JP5404502B2 - Filter device - Google Patents

Description

  The present invention relates to a filter device for a semiconductor manufacturing apparatus including a chemical filter, a dust removing filter, and a fan, and more particularly to a filter device that can be easily clamped and fixed and easily replaced.

The chamber of the filter device is a box made of a material, a plate thickness, and a structure that can reliably hold the filter and can withstand the wind pressure applied to the inside in order to maintain the filter characteristics. A filter tightening and fixing device for preventing air leakage from the chamber and the filter connecting portion is required in the chamber of the filter device. Conventional fastening devices are disclosed in Patent Literature 1 and Patent Literature 2.
In the tightening and fixing device disclosed in Patent Literature 1, a casing that forms an air flow path, a mounting seat that has an air flow opening provided by partitioning a cross section of the air flow path of the casing, and a frame body A filter unit that is formed by supporting the filter and is placed on the upper peripheral edge of the flow opening of the mounting seat via a gasket, and a filter pressing tool that is supported by pressing the mounting seat of the filter unit.
The filter pressing tool is connected to the first arm connected to the inside of the casing above the filter unit via the first hinge, and the first arm and the second hinge. A second arm, and in a state where the second arm is in contact with the upper side of the filter unit, the second arm is attached to a portion obliquely below so as to press the filter unit downward. Tighten and fix through.

  Further, in the tightening and fixing device disclosed in Patent Document 2, the guide surface has an inclined surface whose height with respect to the peripheral edge of the flow opening decreases in the insertion direction of the filter unit, and a predetermined position where the filter unit is installed. Until the filter unit is inserted into the peripheral edge of the flow opening, the gasket moves from the peripheral edge of the flow opening, and when the filter unit is inserted up to the peripheral edge of the flow opening, the gasket opens. It is formed so that it may contact with the peripheral part of.

Japanese Patent No. 4264662 Japanese Patent No. 4277231

  However, in Patent Document 1, there is a possibility that the gasket may be peeled off due to the friction between the gasket attached to the downstream frame of the filter and the filter frame when the filter is inserted. In order to tighten the filter via the hinge portion, it is necessary to secure the movable margin of the hinge portion in the thickness direction, and thus the tightening and fixing device becomes thick. Further, in Patent Document 2, when the filter unit reaches the peripheral edge of the flow opening serving as the forward end position, the gasket comes into close contact with the base surface, and the movement of the filter unit stops (dotted line in FIG. 3 of Patent Document 2). See location). For example, it is described that the movement of the filter unit is preferably forcibly stopped using a dedicated stopper. Therefore, before the filter unit reaches the stopper, the gasket is stopped in a frictional state in which the gasket is in close contact with the base surface. May cause a malfunction. If the gasket stops halfway, the gasket will not come to a predetermined location, and the gasket position will be displaced, resulting in a risk of air leakage.

The reason for this is that, according to FIG. 3, the innermost part of the guide rail is gradually inclined, so that the gasket needs to move on the base surface by the length of the mounting surface. When the gasket is forcibly moved in a frictional state in close contact with the base surface, there arises a problem that the gasket is peeled off as in the prior art. Moreover, according to FIG. 6, in order to perform filter tightening via the hinge portion, it is necessary to secure a movable margin of the hinge portion in the thickness direction, and thus the tightening and fixing device becomes thick.
Accordingly, the present invention provides a filter device capable of preventing the gasket from being peeled off by preventing friction between the gasket and the frame attached to the downstream frame of the filter when the filter is inserted, in order to solve the above problems. The purpose is to do.

The filter device of the present invention is a filter device in which a filter is detachably mounted in a casing, and the filter includes a gasket fixed to one surface side of the filter, A filter frame of the filter; a first support member provided on one side surface of the filter frame; and a second support member provided on the other side surface of the filter frame; An inner frame for contacting the gasket; and a fixing portion for fixing the gasket in close contact with the inner frame, wherein the fixing portion includes the first support member and the second member in the casing. The filter can be slid and inserted in a state where the gasket is separated from the inner frame while supporting a support member, First slide guides each having a notch for dropping the first support member and the second support member of the filter into contact with the inner frame when inserted to a predetermined position in the casing. And a fixing member that removably fixes the filter in a state in which the second slide guide and the gasket are in contact with the inner frame.
According to the above configuration, it is possible to prevent the gasket of the filter from being peeled off by preventing friction between the gasket attached to the downstream frame on one side of the filter and the frame when the filter is inserted. That is, when the filter is inserted, the gasket is separated from the inner frame, and there is no problem that the gasket is peeled off even if the filter is moved.

Preferably, it has a stopper for stopping the filter at the predetermined position in the casing, and when the insertion of the filter is stopped by the stopper, the first support member and the second support member are notched. And the gasket is brought into contact with the inner frame.
According to the above configuration, the insertion of the filter can be stopped by the stopper, and the filter can be dropped and the filter gasket can be reliably brought into contact with the internal frame.

Preferably, the fixing member has an insertion end portion and a fixed end portion, and a fixing member receiver for inserting and holding the insertion end portion, and the fixing end in a state where the insertion end portion is inserted into the fixing member receiver. And a fixture for detachably fixing the portion to the internal frame.
According to the above configuration, the insertion end portion of the fixing member is inserted into the fixing member receiver, and the fixing end portion only needs to be fixed to the inner frame using a fixture, and when fixing the filter to the inner frame, Since the moving distance of the fixing member in the vertical direction is minimized, the filter device can be formed thin while suppressing the thickness of the filter device.
Preferably, the fixing member receiver and the stopper are integrally formed.
According to the above configuration, the number of parts can be reduced as compared with the case where the fixing member receiver and the stopper are configured separately.
Preferably, the first slide guide and the second slide guide have a rail for placing and guiding the filter when the filter is inserted, and when the insertion of the filter is stopped, When the second support member is dropped into the notch, the first support member and the second support member move downward to be detached from the rail.
Preferably, after the filter is inserted, the filter has a fixing bar that is hung over the filter, and one end of the fixing bar on the back side is inserted into the stopper side, and the other end is bolted to the filter. The gasket is configured to be in close contact with the inner frame.

  According to the present invention, the gasket attached to the downstream frame of the filter at the time of insertion of the filter and the frame can be prevented from friction to make it difficult to peel off, and the thickness of the tightening and fixing device accompanying the tightening of the filter can be increased. It is possible to provide a filter device capable of suppressing the above.

It is a perspective view which shows embodiment of the filter apparatus of this invention. It is a perspective view which shows the internal structure of the filter apparatus shown in FIG. It is a perspective view which shows the state in which the filter is being fixed by the fixing bar. It is a figure which shows a mode that it fixes after a filter is inserted in a casing.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view showing an embodiment of a filter device of the present invention. FIG. 2 is a perspective view showing the internal structure of the filter device shown in FIG.
The filter device 1 shown in FIGS. 1 and 2 is preferably a device having a chemical filter and a dust removal filter for a semiconductor manufacturing apparatus. The filter device 1 includes a casing 2 having a rectangular parallelepiped shape, a filter 3, and a blower 4. The filter 3 is a rectangular plate-like member, for example, and is inserted into the casing 2 along the Y1 direction and fixed detachably. The casing 2 has a structure that does not escape the airflow passing through the casing 2 other than the filter 3 when the opening 2P is closed and sealed by the inspection door 5.

As the material of the casing 2 shown in FIGS. 1 and 2, for example, a galvanium steel plate, a plated steel plate (zinc, aluminum alloy), and stainless steel are used.
As shown in FIG. 1, the casing 2 includes a front surface portion 2A, a back surface portion 2B, side surface portions 2C and 2D, an upper surface portion 2E, a bottom surface portion 2F, and an inspection door 5. The front part 2A and the back part 2B face each other, and the side part 2C and the side part 2D face each other. The top surface 2E and the bottom surface 2F face each other, the top surface 2E is on the upstream side of the airflow, and the bottom surface 2F is on the downstream side of the airflow. The blower 4 is disposed in the casing 2 so as to correspond to the finger guard 16 at the center position of the upper surface portion 2E. Therefore, when the blower 4 rotates, the airflow flows in the Z2 direction.

As shown in FIGS. 1 and 2, the casing 2 has a shape in which the X direction is one side, the Y direction is the other side, and the Z direction is the thickness direction. A filter 3 is detachably disposed in the casing 2. As shown in FIG. 1, a dust removal filter 30 is disposed on the bottom surface 2 </ b> F side of the casing 2. Although not shown, for example, a rectangular aluminum lath net is provided on the downstream side of the dust removing filter 30.
The filter 3 is, for example, a chemical filter, and the filter 3 removes organic, acid, alkali, and the like. A dust removal filter 30 is disposed below the filter 3. The filter 3 is disposed on the upstream side of the airflow with respect to the dust removal filter 30. The dust removal filter 30 is, for example, a UPLA filter.

As shown in FIG. 1, an inspection door 5 is provided in the X direction on the front portion 2 </ b> A of the casing 2. These inspection doors 5 can open and close a rectangular opening 2 </ b> P by a plurality of hinges 19. The opening 2P communicates with the storage space 27 in the casing 2.
In FIG. 1, a new filter 3 can be slid and inserted along the Y1 direction through the opening 2P in the storage space 27 in the casing 2, and the used filter 3 can be stored in the new filter. When exchanging to 3, the used filter 3 can be slid along the Y2 direction through the opening 2P and taken out.

As shown in FIG. 1, the filter 3 has a metal filter frame 20. The filter frame 20 has one rectangular opening 20A and the other rectangular opening 20B. A gasket 22 is fixed to the downstream frame body 21 of the filter frame 20 by being attached using, for example, an adhesive. The gasket 22 is a rectangular frame member having an opening.
A first support member 25 is fixed to the first side surface portion 23 of the filter frame 20 by, for example, rivet bonding, and a second support member 26 is fixed to the second side surface portion 24 by, for example, welding. The first support member 25 and the second support member 26 are preferably metal fittings having an L-shaped cross section, and are formed to protrude in opposite directions toward the X direction. The first support member 25 and the second support member 26 are preferably fixed at a position near the upper surface of the filter frame 20 away from the gasket 22. A handle W is attached to the third side surface portion 28 of the filter frame 20.

Next, with reference to FIG. 1, FIG. 2, and FIG. 3, the fixing | fixed part 40 which fixes the filter 3 is demonstrated. FIG. 3 is a perspective view showing a state in which the filter 3 is fixed by the two fixing bars 71 and 72 of the fixing unit 30.
As shown in FIG. 2, the fixing portion 40 is provided for tightening and fixing the filter 3 to the inner frame 90 for attaching the filter as shown in FIG. ing. As shown in FIG. 1, the fixing portion 40 is disposed in the storage space portion 27 of the casing 2, and the fixing portion 40 is indicated by a broken line in FIG. 1. An internal frame 90 as a downstream frame has a rectangular opening 91. The opening 91 has a shape corresponding to the opening of the gasket 22 of the filter 3.

As shown in FIGS. 1 and 2, the fixing portion 40 includes a first slide guide 51, a second slide guide 52, a stopper 53, fixing bar receivers 61 and 62, and two fixing bars shown in FIG. 71, 72. The first slide guide 51, the second slide guide 52, the stopper 53, the fixed bar receivers 61 and 62, and the fixed bars 71 and 72 are, for example, metal members.
As shown in FIG. 1, the first slide guide 51 is fixed to the left side of the internal frame 90 in the casing 2 along the Y1 direction, and the second slide guide 52 is fixed to the right side of the internal frame 90 in the casing 2 on the right side of Y1. It is fixed on the right side along the direction. The first slide guide 51 and the second slide guide 52 are parallel.
The first slide guide and the second slide guide have the same structure and are paired.
The first slide guide 51 will be described as a representative example. The slide guide is long, the cross-sectional shape is a lateral and inward substantially U-shape, and the upper side is a first or second support member to be described later. It is a rail that can be placed and slid. The inner end portion of the rail portion has a bent portion that protrudes downward at a right angle.
The first slide guide 51 has a first notch 51R, and the second slide guide 52 has a second notch 52R. The first notch 51R and the second notch 52R are formed at positions facing each other, and are formed near the stopper 53 and near the back surface 2B of the casing 2.
The first slide guide 51 is an element for guiding the first support member 25 into the first notch 51R by guiding the Y3 direction while supporting and sliding the first support member 25 of the filter 3, The two slide guide 52 is an element for guiding the second support member 26 into the second cutout portion 52R by guiding the second support member 26 in the Y1 direction while supporting and sliding the second support member 26 of the filter 3. At the height at which the first and second support members are dropped from the first and second notches, each support member moves to a lower position and does not interfere with the upper side of each slide guide as a rail. Therefore, when the filter is replaced, if the filter 3 is pulled forward with the handle W of the filter 3, the filter 3 can be pulled out without contacting the first and second slide guides.

As shown in FIGS. 1 and 2, the stopper 53 is fixed to the internal frame 90 along the X direction at a position inside the casing 2 and close to the back surface portion 2B of the casing 2. As shown in FIG. 3, the stopper 53 can be positioned in the Y1 direction by contacting the front end 3A of the filter 3 in a state where the filter 3 is completely inserted.
2 and 3, the fixed bar receivers 61 and 62 are formed integrally with the stopper 53, and the fixed bar receivers 61 and 62 protrude from the stopper 53 in parallel with the Z1 direction. Thus, by forming the fixed bar receivers 61 and 62 and the stopper 53 integrally, the number of parts can be reduced.

As shown in FIG. 3, the fixing bars 71 and 72 are band-shaped members formed by bending, and are fixing tools for tightening and fixing the filter 3 to the internal frame 90. One end portions of the fixing bars 71 and 72 are fixed end portions 71A and 72A, and the other end portions of the fixing bars 71 and 72 are insertion end portions 71B and 72B inserted into the fixing bar receivers 61 and 62, respectively. The fixed end portions 71A and 72A are fixed to the internal frame 90 using, for example, screws 77 as fixing members. The fixed end portions 71A and 72A are fixed to the inner frame 90 by using, for example, screws 77 as fixing members. Moreover, in a state where the insertion end portions 71B and 72B of the fixing bars 71 and 72 are inserted into the fixing bar receivers 61 and 62, respectively, the bent portions 71C and 72C of the fixing bars 71 and 72 and the insertion end portions 71B and 72B. The frame portion 20H of the filter 3 is interposed at the position.

Next, referring to FIG. 1 to FIG. 4, an operation for inserting and fixing the filter 3 in the casing 2 of the filter device 1 described above, and an operation for replacing the used filter 3 with a new filter 3. These will be described in order.
FIG. 4 is a diagram illustrating a state in which the filter 3 is fixed to the inner frame 90 after the filter 3 is inserted into the casing 2.
First, an operation for sliding and inserting the filter 3 into the casing 2 and fixing it will be described.
When the operator opens the inspection door 5 shown in FIG. 1, the filter 3 shown in FIG. 1 can be inserted and fixed in the casing 2 shown in FIG. 1 through the opening 2P while sliding along the Y1 direction. That is, as shown in FIGS. 2 and 4A, the operator places the first support member 25 and the second support member 26 of the filter 3 on the corresponding first slide guide 51 and second slide guide 52, respectively. The filter 3 is slid in the Y1 direction.

When the operator pushes the filter 3 in the Y1 direction, as shown in FIGS. 3 and 4A, the insertion front end 3A of the filter 3 abuts against the stopper 53, whereby the filter 3 is positioned in the Y1 direction. . Moreover, as shown in FIGS. 2 and 4B, when the insertion front end 3 </ b> A of the filter 3 hits the stopper 53, the first support member 25 and the second support member 26 of the filter 3 are moved to the first slide guide 51. Of the first notch 51R and the second notch 52R of the second slide guide 52. Thereby, the gasket 22 on the lower surface side of the filter 3 is brought into contact with the inner frame 90, and the filter 3 faces the opening 91 of the inner frame 90.

Next, as described above, the stopper 53 positions the filter 3 in the Y1 direction, and the gasket 22 of the filter 3 is in contact with the inner frame 90, and the filter 3 faces the opening 91. Then, as shown in FIG. 3 and FIG. 4C, the filter 3 is fixed using two fixing bars 71 and 72. That is, after the insertion end portions 71B and 72B are inserted into the fixing bar receivers 61 and 62, the fixing end portions 71A and 72A of the fixing bars 71 and 72 are fixed to the inner frame 90 using screws 77, respectively. Accordingly, the filter 3 can be fastened and fixed to the inner frame 90 so as not to float in the Z1 direction from the inner frame 90 and to move in the Y2 direction and the X direction.

In this way, the filter 3 is inserted into the casing 2 and fastened and fixed to the internal frame 90, so that the following effects are obtained.
The filter 3 is placed on the corresponding first slide guide 51 and second slide guide 52 using the first support member 25 and the second support member 26 of the filter 3, and the operator handles the filter 3. Hold W and push filter 3 in the Y1 direction. When the insertion front end 3A of the filter 3 abuts against the stopper 53, the filter 3 can be positioned in the Y1 direction, and the first support member 25 and the second support member 26 of the filter 3 are notched to the first notch of the first slide guide 51. It falls into the part 51 </ b> R and falls into the second notch part 52 </ b> R of the second slide guide 52.

For this reason, when the filter 3 is inserted, the gasket 22 is separated from the inner frame 90, and the gasket 22 never touches the inner frame 90, so that the gasket 22 is not peeled off from the filter 3. Friction between the gasket 22 attached to the downstream frame of the filter 3 when the filter 3 is inserted and the frame 3 is prevented, and the gasket 22 of the filter 3 cannot be peeled off. Therefore, the filter 3 can be easily inserted into the casing 2 and positioned.
Since the filter 3 is fastened and fixed by the fixing bars 71 and 72, the gasket 22 can be held in close contact with the inner frame 90. Even if the gasket 22 contracts, the gasket 22 and the inner frame 90 can be contracted. It is possible to prevent the airflow from leaking from between. Furthermore, it is possible to prevent the gasket 22 from being displaced with respect to the internal frame 90 during operation or due to vibrations from other devices.

The fixing bars 71 and 72 are inserted into the casing 2 along the filter 3 in the Y1 direction, the insertion end portions 71B and 72B are inserted into the fixing bar receivers 61 and 62, and the fixed end portions 71A and 72A are inserted. The fixing bars 71 and 72 for tightening may be inserted along the filter 3 in the Y1 direction by fixing to the inner frame 90 using the screws 77, and it is not necessary to insert them in the Z1 and Z2 directions. For this reason, since the vertical movement distance (occupied distance) of the fastening bars 71 and 72 for tightening can be minimized, the thickness of the casing 2 in the Z1 and Z2 directions of the casing 2, that is, the vertical direction is minimized. It can be made as thin as possible. The fixing bars 71 and 72 for tightening are thin plate members, and the shape of the fixing bars 71 and 72 can be formed along the outer shape of the filter 3, so that the thickness of the casing 2 in the vertical direction can be minimized. it can. That is, the increase in dimension in the thickness direction due to the tightening mechanism for tightening the filter 3 in the casing 2 can be minimized.

Next, the exchange operation of the filter 3 will be described.
When the used filter 3 is replaced with a new filter 3, the used filter 3 fixed in the casing 2 is taken out from the casing 2.
The operator opens the inspection door 5 shown in FIG. 1, removes the screw 77 shown in FIG. 4C, and takes out the two fixing bars 71 and 72 in the Y2 direction. Then, the operator can take out the filter 3 along the Y2 direction by holding the handle W of the filter 3.

The filter device of the present invention is a filter device in which a filter in a casing is detachably mounted. The filter includes a gasket fixed to one surface side of the filter, a filter frame of the filter, and one of the filter frames. A first support member provided on the side surface of the filter and a second support member provided on the other side surface of the filter frame, and an inner frame for contacting the filter gasket in the casing, The fixing portion for fixing the gasket in close contact is provided, and the fixing portion supports the first support member and the second support member in the casing and slides the filter while the gasket is separated from the inner frame. And when the filter is inserted to a predetermined position in the casing, the first support member and the second support member of the filter are dropped, A plate shape for detachably fixing the first slide guide and the second slide guide having notches for contacting the sket to the internal frame, and the filter in a state where the gasket is in contact with the internal frame to the internal frame. And a fixing member.
This prevents friction between the gasket attached to the downstream frame on one side of the filter and the frame when the filter is inserted, and makes it difficult to peel off the gasket of the filter. That is, when the filter is inserted, the gasket is separated from the inner frame, and there is no problem that the gasket is peeled off even if the filter is moved.

In the embodiment of the present invention, it has a stopper for stopping the filter at a predetermined position in the casing, and the first support member and the second support member are dropped into the notch when the insertion of the filter is stopped by the stopper, The gasket is brought into contact with the inner frame.
Accordingly, the insertion of the filter can be stopped by the stopper, and the filter can be dropped and the filter gasket can be reliably brought into contact with the inner frame.

The fixing member has an insertion end portion and a fixed end portion. The fixing member receiver inserts and holds the insertion end portion, and the fixing end portion is attached to and detached from the inner frame with the insertion end portion inserted into the fixing member receiver. And a fixing device that can be fixed.
Thereby, the insertion end portion of the fixing member is inserted into the fixing member receiver, and the fixing end portion only needs to be fixed to the inner frame using a fixture, and when fixing the filter to the inner frame, Since the moving distance in the vertical direction is minimized, the filter device can be formed thin with a reduced thickness.
Further, the fixing member receiver and the stopper are integrally formed. As a result, the number of parts can be reduced as compared with the case where the fixing member receiver and the stopper are configured separately. In the embodiments described later, the “fixing member” has been described as “band-shaped”. However, the present invention is not limited to this. Things can be used.

  As materials of parts such as the inspection door 5 and the casing 2 used in the embodiment of the filter device of the present invention, for example, a galvanium steel plate, a plated steel plate (zinc, aluminum alloy), stainless steel is used, and a rivet structure is used without welding. By doing so, it can be made unpainted.

Next, the materials used will be described for the best mode for carrying out the present invention.
Since the present invention does not have a feature in the material used, it can be used even if not described.
Chemical filter is activated carbon granular, organic gas removal filter by physical adsorption such as activated carbon fiber, impregnated activated carbon granular, granular of strongly acidic cation exchange resin, acidic gas removal filter by chemical adsorption of fibrous, impregnated activated carbon granular, One or a plurality of alkali gas removal filters by chemical adsorption such as granular or fibrous weakly basic anion exchange resin can be used, or can be used in a combination in which they are divided into planes. In particular, from the viewpoint of thin and low pressure loss, the chemical filter is preferably a zigzag-shaped filter medium having a structure in which activated carbon particles or an ion exchange resin is sandwiched between nonwoven fabrics.

The dust removal filter is a dust removal filter in which a filter medium made of glass fiber nonwoven fabric, electret nonwoven fabric, PTFE membrane, etc. is folded in a zigzag shape, and is kept spaced by a separator or resin ribbon, and the filter frame is hermetically solidified with an airtight agent such as urethane resin. Can be used. In particular, the dust removal filter is preferably a PTFE membrane filter from the viewpoint of low gas generation with less generation of boron, organic gas, and the like.
As the fan, an axial fan, a mixed fan, a centrifugal fan, a sirocco fan, or the like can be used. In particular, an axial fan is preferable from the viewpoint of thinness and weight reduction. As the gasket, chloroprene resin, EPDM resin, or the like can be used. In particular, the gasket is preferably an EPDM resin from the viewpoint of gas generation.

  The gasket which is an example of the gasket used in the embodiment of the filter device of the present invention has an airtightness between the gasket and the mounting frame of the filter in the case of pressing that can be used such as a normally used single cell type chloroprene rubber. It can be secured.

  DESCRIPTION OF SYMBOLS 1 ... Filter apparatus, 2 ... Casing, 3 ... Filter, 4 ... Blower, 5 ... Inspection door (an example of a door), 20 ... Filter frame, 22 ... Gasket, 25. ..First support member, 26 ... second support member, 40 ... fixed portion, 51 ... first slide guide, 52 ... second slide guide, 61, 62 ... fixed bar receiver , 71, 72... Fixing bar (fixing member), 90... Inner frame

Claims (6)

A filter device in which a filter is detachably mounted in a casing,
The filter includes a gasket fixed to one surface side of the filter, a filter frame of the filter, a first support member provided on one side surface of the filter frame, and a second side surface of the filter frame. A second support member provided;
An inner frame for contacting the gasket of the filter in the casing;
A fixing portion for fixing the gasket in close contact with the inner frame;
The fixing part is
The filter can be slid and inserted in a state where the first support member and the second support member are supported in the casing and the gasket is separated from the inner frame, and the filter is predetermined in the casing. A first slide guide and a second slide guide, each having a notch for dropping the first support member and the second support member of the filter into contact with the inner frame when inserted to a position; ,
A filter device, comprising: a fixing member that removably fixes the filter in a state where the gasket is in contact with the inner frame.   A stopper for stopping the filter at the predetermined position in the casing; and when the insertion of the filter is stopped by the stopper, the first support member and the second support member are dropped into the notch. The filter device according to claim 1, wherein the gasket is rarely brought into contact with the inner frame. The fixing member has an insertion end and a fixing end,
A fixing member receiver for inserting and holding the insertion end,
3. The fixing device according to claim 1, further comprising: a fixing tool that detachably fixes the fixed end portion to the inner frame in a state where the insertion end portion is inserted into the fixing member receiver. The filter device as described.   The filter device according to claim 3, wherein the fixing member receiver and the stopper are integrally formed.   The first slide guide and the second slide guide have rails for placing and guiding the filter when the filter is inserted, and when the insertion of the filter stops, the first support member and the second slide guide 5. The structure according to claim 2, wherein when the support member is dropped into the notch, the first support member and the second support member move downward to be detached from the rail. The filter apparatus of crab.   After inserting the filter, the gasket has a fixing bar that spans over the filter, and inserts one end on the back side of the fixing bar to the stopper side and bolts the other end to the gasket. The filter device according to claim 1, wherein the filter device is configured to be in close contact with the inner frame.

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