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JP5436866B2 - Lens forming method - Google Patents
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JP5436866B2 - Lens forming method - Google Patents

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JP5436866B2
JP5436866B2 JP2009000160A JP2009000160A JP5436866B2 JP 5436866 B2 JP5436866 B2 JP 5436866B2 JP 2009000160 A JP2009000160 A JP 2009000160A JP 2009000160 A JP2009000160 A JP 2009000160A JP 5436866 B2 JP5436866 B2 JP 5436866B2
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lens
pin
sheet
pedestal
liquid resin
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JP2010156913A (en
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治朗 府川
文雄 高村
直司 出村
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New Japan Radio Co Ltd
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Description

本発明はレンズ形成方法、特に金型を使用せずに、光半導体パッケージ(装置)等の所定面に搭載するためのレンズを形成するレンズ形成方法に関する。   The present invention relates to a lens forming method, and more particularly to a lens forming method for forming a lens for mounting on a predetermined surface of an optical semiconductor package (device) or the like without using a mold.

従来から、例えばリモコン等に使用される光半導体パッケージに、レンズが搭載されており、この光半導体パッケージでは、本体の樹脂封止と同時にレンズを形成する方法や、この樹脂封止とは別に金型で形成したレンズを光半導体パッケージの搭載面に貼り付ける方法が採用されていた。   Conventionally, a lens is mounted on, for example, an optical semiconductor package used for a remote controller or the like. In this optical semiconductor package, a method of forming a lens at the same time as the resin sealing of the main body, A method of sticking a lens formed of a mold to a mounting surface of an optical semiconductor package has been adopted.

また、金型を使用せずに、マイクロレンズを基体等の上に形成する方法として、下記の特許文献1,2の技術があり、これら特許文献1,2には、インクジェット法等により基体上に樹脂の液滴を吐出し、この液滴を硬化させてマイクロレンズを形成することが開示されている。   Further, as a method for forming a microlens on a substrate or the like without using a mold, there are the following Patent Documents 1 and 2, which are disclosed in Patent Documents 1 and 2 by an inkjet method or the like. It is disclosed that a microlens is formed by discharging a resin droplet and curing the droplet.

特開2006−30634号公報JP 2006-30634 A 特開2006−323146号公報JP 2006-323146 A

しかしながら、従来の金型を用いてレンズを形成する方法では、高精度のR形状を持つ金型が必要になることから、この金型が高価となり、しかも最近の光半導体パッケージ(装置)が小型化していることにより、金型によるレンズ形成が困難になっているという問題がある。   However, in the conventional method of forming a lens using a mold, a mold having a high-precision R shape is required. This mold is expensive, and the recent optical semiconductor package (device) is small. Therefore, there is a problem that it is difficult to form a lens using a mold.

一方、金型を使用しない方法の場合は、上記特許文献1,2で開示されるように、レンズ形成面に撥水性を持たせるための処理が必要となる。
即ち、図3には、従来(特許文献1)の撥液処理後の状態が示されており、図示されるように、基体11上においてマイクロレンズ形成領域12の周囲に、撥液性を得るための自己組織化膜13を形成し、このマイクロレンズ形成領域12に、樹脂14を滴下することで、この樹脂14の濡れ広がりが防止される。このような撥液処理は、プラズマ処理等でも行うことができる。
On the other hand, in the case of a method that does not use a mold, as disclosed in Patent Documents 1 and 2, a process for imparting water repellency to the lens forming surface is required.
That is, FIG. 3 shows a state after the conventional liquid repellent treatment (Patent Document 1). As shown in the figure, liquid repellency is obtained around the microlens formation region 12 on the substrate 11. A self-assembled film 13 is formed, and the resin 14 is dropped onto the microlens formation region 12 to prevent the resin 14 from spreading. Such liquid repellent treatment can also be performed by plasma treatment or the like.

しかしながら、このような撥水(撥液)性を得るための処理は、製造工程を複雑かつ多工程にするという不都合がある。また、レンズ形状に高精度が求められる場合は、選択的にフォトリソグラフィー又はマスキング等を用い、撥水箇所を限定して処理することが行われるが、この場合には、高価な設備を用いなければならないという問題がある。   However, the treatment for obtaining such water repellency (liquid repellency) has a disadvantage that the manufacturing process is complicated and multi-step. In addition, when high accuracy is required for the lens shape, it is possible to selectively treat the water-repellent part by using photolithography or masking, but in this case, expensive equipment must be used. There is a problem that must be.

本発明は上記問題点に鑑みてなされたものであり、その目的は、高価な金型を用いることなく、また撥水性処理のための複雑な工程や高価な設備を必要とすることなく、レンズを容易かつ安価に製造することができるレンズ形成方法を提供することにある。   The present invention has been made in view of the above problems, and its purpose is to use a lens without using an expensive mold, and without requiring a complicated process or expensive equipment for water-repellent treatment. It is an object of the present invention to provide a lens forming method that can be manufactured easily and inexpensively.

上記目的を達成するために、本発明に係るレンズ形成方法は、空排気により、上面と側面との間に角を持つピンに弾性のあるシートを吸着させ、上記シートをその下方から突き上げた状態とすることにより、このシート上に、外周縁に角を持った台座を形成し、この台座の上に液状樹脂を略半球状に塗布し、次いで、上記略半球状の液状樹脂を硬化することによりレンズを形成し、その後、上記ピンによる突き上げ状態を解除することを特徴とする。
請求項2の発明は、上面と側面との間に角を持つピンを弾性のあるシートへ向けて上昇させ、上記シートをその下方から突き上げた状態とすることにより、このシート上に、外周縁に角を持った台座を形成し、この台座の上に液状樹脂を略半球状に塗布し、次いで、上記略半球状の液状樹脂を硬化することによりレンズを形成し、その後、上記ピンによる突き上げ状態を解除することを特徴とする。
請求項3の発明は、上記ピンによる突き上げ状態を解除した後、上記シート上のレンズをピックアップ装置でピックアップし、接着剤を介して光半導体装置の搭載部に載置することを特徴とする。
To achieve the above object, a lens forming method according to the present invention, the vacuum evacuation, a sheet on the pin resilient with angular adsorbed between the upper and side surfaces, the push-up the sheet from below By forming a state, a pedestal having a corner on the outer peripheral edge is formed on the sheet, and the liquid resin is applied in a substantially hemispherical shape on the pedestal, and then the substantially hemispherical liquid resin is cured. Thus, the lens is formed, and then the push-up state by the pin is released.
According to the invention of claim 2, a pin having an angle between the upper surface and the side surface is raised toward an elastic sheet, and the sheet is pushed up from below, so that the outer peripheral edge is placed on the sheet. A pedestal with a corner is formed, and a liquid resin is coated on the pedestal in a substantially hemispherical shape, and then a lens is formed by curing the substantially hemispherical liquid resin, and then pushed up by the pin. The state is released.
The invention of claim 3 is characterized in that after releasing the push-up state by the pin, the lens on the sheet is picked up by a pickup device and placed on the mounting portion of the optical semiconductor device via an adhesive.

本発明の構成によれば、例えば上面を平面又は球状凹面とした円形にすることにより、円形上面の縁に角が形成されたピンで、弾性シートを突き上げ状態にすることで、シート上に凸状の円形台座が形成されることになり、この台座に液状樹脂が滴下されることで、液状樹脂が表面張力により球状に塗布される。次いで、この球状液樹脂に例えば紫外線を照射することにより、レンズが形成される。このような製造において、上記凸状の台座は、その角のある円形縁の存在によって撥水性処理と同等の効果を発揮することになり、液状樹脂の濡れ広がりを防止して、所望の外周円及び球形(曲率)を有するレンズを形成することが可能になる。   According to the configuration of the present invention, for example, by forming a circular shape with the upper surface being a flat surface or a spherical concave surface, the elastic sheet is pushed up with a pin having a corner formed on the edge of the circular upper surface, thereby protruding on the sheet. A circular pedestal is formed, and when the liquid resin is dropped onto the pedestal, the liquid resin is applied in a spherical shape by surface tension. Next, a lens is formed by irradiating the spherical liquid resin with, for example, ultraviolet rays. In such a production, the convex pedestal exhibits the same effect as the water-repellent treatment due to the presence of the rounded circular edges, and prevents the liquid resin from spreading out to a desired circumference. And a lens having a spherical shape (curvature) can be formed.

そして、形成されたレンズは、吸着コレット等のピックアップ装置でピックアップされ、光半導体パッケージ等の光学部材に接着剤を介して載置されることにより、光半導体パッケージ等に組み付けられる。   The formed lens is picked up by a pickup device such as a suction collet and mounted on an optical member such as an optical semiconductor package via an adhesive, thereby being assembled into the optical semiconductor package or the like.

本発明によれば、高価な金型を用いることなく、レンズを安価に製造でき、また撥水性処理のためのプラズマ処理等の複雑な工程や、フォトリソグラフィー又はマスキング等を実施するための高価な設備も不要となり、レンズを容易にかつ安価に製造することが可能となる。   According to the present invention, a lens can be manufactured at low cost without using an expensive mold, and a complicated process such as a plasma process for water repellency treatment, an expensive process for performing photolithography, masking, or the like. No equipment is required, and the lens can be manufactured easily and inexpensively.

本発明の実施例に係るレンズ形成方法の各工程を説明するための図である。It is a figure for demonstrating each process of the lens formation method which concerns on the Example of this invention. 実施例に使用される多ピン並設部材の2つの構成[図(A),(B)]を示す図である。It is a figure which shows two structure [FIG. (A), (B)] of the multi-pin juxtaposed member used for an Example. 従来のレンズ形成における撥水処理を説明するための図である。It is a figure for demonstrating the water-repellent process in the conventional lens formation.

図1には、本発明の実施例に係るレンズ形成方法の各工程が示され、図2には、実施例においてシートの突き上げ状態を得るための装置の構成が示されている。実施例では、図1(A)に示されるように、シリコーンゴム、塩化ビニル、テフロン(登録商標)からなり、厚さ50μm前後の弾性のあるシート(又はテープ)1と、図2に示されるように、突き上げ用(台座設定用)の複数のピン2を突設しながら並べて配置すると共に、ピン2の間の隙間3から真空排気ができるように構成された多ピン並設部材4(又は4b)とが設けられており、上記複数のピン2は、図2(A)のように円形(その他の形状でもよい)上面が平面(又は略平面)とされたもの、若しくは図2(B)のように上面が球状凹面とされたもの(ピン2b)が用いられる。このような平面又は球状凹面の上面によって、実施例のピン2,2bでは、円形上面と側面との間に角が付き、後述のように、シート1上の円形台座において撥水処理と同等の効果が得られることになる。   FIG. 1 shows the steps of a lens forming method according to an embodiment of the present invention, and FIG. 2 shows the configuration of an apparatus for obtaining a sheet push-up state in the embodiment. In the embodiment, as shown in FIG. 1A, an elastic sheet (or tape) 1 having a thickness of about 50 μm and made of silicone rubber, vinyl chloride, and Teflon (registered trademark) is shown in FIG. As described above, the plurality of pins 2 for pushing up (for setting the base) are arranged side by side while projecting, and the multi-pin juxtaposed member 4 configured to be evacuated from the gap 3 between the pins 2 (or 4b), and the plurality of pins 2 have a circular (or other shape) upper surface as shown in FIG. 2A, or a flat (or substantially flat) upper surface, or FIG. ) (The pin 2b) whose upper surface is a spherical concave surface is used. With such a flat or spherical concave upper surface, in the pins 2 and 2b of the embodiment, an angle is formed between the circular upper surface and the side surface. An effect will be obtained.

そして、実施例では、上記弾性のあるシート1と多ピン並設部材4を用いて、レンズの形成及び半導体パッケージへの搭載が行われており、この製造工程を図1により(1つのピンについて)説明する。   In the embodiment, the elastic sheet 1 and the multi-pin juxtaposed member 4 are used to form a lens and mount it on a semiconductor package. This manufacturing process is shown in FIG. )explain.

まず、図1(A)のように(突き上げ工程)、平らに広げられたシート1の下側にピン2を配置し、このピン2の側面側を真空排気すると、図1(B)のように、薄く弾性のあるシート1が吸引され、このシート1はピン2の平らな上面に密着しながら突き上げ状態となり、ピン2の上面にシート1を介挿した台座(凸形状頂上部)Fが形成される。この台座Fは、ピン2の上面で突き上げられることで、外周縁に角を持った円形台座Fとなる。   First, as shown in FIG. 1A (push-up process), when a pin 2 is arranged on the lower side of a flatly spread sheet 1 and the side surface side of the pin 2 is evacuated, as shown in FIG. Then, a thin and elastic sheet 1 is sucked, and this sheet 1 is pushed up while being in close contact with the flat upper surface of the pin 2, and a pedestal (convex top) F with the sheet 1 interposed on the upper surface of the pin 2 is formed. It is formed. This pedestal F becomes a circular pedestal F having corners on the outer peripheral edge by being pushed up on the upper surface of the pin 2.

次いで、図1(C)の樹脂塗布工程では、台座Fに、ディスペンサ等を用いて液状の紫外線(UV)硬化樹脂5の所定量が滴下、塗布される。この滴下、塗布は、ポッティング法、印刷法、ジェット法、インクジェット法等で行われる。そして、この液状樹脂5は、角を持った台座F内(外周円形縁内)に留まり、濡れ広がりが抑制された状態で、その表面張力によって略半球体を形成する。   1C, a predetermined amount of liquid ultraviolet (UV) curable resin 5 is dropped and applied to the base F using a dispenser or the like. The dropping and coating are performed by a potting method, a printing method, a jet method, an ink jet method, or the like. The liquid resin 5 remains in the cornered base F (inside the outer peripheral circular edge) and forms a substantially hemispherical body by its surface tension in a state where wetting spread is suppressed.

次の図1(D)のUV照射工程では、紫外線が照射されることにより、液状樹脂5が硬化しレンズ50が形成される。この後、図1(E)のように、真空排気を停止することにより突き上げ状態が解除され、シート1は平らな状態に戻る。   In the next UV irradiation process of FIG. 1D, the liquid resin 5 is cured and the lens 50 is formed by irradiation with ultraviolet rays. Thereafter, as shown in FIG. 1E, the pushing-up state is canceled by stopping the vacuum exhaust, and the sheet 1 returns to a flat state.

次いで、図1(F)〜(H)のレンズ搭載工程では、図1(F)のように、ピックアップ装置としての吸着コレット(筒状ロッド内の負圧制御で吸着するもの)6がレンズ50の上部に配置され、吸着コレット6による吸着を行うと同時に、シート1の下側からのピン7の突き上げを行うことによって、図1(G)のように、レンズ50がシート1からピックアップされて剥離される。その後、図1(H)のように、吸着コレット6によりレンズ50が移送され、このレンズ50は光半導体パッケージ8の搭載部に接着剤9を介して載置されることで、この光半導体パッケージ8に対するレンズ50の組立てが完了する。   Next, in the lens mounting process of FIGS. 1 (F) to 1 (H), as shown in FIG. 1 (F), the suction collet (which is sucked by negative pressure control in the cylindrical rod) 6 as the pickup device is attached to the lens 50. The lens 50 is picked up from the sheet 1 as shown in FIG. 1G by pushing up the pin 7 from the lower side of the sheet 1 at the same time as being sucked by the suction collet 6. It is peeled off. Thereafter, as shown in FIG. 1H, the lens 50 is transferred by the suction collet 6, and this lens 50 is placed on the mounting portion of the optical semiconductor package 8 via the adhesive 9. 8 completes the assembly of the lens 50.

図1では、ピン2の上面を平面としたが、図2(B)のように、上面を球状凹面(凹球面)としたピン2b(多ピン並設部材4b)を用いてもよく、これによれば、ピン2bの円形上面と側面との間の角を鋭角にし、台座Fに塗布された液状樹脂5の濡れ広がりの抑制効果を高くすることができる。   In FIG. 1, the upper surface of the pin 2 is a flat surface. However, as shown in FIG. 2B, a pin 2b (multi-pin juxtaposed member 4b) having an upper surface having a spherical concave surface (concave spherical surface) may be used. According to the above, the angle between the circular upper surface and the side surface of the pin 2b can be made an acute angle, and the effect of suppressing the wetting and spreading of the liquid resin 5 applied to the base F can be enhanced.

また、上記実施例では、真空排気によってシート1を突き上げ状態にしたが、個々のピンを上下動可能に支持し、このピンを上昇させてシート1を突き上げるような装置の構成としてもよい。   In the above-described embodiment, the sheet 1 is pushed up by evacuation. However, it may be configured such that each pin is supported so as to move up and down and the pin 1 is raised to push up the sheet 1.

本発明は、リモコン等に使用される光半導体パッケージの光学部だけでなく、撮像装置、検出装置等の各種装置に用いられる光学部に適用することができる。   The present invention can be applied not only to an optical part of an optical semiconductor package used for a remote controller or the like, but also to an optical part used for various devices such as an imaging device and a detection device.

1…シート、 2,2b,7…ピン、
4,4b…多ピン並設部材、
5…液状樹脂、 50…レンズ、
6…吸着コレット、 8…光半導体パッケージ、
9…接着剤、 F…台座。
1 ... sheet, 2,2b, 7 ... pin,
4, 4b ... multi-pin juxtaposed member,
5 ... Liquid resin, 50 ... Lens,
6 ... Adsorption collet, 8 ... Optical semiconductor package,
9: Adhesive, F: Pedestal.

Claims (3)

空排気により、上面と側面との間に角を持つピンに弾性のあるシートを吸着させ、上記シートをその下方から突き上げた状態とすることにより、このシート上に、外周縁に角を持った台座を形成し、
この台座の上に液状樹脂を略半球状に塗布し、
次いで、上記略半球状の液状樹脂を硬化することによりレンズを形成し、
その後、上記ピンによる突き上げ状態を解除するレンズ形成方法。
The vacuum exhaust is adsorbed an elastic sheet to a pin having a corner between the top surface and side surfaces, by a state of pushing up the seat from below, on the sheet, with the angular outer peripheral edge Forming a pedestal,
A liquid resin is applied in a substantially hemispherical shape on this pedestal,
Next, a lens is formed by curing the substantially hemispherical liquid resin,
Then, the lens formation method which cancels | releases the pushing-up state by the said pin.
上面と側面との間に角を持つピンを弾性のあるシートへ向けて上昇させ、上記シートをその下方から突き上げた状態とすることにより、このシート上に、外周縁に角を持った台座を形成し、
この台座の上に液状樹脂を略半球状に塗布し、
次いで、上記略半球状の液状樹脂を硬化することによりレンズを形成し、
その後、上記ピンによる突き上げ状態を解除するレンズ形成方法。
A pin with a corner between the upper surface and the side surface is raised toward the elastic seat, and the seat is pushed up from below, thereby forming a pedestal with a corner on the outer periphery on the seat. Forming,
A liquid resin is applied in a substantially hemispherical shape on this pedestal,
Next, a lens is formed by curing the substantially hemispherical liquid resin,
Then, the lens formation method which cancels | releases the pushing-up state by the said pin .
上記ピンによる突き上げ状態を解除した後、上記シート上のレンズをピックアップ装置でピックアップし、接着剤を介して光半導体装置の搭載部に載置することを特徴とする請求項1又は2記載のレンズ形成方法。3. The lens according to claim 1, wherein after the push-up state by the pin is released, the lens on the sheet is picked up by a pickup device and placed on the mounting portion of the optical semiconductor device via an adhesive. Forming method.
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