time. I'm sorry.

  Since the pair of upper and lower support rollers 36 and 37 are rotated in synchronization with the conveyance of the liquid crystal display panel 2, the pair of upper and lower support rollers 36 and 37 holds the side portion of the liquid crystal display panel 2 in a state of being sandwiched. The liquid crystal display panel 2 can be intermittently conveyed by a predetermined distance in the Y direction.

  Therefore, every time one TAB 3 is imaged, the pair of upper and lower support rollers 36 and 37 are driven in the vertical direction to transport the liquid crystal display panel 2 without releasing the clamping state of the side portions of the liquid crystal display panel 2. Therefore, the imaging of the TAB 3 by the imaging camera 5 can be efficiently performed.

  Moreover, when the liquid crystal display panel 2 is transported in the Y direction, no slip occurs between the pair of upper and lower support rollers 36 and the liquid crystal display panel 2, so that the liquid crystal display panel 2 is scratched by the pair of upper and lower support rollers 36. There is no such thing.

  The present invention is not limited to the one embodiment described above and can be variously modified. For example, two upper support rollers and two lower support rollers each sandwiching the side portion of the liquid crystal display panel are provided, but the number of each support roller may be two or more, for example, four or six. It may be.

  If the number of each of the support rollers is an even number, the imaging camera can be arranged at an intermediate position between the even number of lower support rollers arranged at equal intervals below the side portion of the liquid crystal display panel. That is, the number of upper and lower support rollers is preferably an even number.

  DESCRIPTION OF SYMBOLS 1 ... Conveyance table, 2 ... Liquid crystal display panel (board | substrate), 3 ... TAB (electronic component), 5 ... Imaging camera (imaging means), 7 ... Control apparatus, 13 ... Rotation drive source (rotation drive means), 15 ... 1st DESCRIPTION OF SYMBOLS 1 gearwheel, 16 ... 1st spindle, 17 ... 2nd gearwheel, 18 ... 1st pulley, 21 ... Upper movable body, 22 ... Lower movable body, 23 ... Upper drive cylinder (vertical drive means), 24 ... Lower drive cylinder (vertical drive means), 25 ... Upper rotary shaft, 26 ... Lower rotary shaft, 27 ... Second pulley, 28 ... First belt, 31 ... Looseness removing means, 32 ... Tension roller, 33 ... First 3 pulleys 34... Second support shaft 35. Fourth pulley 36. Upper support roller 37. Lower support roller 38 38 second belt.

Claims (5)

An inspection apparatus for inspecting the mounting state of a plurality of electronic components mounted on a side portion of a substrate at a predetermined interval,
A transport means for mounting the substrate and transporting the substrate in a horizontal direction at a predetermined height;
An upper supporting roller and a lower support roller for holding the side portion of the placed above the substrate to the transport means,
The upper support roller and the lower support roller are provided so as to be able to be driven in the vertical direction, and a vertical drive means for holding the side portion of the substrate at the same height as the height placed on the transport means,
Imaging means for imaging the mounted state of the electronic components of the substrate which is held between the upper support roller and the lower support rollers
A device for inspecting a mounted state of an electronic component , comprising: An image processing unit that performs image processing on an imaging signal output from the imaging unit;
A control device that performs arithmetic processing on the image-processed imaging signal and determines a mounting state of the electronic component on the side portion of the substrate;
The electronic component mounting state inspection apparatus according to claim 1 , further comprising: When the substrate is transported in a horizontal direction at a distance corresponding to the interval between a plurality of electronic components mounted on the substrate, the upper support roller and the lower support roller are driven by the transport means while sandwiching the substrate. inspection device mounting state of the electronic component according to claim 1, characterized by comprising a rotary drive means for rotating in synchronization. An inspection method for inspecting a mounting state of a plurality of electronic components mounted on a side portion of a substrate at a predetermined interval,
A step of horizontally conveying the substrate placed on the conveying means at a predetermined height;
A step of clamping to the predetermined height side portions of the placed above the substrate to said conveying means by a rotatable upper support rollers and the lower support roller,
Determining the mounting state of the electronic component to the image shooting the upper support roller and the lower support rollers and clamping has been the electronic component mounted on the substrate positioned in a state of being supported at a predetermined height Process and
A method for inspecting a mounted state of an electronic component , comprising: When the substrate is transported in a horizontal direction at a distance corresponding to the interval between a plurality of electronic components mounted on the substrate, the upper support roller and the lower support that sandwich the substrate in synchronization with the transport of the substrate by the transport means The process of rotationally driving the roller
The electronic component mounting state inspection method according to claim 4, comprising:

Images