JP5426151B2 - Surface shape measuring device - Google Patents

Description

  The present invention relates to a rotary support structure for a table and a surface shape measuring apparatus including the same.

  Conventionally, apparatuses for measuring surface shapes (flatness, etc.) such as a polishing plate and a wrapping plate have been widely used. For example, when a measurement object is rotated on the table on which the measurement object is placed. A pair of rolls that serve as guides for the slider, a contact-type displacement sensor attached to a uniaxial slider in a direction orthogonal to the moving direction, a position detection mechanism that detects the moving position of the displacement sensor, and a displacement sensor And a calculation processing unit that calculates the shape information signal of the surface of the object to be measured and the position signal obtained from the position detection mechanism are known (see Patent Document 1). According to this surface shape measuring apparatus, the surface shape of the object to be measured can be measured by rotating the object to be measured by a predetermined angle and thereby repeatedly scanning the displacement sensor while changing the measurement position.

  Further, as a table rotation support structure applicable to the surface shape measuring device, for example, a base with a base shaft attached thereto, a table that rotatably supports a workpiece (measurement object, workpiece (workpiece), etc.), A contact type bearing disposed between the base shaft and the table and supporting the radial force of the table, a non-contact type bearing disposed between the base and the table and supporting the axial force of the table, and the base On the other hand, those having a drive device for finely rotating the table are known (see Patent Documents 2 and 3).

JP-A-8-54204 JP 2006-297545 A Japanese Patent Laid-Open No. 10-226459

  In the prior art described in Patent Documents 2 and 3, the table is configured such that the base shaft that supports the table is fixed on the base and rotates with respect to the base shaft via a contact-type bearing. When the amount of rotation increases, there is a problem that it becomes difficult to maintain the accuracy of the rotational shake well. Apart from such a configuration, it is conceivable to rotatably support the base shaft extending downward from the table. However, in order to increase the length of the base shaft in order to improve the rotational runout accuracy, However, there is a problem that the process becomes complicated and the apparatus becomes larger.

  The present invention has been devised in view of such problems of the prior art, and makes it possible to improve the accuracy of rotational runout of a table that supports a workpiece while maintaining a simple and compact configuration. An object of the present invention is to provide a rotary support structure for a table and a surface shape measuring apparatus including the same.

  1st invention made | formed in order to solve the said subject is a rotation support structure of the table (2) which supports a workpiece | work (W), Comprising: The shaft (31) extended below from the said table, A support base (32) for rotatably supporting the shaft, and the support base has a support hole (50) into which the shaft is inserted, and a load in the radial direction of the shaft is loaded into the support hole. The bearing is provided with a receiving bearing.

  As a second aspect of the invention, a cylindrical shaft housing (51) that surrounds the shaft and extends upward from the support hole, and is rotatably supported by the shaft housing and rotated by the shaft. It can be set as the structure further provided with the pulley (57) which transmits a driving force.

  As a third invention, the pulley is connected to the shaft via an Oldham mechanism (61).

  Further, as a fourth invention, the apparatus further comprises table support means (33) provided on the support base and supporting the table in a floating state by supplying a fluid to the lower side of the table. The table and the shaft are connected via an elastic member (36).

  A fifth aspect of the invention is a surface shape measuring apparatus including the rotation support structure according to any one of the first to fourth aspects of the invention.

  According to the first and fifth aspects of the invention, the length of the shaft is increased while maintaining a simple and compact configuration by the configuration in which the shaft that rotatably supports the table is inserted into the support hole of the support base. It is possible to improve the accuracy of the rotational runout of the table. In addition, according to the second aspect of the invention, since the pulley that transmits the rotational driving force is supported by the shaft housing, the radial force acting on the shaft during rotation of the table is suppressed, and the accuracy of the rotational deflection of the table is further improved. Can be improved. Moreover, according to the said 3rd invention, the shift | offset | difference of the shaft center of a shaft and a pulley is absorbed by an Oldham mechanism, and the precision of the rotational runout of a table can be improved more. According to the fourth aspect of the invention, the displacement of the table in the height direction due to flying is absorbed by the elastic member, so that the connection state between the shaft and the table is appropriately maintained, and the accuracy of the rotational runout of the table is good. Can be maintained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following, unless otherwise specified, the terms “upper” and “lower” indicating directions follow the vertical direction of the surface shape measuring apparatus, and “left” and “right” are the directions of the surface shape measuring apparatus shown in FIG. Follow the left-right direction. Further, “front” and “rear” correspond to the near side and the far side of the surface shape measuring apparatus shown in FIG.

  1 and 2 are a perspective view and a main part plan view of a surface shape measuring apparatus according to an embodiment of the present invention, respectively.

  The surface shape measuring apparatus 1 includes a rotatable disk-shaped measuring table 2 that supports a workpiece (not shown) such as a polishing plate or a wrapping plate, and a sensor that linearly moves in the left-right direction above the measuring table 2. 3, a temporary placement table 4 on which the workpiece is temporarily placed, and a workpiece transport mechanism 5 that transports the workpiece placed on the temporary placement table 4 to a predetermined position on the measurement table 2.

  On the upper surface of the measurement table 2, three height adjusting devices 10 for adjusting the measurement position (height) of the workpiece are arranged at equal intervals in the circumferential direction. The sensor 3 is a contact-type displacement sensor having a probe 3 a that contacts the workpiece surface at the tip, and is installed on a slider 12 that is attached to a guide bar 11 disposed above the measurement table 2 so as to be linearly movable. Has been. The guide bar 11 and the slider 12 constitute a known air slide that is driven by a linear motor (not shown). The slider 12 is provided with a position adjuster 13 that changes the vertical position of the sensor 3 (probe 3a).

  The workpiece transfer mechanism 5 is engaged with a pair of left and right support arms 15 that support the workpiece and at least a part of the non-measurement part of the workpiece (here, the workpiece side surface), whereby the workpiece and the support arm 15 are horizontally aligned And a pair of guide panels 16 that define the relative positions of the two. Both support arms 15 are arranged on the left and right sides of the temporary table 4 so as to sandwich the temporary support table 4. Further, as will be described later, the work transport mechanism 5 is provided with a device for realizing the lifting and lowering operations of both the support arms 15 and the moving operation in the front-rear direction.

  A plurality of free ball bearings 25 are arranged on the upper surface of the temporary table 4. Although not shown in detail, the free ball bearing 25 has a configuration in which a resin-made large-diameter ball 25a is rotatably received by a receiving member in which a plurality of small-diameter balls are arranged in a hemispherical recess. By supporting the work by a plurality of free ball bearings 25, even a work having a relatively large weight (for example, 300 kg) can be easily slid in the horizontal direction on the temporary table 4. . Therefore, the worker can easily adjust the horizontal relative position between the work and the support arm 15 when the work on the temporary placement table 4 is supported by the support arm 15.

  3 is a perspective view showing the measurement table of FIG. 1, and FIG. 4 is a cross-sectional view showing a rotation support structure of the measurement table.

  The rotation support structure of the measurement table 2 is mainly composed of a metal rotation shaft 31 that extends downward from the center of the measurement table 2 and a support base 32 that rotatably supports the rotation shaft 31. .

  On the support base 32, a plurality of air pads 33 are provided around the rotary shaft 31 at a predetermined interval so as to receive a load acting in the axial direction of the measurement table 2. As shown in FIG. 4, the air pad 33 is provided with a plurality of blow holes (not shown) on the upper surface 33 a facing the lower surface of the measurement table 2, and the air holes 33 are directed from the blow holes toward the lower surface of the measurement table 2. By discharging the pressurized air, a thin air film is formed between the measurement table 2 and the measurement table 2 is supported in a floating state. Air discharged from the air pad 33 is supplied to the air pad 33 by a tube from a compressor (not shown) through a filter and a regulator.

  The rotation shaft 31 is connected to the measurement table 2 via the leaf spring unit 35 in a state where the upper end of the rotation shaft 31 is inserted into a through hole 2 a provided in the center of the measurement table 2. The plate spring unit 35 includes a donut-shaped plate spring 36, a hub 37 attached to the upper end portion of the rotary shaft 31, and an annular connection bolted to a step portion formed in the through hole 2a of the measurement table 2. Member 38. The leaf spring 36 is fixed by bolts with its inner peripheral edge sandwiched between the flange 37a of the hub 37 and the annular fixing member 39, while its outer peripheral edge is connected to the connecting member 38. And an annular fixing member 40 are fixed by bolts in a state of being sandwiched up and down. Accordingly, the leaf spring 36 can be deformed in a region excluding the fixed inner and outer peripheral edge portions. Even if the measurement table 2 is lifted by the air pad 33 due to the deformation of the leaf spring 36 (that is, the measurement table 2 is displaced upward with respect to the rotary shaft 31), the rotation shaft 31 and the measurement table 2 are connected. State is maintained properly.

  A shaft housing 51 into which the rotary shaft 31 is inserted is attached to the support hole 50 provided in the support base 32. The shaft housing 51 has a substantially cylindrical shape. At the boundary between the enlarged diameter portion 51a accommodated in the support hole 50, the reduced diameter portion 51b extending upward from the support hole 50, and the enlarged diameter portion 51a. And a flange portion 51c provided on the outer periphery of the reduced diameter portion 51b.

  The enlarged diameter portion 51a and the reduced diameter portion 51b are formed so as to surround the enlarged diameter portion 31a and the reduced diameter portion 31b of the rotary shaft 31, respectively. The flange portion 51 c is bolted to the support base 32 via an annular fixing member 53 that is bolted to the opening edge of the support hole 50. Further, a bearing 54 and a bearing 55 are respectively installed in the annular grooves provided in the inner peripheral walls of the diameter-expanded portion 51 a and the reduced-diameter portion 51 b of the shaft housing 51. Receives a load acting in the radial direction.

  A pulley bearing 56 is bolted to the upper side of the flange portion 51 c of the shaft housing 51, and a pulley 57 is bolted to the outer ring of the pulley bearing 56. A driving belt connected to a driving motor (not shown) is wound around the pulley 57, and a rotational driving force (driving motor output) is transmitted to the rotating shaft 31 via the Oldham mechanism 61.

  The Oldham mechanism 61 connects the pulley 57 and the rotating shaft 31. In the Oldham mechanism 61, a pair of left and right front / rear guide keys 62 extending in the front / rear direction are fitted in a pair of guide grooves 63a provided in the upper slider 63 so as to be slidable in the extending direction. A pair of left and right guide keys 64 extending in a direction (that is, a direction orthogonal to the front and rear guide keys 62) are fitted in a pair of guide grooves 65a provided in the lower slider 65 so as to be slidable in the extending direction. Match.

  The front / rear guide key 62 and the left / right guide key 64 are respectively fixed to the upper surface and the lower surface of an annular center plate 66. The center plate 66 is substantially disk-shaped and has an insertion hole into which the rotating shaft 31 (or the shaft housing 51) is inserted. The upper slider 63 is bolted to the lower surface of the flange portion 71 a of the hub 71 attached to the rotating shaft 31. The lower slider 65 is bolted to the upper surface of the pulley 57.

As described above, the rotation shaft 31 that rotatably supports the measurement table 2 is inserted into the support hole 50 of the support base 32, so that a simple and compact configuration is maintained (the rotation shaft 31 is supported). It is possible to increase the length of the shaft 31 (without projecting greatly from the base 32), and as a result, it is possible to improve the accuracy of the rotational runout of the measurement table 2. Further, since the pulley 57 and the rotary shaft 31 are connected via the Oldham mechanism 61, it is possible to absorb the deviation of the axial center between the pulley 57 rotatably supported by the shaft housing 51 and the rotary shaft 31. It becomes possible, and the accuracy of rotational shake can be further improved.

  5 and 6 are a cross-sectional view and a plan view, respectively, of the height adjusting device, and FIG. 7 is a perspective view of an elevating support member in the height adjusting device. FIG. 6 shows a state where the upper lid of the housing is removed and the periphery of the elevating body 82 is exposed.

  As shown in FIG. 5, the height adjusting device 10 includes a tapered block 81 having an inclined surface 81a inclined downward toward the front of the device (the center direction of the measurement table 2 indicated by an arrow in the drawing), and the tapered block. It is mainly provided with an elevating body 82 which is arranged on 81 and moves up and down along the inclined surface 81a.

The taper block 81 is provided with a through hole 81b penetrating in the longitudinal direction of the apparatus (the radial direction of the measurement table 2). The through hole 81b is screwed to a screw shaft 84 extending in the longitudinal direction of the apparatus. A nut 86 is fitted. The screw shaft 84 is supported by a bearing unit 87 in which a ball bearing is accommodated, and an end portion on the rear side of the apparatus (in the direction opposite to the center of the measurement table 2) is connected to the coupling 88. Both the locking nut 91 to provide a preload to the bearing at the rear of the bearing unit 87 is mounted in the screw shaft 84, the stopper portion 92 is provided in front of the bearing unit 87 in the screw shaft 84.

The coupling 88 connects the screw shaft 84 and the output shaft of the speed reducer 93, and an operation knob 94 is provided on the input shaft of the speed reducer 93. A linear flat roller 95 that supports the taper block 81 so as to be slidable in the front-rear direction of the apparatus is provided below the taper block 81. The above-described components other than the upper part of the elevating body 82 and the operation knob 94 are accommodated in a housing 96.

  As shown in FIG. 7, the elevating body 82 has a spherical member 102 made of ceramics fitted in a groove 101 a (see FIG. 5) provided in the upper part of the main body 101. The spherical member 102 supports the work by making substantially point contact (a narrow area at the top is in contact) with the lower surface of the work. The spherical member 102 can appropriately support the lower surface of the work, and can prevent the damage of the work and the like while suppressing the influence of the bending.

  In addition, a roller 103 provided to be rotatable about a shaft 103a is accommodated in the reduced width portion located above the groove 101b provided in the lower portion of the main body 101. The upper portion of the taper block 81 is fitted into the widened portion located on the lower side of the groove 101b, whereby the peripheral surface of the roller 103 is in contact with the inclined surface 81a as shown in FIG. As shown in FIG. 6, the main body 101 is fitted in a groove 104a provided in a pair of left and right side blocks 104, and can slide in the groove 104a in the vertical direction, while moving in the longitudinal direction of the apparatus. Is regulated.

  On the measurement table 2, a pair of side guide plates 111 are installed along the left and right side edges of the housing 96 in the height adjusting device 10 to guide the movement of the height adjusting device 10 in the longitudinal direction of the device. . A center guide plate 112 extends from the housing 96 of the height adjusting device 10 toward the front of the device. The center guide plate 112 has a long hole 112a extending in the longitudinal direction of the apparatus.

A fixing tool 113 for the center guide plate 112 is installed on the measurement table 2. Fixture 113 includes a screw shaft 115 screwed into a threaded hole provided in the measuring table 2 in a state of being inserted into the long hole 112a of the center guide plate 112 (not shown), above and below the center guide plate 112 A pair of annular fixing rings 116 and an operation handle 117 are disposed. The height adjusting device 10 can adjust the position in the front-rear direction within a range in which the screw shaft 115 can be engaged with the elongated hole 112a. The operator sets the height adjusting device 10 to a desired position, and then operates the operation handle 117 to tighten the screw shaft 115 into the screw hole, so that the center guide plate 112 is sandwiched and fixed between the fixing rings 116. can do.

In the height adjusting device 10 having the above configuration, when the operator manually rotates the operation knob 94 to one side, the screw shaft 84 rotates and the taper block 81 moves to the front of the device. Thereby, the contact position of the inclined surface 81a of the taper block 81 and the roller 103 of the raising / lowering body 82 moves to the apparatus rear, and the raising / lowering body 82 raises. At this time, for example, the quality of the height adjustment can be determined by temporarily measuring the surface shape of the workpiece using the sensor 3.

Further, since the rotation of the operation knob 94 is decelerated by the speed reducer 93, it is possible to finely adjust the rising amount of the elevating body 82, and the workpiece height can be set accurately. Moreover, since the raising / lowering body 82 is the structure which contacts the inclined surface 81a via the roller 103, there exists an advantage that the resistance by friction becomes small and the rotational drive force (operation force) of the operation knob 94 may be small. In this case, a device that generates a rotational driving force such as a motor may be connected to the operation knob 94 and the screw shaft 84 may be rotated without manual operation. The elevating body 82 is lowered by rotating the operation knob 94 to the other side.

  When a disk-shaped workpiece is a measurement target, the radial positions of the three spherical members 102 are within a range of 63 to 73% of the workpiece diameter (more preferably, a position of 68% of the diameter). It is good to arrange. Thereby, the bending amount by the dead weight of the workpiece | work supported by the height adjustment apparatus 10 can be minimized, and a measurement precision can be improved.

  FIG. 8 is a cross-sectional view of the main part showing details of the workpiece transfer mechanism 5 of FIG.

  Both the support arms 15 in the workpiece transport mechanism 5 have a horizontal portion 15a on which the workpiece W is placed, and a vertical portion 15b extending downward from the outer end of the horizontal portion 15a. A guide panel 16 is installed on the upper surface of the horizontal portion 15a, and the lower surface of the workpiece W is supported by a region inside the guide panel 16 on the upper surface. In addition, an elevating device 120 that elevates and lowers the support arm 15 is provided below the horizontal portion 15a. The lifting / lowering device 120 has a telescopic shaft 122 that is driven to extend and contract in the vertical direction by a motor 121, and a support block 123 attached to the tip of the telescopic shaft 122 is bolted to the lower surface of the horizontal portion 15a.

Further, the work transport mechanism 5 has a moving table 126 that realizes linear movement of the support arm 15 in the front-rear direction by the ball screw 125. An elevating device 120 is installed on the horizontal portion 126 a of the moving table 126. The ball screw 125 includes a screw shaft 127 (see FIG. 2) extending in the front-rear direction and a ball screw nut 128 attached to the lower side of the horizontal portion 126a of the moving table 126. The screw shaft 127 is rotationally driven by a belt 130 that transmits the output of a motor (not shown). In addition, a pair of front and rear sliders 131 are provided on the lower surface of the horizontal portion 126 a of the moving table 126. Both front and rear sliders 131 are slidably fitted to a pair of front and rear guide rails 133 in which grooves 131 a provided on the lower surface extend in the front-rear direction on the base plate 132. By the front / rear slider 131, the front / rear guide rail 133, and the ball screw 125, the moving table 126 can move smoothly in the front / rear direction.

  Further, a vertical portion 126b extending upward from the outer end side of the horizontal portion 126a of the moving table 126 is provided with an upper and lower guide rail 134 extending in the vertical direction. The vertical guide rail 134 is engaged with a vertical slider 135 provided on the vertical portion 15b of the support arm 15 so as to be slidable in the vertical direction. Guided by

  As shown in FIG. 2, both guide panels 16 are composed of a plurality of (in this case, four sets) pairs of resin-made divided pieces 141 to 144, and these divided pieces 141 to 144 are respectively Bolts are fastened to the support arm 15 so as to be selectively detachable. In the present embodiment, a disk-shaped workpiece is assumed as a measurement target, and the inner edge 141a of the divided piece 141 is on the outer peripheral surface (arc-shaped side surface in plan view) Wa of the workpiece W having the first size. It has a corresponding arc shape. That is, when the worker temporarily places the work W on the temporary placement table 4, the work W and the support arm are brought into contact with the outer peripheral surface Wa of the work W against the inner edges 141a of the left and right divided pieces 141. The horizontal relative position to 15 can be determined appropriately.

  Similarly to the divided piece 141, the inner edges 142a to 144a of the divided pieces 142 to 144 correspond to the outer peripheral surfaces of different workpieces having outer diameters (second to fourth sizes) larger than the workpiece W, respectively. It has a circular arc shape. Therefore, for example, when measuring a workpiece of the third size, the workpiece is placed on the support arm 15 with the divided pieces 141 and 142 inside the corresponding divided piece 143 removed. As shown in FIG. 2, the outer edges 141b to 143b of the divided pieces 141 to 144 have shapes corresponding to the inner edges of the adjacent divided pieces, respectively. It becomes easy to align the position of the.

  With the workpiece transport mechanism 5 having the above-described configuration, even if the workpiece has a relatively large weight, the temporarily placed workpiece can be accurately installed at the measurement position on the measurement table 2. In addition, by providing the guide panel 16 and appropriately determining the horizontal relative position between the workpiece W and the support arm 15, a plurality of workpieces having different sizes can be accurately placed at the measurement positions on the measurement table 2. It becomes possible to do.

  The shape and quantity of the divided pieces can be variously changed according to the size and shape of the workpiece to be measured. In the present embodiment, the entire area of the inner peripheral edge of the split piece is in contact with the outer peripheral surface of the workpiece. However, it is sufficient that at least the horizontal relative position between the workpiece W and the support arm 15 can be determined. For example, the structure which the some different site | part in the inner periphery of a division | segmentation piece contacts the outer peripheral surface of a workpiece | work may be sufficient.

  9 and 10 are a plan view and a side view of the main part showing the periphery of the sensor 3 in FIG. A sub guide bar 151 and a sub slider 152 are provided behind the guide bar 11 in the surface shape measuring apparatus 1. The sub guide bar 151 is disposed substantially parallel to the guide bar 11. The sub-slider 152 moves linearly in the left-right direction in synchronization with the slider 12. On the upper surface 152a of the sub-slider 152, a harness H including a communication cable for the sensor 3 and a linear motor wire for driving the slider 12 is fixed. The harness H is supported by the cable protection tube 153 and connected to a power source and a control device (not shown) installed on the back side of the surface shape measuring device 1.

In the workpiece transport mechanism 5 having the above-described configuration, the operator moves the lifting / lowering device 120 after the workpiece W placed on the temporary placement table 4 is positioned, and as shown in FIG. 15 is raised to a predetermined position (here, a position where the support arm 15 can be moved in the front-rear direction). Thereafter, a motor (not shown) is operated to rotate the screw shaft 127, thereby moving the moving table 126 in the direction of the measurement table 2. As a result, the support arm 15 moves onto the measurement table 2 as shown by a two-dot chain line in FIG. 2 and moves the lifting device 120 downward so that the workpiece W is set at the measurement position of the measurement table 2. Is done. In the case of a disk-shaped workpiece, the center position is set so as to coincide with the center (axial center) of the measurement table 2. Thereafter, the height adjustment by the height adjustment device 10 as described above is executed, and the measurement preparation is completed.

  In this case, since the workpiece W is positioned with respect to the support arm 15 in the temporary placement table 4, the workpiece W is moved to the measurement position of the measurement table 2 only by causing the workpiece conveyance mechanism 5 to perform a predetermined operation. There is an advantage that can be installed accurately.

  The surface shape measurement after the workpiece W is set at the measurement position of the measurement table 2 is performed in the same manner as the measurement method of a known surface shape apparatus. For example, in a state where the probe 3a is in contact with the surface of the stationary workpiece W, the sensor 3 is linearly moved in the diameter direction of the workpiece W by the slider 12, and the displacement amount (that is, the surface shape) of the probe 3a in a predetermined line on the workpiece surface. ) Is detected. By detecting such a displacement amount while rotating the measurement table 2 and appropriately changing the measurement site of the workpiece W, displacement amount data can be acquired over the entire surface of the workpiece W.

  Although the present invention has been described in detail based on specific embodiments, these embodiments are merely examples, and the present invention is not limited to these embodiments. For example, the surface shape measuring apparatus according to the present invention is suitable for measuring a workpiece having a relatively large weight, but can be used for measuring a workpiece having various shapes and sizes. Depending on the type of workpiece, measurement can be performed using a known non-contact type sensor instead of the above-described contact type sensor.

The perspective view of the surface shape measuring apparatus which concerns on embodiment Plan view of relevant parts of a surface shape measuring apparatus according to an embodiment The perspective view which shows the measurement table of FIG. Sectional drawing which shows the rotation support structure of the measurement table of FIG. Sectional view of the height adjustment device of FIG. 1 is a plan view of the height adjusting device of FIG. The perspective view of the raising / lowering support member in the height adjustment apparatus of FIG. FIG. 1 is a cross-sectional view of the main part of the workpiece transfer mechanism of FIG. FIG. 1 is a plan view of a principal part showing the periphery of a sensor of the surface shape measuring apparatus of FIG. FIG. 1 is a side view of the main part showing the sensor periphery of the surface shape measuring apparatus of FIG.

DESCRIPTION OF SYMBOLS 1 Surface shape measuring device 2 Measurement table 3 Sensor 4 Temporary placement table 5 Work conveyance mechanism 10 Height measuring device 11 Guide bar 12 Slider 15 Support arm 16 Guide panel 25 Free ball bearing 31 Shaft 32 Support base 33 Air pad 35 Leaf spring Unit 36 Leaf spring 50 Support hole 51 Shaft housing 53 Fixing member 54 Bearing 55 Bearing 56 Pulley bearing 57 Pulley 61 Oldham mechanism 62 Front / rear guide key 63 Upper slider 64 Left / right guide key 65 Lower slider 66 Center plate 81 Taper block 81a Inclined surface 82 Body 84 Screw shaft 86 Nut 87 Bearing unit 88 Coupling 93 Reducer 94 Operation knob 101 Main body (elevating body)
102 Spherical member 103 Roller 111 Side guide plate 112 Center guide plate 113 Fixing tool 117 Operation handle 120 Lifting device 123 Support block 125 Ball screw 126 Moving table 131 Front and rear slider 132 Base plate 133 Front and rear guide rail 134 Vertical guide rail 135 Vertical slider 141 to 144 Divided piece 151 Sub guide bar 152 Sub slider H Harness W Workpiece

Claims (3)

A table for supporting the workpiece,
The shaft is connected to the table in a state inserted in a through hole provided in the center of the table, and a shaft extending downward from the table ;
A support base for rotatably supporting the shaft ;
A cylindrical shaft housing that surrounds the shaft and extends upward from the support hole;
A pulley that is rotatably supported by the shaft housing, and that transmits a rotational driving force to the shaft ;
The support base has a support hole into which the shaft is inserted, and a bearing that receives a load in the radial direction of the shaft is provided in the support hole .
Wherein the table and the shaft, the surface shape measuring apparatus, characterized in that it is connected through an elastic member. An Oldham mechanism for connecting the pulley to the shaft;
The pulley is disposed between the upper surface of the support base and the lower surface of the table,
The Oldham mechanism, a surface shape measuring apparatus, characterized in that accommodated in the through hole. 3. The apparatus according to claim 1 , further comprising table support means provided on the support base and supporting the table in a floating state by supplying a fluid to the lower side of the table. The surface shape measuring apparatus according to 1 .

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