JP5260164B2 - Measuring apparatus and measuring method - Google Patents

Description

  The present invention relates to a measuring apparatus and a measuring method capable of measuring a predetermined physical quantity of a measurement object.

A substrate inspection apparatus disclosed in Japanese Patent Application Laid-Open No. 2008-8773 is known as this type of measurement apparatus. The substrate inspection apparatus includes a control unit, a first / second current supply unit, a first / second voltage measurement unit, a first / second switching unit, a first / second contact unit, and the like. Yes. That is, this board inspection apparatus is provided with two (two sets) inspection means having a current supply section, a voltage measurement section, a switching section, and the like, and conducts continuity inspection (resistance measurement) on the terminal on the surface side of the board. The inspection efficiency is improved by conducting the continuity inspection for the terminal on the back side of the substrate in parallel by two inspection means.
Japanese Patent Laid-Open No. 2008-8773 (page 5-12, FIG. 2)

  However, the above substrate inspection apparatus has the following problems. That is, in this board inspection apparatus, the inspection of the continuity with respect to the terminal on the front surface side of the substrate and the continuity inspection with respect to the terminal on the back side of the substrate are performed in parallel by two inspection means, thereby improving the inspection efficiency. For this reason, this board inspection apparatus has a problem that it is difficult to reduce the apparatus price as a result of requiring two current supply sections, a voltage measurement section, and a switching section constituting the inspection means.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a measuring apparatus and a measuring method capable of reducing the apparatus price while realizing efficient measurement.

Measuring device according to claim 1 to achieve the above object includes a power supply unit for generating a measuring current, for the first contact terminals and the measurement for outputting the current for measurement in the contacted portion of the measured object A pair of contact terminals each having a pair of second contact terminals for inputting a voltage generated in the contacted part by the output of the current; and a pair of terminals connected to the power supply part to supply the measurement current A first conductor, a plurality of voltage detectors for detecting the voltage, a second conductor connected to each of the voltage detectors in pairs , the first conductors and the second conductors, Is one or more third conductors that are provided separately to energize the measurement current, a connection part that connects and disconnects each contact terminal and each conductor, and the connection part And a control unit for controlling the measurement object based on the voltage value. Bei example a measuring unit for measuring a predetermined physical quantity of Te, the control unit, by controlling the disconnection unit, the contact terminal pairs respectively contact the in each of the contact portions of the plurality of the measured object A plurality of the first contact terminals and the third conductors in each of the contact terminal pairs excluding the predetermined two of the contact terminal pairs. The measurement target bodies are connected in series, and each of the first contact terminal pairs is in contact with the contacted portions located at both ends of the measurement target bodies connected in series. The contact terminals and the first conductors are connected to each other, and the second contact terminals and the respective first contacts in each of the contact terminal pairs that are in contact with the contacted parts of the plurality of measurement objects. 2 conductivity Are connected so that each measurement object and each voltage detector correspond to each other in a one-to-one correspondence, and after the connection process is executed, the measurement unit The predetermined physical quantity is measured for each measurement object that is in contact with each second contact terminal connected to each voltage detection unit via the body.

  The measuring device according to claim 2 is the measuring device according to claim 1, wherein the terminal portion is connected by an internal wiring formed inside the circuit board, and one side and the other side of the circuit board are connected. Each of the contact terminal pairs is configured to be able to contact each wiring pattern as the contacted part formed in each, and in the connection process, the control unit is configured to connect the internal wiring as the measurement object and the respective wiring patterns. The connection / disconnection part is controlled so that the wiring patterns are connected in series.

  A measuring device according to a third aspect is the measuring device according to the second aspect, wherein the contact terminal pair brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection / disconnection portion The wires between the contact terminal pairs brought into contact with the wiring pattern formed on the other surface side of the circuit board and the connection / disconnection portion are bundled together.

Further, the measuring method according to claim 4 is connected to the first contact terminal in the terminal portion having a plurality of contact terminal pairs in which the first contact terminal and the second contact terminal are paired and a power supply unit that generates a measurement current. The measurement current is output to the contacted part of the measurement object via the first contact terminal and connected to the pair of first conductors that supply the measurement current to the plurality of voltage detection parts. The measurement based on the value of the detected voltage is performed by detecting the voltage generated in the contacted part by the output of the measurement current by connecting and disconnecting the second conductors connected to each other in pairs. When measuring a predetermined physical quantity of an object, the contact terminal pairs are brought into contact with the contacted parts of the plurality of measurement objects, respectively, and predetermined two of the contact terminal pairs in that state For each contact terminal pair except By connecting the respective first conductor wherein each first contact terminal in people and said third conductor to the respective second conductors energizing the measuring current provided separately each A plurality of the measurement object bodies are connected in series, and each of the removed two contact terminal pairs that are in contact with the contacted parts located at both ends of the measurement object bodies connected in series, respectively. Each of the second contact terminals in each of the contact terminal pairs connected to the first contact terminals and the first conductors and in contact with the contacted parts of the plurality of measurement objects, After performing the connection process which connects each 2nd conductor so that each said measurement object and each said voltage detection part respond | correspond one-to-one, and after performing the said connection process, each said 2nd conductor Through Wherein measuring said predetermined physical quantity concerning each measured object which the are connected to the respective voltage detection unit each second contact terminal is in contact.

  Further, the measurement method according to claim 5 is the measurement method according to claim 4, wherein the measurement method is connected by an internal wiring formed inside the circuit board and formed on one side and the other side of the circuit board, respectively. In the connection process, when measuring the physical quantity of the internal wiring and the wiring patterns as the measurement object by connecting the contact terminal pairs to the wiring patterns as the contacted parts, The first contact terminals and the third conductor are connected so that the internal wiring and the wiring patterns are connected in series.

  In the measuring apparatus of Claim 1, and the measuring method of Claim 4, each contact terminal except the predetermined two of the some contact terminal pairs which are each contacting each to-be-contacted part of several measurement object. A connection process for connecting each measurement object in series by connecting each first contact terminal and each third conductor in each of the pair is executed, and after executing the connection process, a physical quantity for each measurement object Measure. For this reason, according to this measuring apparatus and measuring method, a physical quantity of a plurality of measurement objects is measured at once (or continuously) using one power supply unit and one connection / disconnection unit that generate a measurement current. As a result, the measurement device can be configured simply because the number of power supply units and connection / disconnection units is small compared to conventional board inspection devices that require two current supply units and two switching units. Can do. Therefore, according to this measuring apparatus and measuring method, it is possible to sufficiently reduce the apparatus price while realizing efficient measurement and inspection.

  Further, in the measuring apparatus according to claim 2 and the measuring method according to claim 5, each contact terminal pair is connected to each wiring pattern on one side and the other side of the circuit board connected by the internal wiring, and the internal wiring and When measuring the physical quantity for each wiring pattern, each first contact terminal and the third conductor are connected so that the internal wiring and each wiring pattern are connected in series. Therefore, according to this measuring apparatus and measuring method, the physical quantities of the plurality of internal wirings and the plurality of wiring patterns in this type of circuit board are converted into one measurement current generation unit (power supply unit) and one connection / disconnection unit. As a result of being able to measure at once (or continuously), it is possible to sufficiently reduce the cost of the apparatus while realizing efficient measurement and inspection for this type of circuit board.

  Further, in the measuring apparatus according to claim 3, the wiring between each contact terminal pair to be brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection portion is bundled, and on the other surface side of the circuit board. The wiring between each contact terminal pair brought into contact with the formed wiring pattern and the connection / disconnection portion is bundled. For this reason, according to this measuring apparatus, it is possible to reduce the influence of noise that occurs when the wiring between each contact terminal pair and the connection portion forms a loop. It can be measured accurately.

  Hereinafter, the best mode of a measuring apparatus and a measuring method according to the present invention will be described with reference to the accompanying drawings.

  First, the configuration of the measuring apparatus 1 will be described with reference to the drawings.

  A measuring apparatus 1 shown in FIG. 1 is an example of a measuring apparatus according to the present invention, and includes, for example, a plurality of wiring patterns and a plurality of elements 101 (all of which are measured according to the present invention) disposed on one surface side of a circuit board 100. While measuring the resistance value R (an example of a physical quantity in the present invention) of an object, which is an example of a physical quantity in the present invention, in a four-terminal method, the three elements 101a to 101c are shown in FIG. Based on the measured resistance value R, the wiring pattern and the quality of each element 101 can be inspected. Specifically, the measuring apparatus 1 includes a probe unit 2 and a main body 3.

  The probe unit 2 corresponds to a terminal portion in the present invention, and as shown in FIG. 1, a plurality of probes 21 (corresponding to contact terminal pairs in the present invention) arranged (planted) on a support portion outside the drawing, In the figure, only six probes 21a to 21f are shown). In this case, when the probe unit 2 is brought close to the circuit board 100 by a moving mechanism (not shown), each probe 21 is a terminal of each element 101 on the circuit board 100 (a contacted part in the present invention, The arrangement pattern is defined such that the tip portion contacts the terminals 111a to 111f (hereinafter also referred to as “terminal 111” when not distinguished) shown in the figure. Further, the probe 21 inputs a first contact terminal 31a for outputting a current Im (an example of a measurement current in the present invention), which will be described later, to the terminal 111, and a voltage Vm generated at the terminal 111 by the output of the current Im. The second contact terminal 31b (hereinafter also referred to as “contact terminal 31” when the first contact terminal 31a and the second contact terminal 31b are not distinguished from each other). The probe 21 is configured such that the tip of the contact terminal 31 can be brought into contact with the terminal 111 in a state where the first contact terminal 31a and the second contact terminal 31b are insulated and paired with each other.

  As shown in FIG. 1, the main body 3 includes a power source 11 and a plurality (for example, three in the figure) of voltage detection units 12 a, 12 b, and 12 c (hereinafter referred to as “voltage detection unit 12” when not distinguished from each other). ), A pair of first conductors 13a and 13b for supplying the current Im (the first conductors in the present invention, which are also referred to as “first conductors 13” when not distinguished below), The second conductors 14a to 14f connected to each other (the second conductor in the present invention, also referred to as “second conductor 14” when not distinguished below), and a pair of third conductors 15a for energizing the current Im, The scanner unit 16 and the control unit 17 are configured by 15b (the third conductor in the present invention, which is also referred to as “third conductor 15” when not distinguished below). The power supply unit 11 is configured to be able to generate a measurement current Im (as an example, a constant current). In this case, the current Im generated by the power supply unit 11 is supplied to the element 101 in the circuit board 100 via the first conductors 13a and 13b, the first contact terminal 31a of the probe 21 in the probe unit 2, and the third conductors 15a and 15b. Are output to the terminal 111.

  The voltage detection unit 12 detects the voltage Vm generated between the terminals 111 and 111 of the element 101 by the output of the current Im by inputting the second contact terminal 31b of the probe 21 and the second conductive wire 14 in the probe unit 2. . The scanner unit 16 is an example of a connection / disconnection unit according to the present invention, and includes a plurality of switches. Under the control of the control unit 17, the contact terminals 31 of the probes 21 and the conductive wires 13, 14, 15 are provided. Disconnect (connect and disconnect). The control unit 17 controls the scanner unit 16 to execute connection processing for connecting each contact terminal 31 of each probe 21 and each of the conductive wires 13, 14, 15 with a predetermined connection pattern. The control unit 17 functions as a measurement unit in the present invention, and after executing the connection process, the value of the current Im generated by the power supply unit 11 and the value of the voltage Vm detected by each voltage detection unit 12 Based on the above, the resistance values R of a plurality of (for example, three in the figure) elements 101 that are in contact with the second contact terminals 31b connected to the voltage detection units 12 via the second conductive wires 14 are determined. Measure at once (or continuously). Further, the control unit 17 inspects the quality of the element 101 based on the measured resistance value R.

  In this case, the measurement apparatus 1 is different from the conventional board inspection apparatus that requires two current supply units, two switching units, and the like, and uses a single power supply unit 11 and a single scanner unit 16 to provide a plurality of elements 101. Can be measured at a time. For this reason, in this measuring apparatus 1, since the number of the power supply units 11 and the scanner units 16 is small, the apparatus configuration is simplified.

  Next, with reference to the drawings, a method for measuring the resistance value R of each element 101 on the circuit board 100 using the measuring apparatus 1 (a measuring method according to the present invention) and a method for inspecting the quality of each element 101 will be described. I will explain.

  In this measuring apparatus 1, when a measurement (inspection) start instruction operation is performed, the control unit 17 controls a moving mechanism (not shown) to bring the probe unit 2 close to the circuit board 100. At this time, as shown in FIG. 1, the tips of the contact terminals 31 of the probes 21 of the probe unit 2 come into contact with the terminals 111 and 111 of the elements 101 of the circuit board 100, respectively. Further, the power supply unit 11 generates a measurement current Im.

  Next, the control unit 17 measures the resistance value R of each element 101 on the circuit board 100. In this case, the control unit 17 first controls the scanner unit 16 to connect the contact terminals 31 of the probes 21 in the probe unit 2 and the conductive wires 13, 14, 15 with a predetermined connection pattern. Execute. In this connection process, the control unit 17 includes the first contact terminal 31a in each of the probes 21 (probes 21b to 21e) excluding a predetermined two of the probes 21 (probes 21a and 21f in this example). Each element 101a-101c is connected in series by connecting with the 3rd conducting wire 15, respectively.

  In this case, the scanner unit 16 connects the first contact terminal 31a of the probe 21b that is in contact with one terminal (right side in the figure) 111b of the element 101a and the third conductor 15a, and one of the elements 101b ( The first contact terminal 31a of the probe 21c that is in contact with the terminal 111c on the left side in the figure is connected to the third conductor 15a. Further, the scanner unit 16 connects the first contact terminal 31a of the probe 21d that is in contact with the other terminal 111d (right side in the figure) of the element 101b and the third conductor 15b, and also connects one of the elements 101c (same as above). The first contact terminal 31a in the probe 21e that is in contact with the terminal 111e on the left side in the drawing is connected to the third conductor 15b. Thereby, each element 101a-101c is connected in series via each 1st contact terminal 31a and 3rd conducting wire 15a, 15b.

  Subsequently, the control unit 17 controls the scanner unit 16 to each of the two probes 21a and 21f that are in contact with the terminals 111a and 111f located at both ends of each of the elements 101a to 101c connected in series. The first contact terminal 31a and the first conductors 13a and 13b are connected to each other. As a result, as indicated by a broken line in FIG. 1, the current Im generated by the power supply unit 11 is output to the elements 101a to 101c connected in series via the first contact terminals 31a and the third conductors 15a and 15b. (Flowing).

  Next, the control unit 17 controls the scanner unit 16 to connect the second contact terminal 31b in each of the probes 21a and 21b in contact with the terminals 111a and 111b of the element 101a to the voltage detection unit 12a. The second conductor 14c is connected to the voltage detector 12b at the second contact terminal 31b of each of the probes 21c and 21d that are connected to the second conductors 14a and 14b and are in contact with the terminals 111c and 111d of the element 101b, respectively. 14d, and the second contact terminals 31b of the probes 21e and 21f that are in contact with the terminals 111e and 111f of the element 101c are respectively connected to the second conductors 14e and 14f connected to the voltage detector 12c. Connect. That is, the control unit 17 controls the scanner unit 16 so that the second contact terminals 31b and the second conductive wires 14 of the probes 21 that are in contact with the terminals 111 of the elements 101 are connected to the elements 101. The voltage detectors 12 are connected so as to correspond one-to-one.

  Subsequently, the voltage detector 12a inputs and detects the voltage Vm generated between the terminals 111a and 111b of the element 101a by the output of the current Im, and the voltage detector 12b detects the terminal 111c of the element 101b by the output of the current Im. , 111d is input and detected. Further, the voltage detector 12c receives and detects the voltage Vm generated between the terminals 111e and 111f of the element 101c by the output of the current Im. Next, the control unit 17 measures the resistance value R of each of the elements 101a to 101c based on the value of the current Im generated by the power supply unit 11 and the value of the voltage Vm detected by each of the voltage detection units 12a to 12c. (Calculate) and record each measured resistance value R in a recording unit (not shown).

  Next, the control unit 17 checks the quality of each element 101 by, for example, comparing the reference range defined by the upper and lower limit values with the resistance value R. In this case, as an example, the control unit 17 determines that the element 101 is a non-defective product when the resistance value R is within the reference range, and determines that the element 101 is defective when the resistance value R is outside the reference value range. . Thus, the pass / fail inspection for each element 101 of the circuit board 100 is completed.

  As described above, in the measurement apparatus 1 and the measurement method, each first contact in each of the probes 21 excluding a predetermined two of the plurality of probes 21 that are in contact with the respective terminals 111 of the plurality of elements 101. A connection process for connecting the elements 101 in series by connecting the terminals 31a and the third conductive wires 15 is performed, and after the connection process is performed, the resistance value R of each element 101 is measured. For this reason, as a result of being able to measure the resistance value R of the plurality of elements 101 at once (or continuously) using one power supply unit 11 and one scanner unit 16, a current supply unit, a switching unit, etc. Compared with a conventional substrate inspection apparatus that requires two each, the number of power supply units 11 and scanner units 16 is small, and thus the measuring apparatus 1 can be configured easily. Therefore, according to the measurement apparatus 1 and the measurement method, the apparatus price can be sufficiently reduced while realizing efficient measurement and inspection.

  In addition, this invention is not limited to said structure and method. For example, the measurement apparatus 1 that performs inspection on a plurality of wiring patterns and a plurality of elements 101 disposed on one surface of the circuit board 100 has been described as an example. However, as illustrated in FIG. A method of measuring the resistance value R of each wiring pattern 201 and each via 202 in the circuit board 200 in which the pattern 201 is disposed and each wiring pattern 201 is connected by a via 202 (internal wiring in the present invention). It is also possible to apply to the measuring device 301 that performs these quality checks based on the resistance value R. In addition, in the following description, the same code | symbol is attached | subjected about the same component as the above-mentioned measuring apparatus 1, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 2, the measuring apparatus 301 includes two probe units 302 a and 302 b (terminal portions in the present invention) and a main body portion 3. In this case, when the probe unit 302a is brought close to the circuit board 200 by a moving mechanism (not shown), the tip portion comes into contact with each wiring pattern 201 on the one surface (upper surface in the drawing) side of the circuit board 200. The plurality of probes 21 whose arrangement pattern is defined (only two probes 21a and 21c are shown in the figure) are provided. Also, the probe unit 302b has an arrangement pattern such that when the probe unit 302b is brought close to the circuit board 200, the tip portion comes into contact with each wiring pattern 201 on the other surface (the lower surface in the figure) of the circuit board 200. A plurality of defined probes 21 (only two probes 21b and 21d are shown in the figure) are provided. That is, in this measuring apparatus 301, the probe units 302a and 302b are configured so that each probe 21 can come into contact with the wiring pattern 201 as a contacted portion disposed on both surfaces of the circuit board 200. In the measuring apparatus 301, the wires between the probes 21 of the probe unit 302a and the scanner unit 16 are bundled, and the wires between the probes 21 of the probe unit 302b and the scanner unit 16 are bundled.

  In this measuring apparatus 301, when a measurement start instruction operation is performed, the control unit 17 controls a moving mechanism (not shown) to bring the probe units 302a and 302b close to the circuit board 200, as shown in FIG. In addition, the tip of each contact terminal 31 in each probe 21 is brought into contact with each wiring pattern 201 on the circuit board 200. Subsequently, the control unit 17 controls the scanner unit 16 (by executing the connection process described above), and as shown in the figure, each via 202 as a measurement object is connected to the probes 21b and 21d. The first contact terminals 31a and the third conductive wires 15a are connected in series.

  Next, as shown in FIG. 2, the control unit 17 controls the scanner unit 16 so that the two probes 21 a and 21 c that are in contact with the wiring patterns 201 positioned at both ends of each of the vias 202 connected in series are connected. The first contact terminal 31a and the first conductive wires 13a and 13b in each are connected. As a result, as indicated by a broken line in the figure, the current Im supplied by the first conductors 13a and 13b is output to each via 202 connected in series via each first contact terminal 31a and the third conductor 15a. (Flowing).

  Subsequently, the control unit 17 controls the scanner unit 16 so that the second contact terminal 31b in each probe 21 in contact with each wiring pattern 201 connected to each via 202 is connected to the second conductor 14. Connect to each. Next, each voltage detection unit 12 (in this example, voltage detection units 12a and 12b: see FIG. 2) inputs and detects the voltage Vm generated in each via 202 by the output of the current Im, and the control unit 17 Based on the value of the current Im and the value of the detected voltage Vm, the resistance value R of each via 202 is measured at once (or continuously) and recorded in a recording unit (not shown). Next, the control unit 17 inspects the quality of each via 202 by, for example, comparing the reference range defined by the upper and lower limit values with the resistance value R.

  As described above, also in this measuring apparatus 301 and the measuring method, each via 202 and each of the vias 202 and each of the vias 202 connected in series using the single scanner unit 16 are caused to flow through the current Im generated by one power supply unit 11. The resistance value R of the wiring pattern 201 can be measured at once (or continuously). For this reason, compared with the conventional board | substrate inspection apparatus which requires two electric current supply parts, a switching part, etc., the measurement apparatus 301 can be comprised simply by the number of the power supply parts 11 and the scanner units 16 being small. it can. Therefore, also in this measuring apparatus 301, the apparatus price can be sufficiently reduced while realizing efficient measurement and inspection. In the measuring apparatus 301, the wires between the probes 21 of the probe unit 302a and the scanner unit 16 are bundled, and the wires between the probes 21 of the probe unit 302b and the scanner unit 16 are bundled. . For this reason, according to this measuring apparatus 301, the influence of noise generated when the wiring between each probe 21 and the scanner unit 16 forms a loop can be suppressed to a low level. As a result, the resistance value R can be measured more accurately. can do.

  Further, the example in which the quality of the element 101 or the via 202 is inspected based on the resistance value R of the element 101 or the via 202 has been described above, but the present invention is applied to a measuring apparatus that only measures the resistance value R without performing the inspection. You can also. Further, the example of measuring the resistance value R as a physical quantity has been described above. However, the physical quantity in the present invention is not limited to the resistance value R, and includes an inductance, a capacity, an impedance, and the like, and a measuring device that measures these physical quantities. Of course, it can be applied to. Further, the configuration example in which the probe unit 2 having the plurality of probes 21 and the probe units 302a and 302b are moved so that each probe 21 is brought into contact with the terminal 111 and the wiring pattern 201 as the contacted portion at a time has been described above. It is also possible to apply to a flying probe type measuring apparatus that individually moves the probe 21 to contact and separate from the contacted part. Furthermore, although the example provided with a pair of 3rd conducting wire 15 was mentioned above, the number of the 3rd conducting wires 15 is not limited to this, It can change according to the number of measuring objects. Specifically, when the number of measurement objects to be brought into contact with the probe 21 is N, the number of the third conductive wires 15 is defined as an arbitrary number of (N−1) or more. Moreover, although it described above about the example provided with the three voltage detection parts 12a-12c, the number of the voltage detection parts 12 is not limited to this, It can prescribe | regulate in two or more arbitrary numbers.

1 is a configuration diagram showing a configuration of a measuring device 1. FIG. 2 is a configuration diagram showing a configuration of a measuring apparatus 301. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,301 Measuring apparatus 2,302a, 302b Probe unit 12a-12c Voltage detection part 13a, 13b 1st conducting wire 14a-14f 2nd conducting wire 15a, 15b 3rd conducting wire 16 Scanner unit 17 Control part 21a-21f Probe 31a 1st contact Terminal 31b Second contact terminal 100,200 Circuit board 101a-101c Element 111a-111f Terminal 201 Wiring pattern 202 Via 301 Measuring device Im Current R Resistance value Vm Voltage

Claims (5)

A power supply unit for generating a measuring current, for inputting a voltage generated in the driven element by the output of the first contact terminals and the current for measurement for outputting the current for measurement in the contacted portion of the measured object A terminal portion having a plurality of contact terminal pairs each having a pair of second contact terminals, a pair of first conductors connected to the power supply portion to supply the measurement current, and a plurality of voltage detections for detecting the voltage And a pair of second conductors connected to each of the voltage detectors, and each of the first conductors and each of the second conductors provided separately from each other to pass the current for measurement. One or more third conductors, a connection part for connecting and disconnecting each contact terminal and each conductor, a control part for controlling the connection part, and the voltage based on the voltage value. Bei example a measuring unit for measuring a predetermined physical quantity of the measurement object,
The control unit controls the connection / disconnection unit, and in a state where the contact terminal pairs are in contact with the contacted parts of the plurality of measurement objects, a predetermined one of the contact terminal pairs. The plurality of measurement objects are connected in series by connecting each of the first contact terminals and the third conductor in each of the contact terminal pairs except the two, and the series connection is made. Connecting each of the first contact terminals and each of the first conductors in each of the two contact terminal pairs that are in contact with the contacted parts located at both ends of each measurement object; And each said 2nd contact terminal and each said 2nd conductor in each of the said contact terminal pair which is contacting each said to-be-contacted part of these measurement object are each said measurement object and each said voltage detection Part Run the connection process of connecting each to correspond to one-to-one,
Each measurement object is in contact with each second contact terminal connected to each voltage detection unit via each second conductor after the connection process is performed. A measuring device for measuring the predetermined physical quantity of the body. The terminal portions are connected by internal wiring formed inside the circuit board, and each contact terminal pair is connected to each wiring pattern as the contacted portion formed on one side and the other side of the circuit board. Each configured to be contactable,
The measurement apparatus according to claim 1, wherein the control unit controls the connection / disconnection unit so that the internal wiring as the measurement object and the wiring patterns are connected in series in the connection process.   The wires formed between the contact terminal pairs to be brought into contact with the wiring pattern formed on the one surface side of the circuit board and the connection portion are bundled, and the wiring formed on the other surface side of the circuit substrate. The measuring device according to claim 2, wherein wiring between each contact terminal pair brought into contact with a pattern and the connection / disconnection part is bundled. A pair supplies connected to the measurement current to the power supply unit for generating the current for measurement from the first contact terminal of the terminal section having a plurality of contact terminals pair of a pair of the first contact terminal and the second contact terminal No. A second conductor connected to each of a plurality of voltage detectors by connecting to and disconnecting from one conductor, outputting a measurement current to the contacted portion of the measurement object via the first contact terminal, and when the said detecting a voltage generated at the contacted portion by the output of the current for measurement performed disconnection between the contact terminals, measuring a predetermined physical quantity for said measured object based on the value of the detected voltage In addition,
The contact terminal pairs are brought into contact with the contacted parts of the plurality of measurement objects, respectively, and each of the contact terminal pairs in each of the contact terminal pairs excluding a predetermined two of the contact terminal pairs in the state is used. A plurality of measurement objects are provided by connecting one contact terminal and a third conductor that is provided separately from each of the first conductors and the second conductors and that allows the measurement current to flow therethrough. The first contact terminals in each of the two removed contact terminal pairs that are connected in series, and are in contact with the contacted parts located at both ends of the measurement target bodies connected in series, respectively. Each of the second contact terminals and each of the second conductors in each of the contact terminal pairs connected to each of the first conductors and in contact with the contacted parts of the plurality of measurement objects. And Run the connection processing each measured object and said each voltage detecting section is connected so as to correspond one-to-one,
After executing the connection process, the predetermined object for each measurement object in contact with each second contact terminal connected to each voltage detection unit via each second conductor. A measurement method that measures physical quantities. The contact terminal pairs are connected to each wiring pattern as the contacted part formed on the one side and the other side of the circuit board and connected by internal wiring formed inside the circuit board, When measuring the physical quantity for the internal wiring and the wiring patterns as the measurement object,
The measurement method according to claim 4, wherein, in the connection process, the first contact terminals and the third conductor are connected so that the internal wiring and the wiring patterns are connected in series.

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