JP5402064B2 - Fan filter unit - Google Patents

Description

  The present invention relates to a fan filter unit installed in a clean room, a clean conveyance path, a semiconductor manufacturing apparatus, and an FPD manufacturing apparatus that require a clean space in a manufacturing factory for semiconductors, liquid crystals, and FPDs (flat panel displays).

  Conventionally, in this type of fan filter unit, there is a concern that the temperature of the device internal space on the filter blowing side changes and adversely affects processes such as wafers, but as a means to suppress temperature variation on the blowing side A device using a Peltier element is known. (For example, refer to Patent Document 1).

JP 2008-286497 A

  In a semiconductor manufacturing process for wafers and the like, unevenness in blown air speed and unevenness in blown temperature affect the quality of the manufactured semiconductor. That is, in the fan filter unit, it has been a big problem to make the blowing air speed from the blowing surface uniform. Further, in the conventional fan filter unit as described above, the airflow discharged from the fan is diffused throughout the chamber, and an airflow without heat absorption by the Peltier element is blown out without contacting the Peltier element, and a stable temperature supply is achieved. There was a problem that it was difficult to obtain.

  The present invention solves such a problem in the conventional fan filter unit, and rectifies the air flow inside the chamber and increases the contact efficiency with the heat absorbing surface of the Peltier element, thereby reducing the suction temperature and the blowing temperature. An object of the present invention is to provide a fan filter unit capable of obtaining blown air with a small temperature difference.

In order to achieve the above object, the fan filter unit of the present invention is provided with a suction port at the top of a box-shaped chamber, and the fan unit comprising a fan and a motor is provided in the chamber. built-in fan filter unit fitted with a filter to blow surface of the chamber, provided that that the guide plate beneath downwardly from the ceiling surface of the chamber, the guide plate, the direction of rotation in front of the fan from the periphery of the fan extending tangentially, and in contact with the inner surface of said chamber, said this inner face fa
An auxiliary guide plate is formed on the outer side of the fan, and an outer periphery of the fan is provided with an auxiliary guide plate that is substantially parallel to the guide plate and has a space between the chamber and the guide plate and the auxiliary guide plate. Two sets are provided so as to be substantially symmetric with respect to the rotation axis, and the guide plate is provided with a surface that blocks a part of the fan blowout surface along the outer periphery of the fan in the direction opposite to the portion extending toward the inner surface of the chamber. The end portion is connected to the end portion of another auxiliary guide plate .

  By this means, a fan filter unit that can rectify the airflow inside the chamber to the inner surface of the chamber in contact with the guide plate is obtained.

  In another means, a Peltier element is disposed on the inner side surface of the chamber in contact with the guide plate so that the inner side of the chamber is a heat absorbing surface and the outer side is a heat radiating surface.

  By this means, it is possible to obtain a fan filter unit capable of obtaining heat absorption and heat dissipation by the airflow rectified by the guide plate coming into contact with the Peltier element and obtaining blown air with a small temperature difference between the suction temperature and the blowout temperature.

  According to the present invention, the airflow inside the chamber is rectified, and the rectified airflow efficiently contacts the Peltier element to absorb heat, and the heat dissipation effect is promoted, and the blown airflow that has a smaller temperature difference between the suction temperature and the blowout temperature A fan filter unit that can be obtained is obtained.

(A) Longitudinal sectional view of the fan filter unit of Embodiment 1 of the present invention, (b) Plan view Plan view of a fan filter unit according to Embodiment 2 of the present invention. Plan view of a fan filter unit according to Embodiment 2 of the present invention. Plan view of a fan filter unit according to Embodiment 2 of the present invention. Plan view of a fan filter unit according to Embodiment 3 of the present invention. Plan view of a fan filter unit according to Embodiment 4 of the present invention.

According to the first aspect of the present invention, a suction port is provided in an upper portion of a box-shaped chamber, a substantially entire bottom surface of the chamber is used as a blowout surface, a fan unit including a fan and a motor is incorporated in the chamber, in the fan filter unit fitted with a filter to blow surface of the chamber, provided that that the guide plate beneath downwardly from the ceiling surface of the chamber, the guide plate, in a tangential direction of the rotation direction front of the fan from the periphery of the fan An auxiliary that extends and touches the inner side surface of the chamber, forms an obtuse angle on the inner side surface and the fan side, and is substantially parallel to the guide plate from the outer periphery of the fan. A guide plate is provided, and two sets of the guide plate and the auxiliary guide plate are provided so as to be substantially symmetrical about the rotation axis of the fan. The side plate is provided with a surface that closes a part of the fan blowout surface along the outer periphery of the fan in the opposite direction to the portion extending to the inner side of the chamber, and its end is connected to the end of the other auxiliary guide plate It is as hereinbefore has the effect of rectifying the chamber side along the airflow from the fan by taking this structure the guide plate.

  Further, by arranging a Peltier element on the inner side surface of the chamber in contact with the guide plate so that the inner side of the chamber is a heat absorbing surface and the outer side is a heat radiating surface, the rectified airflow from the fan is absorbed by the Peltier element and discharged outside the chamber. Has the effect of heating.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, the fan filter unit of the first embodiment is provided with a suction port at the top of a box-shaped chamber 1, and a fan unit 4 including a fan 2 and a motor 3 is built in the chamber 1. ing. A filter 5 is attached to the lower side on the blow-out side of the chamber 1. This fan filter unit is attached to a semiconductor manufacturing apparatus or the like that requires a clean space. The fan 2 uses a turbo impeller and rotates clockwise in FIG. 1B. The airflow blown out from the fan 2 is blown out toward the outer wall of the chamber 1 so as to spread clockwise from the blowout surface of the fan 2. (Arrow (A) shown in FIG. 1B) A guide plate 6 is provided along this air flow. That is, the guide plate 6 is provided so as to extend downward from the ceiling surface of the chamber 1, extend from the outer periphery of the fan 2 in a tangential direction of the outer periphery, and contact the inner surface of the chamber 1. The guide plate 6 and the inner surface of the chamber 1 form an obtuse angle α on the fan 2 side (the side where the arrow (A) shown in FIG. 1B is described). On the fan plate 2 side of the guide plate 6, that is, on the side where the air flow immediately after blowing from the fan 2 flows, an auxiliary guide plate 12 for guiding the blown air flow from the fan 2 to the inner surface of the chamber 1 is provided. The auxiliary guide plate 12 is substantially parallel to the guide plate 6, and a space is provided between the end of the auxiliary guide plate 12 and the inner surface of the chamber 1.

  In this embodiment, two guide plates 6 and two auxiliary guide plates 12 are provided. The two guide plates 6 and the two auxiliary guide plates 12 are provided so as to be substantially symmetrical about the rotation axis of the fan 2. Adjacent guide plate 6 and auxiliary guide plate 12 are connected so as to be along the outer periphery of fan 2 on the fan 2 side, where guide plate 6 and the outer peripheral tangent of fan 2 form an obtuse angle. ing.

  In the above configuration, when the fan unit 4 is operated, air is sucked from the suction port at the top of the chamber 1. The sucked air is blown out along the guide plate 6, and an air flow that is rectified so as to be guided to the inner surface of the chamber 1 can be obtained. Furthermore, the airflow guided to the inner surface of the chamber 1 passes between the auxiliary guide plate 12 and the inner surface of the chamber 1 (arrow (A)), diffuses throughout the chamber 1, and from the blowing surface of the chamber 1, A uniform wind speed can be obtained.

(Embodiment 2)
As shown in FIG. 2, the inside of the chamber 1 is located in the vicinity of the portion where the guide plate 6 and the inner surface of the chamber 1 are in contact with the chamber 1 where the guide plate 6 and the inner surface of the chamber 1 form an obtuse angle α. The Peltier element 7 is disposed so that the heat absorbing surface 7a and the outer surface are the heat radiating surface 7b.

  In the above configuration, as described in the first embodiment, the airflow blown out from the fan 2 flows along the guide plate 6 toward the inner surface of the chamber 1. When this airflow hits the inner surface of the chamber 1, it contacts the heat absorbing surface 7 a of the Peltier element 7. The airflow contacting the Peltier element 7 is absorbed by the Peltier element 7 and cooled. The absorbed heat is released to the outside of the chamber 1 from the heat radiating surface 7b. The cooled airflow in the chamber 1 is blown out through the filter 5, and blown air having a small temperature difference between the suction temperature and the blowout temperature can be obtained. That is, by reducing the temperature difference between the suction temperature and the blowout temperature, the temperature unevenness in the space where the fan filter unit is cleaned is reduced.

  In addition, fins 8 are provided on the heat absorbing surface 7 a of the Peltier element 7. The fins 8 increase the contact area with the airflow that blows out from the fan 2 and reaches the inner surface of the chamber 1. Therefore, it has the effect of increasing the heat absorption of the Peltier element 7.

  As shown in FIG. 3, a fan 9 is provided on the heat dissipation side of the Peltier element 7 attached so that the outer surface of the chamber 1 is on the heat dissipation side.

  In the above configuration, there is an effect of forcibly radiating the heat absorbed by the Peltier element 7 by operating the fan 9 and forcing the air flow to the heat radiating surface 7b.

  As shown in FIG. 4, fins 10 are provided on the guide plate 6 on the fan 2 side, along the guide plate 6 and in contact with the Peltier element 7.

  In the above configuration, the airflow blown out from the fan 2 flows along the guide plate 6 and efficiently contacts the fins 10, so that the heat absorption by the Peltier element 7 is performed efficiently.

(Embodiment 3)
As shown in FIG. 5, a punching plate 11 is provided between the blowing surface of the chamber 1 and the filter 5, and the punching plate 11 is in contact with the heat absorbing surface of the Peltier element 7.

  According to the above configuration, when the airflow in the chamber 1 passes through the punching plate 11, the punching plate 11 absorbs heat. Further, the heat absorbed by the punching plate 11 is transferred to the Peltier element 7 to be absorbed and radiated to the outside of the chamber 1. Moreover, the punching board 11 can accelerate | stimulate the heat absorption of the heat | fever in a chamber by making the material of the punching board 11 excellent in the heat conductivity of aluminum or copper.

(Embodiment 4)
As shown in FIG. 6, the motor 3 of the fan unit 4 including the fan 2 and the motor 3 is disposed outside the chamber 1.

  In the above configuration, heat generated from the motor 3 is radiated outside the chamber 1. Therefore, an increase in the temperature of the air sucked into the chamber 1 can be suppressed.

  By setting the blowing temperature to be constant, it is possible to prevent a temperature change in the apparatus, and it can be applied to an apparatus that requires temperature management, such as a semiconductor manufacturing apparatus or an FPD manufacturing apparatus.

DESCRIPTION OF SYMBOLS 1 Chamber 2 Fan 3 Motor 4 Fan unit 5 Filter 6 Guide plate 7 Peltier element 7a Heat absorption surface 7b Heat dissipation surface 8 Fin 9 Fan 10 Fin 11 Punching plate 12 Auxiliary guide plate

Claims (7)

A suction port is provided at the top of the box-shaped chamber, and the entire bottom surface of the chamber is a blowing surface,
A fan unit consisting of a fan and a motor is built in the chamber,
In the fan filter unit in which a filter is attached to the blowing surface of the chamber,
A guide plate underlying that downward from the ceiling surface of the chamber,
The guide plate extends from the outer periphery of the fan in a tangential direction forward of the rotation direction of the fan , and is in contact with the inner side surface of the chamber , forming an obtuse angle on the inner side surface and the fan side,
From the outer periphery of the fan, provided an auxiliary guide plate that is substantially parallel to the guide plate and provided a space between the chamber,
The guide plate and the auxiliary guide plate are provided in two sets so as to be substantially symmetrical about the rotation axis of the fan,
The guide plate is provided with a surface that closes a part of the fan blowing surface along the outer periphery of the fan in a direction opposite to the portion extending toward the inner side of the chamber, and the end of the guide plate is at the end of another auxiliary guide plate. Connected fan filter unit. The fan filter unit according to claim 1 , wherein a Peltier element is disposed on the side surface of the chamber such that the inner side of the chamber is a heat absorbing surface and the outer side is a heat radiating surface. The fan filter unit according to claim 2 , wherein fins are provided on each surface of the Peltier element. 4. The fan filter unit according to claim 2, wherein a fan is provided on a heat dissipation surface of the Peltier element. The fan filter unit according to any one of claims 2 to 4 , wherein the guide plate includes a fin, and the fin contacts a heat absorbing surface of the Peltier element. 6. The fan filter unit according to claim 2 , wherein a punching plate is provided between the blowout surface of the chamber and the filter, and the punching plate is in contact with the heat absorbing surface of the Peltier element. The fan filter unit according to any one of claims 1 to 6 , wherein a suction port is provided in an upper part of the box-shaped chamber, and the motor of the fan unit including the fan and the motor is disposed in the chamber so as to be outside the chamber.

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