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JP5409171B2 - Wiring board - Google Patents
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JP5409171B2 - Wiring board - Google Patents

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JP5409171B2
JP5409171B2 JP2009179057A JP2009179057A JP5409171B2 JP 5409171 B2 JP5409171 B2 JP 5409171B2 JP 2009179057 A JP2009179057 A JP 2009179057A JP 2009179057 A JP2009179057 A JP 2009179057A JP 5409171 B2 JP5409171 B2 JP 5409171B2
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conductor
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power supply
connection pad
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JP2011035120A (en
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芳洋 中川
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京セラSlcテクノロジー株式会社
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Description

本発明は、配線基板に関する。   The present invention relates to a wiring board.

一般に現在の電子機器は、高速化、大容量伝送化が顕著になってきている。それに伴い電子機器に使用される配線基板は高周波伝送における電気的ロスの少ない形態が要求されている。そのため、特に高周波信号を伝送する伝送路を有する配線基板においては、図11、図12に示すように、複数の絶縁層12が積層されて成る絶縁基板11の表面および各絶縁層12間に複数の接地用または電源用の導体層13を設けている。そして絶縁基板11の下面に外部の電気回路基板に接続される信号用の外部接続パッド15を設けるとともに、絶縁基板11の上面側から信号用の外部接続パッド15の中央部に接続する信号用の貫通導体16を設けて成る。なお、信号用の貫通導体16の上端には信号用の配線導体14が接続されている。また、接地用または電源用の導体層13のうち、同じ電位に接続されるもの同士は絶縁層12を貫通する接地用または電源用の貫通導体18により電気的に接続されている。   In general, high speed and large capacity transmission are becoming prominent in current electronic devices. Accordingly, wiring boards used in electronic devices are required to have a form with less electrical loss in high-frequency transmission. Therefore, particularly in a wiring board having a transmission path for transmitting a high-frequency signal, a plurality of insulating layers 12 are laminated between the surface of the insulating board 11 and a plurality of insulating layers 12 as shown in FIGS. The grounding or power supply conductor layer 13 is provided. Further, a signal external connection pad 15 connected to an external electric circuit board is provided on the lower surface of the insulating substrate 11, and a signal signal connected to the central portion of the signal external connection pad 15 from the upper surface side of the insulating substrate 11. A through conductor 16 is provided. A signal wiring conductor 14 is connected to the upper end of the signal through conductor 16. Further, among the grounding or power supply conductor layers 13, those connected to the same potential are electrically connected by a grounding or power supply through conductor 18 that penetrates the insulating layer 12.

このような配線基板においては、信号用の貫通導体16に接続された外部接続パッド15における急激な特性インピーダンスの低下をなくすことにより外部接続パッド15における信号の反射を抑制して高周波信号を効率良く外部に伝送可能とするために、接地用または電源用の導体層13における外部接続パッド15と対向する領域に外部接続パッド15と同等以上の大きさを有する開口部13aを設け、それにより信号用の貫通導体16に接続された外部接続パッド15と接地用または電源用の導体層13との間に形成される静電容量を低減させるようにしている。   In such a wiring board, the reflection of the signal at the external connection pad 15 is suppressed by eliminating a sudden drop in characteristic impedance at the external connection pad 15 connected to the signal through conductor 16, and a high-frequency signal is efficiently generated. In order to be able to transmit to the outside, an opening 13a having a size equal to or larger than that of the external connection pad 15 is provided in a region facing the external connection pad 15 in the conductor layer 13 for grounding or power supply. The capacitance formed between the external connection pad 15 connected to the through conductor 16 and the conductor layer 13 for grounding or power supply is reduced.

しかしながら、このように接地用または電源用の導体層13における外部接続パッド15と対向する領域に外部接続パッド15と同等以上の大きさを有する開口部13aを設けた場合、信号用の貫通導体16と接地用または電源用の導体層13および接地用または電源用の貫通導体18との間の静電容量が小さくなり、信号用の貫通導体16における特性インピーダンスが逆に大きくなってしまう。その結果、例えば信号用の貫通導体16を伝送する信号の周波数が10GHzを超えるような高周波信号では、その信号を良好に伝送することが困難となってしまう。   However, when the opening 13 a having a size equal to or larger than that of the external connection pad 15 is provided in the region facing the external connection pad 15 in the grounding or power supply conductor layer 13 as described above, the signal through conductor 16 is provided. And the grounding or power supply conductor layer 13 and the grounding or power supply through conductor 18 are reduced, and the characteristic impedance of the signal through conductor 16 is increased. As a result, for example, a high-frequency signal in which the frequency of the signal transmitted through the signal through conductor 16 exceeds 10 GHz makes it difficult to transmit the signal satisfactorily.

そこで、図13、図14に示すように、信号用の貫通導体16を外部接続パッド15の外周部に接続するようになした配線基板が提案されている。信号用の貫通導体16を外部接続パッド15の外周部に接続するようにした場合、信号用の貫通導体16が接地用または電源用の導体層13に近接することになるので、例えば接地用または電源用の導体層13における信号用の貫通導体16に近接した位置に複数の接地用または電源用の貫通導体18を配置することにより信号用の貫通導体16と接地用または電源用の導体層13および接地用または電源用の貫通導体18との間の静電容量の低下を防止することができるので、信号用の貫通導体14のインピーダンスをある程度適正とすることができる。   Therefore, as shown in FIGS. 13 and 14, a wiring board is proposed in which the signal through conductor 16 is connected to the outer peripheral portion of the external connection pad 15. When the signal through conductor 16 is connected to the outer peripheral portion of the external connection pad 15, the signal through conductor 16 comes close to the ground or power source conductor layer 13. By arranging a plurality of grounding or power supply through conductors 18 at positions near the signal through conductors 16 in the power supply conductor layer 13, the signal through conductors 16 and the grounding or power supply conductor layer 13 are arranged. In addition, since it is possible to prevent a decrease in the capacitance between the grounding conductor or the power supply through conductor 18, the impedance of the signal through conductor 14 can be made appropriate to some extent.

しかしながら、このように信号用の貫通導体16を外部接続パッド15の外周部に接続するようになした配線基板においても、信号用の貫通導体16の周りを接地用または電源用の導体層13および接地用または電源用の貫通導体18が信号用の貫通導体16に対して均等な位置で取り囲んでいないこと等から、信号用の貫通導体16およびこれに対応する導体層13および貫通導体18を伝送する信号に伝送位置に偏りが生じ、その結果、信号用の貫通導体16を伝送する信号の周波数が30GHzを超えるような超高周波信号では、その伝送損失が増加して信号を良好に伝送させることが困難となってしまう。   However, even in the wiring board in which the signal through conductor 16 is connected to the outer peripheral portion of the external connection pad 15 in this manner, the signal through conductor 16 is surrounded by the grounding or power supply conductor layer 13 and Since the grounding or power supply through conductors 18 are not surrounded at equal positions with respect to the signal through conductors 16, the signal through conductors 16 and the corresponding conductor layers 13 and through conductors 18 are transmitted. The transmission position is biased in the signal to be transmitted, and as a result, in the case of an ultra-high frequency signal in which the frequency of the signal transmitted through the signal through conductor 16 exceeds 30 GHz, the transmission loss increases and the signal is transmitted satisfactorily. Becomes difficult.

特開2003−273525公報JP 2003-273525 A

本発明の課題は、信号用の貫通導体および該貫通導体に接続された外部接続パッドを伝送する信号が30GHzを超える超高周波であったとしても、信号の伝送損失を少なくして信号を良好に伝送させることが可能な配線基板を提供することにある。   It is an object of the present invention to reduce the signal transmission loss and improve the signal even if the signal transmitted through the signal through conductor and the external connection pad connected to the through conductor is an extremely high frequency exceeding 30 GHz. An object of the present invention is to provide a wiring board capable of transmission.

本発明の配線基板は、複数の絶縁層が積層されて成る絶縁基板と、該絶縁基板の下面に形成された外部接続パッドと、複数の前記絶縁層を貫通し、上面側から前記外部接続パッドの近傍に垂直に導出する信号用の貫通導体と、該信号用の貫通導体の下端と前記外部接続パッドとを接続する接続導体と、複数の前記絶縁層間に配置され、前記信号用の貫通導体に対応する位置に該信号用の貫通導体が中央を貫通する第1の開口部、および前記外部接続パッドに対向する位置に該外部接続パッドと同等以上の大きさの第2の開口部を有する複数の接地用または電源用の導体層と、前記第1の開口部周辺の前記絶縁層に前記接地用または電源用の導体層同士を接続するように前記信号用の貫通導体から等距離に配置された複数の接地用または電源用の貫通導体とを具備して成ることを特徴とするものである。   The wiring board of the present invention includes an insulating substrate formed by laminating a plurality of insulating layers, an external connection pad formed on the lower surface of the insulating substrate, and a plurality of the insulating layers penetrating from the upper surface side to the external connection pad. A signal through conductor that is led out vertically in the vicinity of the signal, a connection conductor that connects a lower end of the signal through conductor and the external connection pad, and the signal through conductor disposed between the plurality of insulating layers. The signal through conductor has a first opening that passes through the center at a position corresponding to, and a second opening that is equal to or larger than the external connection pad at a position facing the external connection pad. Arranged at equal distances from the signal through conductors to connect the grounding or power supply conductor layers to the grounding or power supply conductor layers and the insulating layer around the first opening. For multiple grounding or power supply It is characterized in that formed by and a through conductor.

本発明の配線基板によれば、絶縁層間に配置された接地用または電源用の導体層に信号用の貫通導体がその中央を貫通する第1の開口部を設け、該第1の開口部周辺の前記絶縁層に前記接地用または電源用の導体層同士を接続するように接地用または電源用の複数の貫通導体を信号用の貫通導体に対して等距離に配置したことから、前記第1の開口部を介して前記信号用の貫通導体を取り囲む接地用または電源用の導体層および前記第1の開口部周辺の前記絶縁層に前記信号用の貫通導体に対して等距離に設けられた複数の接地用または電源用の貫通導体とにより、信号用の貫通導体に対して擬似同軸構造が得られて信号用の貫通導体における特性インピーダンスが極めて良好に整合させることが可能であると同時に接地用または電源用の導体層における外部接続パッドに対向する位置に該外部接続パッドと同等以上の大きさの第2の開口部が形成されていることから、外部接続パッドと接地用または電源用の導体層との間に形成される静電容量が低減されて外部接続パッドにおける特性インピーダンスを整合させることができる。したがって、信号用の貫通導体および該貫通導体に接続された外部接続パッドを伝送する信号が30GHzを超える超高周波であったとしても、信号の伝送損失を少なくして信号を良好に伝送させることができる。   According to the wiring substrate of the present invention, the grounding or power supply conductor layer disposed between the insulating layers is provided with the first opening through which the signal through conductor penetrates the center, and the periphery of the first opening Since the plurality of grounding or power supply through conductors are arranged at an equal distance from the signal through conductors so that the grounding or power supply conductor layers are connected to the insulating layer of the first, The grounding or power supply conductor layer surrounding the signal through conductor and the insulating layer around the first opening are provided at an equal distance from the signal through conductor through the opening of the signal. With multiple grounding or power supply through conductors, a pseudo-coaxial structure can be obtained for the signal through conductors, and the characteristic impedance of the signal through conductors can be matched very well, and at the same time For power supply or power supply Since a second opening having a size equal to or larger than that of the external connection pad is formed at a position facing the external connection pad in the layer, it is provided between the external connection pad and the conductor layer for grounding or power supply. The formed capacitance can be reduced to match the characteristic impedance of the external connection pad. Therefore, even if the signal transmitted through the signal through conductor and the external connection pad connected to the through conductor is an ultra-high frequency exceeding 30 GHz, it is possible to reduce the signal transmission loss and to transmit the signal satisfactorily. it can.

図1は、本発明の配線基板における実施形態の一例を示す要部概略上面図である。FIG. 1 is a schematic top view of an essential part showing an example of an embodiment of a wiring board according to the present invention. 図2は、図1に示す配線基板の要部概略断面図である。2 is a schematic cross-sectional view of a main part of the wiring board shown in FIG. 図3は、本発明の配線基板における実施形態の他の例を示す要部概略上面図である。FIG. 3 is a schematic top view of a main part showing another example of the embodiment of the wiring board of the present invention. 図4は、図3に示す配線基板の要部概略断面図である。FIG. 4 is a schematic cross-sectional view of a main part of the wiring board shown in FIG. 図5は、本発明によるシミュレーションモデルを示す斜視図である。FIG. 5 is a perspective view showing a simulation model according to the present invention. 図6は、図5に示すモデルを示す部分断面斜視図である。6 is a partial cross-sectional perspective view showing the model shown in FIG. 図7は、比較のためのシミュレーションモデルを示す斜視図である。FIG. 7 is a perspective view showing a simulation model for comparison. 図8は、図7に示すモデルを示す部分断面斜視図である。FIG. 8 is a partial cross-sectional perspective view showing the model shown in FIG. 図9は、図5,6に示すモデルをシミュレーション結果のグラフである。FIG. 9 is a graph of simulation results of the models shown in FIGS. 図10は、図7,8に示すモデルをシミュレーションした結果のグラフである。FIG. 10 is a graph showing a result of simulating the models shown in FIGS. 図11は、従来の配線基板の一例を示す要部概略上面図である。FIG. 11 is a schematic top view of an essential part showing an example of a conventional wiring board. 図12は、図11に示す配線基板の要部概略断面図である。12 is a schematic cross-sectional view of a main part of the wiring board shown in FIG. 図13は、従来の配線基板の別の例を示す要部概略上面図である。FIG. 13 is a schematic top view of a main part showing another example of a conventional wiring board. 図14は、図13に示す配線基板の要部概略断面図である14 is a schematic cross-sectional view of a main part of the wiring board shown in FIG.

次に、本発明の配線基板の実施形態の一例を添付の図面を基に説明する。本例の配線基板は、図1、図2に示すように、複数の絶縁層2を積層して成る絶縁基板1の表面および各絶縁層2間に複数の接地用または電源用の導体層3を設けている。絶縁層2は、例えばガラスクロスに熱硬化性樹脂を含浸させて成る繊維強化絶縁樹脂材料や熱硬化性樹脂に酸化珪素等の無機絶縁フィラーを分散させてなるフィラー含有絶縁樹脂材料から成る。また、導体層3は、銅箔や銅めっき層から成る導電材料を各絶縁層2に所定パターンに被着させることにより形成されている。なお、図1、図2においては、本例の配線基板の要部のみを模式的に示している。   Next, an example of an embodiment of a wiring board according to the present invention will be described with reference to the accompanying drawings. As shown in FIGS. 1 and 2, the wiring board of this example has a plurality of grounding or power supply conductor layers 3 between the surface of the insulating substrate 1 formed by laminating a plurality of insulating layers 2 and each insulating layer 2. Is provided. The insulating layer 2 is made of, for example, a fiber-reinforced insulating resin material obtained by impregnating a glass cloth with a thermosetting resin or a filler-containing insulating resin material obtained by dispersing an inorganic insulating filler such as silicon oxide in a thermosetting resin. The conductor layer 3 is formed by depositing a conductive material made of copper foil or a copper plating layer on each insulating layer 2 in a predetermined pattern. In FIGS. 1 and 2, only the main part of the wiring board of this example is schematically shown.

絶縁基板1の上面には本例の配線基板に搭載される電子部品の信号電極に接続される信号用の配線導体4が形成されているとともに、絶縁基板1の下面には、外部の電気回路基板に接続される信号用の外部接続パッド5が形成されており、信号用の配線導体4と外部接続パッド5とは、各絶縁層3を貫通する信号用の貫通導体6および絶縁基板1の下面に設けた信号用の接続導体7により電気的に接続されている。これらの配線導体4および外部接続パッド5ならびに貫通導体6および接続導体7は、接地用または電源用の導体層3と同様に銅箔や銅めっき層から成る導電材料を各絶縁層2に所定パターンに被着させることにより形成されている。   A signal wiring conductor 4 connected to a signal electrode of an electronic component mounted on the wiring board of this example is formed on the upper surface of the insulating substrate 1, and an external electric circuit is formed on the lower surface of the insulating substrate 1. A signal external connection pad 5 connected to the substrate is formed. The signal wiring conductor 4 and the external connection pad 5 are formed of the signal through conductor 6 and the insulating substrate 1 penetrating each insulating layer 3. They are electrically connected by a signal connection conductor 7 provided on the lower surface. These wiring conductors 4 and external connection pads 5 as well as through conductors 6 and connection conductors 7 have a predetermined pattern in each insulating layer 2 made of a conductive material made of copper foil or a copper plating layer, like the conductor layer 3 for grounding or power supply. It is formed by making it adhere to.

接地用または電源用の導体層3には、信号用の貫通導体6に対応する位置に信号用の貫通導体6が中央を貫通する円形の第1の開口部3aが形成されているとともに、外部接続パッド5と対向する領域に外部接続パッド5と同等以上の大きさの円形の第2の開口部3bが設けられており、第1の開口部3aと第2の開口部3bとは互いに離間している。   The grounding or power supply conductor layer 3 is formed with a circular first opening 3a through which the signal through conductor 6 passes through the center at a position corresponding to the signal through conductor 6 and externally. A circular second opening 3b having a size equal to or larger than that of the external connection pad 5 is provided in a region facing the connection pad 5, and the first opening 3a and the second opening 3b are separated from each other. doing.

さらに、第1の開口部3a周辺の絶縁層2に接地用または電源用の導体層3同士を接続するようにして信号用の貫通導体6から等距離に配置された複数の接地用または電源用の貫通導体8が信号用の貫通導体6を取り囲むように配置されている。第1の開口部3aおよび接地用または電源用の貫通導体8は、信号用の貫通導体6に対して擬似同軸構造により所定の特性インピーダンスを付与する位置関係で配置されており、それにより貫通導体6における特性インピーダンスが極めて良好に整合される。このように第1の開口部3aは第2の開口部3bから離間しているので、信号用の貫通導体6に対して特定インピーダンスの擬似同軸構造を容易に与えることができる。   Further, a plurality of grounding or power supply terminals disposed equidistantly from the signal through conductor 6 so as to connect the grounding or power supply conductor layers 3 to the insulating layer 2 around the first opening 3a. The through conductors 8 are arranged so as to surround the signal through conductors 6. The first opening 3a and the grounding or power supply penetrating conductor 8 are arranged in a positional relationship that gives a predetermined characteristic impedance to the signal penetrating conductor 6 by a pseudo-coaxial structure. The characteristic impedance at 6 is very well matched. Since the first opening 3a is thus separated from the second opening 3b, a pseudo-coaxial structure having a specific impedance can be easily provided to the signal through conductor 6.

さらに、接地用または電源用の導体層3には、外部接続パッド5と対応する位置に外部接続パッド5と同等以上の大きさの第2の開口部3bが形成されていることから、これにより、外部接続パッド5と接地用または電源用の導体層3との間に形成される静電容量が低減されている。その結果、外部接続パッド5における特性インピーダンスが良好に整合され、外部接続パッド5における信号の反射が抑制される。   Further, the second opening 3b having a size equal to or larger than that of the external connection pad 5 is formed in the grounding or power supply conductor layer 3 at a position corresponding to the external connection pad 5. The capacitance formed between the external connection pad 5 and the grounding or power supply conductor layer 3 is reduced. As a result, the characteristic impedance in the external connection pad 5 is satisfactorily matched, and signal reflection at the external connection pad 5 is suppressed.

したがって本発明の配線基板によれば、信号用の貫通導体6およびこれに接続された外部接続パッド5を伝送する信号が30GHzを超える超高周波であったとしても、信号の損失を極めて少ないものとして信号を良好に伝送させることができる。なお、本発明は上述の実施形態の一例に特定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能であり、例えば上述の実施形態の一例では、信号用の貫通導体6と外部接続パッド5とを絶縁基板1の下面に設けた接続導体7により接続した例を示したが、例えば図3、図4に示すように、信号用の貫通導体6と外部接続パッド5とを絶縁基板1の下面近傍の絶縁層2間に設けた接続導体7により接続するようにしてもよい。この場合、接続導体7に対向する絶縁基板11の下面に接地用または電源用の導体層3を設けることにより、接続導体7の特性インピーダンスを整合させることが容易であるとともに接続導体7の外部に対するシールドを強化することが可能である。   Therefore, according to the wiring board of the present invention, even if the signal transmitted through the signal through conductor 6 and the external connection pad 5 connected thereto is an ultrahigh frequency exceeding 30 GHz, the loss of the signal is extremely small. The signal can be transmitted satisfactorily. The present invention is not limited to an example of the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. For example, in the above-described example of the embodiment, the signal Although the example in which the through conductor 6 and the external connection pad 5 are connected by the connection conductor 7 provided on the lower surface of the insulating substrate 1 is shown, for example, as shown in FIGS. 3 and 4, the signal through conductor 6 and the external connection are connected. The pad 5 may be connected by a connection conductor 7 provided between the insulating layers 2 near the lower surface of the insulating substrate 1. In this case, by providing the grounding or power supply conductor layer 3 on the lower surface of the insulating substrate 11 facing the connection conductor 7, it is easy to match the characteristic impedance of the connection conductor 7 and to the outside of the connection conductor 7. It is possible to strengthen the shield.

本発明による効果を検証するために本発明による解析モデルと比較のための解析モデルを作成し、Ansoft社製の電磁界シミュレーターHFSSを使ってシミュレーションを行なった。   In order to verify the effect of the present invention, an analytical model according to the present invention and an analytical model for comparison were created, and a simulation was performed using an electromagnetic field simulator HFSS manufactured by Ansoft.

まず、本発明による解析モデルについて説明する。本発明による解析モデルは、図5、図6に示すように、絶縁層(不図示)を8層積層して成る絶縁基板1の上下面および各絶縁層の間に接地用または電源用の導体層3を9層設けた。なお、図5においては、最上層の導体層3を点線にて示している。絶縁基板1の上面には直径が120μmの円形のランド4を設けるとともに、最上層の導体層3にはランド4と同じ中心をもつ直径が260mmの開口部3a’を形成した。また絶縁基板1の下面には直径が620μmの外部接続パッド5を設け、最上層の導体層3を除く各接地用または電源用の導体層3には外部接続パッド5と対応する領域に直径が880mmの開口部3bを外部接続パッド5の中心と開口部3bの中心とが同一軸上に並ぶように設けた。また最上層のランド4の下面中央に接続され、最下層から2番目の絶縁層までの絶縁層を貫通する信号用の貫通導体6を、間に最上層のランド4と同じ寸法のランドを介して垂直に積み重ねるように設けるとともに、最上層および最下層から2番目までの導体層3を除く各導体層3における貫通導体6と対応する領域に直径が520μmの開口部3aを、貫通導体6の中心と開口部3aの中心とが同一軸上に並ぶように設け、さらに開口部3aの近傍に接地用または電源用の導体層3同士を接続するようにして信号用の貫通導体6を約50Ωの特性インピーダンスを付与するように四方から等距離で取り囲む接地用または電源用の貫通導体8を各絶縁層に設けた。また、積み重ねられた貫通導体6の下端に接続されたランドから外部接続パッド5の端部まで幅が28μmの接続導体7を設けるとともに外部接続パッド5側の接続導体7の端部にランド4と同じ直径のランドを設け、このランドと外部接続パッド5とを信号用の貫通導体6’で接続した。なお、接続導体7の周囲の導体層3には接続導体7を82μmの幅で取り囲むギャップを設けた。   First, an analysis model according to the present invention will be described. As shown in FIGS. 5 and 6, the analysis model according to the present invention is a conductor for grounding or power supply between the upper and lower surfaces of an insulating substrate 1 formed by stacking eight insulating layers (not shown) and each insulating layer. Nine layers 3 were provided. In FIG. 5, the uppermost conductor layer 3 is indicated by a dotted line. A circular land 4 having a diameter of 120 μm was provided on the upper surface of the insulating substrate 1, and an opening 3 a ′ having a diameter of 260 mm having the same center as that of the land 4 was formed in the uppermost conductor layer 3. Further, an external connection pad 5 having a diameter of 620 μm is provided on the lower surface of the insulating substrate 1, and each grounding or power supply conductor layer 3 except for the uppermost conductor layer 3 has a diameter in a region corresponding to the external connection pad 5. The opening 3b of 880 mm is provided so that the center of the external connection pad 5 and the center of the opening 3b are aligned on the same axis. Further, a signal through conductor 6 connected to the center of the lower surface of the uppermost land 4 and penetrating through the insulating layer from the lowermost layer to the second insulating layer is interposed via a land having the same dimensions as the uppermost land 4. And an opening 3 a having a diameter of 520 μm is formed in a region corresponding to the through conductor 6 in each conductor layer 3 excluding the uppermost layer and the second lowest conductor layer 3. The center of the opening 3a and the center of the opening 3a are arranged on the same axis, and the grounding or power supply conductor layer 3 is connected to the vicinity of the opening 3a so that the signal through conductor 6 is about 50Ω. A grounding or power supply through conductor 8 is provided in each insulating layer so as to provide a characteristic impedance of 5 mm. Further, a connection conductor 7 having a width of 28 μm is provided from the land connected to the lower end of the stacked through conductors 6 to the end of the external connection pad 5, and the land 4 is connected to the end of the connection conductor 7 on the external connection pad 5 side. A land having the same diameter was provided, and the land and the external connection pad 5 were connected by a signal through conductor 6 '. A gap surrounding the connection conductor 7 with a width of 82 μm was provided in the conductor layer 3 around the connection conductor 7.

次に比較のための解析モデルについて説明する。比較のための解析モデルは、図7、図8に示すように、上述した本発明による解析モデルと同じ層構成であり、絶縁層(不図示)を8層積層して成る絶縁基板11の上下面および各絶縁層の間に接地用または電源用の導体層13を9層設けた。絶縁基板11の上面には直径が120μmの円形のランド14を設けるとともに、最上層の導体層13にはランド14と同じ中心をもつ直径が260mmの開口部13a’を形成した。また絶縁基板11の下面には直径が620μmの外部接続パッド15を設け、最上層の導体層13を除く各接地用または電源用の導体層13には外部接続パッド15と対応する領域に直径が880mmの開口部13bを外部接続パッド15の中心と開口部13bの中心とが同一軸上に並ぶように設けた。また最上層のランド14に接続する貫通導体14’を最上層の絶縁層に設けるとともに貫通導体14’に接続されたランドから外部接続パッド15の端部に対応する位置まで幅が28μmの接続導体18を設けるとともに外部接続パッド15側の接続導体7の端部にランド14と同じ直径のランドを設け、このランドと外部接続パッド15とを各絶縁層にランド14と同じ直径のランドを介して垂直に積み重なるように配置した信号用の貫通導体16で接続した。なお、接続導体18の周囲の導体層13には接続導体18を82μmの幅で取り囲むギャップを設けた。さらに開口部3bの近傍に接地用または電源用の導体層13同士を接続するようにして信号用の貫通導体16を六方から等距離で取り囲む接地用または電源用の貫通導体18を各絶縁層に設けた。   Next, an analysis model for comparison will be described. As shown in FIGS. 7 and 8, the analysis model for comparison has the same layer configuration as the analysis model according to the present invention described above, and is provided on the insulating substrate 11 formed by stacking eight insulating layers (not shown). Nine grounding or power supply conductor layers 13 were provided between the lower surface and each insulating layer. A circular land 14 having a diameter of 120 μm was provided on the upper surface of the insulating substrate 11, and an opening 13 a ′ having a diameter of 260 mm having the same center as the land 14 was formed in the uppermost conductor layer 13. An external connection pad 15 having a diameter of 620 μm is provided on the lower surface of the insulating substrate 11, and each grounding or power supply conductor layer 13 except for the uppermost conductor layer 13 has a diameter in a region corresponding to the external connection pad 15. The opening portion 13b of 880 mm is provided so that the center of the external connection pad 15 and the center of the opening portion 13b are aligned on the same axis. Further, a through conductor 14 ′ connected to the uppermost land 14 is provided in the uppermost insulating layer, and a connecting conductor having a width of 28 μm from the land connected to the through conductor 14 ′ to a position corresponding to the end of the external connection pad 15. 18 and a land having the same diameter as the land 14 at the end of the connection conductor 7 on the external connection pad 15 side, and the land and the external connection pad 15 are connected to each insulating layer via a land having the same diameter as the land 14. The signal through conductors 16 are arranged so as to be stacked vertically. A gap surrounding the connection conductor 18 with a width of 82 μm was provided in the conductor layer 13 around the connection conductor 18. Further, the grounding or power supply through conductors 18 that surround the signal through conductors 16 at an equal distance from six sides so as to connect the grounding or power supply conductor layers 13 to each other in the vicinity of the opening 3b are formed in the respective insulating layers. Provided.

前記本発明によるモデルと比較のためのモデルとを用いてシミュレーションした場合における信号の透過損および反射損に対する周波数特性をそれぞれ図9、図10にグラフで示す。なお、シミュレーションにおいては、絶縁基板を構成する各絶縁層の厚みを33μm、比誘電率を3.35、誘電正接を0.018とし、各導体層の厚みを15μm、貫通導体の上端径を53μm、下端径を65μm、導電率を32000000S/mとした。   FIG. 9 and FIG. 10 are graphs showing frequency characteristics with respect to signal transmission loss and reflection loss, respectively, when simulation is performed using the model according to the present invention and the model for comparison. In the simulation, the thickness of each insulating layer constituting the insulating substrate is 33 μm, the relative dielectric constant is 3.35, the dielectric loss tangent is 0.018, the thickness of each conductor layer is 15 μm, and the upper end diameter of the through conductor is 53 μm. The lower end diameter was 65 μm, and the conductivity was 32000000 S / m.

図9、図10に示すグラフにおいて、実線で示したS21が信号の透過損に対する周波数特性を示しており、点線で示したS11が信号の反射損に対する周波数特性を示している。図9に示す本発明によるモデルをシミュレーションした結果のグラフから分るように、本発明によるモデルでは、約50GHzの領域まで信号の反射損が−20dB以下であり、約45GHzの領域まで信号の透過損が−0.5dB以上であることが分る。従って、30GHzを超える超高周波であっても信号の損失を極めて少ないものとして信号を良好に伝送させることができる。これに対して、図10に示す比較のためのモデルをシミュレーションした結果のグラフから分るように、比較のためのモデルでは、約15GHzを超える領域では信号の反射損が−20dBを超え、約30GHzの領域を超える領域では信号の透過損が−0.5dB以下となってしまうことが分る。従って、30GHzを超える長高周波では信号の損失大きくなって信号を良好に伝送させることがでない。   In the graphs shown in FIGS. 9 and 10, S21 indicated by a solid line indicates a frequency characteristic with respect to a signal transmission loss, and S11 indicated by a dotted line indicates a frequency characteristic with respect to a signal reflection loss. As can be seen from the graph of the simulation result of the model according to the present invention shown in FIG. 9, in the model according to the present invention, the signal reflection loss is −20 dB or less up to the region of about 50 GHz, and the signal is transmitted to the region of about 45 GHz. It can be seen that the loss is -0.5 dB or more. Therefore, even at an ultrahigh frequency exceeding 30 GHz, the signal can be transmitted satisfactorily with very little loss of signal. On the other hand, as can be seen from the graph of the simulation result of the model for comparison shown in FIG. 10, in the model for comparison, the signal reflection loss exceeds −20 dB in the region exceeding about 15 GHz, and about It can be seen that the signal transmission loss is −0.5 dB or less in the region exceeding the 30 GHz region. Therefore, at a long high frequency exceeding 30 GHz, the loss of the signal becomes large and the signal cannot be transmitted satisfactorily.

1 絶縁基板
2 絶縁層
3 接地用または電源用の導体層
5 外部接続パッド
6 信号用の貫通導体
7 接続導体
8 接地用または電源用の貫通導体
DESCRIPTION OF SYMBOLS 1 Insulation board | substrate 2 Insulation layer 3 Grounding or power supply conductor layer 5 External connection pad 6 Signal through conductor 7 Connection conductor 8 Grounding or power supply through conductor

Claims (1)

複数の絶縁層が積層されて成る絶縁基板と、該絶縁基板の下面に形成された外部接続パッドと、複数の前記絶縁層を貫通し、上面側から前記外部接続パッドの近傍に垂直に導出する信号用の貫通導体と、該信号用の貫通導体の下端と前記外部接続パッドとを接続する接続導体と、複数の前記絶縁層間に配置され、前記信号用の貫通導体に対応する位置に前記貫通導体が中央を貫通する第1の開口部、および前記外部接続パッドに対向する位置に該外部接続パッドと同等以上の大きさの第2の開口部を有する複数の接地用または電源用の導体層と、前記第1の開口部周辺の前記絶縁層に前記接地用または電源用の導体層同士を接続するように前記信号用の貫通導体から等距離に配置された複数の接地用または電源用の貫通導体とを具備して成り、前記接続導体が前記下面近傍の前記絶縁層間に設けられており、かつ該接続導体に対向する前記下面に接地用または電源用の導体層が設けられていることを特徴とする配線基板。 An insulating substrate formed by laminating a plurality of insulating layers, an external connection pad formed on the lower surface of the insulating substrate, and a plurality of the insulating layers are penetrated to be perpendicular to the vicinity of the external connection pad from the upper surface side. A signal through conductor, a connection conductor connecting the lower end of the signal through conductor and the external connection pad, and a plurality of the insulating layers, the through hole at a position corresponding to the signal through conductor A plurality of conductor layers for grounding or power supply having a first opening through which a conductor penetrates the center and a second opening having a size equal to or larger than that of the external connection pad at a position facing the external connection pad And a plurality of grounding or power supply terminals arranged at equal distances from the signal through conductors so as to connect the grounding or power supply conductor layers to the insulating layer around the first opening. formed SQLDESC_BASE_TABLE_NAME This and a through conductor Wiring board the connection conductor, characterized in Rukoto the lower surface wherein provided in the insulating layers in the vicinity, and has conductor layers for grounding or for power supply to the lower surface opposite to the connection conductor is provided.
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