JP5406497B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus having a cutting blade for cutting a workpiece such as a semiconductor wafer held on a chuck table, and more particularly, to determine the origin position of a cutting blade that serves as a reference for setting the cutting amount of the cutting blade. The present invention relates to a cutting device provided with an origin detection mechanism for detection.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor chips.

Cutting along the streets of the above-described semiconductor wafer, optical device wafer or the like is usually performed by a cutting device called a dicer. The cutting apparatus includes a chuck table having a holding surface for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and the cutting blade. A cutting feed means for moving in a cutting feed direction perpendicular to the holding surface of the chuck table, and a processing feed means for moving the chuck table and the cutting means relative to each other are provided. Such a cutting apparatus is provided with an origin detection mechanism for detecting the origin position of the cutting blade that is a reference for setting the cutting amount of the cutting blade. (For example, refer to Patent Document 1.)
Utility Model Registration No. 2597808

  In the origin detection mechanism disclosed in Patent Document 1, a communication hole facing the end surface of the rotary spindle is provided in a spindle housing that rotatably supports the rotary spindle on which a cutting blade is mounted, and an electrode terminal made of carbon is provided in the communication hole. The electrode terminal is pressed against the end surface of the rotary spindle by being slidably disposed and a spring. Then, a spring receiver having a lead wire attached to the end of the communication hole is screwed, and the lead wire attached to the spring receiver is connected to the origin detection circuit. The origin detection mechanism configured in this way moves the cutting means toward the holding surface of the chuck table while rotating the cutting blade, and when the cutting blade comes into contact with the chuck table, a current flows through the origin detection circuit. The current flow is detected by an ammeter, and the cutting position of the cutting blade when this current is detected is set as the origin position.

  Thus, in the conventional origin detection mechanism described above, an electrode terminal made of carbon, a spring, and a lead wire are attached to a communication hole provided in a spindle housing that rotatably supports the rotary spindle so as to face the end surface of the rotary spindle. Therefore, when replacing the electrode terminal with a new electrode terminal, the lead wire must be removed each time the electrode terminal is worn out. There is a problem that it takes.

  This invention is made | formed in view of the said fact, The main technical subject is to provide the cutting device which can implement the exchange operation of the electrode terminal which comprises an origin detection mechanism easily.

In order to solve the main technical problem, according to the present invention, a chuck table having a holding surface for holding a workpiece and a cutting means having a cutting blade for cutting the workpiece held on the chuck table. And a cutting feed means for moving the cutting blade in a cutting feed direction perpendicular to the holding surface of the chuck table, and origin detection for detecting the origin position of the cutting blade serving as a reference for setting the cutting amount of the cutting blade A cutting device comprising a mechanism,
The origin detection mechanism includes brush means that is mounted on a spindle housing that rotatably supports a rotating spindle on which the cutting blade is mounted, and that is opposed to an end surface of the rotating spindle, and the brush means that is provided on the spindle housing. A connection terminal electrically connected to the brush means in a state of being attached to the brush means, and an origin detection circuit connected to the connection terminal via a lead wire ,
The brush means includes a holder that is detachably attached to the spindle housing and has a cylinder hole having an opening facing the end surface of the rotary spindle, and an electrode terminal that is slidably disposed in the cylinder hole of the holder And a coil spring formed of a conductive material that is attached to the holder and is electrically connected to the electrode terminal and is in contact with the connection terminal provided on the spindle housing while the holder is mounted on the spindle housing and comprising a contact terminal made of,
When replacing the electrode terminal, the brush means is removed from the spindle housing without removing the lead wire connected to the connection terminal provided on the spindle housing.
A cutting device is provided.

  The holder is provided with a first cylinder hole and a second cylinder hole, and the first electrode terminal and the second electrode terminal can slide in the first cylinder hole and the second cylinder hole, respectively. The first electrode terminal and the second electrode terminal are electrically connected to the first electrode terminal and the second electrode terminal, respectively, and the holder is mounted on the spindle housing. A first contact terminal and a second contact terminal that are in contact with the connection terminal and the second connection terminal, respectively, are disposed.

In the cutting apparatus according to the present invention, the origin detection mechanism includes a brush unit that is mounted on a spindle housing that rotates and supports a rotating spindle on which a cutting blade is mounted, and is opposed to the end surface of the rotating spindle, and the brush unit that is provided on the spindle housing includes the spindle. A connection terminal electrically connected to the brush means in a state of being mounted on the housing, and an origin detection circuit connected to the connection terminal via a lead wire, the brush means being detachably mounted on the spindle housing A holder having a cylinder hole having an opening facing the end surface of the rotating spindle, an electrode terminal slidably disposed in the cylinder hole of the holder, a spindle attached to the holder and electrically connected to the electrode terminal and the spindle Connection provided on spindle housing with holder mounted on housing Has and a contact terminal comprising a coil spring formed of a conductive material in contact with the child, when replacing the electrode terminal without removing the lead wires connected to the connection terminals provided on the spindle housing Since the brush means is removed from the spindle housing, since the connection terminal connected to the origin detection circuit via the lead wire is mounted on the spindle housing, it is not necessary to remove the lead wire. Accordingly, the electrode terminal can be easily replaced.

DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a cutting device configured according to the present invention will be described in more detail with reference to the accompanying drawings.
FIG. 1 shows a perspective view of a cutting device constructed in accordance with the present invention. The cutting apparatus shown in FIG. 1 is disposed so as to be movable in a direction indicated by an arrow X that is a cutting feed direction (X-axis direction) on the stationary base 2 and the stationary base 2. A chuck table mechanism 3, a spindle support mechanism 4 disposed on the stationary base 2 so as to be movable in a direction indicated by an arrow Y that is an index feed direction (Y-axis direction) orthogonal to the machining feed direction (X-axis direction); A spindle as a cutting means movably disposed in a direction indicated by an arrow Z which is a cutting feed direction (Z-axis direction) perpendicular to a workpiece holding surface of a chuck table, which will be described later, of the spindle support mechanism 4. A unit 5 is provided.

  The chuck table mechanism 3 includes a pair of guide rails 31, 31 disposed in parallel along the machining feed direction (X-axis direction) indicated by an arrow X on the stationary base 2, and the pair of guide rails 31, A chuck table support base 32 that is movably disposed on the work feed direction indicated by an arrow X on 31, a cover table 34 supported on the chuck table support base 32 by a cylindrical member 33, and the cylindrical member 33 Is provided with a chuck table 35 as a workpiece holding means supported rotatably. The chuck table support base 32 is provided with a pair of guided grooves 321 and 321 that are fitted to the pair of guide rails 31 and 31. The pair of guided grooves 321 and 321 is a pair of guide rails 31 and 31. By being fitted to 31, the chuck table support base 32 is configured to be movable along the pair of guide rails 31 and 31 in the cutting feed direction (X-axis direction) indicated by the arrow X. The chuck table 35 includes a frame body 350 made of stainless steel, and an adsorption chuck 351 formed of a porous material fitted in a fitting recess formed on the upper surface of the frame body 350. . The upper surface of the frame 350 of the chuck table 35 configured as described above and the upper surface of the suction chuck 351 are formed flush with each other, and the upper surface of the suction chuck 351 serves as a holding surface for holding the workpiece. The chuck table 35 configured as described above holds, for example, a disk-shaped semiconductor wafer, which is a workpiece, on the suction chuck 361 by suction means (not shown). The chuck table 35 configured as described above is rotated by a pulse motor (not shown) disposed in the cylindrical member 33. The chuck table 35 is provided with a clamp 352 for fixing an annular frame described later.

  The chuck table mechanism 3 in the illustrated embodiment includes a cutting feed means 36 that moves the chuck table 35 in a cutting feed direction indicated by an arrow X. The cutting feed means 36 includes a male screw rod 361 disposed in parallel between the pair of guide rails 31 and 31, and a drive source such as a servo motor 362 for rotationally driving the male screw rod 361. One end of the male screw rod 361 is rotatably supported by a bearing block 363 fixed to the stationary base 2, and the other end is connected to the output shaft of the servo motor 362. The male screw rod 361 is screwed into a female screw 322 formed at the center of the chuck table support base 33. Therefore, the chuck table support base 32 is moved along the guide rails 31 and 31 in the machining feed direction indicated by the arrow X by driving the male screw rod 361 forward and backward by the servo motor 362.

  The spindle support mechanism 4 includes a pair of guide rails 41, 41 arranged in parallel on the stationary base 2 along the indexing feed direction (Y-axis direction) indicated by an arrow Y, and the pair of guide rails 41, A movable support base 42 is provided on 41 so as to be movable in the direction indicated by arrow Y. The movable support base 42 includes a pair of guide rails 41, a movable support portion 421 that is movably disposed on the guide rails 41, and a mounting portion 422 attached to the movable support portion 421. A pair of guided grooves 421a and 421a that are fitted to the pair of guide rails 41 and 41 are formed on the lower surface of the movement support portion 421. The pair of guided grooves 421a and 421a are connected to the pair of guide rails 41 and 41, respectively. By being fitted to 41, the movable support base 42 is configured to be movable along the pair of guide rails 41 and 41. In addition, the mounting portion 422 is provided with a pair of guide rails 423 and 423 extending in the cutting feed direction (Z-axis direction) perpendicular to the workpiece holding surface of the chuck table 35 indicated by an arrow Z on one side surface. ing. The laser beam irradiation unit support mechanism 4 in the illustrated embodiment includes an index feed means 43 for moving the movable support base 42 in the index feed direction (Y-axis direction) indicated by the arrow Y along the pair of guide rails 41, 41. It has. The index feeding means 43 includes a male screw rod 431 arranged in parallel between the pair of guide rails 41, 41, and a drive source such as a pulse motor 432 for rotationally driving the male screw rod 431. One end of the male screw rod 431 is rotatably supported by a bearing block (not shown) fixed to the stationary base 2, and the other end is connected to the output shaft of the pulse motor 432. The male screw rod 431 is screwed into a female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the moving support portion 421 constituting the movable support base 42. Therefore, the movable support base 42 is moved along the guide rails 41 and 41 in the indexing feed direction (Y-axis direction) indicated by the arrow Y by driving the male screw rod 431 forward and backward by the pulse motor 432. .

  A spindle unit 5 as a cutting means in the illustrated embodiment is attached to a unit holder 51. The unit holder 51 is provided with a pair of guided grooves 511 and 511 slidably fitted to a pair of guide rails 423 and 423 provided in the mounting portion 422. The guided grooves 511 and 511 are provided. Is fitted to the guide rails 423 and 423 so as to be movable in the cutting feed direction (Z-axis direction) perpendicular to the holding surface of the chuck table 35 indicated by the arrow Z. The spindle unit 5 in the illustrated embodiment includes a cutting feed means 52 for moving the holder 51 along the pair of guide rails 423 and 423 in the cutting feed direction (Z-axis direction). The cutting feed means 52, like the cutting feed means 36 and the index feed means 43, is a male screw rod (not shown) disposed between a pair of guide rails 423 and 423, and for rotationally driving the male screw rod. A drive source such as a pulse motor 522 is included, and a male screw rod (not shown) is driven forward and backward by the pulse motor 522 to move the unit holder 51 along the guide rails 423 and 423 in the Z-axis direction.

Next, the spindle unit 5 will be described with reference to FIG.
The spindle unit 5 shown in FIG. 2 includes a spindle housing 61, a rotating spindle 62 rotatably disposed in the spindle housing 61, and a cutting blade 63 attached to the tip of the rotating spindle 62. . The spindle housing 61 is formed in a substantially cylindrical shape, and includes a shaft hole 611 penetrating in the axial direction. A rotary spindle 62 that is inserted through a shaft hole 611 formed in the spindle housing 61 is provided with a cutting blade 63 at its front end (left end in FIG. 2). The cutting blade 63 includes a blade base 631 made of aluminum and an annular cutting edge 632 formed on a side surface of the blade base 631. The cutting blade 63 configured as described above is attached to a mounter 63a mounted on the rotary spindle 62 by a nut 63b. The annular cutting edge 632 constituting the cutting blade 63 is an electroformed blade in which abrasive grains are bonded to the side surface of the blade base 631 by metal plating such as nickel.

  A thrust bearing flange 621 is provided on the outer periphery of the rotary spindle 62 so as to protrude in the radial direction. The rotary spindle 62 configured in this manner is disposed so as to pass through a shaft hole 611 formed in the spindle housing 61 and is rotatably supported by high-pressure air supplied between the inner wall of the shaft hole 611. .

  The illustrated spindle unit 5 includes an electric motor 64 for driving the rotary spindle 62 to rotate. The illustrated electric motor 64 is a permanent magnet motor. The permanent magnet type electric motor 64 is disposed on the spindle housing 61 on the outer peripheral side of the rotor 641 and a rotor 641 made of a permanent magnet mounted on a motor mounting portion 622 formed at the rear end of the rotary spindle 62. And a stator coil 642. In the electric motor 64 configured in this way, a stator coil 642 is connected to a power supply means (not shown).

  Continuing the description with reference to FIG. 2, the cutting apparatus in the illustrated embodiment includes an origin detection mechanism 7 for detecting the origin position of the cutting blade that is a reference for setting the cutting amount of the cutting blade 63. ing. The origin detection mechanism 7 includes brush means 70 for electrically connecting to the rotary spindle 62 on which the cutting blade is mounted, and an origin detection circuit 80 connected to the brush means 70. The brush means 70 is demonstrated with reference to FIG. 3 and FIG.

  The brush means 70 in the embodiment shown in FIG. 3 and FIG. 4 has an electrode terminal holding part 711 and a mounting part 712 formed continuously from the rear end of the electrode terminal holding part 711 and attached to the spindle housing 61. A holder 71 is provided. The holder 71 is made of an insulating material such as synthetic resin. The electrode terminal holding portion 711 of the holder 71 is formed in a columnar shape, and the first cylinder hole 711a and the second cylinder hole 711a having an opening facing the rear end surface of the rotary spindle 62 in a state where the holder 71 is mounted on the spindle housing 61. A cylinder hole 711b is provided. The mounting portion 712 of the holder 71 is formed in a circular shape larger than the diameter of the electrode terminal holding portion 711, and the first contact terminal mounting member 712 a and the second contact terminal mounting member 712 a formed of a conductive material such as copper are formed on the front end surface thereof. The contact terminal attaching member 712b is attached. The mounting portion 712 includes a first cylinder hole 711a and a second cylinder hole 711b provided in the electrode terminal holding portion 711, a first contact terminal attachment member 712a, and a second contact terminal attachment member 712b. Two wiring passages 712c (only one of them is shown in FIG. 4) are provided. The first contact terminal mounting member 712a and the second contact terminal mounting member 712b have a right end portion formed in a small diameter in FIG. 4, and the right end portion is fitted to the wiring passage 712c and is attached to the holder 71. It is attached. The mounting portion 712 is provided with two mounting holes 712d and 712d as shown in FIG.

  The first cylinder hole 711a and the second cylinder hole 711b provided in the electrode terminal holding portion 711 of the holder 71 configured as described above are provided in the first electrode terminal 72a and the second electrode terminal made of carbon, respectively. The first pressing spring 73a and the second pressing spring 73b, which are coil springs made of a conductive material, are disposed in a slidable manner. Accordingly, the first electrode terminal 72a and the second electrode terminal 72b are pressed forward (leftward in FIG. 4) by the spring force of the first pressing spring 73a and the second pressing spring 73b, respectively. . On the other hand, the first contact terminal mounting member 712a and the second contact terminal mounting member 712b provided in the mounting portion 712 constituting the holder 71 are each provided with a first contact terminal made of a coil spring formed of a conductive material. 74a and the second contact terminal 74b are mounted. The first pressing spring 73a, the second pressing spring 73b, the first contact terminal mounting member 74a, and the second contact terminal mounting member 74b are respectively provided in two wiring passages 712c. They are connected by a conductor 75 (only one is shown in FIG. 4). Accordingly, the first contact terminal 74a and the second contact terminal 74b are respectively connected to the first pressing spring 73a and the second contact terminal 75a via the first contact terminal mounting member 712a and the second contact terminal mounting member 712b and the conducting wire 75, respectively. Connected to the pressing spring 73b.

  The brush means 70 configured as described above inserts the electrode terminal holding portion 711 of the holder 71 from the rear end (right end in FIG. 2) of the spindle housing 61 as shown in FIG. The spindle housing 61 is screwed into a female screw hole (not shown) formed in the spindle housing 61 by screwing a fastening bolt 76 that is inserted through the two mounting holes 712d and 712d (see FIG. 3). Attached to. When the brush means 70 is attached to the spindle housing 61 as described above, the brush means 70 is disposed in the first cylinder hole 711 a and the second cylinder hole 711 b provided in the electrode terminal holding portion 711 constituting the holder 71. The first electrode terminal 72a and the second electrode terminal 72b are brought into contact with the rear end surface of the rotary spindle 62 while being pressed by the spring force of the first pressing spring 73a and the second pressing spring 73b. In the state where the brush means 70 is attached to the spindle housing 61, the first contact terminal 74a and the second contact terminal 74b are two connection terminals 77 provided on the spindle housing 61 (one in FIG. 2). Are only configured to contact each other). The two connection terminals 77 are connected to the origin detection circuit 80 via the first lead wire 78a and the second lead wire 78b, respectively.

  Continuing with reference to FIG. 2, the origin detection circuit 80 includes a DC power supply 81, and the anode (+) of the DC power supply 81 is connected to the first lead wire 78 a via the power switch 82 and the wiring 83. And is connected to the chuck table 35 via the power switch 82 and the wiring 84. Further, the negative electrode (−) of the DC power supply 81 is connected to the second lead wire 78 b through the wiring 85. The wiring 83 is provided with an open / close switch 86 and a first ammeter 87. A second ammeter 88 is disposed on the wiring 84.

The origin detection mechanism 7 in the illustrated embodiment is configured as described above, and a procedure for detecting the origin position of the cutting blade 63 serving as a reference for setting the cutting amount of the cutting blade 63 will be described below.
First, an electrode terminal contact confirmation step for confirming whether or not the first electrode terminal 72a and the second electrode terminal 72b of the brush means 70 are in contact with the rear end surface of the rotary spindle 62 is performed. This electrode terminal contact confirmation step is performed with the power switch 82 and the open / close switch 86 closed (ON). When the power switch 82 and the open / close switch 86 are closed (ON), the DC power supply 81 to the power switch 82, open / close switch 86, wiring 83, first lead wire 78a, one connection terminal 77, first contact terminal 74a, first contact One contact terminal mounting member 712a, one conductor 75, a first pressing spring 73a, a first electrode terminal 72a, a rotary spindle 62, a second electrode terminal 72b, a second pressing spring 73b, the other conductor 75, A current flows through the second contact terminal attachment member 712b, the second contact terminal 74b, the other connection terminal 77, the second lead wire 78b, and the wiring 85. By confirming this current flow with the first ammeter 87, it is confirmed that the first electrode terminal 72a and the second electrode terminal 72b of the brush means 70 are in contact with the rear end surface of the rotary spindle 62. be able to. Therefore, the circuit through which the current flows as described above constitutes a confirmation circuit for confirming whether or not the first electrode terminal 72 a and the second electrode terminal 72 b are in contact with the end surface of the rotary spindle 62. When the first ammeter 87 does not operate in this electrode terminal contact confirmation step, either one or both of the first electrode terminal 72a and the second electrode terminal 72b of the brush means 70 is connected to the rotary spindle 62. Since there is a high possibility that the rear end surface is not touched, the brush means 70 is removed from the spindle housing 61 and the constituent members are checked.

  If it is confirmed that the first electrode terminal 72a and the second electrode terminal 72b of the brush means 70 are in contact with the rear end surface of the rotary spindle 62 by performing the electrode terminal contact confirmation step as described above. After the opening / closing switch 86 is opened (OFF), an origin position setting step is performed. In the origin position setting step, the chuck table 35 is moved to the lower side of the cutting blade 63 of the spindle unit 5, the electric motor 64 of the spindle unit 5 is driven to rotate the rotating spindle 62, and the cutting blade 63 is rotated. The spindle motor 5 is lowered by operating the pulse motor 522 of the cutting feed means 52. When the annular cutting edge 632 of the cutting blade 63 comes into contact with the upper surface of the frame 350 made of stainless steel constituting the chuck table 35, the power switch 82, the wiring 84, and the frame of the chuck table 35 are connected from the DC power supply 81. Body 350, cutting blade 63, rotary spindle 62, second electrode terminal 72b, second pressing spring 73b, other conductor 75, second contact terminal mounting member 712b, second contact terminal 74b, other connection terminal 77, a current flows through the second lead wire 78b and the wiring 85. The position of the spindle unit 5 at the time when the current flow is confirmed by the second ammeter 88, that is, the cutting position of the cutting blade 63 is set as the origin position. When the origin position setting step is thus performed, the power switch 82 is opened (OFF).

When the origin position of the cutting blade 63 is set as described above, the workpiece is held on the upper surface (holding surface) of the suction chuck 351 that is flush with the upper surface of the frame 350 constituting the chuck table 35, The cutting operation is performed by positioning the cutting blade 63 at a predetermined cutting depth position with the origin position as a reference.
Since the first electrode terminal 72a and the second electrode terminal 72b of the brush means 70 are in contact with the rear end surface of the rotary spindle 62, they wear out. It is necessary to replace the electrode terminal 72b. In order to replace the first electrode terminal 72a and the second electrode terminal 72b, the fastening bolt 76 fixing the holder 71 of the brush means 70 to the spindle housing 61 is loosened, and the brush means 70 is removed from the spindle housing 61. . Then, the first electrode terminal 72a and the second electrode terminal disposed in the first cylinder hole 711a and the second cylinder hole 711b provided in the electrode terminal holding portion 711 of the holder 71 constituting the brush means 70. 72b is taken out and replaced with a new electrode terminal. When this electrode terminal is replaced, the brush means 70 is removed from the spindle housing 61. The first lead wire 78a and the second lead wire 78b connected to the origin detection circuit 80 are mounted on the spindle housing 61. Since it is connected to the two connection terminals 77, it is not necessary to remove the first lead wire 78a and the second lead wire 78b, so that the above replacement work is facilitated.

  Although the present invention has been described based on the illustrated embodiment, the present invention is not limited to the embodiment, and various modifications are possible within the scope of the gist of the present invention. For example, in the above-described embodiment, in order to confirm that the electrode terminal is in contact with the rear end surface of the rotary spindle 62, the brush means 70 has two electrode terminals (the first electrode terminal 72a and the second electrode terminal). Although the example provided with the electrode terminal 72b) is shown, in order to detect the origin position of the cutting blade 63, it is sufficient to provide one electrode terminal.

A perspective view of a cutting device constructed in accordance with the present invention. Explanatory drawing which fractures | ruptures and shows the principal part of the origin detection mechanism with which the cutting apparatus shown in FIG. 1 is equipped. The perspective view which decomposes | disassembles and shows the brush means which comprises the origin detection mechanism shown in FIG. Sectional drawing of the brush means shown in FIG.

Explanation of symbols

2: stationary base 3: chuck table mechanism 35: chuck table 36: cutting feed means 4: spindle support mechanism 42: movable support base 43: indexing feed means 5: spindle unit 52: cutting feed means 61: spindle housing 62: Rotating spindle 63: Cutting blade 64: Electric motor 7: Origin detection mechanism 70: Brush means 71: Holder 72a: First electrode terminal 72b: Second electrode terminal 78a: First lead wire 78b: Second lead wire 80: Origin detection circuit 81: DC power supply 87: First ammeter 88: Second ammeter

Claims (2)

A chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and the cutting blade perpendicular to the holding surface of the chuck table In a cutting apparatus comprising a cutting feed means for moving in a cutting feed direction, and an origin detection mechanism for detecting the origin position of the cutting blade serving as a reference for setting the cutting amount of the cutting blade,
The origin detection mechanism includes brush means that is mounted on a spindle housing that rotatably supports a rotating spindle on which the cutting blade is mounted, and that is opposed to an end surface of the rotating spindle, and the brush means that is provided on the spindle housing. A connection terminal electrically connected to the brush means in a state of being attached to the brush means, and an origin detection circuit connected to the connection terminal via a lead wire ,
The brush means includes a holder that is detachably attached to the spindle housing and has a cylinder hole having an opening facing the end surface of the rotary spindle, and an electrode terminal that is slidably disposed in the cylinder hole of the holder And a coil spring formed of a conductive material that is attached to the holder and is electrically connected to the electrode terminal and is in contact with the connection terminal provided on the spindle housing while the holder is mounted on the spindle housing and comprising a contact terminal made of,
When replacing the electrode terminal, the brush means is removed from the spindle housing without removing the lead wire connected to the connection terminal provided on the spindle housing.
The cutting device characterized by the above. The holder is provided with a first cylinder hole and a second cylinder hole, and the first electrode terminal and the second electrode terminal can slide in the first cylinder hole and the second cylinder hole, respectively. The first electrode terminal and the second electrode terminal are electrically connected to the first electrode terminal and the second electrode terminal, respectively, and the holder is mounted on the spindle housing. The cutting device according to claim 1, wherein a first contact terminal and a second contact terminal that contact the connection terminal and the second connection terminal, respectively, are disposed.

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