JP5318593B2 - Air supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air supply device capable of constantly keeping the air supplied to a clean room from an air blower for air supply. <P>SOLUTION: This air supply device 13 includes an air supply duct 17, the air blower 18 for distributing the air to the clean rooms 11, 12, a motor damper 19 for adjusting the amount of air flowing into the air blower 18 by swirling of a swirl vane 24, a pressure sensor 20 for measuring of a pressure of the air passing through the duct 17, and a control device 23 for adjusting an opening of the swirl vane 24. The control device 23 has a pressure comparing means for comparing the measured pressure output from the pressure sensor 20 with a first set pressure, and a pressure control means for adjusting the opening of the swirl vane 24 to recover the measured pressure within a range of the first set pressure, when a prescribed amount of air enters into the duct 17 by action of the air blowing outside of an air intake port 22, and the measured pressure gets out of the range of the first set pressure. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an air supply device that supplies air to an air supply target chamber via an air supply duct.

  Casing installed in the air supply duct that connects to the clean room, multiple blowers that are arranged in series inside the casing and capable of changing the air pressure, and arranged in parallel inside the casing to change the air volume of the air There is a pressure control unit having a plurality of blowers, a controller that adjusts the pressure and air volume of air supplied to the clean room by changing the outputs of the blowers, and a pressure sensor that is connected to the controller and measures the pressure in the clean room (See Patent Document 1).

  In this pressure control unit, air (outside air) is taken into an air supply duct from an air intake port located outdoors, and air passing through the air supply duct is sent to the clean room by these blowers. The controller stores a set pressure of the clean room for keeping the clean room at a positive pressure. The pressure sensor outputs the measured pressure in the clean room to the controller. The controller compares the set pressure with the measured pressure output from the pressure sensor.If the measured pressure is out of the set pressure range, the controller changes the output of the blower to adjust the air pressure or air volume, and adjust the measured pressure. Return to the set pressure range.

  JP 2006-329440 A

  When a strong wind blows near the outside of the air intake port located outdoors, a large amount of excess air may enter the air supply duct from the air intake port due to the influence of the wind. The air that has entered the air supply duct from the air intake port flows into the blower from the inlet of the blower, and depending on the pressure (inflow amount), the pressure of the air supplied from the blower is increased, and the set pressure is increased. There is a case where a large amount of air is supplied from the blower into the clean room at a pressure significantly higher. In the pressure control unit disclosed in the above publication, since there is no means for keeping the air flowing into the blower from the air supply duct constant, a large amount of air may flow into the blower irregularly and irregularly due to the influence of the wind. is there. When a large amount of air flows into the blower, this pressure control unit cannot keep the air sent out from the blower constant, resulting in excessive supply of air supplied from the blower to the clean room, and setting the indoor air pressure in the clean room It cannot be held at pressure.

  The objective of this invention is providing the air supply apparatus which can hold | maintain the air supplied to an air supply object chamber from a fan uniformly by making a constant pressure and a fixed quantity of air flow in into a fan.

An air supply apparatus according to the present invention for solving the above problems includes an air supply duct connected to an air supply target chamber, an air blower that sends air passing through the air supply duct into the air supply target chamber, an air blower, and an air intake port. A motor damper that adjusts the amount of air flowing into the blower by swirling of the swirl vane, and a supply duct that extends between the blower and the motor damper and that passes through the duct. Installed in a pressure sensor that measures pressure, a control device that adjusts the opening degree of the rotating blades of the motor damper, and an air supply duct that extends between the air intake and the motor damper, depending on the pressure of the air passing through the air supply duct and an exhaust unit provided with a check valve damper escape the air in the air supply duct to the outside of the duct Te, controller, preset supply air duct and the measured pressure output from the pressure sensor A predetermined amount of air enters the air supply duct by the action of the pressure comparison means for comparing the first set pressure and the wind blown outside the air intake port, whereby the measured pressure deviates from the range of the first set pressure. And a pressure control means for adjusting the opening of the swirl vane of the motor damper to return the measured pressure to the range of the first set pressure , the check valve damper having a shaft attached to the exhaust unit, The check valve damper is configured so that the second set pressure in the air supply duct set in advance and the weight of the swirl blade are balanced with each other. When the weight of the swirl vane is adjusted and the pressure in the air supply duct exceeds the second set pressure, the swirl vane swirls in the direction to open the exhaust unit against the weight of the swirl vane. Predetermined in the air flow path Characterized that you have the air outlet of the product is formed.

As an example of the air supply device according to the present invention, in the pressure control means, when the measured pressure exceeds the range of the first set pressure, the opening degree of the rotating blades of the motor damper is reduced, and the measured pressure is less than the range of the first set pressure. when the ing, if not fully open the opening of the swirl vanes of the motor-damping increases the opening degree of the orbiting blades, the measured pressure returns to within a first set pressure, opening of the swirl vanes of the motor-damping at that time Keep the degree.

  As another example of the air supply device according to the present invention, the first set pressure is in the range of −40 Pa to 40 Pa.

  As another example of the air supply device according to the present invention, the turning speed of the turning blades of the motor damper is in the range of 1 to 5 s / Full Scale.

  As another example of the air supply device according to the present invention, the minimum opening of the blade when the opening of the swirl blade of the motor damper is reduced is in the range of 3 to 5%.

As another example of the air supply device according to the present invention, the second set pressure is in the range of 5 Pa to 20 Pa .

As another example of the air supply device according to the present invention, the check valve damper has a stopper that prevents the swirling blade from further turning when the exhaust unit is closed by the swirling blade .

  According to the air supply device of the present invention, when the measured pressure deviates from the first set pressure range due to the air that has entered the air supply duct, the control device adjusts the opening of the swirl vane of the motor damper to adjust the measured pressure. Since the pressure is returned to within the range of 1 set pressure, there is no influence of the wind blown outside the air intake port, and a large amount of air does not flow into the blower irregularly and irregularly. Since the air supply device can stably flow a constant pressure and a constant amount of air into the blower, the air supplied from the blower to the air supply target chamber can be kept constant, and excessive supply of air in the blower Can be prevented, and the air pressure in the air supply target chamber can be kept constant. This air supply device is particularly effective for use in clean rooms where it is required to strictly control the pressure and amount of air supplied from the blower, and it is possible to create an air-conditioning environment in which there is no fluctuation in indoor air pressure in the clean room It is.

  When the measured pressure exceeds the range of the first set pressure, the opening degree of the swirl vane of the motor damper is reduced. When the measured pressure becomes less than the range of the first set pressure, the opening degree of the swirl vane of the motor damper is not fully opened. When the opening degree of the swirl vane is increased and the measured pressure returns to the range of the first set pressure, the air supply device that holds the opening degree of the swirl vane of the motor damper at that time is a wind blown outside the air intake port. If a large amount of excess air enters the air supply duct due to the influence of the air flow, the opening of the rotating blades of the motor damper becomes smaller and restricts the inflow of the entered air into the blower. Thus, the air supplied to the air supply target chamber from the blower can be kept constant. When the measured pressure falls below the range of the first set pressure, the air supply device increases the opening of the swirl blade to prevent the flow of air into the blower. It can be made to flow into the blower, and the air supplied from the blower to the air supply target chamber can be kept constant. When the measured pressure returns to the range of the first set pressure, the air supply device maintains the opening degree of the rotating blades of the motor damper at that time, so that a constant amount of air and a constant amount of air can flow stably into the blower. The air supplied from the blower to the air supply target chamber can be kept constant.

  In the air supply device in which the first set pressure is in the range of −40 Pa to 40 Pa, the inside of the air supply duct needs to be held at a negative pressure in order to stably flow a constant pressure and a constant amount of air into the blower. By setting the first set pressure within the above range, even if excess air enters the air supply duct from the air intake port, the motor damper operates quickly, and the air in the duct extending between the damper and the blower Can be prevented from becoming positive. This air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and can stably flow a constant pressure and a constant amount of air into the blower. The air supplied to can be kept constant.

  The air supply device in which the swirl speed of the swirl vane of the motor damper is in the range of 1 to 5 s / Full Scale allows excess air to enter the air supply duct from the air intake port by setting the swirl speed of the swirl vane to the above range. Even so, the swirl vanes of the motor damper swivel instantaneously, so that the measured pressure can be quickly returned to the range of the first set pressure, and the pressure of the air in the duct extending between the damper and the blower is positive. Can be prevented. This air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and can stably flow a constant pressure and a constant amount of air into the blower. The air supplied to can be kept constant.

  When the opening degree of the swirl blade is fully closed (0%), the air supply device in which the minimum opening degree of the swirl blade when the opening degree of the swirl blade of the motor damper is reduced is in the range of 3 to 5%. However, the minimum opening of the blade when the opening of the swirl blade of the motor damper is reduced is maintained at 3 to 5%. Therefore, the state where the air is not blown from the blower to the air supply target chamber is avoided, and an extreme decrease in the indoor air pressure of the air supply target chamber can be prevented.

  A supply unit having an exhaust unit provided with a check valve damper that is installed in an air supply duct extending between the air intake port and the motor damper and releases the air in the duct to the outside of the duct according to the pressure of the air passing through the air supply duct. Even if a large amount of excess air instantaneously enters the air supply duct from the air intake port and the swirling blades of the motor damper cannot fully support the air supply, the air supply device uses the check valve damper to supply air. The air that has entered the duct can escape from the exhaust unit to the outside of the duct. This air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and can stably flow a constant pressure and a constant amount of air into the blower. The air supplied to can be kept constant.

  A check valve damper is formed of a shaft attached to the exhaust unit, a swirling blade that opens and closes the unit, and a weight that swirls the swirling blade in a direction to close the unit. The second set pressure and the weight in the air supply duct are In the air supply device in which the weight of the weight is adjusted so as to be balanced, when the pressure in the air supply duct exceeds the second set pressure, the swirl vane opens the air flow path of the exhaust unit against the weight of the weight. Even if a large amount of excess air instantaneously enters the air supply duct from the air intake port and the swirl of the rotating blades of the motor damper cannot cope with it, the check valve damper is used to enter the air supply duct. Air can escape from the exhaust unit to the outside of the duct. The air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and allows a constant pressure and a constant amount of air to stably flow into the blower. The supplied air can be kept constant. In this air supply device, when the pressure in the air supply duct returns to the range of the second set pressure, the swirl vane closes the air flow path of the exhaust unit due to the weight of the weight, so that more air than necessary is external to the unit. The exhaust air is not exhausted, and the decrease in the inflow of air into the blower can be prevented.

  The check valve damper is formed of a shaft attached to the exhaust unit and a swirl vane that closes the unit by its own weight, and the swirl vane weight is adjusted so that the second set pressure in the air supply duct and the swirl vane weight are balanced. When the pressure in the air supply duct exceeds the second set pressure, the adjusted air supply device opens the air flow path of the exhaust unit against the weight of the swirl vane. Even if excess air enters the air supply duct from the air intake and the swirl of the motor damper's swirl blade cannot cope with it, the air that has entered the air supply duct using the check valve damper is removed from the exhaust unit. Can escape outside the duct. The air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and allows a constant pressure and a constant amount of air to stably flow into the blower. The supplied air can be kept constant. In this air supply device, when the pressure in the air supply duct returns to the range of the second set pressure, the swirl vane closes the air flow path of the exhaust unit due to the weight of the swirl vane. The air is not exhausted to the outside, and a decrease in the inflow of air into the blower can be prevented.

  The air supply device in which the second set pressure is in the range of 5 Pa to 20 Pa can be reversed even if a large amount of excess air enters the supply duct from the air intake port by setting the second set pressure in the above range. The swirl vane of the stop valve damper can be swirled quickly to allow air to escape quickly from the exhaust unit to the outside of the duct, ensuring that the air pressure in the duct extending between the damper and the blower is positive. Can be prevented. This air supply device does not allow a large amount of air to flow into the blower irregularly and irregularly, and can stably flow a constant pressure and a constant amount of air into the blower. The air supplied to can be kept constant.

  An air supply device having a stopper that prevents further rotation of the swirl vane when the exhaust unit is closed by the swirl vane, even if air from the outside tries to enter the air supply duct through the exhaust unit. When the air flow path of the unit is closed by the swirl vane, further swirling of the swirl vane is blocked by the stopper, so that the exhaust unit is not opened and the backflow of external air from the unit is prevented be able to.

The block diagram which shows an example of the room pressure control system containing an air supply apparatus. The block diagram which shows an example of the room pressure control system containing an air supply apparatus. The block diagram of the air supply apparatus shown as an example. The flowchart which shows each means which the control apparatus of a motor damper performs. The block diagram which shows another example of the room pressure control system containing an air supply apparatus. The block diagram which shows another example of the room pressure control system containing an air supply apparatus. The block diagram of the air supply apparatus shown as another example. The partially broken perspective view which shows an example of the exhaust unit containing a non-return valve damper. The partially broken perspective view which shows an example of the exhaust unit containing a non-return valve damper. The partially broken side view of the exhaust unit containing a non-return valve damper. The partially broken side view of the exhaust unit containing a non-return valve damper. The block diagram of the air supply apparatus shown as another example. The partially broken perspective view which shows another example of the exhaust unit containing a non-return valve damper. The partially broken perspective view which shows another example of the exhaust unit containing a non-return valve damper.

  The details of the air supply device according to the present invention will be described with reference to the accompanying drawings. 1 and 2 are configuration diagrams showing an example of a room pressure control system 10A including an air supply device 13, and FIG. 3 is a configuration diagram of the air supply device 13 shown as an example. FIG. 1 shows the clean rooms 11 and 12 (air supply target rooms) from above, and FIG. 2 shows the clean rooms 11 and 12 from the side. In addition, although the clean rooms 11 and 12 are illustrated as the air supply target rooms, the air supply target rooms are not limited to the clean rooms 11 and 12, and all rooms are included as the air supply target rooms. In addition, although two clean rooms 11 and 12 (air supply target rooms) are illustrated, the number of air supply target rooms is not limited to two, and room pressure control is performed on one or three or more air supply target rooms. The system 10A and the air supply device 13 can be applied.

  The room pressure control system 10 </ b> A is formed of an air supply device 13 that supplies air (outside air) to the clean rooms 11 and 12 having a predetermined volume, and an exhaust device 14 that exhausts air from the clean rooms 11 and 12. The clean rooms 11 and 12 are surrounded on the four sides by a ceiling, a floor, and side walls. An air supply port (not shown) for taking air into the clean rooms 11 and 12 is provided on the ceiling. A gallery exhaust port 15 for exhausting air from the clean rooms 11 and 12 is provided on the side wall. On the side wall, a door 16 for entering and exiting the clean rooms 11 and 12 is installed. The indoor air pressures of the clean rooms 11 and 12 are maintained at a preset target indoor air pressure. The target room pressure in the clean rooms 11 and 12 is not particularly limited, and the target room pressure can be set as appropriate depending on the use and volume of the clean rooms 11 and 12.

  The air supply device 13 includes a metal air supply duct 17 connected to the clean rooms 11 and 12, and an air supply fan 18 (forcibly sending a predetermined amount of air (outside air) passing through the air supply duct 17 into the clean rooms 11 and 12. An air blower), a motor damper 19 that adjusts the amount of air flowing into the blower 18, a pressure sensor 20 that measures the pressure of the air passing through the air supply duct 17, and a constant air that is supplied to the clean rooms 11 and 12. And an air volume unit 21. The air supply fan 18 and the constant air volume unit 21 are attached to the air supply duct 17. The blower 18 is connected to a controller (not shown) via an interface. The controller holds the output of the blower 18 at the set value, and keeps the pressure and amount of air sent from the blower 18 constant. In this embodiment, the air supply device 13 includes the constant air volume unit 21, but the air supply device 13 may not include the constant air volume unit 21.

  The air supply duct 17 is disposed in the ceiling space and extends between an air supply port provided on the ceiling and an air intake port 22 provided outdoors. The air supply duct 17 conveys the air flowing in from the air intake port 22 to the clean rooms 11 and 12. The motor damper 19 is installed in an air supply duct 17 a extending between the blower 18 and the air intake port 22. The pressure sensor 20 is installed in an air supply duct 17 b extending between the blower 18 and the motor damper 19. The constant air volume unit 21 is installed in an air supply duct 17 c extending between the clean rooms 11 and 12 and the blower 18. In the air supply device 13, the motor damper 19, the pressure sensor 20, the blower 18, and the constant air volume unit 21 are arranged in this order from the air intake port 22 toward the clean rooms 11 and 12.

  The constant air volume unit 21 adjusts the amount of air passing through the unit 21 in response to fluctuations in the internal air pressure of the air supply duct 17c, and always keeps the air volume supplied to the clean rooms 11 and 12 constant. Air (outside air) taken in from the air intake port 22 flows into the air supply blower 18 through the motor damper 19, enters the constant air volume unit 21 through the duct 17 from the blower 18, and then enters the duct from the unit 21. It flows into the clean rooms 11 and 12 through 17.

  The motor damper 19 includes a modular roll motor (not shown), a control device 23 for controlling the rotation of the motor (adjusting the opening degree of the swirl blade 24 of the motor damper 19), and a swirl blade 24 swirling by the driving force of the motor. And an air flow path (not shown) that is opened and closed by turning the swirl vane 24. The control device 23 of the motor damper 19 is a microprocessor having a central processing unit that performs arithmetic processing and a memory (storage unit) that can store various conditions. In the motor damper 19, the module roll motor is rotated by the control signal from the control device 23 and the swirl vane 24 is swung to a predetermined angle, and the opening degree (swirling angle) of the vane 24 with respect to the air flow path is adjusted. Adjust the amount of air passing through. An input device for inputting various conditions and a display device for input confirmation are connected to the control device 23 via an interface (not shown). The motor damper 19 can be a parallel blade damper or a counter blade damper. The pressure sensor 20 is connected to the control device 23 of the motor damper 19 through an interface.

  The turning speed of the turning blade 24 of the motor damper 19 is in the range of 1 to 5 s / Full Scale. When the turning speed exceeds 5 s / Full Scale, the response of the motor damper 19 decreases, and when the air enters the air supply ducts 17a and 17b from the air intake port 22 and the measured pressure increases rapidly, the turning blade 24 May not be able to respond quickly, and a large amount of air may flow into the air supply fan 18. In the motor damper 19, the swirl speed of the swirl vane 24 is in the range of 1 to 5 s / Full Scale. Therefore, even if the measured pressure increases rapidly, the swirl of the swirl vane 24 quickly responds.

  The minimum opening of the blade 24 when the opening of the swirl blade 24 of the motor damper 19 is reduced is set to a range of 3 to 5%, preferably 5%. Therefore, even if the opening degree of the swirl vane 24 is minimized, the vane 24 is not fully closed (opening degree 0%). The opening degree 3 to 5% is a ratio with respect to the opening degree when the blade is fully opened and the opening degree is 100%. For example, when the opening degree is 5%, the blade is opened by 5% with respect to 100% of the blade fully open.

  The memory of the control device 23 of the motor damper 19 stores the first set pressure of the air supply duct 17b. The first set pressure can be freely changed by an input device. The first set pressure is set in the range of −40 Pa to 40 Pa, preferably in the range of −30 Pa to 30 Pa, and more preferably in the range of −20 Pa to 20 Pa.

  The CPU of the control device 23 activates an application program stored in the memory based on control by the operating system, and executes the following means according to the application program. The CPU of the control device 23 executes pressure comparison means for comparing the measured pressure output from the pressure sensor 20 with the first set pressure in the air supply duct 17b set in advance. As a result of comparing the measured pressure with the first set pressure, the CPU of the control device 23 adjusts the opening of the swirl vane 24 of the motor damper 19 when the measured pressure is outside the range of the first set pressure. The pressure control means for returning the pressure to the range of the first set pressure is executed.

  The measured pressure is out of the first set pressure range when the measured pressure exceeds the first set pressure range or when the measured pressure is less than the first set pressure range. When the measured pressure exceeds the range of the first set pressure, the control device 23 determines the opening of the swirl vane 24 of the motor damper 19 unless the swirl vane 24 is at the minimum opening (opening 3 to 5%). The amount of air passing through the air flow path of the damper 19 is reduced. When the measured pressure is less than the first set pressure range, the control device 23 increases the opening of the blade 24 and passes through the air flow path of the damper 19 unless the swirl blade 24 is fully open (opening 100%). Increase the amount of air. When the measured pressure is within the first set pressure range, the control device 23 keeps the blades 24 fully open if the swirl blades 24 are fully open. Or if the blade | wing 24 is not fully open, the opening degree of the blade | wing 24 at that time is hold | maintained.

  The exhaust device 14 includes a metal exhaust duct 25 connected to the clean rooms 11, 12, an exhaust fan 26 for forcibly discharging a predetermined amount of air from the clean rooms 11, 12, and a constant amount of air discharged from the clean rooms 11, 12. And a constant air volume unit 27 to be held. The blower 26 is connected to a controller (not shown) via an interface. The controller keeps the output of the blower 26 at the set value, and keeps the pressure and amount of air sent from the blower 26 constant.

  The exhaust duct 25 is disposed below the floor and extends between the exhaust port 15 provided on the side wall and the exhaust port 28 provided outdoors. The exhaust duct 25 conveys the air flowing out from the exhaust port 15 to the outdoors. The exhaust fan 26 and the constant air volume unit 27 are attached to the exhaust duct 25. The constant air volume unit 27 adjusts the amount of air passing through the unit 27 with respect to fluctuations in the internal air pressure of the air supply duct 25, and always keeps the air volume exhausted from the clean rooms 11 and 12 constant. The air that has flowed out of the exhaust port 15 flows into the constant air volume unit 27, flows into the exhaust fan 26 from the unit 27 through the duct 25, passes through the duct 25 from the fan 26, and is exhausted to the outside from the exhaust port 28. The

  Although not shown, these constant airflow units 21 and 27 are formed of a motor damper and a wind speed sensor, a control device, and a housing for housing them. The motor dampers of the constant air volume units 21 and 27 are the same as the motor damper 19. In the constant air volume units 21 and 27, the module roll motor is rotated by the control signal from the control device, and the swirl blade is swung at a predetermined angle. The control device of the constant air volume units 21 and 27 is a microprocessor having a central processing unit that performs arithmetic processing and a memory (storage unit) that can store various conditions. An input device for inputting various conditions and a display device for input confirmation are connected to the control device via an interface (not shown).

  The memory of the control device of the constant air volume units 21 and 27 stores the correlation between the target indoor air pressure of the clean rooms 11 and 12 and the amount of air passing through the constant air volume units 21 and 27, and corresponds to the target indoor air pressure. The correlation between the air passage amount and the opening degree (turning angle) of the swirl blade of the motor damper corresponding to the air passage amount is stored. The target indoor pressure can be freely changed by an input device. When the target indoor air pressure is input, the control device of the constant air volume units 21 and 27 determines the air passage amount in the air flow path corresponding to the target indoor air pressure based on the correlation stored in the memory, and the air flow path After determining the opening degree of the swirl vane of the motor damper based on the correlation, the opening degree of the swirl vane is held to that determined.

  These constant air volume units 21 and 27 adjust the amount of air passing through the units 21 and 27 to the air pressure corresponding to the target room air pressure in response to fluctuations in the internal air pressure of the ducts 17 and 25, and supply air to the clean rooms 11 and 12. While keeping the amount constant, the amount of air exhausted from the clean rooms 11 and 12 is kept constant. Specifically, it is as follows. The control devices of the constant air volume units 21 and 27 calculate the air passage amount passing through the air flow path of the motor damper from the wind speed output from the wind speed sensor, and calculate the calculated air passage amount and the air passage amount corresponding to the target indoor pressure. Compare. When the calculated air passage amount is larger than that corresponding to the target indoor pressure, the control device decreases the opening degree of the swirl vane of the motor damper and decreases the air passage amount passing through the air flow path. The control device maintains the opening degree of the swirling blade at that time when the calculated air passage amount falls within the range corresponding to the target indoor pressure after reducing the opening degree of the swirling blade. When the calculated air passage amount is smaller than that corresponding to the target indoor pressure, the control device increases the opening degree of the rotating blades of the motor damper and increases the air passage amount passing through the air flow path. The control device maintains the opening degree of the swirling blade at that time when the calculated air passage amount falls within the range corresponding to the target indoor pressure after increasing the opening degree of the swirling blade.

  FIG. 4 is a flowchart illustrating an example of each unit executed by the control device 23 of the motor damper 19. An example of the process of the air supply device 13 executed by the control device 23 will be described based on the flowchart of FIG. When the room pressure control system 10A is activated, the blowers 13 and 14, the motor damper 19, the pressure sensor 20, and the constant air volume units 21 and 27 are operated. The pressure sensor 20 measures the pressure of the air flowing through the air supply duct 17 b and outputs the measured pressure to the control device 23.

  In the room pressure control system 10A, as shown by arrows A1 in FIGS. 1 and 2, a predetermined amount of air is supplied from the air supply duct 17 into the clean rooms 11 and 12 via the air supply fan 18, and the arrow A2 As shown, a predetermined amount of air is discharged from the clean rooms 11 and 12 to the exhaust duct 25 via the exhaust fan 26. At the start of operation of the system 10A, the output of the air supply blower 18 is adjusted so that an amount of air corresponding to the first set pressure passes through the air flow path of the motor damper 19, and is output from the pressure sensor 20. The measured pressure is within the range of the first set pressure. Therefore, the motor damper 19 is operated with its swirl vanes 24 fully opened (opening 100%) (S-1).

  Further, in this system 10A, even if pressure fluctuation occurs in the air flowing through the air supply duct 17c extending between the blower 18 and the constant air volume unit 21, the air flow rate of the duct 17c is reduced by the constant air volume unit 21. The air is kept constant and a constant amount of air is always supplied to the clean rooms 11 and 12. Further, in the exhaust duct 25 extending between the blower 26 and the constant air volume unit 27, even if pressure fluctuations occur in the air flowing therethrough, the air passage amount of the duct 25 is kept constant by the constant air volume unit 27, so that A certain amount of air is exhausted from the clean rooms 11 and 12.

  If a strong wind blows near the outside of the air intake port 22 located outdoors, a large amount of excess air may enter the air supply duct 17a from the air intake port 22 due to the influence of the wind. When a large amount of air enters from the air intake port 22, the air flows into the blower 18 through the air supply duct 17, boosts the pressure of the air supplied from the blower 18, and the air set in the blower 18. There is a case where air having a pressure and an amount significantly exceeding the pressure and amount flows into the constant air volume unit 21. In the constant air volume unit 21, the amount of air passing therethrough is kept constant by adjusting the opening degree of the swirl vanes of the motor damper. However, if a large amount of air flows in at a time, the motor damper does not catch up with the unit 21. A large amount of air may flow into the clean rooms 11 and 12 through the air, and the clean rooms 11 and 12 may not be maintained at the target room pressure.

  However, in the air supply device 13 in this system 10A, the amount of air passing through the duct 17b (the amount of air passing through the air flow path of the motor damper 19) is monitored, and the amount of air passing through the duct 17b is kept constant. A large amount of air does not flow irregularly and irregularly into the air supply fan 18. Specifically, the control device 23 of the motor damper 19 compares the measured pressure output from the pressure sensor 20 with the first set pressure stored in the memory (pressure comparison means) (S-2). Next, as a result of comparing the measured pressure with the first set pressure, the control device 23 determines whether the measured pressure is within the range of the first set pressure (S-3).

  When the control device 23 of the motor damper 19 determines that the measured pressure is within the range of the first set pressure, it holds the opening degree of the swirl blade 24 at that time (if the blade 24 is fully open, it holds fully open, Otherwise, the system 10A is operated in a state where the opening degree is maintained. Next, the control device 23 determines whether to stop the system 10A (S-4). When there is an instruction to stop the system 10A, the control device 23 stops the operation of the system 10A. When the system 10A is continuously operated, the process returns to Step 2 (S-2), the measured pressure is compared with the first set pressure, and the process from Step 2 (S-2) is repeated.

  When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is not within the range of the first set pressure, if the measured pressure exceeds the range of the first set pressure, the swirl vane If the opening degree of 24 is the minimum opening degree (opening degree 3 to 5%), the opening degree is maintained, and if the opening degree of the swirl blade 24 is not the minimum opening degree (opening degree 3 to 5%), the blade The opening degree of 24 is made small (S-5). Even if the opening degree of the blades 24 is reduced, the opening degree is not reduced to less than 3 to 5%, and the blades 24 are not fully closed.

  The control device 23 of the motor damper 19 corresponds to the correlation between the first set pressure of the air supply duct 17b and the air passage amount corresponding to the first set pressure, each measured pressure output from the pressure sensor 20, and these measured pressures. Correlation with the air passage amount, and the opening degree (swing angle) of the swirl vane 24 of the motor damper 19 corresponding to the air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. Based on this, the opening degree of the blade 24 can be determined. In this case, the correlation of the control device 23 and the opening degree of the blade 24 are stored in the memory.

  Specifically, it is as follows. When the measured pressure exceeds the range of the first set pressure, the control device 23 responds to the first set pressure based on the correlation between the first set pressure and the air passage amount corresponding to the first set pressure. And determining the air passage amount corresponding to the measurement pressure output from the pressure sensor 20 based on the correlation between the measurement pressure and the air passage amount corresponding to the measurement pressure. The air passage amount corresponding to the measurement pressure is larger than the air passage amount corresponding to the first set pressure.

  Further, the control device 23 calculates an air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The calculated air passage amount is positive. The control device 23 calculates the air passage calculated based on the opening degree of the swirl vane 24 of the motor damper 19 corresponding to the air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The opening degree of the rotating blade 24 of the motor damper 19 corresponding to the amount is determined. Note that the opening degree of the swirl vane 24 is negative. Therefore, if the opening degree of the turning blade 24 is not the minimum opening degree, the control device 23 reduces the opening degree of the turning blade 24 (S-5).

  The control device 23 of the motor damper 19 determines whether to stop the system 10A after holding the opening degree of the swirl blade 24 at the minimum opening degree or reducing the opening degree of the blade 24 (S-4). When there is an instruction to stop the system 10A, the control device 23 stops the operation of the system 10A. When the system 10A is continuously operated, the system 10A is operated in a state where the minimum opening or the reduced opening is maintained, and the measurement pressure and memory output from the pressure sensor 20 are returned to Step 2 (S-2). Is compared with the first set pressure stored in (pressure comparison means) (S-2). When the opening degree of the swirl vane 24 is the minimum opening degree or the opening degree, the amount of air passing through the air flow path of the motor damper 19 decreases, the measured pressure decreases, and the measured pressure returns to the range of the first set pressure (pressure Control means). Therefore, even if a large amount of excess air flows into the air supply duct 17a from the air intake port 22, the amount of air flowing into the air supply blower 18 can be held corresponding to the first set pressure.

  When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is not within the first set pressure range, if the measured pressure is less than the first set pressure range, the swirl vane 24 is If it is fully open (opening degree 100%), the opening degree is maintained, and if the swirl blade 24 is not fully open, the opening degree of the blade 24 is increased (S-5).

  The case where the opening degree is determined based on each correlation stored in the memory and the opening degree of the blade 24 is as follows. When the measured pressure is less than the range of the first set pressure, the control device 23 determines the air corresponding to the first set pressure based on the correlation between the first set pressure and the air passage amount corresponding to the first set pressure. The passage amount is determined, and the air passage amount corresponding to the measurement pressure output from the pressure sensor 20 is determined based on the correlation between the measurement pressure and the air passage amount corresponding to the measurement pressure. The air passage amount corresponding to the measurement pressure is smaller than the air passage amount corresponding to the first set pressure.

  Further, the control device 23 calculates an air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The calculated air passage amount is negative. The control device 23 calculates the air passage calculated based on the opening degree of the swirl vane 24 of the motor damper 19 corresponding to the air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The opening degree of the rotating blade 24 of the motor damper 19 corresponding to the amount is determined. The opening degree of the swirl vane 24 is positive. Therefore, the control device 23 increases the opening degree of the blade 24 unless the swirl blade 24 is fully opened (S-5).

  The control device 23 of the motor damper 19 determines whether to stop the system 10A after holding the swirl blade 24 fully open or increasing the opening of the blade 24 (S-4). When there is an instruction to stop the system 10A, the control device 23 stops the operation of the system 10A. When the system 10A is continuously operated, the system 10A is operated in a state where the fully opened or enlarged opening is maintained, and the process returns to step 2 (S-2) and is stored in the memory and the measured pressure output from the pressure sensor 20. The first set pressure is compared (pressure comparison means) (S-2). When the opening degree of the swirl vane 24 is fully opened or increased, the amount of air passing through the air flow path of the motor damper 19 increases, the measured pressure rises, and the measured pressure returns to the range of the first set pressure (pressure control means). ). Therefore, the decrease in the inflow of air into the air supply fan 18 can be prevented, and the amount of air flowing into the fan 18 can be held corresponding to the first set pressure.

  When the wind that has blown near the outside of the air intake port 22 is settled and the entry of excess air from the air intake port 22 to the air supply duct 17a stops, the amount of air passing through the air flow path of the motor damper 19 turns. The measured pressure output from the pressure sensor 20 also decreases as it decreases compared to passing through the air flow path immediately after reducing the opening of the blade 24. When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is within the range of the first set pressure in the comparison (S-2) between the measured pressure and the first set pressure, then When the system 10A is operated with the opening of the swirl blade 24 maintained, and the system 10A is continuously operated, the measurement pressure is compared with the first set pressure by returning to Step 2 (S-2), Repeat the process from step 2 (S-2). Note that, after the opening degree of the swirl vane 24 is reduced, when the measured pressure output from the pressure sensor 20 decreases and the measured pressure falls below the first set pressure range, the opening degree of the swirl vane 24 is increased (S). -5).

  The control device 23 of the motor damper 19 blows again in the vicinity of the outside of the air intake port 22, so that a large amount of excess air enters the supply duct 17 a again, and the measured pressure is outside the range of the first set pressure. When the measured pressure exceeds the first set pressure, if the swirl vane 24 is not at the minimum opening, the opening of the vane 24 is reduced (S-5). After reducing the opening degree of the swirl vane 24, the control device 23 operates the system 10A while maintaining the reduced opening degree, returns to step 2 (S-2), and the measured pressure output from the pressure sensor 20 And the first set pressure stored in the memory (pressure comparison means) (S-2).

  The air supply device 13 causes the motor damper 19 to move when a large amount of excess air enters the air supply duct 17a due to the effect of wind blowing near the outside of the air intake port 22 and the measured pressure exceeds the first set pressure range. Since the opening degree of the swirl blade 24 is reduced, the inflow of the air that has entered into the blower 18 can be restricted, and a constant pressure and a constant amount of air can be stably flowed into the blower 18. A constant pressure and a constant amount of air can be stably introduced from 18 into the constant air volume unit 21. When the measured pressure falls below the range of the first set pressure, the air supply device 13 increases the opening of the swirl vane 24 of the motor damper 19 to prevent a decrease in the inflow of air into the blower 18. Can be made to flow stably into the blower 18, and a constant pressure and a constant amount of air can be made to flow stably from the blower 18 to the constant air volume unit 21. When the measured pressure returns to the range of the first set pressure, the air supply device 13 maintains the opening degree of the swirl blade 24 at that time, so that a constant amount of air and a constant amount of air can flow into the blower 18 stably. In addition, a constant pressure and a constant amount of air can be stably introduced from the blower 18 to the constant air amount unit 21. By using this air supply device 13, the indoor air pressure of the clean rooms 11, 12 can be maintained at the target indoor air pressure.

  The air supply device 13 has a first set pressure in the range of −40 Pa to 40 Pa, preferably in the range of −30 Pa to 30 Pa, more preferably in the range of −20 Pa to 20 Pa. Even if a large amount of excess air enters the duct 17a, the motor damper 19 can operate quickly to maintain the air pressure in the air supply duct 17b at a negative pressure. Since the air supply device 13 has a turning speed of the turning blade 24 of the motor damper 19 in the range of 1 to 5 s / Full Scale, even if air enters the air supply ducts 17a and 17b from the air intake port 22, the motor damper 19 The swirl vanes 24 can be swung instantaneously, and the measured pressure can be quickly returned to the range of the first set pressure, thereby preventing the air pressure in the duct 17b from becoming a positive pressure. In the air supply device 13, since the minimum opening of the blade 24 when the opening of the swirl blade 24 of the motor damper 19 is reduced is in the range of 3 to 5%, the opening of the blade 24 is fully closed (0%). In other words, the state where the air from the blower 18 to the constant air volume unit 21 is not blown is avoided, and an extreme decrease in the indoor air pressure of the clean rooms 11 and 12 can be prevented. The air supply device 13 is particularly effective for use in the clean rooms 11 and 12, which are required to strictly control the pressure and amount of air supplied from the blower 18. It is possible to create no air conditioning environment.

  5 and 6 are configuration diagrams showing another example of the room pressure control system 10B including the air supply device 13, and FIG. 7 is a configuration diagram of the air supply device 13 shown as another example. 8 and 9 are partially broken perspective views showing an example of the exhaust unit 29 including the check valve damper 30, and FIGS. 10 and 11 are partially broken side views of the exhaust unit 29 including the check valve damper 30. . FIG. 5 shows the clean rooms 11 and 12 (air supply target rooms) from above, and FIG. 6 shows the clean rooms 11 and 12 from the side. 8 and 10 show a state in which the air flow path 35 of the exhaust unit 29 is closed by the swirl vane 37. In FIG. 9, the swirl vane 37 swirls to open the air flow path 35 of the exhaust unit 29, and an opening 47 (air discharge port) having a predetermined area is formed in the air flow path 35. FIG. 11 shows a state where the swirl vane 37 is swung 90 degrees.

  The room pressure control system 10B includes an air supply device 13 that supplies air (outside air) to the clean rooms 11 and 12 having a predetermined volume, and an exhaust device 14 that exhausts air from the clean rooms 11 and 12, similar to that of FIG. Is formed. The system 10B is different from that shown in FIG. 1 in that the air supply device 13 has an exhaust unit 29 including a check valve damper 30 that allows air in the air supply duct 17a to escape to the outside of the duct 17. Since this is the same as that of the system 10A in FIG. 1, the same reference numerals as those in FIG.

  The air supply device 13 includes a metal exhaust unit 29 in addition to an air supply duct 17, an air supply fan 18 (blower), a motor damper 19, a pressure sensor 20, and a constant air volume unit 21. The exhaust unit 29 is installed in an air supply duct 17 a extending between the motor damper 19 and the air intake port 22, and extends downward from the duct 17. In addition, it is the same as that of the system 10A of FIG. The exhaust unit 29 is a hollow metal duct attached to the peripheral surface of the air supply duct 17a, and is formed in a quadrangular prism shape having first to fourth side walls 31 to 34 (see FIGS. 8 and 9). The exhaust unit 29 has a base end opening located on the air supply duct 17a side and a tip exhaust port located on the opposite side, and an air flow path 35 is formed therein.

  The check valve damper 30 is installed in the air flow path 35 of the exhaust unit 29, and releases the air in the air supply duct 17a to the outside of the duct 17 in accordance with the pressure of the air passing through the air supply duct 17a. The check valve damper 30 includes a rotation shaft 36 (shaft) that is rotatably attached to the exhaust unit 29, a swirl blade 37 that is attached to the rotation shaft 36 and opens and closes the air flow path 35 of the exhaust unit 29, and a rotation shaft. A weight 38 having a predetermined weight, which is attached to 36 and rotates the swirl vane 37 in a direction to close the air flow path 35 of the exhaust unit 29, and a stopper 39. The rotary shaft 36 is rotatably attached to the first and third side walls 31 and 33 of the exhaust unit 29. The rotating shaft 36 includes an inner portion 40 that extends inward of the unit 29, an outer portion 41 that extends through the first side wall 31 and extends outward of the unit 29, and a weight support bar 42 that extends radially outward from the outer portion 41. Have

  The swirl vane 37 is a rectangular metal plate having substantially the same area as the air flow path 35 of the exhaust unit 29, and is attached to the inner portion 49 of the rotation shaft 36 so as to be swivelable. The swirl vane 37 swirls in a direction to close the air flow path 35 and a direction to open the flow path 35 by the rotation of the rotation shaft 36. The stopper 39 is made of a metal plate, is attached to the inside of the fourth side wall 34, and extends from the side wall 34 toward the air flow path 35. When the tip of the swirl vane 37 comes into contact with the stopper 39, the swirl of the swirl vane 37 is stopped.

  Therefore, even if air from the outside enters the air supply duct 17 a through the air flow path 35 while entering from the front end opening of the exhaust unit 29, the air flow path 35 of the exhaust unit 29 is blocked by the swirl vane 37. When closed, the blades 37 are prevented from further swiveling by the stoppers 39, and the blades 37 do not swivel above the stoppers 39, so an opening 47 is formed in the air flow path 35 of the exhaust unit 29. In other words, the backflow of the outside air from the exhaust unit 29 to the air supply duct 17a can be prevented.

  The weight support rod 42 is detachably attached to the tip of the outer portion 41 of the rotating shaft 36. A mounting ring 43 is attached to the proximal end portion of the weight support rod 42. In order to attach the support rod 42 to the rotating shaft 36, the ring 43 is fitted into the outer portion 41 of the rotating shaft 36, and then the ring 43 is fixed to the outer portion 41 with screws 44. The support bar 42 can be removed from the outer portion 41 of the rotary shaft 36 by removing the screw 44 and removing the mounting ring 43 from the outer portion 41.

  The weight 38 is formed by forming a metal into a disk shape, and a circular insertion port is formed at the center thereof. The weight 38 is detachably attached to the weight support rod 42. Fixing rings 45 are arranged on both sides of the weight 38. In order to attach the weight 38 to the weight support rod 42, after one fixing ring 45 is fitted into the support rod 42, the insertion port of the weight 38 is inserted into the support rod 42, and the other fixing ring 45 is further attached to the support rod 42. 42, the weights 38 are sandwiched between the rings 45, and the rings 45 are fixed to the support rod 42 with screws 46. By changing the fixing position of the ring 45 on the support rod 42, the attachment position of the weight 38 on the support rod 42 can be adjusted. The ring 45 and the weight 38 can be removed from the support bar 42 by removing the screw 46 and extracting the ring 45 and the weight 38 from the support bar 42.

  In the state where the swirl vane 37 shown in FIG. 10 closes the air flow path 35 or the swirl vane 37 shown in FIG. 11 has swirled approximately 90 degrees, the weight 38 is on the left of the virtual vertical line N passing through the center of the rotation shaft 36. Located in the direction. Therefore, the weight 38 turns the swirl vane 37 in the direction to close the air flow path 35 of the exhaust unit 29 by its weight. The swirl vane 37 is constantly urged by a weight 38 in a direction to close the air flow path 35 of the exhaust unit 29.

  If a strong wind blows near the outside of the air intake port 22 located outdoors, a large amount of excess air may enter the air supply duct 17a from the air intake port 22 due to the influence of the wind. When a large amount of air enters from the air intake 22, the air enters the exhaust unit 29 through the air supply duct 17, and from the base end opening of the exhaust unit 29 as indicated by an arrow L 3 in FIGS. The air that has flowed into the unit 29 flows toward the upper surface of the swirl vane 37, and a predetermined pressing force acts on the swirl vane 37 by the air pressure. The air flowing toward the upper surface of the swirl vane 37 presses the swirl vane 37 so as to rotate the rotating shaft 36 in the clockwise direction indicated by the arrow L4 in FIGS.

  In the check valve damper 30, the weight of the weight 38 is adjusted so that the second set pressure in the air supply duct 17a and the weight 38 are balanced. The weight of the weight 38 is adjusted by at least one of a case where the weight 38 having a different weight is attached to the weight support rod 42 and a case where the fixed position of the weight 38 with respect to the support rod 42 is changed. When the second set pressure is increased, the weight itself of the weight 38 may be increased. As shown by an arrow L6 in FIG. 10, the fixed position of the weight 38 on the weight support bar 42 is a direction in which the weight 38 is separated from the rotary shaft 36. You may shift. When lowering the second set pressure, the weight itself of the weight 38 may be reduced. As indicated by an arrow L7 in FIG. 10, the fixed position of the weight 38 on the weight support rod 42 is in the direction of approaching the rotating shaft 36. You may shift. The second set pressure is set in the range of 5 Pa to 20 Pa, preferably in the range of 5 Pa to 10 Pa, and is set lower than the set value on the plus side of the first set pressure (first set pressure (+)> first 2 set pressure (+)).

  If the pressure of the air in the air supply duct 17a is larger than the weight of the weight 38 (second set pressure obtained by converting the weight of the weight 38 into air pressure), the swirl vane 37 resists the weight of the weight 38 and the air flow path 35. In a direction to release (rotation shaft 36 rotates clockwise). When the swirl vane 37 swirls in a direction to open the air flow path 35, an opening 47 (air discharge port) having a predetermined area is formed in the air flow path 35, and air is exhausted from the front end opening to the outside through the opening 47. The On the contrary, when the pressure of the air in the air supply duct 17a is smaller than the weight of the weight 38 (second set pressure), the swirling blades 37 turn in the direction of closing the air flow path 35 by the weight of the weight 38 (rotation). The shaft 36 rotates counterclockwise as indicated by the arrow L5 in FIGS.

  An example of the process of the air supply device 13 executed by the control device 23 and the operation of the exhaust unit 29 will be described with reference to the flowchart of FIG. 4. When the room pressure control system 10B is activated, the blowers 13 and 14, the motor damper 19, the pressure sensor 20, and the constant air volume units 21 and 27 are operated. The pressure sensor 20 measures the pressure of the air flowing through the air supply duct 17 b and outputs the measured pressure to the control device 23.

  In the room pressure control system 10B, as shown by arrows A1 in FIGS. 5 and 6, a predetermined amount of air is supplied from the supply duct 17 into the clean rooms 11 and 12 through the supply blower 18, and the arrows A2 As shown, a predetermined amount of air is discharged from the clean rooms 11 and 12 to the exhaust duct 25 via the exhaust fan 26. At the start of the operation of the system 10B, the output of the air supply blower 18 is adjusted so that an amount of air corresponding to the first set pressure passes through the air flow path of the motor damper 19, and is output from the pressure sensor 20. The measured pressure is within the range of the first set pressure. Therefore, the motor damper 19 is operated with the swirl vanes 24 fully opened (S-1).

  In this system 10B, similarly to that of FIG. 1, even if pressure fluctuation occurs in the air flowing through the air supply duct 17c, the air passing amount of the duct 17c is kept constant by the constant air volume unit 21, and a constant amount of air is always maintained. Is supplied to the clean rooms 11 and 12. Even if pressure fluctuations occur in the air flowing through the exhaust duct 25, the air passage amount of the duct 25 is kept constant by the constant air amount unit 27, and a constant amount of air is always exhausted from the clean rooms 11 and 12.

  If a strong wind blows near the outside of the air intake port 22 located outdoors, a large amount of excess air may enter the air supply duct 17a from the air intake port 22 due to the influence of the wind. The control device 23 of the motor damper 19 compares the measured pressure output from the pressure sensor 20 with the first set pressure stored in the memory (pressure comparison means) (S-2). Next, as a result of comparing the measured pressure with the first set pressure, the control device 23 determines whether the measured pressure is within the range of the first set pressure (S-3). The first set pressure is set in the range of −40 Pa to 40 Pa, preferably in the range of −30 Pa to 30 Pa, and more preferably in the range of −20 Pa to 20 Pa, as in the system 10A of FIG.

  When the control device 23 of the motor damper 19 determines that the measured pressure is within the first set pressure range, the controller 10 operates the system 10B while maintaining the opening degree of the swirl blade 24 at that time. Next, the control device 23 determines whether to stop the system 10B (S-4). When there is an instruction to stop the system 10B, the control device 23 stops the operation of the system 10B. When the system 10B is continuously operated, the process returns to Step 2 (S-2), the measured pressure is compared with the first set pressure, and the process from Step 2 (S-2) is repeated.

  The second set pressure is less than the first set pressure. For example, when the positive side of the first set pressure is set to 11 Pa or more and the second set pressure is set to 5 Pa to 10 Pa, excess air due to the influence of the wind Even when the pressure of the air in the duct 17a when entering the air supply duct 17a is within the first set pressure, the pressure of the air in the duct 17a is larger than the weight of the weight 38 (second set pressure). There is a case. In this case, the swirl vane 37 swirls in a direction to open the air flow path 35 against the weight of the weight 38, and an opening 47 having a predetermined area is formed in the air flow path 35, and air passes through the opening 47. It is exhausted to the outdoors through the tip opening. When the air is exhausted to the outside from the opening at the front end, and the pressure of the air in the duct 17a becomes smaller than the weight of the weight 38, the swirling blade 37 swirls in the direction to close the air flow path 35 by the weight of the weight 38, The air flow path 35 is closed by 37. In the state where the air flow path 35 is closed, the tip of the swirl vane 37 is in contact with the stopper 40.

  When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is not within the range of the first set pressure, if the measured pressure exceeds the range of the first set pressure, the swirl vane If the opening degree is the minimum opening degree (opening degree 3 to 5%), the opening degree is maintained, and if the opening degree of the swirl blade is not the minimum opening degree (opening degree 3 to 5%), the opening of the blade is opened. Decrease the degree (S-5).

  The case where the opening degree is determined based on each correlation stored in the memory and the opening degree of the blade 24 is as follows. When the measured pressure exceeds the range of the first set pressure, the control device 23 responds to the first set pressure based on the correlation between the first set pressure and the air passage amount corresponding to the first set pressure. And determining the air passage amount corresponding to the measurement pressure output from the pressure sensor 20 based on the correlation between the measurement pressure and the air passage amount corresponding to the measurement pressure. The air passage amount corresponding to the measurement pressure is larger than the air passage amount corresponding to the first set pressure.

  Further, the control device 23 calculates an air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The calculated air passage amount is positive. The control device 23 calculates the air passage calculated based on the opening degree of the swirl vane 24 of the motor damper 19 corresponding to the air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The opening degree of the rotating blade 24 of the motor damper 19 corresponding to the amount is determined. Note that the opening degree of the swirl vane 24 is negative. Therefore, if the opening degree of the turning blade 24 is not the minimum opening degree, the control device 23 reduces the opening degree of the turning blade 24 (S-5).

  When the measured pressure exceeds the range of the first set pressure, the pressure of the air in the duct 17a becomes larger than the weight of the weight 38 (second set pressure), and the swirl vane 37 resists the weight of the weight 38. The air channel 35 is swung in the direction of opening, and an opening 47 having a predetermined area is formed in the air channel 35, and the air is exhausted from the front end opening to the outside through the opening 47. When the air is exhausted to the outside from the opening at the front end, and the pressure of the air in the duct 17a becomes smaller than the weight of the weight 38, the swirling blade 37 swirls in the direction to close the air flow path 35 by the weight of the weight 38, The air flow path 35 is closed by 37.

  The control device 23 of the motor damper 19 determines whether to stop the system 10B after maintaining the opening degree of the swirl blade 24 at the minimum opening degree or reducing the opening degree of the blade 24 (S-4). When there is an instruction to stop the system 10B, the control device 23 stops the operation of the system 10B. When the system 10B is continuously operated, the system 10B is operated in a state where the minimum opening or the reduced opening is maintained, and the measurement pressure and memory output from the pressure sensor 20 are returned to Step 2 (S-2). Is compared with the first set pressure stored in (pressure comparison means) (S-2). When the opening degree of the swirl vane 24 is the minimum opening degree or the opening degree, the amount of air passing through the air flow path of the motor damper 19 decreases, the measured pressure decreases, and the measured pressure returns to the range of the first set pressure (pressure Control means). Therefore, even if a large amount of excess air flows into the air supply duct 17a from the air intake port 22, the amount of air flowing into the air supply blower 18 can be held corresponding to the first set pressure.

  When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is not within the first set pressure range, if the measured pressure is less than the first set pressure range, the swirl vane 24 is If it is fully open (opening degree 100%), the opening degree is maintained, and if the swirl blade 24 is not fully open, the opening degree of the blade 24 is increased (S-5). In this case, the air flow path 35 of the exhaust unit 29 is closed by the swirl blades 37.

  The case where the opening degree is determined based on each correlation stored in the memory and the opening degree of the blade 24 is as follows. When the measured pressure is less than the range of the first set pressure, the control device 23 determines the air corresponding to the first set pressure based on the correlation between the first set pressure and the air passage amount corresponding to the first set pressure. The passage amount is determined, and the air passage amount corresponding to the measurement pressure output from the pressure sensor 20 is determined based on the correlation between the measurement pressure and the air passage amount corresponding to the measurement pressure. The air passage amount corresponding to the measurement pressure is smaller than the air passage amount corresponding to the first set pressure.

  Further, the control device 23 calculates an air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The calculated air passage amount is negative. The control device 23 calculates the air passage calculated based on the opening degree of the swirl vane 24 of the motor damper 19 corresponding to the air passage amount obtained by subtracting the air passage amount corresponding to the first set pressure from the air passage amount corresponding to the measured pressure. The opening degree of the rotating blade 24 of the motor damper 19 corresponding to the amount is determined. The opening degree of the swirl vane 24 is positive. Therefore, the control device 23 increases the opening degree of the blade 24 unless the swirl blade 24 is fully opened (S-5).

  The control device 23 of the motor damper 19 determines whether to stop the system 10B after holding the swirl blade 24 fully open or increasing the opening of the blade 24 (S-4). When there is an instruction to stop the system 10B, the control device 23 stops the operation of the system 10B. When the system 10B is continuously operated, the system 10B is operated in a state where the fully opened or enlarged opening is maintained, and the process returns to Step 2 (S-2) and is stored in the memory and the measured pressure output from the pressure sensor 20. The first set pressure is compared (pressure comparison means) (S-2). When the opening degree of the swirl vane 24 is fully opened or increased, the amount of air passing through the air flow path of the motor damper 19 increases, the measured pressure rises, and the measured pressure returns to the range of the first set pressure (pressure control means). ). Therefore, the decrease in the inflow of air into the air supply fan 18 can be prevented, and the amount of air flowing into the fan 18 can be held corresponding to the first set pressure.

  When the wind that has blown near the outside of the air intake port 22 is settled and the entry of excess air from the air intake port 22 to the air supply duct 17a stops, the amount of air passing through the air flow path of the motor damper 19 turns. The measured pressure output from the pressure sensor 20 also decreases as it decreases compared to passing through the air flow path immediately after reducing the opening of the blade 24. When the control device 23 of the motor damper 19 determines in step 3 (S-3) that the measured pressure is within the range of the first set pressure in the comparison (S-2) between the measured pressure and the first set pressure, then When the system 10B is operated in a state where the opening degree of the swirl blade 24 is maintained and the system 10B is continuously operated, the measurement pressure is compared with the first set pressure by returning to Step 2 (S-2), Repeat the process from step 2 (S-2). Note that, after the opening degree of the swirl vane 24 is reduced, when the measured pressure output from the pressure sensor 20 decreases and the measured pressure falls below the first set pressure range, the opening degree of the swirl vane 24 is increased (S). -5).

  The control device 23 of the motor damper 19 blows again in the vicinity of the outside of the air intake port 22, so that a large amount of excess air enters the supply duct 17 a again, and the measured pressure is outside the range of the first set pressure. When the measured pressure exceeds the first set pressure, if the swirl vane 24 is not at the minimum opening, the opening of the vane 24 is reduced (S-5). After reducing the opening degree of the swirl vane 24, the control device 23 operates the system 10B while maintaining the reduced opening degree, and returns to Step 2 (S-2) to output the measured pressure output from the pressure sensor 20. And the first set pressure stored in the memory (pressure comparison means) (S-2). Also in this case, the swirl vane 37 swirls in a direction to open the air flow path 35 against the weight of the weight 38, and an opening 47 having a predetermined area is formed in the air flow path 35, and air passes through the opening 47. It is exhausted to the outdoors through the tip opening.

  FIG. 12 is a configuration diagram of the air supply device 13 shown as another example, and FIGS. 13 and 14 are partially broken perspective views showing another example of the exhaust unit 29 including the check valve damper 30. The exhaust unit 29 shown in FIGS. 13 and 14 is installed in an air supply duct 17 a extending between the motor damper 19 and the air intake port 22, and extends upward of the duct 17. The exhaust unit 29 is a hollow duct attached to the peripheral surface of the air supply duct 17a, and is formed into a cylindrical shape having a peripheral wall 48 (see FIGS. 13 and 14). The exhaust unit 29 has a base end opening located on the air supply duct 17a side and a tip exhaust port located on the opposite side, and an air flow path 35 is formed therein.

  The check valve damper 30 is installed in the air flow path 35 of the exhaust unit 29, and releases the air in the air supply duct 17a to the outside of the duct 17 in accordance with the pressure of the air passing through the air supply duct 17a. The check valve damper 30 includes a shaft 36 (hinge) that is rotatably attached to a support plate 49 that is fixed to the exhaust unit 29, and a swirl vane that is attached to the shaft 36 and opens and closes the air flow path 35 of the exhaust unit 29. 37 and a stopper 39. The swirl vane 37 is a substantially circular metal plate having substantially the same area as the air flow path 35 of the exhaust unit 29 and is pivotally attached to the shaft 36. The swirl vane 37 swirls around the shaft 36 in a direction for closing the air flow path 35 and a direction for opening the flow path 35. The stopper 39 is made of a metal plate, is attached to the inside of the peripheral wall 48, and extends from the peripheral wall 48 toward the air flow path 35. When the peripheral edge of the swirl vane 37 comes into contact with the stopper 39, the swirl of the swirl vane 37 stops.

  Therefore, even if air from the outside enters the air supply duct 17 a through the air flow path 35 while entering from the front end opening of the exhaust unit 29, the air flow path 35 of the exhaust unit 29 is blocked by the swirl vane 37. When the blades 37 are closed, further rotation of the blades 37 is prevented by the stoppers 39, and the blades 37 do not rotate below the stoppers 39, so that an opening 47 is formed in the air flow path 35 of the exhaust unit 29. In other words, the backflow of the outside air from the exhaust unit 29 to the air supply duct 17a can be prevented.

  The swirl vane 37 swirls in a direction to close the air flow path 35 of the exhaust unit 29 by its own weight (weight of the swirl vane 37). If a strong wind blows near the outside of the air intake port 22 located outdoors, a large amount of excess air may enter the air supply duct 17a from the air intake port 22 due to the influence of the wind. When a large amount of air enters from the air intake 22, the air enters the exhaust unit 29 through the air supply duct 17, and from the base end opening of the exhaust unit 29 as shown by an arrow L 3 in FIGS. The air that has flowed into the unit 29 flows toward the lower surface of the swirl vane 37, and a predetermined pressing force acts on the swirl vane 37 by the air pressure. The air flowing toward the lower surface of the swirl vane 37 presses the vane 37 so as to rotate the vane 37 in the clockwise direction shown by the arrow L4 in FIG. 14 against the weight of the vane 37.

  In the check valve damper 30, the weight of the blade 37 is adjusted so that the second set pressure in the air supply duct 17 a and the swirl blade 37 are balanced. When increasing the second set pressure, the weight of the blade 37 is increased. When lowering the second set pressure, the weight of the blade 37 is decreased. The second set pressure is set in the range of 5 Pa to 20 Pa, preferably in the range of 5 Pa to 10 Pa, and is set lower than the set value on the plus side of the first set pressure (first set pressure (+)> first 2 set pressure (+)).

  If the pressure of the air in the air supply duct 17a is larger than the weight of the swirl vane 37 (second set pressure obtained by converting the weight of the vane 37 into air pressure), the swirl vane 37 resists the weight and causes the air flow path 35 to pass through. Turn in the opening direction. When the swirl vane 37 swirls in the direction to open the air flow path 35, an opening 47 having a predetermined area is formed in the air flow path 35, and air passes through the opening 47 and is exhausted from the front end opening to the outside. Conversely, when the pressure of the air in the air supply duct 17a is smaller than the weight of the swirl vane 37 (second set pressure), the vane 37 swirls in the direction to close the air flow path 35 by the weight of the swirl vane 37, The opening 47 is closed. When the air flow path 35 is closed, the peripheral edge of the swirl vane 37 is in contact with the stopper 40. The operation of the air supply device 13 using the exhaust unit 29 shown in FIGS. 13 and 14 is the same as that of the air supply device 13 using the exhaust unit 29 shown in FIGS.

  The air supply device 13 in the room pressure control system 10B has the following effects in addition to the effects of the air supply device 13 of the room pressure control system 10A shown in FIGS. In the air supply device 13 in the room pressure control system 10B, a large amount of excess air instantaneously enters the air supply duct 17a from the air intake port 22, and the swirl of the swirl vanes 24 of the motor damper 19 cannot cope with it. However, the air that has entered the air supply duct 17a using the check valve damper 30 can be released from the exhaust unit 29 to the outside of the duct 17a. The air supply device 13 does not allow a large amount of air to flow into the blower 18 irregularly and irregularly, and allows a constant pressure and a constant amount of air to stably flow into the blower 18. A constant pressure and a constant amount of air can be stably flowed into the constant air volume unit 21. The air supply device 13 can maintain the indoor air pressure of the clean rooms 11 and 12 at the target indoor air pressure by using it. When the pressure of the air in the air supply duct 17a falls below the second set pressure range, the air supply device 13 closes the air flow path 35 of the exhaust unit 29 because the swirl vane 38 of the check valve damper 30 closes the air passage 35. Accordingly, it is possible to prevent a decrease in the inflow of air into the fan 18 and to allow a constant pressure and a constant amount of air to stably flow into the blower 18.

  Since the air supply device 13 has a second set pressure in the range of 5 Pa to 20 Pa, preferably in the range of 5 Pa to 10 Pa, even if a large amount of excess air enters the air supply duct 17 a from the air intake port 22. The swirl vane 38 of the check valve damper 30 can swivel quickly to allow air to escape quickly from the exhaust unit 29 to the outside of the duct 17a, thereby reliably preventing the air pressure in the duct 17a from becoming a positive pressure. be able to.

10A Room Pressure Control System 10B Room Pressure Control System 11 Clean Room (Air Supply Target Room)
12 Clean room (Air supply target room)
13 Supply Air Device 14 Exhaust Device 17 Supply Air Duct 18 Supply Air Blower (Blower)
DESCRIPTION OF SYMBOLS 19 Motor damper 20 Pressure sensor 22 Air intake port 23 Control apparatus 24 Swirling blade 29 Exhaust unit 30 Check valve damper 35 Air flow path 36 Rotating shaft (axis)
37 Swirling blade 38 Weight 39 Stopper 47 Opening (air outlet)

Claims (7)

An air supply duct connected to the air supply target chamber, a blower for sending air passing through the air supply duct to the air supply target chamber, and a swirl installed in the air supply duct extending between the blower and the air intake port A motor damper that adjusts the amount of air flowing into the blower by swirling blades, and a pressure sensor that is installed in the air supply duct extending between the blower and the motor damper and measures the pressure of the air passing through the duct; A control device that adjusts the opening degree of the swirl vanes of the motor damper, and the air supply duct that extends between the air intake port and the motor damper, and the air supply according to the pressure of the air passing through the air supply duct. An exhaust unit equipped with a check valve damper that allows air in the air duct to escape outside the duct ,
The control device compares the measured pressure output from the pressure sensor with a preset first set pressure in the air supply duct, and the action of the wind blown outside the air intake port. When a predetermined amount of air enters the air supply duct and the measured pressure deviates from the range of the first set pressure, the opening of the swirl vane of the motor damper is adjusted and the measured pressure is adjusted to the first pressure. Pressure control means for returning to the set pressure range ,
The check valve damper is formed of a shaft attached to the exhaust unit, and a swirl vane attached to the shaft and closing the air flow path of the exhaust unit by its own weight. In the check valve damper, When the weight of the swirl blade is adjusted so that the set second set pressure in the air supply duct and the weight of the swirl blade are balanced, and the pressure in the air supply duct exceeds the second set pressure, supply the orbiting vane against the weight of the swirl vane is pivoted in the direction of opening the exhaust unit, characterized that you have air outlet having a predetermined area is formed on the air flow path of the exhaust unit apparatus.   In the pressure control means, when the measured pressure exceeds the range of the first set pressure, the opening degree of the rotating blade of the motor damper is reduced, and when the measured pressure is less than the range of the first set pressure, the motor damper If the opening degree of the swirl vane is not fully open, the opening degree of the swirl vane is increased, and when the measured pressure returns to the range of the first set pressure, the opening degree of the swirl vane of the motor damper at that time is maintained. The air supply device according to claim 1.   The air supply device according to claim 1 or 2, wherein the first set pressure is in a range of -40 Pa to 40 Pa.   The air supply device according to any one of claims 1 to 3, wherein a turning speed of a turning blade of the motor damper is in a range of 1 to 5 s / Full Scale.   The air supply device according to any one of claims 1 to 4, wherein a minimum opening degree of the swirl blade when the opening degree of the swirl blade of the motor damper is reduced is in a range of 3 to 5%. The air supply device according to any one of claims 1 to 5 , wherein the second set pressure is in a range of 5 Pa to 20 Pa . The air supply device according to any one of claims 1 to 6 , wherein the check valve damper has a stopper that prevents the swirl blade from further swirling when the exhaust unit is closed by the swirl blade .

Images