JP5407543B2 - Droplet discharge device - Google Patents

Description

  The present invention relates to a droplet discharge device, and more specifically, a droplet discharge capable of performing high-precision drawing by preventing a displacement of a droplet landing position due to vibration generated when a stage on which a substrate is mounted is moved. Relates to the device.

  A droplet discharge device that performs drawing by landing droplets on a substrate (work) using a droplet discharge head that discharges minute droplets is used for industrial applications such as wiring pattern drawing on a semiconductor circuit board. Is also widely used. In such an application, it is necessary to land a droplet on an accurate position on the order of μm without causing a disconnection or a short circuit with an adjacent wiring, and the demand for the landing accuracy has been increasing in recent years. On the other hand, in order to improve productivity, it is required to increase the drawing speed and shorten the tact time.

  In order to increase the droplet landing accuracy, it is important that the relative position between the droplet discharge head and the substrate is accurately defined. However, if the stage on which the substrate is mounted is moved at a high speed in order to increase the drawing speed, there is a problem that the relative position between the droplet discharge head and the substrate is disturbed due to vibration.

  This will be described with reference to FIGS.

  For example, an apparatus base 100 made of a stone surface plate is supported on a pace plate 102 via vibration isolating mechanisms 101 such as air suspensions at four corners. A stage 103 on which the base material W is mounted is provided on the surface of the apparatus base 100 so as to be movable along the Y direction (left and right direction in the figure). A droplet discharge head 105 is mounted on the apparatus base 100 via a gantry 104 along the X direction (perpendicular to the paper surface in the drawing) perpendicular to the Y direction with the nozzle surface facing the lower surface.

  Here, when the stage 103 at the initial position shown in FIG. 8 moves along the Y direction below the droplet discharge head 105 for drawing, the vibration isolation mechanism on the rear side in the movement direction is accelerated by the acceleration at the start of the movement. A force in the sinking direction acts on 101, and a force in the lifting direction acts on the vibration isolation mechanism 101 on the front side in the moving direction. Each force acting on the vibration isolation mechanism 101 then acts in the opposite direction, so that sinking and lifting are alternately repeated. As shown in FIG. 9, the apparatus base 100 mainly includes the stage 103. Vibration in the direction along the moving direction is generated, and this vibration is transmitted from the apparatus base 100 to the gantry 104. Since the gantry 104 is erected from the apparatus base 100, the upper end of the gantry 104 vibrates like a so-called pendulum, and the droplet discharge head 105 supported by the gantry 104 also vibrates greatly. For this reason, the relative positional relationship between the substrate W on the stage 103 and the droplet discharge head 105 is disturbed, and landing position deviation occurs.

  If the discharge of the liquid droplet is stopped until the influence of the vibration generated along with the movement of the stage is settled, the tact time becomes long and the productivity is deteriorated. In order to suppress vibration, it is also effective to provide a counter mass and an active damper in the droplet discharge device, but these are extremely expensive devices, so that the device cost is greatly increased. For this reason, it is desired that the tact time does not become long and the landing position shift due to such vibration can be prevented with a simple configuration.

  Conventionally, in Patent Document 1, an actuator for applying force to the droplet discharge head is provided, and droplet discharge is performed based on signals from a speed sensor and a position sensor that detect the moving speed and displacement of the droplet discharge head. By driving the actuator so that a force in the direction opposite to the vibration direction is applied to the head, the vibration of the droplet discharge head that occurs when the stage is moved is canceled and the landing position is prevented from shifting. Is disclosed.

  Patent Document 2 discloses a coating machine that applies an adhesive paste to a substrate constituting a liquid crystal panel. When a rectangular paste pattern is formed on a substrate supported on a stage, a nozzle and a substrate are used. In order to solve the problem that it is difficult to uniformly apply the paste pattern shape due to vibration when applying the corner portion of the substrate whose relative speed changes rapidly, a nozzle for applying paste at the start of the corner portion; By reducing the relative speed with the stage and suppressing the influence of vibration, the increase in the amount of paste applied on the substrate accompanying the decrease in the relative speed is corrected by reducing the discharge pressure of the paste. It is disclosed that an accurate paste pattern can be drawn.

JP 2006-142237 A JP 2005-218971 A

  The vibration generated when the stage is moved at high speed not only vibrates the droplet discharge head, but also affects the stage itself, and also generates vibration of the stage itself. Moreover, since the vibration direction and size of the stage do not always match the vibration direction and size of the droplet discharge head, the relative positional relationship between the stage and the droplet discharge head when the stage is moved at high speed In order to define the above with high accuracy, it is necessary to consider both the vibration of the stage and the vibration of the droplet discharge head.

  However, in Patent Document 1, the actuator provided in the droplet discharge head is controlled to cancel the vibration of the droplet discharge head when the stage is moved. It has not been. Therefore, the relative positional relationship between the stage and the droplet discharge head when the stage is moved at a high speed cannot be defined with high accuracy, and there is a problem that the landing position deviation cannot be prevented.

  Even if an actuator similar to the droplet discharge head is provided on the stage in order to cancel the vibration of the stage, the actuator on the stage side and the actuator on the droplet discharge head side are each in the vibration direction. Therefore, there is no guarantee that the position of the stage after the control and the position of the droplet discharge head coincide with each other. The relative positional relationship between the two cannot be defined with high accuracy, and there is still a problem that the landing position deviation cannot be prevented.

  On the other hand, Patent Document 2 is a technique for uniformly applying an adhesive paste, and does not require high-precision landing position accuracy on the order of μm as in drawing a wiring pattern of a semiconductor circuit board. . In addition, the vibration generated by the rapid change in the relative speed between the nozzle and the substrate at the corner portion of the substrate is suppressed by reducing the moving speed of the stage. It is not intended to prevent the relative positional relationship between the stage and the droplet discharge head from being disturbed in consideration of both the vibration of the nozzle). Therefore, even if such a technique is applied to a droplet discharge apparatus for high-precision drawing such as drawing of a wiring pattern on a semiconductor circuit board, it occurs when both the stage and the droplet discharge head vibrate. There is a problem that it is impossible to prevent landing position deviation.

  Therefore, the present invention makes it possible to define the relative positional relationship between the stage and the droplet discharge head with high accuracy based on the measurement results of the vibrations of the stage and the droplet discharge head. It is an object of the present invention to provide a droplet discharge device that can prevent landing position deviation and perform highly accurate drawing with a configuration.

  Other problems of the present invention will become apparent from the following description.

  The above problems are solved by the following inventions.

According to the first aspect of the present invention, a plurality of droplet discharge heads in which a large number of nozzles for discharging droplets are arranged along the X direction are provided on a plurality of head mounting portions provided along the X direction on the base member. A line head unit that constitutes a line head that is elongated in the X direction by being individually attached, and a stage on which a substrate is mounted and moved in the X direction and the Y direction intersecting the X direction, A droplet discharge device that performs drawing by landing droplets discharged from the nozzles of the droplet discharge head according to a predetermined discharge timing on the substrate,
A first vibration measuring means provided on the stage for measuring the vibration of the stage;
Provided in the line head unit, a second vibration measurement means for measuring the vibration of the line head unit,
An angle formed by the nozzle row direction of the droplet discharge head with respect to the X direction by the operation of the actuator, the actuator being provided between the base member and the head mounting portion in the line head unit; The position changing means that can change the position along the X direction of the droplet discharge head by adjusting the position along the X direction of the head mounting portion while maintaining
An X-direction component of relative displacement between the stage and the line head unit is obtained from the difference between the outputs of the first vibration measuring means and the second vibration measuring means, and the position changing means is determined according to the magnitude. A droplet discharge apparatus comprising: a first correction unit that changes the position of all the droplet discharge heads along the X direction by the same amount by being operated .

According to a second aspect of the present invention, a Y direction component of a relative displacement between the stage and the line head unit is obtained from a difference between outputs of the first vibration measuring unit and the second vibration measuring unit, The droplet discharge device according to claim 1, further comprising a second correction unit that changes the discharge timing according to the size.

According to a third aspect of the present invention, each of the head mounting portions is integrally connected to the base member by a plurality of elastic hinges,
The position changing means maintains the angle formed by the nozzle row direction of the droplet discharge head with respect to the X direction by causing the pressing force of the actuator to act on the head mounting portion and flexing and deforming the elastic hinge. 3. The droplet discharge device according to claim 1 , wherein the position along the X direction of the head mounting portion is adjusted as it is.

According to a fourth aspect of the present invention, the head mounting portion is disposed inside an opening frame formed in the base member.
The droplet ejecting apparatus according to claim 3 , wherein the elastic hinge is disposed along the X direction across the head attachment portion and the inner periphery of the opening frame. .

  The invention according to claim 5 is characterized in that the first vibration measuring means and the second vibration measuring means are constituted by an acceleration sensor. Device.

  According to the present invention, the relative positional relationship between the stage and the droplet discharge head can be defined with high accuracy based on the measurement results of the vibrations of the stage and the droplet discharge head. It is possible to provide a droplet discharge device that can prevent landing position deviation and perform highly accurate drawing.

1 is a schematic perspective view showing an example of a droplet discharge device according to the present invention. The block diagram which shows the structure of the principal part for the discharge timing change in the droplet discharge apparatus 1 Timing chart showing the relationship between discharge timing and vibration A graph showing the result of comparing the landing accuracy with and without correction Bottom view of line head unit Block diagram showing the configuration of the actuator drive unit Timing chart showing vibration in direction along X direction between stage and line head unit and voltage applied to actuator The figure explaining generation | occurrence | production of the vibration in a droplet discharge apparatus The figure explaining generation | occurrence | production of the vibration in a droplet discharge apparatus

  Embodiments of the present invention will be described below.

  The droplet discharge device according to the present invention includes a droplet discharge head in which a large number of nozzles for discharging droplets are arranged along the X direction, a substrate, and the X direction and the Y direction intersecting the X direction. The stage is moved to the substrate, and drawing is performed by causing the droplets ejected from the nozzles of the droplet ejection head to land on the substrate in accordance with a predetermined ejection timing.

  The substrate to be drawn is mounted on the stage and faces the nozzle surface of the droplet discharge head, and the droplet moves while moving in the XY directions parallel to the nozzle surface of the droplet discharge head by moving the stage. A predetermined image is formed by droplets ejected from the ejection head.For example, in addition to paper, plastic sheets, etc. on which images such as general photographs, letters, figures, etc. are formed by using ink, Examples include color filter substrates used in liquid crystal displays and the like, and semiconductor circuit substrates on which wiring patterns are formed with conductive ink.

  For drawing on the substrate, only the stage on which the substrate is mounted is moved in the Y direction (sub-scanning direction) with respect to the droplet discharge head that discharges droplets from the nozzles, and the nozzle row of the droplet discharge head is placed on the substrate This is performed by drawing a predetermined pattern along the Y direction with a width corresponding to the width of the. The movement of the stage in the X direction (main scanning direction) is a movement for changing the relative position of the droplet discharge head and the substrate in the X direction. At this time, the droplet discharge head does not discharge the droplet. I will not.

  The stage is provided with first vibration measuring means for measuring the vibration of the stage. Further, a second vibration measuring means for measuring the vibration of the droplet discharge head is provided on the droplet discharge head side. As the first vibration measuring means and the second vibration measuring means, a vibrometer can be generally used, but among them, an acceleration sensor that can easily detect vibration as an electrical signal is preferably used.

  In the case of using an acceleration sensor, it is important to provide the stage or the droplet discharge head so that minute vibrations of the stage or droplet discharge head can be measured with high accuracy. As shown in -207, four sensors capable of measuring a low frequency such as the stage amplitude are prepared and fixed so that the acceleration in the X direction and the Y direction of the base plate to which the droplet discharge head is fixed can be confirmed. When these sensors are fixed, the X direction and Y direction may be defined with high accuracy by processing parts, or an adjustment mechanism may be provided. Similarly, it is fixed to the side surface of the drawing table on the stage so that the acceleration in the X direction and the Y direction can be confirmed. For example, it can be strictly installed as described above.

  The correcting means in the present invention calculates the difference between the output detected by the first vibration measuring means and the output detected by the second vibration measuring means and calculates the relative between the droplet discharge head and the stage. The magnitude of the displacement is obtained, and the landing position of the droplet ejected from the droplet ejection head is corrected according to the obtained magnitude of displacement.

  Thus, not only the vibration of the droplet discharge head but also the difference between the vibration on the stage side detected by the first vibration measuring means and the vibration on the droplet discharge head side detected by the second vibration measuring means. The relative positional relationship between the two is determined based on the measurement results of the vibrations of both the stage and the droplet discharge head. Can be grasped. Accordingly, the influence of vibrations of both the stage and the droplet discharge head can be canceled precisely to prevent landing position deviation, and high-precision drawing is possible. In addition, in terms of appearance, it is only necessary to add the vibration measuring means on the stage side and the droplet discharge head side, so that the configuration can be simplified.

  The correction of the landing position by the correcting means in the present invention includes a change in the discharge timing of the droplet from the droplet discharge head and a change in the relative position along the X direction between the stage and the droplet discharge head, Although any of these can be performed, the vibration in question is caused by movement of the stage along the Y direction during drawing, and is mainly along the Y direction, so that the landing position in the direction along the Y direction It is preferable to change the ejection timing for performing the correction. Further, since the vibration accompanying the movement of the stage includes not only a small amount of the X direction component, it is more preferable to combine both in order to enable correction of the landing position in the direction along the X direction.

  The change in the discharge timing of the droplets from the former droplet discharge head is determined by the difference between the output detected by the first vibration measurement means and the output detected by the second vibration measurement means. The Y direction component of the relative displacement is obtained, and according to the magnitude of the Y direction component of the displacement, the droplet discharge timing from the droplet discharge head is set earlier by a predetermined time than the normal discharge timing or Can be done by changing late.

  The change in the relative position along the X direction between the latter stage and the droplet discharge head is determined based on the difference between the output detected by the first vibration measuring means and the output detected by the second vibration measuring means. The X-direction component of the relative displacement between the droplet and the droplet discharge head is obtained, and the relative position along the X direction between the stage and the droplet discharge head is determined as the relative position according to the magnitude of the X-direction component of the displacement. Change by changing means.

  The relative position along the X direction between the stage and the droplet discharge head can be changed by moving only the stage in the X direction with respect to the droplet discharge head. An actuator for adjusting the position along the X direction of the discharge head may be provided in the droplet discharge head, and this actuator may be driven. Such relative position changing means can also serve as a fine adjustment mechanism for finely adjusting the attachment position of the droplet discharge head along the X direction with respect to the head unit. This is a preferable mode because it is possible to eliminate the need to provide an actuator for changing the relative position along the X direction.

  When a line head unit is configured by arranging a plurality of droplet discharge heads along the X direction in the head unit, the fine adjustment mechanism is attached along the X direction independently for each droplet discharge head. It is preferable to be provided so that the position can be adjusted.

  Next, a droplet discharge device according to the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic perspective view showing an example of a droplet discharge device according to the present invention. The droplet discharge device 1 has a plurality of liquids for performing ink jet drawing on a device base 2 made of a stone surface plate. A line head unit 3 in which droplet discharge heads are arranged along the X direction, a stage 4 for placing and supporting the substrate W on the upper surface, a θ rotation mechanism 5 for rotating the stage 4 in the θ direction, The stage 4 and the θ rotating mechanism 5 are both provided integrally with the Y moving mechanism 6 that linearly moves along the Y direction, the stage 4 and the θ rotating mechanism 5 are both moved linearly along the X direction, and the stage 4. The acceleration sensor 8A, which is the first vibration measurement means, and the acceleration sensor 8B, which is the second vibration measurement means provided integrally with the line head unit 3, are provided.

  In the present embodiment, the acceleration sensors 8A and 8B are provided so as to be able to detect the X-direction component and the Y-direction component of vibration, respectively, but only one of the components may be provided so as to be detectable.

  Here, the X direction and the Y direction are directions orthogonal to each other on a horizontal plane.

  The line head unit 3 is attached to a gantry 9 installed in parallel with the surface of the apparatus base 2 along the X direction in the vicinity of the end on the apparatus base 2 via a slider 10 and a θ rotation mechanism 11. The slider 10 slides along the gantry 9 to reciprocate along the X direction, and the θ rotation mechanism 11 rotates the direction along the Z direction, which is the normal direction perpendicular to the X and Y directions. And the Z moving mechanism 12 can be moved up and down in the Z direction together with the θ rotating mechanism 11.

  The position coordinates in the X direction, Y direction, and θ direction of the stage 4 and the position coordinates in the X direction, Z direction, and θ direction of the line head unit 3 are the X movement mechanism 7, the Y movement mechanism 6, and the θ rotation mechanism. 5, an encoder (not shown) which is a position coordinate detection unit provided in each of the slider 10, the θ rotation mechanism 11, and the Z movement mechanism 12 can be detected with high accuracy on the order of nm.

  In the figure, reference numeral 13 denotes an anti-vibration mechanism such as an air suspension respectively disposed at the four corners of the bottom surface of the apparatus base 2, and reference numeral 14 denotes a base plate that supports the apparatus base 2 on the upper surface via the anti-vibration mechanism 13.

  FIG. 2 is a block diagram showing the configuration of the main part for changing the discharge timing in the droplet discharge device 1, and FIG. 3 is a timing chart showing the relationship between the discharge timing and vibration. The correction of the landing position by changing the discharge timing will be described using these.

  The droplet discharge heads arranged in the line head unit 3 are arranged on the basis of a signal obtained by applying a predetermined modulation by the pulse modulator 16 to the encoder output 15 output by the movement of the stage 4 in the Y direction. The ejection is controlled according to the ejection timing signal generated by the drive unit 17. A normal discharge timing signal at this time is indicated by T1 in FIG.

  On the other hand, output signals of the acceleration sensors 8A and 8B are also input to the head driving unit 17 via the amplifiers 18A and 18B, respectively.

  The head drive unit 17 has a pulse timing calculator 171 that corrects the timing of the ejection pulse with respect to the signal from the pulse modulator 16, and the output signal of the pulse timing calculator 171 is discharged by the signal amplifier 175. Amplified to power for driving the head, this amplified signal is output to each droplet discharge head of the line head unit 3, and each droplet is based on this output signal and a data signal (not shown) based on the drawing data. The discharge head is driven.

  Here, the analog output signals from the acceleration sensors 8A and 8B are converted into digital signals by the AD converters 172A and 172B, respectively, in the head driving unit 17, and then the difference between the two output signals is calculated by the difference calculator 173. The In FIG. 3, the output signal of the Y direction component of each vibration from the acceleration sensors 8A and 8B is indicated by Dy1, and the difference between both output signals is indicated by Dy2. The horizontal axis indicates time, and the vertical axis indicates position.

  The difference value calculated by the difference calculator 173 is further double-integrated by the double integrator 174 to obtain a relative displacement along the Y direction between the stage 4 and the line head unit 3, and the pulse timing calculator 171. Is output.

  As a result of the vibration generated as the stage 4 moves, both the stage 4 and the line head unit 3 vibrate and a relative positional shift occurs between the two. Therefore, the droplets are generated based on the normal ejection timing signal T1. Is discharged earlier than the target position along the Y direction, depending on the relative displacement between the stage 4 and the line head unit 3, or may land after a delay. Due to this, the deviation of the landing position occurs.

  Therefore, the pulse timing calculator 171 applies correction to the normal ejection timing signal T1 so as to cancel out this displacement according to the relative displacement between the stage 4 and the line head unit 3. A corrected discharge timing signal T2 that is earlier or later than the normal discharge timing is generated, and the corrected discharge timing signal T2 is used to drive each droplet discharge head of the head unit 3 by the signal amplifier 175. And output to each droplet discharge head of the line head unit 3.

  As a result, the landing position deviation in the Y direction caused by the disturbance in the relative positional relationship between the stage 4 and the line head 3 that occurs when the stage 4 moves in the Y direction is corrected. The liquid droplets can be landed with high accuracy in the direction along the Y direction on the substrate W.

  FIG. 4 is a graph showing the result of comparing the landing accuracy when drawing on the substrate W at a pitch of 500 μm with no correction and with correction. As shown in the figure, when correction is performed according to the present invention, the frequency of landing at a target 500 μm pitch position is higher than when correction is not performed, and high landing accuracy can be secured. I understand that.

  Next, a case where the relative position along the X direction between the stage 4 and the line head unit 3 is changed by finely adjusting the attachment position along the X direction of each droplet discharge head in the line head unit 3. explain.

Here, the structure of the line head unit 3 will be described. FIG. 5 is a bottom view of the line head unit 3. In the line head unit 3, a large number of droplet discharge heads H are individually attached and fixed to the lower surface of a base plate 31 which is a single large base member. It arrange | positions so that it may oppose with the surface of the base material W on the stage 4 arrange | positioned.

  Here, twelve droplet discharge heads H are arranged in a staggered manner in two rows so that each nozzle row is aligned in the X direction and each nozzle has a uniform pitch. A line head having a long recording width is formed.

  A metal material is generally used for the base plate 31. Although SUS can be used as the metal material, low thermal expansion materials such as invar material and novinite are preferably used in order to keep the mounting position accuracy of the droplet discharge head H highly accurate. The base plate 31 has two rows of opening frames 32 along the arrangement direction of the droplet discharge heads H, and a head fixing plate 33 as a head mounting portion in each of the opening frames 32 separates the droplet discharge heads H individually. The same number as the droplet discharge heads H is arranged so that it can be attached to the head.

  Each head fixing plate 33 is arranged at one end side of both side edges in the nozzle row direction (X direction in the drawing) of the droplet discharge head H with an interval in the nozzle row direction of the droplet discharge head H. The two elastic hinges 34 having the same length are integrally connected to the base plate 31 and are held by the base plate 31. Each head fixing plate 33 is connected to the base plate 31 only by this elastic hinge 34, and other portions are separated from the base plate 31 in the opening frame 32.

  In the drawing, one head fixing plate 33 shows a state before the droplet discharge head H is attached.

  In the opening frame 32 on the other end side of each head fixing plate 33, an actuator 35 is disposed between the head fixing plate 33 and the base plate 31, and the actuator 35 is juxtaposed along the Y direction with respect to each head fixing plate 33. ing. A piezoelectric element is used for the actuator 35, and the actuator 35 extends according to the applied voltage. Here, at one corner on the other end side of each head fixing plate 33, on the inner periphery of the opening frame 32 that is the side (Y direction in the figure) intersecting the nozzle row direction of the droplet discharge head H. A protruding portion 331 is formed as a pressing operation portion protruding toward the head. On the other hand, a protruding portion 311 protruding from the inner periphery of the opening frame 32 toward the head fixing plate 33 along the Y direction in the figure is formed on the base plate 31. And a pressing force in the horizontal direction parallel to the X direction in the drawing, that is, the nozzle row direction of the droplet discharge head H, is applied between the protrusions 331 and 311. It has become.

  The head fixing plate 33, the elastic hinge 34, the protrusions 311 and 331, and the actuator 35 provided in the opening frame 32 of the base plate 31 constitute a fine adjustment mechanism for finely adjusting the attachment position of the droplet discharge head H. doing. When a predetermined pressing force is applied to the protruding portion 331 by the extension operation of the actuator 35, the fine adjustment mechanism applies a lateral (horizontal) force along the X direction to the head fixing plate 33. The two elastic hinges 34 are slightly bent and deformed by the force and tilted uniformly, so that the parallelism in the X direction of the head fixing plate 33 is maintained, that is, the nozzle row direction of the droplet discharge head H is changed. The position of the droplet discharge head H in the X direction is finely adjusted while maintaining the angle formed with respect to the X direction. On the contrary, when the actuator 35 contracts, the head fixing plate 33 returns to the original position by the elastic return of the elastic hinge 34.

  In this fine adjustment mechanism, an appropriate voltage is applied to each actuator 35 in advance so that the attachment position along the X direction of each droplet discharge head H constituting the line head unit 3 is an appropriate position.

  Reference numeral 332 denotes an attachment hole formed in the head fixing plate 33 for attaching the droplet discharge head H, and reference numeral 36 denotes an attachment screw for attaching the droplet discharge head H to the head fixing plate 33.

  FIG. 6 is a block diagram showing the configuration of the drive unit of the actuator 35, and FIG. 7 is a timing chart showing the vibration of the stage 4 and the line head unit 3 along the X direction and the voltage applied to the actuator 35.

  An appropriate voltage signal for finely adjusting the attachment position of each droplet discharge head H in the X direction is generated in advance by the calculator 19 to each actuator 35 and is applied after being converted into a voltage value by the DA converter 20. The The position of each actuator 35 is monitored by the displacement sensor 21 and fed back to the calculator 19. Thereby, the relative attachment position along the X direction of each droplet discharge head H in the line head unit 3 is adjusted to an appropriate position. This adjustment operation has already been performed when the line head unit 3 is mounted on the droplet discharge device 1.

On the other hand, the X direction component of the vibration generated as the stage 4 moves is detected by the acceleration sensors 8A and 8B in the same manner as in the Y direction component, and the X difference between the stage 4 and the line head unit 3 is determined from the difference between the two. A relative displacement along the direction is required. In FIG. 7 , the output signal of the X direction component of each vibration from the acceleration sensors 8A and 8B is indicated by Dx1, and the difference between both output signals is indicated by Dx2. The horizontal axis indicates time, and the vertical axis indicates position.

  As shown in FIG. 6, the voltage value from the DA converter 20 is given to each actuator 35 via the adder 22. The adder 22 is given a relative displacement value along the X direction between the stage 4 and the line head unit 3, and the stage 4 and the line head unit with respect to the voltage value output to each actuator 35. 3, a correction voltage value V that cancels this displacement is generated according to the relative displacement magnitude along the X direction with respect to 3 and applied equally to each actuator 35. Accordingly, each droplet discharge head H constituting the line head 3 is finely adjusted by the same amount in the direction along the X direction.

  As a result, the landing position deviation in the X direction caused by the disturbance of the relative positional relationship between the stage 4 and the line head unit 3 that occurs when the stage 4 moves in the Y direction is corrected. The ejected droplets can be landed with high accuracy in the direction along the X direction on the substrate W. Since each droplet discharge head H is finely adjusted by the same amount, the attachment position between the droplet discharge heads H does not change.

  The droplet discharge device 1 can prevent the landing position deviation in the XY direction by simultaneously performing both the correction of the landing position deviation along the Y direction and the correction of the landing position deviation along the X direction. Highly accurate drawing can be realized.

1: Droplet ejection device 2: Device base 3: Line head unit 4: Stage 5: θ rotation mechanism 6: Y movement mechanism 7: X movement mechanism 8A, 8B: Acceleration sensor 9: Gantry 10: Slider 11: θ rotation Mechanism 12: Z moving mechanism 13: Vibration isolation mechanism 14: Base plate 15: Stage encoder output 16: Pulse modulator 17: Head drive unit 18A, 18B: Amplifier 19: Calculator 20: DA converter 21: Displacement sensor 22: Addition H: Droplet discharge head W: Substrate

Claims (5)

A plurality of droplet discharge heads in which a large number of nozzles for discharging droplets are arrayed along the X direction are individually attached to a plurality of head mounting portions provided along the X direction on the base member, whereby the X direction A line head unit that constitutes a long line head, and a stage on which a substrate is mounted and moved in the X direction and the Y direction intersecting the X direction, from the nozzles of the droplet discharge head A droplet discharge device that performs drawing by landing droplets discharged according to a predetermined discharge timing on the substrate,
A first vibration measuring means provided on the stage for measuring the vibration of the stage;
Provided in the line head unit, a second vibration measurement means for measuring the vibration of the line head unit,
An angle formed by the nozzle row direction of the droplet discharge head with respect to the X direction by the operation of the actuator, the actuator being provided between the base member and the head mounting portion in the line head unit; The position changing means that can change the position along the X direction of the droplet discharge head by adjusting the position along the X direction of the head mounting portion while maintaining
An X-direction component of relative displacement between the stage and the line head unit is obtained from the difference between the outputs of the first vibration measuring means and the second vibration measuring means, and the position changing means is determined according to the magnitude. A droplet discharge device comprising: a first correction unit that changes the position of all the droplet discharge heads along the X direction by the same amount by being operated . The Y direction component of the relative displacement between the stage and the line head unit is obtained from the difference between the outputs of the first vibration measuring means and the second vibration measuring means, and the ejection timing is changed according to the magnitude. The liquid droplet ejection apparatus according to claim 1, further comprising: a second correcting unit that performs the correction . Each of the head mounting portions is integrally connected to the base member by a plurality of elastic hinges,
The position changing means maintains the angle formed by the nozzle row direction of the droplet discharge head with respect to the X direction by causing the pressing force of the actuator to act on the head mounting portion and flexing and deforming the elastic hinge. 3. The liquid droplet ejection apparatus according to claim 1 , wherein the position along the X direction of the head mounting portion is adjusted as it is. The head mounting portion is disposed inside an opening frame formed in the base member,
The droplet ejecting apparatus according to claim 3 , wherein the elastic hinges are arranged along the X direction across the head mounting portion and the inner periphery of the opening frame .   The liquid droplet ejection apparatus according to claim 1, wherein the first vibration measurement unit and the second vibration measurement unit are configured by an acceleration sensor.

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