JP5281493B2 - Seal member and microwave heating furnace - Google Patents

Description

  The present invention relates to a sealing member and a microwave heating furnace that suppress leakage of microwaves and gases.

  For example, as disclosed in Patent Document 1, various members such as a heater, a thermocouple, a roller, and a stirrer are inserted from the outside into the heating chamber of the microwave heating furnace. For this reason, there exists a possibility that a microwave may leak outside from a heating chamber through the circumference | surroundings of each insertion member.

JP 2008-282628 A

  Therefore, a seal member is disposed around each insertion member in order to suppress microwave leakage. Patent Document 1 discloses a sealing member that suppresses leakage of microwaves from an electric heater. The sealing member of Patent Document 1 seals the gap between the heater and the heater insertion hole formed in the housing of the microwave heating furnace. Both the heater and the housing are non-moving bodies.

  On the other hand, the stirrer is always rotating in order to diffuse the microwave into the heating chamber. That is, a gap between the rotation shaft of the stirrer and the rotation shaft insertion hole formed in the housing is defined between the rotating body and the non-moving body. For this reason, it is difficult to divert the seal member of Patent Document 1 to suppress leakage of microwaves from the gap between the rotation shaft and the rotation shaft insertion hole.

  In addition, the rotation shaft of the stirrer is thermally expanded by heat transfer from the heating chamber. In particular, the amount of expansion in the axial direction of the rotating shaft is large. For this reason, when arrange | positioning a sealing member, it is necessary to consider the amount of thermal expansion of the axial direction of a rotating shaft.

  Further, depending on the type and use of the object to be processed, the heating chamber may be set to a predetermined gas (for example, inert gas) atmosphere and the object to be processed may be irradiated with microwaves. In this case, it is necessary to suppress not only microwave leakage but also gas leakage.

  The sealing member and microwave heating furnace of the present invention have been completed in view of the above problems. An object of the present invention is to provide a sealing member and a microwave heating furnace capable of suppressing leakage of microwaves and gas from the periphery of a rotating shaft member while allowing axial deformation of the shaft member. .

  (1) In order to solve the above-described problem, the seal member of the present invention includes a gap between an insertion hole that penetrates a wall member made of a conductor and a shaft member that is rotatably inserted into the insertion hole about an axis. A sealing member that suppresses leakage of microwaves and gas from the shaft, the shaft member being inserted into the insertion hole, projecting radially outward from the shaft body, and against the insertion hole A flange portion that is offset in the axial direction, and is made of a conductor, interposed between the wall member and the flange portion, and fixed around the insertion hole on the surface of the wall member An annular holder that is made of a conductor and is disposed on the inner peripheral surface of the holder and is in sliding contact with the shaft body in the radial direction, and is made of a conductor and includes the flange. An annular second microwave seal portion that is in sliding contact with the portion in the axial direction; An annular gas seal portion disposed on the surface and in sliding contact with the shaft main body in the radial direction, and when the shaft member is thermally deformed, the second microwave seal portion and the flange portion are in sliding contact with each other The shaft main body is deformed in the axial direction with respect to the first microwave seal portion and the gas seal portion, so that the microwave from the gap is allowed while allowing at least the axial deformation of the shaft member. And gas leakage is suppressed (corresponding to claim 1).

  Here, “annular” is a concept including “cylindrical”. Further, “thermal deformation” refers to at least one of thermal expansion and thermal contraction.

  According to the seal member of the present invention, the first microwave seal portion, the gas seal portion, and the second microwave seal portion are in sliding contact with the shaft member. For this reason, gas leakage can be suppressed by the gas seal portion while allowing rotation of the shaft member. In addition, leakage of microwaves can be suppressed by the first microwave seal portion and the second microwave seal portion while allowing rotation of the shaft member.

  Moreover, according to the sealing member of the present invention, two microwave seal portions (a first microwave seal portion and a second microwave seal portion) are arranged. For this reason, the leakage of the microwave can be more reliably suppressed.

  Further, according to the seal member of the present invention, the holder is disposed so as to surround the insertion hole. The holder is made of a conductor. For this reason, the leakage of the microwave from the radial direction outer side of a 1st microwave seal part can be suppressed.

  Further, according to the sealing member of the present invention, the first microwave sealing portion and the gas sealing portion and the shaft body are in sliding contact with each other in the radial direction. In other words, the inner peripheral surfaces of the first microwave seal portion and the gas seal portion are in sliding contact with the outer peripheral surface of the shaft main body. On the other hand, the second microwave seal portion and the flange portion are in sliding contact with each other in the axial direction. In other words, the axial end surface of the second microwave seal portion and the axial end surface of the flange portion are in sliding contact.

  When the shaft member is thermally deformed, it is the axial direction that has a large deformation amount in the radial direction and the axial direction. In this regard, according to the seal member of the present invention, the shaft member is disposed on the radially inner side of the first microwave seal portion and the gas seal portion while ensuring that the second microwave seal portion and the flange portion are in sliding contact. Can expand and contract in the axial direction. That is, the shaft member can be thermally deformed in the axial direction while the first microwave seal portion, the second microwave seal portion, and the gas seal portion are in sliding contact with the shaft member. For this reason, leakage of microwaves and gas can be suppressed while allowing thermal deformation in the axial direction of the shaft member.

  Further, according to the seal member of the present invention, the holder is disposed so as to surround the insertion hole. A first microwave seal portion and a gas seal portion are disposed on the inner peripheral surface of the holder. For this reason, leakage of microwaves and gas can be suppressed regardless of the size of the gap between the insertion hole and the shaft member. Therefore, when setting the size of the gap between the insertion hole and the shaft member, it is not necessary to consider excessively microwave and gas leakage and thermal deformation in the radial direction of the shaft member. Therefore, it is not necessary to excessively improve the surface accuracy of the outer peripheral surface of the shaft member and the inner peripheral surface of the insertion hole. Moreover, the manufacturing cost of a shaft member or a wall member can be reduced.

  (1-1) Preferably, in the configuration of (1), the wall member, the first microwave seal portion, and the second microwave seal portion are electrically connected, and the first microwave seal The part and the second microwave seal part are preferably configured to be electrically grounded via the wall member. According to this configuration, the passage of microwaves can be suppressed by the conductor wall member, the first microwave seal portion, and the second microwave seal portion.

  (1-2) Preferably, in the configuration of (1) above, the gas seal portion is preferably an oil seal. According to this configuration, the sliding resistance of the gas seal portion with respect to the shaft member is reduced. Further, gas leakage can be suppressed more reliably.

  (2) Preferably, in the configuration of the above (1), a bracket made of a conductor, interposed between the holder and the second microwave seal portion, and fixed to the holder is provided. The second microwave seal portion is preferably fixed to the bracket (corresponding to claim 2).

  According to this configuration, the bracket is made of a conductor. For this reason, leakage of microwaves can be suppressed between the first microwave seal portion and the second microwave seal portion. In addition, the second microwave seal portion and the wall member can be electrically connected by a conduction path that passes through the bracket and the holder.

  (3) Preferably, in the configuration of the above (1) or (2), the shaft member extends in a vertical direction, and the flange portion is disposed to be shifted upward with respect to the insertion hole. It is better that the lower surface of the portion is in sliding contact with the upper surface of the second microwave seal portion using gravity (corresponding to claim 3).

  According to this configuration, the shaft member is rotated in a state where the flange portion is hooked on the second microwave seal portion from above. Moreover, at least a part of the weight of the flange portion is added to the second microwave seal portion. For this reason, it is difficult for the flange portion to be separated from the second microwave seal portion. Accordingly, a gap is hardly generated between the flange portion and the second microwave seal portion.

  (4) Preferably, in any one of the configurations (1) to (3), the thermal deformation in the radial direction of the shaft body is allowed between the second microwave seal portion and the shaft body. A possible gap is defined, and the first microwave seal portion and the gas seal portion are preferably configured to elastically deform so as to allow the thermal deformation in the radial direction of the shaft body. 4).

  According to this configuration, the shaft member can be thermally deformed in the radial direction while the first microwave seal portion, the second microwave seal portion, and the gas seal portion are in sliding contact with the shaft member. For this reason, leakage of microwaves and gas can be suppressed while allowing thermal deformation of the shaft member in the radial direction.

  (5) Further, in order to solve the above problems, a microwave heating furnace of the present invention includes a furnace shell, a heating chamber which is partitioned inside the furnace shell and heats an object to be heated using the microwave, A housing having a rotation shaft insertion hole penetrating the furnace shell, a rotation shaft, and a stirrer having a fan that is disposed at one axial end of the rotation shaft and diffuses the microwave in the heating chamber. A microwave heating furnace comprising the sealing member according to any one of (1) to (4), wherein the wall member is the furnace shell, and the insertion hole is the rotation shaft insertion hole. The shaft member is the rotating shaft (corresponding to claim 5).

  According to the microwave heating furnace of the present invention, leakage of microwaves and gas from around the rotation axis of the stirrer can be suppressed. That is, leakage of microwaves and gas from the gap between the rotating shaft insertion hole that is a non-moving body and the rotating shaft that is a rotating body can be suppressed by the seal member. Further, leakage of microwaves and gas can be suppressed while allowing thermal deformation in the axial direction of the rotation shaft of the stirrer.

  According to the seal member and the microwave heating furnace of the present invention, it is possible to suppress leakage of microwaves and gas from the periphery of the rotating shaft member while allowing axial deformation of the shaft member.

It is a perspective view of a part of longitudinal direction of the microwave heating furnace which is one embodiment of the present invention. It is the II-II direction sectional drawing of FIG. It is a perspective view of applicator upper wall vicinity of the microwave heating furnace. It is a disassembled perspective view of applicator upper wall vicinity of the microwave heating furnace. It is an enlarged view of applicator upper wall vicinity of FIG. FIG. 6 is an enlarged view in a frame VI of FIG. 5.

  Hereinafter, embodiments of the microwave heating furnace of the present invention will be described. In addition, the following description serves as description of the sealing member of this invention.

<Configuration of microwave heating furnace>
First, the structure of the microwave heating furnace of this embodiment is demonstrated. In FIG. 1, the perspective view of the longitudinal direction (left-right direction) part of the microwave heating furnace of this embodiment is shown. FIG. 2 shows a cross-sectional view in the II-II direction of FIG.

  As shown in FIGS. 1 and 2, the microwave heating furnace 1 is a roller hearth type heating furnace. The microwave heating furnace 1 includes a housing 2, a roller 3, a seal member 4, an electric heater 5, a microwave generator 6, a stirrer 7, and a stirrer driving unit 8. The left side of the microwave heating furnace 1 corresponds to the upstream side (loading side). Further, the right side of the microwave heating furnace 1 corresponds to the downstream side (unloading side).

[Housing 2]
The housing 2 includes a housing body 20, a heating chamber 21, a driving side case 29a, and a driven side case 29b.

  The housing body 20 includes an outer wall 200, a heat insulating material 201, and an applicator 209. Among these, the outer wall 200 and the applicator 209 are included in the furnace shell of the present invention. The outer wall 200 is made of stainless steel (made of SUS), and has a thin rectangular tube shape. The outer wall 200 extends in the left-right direction. The outer wall 200 is electrically grounded. The heat insulating material 201 is made of ceramic fiber or refractory brick, and has a thick square tube shape. The heat insulating material 201 is disposed inside the outer wall 200.

  The housing body 20 is provided with a roller insertion hole 202, an applicator mounting hole 203, a heater insertion hole 204, a gas inflow hole 205, and a gas outflow hole 206. A plurality of these holes are arranged at predetermined intervals in the left-right direction (longitudinal direction of the microwave heating furnace 1). Further, these holes communicate a heating chamber 21 described later and the outside of the heating chamber 21.

  A large number of roller insertion holes 202 are arranged on the front wall and the rear wall of the housing body 20. A large number of roller insertion holes 202 on the front wall and a large number of roller insertion holes 202 on the rear wall face each other in the front-rear direction.

  Many heater insertion holes 204 are arranged on the front wall and the rear wall of the housing body 20. A large number of heater insertion holes 204 in the front wall are arranged in two upper and lower stages with a large number of roller insertion holes 202 in the front wall interposed therebetween. A large number of heater insertion holes 204 in the rear wall are arranged in two upper and lower stages with a large number of roller insertion holes 202 in the rear wall interposed therebetween. A number of heater insertion holes 204 on the front wall and a number of heater insertion holes 204 on the rear wall face each other in the front-rear direction.

  A predetermined number of gas inflow holes 205 are arranged on the front wall of the housing body 20. A gas inflow pipe 90 is connected to the gas inflow hole 205. A predetermined number of gas outflow holes 206 are arranged on the front wall of the housing body 20. A gas outflow pipe 91 is connected to the gas outflow hole 206. The gas inflow hole 205 and the gas outflow hole 206 are arranged to face each other in the vertical direction with the roller insertion hole 202 on the rear wall interposed therebetween. A predetermined number of applicator mounting holes 203 are arranged on the upper wall of the housing body 20.

  The applicator 209 is made of SUS and has a bottomed rectangular tube shape. The applicator 209 opens downward. The applicator 209 is installed in the applicator mounting hole 203. The applicator 209 includes a waveguide attachment hole 209a and a rotation shaft insertion hole 209b. The waveguide attachment hole 209a is disposed on the front wall of the applicator 209. The rotation shaft insertion hole 209b is disposed on the upper wall of the applicator 209.

  The heating chamber 21 is partitioned inside the heat insulating material 201. That is, the heating chamber 21 is surrounded by two layers from the outside by the heat insulating material 201 and the outer wall 200.

  The drive side case 29a is made of SUS and has a box shape opening forward. The drive side case 29a is laid on the rear wall of the housing body 20. The drive-side case 29a blocks the rear end of the electric heater 5 and the rear end of the roller 3 from the outside.

  The driven side case 29b is made of SUS and has a box shape opening rearward. The driven case 29 b is laid on the front wall of the housing body 20. The driven case 29b blocks the front end of the electric heater 5 and the front end of the roller 3 from the outside.

[Electric heater 5]
The electric heater 5 supplies heat to the heating chamber 21. The electric heater 5 is made of silicon carbide (SiC) and has a cylindrical shape. The electric heater 5 extends in the front-rear direction. A large number of electric heaters 5 are arranged in the heating chamber 21 side by side in the left-right direction. A large number of electric heaters 5 are arranged in two upper and lower stages with a roller 3 described later interposed therebetween. Both ends of the electric heater 5 in the front-rear direction protrude from the heating chamber 21 to the outside of the housing body 20 via the heater insertion holes 204, respectively.

[Microwave generator 6]
The microwave generator 6 supplies the microwave M to the heating chamber 21. The microwave generator 6 includes a magnetron 60 and a waveguide 61. The magnetron 60 is disposed in front of the applicator 209. The magnetron 60 generates a microwave M of 2.45 GHz.

  The waveguide 61 communicates the magnetron 60 and the inside of the applicator 209. That is, one end of the waveguide 61 is connected to the magnetron 60. On the other hand, the other end of the waveguide 61 is connected to the waveguide mounting hole 209a.

[Roller 3]
The roller 3 is made of SiC and has a cylindrical shape. The roller 3 extends in the front-rear direction. A large number of rollers 3 are arranged in the heating chamber 21 along the left-right direction. The front end of the roller 3 protrudes from the heating chamber 21 to the outside of the housing body 20 through the roller insertion hole 202. The rear end of the roller 3 protrudes from the heating chamber 21 to the outside of the housing body 20 through the roller insertion hole 202. The roller 3 is supported so as to be rotatable about an axis by a driving force of a motor (not shown).

  The article to be heated W is conveyed from the left side to the right side by the rotating roller 3 as shown by the white arrow in FIG. During conveyance, the article to be heated W is heated by the microwave M and the electric heater 5 in a predetermined temperature pattern. When the article to be heated W is heated, a predetermined gas G atmosphere is formed in the heating chamber 21. The gas G flows from the gas inflow pipe 90 into the heating chamber 21 through the gas inflow hole 205. The gas G flows out from the heating chamber 21 to the gas outflow pipe 91 through the gas outflow hole 206.

[Stirrer 7]
In FIG. 3, the perspective view of applicator upper wall vicinity of the microwave heating furnace of this embodiment is shown. FIG. 4 shows an exploded perspective view of the microwave heating furnace near the upper wall of the applicator. FIG. 5 shows an enlarged view near the upper wall of the applicator in FIG.

  As shown in FIGS. 3 to 5, the stirrer 7 includes a rotation shaft 70 and a fan 71. The rotating shaft 70 is made of SUS and includes a shaft main body 701 and a flange portion 700. The shaft body 701 has a round bar shape. The shaft body 701 extends in the vertical direction. A flange portion 700 is integrally formed near the upper end of the shaft body 701. The fan 71 is made of SUS and includes a fan boss 710 and four blades 711. The fan boss 710 has a cylindrical shape. The fan boss 710 is fixed to the lower end of the rotating shaft 70. The four blades 711 are arranged on the outer peripheral surface of the fan boss 710 so as to be separated from each other by approximately 90 ° in the circumferential direction.

[Stirrer drive unit 8]
The stirrer drive unit 8 includes a motor 80, a gear box 81, a flexible coupling 82, and a second bracket 84. The second bracket 84 is made of aluminum and has an L-shaped plate shape as viewed from the rear. The second bracket 84 is fixed to a standing wall of the first bracket 45 described later via four bolts 840.

  The gear box 81 is fixed to the upper surface of the bottom wall of the second bracket 84. The motor 80 is fixed to the upper surface of the gear box 81. The flexible coupling 82 is disposed below the second bracket 84. The flexible coupling 82 connects a rotating shaft (not shown) protruding downward from the gear box 81 and a rotating shaft 70 of the stirrer 7 so as to be tiltable.

  The driving force of the motor 80 is transmitted to the rotating shaft 70 of the stirrer 7 via the driving shaft (not shown) of the motor 80, the gear (not shown) of the gear box 81, and the rotating shaft protruding from the gear box 81. With this driving force, the four blades 711 of the stirrer 7 rotate around the axis of the rotation shaft 70.

[Seal member 4]
As shown in FIG. 5, the seal member 4 is disposed on the upper surface of the upper wall of the applicator 209. The seal member 4 covers the rotary shaft insertion hole 209b from above. Further, the seal member 4 is in sliding contact with the rotating shaft 70. FIG. 6 shows an enlarged view in the frame VI of FIG. As shown in FIGS. 3 to 6, the seal member 4 includes a first microwave seal portion 40, a second microwave seal portion 41, an oil seal 42, a holder 43, a support 44, and a first bracket 45. And. The oil seal 42 is included in the gas seal portion of the present invention. The first bracket 45 is included in the bracket of the present invention.

  The holder 43 is made of SUS and has a cylindrical shape. The holder 43 closes the rotary shaft insertion hole 209b from above. The holder 43 is fixed to the upper wall of the applicator 209 by all-around welding. As shown in FIG. 6, a small diameter portion 430 and a large diameter portion 431 are formed on the inner peripheral surface of the holder 43. The large diameter portion 431 is continuous above the small diameter portion 430.

  The first microwave seal part 40 is made of Oiles Glitron SE (manufacturer: Oiles Kogyo Co., Ltd., “Glytron” is a registered trademark of the company), and has a cylindrical shape. The first microwave seal portion 40 is accommodated in the small diameter portion 430 of the holder 43. The inner peripheral surface of the first microwave seal portion 40 is in sliding contact with the outer peripheral surface of the shaft main body 701.

  The oil seal 42 is made of a tetrafluoroethylene resin and has a cylindrical shape. The oil seal 42 is accommodated in the large diameter portion 431 of the holder 43. The inner peripheral surface of the oil seal 42 is in sliding contact with the outer peripheral surface of the shaft main body 701.

  The support 44 is made of SUS and has a ring shape. The support 44 is fixed to the lower surface of the holder 43. The support 44 holds the first microwave seal portion 40 from below.

  The first bracket 45 is made of SUS and has an L-shaped plate shape as viewed from the rear. A through hole 450 is formed in the bottom wall of the first bracket 45. The bottom wall of the first bracket 45 is fixed to the upper surface of the holder 43 via four screws 451.

  The second microwave seal portion 41 is made of copper and has a ring shape. The second microwave seal portion 41 is interposed between the bottom wall of the first bracket 45 and the flange portion 700 of the rotating shaft 70. The upper surface of the second microwave seal portion 41 is in sliding contact with the lower surface of the flange portion 700 in a state where the weight of the flange portion 700 is added.

<Motion of seal member 4>
Next, the movement of the seal member 4 will be described. As shown in FIG. 2, the microwave M is supplied from the magnetron 60 to the inside of the applicator 209 via the waveguide 61. The supplied microwave M is diffused into the heating chamber 21 by being reflected by the four blades 711 of the stirrer 7.

  As indicated by the white arrow A1 in FIG. 6, the microwave tries to leak from the applicator 209 through a gap between the inner peripheral surface of the rotation shaft insertion hole 209b and the outer peripheral surface of the shaft main body 701. To do. However, the upper end of the rotary shaft insertion hole 209 b is sealed by the holder 43, the support 44, and the first microwave seal portion 40. For this reason, the microwave is reflected by the holder 43, the support 44, and the first microwave seal portion 40. Even if the microwave leaks above these members, the first bracket 45 and the second microwave seal portion 41 are disposed above these members. For this reason, the leaked microwave is reflected by the first bracket 45 and the second microwave seal portion 41.

  Similarly to the microwave, the gas in the heating chamber 21 also has a gap between the inner peripheral surface of the rotary shaft insertion hole 209b and the outer peripheral surface of the shaft main body 701, as indicated by a white arrow A1 in FIG. Through the applicator 209. However, the upper end of the rotary shaft insertion hole 209 b is sealed by the holder 43, the support 44, and the first microwave seal portion 40. An oil seal 42 is interposed between the first microwave seal portion 40 and the second microwave seal portion 41. For this reason, the leakage of gas is sealed.

<Effect>
Next, the effect of the microwave heating furnace 1 of this embodiment is demonstrated. The microwave heating furnace 1 of this embodiment includes a seal member 4. The first microwave seal portion 40, the oil seal 42, and the second microwave seal portion 41 are in sliding contact with the rotating shaft 70. For this reason, leakage of the gas G can be suppressed by the oil seal 42 while allowing the rotation of the rotating shaft 70. In addition, the leakage of the microwave M can be suppressed by the first microwave sealing portion 40 and the second microwave sealing portion 41 while allowing the rotation of the rotating shaft 70.

  Moreover, according to the sealing member 4 of the microwave heating furnace 1 of the present embodiment, two microwave sealing portions (a first microwave sealing portion 40 and a second microwave sealing portion 41) are arranged. For this reason, the leakage of the microwave M can be suppressed more reliably.

  Further, according to the sealing member 4 of the microwave heating furnace 1 of the present embodiment, the holder 43 is disposed so as to surround the rotating shaft insertion hole 209b. The holder 43 is made of SUS. For this reason, the leakage of the microwave M from the radial direction outer side of the 1st microwave seal part 40 can be suppressed.

  Further, according to the seal member 4, the first microwave seal portion 40 and the oil seal 42 and the shaft main body 701 are in sliding contact with each other in the radial direction (horizontal direction). In other words, the inner peripheral surfaces of the first microwave seal portion 40 and the oil seal 42 and the outer peripheral surface of the shaft main body 701 are in sliding contact. On the other hand, the second microwave seal portion 41 and the flange portion 700 are in sliding contact with each other in the axial direction (vertical direction). In other words, the upper surface of the second microwave seal portion 41 and the lower surface of the flange portion 700 are in sliding contact. For this reason, when the rotating shaft 70 thermally expands in the axial direction (vertical direction), the rotating shaft 70 is connected to the first microwave while securing the state in which the second microwave seal portion 41 and the flange portion 700 are in sliding contact with each other. The radially inner side of the seal part 40 and the oil seal 42 can be extended downward. Further, when the rotary shaft 70 is thermally contracted in the axial direction, the rotary shaft 70 is connected to the first microwave seal portion 40 and the oil while ensuring that the second microwave seal portion 41 and the flange portion 700 are in sliding contact with each other. The radially inner side of the seal 42 can be contracted upward. That is, the rotary shaft 70 can be thermally deformed in the axial direction while the first microwave seal portion 40, the second microwave seal portion 41, and the oil seal 42 are in sliding contact with the rotary shaft 70. For this reason, leakage of the microwave M and the gas G can be suppressed while allowing thermal deformation in the axial direction of the rotating shaft 70.

  Moreover, according to the sealing member 4 of the microwave heating furnace 1 of this embodiment, between the outer peripheral surface of the shaft main body 701 and the inner peripheral surface of the second microwave seal portion 41, the outer peripheral surface of the shaft main body 701 and the through hole 450. A gap is defined between the inner peripheral surface of the shaft main body 701 and the outer peripheral surface of the shaft main body 701 and the inner peripheral surface of the support 44. In addition, the oil seal 42 and the first microwave seal portion 40 can be elastically deformed in the radial direction. For this reason, the rotary shaft 70 can be thermally deformed in the radial direction while the first microwave seal portion 40, the second microwave seal portion 41, and the oil seal 42 are in sliding contact with the rotary shaft 70. Thus, according to the sealing member, leakage of the microwave M and the gas G can be suppressed while allowing the thermal deformation of the rotating shaft 70 in the radial direction.

  Further, according to the sealing member 4 of the microwave heating furnace 1 of the present embodiment, the holder 43 is disposed so as to surround the rotating shaft insertion hole 209b. A first microwave seal portion 40 and an oil seal 42 are disposed on the inner peripheral surface of the holder 43. For this reason, the leakage of the microwave M and the gas G can be suppressed regardless of the size of the gap between the rotation shaft insertion hole 209b and the shaft main body 701. Therefore, when setting the size of the gap between the rotation shaft insertion hole 209b and the shaft main body 701, it is not necessary to consider excessive leakage of the microwave M and gas G and thermal deformation of the rotation shaft 70. Therefore, it is not necessary to excessively improve the surface accuracy of the outer peripheral surface of the rotating shaft 70 and the inner peripheral surface of the rotating shaft insertion hole 209b. Moreover, the manufacturing cost of the rotating shaft 70 and the applicator 209 can be reduced.

  Moreover, according to the sealing member 4 of the microwave heating furnace 1 of the present embodiment, the first microwave sealing portion 40, the second microwave sealing portion 41, the holder 43, the first bracket 45, the applicator 209, Are electrically connected. The applicator 209 is electrically connected to the outer wall 200. The outer wall 200 is electrically grounded. Therefore, a so-called Faraday cage can be formed by the outer wall 200, the applicator 209, and the seal member 4.

  Moreover, according to the sealing member 4 of the microwave heating furnace 1 of this embodiment, the oil seal 42 is arrange | positioned as a gas seal part. For this reason, the sliding resistance of the oil seal 42 with respect to the rotating shaft 70 is reduced. Moreover, the leakage of the gas G can be suppressed more reliably.

  Moreover, the holder 43 is arrange | positioned at the sealing member 4 of the microwave heating furnace 1 of this embodiment. For this reason, the 1st microwave seal part 40 and the oil seal 42 can be correctly arrange | positioned in a predetermined position.

  Moreover, the SUS 1st bracket 45 is arrange | positioned at the sealing member 4 of the microwave heating furnace 1 of this embodiment. For this reason, leakage of the microwave M can be suppressed between the first microwave seal portion 40 and the second microwave seal portion 41.

  Moreover, according to the sealing member 4 of the microwave heating furnace 1 of this embodiment, the rotating shaft 70 is rotating in a state where the flange portion 700 is caught on the second microwave sealing portion 41 from above. Further, the second microwave seal portion 41 is subjected to the weight of the flange portion 700. For this reason, the flange portion 700 is unlikely to be separated from the second microwave seal portion 41. Therefore, a gap is hardly generated between the flange portion 700 and the second microwave seal portion 41.

<Others>
The embodiment of the microwave heating furnace of the present invention has been described above. However, the embodiment is not particularly limited to the above embodiment. Various modifications and improvements that can be made by those skilled in the art are also possible.

  For example, you may implement with the form which does not arrange | position the electric heater 5 in the microwave heating furnace 1. FIG. That is, the microwave heating furnace of the present invention may be embodied as the microwave heating furnace 1 using only the microwave M as a heat source.

  Moreover, the material of each member is not particularly limited. The outer wall 200, the applicator 209, the first microwave seal portion 40, the second microwave seal portion 41, the holder 43, and the first bracket 45 may be conductive. These members may be formed of, for example, aluminum, iron, or carbon.

  Further, the frequency of the microwave M emitted from the magnetron 60 may be 800 MHz to 30 GHz in addition to 2.45 GHz. Further, the type of gas G supplied to the heating chamber 21 is not particularly limited. For example, nitrogen gas, argon gas, carbon monoxide gas, or the like may be used.

  The seal member of the present invention may be disposed around the roller 3. If it carries out like this, leakage of the microwave M and the gas G from the circumference | surroundings of the roller 3 can be suppressed, allowing rotation of the roller 3. In addition to the microwave heating furnace 1, the sealing member of the present invention may be incorporated in various microwave processing apparatuses such as a microwave oven that perform processing on an object to be processed using microwaves.

  Moreover, the kind of gas seal part is not specifically limited. In addition to the oil seal 42, a mechanical seal, packing, O-ring, or the like may be used. Further, the material of the gas seal part is not particularly limited. Nitrile rubber, styrene rubber, silicone rubber, fluorine rubber, acrylic rubber, ethylene propyl rubber, butyl rubber, urethane rubber, chloroprene rubber, or the like may be used as at least part of the material.

  Moreover, the material of the 1st microwave seal part 40 and the 2nd microwave seal part 41 is not specifically limited. For example, it may be made of a conductive resin such as a resin containing a conductive filler (carbon filler, metal filler, etc.), a metal such as iron, copper, SUS, or carbon.

1: microwave heating furnace, 2: housing, 3: roller, 4: seal member, 5: electric heater, 6: microwave generator, 7: stirrer, 8: stirrer drive unit, 20: housing body, 21: heating Chamber, 29a: drive side case, 29b: driven side case, 40: first microwave seal part, 41: second microwave seal part, 42: oil seal (gas seal part), 43: holder, 44: support, 45: first bracket (bracket), 60: magnetron, 61: waveguide, 70: rotating shaft, 71: fan, 80: motor, 81: gear box, 82: flexible coupling, 84: second bracket, 90 : Gas inflow pipe, 91: gas outflow pipe, 200: outer wall, 201: heat insulating material, 202: roller insertion hole, 203: applicator mounting hole, 204: heater insertion 205: gas inflow hole, 206: gas outflow hole, 209: applicator, 209a: waveguide mounting hole, 209b: rotating shaft insertion hole, 430: small diameter part, 431: large diameter part, 450: through hole, 451 : Screw, 700: Flange, 701: Shaft body, 710: Fan boss, 711: Blade, 840: Bolt.
G: Gas, M: Microwave, W: Object to be heated.

Claims (5)

A seal member that suppresses leakage of microwaves and gas from a gap between an insertion hole that penetrates a wall member made of a conductor and a shaft member that is rotatably inserted around the insertion hole.
The shaft member includes a shaft main body that is inserted into the insertion hole, and a flange portion that protrudes radially outward from the shaft main body and is displaced in the axial direction with respect to the insertion hole,
An annular holder made of a conductor, interposed between the wall member and the flange portion, and fixed around the insertion hole on the surface of the wall member;
An annular first microwave seal portion made of a conductor, disposed on the inner peripheral surface of the holder, and in sliding contact with the shaft main body in a radial direction;
An annular second microwave seal portion made of a conductor and in sliding contact with the flange portion in the axial direction;
An annular gas seal portion disposed on the inner peripheral surface of the holder and in sliding contact with the shaft body in the radial direction;
With
When the shaft member is thermally deformed, the shaft main body is in an axial direction with respect to the first microwave seal portion and the gas seal portion in a state where the second microwave seal portion and the flange portion are in sliding contact with each other. A sealing member characterized by suppressing leakage of microwaves and gas from the gap while allowing at least the axial deformation of the shaft member by deformation. Furthermore, it is made of a conductor, interposed between the holder and the second microwave seal part, and has a bracket fixed to the holder,
The seal member according to claim 1, wherein the second microwave seal portion is fixed to the bracket. The shaft member extends in the vertical direction,
The flange portion is arranged to be shifted upward with respect to the insertion hole,
3. The seal member according to claim 1, wherein a lower surface of the flange portion is in sliding contact with an upper surface of the second microwave seal portion using gravity. Between the second microwave seal portion and the shaft main body, a gap that allows the thermal deformation in the radial direction of the shaft main body is defined,
The seal member according to any one of claims 1 to 3, wherein the first microwave seal portion and the gas seal portion are elastically deformed so as to allow the thermal deformation in a radial direction of the shaft main body. A housing having a furnace shell, a heating chamber that is partitioned inside the furnace shell and heats an object to be heated using the microwave, and a rotary shaft insertion hole that passes through the furnace shell;
A stirrer having a rotating shaft and a fan that is disposed at one axial end of the rotating shaft and diffuses the microwave in the heating chamber;
A microwave heating furnace comprising:
Furthermore, the seal member according to any one of claims 1 to 4 is provided,
The microwave heating furnace, wherein the wall member is the furnace shell, the insertion hole is the rotation shaft insertion hole, and the shaft member is the rotation shaft.

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