JP5335591B2 - Screen printing machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a screen printing machine which applies a compression force on a substrate in wall balance without depending on a size of the substrate and adequately corrects the warpage of the substrate before carrying out screen printing. <P>SOLUTION: A warpage correction body 10 which is formed by installing a plurality of pressing members 33 to a base 32 is arranged above the substrate PB supported by a warpage member 14. The plurality of pressing members 33 of the warpage correction body 10, are arrayed in parallel to the warpage direction of the substrate PB (or the orthogonal direction to the warpage direction of the substrate PB) depending on the warpage member 14 and installed on the base 32 through a plurality of spring members 63, respectively. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a screen printer for printing a paste by bringing a mask plate into contact with a substrate.

  The screen printing machine holds the substrate transported to a predetermined position by a belt conveyor by clamping (holding) both sides of the substrate with a pair of clamp members, and then bringing the mask plate into contact with the substrate to make a solder paste or conductive paste The paste is printed on the substrate by supplying the paste and the like and sliding the squeegee on the mask plate to fill the pattern holes of the mask plate with the paste.

  In such a screen printing machine, when the substrate is warped, the substrate and the mask plate are not sufficiently adhered to each other, and a gap is formed between the two and the printing accuracy is lowered. For this reason, before the mask plate is brought into contact with the substrate, it is necessary to correct the warp by pressing the entire substrate, and a screen printing machine provided with such a warp correction means is conventionally known (Patent Document 1). .

JP 2005-305484 A

  However, in the conventional warp correction means, since one plate member is pressed against the substrate by a cylinder or the like, depending on the size of the substrate, the plate member may be excessive or small with respect to the substrate, and the pressing force Cannot be applied to the substrate in a well-balanced manner, and there is a problem that the warpage of the substrate may not be sufficiently corrected.

  Accordingly, the present invention provides a screen printing machine that can apply a pressing force to a substrate in a well-balanced manner regardless of the size of the substrate, and can perform screen printing after sufficiently correcting the warpage of the substrate. Objective.

The screen printing machine according to claim 1, wherein a clamp member that clamps and holds both side portions of the substrate, and a plurality of pressing members are attached to a base portion positioned above the substrate held by the clamp member. The warping correction body, the pressing means for pressing the upper surface of the substrate held by the clamp member relatively to the lower surface of the pressing member included in the warpage correction body, and the substrate that has been pressed against the warpage correction body and corrected for warping A mask plate, paste supply means for supplying paste to the mask plate that is in contact with the substrate, and sliding with respect to the mask plate supplied with paste by the paste supply means, through a pattern hole provided in the mask plate A screen printing machine provided with a squeegee for printing paste on a substrate, and the plurality of pressing members provided in the warp correction body are Are arranged side by side in parallel in the direction orthogonal to the clamp Direction of the substrate by the clamp member, and a plurality of rows arranged in the clamping direction parallel to the direction, it is attached to the base portion via respective plurality of spring members.

A screen printing machine according to a second aspect is the screen printing machine according to the first aspect, wherein each pressing member is relatively movable in a direction orthogonal to the clamping direction .

The screen printing machine according to claim 3, a screen printing machine according to claim 1 or 2, wherein said plurality of spring members provided between the pressing members and the base portion, the substrate by the clamp member Have different spring constants depending on the position in the clamping direction.

In the present invention, warp correcting member is a base portion which is located above the substrate held by the clamp members are arranged side by side in parallel in the direction orthogonal to the clamp Direction of the substrate by the clamp member, and the clamping direction Since a plurality of pressing members arranged in a plurality of rows in parallel directions are respectively attached via a plurality of spring members, a portion of the pressing members (substrates that are in contact with the substrate) when correcting the warping of the substrate Depending on the size, all pressing members) independently press the substrate via the spring member. For this reason, the pressing force can be applied to the substrate in a balanced manner regardless of the size of the substrate, and screen printing can be performed after sufficiently correcting the warpage of the substrate.

The top view of the screen printer in Embodiment 1 of this invention Front view of a screen printing machine according to Embodiment 1 of the present invention. Side view of a screen printing machine according to Embodiment 1 of the present invention. 1 is a block diagram showing a control system of a screen printing machine in Embodiment 1 of the present invention. (A) (b) The top view of the positioning conveyor with which the screen printer in Embodiment 1 of this invention is provided 1 is a partially exploded perspective view of a warp correction body included in a screen printing machine according to Embodiment 1 of the present invention. The front view of the curvature correction body with which the screen printer in Embodiment 1 of this invention is provided. (A) (b) (c) The partial perspective view of the curvature correction body with which the screen printer in Embodiment 1 of this invention is provided. (A) (b) (c) Explanatory drawing of the usage method of the curvature correction body with which the screen printer in Embodiment 1 of this invention is provided. (A) (b) Operation | movement explanatory drawing of the screen printer in Embodiment 1 of this invention (A) (b) (c) (d) Operation explanatory diagram of the screen printing machine in Embodiment 1 of the present invention (A) (b) (c) Operation explanatory drawing of the screen printing machine in Embodiment 1 of the present invention The partially exploded perspective view of the curvature correction body with which the screen printer in Embodiment 2 of this invention is provided. The side view of the curvature correction body with which the screen printer in Embodiment 2 of this invention is provided. (A) (b) (c) Explanatory drawing of the usage method of the curvature correction body with which the screen printer in Embodiment 2 of this invention is provided. Explanatory drawing of the usage method of the curvature correction body with which the screen printer in Embodiment 2 of this invention is provided. (A) (b) (c) The partial side view of the curvature correction body with which the screen printer in Embodiment 2 of this invention is provided.

(Embodiment 1)
1, 2, and 3, the screen printing machine 1 according to the first embodiment includes a base 2, a substrate PB that is provided on the base 2, and a substrate PB that is a printing target, and positioning to a predetermined work position. The substrate positioning unit 3 is configured to include a mask plate 4, a syringe 5, a squeegee 6, a camera unit 7, and a warp correction body 10 provided above the substrate positioning unit 3. Hereinafter, for convenience of explanation, the transport direction of the substrate PB by the substrate positioning unit 3 (left and right direction in FIG. 1) is the X axis direction, and the horizontal plane direction perpendicular to the X axis direction (up and down direction in FIG. 1) is the Y axis direction. The vertical direction (the vertical direction in FIG. 2) is taken as the Z-axis direction.

  1, 2, and 3, the substrate positioning unit 3 includes a Y table 11a that moves in the Y axis direction with respect to the base 2, an X table 11b that moves in the X axis direction with respect to the Y table 11a, and an X table. The horizontal table positioning unit 11 including the θ table 11c rotating around the Z axis with respect to 11b and the base table 11d fixed to the upper surface of the θ table 11c, and the base table 11d of the horizontal plane positioning unit 11 is moved up and down. A first elevating table 12a, a second elevating table 12b elevating relative to the first elevating table 12a, a vertical positioning part 12 comprising a lower receiving unit 12c provided on the upper surface of the second elevating table 12b, Attached to the first lifting table 12a of the positioning unit 12, the substrate PB is transported in the X-axis direction, and the substrate PB is predetermined. The positioning conveyor 13 consisting of a pair of belt conveyors that are positioned at the working position, and is opened and closed in the Y-axis direction above the positioning conveyor 13, and both sides of the substrate PB on the positioning conveyor 13 in the Y-axis direction are lateral to the substrate PB. And a pair of clamp members (clampers) 14 that are clamped (held).

  In FIGS. 1 and 2, at positions on both sides in the X-axis direction of the positioning conveyor 13 constituting the substrate positioning unit 3, the substrate PB loaded from the outside of the screen printing machine 1 (the left side in FIG. 1 and FIG. 2) is placed. A carry-in conveyor 15 that carries (carrys in) and delivers it to the positioning conveyor 13 and a carry-out conveyor 16 that carries (carryes out) the substrate PB delivered from the positioning conveyor 13 to the outside of the screen printing machine 1 are provided.

  In FIG. 1, FIG. 2 and FIG. 3, the mask plate 4 is supported on its four sides by a frame member 4w, and a plurality of electrodes provided on the substrate PB are within a rectangular mask region surrounded by the frame member 4w. A plurality of pattern holes 4a corresponding to DT are provided.

  In FIG. 1, an XY robot 17 is provided on the base 2. The XY robot 17 is provided with a pair of Y-axis stages 17a provided extending in the Y-axis direction above the substrate positioning unit 3, and provided with both ends supported by the pair of Y-axis stages 17a. An X-axis stage 17b for moving the camera and an X-axis stage 17c for moving the warp correction body that are movable in the Y-axis direction, and a camera support stage 17d that is movable on the X-axis stage 17b for moving the camera in the X-axis direction. Consists of. In FIG. 3, the camera unit 7 includes a first camera 7a having an imaging field of view directed downward and a second camera 7b having an imaging field of view directed upward.

  In FIG. 3, two squeegees 6 are provided so as to be opposed to the moving beam 18 (see also FIG. 2) provided so as to be movable in the Y-axis direction. Each squeegee 6 is a spatula-like member extending in the X-axis direction, and is moved up and down with respect to the moving beam 18 by operation of a squeegee lifting cylinder 6 a attached to the moving beam 18.

  In this screen printing machine 1, each operation of the carry-in conveyor 15, the positioning conveyor 13 and the carry-out conveyor 16 as a board conveyance path for carrying the board PB is performed by a control apparatus 20 (FIG. 4) which is not shown in the board conveyance path operating mechanism 21. The clamping operation of the substrate PB by the clamp member 14 is performed by performing the operation control of the clamp member operating mechanism 22 (FIG. 4) including an actuator (not shown). Made.

Movement of the Y table 11a with respect to the base 2 in the Y-axis direction, movement of the X table 11b with respect to the Y table 11a in the X-axis direction, rotation of the θ table 11c with respect to the X table 11b (ie, the rotation of the base table 11d) about the Z axis The control device 20 operates the Y table drive motor My and X for each operation of raising and lowering the first raising and lowering table 12a with respect to the base table 11d and raising and lowering the second raising and lowering table 12b with respect to the first raising and lowering table 12a (that is, the receiving unit 12c). This is done by controlling the operation of the substrate positioning unit operating mechanism 23 (FIG. 4) including an actuator such as a table driving motor Mx (see FIGS. 2 and 3).

  The movement operation of the camera movement X-axis stage 17b and the warp correction body movement X-axis stage 17c constituting the XY robot 17 in the Y-axis direction and the movement of the camera support stage 17d to which the camera unit 7 is attached in the X-axis direction. The operation is performed when the control device 20 controls the operation of the XY robot operation mechanism 24 (FIG. 4) including an actuator (not shown).

  In FIG. 3, the syringe 5 is provided so as to be movable in a horizontal plane above the mask plate 4 by a moving mechanism (not shown), and discharges a paste such as solder paste or conductive paste stored therein. The movement operation of the syringe 5 is performed when the control device 20 controls the operation of a syringe moving mechanism 25 (FIG. 4) including an actuator (not shown), and the control device 20 does not show the paste discharging operation by the syringe 5. This is done by controlling the operation of the paste discharge mechanism 26 (FIG. 4) composed of an actuator or the like.

  The movement operation of the moving beam 18 holding the squeegee 6 in the Y-axis direction is performed when the control device 20 controls the operation of a squeegee moving mechanism 27 (FIG. 4) including an actuator (not shown). The raising / lowering operation | movement with respect to the beam 18 is made when the control apparatus 20 performs operation control of the above-mentioned squeegee raising / lowering cylinder 6a.

  The first camera 7a constituting the camera unit 7 is controlled by the control device 20 provided in the screen printing machine 1, and the substrate position detection mark (not shown) of the substrate PB positioned at the work position by the substrate positioning unit 3. The second camera 7b is controlled by the control device 20 to image a mask position detection mark (not shown) provided on the mask plate 4. Both the image data obtained by the imaging of the first camera 7a and the image data obtained by the imaging of the second camera 7b are input to the control device 20 (FIG. 4).

  5 (a) and 5 (b), the positioning conveyor 13 is fixed to the fixed conveyor CBa that cannot move in the Y-axis direction with respect to the base 2, and to the base 2 (that is, to the fixed conveyor CBa). ) It is composed of a movable conveyor CBb that can move in the Y-axis direction. The fixed conveyor CBa and the movable conveyor CBb are moved by moving the movable conveyor CBb in the width direction (Y-axis direction) of the substrate PB with respect to the fixed conveyor CBa. Can be changed (conveyor width W).

  FIGS. 5A and 5B show a state in which the conveyor width W of the positioning conveyor 13 is changed in accordance with the size (width-direction dimension) of the substrate PB. FIG. ) Shows a state when the conveyor width W is relatively small. Although the positioning conveyor 13 is shown here, the conveyor width W can be variably set in the same manner for the carry-in conveyor 15 and the carry-out conveyor 16.

The screen printing machine 1 is provided with a conveyor width setting input unit 28 (FIG. 4) for an operator to input a set value of the conveyor width W. The operator can change the conveyor width W from the conveyor width setting input unit 28. When the value is input, the control device 20 controls the operation of the conveyor width setting mechanism 29 (FIG. 4) including an actuator (not shown) to move the movable conveyors CBb of the three conveyors 13, 15, 16 in the Y-axis direction. The conveyor width W of each of the three conveyors 13, 15, 16 is set to the value input from the conveyor width setting input unit 28. For this reason, in this screen printer 1, the board | substrate PB of a different size can be conveyed and positioned, and screen printing can be performed with respect to multiple types of board | substrates PB.

  In FIG. 6, the warp correction body 10 is attached to the warp correction body moving X-axis stage 17 c constituting the XY robot 17 via a pair of brackets 31, and is clamped by the movement of the warp correction body moving X-axis stage 17 c. 14 includes a base portion 32 positioned above the substrate PB held by the base plate 14 and a plurality of pressing members 33 attached to the base portion 32.

  The base portion 32 is arranged in parallel with a base plate 41 provided extending in the Y-axis direction and in parallel with the clamping direction (Y-axis direction) of the substrate PB by the clamp member 14, and the lower side of the base plate 41 is below the base plate 41. A plurality (four in this case) of pressing member mounting brackets 42 movably mounted in the Y-axis direction are provided.

  The base plate 41 has a rectangular shape extending in the Y-axis direction as a whole, and has a short side parallel to the X-axis and a long side parallel to the Y-axis. Slide grooves 43 extending in the Y-axis direction are provided on both side surfaces (both side surfaces parallel to the Y-axis) on the long side (see also FIG. 7).

  In FIG. 6, each pressing member mounting bracket 42 is a long plate-like member extending in the X-axis direction. Engage with the end face on the long side. Therefore, the entire pressing member mounting bracket 42 can be moved in the Y-axis direction with respect to the base plate 41.

  In each of the left side enlarged views in FIG. 7, each fixing tool 51 includes a slider 52 having a U-shaped cross section attached to the upper surface of the pressing member mounting bracket 42, and screw insertion provided on the vertical wall 52 a of the slider 52. The fixing screw 54 that extends through the hole 53 in the X-axis direction and has the knob portion 54 a positioned outside the vertical wall 52 a of the slider 52 and the fixing screw 54 and screw that are positioned in the slide groove 43 of the base plate 41. It has a combined nut plate 55.

  As shown in the enlarged left side view in FIG. 7, the nut plate 55 screwed with the fixing screw 54 of each fixing tool 51 is connected to the axis of the fixing screw 54 by the upper and lower inner wall surfaces 41 a and 41 b of the base plate 41 forming the slide groove 43. (This axis is parallel to the X axis) The rotation in the rotation direction is constrained, and when the operator twists the knob portion 54a to screw the fixing screw 54 into the nut plate 55, the nut plate 55 causes the slide groove 43 to move. Since the vertical wall 52a of the slider 52 and the upper and lower end walls 41d and 41e of the base plate 41 are clamped between the base plate 41 and the fixing screw 54, the slider 52 is fixed to the base plate 41. Fixed against.

  In FIG. 6, each pressing member 33 is a long member extending in the X-axis direction below the pressing member mounting bracket 42, and spring insertion member mounting holes 61 are formed at both ends in the X-axis direction. Is provided in the thickness direction (Z-axis direction).

  In FIG. 6, spring insertion members 62 are attached to both ends of each pressing member attachment bracket 42 in the X-axis direction. Each spring insertion member 62 has a screw portion 62a extending downward, and the screw portion 62a is inserted through a spring member (here, a helical spring extending in the vertical direction) 63 in the vertical direction. The spring insertion member extends through the spring insertion member mounting hole 61 of the pressing member 33 in the vertical direction (right-side enlarged view in FIG. 7) and opens in the nut receiving space 64 provided on the lower surface of the pressing member 33. Screwed onto the retaining nut 65.

For this reason, two spring members 63 are interposed between each pressing member 33 and the pressing member mounting bracket 42, and the lower surface of the pressing member 33 is pressed from below with the base portion 32 fixed. Then, the pressing member 33 approaches the base portion 32 (the pressing member mounting bracket 42) side while contracting the spring member 63.

  In each fixing tool 51, when the knob portion 54a of the fixing screw 54 is twisted in the direction of the arrow A1 shown in FIG. 8A, the nut plate 55 is relatively moved away from the knob portion 54a, and the slider 52, the base plate 41, and the like. When the knob 54a is released and the knob 54a is twisted in the direction of arrow A2 shown in FIG. 8C, the nut plate 55 is moved relative to the knob 54a and the slider 52 and the base plate 41 are clamped. The In a state where the tightening of the slider 52 and the base plate 41 is released, each fixture 51 is slidable along the long side end surface of the base plate 41 (that is, in the Y-axis direction), and the slider 52 and the base plate 41 are tightened. If it is made, since the fixing tool 51 can be fixed to the base plate 41, each pressing member 33 can change the attachment position with respect to the base plate 41 to an arbitrary position in the Y-axis direction.

  To change the mounting position of the pressing member 33 with respect to the base plate 41, the fixing screws 54 of the pair of fixing members 51 attached to the pressing member mounting bracket 42 connected to the pressing member 33 whose mounting position is to be changed are simultaneously loosened. (FIG. 8A. Arrow A1 shown in the figure), the entire pressing member 33 is moved in the direction in which it is desired to slide in the Y-axis direction, and the mounting position is changed (FIG. 8B. Arrow B shown in the figure. When a new mounting position is determined, the fixing screw 54 is tightened again (FIG. 8 (c), arrow A2 shown in the figure).

  As described above, in the warp correction body 10 of the screen printing machine 1 according to the first embodiment, the pressing members 33 are relatively movable in the arrangement direction of the pressing members 33 (Y-axis direction). It is possible to freely change the interval between the adjacent pressing members 33 by changing the attachment position of the 33 to the base plate 41.

  When correcting the warp of the substrate PB clamped by the clamp member 14, the substrate positioning unit 3 is operated so that the upper surface of the substrate PB is pressed against the warp correction body 10 from below. Among the pressing members 33, the outer end portion in the Y-axis direction of the pressing member 33 closest to the fixed conveyor CBa and the inner end portion in the Y-axis direction on the upper surface of the clamp member 14 on the fixed conveyor CBa side are in contact with each other. (See FIGS. 9 (a), 9 (b) and 9 (c)), the warp correction body 10 is positioned in advance.

  Thereby, among the four pressing members 33 included in the warp correction body 10, a part or all of the pressing members 33 corresponding to the size of the substrate PB come into contact with the substrate PB and the substrate PB is pressed. For example, when the width direction dimension of the substrate PB is large as shown in FIG. 9A and the conveyor width W is set to a value close to the maximum value, all of the four pressing members 33 are on the upper surface of the substrate PB. The four pressing members 33 press the substrate PB to correct the warp of the substrate PB, but the width dimension of the substrate PB is small as shown in FIG. Is set to a value smaller than the maximum value, depending on the value of the set conveyor width W (depending on the size of the substrate PB), some of the four pressing members 33 (FIG. 9). In (b), only three pressing members 33 come into contact with the substrate PB and press the substrate PB (the pressing member 33 not in contact with the substrate PB remains idle as far as the substrate PB is pressed. ). Each pressing member 33 is attached to the base portion 32 via the spring member 63 (directly to the pressing member mounting bracket 42), and the pressing member 33 that has come into contact with the substrate PB via the spring member 63, respectively. Since the substrate PB is pressed independently, the pressing force can be applied to the substrate PB in a balanced manner regardless of the size of the substrate PB.

The four pressing members 33 are relatively movable in the direction in which the pressing members 33 are arranged (here, the Y-axis direction), and the interval between the adjacent pressing members 33 can be freely changed as described above. Therefore, the distance between the pressing members 33 is changed according to the size of the substrate PB so that the substrate PB is pressed by all the four pressing members 33 even when the substrate PB is small. (FIG. 9C).

  Next, the operation of the screen printer 1 will be described with reference to FIGS. 10, 11, and 12. When the control device 20 of the screen printing machine 1 detects that the substrate PB has been loaded from the outside (upstream of the carry-in conveyor 15) by the detection means (not shown), the control device 20 of the screen printing machine 1 operates the carry-in conveyor 15 to move the board. The PB is received and transferred to the positioning conveyor 13 (arrow C shown in FIG. 10A). When it is detected by a detection means (not shown) that the substrate PB conveyed by the positioning conveyor 13 has reached a predetermined work position, the positioning conveyor 13 is stopped to perform positioning (FIG. 10B). Process).

  After positioning the substrate PB to the work position, the control device 20 raises the second lifting table 12b of the vertical positioning portion 12 included in the substrate positioning unit 3 with respect to the first lifting table 12a (FIG. 11A). ) When the lower support unit 12c comes into contact with the lower surface of the substrate PB, the ascent of the second elevating table 12b is stopped. And the clamp member 14 is operated and the both sides of the board | substrate PB on the positioning conveyor 13 are clamped and hold | maintained (arrow E1 shown in Fig.11 (a). Board | substrate holding process).

  When the control device 20 clamps and holds the substrate PB with the clamp member 14, the control device 20 raises the second lifting table 12b again with respect to the first lifting table 12a (arrow D2 shown in FIG. 11B), and receives the lower support. The substrate PB is pushed up by the unit 12c. As a result, the substrate PB is raised while sliding both ends with respect to the clamp member 14 (away from the positioning conveyor 13), and the upper surface of the substrate PB becomes almost the same height as the upper surfaces of both the clamp members 14. By the way, it is stopped (FIG. 11B).

  When the height adjustment of the substrate PB with respect to the clamp member 14 is completed (or before the height adjustment), the control device 20 moves the X-axis stage 17c for warp correction body movement of the XY robot 17 in the Y-axis direction, The warp correction body 10 placed at a predetermined standby position is moved to a predetermined position above the positioning conveyor 13 (arrow F1 shown in FIG. 11B).

  When the control device 20 positions the warp correction body 10 at a predetermined position above the positioning conveyor 13, the control device 20 raises the first elevating table 12a with respect to the base table 11d (arrow D3 shown in FIG. 11C), The substrate PB held by the clamp member 14 is pressed from below onto the lower surface of the pressing member 33 provided in the warp correction body 10 (FIG. 11C). Thereby, the board | substrate PB is pinched | interposed by the some pressing member 33 with which the curvature correction body 10 is equipped, and the receiving unit 12c, and the curvature of the board | substrate PB is corrected (warp correction process).

  When the control device 20 corrects the warpage of the substrate PB as described above, the control device 20 lowers the first elevating table 12a with respect to the base table 11d (FIG. 11 (d), arrow D4 shown in the figure), and moves the substrate PB. The warp correction body 10 is separated downward (FIG. 11 (d)). Then, the X-axis stage 17c for warp correction body movement of the XY robot 17 is moved in the Y-axis direction, and the warp correction body 10 is moved to the standby position (arrow F2 shown in FIG. 11D).

When the warpage correction process of the substrate PB is completed, the control device 20 operates the camera movement X-axis stage 17b and the camera support stage 17d of the XY robot 17 to bring the camera unit 7 into the region between the substrate PB and the mask plate 4. The first camera 7a is used to image the substrate position detection mark provided on the substrate PB, and the second camera 7b is used to image the mask position detection mark provided on the mask plate 4. Then, the position of the substrate PB is grasped from the image data of the obtained substrate position detection mark, and the position of the mask plate 4 is grasped from the obtained image data of the mask position detection mark.

  After grasping the position of the substrate PB and the position of the mask plate 4, the control device 20 controls the operation of the positioning unit 11 in the horizontal plane provided in the substrate positioning unit 3 to move the substrate PB in the horizontal plane direction, and the substrate PB and the mask. Horizontal alignment is performed so that the plate 4 faces in the vertical direction. When the horizontal alignment between the substrate PB and the mask plate 4 is completed, the control device 20 raises the first lifting table 12a of the vertical positioning unit 12 included in the substrate positioning unit 3 with respect to the base table 11d (see FIG. 12 (a), the upper surface which is the printing surface of the substrate PB is brought into contact with the mask plate 4 from below (FIG. 12 (a), mask plate contacting step). As a result, the pattern hole 4a of the mask plate 4 and the electrode DT on the substrate PB are aligned in the vertical direction.

  After the substrate PB is brought into contact with the mask plate 4, the control device 20 moves the syringe 5 above the mask plate 4 to supply the paste PT to the upper surface of the mask plate 4 (FIG. 12A). Step), one squeegee 6 is lowered and the lower edge of the squeegee 6 is brought into contact with the upper surface of the mask plate 4. Then, the squeegee 6 brought into contact with the mask plate 4 is moved in the Y-axis direction (arrow G shown in FIG. 12B), and the paste PT is scraped by the squeegee 6 to enter the pattern hole 4a of the mask plate 4. Fill (paste filling process). In FIG. 12B, when the paste PT is scraped in the direction opposite to the arrow G, the left squeegee 6 is lifted away from the mask plate 4 and the right squeegee 6 is moved away from the mask plate 4. The squeegee 6 is moved in the direction opposite to the arrow G.

  After filling the pattern hole 4a of the mask plate 4 with the paste PT, the control device 20 lowers the first elevating table 12a with respect to the base table 11d and separates the mask plate 4 from the substrate PB (FIG. 12C). ) Arrow D6) shown in the figure. As a result, plate separation is performed (plate separation step), and the paste PT is printed on the electrode DT of the substrate PB.

  When the printing of the paste PT on the substrate PB is finished, the control device 20 operates the clamp member 14 to release the clamp of the substrate PB (arrow E2 shown in FIG. 12C), and then the second lifting table 12b is lowered with respect to the first lifting table 12a, and the substrate PB is lowered onto the positioning conveyor 13. Then, the positioning unit 11 in the horizontal plane provided in the substrate positioning unit 3 is operated to adjust the position of the positioning conveyor 13 with respect to the carry-out conveyor 16, and then the positioning conveyor 13 and the carry-out conveyor 16 are operated, and the substrate on the positioning conveyor 13 is operated. The PB is delivered to the carry-out conveyor 16 and is carried out as it is outside the screen printing machine 1 (substrate carry-out process).

(Embodiment 2)
The screen printer 1 according to the second embodiment is different from the screen printer 1 according to the first embodiment only in the configuration of the warp correction body. In FIG. 13, a warp correction body 70 according to the second embodiment includes a base portion 72 attached to a warp correction body moving X-axis stage 17 c constituting the XY robot 17 via a pair of brackets 71, and a base portion 72. It has a plurality of attached pressing members 73.

The base portion 72 includes a base plate 81 provided extending in the Y-axis direction, and a rectangular frame-like body 82 provided below the base plate 81 and extending in a direction orthogonal to the extending direction of the base plate 81 (that is, the X-axis direction). And arranged in parallel in a direction (X-axis direction) orthogonal to the clamping direction (Y-axis direction) of the substrate PB by the clamp member 14, and below the frame-shaped body 82 with respect to the frame-shaped body 82 in the X-axis direction A plurality of (here, five) pressing member mounting brackets 83 that are movably attached to the housing.

  The base plate 81 has a rectangular shape extending in the Y-axis direction as a whole, and has a short side parallel to the X-axis and a long side parallel to the Y-axis. Further, the frame-like body 82 has a long side parallel to the X axis and a short side parallel to the Y axis. Slide grooves having the same configuration as the slide groove 43 of the first embodiment and extending in the X axis direction on both side surfaces (both side surfaces parallel to the X axis) on the long side of the frame-like body 82 Is provided).

  In FIG. 13, each pressing member mounting bracket 83 is a long plate-like member extending in the Y-axis direction, and is the same as the fixture 51 in the first embodiment provided on the upper surface thereof so as to face the Y-axis direction. A pair of fixtures (same as 51) is engaged with the end face on the long side of the frame-like body 82. For this reason, the entire pressing member mounting bracket 83 can be moved in the X-axis direction with respect to the frame-like body 82. In addition, since the attachment method with respect to the slide groove | channel 43 of each fixing tool 51 is the same as that of the case of Embodiment 1, since the left enlarged view of FIG. 7 can be referred, the detailed description is abbreviate | omitted.

  In FIG. 13, each pressing member 73 is a long member extending in the Y-axis direction similarly to the pressing member mounting bracket 83, but the length in the Y-axis direction is the length of the pressing member mounting bracket 83 in the Y-axis direction. The spring insertion member mounting holes 91 are provided at both ends in the Y-axis direction so as to penetrate the pressing member 73 in the thickness direction. That is, in this warp correction body 70, two pressing members 73 extending in the Y-axis direction are mounted side by side in the Y-axis direction for each pressing member mounting bracket 83 extending in the Y-axis direction.

  13 and 14, each pressing member 73 is attached to a corresponding pressing member mounting bracket 83 with the same configuration as the warp correction body 10 in the first embodiment. That is, each pressing member mounting bracket 83 is provided with four spring insertion members (same as 62) arranged in the Y-axis direction, similar to the spring insertion member 62 of the first embodiment. The threaded portion 62a of the spring insertion member 62 is inserted through a spring member similar to the spring member 63 similar to that of the first embodiment (reference numeral is also 63) in the vertical direction, and then the spring insertion member mounting hole of the pressing member 73 91 in the nut housing space (reference numeral is also denoted by 64) similar to the nut housing space 64 in the first embodiment, which extends through the upper and lower portions 91 and is opened on the lower surface of the pressing member 73. The spring insertion member retaining nut 65 similar to the spring insertion member retaining nut 65 in the first mode is screwed into the same.

  For this reason, two spring members 63 are interposed between each pressing member 73 and the pressing member mounting bracket 83 (FIG. 14), and the bottom surface of the pressing member 73 is fixed with the base portion 72 fixed. Is pressed from below, the pressing member 73 approaches the pressing member mounting bracket 83 side while contracting the spring member 63.

  When correcting the warp of the substrate PB clamped by the clamp member 14, the substrate positioning unit 3 is operated and the upper surface of the substrate PB is pressed against the warp correction body 70 from below as in the case of the first embodiment. However, at this time, the Y-axis direction outer side ends of the five pressing members 73 positioned on the fixed conveyor CBa side and the Y-axis direction inner side end portions of the upper surface of the clamp member 14 on the fixed conveyor CBa side are in contact with each other. The warp correction body 70 is positioned in advance so as to be in contact with each other (see FIGS. 15A, 15B, and 15C).

Thereby, among the ten pressing members 73 included in the warp correction body 70, a part or all of the pressing members 73 corresponding to the size of the substrate PB come into contact with the substrate PB and the substrate PB is pressed. For example, as shown in FIG. 15A, the width dimension of the substrate PB is large, the conveyor width W is set to a value close to the maximum value, and the length dimension (dimension in the X-axis direction) of the substrate PB is also set. If it is large, all of the ten pressing members 73 come into contact with the upper surface of the substrate PB, and the substrate PB is pressed by these ten pressing members 73 to correct the warp of the substrate PB. When the width direction dimension of the substrate PB is small and the conveyor width W is set smaller than the maximum value as shown in FIG. 15B or FIG. 15C, or the length direction dimension of the substrate PB is relatively small. Depending on the set conveyor width W (depending on the size of the substrate PB), some of the ten pressing members 73 (six in FIG. 15B, three in FIG. 15C) Only the pressing member 73 is in contact with the substrate PB, and the substrate PB So that the pressure (in this case, the pressing member 73 does not contact the substrate PB is as far as the pressing of the substrate PB, a state of playing). Each pressing member 73 is attached to the base portion 72 via the spring member 63 (directly to the pressing member mounting bracket 83), and the pressing member 73 that has come into contact with the substrate PB is connected via the spring member 63, respectively. Since the substrate PB is pressed independently, the pressing force can be applied to the substrate PB with a good balance even if the size of the substrate PB changes.

  Further, in the warp correction body 70 according to the second embodiment, the pressing member 73 attached to each pressing member mounting bracket 83 is relatively movable in the arrangement direction (X-axis direction) in units of the pressing member mounting bracket 83. The mounting positions of the pressing members 73 relative to the base plate 81 can be changed by operating the knob portions 54a (FIG. 14) of the pair of fixing members 51 provided on the pressing member mounting brackets 83, and the X-axis direction. It is possible to freely change the interval between the pressing members 73 adjacent to each other. For this reason, even if the substrate PB is relatively small, the substrate PB is pressed by all of the ten pressing members 73 by changing the interval between the pressing members 73 according to the size of the substrate PB. It is also possible to do so (FIG. 16).

  In the warp correction body 70 according to the second embodiment, for each pressing member 73, the two spring members 63 arranged in the Y-axis direction between the pressing member mounting bracket 83 are formed on the substrate PB by the clamp member 14. Have different spring constants depending on the clamping direction (Y-axis direction). That is, in FIG. 14, among the two spring members 63 arranged side by side in the Y-axis direction for one pressing member 73, the spring member 63 (reference numeral 63a) on the left side of the page (the side closer to the fixed conveyor CBa). And the spring constant of the spring member 63 (reference numeral 63b) on the right side of the page (the side far from the fixed conveyor CBa) of the spring constant of the spring member 63b far from the fixed conveyor CBa. The spring constant is relatively lower than the spring constant of the spring member 63a on the side close to the fixed conveyor CBa (and is therefore soft).

  When the substrate PB clamped by the clamp member 14 is pressed against the warp correction body 70, among the 10 pressing members 73 included in the warp correction body 70, the five pressing members 73 on the fixed conveyor CBa side include The relative push-up force P (FIG. 17 (a)) acts almost directly from the extremely rigid clamp member 14 (the clamp member 14 on the fixed conveyor CBa side) against the substrate PB. When the two spring members 63 arranged in the Y-axis direction provided between the pressing member mounting bracket 83 and the member 73 have the same spring constant, the push-up force P is not directly applied. The amount of contraction of the spring member 63 (the spring member 63b on the right side in FIG. 17) is the amount of the spring member 63 on the side on which the push-up force P acts almost directly (on the left side in FIG. 17). Is smaller than the contraction amount of the member 63a), the pressing member 73 as shown in FIG. 17 (b) would be tilted from the horizontal position, is where it becomes impossible to press the substrate PB in uniform force distribution.

However, as described above, in the warp correction body 70 according to the second embodiment, for each pressing member 73, of the two spring members 63 arranged in the Y-axis direction provided between the pressing member mounting bracket 83, The spring constant of the spring member 63 on the side where the push-up force P does not act directly (the side far from the fixed conveyor CBa) (the spring member 63b on the right side in FIG. 17) is the side where the push-up force P acts almost directly (on the fixed conveyor CBa). The spring member 63 (near side) is a value relatively lower than the spring constant of the spring member 63 (the left side spring member 63a in FIG. 17), and the spring member 63 (the page surface in FIG. 17) on which the push-up force P does not act directly. The amount of contraction of the right spring member 63b) is determined by the contraction of the spring member 63 on the side on which the pushing-up force P acts almost directly (the spring member 63a on the left side in FIG. 17). It is possible to about the same extent when, as shown in FIG. 17 (d), it is possible to hold the pressing member 73 in a horizontal posture, it is possible to press the substrate PB in uniform force distribution.

  As described above, the screen printing machine 1 according to the first embodiment (or the second embodiment) includes the clamp member 14 that clamps and holds both sides of the substrate PB, and the substrate PB that is held by the clamp member 14. A warp correction body 10 (a warp in the second embodiment) in which a plurality of pressing members 33 (a pressing member 73 in the second embodiment) are attached to an upper base portion 32 (the base portion 72 in the second embodiment). The correction body 70), the substrate positioning unit 3 as pressing means for pressing the upper surface of the substrate PB held by the clamp member 14 against the lower surface of the pressing member 33 included in the warpage correction body 10, and the warpage correction body 10. The paste PT is supplied to the mask plate 4 that is in contact with the substrate PB that has been warped and the mask plate 4 that is in contact with the substrate PB. A squeegee that slides against the mask 5 serving as the first supply means and the mask plate 4 to which the paste PT is supplied by the syringe 5 and prints the paste PT on the substrate PB through the pattern holes 4 a provided in the mask plate 4. 6, the plurality of pressing members 33 included in the warp correction body 10 are in the Y-axis direction that is the clamping direction of the substrate PB by the clamping member 14 (in the second embodiment, orthogonal to the clamping direction of the substrate PB). Are arranged side by side in parallel with each other and are attached to the base part 32 via a plurality of spring members 63.

  In the screen printing machine 1 according to the first embodiment (or the second embodiment), the warp correction body 10 (the warp correction body 70 in the second embodiment) is positioned above the substrate PB held by the clamp member 14. A plurality of base portions 32 (base portion 72 in the second embodiment) arranged in parallel with the clamping direction of the substrate PB by the clamp member 14 (a direction perpendicular to the clamping direction of the substrate PB in the second embodiment). Since the pressing member 33 (the pressing member 73 in the second embodiment) is attached via a plurality of spring members 63, a part of the substrate PB that is in contact with the substrate PB is corrected when the substrate PB is warped. The pressing members 33 (all the pressing members 33 depending on the size of the substrate PB) each independently press the substrate PB via the spring member 63. Therefore, the pressing force can be applied to the substrate PB in a well-balanced manner regardless of the size of the substrate PB, and the screen printing can be performed after sufficiently correcting the warp of the substrate PB.

  In the screen printing machine 1 according to the first embodiment (or the second embodiment), the plurality of pressing members 33 (the pressing members 73 in the second embodiment) are relatively movable in the arrangement direction of the pressing members 33. Since the attachment position with respect to the base plate 41 (base plate 81 in the second embodiment) can be changed, the interval between the adjacent pressing members 33 can be freely changed. Thereby, it can press efficiently with respect to the board | substrate PB of a different size, and the curvature of the board | substrate PB can be corrected accurately.

Further, in the screen printing machine 1 according to the second embodiment, the plurality of pressing members 73 are arranged in parallel in a direction (X-axis direction) orthogonal to the clamping direction of the substrate PB by the clamping member 14, A plurality of spring members 63 provided between the base portion 72 (directly the pressing member mounting bracket 83) and different spring constants depending on the position of the clamping member 14 in the clamping direction (Y-axis direction) of the substrate PB. Therefore, even when a relative push-up force P is applied to the end of the pressing member 73, the inconvenience that the pressing member 73 is inclined from the horizontal posture is prevented, and the pressing member 73 is kept in the horizontal posture. The substrate PB can be pressed with a uniform force distribution to efficiently correct the warp of the substrate PB.

  In the screen printing machine 1 described above, by removing the spring insertion member retaining nut 65 from the screw portion 62a of the spring insertion member 62 attached to each pressing member attachment bracket 42 (or the pressing member attachment bracket 83), Although the spring insertion member 62 can be removed from the pressing member mounting bracket 42 (or the pressing member mounting bracket 83), the pressing member 33 can be removed from the pressing member mounting bracket 42 (or the pressing member 73 from the pressing member mounting bracket 83). ) Can be easily removed, and thereby maintenance work such as cleaning of the lower surface of the pressing member 33 (or the pressing member 73) can be performed. Further, for such a maintenance work, the entire warp correction body 10 (or warp correction body 70) may be removed from the X-axis stage 17c for warp correction body movement as one unit.

  Although the embodiments of the present invention have been described so far, the present invention is not limited to those shown in the above-described embodiments. For example, in the above-described first embodiment, the four pressing members 33 are arranged in the Y-axis direction. However, the number of the pressing members 33 arranged in parallel in the Y-axis direction may be plural. There is no particular limitation. In the second embodiment, the five pressing members 73 are arranged in the X-axis direction. However, the number of the pressing members 73 arranged in parallel in the X-axis direction may be plural. There is no particular limitation. In the second embodiment, the number of pressing members 73 arranged in the Y-axis direction per pressing member mounting bracket 83 is two. However, this may be one or three. It may be the above.

  Provided is a screen printing machine capable of applying a pressing force to a substrate in a balanced manner regardless of the size of the substrate, and capable of performing screen printing after sufficiently correcting the warpage of the substrate.

1 Screen printer 3 Substrate positioning unit (pressing means)
4 mask plate 4a pattern hole 5 syringe (paste supply means)
6 Squeegee 10 Warp Correction Body 14 Clamp Member 32 Base Part 33 Pressing Member 63 Spring Member PB Substrate PT Paste

Claims (3)

A clamp member that clamps and holds both sides of the substrate, a warp correction body in which a plurality of pressing members are attached to a base portion that is positioned above the substrate held by the clamp member, and is held by the clamp member A pressing unit that presses the upper surface of the substrate relative to the lower surface of the pressing member included in the warpage correction body, a mask plate that is pressed against the warpage correction body and that comes into contact with the substrate, and a mask plate that is in contact with the substrate A paste supply means for supplying the paste to the substrate, and a squeegee that slides on the mask plate supplied with the paste by the paste supply means and prints the paste on the substrate through the pattern holes provided in the mask plate. A screen printing machine,
Plurality of pressing members warp correcting member is provided is arranged side by side parallel to a direction perpendicular to the clamp Direction of the substrate by the clamp member, and a plurality of rows arranged in the clamping direction parallel to the direction, a plurality of spring members A screen printing machine, wherein the screen printing machine is attached to a base portion. 2. The screen printing machine according to claim 1, wherein each pressing member is relatively movable in a direction orthogonal to the clamping direction .   3. The plurality of spring members provided between each pressing member and a base portion have different spring constants depending on the position of the substrate in the clamping direction of the substrate. The screen printing machine described in 1.

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