JP5377254B2 - Rotating stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotary stage device capable of being miniaturized than before. <P>SOLUTION: The rotary stage device 100 includes a worm wheel 262 for rotating a rotation base part 250, and a worm 261 engaged with the worm wheel 262. In both ends of the worm 261, rotation bearings for rotatably supporting the worm 261 are attached respectively. The fixed rotation bearing attached to one shaft part, to which a driven pulley 232 is attached, is fixed in an auxiliary base part 221, and the movable rotation bearing 263 attached to the other shaft part is held by a holding member 264. The holding member 264 presses the movable rotation bearing 263 to a body base part 220, and moreover, urges it in a worm wheel 262 direction. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a rotary stage device that can change the direction of a mounted object.

  Conventionally, a stage called a rotary stage, a θ stage, or the like that can change the orientation of an object placed directly or via a jig or the like by rotating the table (hereinafter referred to as a rotary stage device) is known. It has been.

  In this rotary stage device, a worm gear composed of a worm and a worm wheel is usually used as a mechanism for rotating the table. When this worm gear is used, in order to be able to adjust the backlash, a mechanism that can adjust the distance between the shafts of the worm and the worm wheel, such as a worm, is set in a direction perpendicular to the rotation axis direction. A worm moving mechanism may be provided to allow movement.

  However, in order to provide such a worm moving mechanism, a space for that is required, and the size of the rotary stage device is increased accordingly.

  Further, in the rotary stage device, it is generally necessary to detect the origin position of the table. Therefore, conventionally, for example, the origin position is detected by detecting, with an optical sensor (photo interrupter), a protruding piece protruding from a predetermined position on the side surface of the table.

  However, when the origin position is detected by such a method, it is necessary to provide a space for allowing the protruding piece to pass around the table and a space for arranging the optical sensor, and the size of the rotary stage device increases accordingly. End up.

  JP 2009-168225 A includes a mechanism for pressing the worm gear against the worm wheel in a direction perpendicular to the worm gear axis as a mechanism for preventing back crushing in the rotary stage mechanism that is rotated by the worm wheel and the worm gear. Is disclosed.

JP 2009-168225 A

  An object of the present invention is to provide a rotary stage device that can be made smaller than before.

  A rotary stage device according to the present invention includes a base part, a table part rotatably attached to the base part, a worm wheel for rotating the table part, a worm meshing with the worm wheel, A first rotary bearing attached to one end, a second rotary bearing attached to the other end of the worm, and fixed to the base to hold the first rotary bearing A second holding portion for holding the second rotary bearing, wherein the second holding portion presses the second rotary bearing against the base portion, and the worm It is biased in the direction of the wheel.

  In this case, the second rotary bearing includes an inner ring and an outer ring, the inner ring is fixed to the other end of the worm, and the outer ring is held by the second holding part. Also good. Further, the second holding part includes a pressing part that presses the second rotary bearing against the base part, and a U-shaped part that biases the second rotary bearing toward the worm wheel. You may make it prepare.

  Moreover, in the above case, the protrusion part which protrudes from the bottom face of the table part, the movable member which can move when the protrusion part contacts, and the detection part (for example, detecting the movement of the movable member) A contact type sensor).

  In this case, the movable member may be formed of a flexible member and bend when the projecting portion comes into contact. In addition, the movable member may include a linear portion with which the protruding portion contacts, and an arc portion that bends when the protruding portion contacts the linear portion.

  ADVANTAGE OF THE INVENTION According to this invention, the rotation stage apparatus which can be reduced in size conventionally is provided.

It is a perspective view which shows the structure of the rotation stage apparatus by this invention. FIG. 3 is a plan view (No. 1) for explaining an internal structure of the rotary stage device 100; FIG. 6 is a plan view (No. 2) for explaining the internal structure of the rotary stage device 100; 2 is a front view for explaining an internal structure of a rotary stage device 100. FIG. 4 is a cross-sectional view for explaining the internal structure of the rotary stage device 100. FIG. It is a figure for demonstrating the structure of a holding member.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a perspective view showing a configuration of a rotary stage device according to the present invention.

  As shown in the figure, the rotary stage device 100 according to the present invention includes a table unit 110, a main body unit 120, a power transmission unit 130, and a motor unit 140.

  The rotary stage device 100 is driven by a mechanism housed in the main body 120 and the power transmission unit 130 and a motor housed in the motor unit 140 to rotate the table unit 110. The direction of the rotationally symmetric object placed directly or via a jig or the like is changed.

  Next, the details of the structure of the rotary stage device 100 will be described.

  2-5 is a figure for demonstrating the internal structure of the rotation stage apparatus 100. FIG. 2 and 3 are plan views of the rotary stage device 100. FIG. 2 shows a state in which the cover of the main body 120 and the power transmission unit 130 is removed from the state shown in FIG. The state which removed the table part 110 from the state shown in FIG. On the other hand, FIG. 4 shows a front view of the rotary stage device 100 shown in FIG. 2, and FIG. 5 shows an AA enlarged sectional view of FIG.

  As shown in FIGS. 2 to 5, the rotary stage device 100 includes a table part 110, a main body base part 220, an auxiliary base part 221, a power transmission mechanism part 230, a motor part 140, and a rotary base part 250. The worm gear mechanism 260 and the origin position detector 270 are provided.

  As described above, the table unit 110 is a unit on which a rotating object is placed directly or via a jig or the like, and is rotatably attached to the main body base unit 220. More specifically, it is fixed (screwed) to a rotation base portion 250 that is rotatably attached to the main body base portion 220 and rotates integrally with the rotation base portion 250. As shown in FIGS. 4 and 5, a columnar pin 111 protrudes from the bottom surface of the table portion 110. The function of the pin 111 will be described later.

  The main body base portion 220 is a member constituting the base of the main body portion 120, and the auxiliary base portion 221, the rotation base portion 250, the worm gear mechanism portion 260, and the origin position detection portion 270 are appropriately provided for the main body base portion 220. It is attached. As shown in FIG. 5, the main body base portion 120 has a shape such that a cylindrical protrusion 222 is provided at the center of a thick rectangular plate-like member, and the main body base portion 220 has a shape at the center. The rotation base portion 250 is rotatably attached to the provided cylindrical projection portion 222.

  The auxiliary base portion 221 is a member that is attached to one side of the main body base portion 220 and projects laterally from the main body base portion 220, and is integrated with the main body base portion 220. A motor part 140 is appropriately attached to a portion of the auxiliary base part 221 that protrudes from the main body base part 220. The auxiliary base portion 221 also holds a rotary bearing (described later) that rotatably supports one end portion of the worm 261 constituting the worm gear mechanism portion 260.

  The power transmission mechanism unit 230 is for transmitting the power (rotational motion) of the motor accommodated in the motor unit 140 to the worm gear mechanism unit 260 in the main body unit 120, and includes a driving pulley 231 and a driven pulley 232. And a timing belt 233. The drive pulley 231 is attached (fixed) to an output shaft of a motor housed in the motor unit 140 and rotates integrally with the output shaft of the motor. The driven pulley 232 is attached (fixed) to one end of the worm 261 constituting the worm gear mechanism portion 260 (the end portion rotatably attached to the auxiliary base portion 221 described above), and integrated with the worm 261. It will rotate. The timing belt (toothed belt) 233 is wound around the drive pulley 231 and the driven pulley 232 to transmit the rotation of the motor to the worm 261. 2 to 4, only a part of the teeth of the drive pulley 231, the driven pulley 232, and the timing belt 233 is shown for simplicity.

  The motor unit 140 houses therein a motor for driving the worm gear mechanism unit 260. As described above, the motor accommodated in the motor unit 140 drives the worm gear mechanism unit 260 via the power transmission mechanism unit 230.

  The rotation base portion 250 is a member that is rotatably attached to the main body base portion 220. Two cylindrical members having different diameters and lengths (heights) are arranged concentrically, and an upper surface thereof. Are connected by a disk-shaped member having a circular hole at the center. That is, as shown in FIG. 5, an inner cylinder part 251, an outer cylinder part 252, and a top plate part 253 are provided. And the inner cylinder part 251 of the rotation base part 250 is rotatably attached to the cylindrical projection part 222 of the main body base part 220 via the rotation bearing 254. That is, two rotation bearings 254 are arranged in the vertical direction between the outer periphery of the inner cylindrical portion 251 of the rotation base portion 250 and the inner periphery of the cylindrical projection portion 222 of the main body base portion 220, and the inner ring of each rotation bearing 254 is arranged. And the outer ring are fixed to the inner cylindrical portion 251 of the rotation base portion 250 and the cylindrical protrusion 222 of the main body base portion 220, respectively. Further, the table portion 110 is fixed (screwed) to the top plate portion 253 of the rotation base portion 250. Further, a worm wheel 262 constituting the worm gear mechanism 260 is fixed to the outer periphery of the outer cylinder portion 252 of the rotation base portion 250. That is, the rotation base portion 250 is configured to rotate integrally with the worm wheel 262.

  The worm gear mechanism 260 includes a worm 261 and a worm wheel 262 that meshes with the worm 261, and is a mechanism that converts the rotation of the worm 261 into the rotation of the worm wheel 262.

  The worm 261 is a cylindrical member formed with thread-like teeth, and a small-diameter shaft portion for rotating the worm 261 is provided at both ends thereof. Then, rotary bearings for rotatably supporting the worm 261 are mounted on the shaft portions at both ends. As described above, the rotation bearing (hereinafter referred to as a fixed rotation bearing) mounted on the shaft portion on which the driven pulley 232 is mounted (the lower side in FIG. 3) is held by the auxiliary base portion 221. . That is, the outer ring of the fixed rotation bearing is fixed to the auxiliary base portion 221. On the other hand, a rotary bearing (hereinafter referred to as a movable rotary bearing) 263 attached to the other (upper side in FIG. 3) shaft portion 263 is held by a holding member 264 as shown in FIG. Details of the holding member 264 will be described later.

  The worm wheel 262 is formed by forming teeth that mesh with the worm 261 on the outer periphery of a ring-shaped member. As described above, since the worm wheel 262 is fixed to the rotation base portion 250, when the worm wheel 262 rotates with the rotation of the worm 261, the rotation base portion 250 integrated with the worm wheel 262, and The table part 110 integrated with the rotation base part 250 is rotated.

  The origin position detection unit 270 is for detecting the origin position of the table unit 110, and includes a movable member 271 and a sensor unit 272. Details of the operation of the origin position detection unit 270 will be described later.

  Next, details of the holding member 264 will be described. As described above, the holding member 264 is a member that holds the movable rotary bearing 263 that is attached to one shaft portion (the upper side in FIG. 3) of the worm 261.

  FIG. 6 is a view for explaining the structure of the holding member 264. The figure (a) shows a top view, the figure (b) shows a front view, and the figure (c) shows a perspective view.

  As shown in the figure, the holding member 264 includes a mounting portion 610, a U-shaped portion 620, and a pressing portion 630.

  The attachment portion 610 is a portion for attaching the holding member 264 to the main body base portion 220, and two elongated holes 611 for screwing to the main body base portion 220 are formed.

  The U-shaped portion 620 is a portion having a shape obtained by bending an elongated band-shaped member into a U shape, and the tip end portion (the right end portion in the figure) abuts against the side surface of the movable rotary bearing 263. Thus, the movable rotary bearing 263 is urged toward the worm wheel 262.

  The holding portion 630 is a rectangular flat plate portion that protrudes inward (left side in the figure) from the upper surface of the tip portion of the U-shaped portion 620, and is in contact with the upper surface of the movable rotary bearing 263 so as to be movable. This regulates the vertical movement of the. The holding portion 630 of the holding member 264 restricts the vertical movement of the movable rotary bearing 263 by pressing the movable rotary bearing 263 against the main body base portion 220.

  In the rotary stage device 100, the movable rotary bearing 263 is held by the holding member 264 having the above-described structure. Therefore, the movable rotary bearing 263 and the worm 261 to which the movable rotary bearing 263 is attached are the worm wheels 262. It is biased in the direction and unnecessary backlash is removed. Further, even when the teeth of the worm 261 and the worm wheel 262 are worn, the worm 261 can be moved following the wear, and therefore, it is possible to prevent unnecessary backlash from occurring.

  Note that the distance that the movable rotary bearing 263 moves by the urging force of the holding member 264 is very small, and can be covered within the range of play of the fixed rotary bearing or the like.

  Next, the operation of the origin position detection unit 270 will be described.

  As described above, the origin position detection unit 270 includes the movable member 271 and the sensor unit 272.

  The movable member 271 is disposed below the table portion 110, that is, between the table portion 110 and the main body base portion 220, and can move when the pins 111 protruding from the bottom surface of the table portion 110 abut. It is an important member.

  In the present embodiment, the movable member 271 is configured by a flexible member (plate spring), and includes a mounting portion 2711, an arc portion 2712, and a straight portion 2713, as shown in FIG.

  The attachment portion 2711 is a portion for attaching the movable member 271 to the main body base portion 220, and the attachment portion 2711 is screwed to the main body base portion 220.

  The arc portion 2712 is a portion having a shape that is obtained by bending an elongated belt-like member into an arc shape. As shown in FIG. 2, when the table portion 110 rotates clockwise and the pin 111 protruding to the bottom side comes into contact with the straight portion 2713, the arc portion 2712 is bent and the position of the straight portion 2713 changes. become.

  The straight line portion 2713 is a portion having an elongated strip shape. When the pin 111 provided on the table portion 110 rotating in the clockwise direction comes into contact with the linear portion 2713, the linear portion 2713 moves as the arc portion 2712 bends and comes into contact with the sensor portion 272.

  The sensor unit 272 is a contact-type sensor (for example, a limit switch, a touch sensor, or the like) that detects that the movable member 271 (straight line portion 2713) is in contact. The sensor unit 272 detects that the table unit 110 is at the origin position by detecting that the movable member 271 (linear portion 2713) has come into contact.

  In the rotary stage device 100, since the origin position of the table unit 110 is detected by the origin position detection unit 270 having the above-described configuration, the size can be reduced as compared with the conventional one. That is, since the pins 111 protrude downward from the bottom surface of the table portion 110, it is not necessary to provide a space around the table portion 110, and the apparatus can be downsized accordingly. In addition, instead of directly detecting the pin 111 provided on the table unit 110, the pin 111 is indirectly detected by detecting the movable member 271 that the pin 111 contacts and moves. The amount of movement of the detection object detected by the sensor unit 272 can be reduced.

  As described above, in the above-described embodiment, the movable rotary bearing 263 attached to one end of the worm 261 is urged in the direction of the worm gear 262 while being held by the holding member 264. Therefore, unnecessary backlash can be removed with a simple configuration, and the apparatus can be miniaturized.

  In the above-described embodiment, the pin 111 protruding from the bottom surface of the table unit 110 abuts on the movable member 271 and detects that the movable member 271 has moved, so that the origin position of the table unit 110 is determined. Since detection is performed, the space required for detecting the origin position can be reduced as compared with the conventional case, and the apparatus can be downsized.

  As mentioned above, although embodiment of this invention was described, naturally embodiment of this invention is not restricted to said thing. For example, in the above-described embodiment, the movable member 271 of the origin position detection unit 270 is configured by a flexible member. However, a rotatable rigid member such as a plate-shaped rigid member It is also conceivable to use a hinge mechanism that rotatably supports a plate-like rigid member.

  Further, in the above-described embodiment, the movement of the movable member 271 is detected by the contact type sensor, but it is also conceivable to detect it by another type of sensor (for example, an optical sensor).

DESCRIPTION OF SYMBOLS 100 Rotation stage apparatus 110 Table part 111 Pin 120 Main body part 130 Power transmission part 140 Motor part 220 Main body base part 221 Auxiliary base part 222 Cylindrical protrusion part 230 Power transmission mechanism part 231 Drive pulley 232 Drive pulley 233 Timing belt 250 Rotation base part 251 Inner cylinder part 252 Outer cylinder part 253 Top plate part 254 Rotation bearing 260 worm gear mechanism part 261 worm 262 worm wheel 263 movable rotation bearing 264 holding member 270 origin position detection part 271 movable member 2711 attachment part 2712 arc part 2713 linear part 272 sensor Part 610 Attaching part 611 Long hole 620 U-shaped part 630 Holding part

Claims (6)

A base part;
A table portion rotatably attached to the base portion;
A worm wheel for rotating the table portion;
A worm meshing with the worm wheel;
A first rotating bearing attached to one end of the worm;
A second rotating bearing attached to the other end of the worm;
A first holding part fixed to the base part and holding the first rotary bearing;
A second holding part for holding the second rotary bearing,
The second holding part is
A pressing portion that presses the second rotary bearing against the base portion;
A U-shaped portion for biasing the second rotary bearing in the direction of the worm wheel;
With
The rotary stage device, wherein the second rotary bearing is pressed against the base portion and biased toward the worm wheel. A base part;
A table portion rotatably attached to the base portion;
A worm wheel for rotating the table portion;
A worm meshing with the worm wheel;
A first rotating bearing attached to one end of the worm;
A second rotating bearing attached to the other end of the worm;
A first holding part fixed to the base part and holding the first rotary bearing;
A second holding part for holding the second rotary bearing ;
A protruding portion protruding from the bottom surface of the table portion;
A movable member capable of moving when the protrusion comes into contact;
A detection unit for detecting the movement of the movable member ;
The second holding portion presses the second rotary bearing against the base portion and urges the second rotary bearing toward the worm wheel. A protruding portion protruding from the bottom surface of the table portion;
A movable member capable of moving when the protrusion comes into contact;
The rotation stage apparatus according to claim 1, further comprising a detection unit that detects movement of the movable member. The rotary stage device according to claim 2 , wherein the movable member is configured by a member having flexibility, and bends when the projecting portion comes into contact. The movable member is
A straight portion that moves when the protruding portion is abutting,
The rotary stage device according to any one of claims 2 to 4, further comprising an arc portion that bends when the projecting portion comes into contact with the linear portion. The second rotary bearing includes an inner ring and an outer ring,
The rotary stage device according to any one of claims 1 to 5, wherein the inner ring is fixed to the other end of the worm, and the outer ring is held by the second holding part. .

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