JP5476840B2 - Spray-type coating unit, spray-type coating apparatus, and spray-type coating method - Google Patents

Description

  The present invention relates to a spray-type coating unit, a spray-type coating apparatus, and a spray-type coating method that apply a coating liquid in a spray form.

In the manufacturing process of electronic parts such as semiconductors, there are many processes of applying resin or liquid.
For example, a step of applying a resin so that a resin is poured between flip-chip chips, a step of applying an adhesive for bonding the substrate to the substrate, or for protecting electronic components and improving durability There is a process of applying a resin.
The resin used in such a production process is not a low viscosity like water, but is a high viscosity resin that has a high viscosity and easily draws yarn.

As a coating apparatus used in the production process, a needle type coating apparatus that continuously discharges a coating liquid from a nozzle (needle) and a spray type coating apparatus that discharges a coating liquid from a nozzle in a spraying manner are known.
However, with the miniaturization of electronic components, the needle application device has problems that the application position is restricted due to interference between the nozzle and the electronic component, and that the amount of application cannot be managed with high accuracy due to resin adhering to the nozzle tip. ing.
On the other hand, since the spray-type coating apparatus can eject the coating liquid ejected from the nozzle in the form of fine droplets and land on the coating position, the coating amount and the coating position can be managed with high accuracy. This is possible, and with the miniaturization of electronic components, the demand for spray coating apparatuses is increasing.

FIG. 9 is an explanatory diagram showing a configuration of a general spray-type coating apparatus.
As shown in this figure, the general spray-type coating device pressurizes the resin at a constant pressure and supplies the resin into the nozzle pipe, while the pressure in the nozzle pipe is based on the vertical movement of the piston. Is repeatedly changed (positive pressure → 0 → positive pressure → 0...) To discharge the resin from the nozzle in an injection form.

However, in such a spray-type coating device, since the tip of the piston is brought into contact with the nozzle every time, there is a problem that the inside of the nozzle is worn and the coating amount changes with time. Such a problem can be avoided by periodically replacing the nozzle, but the running cost increases.
Further, in the above-described spray type coating apparatus, since an air type valve is used as a driving source of the piston, it is difficult to operate at a high speed of 250 Hz or more, and it was possible to fly by forming fine droplets. However, the problem of productivity that point coating and line coating take time occurs.

Therefore, it is proposed to improve the coating speed of the spray type coating apparatus by applying the high speed ink jetting technique used in an ink jet printer or the like.
A print head such as an ink jet printer includes a piezoelectric element such as a piezo element capable of operating at high speed, and ejects ink from a nozzle by pressure fluctuation caused by driving the piezoelectric element, so that ink can be ejected at high speed (for example, And Patent Documents 1 to 5).
Therefore, it is considered that the resin can be injected at high speed by replacing the drive source of the piston of the spray coating apparatus shown in FIG. 9 with a piezoelectric element.

JP 2002-086758 A JP 2006-076660 A JP 2008-155537 A Japanese Patent Laid-Open No. 01-082964 Japanese Patent Laid-Open No. 02-158348

However, when the ink jet technology of an ink jet printer is applied to a coating device such as a resin, depending on the characteristics of the coating liquid (viscosity, stringiness, etc.), the coating liquid sprayed from the nozzle may be naturally discharged from the coating liquid in the nozzle. May not be separated, and the thread may be pulled.
In such a case, since the coating liquid sprayed from the nozzle flies in a state where the yarn is pulled, it cannot be applied within a predetermined application area having a minute area (for example, landed outside the predetermined application area). Or a part of the thread that was cut off in the middle (for example, the coating solution on the coating surface side) comes out of the predetermined coating region.

Further, depending on the state of the yarn, the coating liquid in the nozzle is brought into the sprayed coating liquid or the sprayed coating liquid decreases, so that a predetermined amount of coating liquid cannot be applied. There was a problem.
Furthermore, as described above, in the manufacturing process of electronic parts and the like, it is desired to improve the coating quality with the recent miniaturization of electronic parts. That is, there is a demand for a technique for applying a small amount of coating liquid in a coating area having a minute area, a technique for controlling the coating amount with high accuracy, and the like.

Further, when a part of the yarn cut off in the middle (for example, the coating liquid on the nozzle side) adheres to the nozzle, the application state becomes unstable due to the nozzle injection hole being blocked by the coating liquid. In order to avoid this problem, it is necessary to clean the coating liquid adhering to the nozzle by an automatic cleaning mechanism or an operator. At this time, since the spray type coating apparatus is stopped, there is a problem that the production efficiency is lowered.
In addition, as described above, when the nozzle injection hole is blocked with the coating liquid, there is a problem in that stable continuous coating cannot be performed and productivity is reduced.
Furthermore, even when the yarn is naturally cut, if the time from the injection until the yarn breaks is long, it is necessary to lengthen the cycle until the next injection, and the productivity cannot be improved. There was a problem.

  Although it is considered possible to cut the threading portion of the coating liquid by irradiating the threading portion of the coating liquid with energy such as light or heat to reduce the viscosity of the coating liquid, such a thread In order to achieve cutting, it is necessary to add a separate irradiation device that emits energy such as light and heat, which not only significantly increases the cost, but also increases the size of the nozzle part due to the irradiation device. There is a problem that interference easily occurs.

  The object of the present invention is to enable high-speed spraying of the coating liquid, which is the above-mentioned problem, and to prevent a change in the coating amount over time due to wear of the piston, etc., and to cope with a highly viscous coating liquid. An object is to provide a spray coating unit, a spray coating apparatus, and a spray coating method.

In order to achieve the above object, a spray-type coating unit of the present invention includes a discharge tank having a nozzle, a coating liquid filling channel for filling the discharging tank with a coating solution, and the coating solution filling channel. A filling piezoelectric element that opens and closes, a discharge piezoelectric element that varies the pressure in the discharge tank, and a piezoelectric element drive control unit that can independently drive and control the filling piezoelectric element and the discharge piezoelectric element. The piezoelectric element drive control unit operates the filling piezoelectric element to the open side to fill the discharge tank with the coating liquid, and closes the filling piezoelectric element. In addition, by operating the discharge piezoelectric element to the pressure increase side, the discharge control means for discharging the coating liquid in the discharge tank from the nozzle in an ejection state, and the coating liquid was discharged from the nozzle rear Thread trimming control means for cutting the thread drawing portion of the discharged coating liquid by returning the ejection piezoelectric element to the initial side while keeping the filling piezoelectric element closed, thereby making the inside of the ejection tank negative pressure Between the time when the piezoelectric element drive control unit starts returning the ejection piezoelectric element to the initial side and the time when the ejection piezoelectric element returns to the initial state. The operation of the element toward the open side is started .

Further, the spray type coating apparatus of the present invention is a spray type coating apparatus having a spray type coating unit that sprays a coating liquid, and a moving unit that moves the spray type coating unit relative to a coating surface. The spray-type coating unit includes a discharge tank having a nozzle, a coating liquid filling flow path for filling the discharge tank with a coating liquid, a filling piezoelectric element for opening and closing the coating liquid filling flow path, and the discharge A discharge piezoelectric element that fluctuates the pressure in the tank, and a piezoelectric element drive control unit capable of independently driving and controlling the filling piezoelectric element and the discharge piezoelectric element, the piezoelectric element drive control unit comprising: A filling control means for filling the discharge tank with the coating liquid by operating the filling piezoelectric element to the open side; the filling piezoelectric element is closed; and the discharge piezoelectric element is pressure Up The discharge control means for discharging the coating liquid in the discharge tank in an ejection form from the nozzle, and the filling piezoelectric element is closed after discharging the coating liquid from the nozzle. The piezoelectric element drive control is further provided with thread trimming control means for cutting the thread drawing portion of the coating liquid discharged with negative pressure in the discharge tank by returning the ejection piezoelectric element to the initial side. The unit starts the operation to open the filling piezoelectric element by the filling control means after the discharge piezoelectric element returns to the initial side until the discharge piezoelectric element returns to the initial state. As a configuration.

Further, the spray-type coating method of the present invention includes a discharge tank having a nozzle, a coating liquid filling channel for filling the ejection tank with a coating solution, and a filling piezoelectric for opening and closing the coating solution filling channel. A filling step of filling a coating liquid into the discharge tank by operating the filling piezoelectric element to an open side using an element and a discharge piezoelectric element that varies the pressure in the discharge tank; A discharge step of discharging the coating liquid in the discharge tank in an ejection form from the nozzle by closing the filling piezoelectric element and operating the discharge piezoelectric element to the pressure increasing side; After discharging the coating liquid from the nozzle, the coating liquid discharged at a negative pressure in the discharge tank by returning the discharging piezoelectric element to the initial side while keeping the filling piezoelectric element closed. Cut the thread draw section Possess a cutting step, the, the ejection piezoelectric element from the start to default side, the ejection piezoelectric element until returning to the initial state, to the open side of the filling piezoelectric element by the filling process This is a method for starting the operation .

  According to the present invention, it is possible to spray the coating liquid at a high speed, to prevent a change in the coating amount with time due to wear of the piston, etc., and to cope with a coating liquid having a high viscosity.

1 is a schematic perspective view of a spray type coating apparatus according to an embodiment of the present invention. It is a schematic front view which shows the spray type coating unit which concerns on embodiment of this invention. It is a block diagram which shows the piezoelectric element drive control part of the spray type coating unit which concerns on embodiment of this invention. It is explanatory drawing which shows the operation timing of the spray type coating unit which concerns on embodiment of this invention. It is the schematic for demonstrating the effect | action of the thread trimming operation | movement of the injection type coating unit which concerns on embodiment of this invention, (a) is explanatory drawing which shows the coating liquid in discharge, (b) is application | coating of a thread | yarn drawing state Explanatory drawing which shows a liquid, (c) is explanatory drawing which shows the coating liquid after thread trimming. It is a graph which shows the relationship between the viscosity of the coating liquid used for the spray type coating device which concerns on embodiment of this invention, and temperature. It is the schematic for demonstrating the application | coating performance of the spray type coating device which concerns on embodiment of this invention, (a) is a front view which shows the nozzle part of the spray type coating device which concerns on embodiment, (b) is a needle type | mold. It is a front view which shows the nozzle part of a coating device. It is explanatory drawing which shows the other example of the operation timing of the spray type coating unit which concerns on embodiment of this invention. It is explanatory drawing which shows the structure of a general spray type coating device.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Embodiments of spray-type coating apparatus and spray-type coating unit]
FIG. 1 is a schematic perspective view of a spray-type coating apparatus according to an embodiment of the present invention, FIG. 2 is a schematic front view showing a spray-type coating unit according to the embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. It is a block diagram which shows the piezoelectric element drive control part of the spray type coating unit which concerns on.
In these drawings, the spray-type coating device 1 of this embodiment includes a coating unit 10, a casing 11, and a three-axis robot 12, and the coating unit 10 includes a discharge unit 2, a storage unit 3, and a filling unit. 4 and a piezoelectric element drive controller 5 are provided.
The spray coating apparatus 1 applies a coating liquid 14 to a substrate 13 placed on a housing 11.
Here, the coating liquid 14 refers to a liquid resin, an adhesive, a paint, or the like, and includes a dispersion solution.

The coating unit 10 is attached to the three-axis robot 12 and moves in the X-axis direction, the Y-axis direction, and the Z-axis direction.
In the present embodiment, the three-axis robot 12 as the moving means is configured to move the coating unit 10, but is not limited to this.
For example, it is good also as a structure which fixes the application | coating unit 10 and provides the moving means to which the board | substrate 13 is moved.

Next, the discharge unit 2, the storage unit 3, the filling unit 4, and the piezoelectric element drive control unit 5 of the coating unit 10 will be described.
As shown in FIG. 2, the discharge unit 2 includes a discharge tank 21, a nozzle 22, and a discharge piezoelectric element 23.
The discharge tank 21 is a pressurizing chamber provided inside the discharge unit 2 and is filled with the coating liquid 14.
The nozzle 22 is provided at the bottom of the discharge tank 21 from which the coating liquid 14 is discharged in the form of a jet.
The discharge piezoelectric element 23 is provided in the discharge tank 21 in a non-contact state with the nozzle 22, and returns to the initial state after the pressure increasing operation (extension displacement operation) for increasing the pressure in the discharge tank 21. A return operation (contraction operation) is possible, and the coating liquid 14 is discharged from the nozzle 22 by a pressure increase operation.
As the ejection piezoelectric element 23, a laminated piezoelectric element capable of high response and high output is used. This is because with the bimov type piezo, high response and high output cannot be realized, and it is difficult to eject the medium-high viscosity coating liquid 14 in a jet form.

The storage unit 3 includes a storage tank 31 and a pressurizing mechanism 32.
The storage tank 31 is a container that stores the coating liquid 14.
The pressurizing mechanism 32 pressurizes the coating liquid 14 in the storage tank 31 with, for example, air pressure.

The filling unit 4 includes a coating liquid filling channel 41, an on-off valve 42, and a filling piezoelectric element 43.
The coating liquid filling channel 41 is a channel that allows the storage tank 31 and the discharge tank 21 to communicate with each other, and the pressurized coating solution 14 in the storage tank 31 is discharged via the coating solution filling channel 41. It flows into the tank 21.
The on-off valve 42 is a valve body that opens and closes the coating liquid filling channel 41.
The filling piezoelectric element 43 is provided in a state of being connected to the on-off valve 42, and can open and close the on-off valve 42 (extension displacement operation) and close the on-off valve 42 (contraction operation). By opening the valve 42, the coating liquid 14 is filled into the discharge tank 21.
As the filling piezoelectric element 43, similarly to the ejection piezoelectric element 23, a multilayer piezoelectric element capable of high response and high output is used. Thereby, the ejection piezoelectric element 23 and the filling piezoelectric element 43 cooperate at high speed, and the coating liquid 14 can be ejected at high speed.

The piezoelectric element drive control unit 5 is a control means capable of independently driving and controlling the filling piezoelectric element 43 and the ejection piezoelectric element 23. For example, the piezoelectric element drive control unit 5 is configured using an arbitrary waveform generating circuit and is filled via an amplifier. The piezoelectric element 43 and the ejection piezoelectric element 23 are driven.
The piezoelectric element drive control unit 5 includes a filling control unit 51, a discharge control unit 52, and a thread trimming control unit 53 in order to operate the filling piezoelectric element 43 and the discharging piezoelectric element 23 at a predetermined timing. By repeatedly executing, the coating unit 14 can spray the coating liquid 14 at a high speed.

The filling controller 51 fills the discharge tank 21 with the coating liquid 14 by operating the filling piezoelectric element 43 to the open side.
The discharge control means 52 discharges the coating liquid 14 in the discharge tank 21 from the nozzles 22 in a jetting manner by closing the filling piezoelectric element 43 and operating the discharge piezoelectric element 23 to the pressure increasing side. Let
The thread trimming control means 53 discharges the coating liquid 14 from the nozzle 22 and then returns the ejection piezoelectric element 23 to the initial side while keeping the filling piezoelectric element 43 closed, so that the inside of the ejection tank 21 is restored. The thread drawing portion 15 (see FIG. 5) of the coating liquid 14 discharged under a negative pressure is cut.
That is, immediately after the application liquid 14 is discharged from the nozzle 22, if the inside of the discharge tank 21 is made negative, the application liquid 14 remaining in the pipe line of the nozzle 22 is drawn into the discharge tank 21. Therefore, a force in the direction opposite to the discharge direction acts on the thread drawing portion 15 of the coating liquid 14 and the yarn drawing portion 15 is easily cut.

Further, the piezoelectric element drive control unit 5 opens the filling piezoelectric element 43 by the filling control means 51 between the time when the ejection piezoelectric element 23 starts to return to the initial side and the time when the ejection piezoelectric element 23 returns to the initial state. Start the action to the side. Thereby, inflow of bubbles from the nozzle 22 into the discharge tank 21 can be prevented.
That is, when the time during which the inside of the discharge tank 21 is kept at a negative pressure is long, or when the conduit of the nozzle 22 is short and the drawing stroke of the coating liquid 14 is small, the discharge tank 21 is discharged from the nozzle 22 during the thread trimming operation. There is a possibility that bubbles may flow into the inside and continuous spraying of the coating liquid 14 may be impossible. However, before the bubbles enter the discharge tank 21, the operation of opening the filling piezoelectric element 43 is started. By starting the filling of the coating liquid 14 into the discharge tank 21, it becomes possible to prevent the inflow of bubbles from the nozzle 22.

The timing for starting the operation of the filling piezoelectric element 43 toward the opening side by the filling control means 51 can be arbitrarily set according to the pipe length of the nozzle 22 and the like.
For example, a time T1 from when the ejection piezoelectric element 23 starts to return to the initial side to when the filling control means 51 starts to open the filling piezoelectric element 43, and the filling piezoelectric element 43 by the filling control means 51. The time T2 from when the operation to the opening side of the nozzle is started until the ejection piezoelectric element 23 returns to the initial state can be set to be substantially the same. If it does in this way, inflow of the bubble from nozzle 22 can be prevented, ensuring the thread trimming control period required for thread trimming.

Next, the operation of the coating unit 10 having the above configuration will be described with reference to FIGS.
FIG. 4 is an explanatory diagram showing the operation timing of the spray type coating unit according to the embodiment of the present invention, and FIG. 5 is a schematic diagram for explaining the operation of the thread trimming operation of the spray type coating unit according to the embodiment of the present invention. FIG. 4A is an explanatory diagram showing a coating solution being discharged, FIG. 4B is an explanatory diagram showing a coating solution in a stringing state, and FIG. 3C is an explanatory diagram showing a coating solution after thread trimming.
FIG. 4 shows drive signal waveforms of the ejection piezoelectric element 23 and the filling piezoelectric element 43 when the ejection of the coating liquid 14 is started from the state where the ejection tank 21 is filled with the coating liquid 14.

  In the state of FIG. 4A, the filling piezoelectric element 43 is in a closed state and the ejection piezoelectric element 23 is in an initial state. Here, when a voltage having a SIN waveform is applied to the ejection piezoelectric element 23, the ejection piezoelectric element 23 expands in accordance with the voltage and raises the pressure in the ejection tank 21. At this time, since the pressure escape place is only the pipe line of the nozzle 22, the coating liquid 14 is ejected vigorously from the nozzle 22 (see FIGS. 5A and 5B).

After the state shown in FIG. 4B is reached, that is, after the coating liquid 14 is discharged from the nozzle 22, the discharging piezoelectric element 23 is returned to the initial side while the filling piezoelectric element 43 is kept closed. . As a result, the thread drawing portion 15 of the coating liquid 14 discharged with a negative pressure in the discharge tank 21 is cut.
That is, immediately after the application liquid 14 is discharged from the nozzle 22, if the inside of the discharge tank 21 is made negative, the application liquid 14 remaining in the pipe line of the nozzle 22 is drawn into the discharge tank 21. Therefore, a force in the direction opposite to the discharge direction acts on the yarn drawing portion 15 of the coating liquid 14, and the yarn drawing portion 15 is easily cut (see FIG. 5C).

Next, when the state of FIG. 4C is reached, the operation of opening the filling piezoelectric element 43 is started, and filling of the coating liquid 14 into the discharge tank 21 is started.
That is, by starting the filling of the coating liquid 14 into the discharge tank 21 between the start of returning the discharge piezoelectric element 23 to the initial side and the return of the discharge piezoelectric element 23 to the initial state, The negative pressure state in the tank 21 is released, and bubbles are prevented from flowing into the discharge tank 21 from the nozzle 22.

  The drive signal output to the filling piezoelectric element 43 has a SIN waveform. In the state shown in FIG. 4D, the filling piezoelectric element 43 reaches the operating end on the open side, and then continuously returns. When the operation end on the closed side is reached, that is, when the state shown in FIG. 4E is reached, the filling of the coating liquid 14 into the discharge tank 21 is completed. In the continuous ejection operation, a drive signal for the ejection piezoelectric element 23 is output immediately after that.

FIG. 5 shows the operation of the thread trimming operation of the application unit 10 according to the embodiment of the present invention. When the thread trimming unit 15 receives the above-described thread trimming operation, the thread trimming state cannot be maintained. Separation almost naturally in the vertical direction.
Since the portion below the cut stringing portion 15 is absorbed by the droplets of the sprayed coating liquid 14, the sprayed coating liquid 14 is in the form of a stable droplet (substantially in a droplet shape state). The air travels (drops) in the air and is applied to the substrate 13.
Thereby, in the spray type coating apparatus 1, even if the coating liquid 14 is, for example, a high-viscosity resin that generates the stringing portion 15, a small amount of the coating liquid 14 is applied in a coating area having a small area. Can be applied.

In addition, since the portion above the cut stringing portion 15 is absorbed by the coating liquid 14 in the nozzle 22, the coating state becomes unstable due to the periphery of the nozzle 22 being blocked by the coating liquid 14. It is possible to effectively avoid the problem of becoming.
As a result, it is almost unnecessary to clean the coating liquid 14 attached to the nozzle 22 by an automatic cleaning mechanism or an operator, so that productivity can be greatly improved.
Further, by stabilizing the application state, it is possible to improve the application quality, for example, the quality of applying a predetermined amount of the application liquid 14 in a predetermined application region.

The shape of the sprayed coating liquid 14 shown in FIG. 5 is an example. That is, the sprayed coating liquid 14 may have various shapes depending on the characteristics (for example, viscosity) of the coating liquid 14.
Therefore, for example, the diameter of the generated yarn drawing portion 15 may be substantially the same as the minimum diameter of the injection hole of the nozzle 22 or slightly smaller than the minimum diameter. Even in such a case, according to the spray-type coating device 1 of the present embodiment, the sprayed coating liquid 14 is in the air as a stable droplet (substantially in the shape of a droplet) by the above-described thread trimming operation. Is applied to the substrate 13.

Next, the relationship between the viscosity of the coating liquid 14 and the temperature will be described with reference to FIG.
FIG. 6 is a graph showing the relationship between the viscosity and temperature of the coating liquid used in the spray coating apparatus according to the embodiment of the present invention.
In FIG. 6, as an example of the coating liquid 14, the relationship between the viscosity and temperature of an underfill resin (for example, a liquid resin filled between a chip and a substrate) is shown. The viscosity at 60 ° C. is about 1/100 of the viscosity at 20 ° C.

The present invention is effective when the sprayed coating liquid 14 pulls the yarn.
For example, when a coating liquid having the characteristics shown in FIG. 6 is applied by the spray type coating apparatus 1, even if the coating liquid 14 is in a high viscosity temperature range, a small amount of coating liquid is applied in a coating area having a small area. can do.
In the present invention, a viscosity of 10 Pa · s or higher is defined as a high viscosity.

  As described above, according to the spray-type coating apparatus 1 and the coating unit 10 of the present embodiment, the discharge tank 21 having the nozzles 22 and the coating liquid filling flow for filling the discharge tank 21 with the coating liquid 14. The path 41, the filling piezoelectric element 43 that opens and closes the coating liquid filling flow path 41, the ejection piezoelectric element 23 that varies the pressure in the ejection tank 21, the filling piezoelectric element 43, and the ejection piezoelectric element 23 are independent of each other. And a piezoelectric element drive control unit 5 that can be driven and controlled, and the piezoelectric element drive control unit 5 operates the filling piezoelectric element 43 to open to fill the discharge tank 21 with the coating liquid 14. By operating the filling control means 51 and the filling piezoelectric element 43 on the closed side and the discharge piezoelectric element 23 on the pressure increasing side, the coating liquid 14 in the discharge tank 21 is ejected from the nozzle 22 in the form of a jet. After discharging the coating liquid 14 from the discharge control means 52 and the nozzle 22, the discharge piezoelectric element 23 is returned to the initial side while the filling piezoelectric element 43 is kept closed, so that the inside of the discharge tank 21 is restored. Since there is provided a thread trimming control means 53 that cuts the yarn pulling portion 15 of the coating liquid 14 discharged at a negative pressure, the coating liquid 14 is discharged by using the piezoelectric elements 23 and 43 as driving sources, so that the coating liquid 14 can be discharged at high speed. In addition to being able to spray, it is possible to prevent a change in coating amount with time due to piston wear and the like, and after discharging the coating liquid 14 from the nozzle 22, a thread trimming operation for cutting the thread drawing portion 15 of the coating liquid 14 is performed. Accordingly, it is possible to cope with the coating liquid 14 having a high viscosity.

  Further, the piezoelectric element drive control unit 5 opens the filling piezoelectric element 43 by the filling control means 51 between the time when the ejection piezoelectric element 23 starts to return to the initial side and the time when the ejection piezoelectric element 23 returns to the initial state. Therefore, the inflow of bubbles from the nozzle 22 into the discharge tank 21 can be prevented.

  Also, a time T1 from when the ejection piezoelectric element 23 starts to return to the initial side to when the filling control means 51 starts to open the filling piezoelectric element 43, and the filling piezoelectric element 43 by the filling control means 51. Since the time T2 from the start of the operation toward the opening side to the return of the ejection piezoelectric element 23 to the initial state is substantially the same, the nozzle 22 can be controlled while ensuring a thread trimming control period necessary for thread trimming. Inflow of bubbles can be prevented.

[Example of use]
Next, a usage example of the spray coating apparatus 1 according to the embodiment will be described with reference to FIG.
FIG. 7 is a schematic view for explaining the coating performance of the spray-type coating apparatus according to the embodiment of the present invention. FIG. 7A is a front view showing a nozzle portion of the spray-type coating apparatus according to the embodiment. ) Is a front view showing a nozzle portion of a needle type coating apparatus.

  As shown in FIG. 7A, the spray coating apparatus 1 of this embodiment is used in an electronic component, a semiconductor production line, or the like, and a plurality of chips (flip chips) 16 are interposed via solder bumps 17. The coating liquid 14 (underfill resin) is applied to the substrate 13 mounted in this manner. The chips 16 are mounted with high density, and the distance between the chips 16 is a comma number of mm (for example, 0.5 mm).

In the spray coating apparatus 1, the coating unit 10 is moved to a predetermined coating position by the triaxial robot 12, and starts the coating operation as described above. In this usage example, the application unit 10 applies the application liquid 14 to the gaps between the chips 16 with an injection tact of several tens to several hundreds (second injection / second). That is, the spray-type coating device 1 is a minute and high-precision coating in a coating process in which an underfill resin is filled between a chip 16 and a substrate 13 in a production line of a semiconductor product such as a chip (flip chip) 16. It is possible to perform.
As a result, in semiconductor products that tend to be miniaturized and miniaturized, it can greatly help to improve the production efficiency of an underfill filling coating production line that serves as durability and temperature protection. In addition, the spray-type coating device 1 is also effective in a production line using a resin having a high viscosity that easily causes stringing, for example, a UV curing agent or an adhesive, and a production process in which an operator is applying because of high viscosity. is there.

On the other hand, for example, as shown in FIG. 7B, a general coating apparatus using the needle 18 applies the coating liquid 14 to the gaps between the chips 16 with respect to the spray type coating apparatus 1. At this time, the coating liquid 14 comes into contact with the upper surface of the chip 16, and the coating liquid 14 cannot be applied to a predetermined position (a space between the chip 16 and the substrate 13).
That is, the spray coating apparatus 1 is extremely effective for high-density mounting of electronic components and semiconductor devices.

[Second Embodiment of Spray Coating Apparatus and Spray Coating Unit]
FIG. 8 is an explanatory diagram showing another example of the operation timing of the spray-type coating unit according to the embodiment of the present invention.
As shown in this figure, in the spray-type coating apparatus and spray-type coating unit according to the second embodiment of the present invention, the discharge trimmer element 53 is discharged with the yarn trimming control means 53 kept on the closing side. The point which returns 23 to an initial stage in steps differs from the said embodiment.
For example, as shown in FIG. 8, after the discharge piezoelectric element 23 is extended to discharge the coating liquid 14, the discharge piezoelectric element 23 is temporarily stopped after being returned by a predetermined amount, and then discharged again. A two-stage thread trimming operation is performed by returning the element 23 by a predetermined amount.

  As described above, according to the spray-type coating device and spray-type coating unit of the present embodiment, it is possible to achieve substantially the same effect as the spray-type coating device 1 of the first embodiment, and further, the yarn When the cutting control means 53 returns the discharging piezoelectric element 23 to the initial side step by step while the filling piezoelectric element 43 is closed, the thread cutting performance different from that of the above embodiment can be exhibited. Depending on the type of the coating liquid 14, better thread trimming performance than the above embodiment can be exhibited.

Although the present invention has been described with reference to the embodiment, it is needless to say that the present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the claims.
For example, in the above-described embodiment, the discharge piezoelectric element is provided in the discharge tank, and the pressure in the discharge tank is changed by driving the piezoelectric element. However, a pressure fluctuation mechanism such as a piston that changes the pressure in the discharge tank. And the pressure fluctuation mechanism may be operated by driving the ejection piezoelectric element.

  INDUSTRIAL APPLICABILITY The present invention can be applied to a spray-type coating unit, a spray-type coating apparatus, and a spray-type coating method that discharge a coating liquid in a spray form. Suitable for apparatus and spraying application method.

DESCRIPTION OF SYMBOLS 1 Injection type coating apparatus 2 Discharge part 3 Storage part 4 Filling part 5 Piezoelectric element drive control part 10 Application unit 14 Coating liquid 15 String drawing part 21 Discharge tank 22 Nozzle 23 Discharge piezoelectric element 41 Coating liquid filling flow path 42 Opening and closing valve 43 Filling piezoelectric element 51 Filling control means 52 Discharge control means 53 Thread trimming control means

Claims (7)

A discharge tank having a nozzle;
A coating liquid filling flow path for filling the discharge tank with the coating liquid;
A filling piezoelectric element for opening and closing the coating liquid filling flow path;
A discharge piezoelectric element that varies the pressure in the discharge tank;
A piezoelectric element drive control unit capable of independently driving and controlling the filling piezoelectric element and the ejection piezoelectric element,
The piezoelectric element drive control unit is
Filling control means for filling the discharge tank with a coating liquid by operating the filling piezoelectric element to the open side;
A discharge control means for discharging the coating liquid in the discharge tank from the nozzle in a jetting manner by closing the filling piezoelectric element and operating the discharge piezoelectric element to the pressure increasing side;
After discharging the coating liquid from the nozzle, the discharge piezoelectric element is discharged to a negative pressure by returning the discharge piezoelectric element to the initial side while keeping the filling piezoelectric element closed. A thread trimming control means for cutting the thread drawing portion of the liquid ,
The piezoelectric element drive control unit is
The operation of the filling control means to the opening side of the filling piezoelectric element is started after the discharge piezoelectric element starts to return to the initial side and before the discharging piezoelectric element returns to the initial state. A spray-type coating unit. The time from the start of returning the ejection piezoelectric element to the initial side to the start of the operation of opening the filling piezoelectric element by the filling control means, and the opening side of the filling piezoelectric element by the filling control means injection application unit of claim 1, wherein the operation were allowed to initiate the ejection piezoelectric element is time to return to the initial state is substantially the same to. The thread trimming control means is
Wherein while the filling piezoelectric element was closing side, injection coating unit according to claim 1 or 2, wherein the ejection piezoelectric element back stepwise to the initial side. It said piezoelectric element, injection type application unit according to any one of claims 1 to 3, which is a layered piezoelectric element. The spray-type coating unit according to any one of claims 1 to 4 , wherein the coating liquid is a high-viscosity liquid resin. In a spray-type coating apparatus having a spray-type coating unit that sprays a coating liquid, and a moving unit that moves the spray-type coating unit relative to a coating surface.
The spray coating unit is
A discharge tank having a nozzle;
A coating liquid filling flow path for filling the discharge tank with the coating liquid;
A filling piezoelectric element for opening and closing the coating liquid filling flow path;
A discharge piezoelectric element that varies the pressure in the discharge tank;
A piezoelectric element drive control unit capable of independently driving and controlling the filling piezoelectric element and the ejection piezoelectric element,
The piezoelectric element drive control unit is
Filling control means for filling the discharge tank with a coating liquid by operating the filling piezoelectric element to the open side;
A discharge control means for discharging the coating liquid in the discharge tank from the nozzle in a jetting manner by closing the filling piezoelectric element and operating the discharge piezoelectric element to the pressure increasing side;
After discharging the coating liquid from the nozzle, the discharge piezoelectric element is discharged to a negative pressure by returning the discharge piezoelectric element to the initial side while keeping the filling piezoelectric element closed. A thread trimming control means for cutting the thread drawing portion of the liquid ,
The piezoelectric element drive control unit is
The operation of the filling control means to the opening side of the filling piezoelectric element is started after the discharge piezoelectric element starts to return to the initial side and before the discharging piezoelectric element returns to the initial state. A spray-type coating device. A discharge tank having a nozzle;
A coating liquid filling flow path for filling the discharge tank with the coating liquid;
A filling piezoelectric element for opening and closing the coating liquid filling flow path;
Using a discharge piezoelectric element that varies the pressure in the discharge tank,
A filling step of filling the discharge tank with a coating liquid by operating the filling piezoelectric element to the open side;
A discharge step of discharging the coating liquid in the discharge tank in an ejection form from the nozzle by closing the filling piezoelectric element and operating the discharge piezoelectric element to the pressure rising side;
After discharging the coating liquid from the nozzle, the discharge piezoelectric element is discharged to a negative pressure by returning the discharge piezoelectric element to the initial side while keeping the filling piezoelectric element closed. possess and thread-cutting process to cut the stringing of the liquid, the,
The operation of opening the filling piezoelectric element by the filling step is started after the discharge piezoelectric element starts to return to the initial side until the discharge piezoelectric element returns to the initial state. A spray-type coating method.

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