JP5384075B2 - Quartz glass burner - Google Patents

Description

  The present invention relates to a quartz glass burner mainly used for flame processing of quartz glass.

  Metal burners such as stainless steel and brass have been widely used as burners used for flame processing quartz glass to form pipes, etc., but if a metal burner is used, the heated tip nozzle part There is a problem that impurities such as metal ions and metal oxides liberated from the metal adhere to the surface of the quartz glass which is a workpiece, thereby reducing the purity of the quartz glass product. In particular, there has been an increasing demand for reduction of metal contamination for quartz glass flame processed products for semiconductor applications.

In order to meet this demand, a pure quartz glass burner has been proposed in Patent Document 1 below. This burner is designed as a so-called hand burner that can be held by the operator's hand, and a quartz glass burner head (nozzle) can be screwed into and removed from the tip of the quartz glass burner body. Since it is mounted and metal impurities do not adhere to the surface of the quartz glass of the workpiece during processing, there is an advantage that the quartz glass can be molded with high purity. In addition, when the nozzle is damaged, it is only necessary to replace the nozzle with a new one, and it is not necessary to purchase an expensive burner as a whole, and it is also possible to use a nozzle having a different diameter depending on the necessity of work. It can be used as an advantage.
Japanese Patent No. 3881985

  However, the quartz glass burner according to Patent Document 1 has the nozzle mounted on the main body by fastening the screw processing portion at the tip of the quartz glass burner main body and the screw processing portion at the base end of the quartz glass nozzle. When quartz is fastened, there is a problem that quartz glass, which is a brittle material, rubs against each other and the thread is easily lost. Even if a slight defect occurs, if the screw is strongly tightened while biting a piece of quartz glass, a large thread will be lost and it will not be able to withstand long-term use. In addition, missing threads can lead to flashback and gas leaks. Since the thread requires precise machining, once the thread is lost, remanufacturing takes a lot of time and cost.

  Further, since quartz glass is a material that hardly undergoes plastic deformation, there is a problem that even if the quartz glass is screwed together, it does not fit well and is easily loosened. This facilitates the tendency to tighten the screws strongly when the nozzle is mounted on the body and increases the possibility of incurring the aforementioned thread loss.

  Accordingly, an object of the present invention is to provide a novel structure for attaching a detachable nozzle to a main body in a quartz glass burner that does not allow impurities to adhere when flame processing quartz glass, and disadvantageous disadvantages of the above-described conventional technology. Is to eliminate.

In order to solve the above-mentioned problems, the present invention according to claim 1 includes a quartz glass body having a female threaded portion on the distal end side, a quartz glass nozzle, and male threaded portions on the proximal end side and the distal end side, respectively. a heat-resistant resin-made joint having a quartz glass nut is fitted on the base end side of the nozzle, in close contact with the inner tapered surface of the nut while being fitted on the base end side of the nozzle between the tip of the joint It consists of a resin sleeve arranged in a sandwiched state, the male thread processing part on the proximal end side of the joint is detachably fastened to the female thread processing part on the distal end side of the main body, and the male thread processing part on the distal end side of the joint is A quartz glass burner characterized in that a nozzle is detachably attached to the tip of a main body by being detachably fastened to a nut.

According to a second aspect of the present invention, in the quartz glass burner according to the first aspect, a nut is integrally formed on the base end side of the nozzle.

According to a third aspect of the present invention, in the quartz glass burner according to the first or second aspect, a quartz glass joint cover is provided to surround the connecting portion between the main body and the nozzle.

  The quartz glass burner of the present invention includes a quartz glass body having a threaded portion on the distal end side, a quartz glass nozzle, and a heat-resistant resin joint having a threaded portion on the proximal end side and the distal end side, respectively. A nut made of quartz glass attached to the base end side of the nozzle, and the threaded part on the base end side of the joint is detachably fastened to the threaded part on the front end side of the main body. The processed portion is detachably fastened to the nut, so that the nozzle is detachably attached to the tip of the main body. According to the burner made of quartz glass, metal impurities do not adhere to the surface of the quartz glass of the workpiece during the flame processing, so that there is an advantage that the quartz glass can be molded with high purity. In addition, when the nozzle is damaged, it is only necessary to replace the nozzle with a new one, and it is not necessary to purchase an expensive burner as a whole, and it is also possible to use a nozzle having a different diameter depending on the necessity of work. It can be used as an advantage.

Furthermore, according to the present invention, in the structure for detachably attaching the quartz glass nozzle to the quartz glass body, the body is provided via a heat-resistant resin joint instead of screwing the quartz glass together. because there as mounting the nozzle, improved fit upon engagement through plastic deformation of the resin, the effect capable of preventing the loss of threads is exhibited.

  In addition, by providing a quartz glass joint cover that surrounds the connecting portion between the main body and the nozzle, the resin joint can be protected from the flame that bounces off the workpiece during the flame processing.

  Referring to FIGS. 1 and 2, a quartz glass burner 10 according to an embodiment of the present invention includes a quartz glass body 11, a quartz glass nozzle 12, and a sleeve made of resin such as polypropylene (PP). 13, a joint 14 made of a heat resistant resin such as polytetrafluoroethylene (PTFE), a nut 15 made of quartz glass, and a joint cover 16 made of quartz glass.

  The main body 11 has a double pipe structure in which an oxygen introduction pipe 112 is provided concentrically inside the hydrogen introduction pipe 111, but branches at the base end as independent pipes. A port 111a and an oxygen inlet 112a are provided. The hydrogen inlet 111a and the oxygen inlet 112a are connected to a hydrogen supply source and an oxygen supply source (both not shown), respectively. The oxygen introduced from the oxygen supply source into the oxygen introduction pipe 112 through the oxygen introduction port 112a is the hydrogen introduced into the hydrogen introduction pipe 111 from the hydrogen supply source through the hydrogen introduction port 111a, and the tip 116 of the main body 11. To make a mixed fuel.

  Reference numeral 113 denotes a steadying member that connects the hydrogen introduction pipe 111 and the oxygen introduction pipe 112 that are branched on the base end side of the main body 11. Reference numeral 114 denotes a steady rest for connecting the hydrogen introduction pipe 111 and the oxygen introduction pipe 112 provided as a double pipe in the main part of the main body 11 to maintain a concentric arrangement relationship. In the example, three places are provided at intervals of 120 degrees.

  In addition, an outer tube 115 is provided in the main part of the main body 11 so as to surround the hydrogen introduction tube 111, and even if the hydrogen introduction tube 111 is broken during the work, the outer tube 115 Play a role in protecting. The surface of the outer tube 115 may be sandblasted so that the operator can easily grip it.

  The inner diameter of the front end portion 116 of the main body 11 is threaded and has a female screw portion 117. A male screw portion 131 on one end side of the joint 13 is fastened to the female screw portion 117.

  The nozzle 12 has a tip 121 for injecting a flame obtained by burning a mixed fuel of oxygen and hydrogen mixed at the tip of the main body 11 toward a workpiece. The tip 121 has a predetermined diameter for performing the required flame processing. It is possible to prepare a plurality of nozzles 12 each having a spark port 121 having a different diameter and replace and use them as necessary.

  The sleeve 13 is mounted on the base end portion 122 side of the nozzle 12, and the inner diameter thereof is substantially equal to the outer diameter of the base end portion 122 of the nozzle 12, and the outer shape thereof is formed so as to be in close contact with the inside of the nut 15. ing. The nut 15 is attached to the base end portion 122 of the nozzle 12, and a female screw portion 151 is formed in an opening portion facing the main body 11 side. The outer diameter of the nut 15 is slightly larger than the outer diameter of the main body tip portion 116.

  The joint 14 has male screw portions 141 and 142 at both ends, and the male screw portion 141 on the proximal end side is fastened to the female screw portion 117 on the distal end side of the main body 11 as described above, and the male screw portion 142 on the distal end side is connected to the nozzle 12. Fastened to the internal thread 151 of the nut 15 attached to the base end. The central portion 143 of the joint 14 has substantially the same outer diameter as the distal end portion 116 of the main body 11, and when these are integrated with the main body 11 through screwing of the male screw portion 141 and the female screw portion 117, Are made to be substantially the same plane. Further, the inner diameter on the distal end side of the joint 14 is slightly larger than the inner diameter on the proximal end side and is substantially the same as the outer diameter of the proximal end portion of the nozzle 12, and has a step 144.

  The joint cover 16 is a cylindrical member for covering the joint portion between the main body 11 and the nozzle 12, and has an inner diameter substantially the same as the outer diameter of the main body tip portion 116 and the joint central portion 143. The tip has an inner diameter substantially the same as the outer diameter of the nut 15, and thus a step 161 is formed between them. The male screw portion 141 of the joint 14 is fastened to the female screw portion 117 on the distal end side of the main body 11, and the male screw portion 142 is fastened to the nut 15 attached to the base end portion of the nozzle 12, thereby causing the nozzle 12 to move to the front end of the main body 11. The joint cover 16 is engaged with a step 118 formed on the outer peripheral surface of the front end of the main body 11 on the base end side, while the nut 15 is fitted to the step 161 on the front end side. As a result, the axial movement is restricted and held in a fixed position.

  The quartz glass burner 10 is assembled by attaching the joint 14 to the main body 11 by fastening the male screw part 141 on the proximal end side of the joint 14 to the female thread part 117 at the tip of the main body 11, and then on the joint 14. Cover the joint cover 16, pass the nut 15 and the sleeve 13 from the base end side of the nozzle 12, and then insert the base end portion of the nozzle 12 to the tip end side of the joint 14 until it hits the step 144. In this state, the nut 15 is inserted into the joint 14. Are fastened to the female thread portion 142 on the tip side of the. Thereby, the nozzle 12 is integrally attached to the main body 11, and the quartz glass burner 10 is obtained.

  When replacing the damaged nozzle 12 with a new nozzle or a nozzle with a different diameter, loosen the nut 15 and remove it from the joint 14 to release the nozzle 12 from the main body 11 and remove the nut 15 and the sleeve 13. After changing to the nozzle 12 to be newly attached, the nozzle 12 is attached to the main body 11 by tightening the nut 15 in the same manner as described above. In this way, the nozzle 12 can be attached to and detached from the main body 11.

  This quartz glass burner 10 uses a resin joint 13 in a connecting structure for detachably attaching the nozzle 12 to the main body 11, and fastens the male screw portion 131 of the joint 13 to the female screw portion 117 on the distal end side of the main body 11. At the same time, the male thread 142 of the joint 13 is fastened to the female thread 151 of the nut 15 attached to the nozzle 12. That is, in any case, since the connection structure in which the screw is fastened with quartz and the resin is adopted, the connection having high fitting property is realized through the plastic deformation of the resin.

1 is an overall cross-sectional view of a quartz glass burner according to an embodiment of the present invention. It is an expanded sectional view which shows the connection structure of the main body and nozzle of this quartz glass burner.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Quartz glass burner 11 Main body 111 Hydrogen introduction pipe 112 Oxygen introduction pipe 113,114 Stabilization 115 Outer pipe 116 Tip part 117 Female thread part 118 Step 12 Nozzle 121 Fire point 122 Base end part 13 Sleeve 14 Joint 141 Base end side Male thread part 142 Male thread part on the tip side 143 Central part 144 Step 15 Nut 16 Joint cover 161 Step

Claims (3)

A quartz glass body having a female threaded portion on the distal end side, a quartz glass nozzle, a joint made of a heat-resistant resin having male threaded portions on the proximal end side and the distal end side, respectively, and a sheath on the proximal end side of the nozzle A quartz glass nut and a resin sleeve that is externally mounted on the base end side of the nozzle and disposed in a state of being in contact with the inner tapered surface of the nut and sandwiched between the joint tips , external thread processing portion of the base end side of the joint is detachably fastened to the female screw processing portion of the distal end side of the body, external thread processing portion of the distal end side of the joint by being detachably fastened to the nut, the nozzle on the tip of the main body The quartz glass burner is characterized in that is detachably mounted. 2. The quartz glass burner according to claim 1, wherein a nut is integrally formed on the base end side of the nozzle. The quartz glass burner according to claim 1 or 2, further comprising a joint cover surrounding a connecting portion between the main body and the nozzle.

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