JP5249281B2 - Magnetic position detector - Google Patents
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Description
本発明は、磁気抵抗効果素子を用いた磁気式位置検出装置に関し、特に磁気式のスケールやロータリーエンコーダ等に用いて好適な磁気式位置検出装置に関する。 The present invention relates to a magnetic position detection device using a magnetoresistive effect element, and more particularly to a magnetic position detection device suitable for use in a magnetic scale, a rotary encoder, or the like.
磁気式位置検出装置としては、従来から、図6(A)に示されるような、N極とS極が交互に着磁された磁気部材1の磁極配列方向に対して同一位置に4個のスピンバルブ型磁気抵抗素子(SV-GMR1〜SV-GMR4)を配置したものが知られている(下記特許文献1参照)。4個のスピンバルブ型磁気抵抗素子(SV-GMR1〜SV-GMR4)のうち、1対の2個(SV-GMR1及びSV-GMR2)はピン層磁化方向が90°ずれて配置され、残りの対の2個(SV-GMR3及びSV-GMR4)は前記1対の2個に対してピン層磁化方向が180°ずれて配置されている。SV-GMR1〜SV-GMR4は図6(B)のように接続され、磁極配列方向への磁気部材1の相対移動に伴って、この回路から互いに位相が90°ずれた2相の出力信号Vout1,Vout2が得られる。また、図7(A)に示すようにスピンバルブ型磁気抵抗素子を2個(SV-GMR1及びSV-GMR2)とし、それらと抵抗R3,R4を図7(B)に示すように接続した回路からも、互いに位相が90°ずれた2相の出力信号Vout1,Vout2が得られる(下記特許文献1参照)。 Conventionally, as a magnetic position detecting device, as shown in FIG. 6 (A), there are four magnetic position detection devices at the same position with respect to the magnetic pole arrangement direction of the magnetic member 1 in which N poles and S poles are alternately magnetized. A device in which spin valve magnetoresistive elements (SV-GMR1 to SV-GMR4) are arranged is known (see Patent Document 1 below). Of the four spin-valve magnetoresistive elements (SV-GMR1 to SV-GMR4), a pair of two (SV-GMR1 and SV-GMR2) are arranged with the pinned layer magnetization direction shifted by 90 °, and the rest Two pairs (SV-GMR3 and SV-GMR4) are arranged with the pinned layer magnetization direction shifted by 180 ° with respect to the two pairs. The SV-GMR1 to SV-GMR4 are connected as shown in FIG. 6B, and the two-phase output signals Vout1 whose phases are shifted from each other by 90 ° with the relative movement of the magnetic member 1 in the magnetic pole arrangement direction. , Vout2 is obtained. Further, as shown in FIG. 7A, there are two spin-valve magnetoresistive elements (SV-GMR1 and SV-GMR2), and resistors R3 and R4 are connected as shown in FIG. 7B. As a result, two-phase output signals Vout1 and Vout2 whose phases are shifted from each other by 90 ° are obtained (see Patent Document 1 below).
上記特許文献1では、磁極配列方向への磁気部材の相対移動に伴ってスピンバルブ型磁気抵抗素子に回転磁場(磁界)を発生させるために、全長に渡ってN極とS極が交互に等ピッチで配列されたものを磁気部材としている。つまり、全ての磁極は磁極配列方向に関する長さが等しい。この場合、磁極配列方向に関する磁極の長さを短くする(例:14mm→10mm)ことで、磁気部材の全長を短くすることができる(例:4極着磁の場合、56mm→40mm)。しかし、そうすると磁気部材の全長だけでなく検出範囲(センシング範囲)すなわち両端の磁極を除いた磁気部材の長さの合計も同様に短くなる(例:28mm→20mm)という課題がある。 In Patent Document 1, in order to generate a rotating magnetic field (magnetic field) in the spin-valve magnetoresistive element with relative movement of the magnetic member in the magnetic pole arrangement direction, the N pole and the S pole are alternately arranged over the entire length. Those arranged at a pitch are used as magnetic members. That is, all the magnetic poles have the same length in the magnetic pole arrangement direction. In this case, by shortening the length of the magnetic pole in the magnetic pole arrangement direction (example: 14 mm → 10 mm), the total length of the magnetic member can be shortened (example: in the case of quadrupole magnetization, 56 mm → 40 mm). However, in this case, there is a problem that not only the entire length of the magnetic member but also the detection range (sensing range), that is, the total length of the magnetic member excluding the magnetic poles at both ends is similarly shortened (for example, 28 mm → 20 mm).
本発明はこうした状況を認識してなされたものであり、その目的は、検出範囲を狭めなくても磁気部材を小さく(短く)することができ、コストダウンを図ることが可能な、磁気式位置検出装置を提供することにある。 The present invention has been made in view of such a situation, and its purpose is to reduce the cost of the magnetic member without reducing the detection range. It is to provide a detection device.
本発明のある態様は、磁気式位置検出装置である。この磁気式位置検出装置は、
N極とS極が交互に配列された磁気部材と、
前記磁気部材の磁極配列面に対向する位置に存在する一対又は複数対のスピンバルブ型磁気抵抗効果素子とを備え、
前記磁気部材は、磁極配列方向の両端の磁極の前記磁極配列方向に関する長さが、前記両端以外の磁極の前記磁極配列方向に関する長さよりも短く、
前記両端の磁極の前記磁極配列方向に関する長さをP1、前記両端以外の磁極の前記磁極配列方向に関する長さをP2としたとき、P2/P1≦2であることを特徴としている。
One embodiment of the present invention is a magnetic position detection device. This magnetic position detector
A magnetic member in which N poles and S poles are alternately arranged;
A pair or a plurality of pairs of spin valve magnetoresistive effect elements present at positions facing the magnetic pole array surface of the magnetic member,
It said magnetic member has a length related to the magnetic pole arrangement direction of the magnetic poles of both ends of the magnetic pole arrangement direction, rather shorter than the length in the magnetic pole arrangement direction of the magnetic poles other than the two ends,
When the length of the magnetic poles at both ends in the magnetic pole arrangement direction is P1, and the length of the magnetic poles other than the both ends in the magnetic pole arrangement direction is P2, P2 / P1 ≦ 2 .
前記P1と前記P2が、P2/P1≦7/5であるとよい。 The P1 and the P2 may be P2 / P1 ≦ 7/5.
前記磁気部材の磁極配列面が平面又は曲面であるとよい。 Pole array surface of the front Symbol magnetic member may is flat or curved.
なお、以上の構成要素の任意の組合せ、本発明の表現を方法やシステムなどの間で変換したものもまた、本発明の態様として有効である。 It should be noted that any combination of the above-described constituent elements, and those obtained by converting the expression of the present invention between methods and systems are also effective as aspects of the present invention.
本発明によれば、磁気部材は磁極配列方向の両端の磁極の前記磁極配列方向に関する長さが前記両端以外の磁極の前記磁極配列方向に関する長さよりも短いため、磁極配列方向の両端の磁極の前記磁極配列方向に関する長さが前記両端以外の磁極の前記磁極配列方向に関する長さと同じだけ長い場合と比較して、磁気式位置装置としての検出範囲を狭めなくても磁気部材を小さく(短く)することができ、コストダウンを図ることが可能となる。 According to the present invention, since the length of the magnetic poles at both ends of the magnetic pole arrangement direction in the magnetic member is shorter than the length of the magnetic poles other than the both ends in the magnetic pole arrangement direction, Compared to the case where the length in the magnetic pole arrangement direction is as long as the length of the magnetic poles other than the both ends in the magnetic pole arrangement direction, the magnetic member is made smaller (shorter) without narrowing the detection range as the magnetic position device. This makes it possible to reduce costs.
以下、図面を参照しながら本発明の好適な実施の形態を詳述する。なお、各図面に示される同一または同等の構成要素、部材等には同一の符号を付し、適宜重複した説明は省略する。また、実施の形態は発明を限定するものではなく例示であり、実施の形態に記述されるすべての特徴やその組み合わせは必ずしも発明の本質的なものであるとは限らない。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.
図1は、本発明の実施の形態に係る磁気式位置検出装置100の概略斜視図である。磁気式位置検出装置100は、磁気部材101と、磁気センサ102とを備える。磁気部材101は、その磁極配列面101aにN極とS極が交互に配列されたものであり、ここでは4極着磁としている。また、磁極配列方向の両端の磁極の前記磁極配列方向に関する長さP1(両端の磁極長P1)は、前記両端以外の磁極の前記磁極配列方向に関する長さP2(両端以外の磁極長P2)よりも短い。P1,P2の関係についての詳細は後述する。磁気センサ102は、一対又は二対のスピンバルブ型磁気抵抗効果素子を磁気部材101の磁極配列面101aに対向する位置に配置したものである。これについては、図6(A),(B)又は図7(A),(B)に示した従来の技術を適用することができる。
FIG. 1 is a schematic perspective view of a magnetic position detection apparatus 100 according to an embodiment of the present invention. The magnetic position detection device 100 includes a magnetic member 101 and a
図2及び図3は、磁気部材101の両端以外の磁極長P2を一定(P2=14mm)とし、両端の磁極長P1を変化させた場合の磁界シミュレーション結果の説明図であり、図2の(A)はP1=14mm、(B)はP1=12mm、(C)はP1=10mm、(D)はP1=8mmの場合をそれぞれ示し、図3の(A)はP1=6mm、(B)はP1=4mm、(C)はP1=2mm、(D)はP1=0mm(2極着磁)の場合をそれぞれ示す。シミュレーションの範囲は、中央の2つの磁極の境界から左右(磁極配列方向)にそれぞれ14mmとし、磁極配列面101aから垂直に5mm離れた位置での磁界の計算結果を0.5mm間隔でベクトル表記した。これらの図より、両端の磁極長P1が4mm以下まで短くなると、検出範囲の両端において磁界の角度ずれが大きいことが分かる(この種の磁気部材では、N極とS極の境界上では磁界は磁極配列面と平行であることが要求される)。
2 and 3 are explanatory diagrams of magnetic field simulation results when the magnetic pole length P2 other than both ends of the magnetic member 101 is constant (P2 = 14 mm) and the magnetic pole length P1 at both ends is changed. A) shows P1 = 14 mm, (B) shows P1 = 12 mm, (C) shows P1 = 10 mm, and (D) shows a case where P1 = 8 mm. FIG. 3 (A) shows P1 = 6 mm, (B) Represents P1 = 4 mm, (C) represents P1 = 2 mm, and (D) represents P1 = 0 mm (bipolar magnetization). The simulation range is 14 mm from left to right (magnetic pole arrangement direction) from the boundary between the two magnetic poles in the center, and the magnetic field calculation results at a
図4は、磁気部材101の両端以外の磁極長P2を一定(P2=14mm)とし、両端の磁極長P1を変化させた場合の、検出範囲内の位置と位置誤差との関係を示す誤差グラフである。両端の磁極長P1は、図2及び図3と同様にP1=14mm,12mm,10mm,8mm,6mm,4mm,2mm,0mmとした。本図は、図2及び図3のシミュレーションにおける検出範囲内の各位置の磁界の角度ずれを位置誤差に換算したものに相当する。本図より、磁気部材101の両端の磁極長P1が6mm以上であれば、位置誤差が概ね1mm程度以内に収まっていることが分かる。 FIG. 4 is an error graph showing the relationship between the position in the detection range and the position error when the magnetic pole length P2 other than both ends of the magnetic member 101 is constant (P2 = 14 mm) and the magnetic pole length P1 at both ends is changed. It is. The magnetic pole length P1 at both ends was set to P1 = 14 mm, 12 mm, 10 mm, 8 mm, 6 mm, 4 mm, 2 mm, and 0 mm as in FIGS. This figure corresponds to the conversion of the angular deviation of the magnetic field at each position within the detection range in the simulation of FIGS. 2 and 3 into a position error. From this figure, it can be seen that if the magnetic pole length P1 at both ends of the magnetic member 101 is 6 mm or more, the position error is generally within about 1 mm.
図5は、磁気部材101の両端の磁極長P1の各場合における、図4に示した検出範囲内の位置誤差の最大値を示す特性図である。本図より、磁気部材101の両端の磁極長P1が10mm〜14mmの範囲(P2/P1≦7/5)では最大位置誤差は殆ど一定であることが分かる。また、P1が7mm以上(P2/P1≦2)であれば最大位置誤差は1mmを超えないことが分かる。また、P1が6mm(P2/P1=7/3)の場合も最大位置誤差は概ね1mm程度となることが分かる。一方、P1が6mm未満では最大位置誤差が急増する傾向にある。 5 is a characteristic diagram showing the maximum value of the position error within the detection range shown in FIG. 4 in each case of the magnetic pole length P1 at both ends of the magnetic member 101. In FIG. From this figure, it is understood that the maximum position error is almost constant when the magnetic pole length P1 at both ends of the magnetic member 101 is in the range of 10 mm to 14 mm (P2 / P1 ≦ 7/5). It can also be seen that if P1 is 7 mm or more (P2 / P1 ≦ 2), the maximum position error does not exceed 1 mm. It can also be seen that the maximum position error is about 1 mm when P1 is 6 mm (P2 / P1 = 7/3). On the other hand, if P1 is less than 6 mm, the maximum position error tends to increase rapidly.
以上より、磁気部材101の両端の磁極長P1を両端以外の磁極長P2よりも短くしても、P2/P1の範囲を適切に定めることで、等長複数極着磁(P1=P2)の場合と遜色ない精度を得ることが可能である、又は同場合ほどではなくても位置誤差を十分小さく抑えることが可能であるといえる。つまり、等長複数極着磁(P1=P2)の場合と同様に、磁極配列方向への磁気部材101の相対移動に伴って磁気センサ102(素子位置)に安定した回転磁場(磁界)を発生させることができる。 As described above, even if the magnetic pole length P1 at both ends of the magnetic member 101 is shorter than the magnetic pole length P2 other than both ends, by setting the range of P2 / P1 appropriately, equal length multiple pole magnetization (P1 = P2) It can be said that the accuracy comparable to the case can be obtained, or the position error can be sufficiently reduced even if the accuracy is not as high as the case. That is, a stable rotating magnetic field (magnetic field) is generated in the magnetic sensor 102 (element position) with the relative movement of the magnetic member 101 in the magnetic pole arrangement direction, as in the case of equal length multiple pole magnetization (P1 = P2). Can be made.
本実施の形態によれば、下記の効果を奏することができる。 According to the present embodiment, the following effects can be achieved.
(1) 磁気部材101は両端の磁極長P1が両端以外の磁極長P2よりも短いため、両端の磁極長P1が両端以外の磁極長P2と同じだけ長い場合と比較して、磁気部材101の全長を短くして小型化を図ることができ、また、これに伴ってコスト低減を図ることが可能となる。一方、同場合と比較して検出範囲は同じである。つまり、磁気式位置装置としての検出範囲を狭めなくても磁気部材を小さく(短く)することができ、コストダウンを図ることが可能となる。 (1) Since the magnetic member 101 has the magnetic pole length P1 at both ends shorter than the magnetic pole length P2 at both ends, the magnetic member 101 has a magnetic length 101 that is longer than the magnetic pole length P2 at both ends. The overall length can be shortened to reduce the size, and the cost can be reduced accordingly. On the other hand, the detection range is the same as in the same case. That is, the magnetic member can be made smaller (shorter) without reducing the detection range as the magnetic position device, and the cost can be reduced.
(2) 磁気部材101の両端の磁極長P1を両端以外の磁極長P2よりも短くしても位置誤差を十分小さく抑えることが可能であり、小型化及びコストダウンを図るに当たって精度が大きく低下することもない。 (2) Even if the magnetic pole length P1 at both ends of the magnetic member 101 is made shorter than the magnetic pole length P2 at both ends, the position error can be kept sufficiently small, and the accuracy is greatly reduced when miniaturization and cost reduction are achieved. There is nothing.
以上、実施の形態を例に本発明を説明したが、実施の形態の各構成要素には請求項に記載の範囲で種々の変形が可能であることは当業者に理解されるところである。以下、変形例について触れる。 The present invention has been described above by taking the embodiment as an example. However, it will be understood by those skilled in the art that various modifications can be made to each component of the embodiment within the scope of the claims. Hereinafter, modifications will be described.
実施の形態では磁気部材101の磁極配列面101aが平面である場合を説明したが、変形例では磁極配列面101aは円弧面等の曲面であってもよい。 In the embodiment, the case where the magnetic pole array surface 101a of the magnetic member 101 is a flat surface has been described. However, in the modification, the magnetic pole array surface 101a may be a curved surface such as an arc surface.
実施の形態では磁気部材101が4極着磁である場合を説明したが、変形例では磁気部材101を5極以上の多極着磁としてもよい。また、磁気部材101は、一つの磁性体に多極着磁したものであっても、複数の永久磁石を組み合わせたものであってもよい。 In the embodiment, the case where the magnetic member 101 is quadrupole magnetized has been described. However, in the modification, the magnetic member 101 may be multipolar magnetized with five or more poles. Further, the magnetic member 101 may be a multi-pole magnetized one magnetic body or a combination of a plurality of permanent magnets.
スピンバルブ型磁気抵抗素子としては、スピンバルブ型巨大磁気抵抗効果素子(SV-GMR)の他、トンネル効果型磁気抵抗効果素子(SV-TMR)を用いることも可能である。 As the spin valve magnetoresistive element, a tunnel effect magnetoresistive element (SV-TMR) can be used in addition to the spin valve giant magnetoresistive element (SV-GMR).
100 磁気式位置検出装置
101 磁気部材
102 磁気センサ
DESCRIPTION OF SYMBOLS 100 Magnetic type position detection apparatus 101
Claims (3)
前記磁気部材の磁極配列面に対向する位置に存在する一対又は複数対のスピンバルブ型磁気抵抗効果素子とを備え、
前記磁気部材は、磁極配列方向の両端の磁極の前記磁極配列方向に関する長さが、前記両端以外の磁極の前記磁極配列方向に関する長さよりも短く、
前記両端の磁極の前記磁極配列方向に関する長さをP1、前記両端以外の磁極の前記磁極配列方向に関する長さをP2としたとき、P2/P1≦2であることを特徴とする、磁気式位置検出装置。 A magnetic member in which N poles and S poles are alternately arranged;
A pair or a plurality of pairs of spin valve magnetoresistive effect elements present at positions facing the magnetic pole array surface of the magnetic member,
It said magnetic member has a length related to the magnetic pole arrangement direction of the magnetic poles of both ends of the magnetic pole arrangement direction, rather shorter than the length in the magnetic pole arrangement direction of the magnetic poles other than the two ends,
P2 / P1 ≦ 2, where P1 is the length of the magnetic poles at both ends in the magnetic pole arrangement direction, and P2 is the length of the magnetic poles other than the both ends in the magnetic pole arrangement direction. Detection device.
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