JP5407130B2 - Pattern correction method and pattern correction apparatus - Google Patents

Description

  The present invention relates to a fine pattern correction method and correction device, and in particular, in a manufacturing process of a color filter (CF) which is a structural member of a color liquid crystal display (LCD) used in a color television and a personal computer, The present invention relates to a pattern correction method and correction apparatus suitable for correcting a defective part such as a foreign object.

  Conventionally, with the development of personal computers and thin color televisions, the demand for color LCDs has increased, and the price and size have increased. Therefore, among the members, a color filter having a high cost specific gravity is required to further reduce the cost. On the other hand, it is difficult to maintain a high yield in the LCD and color filter processes as the substrate size increases.

  For example, R (red), G (green), and B (blue) colored layers on a transparent substrate and a metal film provided for the purpose of improving the display contrast of a color LCD. And Bk (black) light shielding layers are arranged in a predetermined pattern, and many manufacturing methods are known. Several methods are described below.

  As a method for producing a color filter, a dyeing method, a pigment dispersion method, an electrodeposition method, a printing method, and the like are known.

  In the dyeing method, a process of applying a dyeable polymer material on a transparent substrate, patterning it into a predetermined shape by a photolithographic method, and then immersing and coloring in a dyeing solution is repeated for each color of R 1, G 2, and B to form a colored layer It is a method to do.

  The pigment dispersion method is a method in which a photosensitive resin material in which a pigment is dispersed on a transparent substrate is applied with a spin coater or the like and then patterned with a photolithographic method, and a colored layer is formed by repeating each of the colors R 1, G 2, and B. .

  The electrodeposition method is a method of obtaining a colored layer by forming a transparent electrode pattern on a transparent substrate, then immersing it in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, etc. and performing electrodeposition for each color. is there.

  In the printing method, after a thermosetting ink in which a pigment is dispersed is transferred to a patterned printing plate, a process of forming a pattern by direct printing or offset printing on a transparent substrate is repeated for each color, and a colored layer It is a method of forming.

  If necessary, a light shielding layer pattern made of a metal film such as Cr or a black (Bk) pigment is formed on the transparent substrate before forming the colored layer by these methods.

  Although the color filter can be manufactured by the above method, at present, the pigment dispersion method is often used because of good color characteristics, positional accuracy, cost, and the like. However, in any manufacturing method, it is difficult to manufacture a color filter with no defects due to the increase in dust and foreign matter in the color filter surface as the substrate becomes larger. Considering this together with the increase in material costs, it is becoming difficult to reduce costs in the future.

  Thus, it is important to improve the manufacturing yield by correcting the pattern defect portion generated in the color filter to make it non-defective and reducing the overall manufacturing cost.

  In the present invention, the pattern defect portion or defect is a pinhole defect in which a part of the pattern is missing, an adhesion defect in which ink or foreign matter is adhered, and the continuity of the pattern is impaired, and color uniformity is impaired. It refers to the color defect and the part from which those abnormal parts have been removed.

In most of the fine pattern corrections currently being performed, an operation of removing the defect portion to an appropriate size using ultraviolet to infrared laser light irradiation is performed. (Hereafter referred to as laser repair)
For example, if color spots such as pinholes occur in the light-shielding layer or colored layer of the color filter, the area including the defective part is repaired to a certain area before repairing, and then the correction according to the pattern is performed. I do.

  The size of the laser irradiation is 30 μm to 100 μm, and the shapes include a square, a rectangle, and a parallelogram. By making the shape and size of the defective part uniform, there is an advantage that the amount of correction ink to be applied can be quantified and the operation standard of the correction procedure can be standardized.

As described above, as a method for removing not only defects due to color loss but also foreign matters adhering to the pattern surface and foreign matters embedded in the pattern film, a method of removing foreign matters by laser light irradiation and coloring again has been proposed. . (See Patent Document 1)
For example, when color spots such as pinholes occur in the shading layer or colored layer of the color filter, or for correction of pattern defects after laser repair, a correction ink having an appropriate color density is applied to the correction needle tip. Thereafter, there are known a method of correcting by applying to a correction portion and drying (see Patent Document 2), and a method of correcting using a dispenser system for supplying correction ink.

Further, a method has been proposed in which correction ink is discharged from an ink jet head to pinholes such as pinholes and corrected. (See Patent Documents 3 and 4)
However, the method of directly introducing ink to such correction locations not only makes it difficult to accurately introduce ink to minute correction locations, but also controls the spread of ink on the substrate and variations in film thickness. Is difficult. For this reason, it is necessary to perform a trimming (shaping) operation by laser light irradiation after introducing the ink and a partial polishing operation for adjusting the film thickness.

  Therefore, after the photosensitive colored film in which the correction ink is processed in advance on the film is thermally transferred to the necessary site, exposure / development / drying is performed for correction (see Patent Document 5), or laser is applied during thermal transfer of the correction colored film. A correction method using a so-called film transfer method, such as a method of partially thermocompression using the method (see Patent Document 6), is used.

  The correction by the film transfer method uses a colored film in which the correction ink is formed in a certain film thickness in advance, so the correction pattern has a uniform film thickness and the correction time is shorter than when ink is applied directly to the correction area. There is an advantage that can be shortened.

  However, the colored layer used for the correction film needs to be melted or softened, and a material different from the material already used for patterning on the substrate has to be used.

  In addition, it is necessary to make a correction film in advance. Generally, the amount of correction film used is very small compared to the ink used for patterning the substrate, so it tends to be expensive. Once the correction film is made, the color ink can be changed. There was a flaw that I couldn't expect.

In addition, a wide range of white spots can be corrected in a short time. However, corrections that require patterning require patterning (trimming) at the time of transfer or after transfer, which takes time. It was. In particular, when trimming using laser irradiation at the time of transfer, it is necessary to determine the correction location by observing the base material through the correction film, the disadvantage of simultaneously transferring the film material as the support base material, and the correction position Accuracy and pattern continuity may be reduced.

Known documents are described below.
JP 05-72528 A JP 08-182949 A Japanese Patent Laid-Open No. 11-271752 JP 2003-66218 A Japanese Patent Laid-Open No. 05-210009 Japanese Patent Application Laid-Open No. 11-232081

  An object of the present invention is to solve the problems of a pattern correction method using a conventional film transfer method, and to perform a high-accuracy pattern correction method and pattern that do not require accurate positioning of the pattern correction portion or patterning after transfer of the correction film A correction device is provided.

  In order to achieve the above object in the present invention, first, in the invention of claim 1, patterning is performed on an ink-releasable film in a pattern correction method in which ink is transferred to a pattern defect portion of a substrate that has already been patterned. The preliminarily dried ink film is subjected to pressure transfer to a pattern defect portion on the substrate to correct the pattern.

  In the invention of claim 2, as a method for obtaining a pre-dried ink film patterned on the ink peelable film, a correction ink is applied on the ink peelable film to obtain a pre-dried pattern, and then a required pattern is obtained. 2. The pattern correction according to claim 1, wherein a pre-dried ink film patterned on the ink-releasable film is obtained by bringing a plate having a concave portion into contact and transferring an excess pattern portion to the plate convex portion. It is a method.

  Next, in the invention of claim 3, the pattern correcting method according to claim 1 or 2, wherein a release film having a release layer provided on the surface of a transparent film substrate is used as the ink peelable film. It is a thing.

  Moreover, in invention of Claim 4, the ink-peelable film which patterned the preliminary | backup dry ink film was matched in parallel with the pattern defect part of the board | substrate with which the said patterning was performed, and the said ink-peelable film side is used using an optical means. 4. The pattern correction method according to claim 1, wherein the pattern of the preliminary dried ink film and the pattern defect portion of the substrate are aligned while observing.

  According to a fifth aspect of the present invention, there is provided a pattern correcting apparatus for correcting an image by transferring an ink film patterned on an ink peelable film to a pattern defect portion of a substrate subjected to patterning. Transfer / observation probe that removes unnecessary patterns by irradiation or pressurization during transfer, a film transport system that continuously supplies the ink peelable film to the lower part of the transfer / observation probe, and ink to the ink peelable film A pattern correcting apparatus is provided, which is equipped with a coating head to be applied and a pattern removing unit for patterning a pre-dried film on the ink peelable film with a plate.

Further, according to a sixth aspect of the invention, there is provided the pattern correcting method according to any one of the first to fourth aspects, wherein the patterned substrate is a color filter for a flat panel display.

  Further, according to a seventh aspect of the invention, there is provided the pattern correcting apparatus according to the fifth aspect, wherein the substrate on which the patterning has been performed is a color filter for a flat panel display.

  According to the present invention, in a pattern correction method in which ink is transferred to a pattern defect portion of a substrate on which a pattern has already been applied, a pre-dried ink film patterned on the ink peelable film is added to the pattern defect portion on the substrate. Correct by pressure transfer. Therefore, compared with the method using direct correction ink, the pattern film thickness after correction can be made uniform, so there is no need for local polishing, and the already patterned ink film is transferred. Is a highly accurate pattern correction method that can reduce the time and cost required for correction.

  In the present invention, as a method for obtaining a pre-dried ink film patterned on the ink-peelable film, a correction ink is applied on the ink-peelable film and brought into a pre-dried state. The plate to be touched is brought into contact, and the excess pattern portion is transferred to the plate convex portion. Therefore, in addition to enabling precise patterning of about 10 μm width, it is possible to use only the required amount of correction ink compared to the method in which the correction tape is prepared in advance, and according to the pattern to be corrected. The ink or coating head to be applied can be switched, so there is no need to replace the correction tape or to install a transport system for each correction tape, and the accuracy and time required for correction can be reduced. Pattern correction method.

  Next, in this invention, it can be set as an inexpensive pattern correction method by using the release film which provided the release layer on the transparent film base-material surface as said ink peelable film.

  In the present invention, an ink peelable film obtained by patterning a pre-dried ink film is aligned in parallel with the pattern defect portion of the substrate subjected to the patterning, while observing from the ink peelable film side using optical means. This is a high-accuracy pattern correction method capable of accurately correcting a fine pattern or a wide range of patterns by aligning the pattern of the pre-dried ink film and the pattern defect portion of the substrate.

  Also, in the present invention, as a pattern correction apparatus for correcting the pattern by transferring the patterned ink film on the ink peelable film to the pattern defect portion of the patterned substrate, the unnecessary pattern removal by surface observation or laser irradiation is performed. Or a transfer / observation probe for applying pressure during transfer, a film transport system for continuously supplying the ink peelable film to the lower part of the transfer / observation probe, a coating head for applying ink to the ink peelable film, Equipped with a pattern removal unit that patterns the pre-dried film on the ink-peelable film with a plate, providing a highly accurate pattern correction device that is less expensive and less time consuming to correct than conventional pattern correction devices. Things became possible.

  Furthermore, in the present invention, the patterned substrate is a color filter for a flat panel display, so that it is possible to improve the yield of manufacturing color filters and reduce costs.

  Below, the pattern correction method and pattern correction apparatus by this invention are demonstrated with reference to FIGS. 1-2 based on embodiment.

  FIG. 1 is a schematic diagram of a pattern correction apparatus according to an embodiment of the present invention.

  The ink peelable film 107 used in the present invention can be processed into a flexible base material such as plastic and used. For example, films and sheets of polyethylene terephthalate, polyethylene naphthalate, polyether sulfone, cycloolefin polymer, polyimide, nylon, aramid, polycarbonate, polymethyl methacrylate, polyvinyl chloride, triacetyl cellulose, and the like can be used. Further, by using a light-transmitting substrate, alignment can be facilitated during pattern superposition. These flexible base materials are supplied by a long winding roll, processed into an ink peelable film 107, and then slit to a width of 0.5 mm to 2 mm depending on the size of the correction pattern.

  In addition, when applying ink to a part of the slit ink peelable film, the problem that the ink migrates from the end face to the back side is apt to occur, so protection of PP or PET having a thickness of 25 to 50 μm in advance is possible. It is preferable that the film is laminated on the back surface through an adhesive layer, and the protective film is peeled off after ink coating.

  The ink-peelable film substrate 107 used in the present invention may be coated with a release agent represented by silicone oil or silicone varnish, or may form a thin film layer of silicone rubber. Also, for the same purpose, a fluororesin and a fluororubber can be used, or the fluororesin fine powder may be mixed with silicone rubber or ordinary rubber to give a peelability. These silicone-based coatings usually have low adhesion to the film substrate, but are more adhesive to the substrate with respect to thermosetting or UV-curable acrylic resins, epoxy resins, and silicone layers on the outermost surface. It is also possible to provide a high resin layer as an anchor layer on the film substrate in advance and to provide it as an upper layer.

  It is desirable that both of them have an appropriate ink receptivity and at the same time have a complete ink peelability of the ink once received.

  Specific silicones include dimethylpolysiloxanes with various molecular weights, other methylhydropolysiloxanes, methylphenylsilicone oils, methylchlorinated phenylsilicone oils, or copolymers of these polysiloxanes with organic compounds. Can be used.

  Silicone rubber is a combination of two-component diorganopolysiloxane and a tri- or higher functional silane as a crosslinking agent, or a combination of siloxane and a curing catalyst, or one-component diorganopolysiloxane, acetone oxime, and various methoxys. Combinations of silane, methyltriacetoxysilane, and the like are used, and other polysiloxanes for adjusting rubber hardness are appropriately used.

  In addition, as the ink peelable film 107 used in the present invention, a film obtained by providing an inorganic film on the substrate and then performing a surface treatment with a silane coupling agent can be used.

As the silane coupling agent, trimethoxysilanes, triethoxysilanes, and the like can be used. One part of this silane coupling agent can be selected from those having a reactive group with an organic compound such as a vinyl group, an epoxy group, an amino group, a methacryl group, a mercapto group, or an alkyl group or a part thereof. Those in which fluorine atoms are substituted and those in which siloxane is bonded and bonded to a substituent capable of forming a surface having a small surface free energy can be used. When the former silane coupling agent having a reactive group is used, the surface of the substrate is treated with the silane coupling agent, and then another monomer component is applied so as to obtain a predetermined surface free energy. Can be made. Examples of the silane coupling agent having a reactive group include vinyl methoxy silane, vinyl ethoxy silane, p-styryl trimethoxy silane, 3-glycidoxy propyl trimethoxy silane, 2- (3,4 epoxy cyclohexyl) ethyl trimethoxy silane. , 3-methacryloxypropylmethyldiethoxysilane, 3-acryloxypropyltrimethoxysilane, and the like. As monomers, styrene, ethylene glycol diglycidyl ether, trimethylpropane triglycidyl ether, lauryl acrylate, dipentaerythritol hexa Acrylate or the like can be used. As the silane coupling agent having no reactive group, methyltrimethoxysilane, n-hexyltrimethoxysilane, n-octyltrimethoxysilane, dodecyltrimethoxysilane and the like can be used. However, it is not limited to an alkyl group.

  As a method for fixing the silane coupling agent to the substrate, a known surface treatment method using a silane coupling agent can be used. For example, a solution obtained by diluting a silane coupling agent in water, an acetic acid aqueous solution, a water-alcohol mixed solution, or an alcohol solution is prepared. The silane coupling agent can be fixed by coating the solution on the surface of the substrate using a known coating method such as a gravure coater, a roll coater, a die coater, and the like, followed by drying. When a silane coupling agent having a reactive group is used, other monomer components can then be applied and bonded in the same manner.

In order to immobilize the silane coupling agent on the substrate, it is preferable that SiO ₂ , TiO ₂ , ZrO ₂ or a composite film thereof is provided on the substrate in advance. As these inorganic oxide films, those provided by using a known vapor deposition method or sputtering method can be used.

As a method for providing the inorganic oxide film, a metal alkoxide represented by the general formula M (OR) n (M is a metal such as Si, Ti, Al, Zr, R is an alkyl such as CH ₃ , C ₂ H _5, etc.) It is possible to use a so-called sol-gel method in which an inorganic oxide film is formed by coating a gel solution obtained by hydrolyzing and condensation polymerization in the presence of water and alcohol on the surface and then heating. it can.

  Furthermore, the silane coupling agent can be added in advance to the metal alkoxide solution used in the sol-gel method. In this case, an effect is particularly obtained for surface property modification.

  The ink with respect to the ink peelable film 107 thus obtained preferably has a contact angle of 10 ° or more and 90 ° or less, more preferably 20 ° or more and 70 ° or less when the ink is dropped onto the treated surface. is there. If this contact angle is small, ink releasability in the subsequent process is reduced and pattern defects (such as poor reproducibility) are likely to occur. If the contact angle is large, repelling occurs when forming the ink liquid film, It becomes difficult to form a uniform ink liquid film.

  As a plate 109 for patterning, a mask pattern is formed on a surface of a low expansion glass such as an alkali-free glass using a photosensitive resin, and then the existing dry etching process, wet etching process, or sand blasting process is used. A relief plate having a plate depth of 30 μm to 30 μm can be used.

The plate 109 may be made of nylon, acrylic, silicone resin, styrene-diene copolymer, or the like. Also, rubber plates such as ethylene-propylene, butyl, and urethane rubbers can be used. Such resin-made relief plates have already been used for relief printing and flexographic printing, and can be produced by pouring a predetermined resin into a previously produced mold or engraving. A method using a resin can be manufactured with higher accuracy.

  As a material for the ink liquid film, a material obtained by dissolving or dispersing a solvent in an image pattern forming material can be used. For example, when a color pattern (colored layer) consisting of red, green, and blue or a black matrix is formed by the production method of the present invention in a color filter, the pigment component and the resin component are dissolved and dispersed in a solvent to form an ink. Become.

  Examples of the pigment include the following pigments that can be used in red, green, and blue colors. The type of pigment is a color index (CI) No. It shows with. First, 97, 122, 123, 149, 168, 177, 180, 192, 208, 209, 215, etc. as red pigments, 7, 36, etc. as green pigments, 15, 15: 1, 15 as blue pigments. : 3, 15: 6, 22, 60, 64 and the like. Examples of black pigments include carbon black and titanium black. Further, in order to improve the color adjustment of these red, green and blue pigments and the fluidity of the ink, the following pigments can be added in necessary amounts.

  Besides red, green, and blue, for example, yellow pigments such as 17, 83, 109, 110, and 128, purple pigments such as 19, 23, and white pigments such as 18, 21, 27, and 28, etc. Examples of the orange pigment include 38 and 43. In addition to the simple substance, the pigment may be a pigment dispersion in which the pigment is previously dispersed in a dispersant or an organic solvent.

  Moreover, as a black pigment used for a black matrix, carbon black or titanium black is used alone or in combination.

  As the resin component, one or more selected from the group consisting of polyester resins, acrylic resins, epoxy resins, melamine resins, and benzoguanamine resins are used. As the solvent, an ester solvent, an alcohol solvent, an ether solvent, a hydrocarbon solvent, or the like is used. As ester solvents, propylene glycol monomethyl ether acetate, ethoxyethyl propionate, as alcohol solvents, 1-butanol, 3methoxy-3methyl-1butanol, 1-hexanol, 1,3 butanediol, 1-pentanol, 2-methyl 1-butanol, 4-methyl-2-pentanol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol tertiary butyl ether, dipropylene glycol monomethyl ether, ethylene glycol butyl ether, ethylene glycol ethyl as ether solvents Ether, ethylene glycol methyl ether, diethylene glycol butyl ether, diethylene glycol ethyl ether, hydrocarbon As agent, Solvesso 100, Solvesso 150 (trade name, manufactured by Exxon Chemical Co., Ltd.) and the like.

  Further, as a dispersant, nonionic surfactant such as polyoxyethylene alkyl ether, ionic surfactant such as sodium alkylbenzene sulfonate, poly fatty acid salt, fatty acid salt alkyl phosphate, tetraalkyl ammonium salt, etc. Organic pigment derivatives and polyesters can be used alone or in admixture of two or more.

  Further, a leveling agent can be used in order to uniformly coat the ink peelable film 107. For example, materials containing silicon and / or fluorine atoms such as fluororesin and silicone resin are used. A fluorine-containing monomer or oligomer (low molecular compound) can be used as the fluororesin system, and a silicon-containing monomer or oligomer (low molecular compound) can be used as the silicone resin system.

  If the leveling agent is not added or is low, the ink will repel on the ink-peeling film with low wettability, and if it is high, it will be difficult to ensure adhesion and resistance of the ink to the substrate. The amount is preferably 0.01% to 5% by weight, more preferably 0.05% to 2% by weight, based on the total weight of the ink composition.

  In order to form an ink liquid film on the ink peelable film 107, it can be used by selecting from existing coating methods, but the film thickness obtained by pre-drying the ink liquid film is 0.5 μm to 3 μm. preferable. If the ink liquid film is thinner than this range, drying tends to proceed and the ink peelable film is easily peeled off. On the other hand, when the film thickness of the ink liquid film is high, drying becomes difficult and problems such as the film being stretched on the surface occur, and uniform patterning becomes difficult, for example, drying unevenness easily occurs.

  After the ink liquid film is formed on the ink peelable film 107, the ink liquid film is preliminarily dried. This predrying is a simple method of natural drying. However, it is also possible to use cold air or hot air drying, microwave, reduced pressure drying, or the like. In addition, radiation such as ultraviolet rays and electron beams can be used.

  The purpose of this preliminary drying is to increase the viscosity, thixotropy and brittleness of the ink liquid film. When the drying by preliminary drying is insufficient, the ink liquid film is torn and a defect occurs when the relief printing plate in the subsequent process is pressed and peeled off. On the other hand, when the drying is excessive, the tackiness of the ink film surface is lost, and the ink is not transferred to the letterpress. Therefore, although the drying state is adjusted by the drying time and the atmospheric temperature depending on the composition of the ink to be used, a state in which 0.5 to 5% of solvent remains in the dried ink film is preferable.

  Since the residual amount of solvent on the order of ppm called so-called dry film is too dry, there is a problem that the ink is not transferred and there is a problem that the ink film partially peels due to pressing of the plate and causes dust. Not suitable for pre-drying ink film conditions.

  Below, the pattern correction apparatus for implementing the transfer of a precise pattern using these materials is demonstrated.

  The transfer / observation probe 100 includes an optical system such as a lens and a mirror, a CCD observation unit 104 for observation of correction points and laser repair, a light source / laser light source introduction unit 105, and a transfer head 101 for pattern transfer. This is a correction probe that incorporates.

  A CCD (Charge Coupled Device) observation unit 104 is introduced into a transfer / observation probe and transfers / observes light reflected from the surface of the base material 115 or transmitted light from the base material 115 via an objective lens or a half mirror. Observation is performed using a CCD element incorporated in the probe 100, and any apparatus can be used as long as it can detect an image based on incident light. The CCD element mounting circuit is connected to a personal computer or a monitor to detect the position of the pattern defect portion. Used for confirmation and surface observation.

  In addition, the laser light introduced into the transfer / observation probe 100 from the light source / laser light source introduction portion and irradiated onto the surface of the base material 115 is used to remove foreign matter and pattern defect portions from a near-visible region having a short wavelength to an ultraviolet region. Use laser light. The size of the laser irradiation can be changed using a slit plate, and the shape can be a square, a rectangle, a parallelogram, etc. with a diameter of 30 μm to 100 μm.

The transfer / observation probe 100 is held on the XYΘ stage 116. However, the transfer / observation probe 100 itself may have a moving means in the X-axis direction or the X-axis / Y-axis direction and may be moved on the substrate. Operation in the height direction is possible for focusing for observation by an optical system.

  Further, for example, when a laser repair is performed or when a roughly corrected portion is searched, it is preferable to move the observation probe 100 or the transport system of the ink peelable film 107 to a position where the ink peelable film 107 is out of the observation view.

  The transfer head 101 is composed of a head drive unit 103 and a pressure plate 102, and the correction pattern 113 formed on the ink peelable film substrate by pressing the pressure plate 102 against the ink peelable film 107 by the head drive unit 103. Is transferred onto the substrate 115.

  The pressure plate 102 is a transparent material such as transparent plastic resin or glass, and is free from cracks during pressure, can be held on the transfer head, and can be made of a publicly available material if there is no problem in observing the corrected portion. However, a molded body made of a transparent silicone resin is preferably used.

  The unwinding unit 106 and the winding unit 117 are installed in order to sequentially feed the film from the winding roll of the ink-peelable film 107 that has been slit, and to wind it up after use. A mounter that can be equipped with a take-up roll of 3 to 20 cm in diameter to install or take up the raw material that is supplied by a take-up roll, a cylinder that serves as a shaft, and a motor that controls the rotation and tension to transport the film substrate And a brake for controlling the tension.

  In this invention, the coating method according to the well-known coating method can be used with the viscosity of an ink, or the drying property of a solvent. For example, dipping method, roll coating, gravure coating, reverse coating, air knife coating, comma coating, die coating, screen, spray coating, gravure offset, ink jet and the like can be mentioned. Above all, die coating, cap coating, roll coating, applicator, and inkjet can form a uniform ink liquid film, and among them, the device is simple when forming on a thin slit transport film substrate. A high-viscosity ink can be applied, and a die coat having a high film thickness uniformity is the most efficient and preferred forming method.

  The coating head 108 can set a gap with the ink peelable film 107 in advance, and holds it at an optimal coating position during coating. In the case of using a die coater, the film thickness is controlled according to the transport speed of the gap and the ink peelable film 107, the solid content ratio of the correction ink, and the discharge amount.

  The plate mounter 110 has an adsorption hole for adsorbing and fixing the plate 109 and holds it by vacuum adsorption. In addition, it has a mechanism that can be pressed against the pre-dried ink film 112 obtained on the ink peelable film 107 and adjusted for driving and air pressure to perform separation.

  The XYΘ stage 116 can be driven by a ball screw, a linear motor, or the like, and can be made of metal or stone, but can control reciprocating motion and rotation while maintaining at least the level. Is used. Although the substrate 115 can be adsorbed and fixed by reducing the pressure, a method of providing an adsorption hole only in the vicinity of the edge of the film or a method of using an adsorption surface using a porous material can be selected to prevent unevenness of the surface due to adsorption. .

  Further, a procedure for transferring a precise pattern using the material and the pattern correction apparatus will be described.

First, as shown in FIG. 2 (a), the ink peelable film 107 is unwound from the unwinding portion 106 and conveyed, and the correction ink is applied to a certain portion of the ink peelable film 107 by the coater head 108, The pre-dried ink film 112 is obtained by allowing it to stand for several minutes. (Fig. 2 (b))
Next, after peeling off the protective film, the pre-dried ink film 112 is conveyed onto the transfer stage 111. (Fig. 2 (c))
Thereafter, the plate 109 fixed to the plate mounter 110 is pressed against the ink peelable film 107 on the transfer stage 111 (FIG. 2D), and the plate 109 is peeled off from the ink peelable film 107, whereby the ink peelable film 107 is removed. The correction pattern 113 is obtained above. (Fig. 2 (e))
The ink peelable film 107 is conveyed so that the correction pattern 113 comes directly under the transfer head 101 while observing automatically or using an optical system provided in the transfer / observation probe 100 or the CCD observation unit 104 (FIG. 2). (F)) While simultaneously observing the existing pattern 114 of the base material 115 adsorbed and fixed on the XYΘ stage 116 and the correction pattern 113 on the ink peelable film 107, the position of the XYΘ stage 116 is adjusted and the correction position is adjusted. To decide. (Fig. 2 (g))
If the pattern defect in the existing pattern 114 to be corrected is a defect due to adhesion of foreign matter, or if the pattern defect and the shape of the correction pattern 113 do not match, laser irradiation from the transfer head 101 is performed to It is necessary to standardize removal and defect shape.

  The pressing plate 102 provided on the transfer head 101 is pressed against the ink peelable film 107 by operating the head driving unit 103 and then the head driving unit is returned, whereby the correction pattern 113 is corrected in the existing pattern 114. Transfer to

  If necessary, the corrected substrate 115 is heated using a heating means such as an oven, or a local heating means such as an IR heater is used only at the correction portion to promote the curing of the correction pattern 113 and the pattern correction is completed.

[Adjustment of correction ink]
20 parts of methacrylic acid, 10 parts of methyl methacrylate, 55 parts of butyl methacrylate, and 15 parts of hydroxyethyl methacrylate are dissolved in 300 parts of butyl lactate, and 0.75 part of azobisisobutylnitrile is added under a nitrogen atmosphere, and 5 parts at 70 ° C. An acrylic copolymer resin was obtained by reaction over time. The acrylic copolymer resin was diluted with propylene glycol monomethyl ether acetate (PGMAC) so as to have a resin concentration of 10% to obtain an acrylic copolymer resin liquid. To the acrylic copolymer resin liquid 80.1 g, 19.0 g of RGB pigment, 35.0 g of carbon black, and 0.9 g of a dispersant were added and kneaded with three rolls to obtain R, G, B , Bk colored pastes were obtained. Furthermore, PGME is added to these colored pastes, and the pigment concentration is adjusted to 12 to 15% (RGB) or 23 to 35% (BK), and Megafac F-483SF (Dainippon Ink and Chemicals, Inc.) is used as a leveling agent. 0.2% by weight was added to prepare each correction ink.

[Other correction materials]
As an ink-removable film, a silicone-based release polyester film with a substrate thickness of about 120 μm: K1504 (manufactured by Toyobo Co., Ltd.) is prepared in a roll shape with a width of 300 mm and a thickness of 100 m. After laminating the film, it was slit-processed stepwise to obtain a winding roll having a width of 2 mm and a width of 20 m.

As the Bk plate, a 3.0 cm square 0.7 mm thick transparent glass was used, and the line width was 20 μm,
A cross mark that fits in a μm square was used as an RGB plate, and a 40 μm square pattern was etched to a depth of 5 μm to prepare a pattern.

[Correction of color filter]
Correction was performed using a color filter manufactured by a pigment dispersion method using a pigment equivalent to the prepared correction ink.

  Irradiate foreign matter defects in the light-shielding layer or the R, G, and B colored layers that have acquired position data with an optical inspection device by irradiating the third harmonic YAG laser light (355 nm, 2 mJ / pulse, manufactured by HOYA). And a 40 μm square pinhole was created.

  The prepared ink was applied to a 2 mm wide ink peelable film with a die coater so as to have a film thickness of 1.2 μm, and allowed to stand at room temperature for 300 seconds to obtain a pre-dried ink film.

  After the protective film provided on the back of the ink peelable film was peeled off, the pre-dried ink film was conveyed to the transfer stage.

  The plate held on the mounter was brought into contact with the pre-dried ink film and peeled off vertically to obtain a correction pattern on the ink peelable film.

  The ink peelable film is transported to oppose the color filter substrate fixed on the XYΘ stage, and the XYΘ stage is moved to roughly face the correction position, the correction pattern on the ink peelable film, and the transfer / observation probe. Held in position.

  Using the observation by the transfer / observation probe, the pattern on the ink peelable film and the 40 μm pinhole on the substrate are overlapped, the transfer head at the tip of the transfer / observation probe is lowered and raised, and the correction pattern is pinholed on the substrate Transcribed into position.

  After the color filter substrate after correction is dried at 200 ° C. for 20 minutes and the correction pattern is thermally cured, the color difference between the correction portion and the surrounding area is 5 or less, and the correction portion cannot be recognized visually. A color filter having good pattern continuity and flatness was obtained.

  It can be used for a process of correcting a minute pattern defect, and in particular, can be used for correcting a color filter pattern. The color filter is not limited to the liquid crystal, but may be applied to a color filter for CCD, a color filter for projection apparatus, an organic EL display, or a color filter for electronic paper.

It is the schematic of the pattern correction apparatus which is one Embodiment of this invention. It is explanatory drawing of the process outline of the pattern correction by one Example of this invention.

(a)… Ink peelable film unwinding
(b)… Correction ink coating
(c)… Modified ink drying
(d)… Plate transfer
(e)… Creation of correction pattern by plate peeling
(f)… Transfer positioning
(g)… Transcription position observation

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Transfer / observation probe 101 ... Transfer head 102 ... Pressure plate 103 ... Head drive part 104 ... CCD observation part 105 ... Light source / laser light source introduction part 106 ... Unwinding part 107 ... Ink peelable film 108 ... Coating head 109 ... Plate 110 ... Plate mounter 111 ... Transfer stage 112 ... Pre-dried ink film 113 ... Modified pattern 114 ... Existing pattern 115 ... Substrate 116 ... XYΘ stage 117 ... Winding part 118 ... Protective film

Claims (6)

In a pattern correction method in which ink is transferred to a pattern defect portion of a substrate that has already been patterned, the pre-dried ink film patterned on the ink-peeling film is pressure transferred to the pattern defect portion on the substrate to correct it. A pattern correction method,
As a method of obtaining a pre-dried ink film patterned on the ink-releasable film, a correction ink is applied on the ink-releasable film, brought into a pre-dried state, and then contacted with a plate having a required pattern as a recess. A pattern correction method characterized by obtaining a pre-dried ink film patterned on an ink-peeling film by transferring an excess pattern part to a plate convex part. Examples ink peelable film, the pattern correcting method according to claim 1, wherein the use of a release film provided with a release layer on a transparent film substrate surface. Align the ink peelable film patterned with the pre-dried ink film in parallel with the pattern defect portion of the patterned substrate, and observe from the ink peelable film side using optical means, pattern correction method according to claim 1 or 2, characterized in that for aligning the pattern defect portion of the pattern and the substrate.  This is a pattern correction device that corrects the pattern by transferring the patterned ink film on the ink peelable film to the pattern defect area of the patterned substrate, and removing or transferring the unnecessary pattern by observing the surface or laser irradiation. Transfer / observation probe for applying pressure, etc., a film transport system for continuously supplying the ink peelable film to the lower part of the transfer / observation probe, a coating head for applying ink to the ink peelable film, and ink peelability A pattern correction apparatus comprising a pattern removing unit for patterning a pre-dried film on a film with a plate. Pattern correction method according to any claims 1 to 3, wherein the substrate on which the patterned is applied is a color filter for a flat panel display. The pattern correction apparatus according to claim 4, wherein the patterned substrate is a color filter for a flat panel display.