JP5283585B2 - Device for conveying plate-like object in surface treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus capable of carrying out a surface treatment while continuously transporting a plate like material to be treated in a horizontal state by precisely holding both side edge parts of the plate like material to be treated which have different width size from each other. <P>SOLUTION: A width interval controlling device for controlling the width interval W of each of transportation driving lines L1, L2 of a first transportation device 5A and a second transportation device 5B each provided with a transportation driving means 6 to which many holding chucks are attached and which is rotatively driven in an endless manner is provided. The width interval control apparatus is constituted so that the transportation drive line L1 of the first transportation device 5A is assumed to be a transportation reference line and the transportation driving line L3 of the second transportation device 5B is driven back and forth in a direction intersecting the transportation direction of the plate like material P to be treated with respect to the transportation reference line. Further the width interval control device is constituted so that a center line L3 is assumed to be a transportation reference line and each of transportation driving lines L1, L2 is driven back and forth in a direction intersecting the transportation of the plate like material P to be treated with respect to the transportation reference line L3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  In the present invention, a plate-like workpiece having parallel side edges is supplied to a surface treatment tank in a horizontal state with the plate surface up and down, and the surface treatment tank is continuously conveyed in the horizontal state to pass therethrough. The present invention relates to an apparatus for carrying out a surface treatment on an object to be processed, which is carried out from the surface treatment tank after the surface treatment, and more particularly to a transport apparatus suitable for surface-treating an object to be processed such as a thin plate or a flexible plate.

  As this type of processing apparatus, an electrolytic processing apparatus for a plate-like object disclosed in Patent Document 1 is known. In this electrolytic treatment apparatus, a plate-like object is supplied to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and is discharged again from the electrolysis chamber after the electrolysis treatment. A device for electrodeposition, a transport device for transporting a plate-like object through an electrolysis chamber, is driven to rotate endlessly, sandwiching the side edge of the plate-like object in the transport area and moving in the transport direction The device is configured as a row of individual clamps, and is provided with a device for causing clamping and opening of the plate-like object by the clamps at the start and end of the conveyance path of the plate-like object in the electrolytic chamber.

  FIG. 1 of this patent document 1 shows an apparatus for holding a plate-like object passing between both sides, and it is described that it is necessary when processing a very thin plate-like object. However, this document 1 does not disclose any other explanation about holding a plate-like object on both sides.

JP-A-63-76898

  In an apparatus for carrying out surface treatment while transporting a plate-shaped workpiece in a horizontal state, when the plate-shaped workpiece is a thin plate or a flexible plate, a device that sandwiches and conveys both side edges of the plate-shaped workpiece. is necessary. However, in the conventional surface treatment apparatus, there is no apparatus that accurately sandwiches and conveys both side edges of the plate-like workpieces in a horizontal state having different width sizes.

  In view of such a situation, even when the width of the plate-like workpiece to be surface-treated is different, the present invention accurately holds both side edges of the plate-like workpiece of different width width in a horizontal state. An object of the present invention is to provide an apparatus capable of surface treatment while continuously conveying.

  In order to solve the above-described problems, the present invention (invention of claim 1) is configured such that a plate-like workpiece having parallel side edges is supplied to a surface treatment tank in a horizontal state with the plate surface up and down. In an apparatus for performing a surface treatment on an object to be processed that is transported continuously through the treatment tank in the horizontal state and is unloaded from the surface treatment tank after the surface treatment, the object to be processed is passed over the passage section of the surface treatment tank. The transport device for transporting in a horizontal state is composed of a first transport device and a second transport device provided on both sides of the surface treatment tank with the transport path of the object to be processed. A plurality of clamping chucks are mounted, and each of the clamping chucks is provided with a conveyance driving means having a linear conveyance driving unit along the conveyance path, which is rotationally driven endlessly. Clamping and opening in the vertical direction Each conveyance driving means is driven to rotate at a synchronized speed, and each conveyance drive line in each clamping part of the clamping chuck group in the linear conveyance driving section of each conveyance driving means is parallel to each other and The conveyance path has a width interval spaced apart, and the width interval of each conveyance drive line is configured as the width interval of the conveyance path of the workpiece in the surface treatment tank, and the conveyance in each conveyance device The both side edges of the workpiece are synchronously clamped by the clamping chuck group in the drive line, and the workpiece is moved in the transport direction over the passage section of the surface treatment tank. The second transfer device controls the holding chuck that passes through the starting end of the transfer path of the workpiece from the open state to the holding state, and changes the holding chuck that passes through the end portion of the transfer path of the workpiece from the holding state to the open state. control Each having a chuck opening / closing control means, and setting the transport drive line of the first transport device as a transport reference line, and moving the transport drive line of the second transport device closer to the transport reference line. The transport of each transport device configured so that the second transport device can be moved forward and backward in a direction orthogonal to the transport direction of the workpiece toward the first transport device so as to be disposed at a position or a position in a direction away from the first transport device. Provided is a transport device for a plate-like object to be processed in a surface treatment apparatus, which is provided with a width width adjusting device for adjusting a width width of a drive line.

  In the present invention, one side edge of a plate-like object to be processed having parallel side edges supplied to the surface treatment tank is used as a supply reference line, and the supply reference line and the conveyance drive line (conveyance reference) in the first conveyance device. Line), and the conveyance drive line (conveyance variable line) in the second conveyance device can be adjusted by the lateral width adjustment device according to the supply change line on the other side edge of the workpiece having different width sizes. It is.

  According to the present invention (invention of claim 2), as a lateral width adjusting device for adjusting the lateral width interval of the transport drive line of each transport device, the transport drive line at the center position of the lateral width interval of each transport drive line. A center line parallel to the transport reference line is set as a transport reference line, and each transport device is arranged so that each transport drive line is arranged at a position in the approaching direction or away from the transport reference line with an equal lateral width. Is provided so as to be moved forward and backward in a direction orthogonal to the conveyance direction of the workpiece toward the conveyance reference line.

  In this invention (invention of claim 2), the center position of the lateral width of the plate-like workpiece having parallel both side edges supplied to the surface treatment tank is used as a supply reference line, A conveyance reference line (a central line parallel to the conveyance drive line at the central position of the width interval of each conveyance drive line) is set together, and the supply reference line of the plate-like workpiece is set as the conveyance reference line of the conveyance device. Supply together. The conveyance drive line (conveyance variable line) in each conveyance device is adjusted by the horizontal width adjusting device in accordance with the supply change lines on both side edges of the workpieces having different width sizes.

  According to the apparatus of the present invention, even when the horizontal widths of the plate-like workpieces to be surface-treated are different, the both side edges of the plate-like workpieces having different width sizes are accurately sandwiched and continuously in a horizontal state. Surface treatment can be performed while transporting. The apparatus of the present invention is particularly effective when the plate-like object to be surface-treated is a thin plate or a flexible plate.

It is a schematic plan view which shows embodiment of this invention. It is a schematic plan view which shows embodiment of this invention. It is a schematic side view which shows embodiment of this invention. It is a schematic front view which shows embodiment of this invention. It is a schematic plan view which shows other embodiment of this invention. It is a schematic plan view which shows other embodiment of this invention. It is a schematic side view which shows other embodiment of this invention. It is a schematic front view which shows the Example of chuck | zipper opening / closing control.

  Embodiments of the present invention will be described with reference to the drawings. 1 to 4 show the first embodiment, and FIGS. 5 to 7 show the second embodiment. The description without particular limitation is common to the embodiments of FIGS. 1 to 4 and FIGS. 5 to 7.

  1 and 2 (FIGS. 5 and 6), the plate-like workpiece P is supplied to the surface treatment tank 1 from the left side in a horizontal state with the plate surface up and down, and the surface treatment tank 1 is in the horizontal state. The schematic plan view of the apparatus which performs the surface treatment to the to-be-processed object which is made to convey continuously in the direction of arrow A, and is carried out rightward from the surface treatment tank 1 after surface treatment is shown. In addition, as shown in FIG. 4, the carrying-in entrance 1a and the carrying-out exit 1b which carry in / out the plate-shaped to-be-processed object P of a horizontal state arrange | position the seal roller 1c inside the corresponding processing tank, and are sealed. . The plate-like workpiece P is required to have both side edges parallel to each other. However, in addition to the rectangular (printed circuit board or the like) shown in the figure, it may be a long strip having both side edges parallel to each other. . In the supply position on the left side of the drawing, several types of plate-like workpieces P having parallel side edges and different width sizes are shown. In this surface treatment tank, the plate-like workpiece is subjected to surface treatment such as plating or chemical treatment. The present invention can be widely applied as a transfer device for a surface treatment apparatus for a plate-like object to be processed, such as electrolytic treatment such as electroplating treatment or electroless treatment.

  A conveying device for conveying the plate-like object P in a horizontal state over the passage section 2 (section indicated by the arrow 2) of the surface treatment tank 1 is a conveyance path 3 for the object P in the surface treatment tank 1. It is comprised by the 1st conveying apparatus 5A and the 2nd conveying apparatus 5B which were provided in the both sides in between. Each of the conveying devices 5A and 5B has a plurality of clamping chucks 7... At an equal interval on a conveying driving means 6 having an inner linear driving portion 6a and an outer linear driving portion 6b that are driven to rotate endlessly.・ Attached and configured. The linear driving unit 6a on the inner side along the conveyance path 3 of the workpiece is configured as a linear conveyance driving unit (6a). The length in the conveyance direction of the linear conveyance drive unit 6a (inner linear drive unit 6a) in each conveyance drive unit 6 is configured to be slightly longer than the passage section 2. The conveyance driving means 6 that is rotationally driven by the endless is a toothed transmission belt 9 (may be a chain transmission belt) that is wound around a roller 8 and rotationally driven endlessly, and is provided in each of the conveyance devices 5A and 5B. One roller 8 (the right roller 8 shown in FIGS. 1 and 2) is driven to rotate by the conveying motors 10 and 10. The roller 8 is provided with teeth that match the toothed transmission belt 9.

  The transport driving units 6 and 6 of the first transport device 5A and the second transport device 5B are synchronously driven in the direction of arrow B at the same speed, and the linear transport drive unit 6a (inner linear drive unit in each transport drive unit). ) In each clamping portion of the clamping chuck group 7... (L1 represents the conveyance drive line of the first conveyance device 5A, and L2 represents the conveyance drive line of the second conveyance device 5B). Are parallel to each other, and the clamping chuck groups 7... Are rotationally driven at symmetrical positions with the conveyance path 3 therebetween. Each of the transport drive lines L1 and L2 has a lateral width W that is spaced apart with the transport passage 3 therebetween, and this lateral width W is defined as the lateral width of the transport path 3 of the workpiece P in the surface treatment tank 1. It is configured as. The holding chuck groups 7... On the transfer drive lines L 1, L 2 in the transfer devices 5 A, 5 B hold both side edges of the workpiece P at the same time, and cover the passage section 2 of the surface treatment tank 1. The workpiece is configured to move in the transport direction. The conveyance speed of the object to be processed by the conveying device is 0.5 m to 2 m per minute, and is variable depending on the surface treatment conditions of the object P to be processed.

  In the case of a rectangular plate-shaped workpiece P, the clamping chuck group 7... Attached at an equal interval to the conveyance driving means 6 that is rotationally driven by the endless is an interval that can clamp at least a plurality of side edges. It is installed. In FIGS. 1 and 2 (also FIGS. 5 and 6), the clamping chuck groups 7... Are shown only in a part of the range of the rotational drive path indicated by the alternate long and short dash line. It is attached at equal intervals over the range.

  As shown in FIG. 3 (FIG. 7), the first transfer device 5A and the second transfer device 5B are guided to move the clamping chuck groups 7... In the inner and outer linear drive units 6a and 6b. Each chuck guide rail 12 is provided in a fixed state. The length of the chuck guide rail 12 in the transport direction is configured to be slightly longer than the passage section 2 of the surface treatment tank 1. When the present invention is used as an electrolytic processing apparatus such as an electroplating processing apparatus, the chuck guide for guiding the movement of the clamping chuck groups 7... In the inner linear drive unit 6a (the linear conveyance drive unit 6a). The rail 12 is caused to function as a power supply rail that supplies a cathode current to a workpiece to be conveyed via the clamping chuck 7.

  The first transfer device 5A and the second transfer device 5B hold the holding chucks 7 ... passing through the starting end 2a of the transfer path 3 (passage section 2 of the surface treatment tank) for the workpiece P from the open state. The chuck opening / closing control means for controlling the holding chuck 7... Passing through the terminal end 2b of the transfer path 3 (passage section 2 of the surface treatment tank) of the workpiece P from the holding state to the open state. I have.

  As shown in FIG. 3 (FIG. 7) showing a schematic configuration and FIG. 8 showing a preferred embodiment, the clamping chuck 7 clamps and opens the side edges of the horizontal plate-like workpiece in the vertical direction. And holding the side edge of the plate-like workpiece in a horizontal state under the spring pressure of the compression spring 17 (the fixed clamping portion 15a and the movable clamping portion 16a). ) Is controlled so as to be gripped in the vertical direction. In other words, the movable holding portion 16a that is movable in the vertical direction toward the fixed holding portion 15a at the lower position is provided. Under normal conditions, the movable holding portion 16a is attached downward to the fixed holding portion 15a by the spring pressure of the compression spring 17. The side edge of the plate-like workpiece in the horizontal state is controlled so as to be gripped in the vertical direction. More specifically, the clamping chuck 7 includes a substantially L-shaped fixed rod 15 attached to the toothed transmission belt 9 and a rod-shaped movable rod 16 attached to the fixed rod 15 so as to be movable up and down. I have. The substantially horizontal portion at the lower end of the fixed rod 15 is a fixed clamping portion 15a, and the lower end of the movable rod 16 is a movable clamping portion 16a. In a normal state, the movable clamping portion 16a is urged downward by the spring pressure of the compression spring 17 toward the fixed clamping portion 15a, so that the side edge of the plate-like workpiece in the horizontal state can be gripped in the vertical direction. ing. A guide engaging member 18 is provided on the upper portion of the holding chuck 7. This guide engaging member 18 is engaged with a chuck opening / closing guide member 25 described later, and moves the movable rod 16 upward against the spring pressure of the compression spring 17 so as to open the clamping chuck 7. is there. As the guide engaging member 18, in the embodiment of FIG. 8, a lower lever portion 19b of a substantially L-shaped reversing lever 19 having a fulcrum shaft 18a on the fixed rod 15 side is connected to the upper portion of the movable rod 16, and the reversing lever A roller 18b that can roll along the guide surface is attached to an upper lever portion 19a. In addition, the arrow of FIG. 8 has shown the moving direction of the clamping chuck 7. FIG.

  The chuck opening / closing control means includes a chuck opening / closing guide member 25 having a high-order guide surface portion 25a, and the high-order guide surface portion 25a of the chuck opening / closing guide member 25 is formed by the clamping chuck as shown by a one-dot chain line in FIGS. Are arranged at the position immediately before the start end portion 2a and the position of the end portion 2b in the rotation drive direction along the rotation drive path of the group 7. As shown in FIG. 8, the chuck opening / closing guide member 25 has an inclined guide surface portion in which the intermediate portion in the rotational driving direction of the clamping chuck 7 is a high-level guide surface portion 25a and both sides of the high-level guide surface portion 25a are changed from a high level to a low level. 25b. When the clamping chuck 7 passes the position of the chuck opening / closing guide member 25, the guide engaging member 18 of the clamping chuck 7 is engaged with the high-order guide surface portion 25a of the opening / closing guide member 25, and in this engaged state, The movable clamping portion 16a is configured to be controlled in an upwardly guided open state away from the fixed clamping portion 15a against the biasing force of the spring pressure of the compression spring 17.

  A lateral width adjusting device for adjusting the lateral width of the transport drive line is provided. By this lateral width adjusting device, the lateral width of the conveyance path of the workpiece in the surface treatment chamber can be adjusted.

  In the embodiment of FIGS. 1 to 4, as the lateral width adjusting device (horizontal direction advance / retreat drive device), the transport drive line L1 of the first transport device 5A is set as a transport reference line, and the transport reference line L1 On the other hand, in order to arrange the transport driving line L2 of the second transport device 5B (as shown by the solid line and the alternate long and short dash line in FIG. 1) at the position in the approaching direction or the position in the separating direction, the second transport device 5B is arranged. It is configured to be able to advance and retract in the direction orthogonal to the conveyance direction A of the workpiece P toward the first conveyance device 5A. That is, in this embodiment, one conveyance device (second conveyance device 5B) is driven to advance and retreat in the horizontal width direction, and the horizontal width interval W between the conveyance drive lines L1 and L2 of the first conveyance device 5A and the second conveyance device 5B. Is adjusted.

  As can be understood from FIGS. 2 to 4, this lateral width adjusting device is extended in the lateral width direction and can be spaced in the transport direction so that the entire second transport device 5B can be guided to move forward and backward in the lateral width direction. The horizontal width direction moving guide means 30 including a plurality of horizontal width direction moving guide rails 31 placed thereon and the second conveying device 5B movable in the horizontal width direction by the horizontal width direction moving guide means 30 are moved in the horizontal width direction. It is composed of a lateral width direction driving means 35 using a lateral width adjusting motor 36 that can be driven back and forth in the lateral width direction along the guide rail 31 as a drive source. If the second conveying device 5B is driven to advance toward the first conveying device 5A, the lateral width W of the conveyance path 3 for the object to be processed is narrowed. If driven backward, the lateral width of the conveyance path 3 for the object to be treated is reduced. The interval W increases.

  The second transport device 5B is movably held on each lateral width direction guide rail 31 and is provided with a carrier 32 (this carrier 32 is arranged on the top, bottom, left and right of the lateral width direction guide rail 31 as can be seen from FIGS. The support frame 33 of the second transport device 5B is fixed to the rail 31 via a plurality of bearings), and the second transport device 5B is smoothly moved along the lateral-direction moving guide rail 31. It can be done.

  The lateral width direction driving means 35 has a lateral width wound around each of the width adjustment motor 36 and corresponding to the carrier 32 that is rotationally driven in the lateral width direction by obtaining a normal or reverse rotational driving force of the motor. A direction moving belt (toothed belt) 37 is provided, and the second conveying device 5B is moved along the width direction moving guide rail 31 in the width direction in conjunction with the driving of each width direction moving belt (toothed belt) 37 in the width direction. Drive forward and backward. The rotational driving force of the lateral width adjusting motor 36 is transmitted to the rotational drive of the horizontal rotating shaft 38 extended in the conveying direction via the toothed transmission belt 36a. The shaft portion of the horizontal rotating shaft 38 and the lateral width direction are transmitted. It is equally and accurately transmitted as a rotational driving force in the lateral direction to a laterally moving belt (toothed belt) 37 wound around a rotatable toothed pulley 37a attached to the movement guide rail 31 (outside the range of the lateral movement stroke), By interlocking with the lateral width direction driving of each lateral width direction moving belt (toothed belt) 37, the entire second conveying device 5B can be reciprocated equally in the lateral width direction along the lateral width direction moving guide rail 31. .

  In the lateral width adjusting device of the embodiment of FIGS. 1 to 4, one side edge of the plate-like workpiece P having parallel both side edges supplied to the surface treatment tank 1 (lower side edge in FIG. 1). Is set as a reference supply line, and the reference supply line and the transfer drive line L1 (reference transfer drive line) in the first transfer device 5A are set together, and the other side edge (in FIG. Since the transport drive line L2 (variable transport drive line) in the second transport device 5B can be adjusted in accordance with the changed supply line of the upper side edge), it is a plate-shaped workpiece having a different width. However, the surface treatment can be performed while the both side edges are pinched accurately and continuously conveyed in a horizontal state.

  Next, as this lateral width adjusting device (horizontal direction forward / backward drive device), in the embodiment of FIGS. 5 to 7, a center line parallel to the transport drive line at the center position of the lateral width interval of each transport drive line L1, L2. L3 is set as a transport reference line, and the transport drive lines L1 and L2 are arranged at a position in the approaching direction or a position in a direction away from the transport reference line (center line L3) with an equal lateral width. Each of the transfer devices 5A and 5B is configured to be driven back and forth in a direction perpendicular to the transfer direction of the workpiece toward the transfer reference line (center line L3). That is, in this embodiment, both the transport devices (first transport device 5A and second transport device 5B) are driven to advance and retreat in the lateral width direction to adjust the lateral width interval W between the transport drive lines L1 and L2. . It is preferable that the forward and backward driving of each of the transport devices 5A and 5B is performed synchronously.

  The width width adjusting device of the embodiment of FIGS. 5 to 7 is capable of guiding each of the transfer devices 5A and 5B so as to be movable back and forth in the width direction, and is extended in the width direction and installed at intervals in the transfer direction. A lateral width direction moving guide means 30 including a plurality of lateral width direction moving guide rails 31, and the transfer devices 5 A and 5 B that are movable in the lateral width direction by the lateral width direction moving guide means 30 are connected to the lateral width direction moving guide rails 31. The lateral width direction driving means 35 uses the lateral width adjusting motors 36 for the conveying devices 5A and 5B that can be driven back and forth along the lateral width direction as driving sources.

  The lateral width direction drive means 35 in the embodiment of FIGS. 5 to 7 is laterally driven in the lateral width direction using the lateral width adjusting motors 36 and 36 for the respective transport devices 5A and 5B as forward and reverse rotational drive sources. Moving belts (toothed belts) 37 and 37 are provided, respectively, and the respective conveying devices 5A and 5B are moved along the lateral width direction moving guide rails 31 in conjunction with the lateral width direction driving of the lateral width direction moving belts 37 and 37 in the lateral width direction. It can be driven forward and backward.

  In the embodiment of FIG. 5 to FIG. 7, the members of the lateral width direction moving guide means 30 and the lateral width direction driving means 35 are provided in a bilaterally symmetric state with respect to the center line. In addition, the other structure shown by embodiment of FIGS. 5-7 is substantially the same as the structure shown by embodiment of FIGS. Therefore, the description of the overlapping configuration is omitted.

  In the lateral width adjusting apparatus of the embodiment shown in FIGS. 5 to 7, the center position of the lateral width of the plate-like workpiece P having parallel both side edges supplied to the surface treatment tank is used as a supply reference line, and this supply reference line. And the transport reference line of the transport device (center line L3 parallel to the transport drive line at the center position of the lateral width of the transport drive lines L1 and L2) are set together, and the supply reference line for the plate-shaped workpiece Is supplied in accordance with the conveyance reference line of the conveyance device. Since the conveyance drive line (conveyance variable line) in each conveyance device can be adjusted in accordance with the supply change lines on both side edges of the workpieces with different width sizes, the plate-like workpieces with different width sizes can be adjusted. However, the surface treatment can be performed while the both side edges are pinched accurately and continuously conveyed in a horizontal state.

P plate-like object 1 surface treatment tank 2 passage section 2a start end 2b end 3 transfer path 5A first transfer device 5B second transfer device L1 transfer drive line of the first transfer device L2 transfer drive line of the second transfer device W width interval 6 conveyance driving means 7 nipping chuck 10 conveyance motor 12 chuck guide rail 15a nipping chuck fixed nipping portion 16a nipping chuck movable nipping portion 17 compression spring 18 guide engaging member 25 chuck opening / closing guide member 25a high level guide surface portion 25b Inclined guide surface section 30 Horizontal width direction movement guide means 31 Horizontal width direction movement guide rail 32 Carrier 33 Support frame of each conveying device 35 Horizontal width direction driving means 36 Horizontal width adjusting motor 37 Horizontal width direction moving belt 38 Horizontal rotation axis L3 Conveyance reference line (center line) )

Claims (9)

  A plate-like workpiece having parallel edges on both sides is supplied to the surface treatment tank in a horizontal state with the plate surface up and down, and the surface treatment tank is continuously conveyed in the horizontal state to pass through, after the surface treatment. In an apparatus for performing a surface treatment on an object to be processed, which is carried out from the surface treatment tank, a conveying device for conveying the object to be processed in a horizontal state over a passage section of the surface treatment tank is an object to be processed in the surface treatment tank. The first conveying device and the second conveying device provided on both sides of the conveying path in between, each conveying device is rotationally driven endlessly mounted with a number of clamping chucks at equal intervals, Each of the conveyance chucks includes a conveyance drive unit having a linear conveyance drive unit along the conveyance path. The clamping chuck includes a clamping unit that clamps and opens a side edge of the workpiece in a horizontal state in the vertical direction. Spinning at the speed Each conveyance drive line in each clamping unit of the clamping chuck group in each linear conveyance drive unit of each conveyance drive means is parallel to each other and has a width interval spaced apart with the conveyance path in between, The width interval of the transfer drive line is configured as the width interval of the transfer path of the object to be processed in the surface treatment tank, and both side edges of the object to be processed are synchronously held by the clamping chuck group in the transfer drive line in each transfer device. It is configured so that the workpiece is moved in the transport direction over the passage section of the surface treatment tank, and the first and second transport devices are clamped to pass through the start end of the transport path of the workpiece. A chuck opening / closing control means for controlling the chuck from the opened state to the sandwiched state, and controlling the sandwiched chuck that passes through the terminal portion of the conveyance path of the workpiece from the sandwiched state to the opened state; The transporting line of the feeding device is set as a transporting reference line, and the second transporting is performed so that the transporting driving line of the second transporting device is located closer to or away from the transporting reference line. A width interval adjusting device for adjusting the width interval of the transfer drive line of each transfer device, wherein the device can be driven forward and backward in a direction orthogonal to the transfer direction of the workpiece toward the first transfer device. A transport apparatus for a plate-like object to be processed in a surface treatment apparatus.   A plate-like workpiece having parallel edges on both sides is supplied to the surface treatment tank in a horizontal state with the plate surface up and down, and the surface treatment tank is continuously conveyed in the horizontal state to pass through, after the surface treatment. In an apparatus for performing a surface treatment on an object to be processed, which is carried out from the surface treatment tank, a conveying device for conveying the object to be processed in a horizontal state over a passage section of the surface treatment tank is an object to be processed in the surface treatment tank. The first conveying device and the second conveying device provided on both sides of the conveying path in between, each conveying device is rotationally driven endlessly mounted with a number of clamping chucks at equal intervals, Each of the conveyance chucks includes a conveyance drive unit having a linear conveyance drive unit along the conveyance path. The clamping chuck includes a clamping unit that clamps and opens a side edge of the workpiece in a horizontal state in the vertical direction. Spinning at the speed Each conveyance drive line in each clamping unit of the clamping chuck group in each linear conveyance drive unit of each conveyance drive means is parallel to each other and has a width interval spaced apart with the conveyance path in between, The width interval of the transfer drive line is configured as the width interval of the transfer path of the object to be processed in the surface treatment tank, and both side edges of the object to be processed are synchronously held by the clamping chuck group in the transfer drive line in each transfer device. It is configured so that the workpiece is moved in the transport direction over the passage section of the surface treatment tank, and the first and second transport devices are clamped to pass through the start end of the transport path of the workpiece. Each chuck is provided with a chuck opening / closing control means for controlling the chuck from the open state to the clamped state, and controlling the clamp chuck passing through the terminal end of the conveyance path of the workpiece from the clamped state to the open state. A center line parallel to the transport drive line at the center position of the lateral width interval of the line is set as a transport reference line, and each transport drive line is positioned in a direction approaching the transport reference line with an equal lateral width interval or In order to arrange at a position in a direction away from each other, each conveyance device is configured to be driven forward and backward in a direction orthogonal to the conveyance direction of the workpiece toward the conveyance reference line. A transport apparatus for a plate-like object to be processed in a surface treatment apparatus, comprising a width width adjusting device for adjusting a width distance.   A plurality of lateral width direction moving guide rails extending in the lateral width direction and installed at intervals in the transport direction, wherein the lateral width adjusting device can guide the entire second transport device so as to be movable forward and backward in the lateral width direction. A width direction movement guide means including the width direction movement guide means, and the second width transfer device which is movable in the width direction by the width direction movement guide means for advancing and retreating in the width direction along the width direction movement guide rail. The apparatus for conveying a plate-like object in the surface treatment apparatus according to claim 1, comprising a lateral width direction drive unit using a motor as a drive source.   The lateral width direction driving means includes a lateral width direction moving belt that is rotationally driven in the lateral width direction using the lateral width adjustment motor as a forward / reverse rotational drive source, and the second width direction driving belt is interlocked with the lateral width direction driving of the second width direction moving belt. The transport apparatus for a plate-like workpiece in the surface treatment apparatus according to claim 3, wherein the transport apparatus can be driven back and forth in the lateral width direction along the lateral width direction moving guide rail.   The lateral width direction adjustment device includes a plurality of lateral width direction moving guide rails that extend in the lateral width direction and are installed at intervals in the transport direction so that each of the transportation devices can be guided to move forward and backward in the lateral width direction. For moving width adjusting means for each transfer device that allows the transfer device to move forward and backward in the horizontal width direction along the horizontal width direction moving guide rails. The plate-like workpiece conveying apparatus in the surface treatment apparatus according to claim 2, comprising a lateral width direction driving unit using a motor as a driving source.   The lateral width direction driving means includes lateral width direction moving belts that are rotationally driven in the lateral width direction by using the lateral width adjusting motors for the respective conveying devices as forward and reverse rotational drive sources, respectively. The plate-like workpiece conveying apparatus in the surface treatment apparatus according to claim 5, wherein each conveying apparatus can be driven back and forth in the lateral width direction along the lateral width direction moving guide rail in conjunction with the movement of the sheet processing apparatus.   The chuck opening / closing control means includes a chuck opening / closing guide member having a high-order guide surface portion disposed at a position immediately before the start end portion and a position of the end portion in the rotation drive direction along the rotation drive path of the clamping chuck group. And the clamping chuck is controlled to a clamping state in which a side edge of a plate-like workpiece in a horizontal state can be gripped in a vertical direction by a clamping part under the spring pressure of a compression spring. When passing through the position of the member, it is engaged with the high-order guide surface portion of the open / close guide member, and in this engaged state, the clamping portion is controlled to be in an open state in which it is separated in the vertical direction against the biasing force of the spring pressure of the compression spring. The apparatus for conveying a plate-like object in the surface treatment apparatus according to claim 1 or 2 configured as described above.   The said 1st and 2nd conveying apparatus is equipped with the chuck guide rail which guides the movement of the clamping chuck | zipper group in the said linear conveyance drive part, respectively, The plate-shaped to-be-processed object in the surface treatment apparatus of Claim 1 or 2 Conveying device.   9. The plate-like workpiece conveyance device in the surface treatment device according to claim 8, wherein the chuck guide rail functions as a power supply rail for feeding a cathode current to the workpiece to be conveyed via the clamping chuck.

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