JP5388538B2 - Gas generator - Google Patents

Description

  The present invention relates to a gas generator that generates gas.

Conventionally, fluorine gas has been used in various applications such as material cleaning and surface modification in semiconductor manufacturing processes and the like. Various fluorine-based gases such as NF ₃ (nitrogen trifluoride) gas, NeF (neon fluoride) gas, and ArF (argon fluoride) gas synthesized based on fluorine gas may be used. May be used.

  In order to stably supply the fluorine gas, for example, a gas generator that generates fluorine gas by electrolyzing HF (hydrogen fluoride) is used.

  The fluorine gas generator shown in Patent Document 1 includes an electrolytic cell, an HF adsorption tower, a buffer tank, and a compressor. An electrolytic bath made of a KF-HF mixed molten salt is formed in the electrolytic cell. HF is supplied to the electrolytic bath, and HF is electrolyzed. Thereby, fluorine gas is generated from the anode of the electrolytic cell. The generated fluorine gas is guided to the HF adsorption tower. In the HF adsorption tower, HF mixed in the fluorine gas is removed.

The high purity fluorine gas thus obtained is stored in a buffer tank. The pressure in the buffer tank is adjusted by a compressor. Then, fluorine gas is supplied from the buffer tank as necessary.
JP 2004-107761 A

  In the fluorine gas generator as described above, a bellows pump including a metal bellows is generally used as a compressor. When the bellows pump is operated, the bellows is driven by the motor to expand and contract. Thereby, the fluorine gas in the buffer tank is compressed.

  However, if the bellows pump is continuously used, the bellows is worn and particles are generated, and the particles are mixed in the fluorine gas as impurities. Thereby, the purity of the fluorine gas is lowered, and the processing capacity is lowered in various applications.

  An object of the present invention is to provide a gas generator in which a decrease in gas purity due to generation of particles is prevented.

The gas generation device according to the present invention includes a gas generation unit that generates gas, a gas storage unit that stores gas generated by the gas generation unit, and a gas that compresses and sends the gas generated by the gas generation unit to the gas storage unit A compression conveyance unit, and a gas compression conveyance unit is formed inside the bellows so as to rotate at a predetermined speed, a bellows that expands and contracts as the motor rotates, and compresses and expands as the bellows expands and contracts. A gas compression chamber having a gas inlet for introducing gas and a gas outlet for deriving gas, and suppressing the expansion and contraction of the bellows by reducing the rotational speed of the motor and transmitting it to the bellows, By reducing the generation of particles due to wear of the bellows, it is configured to prevent a decrease in gas purity due to mixing of particles into the gas sent to the gas reservoir. And those having an angular speed transmission unit.

  In the gas generating device, the gas generated by the gas generating unit is compressed and sent to the gas storage unit by the gas compressing and conveying unit. The gas is stored in the gas storage unit. The gas stored in the gas storage unit is supplied to the outside as necessary.

  In the gas compression conveyance unit, the rotation of the motor is transmitted to the bellows via the rotational speed transmission unit, whereby the bellows expands and contracts, and the gas compression chamber formed inside the bellows compresses and expands. Thereby, the gas is introduced into the gas compression chamber through the gas introduction port, the gas is led out from the gas compression chamber through the gas outlet port, and the gas is conveyed.

  In this case, the rotation speed transmission unit reduces the rotation speed of the motor and transmits it to the bellows. Therefore, the expansion / contraction operation of the bellows is suppressed. Thereby, generation | occurrence | production of the particle by abrasion of a bellows is suppressed. Therefore, the fall of the purity of the gas sent to a gas storage part is prevented.

  Further, as compared with the case where the rotational speed of the motor is directly adjusted, it is possible to easily suppress the expansion / contraction operation of the bellows with a simple configuration, and it is possible to suppress the occurrence of malfunction of the motor.

Rotating speed transmission unit may be decreased below a rotational 1000 per minute per 100 revolutions or the rotation speed of the motor.

  In this case, generation | occurrence | production of the particle | grains by abrasion of a bellows can fully be suppressed, maintaining the supply pressure of the gas to a gas storage part appropriately.

The gas generation device according to the reference mode includes a gas generation unit that generates gas, a gas storage unit that stores gas generated by the gas generation unit, and a gas that compresses and sends the gas generated by the gas generation unit to the gas storage unit A compression conveyance unit, and the gas compression conveyance unit is formed inside the bellows so as to be compressed and expanded as the bellows expands and contracts, and for introducing gas. It has a gas compression chamber having a gas inlet and a gas outlet for extracting gas, and an inverter that rotates the motor at a rotational speed lower than the rated rotational speed of the motor.

  In the gas generating device, the gas generated by the gas generating unit is compressed and sent to the gas storage unit by the gas compressing and conveying unit. The gas is stored in the gas storage unit. The gas stored in the gas storage unit is supplied to the outside as necessary.

  In the gas compression transport unit, the gas compression chamber formed inside the bellows is compressed and expanded by the bellows being expanded and contracted by the motor. Thereby, the gas is introduced into the gas compression chamber through the gas introduction port, the gas is led out from the gas compression chamber through the gas outlet port, and the gas is conveyed.

  In this case, the motor rotates at a rotational speed lower than the rated rotational speed by the inverter. Therefore, the expansion / contraction operation of the bellows is suppressed. Thereby, generation | occurrence | production of the particle by abrasion of a bellows is suppressed. Therefore, the fall of the purity of the gas sent to a gas storage part is prevented.

Inverter may be rotated below the rotation 1000 min per 100 or more revolutions of the motor.

  In this case, generation | occurrence | production of the particle | grains by abrasion of a bellows can fully be suppressed, maintaining the supply pressure of the gas to a gas storage part appropriately.

Pneumatic fluid generator is fluorine may be allowed to occur by electrolyzing a mixed molten salt containing hydrogen fluoride.

  In this case, the purity of the generated fluorine can be kept high. Thereby, fluorine can be effectively used in various applications.

Pneumatic fluid generating apparatus may further comprise a fluoride removal unit for removing hydrogen fluoride from the generated gas by the gas generator. In this case, higher purity fluorine can be obtained.

  According to the present invention, generation of particles due to wear of the bellows is suppressed. Thereby, the fall of the purity of the gas sent to a gas storage part is prevented.

  Hereinafter, a gas generator according to an embodiment of the present invention will be described with reference to the drawings. In the following embodiments, a fluorine gas generator that generates fluorine gas will be described as an example of a gas generator.

(1) 1st Embodiment (1-1) Fluorine gas generator FIG. 1: is a schematic diagram which shows the structure of the fluorine gas generator which concerns on 1st Embodiment. As shown in FIG. 1, the fluorine gas generator 1 includes a housing 100. The interior of the housing 100 is partitioned into a first processing chamber 101, a second processing chamber 102, and a third processing chamber 103.

  A partition 104 is provided between the first processing chamber 101 and the second processing chamber 102, and a partition 105 is provided between the second processing chamber and the third processing chamber. The partition 104 blocks the atmosphere between the first processing chamber 101 and the second processing chamber 102, and the partition 105 blocks the atmosphere between the first processing chamber 101 and the third processing chamber 103.

  An electrolytic cell 10 is accommodated in the first processing chamber 101. The electrolytic cell 10 is made of, for example, a metal or alloy such as Ni (nickel), monel, pure iron, or stainless steel. An electrolytic bath 11 made of a KF-HF mixed molten salt is formed in the electrolytic bath 10. A cylindrical partition wall 12 is arranged so as to be partially immersed in the electrolytic bath 11. The partition wall 12 is made of, for example, Ni or Monel. An anode chamber 10 a is formed inside the partition wall 12, and a cathode chamber 10 b is formed outside the partition wall 12.

  An anode 13 is disposed in a region of the electrolytic bath 11 in the anode chamber 10a, and a cathode 14 is disposed in a region of the cathode chamber 10b. Fluorine gas is mainly generated in the anode chamber 10a, and hydrogen gas is mainly generated in the cathode chamber 10b. As the anode 13, it is preferable to use a low polarizable carbon electrode. For example, Ni is preferably used as the cathode 14.

  Gas discharge ports 15 and 16 are provided in the upper part of the electrolytic cell 10. The gas discharge port 15 communicates with the anode chamber 10a, and the gas discharge port 16 communicates with the cathode chamber 10b. The gas generated in the anode chamber 10 a is discharged through the gas discharge port 15, and the gas generated in the cathode chamber 10 b is discharged through the gas discharge port 16. An exhaust pipe 15 a is connected to the gas exhaust port 15, and an exhaust pipe 16 a is connected to the gas exhaust port 16.

  A hot water jacket 20 a is attached so as to cover the outer surface of the electrolytic cell 10. Hot water heated by the hot water heating device 20 is supplied to the hot water jacket 20a. Thereby, the temperature of the electrolytic bath 11 is maintained at a value suitable for the electrolysis of HF.

  An HF supply line 17 for supplying HF (hydrogen fluoride) is connected to the electrolytic cell 10. The HF supply line 17 is covered with a temperature adjusting heater 17a. This prevents HF from being liquefied in the HF supply line 17. The height of the liquid level of the electrolytic bath 11 is detected by liquid level detection means (not shown). When the detected liquid level is lower than a predetermined value, HF is supplied into the electrolytic cell 10 through the HF supply line 17. The internal pressure in the anode chamber 10a is detected by the pressure gauge 18a, and the internal pressure in the cathode chamber 10b is detected by the pressure gauge 18b.

  In the second processing chamber 102, a plurality (two in FIG. 1) of HF adsorption towers 30 are arranged in parallel. An exhaust pipe 16 a extending from the gas discharge port 16 of the electrolytic cell 10 branches into a plurality of exhaust pipes 16 b and is connected to one end portions of the plurality of HF adsorption towers 30. The gas discharged from the gas discharge port 16 (cathode chamber 10b) of the electrolytic cell 10 is guided to the HF adsorption tower 30 through the exhaust pipes 16a and 16b.

  Each HF adsorption tower 30 is filled with, for example, soda lime. The gas discharged from the gas discharge port 16 (cathode chamber 10b) of the electrolytic cell 10 is mainly hydrogen gas, in which highly corrosive HF is mixed. The HF is removed by adsorption in the HF adsorption tower 30. In addition, as a material of each HF adsorption tower 30, it is preferable to use the material which has corrosion resistance with respect to fluorine gas and HF. Examples of such a material include stainless steel, monel, Ni, fluorine resin, and the like.

  An open / close valve V1, a piezo valve PV1, and a vacuum generator 31 are inserted into the exhaust pipe 16a in this order from the electrolytic cell 10 side. Each exhaust pipe 16b has an open / close valve V2.

  By opening the on-off valve V1, the gas discharged from the gas discharge port 16 of the electrolytic cell 10 is guided to the HF adsorption tower 30. The vacuum generator 31 depressurizes the exhaust pipe 16a using the ejector effect. The piezo valve PV <b> 1 operates so that the pressure in the exhaust pipe 16 a is maintained within a predetermined range and a malfunction due to the reduced pressure in the exhaust pipe 16 a does not occur in the electrolytic cell 10.

  By opening one or more of the plurality of on-off valves V2, the gas discharged from the gas outlet 16 of the electrolytic cell 10 is selectively guided to the corresponding HF adsorption tower 30. For example, when the filler (soda lime) is exchanged in one HF adsorption tower 30, the use of the HF adsorption tower 30 is temporarily stopped. In this case, the other HF adsorption tower 30 can be used continuously.

  An exhaust pipe 32 a is connected to the other end of each HF adsorption tower 30. An open / close valve V3 is inserted in each exhaust pipe 32a. The plurality of exhaust pipes 32 a merge with each other and extend outside the housing 100. The gas (hydrogen gas) from which HF has been removed by passing through the HF adsorption tower 30 is discharged to the outside through the exhaust pipe 32a.

  In the third processing chamber 103, a plurality of HF adsorption towers 40 are arranged in parallel. The third processing chamber 103 houses a pressure adjusting tank 50, a compressor 60, and a buffer tank 80. An exhaust pipe 15 a extending from the gas discharge port 15 of the electrolytic cell 10 branches into a plurality of exhaust pipes 15 b and is connected to one end portions of the plurality of HF adsorption towers 40. The gas discharged from the gas discharge port 15 (anode chamber 10a) of the electrolytic cell 10 is guided to the HF adsorption tower 40 through the exhaust pipes 15a and 15b.

  Each HF adsorption tower 40 is filled with, for example, NaF (sodium fluoride). The gas discharged from the gas discharge port 15 (anode chamber 10a) of the electrolytic cell 10 is mainly fluorine gas, and HF is mixed therein. The HF is removed by adsorption in the HF adsorption tower 40. Thereby, high purity fluorine gas is obtained. In addition, as a material of each HF adsorption tower 40, it is preferable that the material which has corrosion resistance with respect to fluorine gas and HF similarly to said HF adsorption tower 30 is used.

  An open / close valve V4 and a piezo valve PV2 are inserted in the exhaust pipe 15a in this order from the electrolytic cell 10 side. In addition, an open / close valve V5 is inserted in each exhaust pipe 15b.

  By opening the on-off valve V4, the gas discharged from the gas outlet 15 of the electrolytic cell 10 is guided to the HF adsorption tower 40. The piezo valve PV2 operates so as to maintain the pressure in the exhaust pipe 15a within a predetermined range. Further, by opening one or more of the plurality of on-off valves V5, the gas discharged from the gas discharge port 16 of the electrolytic cell 10 is selectively guided to the corresponding HF adsorption tower 30.

  An exhaust pipe 41 a is connected to the other end of each HF adsorption tower 40. The plurality of exhaust pipes 41a merge with the exhaust pipe 41b. An open / close valve V6 is inserted in each exhaust pipe 41a, and a piezo valve PV3 is inserted in the exhaust pipe 41b. The piezo valve PV3 operates to maintain the pressure in the exhaust pipe 41b within a predetermined range.

  The exhaust pipe 41 b is connected to the pressure adjusting tank 50. By opening the on-off valve V6, high-purity fluorine gas discharged from the HF adsorption tower 40 is guided to the pressure adjusting tank 50.

  The pressure adjusting tank 50 is connected to the compressor 60 via a supply pipe 42a. The compressor 60 is connected to the buffer tank 80 via the supply pipe 42b. An open / close valve V8 is inserted in the supply pipe 42a, and an open / close valve V9 is inserted in the supply pipe 42b. When the on-off valves V8 and V9 are opened, the fluorine gas in the pressure adjusting tank 50 is sent to the buffer tank 80 by the compressor 60 and stored.

  A supply pipe 43 extends from the buffer tank 80 to the outside of the housing 100. An open / close valve V10 is inserted in the supply pipe 43. By opening the opening / closing valve V <b> 10, the fluorine gas stored in the buffer tank 80 is supplied to the outside of the housing 100.

(1-2) Compressor The compressor 60 in the present embodiment includes a pressurizing pump (hereinafter, referred to as a bellows pump) 61 including a metal bellows and a ball speed reducer 62.

  FIG. 2 is a schematic side view showing an example of a specific configuration of the compressor 60. As shown in FIG. 2, the bellows pump 61 includes a motor 70 and a head portion 71.

  A bellows 72 made of metal (for example, stainless steel) is accommodated in the head portion 71. A gas compression chamber 73 is formed in the bellows 72. A gas inlet 74 a and a gas outlet 74 b for introducing and discharging gas into the gas compression chamber 73 are provided at the top of the head portion 71.

The supply pipe 42a is connected to the gas inlet 74a, and the supply pipe 42b is connected to the gas outlet 74b. Fluorine gas is introduced into the gas compression chamber 73 from the supply pipe 42a through the gas inlet 74a, and is discharged from the gas compression chamber 73 through the gas outlet 74b to the supply pipe 42b.

  By operating the motor 70, the bellows 72 expands and contracts. Thereby, the gas compression chamber 73 is compressed and expanded, and the fluorine gas is sent out from the gas inlet 74a to the gas outlet 74a.

  A ball speed reducer 62 is attached between the motor 70 of the bellows pump 61 and the head portion 71. The ball reducer 62 reduces the rotational speed of the motor 70 at a predetermined reduction ratio and transmits it to the bellows 72 in the head portion 71. Thereby, the expansion / contraction speed of the bellows 72 decreases.

  Normally, when the bellows pump 61 is used, the rotational speed of the motor 70 is set high in order to send out the fluorine gas efficiently. However, in that case, the bellows 72 is worn by the expansion and contraction operation, and a large amount of particles are generated. The particles are mixed into the fluorine gas as impurities, and the purity of the fluorine gas sent to the buffer tank 80 is lowered.

  Therefore, by attaching the ball speed reducer 62 to the bellows pump 61, the rotational speed transmitted to the bellows 72 is reduced, and the expansion / contraction operation of the bellows 72 is suppressed. Thereby, the generation amount of particles can be reduced. Further, noise during operation of the bellows pump 61 is reduced. Furthermore, the supply pressure of fluorine gas to the buffer tank 80 can be appropriately maintained by appropriately adjusting the reduction ratio by the ball reducer 62.

  In addition, the expansion and contraction operation of the bellows 72 can be easily suppressed with a simple configuration as compared with the case where the rotational speed of the motor 70 is directly adjusted, and the occurrence of malfunction of the motor 70 can be suppressed.

  The rotation speed transmitted to the bellows 72 is preferably 100 rpm or more and 1000 rpm or less, and more preferably 150 rpm or more and 500 rpm or less. That is, it is preferable to set the number of expansion / contraction times (frequency of expansion / contraction) of the bellows 72 to 100 [times / min] (100 Hz) or more and 1000 [times / min] (1000 Hz) or less, and 150 [times / min]. It is more preferable to set it to (150 Hz) or more and 500 [times / minute] (500 Hz) or less.

  When the rotation speed transmitted to the bellows 72 is 100 rpm or more, the supply pressure of the fluorine gas to the buffer tank 80 can be appropriately maintained. Moreover, generation | occurrence | production of a particle can fully be suppressed because the rotational speed transmitted to the bellows 72 is 1000 rpm or less.

(1-3) Examples and Comparative Examples The bellows pump 61 was operated under various conditions, and the generation amount of particles and other characteristics were examined. Table 1 shows the conditions of the bellows pumps 61 of Examples 1 to 4 and Comparative Examples 1 and 2 and various measurement results. In the following description, the motor output refers to the power of the motor 70 itself, and the motor rotation speed refers to the rotation speed transmitted from the motor 70 to the bellows 72, that is, the ball reducer 62 is attached. In this case, it means the rotational speed decelerated by the ball reducer 62.

(1-3-1) Examples 1-4
In Examples 1-4, the bellows pump 61 to which the ball speed reducer 62 was attached was used. The motor output of the bellows pump 61 of Examples 1 to 4 was 65W. The rotation speed of the motor 70 is constant at 1600 rpm. By changing the reduction ratio by the ball reducer 62, the motor rotation speed of the bellows pump 61 was set to 16 rpm, 50 rpm, 160 rpm, and 400 rpm in Examples 1 to 4, respectively.

(1-3-2) Comparative examples 1 and 2
In Comparative Examples 1 and 2, the bellows pump 61 to which the ball reducer 62 is not attached is used. The motor output of the bellows pump 61 of Comparative Example 1 was 65 W, and the motor output of the bellows pump 61 of Comparative Example 2 was 380 W. The motor rotation speed of the bellows pump 61 of Comparative Example 1 was 1600 rpm, and the motor rotation speed of the bellows pump 61 of Comparative Example 2 was 3450 rpm.

(1-3-3) Evaluation FIG. 3 is a diagram for explaining a method of measuring the generation amount of particles. As shown in FIG. 3, nitrogen gas is introduced into the bellows pump 61 of Examples 1 to 4 or Comparative Examples 1 and 2 at 20 L / min, and the gas derived from the bellows pump 61 is particle counter at 0.5 L / min. 81. Table 1 shows the average number of particles contained in 1 cubic foot (about 28.3 L) of gas.

  As a result, in Examples 1 to 4, the amount of particles generated was significantly smaller than those in Comparative Examples 1 and 2. Thus, it was found that the amount of particles generated was greatly reduced by using the bellows pump 61 to which the ball speed reducer 62 was attached.

  Further, the maximum gas pressure increase capability (the maximum value of the gas supply pressure to the buffer tank 80) by the bellows pump 61 of Examples 1 to 4 and Comparative Examples 1 and 2 was examined. In the above-described fluorine gas generator 1, the generally required fluorine gas supply pressure is about 150 kPa.

  In Examples 3 and 4, high maximum pressure boosting capabilities of 250 kPa and 300 kPa were obtained, and the conditions required for the fluorine gas generator 1 were satisfied. On the other hand, in Examples 1 and 2, the maximum boosting capability was lower than those in Examples 3 and 4 at 100 kPa and 40 kPa.

  Moreover, the gas conveyance amount by Examples 1-4 and the bellows pump 61 of Comparative Examples 1 and 2 was investigated. The gas supply pressure was set to 150 kPa common in Examples 1 to 4 and Comparative Examples 1 and 2. In the above-described fluorine gas generator 1, the generally required amount of fluorine gas transported is about 400 cc / min.

  In Examples 3 and 4, a sufficient amount of gas of 1000 cc / min and 3000 cc / min could be conveyed, and the conditions required for the fluorine gas generator 1 were satisfied. On the other hand, in Examples 1 and 2, the amount of gas transported was 300 cc / min and 100 cc / min, which was smaller than Examples 3 and 4.

  Moreover, the lifetime of the bellows 72 of the bellows pump 61 of Examples 1-4 and Comparative Examples 1 and 2 was investigated. As a result, in the bellows pump 61 of Examples 1 to 4, since the bellows 72 was not easily worn, it could be used for a long period of 8000 to 1200 hours. On the other hand, in the bellows pump 61 of Comparative Examples 1 and 2, since the bellows 72 was easily worn, it could only be used for a short period of 4000 hours.

(2) Reference form
About the fluorine gas generator 1 which concerns on a reference form, a different point from the fluorine gas generator 1 which concerns on the said 1st Embodiment is demonstrated. The fluorine gas generator 1 according to the reference embodiment includes a compressor shown in FIG. 4 instead of the compressor 60 shown in FIG.

FIG. 4 is a schematic side view showing the configuration of the compressor in the reference embodiment. The compressor 60 a in FIG. 4 includes an inverter circuit 65 instead of the ball reducer 62. The rotational speed of the motor 70 is directly transmitted to the bellows 72 of the head portion 71. The inverter circuit 65 is connected to the motor 70 and controls the rotation speed of the motor 70. In this case, the inverter circuit 65 adjusts the rotational speed of the motor 70 to be lower than the rated rotational speed.

  Thereby, the expansion-contraction operation | movement of the bellows 72 is suppressed. Thereby, the generation amount of particles can be reduced. Further, noise during operation of the bellows pump 61 is reduced. Furthermore, by appropriately adjusting the rotation speed of the motor 70, the supply pressure of the fluorine gas to the buffer tank 80 can be appropriately maintained.

  The rotation speed of the motor 70 is preferably adjusted to 100 rpm or more and 1000 rpm or less, and more preferably 150 rpm or more and 500 rpm or less. That is, it is preferable to set the number of expansion / contraction times (frequency of expansion / contraction) of the bellows 72 to 100 [times / min] (100 Hz) or more and 1000 [times / min] (1000 Hz) or less, and 150 [times / min]. It is more preferable to set it to (150 Hz) or more and 500 [times / minute] (500 Hz) or less.

  In this case, when the rotation speed of the motor 70 is 100 rpm or more, the supply pressure of the fluorine gas to the buffer tank 80 can be appropriately maintained. Moreover, generation | occurrence | production of a particle can fully be suppressed because the rotational speed of the motor 70 is 1000 rpm or less.

(3) Correspondence between each constituent element of claims and each element of the embodiment Hereinafter, an example of correspondence between each constituent element of the claims and each element of the embodiment will be described. It is not limited to.

  In the above embodiment, the electrolytic cell 10 is an example of a gas generation unit, the buffer tank 80 is an example of a gas storage unit, the compressor 60 is an example of a gas compression conveyance unit, and the ball speed reducer 62 transmits a rotational speed. The inverter circuit 65 is an example of an inverter, and the HF adsorption tower 40 is an example of a hydrogen fluoride removing unit.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used in semiconductor manufacturing processes and the like.

It is a typical side view showing the composition of the fluorine gas generating device concerning a 1st embodiment. It is a typical side view which shows an example of the specific structure of a compressor. It is a figure for demonstrating the measuring method of the generation amount of a particle. It is a typical side view which shows the structure of the compressor in a reference form.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fluorine gas generator 10 Electrolysis tank 42a Supply pipe 60 Compressor 61 Bellows pump 62 Ball reducer 65 Inverter circuit 70 Motor 71 Head part 73 Gas compression chamber 74a Gas inlet 74b Gas outlet 100 Case 101 First treatment chamber 102 First 2 treatment chamber 103 3rd treatment chamber

Claims (4)

A gas generating section for generating gas;
A gas storage unit for storing the gas generated by the gas generation unit;
A gas compression transport unit that compresses and sends the gas generated by the gas generation unit to the gas storage unit,
The gas compression transport unit is
A motor that rotates at a predetermined speed;
A bellows that expands and contracts as the motor rotates;
A gas compression chamber which is formed inside the bellows so as to be compressed and expanded as the bellows expands and contracts, and which has a gas inlet for introducing gas and a gas outlet for extracting gas;
Particles to the gas sent to the gas storage unit by suppressing the expansion and contraction of the bellows by reducing the rotational speed of the motor and transmitting it to the bellows, and reducing the generation of particles due to wear of the bellows And a rotation speed transmission unit configured to prevent a decrease in purity of the gas due to mixing of the gas . The gas generator according to claim 1, wherein the rotation speed transmission unit decelerates the rotation speed of the motor from 100 to 1000 rotations per minute. The gas generator comprises a gas generator according to any of claims 1 or 2, characterized in that to generate fluorine by electrolyzing the molten salt mixture containing hydrogen fluoride. The gas generator according to claim 3 , further comprising a hydrogen fluoride removing unit that removes hydrogen fluoride from the gas generated by the gas generating unit.

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