JP5389058B2

JP5389058B2 - Vacuum valve

Info

Publication number: JP5389058B2
Application number: JP2011001877A
Authority: JP
Inventors: 俊則木村; 満月間
Original assignee: Mitsubishi Electric Corp
Current assignee: Mitsubishi Electric Corp
Priority date: 2011-01-07
Filing date: 2011-01-07
Publication date: 2014-01-15
Anticipated expiration: 2031-01-07
Also published as: JP2012146407A

Description

この発明は、真空遮断器に組み込まれる真空バルブに関するもので、特に伸縮ベローズの開閉寿命に対する信頼性を高めた真空バルブに関するものである。 The present invention relates to a vacuum valve incorporated in a vacuum circuit breaker, and more particularly to a vacuum valve with improved reliability with respect to the open / close life of an expandable bellows.

近年、真空バルブはより高い定格電圧へ適用が拡大されており、耐電圧性能確保のため開極距離が大きくなると共に、真空バルブの周囲のガス圧が高くなり、さらに短絡遮断や進み小電流遮断性能の確保のために開極スピードも大きくなるという傾向にある。このため、ベローズは全長が長くなり、さらに内と外との圧力差が大きくなり座屈しやすくなっている。
特許文献１では可動電極棒にフッ素樹脂からなる樹脂被覆部を設け、ベローズが横ずれして座屈が生じるのをこの樹脂被覆で抑えて防止している（特許文献１の第１図）。 In recent years, the application of vacuum valves to higher rated voltages has been expanded, the opening distance has been increased to ensure withstand voltage performance, the gas pressure around the vacuum valve has increased, and further short circuit interruption and advanced small current interruption In order to ensure performance, the opening speed tends to increase. For this reason, the bellows has a long overall length, and further, the pressure difference between the inside and the outside becomes large, which makes it easy to buckle.
In Patent Document 1, a resin coating portion made of a fluororesin is provided on the movable electrode rod, and the bellows are laterally displaced and buckling is prevented by this resin coating (FIG. 1 of Patent Document 1).

特許文献２では、ベローズと可動ロッドの間に多孔質弾性材料で製作された自己振動抑制部材が設けられている（特許文献２の図２）。自己振動抑制部材とベローズの１つの襞との間に形成される空間が伸縮ベローズの自己振動により容積変化し、これに対応して空気の吸入・排出が発生するが、多孔質弾性材料である自己振動抑制部材が負荷として作用し空気の吸入・排出を制限する。その結果、ベローズの自己振動が減衰し座屈を抑制している。 In Patent Document 2, a self-vibration suppressing member made of a porous elastic material is provided between the bellows and the movable rod (FIG. 2 of Patent Document 2). The space formed between the self-vibration suppressing member and the single flange of the bellows changes in volume due to the self-vibration of the telescopic bellows, and air is sucked and discharged in response to this, but it is a porous elastic material The self-vibration suppressing member acts as a load and restricts the intake and discharge of air. As a result, the self-vibration of the bellows is attenuated to suppress buckling.

実開昭６２−３７８４８号公報Japanese Utility Model Publication No. 62-37848 特開平７−１７６２４２号公報Japanese Patent Laid-Open No. 7-176242

従来の座屈防止部品は、真空バルブをロウ付けにて形成した後に組み込まれる。
この時、可動側電極棒はベローズによって真空バルブ本体に接続されているだけであり、また、大気圧によって可動電極を固定電極に押し付ける力が作用している。したがって、冶具による大きな力で可動電極棒を引き出した状態で、座屈防止冶具の位置決め、及び取り付け状況の確認を行う必要がある。また、可動電極棒とベローズ間の空間が狭いため作業性が悪い。
さらに、ベローズと可動側電極棒の間の隙間が座屈防止部品を組み込むのにちょうど良いとは限らず、隙間が大きすぎる場合は、座屈防止部品のために電極棒を無駄に太くする必要がある。一方、隙間が小さい場合は、スペース確保のためベローズを大きくする必要があり、その結果、真空バルブの径も大きくなってしまうということが生じる。 Conventional buckling prevention parts are assembled after the vacuum valve is formed by brazing.
At this time, the movable electrode rod is only connected to the vacuum valve main body by the bellows, and a force pressing the movable electrode against the fixed electrode is applied by atmospheric pressure. Therefore, it is necessary to confirm the positioning of the buckling prevention jig and the installation state in a state where the movable electrode bar is pulled out with a large force by the jig. In addition, workability is poor because the space between the movable electrode rod and the bellows is narrow.
In addition, the gap between the bellows and the movable electrode rod is not always good for incorporating a buckling prevention part, and if the gap is too large, the electrode bar must be made uselessly thick for the buckling prevention part. There is. On the other hand, when the gap is small, it is necessary to increase the bellows in order to secure the space, and as a result, the diameter of the vacuum valve also increases.

座屈対策としてベローズを外圧式（内側が真空で外側がガス）とすることが有効である。
しかし、真空バルブの定格電圧が高くなると、開極距離の増大のためにベローズが長くなり、さらに、開極スピードの増加によって、開極時の衝撃で伸縮ベローズ自身に発生する振動のエネルギーが増大すると、最大振幅部に局部的な応力が発生するためベローズの寿命が短くなるという問題がある。
また、真空バルブの周囲の絶縁ガスの圧力を上げて沿面耐圧を向上させ、遮断器の小型化を図ろうとすると、ベローズ内外の圧力差も大きくなって応力はいっそう増大し、ベローズの局所的な変形から座屈へと発展してしまう。
外圧式伸縮ベローズに対して、従来技術のようにベローズの内径側の可動電極棒に樹脂を設けようとすると、ロウ付け前に仕込んでおく必要があるが、樹脂はロウ付けの温度に耐えられないので適用できない。 As a countermeasure against buckling, it is effective to use an external pressure type bellows (a vacuum on the inside and a gas on the outside).
However, when the rated voltage of the vacuum valve increases, the bellows becomes longer due to the increase in the opening distance, and further, the energy of vibration generated in the telescopic bellows itself due to the impact at the time of opening increases due to the increase in the opening speed. As a result, local stress is generated in the maximum amplitude portion, so that there is a problem that the life of the bellows is shortened.
In addition, if the pressure of the insulating gas around the vacuum valve is increased to improve the creeping pressure resistance and the circuit breaker is downsized, the pressure difference between the inside and outside of the bellows increases and the stress further increases. It develops from deformation to buckling.
For external pressure expansion / contraction bellows, if resin is provided on the movable electrode rod on the inner diameter side of the bellows as in the prior art, it is necessary to prepare the resin before brazing, but the resin can withstand the brazing temperature. Not applicable.

ベローズは、非常に薄い金属でできているため磨耗に弱く、さらに、小さなゴミなどの粒子がベローズと座屈防止部品との間に入り込んでも傷の元となる。したがって、座屈防止部品とベローズが直接接触した状態で滑る構造は、伸縮ベローズの寿命を短くする危険がある。 Since the bellows is made of a very thin metal, it is not easily worn, and even if particles such as small dust enter between the bellows and the buckling prevention part, they can be a source of scratches. Therefore, a structure that slides in a state where the buckling prevention component and the bellows are in direct contact with each other has a risk of shortening the life of the telescopic bellows.

この発明は、このような問題点を解決するためになされたもので、開閉時の衝撃でベローズに発生する振動エネルギーを散逸させて伸縮ベローズの応力緩和を図ることで長寿命のベローズを得て、真空バルブの信頼性を向上させることを目的とする。 The present invention has been made to solve such problems, and obtains a long-life bellows by dissipating vibration energy generated in the bellows by an impact at the time of opening and closing to reduce the stress of the expandable bellows. The purpose is to improve the reliability of the vacuum valve.

この発明に係わる真空バルブは、密封された絶縁筒状真空容器内に、内端部に固定側電極を有し上記真空容器外に気密に貫通された固定側電極棒、及びこの固定側電極と接離可能な可動側電極を内端部に有し伸縮ベローズを介し上記真空容器外に気密に貫通されると共に伸縮ベローズの蛇腹部で進退自在になされた可動側電極棒を備えた真空バルブであって、上記伸縮ベローズに、上記蛇腹部を常に覆うと共にこの蛇腹部の山部に摺接する保持部材、及び上記蛇腹部の谷部に嵌め込み固定され、上記蛇腹部の伸縮動作時に上記保持部材の内周面を摺動する摺動部材を設け、上記保持部材は、上記伸縮ベローズの両端部に互いに対向して配置された第１円筒体部と第２円筒体部とで構成され、上記伸縮ベローズ内端側の第１円筒体部は、上記伸縮ベローズと共に上記真空容器側に固定され、上記伸縮ベローズ外端側の第２円筒体部は、上記伸縮ベローズと共に上記可動側電極棒に装着され進退可能にしたものである。 A vacuum valve according to the present invention includes a fixed-side electrode rod having a fixed-side electrode at an inner end portion thereof and hermetically penetrating outside the vacuum vessel in a sealed insulating cylindrical vacuum vessel, and the fixed-side electrode and A vacuum valve comprising a movable side electrode rod which has a movable side electrode which can be contacted / separated at the inner end portion and is hermetically penetrated to the outside of the vacuum vessel via an expansion / contraction bellows and which can be moved back and forth at the bellows portion of the expansion / contraction bellows. The bellows portion that always covers the bellows portion and is slidably contacted with the peak portion of the bellows portion, and is fitted and fixed to the valley portion of the bellows portion. A sliding member that slides on the inner peripheral surface is provided , and the holding member is composed of a first cylindrical body portion and a second cylindrical body portion that are arranged opposite to each other at both end portions of the expansion / contraction bellows, and the expansion / contraction The first cylindrical part on the inner end side of the bellows Is fixed to the vacuum container side together with the bellows, the second cylindrical body of the expansion bellows outer end side is obtained by the retractable mounted to the movable side electrode rod together with the expansion bellows.

この発明の真空バルブによれば、開閉時の衝撃で伸縮ベローズに発生する振動エネルギーを、摺動部材と保持部材の摩擦で散逸させることにより伸縮ベローズの応力緩和を図ることができ、また、保持部材によって伸縮ベローズが横ずれして座屈が発生するのを防止できるので、伸縮ベローズの寿命が伸び真空バルブの信頼性が向上する。 According to the vacuum valve of the present invention, the stress of the expansion / contraction bellows can be relieved by dissipating the vibration energy generated in the expansion / contraction bellows by the friction at the time of opening and closing by the friction between the sliding member and the holding member. Since it is possible to prevent the expansion / contraction bellows from being laterally displaced and buckling by the member, the life of the expansion / contraction bellows is extended and the reliability of the vacuum valve is improved.

この発明の実施の形態１における真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve in Embodiment 1 of this invention. この発明の実施の形態１における伸縮ベローズ８と保持部材９の部分を示す外面図である。It is an external view which shows the part of the expansion-contraction bellows 8 and the holding member 9 in Embodiment 1 of this invention. この発明の実施の形態１における摺動部材１１と保持部材９の一部を拡大して示す断面図である。It is sectional drawing which expands and shows a part of sliding member 11 and the holding member 9 in Embodiment 1 of this invention. この発明の実施の形態２における真空バルブの摺動部材１１と保持部材９の一部を拡大して示す断面図である。It is sectional drawing which expands and shows a part of sliding member 11 and holding member 9 of the vacuum valve in Embodiment 2 of this invention. この発明の実施の形態３における真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve in Embodiment 3 of this invention.

以下、図面にもとづいて、この発明の各実施の形態を説明する。
なお、各図間において、同一符号は同一あるいは相当部分を示す。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In addition, the same code | symbol shows the same or an equivalent part between each figure.

実施の形態１．
図１はこの発明の実施の形態１による真空バルブを示す断面図で、図２は伸縮ベローズ８と保持部材９の外面図で、伸縮ベローズ８が伸びた状態を示し、図３は摺動部材１１と保持部材９の拡大断面図である。 Embodiment 1 FIG.
1 is a cross-sectional view showing a vacuum valve according to Embodiment 1 of the present invention, FIG. 2 is an external view of the telescopic bellows 8 and the holding member 9, and shows a state in which the telescopic bellows 8 is extended, and FIG. 3 is a sliding member. 11 and an enlarged cross-sectional view of the holding member 9.

まず、絶縁ガスを封入した収納タンク（図示せず）内に並設された真空バルブの全体構成を説明する。
図１に示す真空バルブは、内端部に固定側電極１８ａを有し真空容器外に気密に貫通され
た固定側電極棒３ａ、及びこの固定側電極と接離可能な可動側電極１８ｂを内端部に有し伸縮ベローズ８を介し真空容器外に気密に貫通されると共に伸縮ベローズの蛇腹部８ａで進退自在になされた可動側電極棒３ｂを備えたものである。 First, the overall configuration of vacuum valves arranged in parallel in a storage tank (not shown) filled with an insulating gas will be described.
The vacuum valve shown in FIG. 1 includes a fixed side electrode 18a that has a fixed side electrode 18a at its inner end and is hermetically penetrated to the outside of the vacuum vessel, and a movable side electrode 18b that can be contacted and separated from the fixed side electrode. The movable side electrode rod 3b is provided at the end and hermetically penetrates to the outside of the vacuum vessel via the expansion / contraction bellows 8, and is movable forward and backward at the bellows portion 8a of the expansion / contraction bellows.

以下、図１〜図３にもとづいて詳述する。
円筒形状の絶縁筒２ａ、２ｂの上下両端には、薄い輪状の金属部材であるメタライズ層５が接合されている。絶縁筒２は、絶縁筒２ａ、２ｂの接合部６でアークシールド７を挟み固定する。 Hereinafter, it will be described in detail with reference to FIGS.
Metallized layers 5, which are thin ring-shaped metal members, are joined to the upper and lower ends of the cylindrical insulating cylinders 2 a and 2 b. The insulating tube 2 is fixed with the arc shield 7 sandwiched between the joints 6 of the insulating tubes 2a and 2b.

絶縁筒２ａには、固定側フランジ４を介して固定側端板１ａが固定され、固定側端板１ａの中央には、固定側電極棒３ａが貫通しその先端には固定側接点１８ａが取り付けられている。
メタライズ層５は、薄い金属で端部が尖っているため、セラミック端部は高電界となる。固定側端板１ａには、絶縁筒２ａの上端メタライズ層５の電界緩和のため固定側電界緩和シールド１９を取り付ける。 A fixed-side end plate 1a is fixed to the insulating cylinder 2a via a fixed-side flange 4. A fixed-side electrode rod 3a passes through the center of the fixed-side end plate 1a, and a fixed-side contact 18a is attached to the tip thereof. It has been.
Since the metallized layer 5 is a thin metal and has a sharp end, the ceramic end has a high electric field. A fixed-side electric field relaxation shield 19 is attached to the fixed-side end plate 1a for relaxing the electric field of the upper end metallized layer 5 of the insulating cylinder 2a.

絶縁筒２ｂには、可動側フランジ１２が接合される。可動側フランジ１２は折れまがって段構造を持っており、電界緩和部１２ａは、アークシールド７と絶縁筒２ｂと対向する部分であるので曲率を持たせて電界緩和を図る。
伸縮ベローズカバー１２ｂは、先端が屈曲し屈曲部１２ｃを形成することで、遮断時に接点１８で発生する粒子が伸縮ベローズ８に入り込んで伸縮ベローズを損傷するのを防止する。電界緩和シールド１９は、絶縁筒２ｂの下側メタライズ層５の電界緩和を行う。
伸縮ベローズ８は、上端を後述する保持部材（第１円筒体部９１）を介して可動側フランジ１２に固定し、下端を後述する保持部材（第２円筒体部９２）を介して可動側電極棒３ｂに固定する。 The movable flange 12 is joined to the insulating cylinder 2b. The movable flange 12 is bent and has a stepped structure, and the electric field relaxation portion 12a is a portion facing the arc shield 7 and the insulating cylinder 2b.
The extensible bellows cover 12b is bent at its tip to form a bent portion 12c, thereby preventing particles generated at the contact point 18 from breaking into the extensible bellows 8 and damaging the extensible bellows. The electric field relaxation shield 19 performs electric field relaxation of the lower metallized layer 5 of the insulating cylinder 2b.
The telescopic bellows 8 has an upper end fixed to the movable flange 12 via a holding member (first cylindrical body portion 91) described later, and a lower end connected to a movable side electrode via a holding member (second cylindrical body portion 92) described later. Fix to the rod 3b.

真空バルブ内部の気密性（特に伸縮ベローズの周囲）は、以下の部材をロウ付けによって一体に封止することによって確保している。
すなわち、絶縁筒２ｂと、可動側フランジ１２のフランジ部１２ｄと、電界緩和部１２ａと、伸縮ベローズカバー１２ｂと、支持部９１ａと、伸縮ベローズ８の上端部などの部分がロウ付けによって封止される。さらに、伸縮ベローズ８の下端と、支持部９２ａと、可動側電極棒３ｂの部分も同様にロウ付けされる。
屈曲部１２ｃは、可動側電極棒３ｂとの間に若干の隙間が開いており、可動電極棒３ｂの動作時に接触しないようにする。
伸縮ベローズ８の内部と可動電極棒３ｂとのスペースは、真空に保たれており、屈曲部１２ｃと可動側電極棒３ｂとの間の隙間によって、図面上上部の真空部に通じている。
可動側電極棒３ｂの上端には、可動側接点１８ｂが取り付けられる。
以上の構造により絶縁筒２の内部、伸縮ベローズ８の内部は、高真空に維持される。 The airtightness inside the vacuum valve (especially around the telescopic bellows) is ensured by sealing the following members together by brazing.
That is, the insulating cylinder 2b, the flange portion 12d of the movable flange 12, the electric field relaxation portion 12a, the telescopic bellows cover 12b, the support portion 91a, and the upper end portion of the telescopic bellows 8 are sealed by brazing. The Furthermore, the lower end of the telescopic bellows 8, the support portion 92a, and the movable electrode rod 3b are similarly brazed.
The bent portion 12c has a slight gap between it and the movable electrode rod 3b so that it does not come into contact with the movable electrode rod 3b during operation.
The space between the telescopic bellows 8 and the movable electrode rod 3b is kept in a vacuum, and communicates with the vacuum portion at the upper part of the drawing by a gap between the bent portion 12c and the movable electrode rod 3b.
A movable contact 18b is attached to the upper end of the movable electrode rod 3b.
With the above structure, the inside of the insulating cylinder 2 and the inside of the telescopic bellows 8 are maintained at a high vacuum.

フランジ１７は、下端が可動側端板１ｂに固着され一体となっている。このフランジ１７は、可動側フランジ１２に溶接、あるいは可動側フランジに環状の板（図示されていない）をロウ付けしてねじ止めで固定する。
可動側端板１ｂの中央には、ガイド１４をボルト１５で固定する。これにより、可動側電極棒３ｂは、中心軸が固定され、伸縮ベローズ８の伸縮により上下にスライドするようになる。
フランジ１７と伸縮ベローズ８との間のスペースＳは絶縁ガスで満たされており、可動側端板１ｂには、穴１６が設けられている。
伸縮ベローズ８が縮んでスペースＳの体積が大きくなった時には、この穴１６を通して収納タンク側の絶縁ガスがスペースＳに入り込み、伸縮ベローズ８が伸びてスペースＳの体積が小さくなった時にはこの穴１６を通してスペースＳの絶縁ガスが放出される。
この結果、スペースＳ内の圧力変動が抑制され、伸縮ベローズ８の負担を軽減する。 The lower end of the flange 17 is integrally fixed to the movable side end plate 1b. The flange 17 is fixed to the movable flange 12 by welding or by brazing an annular plate (not shown) to the movable flange and screwing.
A guide 14 is fixed with a bolt 15 at the center of the movable side end plate 1b. Thereby, the central axis of the movable electrode rod 3 b is fixed, and the movable electrode rod 3 b slides up and down by the expansion and contraction of the telescopic bellows 8.
A space S between the flange 17 and the expandable bellows 8 is filled with an insulating gas, and a hole 16 is provided in the movable side end plate 1b.
When the expansion bellows 8 contracts and the volume of the space S increases, the insulating gas on the storage tank side enters the space S through the hole 16, and when the expansion bellows 8 extends and the volume of the space S decreases, the hole 16 Through this, the insulating gas in the space S is released.
As a result, the pressure fluctuation in the space S is suppressed, and the burden on the expansion / contraction bellows 8 is reduced.

通常の通電時は、固定側接点１８ａと可動側接点１８ｂは閉じているが、遮断時には可動側電極棒３ｂが図示されていない機構により高速で引き下げられ開極する。この時、接点間には、アークが発生し接点１８の表面から金属蒸気や粒子が発生する。そこで、金属蒸気を補足するために、接点１８の周囲を覆うように、ＳＵＳ製のアークシールド７が設けられている。 During normal energization, the fixed side contact 18a and the movable side contact 18b are closed, but at the time of interruption, the movable side electrode rod 3b is pulled down at a high speed by a mechanism (not shown) and opened. At this time, an arc is generated between the contacts, and metal vapor and particles are generated from the surface of the contact 18. Therefore, in order to supplement the metal vapor, the SUS arc shield 7 is provided so as to cover the periphery of the contact 18.

次に、実施の形態１における主要部の構成を説明する。
実施の形態１における主要部は、伸縮ベローズの蛇腹部８ａを常に覆うと共にこの蛇腹部の山部８ｂに摺接する保持部材９（９１、９２）、及び蛇腹部８ａの谷部８ｃに嵌め込み固定され、蛇腹部８ａの伸縮動作時に保持部材９（９１、９２）の内周面を摺動する摺動部材１１で構成されている。 Next, the structure of the main part in Embodiment 1 is demonstrated.
The main part in Embodiment 1 is fitted and fixed to the holding member 9 (91, 92) that always covers the bellows part 8a of the expandable bellows and is in sliding contact with the peak part 8b of the bellows part, and the valley part 8c of the bellows part 8a. The sliding member 11 is configured to slide on the inner peripheral surface of the holding member 9 (91, 92) when the bellows portion 8a is expanded and contracted.

伸縮ベローズ８は、外側が絶縁ガス、内側が真空で、このような外圧形態は真空バルブの周囲の絶縁ガスの圧力が高い場合に用いられる。（通常の真空バルブでは伸縮ベローズは外側が真空、内側が絶縁ガスという内圧形態で使用される。） The expandable bellows 8 has an insulating gas on the outside and a vacuum on the inside, and such an external pressure form is used when the pressure of the insulating gas around the vacuum valve is high. (In a normal vacuum valve, the telescopic bellows is used in the form of internal pressure with the outside being vacuum and the inside being insulating gas.)

保持部材９は、図１に示すように伸縮ベローズ８の両端部に互いに対向して配置された一対の第１円筒体部９１、第２円筒体部９２で構成され、伸縮ベローズ８の内端側の第１円筒体部９１は、伸縮ベローズ８と共に真空容器側に固定され、伸縮ベローズ８の外端側の第２円筒体部９２は、伸縮ベローズ８と共に可動側電極棒３ｂに装着され進退自在になされている。
第１円筒体部９１は、伸縮ベローズ８の上端部に支持部９１ａを固着し、側面部９１ｂで伸縮ベローズ８の外径を覆い、支持部９１ａと側面部９１ｂとは一体化され円筒体を構成している。
第２円筒体部９２は、伸縮ベローズ８の下端部に支持部９２ａを固着し、側面部９２ｂで伸縮ベローズ８の外径を覆い、支持部９２ａと側面部９２ｂとは一体化され円筒体を構成している。なお、支持部９２ａは、可動側電極棒３ｂに密閉に固定されている。 As shown in FIG. 1, the holding member 9 is composed of a pair of first cylindrical body portion 91 and second cylindrical body portion 92 that are disposed opposite to each other at both ends of the expansion / contraction bellows 8. The first cylindrical body portion 91 on the side is fixed to the vacuum vessel side together with the telescopic bellows 8, and the second cylindrical body portion 92 on the outer end side of the telescopic bellows 8 is mounted on the movable electrode rod 3 b together with the telescopic bellows 8. It is made freely.
The first cylindrical portion 91 has a support portion 91a fixed to the upper end portion of the expansion / contraction bellows 8, covers the outer diameter of the expansion / contraction bellows 8 with a side surface portion 91b, and the support portion 91a and the side surface portion 91b are integrated to form a cylindrical body. It is composed.
The second cylindrical body portion 92 has a support portion 92a fixed to the lower end portion of the telescopic bellows 8, covers the outer diameter of the telescopic bellows 8 with a side surface portion 92b, and the support portion 92a and the side surface portion 92b are integrated to form a cylindrical body. It is composed. The support portion 92a is hermetically fixed to the movable electrode rod 3b.

また、図２に示すように、第1円筒体部９１と第２円筒体部９２とが対向する側の両開
口部には、それぞれ櫛歯状の凹凸部が互いにずらせて設けられ、櫛部９１ｃ、９２ｃが相互に並ぶことで、ぶつからないよう組み立てられている。したがって、両円筒体部９１、９２は、蛇腹部８ａが収縮する時、互いに干渉することなく噛合し両円筒体部の筒長を変える伸縮動作が行われる。
なお、図２の櫛部９１ｃ、９２ｃは、３つの凸部を持ち、３つ以上の凸部を持つようにしてもよい。 In addition, as shown in FIG. 2, comb-shaped uneven portions are provided at both openings on the side where the first cylindrical body portion 91 and the second cylindrical body portion 92 are opposed to each other. , 92c are assembled so as not to collide with each other. Therefore, when the bellows portion 8a contracts, the two cylindrical body portions 91 and 92 are engaged with each other without interfering with each other, and an expansion and contraction operation is performed to change the cylinder length of both cylindrical body portions.
The comb portions 91c and 92c in FIG. 2 may have three convex portions and may have three or more convex portions.

蛇腹部８ａの谷部８ｃに嵌め込み固定された摺動部材１１は、伸縮ベローズ８を自由長にした時の蛇腹断面形状に適合する断面形状を持つ。また、周方向に扇形形状とし、複数を組み合わせて蛇腹の全周を覆うようにする。
図３に示すように、摺動部材１１の外径Ｒ１は、伸縮ベローズ８の外径Ｒ２より大きくする。さらに、摺動部材１１の外径Ｒ１は、保持部材９（９１、９２）の内径Ｒ３と実質的に等しく、伸縮ベローズ８の伸縮に伴って摺動部材１１が移動した際に、保持部材９と接している状態のまま摺動部材１１が横滑りするようにする。 The sliding member 11 fitted and fixed in the valley portion 8c of the bellows portion 8a has a cross-sectional shape that matches the bellows cross-sectional shape when the telescopic bellows 8 is free length. In addition, a fan shape is formed in the circumferential direction, and a plurality of them are combined so as to cover the entire circumference of the bellows.
As shown in FIG. 3, the outer diameter R <b> 1 of the sliding member 11 is made larger than the outer diameter R <b> 2 of the telescopic bellows 8. Further, the outer diameter R1 of the sliding member 11 is substantially equal to the inner diameter R3 of the holding member 9 (91, 92), and when the sliding member 11 moves as the expansion / contraction bellows 8 expands / contracts, the holding member 9 The sliding member 11 is caused to slide sideways while being in contact with.

例えば、摺動部材１１の外径Ｒ１と保持部材９（９１、９２）の内径Ｒ３の隙間は、加工公差と伸縮ベローズの応力緩和効果を考えて0.5mm程度以下とする。
摺動部材１１の外径Ｒ１と伸縮ベローズ８の外径Ｒ２の差は、伸縮ベローズの横ずれによる座屈の防止のために1mm程度とする。 For example, the clearance between the outer diameter R1 of the sliding member 11 and the inner diameter R3 of the holding member 9 (91, 92) is set to about 0.5 mm or less in consideration of the processing tolerance and the stress relaxation effect of the expansion / contraction bellows.
The difference between the outer diameter R1 of the sliding member 11 and the outer diameter R2 of the telescopic bellows 8 is about 1 mm in order to prevent buckling due to the lateral displacement of the telescopic bellows.

次に、この実施の形態１で使用する材料について説明する。
摺動部材１１と保持部材９の側面部９１ｂ、９２ｂは、焼付き防止のため異なる材料とするべきで、例えば摺動部材をSUS、保持部材９をCuとする。摺動部材１１もしくは保持
部材９の接触面にAgロウを付着させてもよい。
摺動部材１１又は円筒体部側面部９１ｂ、９２ｂをセラミック（アルミナ、窒化ケイ素）とし、ロウ付け面にメタライズ層を設けてロウ付けしてもよい。金属の母材にこれらの皮膜を設けてもよい。 Next, materials used in the first embodiment will be described.
The side portions 91b and 92b of the sliding member 11 and the holding member 9 should be made of different materials for preventing seizure. For example, the sliding member is SUS and the holding member 9 is Cu. Ag solder may be attached to the contact surface of the sliding member 11 or the holding member 9.
The sliding member 11 or the cylindrical body side surfaces 91b and 92b may be made of ceramic (alumina, silicon nitride), and may be brazed by providing a metallized layer on the brazing surface. These coatings may be provided on a metal base material.

摺動部材１１と円筒体部側面部９１ｂ、９２ｂの接触面を上記の金属材料、セラミック材料とし、それ以外の伸縮ベローズ８の横ずれを防止する部分には固体潤滑剤（例えばロウ付け温度でも安定である窒化ホウ素）の皮膜を設ける構造とすると、摺動部材１１と円筒体部側面部９１ｂ、９２ｂの摩擦による伸縮ベローズ８の振動エネルギー散逸の効果と、座屈防止のため伸縮ベローズ８が円筒体部側面部９１ｂ、９２ｂと接触しても固体潤滑剤であるため磨耗が少ないという効果が得られ、伸縮ベローズ８の寿命がさらに長くなる。次に、この発明に至る従来構造の問題点について説明する。 The contact surface of the sliding member 11 and the cylindrical body side surface portions 91b and 92b is made of the above-mentioned metal material or ceramic material, and other portions that prevent lateral displacement of the expansion / contraction bellows 8 are solid lubricant (for example, stable at brazing temperature) If the structure is provided with a coating of boron nitride, the expansion bellows 8 is cylindrical in order to dissipate the vibration energy of the expansion bellows 8 due to friction between the sliding member 11 and the cylindrical body side portions 91b and 92b and to prevent buckling. Even if it contacts the body side surface portions 91b and 92b, since it is a solid lubricant, the effect of less wear is obtained, and the life of the expandable bellows 8 is further increased. Next, problems of the conventional structure leading to the present invention will be described.

（1）伸縮ベローズ８の端の方の蛇腹に応力が集中する点について、
開極、閉極の際の伸縮ベローズ８の動きを高速度カメラで観測すると、伸縮ベローズ８は数m/sという高速で動いた後に急に停止するため、蛇腹部８ａに粗密波が発生し往復運
動を行う。この時、伸縮ベローズ８の両端の蛇腹は、固定端となっているためにその付近で特に大きな応力が発生する。この結果、伸縮ベローズ８の端の方で亀裂が発生する。 (1) About the point where stress concentrates on the bellows toward the end of the expandable bellows 8.
When the movement of the expansion / contraction bellows 8 at the time of opening and closing is observed with a high-speed camera, the expansion / contraction bellows 8 suddenly stops after moving at a high speed of several m / s, so that a dense wave is generated in the bellows portion 8a. Perform reciprocating motion. At this time, since the bellows at both ends of the telescopic bellows 8 are fixed ends, particularly large stress is generated in the vicinity thereof. As a result, a crack occurs at the end of the telescopic bellows 8.

従来技術は、伸縮ベローズの端から端まで同じように座屈防止冶具を設けているため、伸縮ベローズの端の応力が大きいという問題は解決されておらず、開極距離や開極スピードが増加すると振動のエネルギーは増加し、結局伸縮ベローズの端の方で亀裂が生じてしまう。
実施の形態１の構造では、図１や図３のように伸縮ベローズ８の端より少し中央寄りに摺動部材１１を設けたので、まず、粗密波が摺動部材１１を振動させ、この時、摺動部材１１と保持部材９の摩擦でエネルギーを散逸し、エネルギーを減少させた後で伸縮ベローズ８の端部に至る構造となっている。
摺動部材１１を保持部材９の櫛部９１ｃ、９２ｃよりも伸縮ベローズ８端部寄りに設けると、伸縮ベローズ８と保持部材９で囲まれた空間は密閉状態に近くなり、特に絶縁ガスの圧力が例えば0.6MPa（絶対値）と高い場合に、エアダンパーの効果が現れてくる。
本構造は以上の作用を持つため、開極距離や開極スピードが増加しても伸縮ベローズ８端部の応力は抑制され、伸縮ベローズの寿命が伸びるという効果がある。 In the conventional technology, the buckling prevention jig is provided in the same way from end to end of the expansion / contraction bellows, so the problem of large stress at the end of the expansion / contraction bellows is not solved, and the opening distance and opening speed increase. As a result, the vibration energy increases and eventually cracks occur at the ends of the telescopic bellows.
In the structure of the first embodiment, the sliding member 11 is provided slightly closer to the center than the end of the telescopic bellows 8 as shown in FIG. 1 and FIG. In this structure, energy is dissipated by friction between the sliding member 11 and the holding member 9 and the energy is reduced, and then the end of the telescopic bellows 8 is reached.
When the sliding member 11 is provided closer to the end of the expansion / contraction bellows 8 than the comb portions 91c and 92c of the holding member 9, the space surrounded by the expansion / contraction bellows 8 and the holding member 9 is close to a sealed state, and the pressure of the insulating gas is particularly high. For example, when it is as high as 0.6 MPa (absolute value), the effect of the air damper appears.
Since this structure has the above action, even if the opening distance and the opening speed increase, the stress at the end portion of the expansion / contraction bellows 8 is suppressed, and the life of the expansion / contraction bellows is extended.

（２）伸縮ベローズ８と座屈防止部品との擦れによって金属や絶縁物の粒子が発生する可能性について、
従来構造では、これらの粒子が真空バルブ外の絶縁ガス空間に移動する可能性がある。その後、粒子は開閉の振動の影響で移動し、さらに電界の作用により電界の高い沿面に付着する。この結果、耐電圧性能が低下するという問題がある。絶縁物粒子であっても部分放電を発生したり、金属粒子を巻上げるという悪影響がある。この問題は、定格電圧の高い真空遮断器で重要となる。 (2) About the possibility that particles of metal and insulator are generated by rubbing between the expansion / contraction bellows 8 and the buckling prevention component,
In the conventional structure, these particles may move to the insulating gas space outside the vacuum valve. Thereafter, the particles move under the influence of opening and closing vibrations, and further adhere to the creeping surface having a high electric field by the action of the electric field. As a result, there is a problem that the withstand voltage performance is lowered. Even if it is an insulator particle | grain, there exists a bad influence of generating a partial discharge or winding up a metal particle. This problem is important for vacuum circuit breakers with high rated voltage.

実施の形態１の構造では、伸縮ベローズ８の摺動部の周りを、フランジ１７と可動側端板１ｂで覆い、擦れによる金属や絶縁物の粒子を閉じ込める構造とした。穴１６の前に遮蔽板を設けたり、穴を下側の可動側端板１ｂではなくフランジ１７の側面に設けると、粒子の閉じ込め効果を高めることができる。 In the structure of the first embodiment, the periphery of the sliding portion of the expansion / contraction bellows 8 is covered with the flange 17 and the movable side end plate 1b to confine metal or insulating particles caused by rubbing. When a shielding plate is provided in front of the hole 16 or a hole is provided on the side surface of the flange 17 instead of the lower movable side end plate 1b, the particle confinement effect can be enhanced.

次に、実施の形態１の作用について説明する。
開閉時の衝撃で伸縮ベローズ８に発生する振動エネルギーを、摺動部材１１と保持部材９の摩擦で散逸させることにより、伸縮ベローズ８の応力緩和を図る。この結果、伸縮ベローズ８の寿命が伸び、真空バルブの信頼性が増すことができる。
特に、摺動部材１１を伸縮ベローズ８の端よりは中央寄りに設けることによって、段落番号００２９の（１）で述べたように、開閉の衝撃で発生する粗密波のエネルギーを減衰させ、伸縮ベローズ８の端部に発生する応力を抑制することにより、開極距離や開極スピードが増加しても伸縮ベローズ８の寿命を伸ばすことができる。 Next, the operation of the first embodiment will be described.
The vibration energy generated in the expansion / contraction bellows 8 due to the impact at the time of opening and closing is dissipated by the friction between the sliding member 11 and the holding member 9, thereby reducing the stress of the expansion / contraction bellows 8. As a result, the life of the telescopic bellows 8 can be extended and the reliability of the vacuum valve can be increased.
In particular, by providing the sliding member 11 closer to the center than the end of the expansion / contraction bellows 8, as described in paragraph (0029) of paragraph No. 0029, the energy of the dense wave generated by the opening / closing impact is attenuated, and the expansion / contraction bellows By suppressing the stress generated at the end of 8, the life of the expandable bellows 8 can be extended even if the opening distance and opening speed increase.

保持部材９の先端を櫛歯状としたので、伸縮ベローズ８の伸縮状態に関係なく全ての蛇腹の横ずれを防止する。このため伸縮ベローズ８の全長が長い場合でも座屈が防止される。
伸縮ベローズ８の摺動部の周りをフランジ１７と可動側端板１ｂで覆い、擦れによる金属や絶縁物の粒子を閉じ込める構造としたため、段落番号００３１の（２）で述べたように、粒子が真空バルブ外の絶縁ガス空間に移動することを防止し耐電圧性能を向上させる。 Since the tip of the holding member 9 has a comb-like shape, the lateral displacement of all bellows is prevented regardless of the expansion / contraction state of the expansion / contraction bellows 8. For this reason, buckling is prevented even when the total length of the telescopic bellows 8 is long.
Since the periphery of the sliding portion of the expansion / contraction bellows 8 is covered with the flange 17 and the movable side end plate 1b and the particles of metal and insulator due to rubbing are confined, as described in paragraph (0031) (2), the particles Prevents movement to the insulating gas space outside the vacuum valve and improves the withstand voltage performance.

その他の構造について説明する。
伸縮ベローズ８は、可動側フランジ１２を絶縁筒２ｂの内側に折り曲げて一部が絶縁筒２ｂの中に入る構造としたので、真空バルブの全長を短くする効果がある。さらに、可動側フランジ１２にはメタライズ層５の電界緩和のための電界緩和シールド１９と、アークシールド７及び絶縁筒２ｂに対向する部位に電界緩和部１２ａを設けたので、全長を短くしても耐電圧性能は維持されるという効果がある。 Other structures will be described.
The telescopic bellows 8 has a structure in which the movable flange 12 is bent inside the insulating cylinder 2b so that a part of the expansion bellows 8 enters the insulating cylinder 2b. Furthermore, since the movable side flange 12 is provided with the electric field relaxation shield 19 for relaxing the electric field of the metallized layer 5 and the electric field relaxation portion 12a at the portion facing the arc shield 7 and the insulating cylinder 2b, the entire length can be shortened. The withstand voltage performance is maintained.

次に、実施の形態１の製造工程について説明する。
多段ロウ付けとし、あらかじめ伸縮ベローズの蛇腹部８ａの谷部８ｃに摺動部材１１をロウ付けする。その後、冶具によって、可動側電極棒３ｂと伸縮ベローズ８、保持部材９（第１円筒体部９１、第２円筒体部９２）、可動側フランジ１２の軸心を出した状態でロウ付けする。その際、保持部材９の櫛部９１ｃ、９２ｃは、保持部材９で干渉しないよう方向に注意する。摺動部材１１と保持部材９の隙間は、このロウ付け時に決まるのでロウ付け後に確認する。
この段階で、接点１８は、大気圧の接圧が印加することによって閉極しているので、冶具を外しても軸心を出した状態を維持できる。続いて、フランジ１７と可動側端板１ｂをロウ付け一体化した部品を製造し、あらかじめロウ付けしておいた真空バルブの可動側フランジ１２に溶接またはねじ止めする（取り付け構造の詳細は図1では略されている）。
次に、ガイド１４をねじ止めする。 Next, the manufacturing process of Embodiment 1 will be described.
The sliding member 11 is brazed in advance to the valley portion 8c of the bellows portion 8a of the expandable bellows. Thereafter, the movable side electrode rod 3b, the expansion / contraction bellows 8, the holding member 9 (the first cylindrical body portion 91, the second cylindrical body portion 92), and the movable flange 12 are brazed with a jig in a state where the axial centers thereof are exposed. At that time, care is taken in the direction in which the comb portions 91 c and 92 c of the holding member 9 do not interfere with the holding member 9. Since the gap between the sliding member 11 and the holding member 9 is determined at the time of brazing, it is confirmed after brazing.
At this stage, the contact 18 is closed by applying a contact pressure of atmospheric pressure, so that the axial center can be maintained even if the jig is removed. Subsequently, a part in which the flange 17 and the movable side end plate 1b are brazed and integrated is manufactured, and welded or screwed to the movable side flange 12 of the vacuum valve previously brazed (details of the mounting structure are shown in FIG. 1). Is abbreviated).
Next, the guide 14 is screwed.

実施の形態１の真空バルブでは、以上のように開閉時の衝撃で伸縮ベローズ８に発生する振動エネルギーを、摺動部材１１と保持部材９の摩擦で散逸させることにより、伸縮ベローズ８の応力緩和を図る。さらに、保持部材９によって伸縮ベローズ８が横ずれして座屈が発生するのを防止する。この結果、伸縮ベローズ８の寿命が伸び、真空バルブの信頼性が向上するという効果がある。 In the vacuum valve of the first embodiment, as described above, the vibration energy generated in the expansion / contraction bellows 8 by the impact at the time of opening and closing is dissipated by the friction between the sliding member 11 and the holding member 9, thereby reducing the stress of the expansion / contraction bellows 8. Plan. Further, the expansion and contraction bellows 8 is prevented from being laterally displaced by the holding member 9 to prevent buckling. As a result, there is an effect that the life of the expandable bellows 8 is extended and the reliability of the vacuum valve is improved.

実施の形態２．
図４は、実施の形態２による真空バルブの摺動部材１１と保持部材９の構造を示す拡大断面図である。
実施の形態１では、伸縮ベローズの蛇腹部８ａに摺動部材１１を設けたが、この実施例では伸縮ベローズ８は、軸方向に分割された複数の蛇腹部８ａ１、８ａ２で構成され、これらの蛇腹部８ａ１、８ａ２を連結し一体化する。接続部品２０は、摺動部材１１で兼用することとした。
図４では、伸縮ベローズ８の接続部の一実例として、伸縮ベローズ８の溶接部に接続部品２０を被せて強化した例を示す。接続部品２０と保持部材９の隙間や接続部品２０の外径と伸縮ベローズ８の外径の差は、実施の形態１と同じ設定とする。
他の部品構造、例えば保持部品の先端の櫛形などは実施の形態１と同じとする。 Embodiment 2. FIG.
FIG. 4 is an enlarged sectional view showing the structure of the sliding member 11 and the holding member 9 of the vacuum valve according to the second embodiment.
In the first embodiment, the sliding member 11 is provided on the bellows portion 8a of the telescopic bellows. However, in this embodiment, the telescopic bellows 8 includes a plurality of bellows portions 8a1 and 8a2 divided in the axial direction. The bellows portions 8a1 and 8a2 are connected and integrated. The connecting component 20 is also used as the sliding member 11.
In FIG. 4, as an example of the connection part of the expansion / contraction bellows 8, an example in which the connection part 20 is covered with the welded part of the expansion / contraction bellows 8 and is reinforced is shown. The gap between the connecting component 20 and the holding member 9 and the difference between the outer diameter of the connecting component 20 and the outer diameter of the telescopic bellows 8 are set to be the same as those in the first embodiment.
Other component structures, such as the comb shape at the tip of the holding component, are the same as those in the first embodiment.

実施の形態２では、伸縮ベローズ８の製造段階で摺動部材１１が形成されているので、伸縮ベローズ８に摺動部材１１をロウ付けする工程を省略することができる。
伸縮ベローズ８の応力緩和と座屈防止による真空バルブの信頼性が向上するという効果は実施の形態１と同様である。 In Embodiment 2, since the sliding member 11 is formed at the manufacturing stage of the telescopic bellows 8, the step of brazing the sliding member 11 to the telescopic bellows 8 can be omitted.
The effect of improving the reliability of the vacuum valve by relaxing the stress of the telescopic bellows 8 and preventing buckling is the same as in the first embodiment.

実施の形態３．
図５はこの実施の形態３による真空バルブを示す断面図である。
実施の形態１及び２では、保持部材９を他の部品と同時にロウ付けしたが、実施の形態３では、他の部品のロウ付け終了後に保持部材９を取り付ける形態とした。
伸縮ベローズ８に摺動部材１１を設ける点は、実施の形態１と同じである。
伸縮ベローズ８の内端側は、伸縮ベローズ固定板２２を介して可動側フランジ１２に固定する。伸縮ベローズ８の外端側は、伸縮ベローズ固定板２１によって可動側電極棒３ｂに固定する。 Embodiment 3 FIG.
FIG. 5 is a sectional view showing a vacuum valve according to the third embodiment.
In the first and second embodiments, the holding member 9 is brazed simultaneously with other parts, but in the third embodiment, the holding member 9 is attached after brazing of the other parts.
The point which provides the sliding member 11 in the expansion-contraction bellows 8 is the same as Embodiment 1. FIG.
The inner end side of the expansion / contraction bellows 8 is fixed to the movable flange 12 via the expansion / contraction bellows fixing plate 22. The outer end side of the telescopic bellows 8 is fixed to the movable electrode rod 3b by the telescopic bellows fixing plate 21.

実施の形態１、２では、伸縮ベローズカバー１２ｂと伸縮ベローズ８の間に、支持部材９１ａと側面部９１ｂで構成される第１円筒体部９１を設けたが、この実施の形態３では、支持部材９１ａと側面部９１ｂを分離した。
すなわち、支持部材９１ａに相当するのが部材２１ａである。この部材２１ａは、伸縮ベローズカバー１２ｂの強度補強のために設けた補強部材である。 In the first and second embodiments, the first cylindrical body portion 91 including the support member 91a and the side surface portion 91b is provided between the expandable bellows cover 12b and the expandable bellows 8, but in the third embodiment, the support is provided. The member 91a and the side part 91b were separated.
That is, the member 21a corresponds to the support member 91a. This member 21a is a reinforcing member provided for reinforcing the strength of the telescopic bellows cover 12b.

保持部材９の第１円筒体部９１は、側面部９１ｂに設けた支持部９１ａａを、可動側フランジ１２に設けたフランジ補強板２２にねじ止めすることにより固定される。
側面部９１ｂの開口側端部には、実施の形態１と同様に櫛部９１ｃを持つ。このため、支持部９１ａａは櫛部９１ｃに設けられた構造となり、支持部９１ａａとフランジ補強板２２とによって第１支持部を構成している。 The first cylindrical body portion 91 of the holding member 9 is fixed by screwing the support portion 91aa provided on the side surface portion 91b to the flange reinforcing plate 22 provided on the movable side flange 12.
Similar to the first embodiment, a comb portion 91c is provided at the opening side end of the side surface portion 91b. For this reason, the support portion 91aa has a structure provided in the comb portion 91c, and the support portion 91aa and the flange reinforcing plate 22 constitute a first support portion.

図５は、断面図であるため中心線の右側には支持部９１ａａと櫛部９１ｃの断面が見えているが、中心線の左側には見えていない。
保持部材９の第２円筒体部９２は、支持部９２ａを可動側電極棒３ｂに固定された伸縮ベローズ固定板２１にねじ止めすることにより固定され、支持部９２ａと伸縮ベローズ固定板２１とによって第２支持部を構成している。
こちらは中心線の左側に櫛部９２ｃが見えているが、右側には見えていない。
図５は、開極状態の図であるので、第１円筒体部９１の櫛部９１ｃと第２円筒体部９２の側面部９２ｂの間、及び第２円筒体部９２の櫛部９２ｃと第１円筒体部９１の側面部９１ｂの間は、大きく開いている。 Since FIG. 5 is a cross-sectional view, the cross section of the support portion 91aa and the comb portion 91c is visible on the right side of the center line, but is not visible on the left side of the center line.
The second cylindrical body portion 92 of the holding member 9 is fixed by screwing the support portion 92a to the expansion / contraction bellows fixing plate 21 fixed to the movable electrode rod 3b, and is supported by the support portion 92a and the expansion / contraction bellows fixing plate 21. The 2nd support part is comprised.
Here, although the comb part 92c is visible on the left side of the center line, it is not visible on the right side.
Since FIG. 5 is a diagram of the open state, the comb portion 91c of the first cylindrical body portion 91 and the side surface portion 92b of the second cylindrical body portion 92 and the comb portion 92c of the second cylindrical body portion 92 and the first cylinder are shown. The space between the side surface portions 91b of the body portion 91 is largely open.

次に、この実施の形態３で使用する材料について説明する。
摺動部材１１と保持部材９の側面部９１ｂ、９２ｂは、焼付き防止のため異なる材料とするべきであるという点は実施の形態１と同じである。本構造では、保持部材９はロウ付け温度ほどの高温にならないので、エンジニアリングプラスチック（ＰＰＥ、ＰＣ、ＰＡ、ＰＯＭ、ＰＢＴ）で形成する。窒化ケイ素などの硬質皮膜を用いて磨耗の少ない摩擦状態としてもよい。 Next, materials used in the third embodiment will be described.
Similar to the first embodiment, the side portions 91b and 92b of the sliding member 11 and the holding member 9 should be made of different materials for preventing seizure. In this structure, since the holding member 9 does not become as high as the brazing temperature, it is made of engineering plastic (PPE, PC, PA, POM, PBT). It is good also as a friction state with little abrasion using hard films, such as silicon nitride.

保持部材９の側面部９１ｂ、９２ｂの内、摺動部材１１と接触する面は、エンジニアリングプラスチックとし、それ以外の伸縮ベローズの横ずれを防止する部分は、固体潤滑材
料(ポリテトラフルオロエチレン、ポリエチレンなど)として一体化すれば、摺動部材１１と保持部材９の摩擦による伸縮ベローズ８の振動エネルギー散逸の効果と、伸縮ベローズ８が保持部材９と接触しても固体潤滑剤であるため磨耗が少ないという効果が得られ、伸縮ベローズ８の寿命がさらに長くなる。 Of the side surfaces 91b and 92b of the holding member 9, the surface that contacts the sliding member 11 is made of engineering plastic, and the other portions that prevent lateral displacement of the expandable bellows are solid lubricant materials (polytetrafluoroethylene, polyethylene, etc. ), The vibrational energy dissipation of the expansion / contraction bellows 8 due to the friction between the sliding member 11 and the holding member 9, and even if the expansion / contraction bellows 8 comes into contact with the holding member 9, it is a solid lubricant and thus wear is small. Thus, the life of the expandable bellows 8 is further prolonged.

次に、実施の形態３の製造工程について説明する。
他の部品のロウ付け後、下端から保持部材９の第１円筒体部９１を挿入し、支持部９１ａａをフランジ補強板２２に固定する。
続いて、第２円筒体部９２を下端から挿入し支持部９２ａを伸縮ベローズ固定板２１にねじ止めする。
その後、フランジ１７と可動側端板１ｂを一体化した部品をフランジ補強板２２にねじ止めする。最後にガイド１４をボルト１５で固定する。 Next, the manufacturing process of Embodiment 3 will be described.
After brazing of other parts, the first cylindrical body portion 91 of the holding member 9 is inserted from the lower end, and the support portion 91aa is fixed to the flange reinforcing plate 22.
Subsequently, the second cylindrical body portion 92 is inserted from the lower end, and the support portion 92 a is screwed to the telescopic bellows fixing plate 21.
Thereafter, a part in which the flange 17 and the movable side end plate 1 b are integrated is screwed to the flange reinforcing plate 22. Finally, the guide 14 is fixed with the bolt 15.

実施の形態３では、保持部材９を後から取り付けるようにしたので、ロウ付け時に軸心出しをする部品の数が減り冶具が簡略化される。保持部材９としてプラスチックなど適用できる材料が増えるので、開極距離や開極スピードに合せて最適な材料を選ぶことができる。 In the third embodiment, since the holding member 9 is attached later, the number of parts to be centered during brazing is reduced, and the jig is simplified. Since the applicable material such as plastic increases as the holding member 9, an optimum material can be selected according to the opening distance and opening speed.

１a 固定側端板
１ｂ可動側端板
２絶縁筒
３ａ固定側電極棒
３ｂ可動側電極棒
４固定側フランジ
５メタライズ層
６絶縁筒接合部
７アークシールド
８伸縮ベローズ
８ａ蛇腹部
８ａ１蛇腹部
８ａ２蛇腹部
８ｂ山部
８ｃ谷部
９保持部材
９１第１円筒体部
９１ａ支持部
９１ａａ支持部
９１ｂ側面部
９１ｃ櫛部
９２第２円筒体部
９２ａ支持部
９２ｂ側面部
９２ｃ櫛部
１１摺動部材
１２可動側フランジ
１２ａ電界緩和部
１２ｂ伸縮ベローズカバー
１２ｃ屈曲部
１２ｄフランジ部
１４ガイド
１５ボルト
１６穴
１７フランジ
１８接点
1８ａ固定側接点
１８ｂ可動側接点
１９電界緩和シールド
２０接続部品
２１伸縮ベローズ固定板（第２支持部）
２２フランジ補強板（第１支持部）
Ｓスペース。 DESCRIPTION OF SYMBOLS 1a Fixed side end plate 1b Movable side end plate 2 Insulating tube 3a Fixed side electrode rod 3b Movable side electrode rod 4 Fixed side flange 5 Metallized layer 6 Insulating tube joint 7 Arc shield 8 Telescopic bellows 8a Bellows 8a1 Bellows 8a2 Bellows 8b Mountain portion 8c Valley portion 9 Holding member 91 First cylindrical body portion 91a Support portion 91aa Support portion 91b Side surface portion 91c Comb portion 92 Second cylindrical body portion 92a Support portion 92b Side surface portion 92c Comb portion 11 Sliding member 12 Movable flange 12a Electric field Relaxing part 12b Telescopic bellows cover 12c Bending part 12d Flange part 14 Guide 15 Bolt 16 Hole 17 Flange 18 Contact
18a Fixed side contact 18b Movable side contact 19 Electric field relaxation shield 20 Connection part 21 Telescopic bellows fixed plate (second support part)
22 Flange reinforcement plate (first support)
S Space.

Claims

In a sealed insulating cylindrical vacuum vessel, there are a fixed side electrode having a fixed side electrode at the inner end and air-tightly penetrating outside the vacuum vessel, and a movable side electrode that can be contacted and separated from the fixed side electrode. A vacuum valve having a movable side electrode rod which is airtightly penetrated to the outside of the vacuum vessel via an expansion / contraction bellows at the inner end portion and is movable back and forth at the bellows portion of the expansion / contraction bellows, A holding member that always covers the bellows portion and is in sliding contact with the peak portion of the bellows portion, and a slide that is fitted into and fixed to the valley portion of the bellows portion and slides on the inner peripheral surface of the holding member during the expansion and contraction of the bellows portion. A moving member is provided , and the holding member is composed of a first cylindrical body portion and a second cylindrical body portion arranged opposite to each other at both ends of the telescopic bellows, and the first cylinder on the inner end side of the telescopic bellows. Body part together with the telescopic bellows on the vacuum vessel side Fixed, the second cylindrical body of the expansion bellows outer end side, vacuum valve, characterized in that the retractable mounted to the movable side electrode rod together with the expansion bellows.

A comb-like shape that engages with each other when the bellows portion contracts with both openings of the holding member on the side where the first cylindrical body portion and the second cylindrical body portion face each other, and expands and contracts the cylinder length of both cylindrical body portions. The vacuum valve according to claim 1, wherein the uneven portions are provided so as to be shifted from each other .

The vacuum valve according to claim 2, wherein the first cylindrical body portion and the second cylindrical body portion are provided with at least three comb-shaped uneven portions that mesh with each other .

The vacuum valve according to any one of claims 1 to 3, wherein the sliding member includes a plurality of fan-shaped members and is fitted and fixed in a valley portion of the bellows portion .

The said expansion-contraction bellows is comprised by the some bellows part divided | segmented into the axial direction, and these bellows parts were connected and integrated by the said sliding member, The any one of Claims 1-4 characterized by the above-mentioned. The vacuum valve according to item.

The first cylindrical body portion is provided with a first support portion for fixing the first cylindrical body portion to the vacuum vessel side, and the second cylindrical body portion is provided with the second cylindrical body portion on the movable side. The vacuum valve according to claim 1 , further comprising a second support portion that is fixed to the electrode rod side .