JP5352775B2 - Package, Piezoelectric vibrator, Oscillator, Electronic equipment and Radio clock - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a package which can be securely vacuum-sealed, and a piezoelectric vibrator using the package. <P>SOLUTION: The package includes an airtight terminal having a lead terminal to which an electronic component is connected and a ring-shaped plug body 4 fixed to the intermediate portion of the lead terminal, and a cylindrical case with a bottom, which accommodates the electronic component. The opening of the case pressed in and fixed to the outer peripheral surface 43 of the plug body 4. At least a part of an inner peripheral edge 33 of an opening end 31 of the case is formed to cross a plane M orthogonal to the center axis C of the case 3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a package, a piezoelectric vibrator, an oscillator, an electronic device, and a radio timepiece.

  In recent years, a piezoelectric vibrator using a crystal or the like is used as a time source, a timing source of a control signal, a reference signal source, or the like in a mobile phone or a portable information terminal device. Various piezoelectric vibrators of this type are provided, and one of them is a piezoelectric vibrator having a cylinder type package formed in a cylindrical shape.

The piezoelectric vibrator of this package includes an airtight terminal, a tuning-fork type piezoelectric vibrating piece, and a bottomed cylindrical case that accommodates the piezoelectric vibrating piece inside.
The hermetic terminal includes a pair of lead terminals to which the piezoelectric vibrating piece is connected and a plug body fixed to an intermediate portion of the lead terminals. The plug body further includes a metal annular metal ring and a glass member that seals the inside of the metal ring. The piezoelectric vibrating piece is sealed inside the case by press-fitting and fixing the opening of the case to the outer peripheral surface of the plug body.

  Here, as described in Patent Document 1, electrical characteristics such as oscillation frequency characteristics and impedance characteristics of the piezoelectric vibrating piece are better when the space is in a vacuum state. Therefore, in order to vacuum seal the piezoelectric vibrating piece with the inside of the case in a vacuum state, the process of sealing the piezoelectric vibrating piece inside the case by press-fitting and fixing the opening of the case to the outer peripheral surface of the plug body is performed in a vacuum chamber ( In a vacuum chamber). Specifically, first, the opening of the case is placed on the metal ring of the plug body. Thereafter, evacuation is performed in a vacuum chamber, and the inside of the case is evacuated. Then, the opening of the case is fixed to the outer peripheral surface of the plug body by press-fitting, and the piezoelectric vibrating piece is sealed inside the vacuum case.

Japanese Patent Laid-Open No. 11-145757

  However, when evacuation is performed with the case opening placed on the metal ring of the plug body, the inner peripheral edge of the case opening and the outer peripheral edge of the metal ring of the plug main body are lined up over the entire circumference. May come into contact. In this case, when the inside of the vacuum chamber is evacuated, a sufficient passage for discharging the air inside the case to the outside of the case cannot be secured. As a result, there is a possibility that the piezoelectric vibrating piece is sealed inside the case while air remains in the case, and the piezoelectric vibrating piece cannot be vacuum sealed. As a result, the electrical characteristics such as the oscillation frequency characteristics and impedance characteristics of the piezoelectric vibrating piece deteriorate, and as a result, the performance of the piezoelectric vibrator deteriorates.

  Accordingly, an object of the present invention is to provide a package capable of reliably performing vacuum sealing and a piezoelectric vibrator using the package.

In order to solve the above-described problems, a package of the present invention includes an airtight terminal including a lead terminal to which an electronic component is connected, and an annular plug body fixed to an intermediate portion of the lead terminal; A package having a bottomed cylindrical case for housing a part, wherein the opening of the case is press-fitted and fixed to the outer peripheral surface of the plug body, and at least a part of the inner peripheral edge of the opening end surface of the case Is formed so as to intersect with a plane orthogonal to the central axis of the case.
According to the present invention, since the plug body is annular, the plane including the outer peripheral edge at the end face of the plug body is a plane orthogonal to the central axis of the plug body. On the other hand, at least a part of the inner peripheral edge of the opening end surface of the case is formed so as to intersect a plane orthogonal to the central axis of the case. Therefore, when the inner peripheral edge is placed in contact with the outer peripheral edge while the central axis of the case is aligned with the central axis of the plug body, the inner peripheral edge and the outer peripheral edge are all around. There is no line contact over. And since the gas passage which connects inside and outside of a case is formed in the said part, when the inside of a case is evacuated, the gas inside a case can be discharge | released outside the case through the said gas passage. Thereafter, the opening of the case is press-fitted and fixed to the outer peripheral surface of the plug body, and the gas passage is closed, so that the vacuum sealing can be reliably performed.

The opening end face of the case is an inclined plane that intersects with the central axis of the case at an angle other than a right angle.
According to the present invention, only the tip end portion of the inclined plane abuts on the outer peripheral edge of the plug main body, and the gas passage is formed in the other portion. This gas can be discharged outside the case. Moreover, since the opening end face is a flat surface, it can be easily formed by press working or machining.

The distance between the distal end portion and the proximal end portion of the opening end surface in the axial direction of the case is shorter than the press-fitting length into the plug body in the axial direction of the case.
According to the present invention, since the distance between the distal end portion and the proximal end portion of the opening end surface in the axial direction of the case is shorter than the press-fitting length into the plug body in the axial direction of the case, the case is press-fitted into the outer peripheral surface of the plug body. By just doing, the gas passage which connects the inside and outside of the case is closed. Thereby, vacuum sealing can be performed easily and reliably.

The piezoelectric vibrator of the present invention is characterized in that a piezoelectric vibrating piece is accommodated as the electronic component in the package.
According to the present invention, since the piezoelectric vibrating piece is accommodated in the case of the package that is surely vacuum-sealed, it is possible to provide a piezoelectric vibrator capable of obtaining good electrical characteristics.

The oscillator according to the present invention is characterized in that the above-described piezoelectric vibrator is electrically connected to an integrated circuit as an oscillator.
The electronic apparatus according to the present invention is characterized in that the above-described piezoelectric vibrator is electrically connected to a time measuring unit.
The radio-controlled timepiece of the present invention is characterized in that the above-described piezoelectric vibrator is electrically connected to a filter unit.

  According to the oscillator, the electronic device, and the radio timepiece according to the present invention, since the piezoelectric vibrator having good electrical characteristics can be obtained by reliably performing vacuum sealing, the performance of the product can be improved. Can do.

  According to the present invention, since the plug body is annular, the plane including the outer peripheral edge at the end face of the plug body is a plane orthogonal to the central axis of the plug body. On the other hand, at least a part of the inner peripheral edge of the opening end surface of the case is formed so as to intersect a plane orthogonal to the central axis of the case. Therefore, when the inner peripheral edge is placed in contact with the outer peripheral edge while the central axis of the case is aligned with the central axis of the plug body, the inner peripheral edge and the outer peripheral edge are all around. There is no line contact. Since the gas passage that communicates the inside and outside of the case is formed in the part, the gas inside the case can be discharged to the outside of the case through the gas passage when the inside of the case is evacuated. Then, vacuum sealing can be performed reliably by press-fitting and fixing the opening of the case to the outer peripheral surface of the plug body to close the gas passage.

It is a front view of the piezoelectric vibrating piece in the embodiment of the present invention. It is a rear view of the piezoelectric vibrating piece in the embodiment of the present invention. It is a front view of a package. It is a perspective view of an airtight terminal. It is explanatory drawing of the case in 1st Embodiment, Fig.5 (a) is a front view, FIG.5 (b) is a right view. It is sectional drawing in the AA of FIG. FIG. 7A is an explanatory diagram of a setting process, FIG. 7B is an explanatory diagram of a evacuation process, and FIG. 7C is an explanatory diagram of a case press-fitting process. FIG. It is explanatory drawing of the case in 2nd Embodiment, Fig.8 (a) is a front view, FIG.8 (b) is a front view of a modification. It is a block diagram which shows one Embodiment of the oscillator which concerns on this invention. It is a block diagram which shows one Embodiment of the electronic device which concerns on this invention. It is a block diagram which shows one Embodiment of the radio timepiece which concerns on this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment, piezoelectric vibrating piece)
First, an embodiment of a piezoelectric vibrating piece in the piezoelectric vibrator of the first embodiment will be described.
FIG. 1 is a front view of a piezoelectric vibrating piece according to an embodiment of the present invention.
FIG. 2 is a rear view of the piezoelectric vibrating piece according to the embodiment of the present invention.
In the piezoelectric vibrator of this embodiment, a piezoelectric vibrating piece 2 is accommodated as an electronic component inside a package.

As shown in FIGS. 1 and 2, the piezoelectric vibrating piece 2 is a tuning fork type vibrating piece formed of a piezoelectric material such as quartz crystal, lithium tantalate or lithium niobate, and when a predetermined voltage is applied. It vibrates.
The piezoelectric vibrating piece 2 includes a pair of vibrating arm portions 10 and 11 arranged in parallel, a base portion 12 that integrally fixes the proximal end sides of the vibrating arm portions 10 and 11, and an outer side of the vibrating arm portions 10 and 11. An excitation electrode 15 formed of a first excitation electrode 13 and a second excitation electrode 14 which is formed on the surface and vibrates the vibrating arm portions 10 and 11, and the first excitation electrode 13 and the second excitation electrode 14 It has the mount electrodes 17 and 18 electrically connected.

In addition, the piezoelectric vibrating piece 2 of the present embodiment includes groove portions 20 formed along the longitudinal direction X of the vibrating arm portions 10 and 11 on both main surfaces of the vibrating arm portions 10 and 11. The groove portion 20 is formed from the proximal end side of the vibrating arm portions 10 and 11 to the vicinity of the middle.
The excitation electrode 15 including the first excitation electrode 13 and the second excitation electrode 14 is an electrode that vibrates the vibrating arm portions 10 and 11 at a predetermined resonance frequency in a direction approaching or separating from each other. 11 are patterned and formed on the outer surface of each of the outer surfaces. Specifically, the first excitation electrode 13 is mainly formed on the groove portion 20 of one vibration arm portion 10 and on both side surfaces of the other vibration arm portion 11, and the second excitation electrode 14 is It is mainly formed on both side surfaces of one vibrating arm portion 10 and on the groove portion 20 of the other vibrating arm portion 11.

  As shown in FIGS. 1 and 2, the first excitation electrode 13 and the second excitation electrode 14 are electrically connected to the mount electrodes 17 and 18 via the extraction electrodes 21 and 22, respectively, on both main surfaces of the base portion 12. Connected. A voltage is applied to the piezoelectric vibrating piece 2 via the mount electrodes 17 and 18.

  The excitation electrode 15, the mount electrodes 17 and 18, and the extraction electrodes 21 and 22 described above are, for example, conductive films (electrode films) such as chromium (Cr), nickel (Ni), aluminum (Al), and titanium (Ti). ).

  Further, a weight metal film 23 for adjusting (frequency adjustment) so as to vibrate its own vibration state within a predetermined frequency range is formed at the tips of the pair of vibrating arm portions 10 and 11. The weight metal film 23 is divided into a coarse adjustment film 23a used when the frequency is roughly adjusted and a fine adjustment film 23b used when the frequency is finely adjusted. By adjusting the frequency using the coarse adjustment film 23a and the fine adjustment film 23b, the frequencies of the vibrating arm portions 10 and 11 can be kept within the range of the nominal frequency of the device.

(Package whose opening end face is inclined plane)
Next, an embodiment of the package of the present invention will be described. In the following description, in the direction along the center axis C of the case, the open end side of the bottomed cylindrical case is defined as the −Z side, and the closed end side is defined as the + Z side.

FIG. 3 is a front view of the package.
As shown in FIG. 3, the package 1 of the present embodiment includes lead terminals 45 and 45 to which the electronic component 2 is connected, and an annular plug body 4 that is fixed to an intermediate portion of the lead terminals 45 and 45. A package 1 including a hermetic terminal 5 provided and a bottomed cylindrical case 3 that accommodates an electronic component 2, and an opening of the case 3 is press-fitted and fixed to the outer peripheral surface 43 of the plug body 4. At least a part of the inner peripheral edge 33 of the three open end faces 31 is formed so as to intersect a plane orthogonal to the central axis C of the case 3.

FIG. 4 is a perspective view of the hermetic terminal.
The package of the present embodiment includes an airtight terminal 5, and as shown in FIG. 4, the airtight terminal 5 is an intermediate between the lead terminals 45 and 45 to which electronic components (not shown) are connected and the lead terminals 45 and 45. And a plug body 4 fixed to the portion.

  The lead terminals 45, 45 are columnar members made of metal such as Kovar (FeNiCo alloy), and are arranged in parallel so as to penetrate a plug body 4 described later in a state of being spaced apart by a predetermined distance. The diameter of the lead terminals 45, 45 is, for example, about 0.12 mm. A plating film is formed on the surfaces of the lead terminals 45 and 45. As the plating material, copper (Cu) plating or the like is used for the base film, and high-melting-point solder plating with a melting point of, for example, about 300 ° C. (tin / lead alloy, the weight ratio is 1: 9) is used for the finish film. Used. For example, Cu plating as a base film is formed with a film thickness of about 2 μm to 5 μm. Subsequently, a high melting point solder plating as a finish film is formed with a film thickness of about 8 μm to 15 μm.

  The lead terminals 45, 45 are inner leads 45a, 45a to which electronic components are connected on the + Z side with the plug body 4 interposed therebetween, and outer leads 45b, 45b electrically connected to the outside on the −Z side. It has become.

  As shown in FIG. 4, the plug body 4 includes a metal ring 41 that seals the case, and an insulating material 47 that fills the inside of the metal ring 41 and fixes the plug body 4 to an intermediate portion of the lead terminal 45. Yes.

  The metal ring 41 is formed by forming a metal material such as an iron-nickel alloy into an annular shape, and is formed by pressing or the like. Further, a plating film is formed on the outer peripheral surface of the metal ring 41, and a plating film of the same material as the plating film formed on the lead terminals 45, 45 is formed with substantially the same film thickness. ing.

  The insulating material 47 is made of, for example, borosilicate glass, and the metal ring 41 is fixed to the lead terminals 45 and 45 by filling the inside of the annular metal ring 41. Specifically, the insulating material 47 sintered in a ring shape in advance is set inside the metal ring 41, and the two lead terminals 45, 45 are set at a predetermined interval so as to penetrate the insulating material 47. To do. Then, it puts in a heating furnace and performs baking by the temperature atmosphere of about 1000 degreeC. Thereby, between the insulating material 47 and the lead terminals 45 and 45, and between the insulating material 47 and the metal ring 41 are completely sealed, and vacuum sealing can be ensured.

Returning to FIG. 3, the package 1 of the present embodiment includes a bottomed cylindrical case 3 that accommodates the electronic component 2.
The case 3 is formed into a bottomed cylindrical shape by deep drawing a white flat plate member made of an alloy such as copper, nickel, or zinc. As described above, the inner peripheral surface 37 of the case 3 is fixed to the outer peripheral surface 43 of the plug body 4 by press-fitting with the electronic component 2 housed in the case 3. In addition, when forming the length of the case 3 in the direction of the axis C, the inner diameter, or the like to be larger than the limit drawing of the flat plate member, it is desirable to perform deep drawing in a plurality of times in order to prevent cracks.

FIG. 5 is an explanatory view of the case in the first embodiment, FIG. 5 (a) is a front view, and FIG. 5 (b) is a right side view.
As shown in FIG. 5, at least a part of the inner peripheral edge portion 33 on the opening end surface 31 of the case 3 is formed so as to intersect with a plane M orthogonal to the central axis C of the case 3. In the present embodiment, the opening end surface 31 of the case 3 is an inclined plane K that intersects with the central axis C of the case 3 at an angle other than a right angle. In other words, in the present embodiment, almost the entire inner peripheral edge 33 of the opening end surface 31 of the case 3 is formed so as to intersect the plane M perpendicular to the central axis C of the case 3.

  The inclined plane K of the opening end face 31 is formed by forming the outer shape of the case 3 by deep drawing and then performing press working or machining. By forming the inclined plane, only the tip end portion of the inclined plane abuts on the outer peripheral edge 44 of the plug body 4, and a gas passage is formed in the other part. As a result, as shown in FIG. 5B, when the case 3 is placed on the + Z side of the plug body 4 before the case 3 is fixed to the plug body 4, the gas passage that communicates the inside and outside of the case 3. G is formed.

  Although details will be described in a case press-fitting step in the package manufacturing method described later, the distance H between the distal end portion 31a and the proximal end portion 31b of the opening end surface 31 in the axis C direction of the case 3 depends on the axis C of the case 3. It is set to be shorter than the press-fitting length L to the plug body 4 in the direction. Thereby, vacuum sealing can be performed simply and reliably by simply press-fitting the opening of the case 3 into the outer peripheral surface 43 of the plug body 4.

(Piezoelectric vibrator)
6 is a cross-sectional view taken along line AA in FIG.
As shown in FIG. 6, the piezoelectric vibrating reed 2 is housed inside the package 1 as an electronic component, and the piezoelectric vibrating reed 2 is connected to the tips of the inner leads 45a and 45a, whereby the piezoelectric vibrator 1 is formed. Yes. Specifically, the inner leads 45a and 45a protruding from the plug body 4 to the + Z side and the mount electrodes 17 and 18 of the piezoelectric vibrating piece 2 are mounted via solder E or the like. That is, the inner leads 45a and 45a and the mount electrodes 17 and 18 are mechanically joined via the solder E or the like, and at the same time, the inner leads 45a and 45a and the mount electrodes 17 and 18 are electrically connected. Yes.

  When the piezoelectric vibrator 1 configured as described above is operated, a predetermined drive voltage is applied to the outer leads 45b and 45b of the two lead terminals 45 and 45. Thus, a voltage is applied to the excitation electrode 15 including the first excitation electrode 13 and the second excitation electrode 14 through the inner leads 45a and 45a, the solder E, the mount electrodes 17 and 18 and the extraction electrodes 21 and 22. The pair of vibrating arm portions 10 and 11 can be vibrated at a predetermined frequency in a direction in which the pair of vibrating arm portions 10 and 11 approaches and separates. The vibration of the pair of vibrating arm portions 10 and 11 can be used as a time source, a control signal timing source, a reference signal source, and the like.

(Package manufacturing method, vacuum sealing process)
Next, a vacuum sealing process in the package manufacturing method of the present embodiment will be described.
7 is an explanatory diagram of the vacuum sealing process, FIG. 7A is an explanatory diagram of the setting process, FIG. 7B is an explanatory diagram of the vacuuming process, and FIG. 7C is a case press-fitting. It is explanatory drawing of a process.
The package vacuum sealing process of the present embodiment includes a setting process S1 in which the plug body 4 is placed on a jig and the case 3 is placed on the plug body 4, a vacuuming process S2 in which vacuuming is performed, and a case 3 A case press-fitting step S3 for press-fitting the plug main body 4. The setting step S1 is performed outside a vacuum chamber (not shown), and the evacuation step S2 and the case press-fitting step S3 are performed in the vacuum chamber.

  The jig used for the vacuum sealing process is composed of an upper jig 60 that supports the case 3, a lower jig 62 that supports the plug body 4, and a press-fitting jig 64 that is pressed to press-fit the case 3. Has been. The upper jig 60 and the lower jig 62 have irregularities (not shown) so that the case 3 can be placed on the + Z side of the plug body 4 while keeping the center axis C of the case 3 along the center axis of the plug body 4. They are positioned in the horizontal direction by fitting or the like. The upper jig 60, the lower jig 62, and the press-fitting jig 64 are formed so that a plurality of packages can be arranged in a lattice shape, and the plurality of packages can be vacuum-sealed simultaneously.

  First, as shown in FIG. 7A, a setting step S1 for setting the plug body 4 and the case 3 on a jig is performed. Specifically, first, the plug body 4 is arranged on the lower jig 62 with the outer lead directed to the −Z side. Thereafter, the case 3 is inserted into the insertion hole 60 a of the upper jig 60 with the opening end surface 31 of the case 3 facing −Z. As a result, the opening end face 31 of the case 3 can be placed on the + Z side of the plug body 4 with the center axis C of the case 3 aligned with the center axis of the plug body 4. 5B, the opening end surface 31 of the case 3 is an inclined plane K that intersects with the central axis C of the case 3 at an angle other than a right angle. There is no contact with the portion 44 over the entire circumference, and only the tip of the inclined plane K contacts the outer peripheral edge 44 of the plug body 4. Thus, a gas passage G that communicates the inside and outside of the case 3 can be formed between the other part of the inclined plane K and the plug body 4.

  Next, as shown in FIG. 7B, a vacuuming step S <b> 2 is performed in which vacuuming is performed to remove the gas inside the case 3. As shown in FIGS. 5B and 7B, with the case 3 placed on the + Z side of the plug body 4, only the tip of the inclined plane K abuts on the outer peripheral edge of the plug body, Gas passages G are formed in other portions. Then, by evacuating the vacuum chamber, the gas inside the case 3 can be released to the outside of the case 3 through the gas passage G. In addition, before vacuum-sealing, it is desirable to sufficiently heat each member such as the case and the plug body 4 so that surface adsorbed moisture and the like are desorbed from each member.

  Finally, as shown in FIG. 7C, a case press-fitting step S3 for press-fitting the case 3 into the plug body 4 is performed. Specifically, the press-fitting jig 64 is used to press-fit the opening of the case 3 into the outer peripheral surface 43 of the plug body 4 while applying a predetermined load to the case 3 in the −Z direction. In the setting step S1, since the case 3 is arranged with the central axis C of the case 3 along the central axis of the plug body, the case 3 can be prevented from being press-fitted in a tilted state.

  Here, as shown in FIG. 5B, the distance H between the distal end portion 31 a and the proximal end portion 31 b of the opening end surface 31 is set to be shorter than the press-fit length L. As a result, when the case 3 is press-fitted, the gas passage G formed between the inclined plane K and the plane M perpendicular to the central axis of the case 3 is blocked as shown by a two-dot chain line in FIG. As a result, the inner peripheral surface 37 of the case 3 and the outer peripheral surface 43 of the plug body 4 abut on the entire periphery. In this way, the gas passage G communicating with the inside and outside of the case 3 before press-fitting the case 3 can be closed by simply press-fitting the opening of the case 3 into the outer peripheral surface 43 of the plug body 4. Sealing can be performed easily and reliably. Since the plating layer made of the base film and the finish film formed on the outer peripheral surface 43 of the plug body 4 has a soft and easy-to-deform characteristic, the outer peripheral surface 43 of the plug body 4 with the plating layer interposed. By press-fitting the opening of the case 3 into the case, vacuum sealing can be ensured.

  According to the present embodiment, as shown in FIG. 5, since the plug body 4 is annular, the plane M including the outer peripheral edge 44 on the end face of the plug body 4 is orthogonal to the central axis C of the plug body 4. It becomes the plane M. On the other hand, at least a part of the inner peripheral edge 33 on the opening end surface 31 of the case 3 is formed so as to intersect a plane M orthogonal to the central axis C of the case 3. Therefore, when the inner peripheral edge 33 is placed in contact with the outer peripheral edge 44 while the central axis C of the case 3 is set along the central axis of the plug body 4, the inner peripheral edge 33 and the outer peripheral edge 44 are Does not make line contact over the entire circumference. And since the gas passage G which connects the inside and outside of the case 3 is formed in the part, when the inside of the case 3 is evacuated, the gas inside the case 3 can be released to the outside of the case 3 through the gas passage G. it can. Thereafter, the opening of the case 3 is press-fitted and fixed to the outer peripheral surface 43 of the plug body 4 to close the gas passage G, whereby the vacuum sealing can be reliably performed.

  Further, according to the present embodiment, as shown in FIG. 5, only the distal end portion of the inclined plane K abuts on the outer peripheral edge portion 44 of the plug body 4 and the gas passage G is formed in the other portion. When evacuating the inside of the case 3, the gas inside the case 3 can be discharged to the outside of the case 3 through the gas passage G. Moreover, since the opening end surface 31 is a flat surface, it can be easily formed by machining.

(Second embodiment, a package whose opening end face has a substantially wave shape)
FIG. 8 is an explanatory diagram of a case in the second embodiment, and FIG. 8A is a front view.
Although the inclined plane K is formed on the opening end surface 31 of the case 3 of the first embodiment shown in FIG. 5, the opening end surface 31 of the case 3 of the second embodiment shown in FIG. It is different from the first embodiment in that it is formed in a mold shape. Detailed description of the same configuration as in the first embodiment will be omitted.

In order to form the gas passage, it is only necessary that at least a part of the inner peripheral edge portion 33 of the case 3 intersects the plane M perpendicular to the central axis C of the case 3. Therefore, as shown in FIG. 8A, the gas passage G can be formed by forming the opening end face 31 in a substantially wave shape when viewed from the radial direction of the case 3. Specifically, a portion 33a of the inner peripheral edge 33 of the substantially wave-shaped opening end surface 31 intersects a plane M perpendicular to the central axis C of the case 3 so that the gas passage G is formed in the portion. Is formed. The opening end surface 31 is formed by machining after forming the outer shape of the case 3 by deep drawing.
Further, the distance H between the bottom 31a and the top 31b of the substantially wave shape in the axis C direction of the case 3 is set to be lower than the press-fitting length L to the plug body 4 in the axis C direction of the case 3. Thus, as in the first embodiment, vacuum sealing can be performed simply and reliably by simply press-fitting the opening of the case 3 into the outer peripheral surface of the plug body 4.

(Package manufacturing method, vacuum sealing process)
Next, the vacuum sealing process in the manufacturing method of the package of 2nd Embodiment is demonstrated.
In the vacuum sealing process in the manufacturing method of the package of the first embodiment, the gas passage is formed by the inclined plane K that intersects with the central axis C of the case 3 at an angle other than the right angle, but the package of the second embodiment The vacuum sealing process in this manufacturing method is different from the first embodiment in that the gas passage is formed by forming the opening end face 31 in a substantially wave shape. In addition, detailed description is abbreviate | omitted about the part of the structure similar to the vacuum sealing process in the manufacturing method of the package of 1st Embodiment.

In the evacuation step of the vacuum sealing step of the present embodiment, as shown in FIG. 8A, a part 33 a of the inner peripheral edge portion 33 in the opening end surface 31 having a substantially wave shape as viewed from the radial direction of the case 3. However, the gas passage G is formed by intersecting the plane M perpendicular to the central axis C of the case 3. Then, by evacuating the case 3 with the case 3 placed on the + Z side of the plug body, the gas inside the case 3 can be released to the outside of the case 3 through the gas passage G.
In the case press-fitting step of the vacuum sealing step of the present embodiment, as described above, the distance H between the substantially wave-shaped bottom portion 31a and the top portion 31b is the press-fitting length into the plug body 4 in the axis C direction of the case 3. It is set lower than the length L. Thereby, the gas passage G is closed only by press-fitting the case 3, and the inner peripheral surface of the case 3 and the outer peripheral surface of the plug main body can be brought into contact over the entire periphery.

(Modification of the second embodiment, a package in which the opening end face has a substantially triangular shape)
As a modified example of the second embodiment, a package whose opening end surface is substantially triangular will be described with reference to the drawings.
FIG. 8B is a front view of a case in a modification of the second embodiment.
The opening end surface 31 of the case 3 of the second embodiment shown in FIG. 8A is formed in a substantially wave shape, but in the modification shown in FIG. 8B, the opening end surface 31 of the case 3 is substantially It is different in that it is formed in a triangular shape.

In order to form the gas passage, it is only necessary that at least a part of the inner peripheral edge portion 33 of the case 3 intersects the plane M perpendicular to the central axis C of the case 3. Therefore, as shown in FIG. 8B, the opening end face 31 may be formed in a substantially triangular shape when viewed from the radial direction of the case 3. In the present modification, a gas passage G is formed by a portion 33 a of the inner peripheral edge portion 33 of the substantially triangular opening end surface 31 intersecting a plane M orthogonal to the central axis C of the case 3. As described above, also in this modification, the opening end face 31 is formed by machining after forming the outer shape of the case 3 by deep drawing.
Further, the distance H between the substantially triangular bottom 31a and the top 31b in the axis C direction of the case 3 is set to be lower than the press-fitting length L to the plug body 4 in the axis C direction of the case 3. Thereby, vacuum sealing can be performed easily and reliably only by press-fitting the opening of the case 3 into the outer peripheral surface of the plug body.

  According to the second embodiment and the modification of the second embodiment, there are the same effects as in the first embodiment. That is, the gas inside the case can be discharged to the outside of the case through the gas passage, and vacuum sealing can be performed reliably.

  Here, when the opening end surface 31 has a substantially wave shape or a substantially triangular shape as viewed from the radial direction of the case 3, the opening end surface 31 has an uneven surface shape. For this reason, machining to form the opening end face 31 is difficult. On the other hand, as shown in FIG. 6, when the opening end surface 31 is an inclined plane, the opening end surface 31 has a planar shape. For this reason, the machining which forms the opening end surface 31 is easy. Therefore, by setting the opening end surface 31 to be an inclined plane, it is possible to ensure superiority in processing accuracy and cost as compared to the case where the opening end surface 31 has an uneven surface shape as shown in FIG.

(Oscillator)
Next, an embodiment of an oscillator according to the present invention will be described with reference to FIG.
As shown in FIG. 9, the oscillator 110 according to the present embodiment is configured by configuring the package (piezoelectric vibrator) 1 as an oscillator electrically connected to the integrated circuit 111. The oscillator 110 includes a substrate 113 on which an electronic element component 112 such as a capacitor is mounted. An integrated circuit 111 for an oscillator is mounted on the substrate 113, and the piezoelectric vibrating piece 2 of the piezoelectric vibrator 1 is mounted in the vicinity of the integrated circuit 111. The electronic element component 112, the integrated circuit 111, and the piezoelectric vibrator 1 are electrically connected by a wiring pattern (not shown). Each component is molded with a resin (not shown).

In the oscillator 110 configured as described above, when a voltage is applied to the piezoelectric vibrator 1, the piezoelectric vibrating piece 2 in the piezoelectric vibrator 1 vibrates. This vibration is converted into an electric signal by the piezoelectric characteristics of the piezoelectric vibrating piece 2 and input to the integrated circuit 111 as an electric signal. The input electrical signal is subjected to various processes by the integrated circuit 111 and output as a frequency signal. Thereby, the piezoelectric vibrator 1 functions as an oscillator.
In addition, by selectively setting the configuration of the integrated circuit 111, for example, an RTC (real-time clock) module or the like as required, the operation date and time of the device or external device in addition to a single-function oscillator for a clock, etc. A function for controlling the time, providing a time, a calendar, and the like can be added.

  According to the oscillator 110 of the present embodiment as described above, since the piezoelectric vibrator capable of obtaining good electrical characteristics by reliably performing vacuum sealing is provided, a high-performance oscillator can be provided. .

(Electronics)
Next, an embodiment of an electronic apparatus according to the invention will be described with reference to FIG. Note that a portable information device 120 having the above-described piezoelectric vibrator 1 will be described as an example of the electronic device.
First, the portable information device 120 of this embodiment is represented by, for example, a mobile phone, and is a development and improvement of a wrist watch in the prior art. The appearance is similar to that of a wristwatch, and a liquid crystal display is arranged in a portion corresponding to a dial so that the current time and the like can be displayed on this screen. Further, when used as a communication device, it is possible to perform communication similar to that of a conventional mobile phone by using a speaker and a microphone that are removed from the wrist and incorporated in the inner portion of the band. However, it is much smaller and lighter than conventional mobile phones.

  Next, the configuration of the portable information device 120 of this embodiment will be described. As shown in FIG. 10, the portable information device 120 includes the piezoelectric vibrator 1 and a power supply unit 121 for supplying power. The power supply unit 121 is made of, for example, a lithium secondary battery. The power supply unit 121 includes a control unit 122 that performs various controls, a clock unit 123 that counts time, a communication unit 124 that communicates with the outside, a display unit 125 that displays various information, and the like. A voltage detection unit 126 that detects the voltage of the functional unit is connected in parallel. Power is supplied to each functional unit by the power supply unit 121.

  The control unit 122 controls each function unit to control operation of the entire system such as transmission and reception of audio data, measurement and display of the current time, and the like. The control unit 122 includes a ROM in which a program is written in advance, a CPU that reads and executes the program written in the ROM, and a RAM that is used as a work area for the CPU.

  The timer unit 123 includes an integrated circuit including an oscillation circuit, a register circuit, a counter circuit, an interface circuit, and the like, and the piezoelectric vibrator 1. When a voltage is applied to the piezoelectric vibrator 1, the piezoelectric vibrating piece 2 vibrates, and the vibration is converted into an electric signal by the piezoelectric characteristics of the crystal and input to the oscillation circuit as an electric signal. The output of the oscillation circuit is binarized and counted by a register circuit and a counter circuit. Then, signals are transmitted to and received from the control unit 122 through the interface circuit, and the current time, current date, calendar information, and the like are displayed on the display unit 125.

The communication unit 124 has functions similar to those of a conventional mobile phone, and includes a radio unit 127, a voice processing unit 128, a switching unit 129, an amplification unit 130, a voice input / output unit 131, a telephone number input unit 132, a ring tone generation unit. 133 and a call control memory unit 134.
The radio unit 127 exchanges various data such as audio data with the base station via the antenna 135. The audio processing unit 128 encodes and decodes the audio signal input from the radio unit 127 or the amplification unit 130. The amplifying unit 130 amplifies the signal input from the audio processing unit 128 or the audio input / output unit 131 to a predetermined level. The voice input / output unit 131 includes a speaker, a microphone, and the like, and amplifies a ringtone and a received voice or collects a voice.

In addition, the ring tone generator 133 generates a ring tone in response to a call from the base station. The switching unit 129 switches the amplifying unit 130 connected to the voice processing unit 128 to the ringing tone generating unit 133 only when an incoming call is received, so that the ringing tone generated by the ringing tone generating unit 133 passes through the amplifying unit 130. To the audio input / output unit 131.
Note that the call control memory unit 134 stores a program related to incoming / outgoing call control of communication. The telephone number input unit 132 includes, for example, number keys from 0 to 9 and other keys. By pressing these number keys and the like, a telephone number of a call destination is input.

  The voltage detection unit 126 detects the voltage drop and notifies the control unit 122 when the voltage applied to each functional unit such as the control unit 122 by the power supply unit 121 falls below a predetermined value. . The predetermined voltage value at this time is a value set in advance as a minimum voltage necessary to stably operate the communication unit 124, and is, for example, about 3V. Upon receiving the voltage drop notification from the voltage detection unit 126, the control unit 122 prohibits the operations of the radio unit 127, the voice processing unit 128, the switching unit 129, and the ring tone generation unit 133. In particular, it is essential to stop the operation of the wireless unit 127 with high power consumption. Further, the display unit 125 displays that the communication unit 124 has become unusable due to insufficient battery power.

That is, the operation of the communication unit 124 can be prohibited by the voltage detection unit 126 and the control unit 122, and that effect can be displayed on the display unit 125. This display may be a text message, but as a more intuitive display, a x (X) mark may be attached to the telephone icon displayed at the top of the display surface of the display unit 125.
In addition, the function of the communication part 124 can be stopped more reliably by providing the power supply cutoff part 136 that can selectively cut off the power of the part related to the function of the communication part 124.

  According to the portable information device 120 of this embodiment, as described above, since the piezoelectric vibrator capable of obtaining good electrical characteristics by reliably performing vacuum sealing is provided, a high-performance portable information device. Can be provided.

(Radio watch)
Next, an embodiment of a radio timepiece according to the present invention will be described with reference to FIG.
As shown in FIG. 11, the radio-controlled timepiece 140 according to the present embodiment includes the piezoelectric vibrator 1 electrically connected to the filter unit 141. The radio-controlled timepiece 140 receives a standard radio wave including timepiece information and is accurate. It is a clock with a function of automatically correcting and displaying the correct time.
In Japan, there are transmitting stations (transmitting stations) that transmit standard radio waves in Fukushima Prefecture (40 kHz) and Saga Prefecture (60 kHz), each transmitting standard radio waves. Long waves such as 40 kHz or 60 kHz have the property of propagating the surface of the earth and the property of propagating while reflecting the ionosphere and the surface of the earth. doing.

Hereinafter, the functional configuration of the radio timepiece 140 will be described in detail.
The antenna 142 receives a long standard wave of 40 kHz or 60 kHz. The long-wave standard radio wave is obtained by subjecting time information called a time code to AM modulation on a 40 kHz or 60 kHz carrier wave. The received long standard wave is amplified by the amplifier 143 and filtered and tuned by the filter unit 141 having the plurality of piezoelectric vibrators 1.
The piezoelectric vibrator 1 according to this embodiment includes crystal vibrator portions 148 and 149 having resonance frequencies of 40 kHz and 60 kHz that are the same as the carrier frequency.

Further, the filtered signal having a predetermined frequency is detected and demodulated by the detection and rectification circuit 144.
Subsequently, the time code is taken out via the waveform shaping circuit 145 and counted by the CPU 146. The CPU 146 reads information such as the current year, accumulated date, day of the week, and time. The read information is reflected in the RTC 148, and accurate time information is displayed.
Since the carrier wave is 40 kHz or 60 kHz, the crystal vibrator portions 148 and 149 are preferably vibrators having the tuning fork type structure described above.

  In addition, although the above-mentioned description was shown in the example in Japan, the frequency of the long standard wave is different overseas. For example, in Germany, a standard radio wave of 77.5 KHz is used. Therefore, when the radio timepiece 140 that can be used overseas is incorporated in a portable device, the piezoelectric vibrator 1 having a frequency different from that in Japan is required.

  According to the radio-controlled timepiece 140 of the present embodiment, as described above, the high-performance radio-controlled timepiece is provided because it includes the piezoelectric vibrator that can obtain good electrical characteristics by reliably performing vacuum sealing. can do.

The present invention is not limited to the embodiment described above.
In the package of the first embodiment, the opening end surface of the case is an inclined plane that intersects the central axis of the case at an angle other than a right angle, so that the inner peripheral edge of the case and the outer peripheral edge of the plug body are in contact with each other. In this state, a gas passage communicating between the inside and outside of the case is formed. However, for example, a through hole that communicates the inside and outside of the case may be formed at a position shorter than the press-fitting length from the opening end surface of the case peripheral surface. As a result, a gas passage communicating between the inside and the outside of the case is formed, and the gas inside the case can be discharged to the outside of the case, so that vacuum sealing can be performed easily and reliably. However, since the diameter of the case is about several mm, it is difficult to process as compared with the present embodiment. Therefore, this embodiment is superior in terms of ease of processing.

DESCRIPTION OF SYMBOLS 1 ... Package (piezoelectric vibrator) 2 ... Electronic component (piezoelectric vibrating piece) 3 ... Case 4 ... Plug main body 5 ... Airtight terminal 31 ... Open end face of case 33 ... Inner peripheral edge 43 ... Outer peripheral surface of plug body 45 ... Lead terminal 110 ... Oscillator 120 ... Portable information device (electronic device) 140 ... Radio clock C ... Case shaft (case Center axis) H ... Distance L ... Press fit length

Claims (6)

An airtight terminal comprising: a lead terminal to which an electronic component is connected; and an annular plug body fixed to an intermediate portion of the lead terminal;
A bottomed cylindrical case that houses the electronic component;
With
A package in which the opening of the case is press-fitted and fixed to the outer peripheral surface of the plug body,
At least a part of the inner peripheral edge of the opening end surface of the case is formed so as to intersect a plane orthogonal to the central axis of the case, and the opening end surface of the case is perpendicular to the central axis of the case A package characterized by being inclined planes that intersect at an angle other than . Distance between the tip end and a proximal end of said open end face in the axial direction of the case, the package of claim 1, wherein the shorter than the press-fitting length to the plug body in the axial direction of the case. Inside the package according to claim 1 or 2, the piezoelectric vibrator, wherein a piezoelectric vibrating reed is accommodated as the electronic component. An oscillator comprising the piezoelectric vibrator according to claim 3 electrically connected to an integrated circuit as an oscillator. An electronic apparatus, wherein the piezoelectric vibrator according to claim 3 is electrically connected to a time measuring unit. A radio-controlled timepiece, wherein the piezoelectric vibrator according to claim 3 is electrically connected to a filter portion.

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