JP5239149B2 - Surface acoustic wave revolving element and device for measuring substances in solution - Google Patents

Description

  The present invention relates to a surface acoustic wave circulating element and a substance measuring device in a solution using the surface acoustic wave circulating element.

  A surface acoustic wave revolving element is already known, for example, from International Publication WO 01/45255 A1 (Patent Document 1).

  The surface acoustic wave revolving element includes a base material that includes a surface of at least one annular surface acoustic wave propagation path that is a part of a spherical shape and capable of revolving surface acoustic waves. The surface acoustic wave orbiting element further excites the surface acoustic wave in the surface acoustic wave propagation path on the surface of the substrate, propagates the excited surface wave to the surface acoustic wave propagation path, and circulates the surface acoustic wave propagation path. A surface acoustic wave excitation detecting means for detecting a surface acoustic wave that has come and detecting a detection signal corresponding to the detected surface acoustic wave is provided. The base material is supported by a base material support member in a region excluding the surface acoustic wave propagation path on the surface.

  In the surface acoustic wave revolving element, the velocity and intensity of the surface acoustic wave that circulates in the surface acoustic wave propagation path vary depending on the mass of the material in contact with the surface acoustic wave propagation path. Therefore, the mass of the substance in contact with the surface acoustic wave propagation path can be determined by measuring the time required for the surface acoustic wave to travel around the surface acoustic wave propagation path a predetermined number of times. When only a specific substance is in contact with the surface acoustic wave propagation path, the surface acoustic wave orbiting element is placed in a fluid containing the specific substance, and the above-mentioned time is measured, the concentration of the specific substance in the fluid containing the specific substance I understand.

  By the way, in an experiment using medicine or a biological substance, measurement of a large number of samples containing substances to be measured and molecules in a solution containing eight or more different concentrations, different substances, and different specimens is required.

  It is often necessary to measure more than 8 samples, sometimes more than 100 samples. In order to perform a large number of measurements in this way, it takes a long time to measure, but there are some that change over time in measurements using biological materials, and a measurement device that can complete a large number of measurements in as short a time as possible. Is required.

  As a device for measuring substances in liquids using surface acoustic waves, for example, a method of measuring the resonance frequency of elastic vibration called QCM (Quarts Crystal Microbalance) using a disk-shaped AT-cut crystal has been devised. In addition, there is a limit to the improvement in the measurement method using the elasticity that has a diameter of 30 mm or less and whose frequency is 30 MHz or less and whose sensitivity improves according to the frequency.

  In particular, when the amount of the sample is only 0.1 mL, for example, the size is small with respect to the size of the element and the area of the sensitive surface, making measurement difficult.

Japanese Patent Application Laid-Open No. 2003-294713 (Patent Document 2) discloses a substance inspection apparatus that can accurately inspect a liquid with a small amount using elastic waves. In this conventional substance inspection apparatus, a plurality of accommodation holes in which a plurality of surface acoustic wave excitation means are accommodated are sequentially connected by a flow path, and the liquid sequentially flows through the plurality of accommodation holes through the flow path. Various substances therein are measured by a plurality of surface acoustic wave excitation means.
International publication WO 01/45255 A1 JP 2003-294713 A

  The surface acoustic wave excitation detection means operates using electricity. Therefore, the surface acoustic wave excitation detection means cannot operate normally if the fluid in contact with the surface acoustic wave propagation path or the fluid containing the specific material has conductivity and a high dielectric constant.

  In the substance inspection apparatus described in Japanese Patent Application Laid-Open No. 2003-294713 (Patent Document 2), a plurality of accommodation holes in which a plurality of surface acoustic wave excitation means are accommodated are sequentially connected by a flow path, and the liquid passes through the flow path. Since various substances in the liquid are measured by the plurality of surface acoustic wave excitation means as the plurality of receiving holes sequentially flow, the substances in many kinds of liquids cannot be measured at high speed.

  The present invention has been made under the above circumstances, and the object of the present invention is normal even when a substance in contact with the surface acoustic wave propagation path or a fluid containing a specific substance has conductivity and a high dielectric constant. In addition to providing a surface acoustic wave revolving element with a simple configuration that can operate, it is possible to simultaneously measure substances in a plurality of solutions in a solution by using such a surface acoustic wave revolving element. It is to provide a substance measuring device.

In order to achieve the above-mentioned object of the present invention, a surface acoustic wave revolving element according to the present invention is: at least one annular surface that is part of a spherical shape and capable of revolving surface acoustic waves and rising from a horizontal plane. A base material including a surface acoustic wave propagation path on the surface; and an excited elastic surface disposed in a region located in the upper half of the surface in the surface acoustic wave propagation path of the base material to excite the surface acoustic wave a surface acoustic wave excitation detection means for emitting a detection signal corresponding to the surface acoustic wave detected by detecting the surface acoustic wave came orbiting surface acoustic wave propagation path with propagating waves in the elastic surface wave propagation path; tubular And provided with one end face that is fixed to the upper half of the surface of the base material in the vertical direction with the surface acoustic wave excitation detecting means disposed in the inner hole. grooves across the propagation path is formed based on In the upper half of the vertical surface of a substrate support member for supporting the excluded area surface acoustic wave propagation path; and solution contact inhibition means for inhibiting the solution contact against the surface acoustic wave excitation detecting means; the substrate At least part of the surface acoustic wave propagation path on the surface is covered with a substance that adheres only a predetermined substance contained in the solution and does not prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path. Detection of surface acoustic waves emitted after the surface acoustic wave propagation path is excited and propagated by the surface acoustic wave excitation detection means after being immersed in a solution after at least a part of the surface acoustic wave propagation path on the surface is immersed in the solution. A substance measuring means in the solution for measuring the substance in the solution based on the signal; and connected to the inner hole of the substrate supporting member at a position away from one end surface of the substrate supporting member, and the surface of the substrate Elasticity table After at least part of the wave propagation path is immersed in the solution, the surface acoustic wave propagation path is pulled up from the solution, and before the substance in the solution is measured by the substance measuring means, A gas that supplies gas, descends along the surface of the substrate through a groove on one end surface of the substrate support member, and blows away the solution remaining on the surface of the substrate from at least the surface acoustic wave propagation path And a supply means .

In order to achieve an object of the present invention described above, material measuring device soluble solution in accordance with the present invention are mutually different multiple solutions to each other by a plurality of possible hold separated are arranged in a predetermined sequence A device for measuring a substance in a solution for measuring substances in a plurality of solutions held by the plurality of solution holding parts of a solution holding member including a solution holding part: the surface acoustic wave revolving element according to the present invention described above A plurality of surface acoustic wave revolving elements arranged in the predetermined array ; and the plurality of surface acoustic wave revolving elements are simultaneously moved up and down within a predetermined range, and a plurality of solution holding members are disposed at a lower end position. At least a part of the surface acoustic wave propagation path on the surface of the substrate of the surface acoustic wave circulating element corresponding to the solution holding unit is immersed in the solution held in the solution holding unit, and the plurality of surface acoustic waves are at the upper end position. Rotating element in solution A surface acoustic wave revolving element vertically moving means for separating from the plurality of solution holding portions of the member; and a solution held in the plurality of solution holding portions of the solution holding member at the lower end position. After immersing at least part of the surface acoustic wave propagation path on the surface of the base material of the corresponding surface acoustic wave circulating element, the plurality of surface acoustic wave circulating elements are moved to the upper end position, and the plurality of surface acoustic waves are moved to the upper end position. After the solution remaining on the surface of the base material is blown off from at least the surface acoustic wave propagation path by the gas supply means of the orbiting element, elasticity is obtained by the surface acoustic wave excitation detecting means of the plurality of surface acoustic wave orbiting elements at the upper end position. Based on the detection signal generated from the surface acoustic wave after exciting the surface acoustic wave in the surface wave propagation path and propagating it to circulate a predetermined number. To measure the substance in the solution with a material measuring means in a solution of the surface acoustic wave circulating device is characterized in that.

In the surface acoustic wave revolving element according to the present invention, at least one annular surface acoustic wave propagation path which is a part of a spherical shape included in the surface of the substrate and can revolve the surface acoustic wave is from a horizontal plane. Standing up. Then, the surface acoustic wave that is excited by the surface acoustic wave propagation path on the surface of the substrate is propagated to the surface acoustic wave propagation path, and the surface acoustic wave that has circulated around the surface acoustic wave propagation path is A surface acoustic wave excitation detection means for detecting and generating a detection signal corresponding to the detected surface acoustic wave is disposed in a region located in the upper half of the vertical direction in the surface acoustic wave propagation path on the surface of the substrate. Is excited.

  Therefore, in order to measure the substance in the solution by the substance measuring means in the solution, when at least part of the surface acoustic wave propagation path on the surface of the substrate is immersed in the solution, the surface acoustic wave excitation detecting means from the solution is used. As far away as possible.

Furthermore, in the surface acoustic wave revolving element according to the present invention, the contact of the solution with the surface acoustic wave excitation detecting means is blocked by the solution contact blocking means. Further, it has a cylindrical shape, and is provided with one end face that is fixed to the upper half portion in the vertical direction of the surface of the base material in a state where the surface acoustic wave excitation detecting means is disposed in the inner hole. In the upper half of the vertical direction of the surface of the base material, a region excluding the surface acoustic wave propagation path is supported by the base material support member in which a groove straddling the surface acoustic wave propagation path is formed. Further, at least a part of the surface acoustic wave propagation path on the surface of the base material is covered with a substance that does not prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path by attaching only a predetermined substance contained in the solution. The material measuring means is immersed in the solution at least a part of the surface acoustic wave propagation path on the surface of the substrate and then excited and propagated by the surface acoustic wave propagation path by the surface acoustic wave excitation detection means. A substance in the solution is measured based on a detection signal of a surface acoustic wave emitted later. Then, after at least a part of the surface acoustic wave propagation path on the surface of the substrate is immersed in the solution, the surface acoustic wave propagation path is pulled up from the solution, and before the substance in the solution is measured by the substance measuring means The gas supply means connected to the inner hole of the substrate support member at a position away from the one end surface of the substrate support member supplies gas to the inner hole of the substrate support member, and this gas is supplied to the substrate support member. The solution remaining on the surface of the substrate is blown off at least from the surface acoustic wave propagation path.

  As a result of these, the surface acoustic wave revolving element according to the present invention has a simple structure, but the surface acoustic wave excitation detecting means is provided after at least part of the surface acoustic wave propagation path on the surface of the substrate is immersed in the solution. When the substance in the solution is measured by the substance measuring means in the solution based on the detection signal of the surface acoustic wave generated after being excited and propagated by the surface acoustic wave propagation path and circulated around a predetermined number, Even when a substance in contact with the surface acoustic wave propagation path or a fluid containing a specific substance (that is, a solution) has electrical conductivity and a high dielectric constant, it can operate normally.

In addition, the surface acoustic wave circulating element according to the present invention is based on the detection signal of the surface acoustic wave generated after the surface acoustic wave excitation detecting means is excited and propagated to the surface acoustic wave propagation path and circulates a predetermined number. in the material measuring means in the solution when measuring a substance in the solution, the surface acoustic wave propagation path of the surface of the substrate after immersing at least a portion of the surface acoustic wave propagation path of the surface of the substrate in the solution at least a portion keep pulling up from the solution, it can be.

An apparatus for measuring a substance in a solution according to the present invention includes a plurality of solutions of a solution holding member that includes a plurality of solution holding portions that are arranged in a predetermined arrangement and that are capable of separately holding a plurality of different solutions. An apparatus for measuring a substance in a solution for measuring substances in a plurality of solutions held by a holding unit: having a plurality of surface acoustic wave revolving elements according to the present invention described above and arranged in the predetermined array The surface acoustic wave revolving element includes a plurality of surface acoustic wave revolving elements and a surface acoustic wave revolving element vertical movement means for simultaneously moving the plurality of surface acoustic wave revolving elements up and down within a predetermined range. Then, the surface of the substrate of the surface acoustic wave revolving element corresponding to the solution holding part is applied to the solution held in the plurality of solution holding parts of the solution holding member at the lower end position by the surface acoustic wave revolving element vertical movement means. After immersing at least a part of the surface acoustic wave propagation path, the plurality of surface acoustic wave revolving elements are moved to the upper end position, and the plurality of surface acoustic wave revolving elements are detached from the plurality of solution holding portions of the solution holding member. Furthermore, after the solution remaining on the surface of the base material is blown off from at least the surface acoustic wave propagation path by the gas supply means of the plurality of surface acoustic wave revolving elements at the upper end position, the plurality of surface acoustic wave revolving elements at the upper end position. The surface acoustic wave excitation detection means of the surface acoustic wave is excited and propagated in the surface acoustic wave propagation path, circulates the predetermined number, and is generated from the surface acoustic wave after the surface acoustic wave propagation path circulates the predetermined number Based on the detection signal, the substance in the solution is measured by the substance measuring means in the solution of the surface acoustic wave circulating element.

Substance measuring apparatus in solvent solution in accordance with the invention, to Ru can be obtained various advantages described above can be obtained by surface acoustic wave circulating device in accordance with the invention described above, moreover such elasticity A surface wave circulating element can be used to simultaneously measure substances in a plurality of solutions in a short time.

[First Embodiment of Surface Acoustic Wave Circulating Element According to the Invention]
First, a surface acoustic wave revolving element 10 according to a first embodiment of the present invention will be described with reference to FIG. In FIG. 1A, a front view of a surface acoustic wave circulating element 10 according to the first embodiment of the present invention is schematically shown by disassembling part of the constituent members of the surface acoustic wave circulating element 10. It is shown.

  The surface acoustic wave revolving element 10 is used to measure a desired substance in a solution. Here, the measurement of the desired substance in the solution means measuring the mass of the desired substance contained in the solution.

  The surface acoustic wave revolving element 10 includes a base material 12. The substrate 12 is a part of a sphere, and includes at least one annular surface acoustic wave propagation path 12a that rises from a horizontal plane and is capable of circulating surface acoustic waves. The substrate 12 is formed of a material that is not excited by surface acoustic waves, is a part of a sphere, includes at least one annular part rising from a horizontal plane on the surface, and the part of the surface of the body. The surface acoustic wave can be excited and covered with a material that can propagate the surface acoustic wave. Alternatively, the base material 12 includes at least one annular portion that is a part of a spherical shape and rises from a horizontal plane on the surface by a crystalline material that can propagate a surface acoustic wave along the predetermined crystal surface. It can be provided by forming. As such a crystal material, for example, a crystal group having piezoelectricity called crystal, langasite, lithium niobate, lithium tantalate, or langasite family is known.

  As long as the surface of the base material 12 has only a surface acoustic wave propagation path 12a as a part of a sphere and has an annular shape rising from a horizontal plane, the area other than the surface acoustic wave propagation path 12a may have any shape. it can. For example, the surface of the surface acoustic wave propagation path 12a may have a so-called disk shape in which both sides of the surface acoustic wave propagation path 12a are formed horizontally along the surface acoustic wave propagation path 12a. However, the substrate 12 shown in FIG. 1A has a spherical shape for ease of manufacture.

  For example, lithium niobate can be selected as the crystal material of the substrate 12 and the sphere diameter can be 3.3 mm.

  The term “surface acoustic wave” used in this specification includes “leaky surface acoustic wave” and “pseudo-leakage surface acoustic wave”.

  The surface acoustic wave revolving element 10 excites a surface acoustic wave by exciting the surface acoustic wave in a region located in the upper half of the vertical direction of the surface acoustic wave propagation path 12a on the surface of the substrate 12, and the surface acoustic wave propagation path. A surface acoustic wave excitation detecting means 14 is provided that detects a surface acoustic wave that propagates through the surface acoustic wave propagation path 12a and emits a detection signal corresponding to the detected surface acoustic wave.

  In this embodiment, the surface acoustic wave excitation detecting means 14 is arranged in a region located in the upper half of the vertical direction in the surface acoustic wave propagation path 12a on the surface of the substrate 12, and more specifically, surface acoustic wave propagation. It arrange | positions in the path | route 12a at the upper end part of the perpendicular direction. The meaning of being arranged here is not only in contact with the region, but also with respect to the region as long as it can function as the surface acoustic wave excitation detecting means 14 described above. You may face through.

  In this embodiment, the surface acoustic wave excitation detecting means 14 is constituted by a so-called interdigital electrode, and a pair of terminals 14a are arranged on both sides of the surface of the surface acoustic wave propagation path 12a on the surface of the substrate 12. ing. Such surface acoustic wave excitation detecting means 14 is formed by, for example, printing a conductive material on the above-mentioned region, or patterning it after being deposited by vapor deposition, sputtering or CVD (Chemical Vapor Deposition). Is done.

  For example, the interdigital electrode pitch (electrode element spacing) can be about 2.8 micrometers and the electrode width can be about 14 micrometers.

  The surface acoustic wave circulating element 10 further includes a base material support member 16 that supports a region excluding the surface acoustic wave propagation path 12a in the upper half of the surface of the base material 12 in the vertical direction. In this embodiment, a pair of base material support members 16 are used, and each is formed of an insulator. The pair of base material support members 16 support a pair of conductive paths 18 for the pair of terminals 14 a of the surface acoustic wave excitation detecting means 14.

  The pair of conductive paths 18 can be conductive wires independent of the pair of base material support members 16, but in this embodiment, for example, by printing on the surface of the pair of base material support members 16, Or it forms by making it pattern after making it adhere by vapor deposition, sputtering, or CVD (Chemical Vapor Deposition: Chemical vapor deposition). Each conductive path 18 is disposed on one end face of the corresponding base material support member 16 facing downward, has a terminal, and extends upward from the one end face.

  The pair of base material support members 16 has a surface acoustic wave propagation path 12a in the upper half of the surface of the base material 12 in the vertical direction so that one end surface overlaps the pair of terminals 14a of the surface acoustic wave excitation detection means 14. It is fixed in the area that excludes. Such fixing can be performed by, for example, an adhesive. Due to the overlap, the terminals of the conductive path 18 on one end face of the pair of base material support members 16 and the pair of terminals 14a of the surface acoustic wave excitation detecting means 14 are electrically connected, and the adhesive is electrically Solution contact blocking means for blocking the solution from contacting the connection is configured.

  The surface acoustic wave excitation detecting means 14 is also prevented from contacting the solution by a solution contact preventing means (not shown).

  The solution contact blocking means is a prevention formed by applying a water repellent treatment to the surface acoustic wave excitation detecting means 14 with a material having water repellency or applying a waterproof material to the surface acoustic wave excitation detecting means 14. Can be a membrane.

  The surface acoustic wave revolving element 10 is also excited and propagated by the surface acoustic wave propagation path 12a by the surface acoustic wave excitation detecting means 14 after immersing at least a part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 in the solution. A substance measuring means 20 in the solution for measuring the substance in the solution based on the detection signal of the surface acoustic wave generated after being circulated a predetermined number is provided. The substance measuring means 20 in the solution is electrically connected to one upper extension end of the pair of conductive paths 18. The other upper extension end of the pair of conductive paths 18 is grounded.

  The substance measuring means 20 in the solution includes a high-frequency oscillation circuit, and the surface acoustic wave propagation on the surface of the substrate 12 is performed by loading the surface acoustic wave excitation detecting means 14 with a predetermined frequency as a burst signal at a predetermined timing. A surface acoustic wave can be excited in the path 12a, and the excited surface acoustic wave can be propagated along the surface acoustic wave propagation path 12a and circulated. The substance measuring means 20 in the solution further receives the detection signal of the surface acoustic wave detected by the surface acoustic wave excitation detecting means 14 after being excited and propagated by the surface acoustic wave propagation path 12a and circulating around a predetermined number.

  For example, the burst signal can be a high-frequency signal having a frequency of 150 MHz that lasts for only 5 microseconds, and the substance measuring means 20 in the solution can receive the detection signal via, for example, a 50 ohm impedance matching circuit.

  The substance measuring means 20 in the solution is in a state in which at least a part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 is immersed in the solution, and is left as it is via the surface acoustic wave excitation detecting means 14. A surface acoustic wave is excited in the surface acoustic wave propagation path 12a on the surface, and the excited surface acoustic wave is propagated along the surface acoustic wave propagation path 12a and corresponds to the surface acoustic wave detected after being circulated a predetermined number. A detection signal is received, and a substance in the solution is measured based on the detection signal.

  For example, the substance measuring unit 20 in the solution loads the surface acoustic wave propagation path 12a via the surface acoustic wave excitation detecting unit 14 with a high frequency having a predetermined frequency as a burst signal and excites the surface acoustic wave by a predetermined number. The time required for the surface acoustic wave excitation detection means 14 to detect the surface acoustic wave after being circulated and generate a corresponding detection signal is measured. Alternatively, the substance measuring means 20 in the solution measures the difference between the intensity of the burst signal and the intensity of the detection signal. These measured values can be obtained by converting the burst signal and the received signal into data using, for example, a digital oscilloscope.

  If the predetermined substance contained in the solution is one kind, the difference in the time and the intensity is determined according to the mass of the predetermined substance in the solution. That is, the mass of the predetermined substance in the solution can be determined by measuring the time and the difference in strength.

  When a plurality of substances are included in the solution and one kind of predetermined substance is to be measured, at least a part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 immersed in the solution may be It suffices to cover only a predetermined substance with a substance that does not prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12a.

  Only the predetermined substance can be attached to at least a part of the surface acoustic wave propagation path 12a on the surface of the base material 12 immersed in the solution, and the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12a can be prevented. If the predetermined substance is separated from the solution and its mass does not change, at least part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 is immersed in the solution. After that, it is pulled out from the solution, and then the predetermined substance in the solution can be measured by the substance measuring means 20 in the solution as described above.

  Display means 22 for displaying a predetermined substance measured in the solution can be connected to the substance measuring means 20 in the solution. Further, the display means 22 is loaded with a high frequency of a predetermined frequency as a burst signal on the surface acoustic wave propagation path 12a via the surface acoustic wave excitation detecting means 14 and exciting the surface acoustic wave. The time required for the surface acoustic wave excitation detecting means 14 to detect the surface acoustic wave after being circulated a predetermined number and generating a corresponding detection signal, the intensity of the burst signal, the intensity of the detection signal, The difference between the intensity of the burst signal and the intensity of the detection signal can also be displayed.

  In this embodiment, the surface acoustic wave excitation detecting means 14 is arranged in a region located in the upper half portion in the vertical direction in the surface acoustic wave propagation path 12 a on the surface of the substrate 12.

  Therefore, when at least part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 is immersed in the solution in order to measure the substance in the solution by the substance measuring means 20 in the solution, the surface acoustic wave is extracted from the solution. The excitation detection means 14 can be moved as far away as possible.

  Furthermore, in the surface acoustic wave revolving element 10 according to this embodiment, the contact of the solution with the surface acoustic wave excitation detecting means 14 is blocked by a solution contact blocking means (not shown).

  As a result, the surface acoustic wave revolving element 10 according to this embodiment has a simple configuration, but is elastic after at least part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 is immersed in the solution. Based on the surface acoustic wave detection signal emitted after being excited and propagated by the surface acoustic wave propagation path 12a by the surface wave excitation detection means 14 and circulated around a predetermined number, the substance measurement means 20 in the solution in the solution When measuring this material, the material in contact with the surface acoustic wave propagation path 12a or a fluid containing a specific material (that is, a solution) may operate normally even if it has conductivity and high dielectric constant. I can do it.

[First Modification of Surface Acoustic Wave Circulating Element 10 According to First Embodiment of the Invention]
Next, a first modification of the surface acoustic wave revolving element 10 according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1B schematically shows a front view of a first modification of the surface acoustic wave revolving element 10 according to the first embodiment of the present invention shown in FIG. Is shown in

  Most of the configuration of the surface acoustic wave revolving element 10 'according to the first modification is the same as that of the surface acoustic wave revolving element 10 according to the first embodiment shown in FIG. Same as most. Accordingly, in the surface acoustic wave revolving element 10 ′ according to the first modification, the same constituent members as those of the surface acoustic wave revolving element 10 according to the first embodiment are used as the elastic surface according to the first embodiment. The same reference numerals as the reference numerals attached to the corresponding components in the wave turning element 10 are used, and the detailed description is omitted.

  The surface acoustic wave circulating element 10 'according to the first modification differs from the surface acoustic wave circulating element 10 according to the first embodiment shown in FIG. That is, another surface acoustic wave propagation path 12 ′ a is set on the surface 12 and another surface acoustic wave excitation detecting means 14 ′ is arranged.

  The other surface acoustic wave propagation path 12'a is also a part of a spherical shape, and the surface acoustic wave can be circulated and has an annular shape and rises from the horizontal plane HL. It is shallower than the propagation path 12a. Therefore, even when part of the surface acoustic wave propagation path 12a is immersed in the solution, the other surface acoustic wave propagation path 12'a can be prevented from being immersed in the solution.

  Another surface acoustic wave excitation detecting means 14 'is also arranged in the upper half region of the surface of the substrate 12 in another surface acoustic wave propagation path 12'a, and a pair of terminals 14'a. One of these is connected to the substance measuring means 20 'in the solution, and the other is grounded. Also in this modification, the pair of terminals 14'a can be independent conductive wires. However, one terminal 14'a is an insulator that supports the region excluding the surface acoustic wave propagation path 12a and the other surface acoustic wave propagation path 12'a in the upper half of the surface of the substrate 12 in the vertical direction. The conductive path formed by, for example, printing on the surface of the other base material support member 16 ′, or by patterning after being deposited by vapor deposition, sputtering, or CVD (Chemical Vapor Deposition) A terminal disposed on one end surface facing downward of another base material support member 16 ′ in 18 ′ overlaps with one terminal 14′a, thereby being electrically connected to the conductive path 18 ′. Yes. The upper extension end of the conductive path 18 'is connected to the substance measuring means 20' in the solution.

  The other base material support member 16 'has an upper half portion in the vertical direction on the surface of the base material 12 so that one end surface thereof overlaps with the one of the pair of terminals 14'a of the surface acoustic wave excitation detection means 14'. The surface acoustic wave propagation paths 12a and 12'a are excluded from the region. Such fixing can be performed with an adhesive, for example. The adhesive constitutes solution contact preventing means for preventing the solution from coming into contact with the electrical connection between the one terminal 14′a and the conductive path 18 ′.

  The other grounded terminal 14'a of the other surface acoustic wave excitation detecting means 14 'is overlapped with the other end face 14a of the surface acoustic wave excitation detecting means 14 at the lower end. It overlaps with the said one end surface of the base-material support member 16, and is earth | grounded by the upper extension end of electric conduction path 18 'by which the terminal is arrange | positioned at the said one end surface. The conductive path 18 ′ is also formed by, for example, printing on the surface of the substrate support member 16, or by patterning after being deposited by vapor deposition, sputtering, or CVD (Chemical Vapor Deposition). A terminal disposed on one end surface facing downward of the material support member 16 is overlapped with the other terminal 14'a, thereby being electrically connected to the conductive path 18 '.

  The electrical connection between the other terminal 14'a and the conductive path 18 'can also prevent contact with the solution by, for example, an adhesive fixing the base material support member 16 to the surface of the base material 12. .

  The surface acoustic wave excitation detecting means 14 'is also prevented from contacting the solution by a solution contact preventing means (not shown). The solution contact blocking means is formed by applying a water repellency treatment to the surface acoustic wave excitation detecting means 14 ′ by a material having water repellency or applying a waterproof material to the surface acoustic wave excitation detecting means 14 ′. Can be waterproof membrane.

  In the surface acoustic wave revolving element 10 ′ according to the first modification configured as described above, at least a part of the surface acoustic wave propagation path 12 a on the surface of the substrate 12 is immersed in the solution, and the state is kept as it is. Alternatively, after at least a part of the surface acoustic wave propagation path 12a on the surface of the substrate 12 is immersed in the solution, it is pulled up from the solution, and thereafter, the substance measuring means 20 ′ in the solution is subjected to the surface acoustic wave excitation detecting means 14. The surface acoustic wave propagation path 12a on the surface of the base material 12 is excited through the surface acoustic wave to cause the excited surface acoustic wave to propagate along the surface acoustic wave propagation path 12a, and is detected after being circulated a predetermined number. When a detection signal corresponding to the generated surface acoustic wave is received and a substance in the solution is measured based on the detection signal, it is immersed in the solution on the surface of the substrate 12 through the surface acoustic wave excitation detecting means 14 '. The The surface acoustic wave that is detected after the surface acoustic wave is excited along the surface acoustic wave propagation path 12'a by exciting the surface acoustic wave in the non-surface acoustic wave propagation path 12'a and propagating along the surface acoustic wave propagation path 12'a. A detection signal corresponding to is received. The time from the burst signal of the surface acoustic wave that circulates in the surface acoustic wave propagation path 12 ′ to the detection signal after a predetermined number of laps and the intensity difference between the burst signal and the detection signal are affected only by the ambient temperature around the substrate 12. Receive.

  That is, in the surface acoustic wave revolving element 10 'according to the first modification, the time or burst from the surface acoustic wave burst signal that circulates the surface acoustic wave propagation path 12'a to the detection signal after a predetermined number of laps. The difference in intensity between the signal and the detection signal, the time from the burst signal of the surface acoustic wave that circulates in the surface acoustic wave propagation path 12a after being immersed in the solution to the detection signal after a predetermined number of laps, or the burst signal and the detection signal Between the burst signal of the surface acoustic wave that circulates the surface acoustic wave propagation path 12a after being immersed in the solution and the detection signal after the predetermined number of laps or the burst signal and the detection signal. The measurement result of the substance in the solution by the substance measuring means 20 ′ in the solution based on the difference in strength between the base material 12 and the substrate 12 can be calibrated by the influence of the ambient temperature around the substrate 12.

[Second Modification of Surface Acoustic Wave Circulating Element 10 According to First Embodiment of the Invention]
Next, a second modification of the surface acoustic wave revolving element 10 according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1C schematically shows a front view of a second modification of the surface acoustic wave revolving element 10 according to the first embodiment of the present invention shown in FIG. Is shown in

  Most of the configuration of the surface acoustic wave circulating element 10 ″ according to the second modification is the configuration of the surface acoustic wave circulating element 10 according to the first embodiment shown in FIG. And most of the configuration of the surface acoustic wave revolving element 10 'according to the first modification shown in FIG. 1B. Therefore, in the surface acoustic wave circulating element 10 ″ according to the second modification, the constituent members of the surface acoustic wave circulating element 10 according to the first embodiment and the surface acoustic wave circulating element 10 ′ according to the first modification. The same constituent members as those in FIG. 1 correspond to the constituent members corresponding to the surface acoustic wave circulating element 10 according to the first embodiment and the surface acoustic wave circulating element 10 ′ according to the first modification. The same reference numerals as those used for the constituent members are attached, and detailed description thereof is omitted.

  A surface acoustic wave revolving element 10 '' of this modification is shown in FIG. 1A and the surface acoustic wave revolving element 10 according to the first embodiment shown in FIG. 1A. The difference from the surface acoustic wave revolving element 10 'according to the first modified example is that the two surface acoustic wave propagation paths 12a, 12'a on the surface of the substrate 12 have the same angle with respect to the horizontal line HL. It is inclined at.

  This is intended that when a part of one surface acoustic wave propagation path 12a is immersed in the solution, a part of the other surface acoustic wave propagation path 12'a is also immersed in the solution at the same time.

  Each of the two surface acoustic wave excitation detection means 14 and 14 'disposed in the two surface acoustic wave propagation paths 12a and 12'a includes a substance measurement means 20 and a display means in a solution having the same configuration. 22 is connected. In addition, only one type of a predetermined substance among a plurality of substances contained in the solution can be attached to a part of the surface acoustic wave propagation path 12a that is immersed in the solution, and the surface acoustic wave propagation path 12a. Is covered with a substance that does not hinder the propagation of surface acoustic waves in the other surface, and part of the other surface acoustic wave propagation path 12'a immersed in the solution is another one of the plurality of substances contained in the solution. It is covered with a substance that can attach only a predetermined material of the seed and does not prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12'a.

  Therefore, the surface acoustic wave revolving element 10 ″ according to the second modification has two surface acoustic waves after the two surface acoustic wave propagation paths 12a and 12′a on the surface of the substrate 12 are immersed in the solution at the same time. While the propagation paths 12a and 12'a are immersed in the solution at the same time, or two surface acoustic wave propagation paths 12a and 12'a are immersed in the solution at the same time and then pulled out of the solution, a plurality of substances contained in the solution Two kinds of predetermined substances can be measured.

[Second Embodiment of Surface Acoustic Wave Circulating Element According to the Invention]
Next, a surface acoustic wave revolving element 30 according to a second embodiment of the present invention will be described in detail with reference to FIGS.

  In FIG. 2A, a front view of a surface acoustic wave circulating element 30 according to the second embodiment of the present invention is schematically shown by disassembling part of the constituent members of the surface acoustic wave circulating element 30. It is shown.

  In FIG. 2B, a front view of the surface acoustic wave circulating element 30 according to the second embodiment of the present invention is schematically shown without a part of components of the surface acoustic wave circulating element 30 being disassembled. Has been shown.

  In FIG. 2C, a side view of the surface acoustic wave circulating element 30 according to the second embodiment of the present invention is schematically shown in which a part of the constituent members of the surface acoustic wave circulating element 30 is a longitudinal section. Is shown in

  Most of the configuration of the surface acoustic wave revolving element 30 according to the second embodiment is the same as that of the surface acoustic wave revolving element 10 according to the first embodiment shown in FIG. Same as most. Therefore, in the surface acoustic wave revolving element 30 according to the second embodiment, the same constituent members as those of the surface acoustic wave revolving element 10 according to the first embodiment have the elastic surface according to the first embodiment. The same reference numerals as the reference numerals attached to the corresponding components in the wave turning element 10 are used, and the detailed description is omitted.

  The surface acoustic wave circulating element 30 according to the second embodiment is different from the surface acoustic wave circulating element 10 according to the first embodiment shown in FIG. That is, the base material support member 36 that supports the region excluding the surface acoustic wave propagation path 12a in the upper half of the surface 12 in the vertical direction is formed into a cylindrical shape by an insulator.

  For example, the outer diameter of the cylindrical base material support member 36 can be set to 4 mm.

  The cylindrical base material support member 36 includes one end face that is fixed to the upper half portion in the vertical direction of the surface of the base material 12 in a state where the surface acoustic wave excitation detection means 14 is disposed in the inner hole. A pair of grooves 36a straddling the surface acoustic wave propagation path 12a is formed on one end surface. The base material support member 36 is a pair of terminals of the surface acoustic wave excitation detecting means 14 that is disposed in the inner hole of the base material support member 36 with the terminals of the pair of conductive paths 18 disposed on the one end surface. For example, an adhesive 38 is fixed to the upper half of the surface of the base material 12 so as to overlap with 14 a. Due to the overlap, electrical connection between the terminals of the pair of conductive paths 18 disposed on the one end face of the base material support member 36 and the pair of terminals 14a of the surface acoustic wave excitation detecting means 14 is achieved. . The adhesive 38 is a solution in which the electrical connection between the pair of terminals 18 of the conductive path 18 disposed on the one end face of the substrate support member 36 and the pair of terminals 14a of the surface acoustic wave excitation detecting means 14 is a solution. The solution contact blocking means is configured to block contact with the liquid.

  The depth D of each of the pair of grooves 36a can be set to 0.1 mm, for example. If the depth D of each of the pair of grooves 36a is 20 microns or less, the solution cannot pass through each groove 36a due to the surface tension of the solution generated in each groove 36a.

  Each of the pair of grooves 36a can prevent the solution from entering the inner hole of the base material support member 36 through each groove 36a, and can pass through the surface acoustic wave propagation path 12a over which each groove 36a straddles. It can be blocked by a material that does not prevent the propagation of surface acoustic waves.

  However, in this embodiment, the surface acoustic wave excitation detecting means 14 disposed in the inner hole of the cylindrical base material support member 36 prevents the solution contact described above so as to prevent contact with the solution. Covered by means.

  Therefore, the surface acoustic wave revolving element 30 of this embodiment can be immersed in the solution up to the upper end of the substrate 12.

[First Modification of Surface Acoustic Wave Circulating Element 30 According to Second Embodiment of the Invention]
Next, a first modification of the surface acoustic wave revolving element 30 according to the second embodiment of the present invention will be described in detail with reference to FIG. FIG. 3 schematically shows a top view of a first modification of surface acoustic wave circuit 30 according to the second embodiment of the present invention.

  Most of the configuration of the surface acoustic wave revolving element 30 'according to the first modification is mostly the surface acoustic wave revolving according to the second embodiment shown in FIGS. This is the same as most of the configuration of the element 30. Accordingly, in the surface acoustic wave revolving element 30 ′ according to the first modification, the same constituent members as those of the surface acoustic wave revolving element 30 according to the second embodiment conform to the second embodiment. The same reference numerals as those used for the corresponding components of the surface acoustic wave revolving element 30 are used, and detailed description thereof is omitted.

  The surface acoustic wave circulating element 30 ′ according to the first modification is different from the surface acoustic wave circulating element 30 according to the second embodiment in that another surface acoustic wave is formed on the surface of the substrate 12. A propagation path 12 ″ a is provided. Another surface acoustic wave propagation path 12 ″ a intersects the surface acoustic wave propagation path 12 a at the upper half in the vertical direction of the surface of the substrate 12, the upper end in this modification, In the lower half of the vertical direction, it intersects with the surface acoustic wave propagation path 12a at a position opposite to the intersecting position of the upper half in the diametrical direction of the substrate 12, in this modified example, at the lower end. And the double surface acoustic wave excitation detection means 40 for the two surface acoustic wave propagation paths 12a, 12 ″ a are disposed at the intersection of the upper half. The double surface acoustic wave excitation detecting means 40 overlaps, for example, an interdigital electrode for the surface acoustic wave propagation path 12a and an interdigital electrode for the other surface acoustic wave propagation path 12 ″ a. Can be configured.

  The double surface acoustic wave excitation detection means 40 is surrounded by one end face of the cylindrical insulator base material support member 36 'facing downward and disposed in the inner hole of the one end face. Two pairs of grooves 36a and 36'a straddling the two surface acoustic wave propagation paths 12a and 12 "a are formed on the one end face of the base material support member 36 '.

  A pair of terminals 40a of one surface acoustic wave excitation detecting means 40 for one surface acoustic wave propagation path 12a disposed on both sides of one surface acoustic wave propagation path 12a and the other surface acoustic wave propagation path 12 The pair of terminals 40 ′ a of the other surface acoustic wave excitation detecting means 40 for the other surface acoustic wave propagation path 12 ′ a disposed on both sides of ′ a is the above-mentioned of the base material support member 36 ′. One end surface overlaps two pairs of terminals disposed on both sides of the two pairs of grooves 36a and 36'a. The two pairs of terminals are the lower ends of the two pairs of conductive paths 18, 18 ″ supported by the base material support member 36 ′, and are extended above the two pairs of conductive paths 18, 18 ″. Each pair of ends is electrically connected to one pair (see FIG. 2A) of a combination of the substance measuring means 20 and the display means 22 in a solution having the same configuration. The one end surface of the base material support member 36 ′ is fixed to the upper half portion in the vertical direction of the surface of the base material 12 by, for example, an adhesive 38.

  The adhesive 38 is a solution for the electrical connection between the two pairs of terminals 40a and 40'a of the double surface acoustic wave excitation detecting means 40 and the two pairs of terminals of the two pairs of conductive paths 18 and 18 ''. It functions as a solution blocking means for blocking contact.

  The double surface acoustic wave excitation detecting means 40 is covered with the above-described solution contact preventing means so as to prevent contact with the solution.

  The depth D of each of the two pairs of grooves 36a and 36'a on the one end surface of the base material supporting member 36 'can be set to 0.1 mm, for example. If the depth D of each of the two pairs of grooves 36a and 36'a is 20 microns or less, the solution cannot pass through each groove 36a due to the surface tension of the solution generated in each of the grooves 36a and 36'a.

  Each of the pair of grooves 36a can prevent the solution from entering the inner hole of the base material support member 36 ″ via the respective grooves 36a, 36′a, and each groove 36a, 36′a The straddling surface acoustic wave propagation paths 12a and 12'a can be blocked with a material that does not prevent the surface acoustic waves from propagating.

  Therefore, the surface acoustic wave revolving element 30 ′ of this embodiment can be immersed in the solution up to the upper end of the substrate 12.

  In addition, only one type of a predetermined substance among a plurality of substances contained in the solution can be attached to a part of the surface acoustic wave propagation path 12a that is immersed in the solution, and the surface acoustic wave propagation path 12a. Is covered with a substance that does not hinder the propagation of the surface acoustic wave in the surface, and a part of the other surface acoustic wave propagation path 12 ″ a that is immersed in the solution is a part of the plurality of substances contained in the solution. Only one kind of predetermined substance can be adhered, and it is covered with a substance that does not prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12 ″ a.

  Therefore, the surface acoustic wave revolving element 30 ′ according to the first modification has two surface acoustic wave waves after the two surface acoustic wave propagation paths 12 a and 12 ″ a on the surface of the base material 12 are simultaneously immersed in the solution. While the propagation paths 12a and 12 "a are immersed in the solution at the same time, or in a state where the two surface acoustic wave propagation paths 12a and 12" a are simultaneously immersed in the solution and then pulled out of the solution, a plurality of Two kinds of predetermined substances in the substance can be measured.

[Second Modification of Surface Acoustic Wave Circulating Element 30 According to Second Embodiment of the Invention]
Next, a second modification of the surface acoustic wave revolving element 30 according to the second embodiment of the present invention will be described in detail with reference to FIGS. 4 (A) and 4 (B). In FIG. 4A, the substrate 12 of the second modification of the surface acoustic wave revolving element 30 according to the second embodiment of the present invention is once immersed in the solution and then pulled up from the solution. A side view of the state immediately after is schematically shown: FIG. 4B shows a second modification of the surface acoustic wave revolving element 30 according to the second embodiment of the present invention. Side view of a state in which the base material 12 is once dipped in the solution and then pulled up from the solution, and the remaining solution on the surface of the base material 12 is blown off by a configuration unique to the second modification. Is shown schematically.

  Most of the configuration of the surface acoustic wave circulating element 30 ″ according to the second modification is the surface acoustic wave according to the second embodiment shown in FIGS. 2 (A) to (C). This is the same as most of the configuration of the revolving element 30. Accordingly, in the surface acoustic wave circulating element 30 ″ according to the second modification, the same constituent members as those of the surface acoustic wave circulating element 30 according to the second embodiment are used in the second embodiment. Accordingly, the same reference numerals as those used for the corresponding constituent members of the surface acoustic wave revolving element 30 are attached and detailed description thereof is omitted.

  The surface acoustic wave circulating element 30 ″ according to the second modification is different from the surface acoustic wave circulating element 30 according to the second embodiment in that the inner hole of the cylindrical base material supporting member 36 is In other words, the gas supply means 42 is connected. The gas supply means 42 supplies a gas that does not denature a predetermined substance in the solution to the inner hole of the cylindrical substrate support member 36 at a predetermined timing described later.

  Further, the groove 36a on one end surface of the cylindrical base material support member 36 is not closed, and a part of the surface of the surface acoustic wave propagation path 12a of the base material 12 that is immersed in the solution is included in the predetermined solution. It is covered with a substance that can attach only a substance and does not interfere with the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12a.

  When measuring a predetermined substance in the solution using the surface acoustic wave revolving element 30 ″ according to the second modification, the substrate 12 is immersed in the solution and then pulled up from the solution. At this time, as shown in FIG. 4A, the fixing part using, for example, an adhesive 38 on one end surface of the cylindrical base material support member 36 with respect to the surface of the base material 12 or the surface of the base material 12 A part of the solution LB may remain at the lower end of the substrate.

  A part LB of the remaining solution covers a region near and a lower end region of the groove 36a on one end surface of the cylindrical base material support member 36 in the surface acoustic wave propagation path 12a, and thereafter a substance in the solution. Using the measuring means 20, it is possible to attach only a predetermined substance contained in the solution in the surface acoustic wave propagation path 12a of the substrate 12, and to prevent the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12a. When measuring a predetermined substance attached to a non-existing substance, the accuracy of the measurement is lowered.

  In this modified example, in order to prevent such a reduction in measurement accuracy, the surface acoustic wave revolving element 30 ″ according to the second modified example is obtained after the substrate 12 is immersed in the solution and pulled up from the solution. Before the predetermined substance in the solution is measured using the gas, the gas is supplied from the gas supply means 42 into the inner hole of the cylindrical base material support member 36. The gas supplied into the inner hole of the cylindrical substrate supporting member 36 is 1 on one end surface of the cylindrical substrate supporting member 36 as indicated by an arrow F in FIG. It passes along the pair of grooves 36a and descends along the surface of the substrate 12, and during this time, a part of the solution LB remaining on the surface of the substrate 12 is blown off at least from the surface acoustic wave propagation path 12a.

[Residual solution recovery device]
FIG. 5 shows a surface acoustic wave revolving element 30 according to the second embodiment, wherein the substrate 12 is immersed in a solution and pulled up from the solution, and then a predetermined substance in the solution is used by using the surface acoustic wave revolving element 30. FIG. 2 shows a schematic longitudinal sectional view of a residual solution recovery apparatus 46 that blows off a part LB of the solution remaining on the surface of the base material 12 from the surface before the measurement.

  The residual solution recovery device 46 includes a base material insertion space 46 a into which the base material 12 of the surface acoustic wave revolving element 30 after being immersed in the solution and pulled up from the solution is inserted together with the base material support member 36. On the inner surface of the base material insertion space 46a, gas flows into a position above the base material 12 inserted into the base material insertion space 46a together with the base material support member 36 and a position facing the lower end of the surface of the base material 12. A hole 46b is opened. The gas inflow hole 46b is connected to a gas supply means 46c that supplies a gas that does not denature a predetermined substance in the solution.

  A residual solution discharge hole 46d is opened at a position below the base material 12 inserted into the base material insertion space 46a together with the base material support member 36 on the inner surface of the base material insertion space 46a. An exhaust means 46e is connected to 46d.

  In the residual solution recovery device 46 configured in this way, the base material 12 of the surface acoustic wave revolving element 30 after being immersed in the solution and pulled up from the solution is inserted into the base material insertion space 46a together with the base material support member 36 from above. Then, the gas from the gas supply means 46c is caused to flow into the base material insertion space 46a through the gas inflow hole 46b, and the exhaust means 46e is operated.

  The gas flowing into the base material insertion space 46a from the gas supply means 46c through the gas inflow hole 46b is outside the base material support member 36 and the base material 12 in the base material insertion space 46a as shown by an arrow F ′. It flows toward the residual solution discharge hole 46d along the surface. In the meantime, a part of the solution LB remaining on the surface of the substrate 12 is blown off from the surface of the substrate 12 toward the residual solution discharge hole 46d. A part of the solution LB blown off from the surface of the substrate 12 toward the residual solution discharge hole 46d is discharged from the residual solution discharge hole 46d together with the gas by the exhaust means 46e.

  Thereafter, a predetermined substance in the solution is measured using the surface acoustic wave revolving element 30 according to the second embodiment. That is, only a predetermined substance contained in the solution can be attached to the surface acoustic wave propagation path 12a of the substrate 12 of the surface acoustic wave circulating element 30, and the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12a is prevented. Measures a predetermined substance attached to a substance that does not have any.

[Third Embodiment of Surface Acoustic Wave Circulating Element According to the Invention]
Next, a surface acoustic wave revolving element 50 according to a third embodiment of the present invention will be described in detail with reference to FIG.

  FIG. 6 schematically shows a front view of a surface acoustic wave revolving element 50 according to the third embodiment of the present invention, with parts of the components of the surface acoustic wave revolving element 50 disassembled. .

  Most of the configuration of the surface acoustic wave revolving element 50 according to the third embodiment is the same as that of the surface acoustic wave revolving element 10 according to the first embodiment shown in FIG. Same as most. Accordingly, in the surface acoustic wave revolving element 50 according to the third embodiment, the same constituent members as those of the surface acoustic wave revolving element 10 according to the first embodiment have elastic surfaces according to the first embodiment. The same reference numerals as the reference numerals attached to the corresponding components in the wave turning element 10 are used, and the detailed description is omitted.

  The surface acoustic wave circulating element 50 according to the third embodiment is different from the surface acoustic wave circulating element 10 according to the first embodiment shown in FIG. That is, at least one annular surface acoustic wave propagation path 12 ″ ″ a, which is a part of a spherical shape on the surface of the surface 12 and is capable of circulating a surface acoustic wave, is disposed in the horizontal plane HL.

  Further, in the surface acoustic wave revolving element 50 according to the third embodiment, the surface acoustic wave excitation detecting means 14 disposed on the surface of the base material 12 includes the surface acoustic wave excitation detecting means 14 on the surface of the base material 12. Are disposed on the upper side of the surface acoustic wave propagation path 12 ″ ″ a.

  Furthermore, in the surface acoustic wave revolving element 50 according to the third embodiment, a base that supports a region excluding the surface acoustic wave propagation path 12 ″ ″ a in the upper half of the surface of the substrate 12 in the vertical direction. The material support member 36 ′ is formed in a cylindrical shape by an insulator.

  The cylindrical base material support member 36 ′ has one end face that overlaps and is fixed to the pair of terminals 14 ″ a of the surface acoustic wave excitation detecting means 14 on the surface of the base material 12. A pair of conductive paths 18 having terminals arranged on the end faces and electrically connected to the substance measuring means 20 in the solution are supported.

  The cylindrical base material support member 36 ′ overlaps the pair of terminals 14 a of the surface acoustic wave excitation detection means 14 with the terminals of the pair of conductive paths 18 arranged on the one end surface. For example, it is fixed to the upper half of the vertical direction by an adhesive 52. Due to the overlap, electrical connection between the terminals of the pair of conductive paths 18 disposed on the one end face of the substrate support member 36 ′ and the pair of terminals 14 ″ a of the surface acoustic wave excitation detecting means 14 is performed. Has been achieved. The adhesive 52 is electrically connected between the terminals of the pair of conductive paths 18 disposed on the one end face of the substrate support member 36 ′ and the pair of terminals 14 ″ a of the surface acoustic wave excitation detecting means 14. Solution contact blocking means for blocking the open connection from contacting the solution.

  The portions of the surface acoustic wave excitation detecting means 14 and the pair of terminals 14 ″ a exposed on the surface of the substrate 12 include, for example, a water-repellent treatment or a cover with a waterproof film of a non-conductive material not shown. Contact with the solution is blocked by the solution contact blocking means.

  Only a predetermined substance contained in the solution can be attached to a part of the surface acoustic wave propagation path 12 ″ ″ a, and the propagation of the surface acoustic wave in the surface acoustic wave propagation path 12 ″ ″ a is prevented. It is covered with a material that never happens.

  When measuring a predetermined substance in a solution using the surface acoustic wave revolving element 50 according to the third modification, the substrate 12 is pulled up from the solution after being immersed in the solution. At this time, as shown in FIG. 7B, for example, the fixing part using the adhesive 52 on the one end surface of the cylindrical base material support member 36 ′ with respect to the surface of the base material 12 or the base material 12. Some LB of the solution may remain at the lower end of the surface.

  In order to blow off a part of the solution LB remaining on the surface of the substrate 12 from the surface before measuring a predetermined substance in the solution using the surface acoustic wave revolving element 50, FIG. The base material 12 of the surface acoustic wave revolving element 50 after being pulled up from the solution into the base material insertion space 46a of the residual solution recovery device 46 as shown in FIG. Even when the gas from the supply means 46c flows into the base material insertion space 46a through the gas inflow hole 46b and the exhaust means 46e is operated, the base material as shown in FIG. In some cases, a part of the concentrated solution CLB may remain at the lower end of the surface 12.

  However, even in such a case, a part of the concentrated solution CLB on the surface of the base material 12 remains only at the lower end portion of the surface of the base material 12, and the surface acoustic wave propagation path 12 ″ ″. A part LB of the solution as well as a part CLB of the concentrated solution are not attached to a.

  Accordingly, the substrate 12 is dipped in the solution and then pulled up from the solution, and the surface acoustic wave revolving element 50 after the partial solution LB remaining in the residual solution recovery device 46 is recovered is used to obtain a predetermined solution in the solution. If this substance is measured, the measured value becomes highly accurate.

[Measurement equipment for substances in solution]
Next, an embodiment of a substance measuring device in solution according to the present invention will be described with reference to FIGS.

  The substance measurement device 60 in a solution according to one embodiment includes a plurality of solutions that are arranged in a predetermined arrangement as shown in FIG. 8 and that can hold a plurality of different solutions separated from each other. Substances in the plurality of solutions S held by the plurality of solution holding portions 62a of the solution holding member 62 including the holding portion 62a are measured. Such a solution holding member 62 can be a rack holding a plurality of test tubes, but is a container called a so-called microtiter plate that is often used in bio experiments.

  The microtiter plate has 6 solution holders (each holding 15 ml of solution), 12 solution holders (each holding 5 ml of solution), 24 solutions One having holding parts (each holding 3 ml of solution), one having 48 solution holding parts (each holding 1 ml of solution), 96 solution holding parts (each 0.2 ml to 1 ml) With 384 solution holders (each holding 0.025 ml to 0.2 ml of solution), and 536 solution holders (each with 0.01 ml). It is already widely known that it has a solution).

  The substance measuring device 60 in solution includes a plurality of surface acoustic wave revolving elements 70 arranged in the predetermined array and a surface acoustic wave that moves the plurality of surface acoustic wave revolving elements 70 up and down simultaneously within a predetermined range. Circulatory element vertical movement means 72.

  The surface acoustic wave revolving element vertical movement means 72 separates the plurality of surface acoustic wave revolving elements 70 from the plurality of solution holding portions 62 a of the solution holding member 62 at the upper end position shown in FIG. In the lower end position shown in FIG. 9B, the surface of the surface acoustic wave corresponding to the solution holding portion 62a is changed to the solution S held in the plurality of solution holding portions 62a of the solution holding member 62. At least a part of a surface acoustic wave propagation path (not shown) on the surface of the substrate 74 of the element 70 is immersed.

  One of the surface acoustic wave excitation detection means (not shown) arranged in the upper half of the surface acoustic wave propagation path (not shown) in the vertical direction on the surface of the base material 74 of the plurality of surface acoustic wave revolving elements 70. The pair of terminals is connected to the switch circuit 78 via a matching circuit 76 of 50 ohms, for example, and the switch circuit 78 is connected to the substance measuring means 20 in the solution. The substance measuring means 20 in the solution is connected to the display means 22 and the recording means 80.

  Each of the plurality of surface acoustic wave revolving elements 70 includes a surface acoustic wave revolving element 10 according to the first embodiment shown in FIGS. 1A to 1C and the first embodiment. The surface acoustic wave orbiting elements 10 ′ and 10 ″ according to the first and second modifications of FIG. 2 and illustrated in FIGS. 2A to 2C. The surface acoustic wave revolving element 30 according to the second embodiment can be provided, and the surface acoustic wave according to the first modification of the second embodiment shown in FIG. It can be a revolving element 30 ′, and a surface acoustic wave revolving element 30 ″ according to a second modification of the second embodiment shown in FIGS. 4A and 4B. Or the elastic table according to the third embodiment shown in FIGS. 6A and 7C. It can be a waves lap element 50.

  In each of the plurality of surface acoustic wave revolving elements 70, the surface acoustic wave propagation paths 12 a, 12 ′ a, 12 ″ a rise from the horizontal plane LH on the surface of the substrate 12 (A) in FIG. 1. The surface acoustic wave circuit 10 according to the first embodiment shown in FIGS. 1C to 1C and the surface acoustic waves according to the first and second modifications of the first embodiment. One of the orbiting elements 10 ′ and 10 ″, the surface acoustic wave orbiting element 30 according to the second embodiment shown in FIGS. 2A to 2C, shown in FIG. The surface acoustic wave revolving element 30 'according to the first modification of the second embodiment, or the second embodiment shown in FIGS. 4A and 4B. In the case of the surface acoustic wave circulating element 30 ″ according to the second modification, the base material 7 of the plurality of surface acoustic wave circulating elements 70 is used. Is disposed at the lower end position shown in FIG. 9A, and at least part of the surface acoustic wave propagation path (not shown) on the surface of the substrate 74 of the plurality of surface acoustic wave revolving elements 70 is a solution. The substance in the solution S held in the plurality of corresponding solution holding portions 62a of the solution holding member 62 while being immersed in the solution S held in the corresponding plurality of solution holding portions 62a of the holding member 62 Can be measured sequentially.

  When the predetermined substance in the solution S is, for example, various biological substances and the properties change when the substance is taken out from the solution S, the base materials 74 of the plurality of surface acoustic wave revolving elements 70 are formed as described above. At least a part of the surface acoustic wave propagation path (not shown) on the surface of the base material 74 of the plurality of surface acoustic wave revolving elements 70 disposed at the lower end position shown in FIG. The substance in the solution S held in the corresponding plurality of solution holding portions 62a of the solution holding member 62 while being immersed in the solution S held in the corresponding plurality of solution holding portions 62a of the member 62 It is particularly useful to measure sequentially.

  When each of the plurality of surface acoustic wave revolving elements 70 is described above, or the base material 74 of the plurality of surface acoustic wave revolving elements 70 is arranged at the lower end position shown in FIG. The solution S in which at least a part of a surface acoustic wave propagation path (not shown) on the surface of the base material 74 of the plurality of surface acoustic wave revolving elements 70 is held in the corresponding plurality of solution holding portions 62 a of the solution holding member 62. In the solution S held in the plurality of corresponding solution holding portions 62a of the solution holding member 62 in a state where it is pulled up to the upper end position shown in FIG. Substances can be measured sequentially.

  And the substance in the solution S hold | maintained in the some solution holding | maintenance part 62a of the solution holding member 62 in the state pulled up to the upper end position shown in FIG. 9 (B) in this way. 5 are sequentially measured, the base materials 74 of the plurality of surface acoustic wave revolving elements 70 at the upper end positions are inserted into the base material of the residual solution recovery device 46 shown in FIG. A portion of the solution remaining in at least a surface acoustic wave propagation path (not shown) on the surface of each substrate 74 can be blown off by being inserted into the space 46a, or a plurality of surface acoustic wave revolving elements When each of 70 is a surface acoustic wave revolving element 30 ″ according to the second modification of the second embodiment shown in FIGS. Gas supply hand connected to the inner hole of the substrate support member 36 A part of the solution remaining from at least a surface acoustic wave propagation path (not shown) on the surface of each substrate 74 of the plurality of surface acoustic wave revolving elements 70 at the upper end position also by the gas supplied from the stage 42 Can be blown away.

  In each of the plurality of surface acoustic wave revolving elements 70, the surface acoustic wave propagation path 12 ″ ″ a is arranged on the horizontal plane LH on the surface of the base material 12, in FIGS. 6 and 7 (A) to (C). In the case of the surface acoustic wave revolving element 50 according to the third embodiment shown in FIG. 9, the substrate 74 of the plurality of surface acoustic wave revolving elements 70 is shown in FIG. At least a part of the surface acoustic wave propagation path (not shown) on the surface of the base material 74 of the plurality of surface acoustic wave revolving elements 70 arranged at the lower end position of the solution holding member 62 corresponds to the plurality of solution holding portions 62a. 9 is temporarily immersed in the solution S held therein, and then pulled up to the upper end position shown in FIG. 9B, the solution holding member 62 has a corresponding plurality of solution holding portions 62a. The substances in the retained solution S can be measured sequentially.

  When the substances in the solution S held in the plurality of solution holding portions 62a corresponding to the solution holding member 62 are sequentially measured by the plurality of surface acoustic wave revolving elements 70 as described above, the switch circuit 78 is used. A plurality of surface acoustic wave revolving elements 70 are sequentially connected to the substance measuring means 20 in the solution, and the substances in the solution S held by the plurality of surface acoustic wave revolving elements 70 in the corresponding plurality of solution holding portions 62a. Are sequentially measured by the substance measuring means 20 in the solution, and the measurement result is displayed on the display means 22 and recorded on the recording means 80.

  For example, when the diameter of the substrate 12 is 3.3 mm as described above, the surface acoustic wave propagation path 12a, 12′a, 12 ″ ′, or 12 ″ ″ a is the 150 MHz elastic surface described above. The time required for the wave to circulate is about 3.3 microseconds. Therefore, one surface acoustic wave circulator 70 measures the substance in the solution S held in the corresponding solution holder 62a. It takes less than a second.

  That is, by using the substance measuring device 60 in the solution, the time required to measure the substances in the plurality of solutions S held in the plurality of solution holding units 62a is multiplied by the number of the solution holding units 62a. The time is less than a second.

FIG. 1A is a front view schematically showing a surface acoustic wave revolving element according to the first embodiment of the present invention, with a part of the components disassembled; FIG. FIG. 2 is a front view schematically showing a first modification of the surface acoustic wave revolving element according to the first embodiment of the present invention shown in FIG. 1 (A); FIG. 10C is a front view schematically showing a second modification of the surface acoustic wave revolving element according to the first embodiment of the present invention shown in FIG. FIG. 2A is a front view schematically showing a surface acoustic wave orbiting element according to the second embodiment of the present invention, with parts of the constituent members disassembled; FIG. FIG. 2 is a front view schematically showing a surface acoustic wave revolving element according to a second embodiment of the present invention without disassembling part of the constituent members; and FIG. FIG. 5 is a side view schematically showing a surface acoustic wave orbiting element according to a second embodiment of the present invention, with a part of its constituent members taken as a longitudinal section. FIG. 3 is a schematic top view of a first modification of the surface acoustic wave revolving element according to the second embodiment of the present invention. FIG. 4A shows a state immediately after the substrate of the second modification of the surface acoustic wave revolving element according to the second embodiment of the present invention is once dipped in the solution and then pulled up from the solution. FIG. 4B is a side view schematically showing the substrate of the second modified example of the surface acoustic wave revolving element according to the second embodiment of the present invention. FIG. 10 is a side view schematically showing a state in which the solution that has been dipped is pulled up from the solution and the remaining solution on the surface of the base material is blown away by a configuration unique to the second modification. FIG. 5 shows a surface acoustic wave revolving element according to the second embodiment, in which a substrate is immersed in a solution and pulled up from the solution, and then a predetermined substance in the solution is measured using the surface acoustic wave revolving element. It is a schematic longitudinal cross-sectional view of the residual solution collection | recovery apparatus which blows off a part of solution which remains on the surface of a base material from the said surface before. FIG. 6 is a front view schematically showing a surface acoustic wave orbiting element according to the third embodiment of the present invention, with parts of the components disassembled. FIG. 7A is a front view schematically showing a surface acoustic wave orbiting element according to the third embodiment of the present invention without disassembling a part of its constituent members; ), When measuring a predetermined substance in the solution using the surface acoustic wave revolving element according to the third modification, the substrate surface is immersed in the solution and then pulled up from the solution. FIG. 7C is a front view schematically showing a state in which a part of the solution remains in FIG. 7C. FIG. 7C is a diagram illustrating a part of the solution remaining on the surface of the substrate in FIG. It is a front view which shows roughly the state by which the part is dried and concentrated. An apparatus for measuring a substance in a solution according to an embodiment of the present invention includes a plurality of solution holding units arranged in a predetermined arrangement and capable of separately holding a plurality of different solutions. It is a perspective view which shows roughly the well-known microtiter plate as an example of the solution holding member which measures the substance in the some solution hold | maintained at this solution holding part. FIG. 9A is a side view schematically showing a configuration of a substance measuring apparatus in a solution according to an embodiment of the present invention, in which a plurality of surface acoustic wave revolving elements are surface acoustic wave revolving elements. 9B is arranged at the upper end position of the vertical movement within a predetermined range by the element vertical movement means; and FIG. 9B shows a substance measuring device in the solution of FIG. FIG. 6 is a side view schematically showing a state in which the orbiting element is arranged at the lower end position of the vertical movement within a predetermined range by the surface acoustic wave orbiting element vertical movement means.

Explanation of symbols

  10, 10 ', 10 "... surface acoustic wave revolving element, 12 ... base material, 12a, 12'a, 12"', 12 "'a ... surface acoustic wave propagation path, 14, 14' ... elastic surface Wave excitation detection means, 14a, 14'a, 14 "a ... terminal, 16, 16 '... base material support member, 18, 18' ... conductive path, 20, 20 '... means for measuring substance in solution, 22 ... Display means, HL ... horizontal plane, 30, 30 ', 30 "... surface acoustic wave orbiting element, 36, 36' ... substrate support member, 36a, 36'a ... groove, D ... depth, 38 ... adhesive, DESCRIPTION OF SYMBOLS 40 ... Surface acoustic wave excitation detection means, 40a, 40'a ... Terminal, 42 ... Gas supply means, LB ... Part of solution, 46 ... Residual solution collection | recovery apparatus, 46a ... Base material insertion space, 46b ... Gas inflow hole, 46c ... Gas supply means, 46d ... Residual solution discharge hole, 46e ... Residual solution discharge hole, 50 ... Surface acoustic wave revolving element 52 ... Adhesive, CLB ... Part of concentrated solution, 60 ... Substance measuring device in solution, 62 ... Solution holding member, 62a ... Solution holding part, S ... Solution, 70 ... Surface acoustic wave revolving element, 72 ... Surface acoustic wave revolving element vertical movement means, 74... Substrate, 76... Matching circuit, 78.

Claims (5)

A substrate having at least one annular surface acoustic wave propagation path on its surface, which is a part of a sphere and is capable of revolving surface acoustic waves and rising from a horizontal plane;
The surface acoustic wave propagation path on the surface of the substrate is arranged in a region located in the upper half of the vertical direction to excite the surface acoustic wave, and the excited surface acoustic wave is propagated to the surface acoustic wave propagation path and the elastic surface. Surface acoustic wave excitation detecting means for detecting a surface acoustic wave that has circulated around the wave propagation path and generating a detection signal corresponding to the detected surface acoustic wave;
It has a cylindrical shape and is provided with one end face that is fixed to the upper half of the surface of the base material in the vertical direction with the surface acoustic wave excitation detecting means disposed in the inner hole. A base material support member that supports a region in which a groove that straddles the surface wave propagation path is formed and the surface acoustic wave propagation path is excluded in the upper half of the surface of the base material in the vertical direction;
Solution contact blocking means for blocking contact of the solution with the surface acoustic wave excitation detection means;
At least a part of the surface acoustic wave propagation path on the surface of the base material is covered with a substance that adheres only a predetermined substance contained in the solution and does not interfere with the propagation of the surface acoustic wave in the surface acoustic wave propagation path, The elastic surface generated after the surface acoustic wave propagation path is excited and propagated by the surface acoustic wave excitation detection means after being immersed in a solution after at least part of the surface acoustic wave propagation path on the surface of the substrate is circulated. A substance measuring means in the solution for measuring the substance in the solution based on the detection signal of the wave;
Surface acoustic wave propagation after being connected to the inner hole of the substrate support member at a position away from one end surface of the substrate support member, and at least part of the surface acoustic wave propagation path on the surface of the substrate is immersed in the solution Before the path is pulled up from the solution and the substance in the solution is measured by the substance measuring means, a gas is supplied to the inner hole of the substrate support member, and this gas is passed through the groove on one end surface of the substrate support member. Gas supply means for lowering the solution remaining on the surface of the base material through at least the surface acoustic wave propagation path by being lowered along the surface of the base material;
A surface acoustic wave orbiting element comprising: The surface acoustic wave excitation detection means is disposed in a region located in the upper half of the vertical direction in the surface acoustic wave propagation path on the surface of the substrate, and
The solution contact preventing means includes a water repellent treatment of the surface acoustic wave excitation detecting means,
The surface acoustic wave revolving element according to claim 1. The surface acoustic wave excitation detection means is disposed in a region located in the upper half of the vertical direction in the surface acoustic wave propagation path on the surface of the substrate, and
The solution contact blocking means includes a waterproof film covering the surface acoustic wave excitation detecting means.
The surface acoustic wave revolving element according to claim 1. The surface acoustic wave excitation detection means is arranged in a region located in the upper half of the vertical direction in the surface acoustic wave propagation path on the surface of the substrate,
The surface acoustic wave excitation detection means includes a terminal disposed on at least one side of the surface acoustic wave propagation path portion where the surface acoustic wave excitation detection means is disposed on the surface of the substrate,
The base material supporting member has a terminal disposed on the one end surface and supports a conductive path electrically connected to the substance measuring means in the solution,
When the one end surface of the base material support member is fixed to the upper half of the base material surface in the vertical direction, the terminal of the one end surface of the conductive path of the base material support member is the surface acoustic wave excitation detecting means on the surface of the base material Overlapping the terminal
The surface acoustic wave revolving element according to claim 1, wherein the surface acoustic wave revolving element is provided. Substances in a plurality of solutions held in the plurality of solution holding parts of a solution holding member including a plurality of solution holding parts arranged in a predetermined arrangement and capable of separately holding a plurality of different solutions. Is a device for measuring substances in a solution to measure:
A plurality of surface acoustic wave revolving elements according to any one of claims 1 to 4, wherein the plurality of surface acoustic wave revolving elements are arranged in the predetermined array ;
The surface acoustic wave revolving element corresponding to the solution holding part in the solution held in the plurality of solution holding parts of the solution holding member at the lower end position by vertically moving the plurality of surface acoustic wave revolving elements simultaneously in a predetermined range. Surface acoustic wave revolving element vertical movement means for immersing at least a part of the surface acoustic wave propagation path on the surface of the substrate and separating the plurality of surface acoustic wave revolving elements from the plurality of solution holding portions of the solution holding member at the upper end position When;
With
At least a part of the surface acoustic wave propagation path on the surface of the substrate of the surface acoustic wave revolving element corresponding to the solution holding part is immersed in the solution held in the plurality of solution holding parts of the solution holding member at the lower end position. Later, the plurality of surface acoustic wave revolving elements are moved to the upper end position, and at the upper end position, the solution remaining on the surface of the substrate by the gas supply means of the plurality of surface acoustic wave revolving elements is at least on the surface acoustic wave propagation path. The surface acoustic wave propagation path is excited and propagated in the surface acoustic wave propagation path by the surface acoustic wave excitation detection means of the plurality of surface acoustic wave orbiting elements at the upper end position and circulates a predetermined number of the surface acoustic wave propagation path. Measuring the substance in the solution by the substance measuring means in the solution of the surface acoustic wave orbiting element based on the detection signal emitted from the surface acoustic wave after orbiting the predetermined number,
An apparatus for measuring a substance in a solution.

Images