JP5241382B2 - Industrial robot - Google Patents

Description

  The present invention relates to an industrial robot that transports a predetermined transport object.

  Conventionally, industrial robots that convey a predetermined conveyance object have been widely used. As this type of industrial robot, there is known an industrial robot including a hand on which an object to be transported is mounted, an arm that holds the hand, and a ball screw that moves the arm up and down (see, for example, Patent Document 1). . In the industrial robot described in Patent Document 1, one motor is connected to a ball screw, and the ball screw is driven by one motor.

  In addition, an industrial robot that is not an industrial robot that transports an object to be transported but in which a base on which a main body portion of the robot is mounted is movable in a horizontal direction is also known (for example, see Patent Document 2). The industrial robot described in Patent Document 2 includes a rack and a pinion for moving the base in the horizontal direction, and a single motor for rotationally driving the pinion.

JP 2006-102886 A JP-A-6-106487

  Some objects to be conveyed by industrial robots, such as glass substrates for liquid crystal displays, become larger year by year. Along with the increase in size of the transfer object, industrial robots that transfer the transfer object to be increased tend to be increased in size. In addition, with the increase in size of industrial robots, the cost of industrial robots tends to increase.

  Therefore, an object of the present invention is to provide an industrial robot that can be reduced in size and reduced in cost even when a conveyance object to be enlarged is conveyed.

In order to solve the above problems, an industrial robot according to the present invention includes a hand on which an object to be transported is mounted, an arm to which the hand is coupled, and a support member that supports the arm, and moves the support member up and down. And a control unit that controls the vertical drive mechanism, the vertical drive mechanism includes a plurality of drive motors, and the control unit includes a motor control unit that controls the plurality of drive motors. The control unit controls a first drive motor, which is a number of drive motors among the plurality of drive motors, by either speed control or position control and torque control . The second drive motor, which is the remaining drive motor excluding the motor, is controlled by torque control . Moreover, in order to solve said subject, the industrial robot of this invention is equipped with the hand by which a conveyance target object is mounted, the arm to which a hand is connected, the supporting member which supports an arm, and a supporting member. A horizontal drive mechanism for moving in the horizontal direction and a control unit for controlling the horizontal drive mechanism are provided. The horizontal drive mechanism includes a plurality of drive motors, and the control unit is a motor for controlling the plurality of drive motors. The motor control unit controls a first drive motor, which is some of the plurality of drive motors, by either speed control or position control and torque control. The second drive motor, which is the remaining drive motor excluding the first drive motor, is controlled by torque control. Furthermore, in order to solve the above-described problems, an industrial robot of the present invention includes a hand on which an object to be transported is mounted, an arm to which the hand is coupled, a support member that supports the arm, and a vertical direction. A rotation drive mechanism for rotating the support member around a predetermined central axis as an axial direction, and a control unit for controlling the rotation drive mechanism, the rotation drive mechanism including a plurality of drive motors, and a control unit Includes a motor control unit that controls a plurality of drive motors, and the motor control unit performs speed control or position control on a first drive motor that is a drive motor among the plurality of drive motors. And the second drive motor, which is the remaining drive motor excluding the first drive motor, is controlled by torque control.

  As the size of the conveyance object increases, the total capacity of the drive motor required by the vertical drive mechanism, the horizontal drive mechanism, and / or the rotary drive mechanism increases. Therefore, when driving a vertical drive mechanism, a horizontal drive mechanism and / or a rotary drive mechanism with a single drive motor, it is necessary to use a motor with a large physique, which may increase the size of an industrial robot. is there.

In the industrial robot of the present invention, the vertical drive mechanism includes a plurality of drive motors. In the industrial robot of the present invention, the horizontal drive mechanism includes a plurality of drive motors, and the rotation drive mechanism includes a plurality of drive motors. Therefore, even if the total capacity of the drive motor which is required by the vertical drive mechanism is large, it is possible to use a smaller drive motor's size, the total capacitance of the driving motor required by the horizontal driving mechanism A drive motor with a small physique can be used even if it is large, and a drive motor with a small physique is used even when the total capacity of the drive motor required by the rotary drive mechanism is large be able to. In addition, when using a plurality of drive motors with small physiques, the degree of freedom of arrangement of the drive motors is higher than when using one drive motor with a large physique. Therefore, in the present invention, it is possible to reduce the size of the industrial robot in spite of transferring a large transfer object.

  In addition, when the capacity of the driving motor exceeds a predetermined capacity, the price of the driving motor rapidly increases. However, in the present invention, a driving motor having a small capacity can be used. Even when is used, the cost of the industrial robot can be reduced.

  Furthermore, in the present invention, since a drive motor with a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as a gear for transmitting the power of the driving motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed.

On the other hand, when a plurality of drive motors are used, there is a possibility that the drive torque of one drive motor may become a large load on another drive motor due to a difference in rotational speed or the like. In the present invention, the motor control unit controls the first drive motor, which is some of the plurality of drive motors, by either speed control or position control and torque control, And the 2nd drive motor which is the remaining drive motors except the 1st drive motor is controlled by torque control. Therefore, the rotational speed or rotational position of the second drive motor is not controlled, and the second drive motor rotates following the rotational speed or rotational position of the first drive motor. As a result, even when a plurality of drive motors are used, it is possible to prevent the drive torque of one drive motor from becoming a heavy load on another drive motor.

  In the present invention, the first drive motor is preferably a single drive motor. If comprised in this way, the remaining drive motors can be controlled on the basis of one drive motor. Therefore, for example, by controlling the rotational speed of one first driving motor and not controlling the rotational speeds of the remaining second driving motors, the second driving motor is changed to 1 It can be rotated following the rotation speed of the first drive motor of the table. As a result, it is possible to reliably prevent the driving torque of a certain driving motor from becoming a heavy load on another driving motor.

Moreover, in order to solve said subject, the industrial robot of this invention is equipped with the hand by which a conveyance target object is mounted, the arm to which a hand is connected, the supporting member which supports an arm, and a supporting member. A horizontal drive mechanism for moving in the horizontal direction and a control unit that controls the horizontal drive mechanism are provided. The horizontal drive mechanism includes a plurality of drive motors, and the control unit controls a horizontal drive that controls the plurality of drive motors. A motor control unit is provided, each of the plurality of drive motors is provided with a speed detection mechanism for detecting the rotational speed of the drive motor, and some of the plurality of drive motors are set as the first drive motor. If the remaining horizontal driving motors except for the first horizontal driving motor are second horizontal driving motors, the horizontal motor control unit controls the first horizontal driving motor for speed control or position. System From the predetermined reference position of the support member to the planned stop position, which is controlled by one of the torque control and the first speed detection mechanism which is the speed detection mechanism of the first horizontal drive motor The difference between the reference pulse number that is the number of pulses and the detected pulse number that is the actual pulse number from the reference position of the support member detected by the first speed detection mechanism is calculated, and the difference is a predetermined value. In the following cases, the second horizontal drive motor is controlled by either speed control or position control and torque control, and the difference between the reference pulse number and the detected pulse number is larger than a predetermined value. In this case, the second horizontal drive motor is controlled by torque control.

As the transport object becomes larger, the total capacity of the drive motor required by the horizontal drive mechanism increases. Therefore, when driving the horizontal drive mechanism with a single drive motor, a motor with a large physique There is a risk that the industrial robot will become large. In the industrial robot of the present invention, the horizontal drive mechanism includes a plurality of drive motors. Therefore, even when the total capacity of the drive motor required by the horizontal drive mechanism is large, a drive motor with a small physique can be used. In addition, when using a plurality of drive motors with small physiques, the degree of freedom of arrangement of the drive motors is higher than when using one drive motor with a large physique. Therefore, in the present invention, it is possible to reduce the size of the industrial robot in spite of transferring a large transfer object. In addition, when the capacity of the driving motor exceeds a predetermined capacity, the price of the driving motor rapidly increases. However, in the present invention, a driving motor having a small capacity can be used. Even when is used, the cost of the industrial robot can be reduced. Furthermore, in the present invention, since a drive motor with a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as a gear for transmitting the power of the driving motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed. On the other hand, when a plurality of drive motors are used, there is a possibility that the drive torque of one drive motor may become a large load on another drive motor due to a difference in rotational speed or the like. In the present invention, the horizontal motor control unit controls the first horizontal drive motor by either speed control or position control and torque control, and is a speed detection mechanism of the first horizontal drive motor. From the reference pulse number detected by the first speed detection mechanism, which is the number of pulses from the predetermined reference position of the support member to the scheduled stop position, and the reference position of the support member detected by the first speed detection mechanism When the difference between the detected pulse number and the actual pulse number is less than or equal to a predetermined value, either the speed control or the position control and the torque control are used for the second horizontal drive. The motor is controlled, and when the difference between the reference pulse number and the detected pulse number is larger than a predetermined value, the second horizontal drive motor is controlled by torque control. Therefore, when the difference between the number of reference pulses and the number of detected pulses is larger than a predetermined value, the rotational speed or rotational position of the second horizontal drive motor is not controlled, and the second horizontal drive motor It rotates following the rotational speed or rotational position of the first horizontal drive motor. As a result, even when a plurality of drive motors are used, it is possible to prevent the drive torque of one drive motor from becoming a heavy load on another drive motor. The difference between the reference pulse number and the detected number of pulses becomes equal to or less than a predetermined value, before the second horizontal drive motor is stopped, it controls the rotational speed or rotational position of the second horizontal drive motor It is possible to eliminate backlash when the power transmission mechanism for transmitting the power of the first horizontal driving motor and the second horizontal driving motor to the support member is stopped.

In order to solve the above problems, an industrial robot according to the present invention includes a hand on which an object to be transported is mounted, an arm to which the hand is coupled, a support member that supports the arm, and a vertical direction. A rotation drive mechanism for rotating the support member around a predetermined central axis as an axial direction, and a control unit for controlling the rotation drive mechanism, the rotation drive mechanism including a plurality of drive motors, and a control unit Includes a rotation motor control unit that controls a plurality of drive motors, and each of the plurality of drive motors includes a speed detection mechanism for detecting the rotation speed of the drive motor. If the drive motors of the above are the first rotation drive motors and the remaining drive motors other than the first rotation drive motors are the second rotation drive motors, the rotation motor control unit Rotating 1 The support motor is controlled by either speed control or position control and torque control, and is detected by a first speed detection mechanism that is a speed detection mechanism of the first rotation drive motor. The difference between the reference pulse number, which is the number of pulses from the rotation reference position to the planned stop position, and the detected pulse number, which is the actual pulse number from the rotation reference position of the support member, detected by the first speed detection mechanism When the difference is equal to or less than a predetermined value, the second rotational drive motor is controlled by either speed control or position control and torque control, and the reference pulse number and the detection pulse number Is greater than a predetermined value, the second rotational drive motor is controlled by torque control.

Along with the increase in the size of the object to be conveyed, the total capacity of the drive motor required by the rotation drive mechanism increases. Therefore, when the rotation drive mechanism is driven by a single drive motor, the motor is large. There is a risk that the industrial robot will become large. In the industrial robot of the present invention, the rotational drive mechanism includes a plurality of drive motors. Therefore, even when the total capacity of the drive motor required by the rotary drive mechanism is large, a drive motor with a small physique can be used. In addition, when using a plurality of drive motors with small physiques, the degree of freedom of arrangement of the drive motors is higher than when using one drive motor with a large physique. Therefore, in the present invention, it is possible to reduce the size of the industrial robot in spite of transferring a large transfer object. In addition, when the capacity of the driving motor exceeds a predetermined capacity, the price of the driving motor rapidly increases. However, in the present invention, a driving motor having a small capacity can be used. Even when is used, the cost of the industrial robot can be reduced. Furthermore, in the present invention, since a drive motor with a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as a gear for transmitting the power of the driving motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed. On the other hand, when a plurality of drive motors are used, there is a possibility that the drive torque of one drive motor may become a large load on another drive motor due to a difference in rotational speed or the like. In the present invention, the rotary motor control unit controls the first rotary drive motor by either speed control or position control and torque control, and is a speed detection mechanism of the first rotary drive motor. The reference pulse number which is the number of pulses from the predetermined rotation reference position of the support member to the planned stop position detected by the first speed detection mechanism, and the reference position of the support member detected by the first speed detection mechanism When the difference from the detected number of pulses, which is the actual number of pulses, is less than or equal to a predetermined value, the second rotational drive is performed by either speed control or position control and torque control. When the difference between the reference pulse number and the detected pulse number is larger than a predetermined value, the second rotation driving motor is controlled by torque control. Therefore, when the difference between the number of reference pulses and the number of detected pulses is larger than a predetermined value, the rotation speed or rotation position of the second rotation drive motor is not controlled, and the second rotation drive motor It rotates following the rotational speed or rotational position of the first rotational drive motor. As a result, even when a plurality of drive motors are used, it is possible to prevent the drive torque of one drive motor from becoming a heavy load on another drive motor. The difference between the reference pulse number and the detected number of pulses becomes equal to or less than a predetermined value, before the second rotary drive motor is stopped, it controls the rotational speed or rotational position of the second rotary driving motor It is possible to eliminate backlash when the power transmission mechanism for transmitting the power of the first rotation driving motor and the second rotation driving motor to the support member is stopped.

  As described above, in the industrial robot according to the present invention, it is possible to reduce the size of the industrial robot and reduce the cost of the industrial robot even when transporting an object to be enlarged. Become.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a diagram showing the industrial robot 1 from the EE direction of FIG. FIG. 3 is a diagram illustrating the industrial robot 1 from the FF direction in FIG. 1.

  An industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. . The robot 1 according to the present embodiment is a large robot particularly suitable for transporting a large substrate 2, and for example, transports a substantially square substrate 2 having a side of about 3 m. The transfer object is not limited to the substrate 2 and may be a semiconductor wafer or the like.

  As shown in FIGS. 1 to 3, the robot 1 includes two hands 3 on which a substrate 2 is mounted, two arms 4 to which each of the two hands 3 is connected to the tip side, and 2 A main body 5 that supports the arm 4 and a base member 6 that supports the main body 5 so as to be movable in the horizontal direction are provided. The main body 5 supports the base ends of the two arms 4 and can move up and down, a columnar member 8 for supporting the support member 7 so as to be movable in the vertical direction, A base 9 that constitutes the lower end portion and is horizontally movable with respect to the base member 6, and a revolving member 10 that is fixed at the lower end of the columnar member 8 and that is rotatable with respect to the base 9.

  As described above, the robot 1 of this embodiment is a large robot. For example, the height of the robot 1 is about 7 m, and the vertical stroke (movement amount) of the support member 7 is about 5 m. For example, the horizontal stroke of the hand 3 is about 5.5 m.

  The hand 3 includes a plurality of claw portions 12 for mounting the substrate 2. The base end of the band 3 is rotatably connected to the tip of the arm 4. The arm 4 has two joint portions 13 and is configured to expand and contract as a whole. The base end of the arm 4 is fixed to the support member 7.

  In this embodiment, the two hands 3 and the two arms 4 are arranged so as to overlap in the vertical direction. That is, the robot 1 of this embodiment is a double arm type robot. The robot 1 may be a single arm type robot including one hand 3 and one arm 4.

  In addition, the robot 1 has a vertical drive mechanism 16 (see FIG. 4) that moves the support member 7 up and down, a horizontal drive mechanism 17 (see FIG. 7) that moves the main body 5 in the horizontal direction, and the base 9. And a rotation drive mechanism 18 (see FIG. 7) for turning the turning member 10. Hereinafter, the configuration of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18 and the configuration of the peripheral portion thereof will be described.

(Configuration of vertical drive mechanism and its surroundings)
4 is a view showing the support member 7 and the vertical drive mechanism 16 from the FF direction of FIG. FIG. 5 is a diagram showing the support member 7, the columnar member 8, and the vertical drive mechanism 16 from the GG direction of FIG. 4. FIG. 6 is a view showing the vertical drive mechanism 16 from the HH direction of FIG.

  As shown in FIG. 5, the vertical drive mechanism 16 is disposed on the side of the columnar member 8 (below the columnar member 8 in FIG. 5). The vertical drive mechanism 16 includes two vertical drive motors 20 and two speed reducers 21 connected to each of the two vertical drive motors 20. As shown in FIG. 4, one vertical drive motor 20, two speed reducers 21, and one vertical drive motor 20 are fixed to the moving member 7 in this order from the top.

  Further, the vertical drive mechanism 16 is for vertical drive that meshes with two pinions (small gears) 22 as vertical drive pinions fixed to the output shafts of the two speed reducers 21 and the two pinions 22. And a rack 23 as a rack. With the two pinions 22 and the rack 23, the support member 7 moves in the vertical direction. Further, the vertical drive mechanism 16 includes two vertical brake mechanisms 24 for stopping the vertical drive mechanism 16 (that is, for stopping the support member 7).

  Further, as shown in FIG. 5, the robot 1 includes a guide portion 25 for guiding the support member 7 in the vertical direction. The guide portion 25 includes a guide rail 26 and a guide block 27 that engages with the guide rail 26. The columnar member 8 is formed in a long and narrow rectangular column shape with the vertical direction as the longitudinal direction, and the support member 7 is formed in a block shape.

  The vertical drive motor 20 includes a speed detection mechanism (not shown) for detecting the rotational speed of the vertical drive motor 20. This speed detection mechanism is composed of, for example, a slit plate formed in a disc shape, and a light emitting element and a light receiving element that are arranged to face each other with the slit plate interposed therebetween.

  As shown in FIG. 6, a pulley 28 is fixed to the output shaft of the vertical drive motor 20. A pulley 29 having a diameter larger than that of the pulley 28 is fixed to the input shaft of the speed reducer 21. A belt 30 is stretched around the pulleys 28 and 29, and the vertical drive motor 20 and the speed reducer 21 that are adjacently arranged in the vertical direction are connected by the belt 30.

  The rack 23 is fixed to the columnar member 8 with the vertical direction as the longitudinal direction (see FIG. 5). As described above, in this embodiment, the support member 7 has a long vertical stroke. That is, the rack 23 is long. Therefore, in this embodiment, the rack 23 is formed by connecting a plurality of rack pieces. In addition, the length of one rack piece is longer than the arrangement pitch of the two pinions 22.

  As shown in FIG. 6 and the like, the vertical brake mechanism 24 is attached to the input shaft of the speed reducer 21 so as to be adjacent to the pulley 29. That is, each of the two vertical brake mechanisms 24 is connected to each of the two vertical drive motors 20 via the pulleys 28 and 29 and the belt 30.

  The vertical brake mechanism 24 is a so-called non-excitation actuating brake, and is disposed so as to be movable in the axial direction with respect to the case body in which the coil is housed, the side plate fixed to the case body, and the case body. The armature includes a brake disk that is disposed between the side plate and the armature and is fixed to the input shaft of the speed reducer 21, and a compression coil spring that biases the armature toward the brake disk. In the vertical brake mechanism 24, when the coil is energized, the armature is sucked into the case body and the brake disc is released. When energization of the coil is stopped, the brake disk is sandwiched between the armature and the side plate by the urging force of the compression coil spring, and the speed reducer 21 is suddenly braked. One vertical brake mechanism 24 has a braking force that can sufficiently stop a portion that moves in the vertical direction including the substrate 2, the hand 3, the arm 4, the support member 7, and the like.

  The guide rail 26 is fixed to the columnar member 8 with the vertical direction as the longitudinal direction (see FIG. 5). In this embodiment, two guide rails 26 are fixed to the columnar member 8. Specifically, the guide rail 26 is fixed to each of the mounting surfaces of the two columnar members 8 parallel to the left-right direction in FIG. In addition, the guide rail 26 disposed on the lower side of FIG. 5 is fixed so as to be adjacent to the rack 23.

  The guide block 27 is fixed to the support member 7. Specifically, a guide block 27 is fixed to a surface of the support member 7 orthogonal to the fixing surface of the arm 4 (the right end surface in FIG. 5), and the guide block 27 is viewed from the outside in the vertical direction in FIG. The guide rail 26 is engaged.

  In this embodiment, the cover member 31 is fixed to the columnar member 8 as shown in FIG. The cover member 31 is disposed so as to cover the guide rail 26 from the vertical direction of FIG.

(Configuration of horizontal drive mechanism and its surroundings)
FIG. 7 is a diagram for explaining the internal configuration of the portion J in FIG. FIG. 8 is a diagram for explaining the configuration of the horizontal drive mechanism 17 and the like from the KK direction of FIG. FIG. 9 is a view for explaining the configuration of the horizontal drive mechanism 17 from the LL direction of FIG.

  The horizontal drive mechanism 17 is arrange | positioned at the left end side of the base 9 in FIG. 7, as shown in FIG. The horizontal drive mechanism 17 includes two horizontal drive motors 40. As shown in FIG. 8, the two horizontal drive motors 40 are arranged adjacent to each other in the left-right direction of FIG. Each of the two horizontal drive motors 40 is fixed to each of the two brackets 52 fixed to the base 9. As shown in FIGS. 8 and 9, a rotating shaft 53 is rotatably held by each of the two brackets 52 via a bearing 54. The two rotating shafts 53 are arranged so as to be adjacent in the left-right direction of FIG.

  The horizontal drive mechanism 17 includes two pinions 42 as horizontal drive pinions fixed to the respective lower ends of the two rotary shafts 53 and a rack 43 as a horizontal drive rack that meshes with the two pinions 42. And. The base 9 is moved in the horizontal direction by the two pinions 42 and the rack 43. Further, the horizontal drive mechanism 17 includes two horizontal brake mechanisms 44 for stopping the horizontal drive mechanism 17 (that is, for stopping the base 9).

  The robot 1 also includes a guide portion 45 for guiding the base 9 in the horizontal direction. The guide portion 45 includes a guide rail 46 and a guide block 47 that engages with the guide rail 46. Further, the base member 6 includes two elongated rail-like members 51 as shown in FIGS. The rail-like members 51 are arranged in parallel with a predetermined interval in the left-right direction in FIG.

  The horizontal drive motor 40 includes a speed detection mechanism (not shown) for detecting the rotational speed of the horizontal drive motor 40. This speed detection mechanism is composed of, for example, a slit plate formed in a disc shape, and a light emitting element and a light receiving element that are arranged to face each other with the slit plate interposed therebetween.

  As shown in FIG. 9, a pulley 48 is fixed to the output shaft of the horizontal drive motor 40. A pulley 49 having a diameter larger than that of the pulley 48 is fixed to the upper end side of the rotating shaft 53. A belt 50 is stretched over the pulleys 48 and 49, and a horizontal driving motor 40 and a rotating shaft 53 that are adjacently arranged in the vertical direction in FIG. 8 are connected by the belt 50.

  The rack 43 is fixed to the upper surface of the rail-shaped member 51 as shown in FIG. In this embodiment, since the movement amount of the base 9 is large, the length of the rack 43 is long. Therefore, the rack 43 is formed by connecting a plurality of rack pieces.

  As shown in FIG. 9, the horizontal brake mechanism 44 is attached to the output shaft of the horizontal drive motor 40 so as to be adjacent to the pulley 48. The horizontal brake mechanism 44 is a so-called non-excitation actuated brake as with the vertical brake mechanism 24, and is configured in the same manner as the vertical brake mechanism 24. That is, in the horizontal brake mechanism 44, when the coil is energized, the armature is attracted to the case body and the brake disc is released. When energization of the coil is stopped, the brake disk is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the horizontal drive motor 40 is suddenly braked.

  The guide rail 46 is fixed to the upper surface of the rail-shaped member 51 as shown in FIG. In this embodiment, the guide rail 46 is fixed to the upper surfaces of the two rail-like members 51. Further, the guide rail 46 disposed on the upper side in FIG. 8 is fixed so as to be adjacent to the rack 43. As shown in FIG. 7, the guide block 47 is fixed to both ends of the base 9 in the left-right direction of FIG. The guide block 47 is engaged with the guide rail 46 from above.

(Configuration of rotation drive mechanism and its peripheral parts)
FIG. 10 is a plan view of the turning member 10 shown in FIG. 11 is a cross-sectional view taken along the line MM in FIG.

  As shown in FIGS. 10 and 11, the rotation drive mechanism 18 is disposed around a central axis CL that is a turning center of the turning member 10. The rotation drive mechanism 18 includes two rotation drive motors 60. As shown in FIG. 10, the two rotation driving motors 60 are arranged point-symmetrically with respect to the central axis CL, and are fixed to the central portion of the turning member 10. The rotation drive mechanism 18 includes a speed reducer 61 that is fixed to the central portion of the turning member 10. Further, the rotation drive mechanism 18 includes one rotation brake mechanism 64 for stopping the rotation drive mechanism 18 (that is, for stopping the turning member 10). In addition, the turning member 10 is an elongated block-like member, and the lower end of the columnar member 8 is fixed to one end side (the left end side in FIG. 10).

  The rotation drive motor 60 includes a speed detection mechanism (not shown) for detecting the rotation speed of the rotation drive motor 60. This speed detection mechanism is composed of, for example, a slit plate formed in a disc shape, and a light emitting element and a light receiving element that are arranged to face each other with the slit plate interposed therebetween.

  As shown in FIG. 11, an output gear 68 is fixed to the output shaft of the rotation drive motor 60, and the two output gears 68 are meshed with the input gear 69 of the speed reducer 61. The turning member 10 turns with respect to the base 9 by the two output gears 68 and the speed reducer 61 including the input gear 69. That is, the output side of the speed reducer 61 is fixed to the central portion of the turning member 10, and the turning member 10 is moved relative to the base 9 by the power of the rotation driving motor 60 transmitted through the speed reducer 61. Turn.

  As shown in FIG. 11, the rotary brake mechanism 64 is fixed to the upper end of a rotary shaft 73 that is rotatably held at the center of the turning member 10 via a bearing 74. A gear 70 that meshes with the input gear 69 of the speed reducer 61 is fixed to the lower end of the rotating shaft 73. Further, as shown in FIG. 10, the rotary brake mechanism 64 is disposed at a position where the rotation driving motor 60 is rotated by 90 ° about the central axis CL.

  The rotary brake mechanism 64 is a so-called non-excitation actuated brake as with the vertical brake mechanism 24, and is configured in the same manner as the vertical brake mechanism 24. That is, in the rotary brake mechanism 64, when the coil is energized, the armature is attracted to the case body and the brake disc is released. When energization of the coil is stopped, the brake disk is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the input gear 69 is suddenly braked.

(Configuration of control unit)
FIG. 12 is a block diagram of the control unit 80 and related parts of the industrial robot 1 shown in FIG. In FIG. 12, the configuration of the control unit 80 related to the control of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18 is illustrated.

  As shown in FIG. 12, the control unit 80 has a configuration related to the control of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18, and a vertical motor control unit 81 that controls the two vertical drive motors 20. A horizontal motor control unit 82 for controlling the two horizontal drive motors 40, a rotary motor control unit 83 for controlling the two rotary drive motors 60, and a vertical brake for controlling the two vertical brake mechanisms 24 The control part 84, the horizontal brake control part 85 which controls the two horizontal brake mechanisms 44, and the rotation brake control part 86 which controls the one rotation brake mechanism 64 are provided. A control command unit 87 is connected to the control unit 80.

  The vertical motor control unit 81 individually controls each of the two vertical drive motors 20. Specifically, the vertical motor control unit 81 controls one vertical drive motor 20 of the two vertical drive motors 20 by speed control and torque control, and torques the other vertical drive motor 20. Control by control. In other words, the vertical motor control unit 81 controls feedback control based on the output from the speed detection mechanism of the vertical drive motor 20 and the current value of the vertical drive motor 20 for one vertical drive motor 20. Torque control is performed, and the current value of the vertical drive motor 20 is not applied to the other vertical drive motor 20 without performing feedback control based on the output from the speed detection mechanism of the vertical drive motor 20. Torque control is performed.

  In this embodiment, one of the two vertical drive motors 20 is the first drive motor 20. The other vertical drive motor 20 is a second drive motor.

  The horizontal motor control unit 82 individually controls each of the two horizontal drive motors 40. Specifically, the horizontal motor control unit 82 controls one of the two horizontal drive motors 40 by speed control and torque control. Further, the horizontal motor control unit 82 controls the other horizontal drive motor 40 by speed control and torque control in the same manner as the one horizontal drive motor 40 before the other horizontal drive motor 40 stops. However, at the time other than before the other horizontal driving motor 40 is stopped, the other horizontal driving motor 40 is controlled by torque control.

  That is, the horizontal motor control unit 82 outputs the output from the speed detection mechanism of the horizontal drive motor 40 to the other horizontal drive motor 40 at other times except when the other horizontal drive motor 40 is stopped. Torque control is performed without performing feedback control. Further, the horizontal motor control unit 82 performs feedback control on the other horizontal drive motor 40 based on the output from the speed detection mechanism of the horizontal drive motor 40 before the other horizontal drive motor 40 stops. And the rotational speed of the other horizontal drive motor 40 is controlled so that the backlash between the two pinions 42 and the rack 43 is eliminated.

  Here, the horizontal motor control unit 82 determines whether or not the other horizontal driving motor 40 is before stopping based on, for example, an output from the speed detection mechanism of the one horizontal driving motor 40. For example, the horizontal motor control unit 82 detects the number of pulses from the predetermined reference position of the base 9 to the planned stop position detected by the speed detection mechanism of one horizontal drive motor 40 and the actual speed detection mechanism. The difference from the number of pulses is calculated, and if the difference is equal to or less than a predetermined value, it is determined that the other horizontal drive motor 40 is not stopped. That is, when the base 9 enters the range of a predetermined distance from the planned stop position, the other horizontal drive motor 40 is not stopped.

  In the present embodiment, one of the two horizontal drive motors 40 is a first drive motor and is a first horizontal drive motor. The other horizontal drive motor 40 is a second drive motor and a second horizontal drive motor.

  Similarly, the rotation motor control unit 83 individually controls each of the two rotation drive motors 60. Specifically, the rotary motor control unit 83 controls one of the two rotary drive motors 60 by speed control and torque control. Further, the rotary motor control unit 83 controls the other rotary drive motor 60 by speed control and torque control in the same manner as the one rotary drive motor 60 before the other rotary drive motor 60 is stopped. However, at other times except when the other rotation driving motor 60 is not stopped, the other rotation driving motor 60 is controlled by torque control.

  That is, the rotation motor control unit 83 outputs the output from the speed detection mechanism of the rotation drive motor 60 to the other rotation drive motor 60 at other times except when the other rotation drive motor 60 is stopped. Torque control is performed without performing feedback control. Further, the rotary motor control unit 83 controls the other rotary drive motor 60 based on the output from the speed detection mechanism of the rotary drive motor 60 before the other rotary drive motor 60 stops. And the rotational speed of the other rotational drive motor 60 is controlled so that the backlash between the two output gears 68 and the input gear 69 is eliminated.

  Here, whether or not the other rotation driving motor 60 is before being stopped is determined by the rotation motor control unit 83 based on, for example, an output from the speed detection mechanism of the one rotation driving motor 60. For example, the rotation motor control unit 83 detects the number of pulses from the predetermined reference position of the turning member 10 to the planned stop position detected by the speed detection mechanism of one of the rotation drive motors 60 and the actual speed detection mechanism. The difference from the number of pulses obtained is calculated, and if the difference is equal to or less than a predetermined value, it is determined that the other rotation driving motor 60 is not stopped. That is, when the turning member 10 enters within a predetermined angle from the planned stop position, the other rotation driving motor 60 is not stopped.

  In the present embodiment, one of the two rotational drive motors 60 is the first drive motor and is the first rotational drive motor. The other rotation drive motor 60 is a second drive motor and a second rotation drive motor.

  The vertical brake control unit 84 operates the two vertical brake mechanisms 24 stepwise when a stop signal for the support member 7 is input from the control command unit 87. That is, when a stop signal of the support member 7 is input from the control command unit 87, the vertical brake control unit 84 changes the operation start timing of one of the vertical brake mechanisms 24 and the operation start timing of the other vertical brake mechanism 24. The two vertical brake mechanisms 24 are operated as described above (so as to shift). Specifically, the vertical brake control unit 84 operates the two vertical brake mechanisms 24 so that the operation start timing of the other vertical brake mechanism 24 is delayed from the operation start timing of one of the vertical brake mechanisms 24. More specifically, the vertical brake control unit 84 is configured so that the timing of stopping energization of the coil of the other vertical brake mechanism 24 is delayed from the timing of stopping energization of the coil of the one vertical brake mechanism 24. The energization to the coils of the two vertical brake mechanisms 24 is stopped.

  Similarly, when a stop signal for the base 9 is input from the control command unit 87, the horizontal brake control unit 85 operates the two horizontal brake mechanisms 44 stepwise. That is, when a stop signal for the base 9 is input from the control command unit 87, the horizontal brake control unit 85 shifts the operation start timing of one horizontal brake mechanism 44 from the operation start timing of the other horizontal brake mechanism 44. Thus, the two horizontal brake mechanisms 44 are operated. Specifically, the horizontal brake control unit 85 operates the two horizontal brake mechanisms 44 so that the operation start timing of the other horizontal brake mechanism 44 is delayed from the operation start timing of one horizontal brake mechanism 44. The horizontal brake control unit 85 may simultaneously operate the two horizontal brake mechanisms 44 when a stop signal for the base 9 is input from the control command unit 87.

(Main effects of this form)
As described above, in this embodiment, the vertical drive mechanism 16 includes the two vertical drive motors 20. Therefore, even when the total capacity of the vertical drive motor 20 required by the vertical drive mechanism 16 is increased in order to transport the large substrate 2, the vertical drive motor 20 having a relatively small size is used. be able to. For example, when the total capacity of the vertical drive motor 20 required by the vertical drive mechanism 16 is 10 kW, a large physique 10 kW vertical drive motor is not used, but a relatively small physique 5 kW vertical A drive motor 20 can be used. Further, when two vertical drive motors 20 having a small physique are used, when the two vertical drive motors 20 having a small physique are used, the degree of freedom of arrangement of the vertical drive motors 20 is increased. Get higher. Therefore, in this embodiment, the robot 1 can be downsized despite the large substrate 2 being transferred.

  Further, when the capacity of the vertical drive motor 20 exceeds a predetermined capacity, the price of the vertical drive motor 20 increases rapidly. However, in this embodiment, the vertical drive motor 20 having a relatively small capacity may be used. Therefore, even when two vertical drive motors 20 are used, the cost of the robot 1 can be reduced.

  Furthermore, in this embodiment, since the vertical drive motor 20 having a relatively small capacity can be used, the power transmitted from one vertical drive motor 20 is reduced. Therefore, the transmission power to the power transmission mechanism such as the speed reducer 21, the pinion 22 and the rack 23 for transmitting the power of the vertical drive motor 20 can be reduced, and the power transmission to the speed reducer 21, the pinion 22 and the rack 23, etc. The structure of the mechanism can be simplified. Moreover, damage to power transmission mechanisms such as the speed reducer 21, the pinion 22, and the rack 23 can be suppressed.

  On the other hand, since the vertical drive mechanism 16 uses two vertical drive motors 20, the drive torque of one vertical drive motor 20 becomes a heavy load on the other vertical drive motor 20, and the other vertical drive motor 20. Although there is a possibility that the driving torque of the motor 20 becomes a large load on one of the vertical driving motors 20, in this embodiment, the vertical motor control unit 81 has one of the two vertical driving motors 20. The vertical drive motor 20 is controlled by speed control and torque control, and the other vertical drive motor 20 is controlled by torque control. That is, the vertical motor control unit 81 controls the rotational speed of one vertical driving motor 20, but does not control the rotational speed of the other vertical driving motor 20, and the other vertical driving motor 20 It rotates following one of the vertical drive motors 20. Therefore, a large difference in rotational speed between the two vertical drive motors 20 does not occur. Therefore, the driving torque of one vertical driving motor 20 is prevented from becoming a large load on the other vertical driving motor 20, and the driving torque of the other vertical driving motor 20 is larger than that of the one vertical driving motor 20. It can prevent becoming a load.

  Further, since the other vertical driving motor 20 rotates following the one vertical driving motor 20, the two vertical driving motors 20 are connected to each of the two vertical driving motors 20 via the speed reducer 21 or the like. Even when the pinion 22 is meshed with the rack 23, the teeth of the two pinions 22 and the teeth of the rack 23 can be prevented from meshing with an excessive force. As a result, damage to the pinion 22 and the rack 23 can be suppressed, and the support member 7 can be appropriately moved up and down by the vertical drive mechanism 16.

  In the present embodiment, the horizontal drive mechanism 17 includes two horizontal drive motors 40. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the horizontal drive motor 40 required by the horizontal drive mechanism 17 is large, it is possible to use the horizontal drive motor 40 having a relatively small physique. Moreover, the freedom degree of arrangement | positioning of the motor 40 for a horizontal drive becomes high. Therefore, in this embodiment, the robot 1 can be downsized despite the large substrate 2 being transferred.

  Further, in this embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, the cost of the robot 1 can be reduced even when two horizontal drive motors 40 are used. Is possible. Furthermore, in this embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, the power transmitted from one horizontal drive motor 40 is reduced. Therefore, the transmission power to the power transmission mechanisms such as the pinion 42 and the rack 43 that transmit the power of the horizontal drive motor 40 can be reduced, and the configuration of the power transmission mechanism that transmits the power of the horizontal drive motor 40 is simplified. Can be Further, it is possible to suppress damage to the power transmission mechanism that transmits the power of the horizontal drive motor 40.

  On the other hand, since the horizontal drive mechanism 17 uses two horizontal drive motors 40, the drive torque of one horizontal drive motor 40 (or the other horizontal drive motor 40) is the other horizontal drive motor 40. In this embodiment, the horizontal motor control unit 82 may be one of the two horizontal drive motors 40. However, the horizontal motor control unit 82 may be a large load on the horizontal drive motor 40. The motor 40 is controlled by speed control and torque control, and the other horizontal drive motor 40 is controlled by torque control at other times except when the other horizontal drive motor 40 is stopped.

  That is, at other times than before the other horizontal drive motor 40 is stopped, the rotation speed of one horizontal drive motor 40 is controlled, but the rotation speed of the other horizontal drive motor 40 is not controlled. The other horizontal drive motor 40 rotates following the one horizontal drive motor 40. For this reason, a large difference in rotational speed does not occur between the two horizontal drive motors 40 at other times except when the other horizontal drive motor 40 is stopped, and one horizontal drive motor 40 (or the other) It is possible to prevent the driving torque of the horizontal driving motor 40) from becoming a heavy load on the other horizontal driving motor 40 (or one horizontal driving motor 40).

  At other times except when the other horizontal drive motor 40 is not stopped, the other horizontal drive motor 40 rotates following the one horizontal drive motor 40, so that the pulleys 48 and 49 and the belt 50 are used. Even if two pinions 42 connected to each of the two horizontal drive motors 40 mesh with the rack 43, the teeth of the two pinions 42 and the teeth of the rack 43 are more than necessary. It is possible to prevent them from meshing with each other. As a result, damage to the pinion 42 and the rack 43 can be suppressed, and the main body 5 can be appropriately horizontally moved by the horizontal drive mechanism 17.

  In the present embodiment, before the other horizontal drive motor 40 is stopped, the other horizontal drive motor 40 is controlled by speed control and torque control, and between the two pinions 42 and the rack 43. The rotation speed of the other horizontal drive motor 40 is controlled so that the backlash of the other is eliminated. Therefore, when the base 9 is stopped, the backlash between the two pinions 42 and the rack 43 can be eliminated.

  In this embodiment, the rotation drive mechanism 18 includes two rotation drive motors 60. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the rotational drive motor 60 required by the rotational drive mechanism 18 is large, the rotational drive motor 60 having a relatively small physique can be used. Moreover, the freedom degree of arrangement | positioning of the motor 60 for rotation drive becomes high. Therefore, in this embodiment, the robot 1 can be downsized despite the large substrate 2 being transferred.

  Further, in the present embodiment, the rotational drive motor 60 having a relatively small capacity can be used, so that the cost of the robot 1 can be reduced even when two rotational drive motors 60 are used. Is possible. Furthermore, in this embodiment, since the rotational drive motor 60 having a relatively small capacity can be used, the power transmitted from one rotational drive motor 60 is reduced. Therefore, the transmission power to the power transmission mechanism such as the output gear 68 and the speed reducer 61 that transmits the power of the rotation drive motor 60 can be reduced, and the configuration of the power transmission mechanism that transmits the power of the rotation drive motor 60 can be reduced. Can be simplified. Further, it is possible to suppress damage to the power transmission mechanism that transmits the power of the rotation driving motor 60.

  On the other hand, since the rotation drive mechanism 18 uses two rotation drive motors 60, the drive torque of one rotation drive motor 60 (or the other rotation drive motor 60) is the other rotation drive motor 60. In this embodiment, the rotary motor control unit 83 may be used to rotate one of the two rotation drive motors 60 (or one of the rotation drive motors 60). The motor 60 is controlled by speed control and torque control, and the other rotation drive motor 60 is controlled by torque control at other times except when the other rotation drive motor 60 is stopped.

  That is, at other times than before the other rotation drive motor 60 is stopped, the rotation speed of one rotation drive motor 60 is controlled, but the rotation speed of the other rotation drive motor 60 is not controlled. The other rotation driving motor 60 rotates following the one rotation driving motor 60. For this reason, a large difference in rotational speed does not occur between the two rotation driving motors 60 at other times except when the other rotation driving motor 60 is not stopped. It is possible to prevent the drive torque of the rotation drive motor 60) from becoming a heavy load on the other rotation drive motor 60 (or one rotation drive motor 60).

  In other cases except before the other rotation driving motor 60 is stopped, the other rotation driving motor 60 rotates following the one rotation driving motor 60, so that the two output gears 68 are reduced. Even when the gear 61 is meshed with the input gear 69, the teeth of the output gear 68 and the teeth of the input gear 69 can be prevented from meshing with an excessive force. As a result, damage to the input gear 68 and the output gear 69 can be suppressed, and the turning member 10 can be appropriately turned by the rotation drive mechanism 18.

  In this embodiment, before the other rotation driving motor 60 is stopped, the other rotation driving motor 60 is controlled by speed control and torque control. The rotational speed of the other rotational drive motor 60 is controlled so that the backlash of the other is eliminated. Therefore, the backlash between the two output gears 68 and the input gear 69 can be eliminated when the turning member 10 is stopped.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the vertical motor control unit 81 controls one vertical drive motor 20 of the two vertical drive motors 20 by speed control and torque control. In addition to this, for example, the vertical motor control unit 81 performs one vertical control by position control and torque control based on the rotational position of the vertical drive motor 20 calculated by integrating the rotational speed detected by the speed detection mechanism. The drive motor 20 may be controlled.

  Similarly, in the above-described form, the horizontal motor control unit 82 controls one horizontal drive motor 40 by speed control and torque control, and controls the other horizontal drive motor 40 by speed control in a predetermined case. Although it is controlled by torque control, the horizontal drive motor 40 may be controlled by position control and torque control. In the above-described form, the rotary motor control unit 83 controls one rotary drive motor 60 by speed control and torque control, and, in a predetermined case, controls the other rotary drive motor 60 by speed control and torque. However, the rotational drive motor 60 may be controlled by position control and torque control.

  In the embodiment described above, the vertical drive mechanism 16 includes two vertical drive motors 20. In addition, for example, the vertical drive mechanism 16 may include three or more vertical drive motors 20. In this case, the vertical motor control unit 81 controls several vertical drive motors 20 among the three or more vertical drive motors 20 by speed control and torque control, and the remaining vertical drive motors. 20 may be controlled by torque control. In this case, the vertical motor control unit 81 includes three or more vertical drive motors in order to reliably prevent the drive torque of a vertical drive motor 20 from becoming a heavy load on the other vertical drive motors 20. It is preferable that one vertical driving motor 20 of the motors 20 is controlled by speed control and torque control, and the remaining vertical driving motors 20 are controlled by torque control.

  In the embodiment described above, the horizontal drive mechanism 17 includes two horizontal drive motors 40, but the horizontal drive mechanism 17 may include three or more horizontal drive motors 40. In this case, the horizontal motor control unit 82 controls some of the three or more horizontal drive motors 40 by speed control and torque control, and the remaining horizontal drive. Before the motor 40 is stopped, the remaining horizontal drive motor 40 is controlled by speed control and torque control, and at other times except before the remaining horizontal drive motor 40 is stopped, the remaining horizontal drive motor What is necessary is just to control 40 by torque control. In this case, the horizontal motor control unit 82 includes three or more horizontal drives in order to reliably prevent the driving torque of one horizontal drive motor 40 from becoming a heavy load on the other horizontal drive motors 40. One of the horizontal motors 40 is controlled by speed control and torque control, and the remaining horizontal drive motors 40 are controlled at other times except when the remaining horizontal drive motors 40 are stopped. It is preferable to control by torque control.

  Similarly, the rotation drive mechanism 18 may include three or more rotation drive motors 60. In this case, the rotation motor control unit 83 controls some of the three or more rotation drive motors 60 by speed control and torque control, and the remaining rotation drive. Before the motor 60 is stopped, the remaining rotational driving motor 60 is controlled by speed control and torque control, and the remaining rotational driving motors are otherwise used before the remaining rotational driving motor 60 is stopped. 60 may be controlled by torque control. In this case, in order to reliably prevent the driving torque of one rotation driving motor 60 from becoming a heavy load on the other rotation driving motor 60, the rotation motor control unit 83 includes three or more rotation driving units. One of the motors 60 for rotation is controlled by speed control and torque control, and at the time other than before the remaining motor 60 for rotation is stopped, the remaining motor 60 for rotation driving is controlled. It is preferable to control by torque control.

  In the embodiment described above, the horizontal motor control unit 82 controls the other horizontal drive motor 40 by speed control and torque control before stopping the other horizontal drive motor 40, and At other times than before the stop, the other horizontal drive motor 40 is controlled by torque control. In addition to this, for example, the horizontal motor control unit 82 may always control the other horizontal driving motor 40 by torque control. Similarly, the rotation motor control unit 83 may always control the other rotation drive motor 60 by torque control.

  In the embodiment described above, the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18 are all provided with the two drive motors 20, 40, 60. However, the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotation are provided. If at least one drive mechanism of the drive mechanism 18 includes two drive motors 20, 40, 60, the drive motors 20, 40, 60 included in the other drive mechanisms are one. There may be.

  In the embodiment described above, the support member 7 is moved in the vertical direction by the two pinions 22 and the rack 23. In addition to this, for example, the support member 7 may be moved in the vertical direction by a ball screw and a plurality of nut members screwed into the ball screw. Similarly, in the embodiment described above, the base 9 is moved in the horizontal direction by the two pinions 42 and the rack 43, but the base 9 is horizontally moved by the ball screw and a plurality of nut members screwed to the ball screw. You may move in the direction.

  In the form described above, the robot 1 includes the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18. In addition to this, for example, the robot 1 may include only two or one drive mechanism arbitrarily selected from the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18.

It is a top view of the industrial robot concerning an embodiment of the invention. It is a figure which shows an industrial robot from the EE direction of FIG. It is a figure which shows an industrial robot from the FF direction of FIG. It is a figure which shows a supporting member and an up-down drive mechanism from the FF direction of FIG. It is a figure which shows a supporting member, a columnar member, and an up-down drive mechanism from the GG direction of FIG. It is a figure which shows an up-down drive mechanism from the HH direction of FIG. It is a figure for demonstrating the internal structure of the J section of FIG. It is a figure for demonstrating structures, such as a horizontal drive mechanism, from the KK direction of FIG. It is a figure for demonstrating the structure of a horizontal drive mechanism from the LL direction of FIG. It is a top view of the turning member shown in FIG. It is sectional drawing of the MM cross section of FIG. It is a block diagram of the control part of the industrial robot shown in FIG. 1, and its relevant part.

Explanation of symbols

1 Robot (industrial robot)
2 Substrate (object to be transported)
3 hand 4 arm 7 support member 16 vertical drive mechanism 17 horizontal drive mechanism 18 rotation drive mechanism 20 vertical drive motor (drive motor, first drive motor, second drive motor)
40 Horizontal drive motor (drive motor, first drive motor, second drive motor)
60 Rotation drive motor (drive motor, first drive motor, second drive motor)
80 control unit 81 vertical motor control unit (motor control unit)
82 Horizontal motor controller (motor controller)
83 Rotation motor controller (motor controller)
CL center axis

Claims (6)

A hand on which the object to be transported is mounted; an arm to which the hand is connected; and a support member that supports the arm;
A vertical drive mechanism that moves the support member up and down; and a control unit that controls the vertical drive mechanism,
The vertical drive mechanism includes a plurality of drive motors,
The control unit includes a motor control unit that controls the plurality of drive motors,
The motor control unit controls a first drive motor, which is some of the plurality of drive motors, by either speed control or position control and torque control, An industrial robot characterized in that a second drive motor, which is the remaining drive motor excluding the first drive motor, is controlled by torque control . A hand on which the object to be transported is mounted; an arm to which the hand is connected; and a support member that supports the arm;
A horizontal drive mechanism for moving the support member in a horizontal direction; and a control unit for controlling the horizontal drive mechanism,
The horizontal drive mechanism includes a plurality of drive motors,
The control unit includes a motor control unit that controls the plurality of drive motors,
The motor control unit controls a first drive motor, which is some of the plurality of drive motors, by either speed control or position control and torque control, An industrial robot characterized in that a second drive motor, which is the remaining drive motor excluding the first drive motor, is controlled by torque control. A hand on which the object to be transported is mounted; an arm to which the hand is connected; and a support member that supports the arm;
A rotation drive mechanism for rotating the support member around a predetermined central axis with the vertical direction as an axial direction, and a control unit for controlling the rotation drive mechanism;
The rotational drive mechanism includes a plurality of drive motors,
The control unit includes a motor control unit that controls the plurality of drive motors,
The motor control unit controls a first drive motor, which is some of the plurality of drive motors, by either speed control or position control and torque control, An industrial robot characterized in that a second drive motor, which is the remaining drive motor excluding the first drive motor, is controlled by torque control. It said first drive motor, industrial robot according to any of claims 1 to 3, characterized in that the one said drive motor. A hand on which the object to be transported is mounted; an arm to which the hand is connected; and a support member that supports the arm;
A horizontal drive mechanism for moving the support member in a horizontal direction; and a control unit for controlling the horizontal drive mechanism,
The horizontal drive mechanism includes a plurality of drive motors,
The control unit includes a horizontal motor control unit that controls a plurality of the driving motors,
Each of the plurality of drive motors includes a speed detection mechanism for detecting a rotation speed of the drive motor,
Some of the plurality of drive motors are used as first horizontal drive motors, and the remaining drive motors other than the first horizontal drive motor are used as second horizontal drive motors. If it is a motor,
The horizontal motor control unit controls the first horizontal drive motor by either speed control or position control and torque control, and is the speed detection mechanism of the first horizontal drive motor. A reference pulse number which is detected by the first speed detection mechanism and is a pulse number from a predetermined reference position of the support member to a scheduled stop position; and the support member detected by the first speed detection mechanism. When the difference from the number of detected pulses, which is the actual number of pulses from the reference position, is less than or equal to a predetermined value, either the speed control or the position control and the torque control 2 for controlling the horizontal driving motor, and when the difference between the reference pulse number and the detection pulse number is larger than the predetermined value, the second horizontal driving is performed by torque control. Industrial robot and controlling the motor. A hand on which the object to be transported is mounted; an arm to which the hand is connected; and a support member that supports the arm;
A rotation drive mechanism for rotating the support member around a predetermined central axis with the vertical direction as an axial direction, and a control unit for controlling the rotation drive mechanism;
The rotational drive mechanism includes a plurality of drive motors,
The control unit includes a rotary motor control unit that controls a plurality of the drive motors,
Each of the plurality of drive motors includes a speed detection mechanism for detecting a rotation speed of the drive motor,
Some of the drive motors among the plurality of drive motors serve as first rotational drive motors, and the remaining drive motors other than the first rotational drive motors serve as second rotational drive motors. If it is a motor,
The rotary motor control unit controls the first rotary drive motor by either speed control or position control and torque control, and is the speed detection mechanism of the first rotary drive motor. A reference pulse number that is detected by the first speed detection mechanism and is a pulse number from a predetermined rotation reference position of the support member to a scheduled stop position, and the support member that is detected by the first speed detection mechanism The difference between the actual number of pulses from the rotation reference position and the number of detected pulses is calculated, and if the difference is less than or equal to a predetermined value, either speed control or position control and torque control are performed. When the second rotational drive motor is controlled and the difference between the reference pulse number and the detection pulse number is larger than the predetermined value, the second control is performed by torque control. Industrial robot and controlling the rotational drive motor.

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