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JP5317065B2 - Lead-free magnetic optical element and manufacturing method thereof - Google Patents
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JP5317065B2 - Lead-free magnetic optical element and manufacturing method thereof - Google Patents

Lead-free magnetic optical element and manufacturing method thereof Download PDF

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JP5317065B2
JP5317065B2 JP2009509014A JP2009509014A JP5317065B2 JP 5317065 B2 JP5317065 B2 JP 5317065B2 JP 2009509014 A JP2009509014 A JP 2009509014A JP 2009509014 A JP2009509014 A JP 2009509014A JP 5317065 B2 JP5317065 B2 JP 5317065B2
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titania
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実 長田
高義 佐々木
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National Institute for Materials Science
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/09Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect
    • G02F1/093Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on magneto-optical elements, e.g. exhibiting Faraday effect used as non-reciprocal devices, e.g. optical isolators, circulators
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532Heads
    • G11B11/10541Heads for reproducing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10584Record carriers characterised by the selection of the material or by the structure or form characterised by the form, e.g. comprising mechanical protection elements
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/193Magnetic semiconductor compounds

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Thin Magnetic Films (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Description

本発明は、光アイソレータや高密度光磁気記録などの情報通信技術分野に応用して好適な、非鉛系磁性光学素子と、その製造方法に関し、より詳しくは、その光学特性をより広域に広げる技術に関する。   The present invention relates to a lead-free magnetic optical element suitable for application in the field of information communication technology such as optical isolators and high-density magneto-optical recording, and a method for manufacturing the same. Regarding technology.

インターネットの急速な普及により、光通信ネットワークの高速化・高容量化の需要が高まっている。今後、光通信ネットワークを広く一般家庭に普及させ、高度情報通信社会を将来にわたって持続的に発展させるためには、各種光部品の抜本的なコストダウンが必要である。これら光部品の中でも量産化が難しくシステム全体を高価にしているのが磁気光学素子である。磁気光学素子は高速光ネットワークには不可欠な光部品で、磁気光学効果の固有の性質である偏波面回転現象(ファラデー回転)を使い、光の進行方向を一方向に限定する光アイソレータとして利用される。現在の光通信システムでは、磁性ガーネット結晶(希土類鉄ガーネット)を用いた光アイソレータが、レーザ光源や光増幅器に多数配置されている。   Due to the rapid spread of the Internet, there is an increasing demand for high-speed and high-capacity optical communication networks. In the future, drastic cost reduction of various optical components will be necessary in order to widely spread optical communication networks to general households and to continuously develop an advanced information communication society in the future. Among these optical components, the magneto-optical element is difficult to mass-produce and makes the entire system expensive. A magneto-optic element is an optical component that is indispensable for high-speed optical networks, and is used as an optical isolator that uses the polarization plane rotation phenomenon (Faraday rotation), which is an inherent property of the magneto-optic effect, to limit the traveling direction of light in one direction. The In current optical communication systems, a large number of optical isolators using magnetic garnet crystals (rare earth iron garnet) are arranged in laser light sources and optical amplifiers.

しかし、既存の磁気光学材料は、波長1μm以下の短波長域では使用できない、他の半導体光部品との一体的な集積化が困難である、結晶成長の際に利用するフラックスの酸化鉛が残留する等の問題があった。
このため、機能、コスト、環境面で今後重要性を増す超大容量波長多重通信には対応できず、光通信システム開発の最大の課題となっている。
特に、鉛の含有は現在深刻な環境問題であり、2006年7月欧州連合では、電気・電子機器に含まれる鉛をRoHS指令により環境規制対象物質として撤廃することで決定した。しかし、通信装置に組み込まれる光アイソレータについては、現在代替材料がないため例外措置として鉛含有基準を1000ppm以下に規制する方向で進められているが、将来的には非鉛系材料への代替が望まれている。
However, existing magneto-optical materials cannot be used in the short wavelength region of 1 μm or less, and it is difficult to integrate with other semiconductor optical components, and lead oxide of flux used for crystal growth remains. There was a problem such as.
For this reason, it cannot cope with ultra-high capacity wavelength division multiplexing communication, which will increase in importance in the future in terms of function, cost, and environment, and is the biggest issue in the development of optical communication systems.
In particular, the inclusion of lead is currently a serious environmental problem, and in July 2006, the European Union decided to eliminate lead contained in electrical and electronic equipment as a substance subject to environmental regulations under the RoHS Directive. However, for optical isolators built into communication devices, there is currently no alternative material, and as an exceptional measure, the lead content standard is being regulated to 1000 ppm or less, but in the future, replacement with non-lead materials will be promoted. It is desired.

このような問題を解決する次世代のキーテクノロジーとして、室温で優れた磁気光学効果を有する非鉛系強磁性半導体の開発とナノテクノロジーとの融合が注目されている。これは、これらの技術融合が実現すれば,磁気記録,光の偏光制御等など,磁性体が得意とする機能を全て非鉛系半導体材料で実現し、半導体光部品との一体的な集積化も可能となるためである。
その一つの手段として、最近、本発明者等は、ナノ材料を基幹ブロックにして低コストの室温溶液プロセスを用いた自己組織化反応によりCo置換チタニアナノシートとFe置換チタニアナノシートを交互に積んで、Co−Feの相互作用を使う多層膜や超格子を作製すれば、紫外光から可視光波長領域(260−500nm)に応答し、かつ既存の磁気光学材料を大きく凌ぐ世界最高の磁気光学効果(300,000度/cm)を有する磁気光学素子の製造が可能となることを見出した(WO2007/069638)。
As a next-generation key technology that solves these problems, the development of lead-free ferromagnetic semiconductors that have excellent magneto-optical effects at room temperature and the fusion of nanotechnology are attracting attention. If these technological integrations are realized, all the functions that magnetic materials are good at, such as magnetic recording and light polarization control, will be realized with lead-free semiconductor materials, and integrated with semiconductor optical components. This is also possible.
As one means, recently, the present inventors have alternately stacked Co-substituted titania nanosheets and Fe-substituted titania nanosheets by a self-assembly reaction using a nanomaterial as a basic block and a low-cost room temperature solution process, If a multilayer film or a superlattice using Co—Fe interaction is produced, the world's best magneto-optic effect that responds from the ultraviolet light to the visible wavelength region (260-500 nm) and far surpasses existing magneto-optic materials ( It has been found that it is possible to produce a magneto-optical element having 300,000 degrees / cm) (WO 2007/069638).

磁性半導体ナノシートから構成される素子は、紫外から可視光波長領域(260−500nm)の利用には最適であるが、半導体レーザ等に利用できる可視光から近赤外光波長領域(500−900nm)で応答する素子が必要となる。また、磁性半導体ナノシートの優れた磁気光学特性の実現のためには、磁性金属間の層間相互作用が機能するように、異なるナノシートを精密に交互積層した超格子を形成する必要があった。そのため、低コストかつ簡便な磁気光学素子の製造のためには、単体として、紫外光から近赤外光の広い波長領域に応答する磁性半導体ナノ材料の開発が望まれていた。   An element composed of a magnetic semiconductor nanosheet is optimal for use in the ultraviolet to visible wavelength region (260-500 nm), but can be used for a semiconductor laser or the like from visible light to near infrared wavelength region (500-900 nm). The element which responds by is needed. Moreover, in order to realize the excellent magneto-optical properties of the magnetic semiconductor nanosheet, it was necessary to form a superlattice in which different nanosheets were precisely and alternately laminated so that the interlayer interaction between magnetic metals functions. Therefore, in order to manufacture a low-cost and simple magneto-optical element, it has been desired to develop a magnetic semiconductor nanomaterial that responds to a wide wavelength region from ultraviolet light to near infrared light as a single unit.

本発明は、以上のとおりの背景から、従来の磁気光学材料の問題点を解消し、単体として紫外光から近赤外光の広い波長領域で高い磁気光学効果を有する非鉛系磁性光学素子と、その製造方法を提供することを課題としている。   The present invention solves the problems of conventional magneto-optical materials from the background as described above, and is a lead-free magnetic optical element having a high magneto-optical effect in a wide wavelength region from ultraviolet light to near infrared light as a single unit. It is an object to provide a manufacturing method thereof.

本発明者らは、上記課題を解決するために鋭意研究を重ねた結果、チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートを基本ブロックにして磁性ナノ薄膜を作製することにより、スピン相互作用を介して異なる磁性金属間の光学遷移の制御が可能となること、また、この光学遷移を利用することにより、紫外から近赤外までの広い波長領域で高い磁気光学効果とその制御が可能となることを見出し、これらの技術的知見に基づいて本発明を完成させた。   As a result of intensive research in order to solve the above problems, the present inventors have found that a single layer of a layered titanium oxide in which two or more different magnetic elements are simultaneously substituted at a titanium lattice position is obtained. By making magnetic nanothin films using substituted titania nanosheets as a basic block, it is possible to control optical transitions between different magnetic metals through spin interaction, and by using these optical transitions, ultraviolet The present inventors have found that a high magneto-optical effect and its control are possible in a wide wavelength range from 1 to the near infrared, and have completed the present invention based on these technical findings.

すなわち、本発明の非鉛系磁性光学素子は、第1に、チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートからなる磁性ナノ薄膜を用いたことを特徴としている。   That is, the lead-free magneto-optical element of the present invention is, firstly, a magnetic element simultaneous substitution titania nanosheet obtained by exfoliating a layered titanium oxide in which two or more different magnetic elements are simultaneously substituted at a titanium lattice position. It is characterized by using a magnetic nano thin film made of

第2は、前記第1の発明の非鉛系磁性光学素子において、その磁性ナノ薄膜の磁性元素同時置換チタニアナノシートが、組成式Ti1-x-yM’(ただし、Mは、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれる磁性金属、M’は、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれるM以外の磁性金属少なくとも1種、0<x+y<1)で示されることを特徴としている。Second, in the lead-free magnetic optical element of the first invention, the magnetic nano-thin magnetic element simultaneous substitution titania nanosheet has a composition formula of Ti 1-xy M x M ′ y O 2 (where M Is a magnetic metal selected from V, Cr, Mn, Fe, Co, Ni, Cu, M ′ is at least one magnetic metal other than M selected from V, Cr, Mn, Fe, Co, Ni, Cu, It is characterized by 0 <x + y <1).

第3は、前記第2の発明の非鉛系磁性光学素子において、その磁性ナノ薄膜の磁性元素同時置換チタニアナノシートが、MとM'が同一元素であり、MとM'の価数が相互に異ならせてあることを特徴としている。   Third, in the lead-free magnetic optical element of the second invention, the magnetic element simultaneous substitution titania nanosheet of the magnetic nano thin film is such that M and M ′ are the same element, and the valences of M and M ′ are mutually It is characterized by being different.

第4は、前記第1の発明の非鉛系磁性光学素子において、その磁性ナノ薄膜の磁性元素同時置換チタニアナノシートが、組成式Ti1-x-yCoFe(ただし、0<x+y<1)で示されることを特徴としている。Fourth, in the lead-free magnetic optical element of the first invention, the magnetic nano-thin magnetic element simultaneous substitution titania nanosheet has a composition formula of Ti 1-xy Co x Fe y O 2 (where 0 < It is characterized by x + y <1).

第5は、前記第1から4のいずれかの発明の非鉛系磁性光学素子において、前記磁性ナノ薄膜は、磁性元素同時置換チタニアナノシートと、有機ポリマー、無機高分子、金属錯体または多核水和物イオンを含む無機化合物の少なくともいずれかの1種の薄膜が組み合わされた薄膜であることを特徴としている。   The fifth is the lead-free magnetic optical element according to any one of the first to fourth aspects, wherein the magnetic nano thin film includes a magnetic element simultaneous substitution titania nanosheet, an organic polymer, an inorganic polymer, a metal complex, or polynuclear hydration. It is characterized in that it is a thin film in which at least one thin film of an inorganic compound containing a physical ion is combined.

第6は、前記第1から5のいずれかの発明の非鉛系磁性光学素子の製造方法であって、チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートを、カチオン性物質として有機ポリカチオンを介して基板上に積層してその磁性ナノ薄膜を形成することを特徴としている。   6th is the manufacturing method of the lead-free magnetic optical element according to any one of the first to 5th inventions, wherein a single layer of layered titanium oxide in which two or more different magnetic elements are simultaneously substituted at a titanium lattice position. A magnetic element simultaneous substitution titania nanosheet obtained by peeling is laminated on a substrate through an organic polycation as a cationic substance to form the magnetic nanothin film.

第7は、前記第6の発明の非鉛系磁性光学素子の製造方法において、磁性元素同時置換チタニアナノシートを基板上にスピンコートまたはディップコートすることにより磁性ナノ薄膜を形成することを特徴としている。   Seventh, in the method for producing a lead-free magnetic optical element according to the sixth invention, a magnetic nano thin film is formed by spin-coating or dip-coating a magnetic element simultaneous substitution titania nanosheet on a substrate. .

第1の発明によれば、紫外光から近赤外光の広い波長領域で高い磁気光学効果を示す磁性ナノ薄膜が実現され、特性の高度な制御が可能になる。さらに、このような磁性ナノ薄膜を非鉛系の安全な材料を用いて低コストで製造することができる。
本発明の磁性ナノ薄膜は、今後一層の高性能化が期待される高速光ネットワークに対して、安価で高性能の光アイソレータや、半導体レーザや各種光部品と融合した高機能光集積回路を実現できるため、インターネットのさらなる普及や高度情報通信をベースとするユビキタス社会の発展に貢献できる。また、磁気光学効果を利用したデバイスは、光アイソレータ以外にも、光磁気記録素子、光磁界センサ、光スイッチなど広範な応用があるため、本発明により提供される優れた磁気光学特性を有する磁性ナノ薄膜は、これらの技術分野に適用しても極めて有用である。
According to the first invention, a magnetic nano thin film exhibiting a high magneto-optical effect in a wide wavelength region from ultraviolet light to near infrared light is realized, and advanced control of characteristics is possible. Furthermore, such a magnetic nano thin film can be manufactured at low cost using a lead-free safe material.
The magnetic nano thin film of the present invention realizes a high-performance optical integrated circuit that is integrated with low-cost, high-performance optical isolators, semiconductor lasers, and various optical components for high-speed optical networks that are expected to have higher performance in the future. Therefore, it can contribute to the further spread of the Internet and the development of a ubiquitous society based on advanced information communication. In addition to optical isolators, devices using the magneto-optical effect have a wide range of applications such as magneto-optical recording elements, magneto-optical sensors, and optical switches. Therefore, magnetic devices having excellent magneto-optical characteristics provided by the present invention are provided. Nano thin films are extremely useful when applied to these technical fields.

第2の発明によれば、半導体性のチタニアナノシートにおいて、異なる3d遷移金属元素間の特異な磁気的相互作用、電子遷移の付与が可能となり、紫外光から近赤外光までの広い波長領域において高い磁気光学効果を示す磁性ナノ薄膜の作製と特性の自在な制御が可能になった。   According to the second invention, in the semiconducting titania nanosheet, it is possible to impart unique magnetic interaction and electronic transition between different 3d transition metal elements, and in a wide wavelength region from ultraviolet light to near infrared light. Fabrication of magnetic nano-thin films exhibiting a high magneto-optic effect and free control of properties have become possible.

第3の発明によれば、半導体性のチタニアナノシートにおいて、異なる価数を有する遷移金属元素間の特異な磁気的相互作用、電子遷移の付与が可能となり、紫外光から近赤外光までの広い波長領域において高い磁気光学効果を示す磁性ナノ薄膜の作製と特性の自在な制御が可能になった。   According to the third invention, in the semiconducting titania nanosheet, it is possible to impart a unique magnetic interaction and electronic transition between transition metal elements having different valences, and a wide range from ultraviolet light to near infrared light. Fabrication of magnetic nano-thin films exhibiting high magneto-optic effect in the wavelength region and free control of properties are now possible.

第4の発明によれば、半導体性のチタニアナノシートにおいて、2次元ナノ構造内でのCo-Feの強い電子・スピン相互作用を介して、Co-Feの電子遷移が発現し、紫外光から近赤外光までの広い波長領域において高い磁気光学効果を示す磁性ナノ薄膜の作製と磁気光学特性の特性向上を実現することができた。   According to the fourth aspect of the invention, in the semiconducting titania nanosheet, the Co—Fe electronic transition is expressed through the strong electron-spin interaction of Co—Fe in the two-dimensional nanostructure, and is close to the ultraviolet light. Fabrication of magnetic nano-thin films exhibiting a high magneto-optic effect in a wide wavelength range up to infrared light and improvement of the magneto-optical properties were realized.

第5の発明によれば、有機ポリマーなど高分子材料との融合が可能となったため、磁性元素同時置換チタニアナノシートの有する優れた磁気光学特性を利用した有機-無機ハイブリットデバイスの作製や、半導体素子や分子エレクトロニクスと融合した磁気光学素子としての利用が可能となった。   According to the fifth invention, since it is possible to fuse with a polymer material such as an organic polymer, it is possible to fabricate an organic-inorganic hybrid device using the excellent magneto-optical properties of the magnetic element simultaneous substitution titania nanosheet, And it can be used as a magneto-optical element fused with molecular electronics.

第6の発明によれば、磁性元素同時置換チタニアナノシートを利用した高品位磁性ナノ薄膜の多層化が可能になったため、目的の膜厚と磁気光学特性を有する磁気光学素子の設計と製造が可能となった。   According to the sixth invention, it is possible to design a multi-layered high-quality magnetic nano thin film using a magnetic element simultaneous substitution titania nanosheet, so that a magneto-optical element having a desired film thickness and magneto-optical characteristics can be designed and manufactured. It became.

第7の発明によれば、従来の磁気光学薄膜プロセスの主流である、大型の真空装置や高価な成膜装置を必要としない、低コスト、低環境プロセスを実現できた。   According to the seventh invention, a low-cost, low-environment process that does not require a large vacuum apparatus or an expensive film forming apparatus, which is the mainstream of the conventional magneto-optic thin film process, can be realized.

図1は、Co,Fe同時置換チタニアナノシートとその多層膜の構造模式図である。FIG. 1 is a structural schematic diagram of a Co and Fe co-substituted titania nanosheet and its multilayer film. 図2は、石英ガラス基板上にCo,Fe同時置換チタニアナノシートとポリジアリルジメチルアンモニウム塩化物(PDDA)が交互に10層積層した多層膜(Ti0.75Co0.15Fe0.110の紫外・可視吸収スペクトルを示す図で、挿入図は光学写真である。FIG. 2 shows a multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) in which 10 layers of Co and Fe co-substituted titania nanosheets and polydiallyldimethylammonium chloride (PDDA) are alternately laminated on a quartz glass substrate. ) 10 shows the ultraviolet / visible absorption spectrum, and the inset is an optical photograph. 図3は、石英ガラス基板上にCo,Fe同時置換チタニアナノシートとポリジアリルジメチルアンモニウム塩化物(PDDA)が交互に10層積層した多層膜(Ti0.75Co0.15Fe0.110における室温、500nmでの磁気光学ヒステリシス特性を示す図である。FIG. 3 shows a multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) in which 10 layers of Co and Fe co-substituted titania nanosheets and polydiallyldimethylammonium chloride (PDDA) are alternately laminated on a quartz glass substrate. FIG. 10 is a diagram showing magneto-optical hysteresis characteristics at room temperature and 500 nm in FIG. 図4は、Co置換チタニアナノシート多層膜(a)、Fe置換チタニアナノシート多層膜(a)、および本発明のCo,Fe同時置換酸化チタンナノシート多層膜(Ti0.75Co0.15Fe0.110(b)における室温での磁気光学スペクトルを示す図である。FIG. 4 shows a Co-substituted titania nanosheet multilayer film (a), an Fe-substituted titania nanosheet multilayer film (a), and a Co and Fe co-substituted titanium oxide nanosheet multilayer film (Ti 0.75 Co 0.15 Fe 0. is a diagram showing a magneto-optical spectrum at room temperature in 1 O 2) 10 (b) . 図5は、異なる組成のCo,Fe同時置換チタニアナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2、Ti0.75Co0.15Fe0.1)の多層膜における室温での磁気光学スペクトルを示す図である。FIG. 5 shows Co and Fe co-substituted titania nanosheets of different compositions (Ti 0.65 Co 0.05 Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 , Ti 0.75 Co it is a diagram showing a magneto-optical spectra at room temperature of the multilayer film of 0.15 Fe 0.1 O 2). 図6は、第一原理計算に用いたCo,Fe同時置換チタニアナノシートの結晶構造モデルを示す図である。FIG. 6 is a diagram showing a crystal structure model of the Co and Fe simultaneous substitution titania nanosheet used in the first principle calculation. 第一原理計算により評価したCo,Fe同時置換チタニアナノシート(Ti0.5Co0.5Fe0.5)の電子バンド構造を示す図で、(a)がTi0.5Co0.5Fe0.5を構成する全原子からの状態密度、(b)がTi0.5Co0.5Fe0.5の磁性元素成分Co、Feからの部分状態密度を示す。Co assessed by first-principles calculation, a diagram showing the electronic band structure of Fe simultaneous substitution titania nanosheet (Ti 0.5 Co 0.5 Fe 0.5 O 2), (a) is Ti 0.5 Co 0. The density of states from all atoms constituting 5 Fe 0.5 O 2 , (b) shows the partial density of states from the magnetic element components Co and Fe of Ti 0.5 Co 0.5 Fe 0.5 O 2 . 図8は、第一原理計算により評価したCo,Fe同時置換チタニアナノシート(Ti0.5Co0.5Fe0.5)の光学吸収特性を示す図である。FIG. 8 is a diagram showing optical absorption characteristics of Co and Fe co-substituted titania nanosheets (Ti 0.5 Co 0.5 Fe 0.5 O 2 ) evaluated by the first principle calculation. 図9は、本発明のCo,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.110における単位厚さあたりの磁気光学回転角の性能指数と応答波長を示した図である。併せて比較のため、Co,Fe置換チタニアナノシート多層膜、Co、Fe置換チタニアナノシート超格子、典型的なアイソレータ材料における、単位厚さあたりの磁気光学回転角の性能指数と最大応答波長を示した。FIG. 9 shows the figure of merit and response wavelength of the magneto-optical rotation angle per unit thickness in the Co and Fe co-substituted titania nanosheet multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) 10 of the present invention. FIG. For comparison, the figure of merit and maximum response wavelength of magneto-optical rotation angle per unit thickness are shown for Co, Fe-substituted titania nanosheet multilayer film, Co, Fe-substituted titania nanosheet superlattice, and typical isolator materials. . 図10は、異なる組成のCo,Mn同時置換チタニアナノシート(Ti0.75Co0.15Mn0.1、Ti0.775Co0.175Mn0.05)の多層膜における室温での磁気光学スペクトルを示す図である。FIG. 10 shows room temperature in a multilayer film of Co and Mn co-substituted titania nanosheets (Ti 0.75 Co 0.15 Mn 0.1 O 2 , Ti 0.775 Co 0.175 Mn 0.05 O 2 ) having different compositions. It is a figure which shows the magneto-optical spectrum in.

本発明の非鉛系磁性光学素子とその製造方法について、具体的な例を示し、さらに詳しく説明する。   The lead-free magnetic optical element and the manufacturing method thereof according to the present invention will be described in more detail with specific examples.

図1は、本発明の一実施の形態に係わる磁性元素同時置換チタニアナノシートからなる磁性ナノ薄膜の構造を模式的に例示した図である。図1において、符号1は、たとえば石英ガラスまたはSi基板(以下、単に「基板」ということがある)を示し、2は該基板上に形成されたポリマー、3は磁性同時置換チタニアナノシートを示している。
そしてこの図1の実施形態では、上記の磁性元素同時置換チタニアナノシート3が積層された状態であることを例示している。
なお、本発明においては、基板1は、石英ガラスまたはSi基板に限定されることはなく、プラスチックなどの他の種類の基板であってもよく、基板上に金、白金等の金属電極が設けられたものの上に、同様に磁性元素同時置換チタニアナノシートが配設されていてもよい。
FIG. 1 is a diagram schematically illustrating the structure of a magnetic nanothin film composed of a magnetic element simultaneous substitution titania nanosheet according to an embodiment of the present invention. In FIG. 1, reference numeral 1 indicates, for example, a quartz glass or Si substrate (hereinafter, simply referred to as “substrate”), 2 indicates a polymer formed on the substrate, and 3 indicates a magnetic co-substituted titania nanosheet. Yes.
In the embodiment of FIG. 1, the magnetic element simultaneous substitution titania nanosheet 3 is illustrated as being laminated.
In the present invention, the substrate 1 is not limited to quartz glass or Si substrate, but may be other types of substrates such as plastic, and a metal electrode such as gold or platinum is provided on the substrate. Similarly, a magnetic element simultaneous substitution titania nanosheet may be disposed on the resultant structure.

磁性ナノ薄膜の構成層となる磁性元素同時置換チタニアナノシート(たとえば、Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2、Ti0.75Co0.15Fe0.1)は、層状チタン化合物をソフト化学的な処理により結晶構造の基本最小単位である層1枚にまで剥離することにより得られる、2次元異方性を有する磁性半導体ナノ材料である。
本発明の磁性ナノ薄膜は、主としてこのような磁性元素同時置換チタニアナノシートもしくはその積層をもって構成されるものであるが、ここで、たとえば好適にはナノシートは、厚み約1nm、横サイズ200nm〜100μmの粒子サイズを有してよい。
Magnetic element simultaneous substitution titania nanosheet (for example, Ti 0.65 Co 0.05 Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 , Ti 0. 75 Co 0.15 Fe 0.1 O 2 ) has a two-dimensional anisotropy obtained by peeling a layered titanium compound to one layer which is a basic minimum unit of a crystal structure by a soft chemical treatment. It is a magnetic semiconductor nanomaterial.
The magnetic nano thin film of the present invention is mainly composed of such a magnetic element simultaneous substitution titania nanosheet or a laminate thereof. Here, for example, the nanosheet preferably has a thickness of about 1 nm and a lateral size of 200 nm to 100 μm. It may have a particle size.

磁性元素同時置換チタニアナノシートは、チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られるナノシートからなるが、この際の磁性元素同時置換チタニアナノシートとしては各種のものであって良いが、たとえば好適には、3d磁性金属元素をチタン格子位置に2種以上同時置換したチタニアナノシート、組成式Ti1-x-yM’(ただし、Mは、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれる磁性金属、M’は、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれるM以外の磁性金属少なくとも1種、0<x+y<1)が例示される。The magnetic element simultaneous substitution titania nanosheet consists of a nanosheet obtained by exfoliating a single layer of layered titanium oxide with two or more different magnetic elements simultaneously substituted at the titanium lattice position. May be various types, for example, preferably, a titania nanosheet in which two or more 3d magnetic metal elements are simultaneously substituted at the titanium lattice position, composition formula Ti 1-xy M x M ′ y O 2 (however, , M is a magnetic metal selected from V, Cr, Mn, Fe, Co, Ni, Cu, and M ′ is a magnetic metal other than M selected from V, Cr, Mn, Fe, Co, Ni, Cu. Seed, 0 <x + y <1).

単層剥離のための処理は、ソフト化学処理と呼ぶことができるものであって、ソフト化学処理とは、酸処理とコロイド化処理を組み合わせた処理である。すなわち、層状構造を有するチタン酸化物粉末に塩酸などの酸水溶液を接触させ、生成物をろ過、洗浄後、乾燥させると、処理前に層間に存在していたアルカリ金属イオンがすべて水素イオンに置き換わり、水素型物質が得られる。次に、得られた水素型物質をアミンなどの水溶液中に入れ撹拌すると、コロイド化する。このとき、層状構造を構成していた層が1枚1枚にまで剥離する。膜厚はサブnm〜nmの範囲で制御可能である。   The treatment for single layer peeling can be called soft chemical treatment, and the soft chemical treatment is a treatment combining acid treatment and colloidalization treatment. That is, when titanium oxide powder having a layered structure is contacted with an acid aqueous solution such as hydrochloric acid, and the product is filtered, washed, and dried, all alkali metal ions present between the layers before the treatment are replaced with hydrogen ions. A hydrogen-type substance is obtained. Next, when the obtained hydrogen-type substance is placed in an aqueous solution of amine or the like and stirred, it is colloidalized. At this time, the layers constituting the layered structure are peeled up one by one. The film thickness can be controlled in the range of sub nm to nm.

本発明では、上記の方法を工程の少くとも一部として含むことを特徴とする非鉛系磁性光学素子とその製造方法が実現されることになる。たとえば以下の実施例に示した形態では、Co,Feを同時置換したチタニアナノシートならびにCo,Mnを同時置換したチタニアナノシートをベースとした非鉛系磁性光学素子を作製している。
なお、本発明は以下の実施例によって限定されるものでないことは言うまでもない。
According to the present invention, a lead-free magnetic optical element including the above method as at least a part of the process and a method for manufacturing the same are realized. For example, in the forms shown in the following examples, lead-free magnetic optical elements based on titania nanosheets simultaneously substituted with Co and Fe and titania nanosheets simultaneously substituted with Co and Mn are manufactured.
Needless to say, the present invention is not limited to the following examples.

本実施例においては、半導体性であるチタニアナノシートのチタン格子位置に異なる磁性元素(Co,Fe)を5%〜30%の濃度で同時置換したチタニアナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2、Ti0.75Co0.15Fe0.1)を作製し、図1に示したように、石英ガラスまたはSi基板上にカチオン性ポリマー(ポリジアリルジメチルアンモニウム塩化物(PDDA))を介して交互自己組織化積層技術により多層膜を作製した。In this example, titania nanosheets (Ti 0.65 Co 0.05 Fe 0 ) obtained by simultaneously substituting different magnetic elements (Co, Fe) at a concentration of 5% to 30% at the titanium lattice position of the titania nanosheet that is semiconducting. .3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 , Ti 0.75 Co 0.15 Fe 0.1 O 2 ), as shown in FIG. A multilayer film was produced on a Si substrate by an alternating self-assembled lamination technique via a cationic polymer (polydiallyldimethylammonium chloride (PDDA)).

この基板積層技術は、本発明者らが発明したチタニア超薄膜の製造方法(特許第3513589号)に開示した交互自己組織化積層技術に相当する。実際の操作としては、基板を(1)チタニアゾル溶液に浸漬→(2)純水で洗浄→(3)有機ポリカチオン溶液に浸漬→(4)純水で洗浄するという一連の操作を1サイクルとしてこれを必要回数分反復する。有機ポリカチオンとしては、ポリジアリルジメチルアンモニウム塩化物(以下、PDDAとも記す)、ポリエチレンイミン(PEI)、塩酸ポリアリルアミン(PAH)などが適当である。また、交互積層に際しては、基板表面に正電荷を導入することができれば基本的に問題なく、有機ポリマーの代わりに、正電荷を持つ無機高分子、多核水和物イオンを含む無機化合物を使用することもできる。   This substrate lamination technique corresponds to the alternating self-organization lamination technique disclosed in the method for producing an ultrathin titania thin film (Japanese Patent No. 3513589) invented by the present inventors. As an actual operation, a series of operations of (1) immersing the substrate in titania sol solution → (2) cleaning with pure water → (3) immersing in organic polycation solution → (4) cleaning with pure water as one cycle This is repeated as many times as necessary. As the organic polycation, polydiallyldimethylammonium chloride (hereinafter also referred to as PDDA), polyethyleneimine (PEI), polyallylamine hydrochloride (PAH) and the like are suitable. In addition, when alternating layers are stacked, there is basically no problem if a positive charge can be introduced to the substrate surface. Instead of an organic polymer, an inorganic polymer having a positive charge and an inorganic compound containing polynuclear hydrate ions are used. You can also.

また、交互積層に基づく成膜に際しては、基板表面が充分にナノシートまたはポリマーで吸着・被覆されれば良く、交互自己組織化積層技術の代わりに、スピンコート法あるいはディップコート法を利用することも可能である。   In film formation based on alternating lamination, it is sufficient that the substrate surface is sufficiently adsorbed and coated with nanosheets or polymers, and spin coating or dip coating may be used instead of the alternating self-organization lamination technique. Is possible.

このようにして調製される磁性ナノ薄膜は高い積層秩序を有しており、磁性元素同時置換チタニアナノシートとPDDAの繰り返し周期に基づく明瞭なX線回折ピークを示す。実際、磁性元素同時置換チタニアナノシートとPDDAの多層膜の形成過程をX線回折測定によりモニターすると、1.4nm前後の周期構造を示すブラッグピークが出現し、吸着回数の増大にしたがって強度が増大した。
すなわち順番に吸着・累積されたナノシートとPDDAが製膜後に、入り乱れることなく、整然とした多層ナノ構造を保持していることを示している。より直接的な製膜プロセスのモニター法として、紫外・可視吸収スペクトルやエリプソメトリーによる膜厚の測定があげられる。各吸着操作毎に膜厚がサブnm〜μmのレンジで段階的に増大していく様子が読み取れる。すなわち膜厚をこのような極めて微細な領域でコントロールできることになる。
The magnetic nanothin film thus prepared has a high stacking order, and shows a clear X-ray diffraction peak based on the repetition period of the magnetic element simultaneous substitution titania nanosheet and PDDA. In fact, when the formation process of the multilayer film of magnetic element simultaneous substitution titania nanosheet and PDDA was monitored by X-ray diffraction measurement, a Bragg peak showing a periodic structure around 1.4 nm appeared, and the intensity increased as the number of adsorption increased. .
That is, it is shown that the nanosheets and PDDA adsorbed and accumulated in order maintain an orderly multilayered nanostructure without being disturbed after film formation. More direct film forming process monitoring methods include measurement of film thickness by ultraviolet / visible absorption spectrum and ellipsometry. It can be seen that the film thickness gradually increases in the sub-nm to μm range for each adsorption operation. That is, the film thickness can be controlled in such an extremely fine region.

以上のように、本発明では、磁性元素同時置換チタニアナノシートと有機ポリカチオンをそれぞれ液相から自己組織化的にモノレイヤーで吸着させ、これを繰り返すことによって製膜を行うため、サブnm〜nmレンジの極めて微細な膜厚の制御が可能であること、膜の組成、構造を選択、制御できる自由度が高いことなどの製膜プロセッシング上の特徴がある。特に、チタニアナノシートと有機ポリカチオンからなる多層超薄膜での膜厚精度は、1nm以下であり、最終的な膜厚は吸着サイクルの反復回数に依存し、μmレベルにまで厚くすることも可能である。   As described above, in the present invention, the magnetic element simultaneous substitution titania nanosheet and the organic polycation are each adsorbed in a monolayer in a self-organized manner from the liquid phase, and film formation is performed by repeating this process. The film forming processing has features such as a very fine film thickness control in the range and a high degree of freedom in selecting and controlling the film composition and structure. In particular, the film thickness accuracy of multilayer ultrathin films composed of titania nanosheets and organic polycations is 1 nm or less, and the final film thickness depends on the number of repetitions of the adsorption cycle and can be increased to the μm level. is there.

図2は、石英ガラス基板上にCo,Fe同時置換チタニアナノシートとPDDAが交互に10層積層した多層膜(Ti0.75Co0.15Fe0.110の紫外・可視吸収スペクトルと光学写真である。Co,Fe同時置換チタニアナノシートは、量子サイズ効果に起因した広いバンドギャップ(300nm)を有し、石英ガラス基板に作製したサンプルは、図2に示したように、可視光の広い領域に対して透明であった。FIG. 2 shows an ultraviolet / visible absorption spectrum of a multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) 10 in which 10 layers of Co and Fe co-substituted titania nanosheets and PDDA are alternately laminated on a quartz glass substrate. And optical photos. The Co and Fe co-substituted titania nanosheet has a wide band gap (300 nm) due to the quantum size effect, and the sample produced on the quartz glass substrate is as shown in FIG. It was transparent.

図3は、Co,Fe同時置換チタニアナノシート(Ti0.75Co0.15Fe0.1)が10層積層した多層膜の室温下における磁気円二色性(MCD)磁気光学測定から求めた磁気光学回転角である。図3に示された磁気光学ヒステリシス特性は、磁性体によって光が反射する際の磁化またはスピン分極による右円偏光と左円偏光の反射率差を示すもので、材料のスピン分極およびスピン−軌道相互作用に対応し、磁化の存在を実証している。可視光領域の500nmにおける磁気光学測定の結果、Co,Fe同時置換チタニアナノシート(Ti0.75Co0.15Fe0.1)が10層積層した多層膜は強磁性特有の磁気光学応答を示し、室温で強磁性体として機能することが確認され、また、磁気光学性能指数は約130,000度/cmという大きな値を示した。同様の強磁性的な磁気光学応答は、異なる組成のCo,Fe同時置換酸化チタンナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2)が10層積層した多層膜でも確認された。以上、図2,3から示されるように、Co,Fe同時置換チタニアナノシートは可視光領域での透明性を維持し、かつ、室温で強磁性体として機能する室温・強磁性半導体であると結論される。FIG. 3 shows a magnetic circular dichroism (MCD) magneto-optical measurement at room temperature of a multilayer film in which 10 layers of Co and Fe co-substituted titania nanosheets (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) are laminated. The obtained magneto-optical rotation angle. The magneto-optical hysteresis characteristic shown in FIG. 3 shows a difference in reflectance between right circular polarization and left circular polarization due to magnetization or spin polarization when light is reflected by a magnetic material. Corresponding to the interaction, it demonstrates the existence of magnetization. As a result of magneto-optical measurement at 500 nm in the visible light region, a multilayer film in which 10 layers of Co and Fe co-substituted titania nanosheets (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) are laminated has a unique magneto-optical response. It was confirmed that it functions as a ferromagnetic material at room temperature, and the magneto-optical figure of merit was a large value of about 130,000 degrees / cm. Similar ferromagnetic magneto-optical responses are obtained for Co and Fe co-substituted titanium oxide nanosheets with different compositions (Ti 0.65 Co 0.05 Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2. It was confirmed even in a multilayer film in which 10 layers of O 2 ) were laminated. As described above, as shown in FIGS. 2 and 3, it is concluded that the Co and Fe co-substituted titania nanosheet is a room temperature / ferromagnetic semiconductor that maintains transparency in the visible light region and functions as a ferromagnetic material at room temperature. Is done.

図4は、Co置換チタニアナノシート多層膜(a)、Fe置換チタニアナノシート多層膜(a)、および本発明のCo,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.110(b)の磁気光学スペクトルである。室温下、各波長において±10kOeの磁場を印加して磁気光学回転角を検出し、スペクトル化した。
図4(a)に示したように、Co置換チタニアナノシート多層膜、Fe置換チタニアナノシート多層膜は、紫外線領域に応答を持ち、それぞれ固有の約10,000度/cmの磁気光学効果を示した。他方、Co,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.110は、図4(b)に示したように、紫外光から近赤外光の広い波長領域(波長300−800nm)において10倍以上増強した約130,000度/cmの巨大な磁気光学効果を示した。
FIG. 4 shows a Co-substituted titania nanosheet multilayer film (a), an Fe-substituted titania nanosheet multilayer film (a), and a Co and Fe co-substituted titania nanosheet multilayer film (Ti 0.75 Co 0.15 Fe 0.1 ) of the present invention. O 2) is a magneto-optical spectrum of the 10 (b). A magnetic optical rotation angle was detected by applying a magnetic field of ± 10 kOe at each wavelength at room temperature, and the spectrum was obtained.
As shown in FIG. 4 (a), the Co-substituted titania nanosheet multilayer film and the Fe-substituted titania nanosheet multilayer film have a response in the ultraviolet region, and each showed a unique magneto-optical effect of about 10,000 degrees / cm. . On the other hand, the Co and Fe co-substituted titania nanosheet multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) 10 has a wide range of ultraviolet light to near infrared light as shown in FIG. In the wavelength region (wavelength 300-800 nm), a huge magneto-optical effect of about 130,000 degrees / cm enhanced by 10 times or more was shown.

図5は、異なる組成のCo,Fe同時置換チタニアナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2、Ti0.75Co0.15Fe0.1)の多層膜における磁気光学スペクトルである。図4(b)に示したTi0.75Co0.15Fe0.1と同様の磁気光学効果は、異なる組成のCo、Fe同時置換酸化チタンナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2)の多層膜でも確認され、Co,Fe同時置換チタニアナノシートの利用が高い磁気光学特性を持ち、かつ紫外光から近赤外光の広い波長領域の様々な波長に応答する磁気光学素子の開発に有効であると言える。FIG. 5 shows Co and Fe co-substituted titania nanosheets of different compositions (Ti 0.65 Co 0.05 Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 , Ti 0.75 Co It is a magneto-optical spectrum in a multilayer film of 0.15 Fe 0.1 O 2 ). The magneto-optical effect similar to that of Ti 0.75 Co 0.15 Fe 0.1 O 2 shown in FIG. 4 (b) is different from the Co and Fe co-substituted titanium oxide nanosheets (Ti 0.65 Co 0.05) having different compositions. Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 ) are confirmed in multilayer films, and Co and Fe co-substituted titania nanosheets have high magneto-optical properties, and from ultraviolet light It can be said that it is effective for the development of a magneto-optical element that responds to various wavelengths in a wide wavelength region of near infrared light.

図6−8は、磁気光学効果と関係した電子構造の評価のため、第一原理計算によりCo,Fe同時置換チタニアナノシートの電子バンド構造と光学吸収特性の評価を行った結果である。第一原理計算は、計算プログラムCASTEPを用い、局所密度近似法(LDA)により行った。ナノシートの初期構造には、レピドクロサイト型TiOをベースとした結晶構造モデル(図6)を仮定し、構造最適化後、電子バンド構造と光学吸収特性の評価を行った。組成は、簡単のためCo/Fe比=1のTi0.5Co0.25Fe0.25とした。FIGS. 6-8 are the results of evaluating the electronic band structure and optical absorption characteristics of Co and Fe co-substituted titania nanosheets by first-principles calculation for evaluation of the electronic structure related to the magneto-optical effect. The first principle calculation was performed by a local density approximation method (LDA) using a calculation program CASTEP. As the initial structure of the nanosheet, a crystal structure model (FIG. 6) based on the lipidocrosite type TiO 2 was assumed, and after the structure optimization, the electronic band structure and the optical absorption characteristics were evaluated. For simplicity, the composition was Ti 0.5 Co 0.25 Fe 0.25 O 2 with a Co / Fe ratio = 1.

Co、Fe同時置換チタニアナノシートに対して強磁性状態の安定性について検討したところ、実験結果と同様、室温で強磁性状態が安定であることが確認された。また、図7に示した電子バンド構造の結果、Co,Fe同時置換酸化チタンナノシートでは、禁制バンド内にCo3dおよびFe3dの不純物バンドが現れ、交換分裂により上向きのスピンの電子数と下向きのスピンの電子数に大きな差が生じ、強磁性状態であることが確認された。   When the stability of the ferromagnetic state was examined for the Co and Fe co-substituted titania nanosheets, it was confirmed that the ferromagnetic state was stable at room temperature as in the experimental results. Further, as a result of the electron band structure shown in FIG. 7, in the Co and Fe co-substituted titanium oxide nanosheet, impurity bands of Co3d and Fe3d appear in the forbidden band, and the number of spin electrons in the upward direction and the number of spins in the downward direction due to the exchange splitting. A large difference in the number of electrons occurred, confirming the ferromagnetic state.

さらに、図8に示した光学吸収スペクトルでは、図7に示した電子バンド構造を反映し、禁制バンド内の紫外から近赤外光の広い波長領域において、Co,Feの不純物準位およびCo-Feのd-d遷移と関係した光学吸収ピーク、すなわちCo2+d-d(1.9−2.1eV)、Fe3+d-d(1.7,2.4-3.0eV)、Co2+−Fe3+(〜2.5eV)のd-d遷移が観測された。
また、これらの光学吸収ピークは、図4(b)に示したCo,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.1)で観測された磁気光学ピークのエネルギー(300−460nm、500−800nm付近)と対応していた。これより、Co,Fe同時置換チタニアナノシートの磁気光学ピークは、Co2+(d)-Fe3+(d)の強い磁気的相互作用に起因しており、同時置換によりナノシート内の磁気的相互作用を変化させることで、CoあるいはFeの単体置換チタニアナノシートで実現しえないCo-Feのd-d遷移の制御が実現し、応答波長の拡大と共に、強度増大が引き起こされたものと考えられる。
Further, the optical absorption spectrum shown in FIG. 8 reflects the electronic band structure shown in FIG. 7, and in the broad wavelength region from ultraviolet to near infrared light in the forbidden band, the impurity levels of Co and Fe and Co − Optical absorption peaks related to Fe dd transition, ie, Co 2+ dd (1.9-2.1 eV), Fe 3+ dd (1.7, 2.4-3.0 eV), Co 2+ A dd transition of -Fe 3+ (~ 2.5 eV) was observed.
These optical absorption peaks are the magneto-optical peaks observed in the Co and Fe co-substituted titania nanosheet multilayer film (Ti 0.75 Co 0.15 Fe 0.1 O 2 ) shown in FIG. Corresponding to energy (300-460 nm, around 500-800 nm). Thus, the magneto-optical peak of the Co and Fe co-substituted titania nanosheet is due to the strong magnetic interaction of Co 2+ (d 7 ) -Fe 3+ (d 5 ). By changing the action, control of the dd transition of Co—Fe, which cannot be realized with a single-substitution titania nanosheet of Co or Fe, was realized, and it is considered that the increase in the strength was caused as the response wavelength increased. .

以上より、本発明においてCo,Fe同時置換チタニアナノシートが優れた効果を示した理由は、Co2+d-d電荷移動遷移(Co2+→Co3+)あるいはCo2+-Fe3+(Co2+-Fe3+→Co3+-Fe2+)により、初期状態Co2+(d)の低スピン状態(s=1/2)から磁気特性の優れたCo3+(d)の高スピン状態(s=2)が実現するためであると考えられる。From the above, the reason why the Co and Fe co-substituted titania nanosheets showed excellent effects in the present invention is that Co 2+ dd charge transfer transition (Co 2+ → Co 3+ ) or Co 2+ -Fe 3+ (Co 2+ -Fe 3+ → Co 3+ -Fe 2+ ) changes the low spin state (s = 1/2) in the initial state Co 2+ (d 7 ) to the high spin state (s = 2) in Co 3+ (d 6 ) with excellent magnetic properties. This is considered to be realized.

図9は、本発明の磁性同時置換チタニアナノシートにおける単位厚さあたりの磁気光学回転角の性能指数と応答波長を示した図である。併せて比較のため、Co,Fe置換チタニアナノシート多層膜、Co,Fe置換チタニアナノシート超格子、典型的なアイソレータ材料における、単位厚さあたりの磁気光学回転角の性能指数と最大応答波長を示した。Co,Fe置換チタニアナノシート多層膜およびCo,Fe置換チタニアナノシート超格子の磁気光学効果は、紫外から可視光波長領域(260−500nm)で10,000度/cm以上の性能を有し、短波長の紫外から可視光波長のみの利用には最適である。それに対し、本発明の磁性同時置換チタニアナノシートの磁気光学効果は、紫外から近赤外光の広い波長領域(波長300−800nm)に応答し、紫外〜可視光波長領域(260−500nm)ではCo,Fe置換チタニアナノシート超格子に匹敵する性能指数、可視〜近赤外光波長領域(500−800nm)では既存の磁気光学材料を大きく凌ぐ世界最高の性能指数を有する。   FIG. 9 is a diagram showing the performance index and response wavelength of the magneto-optical rotation angle per unit thickness in the magnetic simultaneous substitution titania nanosheet of the present invention. For comparison, the figure of merit and maximum response wavelength of magneto-optical rotation angle per unit thickness are shown for Co, Fe-substituted titania nanosheet multilayer film, Co, Fe-substituted titania nanosheet superlattice, and typical isolator materials. . The magneto-optical effect of the Co, Fe-substituted titania nanosheet multilayer film and the Co, Fe-substituted titania nanosheet superlattice has a performance of 10,000 degrees / cm or more in the ultraviolet to visible wavelength region (260-500 nm), and has a short wavelength. It is optimal for using only ultraviolet to visible light wavelengths. On the other hand, the magneto-optical effect of the magnetic co-substituted titania nanosheet of the present invention is responsive to a wide wavelength region (wavelength 300 to 800 nm) from ultraviolet to near infrared light, and is Co in the ultraviolet to visible wavelength region (260 to 500 nm). , Fe-substituted titania nanosheet superlattice has a figure of merit comparable to that of the superlattice in the visible to near-infrared wavelength region (500-800 nm), and has the world's best figure of merit that far surpasses existing magneto-optic materials.

本実施例においては、半導体性であるチタニアナノシートのチタン格子位置に異なる磁性元素(Co,Mn)を5%〜20%の濃度で同時置換したチタニアナノシート(Ti0.75Co0.15Mn0.1、Ti0.775Co0.175Mn0.05)を作製し、図1に示したように、石英ガラスまたはSi基板上にカチオン性ポリマー(ポリジアリルジメチルアンモニウム塩化物(PDDA))を介して交互自己組織化積層技術により多層膜を作製した。In this example, a titania nanosheet (Ti 0.75 Co 0.15 Mn 0 ) in which different magnetic elements (Co, Mn) are simultaneously substituted at a titanium lattice position of a semiconducting titania nanosheet at a concentration of 5% to 20%. .1 O 2 , Ti 0.775 Co 0.175 Mn 0.05 O 2 ), and as shown in FIG. 1, a cationic polymer (polydiallyldimethylammonium chloride ( A multilayer film was produced by alternating self-assembled lamination technique via PDDA)).

このようにして得られたCo,Mn同時置換チタニアナノシートの10層積層膜に対し、室温下、200−900nmまでの各波長において±10kOeの磁場を印加して磁気光学回転角を検出し、磁気光学スペクトルの評価を行った。図10は、異なる組成のCo,Mn同時置換チタニアナノシート(Ti0.65Co0.05Fe0.3、Ti0.7Co0.1Fe0.2)の10層積層膜における磁気光学スペクトルである。図10から明らかなように、Co,Fe同時置換体と同様の磁気光学特性は、Co,Mn同時置換チタニアナノシートにおいても実現しており、紫外光から近赤外光の広い波長領域(波長300−800nm)において約100,000〜200,000度/cmの巨大な磁気光学効果を示した。The magnetic optical rotation angle is detected by applying a magnetic field of ± 10 kOe at each wavelength from 200 to 900 nm at room temperature to the 10-layer laminated film of Co and Mn co-substituted titania nanosheets thus obtained. The optical spectrum was evaluated. FIG. 10 shows a ten-layer laminated film of Co and Mn co-substituted titania nanosheets (Ti 0.65 Co 0.05 Fe 0.3 O 2 , Ti 0.7 Co 0.1 Fe 0.2 O 2 ) having different compositions. FIG. As is apparent from FIG. 10, the same magneto-optical characteristics as those of the Co and Fe simultaneous substitution products are realized also in the Co and Mn simultaneous substitution titania nanosheet, and a wide wavelength region (wavelength 300) from ultraviolet light to near infrared light. -800 nm) showed a giant magneto-optical effect of about 100,000 to 200,000 degrees / cm.

さらに、図10に示した磁気光学スペクトルでは、禁制バンド内の紫外から近赤外光の広い波長領域において、Co,Mnの不純物準位およびCo-Mnのd-d遷移と関係したピーク、すなわちCo2+d-d(1.9−2.1eV)、Mn2+d-d*(12.2、2.5、2.8eV)、Mn3+d-d(1.0−2.0、2.5eV)、Co2+−Mn3+(〜2.0eV)のd-d遷移が観測された。これより、Co,Mn同時置換チタニアナノシートの磁気光学ピークは、Co,Mnの強い磁気的相互作用に起因しており、同時置換によりナノシート内の磁気的相互作用を変化させることで、Co、Fe同時置換体と同様の応答波長の拡大と強度増大が引き起こされたものと考えられる。Furthermore, in the magneto-optical spectrum shown in FIG. 10, in the wide wavelength region from ultraviolet to near infrared light within the forbidden band, peaks related to Co, Mn impurity levels and Co—Mn dd transition, Co 2+ dd (1.9-2.1 eV), Mn 2+ dd * (12.2, 2.5, 2.8 eV), Mn 3+ dd (1.0-2.0, 2 .5 eV), Co 2+ -Mn 3+ (˜2.0 eV) dd transition was observed. Thus, the magneto-optical peak of the Co, Mn co-substituted titania nanosheet is due to the strong magnetic interaction of Co, Mn. By changing the magnetic interaction in the nanosheet by simultaneous substitution, Co, Fe It is considered that the same response wavelength expansion and intensity increase as in the simultaneous substitution product were caused.

以上のように、本発明においては、Co,Fe同時置換ならびにCo,Mn同時置換チタニアナノシートを例に、ナノシート内に異なる磁性元素を同時することより、2次元ナノ構造内で強い電子・スピン相互作用を介して、Co、FeあるいはMnの単体置換チタニアナノシートで実現しえない磁性元素間のd-d遷移が発現し、応答波長の拡大と共に、強度増大を実現することができた。このような磁気的相互作用は、Co、Fe、Mnの組み合わせに限ることなく、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれる他の3d磁性元素の組み合わせや、Co2+、Co3+のような同一元素の混合原子価状態でも実現することが予想される。これは、3d遷移金属元素の磁気特性が3d電子数(d:n=電子数)で規定されるスピン配置と関係しているためであり、Co2+(d)、Fe3+(d)と同様のスピン配置を有するNi3+(d)、Mn2+(d)を用いた組み合わせ、すなわちNi3+-Fe3+,Ni3+-Mn2+,Co2+-Mn2+においても同様の効果を奏することが期待される。As described above, in the present invention, by using Co and Fe co-substitution and Co and Mn co-substitution titania nanosheets as an example, by combining different magnetic elements in the nanosheets simultaneously, strong electron-spin mutual interaction in the two-dimensional nanostructure is achieved. Through this action, a dd transition between magnetic elements that cannot be realized with a single-substitution titania nanosheet of Co, Fe, or Mn was developed, and it was possible to realize an increase in strength along with an increase in response wavelength. Such magnetic interaction is not limited to the combination of Co, Fe, and Mn, but is also a combination of other 3d magnetic elements selected from V, Cr, Mn, Fe, Co, Ni, and Cu, Co 2+ , Co It is expected to be realized even in a mixed valence state of the same element such as 3+ . This is because the magnetic characteristics of the 3d transition metal element are related to the spin configuration defined by the number of 3d electrons (d n : n = number of electrons), and Co 2+ (d 7 ), Fe 3+ (d 5 The same effect can be obtained with a combination using Ni 3+ (d 7 ) and Mn 2+ (d 5 ) having the same spin configuration as that of Ni), that is, Ni 3+ -Fe 3+ , Ni 3+ -Mn 2+ , and Co 2+ -Mn 2+ . It is expected to play.

以上説明した通り、本発明によれば、磁性同時置換チタニアナノシートの有する特異な磁気的相互作用、電子遷移を活用することで、紫外光から近赤外光までの広い波長領域において高い磁気光学効果を示す磁性ナノ薄膜の作製と特性の自在な制御が可能になる。磁気光学効果を利用したデバイスは、光アイソレータ、光磁気記録素子、光磁界センサ、光スイッチなど広範な応用があるため、本発明により提供される優れた磁気光学材料は、これらの技術分野に適用すれば極めて有用である。
中でも、磁気光学効果は光アイソレータとして使える他にない特性であり、磁気光学効果を利用した光アイソレータは光通信のあらゆるシステムに組み込まれている。光情報通信の波長に応じて大きな磁気光学特性を示す材料は特に注目すべき材料であり、本発明の磁性元素同時置換チタニアナノシートは紫外から近赤外光までの広い波長領域高い磁気光学特性を有することから、このような用途に非常に有効である。たとえば、磁性元素同時置換チタニアナノシートを用いた様々な波長のレーザに応答する磁気光学素子や磁気機能を有する磁性素子が実現可能である。
As described above, according to the present invention, by utilizing the unique magnetic interaction and electronic transition of the magnetic co-substituted titania nanosheet, a high magneto-optical effect in a wide wavelength region from ultraviolet light to near infrared light. It is possible to freely control the fabrication and properties of the magnetic nanofilm showing Devices using the magneto-optic effect have a wide range of applications such as optical isolators, magneto-optical recording elements, magneto-optical sensors, and optical switches. Therefore, the excellent magneto-optical material provided by the present invention can be applied to these technical fields. This is extremely useful.
Among them, the magneto-optical effect is a unique characteristic that can be used as an optical isolator, and an optical isolator using the magneto-optical effect is incorporated in every system of optical communication. Materials that exhibit large magneto-optical properties depending on the wavelength of optical information communication are particularly noteworthy materials. The magnetic element simultaneous substitution titania nanosheet of the present invention has high magneto-optical properties over a wide wavelength range from ultraviolet to near infrared light. Therefore, it is very effective for such applications. For example, a magneto-optical element that responds to lasers of various wavelengths using a magnetic element simultaneous substitution titania nanosheet and a magnetic element having a magnetic function can be realized.

また、現在、磁気光学材料として実用化されているガーネット系材料では、半導体素子や分子エレクトロニクスとの融合は困難であったが、磁性元素同時置換チタニアナノシートは、自己組織化などのソフト化学反応を利用することにより様々な材料との融合が可能であり、融合を低コストで行うことができる。たとえば、磁性元素同時置換チタニアナノシートと、有機ポリマー、無機高分子、金属錯体、または多核水和物イオンを含む無機化合物の少なくともいずれかの1種の薄膜が組み合わされた薄膜から構成される磁性人工超格子が実現可能である。したがって、本発明の磁性同時置換チタニアナノシートは、光アイソレータなどの情報通信技術分野、ナノスピンエレクトロニクス、分子エレクトロニクスなどの技術分野に極めて有用であると結論される。   In addition, garnet-based materials that are currently in practical use as magneto-optical materials have been difficult to fuse with semiconductor elements and molecular electronics. However, magnetic element simultaneous substitution titania nanosheets do not undergo soft chemical reactions such as self-organization. By using it, fusion with various materials is possible, and fusion can be performed at low cost. For example, a magnetic artificial article composed of a thin film in which a magnetic element simultaneous substitution titania nanosheet and an organic polymer, an inorganic polymer, a metal complex, or an inorganic compound containing a polynuclear hydrate ion are combined. A superlattice is feasible. Therefore, it can be concluded that the magnetic co-substituted titania nanosheet of the present invention is extremely useful in the fields of information communication technology such as optical isolators, nanospin electronics, and molecular electronics.

さらに、本発明により提供されるチタニアあるいは磁性半導体をベースとした材料技術は、環境にやさしい21世紀型のITネットワーク社会構築において活躍するものと期待される。現在の光アイソレータ材料であるガーネット系における環境面での課題が、鉛含有の問題である。光アイソレータの代表例である希土類鉄ガーネットでは、結晶成長の際にフラックスとして酸化鉛の利用が不可欠であり、このために結晶中には酸化鉛が5000ppm程度含まれている。2006年7月に欧州連合では、電気・電子機器に含まれる鉛をRoHS指令により環境規制対象物質として撤廃することで決定したが、光アイソレータについては、技術的な問題から例外措置として鉛含有基準を1000ppm以下に規制する方向で進められており、基準を完全にクリアする非鉛系材料の開発が望まれていた。その点、本発明により提供される磁気光学材料は、チタニアをベースとした、鉛を全く含まない材料であり、次世代の低環境負荷グリーン技術としても重要な役割を果たすことが期待される。   Furthermore, the material technology based on titania or magnetic semiconductor provided by the present invention is expected to play an active role in the construction of an environment-friendly 21st century IT network society. An environmental problem in the garnet system, which is the current optical isolator material, is a lead-containing problem. In rare earth iron garnet, which is a typical example of an optical isolator, it is indispensable to use lead oxide as a flux during crystal growth. For this reason, about 5000 ppm of lead oxide is contained in the crystal. In July 2006, the European Union decided to eliminate lead contained in electrical and electronic equipment as an environmentally regulated substance in accordance with the RoHS Directive. Therefore, the development of lead-free materials that completely satisfy the standards has been desired. In that respect, the magneto-optical material provided by the present invention is a material that does not contain lead at all based on titania, and is expected to play an important role as a next-generation low environmental load green technology.

本発明は、磁性半導体技術とナノテクノロジーによって、光アイソレータや高密度光磁気記録などの高度情報通信技術分野に応用して好適な、可視光を透過し、かつ用いた紫外光から近赤外光の広い波長領域で高い磁気光学特性を示す磁性ナノ薄膜を創出しようというものである。   The present invention is applicable to advanced information communication technology fields such as optical isolators and high-density magneto-optical recording by magnetic semiconductor technology and nanotechnology, and transmits visible light and uses ultraviolet light to near infrared light. The aim is to create a magnetic nano-thin film that exhibits high magneto-optical properties in a wide wavelength region.

本発明で提供する磁性同時置換チタニアナノシートで生み出した磁気光学の応用は多岐に渡っており、光アイソレータ、光磁気記録素子、光磁界センサ、光スイッチなどの高度情報通信技術分野などがあげられる。特に、光アイソレータの応用においては、本発明により提供される磁気光学材料は、チタニアをベースとした、鉛を全く含まない材料であり、環境にやさしい21世紀型のITネットワーク社会構築において活躍するものと期待される。   The applications of magneto-optics produced by the magnetic simultaneous substitution titania nanosheets provided by the present invention are diverse, including advanced information communication technology fields such as optical isolators, magneto-optical recording elements, magneto-optical sensors, and optical switches. In particular, in the application of optical isolators, the magneto-optical material provided by the present invention is a titania-based material that does not contain lead at all, and plays an active role in building an environmentally friendly 21st century IT network society. It is expected.

さらに、本発明では、従来の薄膜プロセスの主流である、大型の真空装置や高価な成膜装置を必要としない、低コスト、低環境負荷プロセスを実現することができる。したがって、本発明の磁性同時置換チタニアナノシートを磁気光学材料が基幹部品となっている、光アイソレータ、光磁気記録素子、光磁界センサ、光スイッチなどの高度情報通信技術分野、ナノエレクトロニクスなどの技術分野に使用すれば極めて有用であると結論される。   Furthermore, in the present invention, it is possible to realize a low cost and low environmental load process which does not require a large vacuum apparatus or an expensive film forming apparatus, which is the mainstream of conventional thin film processes. Therefore, the magnetic simultaneous substitution titania nanosheet of the present invention is a key component of a magneto-optic material, such as an optical isolator, a magneto-optical recording element, a magneto-optical sensor, and an optical switch, and a technical field such as a nanoelectronics. It is concluded that it is extremely useful when used in

Claims (7)

磁性ナノ薄膜を用いた非鉛系磁性光学素子であって、前記磁性ナノ薄膜が、チタン格子位置に2種の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートからなり、
前記2種の磁性元素の組み合わせはそれぞれCo 2+ (d )及びFe 3+ (d )と同じスピン配置を有する元素の組み合わせである
ことを特徴とする非鉛系磁性光学素子。
A non-lead-based magnetic optical device using magnetic nano thin film, the magnetic element the magnetic nano thin film is obtained a layered titanic oxide were simultaneously replaced with two different magnetic elements in the titanium lattice sites by a single layer peeling Ri Do from simultaneous substitution titania nano-sheet,
The two combinations of magnetic elements each Co 2+ (d 7) and Fe 3+ (d 5) and the non-lead-based magnetic optical element to which is a combination wherein <br/> that elements having the same spin configuration.
前記磁性元素同時置換チタニアナノシートが、組成式Ti1−x−yM’(ただし、Mは、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれる磁性金属、M’は、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれるM以外の磁性金属少なくとも1種、0<x+y<1)で示されることを特徴とする請求項1に記載の非鉛系磁性光学素子。 The magnetic element simultaneous substitution titania nanosheet has a composition formula Ti 1-xy M x M ′ y O 2 (where M is a magnetic metal selected from V, Cr, Mn, Fe, Co, Ni, Cu, M The non-lead according to claim 1, wherein 'is represented by at least one magnetic metal other than M selected from V, Cr, Mn, Fe, Co, Ni, and Cu, 0 <x + y <1) Magnetic optical element. MとM'が同一元素であり、MとM'の価数が相互に異ならせてあることを特徴とする請求項2に記載の非鉛系磁性光学素子。   The lead-free magnetic optical element according to claim 2, wherein M and M 'are the same element, and the valences of M and M' are different from each other. 前記磁性元素同時置換チタニアナノシートが、組成式Ti1−x−yCoFe(ただし、0<x+y<1)で示されることを特徴とする請求項1に記載の非鉛系磁性光学素子。 The lead-free magnetic material according to claim 1, wherein the magnetic element simultaneous substitution titania nanosheet is represented by a composition formula Ti 1-xy Co x Fe y O 2 (where 0 <x + y <1). Optical element. 前記磁性ナノ薄膜は、磁性元素同時置換チタニアナノシートと、有機ポリマー、無機高分子、金属錯体または多核水和物イオンを含む無機化合物の少なくともいずれかの1種の薄膜が組み合わされた薄膜であることを特徴とする請求項1から4のいずれかに記載の非鉛系磁性光学素子。   The magnetic nano thin film is a thin film in which a magnetic element simultaneous substitution titania nano sheet and an organic polymer, an inorganic polymer, a metal complex, or an inorganic compound containing a polynuclear hydrate ion are combined. The lead-free magneto-optical element according to claim 1, wherein 請求項1から5のいずれかに記載の非鉛系磁性光学素子の製造方法であって,チタン格子位置に2種の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートを、カチオン性物質として有機ポリカチオンを介して基板上に積層してその磁性ナノ薄膜を形成することを特徴とする非鉛系磁性光学素子の製造方法。 A method of manufacturing a non-lead-based magnetic optical element according to any one of claims 1 to 5, the resulting layered titanic oxide were simultaneously substituting two different magnetic elements in the titanium lattice sites by a single layer peeling A method for producing a lead-free magnetic optical element, wherein a magnetic nano-thin film is formed by laminating magnetic element simultaneous substitution titania nanosheets on a substrate via an organic polycation as a cationic substance. 磁性元素同時置換チタニアナノシートを基板上にスピンコートまたはディップコートすることにより磁性ナノ薄膜を形成することを特徴とする請求項6に記載の非鉛系磁性光学素子の製造方法。   7. The method for producing a lead-free magnetic optical element according to claim 6, wherein the magnetic nano thin film is formed by spin-coating or dip-coating the magnetic element simultaneous substitution titania nanosheet on the substrate.
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