JP5459748B2 - Guide roller device - Google Patents

Description

  The present invention relates to a guide roller device, and more particularly to a guide roller device that guides from both sides of a transfer object so that the transfer object is normally transferred along the transfer direction.

  When manufacturing a display substrate such as a flat display panel, various processes such as vapor deposition, cleaning, drying, etching, and exposure are performed to form a pattern on the substrate. Most of these processes are performed in a process chamber for performing the corresponding process. However, the substrate is transferred to enter each process chamber by the substrate transfer device, or the process is performed in the corresponding process chamber. Upon completion, it is transferred for removal from the process chamber.

  Currently, the substrate transfer method applied in the substrate transfer apparatus includes a horizontal transfer method for supporting and transferring a substrate in a horizontal state, a vertical transfer method for supporting and transferring a substrate in a vertical state, and an inclined substrate. There is an inclined transfer method that supports and transfers in a state.

  When the substrate is normally transferred in the process of transferring the substrate, the substrate is transferred while moving straight along the transfer direction. However, there may be a case where the substrate cannot go straight along the transfer direction due to factors such as imbalance in the rotational force of the substrate transfer device and poor flatness of the substrate transfer device. Thus, in order to prepare for the case where the substrate cannot move straight along the transfer direction, guide roller devices that guide the straight transfer of the substrate are installed on both sides of the substrate so that the substrate is transferred normally.

  FIG. 1 is a view showing an example of a conventional guide roller device.

  Referring to FIG. 1, in a conventional guide roller device, a plurality of guide rollers 20 are arranged to be spaced apart from each other along a transfer direction A1, and each guide roller 20 can freely rotate without power. Is bound to. When the transfer object 10 is bent along the transfer direction A1 and slightly bent and collides with the guide roller 20, the traveling direction of the transfer object 10 changes to the opposite direction while the guide roller 20 rotates, and the transfer object 10 is configured so that it can be normally transferred again along the transfer direction A1.

  However, as shown in FIG. 1B, when the transfer object 10 is excessively bent with respect to the transfer direction A1 and collides with the guide roller 20, the guide roller 20 does not rotate any more, and the transfer object. There arises a problem that 10 is caught by the guide roller 20 and stopped. In order to solve such a problem, the transfer of the transfer object 10 has been normally restored by a method in which an operator manually adjusts the guide roller 20.

  In this way, when the transfer object is caught by the guide roller and is not transferred along the transfer direction any more, the process equipment must be stopped, so that the production efficiency of the product is lowered, and it is impossible to transfer the transfer object. Since an external force is applied, there is a problem that the object to be transferred can be damaged.

  Accordingly, an object of the present invention is to further include a roller that can move in a direction approaching the transfer object in addition to a roller that guides the normal transfer of the transfer object in order to solve such a conventional problem. Accordingly, it is an object of the present invention to provide a guide roller device that can prevent a problem that even if the object to be transferred is excessively bent with respect to the transfer direction, the transfer object is caught by the roller and cannot be transferred along the transfer direction.

  In order to achieve the above-described object, the guide roller device of the present invention separates a transfer unit that transfers a transfer object along the transfer direction and a side part of the transfer object along the transfer direction. Arranged between the plurality of first rollers for guiding the transfer object to be transferred along the transfer direction and the first roller adjacent to the side of the transfer object. Between the first roller and the second roller disposed behind the second roller with reference to the transfer direction among the adjacent first rollers. A belt to be hung, a second roller moving unit for reciprocating the second roller in a direction approaching the transfer object or a direction moving away from the transfer object, the first roller is rotated, and the first roller is rotated. The low And a first roller rotation driving unit that rotates a belt wound between the second roller and the second roller, and the first roller rotation in a state where the object to be transferred is caught by the belt and stopped A torque sensor for defining the torque of the drive unit as a reference torque and sensing the torque of the first roller rotation drive unit; and the second roller when the torque sensed by the torque sensor is greater than or equal to the reference torque And a controller for controlling the second roller moving unit so as to move the second roller again in a direction approaching the transfer object after moving the object in a direction away from the transfer object. It is characterized by.

  Preferably, the guide roller device according to the present invention further includes an entry sensor that senses that the transfer object has entered, and the second sensor after detecting that the transfer object has entered by the entry sensor. The second roller moves in a direction approaching the transfer object by the roller moving unit.

  In the guide roller device according to the present invention, preferably, the second object along a direction intersecting the transfer direction is used to absorb an impact when the transfer object collides with the second roller or the belt. A spring member installed on the second roller so as to exert an elastic force in a direction to push the roller toward the object to be transferred.

  According to the guide roller device of the present invention, even when the transfer object is excessively bent with respect to the transfer direction, it is possible to prevent the problem that the transfer object stops due to being caught by the roller.

  In addition, according to the guide roller device of the present invention, the object to be transferred that collided with the belt in the course of bending is normally returned in the transfer direction, and the object to be transferred that has been stopped by being caught by the belt is easily returned in the transfer direction. be able to.

It is the figure which showed an example of the conventional guide roller apparatus. It is the figure which showed the guide roller apparatus which concerns on one Example of this invention. It is the figure which showed the 1st roller rotated by the 1st roller rotation drive part of the guide roller apparatus of FIG. 2, a 2nd roller, and a belt. It is a figure explaining operation | movement of the 2nd roller of the guide roller apparatus of FIG. 2 when a transfer target object is not transferred along a transfer direction. It is the figure which showed the spring member of the guide roller apparatus of FIG.

  Hereinafter, embodiments of the guide roller device according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 2 is a view showing a guide roller device according to an embodiment of the present invention, and FIG. 3 is a diagram showing a first roller and a second roller rotated by a first roller rotation driving unit of the guide roller device of FIG. FIG. 4 is a diagram illustrating a roller and a belt, and FIG. 4 is a diagram illustrating the operation of the second roller of the guide roller device of FIG. 2 when the object to be transferred is not transferred along the transfer direction, and FIG. It is the figure which showed the spring member of 2 guide roller apparatuses.

  Referring to FIGS. 2 to 5, the guide roller device 100 according to the present embodiment guides from both sides of the transfer object so that the transfer object is normally transferred along the transfer direction. 110, a plurality of first rollers 120, a second roller 130, a belt 140, a second roller moving unit (not shown), a first roller rotation driving unit (not shown), a control unit (not shown). 1), an ingress sensor 160, and a spring member 170.

  The transfer unit 110 supports the transfer object 10 at the lower part and transfers the transfer object 10 along the transfer direction A1. The transfer unit 110 may include a ball screw and a linear motion guide unit arranged along the transfer direction A1, and a motor that supplies a rotational driving force that rotates the ball screw. The transfer unit 110 can transfer the transfer object 10 along the transfer direction A1 according to the rotation direction of the motor or along the direction opposite to the transfer direction A1 as necessary.

  In the present specification, the object to be transferred 10 means the substrate itself to be transferred without the substrate tray or the substrate accommodated in the substrate tray.

  The plurality of first rollers 120 guide the transfer object 10 to be transferred along the transfer direction A1, and are separated along the transfer direction A1 at the side of the transfer object 10. Placed in. The first roller 120 is preferably formed of a material that does not damage the transfer target object 10 and does not generate static electricity in the transfer target object 10. For example, the first roller 120 may be formed of a material such as PEEK (poly ether ether ketone). it can.

  The 1st roller 120 is installed so that it can rotate centering on the rotating shaft which penetrates a center part to an up-down direction.

  The second roller 130 is disposed between adjacent first rollers 120 on the side of the transfer object 10. The second roller 130 is also preferably formed of a material that does not damage the transfer object 10 and does not generate static electricity in the transfer object 10. For example, the second roller 130 may be formed of a material such as PEEK (poly ether ether ketone). it can. The 2nd roller 130 is also installed so that it can rotate centering on the rotating shaft which penetrates a center part to an up-down direction.

  The second rollers 130 may all be installed between the adjacent first rollers 120 along the transfer direction A1, and may be installed between the adjacent first rollers 120 in some areas, In some areas, it may be installed intermittently as in the case where it is not installed between the adjacent first rollers 120.

  The belt 140 is wound between the first roller 120 and the second roller 130, and can rotate with the first roller 120 and the second roller 130. As shown in FIG. 2, the belt 140 is wound around the first roller 120 disposed behind the second roller 130 with respect to the transfer direction A <b> 1 among the adjacent first rollers 120.

  The belt 140 is also preferably formed of a material that does not damage the transfer object 10 and does not generate static electricity in the transfer object 10.

  The second roller moving unit (not shown) moves the second roller 130 in the direction B1 approaching the transfer object or the direction B2 moving away from the transfer object along the direction intersecting the transfer direction A1 of the transfer object. Move back and forth.

  In a state where the second roller 130 has moved in the direction B1 approaching the transfer object, an imaginary straight line connecting the rotation axis of the first roller 120 and the rotation axis of the second roller 130 is relative to the transfer direction A1. An imaginary straight line that connects the rotation axis of the first roller 120 and the rotation axis of the second roller 130 in a state where the second roller 130 moves in the direction B2 away from the object to be transferred. Are arranged substantially parallel to the transport direction A1.

  The second roller moving unit can be realized by a pneumatic cylinder, a structure in which a ball screw and a rotary motor are combined, a linear drive unit such as a linear motor, and the configuration of such a linear drive unit is related to the technical field. Therefore, a detailed description thereof will be omitted.

  The second roller moving unit can be configured to move each second roller 130 individually, or can be configured to move a plurality of second rollers 130 at a time.

  The first roller rotation driving unit (not shown) rotates the first roller 120 and rotates the belt 140 wound between the first roller 120 and the second roller 130. The first roller rotation driving unit includes a motor that supplies a rotation driving force for rotating the first roller 120, and a power transmission unit that transmits the rotation driving force of the motor to the first roller 120. Can do. Since such a configuration can be easily implemented by a normal engineer in the technical field, a detailed description thereof will be omitted.

  The first roller rotation driving unit can be configured to rotate each first roller 120 individually, or can be configured to rotate a plurality of first rollers 120 simultaneously.

  The control unit (not shown) is in a state where the transfer object 10 is caught in the belt 140 and stopped even if the transfer object 10 is not transferred in the transfer direction A1 even if the first roller 120 is rotated. The second roller moving unit is controlled so that the transfer object 10 is normally transferred.

  A torque sensor (not shown) for sensing the torque of the first roller rotation drive unit is installed in the first roller rotation drive unit. In the state where the transfer object 10 does not collide with the belt 140, there is no element that obstructs the rotation of the belt 140, and therefore the belt 140 can be rotated by the rated torque of the first roller rotation drive unit. However, as shown in FIG. 4A, when the object to be transferred 10 collides with the belt 140 and is caught by the belt 140 and stopped, the rotation of the belt 140 is obstructed. The torque of the first roller rotation driving unit required for the increase is increased.

  At this time, a torque exceeding the rated torque of the first roller rotation drive unit in a state where the transfer object 10 is caught by the belt 140 and stopped is defined as a reference torque.

  When the torque detected by the torque sensor is equal to or higher than the reference torque defined above in a state where the object to be transferred 10 is caught by the belt 140 and stopped, the control unit, as shown in FIG. After moving the second roller 130 in the direction B2 away from the transfer object, as shown in FIG. 4C, the second roller 130 is moved again in the direction B1 approaching the transfer object. 2 roller moving parts are controlled.

  Referring to FIG. 4 (c), the second roller 130 pushes out the corner portion of the transfer object 10 while moving in the direction B1 approaching the transfer object, so that the bent angle of the transfer object 10 is compensated to some extent. However, the transfer object 10 can be returned to the normal trajectory and transferred along the transfer direction A1.

  The ingress sensor 160 senses that the transfer object 10 has entered.

  After sensing that the transfer object 10 has entered using the entry sensor 160, the control unit controls the second roller moving unit so that the second roller 130 moves in the direction B1 approaching the transfer object. .

  A carry-out sensor (not shown) can be installed at the end opposite to the end where the entry sensor 160 is installed in the transfer unit 110. After sensing that the transfer object 10 is carried out by the carry-out sensor, the control unit may control the second roller moving unit so that the second roller 130 moves in the direction B2 away from the transfer object. it can.

  The spring member 170 is installed on the second roller 130 in order to absorb an impact when the transfer target 10 collides with the second roller 130 or the belt 140.

  The spring member 170 is installed so as to apply an elastic force in a direction A1 that pushes the second roller 130 toward the transfer target object 10 along a direction intersecting the transfer direction A1. When the transfer object 10 collides with the second roller 130 or the belt 140, the elastic force of the spring member 170 acts in the direction B1 that pushes the second roller 130 toward the transfer object 10, and such an elastic force. While the bent angle of the transfer object 10 is compensated by this, the transfer object 10 can be returned again in the transfer direction A1.

  According to the guide roller device according to the present embodiment configured as described above, in addition to the first roller for guiding the normal transfer of the transfer object, the second roller that can move in the direction approaching the transfer object. Furthermore, even when the transfer object is excessively bent with respect to the transfer direction, the problem that the transfer object stops due to being caught by the roller can be prevented.

  In addition, according to the guide roller device according to the present embodiment configured as described above, the belt is bent while being advanced by rotating the belt wound between the first roller and the second roller. The object to be transferred that collided with can be returned to the normal direction in the transfer direction.

  Further, according to the guide roller device according to the present embodiment configured as described above, when the object to be transferred is caught by the belt and stopped, the second roller is moved backward and then moved forward again to be caught by the belt. The object to be transferred that has been stopped can be easily returned in the direction of transfer.

  Moreover, according to the guide roller device according to the present embodiment configured as described above, the transfer that collides with the belt by including a spring member that applies an elastic force in a direction in which the second roller is pushed toward the transfer object side. The object can be easily returned in the transfer direction.

  The scope of right of the present invention is not limited to the above-described embodiments and modifications, and can be embodied in various forms of embodiments within the scope of the appended claims. The scope of the claims of the present invention is within the scope of the claims of the present invention without departing from the gist of the present invention claimed in the claims, and to various extents that can be modified by anyone having ordinary knowledge in the technical field to which the invention belongs. Is considered.

100: Guide roller device, 110: Transfer section, 120: First roller, 130: Second roller, 140: Belt

Claims (3)

A transfer unit configured to transfer a transfer object along a transfer direction; and a side part of the transfer object arranged to be separated along the transfer direction so that the transfer object is transferred along the transfer direction. A plurality of first rollers for guiding, a second roller disposed between adjacent first rollers on the side of the transfer object, and the transfer among the adjacent first rollers A belt wound between the first roller and the second roller disposed behind the second roller with respect to the direction, and a direction in which the second roller approaches the transfer object or A second roller moving unit that reciprocates in a direction away from the object to be transferred, the first roller is rotated, and a belt wound between the first roller and the second roller is rotated. Make Wherein the first and roller driving portion,
The torque of the first roller rotation drive unit in a state where the transfer object is caught by the belt and stopped is defined as a reference torque,
A torque sensor for detecting the torque of the first roller rotation driving unit; and when the torque detected by the torque sensor is equal to or greater than the reference torque, the second roller is moved in a direction away from the object to be transferred. And a control unit that controls the second roller moving unit so as to move the second roller again in a direction approaching the object to be transferred. An ingress sensor that senses that the transfer object has entered;
The second roller is moved in a direction approaching the transfer object by the second roller moving unit after detecting that the transfer object has entered by the entry sensor. The guide roller device according to 1. In order to absorb the impact when the transfer object collides with the second roller or the belt, the second roller is pushed in the direction of the transfer object along the direction intersecting the transfer direction. The guide roller device according to claim 1, further comprising: a spring member installed on the second roller so as to apply an elastic force.