JP5313826B2 - Vacuum resistance welding apparatus and vacuum resistance welding method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve welding efficiency by sequentially welding a plurality of materials to be welded in vacuum where high vacuum condition is maintained. <P>SOLUTION: A resistance welding device in vacuum includes electrode units 15 capable of mounting the materials W to be welded and having lower electrode chips 15 A that are mutually independently vertically moved. The plurality of the materials to be welded are preliminarily mounted at the electrode unit outside a vacuum chamber 5, the electrode unit is mounted at a support member 19 in the vacuum chamber, and the plurality of the materials to be welded are collectively transferred into the vacuum chamber. When the inside of the vacuum chamber reaches a predetermined vacuum condition, the electrode unit is intermittently moved, the materials to be welded are sequentially transferred between an upper welding electrode and a lower welding electrode and resistance welding is carried out to perform vacuum airtight sealing. After the plurality of the materials to be welded in the vacuum chamber are resistance welded, airtight sealing devices that are airtight sealed in vacuum are collectively carried out from the vacuum chamber by the electrode unit. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a resistance welding apparatus in vacuum that performs airtight sealing by resistance welding of an object to be welded in vacuum.

  In the case of a piezoelectric device such as a crystal resonator, a piezoelectric resonator, a piezoelectric oscillator, a surface acoustic wave (SAW) device, or an electronic device including these devices, since the vibration portion is included in the package, the operating characteristics are improved. In order to achieve this, efforts have been made to evacuate the inside of the package. Recently, high power LEDs, infrared sensors, and the like are increasingly required to be sealed in a high vacuum in order to obtain a vacuum heat insulating effect and to improve performance.

  As a conventional resistance welding apparatus that resistance welds a workpiece in vacuum and vacuum seals it, a small sealed space surrounding the workpiece is formed around the welding electrode during resistance welding and the sealed space is evacuated. A resistance welding apparatus that resistance welds an object to be welded has been proposed (see, for example, Patent Document 1). According to the resistance welding apparatus disclosed in Patent Document 1, one of the two chamber members forming the vacuum chamber is supported by the upper welding electrode, and the other chamber member is mechanically coupled to the lower welding electrode. Yes. Therefore, in order to set a workpiece to be welded between the upper and lower welding electrodes, when the upper welding electrode is raised, one chamber member is also raised together, and when the upper welding electrode is lowered, one chamber member is also lowered. To do. When the upper welding electrode is lowered to a certain position, the two chamber members form a vacuum chamber.

  Since the resistance welding device described in Patent Document 1 has such a structure, the upper welding electrode and the one chamber member move up and down each time resistance welding of one workpiece is performed. Every time one workpiece is welded, it takes time to change the vacuum chamber from atmospheric pressure to vacuum, and it is difficult to increase the vacuum. There is a problem that it takes time to obtain a predetermined degree of vacuum and it is difficult to increase production efficiency.

  In addition, since the upper welding electrode and one chamber member move together, and only the upper welding electrode moves during welding, an attempt is made to improve the sealing between the upper welding electrode and one chamber member. The maintenance is difficult because excessive pressure is applied to the sealing member of one chamber member and the other chamber member. Furthermore, since the two chamber members are coupled with a certain amount of pressure for each welding, there is also a problem that the degree of vacuum is reduced because the coupling portion is easily affected by the pressure and dirt. This further increased maintenance. In addition, this may adversely affect the welding result.

  In addition, as a welding apparatus similar to the structure of the resistance welding apparatus described in Patent Document 1, a small sealed space is formed that surrounds an object to be welded during resistance welding, and the sealed space is filled with an inert gas. Resistance welding apparatuses for welding have already been proposed (see, for example, Patent Documents 2 to 4). The resistance welding apparatus described in Patent Document 2 to Patent Document 4 is also almost the same as the resistance welding apparatus described in Patent Document 1, although there is a difference in whether the chamber is evacuated or filled with an inert gas. There was a problem.

  A seam joining device that solves a part of the problems of the resistance welding device described above has already been disclosed (see, for example, Patent Document 5). This bonding apparatus includes a roller electrode for seam bonding in a vacuum chamber, and drives the roller electrode in a state where the vacuum chamber is in a vacuum state to bond a lid to the package for vacuum-tight sealing. In this bonding apparatus, a vacuum chamber with a high degree of sealing can be used, so that a high degree of vacuum can be obtained. However, each time one package and a lid are bonded, the vacuum chamber is opened and closed to form one package. Since the operation of transferring the lid to the vacuum chamber and making it a high vacuum again is repeated, there is a problem that the production efficiency is very low.

Japanese Utility Model Publication No. 51-85028 JP 62-263877 A JP-A-6-226453 JP-A-7-136770 JP 2009-147097 A

  The problem to be solved by the present invention is that when welding is performed in a vacuum chamber, conventionally, one workpiece is transferred from the outside of the vacuum chamber into the vacuum chamber, and the vacuum chamber reaches a predetermined degree of vacuum. When a predetermined vacuum level is reached, the welding function is activated and welding is performed to perform vacuum hermetic sealing, and then the vacuum chamber is opened to form a single hermetic seal. The operation is to repeat the operation of taking out the device and transferring another workpiece to be welded into the vacuum chamber. Accordingly, every time one workpiece is welded, it is difficult to further improve the welding efficiency because vacuuming must be performed from atmospheric pressure to a predetermined vacuum level.

  In order to solve the conventional problems, the present invention collectively loads a plurality of workpieces from the outside of a vacuum chamber section where resistance welding is performed, into the vacuum chamber section, and sequentially, We propose a specific means to realize this premise on the premise that the plurality of hermetic sealing devices are collectively transported out of the vacuum chamber after resistance welding of the workpiece to be welded and vacuum hermetic sealing. Is.

  The present invention includes an electrode unit that can place an object to be welded, moves up and down independently of each other, and has a plurality of lower electrode tips that contact the lower welding electrode during welding. A plurality of objects to be welded are placed on the electrode unit in advance outside the vacuum chamber part where resistance welding is performed, and the electrode units are mounted on a support member in the vacuum chamber part, and a plurality of objects to be welded are collectively collected. Transfer into the vacuum chamber. When the inside of the vacuum chamber reaches a predetermined degree of vacuum, the electrode member is intermittently moved by a predetermined distance by moving the support member intermittently, and the lower electrode tip and the workpiece to be welded are sequentially moved upward. It transfers between a welding electrode and a lower welding electrode, performs resistance welding, and is vacuum-tightly sealed. After all of the plurality of objects to be welded in the vacuum chamber are resistance-welded, the hermetic sealing device resistance-welded in vacuum is collectively carried out of the vacuum chamber while being placed on the electrode unit. Then, the operation | movement of transferring the electrode unit which mounted several new to-be-welded object into a vacuum chamber part is repeated.

  According to the first invention, a plurality of workpieces are placed on the electrode unit and transferred collectively into the vacuum chamber, and the workpieces are sequentially resistance welded while being placed on the electrode unit. Since the hermetic sealing device, which is hermetically sealed in vacuum at once, is carried out from inside the vacuum chamber after welding the workpieces, the welding is continuously performed in vacuum without returning the inside of the vacuum chamber to atmospheric pressure. The objects can be welded sequentially, the time required for evacuation of one workpiece can be shortened, the welding efficiency is improved, and the inside of the vacuum chamber can be easily made high vacuum, An even higher quality hermetic sealing device can be obtained.

  According to the second invention, while resistance welding is performed in the vacuum chamber portion, the electrode unit on which a plurality of workpieces are placed in advance is placed on standby outside or inside the vacuum chamber portion, and is used for switching. By simply switching the unit, the electrode unit on which the welded hermetic sealing device is placed can be switched immediately and the resistance welding can be started. Therefore, during welding in the vacuum chamber, the hermetic sealing device welded to the standby electrode unit and the workpiece to be welded can be replaced, so that the welding efficiency can be further improved.

  According to the third invention, the lower electrode tip can be easily replaced when the work piece is positioned at a predetermined position of the electrode unit and becomes dirty or worn during welding. In addition, since the upper electrode tip is overlaid on each work piece, the upper electrode tip and the lower electrode tip are lowered by lowering the upper welding electrode or raising the lower welding electrode in the vacuum chamber. The position detection mechanism and the position control mechanism are not necessary because it is not necessary to have a function of specially aligning the work piece with the upper welding electrode. Therefore, the resistance welding mechanism can be simplified, not only can the resistance welding mechanism be miniaturized and the economy can be improved, but also the vacuum chamber portion is not provided with them, so the internal volume of the vacuum chamber portion can be reduced, and the The time required for evacuation can be shortened, leading to further improvement in welding efficiency.

  According to the fourth aspect of the present invention, when a workpiece is resistance-welded and vacuum-tight sealed, a current different from the welding current can be supplied to some of the plurality of external terminals of the workpiece at the same time. Thus, an airtight sealing device having excellent vacuum characteristics of the sealing space can be obtained. Further, the external terminal to be energized can be used for further vacuuming of the hermetic sealing device, various measurements, detections, and the like. Furthermore, since the support member and the electrode unit are moved together in the vacuum chamber, electrical connection and disconnection between the support member and the electrode unit can be easily performed. The electrical connection structure for making it possible can be simplified.

  According to the fifth invention, a plurality of workpieces are placed on the electrode unit and transferred collectively into the vacuum chamber, and the workpieces are sequentially resistance-welded while being placed on the electrode unit. When the workpieces are welded, the hermetic sealing device that is hermetically sealed in a vacuum is carried out from the vacuum chamber. Therefore, the number of evacuations can be reduced and the overall evacuation time can be shortened. Efficiency can be improved.

  According to the sixth invention, while resistance welding is performed in the vacuum chamber portion, the electrode unit on which a plurality of workpieces are placed in advance is put on standby outside or inside the vacuum chamber portion to be used as the electrode unit. Since a plurality of workpieces before welding are placed, time can be omitted and welding efficiency can be further improved.

It is drawing which shows the external appearance of the resistance welding apparatus in vacuum which concerns on Embodiment 1 of this invention. It is a figure for demonstrating the inside of the dry box part, vacuum chamber part, etc. in the resistance welding apparatus in vacuum which concerns on Embodiment 1 of this invention seeing from the top. It is a figure for demonstrating seeing the inside of a dry box part, a vacuum chamber part, etc. in the resistance welding apparatus in vacuum concerning Embodiment 1 of this invention from a side surface. It is the figure which looked at an example of the electrode unit used with the resistance welding apparatus in vacuum which concerns on Embodiment 1 of this invention from the top. It is a figure which shows the side surface of a part of electrode unit shown in FIG. 4 in a vacuum chamber part. The example of the to-be-welded object vacuum-tightly sealed with the resistance welding apparatus which concerns on this invention is shown. It is the figure which looked at an example of the electrode unit used with the resistance welding apparatus in vacuum which concerns on Embodiment 2 of this invention from the top. It is a figure which shows the side surface of a part of electrode units etc. in the vacuum chamber part of the resistance welding apparatus in vacuum which concerns on Embodiment 2 of this invention.

[Embodiment 1]
First, the outline of the resistance welding apparatus in vacuum according to the first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, the main part according to the present invention viewed from the appearance of this vacuum resistance welding apparatus is adjacent to the dry box part 1 filled with dry nitrogen gas, and the back side of the paper surface of the dry box part 1. The vacuum baking part 3 (shown by a broken line), the vacuum chamber part 5 disposed adjacent to the right side of the dry box part 1 and subjected to resistance welding, and the vacuum chamber part 5 can be made high vacuum in a short time. As shown in the vacuum pump mechanism 7 (shown by a broken line), FIG. 3 and the like, the resistance welding mechanism 9 in which the upper welding electrode and the lower welding electrode are housed in the vacuum chamber 5, operations for performing various operations The panel unit 11 and the pass box 13 coupled to the dry box unit 1 are included. Since the vacuum baking part 3 is a general thing, it does not explain in particular, However, It can carry in to the dry box part 1 without exposing the to-be-fired to-be-welded object to air | atmosphere.

  Although not shown, the dry box unit 1 is connected to a gas supply mechanism that supplies dry nitrogen gas. The dry box unit 1 has three operation windows 1A to 1C on the surface thereof, and an operator can perform necessary operations in the dry box unit 1 by inserting his / her arms through the operation windows 1A to 1C. At this time, the dry box part 1 has a structure that can be isolated from the atmosphere. Since this isolation structure may be general, the description thereof is omitted. The inside of the dry box unit 1 and the vacuum chamber unit 5 will be described in detail later. As shown in FIG. 2, the tray T on which the workpiece is placed is carried into the dry box unit 1, or the tray T on which the airtight sealing device is mounted is carried out to the outside.

The vacuum pump mechanism 7 has a scroll pump, a turbo molecular pump, a suction passage, and various valves (not shown in detail) so that the inside of the vacuum chamber 5 can be made high vacuum (1 × 10 ⁻³ Pa or less) in a short time. It consists of a control unit. The vacuum chamber portion 5 is rapidly roughed by a scroll pump, and the vacuum chamber portion 5 is maintained at a predetermined high vacuum level by a turbo molecular pump. Of course, the vacuum pump mechanism 7 may have another structure.

  The resistance welding mechanism 9 includes a welding drive mechanism 9A, a coupling member 9B, a support mechanism 9C, and the like in addition to a power supply unit (not shown) configured by a rectification unit that converts AC power into DC power, a capacitor unit, a welding transformer, and the like. Is provided. The welding drive mechanism 9A can move the upper welding electrode 9D positioned in the vacuum chamber portion 5 shown in FIGS. 3 and 5 up and down, and can apply a predetermined pressure to the upper welding electrode 9D. . The coupling member 9B couples the welding drive mechanism 9A and the upper welding electrode 9D. The support mechanism 9C supports the welding drive mechanism 9A, the coupling member 9B, and the like. The welding drive mechanism 9A is composed of, for example, a hydraulic cylinder, a pneumatic cylinder, or a combination of these, and moves the upper welding electrode 9D up and down at a high speed and does not give mechanical impact to the workpiece. Is configured to do.

  Although not shown, the coupling mechanism 9 </ b> B is supported by a sealing structure that can move up and down while maintaining the airtightness of the vacuum chamber 5. The resistance welding mechanism 9 is preferably a capacitor type resistance welding machine that discharges electric energy stored in the capacitor portion in a short time of 20 to 30 ms or less. However, depending on the magnitude of the welding current, commercial power may be supplied by an inverter device or the like. The thing of the structure to control may be used. In the first embodiment, the upper welding electrode 9D is moved up and down. However, the lower welding electrode 9E may be moved up and down.

  Next, before describing the electrode unit with reference to FIGS. 4 and 5, the workpiece to be mounted placed on the electrode unit will be described. An example of a workpiece to be hermetically sealed by the resistance welding apparatus according to Embodiment 1 of the present invention will be described with reference to FIG. A workpiece to be welded W shown in FIG. 6A is a general one, and a first element S on which a crystal resonator or a piezoelectric device or an electronic device including these and a semiconductor element is mounted is mounted. It consists of a work piece W1 and a second work piece W2 that is resistance-welded to the first work piece W1 to form a sealed space.

  The first workpiece W1 and the second workpiece W2 are not only shown in the figure, but also have a structure that allows a welding current to flow therethrough, and a pressure is applied almost evenly to the resistance welding portion. And if it has an annular resistance welding part which can concentrate a welding current uniformly and on a resistance welding part, it will not be limited to a shape. For example, an element or device may be mounted on an electrically insulating substrate in a short cylindrical metal case, and a sealed structure may be formed with a flat lid. The first workpiece W1 shown in FIG. 6A has a plurality of lead terminals as external terminals L. The external terminals L are electrically insulated from the base portion of the first workpiece W1. Of course, the electrode terminal may be a flat electrode terminal formed on the outer surface, and is not limited to the shape of the external terminal.

  As shown in FIG. 2, first, the tray T on which the workpiece W in which the second workpiece W2 is superposed on the first workpiece W1 having such a structure is loaded into the pass box 13. After the pass box 13 is filled with the dry nitrogen gas, the tray T is transferred from the pass box 13 into the dry box unit 1 filled with the dry nitrogen gas, and waits in the dry box unit 1. In the baking part 3, after the workpiece W on the preceding tray T has been baked for a predetermined time, when the tray T is returned into the dry box part 1 without being exposed to the atmosphere, it waits instead. The tray T is transferred to the baking unit 3. Of course, a structure in which the pass box 13 is provided adjacent to the baking unit 3 and the tray T is conveyed from the atmosphere to the baking unit 3 through the pass box 13 may be used. Although various structures are conceivable, any may be used.

  In this embodiment, an electrode unit 15 having a structure as shown in FIGS. 4 and 5 stands by on the switching unit 17 in the dry box unit 1. First, the electrode unit 15 will be described. As shown in FIG. 4, in this embodiment, 15 lower electrode tips 15A having the same configuration on which 15 workpieces W can be respectively placed are arranged in a line. ing. The fifteen lower electrode chips 15A are aligned in the left-right direction in FIG. 4, and are aligned in the front-back direction of the paper surface in FIG. The fifteen lower electrode tips 15A are separated from each other by a predetermined interval so that they can move up and down without affecting others. Common support portions 15B extend on both sides of each lower electrode chip 15A, and these lower electrode chips 15A are supported by the common support portion 15B. Each common support portion 15B is provided with two pins 15C extending to and fixed to each lower electrode chip 15A.

  As shown in FIG. 5, the common support portion 15B supports the pin 15C so that the pin 15C can move up and down, and a spring 15E such as a coil spring is provided between the head portion 15D and the common support portion 15B. Is provided. When pressure is applied to the lower electrode tip 15A from above, the spring 15E is compressed to lower the lower electrode tip 15A, and when the applied pressure is removed, the spring 15E exhibits an elastic force that raises it to the original position again. Accordingly, the 15 lower electrode tips 15A are elastically mechanically coupled to the common support portion 15B by the two pins 15C and the springs 15E, and all the lower electrode tips 15A are moved up and down independently. It is supported by the common support part 15B so that it can do. Further, two positioning pins 15F extending perpendicularly to the upper surface of each lower electrode chip 15A are provided. The positioning pin 15F positions the upper electrode tip 15G when the upper electrode tip 15G is placed on the workpiece W after the workpiece W is transferred from the tray T to each lower electrode tip 15A in the dry box portion 1. In addition, the upper electrode tip 15G is easily placed on the workpiece W by guiding. It is sufficient that two or more positioning pins 15F are provided in each lower electrode chip 15A.

  Here, as described above, the upper electrode tip 15G is placed on the workpiece W placed on each lower electrode tip 15A because the workpiece W placed on the lower electrode tip 15A does not move. As shown in FIG. 5, the upper welding electrode 9D is appropriately brought into contact with the upper electrode tip 15G without providing a position detection mechanism for detecting the position of the work piece W in the vacuum chamber 5 in particular. It is because it can be made. By doing so, the mechanism inside the vacuum chamber unit 5 is simplified, and the internal volume of the vacuum chamber unit 5 is reduced. In practice, this is not only economically advantageous, but also shortens the time for evacuation to a predetermined high vacuum. The upper electrode tip 15G has a shape suitable for the structure of the second workpiece W2 shown in FIG. 5, and an annular shape of the first workpiece W1 and the second workpiece W2. It is structured to apply pressure by directly contacting only the contact part. Preferably, it has a ring projection which contacts the annular contact part of the 1st to-be-welded object W1 and the 2nd to-be-welded object W2.

  However, when the vacuum chamber portion 5 has a mechanism capable of intermittently driving the electrode unit 15 while positioning the workpiece W with high accuracy with respect to the upper welding electrode 9D, the upper welding electrode 9D is the upper electrode. An electrode tip having a structure similar to that of the tip 15G is integrated with the tip surface of the upper welding electrode 9D, and the position of the workpiece W is detected and the upper welding electrode 9D is directly welded while performing positioning. A pressing force may be applied to the object W. In this case, the positioning pin 15F and the upper electrode tip 15G are not necessary, and the trouble of placing the upper electrode tip 15G on the workpiece W can be saved. Note that the number of the lower electrode tips 15A of the electrode unit 15 is not limited to 15, but may be any number of two or more determined by the economics and welding efficiency of the welding apparatus.

  Returning to the description of the dry box unit 1, the electrode unit 15 having the above-described structure is located on the switching unit 17 in the dry box unit 1, and in this state, each lower electrode chip of the electrode unit 15 from the tray T. The workpiece W is transferred to 15A, and the upper electrode tip 15G is mounted thereon. Accordingly, since the workpiece W and the upper electrode tip 15G are mounted on the standby electrode unit 15, the electrode chamber 15 on which the workpiece W and the upper electrode tip 15G are already mounted is always immediately attached to the vacuum chamber 5. Therefore, it is not necessary to consider the time for mounting the workpiece W and the upper electrode tip 15G on the electrode unit 15 in the entire welding time.

  Although the switching unit 17 is not shown in detail, in FIG. 2, a pair of switching support members 17B and 17C are fixed on a support base 17A that slides in the vertical direction, that is, in a direction perpendicular to the conveying direction of the electrode unit 15. Has been. The switching support members 17B and 17C are switched by the sliding operation of the switching unit 17. The switching support members 17B and 17C are used when the electrode unit 15 is transferred from the dry box unit 1 into the vacuum chamber unit 5 or when the electrode unit 15 is carried out from the vacuum chamber unit 5 into the dry box unit 1. It serves to temporarily guide the unit 15 and to support the electrode unit 15. The electrode unit 15 stands by on one switching support member 17B, the other switching support member 17C is empty, and an electrode unit carried out from the inside of the vacuum chamber portion 5 described later becomes an empty switching support member 17C. Installed.

  When the electrode unit 15 is a single unit, that is, only in the dry box unit 1 or the vacuum chamber unit 5, the switching unit 17 is not necessary. In this case, the support member in the dry box unit 1 is one and may be fixed, or depending on the opening / closing mechanism of the opening / closing member 5A of the vacuum chamber unit 5, the opening / closing operation of the opening / closing member 5A is affected. The structure may be slidable in the left-right direction (movement direction of the electrode unit 15) or the vertical direction (direction perpendicular to the movement direction of the electrode unit 15 and the left-right direction) in FIG. Further, the switching unit 17 may include another switching support member in addition to the pair of switching support members 17B and 17C.

  Next, the inside of the vacuum chamber 5 will be described with reference to FIGS. A movable support member 19 is provided in the vacuum chamber section 5. The support member 19 can move from the inside and outside in the vicinity of the entrance / exit 5 </ b> B opened and closed by the opening / closing member 5 </ b> A to a predetermined position in the vacuum chamber 5. The support member 19 moves the electrode unit 15 when the electrode unit 15 is transferred from the dry box unit 1 to the vacuum chamber unit 5 or when the electrode unit 15 is transferred from the vacuum chamber unit 5 to the dry box unit 1. The role of temporarily guiding and the role of supporting the electrode unit 15 are performed. The support member 19 preferably has a small and light structure.

  When the electrode unit 15 is transferred from the switching support member 17 </ b> B in the dry box unit 1 to the support member 19 in the vacuum chamber unit 5, the drive mechanism 21 operates to evacuate the electrode unit 15 together with the support member 19. The opening / closing member 5A closes the entrance / exit 5B, and the vacuum pump mechanism 7 also starts operating to start evacuation in the vacuum chamber 5 while moving to the right in the chamber portion 5. The drive mechanism 21 for moving the support member 19 to the left and right in FIGS. 2 and 3 is roughly divided into an external drive unit 21A composed of a servo motor or the like disposed outside the vacuum chamber unit 5 and the like. 3 and the internal drive part 21B driven in the left-right direction. The internal drive unit 21B includes, for example, a ball screw that rotates intermittently at a constant angle by the external drive unit 21A, and a drive member 21b that moves to the right or left in FIGS. 2 and 3 depending on the rotation direction of the ball screw. The support member 19 fixed to the drive member 21b is intermittently driven, and the electrode unit 15 is moved intermittently together. The support member 19 is supported by the internal drive unit 21B or fixed to the internal drive unit 21B.

  The support member 19 and the electrode unit 15 mounted on the support member 19 are temporarily stopped at a predetermined position in FIG. This stop position is such that the lower electrode tip 15F located on the rightmost side of the electrode unit 15 shown in FIG. 4 and the center of the workpiece W to be first resistance welded are coaxially aligned with each other in the vertical direction. Is preferably on the line connecting the center of the upper welding electrode 9D and the center of the lower welding electrode 9E, that is, at the welding position. When the inside of the vacuum chamber 5 reaches a predetermined degree of vacuum, the resistance welding mechanism 9 operates, and the upper welding electrode 9D is lowered by the welding driving mechanism 9A, and the upper welding electrode 9D comes into contact with the upper electrode tip 15G and is added. Press. At least these operations in the vacuum chamber section 5 are automatically performed according to programming by a controller (not shown).

  With the applied pressure, as shown in FIG. 5B, the spring 15E contracts, the lower electrode tip 15A is lowered, and the lower surface thereof is pressed against the upper surface of the lower welding electrode 9E. In this state, the power source (not shown) is energized between the upper welding electrode 9D and the lower welding electrode 9E, and a pulsed welding current having a predetermined peak value is passed through the lower electrode tip 15A and the upper electrode tip 15G. Then, it flowed to the resistance welded portion which is a contact portion between the first workpiece W1 and the second workpiece W2, and the resistance welded portion was welded in a short period of time, and hermetic sealing was performed in a high vacuum state. An airtight sealing device is obtained. Immediately thereafter, the resistance welding mechanism 9 operates, and the upper welding electrode 9D is raised to the original position by the welding drive mechanism 9A.

  Next, with the vacuum chamber 5 kept at a predetermined degree of vacuum, the drive mechanism 21 is operated again, and the support member 19 and the electrode unit 15 placed thereon are moved to the right in FIG. Move in the direction. By this movement, the lower electrode tip 15A positioned second from the right side and the workpiece W placed thereon are positioned at a welding position between the upper welding electrode 9D and the lower welding electrode 9E. Again, the resistance welding mechanism 9 operates to lower the upper welding electrode 9D, the upper welding electrode 9D applies pressure to the workpiece W through the upper electrode tip 15G, and energizes to resistance weld the workpiece W. .

  The resistance welding described above is performed 15 times in a state where the inside of the vacuum chamber 5 is maintained at a predetermined degree of vacuum, whereby all the workpieces W are hermetically sealed in a high vacuum, and the workpieces placed on the electrode unit 15 are sealed. All the weldments W become hermetic sealing devices. Thereafter, dry nitrogen is supplied into the vacuum chamber 5 to make the inside of the vacuum chamber 5 substantially equal to the atmospheric pressure, and then the opening / closing member 5A opens the entrance / exit 5B. At substantially the same time, the drive mechanism 21 starts to move, and the support member 19 and the electrode unit 15 are moved to the left in FIGS. 2 and 3 to move to the entrance / exit 5B. Unload. Thereby, 15 airtight sealing devices are taken out from the vacuum chamber part 5 collectively.

  In the dry box unit 1, the electrode unit 15 taken out from the vacuum chamber unit 5 is placed on an empty switching support member 17 </ b> C of the switching unit 17. Next, the switching unit 17 is slid so that the switching support member 17B on which the electrode unit 15 on which the workpiece W is placed is fitted with the support member 19 in the vacuum chamber 5. The switching support member 17B stops at the alignment position, that is, the switching support member 17B and the support member 19 are aligned in a straight line and the heights are equal to each other. The electrode unit 15 is transferred from the switching support member 17 </ b> B to the support member 19 and is transported into the vacuum chamber 5. At this time, the switching support member 17B and the support member 19 are interrupted at the entrance / exit 5B and have a gap, but the gap does not cause a problem in the transfer of the electrode unit 15. On the other hand, fifteen hermetic sealing devices are transferred to the tray T from the electrode unit 15 placed on the switching support member 17 </ b> C in the dry gas box unit 1. As described above, the present invention has a specific configuration in which a plurality of objects to be welded can be sequentially resistance-welded once the inside of the vacuum chamber is evacuated to high vacuum.

[Embodiment 2]
Next, a second resistance welding apparatus in vacuum suitable for welding the workpiece W shown in FIG. 6B will be described. This work W has a pair of external terminals L indicated by a part of a plurality of external terminals, for example, thick terminals. These external terminals L perform a role of flowing a current between the external terminals L to increase the degree of vacuum or performing various measurements or detections. This vacuum resistance welding apparatus is different from the first embodiment in that it has a structure in which a current different from the welding current can be applied to the external terminal L during welding. The appearance of this vacuum resistance welding apparatus is the same as that in FIG. 1, and the dry box part 1, the vacuum baking part 3 (shown by broken lines), the vacuum chamber part 5, the vacuum pump mechanism 7, the resistance welding mechanism 9, and various operations are performed. The operation panel unit 11 and the pass box 13 for performing are the same as those described above. Since parts of the electrode unit 15 and the support member 19 are different from those of the first embodiment, the different parts will be mainly described.

  In the second embodiment, as shown in FIG. 7, the support member 19 in the vacuum chamber portion 5 includes a connector portion 19A at the rear end portion (right side in FIG. 7). The connector portion 19A is connected to a power source portion made up of an AC power source or a DC power source (not shown) by a flexible conductive wire 19B. As shown in FIG. 3, the connector portion 19 </ b> A naturally moves together when the support member 19 is moved by the drive mechanism 21. The tip of the electrode unit 15 (the right side in FIG. 7) is a pair of connections composed of two copper plates with good electrical conductivity that are electrically insulated from each other, or a connector that can be easily attached to and detached from the connector part 19A. Part 15H. The pair of connection portions 15H are mechanically supported by the pair of common support portions 15B. Note that the common support portion 15B may be a frame body formed of four-side frame members. When the common support portion 15B is a frame, a pair of connection portions 15H are provided on the front surface thereof.

  When the electrode unit 15 is pushed into the support member 19 in the vicinity of the entrance / exit 5B of the vacuum chamber portion 5 toward the right side in FIG. 3, the pair of connection portions 15H of the electrode unit 15 are easily connected to the connector portion 19A, When the unit 15 is pulled out to the left in FIG. 3, the connecting portion 15H can be easily disconnected from the connector portion 19A. As described above, since the connection portion 15H and the connector portion 19A can be easily connected or disconnected, the electrode unit 15 is drawn out from the vacuum chamber portion 5 or in the vacuum chamber portion 5. When carrying in, the connection part 15H and the connector part 19A can be connected and disconnected without any special operation.

  As shown in FIG. 8, the center of each lower electrode chip 15A in the electrode unit 15 is filled with an electrically insulating material 15a, and a pair of conductive contact pins 15I are surrounded and fixed by the electrically insulating material 15a. The lower electrode chip 15A is electrically insulated. In FIG. 8, the conductive contact pin 15I has a structure having an elastic force in the vertical direction as an example. When the external terminal L of the workpiece W is pushed in, the electrical contact between the external terminal L and the conductive contact pin 15I is shown. Secure contact. At the stage where the workpiece W is placed on the lower electrode tip 15A, the external terminal L contacts the conductive contact pin 15I. When an upper electrode tip 15G similar to that used in Embodiment 1 is placed on the workpiece W, the electrical contact between the external terminal L and the conductive contact pin 15I is ensured by the weight of the upper electrode tip 15G. It will be something. When the upper electrode tip 15G is omitted, the workpiece W is pressed downward when the workpiece W is placed on the lower electrode tip 15A, or the upper welding electrode 9D is pressed by a force that pressurizes the workpiece W. The electrical contact between the external terminal L and the conductive contact pin 15I may be ensured. The contact structure between the external terminal L and the conductive contact pin 15I is not particularly limited.

  The pair of conductive members 15J has their tips connected to the conductive contact pins 15I. The conductive member 15J extends in the lateral direction by surrounding the lower electrode chip 15A with an electrical insulating material, and electrical insulation from the lower electrode chip 15A is ensured. The pair of conductive members 15J are connected to the respective conductive pins 15L by respective flexible conductive wires 15K. Therefore, when the lower electrode tip 15A moves up and down, the conductive member 15J moves up and down together with the conductive contact pin 15I without any problem due to the flexibility of the conductive wire 15K. Each conductive pin 15L is fixed to the common support portion 15B of the electrode unit 15 through the electrical insulating portion 15M. The pair of conductive pins 15L of each lower electrode chip 15A are connected in parallel to each other by a conductive wire (not shown). Therefore, the pair of conductive contact pins 15I provided in the central cavity portion 15a of all the lower electrode chips 15A are connected in parallel to the pair of connection portions 15H of the electrode unit 15.

  In the second embodiment, before resistance welding is performed in the vacuum chamber portion 5, power is supplied from a power supply portion (not shown) to the connection portion 15 </ b> H of the electrode unit 15 for a predetermined time, and through the external terminals L of all the workpieces W to be welded. A current is passed through the work piece W. After the energization is completed, the upper welding electrode 9D is lowered, and resistance welding is sequentially performed as described above, and the workpiece W is sealed in a vacuum. This energization improves characteristics such as the degree of vacuum of the workpiece before being hermetically sealed in vacuum. Further, the external terminal L can be used as a terminal for measuring various characteristics of the hermetic sealing device or a detection terminal. In addition, the energization to the external terminal L of the work piece W may be performed after resistance welding of the work piece W depending on the purpose of energization, or when the external terminal L of the work piece W is energized, Resistance welding may be performed. Further, depending on the purpose of energization, the energization may be performed outside the vacuum chamber section 5.

[Embodiment 3]
In the first and second embodiments described above, only one electrode unit is carried into the vacuum chamber at the same time, but a plurality of electrode units are carried into the vacuum chamber at the same time and maintained at a predetermined high vacuum level. Then, after all the workpieces placed on the electrode units are hermetically sealed, an example in which they are carried out from the vacuum chamber will be described. Although the vacuum chamber portion becomes large, more workpieces can be continuously hermetically sealed in the vacuum chamber portion maintained at a predetermined high degree of vacuum. This will be described with reference to FIGS.

  A switching unit that can be switched in the same manner as the switching unit 17 shown in FIG. 2 is provided in the dry box unit 1 and the vacuum chamber unit 5. The first switching unit installed in the dry box unit 1, that is, outside the vacuum chamber unit 5, has five first switching units on which any number of switching support members, for example, the electrode units 15 described above can be mounted. A switching support member or a fifth switching support member is provided in parallel. These switching support members are all fixed to the support base of the first switching unit at a predetermined interval, and the switching support members are switched one by one by sliding the support base of the first switching unit. It has become. Similarly, the second switching unit disposed in the vacuum chamber section 5 includes five first support members or fifth switching units on which the same number of electrode units 15 as the first switching unit can be respectively mounted. Support members are provided in parallel on the support table at predetermined intervals. The first to fifth support members may have the same structure as the support member 19 described above. The second switching unit is also configured so that the support members are switched one by one by sliding the support base.

  In one example, the first switching unit described above is installed in the dry box unit 1 in the vicinity of the entrance / exit 5B (FIG. 3) of the vacuum chamber unit 5, and the second switching unit is installed inside the vacuum chamber unit 5. It is assumed that it is mounted on the drive member 21b of the drive mechanism 21B. The first switching unit slides in the horizontal direction in a direction perpendicular to the direction in which the electrode unit 15 moves, so that each switching support member of the first switching unit is supported by the second switching unit support member. Can be aligned to match sequentially. The second switching unit in the vacuum chamber section 5 is slidably supported by the drive member 21b of the internal drive mechanism 21B of the drive mechanism 21 shown in FIG.

  The switching drive mechanism for switching the second switching unit is arranged outside the vacuum chamber portion 5 corresponding to the position where the switching operation of the second switching unit is performed, and the second switching unit is switched. Selectively coupled to the drive mechanism. When the switching drive mechanism is activated, the second switching unit is mounted on the drive member 21b of the internal drive mechanism 21B and slides in a direction perpendicular to the direction in which the electrode unit 15 moves in the horizontal direction. The first support member to the fifth support member are sequentially switched one by one. Therefore, the 1st support member thru / or the 5th support member in the 2nd unit for change can be moved to the right-and-left direction of Drawing 2 and Drawing 3 by drive mechanism 21 like Embodiments 1 and 2, In addition, it can slide in a direction perpendicular to the drive direction of the internal drive mechanism 21B.

  The operation of the apparatus according to the third embodiment will be described. First, each of the first switching support member to the fifth switching support member of the first switching unit installed in the dry box unit 1 is to be welded. The electrode unit 15 on which W is previously mounted is mounted. Next, the first switching support member is aligned by the first switching unit according to the first support member of the second switching unit stopped in the vicinity of the entrance / exit 5B in the vacuum chamber section 5, The electrode unit 15 mounted on one switching support member is transferred to the first support member.

  Next, the first switching unit is switched to switch from the first switching support member to the second switching support member. On the other hand, the second switching unit in the vacuum chamber section 5 is switched to switch from the first support member to the second support member. When both switching units perform such a switching operation, the corresponding switching support member and the support member are aligned so that they match, and the electrode unit 15 on the switching support member in the dry box unit 1 is connected to the vacuum chamber unit. 5 are sequentially transferred onto the support member in the body 5. By repeating such switching operation and transfer operation, all the electrode units 15 in the dry box unit 1 are carried into the vacuum chamber unit 5. If these operations are performed manually through the entrance / exit 5B, only one switching drive mechanism is required, which is economical.

  When the loading of the electrode unit 15 is completed, the opening / closing member 5A of the vacuum chamber section 5 closes the entrance / exit 5B, and evacuation starts. During the time until the inside of the vacuum chamber 5 reaches a predetermined high vacuum level, the driving mechanism 21 performs a driving operation, and all the electrode units and supporting members thereon are put together with the second switching unit. As described above, it is moved to the right in FIG. 3 and stopped at the predetermined position described in the first embodiment. Next, the switching drive mechanism is operated, the switching drive mechanism is coupled to the second switching unit, and the first support member or the fifth support member is connected to the upper welding electrode 9D and the lower welding electrode 9E. The support base of the second switching unit is slid on the drive member 21b of the internal drive mechanism 21B so as to be positioned on the extension of the welding position between them. In the above description, the electrode unit is finally mounted on the fifth support member, and in this state, the second switching unit is moved in the right direction in FIG. 3, so that the fifth support member extends the welding position. Often located above. In this case, the switching drive mechanism may perform the switching operation from the time of switching the fifth support member to the fourth support member. When the switching of the second switching unit is completed, the switching drive mechanism once releases the mechanical coupling with the second switching unit.

  Next, the drive mechanism 21 operates to intermittently move the fifth support member from the first support member on the second switching unit to the right side of FIG. 3 as described above. When the fifth support member is positioned on the extension of the welding position, the drive mechanism 21 sequentially welds the workpiece W mounted on the electrode unit mounted on the fifth support member to the upper weld. The welding is intermittently transferred to the welding position between the electrode 9D and the lower welding electrode 9E, and resistance welding is sequentially performed as described above. When all 15 workpieces W placed on the electrode unit are hermetically sealed, all the supporting members on the second switching unit are returned to their original positions by the drive mechanism 21. Next, the switching drive mechanism is operated, the switching drive mechanism is coupled to the second switching unit, and the second switching unit is slid to switch from the fifth support member to the fourth support member. . When this switching is completed, the switching drive mechanism once releases the mechanical connection with the second switching unit.

  By repeating such an operation, when the vacuum hermetic sealing of all the workpieces W mounted on the electrode unit 15 mounted on the first support member to the fifth support member is completed, the driving is performed. The mechanism 21 moves the second switching unit to a predetermined position near the entrance / exit 5 </ b> B in the vacuum chamber 5. As described above, after the inside of the vacuum chamber 5 is brought to an atmospheric pressure substantially equal to the atmospheric pressure, the entrance / exit 5B is opened, and the electrode units 15 are sequentially carried out to the dry box 1. At this time, the second switching unit performs a switching operation each time the electrode unit on each support member is transferred to the switching support member of the first switching unit, and the first switching unit performs each switching support. The switching operation is performed every time the electrode unit is mounted on the member.

  The hermetic sealing devices placed on all the electrode units 15 are transferred to the tray T, and when the workpiece W is transferred from another tray to all the emptied electrode units 15, again, The operation is repeated. In the third embodiment as well, another first switching unit is provided, and the workpiece W is placed in advance on another electrode unit placed on the switching support member, and the first switching unit is provided. When the electrode unit carried out from the vacuum chamber 5 is mounted on all the switching support members of the unit, the first switching unit may be switched to the other first switching unit. In the above description, the first and second switching units have a structure in which five electrode units 5 can be mounted. However, this is an example, and the number is not limited as long as there are a plurality of electrode units 5.

  In the embodiment described above, an example in which two or more electrode units 15 are used has been described. . In this case, a mechanism such as a switching unit is of course unnecessary, but the overall welding time is increased by the time required to transfer the workpiece W to the electrode unit 15. Note that the support member 19 in the vacuum chamber 5 is a part of the internal drive member 21 </ b> B because the drive unit 21 moves together with the electrode unit in the vacuum chamber 5. In the vacuum chamber 5, the workpiece W may be sequentially resistance welded from the left side while the electrode unit 15 is intermittently moved to the left in FIGS. 2 and 3.

  In the first and second embodiments, the switching unit 17 may be provided in the vacuum chamber portion 5 without being provided in the dry box portion 1. When the switching unit is provided in the vicinity of the entrance / exit 5B in the vacuum chamber unit 5, when the hermetic sealing device is carried out of the vacuum chamber unit 5, the electrode unit on which the hermetic sealing device is placed is first switched. It is transferred onto 17 support members. The entrance / exit 5B is opened, the switching unit 17 in the vacuum chamber unit 5 is switched, and the electrode unit on the support member outside the vacuum chamber unit 5 is first supported on one empty side in the switching unit 17 in the vacuum chamber unit 5. It transfers to the member 19 and the said supporting member outside the vacuum chamber part 5 is emptied. Thereafter, the switching unit 17 is switched again, and the electrode unit mounted with the hermetic sealing device mounted on the other support member 19 in the vacuum chamber 5 is used as an empty support member outside the vacuum chamber 5. Just transfer.

  In the above-described embodiment, the room adjacent to the vacuum chamber unit 5 is described as the dry box unit 1 and can be filled with dry nitrogen. However, the present invention is not limited to this, and the outside of the vacuum chamber unit 5 is in the atmosphere. It may be a baking part. Further, a low vacuum chamber or a pass box having a degree of vacuum lower than that of the vacuum chamber unit 5 may be provided in the front stage of the vacuum chamber unit 5 as a front chamber. In this case, since a low vacuum chamber or a pass box having a smaller internal volume than the vacuum chamber unit 5 is provided, the time required for the vacuum degree of the vacuum chamber unit 5 to reach a predetermined value can be shortened. Moreover, you may provide a pass box between each room as needed.

  It can be applied to obtain a high-performance hermetic sealing device by hermetically sealing an object to be welded having a crystal resonator or a piezoelectric device or an electronic device including these and a semiconductor element in a high vacuum.

DESCRIPTION OF SYMBOLS 1 ... Dry box part 1A-1C ... Operation window 3 ... Baking part 5 ... Vacuum chamber part 5A ... Opening / closing member 5B ... Entrance / exit 7 ... Vacuum pump mechanism 9 ... Resistance welding mechanism 9A ... Welding drive mechanism 9B ... Connecting member 9C ... Support mechanism 9D ... Upper welding electrode 9E ... Lower welding electrode 11 ... Operation panel part 13 ... Pass box 15 ... Electrode unit 15A ... Lower electrode tip 15a ... Cavity 15B ... Common support 15C ... Pin 15D ... Pin head 15E ... Spring 15F ... Positioning pin 15G ... Upper electrode tip 15H ... Connection part 15I ... Conductive contact pin 15J ... Conductive member 15K ... Conductive wire 15L ... Conductive pin 15M ... Electrical insulation part 17 ... For switching Unit 17A ... Supporting base 17B ... Switching support member 17C ... Switching support member 19 ... Supporting member 19A ... Connector part 19B ... Conductor 21 ... Drive mechanism 21A ... External drive part 21B: Internal drive unit 21b: Drive member W: Work piece W1: First work piece W2: Second work piece S: Element L: External Terminal

Claims (6)

A resistance welding apparatus that includes a lower welding electrode and an upper welding electrode in a vacuum chamber, and seals the workpiece by resistance welding in vacuum by using the lower welding electrode and the upper welding electrode,
A plurality of lower electrode tips on which the workpieces can be respectively placed, and a plurality of lower electrode tips that are elastically mechanically coupled to the plurality of lower electrode tips so that the lower electrode tips can move up and down independently of each other An electrode unit comprising a support part ;
A support member on which the electrode unit is mounted in the vacuum chamber;
A drive mechanism for intermittently moving the electrode unit together with the support member ;
With
The conveyed electrode unit is within the vacuum chamber portion, said by drive mechanism intermittently driving the electrode unit, sequentially and the weld object resting on its and the lower electrode tip, Transfer between the lower welding electrode and the upper welding electrode;
When the inside of the vacuum chamber reaches a predetermined degree of vacuum, the interval between the lower welding electrode and the upper welding electrode is narrowed, and the lower electrode tip is sandwiched between the lower welding electrode and the upper welding electrode Is lowered or raised, the workpiece and the lower electrode tip are pressurized by the upper welding electrode and the lower welding electrode,
In a state where the object to be welded and the lower electrode tip are sandwiched and pressed between the lower welding electrode and the upper welding electrode, energization is performed between the lower welding electrode and the upper welding electrode. By passing a welding current through the workpiece, the workpiece is resistance welded and vacuum-tight sealed,
When the workpiece is resistance-welded, the gap between the lower welding electrode and the upper welding electrode is widened, and the drive mechanism drives the electrode unit intermittently again, and the next workpiece to be welded is Each time the inside of the vacuum chamber is maintained at a predetermined degree of vacuum by transferring between the lower welding electrode and the upper welding electrode, and similarly performing resistance-welding and vacuum-tight sealing the workpiece. A resistance welding apparatus in vacuum, wherein the plurality of workpieces are resistance-welded and vacuum-tightly sealed. In claim 1,
In the case where a plurality of the electrode units are provided, a switching unit in which the electrode unit in a standby state before welding in which the workpiece to be welded before being placed is placed inside or outside the vacuum chamber portion is provided,
The resistance in vacuum characterized in that the electrode unit on which the resistance-welded workpiece is mounted is switched to the standby electrode unit before welding by the switching unit outside or inside the vacuum chamber section. Welding equipment. In claim 1 or claim 2,
After placing the object to be welded to the lower electrode tip of the electrode unit, placing the upper electrode chip to the object to be welded,
When the gap between the lower welding electrode and the upper welding electrode is narrowed, the lower electrode tip sandwiched between the lower welding electrode and the upper welding electrode is lowered or raised, whereby the upper welding electrode Is in contact with the upper electrode tip, the lower welding electrode is in contact with the lower electrode tip, and the welding current flowing between the lower welding electrode and the upper welding electrode is the lower electrode tip and the upper electrode tip A resistance welding apparatus in vacuum characterized by flowing through the workpiece through the vacuum. In any one of Claims 1 thru | or 3,
The workpiece is provided with a plurality of external terminals,
The electrode unit includes a plurality of conductive contact pins, and a current path for energizing the conductive contact pins,
When an interval between the upper welding electrode and the lower welding electrode is narrowed, any of the plurality of external terminals among the external terminals of the workpiece is in contact with the conductive contact pin, and the current path and the conductive A resistance welding apparatus in vacuum, wherein a current different from the welding current is passed through the work piece through a contact pin. A lower welding electrode and an upper welding electrode provided in the vacuum chamber section; an electrode unit including a plurality of lower electrode tips on which the workpieces can be respectively mounted and movable up and down independently of each other; and in the vacuum chamber section A plurality of objects to be welded are sequentially vacuum-tightly sealed in a vacuum by a resistance welding apparatus including a support member that supports the electrode unit and a drive mechanism that intermittently moves the electrode unit together with the support member. A resistance welding method in vacuum,
A first step of transferring the electrode unit on which the plurality of workpieces are placed on the plurality of lower electrode tips to the inside of the vacuum chamber ; and
When the drive mechanism intermittently drives the electrode unit, the lower electrode tip and the workpiece to be placed thereon are sequentially placed between the lower welding electrode and the upper welding electrode. a second step you transfer,
When the inside of the vacuum chamber reaches a predetermined degree of vacuum, the space between the lower welding electrode and the upper welding electrode is narrowed, and the lower electrode tip positioned between the lower welding electrode and the upper welding electrode is lowered. Or a third step of raising and pressurizing the workpiece and the lower electrode tip by the upper welding electrode and the lower welding electrode;
In a state where the object to be welded and the lower electrode tip are sandwiched and pressed between the lower welding electrode and the upper welding electrode, energization is performed between the lower welding electrode and the upper welding electrode. A fourth step of applying a welding current to the work piece to resistance-weld the work piece and vacuum-tightly seal the work piece;
When the workpiece is resistance-welded, the distance between the lower welding electrode and the upper welding electrode is widened, and the drive mechanism drives the electrode unit intermittently again, and the next workpiece to be welded is A fifth step of transferring between a lower welding electrode and the upper welding electrode, and similarly performing a vacuum hermetic sealing by resistance welding the workpiece to be welded;
In the vacuum chamber portion maintained at a predetermined degree of vacuum, all the workpieces are sequentially resistance welded, and then the electrode unit is unloaded from the vacuum chamber portion to collectively perform a plurality of the resistance welded pieces . A sixth step of carrying out the work piece;
A resistance welding method in vacuum characterized by comprising: In claim 5,
In the inside or outside of the vacuum chamber part, the electrode unit on which the plurality of workpieces before welding are placed is put on standby,
The electrode unit carrying a plurality of resistance-welded workpieces is switched to the electrode unit that has been waiting outside or inside the vacuum chamber, and is placed on the electrode unit that has been waiting. A resistance welding method in vacuum, wherein the objects to be welded are sequentially resistance welded.

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