JP5375232B2 - X-ray irradiation apparatus and safety mechanism thereof - Google Patents

Description

  The present invention relates to an X-ray irradiation apparatus such as an X-ray fluorescence analyzer and an X-ray diffractometer and a safety mechanism thereof, and more particularly to self-diagnosis of components and circuits constituting the safety mechanism.

In the X-ray irradiation apparatus, in order to prevent X-ray leakage that causes X-ray exposure of the user, a safety mechanism is required to prevent X-ray irradiation while the lid of the X-ray irradiation area is open. In order to protect the user in the event of a failure, such a safety mechanism
(A) ensuring safety in the event of a single failure;
(B) detecting a failure location at the stage of a single failure occurrence and stopping the system before the occurrence of the next failure;
The requirements of are desired. The requirement (a) can be realized by making a sensor, a circuit, etc. provided for safety double, and even if one fails, the safety can be secured by the other. The requirement of (b) is that the sensor wiring is stopped so that the X-ray irradiation apparatus stops when the failure occurs, or the failure diagnosis is performed by a microcomputer or the like, and the X-ray irradiation is stopped when a failure is detected. Or it is realizable by the method of stopping the whole X-ray irradiation apparatus and prohibiting X-ray irradiation operation.

Therefore, as shown in FIG. 5, in the conventional X-ray irradiation apparatus, when the lid 12 of the sample chamber 11 is opened, the interlock mechanism 37 provided as a part of the safety mechanism 3 is operated, and the X-ray Φ ₁ Is prohibited. On the other hand, in the control microcomputer 21 that controls the opening / closing operation of the X-ray tube power supply 16 and the lid 12, the lid sensor 34 monitors the opening and closing of the lid 12. If the lid sensor 34 that is a component of the safety mechanism 3 fails, the diagnostic software 351 detects an abnormality and stops the power supply to the X-ray tube power supply 16.

  When performing self-diagnosis of each component and circuit constituting the safety mechanism 3, the lid 12 is opened and closed by the control software 211 of the control microcomputer 21, and the diagnosis software 351 determines the state of the lid sensor 34 and the interlock mechanism 37. You can confirm that changes correctly.

However, in the configuration shown in FIG.
(B) The control software 211 destroys the memory area of the diagnostic software 351, thereby reaching an incorrect diagnostic result;
(B) The diagnostic software 351 is not executed due to the runaway control software 211.
There is a risk that such troubles occur. In particular, when the control software is linked with a personal computer, the number of states as a system becomes very large, and it is extremely difficult to prove by a test that the problems (a) and (b) do not occur.

Therefore, as shown in FIG. 6, the inventor divides the self-diagnosis function of each component and circuit of the safety mechanism 3 into a diagnosis microcomputer 35, which is a microcomputer different from the control microcomputer 21, and causes interference from the control mechanism 2. A method for avoiding the inhibition of the operation of the diagnostic software 351 was examined. When performing the self-diagnosis operation with the structure shown in FIG. 6, the control microcomputer 21 opens and closes the lid 12, and configures a signal indicating the state from the lid sensor 34 in each of the open state and the closed state, and a safety mechanism. The diagnosis microcomputer 35 performs diagnosis on signals indicating the state of each component or circuit to be performed. If some trouble is detected, it means that there is an abnormality in any component or circuit of the safety mechanism 3, by diagnosing the microcomputer 35 notifies the control microcomputer 21 on stopping irradiation of X-ray [Phi _1, The operation of the entire system of the X-ray irradiation apparatus is stopped.

However, even in the configuration of FIG.
(I) If there is a malfunction in the function of the control microcomputer 21 that transmits the current state of the lid 12 to the diagnosis microcomputer 35, the self-diagnosis cannot be performed correctly;
(Ii) If the communication between the control microcomputer 21 and the diagnosis microcomputer 35 is defective, the self-diagnosis cannot be performed correctly;
(Iii) If the interlock mechanism 37 has a problem, a self-diagnosis process “when the lid 12 is open, the power supply to the X-ray tube power supply 16 is stopped by the interlock mechanism 37” is performed. There is a risk of X-ray leakage without stopping the power supply.
It has been found.

  In view of such circumstances, the present invention provides a highly reliable X-ray irradiation apparatus and its safety mechanism that does not hinder the self-diagnosis operation of each component or circuit of the safety mechanism even when a malfunction occurs in the control mechanism or the like. The purpose is to provide.

  In order to achieve the above object, a first aspect of the present invention includes an X-ray tube power source for supplying power to an X-ray tube, an X-ray irradiation mechanism having a sample chamber for storing an X-ray irradiation target, A control mechanism that controls the operation of the X-ray irradiation mechanism, a lid sensor that detects the opening and closing of the lid of the sample chamber, and an interlock that prohibits or permits energization of the X-ray tube power supply based on the output signal from the lid sensor The present invention relates to an X-ray irradiation apparatus including a safety mechanism having a mechanism. The safety mechanism of the X-ray irradiation apparatus according to the first aspect further includes a diagnosis mechanism that self-diagnose the state of the safety mechanism independently of the control mechanism without receiving communication from the control mechanism.

  A second aspect of the present invention is a lid sensor that detects opening and closing of a lid of a sample chamber that stores an X-ray irradiation target, and an X-ray tube that supplies electric power to an X-ray tube based on an output signal from the lid sensor. The present invention relates to a safety mechanism of an X-ray irradiation apparatus having an interlock mechanism that prohibits or permits energization of a sphere power source. The safety mechanism according to the second aspect further includes a diagnosis mechanism that self-diagnose the state of the safety mechanism independently of the control mechanism without receiving communication from the control mechanism.

  According to the present invention, there is provided a highly reliable X-ray irradiation apparatus and its safety mechanism that does not hinder the self-diagnosis operation of each component or circuit of the safety mechanism even when a malfunction occurs in the control mechanism or the like.

It is a schematic diagram which shows the structure of the X-ray irradiation apparatus which concerns on the 1st Embodiment of this invention. It is a table | surface which shows an example of the check list in the self-diagnosis based on the 1st Embodiment of this invention. It is a flowchart showing the outline of the self-diagnosis operation | movement of the safety mechanism of the X-ray irradiation apparatus which concerns on 1st Embodiment. It is a schematic diagram which shows the safety mechanism of the X-ray irradiation apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows the structure of the conventional X-ray irradiation apparatus, Comprising: The structure of an X-ray irradiation apparatus provided with the diagnostic mechanism implement | achieved in the control microcomputer is shown. The structure of an X-ray irradiation apparatus provided with a control microcomputer and a diagnostic microcomputer is shown.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and the aspect ratio is different from the actual one. In addition, it goes without saying that portions with different ratios are included between the drawings.

  Further, the following embodiments exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention will be described in terms of the material, shape, structure, The layout is not specified as follows. The technical idea of the present invention can be variously modified within the scope of the claims.

(First embodiment)
[X-ray irradiation equipment]
As shown in FIG. 1, the X-ray irradiation apparatus according to the first embodiment of the present invention includes an X-ray irradiation mechanism 1, a control mechanism 2 for controlling the operation of the X-ray irradiation mechanism 1, and an X-ray leakage. And a safety mechanism 3 to prevent.

The X-ray irradiation mechanism 1 stores a sample (irradiation target) 14, a sample chamber 11 made of a material that shields X-rays, and a lid 12 that is provided as a part of the sample chamber 11 and makes the sample chamber 11 a sealed space. , A lid opening / closing mechanism 19 for opening / closing the lid 12, a motor 13 for driving the lid opening / closing mechanism 19, an X-ray tube 15 for irradiating the sample 14 with X-rays Φ ₁ , and power to the X-ray tube 15 includes an X-ray tube power supply 16 for supplying the detector 18 for detecting the X-ray [Phi ₂ emitted from the sample 14.

The control mechanism 2 includes a control microcomputer 21 that is controlled by the control software 211. Although details of the control microcomputer 21 are not shown, in addition to the arithmetic processing unit (CPU), a main storage device, an auxiliary storage device, a program storage device, an input device, an output device, a display device, and an input / output control unit Etc., and the hardware configuration of the Neumann computer can be made. For example, the control software 211 is stored in a program storage device (not shown). The control microcomputer 21 receives a signal output from the diagnostic mechanism 38 and performs a diagnostic result input means 212 for performing arithmetic processing necessary for controlling the X-ray tube power supply 16 based on the signal, and the lid opening / closing mechanism 19. a lid control unit 213 for performing output, arithmetic processing required for its closure drive signal I _m for controlling the motor 13 which drives a, for controlling the energization of the X-ray tube 15 by the X-ray tube power supply 16 And X-ray tube power supply control means 214 for performing the signal output and the arithmetic processing necessary for it.

The safety mechanism 3 includes a lid sensor 34 that detects opening and closing of the lid 12 and an energization prohibition instruction I _ILO that prohibits energization of the X-ray tube power supply 16 while the lid 12 is open based on the output of the lid sensor 34. While the lid 12 is closed, an interlock circuit 31 that outputs an energization permission instruction I _ILC that permits energization of the X-ray tube power supply 16, and an energization prohibition instruction I _ILO that is output from the interlock circuit 31. the interlock relay 32 to cut the X-ray tube power supply 16, receives at diagnosis injunction I _dro and supply permission instruction I _drc from the diagnostic mechanism 38, during the self-diagnosis operation is the X-ray tube power on the basis of the 16 includes a diagnostic relay 33 that prohibits power supply to 16 and permits power supply while the self-diagnosis operation is not being performed, and a diagnostic mechanism 38 that directly diagnoses the operating state of each component or circuit of the safety mechanism 3. An interlock mechanism 37 is formed by the interlock circuit 31 and the interlock relay 32.

The diagnostic mechanism 38 is connected to a diagnostic microcomputer arithmetic processing unit (CPU) 35 for self-diagnosis of the state of each component or circuit constituting the safety mechanism 3, and the diagnostic microcomputer arithmetic processing unit 35 as shown in FIG. A check list storage means is provided for storing a check list of diagnostic items for self-diagnosis. Although details of the diagnosis mechanism 38 are not shown, in addition to the arithmetic processing unit (CPU) 35, a main storage device, an auxiliary storage device, a program storage device, an input device, an output device, a display device, and input / output control. The check list storage means 36 can be configured using, for example, a part of an auxiliary storage device. The arithmetic processing unit 35 of the diagnostic microcomputer is controlled by diagnostic software 351. For example, the diagnostic software 351 is stored in a program storage device (not shown). The arithmetic processing unit 35 of the diagnosis microcomputer includes a diagnosis result output means 352 for outputting a diagnosis result by the self-diagnosis operation as a signal to the control mechanism 2 and a diagnosis prohibition instruction I _dro for disconnecting the diagnosis relay 33 at the start of the self-diagnosis operation. And the output of the supply permission instruction I _drc to be reconnected at the end of the self-diagnosis operation, the diagnostic relay control means 353 for performing arithmetic processing necessary for the output of these instructions, and the open detection signal S _SO output from the lid sensor 34. and a sensor signal input unit 354 for inputting a closed detection signal S _SC, interlock relay 32 is energized prohibited showing a state of cutting and connecting that output signal S _ILO and interlocking condition input means for inputting an energization permission signal S _ILC 355 If, from the sensor signal input unit 354 and the interlocking condition input means 355, the open-closed detection signal _{S S} Comprises S _SC and energized to disable or enable signal S _ILO, to obtain information of the S _ILC, and a self-diagnosis execution unit 356 for executing the self-diagnosis of each check item set in the checklist.

In the configuration shown in FIG. 1, since the diagnostic relay 33 is provided between the interlock relay 32 and the X-ray tube power supply 16, the diagnostic relay control means 353 in the arithmetic processing unit 35 of the diagnostic microcomputer is used. The diagnostic relay 33 can be set in advance to a power-off (OFF) state for prohibiting X-ray irradiation before starting the self-diagnosis by the prohibition instruction I _dro during diagnosis. In this state, energization prohibited is output from the interlock relay 32, permission signals _{S ILO, S ILC} and open is output from the lid sensor 34-closed detection signal _{S SO,} safety mechanism using the logical relation between the _{S SC} Conduct self-diagnosis of 3 parts and circuits. As a result of self-diagnosis, when the normal operation of each component or circuit constituting the safety mechanism 3 is confirmed, the diagnostic relay 33 is brought into a power supply connection (ON) state that permits X-ray irradiation.

  As described above, in the X-ray irradiation apparatus according to the first embodiment of the present invention, the diagnostic microcomputer arithmetic processing unit 35 is configured independently of the control microcomputer 21, and the diagnostic microcomputer arithmetic processing unit 35 is the safety mechanism 3. In the case of self-diagnosis of each component, circuit, etc. that constitutes the system, the self-diagnosis is completed only by the arithmetic processing unit 35 of the diagnostic microcomputer without receiving the communication of the control microcomputer 21. Even if only ordinary sensors and switches that are not provided are used, a highly reliable safety mechanism can be realized relatively easily.

  The check list storage means 36 of the diagnostic microcomputer holds a list of check items necessary for self-diagnosis of each component and circuit constituting the safety mechanism 3 illustrated in FIG. Check items in the corresponding checklist according to the closed state. If all the check items are “OK”, normal operation of each component, circuit, etc. constituting the safety mechanism 3 has been confirmed, so X-ray irradiation is permitted. If a contradiction is detected in any of the check items, any part or circuit constituting the safety mechanism 3 has an abnormality, so X-ray irradiation is prohibited.

  The self-diagnosis execution unit 356 constantly monitors the state of each component or circuit constituting the safety mechanism 3 even during operation of the X-ray irradiation apparatus.

  In the construction of the self-diagnosis system of the safety mechanism 3 in the X-ray irradiation apparatus having the above-described configuration, the detection means such as the lid sensor 34 is doubled or other parts such as an X-ray shutter other than the above-described components When a circuit is provided, the number of items that need to be checked in the self-diagnosis of the safety mechanism 3 can be further increased.

[Self-diagnosis operation]
A safety mechanism self-diagnosis method according to the first embodiment of the present invention will be described below with reference to the flowchart of FIG.

  (a) When the system of the X-ray irradiation apparatus is activated, first, in step S10, the self-diagnosis execution unit 356 sets initial values in the check columns of all check items in the check list stored in the check list storage unit 36. Enter “NG”. In step S11, before starting the diagnostic operation, the diagnostic relay control means 353 disconnects the diagnostic relay 33 and sets the X-ray irradiation prohibited state.

(b) Then, in step S12, the lid control unit 213 of the control mechanism 2 outputs a lid driving signal _{I m} to the motor 13, opens the lid 12 by driving the motor 13, the process proceeds to step S13 (Incidentally, the manual device If so, open the lid 12 manually.) When the lid 12 is opened, if the lid sensor 34 is normal, an open detection signal _SSO is input from the lid sensor 34 to the sensor signal input means 354. When the interlock mechanism 37 is operating normally, the interlock circuit 31 based on the open detection signal S _SO from the lid sensor 34 outputs a current injunction I _ILO to interlock relay 32, it is cut The interlock relay 32 outputs a signal indicating the interlock state to the interlock state input means 355 in the arithmetic processing unit 35 of the diagnostic microcomputer.

(c) Then, in step S13, self diagnosis execution unit 356 determines the open detection signal _{S SO} from the lid sensor 34, energization inhibit signal _{S ILO} from interlock relay 32, whether or not it is outputted. If the energization prohibition signal _SILO is output, the process proceeds to step S14 to check the item No. in the check list. Enter “OK” in the check box 1. If the energization prohibition signal _SILO has not been output, there is an abnormality in any of the parts or circuits constituting the safety mechanism 3, so the process proceeds to step S21, and the item No. The process proceeds to the X-ray irradiation prohibiting process in step S23 while maintaining “NG” in the check column 1. In step S23, the diagnostic result output means 352 outputs an X-ray irradiation prohibition signal to the control mechanism 2, and the control mechanism 2 that has received the X-ray irradiation prohibition signal further displays an error message and waits for the X-ray irradiation apparatus. Execute the process to shift to, and end the self-diagnosis operation.

If the proceeds from (d) step S13 to step S14, the process proceeds to step S15, the lid control unit 213 in the control microcomputer 21 outputs a cover drive signal _{I m} to the motor 13, by driving the motor 13 lid 12 is closed and the process proceeds to step S16 (in the case of a manual device, the lid 12 is manually closed). Closing the lid 12, if normal lid sensor 34 to the sensor signal input means 354 of the interlock circuit 31 and the arithmetic processing unit 35, it outputs a closed detection signal S _SC.

(e) in step S16, self diagnosis execution unit 356 determines the signal _{S SC} out closing the lid sensor 34, energization permission signal _{S ILC} from interlock relay 32, whether or not it is outputted. If the energization permission signal _SILC is correctly output, the process proceeds to step S17, and the check list item No. Enter “OK” in the check box 2. If the energization permission signal _SILC is not output, there is an abnormality in any of the components or circuits constituting the safety mechanism 3, so the process proceeds to step S22, and the item No. While maintaining “NG” in the check column 2, the process proceeds to the X-ray irradiation prohibition process in step S 23.

(f) If the process proceeds to step S17, then the process proceeds to step S18 to connect the diagnostic relay 33. The diagnostic relay control means 353 outputs a supply permission command I _drc to the diagnostic relay 33, connects the diagnostic relay 33, permits power supply to the X-ray tube power supply 16, and ends the self-diagnosis operation. .

  While the X-ray irradiation apparatus is in operation, the system is controlled by the control microcomputer 21, but each time the lid 12 is opened, the diagnosis mechanism 38 operates regardless of the communication from the control microcomputer 21. The self-diagnosis operation of step S13 is started, and if “prohibition” of the interlock relay 32 is confirmed in step S13, the process proceeds to step S15 through step S14. After the lid 12 is closed, the self-diagnosis of step S16 is performed. Perform diagnostic actions. That is, while the X-ray irradiation apparatus is in operation, a self-diagnosis operation is performed every time the lid 12 is opened and closed.

(Second Embodiment)
The arithmetic processing unit 35 of the diagnostic microcomputer of the diagnostic mechanism 38 may be configured such that the interlock circuit 31 outputs the relay disconnection signal _SCKO and the relay connection signal _SCCK as shown in FIG.

  Similar to the X-ray irradiation apparatus according to the first embodiment, the X-ray irradiation apparatus according to the second embodiment includes an X-ray irradiation mechanism, a control mechanism that controls the operation of the X-ray irradiation mechanism, and an X-ray irradiation apparatus. Although a safety mechanism 3 for preventing line leakage is provided, an X-ray irradiation mechanism and a control mechanism are not shown in FIG.

As shown in FIG. 4, the safety mechanism 3 of the X-ray irradiation apparatus according to the second embodiment includes a lid sensor 34 that detects opening and closing of the lid 12, and the lid 12 is opened based on the output of the lid sensor 34. An energization prohibition instruction I _ILO that prohibits energization of the X-ray tube power supply 16 is output while the X-ray tube power supply 16 is energized, and an energization permission instruction I _ILC that permits energization of the X-ray tube power supply 16 is output while the lid 12 is closed. An interlock circuit 31 that outputs, an interlock relay 32 that disconnects the X-ray tube power supply 16 based on an energization prohibition instruction I _ILO that is output from the interlock circuit 31, and a diagnosis prohibition instruction I _dro from the diagnosis mechanism 38 A diagnosis relay 33 that receives the supply permission command I _drc and prohibits the power supply to the X-ray tube power supply 16 during the self-diagnosis operation and permits the power supply during the self-diagnosis operation, and the safety mechanism 3 parts In terms and a diagnostic mechanism 38 for diagnosing the operating conditions of the circuit such as direct, it is similar to the X-ray irradiation apparatus according to the first embodiment.

Diagnostic mechanism 38, in addition to the configuration shown in FIG. 1, enter the relay disconnect signal S _CKO and relay connection signal S _CKC output from the interlock circuit 31, arithmetic processing for inputting a self-diagnosis execution unit 356 The difference from the X-ray irradiation apparatus according to the first embodiment is that a determination signal input unit 357 is further provided. In the X-ray irradiation apparatus according to the second embodiment, the relay disconnection / connection signals S _CKO and S _CKC are supplied with the energization prohibition instruction I _ILO or the energization permission instruction I _ILC from the interlock circuit 31 to the interlock relay 32. The same signal as is output to the diagnosis mechanism 38 for confirmation by self-diagnosis.

In the case of the configuration of the X-ray irradiation apparatus according to the second embodiment, in the determination of steps S13 and S16 in the flowchart of the self-diagnosis operation described in the first embodiment, the opening from the lid sensor 34 is performed. In addition to the close detection signal (S _SO , S _SC ) and the energization prohibition / permission signal (S _ILO , S _ILC ) from the interlock relay 32, the relay disconnection / connection signal (S _CKO , Whether S _CKC ) is output correctly is also determined. The combination of three types of signals, the open detection signal _{S SO} in step S13, the energization inhibit signal _{S ILO,} a set of relays disconnect signal _{S CKO,} closed detection signal _{S SC} in step S16, the energization permission signal _{S ILC,} relay connections If it is a set of signals S _CKC , the normal operation of each component or circuit constituting the safety mechanism 3 has been confirmed. Therefore, the process proceeds to steps S14 and S17, respectively, and “OK” is entered in the check item check column. input.

  If it is a combination other than these, there is an abnormality in any one of the parts or circuits constituting the safety mechanism 3, so that the process proceeds to steps S21 and S22, and “NG” is input in the check column. . Others are substantially the same as those of the X-ray irradiation apparatus according to the first embodiment, and redundant description is omitted.

  In the X-ray irradiation apparatus according to the second embodiment of the present invention, as in the X-ray irradiation apparatus according to the first embodiment, the arithmetic processing unit 35 of the diagnostic microcomputer is independent from the control microcomputer 21 and diagnoses. When the microcomputer processing unit 35 performs self-diagnosis of each component or circuit constituting the safety mechanism 3, the self-diagnosis is completed only by the processing unit 35 of the diagnostic microcomputer without receiving communication from the control microcomputer 21. Even when only ordinary sensors and switches each having no self-diagnosis function are used, a highly reliable safety mechanism can be realized relatively easily.

(Other embodiments)
As described above, the present invention has been described according to the first and second embodiments. However, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

For example, in the X-ray irradiation apparatus according to the second embodiment, the self-diagnosis execution unit 356 does not use the energization prohibition / permission signals S _ILO and S _ILC output from the interlock relay 32 but from the interlock circuit 31. It may be configured such that a logical contradiction with a signal output from the lid sensor 34 is determined only by the relay disconnection / connection signals S _CKO and S _CKC .

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 ... X-ray irradiation mechanism 11 ... Sample chamber 12 ... Cover 13 ... Motor 14 ... Sample 15 ... X-ray tube 16 ... X-ray tube power supply 18 ... Detector 19 ... Cover opening / closing mechanism 2 ... Control mechanism 21 ... Control microcomputer 211 ... Control software 212 ... Diagnosis result input means 213 ... Cover control means 214 ... X-ray tube power supply control means 3 ... Safety mechanism 31 ... Interlock circuit 32 ... Interlock relay 33 ... Diagnosis relay 34 ... Cover sensor 35 ... Diagnosis microcomputer Arithmetic processing unit (CPU)
351 ... diagnostic software 352 ... diagnostic result output means 353 ... diagnostic relay control means 354 ... sensor signal input means 355 ... interlock state input means 356 ... self-diagnosis execution means 357 ... judgment signal input means 36 ... check list storage means 37 ... Interlock mechanism 38 ... Diagnostic mechanism

Claims (6)

An X-ray tube power source for supplying electric power to the X-ray tube, an X-ray irradiation mechanism having a sample chamber for storing an X-ray irradiation target;
A control mechanism having a control microcomputer for controlling the operation of the X-ray irradiation mechanism and the opening and closing operation of the lid of the sample chamber ;
Diagnosis independent of a lid sensor that detects opening and closing of the lid of the sample chamber, an interlock mechanism that prohibits or permits energization of the X-ray tube power supply based on an output signal from the lid sensor, and the control microcomputer A safety mechanism having a microcomputer , and independently of the information on the open / close state of the lid of the control microcomputer, the diagnostic microcomputer performs self-diagnosis in the open state and the closed state of the lid, respectively. state X-ray irradiation apparatus characterized by self-diagnose.   The interlock mechanism includes an interlock circuit that outputs a signal for cutting off the X-ray tube power supply while the lid is open, and an interlock relay that operates by a signal from the interlock circuit. The X-ray irradiation apparatus according to claim 1.   The X-ray irradiation apparatus according to claim 1, wherein the safety mechanism further includes a diagnostic relay that stops the irradiation of the X-rays during the self-diagnosis. A lid sensor that detects opening and closing of a lid of a sample chamber that stores an X-ray irradiation target, and prohibits energization of an X-ray tube power source that supplies power to the X-ray tube based on an output signal from the lid sensor or A safety mechanism of an X-ray irradiation apparatus having an interlock mechanism to be permitted,
The safety mechanism performs self-diagnosis in the open and closed states of the lid independently of the information on the open / closed state of the lid, which is included in a control microcomputer that controls the operation of the X-ray irradiation mechanism and the opening / closing operation of the lid. The safety mechanism further comprises a diagnostic microcomputer independent of the control microcomputer .   The interlock mechanism includes an interlock circuit that outputs a signal for cutting off the X-ray tube power supply while the lid is open, and an interlock relay that operates by a signal from the interlock circuit. The safety mechanism according to claim 4.   The safety mechanism according to claim 4, wherein the safety mechanism further includes a diagnostic relay that stops the irradiation of the X-rays during the self-diagnosis.

Images