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JP5457762B2 - Circuit device and manufacturing method thereof - Google Patents
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JP5457762B2 - Circuit device and manufacturing method thereof - Google Patents

Circuit device and manufacturing method thereof Download PDF

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JP5457762B2
JP5457762B2 JP2009199925A JP2009199925A JP5457762B2 JP 5457762 B2 JP5457762 B2 JP 5457762B2 JP 2009199925 A JP2009199925 A JP 2009199925A JP 2009199925 A JP2009199925 A JP 2009199925A JP 5457762 B2 JP5457762 B2 JP 5457762B2
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resin
circuit board
circuit
package
cavity
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JP2011054623A (en
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英行 坂本
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Semiconductor Components Industries LLC
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings

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  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

本発明は、全面モールド型のパッケージの未充填領域を低減する回路装置及びその製造方法に関する。   The present invention relates to a circuit device for reducing an unfilled region of a full-mold package and a method for manufacturing the circuit device.

従来の回路装置及びその製造方法の一実施例を下記に説明する。図7(A)は、従来のパッケージの斜視図を示す。図7(B)は、図7(A)に示すパッケージのD−D線方向の断面図を示す。図8は、従来の樹脂モールド工程の断面図を示す。   An example of a conventional circuit device and a method for manufacturing the same will be described below. FIG. 7A shows a perspective view of a conventional package. FIG. 7B is a cross-sectional view of the package shown in FIG. 7A in the DD line direction. FIG. 8 shows a cross-sectional view of a conventional resin molding process.

図7(A)に示す如く、混成集積回路装置51の樹脂パッケージ52は、回路基板59(図7(B)参照)全面を被覆するフルパッケージ型として形成される。樹脂パッケージ52の長手方向の側面53、54からは複数のリード55が導出する。そして、樹脂パッケージ52の短手方向の側面56、57には、ネジ留め用のU字孔58が配置される。   As shown in FIG. 7A, the resin package 52 of the hybrid integrated circuit device 51 is formed as a full package type covering the entire surface of the circuit board 59 (see FIG. 7B). A plurality of leads 55 are led out from the side surfaces 53 and 54 in the longitudinal direction of the resin package 52. Then, U-shaped holes 58 for screwing are arranged on the side surfaces 56 and 57 in the short direction of the resin package 52.

図7(B)に示す如く、回路基板59上面は絶縁層60により被覆され、絶縁層60上面には導電パターン61が配置される。導電パターン61上には半導体素子62等の回路素子が固着され、導電パターン61とリード55とは金属細線63により電気的に接続される。そして、回路基板59、半導体素子62や金属細線63等は、樹脂パッケージ52内に完全に封止される。   As shown in FIG. 7B, the upper surface of the circuit board 59 is covered with an insulating layer 60, and a conductive pattern 61 is disposed on the upper surface of the insulating layer 60. A circuit element such as a semiconductor element 62 is fixed on the conductive pattern 61, and the conductive pattern 61 and the lead 55 are electrically connected by a thin metal wire 63. Then, the circuit board 59, the semiconductor element 62, the fine metal wire 63, and the like are completely sealed in the resin package 52.

図8に示す如く、樹脂封止金型の上金型64と下金型65によりリード55を挟持することで、回路基板59は、樹脂封止金型のキャビティ66内に収納される。このとき、回路基板59の裏面側においても下金型65との間に樹脂が充填される隙間が形成される。そして、図7(A)に示すように、樹脂パッケージ52の長手方向の側面53、54には複数のリード55が配置されるため、例えば、樹脂パッケージ52の短手方向の側面56、57側から、キャビティ66内へと樹脂が注入される(例えば、特許文献1参照。)。   As shown in FIG. 8, the circuit board 59 is accommodated in the cavity 66 of the resin-sealed mold by sandwiching the leads 55 by the upper mold 64 and the lower mold 65 of the resin-sealed mold. At this time, a gap filled with resin is formed between the back surface of the circuit board 59 and the lower mold 65. 7A, since a plurality of leads 55 are arranged on the side surfaces 53 and 54 in the longitudinal direction of the resin package 52, for example, the side surfaces 56 and 57 side in the short direction of the resin package 52 Then, resin is injected into the cavity 66 (see, for example, Patent Document 1).

特開2007−273698号公報(第7−9頁、第1、5図)JP 2007-273698 A (page 7-9, FIGS. 1, 5)

従来の樹脂パッケージ52の長手方向の側面53、54には、複数のリード55が一定間隔で配置され、樹脂封止金型のゲート部(図示せず)が配置される領域が存在しない。そのため、樹脂パッケージ52の短手方向の側面56、57に樹脂封止金型のゲート部が配置されることとなる。その結果、キャビティ66内に注入される樹脂は、ゲート部から回路基板59の長手方向に沿ってキャビティ66内に充填されることとなり、注入された樹脂の流れ方向を制御し難くなる。具体的には、樹脂が、ゲート部からその対抗面側に向かい、キャビティ66の中央領域から充填されることで、キャビティ66内の空気がキャビティ66端部の一定領域(エアベント形成領域)へと追い込まれることとなる。しかしながら、樹脂が、回路基板59の長手方向に沿って充填されることで、キャビティ66の奥行きが広くなり、樹脂の流れ方向が制御し難くなる。そして、キャビティ66内の空気が、キャビティ66端部の一定領域(エアベント形成領域)へと追い込まれ難くなる。その結果、キャビティ66内の空気が、キャビティ66内に残存し、樹脂パッケージ52に未充填領域(ボイド)が発生するという問題がある。   On the side surfaces 53, 54 in the longitudinal direction of the conventional resin package 52, a plurality of leads 55 are arranged at regular intervals, and there is no region where a gate portion (not shown) of a resin-sealed mold is arranged. Therefore, the gate portion of the resin sealing mold is arranged on the side surfaces 56 and 57 in the short direction of the resin package 52. As a result, the resin injected into the cavity 66 is filled into the cavity 66 along the longitudinal direction of the circuit board 59 from the gate portion, making it difficult to control the flow direction of the injected resin. Specifically, the resin is filled from the central region of the cavity 66 toward the facing surface side from the gate portion, so that the air in the cavity 66 becomes a certain region (air vent formation region) at the end of the cavity 66. It will be driven. However, since the resin is filled along the longitudinal direction of the circuit board 59, the depth of the cavity 66 is increased, and the flow direction of the resin is difficult to control. And it becomes difficult for the air in the cavity 66 to be driven into a certain region (air vent formation region) at the end of the cavity 66. As a result, there is a problem that air in the cavity 66 remains in the cavity 66 and an unfilled region (void) is generated in the resin package 52.

特に、回路基板59の裏面側では、半導体素子62等から発生し、回路基板59に熱伝導した熱を樹脂パッケージ52外部へと効率的に放出するため、その樹脂厚みを薄くする必要がある。一方、回路基板59の表面側は、半導体素子62や金属細線63等を完全に被覆するため、その樹脂厚みは厚くなり、樹脂の流路幅も広くなる。この構造により、キャビティ66内に充填された樹脂は、回路基板59の表面側の方が流れ易く、回路基板59の裏面側には、その表面側からも樹脂が回り込む。その結果、前述したように、回路基板59の裏面側では、色々な方向から樹脂が流れ込み、キャビティ66内の空気が残存し、樹脂パッケージ52に未充填領域が発生し易くなる。そして、樹脂パッケージ52の裏面側に未充填領域が発生することで、混成集積回路装置51の耐圧特性が悪化する等の問題が発生する。   In particular, on the back surface side of the circuit board 59, the heat generated from the semiconductor element 62 or the like and conducted to the circuit board 59 is efficiently released to the outside of the resin package 52, so that the resin thickness needs to be reduced. On the other hand, the surface side of the circuit board 59 completely covers the semiconductor element 62, the fine metal wires 63, etc., so that the resin thickness is increased and the resin flow path width is increased. With this structure, the resin filled in the cavity 66 flows more easily on the front surface side of the circuit board 59, and the resin wraps around the back surface side of the circuit board 59 also from the front surface side. As a result, as described above, on the back surface side of the circuit board 59, the resin flows from various directions, the air in the cavity 66 remains, and an unfilled region is easily generated in the resin package 52. Then, since the unfilled region is generated on the back surface side of the resin package 52, there arises a problem that the breakdown voltage characteristic of the hybrid integrated circuit device 51 is deteriorated.

本発明の回路装置は、導電パターン及び前記導電パターンに固着された回路素子を有する混成集積回路が上面に組み込まれた矩形形状の回路基板と、前記導電パターン上に固着され、一対の前記回路基板の長手方向に沿ってそれぞれ配置された複数のリードと、前記回路基板を被覆する樹脂パッケージとを有し、少なくとも前記リードが導出する前記樹脂パッケージの一方の側面には、前記リード間に樹脂注入ゲート部が配置される隙間を有し、前記隙間は前記一方の側面の中央領域に配置され、前記樹脂パッケージは、前記回路基板を完全に被覆するパッケージであり、前記樹脂パッケージの表面側には、前記樹脂注入ゲート部側に前記一方の側面に沿って溝が形成されることを特徴とする。
The circuit device of the present invention includes a rectangular circuit board in which a hybrid integrated circuit having a conductive pattern and a circuit element fixed to the conductive pattern is incorporated on an upper surface, and a pair of the circuit boards fixed on the conductive pattern. A plurality of leads respectively disposed along the longitudinal direction of the resin package, and a resin package covering the circuit board, and at least one side surface of the resin package led out by the leads is injected with resin between the leads There is a gap in which the gate portion is arranged, and the gap is arranged in a central region of the one side surface, and the resin package is a package that completely covers the circuit board, and on the surface side of the resin package characterized by Rukoto groove is formed along the one side surface to the resin injection gate side.

本発明の回路装置の製造方法は、導電パターン及び前記導電パターンに固着された回路素子を有する混成集積回路が上面に組み込まれた矩形形状の回路基板を樹脂封止金型のキャビティ内に収納し、前記回路基板を樹脂モールドすることで樹脂パッケージを形成する回路装置の製造方法において、一対の前記回路基板の長手方向に沿ってそれぞれ前記導電パターン上にリードを固着し、前記リードを挟持し、前記樹脂封止金型のキャビティ内に前記回路基板を収納した後、前記回路基板の長手方向の側面側の中央領域であり、且つ前記リード間の隙間に配置された前記樹脂封止金型のゲート部から、前記回路基板の短手方向に沿って前記キャビティ内に樹脂を注入し、前記ゲート部の前記キャビティへの入り口は、前記回路基板の裏面と前記樹脂封止金型との隙間と同じ高さに配置されることを特徴とする。
In the method of manufacturing a circuit device according to the present invention, a rectangular circuit board in which a hybrid integrated circuit having a conductive pattern and a circuit element fixed to the conductive pattern is incorporated on the upper surface is housed in a cavity of a resin-sealed mold. In the method of manufacturing a circuit device for forming a resin package by resin molding the circuit board, the leads are fixed on the conductive patterns along the longitudinal direction of the pair of circuit boards, and the leads are sandwiched. After the circuit board is housed in the cavity of the resin-sealed mold, the resin-sealed mold of the resin-sealed mold disposed in the center region on the side surface in the longitudinal direction of the circuit board and in the gap between the leads wherein the gate portion, the resin is injected into the cavity along the lateral direction of the circuit board, the entrance to the cavity of the gate portion, a back surface of the circuit board Characterized in that it is arranged at the same height as the gap between Aburafu metal mold.

本発明では、樹脂パッケージの長手方向側面の中央領域に樹脂注入用のゲート部を有することで、樹脂の流れ方向の奥行きが狭まり、樹脂パッケージの未充填領域の発生を抑止できる。   In the present invention, since the resin injection gate portion is provided in the central region of the side surface in the longitudinal direction of the resin package, the depth in the resin flow direction is narrowed, and generation of an unfilled region of the resin package can be suppressed.

また、本発明では、樹脂パッケージの表面側にその長手方向に沿って溝が配置されることで、回路基板の表面側の樹脂の流れ等が制御し易くなる。   Further, in the present invention, since the grooves are disposed on the surface side of the resin package along the longitudinal direction, the flow of the resin on the surface side of the circuit board can be easily controlled.

また、本発明では、回路素子が回路基板上の一定領域に配置されることで、金属細線倒れが防止される。   Further, in the present invention, the circuit element is arranged in a certain region on the circuit board, thereby preventing the metal thin wire from falling.

また、本発明では、回路基板と下金型との隙間に合わせて樹脂注入用のゲート部を配置することで、回路基板の裏面側の樹脂の充填を優先的に行い、未充填領域の発生を抑止できる。   Also, in the present invention, the resin filling gate portion is arranged in accordance with the gap between the circuit board and the lower mold, so that the resin on the back side of the circuit board is preferentially filled, and an unfilled region is generated. Can be suppressed.

また、本発明では、上金型の突出部により回路基板の表面側の樹脂の流速を調整することで、樹脂の注入速度を速くし、回路基板の裏面側の樹脂の充填をスムーズに行える。   In the present invention, by adjusting the flow rate of the resin on the front surface side of the circuit board by the protruding portion of the upper mold, the resin injection speed can be increased, and the resin can be smoothly filled on the back surface side of the circuit board.

本発明の実施の形態における回路装置を説明するための斜視図である。It is a perspective view for demonstrating the circuit apparatus in embodiment of this invention. 本発明の実施の形態における回路装置を説明するための平面図である。It is a top view for demonstrating the circuit apparatus in embodiment of this invention. 本発明の実施の形態における回路装置を説明するための(A)断面図、(B)断面図、(C)断面図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a cross-sectional view, FIG. 2B is a cross-sectional view, and FIG. 本発明の実施の形態における回路装置の製造方法を説明するための(A)平面図、(B)断面図である。It is (A) top view and (B) sectional drawing for demonstrating the manufacturing method of the circuit device in embodiment of this invention. 本発明の実施の形態における回路装置の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of the circuit device in embodiment of this invention. 本発明の実施の形態における回路装置の製造方法を説明するための(A)断面図、(B)断面図、(C)断面図である。It is (A) sectional drawing, (B) sectional drawing, (C) sectional drawing for demonstrating the manufacturing method of the circuit device in embodiment of this invention. 従来の実施の形態における回路装置を説明するための(A)斜視図、(B)断面図である。It is (A) perspective view for demonstrating the circuit apparatus in the conventional embodiment, (B) It is sectional drawing. 従来の実施の形態における回路装置の製造方法を説明するための断面図である。It is sectional drawing for demonstrating the manufacturing method of the circuit apparatus in conventional embodiment.

以下に、図1〜図3を参照し、本発明の一実施例である回路装置について説明する。図1は、回路装置を説明する斜視図である。図2は、回路装置を説明する平面図である。図3(A)〜図3(C)は、回路装置を説明する断面図である。   A circuit device according to an embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a perspective view illustrating a circuit device. FIG. 2 is a plan view illustrating the circuit device. 3A to 3C are cross-sectional views illustrating a circuit device.

先ず、図1に示す如く、混成集積回路装置1の樹脂パッケージ2は、回路基板15(図2参照)全面を被覆するフルモールド型のパッケージである。樹脂パッケージ2の長手方向の側面3、4からは複数のリード5が導出する。一方、樹脂パッケージ2の短手方向の側面6、7には、ネジ留め用のU字孔8が配置される。そして、樹脂パッケージ2の側面4側では、リード5が側面4の両側に離間して配置され、その中央領域には樹脂注入用のゲート部が配置される。   First, as shown in FIG. 1, the resin package 2 of the hybrid integrated circuit device 1 is a full mold type package that covers the entire surface of the circuit board 15 (see FIG. 2). A plurality of leads 5 are led out from the side surfaces 3 and 4 in the longitudinal direction of the resin package 2. On the other hand, U-shaped holes 8 for screwing are disposed on the side surfaces 6 and 7 in the short direction of the resin package 2. Then, on the side surface 4 side of the resin package 2, the leads 5 are spaced apart from both sides of the side surface 4, and a gate portion for resin injection is disposed in the central region.

樹脂パッケージ2の表面9には、その長手方向に沿って溝10が配置される。詳細は後述するが、溝10は、樹脂モールド工程時に樹脂の流れや速度を制御するために設けられ、溝10よりも側面4側は幅W1有し、幅W1を調整することで、樹脂の流れや速度が調整される。一方、溝10よりも側面3側は幅W2有し、その樹脂パッケージ2の表面9には、位置認識用マーク11〜14が配置される。例えば、位置認識マーク11は鏡面となり、位置認識マーク12〜14は梨地面となる。   A groove 10 is disposed on the surface 9 of the resin package 2 along the longitudinal direction thereof. Although details will be described later, the groove 10 is provided to control the flow and speed of the resin during the resin molding process, and the side surface 4 side of the groove 10 has a width W1, and by adjusting the width W1, Flow and speed are adjusted. On the other hand, the side surface 3 side of the groove 10 has a width W2, and the position recognition marks 11 to 14 are arranged on the surface 9 of the resin package 2. For example, the position recognition mark 11 is a mirror surface, and the position recognition marks 12 to 14 are pear ground.

次に、図2に示す如く、矩形の回路基板15上にリード5が実装される状態を示す。図示していないが、回路基板15上は導電パターン16が配置され、導電パターン16上には半導体素子やコンデンサ等の回路素子が実装され、混成集積回路が形成される。前述したように、回路基板15の一点鎖線17上に溝10(図1参照)が配置され、幅W1の領域に位置する回路基板15には、導電パターン16のみが配置される。一方、幅W2の領域に位置する回路基板15には、導電パターン16上に回路素子が実装される。つまり、幅W1の領域では、樹脂モールド時の樹脂流入速度が速く、金属細線倒れ等を防止するため、回路素子が配置されない領域として用いられる。   Next, as shown in FIG. 2, a state in which the leads 5 are mounted on the rectangular circuit board 15 is shown. Although not shown, a conductive pattern 16 is disposed on the circuit board 15, and circuit elements such as semiconductor elements and capacitors are mounted on the conductive pattern 16 to form a hybrid integrated circuit. As described above, the groove 10 (see FIG. 1) is disposed on the alternate long and short dash line 17 of the circuit board 15, and only the conductive pattern 16 is disposed on the circuit board 15 located in the region of the width W1. On the other hand, a circuit element is mounted on the conductive pattern 16 in the circuit board 15 located in the region of the width W2. That is, in the region of the width W1, the resin inflow speed at the time of resin molding is high, and it is used as a region where no circuit element is arranged in order to prevent the metal thin wire from falling down.

次に、図3(A)は、図1のA−A線方向の断面図を示す。図示したように、回路基板15は、アルミニウム(Al)や銅(Cu)等の金属を主材料とする金属基板から成り、例えば、1.5mm程度の厚みを有する。例えば、回路基板15としてAl基板を用いる場合には、その表裏面には酸化膜が形成され、アルマイト処理される。   Next, FIG. 3A is a cross-sectional view taken along the line AA in FIG. As shown in the figure, the circuit board 15 is made of a metal substrate whose main material is a metal such as aluminum (Al) or copper (Cu), and has a thickness of about 1.5 mm, for example. For example, when an Al substrate is used as the circuit board 15, an oxide film is formed on the front and back surfaces and anodized.

絶縁層18は、回路基板15の上面全域を被覆し、その膜厚は50μm程度と成る。絶縁層18は、Al等のフィラーが、例えば、60〜80重量%程度高充填されたエポキシ樹脂から成る。そして、絶縁層18は、フィラーが混入されることで熱抵抗が低減され、回路素子から発生する熱の回路基板15への放熱性が向上される。 The insulating layer 18 covers the entire upper surface of the circuit board 15 and has a thickness of about 50 μm. The insulating layer 18 is made of an epoxy resin that is highly filled with a filler such as Al 2 O 3 by about 60 to 80% by weight, for example. The insulating layer 18 is reduced in thermal resistance by mixing the filler, and heat dissipation from the circuit element 15 to the circuit board 15 is improved.

導電パターン16は、Cu等の金属から成り、絶縁層18上面にパターン配置される。導電パターン16の膜厚及びその幅は、例えば、50〜100μm程度である。そして、導電パターン16上には、半導体素子19やチップコンデンサー20等の回路素子が実装される。尚、その他の回路素子としては、例えば、チップ抵抗、インダクタンス、発振器等の受動素子や能動素子が採用される。   The conductive pattern 16 is made of a metal such as Cu, and is arranged in a pattern on the upper surface of the insulating layer 18. The film thickness and width of the conductive pattern 16 are, for example, about 50 to 100 μm. Circuit elements such as a semiconductor element 19 and a chip capacitor 20 are mounted on the conductive pattern 16. As other circuit elements, for example, passive elements such as chip resistors, inductances, oscillators, and active elements are employed.

樹脂パッケージ2は、回路基板15全面を被覆するように形成される。そして、樹脂パッケージ2が、トランスファーモールドにより形成される場合には、熱硬化性樹脂が用いされ、インジェクションモールドにより形成される場合には、熱可塑性樹脂が用いられる。そして、樹脂パッケージ2を構成する樹脂内には、熱伝導率の向上させるための酸化シリコン等のフィラーが混入される。   The resin package 2 is formed so as to cover the entire surface of the circuit board 15. When the resin package 2 is formed by transfer molding, a thermosetting resin is used. When the resin package 2 is formed by injection molding, a thermoplastic resin is used. In the resin constituting the resin package 2, a filler such as silicon oxide for improving the thermal conductivity is mixed.

回路基板15の裏面側の樹脂パッケージ2の厚みT1は、例えば、0.5mm程度であり、この厚みT1を薄くすることで、回路基板15から樹脂パッケージ2外部への放熱性が向上される。前述したように、回路基板15表面側の樹脂パッケージ2には溝10が配置され、溝10の配置領域での樹脂パッケージ2の厚みT2は、例えば、0.5〜1.0mm程度であり、その他の領域での樹脂パッケージ2の厚みT3は、例えば、3.5mm程度である。また、この断面では、樹脂パッケージ2の側面4には、丸印21にて示すように、樹脂注入用のゲート部が配置される。一方、樹脂パッケージ2の側面3からはリード5が導出する。   The thickness T1 of the resin package 2 on the back surface side of the circuit board 15 is, for example, about 0.5 mm. By reducing the thickness T1, heat dissipation from the circuit board 15 to the outside of the resin package 2 is improved. As described above, the groove 10 is arranged in the resin package 2 on the surface side of the circuit board 15, and the thickness T2 of the resin package 2 in the arrangement region of the groove 10 is, for example, about 0.5 to 1.0 mm. The thickness T3 of the resin package 2 in other regions is, for example, about 3.5 mm. In this cross section, a resin injection gate is disposed on the side surface 4 of the resin package 2 as indicated by a circle 21. On the other hand, the lead 5 is led out from the side surface 3 of the resin package 2.

次に、図3(B)は、図1のB−B線方向の断面図を示す。尚、図3(A)に示す構成部材と同一の構成部材には同一の符番を付し、その説明を参酌する。図示する断面では、樹脂パッケージ2の側面4からもリード5が導出し、図2(A)の丸印21にて示す樹脂注入用のゲート部が配置されていない。   Next, FIG. 3B is a cross-sectional view taken along the line BB in FIG. In addition, the same number is attached | subjected to the same structural member as the structural member shown to FIG. 3 (A), and the description is referred. In the cross section shown in the drawing, the lead 5 is also led out from the side surface 4 of the resin package 2, and the resin injection gate portion indicated by the circle 21 in FIG. 2A is not disposed.

次に、図3(C)は、図1のC−C線方向の断面図を示す。尚、図3(A)に示す構成部材と同一の構成部材には同一の符番を付し、その説明を参酌する。図示する断面では、回路基板15上に導電パターン16等が配置されない領域であり、その上面の樹脂パッケージ2の厚みはT2と成る。前述したように、樹脂パッケージ2の側面6、7側にはネジ留め用のU字孔8が配置される。そして、回路基板1の端部近傍には、樹脂モールドの際に回路基板15の固定するガイドピンによる孔22が形成される。   Next, FIG. 3C is a cross-sectional view taken along the line CC of FIG. In addition, the same number is attached | subjected to the same structural member as the structural member shown to FIG. 3 (A), and the description is referred. In the cross section shown in the drawing, the conductive pattern 16 or the like is not disposed on the circuit board 15, and the thickness of the resin package 2 on the upper surface thereof is T2. As described above, the U-shaped holes 8 for screwing are disposed on the side surfaces 6 and 7 of the resin package 2. In the vicinity of the end of the circuit board 1, a hole 22 is formed by a guide pin that is fixed to the circuit board 15 during resin molding.

図示したように、樹脂パッケージ2の両側面6、7側には、回路基板15の表面側に厚みはT2の領域が、回路基板15の短手方向に沿って配置される。詳細は樹脂モールド工程にて説明するが、樹脂パッケージ2の厚みT2の領域では、樹脂モールド時の樹脂の速度を遅くできるので、回路基板15の表面側から裏面側への樹脂の回り込みを遅らせることができる。その結果、回路基板15裏面側の樹脂パッケージ2に未充填領域(ボイド)が発生することを防止でき、混成集積回路装置1の耐圧特性の劣化やパッケージ不良等を防止できる。つまり、樹脂パッケージ2の両側面6、7側に、回路基板15上の厚みT3よりも薄い領域を配置することで、前述した効果を得ることができる。尚、U字孔8の配置領域では、機械的強度が優先され、樹脂パッケージ2の厚みも厚くなる。   As shown in the drawing, on the both side surfaces 6 and 7 side of the resin package 2, a region having a thickness T <b> 2 on the surface side of the circuit board 15 is arranged along the short direction of the circuit board 15. Although details will be described in the resin molding process, in the region of the thickness T2 of the resin package 2, since the speed of the resin at the time of resin molding can be slowed, the wraparound of the resin from the front surface side to the back surface side of the circuit board 15 is delayed. Can do. As a result, it is possible to prevent an unfilled region (void) from being generated in the resin package 2 on the back surface side of the circuit board 15, and it is possible to prevent the breakdown voltage characteristics of the hybrid integrated circuit device 1 from being deteriorated or the package is defective. That is, the above-described effects can be obtained by disposing a region thinner than the thickness T3 on the circuit board 15 on both side surfaces 6 and 7 of the resin package 2. In addition, in the arrangement | positioning area | region of the U-shaped hole 8, mechanical strength has priority and the thickness of the resin package 2 also becomes thick.

次に、図4〜図6を参照し、本発明の一実施例である回路装置の製造方法について説明する。図4(A)は、リードフレームを説明する平面図である。図4(B)は、実装工程を説明する断面図である。図5は、樹脂モールド工程を説明する図である。図6(A)〜図6(C)は、樹脂モールド工程を説明する断面図である。尚、尚、本実施の形態では、図1〜図3に示す構造の製造方法を説明するため、同一の構成部材には同一の符番を付し、また、適宜、図1〜図3を参照する。   Next, with reference to FIGS. 4-6, the manufacturing method of the circuit apparatus which is one Example of this invention is demonstrated. FIG. 4A is a plan view for explaining a lead frame. FIG. 4B is a cross-sectional view illustrating the mounting process. FIG. 5 is a diagram illustrating a resin molding process. 6A to 6C are cross-sectional views illustrating a resin molding process. In this embodiment, in order to describe the manufacturing method of the structure shown in FIGS. 1 to 3, the same constituent members are given the same reference numerals, and FIGS. refer.

先ず、図4(A)に示す如く、例えば、銅を主材料とするリードフレーム31を準備する。リードフレーム31は、紙面X軸方向に延在し、リードフレーム31には点線で示す複数のユニット32が配置される。個々のユニット32では、紙面Y軸方向にそれぞれ離間して複数のリード5が配置され、その中央領域に回路基板15の配置領域がある。そして、複数のリード5は、紙面X軸方向に延在するタイバー33により互いに連結され、リードフレーム31に固定される。また、リードフレーム31の紙面X軸方向には、その上下端部領域にインデックス孔34が設けられ、各工程での位置決めに用いられる。   First, as shown in FIG. 4A, for example, a lead frame 31 mainly made of copper is prepared. The lead frame 31 extends in the X-axis direction on the paper surface, and a plurality of units 32 indicated by dotted lines are arranged on the lead frame 31. In each unit 32, a plurality of leads 5 are arranged apart from each other in the Y-axis direction on the paper surface, and the arrangement area of the circuit board 15 is in the central area. The plurality of leads 5 are connected to each other by a tie bar 33 extending in the X-axis direction on the paper surface and fixed to the lead frame 31. In addition, index holes 34 are provided in the upper and lower end regions in the X-axis direction of the lead frame 31 on the paper surface, and are used for positioning in each process.

次に、図4(B)に示す如く、回路基板15を準備し、回路基板15上に絶縁層18、導電パターン16を形成する。尚、予め、絶縁層18、導電パターン16が形成された回路基板15を準備する場合でも良い。次に、ダイボンド工程にて、導電パターン16上に半導体素子19等の回路素子を導電性接着材により固着する。次に、ワイヤーボンディング工程にて、半導体素子19と導電パターン16とを金属細線35により接続する。その後、リード5を導電パターン16上に導電性接着材により固着し、ユニット32毎に回路基板15をリードフレーム31に固着する。   Next, as shown in FIG. 4B, a circuit board 15 is prepared, and an insulating layer 18 and a conductive pattern 16 are formed on the circuit board 15. Note that the circuit board 15 on which the insulating layer 18 and the conductive pattern 16 are formed in advance may be prepared. Next, in a die bonding process, a circuit element such as the semiconductor element 19 is fixed on the conductive pattern 16 with a conductive adhesive. Next, the semiconductor element 19 and the conductive pattern 16 are connected by the thin metal wire 35 in the wire bonding process. Thereafter, the lead 5 is fixed onto the conductive pattern 16 with a conductive adhesive, and the circuit board 15 is fixed to the lead frame 31 for each unit 32.

次に、図5及び図6を用いて、樹脂モールド工程を説明する。   Next, the resin molding process will be described with reference to FIGS.

先ず、図5では、点線で示すように、樹脂封止金型36内に回路基板15を配置した状態を示す。樹脂封止金型36では、リードフレーム31の各ユニット32毎にリード5を挟持することで、回路基板15をキャビティ内に設置する。そして、紙面下側のゲート部37からキャビティ内へ樹脂を注入し、キャビティ内を樹脂にて充填し、樹脂パッケージ2を形成する。   First, FIG. 5 shows a state in which the circuit board 15 is disposed in the resin-sealed mold 36 as indicated by a dotted line. In the resin-sealed mold 36, the circuit board 15 is installed in the cavity by sandwiching the leads 5 for each unit 32 of the lead frame 31. Then, resin is injected into the cavity from the gate portion 37 on the lower side of the drawing, and the cavity is filled with resin to form the resin package 2.

このとき、先ず、ゲート部37は、回路基板15の長手方向の側面中央領域に配置されることで、キャビティ内への樹脂の注入を制御し易くなる。具体的には、樹脂は回路基板15の短手方向に沿って注入されることで、樹脂の注入方向の奥行きが狭くなる。そして、一点鎖線で示すように、樹脂は、回路基板15の表裏面において、キャビティ内の中央領域から外周領域へと充填される。その結果、キャビティ内の空気は、エアベント部38が設けられたキャビティ端部へと追いやられる。   At this time, first, the gate portion 37 is arranged in the central region of the side surface in the longitudinal direction of the circuit board 15, thereby making it easy to control the injection of the resin into the cavity. Specifically, the resin is injected along the short direction of the circuit board 15, thereby reducing the depth in the resin injection direction. And as shown with a dashed-dotted line, resin is filled into the outer peripheral area | region from the center area | region in a cavity in the front and back of the circuit board 15. FIG. As a result, the air in the cavity is repelled to the end of the cavity where the air vent 38 is provided.

次に、樹脂封止金型36には、紙面上側の両側にはエアベント部38が配置され、キャビティ内の空気や樹脂をキャビティ外部へと排出する。前述したように、ゲート部37の位置により、キャビティ内の空気は確実にキャビティ端部へと追いやられる。そして、エアベント部38は、キャビティ内にて最後に樹脂が充填される領域に配置されることで、効率的にキャビティ内の空気が排出され、樹脂パッケージ2の未充填領域の発生を防止できる。   Next, in the resin-sealed mold 36, air vent portions 38 are arranged on both sides on the upper side of the paper, and the air and resin in the cavity are discharged to the outside of the cavity. As described above, the air in the cavity is surely driven to the end of the cavity depending on the position of the gate portion 37. And the air vent part 38 is arrange | positioned in the area | region where resin is finally filled in a cavity, The air in a cavity is discharged | emitted efficiently and generation | occurrence | production of the unfilled area | region of the resin package 2 can be prevented.

次に、詳細は図6(A)を用いて後述するが、樹脂封止金型36の上金型には、回路基板15の長手方向に沿って突出部39が配置される。突出部39は、ゲート部37近傍に配置され、回路基板15の表面側の樹脂の流れや速度を制御し、回路基板15の表面側から裏面側への樹脂の回り込みや金属細線倒れ等を防止する。   Next, although details will be described later with reference to FIG. 6A, a protrusion 39 is disposed on the upper mold of the resin-sealed mold 36 along the longitudinal direction of the circuit board 15. The protruding portion 39 is disposed in the vicinity of the gate portion 37, controls the flow and speed of the resin on the front surface side of the circuit board 15, and prevents the resin from wrapping around from the front surface side to the back surface side of the circuit board 15 and falling of the fine metal wires. To do.

図6(A)では、図1のA−A線方向の断面に対応し、樹脂封止金型36のゲート部37が配置される断面を示す。リード5が、上金型40と下金型41との当接面にて挟持され、回路基板15は樹脂封止金型36のキャビティ42内に収納される。丸印43で示すように、キャビティ42に連続するゲート部37の入り口は、下金型41表面から、例えば、0.55mm程度開口し、回路基板15と下金型41との隙間とほぼ同じ高さに配置される。そして、その隙間は、例えば、0.5mm程度と狭い領域であるが、ゲート部37から注入された樹脂は、回路基板15に阻まれることなく、スムーズに回路基板15の裏面側へと流れ込む。   6A shows a cross section in which the gate portion 37 of the resin-sealed mold 36 is disposed, corresponding to the cross section in the direction of the line AA in FIG. The lead 5 is sandwiched between the contact surfaces of the upper mold 40 and the lower mold 41, and the circuit board 15 is accommodated in the cavity 42 of the resin-sealed mold 36. As indicated by a circle 43, the entrance of the gate portion 37 continuing to the cavity 42 opens from the lower mold 41 surface, for example, by about 0.55 mm, and is substantially the same as the gap between the circuit board 15 and the lower mold 41. Placed at height. The gap is a narrow region of about 0.5 mm, for example, but the resin injected from the gate portion 37 smoothly flows into the back side of the circuit board 15 without being blocked by the circuit board 15.

一方、ゲート部37から注入された樹脂は、回路基板15の側面と上金型40との隙間を流れ、回路基板15の表面側にも流れ込む。回路基板15の表面側の隙間は、例えば、3.5mm程度あり、回路基板15の裏面側と比較しても広く、樹脂が流れ易い領域となる。前述したように、上金型40に突出部39を配置することで、回路基板15の表面側の樹脂の流れを制御する。例えば、回路基板15の表面と突出部39先端との隙間を0.5〜1.0mm程度とすることで、突出部39より先へ流れる樹脂の速度を遅らせることができる。   On the other hand, the resin injected from the gate portion 37 flows through the gap between the side surface of the circuit board 15 and the upper mold 40 and also flows into the surface side of the circuit board 15. The gap on the front surface side of the circuit board 15 is, for example, about 3.5 mm, which is wider than the back surface side of the circuit board 15 and is an area where the resin flows easily. As described above, the resin flow on the surface side of the circuit board 15 is controlled by disposing the protrusion 39 on the upper mold 40. For example, by setting the gap between the surface of the circuit board 15 and the tip of the protruding portion 39 to about 0.5 to 1.0 mm, the speed of the resin flowing beyond the protruding portion 39 can be delayed.

つまり、回路基板15の裏面側では、ほぼ全領域が0.5mm程度の狭い隙間のため、樹脂の充填速度が遅くなるが、ゲート部37の位置や突出部39により回路基板15の表面側の樹脂の充填速度を遅らせることで、優先的に回路基板15の裏面側から樹脂が充填され易くなる。特に、ゲート部37から離れた領域において、回路基板15の表面側から裏面側への樹脂の回り込みを無くすことで、回路基板15裏面側での樹脂パッケージ2への未充填領域の発生を抑止できる。   That is, on the back surface side of the circuit board 15, the resin filling speed is slow because the entire area is a narrow gap of about 0.5 mm, but the position on the front surface side of the circuit board 15 depends on the position of the gate portion 37 and the protrusion 39. By slowing down the resin filling speed, it becomes easy to preferentially fill the resin from the back side of the circuit board 15. In particular, in a region away from the gate portion 37, it is possible to suppress the occurrence of an unfilled region in the resin package 2 on the back surface side of the circuit board 15 by eliminating the wraparound of the resin from the front surface side to the back surface side of the circuit substrate 15. .

更に、回路基板15の表面側では、突出部39よりゲート部37側の領域44には回路素子が配置されず、金属細線も配置されない。そのため、ゲート部37からの樹脂の注入速度を速くした場合でも金属細線倒れが問題とならない。前述したように、突出部39より先の領域45への樹脂の速度が抑制されるため、領域45にて金属細線倒れが発生しない範囲で、樹脂の注入速度を速くすることができる。その結果、回路基板15の裏面側では、樹脂の注入速度が速く、更に、回路基板15の表面側よりも樹脂が優先的に充填され易くなる。   Further, on the surface side of the circuit board 15, no circuit element is arranged in the region 44 closer to the gate portion 37 than the protruding portion 39, and no fine metal wire is arranged. Therefore, even when the injection rate of the resin from the gate portion 37 is increased, the metal thin wire collapse does not become a problem. As described above, since the speed of the resin to the area 45 beyond the protruding portion 39 is suppressed, the resin injection speed can be increased within a range where the metal thin wire collapse does not occur in the area 45. As a result, on the back surface side of the circuit board 15, the resin injection speed is high, and the resin is more preferentially filled than the front surface side of the circuit board 15.

次に、図6(B)では、図1のB−B線方向の断面に対応し、樹脂封止金型36のゲート部37が配置されない断面を示す。この断面においても、前述したように、上金型40の突出部39により回路基板15の表面側の樹脂の流れや速度を制御することで、優先的に回路基板15の裏面側が樹脂で充填され易くなる。   Next, FIG. 6B shows a cross section in which the gate portion 37 of the resin-sealed mold 36 is not disposed, corresponding to the cross section in the BB line direction of FIG. Also in this cross section, as described above, by controlling the flow and speed of the resin on the front surface side of the circuit board 15 by the protrusion 39 of the upper mold 40, the back surface side of the circuit board 15 is preferentially filled with the resin. It becomes easy.

次に、図6(C)では、エアベント部38が配置される断面を示す。この断面では、回路基板15は、上金型40に設けられた位置ピン46によりキャビティ42内にて適正な位置を維持している。前述したように、樹脂は回路基板15の裏面側から優先的に充填され、回路基板15は上金型40側へと傾き易いが、位置ピン46によりその傾きが防止される。また、回路基板15の短手方向に沿って、回路基板15と上金型40との隙間を小さくすることで、前述したように、回路基板15の表面側から裏面側への樹脂の回り込みを防止できる。   Next, FIG. 6C shows a cross section in which the air vent portion 38 is disposed. In this cross section, the circuit board 15 maintains an appropriate position in the cavity 42 by the position pins 46 provided in the upper mold 40. As described above, the resin is preferentially filled from the back surface side of the circuit board 15, and the circuit board 15 easily tilts toward the upper mold 40, but the tilt is prevented by the position pins 46. Further, by reducing the gap between the circuit board 15 and the upper mold 40 along the short direction of the circuit board 15, as described above, the resin wraps around from the front surface side to the back surface side of the circuit board 15. Can be prevented.

また、キャビティ42端部へと追い込まれた空気は、樹脂とともにエアベント部38へと流れ込むことで、樹脂パッケージ2への未充填領域の発生が抑止される。丸印47にて示すように、キャビティ42とエアベント部38間の通路を広くし、樹脂も積極的にエアベント部38へと流すことで、樹脂パッケージ2端部での未充填領域の発生も抑止できる。尚、上金型40にはエアベント部38から空気のみを逃がす通路48を設ける場合でも良い。   In addition, the air driven into the end of the cavity 42 flows into the air vent portion 38 together with the resin, thereby preventing the unfilled region in the resin package 2 from being generated. As indicated by a circle 47, the passage between the cavity 42 and the air vent portion 38 is widened, and the resin is also allowed to flow into the air vent portion 38, thereby preventing the occurrence of an unfilled region at the end of the resin package 2. it can. The upper mold 40 may be provided with a passage 48 through which only air escapes from the air vent portion 38.

最後に、樹脂封止型36から離型したリードフレーム31からユニット32毎に樹脂パッケージ2を分離し、図1(A)に示す混成集積回路装置1が完成する。   Finally, the resin package 2 is separated for each unit 32 from the lead frame 31 released from the resin sealing mold 36, and the hybrid integrated circuit device 1 shown in FIG. 1A is completed.

1 混成集積回路装置
2 樹脂パッケージ
10 溝
15 回路基板
31 リードフレーム
37 ゲート部
38 エアベント部
39 突出部
DESCRIPTION OF SYMBOLS 1 Hybrid integrated circuit device 2 Resin package 10 Groove 15 Circuit board 31 Lead frame 37 Gate part 38 Air vent part 39 Protrusion part

Claims (4)

導電パターン及び前記導電パターンに固着された回路素子を有する混成集積回路が上面に組み込まれた矩形形状の回路基板と、
前記導電パターン上に固着され、一対の前記回路基板の長手方向に沿ってそれぞれ配置された複数のリードと、
前記回路基板を被覆する樹脂パッケージとを有し、
少なくとも前記リードが導出する前記樹脂パッケージの一方の側面には、前記リード間に樹脂注入ゲート部が配置される隙間を有し、前記隙間は前記一方の側面の中央領域に配置され、
前記樹脂パッケージは、前記回路基板を完全に被覆するパッケージであり、前記樹脂パッケージの表面側には、前記樹脂注入ゲート部側に前記一方の側面に沿って溝が形成されることを特徴とする回路装置。
A rectangular circuit board in which a hybrid integrated circuit having a conductive pattern and a circuit element fixed to the conductive pattern is incorporated on the upper surface;
A plurality of leads fixed on the conductive pattern and respectively disposed along the longitudinal direction of the pair of circuit boards;
A resin package covering the circuit board;
At least one side surface of the resin package from which the lead is led out has a gap where a resin injection gate portion is arranged between the leads, and the gap is arranged in a central region of the one side surface,
The resin package is a package that fully covers the circuit board, wherein the surface side of the resin package, characterized by Rukoto groove is formed along the one side surface to the resin injection gate side Circuit device.
前記回路素子は、前記溝から前記リードが導出する他方の側面の間の前記回路基板上に配置されることを特徴とする請求項1に記載の回路装置。   The circuit device according to claim 1, wherein the circuit element is disposed on the circuit board between the other side surface where the lead is led out from the groove. 導電パターン及び前記導電パターンに固着された回路素子を有する混成集積回路が上面に組み込まれた矩形形状の回路基板を樹脂封止金型のキャビティ内に収納し、前記回路基板を樹脂モールドすることで樹脂パッケージを形成する回路装置の製造方法において、
一対の前記回路基板の長手方向に沿ってそれぞれ前記導電パターン上にリードを固着し、前記リードを挟持し、前記樹脂封止金型のキャビティ内に前記回路基板を収納した後、前記回路基板の長手方向の側面側の中央領域であり、且つ前記リード間の隙間に配置された前記樹脂封止金型のゲート部から、前記回路基板の短手方向に沿って前記キャビティ内に樹脂を注入し、
前記ゲート部の前記キャビティへの入り口は、前記回路基板の裏面と前記樹脂封止金型との隙間と同じ高さに配置されることを特徴とする回路装置の製造方法。
A rectangular circuit board in which a hybrid integrated circuit having a conductive pattern and a circuit element fixed to the conductive pattern is incorporated on the upper surface is accommodated in a cavity of a resin-sealed mold, and the circuit board is resin-molded. In a method for manufacturing a circuit device for forming a resin package,
A lead is fixed on each of the conductive patterns along the longitudinal direction of the pair of circuit boards, the leads are sandwiched, and the circuit boards are stored in the cavities of the resin-sealed molds. Resin is injected into the cavity along the short direction of the circuit board from the gate portion of the resin-sealed mold, which is a central region on the side surface in the longitudinal direction and disposed in the gap between the leads. ,
The circuit device manufacturing method , wherein an entrance of the gate portion into the cavity is arranged at the same height as a gap between a back surface of the circuit board and the resin-sealed mold .
前記回路基板の表面側の前記樹脂封止金型には、前記回路基板の長手方向に沿って突出部が配置され、前記回路基板表面側へと流れた樹脂は、前記突出部によりその流速が遅くなることを特徴とする請求項3に記載の回路装置の製造方法。

The resin-sealed mold on the surface side of the circuit board is provided with a protruding portion along the longitudinal direction of the circuit board, and the flow rate of the resin flowing to the circuit board surface side is increased by the protruding portion. 4. The method of manufacturing a circuit device according to claim 3, wherein the circuit device is slowed down.

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