JP5324202B2 - Laser processing machine equipped with a laser oscillator - Google Patents

Description

  The present invention relates to a laser processing machine that processes a workpiece by emitting laser from a laser oscillator.

  The laser processing machine is equipped with a laser oscillator. The laser emitted from the laser oscillator is reflected toward the workpiece by the total reflection mirror, thereby processing the workpiece, for example, cutting and welding.

  When maintaining the laser oscillator, the total reflection mirror or the partial reflection mirror in the laser oscillator may be replaced. In such a case, adjustment of the total reflection mirror and / or partial reflection mirror and aging of the vacuum system are performed until processing is possible, and the laser emitted from the laser oscillator is guided to the processing point on the workpiece. It is necessary to confirm whether it is done.

  When it is found that the aging is insufficient after machining the workpiece, it is necessary to perform maintenance of the laser oscillator again. Therefore, the aging is usually performed by taking a sufficient time to complete the aging. For this reason, a great deal of time is wasted until the laser oscillator is maintained and restarted.

  Further, the angle adjustment of the total reflection mirror and / or the partial reflection mirror is performed by directly irradiating the acrylic block with a laser beam and visually determining the degree of darkness of the acrylic block. For this reason, it is difficult to make a quantitative determination, and the angle of the total reflection mirror and / or the partial reflection mirror varies depending on the skill level of the operator.

  As described above, the aging work in the prior art and the angle adjustment work of the total reflection mirror and / or the partial reflection mirror are extremely inefficient, and there is a potential demand for quantitatively performing them.

By the way, a profiler may be used to measure laser light intensity distribution data. The light receiving surface of the profiler receives the laser and measures the two-dimensional light intensity distribution data. For example, a laser processing machine disclosed in Patent Document 1 includes a laser oscillator, a processing station, and a profiler located outside the laser oscillator. The direction of the laser emitted from the laser oscillator is changed by a switching mechanism having a built-in angle-adjusting reflection mirror, and is input to the profiler. The signal detected by the profiler is fed back to the resonator alignment. In Patent Document 1, a power meter is arranged behind the profiler. The power meter is used to detect the power of the laser that has passed through the profiler and determine whether the power of the laser beam is normal. For example, when it is determined that the power is insufficient, the laser power is fed back to the laser power source. When the laser is stabilized, the switching mechanism is operated, the laser is transmitted to the processing station, and the workpiece is processed.
JP-A-01-218786

  However, in Patent Document 1, since the laser emitted from the output mirror of the laser oscillator is measured, the laser processing machine needs to have a profiler and a power meter outside the laser oscillator. For this reason, the cited document 1 has a problem that the optical system becomes complicated, the processing stability is lowered, and the entire laser processing machine is likely to be enlarged.

  In general, the intensity of the laser emitted from the output mirror is much higher than that emitted from the rear mirror, and the intensity of the laser needs to be greatly attenuated before being input to the profiler. As a result, the optical system becomes more complicated and the laser processing machine becomes larger. Further, as disclosed in Patent Document 1, when the laser processing machine includes a plurality of switching mechanisms, there is a problem that the control of the switching operation becomes complicated.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a laser processing machine capable of measuring light intensity distribution data of a laser without increasing the size and complexity.

  In order to achieve the above-described object, according to a first invention, in a laser processing machine for processing a workpiece by emitting a laser from a laser oscillator, the laser oscillator includes: a discharge tube for exciting a laser gas by a discharge action; A rear mirror and an output mirror that are partially transmissive and amplify a laser in the discharge tube; a partial reflector disposed behind the rear mirror; and the laser and the part reflected by the partial reflector A laser detector for detecting one of the lasers that have passed through the reflecting mirror; and the other of the laser reflected by the partial reflecting mirror and the laser that has passed through the partial reflecting mirror, and There is provided a laser processing machine including a profiler for measuring light intensity distribution data of a laser.

  That is, in the first invention, a partial reflection mirror is inserted between the rear mirror and the laser detector or between the rear mirror and the profiler. Therefore, the output of the laser emitted from the rear mirror is detected, and the light intensity distribution data of such a laser is measured. In other words, the profiler and the laser output sensor can be arranged inside the laser oscillator, and it is not necessary to switch the optical path of the laser, so that the switching mechanism can be eliminated. Therefore, the laser processing machine is not increased in size and complexity. Further, since such a partial reflection mirror can be inserted into an existing laser beam machine, the existing laser beam machine can be easily and inexpensively improved.

According to a second aspect, in the first aspect, the profiler measures at least two light intensity distribution data of the laser on the light receiving surface at different times, and the laser processing machine further includes the laser A determination unit that determines whether the laser is capable of outputting based on at least two light intensity distribution data.
That is, in the second invention, it is possible to quantitatively and easily determine whether or not the laser of the laser beam machine is in a state where the workpiece can be processed, that is, whether or not aging has been completed. Therefore, the downtime of the laser beam machine when performing maintenance can be minimized.

According to a third invention, in the first invention, a storage unit for storing light intensity distribution data of the laser when the partial reflector is deteriorated, and a light intensity of the laser measured by the profiler A deterioration determining unit that compares the distribution data with the light intensity distribution data stored in the storage unit to determine whether or not the partial reflecting mirror has deteriorated;
That is, in the third invention, it is possible to quantitatively and easily determine whether or not the partial reflecting mirror has deteriorated. Furthermore, it is possible to appropriately grasp the maintenance timing of the partial reflector and reduce the maintenance frequency.

According to a fourth invention, in the first invention, a total reflection mirror that reflects the laser emitted from the laser oscillator to the workpiece, and light of the laser when the total reflection mirror deteriorates Whether the total reflection mirror has deteriorated by comparing the storage unit storing the intensity distribution data, the light intensity distribution data of the laser measured by the profiler, and the light intensity distribution data stored in the storage unit A deterioration determining unit for determining whether or not.
That is, in the fourth aspect, it can be quantitatively and easily determined whether or not the total reflection mirror has deteriorated. Furthermore, it is possible to appropriately grasp the maintenance timing of the total reflection mirror and reduce the maintenance frequency.

According to the fifth aspect, in the third or fourth aspect, the apparatus further includes an alarm output unit that outputs an alarm when the deterioration is determined by the deterioration determination unit.
That is, in the fifth aspect, the operator can be alerted by outputting an alarm.

According to a sixth aspect, in the first aspect, the storage unit stores a relationship between the angle of the partial reflector and the light intensity distribution data of the laser measured by the profiler, and the profiler. An adjustment determination unit that determines whether or not to adjust the angle of the partial reflecting mirror by comparing the light intensity distribution data of the laser measured by the light intensity distribution data stored in the storage unit; And a calculation unit that calculates an angle adjustment amount of the partial reflection mirror when the adjustment determination unit determines to adjust the angle of the partial reflection mirror.
That is, in the sixth aspect, it is possible to quantitatively determine whether or not the angle of the partial reflecting mirror needs to be adjusted, and the angle adjustment amount of the partial reflecting mirror can be easily obtained. Furthermore, it is possible to reduce the time required for maintenance of the partial reflection mirror and to avoid a situation in which the angle varies depending on the skill level of the operator.

According to a seventh aspect, in the first aspect, the total reflection mirror that reflects the laser emitted from the laser oscillator to the workpiece, the angle of the total reflection mirror, and the profiler are further measured. The storage unit that stores the relationship between the light intensity distribution data of the laser, the light intensity distribution data of the laser measured by the profiler, and the light intensity distribution data stored in the storage unit are compared. An adjustment determination unit that determines whether or not to adjust the angle of the total reflection mirror, and calculates an angle adjustment amount of the total reflection mirror when the adjustment determination unit determines to adjust the angle of the total reflection mirror. And a calculation unit.
That is, in the seventh aspect, it can be quantitatively determined whether or not the angle of the total reflection mirror needs to be adjusted, and the angle adjustment amount of the total reflection mirror can be easily obtained. Furthermore, it is possible to reduce the time required for maintenance of the total reflection mirror and to avoid a situation in which the angle varies depending on the skill level of the operator.

Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following drawings, the same members are denoted by the same reference numerals. In order to facilitate understanding, the scales of these drawings are appropriately changed.
FIG. 1 is a schematic view of a laser beam machine according to the present invention. The laser processing machine 100 is mainly used for metal processing, and includes a laser oscillator 2 and a processing section 40 that processes the workpiece 20. The laser oscillator 2 is a discharge excitation type gas laser oscillator with a relatively high output, for example, a carbon dioxide gas laser having an output of 1 kW or more. As shown in FIG. 1, the laser oscillator 2 and the processing department 40 are electrically connected to each other via the control device 1.

  As shown in FIG. 1, the laser oscillator 2 includes a discharge tube 9 filled with a laser gas. One end of the discharge tube 9 is provided with a partially transmissive rear mirror 6 (resonator internal mirror), and the other end of the discharge tube 9 is provided with a partially transmissive output mirror 8. The output mirror 8 is made of ZnSe, and the inner surface of the output mirror 8 is partially reflective coated and the outer surface of the output mirror 8 is non-reflective coated. A laser output sensor 5 is disposed behind the rear mirror 6. The laser output sensor 5 detects the output of the laser that has passed through the rear mirror 6 having partial transparency.

  As shown in the figure, a pair of discharge electrodes 7 a and 7 b are arranged so as to sandwich the discharge tube 9. A discharge section is formed between the discharge electrodes 7a and 7b. The discharge electrodes 7a and 7b have the same dimensions and are metallized or attached with a metal member. As shown in FIG. 1, the discharge electrode 7 b is connected to the laser power source 4 via the matching circuit 3.

  When the discharge electrodes 7a and 7b apply a predetermined voltage, for example, an AC voltage of several hundreds of kHz to several tens of MHz, the laser gas is excited, thereby generating a laser beam. According to a known principle, the laser beam is amplified in the optical resonance space of the discharge tube 9, and the laser beam is emitted through the output mirror 8.

  The laser beam output from the output mirror 8 of the laser oscillator 2 enters the processing department 40. The processing section 40 includes at least one total reflection mirror 41 that reflects the incident laser. The workpiece 20 is placed on a machining table 43 that can move in the horizontal direction. The reflected laser beam irradiates the workpiece 20 on the machining table 43 through a condenser lens and a machining head (not shown), whereby the workpiece 20 is machined.

  Referring again to the laser oscillator 2 in FIG. 1, a partial reflection mirror 11 is disposed between the rear mirror 6 and the laser output sensor 5. The laser excited in the discharge tube 9 passes through the rear mirror 6 and enters the partial reflection mirror 11. A part of the laser passes through the partial reflection mirror 11 and enters the laser output sensor 5. As can be seen from FIG. 1, the remaining part of the laser is reflected by the partially reflecting mirror 11 and is incident on the profiler 12.

  The profiler 12 includes a light receiving surface 12a that receives a laser, and measures the light intensity distribution of the laser on the light receiving surface 12a. Further, the laser oscillator 2 includes a sub-processor 13 that receives the data of the profiler 12 and performs an analysis operation. In addition, the calculation result of the sub processor 13 is temporarily stored in the storage unit 14.

  Further, the control device 1 shown in FIG. 1 is a digital computer, and mainly includes a main processor 23 (CPU) and a storage unit 24. The storage unit 24 stores a program for driving the laser oscillator 2 and various data to be described later.

  As illustrated, the main processor 23 of the control device 1 includes a determination unit 31 that determines whether aging of the laser oscillator 2 is completed based on the measured light intensity distribution. Further, the main processor 23 includes a deterioration determination unit 32 that determines whether or not the partial reflection mirror 11 has deteriorated based on the measured light intensity distribution and the light intensity distribution when the partial reflection mirror 11 has deteriorated. It is out. Furthermore, the deterioration determination unit 32 can also determine whether the total reflection mirror 41 has deteriorated based on the measured light intensity distribution and the light intensity distribution when the total reflection mirror 41 has deteriorated.

  Further, the main processor 23 determines the partial reflection mirror 11 and / or the difference between the angle of the partial reflection mirror 11 and / or the total reflection mirror 41 and the measured light intensity distribution, and the measured light intensity distribution. Or the adjustment determination part 33 which determines whether the angle of the total reflection mirror 41 is adjusted is included. When it is determined that the angle of the partial reflection mirror 11 needs to be adjusted, the calculation unit 34 of the main processor 23 calculates the angle adjustment amount of the partial reflection mirror 11. It is assumed that the angle of the partial reflection mirror 11 is adjusted by the step motor 11a.

  As shown in the figure, in the present invention, the partial reflection mirror 11 is disposed between the laser output sensor 5 and the rear mirror 6 so that the laser reflected by the partial reflection mirror 11 is incident on the profiler 12. . Therefore, the output of the laser emitted from the rear mirror 6 is detected by the laser output sensor 5, and the light intensity distribution data of the laser emitted from the rear mirror 6 is measured by the profiler 12.

  With such a configuration, in the present invention, the profiler 12 and the laser output sensor 5 can be arranged inside the laser oscillator 2. Further, in the present invention, since it is not necessary to switch the optical path of the laser, the switching mechanism can be eliminated. Therefore, in the present invention, it is possible to measure the light intensity distribution of the laser without increasing the size and complexity of the laser processing machine 100. Since the configuration of the present invention can be realized by inserting the partial reflection mirror 11 between the laser output sensor 5 and the rear mirror 6 of the laser processing machine, the existing laser processing machine can be easily and inexpensively provided by the configuration of the present invention. It can be improved.

  Hereinafter, the aging process after the maintenance of the laser beam machine 100 of the present invention will be described. FIG. 2A is a conceptual diagram of the light receiving surface 12 a of the profiler 12. As shown in FIG. 2A, the light receiving surface 12a includes a plurality of light receiving elements A11 to Axy arranged in a grid of “x rows and y columns”. That is, the light receiving surface 12a includes x light receiving elements in the X axis direction and y light receiving elements in the Y axis direction. In one embodiment, x and y are each 100.

  As shown in FIG. 2B, which is a conceptual diagram showing one example of the light intensity distribution of the laser beam received by the light receiving surface 12a, the light intensity is high in the vicinity of the center of the light receiving surface 12a. It is low near the outer periphery. And the numerical value which shows light intensity is acquired for each light receiving element A11-Axy. The light intensity distribution data acquired in this way is represented by Profile (x, y, n). Note that the letter “n” is a data number (0 <n ≦ N).

N light intensity distribution data are sequentially acquired at different times by the profiler 12 within a predetermined period after the maintenance of the laser beam machine 100 is performed. Then, adjacent light intensity distribution data of N pieces of light intensity distribution data, for example, nth and n + 1th light intensity distribution data are extracted. Next, the determination unit 31 of the main processor 23 calculates a determination value H using the following equation (1).

  Thereafter, the determination unit 31 compares the determination value H with the reference value H0. The reference value H0 is obtained in advance by experiments or the like. When the determination value H is equal to or less than the reference value H0, it is determined that aging is complete and the laser can be output. In this case, since it can be determined that the workpiece 20 can be machined, a signal to that effect is transmitted to the control device 1. Thus, in the present invention, it is possible to quantitatively and easily determine whether or not aging has been completed. For this reason, it is not necessary to perform aging with a margin, and the downtime of the laser beam machine 100 can be minimized when performing maintenance. In other words, in the present invention, aging can be completed in a minimum time.

  If the determination value H is not less than or equal to the reference value H0, the same determination is performed using the (n + 1) th and n + 2th light intensity distribution data. Further, if the determination value H does not become the reference value H0 or less even if the N-1th and Nth light intensity distribution data are used, a plurality of light intensity distribution data is acquired again, and the determination value H is the reference value H0. The above-described processing is repeated until the following is reached.

  By the way, in formula (1), calculation is performed for all light receiving elements in x rows and y columns for the sake of strictness. However, calculation may be performed only for one light receiving element in x rows and y columns. Good.

  FIG. 3 is a diagram showing light intensity data in the Y1th column (1 ≦ Y1 ≦ y) in the nth and n + 1th light intensity distribution data. Therefore, the horizontal axis in these light intensity data corresponds to the X axis in the light receiving surface 12a. Moreover, the vertical axis | shaft in FIG. 3 has shown the light intensity. FIG. 3 shows the light intensity at a predetermined position on the X axis, for example, X = X1, so that the light intensities measured by the light receiving elements located in the “X1th row, Y1th column” are compared. become.

  Then, by determining the determination value H from the two light intensities, the same determination as described above can be performed. In this case, it will be understood that the calculation time can be shortened because the light intensity at only one location is used. As a matter of course, the above-described determination may be performed using light intensity measured by a plurality of light receiving elements.

  Incidentally, in the present invention, the control device 1 may be provided with an aging process start button 25 for continuously performing the series of processes described above. FIG. 4 is a flowchart when aging is performed in such a case.

  When the operator presses the aging process start button 25 in step S1 in FIG. 4, aging is started (step S2). As described above, aging is continuously performed until a signal indicating that the workpiece 20 can be machined is transmitted to the control device 1 (step S3). Then, when the control device 1 receives a signal that the workpiece 20 can be machined, machining of the workpiece 20 is automatically started (step S4) until the machining of the workpiece 20 is completed (step S4). Step S5), the process is continued.

  As described above, in the present invention, it is possible to automatically perform the process from the start of aging to the completion of machining of the workpiece 20 by simply pressing the aging machining start button 25. Therefore, it is possible to greatly reduce the burden on the operator and minimize the machine stop time due to maintenance.

  Furthermore, according to the laser processing machine 100 of the present invention, the light intensity distribution data when the partial reflection mirror 11 and / or the total reflection mirror 41 are deteriorated is stored in the storage unit 24 of the control device 1. FIG. 5 is a view similar to FIG. 3 showing normal light intensity data and light intensity data when the partial reflector is deteriorated.

  In FIG. 5, single light intensity data when the partial reflecting mirror is deteriorated is shown, but a plurality of light intensity distribution data different depending on the degree of deterioration of the partial reflecting mirror 11 is stored in the storage unit 24. It is assumed that it is stored in Here, the light intensity distribution data when the partial reflecting mirror 11 is deteriorated is referred to as Dprofile (x, y, m). The letter m represents a data number, and the smaller the value, the smaller the degree of deterioration of the partial reflector 11.

  Further, the deterioration determination unit 32 of the control device 1 averages a plurality of light intensity distribution data Profile (x, y, m) measured by the profiler 12, and calculates average light intensity distribution data Profile A (x, y). To do. By such an averaging process, the accuracy of data can be increased.

Then, the degradation determination unit 32 compares the average light intensity distribution data ProfileA (x, y) with each of Dprofile (x, y, m) as shown in the following formulas (2) and (3). Then, Result A (m) is calculated.

  Thereafter, the minimum Result A (m) is obtained from the plurality of Result A (m) and compared with the reference value R0. The reference value R0 is a value determined in advance by experiments or the like. When the minimum Result A (m) is equal to or less than the reference value R0, it is determined that the partial reflecting mirror 11 has deteriorated. Further, the degree of deterioration of the partial reflection mirror 11 can be determined from the value of “m”.

  Although not described in detail, a plurality of light intensity distribution data that differ depending on the degree of deterioration of the total reflection mirror 41 is also stored in the storage unit 24. Therefore, it is also possible to determine the deterioration of the total reflection mirror 41 in the same manner by performing the same processing on the total reflection mirror 41.

  Thus, in the present invention, it can be quantitatively and easily determined whether or not the partial reflection mirror 11 and / or the total reflection mirror 41 has deteriorated. Therefore, in the present invention, maintenance of the partial reflection mirror 11 and / or the total reflection mirror 41 can be performed at an appropriate timing. As a result, the maintenance frequency can be reduced and the time required for maintenance can be shortened. As a result, the productivity of the laser beam machine 100 can be increased. Furthermore, it is possible to avoid a situation in which the angles of the partial reflection mirror 11 and / or the total reflection mirror 41 differ depending on the skill level of the operator.

  When it is determined that the partial reflecting mirror 11 and / or 41 is deteriorated, it is preferable to output an alarm from the alarm output unit 26 of the control device 1. As a result, the operator can be alerted.

  Furthermore, according to the laser processing machine 100 of the present invention, a plurality of light intensity distribution data that differ depending on the angle of the partial reflection mirror 11 is stored in the storage unit 24 of the control device 1. FIG. 6 is a view similar to FIG. 3 showing normal light intensity data and light intensity data when the angle of the partial reflection mirror is deviated. In FIG. 6, single light intensity data when the angle of the partial reflection mirror 11 is shifted is shown, but a plurality of light intensity distribution data that differ depending on the angle shift amount of the partial reflection mirror 11 is shown. It is assumed that it is stored in the storage unit 24. The light intensity distribution data when the angle of the partial reflecting mirror 11 is deviated is referred to as Tprofile (x, y, l). In this case, the letter l represents the amount of deviation from the reference angle of the partial reflecting mirror 11, and the smaller the value, the smaller the angle deviation of the partial reflecting mirror 11.

Then, as described above, the adjustment determination unit 33 converts the average light intensity distribution data ProfileB (x, y) into Tprofile (x, y,) as shown in the following equations (4) and (5). Compare with each of l), Result B (l) is calculated.

  Next, the minimum ResultB (l) is obtained from the plurality of ResultB (l) and compared with the reference value R1. The reference value R1 is a value determined in advance by experiments or the like. When the minimum ResultB (l) is equal to or less than the reference value R1, it is determined that the angle of the partial reflecting mirror 11 is shifted.

  Next, the calculation unit 34 calculates the angle adjustment amount of the partial reflection mirror 11 based on the character l. The step motor 11a of the laser oscillator 2 rotates the partial reflection mirror 11 based on the calculated angle adjustment amount and arranges it at an appropriate angular position. Thus, in the present invention, it is possible to quantitatively determine whether or not the angle of the partial reflection mirror 11 needs to be adjusted, and the angle adjustment amount of the partial reflection mirror 11 can be easily obtained.

  Although not described in detail, a plurality of light intensity distribution data that differ depending on the angle shift of the total reflection mirror 41 is also stored in the storage unit 24. Therefore, it is also possible to similarly determine the deviation of the angle of the total reflection mirror 41 by performing the same processing on the total reflection mirror 41.

  Thus, in the present invention, it is possible to quantitatively determine the angle deviation from the reference position of the partial reflection mirror 11 and / or the total reflection mirror 41. Therefore, in the present invention, maintenance of the partial reflection mirror 11 and / or the total reflection mirror 41 can be performed at an appropriate timing. As a result, the maintenance frequency can be reduced and the time required for maintenance can be shortened. As a result, the productivity of the laser beam machine 100 can be increased.

  Although it has been described that the main processor 23 of the control device 1 performs the above-described processing, the sub-processor 13 of the laser oscillator 2 performs at least a part of the above-described processing based on the data stored in the storage unit 14. May be. Further, the locations of the laser output sensor 5 and the profiler 12 may be switched, and the partial reflection mirror 11 may be disposed between the profiler 12 and the rear mirror 6. It will be understood that such a case is within the scope of the present invention.

1 is a schematic diagram of a laser processing machine according to the present invention. (A) It is a conceptual diagram of the light-receiving surface of a profiler. (B) It is a conceptual diagram which shows one example of the light intensity distribution of the laser received by the light-receiving surface of a profiler. It is a figure which shows the light intensity data in the Y-th column in the nth and n + 1th light intensity distribution data. It is a flowchart when performing aging in the laser beam machine of this invention. FIG. 4 is a view similar to FIG. 3 showing normal light intensity data and light intensity data when the partial reflecting mirror is deteriorated. FIG. 4 is a view similar to FIG. 3 showing normal light intensity data and light intensity data when the angle of the partial reflection mirror is shifted.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Control apparatus 2 Laser oscillator 3 Matching circuit 4 Laser power supply 5 Laser output sensor 6 Rear mirror 7a, 7b Discharge electrode 8 Output mirror 9 Discharge tube 11 Partial reflection mirror 11a Step motor 12 Profiler 12a Light-receiving surface 13 Subprocessor 14 Memory | storage part 20 Machining work 23 Main processor 24 Storage unit 25 Aging processing start button 26 Alarm output unit 31 Determination unit 32 Degradation determination unit 33 Adjustment determination unit 34 Calculation unit 40 Processing department 41 Total reflection mirror 43 Processing table 100 Laser processing machine

Claims (7)

In a laser processing machine that processes a workpiece by emitting laser from a laser oscillator,
The laser oscillator is
A discharge tube for exciting the laser gas by a discharge action;
A rear mirror and an output mirror having partial transparency and amplifying the laser in the discharge tube;
A partially reflecting mirror disposed behind the rear mirror;
A laser detector that detects an output of one of the laser reflected by the partial reflector and the laser that has passed through the partial reflector;
A profiler that receives the other of the laser reflected by the partial reflection mirror and the laser that has passed through the partial reflection mirror and measures light intensity distribution data of the laser on a light receiving surface. The profiler measures at least two light intensity distribution data of the laser on the light receiving surface at different times;
The laser processing machine according to claim 1, further comprising a determination unit that determines whether or not the laser can be output based on at least two light intensity distribution data of the laser. . Furthermore, a storage unit for storing light intensity distribution data of the laser when the partial reflecting mirror is deteriorated,
A deterioration determining unit that determines whether the partial reflecting mirror has deteriorated by comparing the light intensity distribution data of the laser measured by the profiler with the light intensity distribution data stored in the storage unit; The laser processing machine according to claim 1. Furthermore, a total reflection mirror that reflects the laser emitted from the laser oscillator to the workpiece;
A storage unit for storing light intensity distribution data of the laser when the total reflection mirror is deteriorated;
A deterioration determining unit that determines whether the total reflection mirror has deteriorated by comparing the light intensity distribution data of the laser measured by the profiler with the light intensity distribution data stored in the storage unit; The laser processing machine according to claim 1.   The laser processing machine according to claim 3, further comprising an alarm output unit that outputs an alarm when the deterioration is determined by the deterioration determination unit. A storage unit that stores a relationship between the angle of the partial reflector and the light intensity distribution data of the laser measured by the profiler;
An adjustment determination unit that determines whether or not to adjust the angle of the partial reflector by comparing the light intensity distribution data of the laser measured by the profiler and the light intensity distribution data stored in the storage unit; ,
The laser processing machine according to claim 1, further comprising: a calculation unit that calculates an angle adjustment amount of the partial reflection mirror when the adjustment determination unit determines to adjust the angle of the partial reflection mirror. Furthermore, a total reflection mirror that reflects the laser emitted from the laser oscillator to the workpiece;
A storage unit for storing a relationship between an angle of the total reflection mirror and light intensity distribution data of the laser measured by the profiler;
An adjustment determination unit that determines whether or not to adjust the angle of the total reflection mirror by comparing the light intensity distribution data of the laser measured by the profiler and the light intensity distribution data stored in the storage unit; ,
The laser processing machine according to claim 1, further comprising: a calculation unit that calculates an angle adjustment amount of the total reflection mirror when the adjustment determination unit determines to adjust the angle of the total reflection mirror.