JP5336754B2 - Cutting equipment - Google Patents

Abstract

The invention provides a cutting device, having a cutter hood which can make a movable part smoothly advance and retreat even if the movable part has big loading effect on an air cylinder part, the movable part is retreat to the evading position. The cutter hood (1) is composed of the movable part (10) with a jet nozzle, and an air cylinder part (11) for driving the movable part (10) by the advance and retreat of a lever (110), the movable part is fixed on the lever, the air cylinder part (11) can make the movable part selected located in the assembling and disassembling position where the cutting tool is assembled and disassembled and in the feeding position where the cutting solution is fed to the cutting tool from the jet nozzle, in the cutter hood (1), a support part (12) capable of supporting the movable part (10) to slide is arranged, the lever (110) advances and retreats so that in the period that the movable part is moved in the predetermined range, the support part (12) always support the movable part to slide, the big load is prevented from acting on the lever (110), consequently the movable movable part can be moved smoothly.

Description

  The present invention relates to a cutting apparatus equipped with a cutting blade for cutting a workpiece such as a semiconductor wafer and a blade cover having a function of supplying cutting water to the cutting blade.

  For example, in a semiconductor device manufacturing process, a circuit (cutting line) that forms circuits such as ICs and LSIs in a large number of areas formed in a grid on the surface of a semiconductor wafer having a substantially disk shape, and divides each circuit. Each semiconductor chip is manufactured by cutting and dicing.

  As a device for dicing a semiconductor wafer in this way, a cutting device is generally used. A cutting apparatus for dicing a semiconductor wafer includes a chuck table that holds a workpiece and a cutting means that includes a cutting blade that cuts the workpiece held on the chuck table. The cutting blade is usually protected by a blade cover. Further, the blade cover is provided with a cutting water supply nozzle, and cutting water mainly for cooling and cleaning is supplied from the cutting water supply nozzle to a cutting point or the like.

  Since the cutting blade is a consumable part, it needs to be periodically replaced. However, the cutting water supply nozzle or the like may interfere with the replacement. Therefore, the present applicant has proposed a blade cover in which a cutting water supply nozzle or the like is automatically retracted to a retracted position by a cylinder portion such as an air cylinder so that the cutting blade can be attached and detached (see, for example, Patent Document 1). ).

JP 7-276183 A

  However, although the above-described retraction function by the cylinder portion has reduced the work burden on the operator when the cutting blade is attached and detached, in recent years, the function of the blade cover has been diversified and the weight of the movable portion has increased, and the cylinder portion is loaded. The load may be large. In this case, in the blade cover having the above-described retreating function, the cylinder part cannot withstand the load, and the movable part may not be driven smoothly.

  The present invention has been made in view of the above facts, and the main technical problem thereof is to smoothly advance and retract the movable part even when a large load is applied to the cylinder part by the movable part that is retracted to the retracted position by the cylinder part. An object of the present invention is to provide a cutting apparatus having a blade cover that can be used.

The present invention relates to a holding means for holding a workpiece, a cutting means configured to detachably attach a cutting blade for cutting a workpiece held by the holding means to a spindle, and a nozzle for supplying cutting water to the cutting blade The blade cover includes a movable part including a nozzle, a cylinder part that has a rod that can be advanced and retracted, and that drives the movable part by moving the rod back and forth, and a cylinder part. a fixed cover section that covers the mounted cutting blade, and a support portion for supporting the fixed movable portion on the side of the fixed cover section and the movable section, the movable base portion fixed to the distal end of the rod, the moveable base is secured consists of a movable cover portion for covering the cutting blade, the cylinder portion is cut in the cutting blade the movable portion of the cutting blade from the desorption position and nozzle removable Water is selectively positionable and supply position capable of supplying, supporting portion is fixed to the fixed cover portion, to the movable base portion slidably supported from below, to reduce the load on the cylinder portion It is characterized by.

  In the present invention, since the support part always supports the movable part slidably while the movable part moves within a predetermined range by moving the rod back and forth within the stroke range, a high load may be applied to the rod. The movable part can be moved smoothly.

  The blade cover 1 shown in FIG. 1 protects the cutting blade 32 from above and from the side, and includes a movable portion 10 that slides in the horizontal direction so that the cutting blade 32 can be attached and detached, and a movable portion. And a cylinder portion 11 for driving the motor 10.

  The cylinder portion 11 is an air cylinder in the illustrated example, and as shown in FIG. 2, a rod 110 that advances and retreats in the horizontal direction, a first air introduction portion 111 that introduces air for advancing the rod 110, And a second air introduction part 112 for introducing air for retreating the rod 110. The first air introduction part 111 and the second air introduction part 112 are respectively provided with a first adjustment part 113 and a second adjustment part 114 that adjust the amount of air introduced. 2 shows a state in which the cutting blade 32 shown in FIG. 1 is removed.

  A movable base 100 is attached to the tip of the rod 110, and the movable base 100 is also moved in the horizontal direction as the rod 110 advances and retreats. A movable cover portion 101 is fixed to the movable base portion 100, and the movable base portion 100 and the movable cover portion 101 constitute a movable portion 10.

  The movable cover portion 101 is a member that covers and protects the cutting blade 32 from the upper side of the cutting blade 32 and the right side when viewed from the front, and a pair of nozzles 102 disposed so as to sandwich the cutting blade 32 from the front and rear. The water inflow part 103 used as the inflow port of the cutting water discharged from the nozzle 102 is provided.

  A fixed cover portion 115 is attached to the lower portion of the cylinder portion 11 and the front front side. The fixed cover 115 is a member that covers and protects the cutting blade 32 from the left side when viewed from above and in front of the cutting blade 32, and includes an inflow portion 116 that allows cutting water to flow in, and cutting water that flows from the inflow portion 116. Are provided, and an air ejecting portion 118 that ejects air that blows off the cutting water or the like adhering to the cutting blade 32. The fixed cover portion 115 has a shape in which the lower end is cut into a circular shape in accordance with the shape of the cutting blade 32.

  As shown in FIG. 2, when the rod 110 moves forward (moves in the right direction in FIG. 2) due to the introduction of air in the first air introduction part 111, the gap between the movable part 10 and the fixed cover part 115 opens. The cutting blade 32 can be detached. The position of the movable part 10 at this time is called a detaching position. On the other hand, the rod 110 moves backward (moves to the left in FIG. 2) and there is no space between the fixed cover portion 115 and the movable portion 10 to allow the cutting blade 32 to be attached and detached. In the state where 32 is located, the cutting water can be supplied from the nozzle 102 to the cutting blade 32. The position of the movable part 10 at this time is called a supply position.

  As shown in FIG. 3, in which the movable cover portion 101 is not shown, a support portion 12 that supports the movable base portion 100 from below is fixed to a side portion of the fixed cover portion 115. The upper surface 120 of the support part 12 is formed on a plane coinciding with the moving direction of the movable base 100, and while the movable part 10 moves between the detachment position and the supply position, that is, within the stroke range of the movable part 10. The upper surface 120 slidably supports the lower end of the movable base 100. The support portion 12 is formed of a highly rigid material such as metal. When a sheet made of a material having a low coefficient of friction such as polytetrafluoroethylene (Teflon (registered trademark)) is laid or coated on the upper surface 120 of the support part 12, the sliding of the movable base part 100 becomes smoother. Since it is not necessary to use grease or the like on the upper surface 120 in order to ensure slidability, the cutting water is not adversely affected. As described above, the support unit 12 supports the movable base 100 within the range of the stroke of the movable unit 10, and thereby the support unit 12 slidably supports the movable unit 10. Even if the weight increases, the load is absorbed by the support portion 12, so the load applied to the cylinder portion 11 including the rod 110 is reduced, and the smooth drive of the movable portion 10 by the cylinder portion 11 is ensured.

  As shown in FIG. 4, the blade cover 1 shown in FIGS. 1 to 3 is mounted on a cutting means 3 constituting the cutting device 2 shown in FIG. 4, for example. In the cutting means 3, the housing 30 rotatably supports the spindle 31, and the blade cover 1 attached to the end of the housing 30 is cut by being attached to the tip of the spindle 31 by a cutting blade 32 and fastened by a nut 33. The blade 32 is covered and protected. The cutting apparatus 2 includes a holding unit 4 that holds a workpiece to be cut, and cuts the workpiece by relative movement between the holding unit 4 and the cutting unit 3. In the illustrated example, the holding means 4 is movable in the X-axis direction, the cutting means 3 is movable in the Y-axis direction and the Z-axis direction, and the position of the cutting blade 32 in the Y-axis direction is the cutting position. The holding means 4 which is positioned upward and holds the workpiece moves in the X-axis direction, and the cutting blade 32 is lowered while rotating, whereby a predetermined cutting position is cut.

  Examples of workpieces include wafers such as semiconductor wafers, adhesive members such as die attach films provided on the back side of wafers for chip mounting, semiconductor product packages, glass or silicon substrates, and micron-order processing accuracy Various processing materials and the like that are required. The cutting process includes complete cutting and grooving.

  While the workpiece held by the holding means 4 is being cut, the movable portion 10 of the blade cover 1 is located at the supply position as shown in FIG. 1, and cutting water is supplied from the nozzle 102 to the cutting blade 32. In this state, the work held by the holding means 4 can be cut.

  On the other hand, when it becomes necessary to replace the cutting blade 32 due to wear or chipping, the rod 110 is advanced by driving the cylinder portion 11 as shown in FIG. Position. Then, since the nozzle 102 is retracted from the front of the cutting blade 32 to the side, the cutting blade 32 can be removed and a new one can be mounted on the spindle 31 by removing the nut 33 in this state. Then, the nut 33 is fastened to the spindle 31 and the movable part 10 is returned to the supply position under the drive of the cylinder part 11 so that the workpiece can be cut.

It is a perspective view which shows an example of the blade cover and cutting blade in the state where a movable part exists in a supply position. It is a perspective view which shows an example of the blade cover of the state which has a movable part in a removal | desorption position. It is a perspective view showing an example of a blade cover in the state where a movable part is in a removal position and a movable cover part was removed. It is a perspective view which shows an example of the cutting device provided with the blade cover.

Explanation of symbols

1: Blade cover 10: Movable part 100: Movable base part 101: Movable cover part 102: Nozzle 103: Water inflow part 11: Cylinder part 110: Rod 111: First air introduction part 112: Second air introduction part 113: 1st adjustment part 114: 2nd adjustment part 115: Fixed cover part 116: Inflow part 117: Discharge part 118: Air ejection part 12: Support part 120: Upper surface 2: Cutting device 3: Cutting means 30: Housing 31: Spindle 32: Cutting blade 4: Holding means

Claims (1)

A holding means for holding the workpiece; a cutting means configured to detachably attach a cutting blade for cutting the workpiece held by the holding means to the spindle; and a nozzle for supplying cutting water to the cutting blade. A cutting device including a disposed blade cover,
The blade cover includes a movable part including the nozzle, a cylinder part having a rod that can advance and retreat, and driving the movable part by the advance and retreat of the rod, and a fixed cover part that is attached to the cylinder part and covers the cutting blade. A support portion fixed to a side portion of the fixed cover portion and supporting the movable portion,
Movable portion includes a movable base that is fixed to the distal end of the rod is constituted by a movable cover portion for covering said cutting blade is fixed to the movable base, the cylinder portion, the said cutting blade the movable portion It can be selectively positioned at a detachable position where it can be detached and a supply position where cutting water can be supplied from the nozzle to the cutting blade,
The support portion is fixed to the fixed cover portion, and supported from below the movable base portion slidably, a cutting machine, characterized in that to reduce the load on the cylinder unit.

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