JP5478355B2 - Correction method of measured value by two-dimensional measuring machine - Google Patents

Description

  The present invention relates to a method of correcting a measurement value by a two-dimensional length measuring device, and in particular, a measured value when the two-dimensional length measuring device measures a plurality of exposure points that are exposed and marked by a laser marking device. Is related to the correction method.

  The laser marking device reflects the laser beam on the X-direction mirror and Y-direction mirror, and arbitrarily controls the rotation angle of each mirror with a motor, so that the laser marking device can be placed at any location on the material such as a liquid crystal panel placed on the exposure surface. It is widely used for applications such as focusing two-dimensional codes by condensing laser light. FIG. 1 is an explanatory view schematically showing a main part configuration of a conventional laser marking apparatus. In the figure, incident laser light 1 emitted from a light source (not shown) is reflected by an X direction mirror 2 and a Y direction mirror 3, passes through a condenser lens 4, and is focused on an exposure surface 5. The (focus) coordinate positions Xm and Ym on the exposure surface 5 are uniquely determined by the rotation angles θx and θy of the X direction mirror 2 and the Y direction mirror 3. 1 denotes a control unit, and a main control unit 60 ′ of the control unit 6 ′ includes a laser control unit 61 and a marking position information output unit 63. Also, a setting command unit 8 is connected to the marking position information output unit 63.

  The marking position information output unit 63 outputs marking command signals x and y based on the marking pattern information P. The marking command signals x and y are supplied to the driving motor 21 of the X-direction mirror 2 via the power amplifiers 9 and 9 ′. And sent to the drive motor 31 of the Y-direction mirror 3 (see Patent Document 1 or 2).

  According to the conventional laser marking device, the laser beam irradiation position is distorted due to the characteristics of the condenser lens 4 and the geometrical arrangement of the condenser lens 4 and the X-direction mirror 2 and Y-direction mirror 3. Will occur. Therefore, even if the rotation angles θx and θy of the X-direction mirror 2 and the Y-direction mirror 3 are rotated at equal intervals, the intervals between the coordinate positions Xm and Ym are not equal due to distortion in the irradiation position of the laser beam.

  FIG. 2 is a graph showing an example of an ideal result (product after marking) when the rotation angles θx and θy are respectively rotated at equal intervals in the X direction and the Y direction and marked with laser light. Each point indicated by a white circle corresponds to the rotation angle of θx, θy in the orthogonal coordinates of FIG. Also, FIG. 3 shows the position where the coordinate positions (exposure points) Xm, Ym on the exposed exposure surface are converted to the positions indicated by white circles in FIG. Each point indicated by a black circle corresponds to the position of Xm, Ym in the orthogonal coordinates of FIG.

  In FIG. 2, the arrangement of the white circles has a uniform lattice shape as a whole, but in FIG. 3, the arrangement of the black circles has an overall shape in which the top and bottom are swollen and the left and right are concave. . Therefore, in order to make the coordinate positions (exposure points) Xm, Ym on the exposure surface to be a lattice with equal intervals as shown in FIG. 5, the rotation angles θx, Xx of the X direction mirror 2 and the Y direction mirror 3 It is necessary to control so that θy becomes a position where there is no regular interval, that is, a position of a white circle in FIG. By performing such control, it is possible to mark exposure points at equal intervals as shown in FIG.

  By the way, a plurality of exposure points on coordinates as shown in FIG. 3 formed on the exposure surface 5 are sequentially measured by a two-dimensional length measuring machine, and based on the measurement result, the X direction mirror 2 and the Y direction mirror 3 Control is performed so that the rotation angles θx and θy are at positions at equal intervals, that is, positions of white circles in FIG. Further, as a result of the control so that the positions of the white circles in FIG. 4 are controlled, the two-dimensional length measuring device also sequentially measures whether or not the exposure points at equal intervals as shown in FIG. 5 are marked on the exposure surface. .

  In addition, in order to mark the intended position on the exposure surface, using a pattern recognition device, the error amount at the lattice point is measured, plus the relative movement amount between the current position and the destination position, There has also been proposed a method for correcting a position by using a difference in error amount at a lattice point as a correction amount and adding the correction amount to a galvanometer driving signal.

JP-A-62-94343 JP-A-7-164169

  When measuring a plurality of exposure points on the coordinates formed on the exposure surface by the two-dimensional length measuring device as described above, the X and Y drive axes of the two-dimensional length measuring device intersect at right angles with high accuracy. Need to be. However, a two-dimensional length measuring machine using an encoder or the like measures the exposure point formed on the exposure surface while the X-axis encoder and the Y-axis encoder move orthogonally in the X and Y coordinates. Therefore, it is difficult to maintain the orthogonal encoder mechanism elements in a right angle state with high accuracy. Of course, if an expensive two-dimensional measuring machine is used, the components of the X and Y drive shafts of the two-dimensional measuring machine can be maintained at a right angle with high accuracy. Since it is difficult to maintain the component in a right-angle state with high accuracy, a measurement error occurs as a result when measuring an exposure point on the coordinates formed on the exposure surface.

  Therefore, even if a general-purpose two-dimensional measuring machine is used, a technical problem to be solved arises in order to be able to measure the exposure point on the coordinates formed on the exposure surface with high accuracy. Aims to solve this problem.

The present invention has been proposed to achieve the above object, and the invention according to claim 1 is an X-coordinate measuring means for driving in the X-axis direction to measure the X-coordinate and a Y-axis driving device for measuring the X coordinate. It met correction method of measurement by the two-dimensional length measuring machine and a Y coordinate measurement means for measuring the coordinates,
Coordinates measured when the X-coordinate measuring means and the Y-coordinate measuring means intersect at right angles when the crossing angle θ between the X-coordinate measuring means and the Y-coordinate measuring means is in the range of 0 <θ <π. The true measured values x and y of the coordinate values X ′ and y ′ of the coordinates actually measured when the X coordinate measuring means and the Y coordinate measuring means intersect at the intersecting angle θ and the intersecting angle θ In the correction method of the measured value by the two-dimensional length measuring machine obtained by
When the crossing angle θ is 0 <θ <π, the true measured values x and y are
Provided is a method for correcting a measurement value by a two-dimensional length measuring machine, wherein x = x ′ + y′cos θ and y = y′sin θ .

  According to this method, even if the intersecting angle θ between the X coordinate measuring means (X axis encoder) and the Y coordinate measuring means (Y axis encoder) constituting the two-dimensional length measuring device deviates from a right angle state, the intersecting angle θ is When 0 <θ <π, the true measured values x and y of the coordinates measured when the X coordinate measuring means and the Y coordinate measuring means intersect each other at right angles are the X coordinate measuring means and Y It can be expressed as a function of the coordinate measurement values x ′ and y ′ actually measured by the coordinate measuring means and the crossing angle θ. Therefore, if the measured values x ′ and y ′ of the coordinates actually measured by the X coordinate measuring means and the Y coordinate measuring means and the intersection angle θ are known, the true measured values x and y of the coordinates can be uniquely determined. . Thus, even if an expensive two-dimensional measuring device is not prepared, even if an inexpensive two-dimensional measuring device in which the perpendicularity between the X coordinate measuring means and the Y coordinate measuring means is easily shifted is used, the true measured value of the coordinates is obtained. Can be easily obtained.

  According to this method, when the crossing angle θ between the X coordinate measurement means and the Y coordinate measurement means is 0 to 180 degrees, the true measurement values x and y are x = x ′ + y′cos θ and y = y′sin θ can be obtained. Therefore, when the range of the crossing angle θ between the X coordinate measuring means and the Y coordinate measuring means is in the range from 0 degrees to 180 degrees, the true measured values x and y of the coordinates can be easily obtained. Furthermore, it is possible to use a cheap and general-purpose two-dimensional measuring machine.

According to a second aspect of the present invention, the two-dimensional length measuring device measures the coordinates of an exposure point on an exposure surface formed by a laser marking device. A method for correcting a value is provided.

  According to this method, the exposure point on the exposure surface formed by the laser marking device is measured by using an inexpensive two-dimensional measuring machine in which the crossing angle θ between the X coordinate measuring means and the Y coordinate measuring means is easily shifted from 90 degrees. Coordinates can be measured.

According to a third aspect of the invention, the two-dimensional length measuring machine provides a method of correcting measured values by the two-dimensional length measuring machine according to claim 2, characterized by being configured to the laser marking device integrally To do.

  According to this method, an inexpensive two-dimensional measuring machine in which the crossing angle θ between the X coordinate measuring means and the Y coordinate measuring means is easily shifted from 90 degrees is integrated with the laser marking device, so that it is inexpensive and easy to use. A laser marking device can be provided.

According to the first aspect of the present invention, since the true measurement value of the coordinates can be obtained by a simple calculation even when the X coordinate measuring means and the Y coordinate measuring means are deviated from the right angle state, an expensive two-dimensional length measuring machine can be obtained. Even if it is not prepared, it is possible to use a general-purpose inexpensive two-dimensional measuring machine in which the perpendicularity of the X coordinate measuring means and the Y coordinate measuring means is easily shifted. In addition, according to the present invention, the true measured value of the coordinates can be obtained from the crossing angle θ between the measured values x ′ and y ′ of the coordinates actually measured by the X coordinate measuring means and the Y coordinate measuring means. Therefore, in addition to the above effects, a cheaper and simpler two-dimensional length measuring device can be used.

Since the invention described in claim 2 can measure the coordinates of the exposure point on the exposure surface formed by the laser marking device using a cheaper and simple two-dimensional measuring machine, the invention described in claim 1 In addition to the effects of the invention, a more convenient two-dimensional length measuring device can be realized.

According to a third aspect of the invention, by incorporating the X-coordinate measuring unit and Y seat measuring means and the intersection angle θ tends inexpensive 2-dimensional length measuring machine shifted from 90 ° integrally with the laser marking apparatus, according to claim 2 In addition to the effects of the described invention, an inexpensive and easy-to-use laser marking device can be provided.

The schematic diagram which shows the principal part structure of the conventional laser marking apparatus. FIG. 3 is an explanatory diagram in which the rotation angle of the mirror of FIG. 1 is graphed on coordinates. Explanatory drawing which graphed the exposure point of the laser focus position on the exposure surface corresponding to the rotation angle of a mirror same as the above on the coordinate. Explanatory drawing which made the rotation angle of the mirror graphed on a coordinate when the coordinate of the laser focus position on an exposure surface same as the above was made into the grid | lattice form of equal intervals. FIG. 5 is an explanatory diagram in which the exposure point at the laser focal position on the exposure surface corresponding to the rotation angle of the mirror in FIG. 4 is graphed on coordinates. Explanatory drawing which shows the state which measures the exposure point formed in the exposure surface by the two-dimensional length measuring machine applied to this invention. Explanatory drawing which shows a coordinate axis in case the X-axis guide 15 and Y-axis guide 16 which are shown in FIG. 6 cross | intersect at an angle of 90 degrees or less. Explanatory drawing which shows a coordinate axis in case the X-axis guide 15 and Y-axis guide 16 which are shown in FIG. 6 cross | intersect at an angle of 90 degree | times or more.

In order to achieve the object that the point on the coordinate formed on the exposure surface can be measured with high accuracy even by using a general-purpose two-dimensional length measuring device, the present invention is driven in the X-axis direction to achieve X It met correction method of measurement by the two-dimensional length measuring machine and a Y coordinate measurement means for measuring the Y coordinate by driving the X-coordinate measuring unit and the Y-axis direction to measure the coordinates,
Coordinates measured when the X-coordinate measuring means and the Y-coordinate measuring means intersect at right angles when the crossing angle θ between the X-coordinate measuring means and the Y-coordinate measuring means is in the range of 0 <θ <π. The true measured values x and y of the coordinate values X ′ and y ′ of the coordinates actually measured when the X coordinate measuring means and the Y coordinate measuring means intersect at the intersecting angle θ and the intersecting angle θ In the correction method of the measured value by the two-dimensional length measuring machine obtained by
When the crossing angle θ is 0 <θ <π, the true measured values x and y are
This was realized by providing a method for correcting a measurement value by a two-dimensional length measuring machine, characterized by x = x ′ + y′cos θ and y = y′sin θ .

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to FIGS. In this embodiment, a two-dimensional length measuring machine that measures a large number of exposure points formed on the exposure surface by the laser marking apparatus shown in FIG. 1 will be described. In this case, considering the convenience of use, it is desirable that the two-dimensional length measuring device is mounted in the laser marking device. However, even if the two-dimensional length measuring device and the laser marking device are configured separately, this The correction method of the measured value by the two-dimensional measuring machine according to the invention can be realized.

  FIG. 6 is an explanatory diagram showing a state in which the two-dimensional length measuring machine applied to the present invention measures the exposure points formed on the exposure surface. As shown in FIG. X axis encoder / scale 11, X axis encoder / sensor 12, Y axis encoder / scale 13, Y axis encoder / sensor 14, X axis guides 15, 15, Y axis guide 16, X axis direction movable beam 17, Y axis direction The movable beam 18 and the exposure point observation camera 19 are configured as main elements, and a plurality of exposure points 20, 20, 20... On the plane can be measured. Such a two-dimensional length measuring machine 10 is a known device, and therefore a detailed description of the constituent elements is omitted.

  That is, with the configuration as described above, the two-dimensional length measuring machine 10 has the X-axis direction movable beam 17 and the Y-axis direction movable beam 18 moved in the X-axis direction and the Y-axis direction, respectively, and the exposure point observation camera 19. Scans the plane in the X-axis direction and the Y-axis direction, whereby the X-coordinate and Y-coordinate positions of the exposure points 20, 20, 20... Formed on the surface of the exposure surface can be measured. . In this way, when the exposure point observation camera 19 scans the entire exposure surface, for example, the coordinate positions of a large number of exposure points as shown in FIG. 3 or FIG. 5 can be measured.

  However, there is a possibility that the X-axis guides 15 and 15 and the Y-axis guide 16 cannot maintain a right-angle state due to clearance (play) of a mounting portion of the mechanical component. In other words, if the X-axis guides 15 and 15 and the Y-axis guide 16 deviate from the right angle state, the X-axis direction movable beam 17 and the Y-axis direction movable beam 18 that are moving in the X-axis direction and the Y-axis direction are inevitably orthogonal. The state may not be maintained. As a result, a measurement error occurs at a plurality of exposure points 20, 20, 20... Measured when the exposure point observation camera 19 scans the exposure surface. Even if the X-axis encoder / scale 11, the Y-axis encoder / scale 13, the X-axis direction movable beam 17, the Y-axis direction movable beam 18 and the like are displaced in the orthogonal state, the exposure points 20, 20, A measurement error occurs at 20.

  Therefore, in the method of correcting the measurement value by the two-dimensional length measuring machine according to the present invention, the X coordinate and Y coordinate of the exposure points 20, 20, 20... According to the angle at which the X axis guide 15 and the Y axis guide 16 intersect. By correcting the measurement values, accurate measurement values of the exposure points 20, 20, 20... Are obtained. Hereinafter, specific examples of a method for correcting a measurement value by the two-dimensional length measuring machine of the present invention will be described. In the following description, a case where the angle at which the X-axis guide 15 and the Y-axis guide 16 intersect is 90 degrees or less and a case where the angle is 90 degrees or more will be described individually.

  FIG. 7 is an explanatory diagram showing coordinate axes when the X-axis guide 15 and the Y-axis guide 16 shown in FIG. 6 intersect at an angle of 90 degrees or less. That is, the X-axis guide 15 and the Y-axis guide 16 are changed from a state where the X-axis and the Y-axis are perpendicular to each other at 90 degrees, and from the state where the X-axis and the Y′-axis intersect at an intersection angle θ of 90 degrees or less. Suppose that

  At this time, if the exposure point observation camera 19 measures the exposure point 20 based on the angle between the X-axis guide 15 and the Y-axis guide 16, the measured values of the coordinates to be measured are x 'and y'. However, the measured values of the true coordinates at the exposure point 20 are x and y. Accordingly, the relationship between the true coordinate measurement values x and y, the actual coordinate measurement values x ′ and y ′, and the intersection angle θ is expressed by the following equations (1) and (2).

x = x ′ + y′cos θ (1)
y = y'sinθ (2)

  Therefore, when the X-axis guide 15 and the Y-axis guide 16 intersect at an intersection angle θ of 90 degrees or less, the measured values x ′ and y ′ of the actually measured coordinates, By substituting the intersection angle θ at which the Y-axis guide 16 intersects into the equations (1) and (2), the measured values x and y of the true coordinates can be obtained. As a result, even if the X-axis guide 15 and the Y-axis guide 16 are shifted to the intersection angle θ of 90 degrees or less, the measurement values x and y of the true coordinates with no measurement error can be obtained.

  FIG. 8 is an explanatory diagram showing coordinate axes when the X-axis guide 15 and the Y-axis guide 16 shown in FIG. 6 intersect at an angle of 90 degrees or more. That is, the X-axis guide 15 and the Y-axis guide 16 are changed from a state in which the X-axis and the Y-axis are orthogonal to each other at 90 degrees, and a state in which the X-axis and the Y′-axis intersect at an intersection angle θ of 90 degrees or more. Suppose that

  At this time, when the exposure point 20 is measured by the X-axis guide 15 and the Y-axis guide 16, the measured values of the measured coordinates are x 'and y'. However, the measured values of the true coordinates at the exposure point 20 are x and y. Therefore, the relationship between the true coordinate measurement values x and y, the actual coordinate measurement values x ′ and y ′, and the intersection angle θ is expressed by the above-described equations (1) and (2).

  Therefore, when the X-axis guide 15 and the Y-axis guide 16 intersect at an intersection angle θ of 90 degrees or more, the measured values x ′ and y ′ of the actually measured coordinates, By substituting the intersection angle θ at which the Y-axis guide 16 intersects into the equations (1) and (2), the measured values x and y of the true coordinates can be obtained. As a result, even if the X-axis guide 15 and the Y-axis guide 16 are shifted to the intersection angle θ of 90 degrees or more, the measurement values x and y of the true coordinates with no measurement error can be obtained.

  That is, if the crossing angle θ between the X-axis guide 15 and the Y-axis guide 16 is in the range of 0 <θ <π, the measured values x ′ and y ′ of the actually measured coordinates, the X-axis guide 15 and the Y-axis Based on the intersection angle θ with the shaft guide 16, the true coordinate measurement values x and y can be uniquely determined.

  Thus, the exposure point can be easily obtained without using an expensive length measuring device, even if a general-purpose inexpensive length measuring device in which the crossing angle between the X-axis guide 15 and the Y-axis guide 16 easily deviates from 90 degrees (right angle) is used. The measured values x and y of the true coordinates can be obtained.

  In summary, the correction method of the measurement value by the two-dimensional length measuring machine of the present invention is driven in the X-axis direction to move in the X-axis direction and contribute to the measurement of the X-coordinate, and in the Y-axis direction. If the crossing angle θ with the Y-axis direction movable beam 18 that contributes to the measurement of the Y coordinate is in the range of 0 <θ <π, it is measured when the X-axis guide 15 and the Y-axis guide 16 intersect at right angles. The true measured values x and y of the coordinates to be obtained are the measured values x ′ and y ′ of the coordinates actually measured when the X-axis guide 15 and the Y-axis guide 16 intersect at the intersecting angle θ and the intersecting angle θ. And can be easily obtained.

  More specifically, when the crossing angle θ between the X-axis guide 15 and the Y-axis guide 16 is in the range of 0 <θ <π, the true measured values x and y are expressed by the above formula (1) and It can be obtained by equation (2).

  As a suitable application of the two-dimensional length measuring machine having such a correction function, it can be used for measuring the coordinates of exposure points on an exposure surface formed by a laser marking device. At this time, if the two-dimensional length measuring device is configured integrally with the laser marking device, exposure and measurement can be performed at once, so that the usability of the laser marking device and the two-dimensional length measuring device is further improved.

  The present invention can be variously modified without departing from the spirit of the present invention, and the present invention naturally extends to the modified one.

  According to the correction method of the measurement value by the two-dimensional length measuring device according to the present invention, the exposure point exposed by the laser marking apparatus can be accurately measured using an inexpensive general-purpose two-dimensional length measuring device. It can be effectively used as a combined device that integrally incorporates a two-dimensional length measuring device into a laser marking device and performs exposure and measurement collectively.

DESCRIPTION OF SYMBOLS 1 Incident laser beam 2 X direction mirror 3 Y direction mirror 4 Condensing lens 5 Exposure surface 6 'Control unit 8 Setting value etc. command part 9 X direction power amplifier 9' Y direction power amplifier 10 Two-dimensional measuring machine 11 X Axis encoder / scale 12 X-axis encoder / sensor 13 Y-axis encoder / scale 14 Y-axis encoder / sensor 15 X-axis guide 16 Y-axis guide 17 X-axis direction movable beam 18 Y-axis direction movable beam 19 Exposure point observation camera 20 Exposure point 21 X-direction drive motor 31 Y-direction drive motor 60 'main control unit 61 laser control unit 63 marking position information output unit p marking pattern information

Claims (3)

Method of correcting the value measured by X-coordinate measuring unit and the Y-axis direction by driving the two-dimensional length measuring machine and a Y coordinate measurement means for measuring the Y coordinate by driving the X-axis direction to measure the X coordinate met And
Coordinates measured when the X-coordinate measuring means and the Y-coordinate measuring means intersect at right angles when the crossing angle θ between the X-coordinate measuring means and the Y-coordinate measuring means is in the range of 0 <θ <π. The true measured values x and y of the coordinate values X ′ and y ′ of the coordinates actually measured when the X coordinate measuring means and the Y coordinate measuring means intersect at the intersecting angle θ and the intersecting angle θ In the correction method of the measured value by the two-dimensional length measuring machine obtained by
When the crossing angle θ is 0 <θ <π, the true measured values x and y are
x = x ′ + y′cos θ, and y = y′sin θ. The two-dimensional length measuring machine, the correction method of measurement according to claim 1 2-dimensional length measuring machine, wherein that you measure the coordinates of the exposure point in the exposure plane formed by the laser marking device. Method of correcting measured values by the two-dimensional length measuring machine according to claim 2, wherein the two-dimensional length measuring machine characterized that you have been configured the laser marking device integrally.

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