JP5286802B2 - Light irradiation type heating device - Google Patents

Description

  The present invention relates to a light irradiation type heating apparatus used for heat-treating an object to be processed such as a semiconductor wafer by light irradiation.

  Currently, when performing various processes such as film formation, oxidation, nitridation, film stabilization, silicidation, crystallization, and implanted ion activation in semiconductor manufacturing processes, heat treatment by light irradiation from a light source is used. According to the light irradiation type heating apparatus used in such heat treatment, the temperature of the object to be processed is rapidly increased / decreased compared with the resistance heating method, specifically, for example, the object to be processed Can be raised to a temperature of 1000 ° C. or more in several seconds to several tens of seconds, and the object to be processed can be rapidly cooled after the light irradiation is stopped.

  In the light irradiation type heating apparatus in which such heat treatment is performed, an incandescent lamp, for example, is used as a light source, and a plurality of tube shapes are used to collectively irradiate light on the entire surface of an object to be processed such as a semiconductor wafer. A structure using a lamp unit in which the lamps are arranged in parallel on the same plane is known.

In recent years, it has been required to raise and lower the temperature of an object to be processed at a higher speed. For example, in heat treatment called “spike annealing” or “flash heating”, for example, it exceeds 200 ° C./second. It is necessary to rapidly raise the temperature at the rate of temperature rise and immediately cool it when it reaches the target temperature. By such heat treatment, a very thin diffusion layer (shallow junction) is formed. And the performance of the semiconductor element can be improved.
The “flash heating” process uses a flash lamp in which a pair of discharge electrodes are arranged in an arc tube.

  In order to meet such demands, it is necessary to irradiate the entire surface of the processing object such as a semiconductor wafer with more powerful light, and a plurality of tube-shaped lamps arranged in parallel on the same plane. A structure is adopted in which a plurality of units are stacked to increase the light output.

A light irradiation type heating apparatus in which a plurality of lamp units as described above are stacked will be described with reference to FIG.
In FIG. 7, an object to be processed such as a semiconductor wafer is positioned above the plane of the drawing, and the structure of the lamp unit is shown more clearly by inverting the actual apparatus arrangement state.

  In this light irradiation type heating device, there are two sets of upper and lower lamp units in which a plurality of tube-shaped lamps 1 are arranged in parallel on the same plane, which are a first lamp unit L1 and a second lamp unit L2. A reflecting mirror (not shown) is arranged on the lamp unit side of the inner wall of the base plate C for mounting the lamp house, and the first lamp unit L1 and the second lamp unit L2 are respectively connected to the lamp tube axis in front of the reflecting mirror. It is arranged to intersect.

And each lamp | ramp 1 which comprises the 1st lamp unit L1 is hold | maintained by the holding members 30 and 31 in the sealing part of the both ends. Specifically, the holding member 30 that holds one end side of the lamp 1 includes a fixing base 30a fixed to the base plate C and a fixing plate 30b facing the fixing base 30a. The fixing base 30a and the fixing plate 30b Has a recess (not shown) in which the sealing portions of the respective lamps are fitted at an appropriate interval, and the sealing portion of the lamp 1 is placed on the fixed base 30a. The fixing plate 30b is connected to the fixing base 30a by an appropriate method so as to sandwich the lamp 1, and one end side of the lamp 1 is held by the holding member 30.
Similarly, the holding member 31 for holding the other end of the lamp 1 includes a fixing base 31a fixed to the base plate C and a fixing plate 31b facing the fixing base 31a. The lamp 1 is placed on the fixing base 31a. In this state, the fixing plate 31b is connected to the fixing base 31a by an appropriate method so as to sandwich the sealing portion, and the other end side of the lamp 1 is held by the holding member 31. is there.

  Similarly, each lamp 1 constituting the second lamp unit L2 includes a holding member 32 including a fixing base 32a and a fixing plate 32b, and a fixing base 33a and a fixing plate 33b at sealing portions at both ends. 33.

  Actually, power supply lead wires are connected to both sides of each lamp 1 constituting the second lamp unit L2, but in order to make the drawing easier to understand, in FIG. The lead wires of the lamps 1 constituting the lamp unit L2 are omitted.

As described above, the first lamp unit L1 and the second lamp unit L2 are arranged in two upper and lower stages, so that the entire surface of the object to be processed such as a semiconductor wafer can be irradiated with powerful light. The temperature can be raised and lowered at high speed.
JP 2001-210604 A

In such a light irradiation type heating device, when a certain lamp becomes unable to be lit due to its life or the like, an operation of replacing only the lamp occurs.
Specifically, as shown in FIGS. 8A and 8B, the structure including the lamp unit and the reflecting mirror is placed in a state where the reflecting mirror is positioned vertically downward so that the lamp does not fall when the lamp is replaced. To do. Thereafter, in the operation of replacing the lamp 1 having the second lamp unit L2 close to the object to be processed, the connection of the fixing plate 32b from the fixing base 32a constituting the holding member 32 is released, and the holding member 33 is further configured. In this state, the connection of the fixing plate 33b is released from the fixed base 33a and all the lamps 1 are removable, and only the lamps that cannot be lit are replaced.

  Further, when the lamp 1 of the first lamp unit L1 located between the reflecting mirror and the second lamp unit L2 cannot be turned on, the second lamp unit L2 exists in the front and the lamp house body and the lamp are in the rear. Since the mounting base plate and the reflecting mirror are located and a cooling mechanism and the like are arranged as necessary, the lamp cannot be replaced from the lamp house body direction.

For this reason, when the lamp of the first lamp unit L1 is replaced, the operation of replacing the lamp can be performed only from the direction of the second lamp unit L2.
Specifically, as shown in FIGS. 8A and 8B, the holding members 32 and 33 are disconnected, and all the lamps of the second lamp unit L2 that do not require lamp replacement are removed. Then, the connection of the fixing plate 30b from the fixing base 30a constituting the holding member 30 is released, and further, the connection of the fixing plate 31b from the fixing base 31a constituting the holding member 31 is released, and the first lamp unit In a state where all the lamps 1 of L1 are removable, only the lamps that cannot be turned on are replaced.

  That is, when the lamp of the first lamp unit L1 is replaced, the lamp of the second lamp unit L2, which does not need to be replaced at all, must be removed, and there is a problem that workability at the time of lamp replacement is extremely poor.

  The present invention has been made based on the above situation, and a plurality of lamp units in which a plurality of lamps are arranged in parallel on the same plane are stacked, and the lamp unit is positioned on the reflecting mirror and the object to be processed side. When replacing the lamp of the lamp unit existing between the lamp unit and the light irradiation type heating device, it is possible to replace only a specific lamp with a simple operation without removing the lamp of the lamp unit located on the workpiece side Is to provide.

  The light irradiation type heating device according to claim 1 is a light irradiation type heating device including a lamp unit in which a plurality of lamps are arranged, and a reflecting mirror that reflects light emitted from the lamp unit toward the object to be processed. The lamp unit includes a first lamp unit in which a plurality of lamps are arranged on the same plane so that the tube axes of the lamps are parallel to each other, and spaced apart from the first lamp unit. The second lamp unit includes a plurality of lamps arranged on the same plane so that the tube axes of the respective lamps are parallel to each other. The first lamp unit includes the reflecting mirror and the second lamp unit. Each lamp that is positioned between the lamp units and that constitutes the first lamp unit is a tube-shaped lamp having sealing portions at both ends, the first feeding mechanism and the other end at one end side. On the side Two power supply mechanisms are provided, and a first holding member and a second holding member for holding the lamp constituting the first lamp unit at both end positions in the tube axis direction of the lamp constituting the first lamp unit. The first power supply mechanism is held by the first holding member and the second power supply mechanism is the second power supply mechanism so that each of the lamps constituting the first lamp unit is detachable in the tube axis direction of the lamp. It is characterized by being held by two holding members.

  The light irradiation type heating device according to claim 2 is the light irradiation type heating device according to claim 1, and in particular, the first power feeding mechanism is a base attached to a sealing portion on one end side of the lamp. And a power supply pin protruding in the tube axis direction of the lamp from the tip of the base, and the first holding member includes a main body portion and a power supply pin insertion hole provided in the main body portion and extending in the tube axis direction of the lamp. The power supply pin is inserted into the power supply pin insertion hole, and each lamp constituting the first lamp unit is held by a first holding member.

  The light irradiation type heating device according to claim 3 is the light irradiation type heating device according to claim 1 or 2, wherein the second power feeding mechanism is a sealing part on the other end side of the lamp. And the second holding member includes a main body portion and a base insertion hole extending in the tube axis direction of the lamp provided in the main body portion, and sealing the other end side of the lamp. A base attached to the portion is inserted into the base insertion hole, and each lamp constituting the first lamp unit is held by a second holding member.

  The light irradiation type heating device according to claim 4 is the light irradiation type heating device according to claim 2, and in particular, a contact portion that is in contact with the power supply pin inside the power supply pin insertion hole to form an electrical path. And the contact portion is fixed to the main body portion of the first holding member.

  The light irradiation type heating device according to claim 5 is the light irradiation type heating device according to claim 3, and in particular, the second power feeding mechanism extends from a rear end of the base in a tube axis direction of the lamp. The second holding member has a lead wire through hole, and a lead wire through hole through which the lead wire communicating with the base insertion hole passes is formed.

  The light irradiation type heating device according to claim 6 is the light irradiation type heating device according to claim 4, and in particular, the power supply pin insertion hole expands toward the lamp side, and the tip of the power supply pin It has the guide surface which guides to a feed pin insertion hole.

  The light irradiation type heating apparatus according to claim 7 is the light irradiation type heating apparatus according to claim 5, and in particular, the base insertion hole is expanded to the lamp side, and the rear end of the base is It has a guide surface for guiding to the base insertion hole.

The light irradiation type heating apparatus according to the present invention includes a plurality of lamp units in which a plurality of lamps are arranged in parallel on the same plane, and a lamp unit existing between a reflecting mirror and a lamp unit located on the object side. When replacing the lamp, only a specific lamp can be replaced with a simple operation without removing the lamp of the lamp unit located on the object side.
Further, the lamp can be positioned at the same time when the lamp is replaced.

The light irradiation type heating apparatus of the present invention will be described below with reference to FIGS.
FIG. 1 is a cross-sectional view of a light irradiation type heat treatment apparatus using the light irradiation type heating apparatus of the present invention.

  As shown in FIG. 1, this light irradiation type heat treatment apparatus 2 has a quartz window 3 made of, for example, quartz glass that transmits light, and a lamp house 4 that constitutes the light irradiation type heating apparatus of the present invention. A chamber 40 having a heat treatment space is included. By irradiating light to be emitted from the first lamp unit 5 and the second lamp unit 6 arranged in the lamp house 4 to the object 7 arranged in the chamber 40 through the quartz window 3, The to-be-processed object 7 is heat-processed.

  The first lamp unit 5 and the second lamp unit 6 housed in the lamp house 4 are configured, for example, by arranging 10 lamps 1 in parallel at a predetermined interval, and the second lamp unit 6 is a first lamp unit 6. The lamp unit 5 is disposed so as to be separated from the lamp unit 5. The tube axis direction of the lamp 1 constituting the first lamp unit 5 is arranged so as to intersect the tube axis direction of the filament lamp 1 constituting the second lamp unit 6.

A reflecting mirror 8 is disposed on the outer side of the first lamp unit 5 (above the paper surface in FIG. 1). The reflecting mirror 8 has a structure in which a base material made of oxygen-free copper is coated with gold, for example, and a reflection cross section (not shown) has a shape of a part of a circle, a part of an ellipse, a part of a parabola, a flat plate, or the like. . The reflecting mirror 8 reflects light irradiated upward from the first lamp unit 5 and the second lamp unit 6 toward the object 7 to be processed.
That is, the light emitted from the first lamp unit 5 and the second lamp unit 6 is reflected directly or by the reflecting mirror 8 and is irradiated onto the object 7 to be processed.

Cooling air from the air cooling unit 9 is introduced into the lamp house 4 from the outlet 11 of the cooling air supply nozzle 10. The cooling air introduced into the lamp house 4 is blown to the lamps 1 in the first lamp unit 5 and the second lamp unit 6 to cool the arc tubes constituting the lamps 1. Here, the sealing part of each lamp 1 has lower heat resistance than other parts.
Therefore, it is desirable that the outlet 11 of the cooling air supply nozzle 10 is disposed so as to face the sealing portion of each lamp 1 so that the sealed portion of each lamp 1 is cooled preferentially.

  The cooling air blown to each lamp 1 and heated to a high temperature by heat exchange is discharged from a cooling air outlet 12 provided in the lamp house 4. Note that the flow of the cooling air is considered so that the cooling air heated to a high temperature by heat exchange does not heat each lamp 1. The flow of the cooling air is set so that the reflecting mirror 8 is also cooled at the same time. When the reflecting mirror 8 is water-cooled by a water-cooling mechanism (not shown), it is not always necessary to set the wind flow so that the reflecting mirror 8 is also cooled.

  By the way, heat storage in the quartz window 3 is generated by radiant heat from the object 7 to be heated. The to-be-processed object 7 may receive an undesired heating effect | action by the heat ray radiated | emitted from the quartz window 3 by which heat was accumulate | stored. In this case, the temperature controllability of the object to be processed 7 is caused by redundancy (for example, overshoot such that the temperature of the object 7 is higher than the set temperature) and the temperature variation of the quartz window 3 itself that stores heat. Inconvenience such as a decrease in temperature uniformity occurs in the object 7 to be processed. Moreover, it becomes difficult to improve the temperature drop rate of the object 7 to be processed. Therefore, in order to suppress these problems, the outlet 11 of the cooling air supply nozzle 10 as shown in FIG. 1 is also provided in the vicinity of the quartz window 3 so that the quartz window 3 is cooled by the cooling air from the air cooling unit 9. It is desirable to make it.

Each lamp 1 of the first lamp unit 5 is a tube-shaped lamp having sealing portions at both ends, and is provided with a first power feeding mechanism 13 on one end side and a second power feeding mechanism 14 on the other end side. A first holding member 15 and a second holding member 16 for holding the lamp 1 constituting the first lamp unit 5 are arranged at both end positions in the tube axis direction of the lamp 1 constituting the first lamp unit 5. The first holding member 15 and the second holding member 16 are directly fixed to the inner wall of the lamp house 4.
In FIG. 1, the first holding member 15 and the second holding member 16 are depicted as being fixed to the inner wall of the lamp house 4, but as will be described later, the first holding member 15 and the second holding member 16 are illustrated. The holding member 16 may be fixed to the lamp mounting base plate 41 and the lamp mounting base plate 41 may be mounted on the inner wall of the lamp house 4.
Each lamp 1 of the second lamp unit 6 is a tube-shaped lamp having sealing portions at both ends. Like the first lamp unit 5, the third power feeding mechanism is provided on one end side and the fourth power feeding is provided on the other end side. A mechanism is provided to hold the lamp 1 constituting the second lamp unit 6 at both end positions in the tube axis direction of the lamp 1 constituting the second lamp unit 6 in the same manner as the first lamp unit 5. A third holding member and a fourth holding member are arranged.
In FIG. 1, the third power supply mechanism and the fourth power supply mechanism of the second lamp unit 6 and the third holding member and the fourth holding member for holding the lamp 1 constituting the second lamp unit 6 are Not shown.

The lamp house 4 is provided with a pair of power supply ports 18 and 19 to which power supply lines from the power supply device of the power supply unit 17 are connected. In FIG. 1, one set of power supply ports 18 and 19 is shown, but the number of power supply ports is determined according to the number of lamps 1 and the like. In FIG. 1, the first power supply mechanism 13 and the second power supply mechanism 14 of the first lamp unit 5 are electrically connected to the power supply ports 18 and 19 through, for example, lead wires, and the second lamp unit 6. The third power supply mechanism and the fourth power supply mechanism are electrically connected to other power supply ports (not shown).
With this configuration, power can be supplied from the power supply device in the power supply unit 17 to the respective lamps 1 of the first lamp unit 5 and the second lamp unit 6.

  In the chamber 40, a processing table 20 on which the object 7 is fixed is provided. For example, when the object 7 to be processed is a semiconductor wafer, the processing table 20 is made of a refractory metal material such as molybdenum, tungsten, or tantalum, a ceramic material such as silicon carbide (SiC), quartz, or silicon (Si). It is preferable that it is a guard ring structure in which a step portion for supporting a semiconductor wafer is formed on the inner peripheral portion of the circular opening. The semiconductor wafer as the object to be processed 7 is arranged so that the semiconductor wafer is fitted into the circular opening of the annular guard ring, and is supported by the step portion. The processing table 20 itself also becomes high temperature by light irradiation and radiantly heats the outer peripheral edge of the semiconductor wafer that faces it to compensate for the heat radiation from the outer peripheral edge of the semiconductor wafer. Thereby, the temperature fall of the semiconductor wafer outer periphery part resulting from the thermal radiation from the outer periphery of a semiconductor wafer, etc. is suppressed.

  On the back side of the light irradiation surface of the object to be processed 7 installed on the processing table 20, a temperature measuring unit 21 is provided in proximity to or in contact with the object to be processed 7. The temperature measuring unit 21 is for monitoring the temperature distribution of the object to be processed 7, and the number is set according to the dimensions of the object to be processed 7. As the temperature measurement unit 21, for example, a thermocouple or a radiation thermometer is used. The temperature information monitored by the temperature measuring unit 21 is sent to the thermometer 22. The thermometer 22 calculates the temperature at the measurement point of each temperature measurement unit 21 based on the temperature information sent from each temperature measurement unit 21, and sends the calculated temperature information to the main control unit via the temperature control unit 23. 24. Based on the temperature information at each measurement point on the object 7 to be processed, the main controller 24 sends a command to the temperature controller 23 so that the temperature on the object 7 becomes uniform at a predetermined temperature. Based on this command, the temperature control unit 23 controls the power supplied from the power supply unit 17 to each lamp 1. For example, when the main control unit 24 obtains temperature information that the temperature at a certain measurement point is lower than a predetermined temperature from the temperature control unit 23, the light emitted from the lamp adjacent to the measurement point increases. Thus, a command is sent to the temperature control unit 23 so as to increase the amount of power supplied to the lamp. The temperature control unit 23 increases the power supplied from the power supply unit 17 based on the command sent from the main control unit 24.

The main control unit 24 controls the arc tube and the quartz window 3 not to be in a high temperature state by sending a command to the cooling air unit 9 while the lamp 1 is lit in the first and second lamp units 5 and 6. . Further, a process gas unit 25 for introducing / exhausting a process gas may be connected in the chamber 40 according to the type of heat treatment. For example, when a thermal oxidation process is performed, a process gas unit 25 that introduces and exhausts oxygen gas into the chamber 40 and purge gas (for example, nitrogen gas) for purging the chamber 40 is connected. Process gas and purge gas from the process gas unit 25 are introduced into the chamber 40 from the outlet 27 of the gas supply nozzle 26 provided in the chamber 40. Further, exhaust is performed from the discharge port 28.
The lamp 1 constituting the first lamp unit 5 and the second lamp unit 6 is an incandescent lamp having a filament inside the arc tube or a flash lamp in which a pair of discharge electrodes are arranged inside the arc tube. Also good.

FIG. 2 is an explanatory diagram of the first lamp unit and the second lamp unit of the light irradiation type heating device shown in FIG. 1, and is an explanatory diagram viewed from a direction orthogonal to the tube axis of the lamp constituting the first lamp unit. It is.
In FIG. 2, an object to be processed such as a semiconductor wafer is positioned above the plane of the drawing, and is shown upside down with respect to the actual arrangement state of the apparatus so that the structure of the lamp unit can be understood more clearly.

In this light irradiation type heating device, a first lamp unit 5 and a second lamp unit 6 are stacked in two stages in the vertical direction. In this embodiment, a reflecting mirror is provided near the inner wall of the lamp house 4 by appropriate means. 8 is arranged, and the first lamp unit 5 is located between the reflecting mirror 8 and the second lamp unit 6.
The lamp 1 constituting the first lamp unit 5 is a tube-shaped lamp having sealing portions at both ends, and is provided with a first power feeding mechanism 13 on one end side and a second power feeding mechanism 14 on the other end side. The first power supply mechanism 13 includes a base 13a attached to a sealing portion on one end side of the lamp 1 and power supply pins 13b protruding from the tip of the base 13a in the tube axis direction of the lamp 1. The two power feeding mechanisms 14 are a base 14 a attached to a sealing portion on the other end side of the lamp 1 and a lead wire 14 b extending from the rear end of the base 14 a in the tube axis direction of the lamp 1.

  A first holding member 15 and a second holding member 16 for holding the lamp 1 constituting the first lamp unit 5 are arranged at both end positions in the tube axis direction of the lamp 1 constituting the first lamp unit 5. The first holding member 15 and the second holding member 16 are fixed to a lamp mounting base plate 41 fixed to the inner wall of the lamp house 4.

Next, the holding structure of the lamp 1 constituting the first lamp unit 5 will be described in detail.
FIG. 3 is an enlarged cross-sectional view showing the relationship between the first power supply mechanism 13 and the first holding member 15 of the lamp 1 constituting the first lamp unit 5.
The first holding member 15 includes a main body portion 15a made of an insulator such as a ceramic material, and a power supply pin insertion hole 15b extending in the tube axis direction of the lamp 1 provided in the main body portion 15a.
Inside the power supply pin insertion hole 15b, a contact portion 15c that is in contact with the power supply pin 13b and serves as an electrical path is disposed. A lead wire for supplying power to the lamp is connected to the contact portion 15c.
Specifically, the length of the power supply pin 13b is 15 mm and the outer diameter is 3 mm, the length of the power supply pin through-hole 15b in the tube axis direction of the lamp 1 is 20 mm, the inner diameter is 4 mm, and the contact portion 15c is made of copper. A cylindrical member having an inner diameter of 3.1 mm, which is substantially equal to the outer diameter of the power supply pin 13b, and cutting out a part of the outer surface of the cylindrical member so that the inner diameter becomes smaller in the middle in the longitudinal direction of the contact portion 15c. A plate spring is used, and the outer periphery of the power supply pin 13b is sandwiched by the plate spring. And this contact part 15c is being fixed to the main-body part 15a within the electric power feeding pin insertion hole 15b, and the main-body part 15a is being fixed to the base board 41 by the appropriate mechanism.

Then, by moving the lamp 1 in the direction of the tube axis in the direction of the first holding member 15, that is, when the power feed pin 13 b moves in the tube axis direction and is inserted into the power feed pin insertion hole 15 b, The first power supply mechanism 13 is held by the first holding member 15.
On the contrary, by moving the lamp 1 in the direction of the tube axis in the direction of the second holding member 16, that is, when the power supply pin 13 b moves in the direction of the tube axis and comes out of the power supply pin insertion hole 15 b, Thus, the first power supply mechanism 13 on one end side of 1 is detached from the first holding member 15.
As a result, each lamp 1 constituting the first lamp unit 5 has a structure in which the first power supply mechanism 13 is held by the first holding member 15 so as to be detachable in the tube axis direction of the lamp 1. .
Further, since the power supply pin 13b is inserted into the power supply pin insertion hole 15b provided in the main body portion 15a made of an insulator such as a ceramic material, the main body portion is insulated from the power supply pin 13b of the adjacent lamp 1. 15a can be taken.

FIG. 4 is an enlarged cross-sectional view showing the relationship between the second power feeding mechanism 14 and the second holding member 16 of the lamp 1 constituting the first lamp unit 5.
The second holding member 16 communicates with a main body portion 16a made of an insulator such as a ceramic material, a base insertion hole 16b extending in the tube axis direction of the lamp 1 provided in the main body portion 16a, and the base insertion hole 16b. A lead wire through hole 16c through which the lead wire 14b passes is formed.
Specifically, the base 14a attached to the other end of the lamp 1 has a length of 30 mm and an outer diameter of 20 mm, and the base insertion hole 16b has a length in the tube axis direction of the lamp 1 of 20 mm and an inner diameter of 21 mm. The length of the lead wire through hole 16c in the tube axis direction is 40 mm and the inner diameter is 5 mm.

Then, by moving the body portion 16a in the direction of the tube axis in the direction of the first holding member 15, the base 14a is inserted into the base insertion hole 16b, and the second power feeding mechanism 14 on the other end side of the lamp 1 is It will be held by the second holding member 16. When the main body 16a is moved in the direction of the tube axis in the direction of the first holding member 15 and the base 14a is inserted into the base insertion hole 16b, the main body 16a is fixed to the base plate 41 by an appropriate mechanism. It is what is done.
In contrast to this movement, the other end of the lamp 1 is moved by moving the main body portion 16a in the tube axis direction opposite to the first holding member 15, that is, by removing the base 14a from the base insertion hole 16b. The second power feeding mechanism 14 on the side is detached from the second holding member 16.
As a result, each lamp 1 constituting the first lamp unit 5 has a structure in which the second power feeding mechanism 14 is held by the second holding member 16 so as to be detachable in the tube axis direction of the lamp 1. .
The main body portion 16a may be provided with a plurality of base insertion holes 16b so that a single main body portion holds a plurality of lamps.

  Each of the lamps 1 of the second lamp unit 6 also has the same holding structure as the holding structure of the first lamp unit by the third and fourth power feeding mechanisms and the third and fourth holding members provided at both ends of the lamp. Although the second lamp unit 6 can be replaced without removing the first lamp unit 5 as described above, the conventional holding member 32 as shown in FIG. , 33 may be used.

  According to the first lamp unit 5 described above, when the lamp 1 of the first lamp unit 5 cannot be turned on, the main body portion 16 a of the second holding member 16 is released from the base plate 41. Then, the base 14 a on the other end side of the lamp 1 is detached from the second holding member 16 by moving the main body portion 16 a to the opposite side of the first holding member 15 in the tube axis direction of the lamp 1. In this state, since the power supply pin 13b on one end side of the lamp 1 is sandwiched by the contact portion 15c in the power supply pin insertion hole 15b, the power supply pin 13b does not fall out of the power supply pin insertion hole 15b. One end of the lamp 1 is held by the first holding member 15. Furthermore, by moving the lamp 1 in the direction of the second holding member 16 along the tube axis direction, the lamp 1 is completely removed from the first holding member 15 and only the lamp 1 that has become unlit can be selectively removed. Can do.

  When the replacement lamp 1 is attached to the first lamp unit 5, the power supply pin 13b of the replacement lamp 1 is inserted into the power supply pin insertion hole 15b from the tube axis direction and is held between the contact portions 15C. Further, with the lead wire 14b passed through the lead wire through hole 16c, the main body portion 16a of the second holding member is moved from the tube axis direction to the other end side of the replacement lamp 1, and the base is inserted into the base insertion hole 16b. 14 a is inserted, and the main body portion 16 a is fixed to the base plate 41.

  As a result, it is not necessary to remove the lamp of the second lamp unit 6, in other words, it is possible to replace only the lamp 1 of the first lamp unit 5 with a simple operation while leaving the second lamp unit 6 as it is. It can be done.

Further, a power supply pin 13b on one end side of the lamp 1 is inserted into the power supply pin insertion hole 15b, and the position of the power supply pin 13b can be adjusted in the tube axis direction in the power supply pin insertion hole 15b. Since the hole 15b is formed at a predetermined position of the main body portion 15a of the first holding member 15, the lamp 1 can be positioned in the tube axis direction and the direction orthogonal to the tube axis.
Further, since the base 14a provided on the other end side of the lamp 1 is inserted into the base insertion hole 16b, and this base insertion hole 16b is formed at a predetermined position of the main body portion 16a of the second holding member 16, The lamp 1 can be positioned in a direction perpendicular to the tube axis.

FIG. 5 is an enlarged cross-sectional view for explaining a modification of the first holding member 15, and the first power feeding mechanism 13 is also drawn.
The power feed pin insertion hole 15b provided in the main body 15a of the first holding member 15 has a guide surface 15b1 that expands toward the lamp 1 side.
By having this guide surface 15b1, the lamp 1 is moved in the direction of the tube axis in the direction of the first holding member 15 even when the tip of the power supply pin 13b is not located at the center of the power supply pin insertion hole 15b. Then, the tip of the power feed pin 13b moves along the guide surface 15b1, and the power feed pin 13b is reliably guided to the power feed pin insertion hole 15b.

  That is, when the lamp 1 constituting the first lamp unit 5 for replacement is inserted from the direction intersecting the tube axis of the lamp constituting the second lamp unit 6, the insertion distance becomes long, and power supply on one end side of the lamp is performed. Although the position of the pin 13b is difficult, by using the guide surface 15b1, even if the position of the power supply pin 13b is deviated from the center of the power supply pin insertion hole 15b, the power supply pin 13b is surely inserted into the power supply pin insertion hole. It can be inserted into 15b.

FIG. 6 is an enlarged cross-sectional view for explaining a modification of the second holding member 16, and the second power feeding mechanism 14 is also drawn.
A base insertion hole 16b provided in the main body portion 16a of the second holding member 16 has a guide surface 16b1 that expands toward the lamp 1 side.
By having the guide surface 16b1, the main body portion 16a is moved in the direction of the first holding member 15 in the tube axis direction even when the rear end of the base 14a is not positioned at the center of the base insertion hole 16b. Then, the rear end of the base 14a moves along the guide surface 16b1, and the base 14a is reliably guided to the base insertion hole 16b.

It is sectional drawing of the light irradiation type heat processing apparatus using the light irradiation type heating apparatus of this invention. It is explanatory drawing of the 1st lamp unit and 2nd lamp unit of the light irradiation type heating apparatus shown in FIG. 1, Comprising: It is explanatory drawing seen from the direction orthogonal to the tube axis | shaft of the lamp | ramp which comprises a 1st lamp unit. It is an expanded sectional view which shows the relationship between the 1st electric power feeding mechanism of the lamp | ramp which comprises the 1st lamp unit of this invention, and a 1st holding member. It is an expanded sectional view which shows the relationship between the 2nd electric power feeding mechanism of the lamp | ramp which comprises the 1st lamp unit of this invention, and a 2nd holding member. It is an expanded sectional view for explaining the modification of the 1st holding member of the present invention. It is an expanded sectional view for explaining the modification of the 2nd holding member of the present invention. It is explanatory drawing of the conventional light irradiation type heating apparatus. It is explanatory drawing at the time of lamp replacement in the lamp unit of the conventional light irradiation type heating apparatus. It is explanatory drawing at the time of lamp replacement in the lamp unit of the conventional light irradiation type heating apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lamp 2 Light irradiation type heat processing apparatus 3 Quartz window 4 Lamp house 40 Chamber 41 Base board 5 1st lamp unit 6 2nd lamp unit 7 To-be-processed object 8 Reflector 13 1st electric power feeding mechanism 13a Base 13b of the 1st electric power feeding mechanism Power supply pin 14 of the first power supply mechanism Second power supply mechanism 14a Base 14b of the second power supply mechanism Lead wire 15 of the second power supply mechanism First holding member 15a Main body portion 15b of the first holding member Power supply pin insertion hole of the first holding member 15c Contact piece 16 of first holding member Second power feeding mechanism 16a Main body portion 16b of second power feeding mechanism Base insertion hole 16c of second power feeding mechanism Lead wire through hole of second power feeding mechanism

Claims (2)

A light irradiation type heating apparatus including a lamp unit in which a plurality of lamps are arranged and a reflecting mirror that reflects light emitted from the lamp unit toward the object to be processed,
The lamp unit includes a first lamp unit in which a plurality of lamps are arranged on the same plane so that the tube axes of the lamps are parallel to each other;
The second lamp unit is spaced from the first lamp unit toward the object to be processed, and includes a plurality of lamps arranged on the same plane so that the tube axes of the respective lamps are parallel to each other.
The first lamp unit is located between the reflecting mirror and the second lamp unit, and the tube axis direction of the lamp constituting the first lamp unit is the tube axis of the lamp constituting the second lamp unit. Arranged to intersect the direction,
Each of the lamps constituting the first lamp unit is a tube-shaped lamp having sealing portions at both ends, and is provided with a first power feeding mechanism on one end side and a second power feeding mechanism on the other end side. And
Each lamp constituting the first lamp unit can be attached and detached without moving the lamp constituting the second lamp unit by moving in the tube axis direction within the same plane in which the lamps are arranged. A light irradiation type heating device characterized by the above . The said 1st electric power feeding mechanism consists of the base attached to the sealing part of the one end side of a lamp | ramp, and the electric power feeding pin protruded in the tube-axis direction of the lamp | ramp from the front-end | tip of the said base . Light irradiation type heating device.

Images