JP5236993B2 - Block gauge holder - Google Patents

Description

  The present invention relates to a holder for a block gauge, and more particularly, to a holder for a block gauge used when measuring the dimension of a block gauge with a dimension measuring apparatus using light wave interference. In particular, the present invention relates to a holder for a block gauge used in a non-contact type dimension measuring apparatus that does not ring between a block gauge and a base plate.

Conventionally, an edge measuring instrument such as a block gauge is a highly accurate standard used as a reference for measuring a length, and when several pieces are in close contact with each other, an arbitrary dimension can be created in units of 1 to 10 μm, for example. Therefore, for example, it is widely used as a factory length standard.
Here, the terms defined in JIS B 7506, “measurement surface” and “side surface”, are used for the block gauge. In the block gauge, a surface used as an end surface of a dimension is a “measurement surface”. There are two measurement surfaces in a parallel positional relationship, and the distance between the two surfaces is called a “length”. All the surfaces other than the two measurement surfaces are called “side surfaces” and are surfaces that are not used for measurement.
Further, in the present text, a block gauge having a nominal size that cannot be self-supporting with the side surface as a bottom surface is referred to as a “thin block gauge”.
High precision is required for the inspection of such an accurate edger (hereinafter referred to as a block gauge). For example, the dimension can be measured with high resolution and non-contact, and therefore, dimension measurement using light wave interference. The device is widely used. In particular, there is known a non-contact type dimension measuring apparatus that does not perform ringing (contact) between a block gauge and a base plate, which is excellent in that high-accuracy dimension measurement can be easily performed in a short time (for example, Patent Document 1). reference). The non-contact type dimension measurement does not require a skilled work such as ringing, can suppress measurement variations among workers, and can obtain a wide range of user layers.

JP 2003-194523 A

However, in the non-contact type (non-ringing type) dimension measuring apparatus described in Patent Document 1, it is necessary to perform interference measurement on both surfaces of the two measurement surfaces of the block gauge instead of performing ringing. That is, in order to simultaneously irradiate two measurement surfaces with measurement light, it is necessary to place the block gauge on the mounting table of the measurement apparatus with both measurement surfaces open (exposed).
FIG. 9 is a diagram illustrating a state in which block gauges having different nominal dimensions are mounted on the mounting table.
For example, in the case where the measurement optical axis L is constructed horizontally, in order to install the block gauge 201 having a long nominal size and capable of being supported by the side surface on the mounting table 31, as shown in FIG. The Airy point on the side surface 201 may be supported by the Airy point support base 32. Here, the Airy point is a support point at which both end surfaces (measurement surfaces) are the most parallel even when the two side surfaces of the end measure such as a block gauge are supported by deformation.
On the other hand, in the case of the thin object block gauge 202, as shown in FIG. 9B, it is difficult to stand independently with the side face as the bottom face. In such a case, a holder for holding the block gauge is required.

The holder of the thin block gauge 202 is, for example, a holder that holds the posture so that the measurement surface of the thin block gauge 202 is vertical while sandwiching the vicinity of the lower surface of the thin block gauge 202 in FIG. 9B. Conceivable. However, the clamping force must be as small as possible so that the elastic deformation due to the clamping force of the thin block gauge 202 does not affect the measurement result.
For this reason, the clamping force becomes insufficient, the moment that the thin block gauge 202 tends to fall becomes larger, and the thin block gauge 202 finally balances in a state where it has fallen to some extent.
Therefore, such a holder has a great influence on the precision measurement of the thin block gauge 202, and it is difficult to perform highly accurate measurement.

  An object of the present invention is to provide a holder for a thin block gauge capable of maintaining the posture so that the measurement surface of the thin block gauge is orthogonal to the measurement optical axis.

  The holder of the block gauge according to the present invention is configured such that when measuring a length dimension between the measurement surfaces by simultaneously irradiating a pair of measurement surfaces of the block gauge with the measurement light, the measurement surface is relative to the optical axis of the measurement light. A holder for maintaining the posture of the block gauge so as to be orthogonal to each other, the base having a contact surface that contacts any one of the four side surfaces orthogonal to the measurement surface of the block gauge; A holding portion that is provided on the base and holds the pair of measurement surfaces from both sides, and the holding portion is a region to be held that is an area excluding the vicinity of the side surface that contacts the contact surface on the measurement surface At least a region is held, and the measurement surface is held at a right angle to the contact surface.

  Here, the block gauge to be held is a thin block gauge having a length dimension (nominal dimension) between a pair of measurement surfaces of 0.3 mm or more and 10 mm or less.

According to this configuration, since the block gauge is held from both sides of the pair of measurement surfaces by the holding portion, for example, even if it is a block gauge that cannot be self-supported with any one side surface as the bottom surface, it does not fall over The posture in which the measurement surface is orthogonal to the measurement optical axis can be maintained.
In addition, since the held area of the measurement surface held at least by the holding portion is an area excluding the vicinity of the side surface that contacts the contact surface, that is, when assisting the self-supporting of the block gauge, from the lower end of the measurement surface However, since at least the upper position is held by the holding portion, the block gauge can be prevented from falling over efficiently. That is, since the holding unit does not have to hold the held area with a strong holding force, the holding unit does not affect the measurement accuracy, and high-precision measurement is possible.

  In the block gauge holder of the present invention, it is preferable that the holding portion holds an end portion of the measurement surface.

  According to this configuration, since the end portion of the measurement surface is held by the holder, at least the block gauge can be prevented from falling. Furthermore, the area of the measurement surface that is shielded by the holding portion is only the area of the end of the measurement surface. The ideal structure of the holder is that the light shielding portion generated by the holding portion does not provide a non-interference region (non-measurable region) as much as possible in order to acquire information on the widest possible region by measurement. Therefore, according to the holder of the present invention, information on a wide area on the measurement surface can be acquired with high accuracy, and various measurements such as measurement of the shape of the measurement surface can be realized simply and inexpensively.

  In the block gauge holder of the present invention, it is preferable that the held region is a region excluding at least a central portion and four corner portions of the measurement surface.

According to this configuration, since at least the central portion and the four corner portions of the measurement surface are not shielded by the holding portion, it is possible to accurately calculate fo and fu based on the EAL-G21 standard using the central portion and the four corner portions. it can.
In addition, fo based on the EAL-G21 standard is a difference between the maximum dimension of a plurality of measurement locations of the block gauge and the central dimension of the block gauge, and fu is the central dimension of the block gauge and the block gauge. It is a difference from the minimum dimension of a plurality of measurement points.

  In the holder of the block gauge of the present invention, the holding portion is provided on a pair of side members protruding from the contact surface on both sides of the block gauge in the width direction of the measurement surface, and the side member. And a pair of clamping members arranged on both sides of the block gauge along the thickness direction of the block gauge, which is a direction perpendicular to the measurement surface.

Here, the width direction of the measurement surface indicates a width direction along a direction perpendicular to the optical axis of the measurement light and parallel to the side surface in contact with the contact surface.
According to this configuration, the pair of clamping members are arranged so as to sandwich the pair of measurement surfaces of the block gauge from both sides and hold a part of the measurement surface, so that the light shielding portion of the measurement surface by the holding unit is made as small as possible. Various measurements such as measurement of the shape of the measurement surface can be performed easily and inexpensively.

  In the block gauge holder of the present invention, it is preferable that the pair of clamping members are arranged at an interval of a thickness dimension of the block gauge.

  According to this configuration, the pair of measurement surfaces of the block gauge can be easily held from both sides simply by inserting the block gauge between the pair of clamping members.

  In the holder of the block gauge of the present invention, a biasing member for biasing the block gauge to the other clamping member is provided between at least one clamping member of the pair of clamping members and the block gauge. It is preferable that

  According to this configuration, when the block gauge is inserted between the pair of sandwiching members, the biasing member biases the block gauge to the other sandwiching member, so that the gap between the sandwiching member and the block gauge is eliminated, and the block gauge The holding force can be strengthened, and the block gauge posture can be maintained more reliably.

In the holder of the block gauge of the present invention, at least one of the pair of clamping members is supported so as to be movable along the optical axis direction, and when holding the block gauge, It is preferable that the pressing member provided on the opposite side of the block gauge to the other clamping member is pressed toward the other clamping member.

  According to this configuration, when the block gauge is inserted between the pair of clamping members, one clamping member is pressed by the pressing member, so there is no gap between the clamping member and the block gauge, and the block gauge is securely held. be able to. Furthermore, since the holding position of one clamping member can be moved according to the nominal size of a block gauge, the same holder can be used for block gauges having different nominal sizes.

  In the holder of the block gauge of the present invention, the dimension of the base along the width direction of the measurement surface is formed to be substantially the same as the width dimension of the measurement surface, and the pair of side members are formed in a plate shape and It is preferable that the bases are arranged in parallel.

  According to this configuration, even when a plurality of holders are arranged in the width direction of the measurement surface while holding the block gauge with the holder, only the thickness dimension of the side member is measured as compared with the case where the block gauge is independent. Just add to the width dimension of the surface. Therefore, even when measuring with multiple block gauges arranged in the width direction of the measurement surface, it is possible to easily place multiple block gauge holders in parallel in the limited measurement light measurable area. Thus, the measurement efficiency can be improved.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
In the second and later embodiments described later, the same reference numerals are given to the same components and the same members as the components in the first embodiment described below, and the description will be simplified or omitted. .

[First Embodiment]
The holder of the block gauge of the present embodiment holds the block gauge when measuring the dimension between the measurement surfaces facing each other of the block gauge having a known preliminary value at a plurality of measurement points using light wave interference. Is for.
Here, the plurality of measurement locations of the block gauge are the center and four corners of the measurement surface.
The dimension measuring apparatus using the block gauge holder of the present embodiment will be described below.

[Configuration of dimension measuring device]
FIG. 1 shows a schematic configuration of the dimension measuring apparatus 1.
The dimension measuring apparatus 1 has one single wavelength laser (light source) 11A, a first half mirror 12A, and an optical axis that coincides with the measurement axis of the block gauge 2, and is arranged at a predetermined separation distance. The second half mirror 12B and the third half mirror 12C are provided.
In addition, a first screen 13A and a second screen 13B that can observe the phase difference of the interference light respectively formed by the second half mirror 12B and the third half mirror 12C are provided.
Further, as shown in the figure, the first reference mirror 12D and the second reference mirror 12E are provided as optical system constituent members.
In this manner, the first half mirror 12A, the second half mirror 12B, and the third half mirror 12C constitute an annular interferometer 12.

An installation table 3 is provided between the second half mirror 12B and the third half mirror 12C. By placing the block gauge 2 on the installation surface of the installation table 3, the block gauge 2 is connected to the second half mirror 12B and the second half mirror 12B. It is arranged on the optical axis of the laser beam (measurement light) connecting the third half mirror 12C.
In the present embodiment, the block gauge 2 is mounted on the mounting surface of the installation base 3 while being held by the holder 100, and the holder 100 allows the left and right end surfaces of the block gauge 2 (hereinafter, “ The posture of the block gauge 2 is maintained so that a pair of measurement surfaces 2A and 2B) are orthogonal to the optical axis of the laser beam. As the block gauge 2, a thin block gauge having a length dimension (nominal dimension) between a pair of measurement surfaces of 0.3 mm or more and 10 mm or less is used.

Laser light (measurement light) emitted from the single wavelength laser 11A is incident on the reflecting mirror 11C through the beam expander lens 11B. For example, a laser beam having a predetermined wavelength λ is collimated to a required beam diameter by the beam expander lens 11B, and enters the first half mirror 12A via the reflecting mirror 11C as a laser beam. ing.
The beam diameter of the laser beam is such that part of the laser beam is incident on the end (measurement surface) of the block gauge 2 and the rest passes through the side of the block gauge 2 so that the second half mirror 12B or larger than the measurement surfaces 2A and 2B of the block gauge 2 so as to be incident on the third half mirror 12C.

The first half mirror 12A splits the laser light from the reflecting mirror 11C into a clockwise optical path and a counterclockwise optical path in the figure, and makes each split light incident on an interferometer 12 constructed in an annular shape.
That is, the first parallel light that is one split light is incident on the second half mirror 12B, and the second parallel light that is the other split light is incident on the third half mirror 12C.
Then, the second half mirror 12B divides the first parallel light into the first straight light and the first reference light, and directs the first straight light toward the left in the length measurement direction of the block gauge 2 in the figure. The first reference light is reflected and incident on the first reference mirror 12D. Part of the first straight light reflected toward the left in the figure in the length measurement direction of the block gauge 2 by the second half mirror 12B is incident on the measurement surface 2A (right end surface) of the block gauge 2. The remaining light does not enter the measurement surface 2A of the block gauge 2, passes through the side, and enters the third half mirror 12C.

  On the other hand, the second parallel light beam enters the third half mirror 12C from the first half mirror 12A. The third half mirror 12C divides the second parallel light beam into the second straight light and the second reference light, and reflects the second straight light toward the right direction in the length measurement direction of the block gauge 2. Then, the second reference light is incident on the second reference mirror 12E. A part of the second straight light reflected by the third half mirror 12C toward the right side of the block gauge 2 in the figure enters the measurement surface 2B (left end surface) of the block gauge 2. The remaining light does not enter the measurement surface 2B of the block gauge 2, passes through the side, and enters the second half mirror 12B.

On the first screen 13A, the phase difference between the first reference interference fringe and the first measurement interference fringe is observed.
That is, the light emitted toward the first reference mirror 12D by the second half mirror 12B is reflected by the first reference mirror 12D and returns to the second half mirror 12B again.
In the second half mirror 12B, interference light is obtained by superimposing the second rectilinear light from the third half mirror 12C that has passed by the side of the block gauge 2 and the first reference light from the first reference mirror 12D. This interference light is observed as a first reference interference fringe on the first screen 13A. Simultaneously with this observation, in the second half mirror 12B, the second half mirror 12B emits the light toward the measurement surface 2A of the block gauge 2, reflects on the measurement surface 2A, and returns to the second half mirror 12B again. The interference light is obtained by superimposing the one reflected light and the first reference light from the first reference mirror 12D. This interference light is incident on the first screen 13A, and is observed simultaneously with the first reference interference fringe as the first measurement interference fringe on the first screen 13A.

On the other hand, on the second screen 13B, a phase difference between the second reference interference fringe and the second measurement interference fringe is observed.
In other words, the second reference light irradiated toward the second reference mirror 12E by the third half mirror 12C is reflected by the second reference mirror 12E and returns to the third half mirror 12C again.
In the third half mirror 12C, interference light is obtained by superimposing the first straight light from the second half mirror 12B that has passed by the side of the block gauge 2 and the second reference light from the second reference mirror 12E. This interference light enters the second screen 13B and is observed as a second reference interference fringe on the second screen 13B. Simultaneously with this observation, in the third half mirror 12C, the third half mirror 12C is emitted toward the measurement surface 2B of the block gauge 2, reflected by the measurement surface 2B, and returned to the third half mirror 12C again. The interference light is obtained by superimposing the two reflected light and the second reference light from the second reference mirror 12E. The interference light is incident on the second screen 13B, and is observed simultaneously with the second reference interference fringe as the second measurement interference fringe on the second screen 13B.

[Measurement of dimensions]
Based on the interference fringes on the first screen 13A and the interference fringes on the second screen 13B, the dimension between the measurement surfaces 2A and 2B of the block gauge 2 is calculated. That is, the dimension measuring apparatus 1 reads the phase difference between the first reference interference fringe and the first measurement interference fringe observed on the first screen 13A. Similarly, the dimension measuring apparatus 1 reads the phase difference between the second reference interference fringe and the second measurement interference fringe observed on the second screen 13B. Then, the dimension between the measurement surfaces of the block gauge 2 is calculated by using, for example, a matching method based on the preliminary value information of the block gauge 2 and the read phase difference.

[Configuration of holder]
FIG. 2 is a perspective view showing the holder 100 in a state where the block gauge 2 is held. FIG. 3 is an exploded view showing the configuration of the holder 100.
The holder 100 includes a base 110, a pair of side plates 120, and four clamping members 130 fixed to each side plate 120 at two locations. Note that the side plate 120 and the sandwiching member 130 constitute a holding portion of the present invention.

  The base 110 has a contact surface 111 that contacts the side surface 2E of the four side surfaces 2C, 2D, 2E, 2F orthogonal to the measurement surfaces 2A, 2B of the block gauge 2. The width dimension of the base 110, that is, the dimension along the width direction of the measurement surfaces 2A and 2B is substantially the same as the width dimension of the measurement surfaces 2A and 2B. Here, the width direction of the measurement surfaces 2 </ b> A and 2 </ b> B indicates a width direction along a direction perpendicular to the optical axis of the measurement light and parallel to the side surface 2 </ b> E contacting the contact surface 111. Further, since the holder 100 is installed on the mounting table 31 (see FIG. 1) with the bottom surface of the base 110 facing down, the total length (dimension along the optical axis) of the base 110 is an appropriate length in consideration of installation stability. Is secured. If such a base 110 is used, the existing dimension measuring apparatus 1 can be easily introduced into the mounting table 31.

The plate-like side plate 120 which is a side member of the present invention has a pair of side plates 120A and 120B, and is opposed to each other with an interval of 9 mm which is a dimension in the width direction (short side direction) of the block gauge 2 across the base 110. Are arranged in parallel.
The side plate 120 includes a side plate base 121 attached to both side surfaces of the base 110 and a side plate protruding portion 122 protruding from a substantially center in the longitudinal direction of the base 110 and is formed in a generally convex shape. That is, the pair of side plates 120A and 120B are provided at both side positions of the block gauge 2 in the width direction of the measurement surfaces 2A and 2B, and the side plate protruding portions 122 are provided to protrude vertically upward from the contact surface 111.

Further, in the dimension measurement by the non-ringing method, since interference fringes generated in portions other than the measurement surfaces 2A and 2B of the block gauge 2 (block gauge peripheral portions) are also used for analysis, the thickness dimension of the side plate 120 is sandwiched. The thickness is set as thin as possible while having rigidity necessary for supporting the member 130.
As a material for the base 110 and the side plate 120, a material having a good thermal conductivity (for example, aluminum) is used in consideration of the thermal balance between the dimension measuring device 1 and the block gauge 2.

  The clamping member 130 is formed in a substantially square plate shape, and is bonded to the opposing surfaces of the pair of side plates 120. That is, the two clamping members 130 are arranged on one side plate 120A at intervals of the thickness dimension (nominal dimension) of the block gauge 2 along the thickness direction of the block gauge 2 orthogonal to the measurement surfaces 2A and 2B. ing. Similarly, two clamping members 130 are arranged on the other side plate 120B at intervals of the thickness dimension (nominal dimension) of the block gauge 2 along the thickness direction of the block gauge 2 orthogonal to the measurement surfaces 2A and 2B. Has been. In order to facilitate the insertion of the block gauge 2 between the respective holding members 130, the upper side of the side surface 131 of the opposing holding member 130 is chamfered to form an inclined surface 132.

The block gauge 2 is inserted between the holding members 130 until the side surface 2E of the block gauge 2 comes into contact with the contact surface 111, whereby the measurement surfaces 2A and 2B of the block gauge 2 are held from both sides. Is to be held by. The holding of the block gauge 2 by the clamping member 130 is centered on maintaining the posture, but the fitting between the block gauge 2 and the clamping member 130 is achieved by adjusting the interval between the clamping members 130 with respect to the dimension of the block gauge 2. Thus, the block gauge 2 can be appropriately fixed.
The clamping member 130 is a portion that slides directly with the measurement surfaces 2A and 2B when the block gauge 2 is inserted, and thus is formed of a relatively soft material such as a resin to protect the measurement surfaces 2A and 2B. .

  Since such a holder 100 is installed in the laser beam, interference noise due to the reflected light from the holder 100 may occur. Therefore, in order to reduce the reflected light, the surface that is irradiated with the laser light is subjected to a matte black coating or surface treatment.

FIG. 4 is a front view showing the measured locations 231 to 234 and the held region 21 of the block gauge 2.
The clamping member 130 holds the pair of held regions 21 (FIG. 4) that is a region excluding the vicinity of the side surface 2E that contacts the contact surface 111 of the base 110 in the measurement surfaces 2A and 2B, and the measurement surfaces 2A and 2B. Is held at right angles to the contact surface 111. The pair of held regions 21 are provided at both ends of the measurement surfaces 2A and 2B in the width direction (left-right direction in the drawing) parallel to the side surface 2E.

As shown in FIG. 4, the measurement surfaces 2A and 2B are set with a total of five measurement locations of the central portion 221 and the four corner portions 231, 232, 233, and 234, and at least these measurement locations as described above. A held area 21 is provided in an area excluding.
The projected area from the optical axis direction of the clamping member 130 is set to be as small as possible within a range in which stable holding of the block gauge 2 is obtained so that the held region 21 is as small as possible.

By using such a holder 100, the block gauge 2 is inserted from above into the space between the pair of sandwiching members 130, so that self-supporting on the side surface 2E of the block gauge 2 is assisted. In the above-described dimension measuring apparatus 1, when measuring the length dimension between the measurement surface 2A and the measurement surface 2B by simultaneously irradiating the pair of measurement surfaces 2A and 2B of the block gauge 2 with laser, the measurement surfaces 2A and 2B are measured. The posture of the block gauge 2 can be maintained so that 2B is orthogonal to the measurement optical axis L.
In addition, the correspondence to the block gauge of various nominal dimensions uses a holder of a dedicated size created by setting the interval between the holding members 130.

In addition, the block gauge 2 is an edge scale in which both measurement surfaces 2A and 2B are parallel to each other and the distance between both measurement surfaces 2A and 2B is finished to an arbitrary dimension. There are small and large areas.
Therefore, as a value representing such a dimensional difference, a difference fo between the maximum dimension and the central dimension and a difference fu between the central dimension and the minimum dimension are defined.

FIG. 5 shows the side surface of the block gauge 2 in an exaggerated manner.
In FIG. 5, lc represents the dimension between the center of the measurement surface 2A of the block gauge 2 and the center of the measurement surface 2B, and lmax and lmin represent the maximum value and the minimum value of the distance between the measurement surfaces, respectively.
Here, fo and fu are expressed by the following equations (1) and (2).
fo = lmax−lc (1)
fu = lc−lmin (2)

For example, according to the EAL-E21 standard of EAL-E21 (European co-op for accreditation of laboratories), the center and four corner dimensions of a block gauge are measured. Fo and fu are calculated as lmax and lmin, respectively.
By using the holder 100 of the present embodiment, it is possible to measure such fo and fu even with a thin block gauge.

Further, the side plate 120 and the sandwiching member 130 have a U-shaped structure, and the side plate 120 is made as thin as possible to minimize the light shielding portion of the interference fringes around the block gauge 2. Can do.
In addition, since the interference fringe region around the block gauge 2 is not divided, phase connection can be accurately performed in the measurement result of the surrounding portion. Therefore, it is possible to cope with the light wave interference dimension measuring method capable of improving the robustness against the inclination of the interference fringes previously filed (Japanese Patent Application Laid-Open No. 2004-347531).

[Effects of this embodiment]
According to this embodiment, the following effects can be achieved.
(1) Since the block gauge 2 is held from both sides of the pair of measurement surfaces 2A and 2B by the sandwiching member 130, for example, even a block gauge that cannot stand independently with any one side face as the bottom surface falls. The posture in which the measurement surfaces 2A and 2B are orthogonal to the measurement optical axis can be maintained.

(2) Since the held regions 21 of the measurement surfaces 2A and 2B are provided at least above the lower end and are held by the clamping member 130, the block gauge 2 can be efficiently prevented from falling. That is, since the holding member 130 does not have to hold the held region 21 with a strong holding force, the holding member 130 does not affect the measurement accuracy, and high-precision measurement is possible.

(3) Since the held regions 21 are provided at both ends in the width direction of the measurement surfaces 2A and 2B and are held by the clamping member 130, the pitching and yawing of the block gauge 2 can be prevented.

(4) Since the central portion 221 and the four corner portions 231, 232, 233, and 234 of the measurement surfaces 2A and 2B are not shielded by the clamping member 130, the central portion 221 and the four corner portions 231, 232, 233, and 234 are used. Fo and fu based on the EAL-G21 standard can be measured with high accuracy.

(5) Since the holder 100 has a simple structure and shape, the number of parts can be reduced and the holder 100 can be manufactured at low cost. Moreover, the block gauge 2 can be easily set in the holder 100 with only one hand, for example, by only inserting the block gauge 2 between the pair of clamping members 130. Further, the block gauge 2 can be easily removed.

(6) With the holder 100 holding the block gauge 2, even if a plurality of holders 100 are arranged in the width direction of the measurement surfaces 2A and 2B, the thickness dimension of the side plate 120 is larger than when the block gauge 2 is made to stand alone. However, since it is only necessary to add to the width dimension of the measurement surfaces 2A and 2B, it is possible to perform measurement in a state where a plurality of block gauges 2 are arranged in the width direction of the measurement surfaces 2A and 2B.

[Second Embodiment]
Next, a block gauge holder 100A according to a second embodiment of the present invention will be described with reference to FIG.
FIG. 6 is a perspective view showing a part of the holder 100A.
That is, when the holder 100A is inserted through the block gauge, the holder 100A serves as a biasing member between the clamping members 130 with respect to the holder 100 of the first embodiment in order to completely eliminate the gap between the clamping members 130 and the block gauges. This is different in that the leaf spring 140 is installed, and other configurations are substantially the same.

  One of the two clamping members 130 is a clamping member 130A in which a substantially L-shaped leaf spring 140 is fixed to the side surface. When the block gauge is inserted between the holding members 130 and 130A, an elastic force is generated by elastic deformation of the leaf spring 140, and the held area of the block gauge through which the end portion of the leaf spring 140 is inserted is urged. Thereby, the clearance gap between the clamping member 130 and a block gauge can be eliminated completely, and the retention strength of a block gauge can be strengthened.

According to this embodiment, in addition to the effects substantially the same as the effects (1) to (6), the following effects can be achieved.
(7) Since the elastic member (leaf spring 140) is provided between the clamping members 130 and 130A, the gap between the holder 100A and the block gauge 2 can be eliminated, and the block gauge 2 can be held more reliably.

[Modification of the present invention]
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, a block gauge holder 100B according to a modification of the present invention will be described with reference to FIG.
FIG. 7 is a perspective view showing a part of the holder 100B.
In the holder 100B, one clamping member 130B is slidably supported on the side plate 120C along the thickness direction of the block gauge 2. Further, the clamping member 130B is pressed toward the other clamping member 130 by two coil springs (pressing members) 134 interposed between the clamping plate 130B and the fixed plate 133 fixed to the side plate 120C.
In the above-described embodiment, in order to cope with various nominal dimensions, a dedicated holder is prepared by setting the interval between the clamping members in accordance with the nominal dimensions. However, if the holder 100B shown in FIG. Since the holding position of the clamping member 130B can be moved within the range of elastic deformation of the spring 134, it can easily cope with several kinds of nominal dimensions.

Further, a block gauge holder 100C according to another modification of the present invention will be described with reference to FIG. In the above-described embodiment, the clamping member 130 is provided so as to hold both ends of the measurement surfaces 2A and 2B in the width direction. However, in the holder 100C illustrated in FIG. 8, the pair of clamping members 130 includes the measurement surface 2A. , 2B are provided so as to hold the upper and lower ends in the height direction (direction perpendicular to the contact surface 111). In the first embodiment, the pair of side plates 120A and 120B are arranged so as to sandwich the base 110. However, in the holder 100C, the side plate 120D is arranged on one side of the base 110, and the side plate 120D includes a top plate. 150 is fixed so as to be parallel to the contact surface 111. A pair of clamping members 130 are bonded to the inside of the top plate 150 and the surface of the contact surface 111 at intervals of the thickness dimension of the block gauge 2 to hold the upper and lower ends of the measurement surfaces 2A and 2B from both sides. It is provided as follows.
By using such a holder 100C and inserting the block gauge 2 from the side between the pair of clamping members 130, the block gauge 2 can be prevented from overturning, and the measurement surfaces 2A and 2B can be measured with respect to the measurement optical axis L. The posture of the block gauge 2 can be maintained so as to be orthogonal to each other.

  Moreover, the fixing method of each element which comprises the holder of the said embodiment does not ask | require means, such as fastening with a screw and adhesion | attachment. In addition, each element may be formed integrally, which has an effect of reducing the number of parts.

  Further, the configuration and the like of the dimension measuring device 1 are not limited to those of the above-described embodiments. That is, the dimension measuring apparatus of the present invention may be any apparatus that measures the length dimension between the measurement surfaces by simultaneously irradiating the pair of measurement surfaces of the block gauge with the measurement light. The measuring optical axis is not limited to the horizontal optical axis, and the holder of the present invention can be applied to a vertical optical axis.

  In the above embodiment, the case where the held region is set to a region excluding at least the central part and the four corners of the block gauge has been described, but the present invention is not limited thereto, and the held region of the present invention is as follows. It suffices if the region is set at least excluding the vicinity of the side surface in contact with the base. For example, the held area may be set at the center of the measurement surface, and the measurement position may be changed to a location other than the center of the interference area. Note that the ideal structure of the holder is that the light shielding portion generated by the clamping member makes the non-interference area (unmeasurable area) as small as possible in order to acquire information on the widest possible area by measurement. . As a result, information on a wide area on the measurement surface can be obtained with high accuracy, and various measurements such as measurement of the shape of the measurement surface and appearance inspection can be realized easily and inexpensively.

  The block gauge is not limited to the rectangular rectangular block gauge shown in the above embodiment, but may be a square scale block gauge. If a holder having a dimension suitable for the shape is prepared, the same dimension measurement is possible. It becomes. Moreover, what is necessary is just to produce the holder match | combined with the shape other than a block gauge as a to-be-measured object.

In addition, the best configuration, method and the like for carrying out the present invention have been disclosed above, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  The present invention can be used for a dimension measuring method using light wave interference.

The figure which shows schematic structure of the dimension measuring apparatus used for the dimension measuring method of 1st Embodiment. The perspective view which shows the holder of the block gauge of the said embodiment. The exploded view which shows the holder of the block gauge of the said embodiment. The front view which shows the block gauge of the said embodiment. The figure which exaggerated and showed the side surface of the block gauge of the said embodiment. The perspective view which shows the part of the holder of the block gauge of 2nd Embodiment. The perspective view which shows the part of the holder of the block gauge which concerns on the modification of this invention. The perspective view which shows the holder of the block gauge which concerns on the other modification of this invention. The figure for demonstrating the subject of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Dimension measuring apparatus 2 ... Block gauge 2A ... Measuring surface 2B ... Measuring surface 2E ... Side surface 21 ... Held area 100, 100A, 100B, 100C ... Holder 110 ... Base 111 ... Contact surface 120 ... Side plate (side member)
130: clamping member 134 ... coil spring (pressing member)
140 ... leaf spring (biasing member)
221: Central part 231, 232, 233, 234 ... Four corners.

Claims (8)

When the measurement light is simultaneously irradiated onto a pair of measurement surfaces of the block gauge and the length dimension between the measurement surfaces is measured, the block gauge is arranged so that the measurement surface is orthogonal to the optical axis of the measurement light. A holder for maintaining the posture of
A base having an abutting surface that abuts on any one of four side surfaces orthogonal to the measurement surface of the block gauge;
A holding portion provided on the base and holding the pair of measurement surfaces from both sides,
The holding portion holds at least a held area that is an area excluding the vicinity of the side surface in contact with the contact surface on the measurement surface, and holds the measurement surface at right angles to the contact surface. Block gauge holder characterized by The block gauge holder according to claim 1,
The holder of a block gauge, wherein the holder holds an end of the measurement surface. In the holder of the block gauge according to claim 1 or 2,
The holder of a block gauge, wherein the held area is an area excluding at least a central part and four corners of the measurement surface. In the holder of the block gauge according to any one of claims 1 to 3,
The holding part is
A pair of side members provided on both sides of the block gauge in the width direction of the measurement surface and projecting from the contact surface;
A block provided on the side member, and having a pair of clamping members disposed on both sides of the block gauge along a thickness direction of the block gauge which is a direction perpendicular to the measurement surface Gauge holder. In the holder of the block gauge according to claim 4,
The pair of clamping members are arranged at intervals of a thickness dimension of the block gauge. In the holder of the block gauge according to claim 4,
A block characterized in that a biasing member that biases the block gauge toward the other clamping member is provided between at least one clamping member of the pair of clamping members and the block gauge. Gauge holder. In the holder of the block gauge according to claim 4,
At least one clamping member of the pair of clamping members is supported so as to be movable along the optical axis direction, and when holding the block gauge , the block gauge is more than the one clamping member. Is a holder for a block gauge, which is pressed toward the other clamping member by a pressing member provided on the opposite side. In the holder of the block gauge in any one of Claims 4-7,
A dimension along the width direction of the measurement surface of the base is formed substantially the same as the width dimension of the measurement surface,
The pair of side members are formed in a plate shape and are arranged in parallel with the base in between.

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