JP5478899B2 - High purity aluminum material - Google Patents
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Description
本発明は、例えば50K以下の極低温において低い電気抵抗率が要求される材料として有用な高純度アルミニウム材に関する。 The present invention relates to a high-purity aluminum material that is useful as a material that requires low electrical resistivity at, for example, an extremely low temperature of 50K or less.
例えば、医療用のMRI(磁気共鳴画像診断装置)や分析用のNMR(核磁気共鳴分析装置)等に用いられる超電導マグネットや、クライオポンプ、極低温冷凍機等の部材は、通常、50K以下の極低温で使用される。そのため、これら部材の構成材料には、極低温の雰囲気において優れた電気伝導度を発現するといった特性が求められる。そのような材料としては、これまでから、電気抵抗率が低い高純度アルミニウムが利用されていた(特許文献1)。 For example, members such as superconducting magnets, cryopumps, and cryogenic refrigerators used in medical MRI (magnetic resonance imaging apparatus) and NMR (nuclear magnetic resonance analyzer) for analysis are usually 50K or less. Used at cryogenic temperatures. For this reason, the constituent materials of these members are required to have a characteristic of exhibiting excellent electrical conductivity in a cryogenic atmosphere. As such a material, conventionally, high-purity aluminum having a low electrical resistivity has been used (Patent Document 1).
しかしながら、従来のように高純度アルミニウムにより形成された部材であっても、その形状を薄板や箔材等とした場合には、材料(すなわち、アルミニウム)が本来有する電気伝導性が充分に発現されず、極低温における電気抵抗率が満足しうるレベルに達しないという問題があった。 However, even if the member is made of high-purity aluminum as in the past, when the shape thereof is a thin plate or foil material, the electrical conductivity inherent to the material (ie, aluminum) is sufficiently expressed. Therefore, there is a problem that the electrical resistivity at extremely low temperature does not reach a satisfactory level.
そこで、本発明は、薄板や箔材等であっても、極低温において低い電気抵抗率を発現しうる高純度アルミニウム材を提供することを目的とする。 Therefore, an object of the present invention is to provide a high-purity aluminum material that can exhibit a low electrical resistivity even at a very low temperature, even if it is a thin plate or a foil material.
本発明者らは、上記課題を解決すべく鋭意検討を行なった。その結果、部材の形状を薄板や箔材等とした場合、部材表面の微細な凹凸の凸部が電気の抵抗として作用し、これが電気伝導性を低下させる原因になっていることを見出した。そして、この知見に基づき、部材表面の凸部の量を表面研磨処理によって低減することにより、アルミニウムが本来有する電気伝導性を良好に発揮させうることを見出すとともに、極低温における電気伝導性を向上させるにはアルミニウムの純度が高いほど良いことをも見出した。ちなみに、以上の検討のなかで、部材表面の凹凸が及ぼす前述した悪影響は、アルミニウムの純度が高いほど、また部材の厚みが薄いほど、顕著に現れるものであるという知見も得られており、この点に鑑みても、部材表面の凹凸を表面研磨処理することが、極低温における低い電気抵抗率を得るうえで非常に有効であることが判った。本発明は、これらの知見に基づき完成されたものである。 The present inventors have intensively studied to solve the above problems. As a result, when the shape of the member is a thin plate, a foil material, or the like, it has been found that the fine irregularities on the surface of the member act as electrical resistance, which causes a decrease in electrical conductivity. And based on this knowledge, by reducing the amount of protrusions on the surface of the member by surface polishing treatment, it was found that the original electrical conductivity of aluminum can be exhibited well, and improved electrical conductivity at cryogenic temperatures It has also been found that the higher the purity of aluminum, the better. By the way, in the above examination, it has been found that the above-mentioned adverse effects caused by unevenness on the surface of the member are more prominent as the purity of aluminum is higher and the thickness of the member is thinner. In view of this point, it has been found that it is very effective to subject the unevenness on the surface of the member to a surface polishing treatment to obtain a low electrical resistivity at an extremely low temperature. The present invention has been completed based on these findings.
すなわち、本発明は以下の構成を有する。
(1)純度99.9999質量%以上である高純度アルミニウムの圧延材からなり、該圧延材の表面に表面研磨処理が施されていることを特徴とする高純度アルミニウム材。
(2)前記圧延材の表面は下記式
表面粗さ(μm)=計測部表面の凹凸部分の体積(μm3)/計測面積(μm2)
で求められる表面粗さが3μm未満となっている前記(1)記載の高純度アルミニウム材。
(3)前記圧延材は、厚みが1.5mm以下である前記(1)または(2)記載の高純度アルミニウム材。
(4)厚み0.2〜2μmの酸化皮膜で覆われている前記(1)〜(3)のいずれかに記載の高純度アルミニウム材。
(5)400〜600℃で1時間以上保持する焼鈍処理が施されてなる前記(1)〜(4)のいずれかに記載の高純度アルミニウム材。
That is, the present invention has the following configuration.
(1) A high-purity aluminum material comprising a rolled material of high-purity aluminum having a purity of 99.9999% by mass or more, wherein the surface of the rolled material is subjected to a surface polishing treatment.
(2) The surface of the rolled material has the following formula: surface roughness (μm) = volume of uneven portions on the surface of the measurement part (μm 3 ) / measurement area (μm 2 )
The high-purity aluminum material according to the above (1), wherein the surface roughness required by 1 is less than 3 μm.
(3) The high-purity aluminum material according to (1) or (2), wherein the rolled material has a thickness of 1.5 mm or less.
(4) The high-purity aluminum material according to any one of (1) to (3), which is covered with an oxide film having a thickness of 0.2 to 2 μm.
(5) The high-purity aluminum material according to any one of (1) to (4), which is subjected to an annealing treatment that is held at 400 to 600 ° C. for 1 hour or more.
本発明によれば、部材の形状が薄板や箔材等であっても、例えば50K以下の極低温において低い電気抵抗率を発現させることができる。 According to the present invention, even when the shape of the member is a thin plate, a foil material, or the like, a low electrical resistivity can be exhibited at an extremely low temperature of, for example, 50K or less.
本発明の高純度アルミニウム材は、純度99.9999質量%以上である高純度アルミニウムの圧延材からなる。この高純度アルミニウムの純度の上限は、特に制限されないが、通常、99.99999質量%未満である。このような高純度アルミニウムの純度は、Alの含有量の測定により求めてもよいが、Fe、Ti、V、Cr、Zr、Si、CuおよびMg(以下、これらを纏めて「8元素」と称することもある)について各元素の含有量を求め、それらの合計量を100%から差し引くことにより求めることもできる。つまり、一般に、高純度アルミニウムに不純物として含まれうる元素としては、Si、Cu、Mg、Fe、Ti、V、Cr、Zr、Li、Be、B、Na、K、Ca、Mn、Ni、Co、Zn、Ga、As、Mo、Ag、Cd、In、Sn、Sb、Ba、La、Ce、Pt、Hg、Pb、Bi、ThおよびU(以下、これらを纏めて「35元素」と称することもある)などが挙げられ、さらに、これら35元素以外の不可避不純物を含有することもあるが、これらの中で、上記8元素以外の元素は、通常、含有されていたとしても極めて微量であり、前述のように上記8元素以外の元素の含有量をゼロと仮定して算出した純度であっても殆ど誤差は生じない。 The high-purity aluminum material of the present invention is a rolled material of high-purity aluminum having a purity of 99.9999% by mass or more. The upper limit of the purity of the high-purity aluminum is not particularly limited, but is usually less than 99.99999% by mass. The purity of such high-purity aluminum may be determined by measuring the Al content, but Fe, Ti, V, Cr, Zr, Si, Cu and Mg (hereinafter collectively referred to as “8 elements”) It is also possible to obtain the content of each element by subtracting the total amount from 100%. That is, generally, elements that can be contained as impurities in high-purity aluminum include Si, Cu, Mg, Fe, Ti, V, Cr, Zr, Li, Be, B, Na, K, Ca, Mn, Ni, Co Zn, Ga, As, Mo, Ag, Cd, In, Sn, Sb, Ba, La, Ce, Pt, Hg, Pb, Bi, Th, and U (hereinafter collectively referred to as “35 elements”) In addition, these elements may contain unavoidable impurities other than these 35 elements, but among these, elements other than the above 8 elements are usually very small even if contained. As described above, there is almost no error even if the purity is calculated assuming that the content of elements other than the above eight elements is zero.
前記高純度アルミニウムに含まれうる不純物のうち、Si、CuおよびMgの各元素の含有量はそれぞれ0.5質量ppm以下であることが好ましく、一方、Fe、Ti、V、CrおよびZrの各元素の含有量はそれぞれ0.1質量ppm以下であることが好ましい。これにより、極低温において、より低い電気抵抗率を得ることができる。また、前記高純度アルミニウムは、同様の理由から、前記35元素の合計含有量が1質量ppm以下であることが好ましい。 Among impurities that can be contained in the high-purity aluminum, the content of each element of Si, Cu and Mg is preferably 0.5 mass ppm or less, respectively, while each of Fe, Ti, V, Cr and Zr The element content is preferably 0.1 mass ppm or less. Thereby, a lower electrical resistivity can be obtained at an extremely low temperature. The high-purity aluminum preferably has a total content of 35 elements of 1 mass ppm or less for the same reason.
このような高純度アルミニウムは、比較的純度の低い普通アルミニウム(例えば、純度99.9質量%であるJIS−H2102の特1種程度のグレード)を精製することによって得ることができる。精製方法としては、特に制限されないが、好ましくは、前記高純度アルミニウムは、三層電解法による精製と、一方向凝固法による精製との両方を経て得られたものであるのがよい。三層電解法による精製と一方向凝固法による精製の実施順序は、特に制限されないが、通常は、まず三層電解法で精製し、その後、一方向凝固法で精製される。また、三層電解法による精製と一方向凝固法による精製は、例えば、交互に繰り返し行ってもよいし、いずれか一方もしくは両方を各々繰り返し行ってもよいが、特に、一方向凝固法による精製は、繰り返し行うことが好ましい。なお、三層電解法による精製および一方向凝固法による精製の具体的な手法や条件等は、通常この分野で行われている方法や条件等を適宜採用すればよい。 Such high-purity aluminum can be obtained by refining ordinary aluminum having a relatively low purity (for example, a grade of about 1 type of JIS-H2102 having a purity of 99.9% by mass). The purification method is not particularly limited, but preferably, the high-purity aluminum is obtained through both purification by a three-layer electrolytic method and purification by a unidirectional solidification method. The order of performing the purification by the three-layer electrolysis method and the purification by the unidirectional solidification method is not particularly limited, but usually the purification is first performed by the three-layer electrolysis method and then purified by the unidirectional solidification method. Further, the purification by the three-layer electrolysis method and the purification by the unidirectional solidification method may be repeated alternately, for example, or either one or both may be repeated. Is preferably repeated. As specific methods and conditions for purification by the three-layer electrolysis method and purification by the unidirectional solidification method, methods, conditions, and the like usually used in this field may be adopted as appropriate.
前記圧延材は、前記高純度アルミニウムの鋳塊に圧延加工を施すことによって得られる。圧延加工は、例えば、鋳塊を一対のロールの間に挟み込むことにより圧力を加えながら、これらロール間に鋳塊を通過させる方法など、通常の方法を採用して行えばよい。圧延加工を行う際の具体的な手法や条件(処理温度、処理時間、加工率など)は、特に制限されるものではなく、本発明の効果を損なわない範囲で適宜設定すればよい。
前記圧延材は、表面研磨処理による電気抵抗低減効果を顕著に発現させるうえでは、厚みが1.5mm以下であることが好ましく、より好ましくは1.0mm以下である。つまり、前記圧延材がこのように厚みが薄い薄板や箔材等である場合には、極低温において表面研磨処理による電気伝導性の向上効果がより顕著になるのである。また、厚みが薄い圧延材は、熱伝達材として利用する場合、振動を伝え難く、防振効果をもつという利点もある。なお、ここで言う圧延材の厚み(すなわち、1.5mm以下)は、後述する酸化皮膜の厚みを含まないものである。
The rolled material is obtained by rolling the high-purity aluminum ingot. The rolling process may be performed by adopting a normal method such as a method of passing the ingot between these rolls while applying pressure by sandwiching the ingot between a pair of rolls. Specific methods and conditions (processing temperature, processing time, processing rate, etc.) when performing the rolling process are not particularly limited, and may be appropriately set within a range not impairing the effects of the present invention.
The rolled material preferably has a thickness of 1.5 mm or less, more preferably 1.0 mm or less, in order to remarkably develop the effect of reducing electrical resistance by surface polishing treatment. That is, when the rolled material is a thin plate or foil material having such a small thickness, the effect of improving the electrical conductivity by the surface polishing treatment at a very low temperature becomes more remarkable. In addition, when a rolled material having a small thickness is used as a heat transfer material, there is an advantage that it is difficult to transmit vibration and has an anti-vibration effect. In addition, the thickness of the rolling material (namely, 1.5 mm or less) said here does not include the thickness of the oxide film mentioned later.
なお、前記高純度アルミニウムを圧延するに際しては、あらかじめ所望の形状に鋳造し、切削するなどの処理を施すこともできる。鋳造を行うには、例えば、高純度アルミニウムを加熱溶融して溶湯とし、得られた高純度アルミニウム溶湯を鋳型内で冷却固化させるといった通常の方法を採用すればよいが、これに限定されるものではない。鋳造の際の条件等も特に制限されないが、加熱温度は通常700〜800℃であり、加熱溶融は通常、減圧下あるいは不活性ガス(窒素ガス、アルゴンガス等)雰囲気下で、黒鉛製等のルツボ内で行なわれる。減圧下で加熱溶融を行なう場合には、通常1×10-2Pa〜1×10-4Pa、好ましくは、1×10-3Pa〜1×10-4Paとするのがよい。1×10-4Paを超える減圧下であっても得られる高純度アルミニウム材の性能上は問題ないが、設備等の観点から経済的に不利になる。 In addition, when rolling the high-purity aluminum, it is possible to perform a treatment such as casting into a desired shape and cutting in advance. For casting, for example, a normal method may be employed in which high-purity aluminum is heated and melted to form a molten metal, and the obtained high-purity aluminum molten metal is cooled and solidified in a mold, but is not limited thereto. is not. The conditions for casting are not particularly limited, but the heating temperature is usually 700 to 800 ° C., and the heating and melting is usually performed under reduced pressure or under an inert gas (nitrogen gas, argon gas, etc.) atmosphere made of graphite or the like. Performed in a crucible. When heat-melting is performed under reduced pressure, it is usually 1 × 10 −2 Pa to 1 × 10 −4 Pa, preferably 1 × 10 −3 Pa to 1 × 10 −4 Pa. There is no problem in the performance of the high-purity aluminum material obtained even under a reduced pressure exceeding 1 × 10 −4 Pa, but it is economically disadvantageous from the viewpoint of facilities and the like.
本発明の高純度アルミニウム材は、前記圧延材の表面に表面研磨処理が施されたものである。このように表面研磨処理を施すことにより、表面の凸部の量を低減することができ、その結果、薄板や箔材等の形状であっても、前述した高純度アルミニウムが有する電気伝導性を良好に発揮させ、極低温における電気抵抗率を下げることができる。 The high-purity aluminum material of the present invention is obtained by subjecting the surface of the rolled material to a surface polishing treatment. By performing the surface polishing treatment in this way, the amount of convex portions on the surface can be reduced, and as a result, the electrical conductivity of the high-purity aluminum described above can be obtained even in the shape of a thin plate or foil material. It can be satisfactorily exhibited and the electrical resistivity at extremely low temperatures can be lowered.
前記表面研磨処理の手法や条件等は、特に制限はなく、例えば、社団法人日本アルミニウム協会発行「アルミニウムハンドブック(第7版)」p180に記載のような公知の電解研磨や化学研磨等の方法を採用することができる。好ましくは電解研磨がよく、その場合、具体的には、圧延材を陽極に、黒鉛電極を陰極に用い、通常、過塩素酸とエタノールとの混合液中、15〜25Vの電圧で0.5〜5分間の条件で定電圧電解を行えばよい。 The surface polishing method and conditions are not particularly limited. For example, a known method such as electrolytic polishing or chemical polishing described in “Aluminum Handbook (7th edition)” p180 issued by the Japan Aluminum Association is used. Can be adopted. Preferably, electropolishing is preferable. In this case, specifically, a rolled material is used as an anode and a graphite electrode is used as a cathode, and usually in a mixed solution of perchloric acid and ethanol at a voltage of 15 to 25 V and 0.5. What is necessary is just to perform constant voltage electrolysis on the conditions for -5 minutes.
本発明において、表面研磨処理が施された圧延材の表面は、下記式
表面粗さ(μm)=計測部表面の凹凸部分の体積(μm3)/計測面積(μm2)
で求められる表面粗さ(以下、本明細書においては、これを「表面粗さ」と称する)が3μm未満となっていることが好ましい。換言すれば、表面研磨処理を、表面粗さが3μm未満となるように施すことが好ましいのである。
なお、前記表面粗さは、試料表面の三次元粗さ情報を計測することができるレーザー顕微鏡を用いて、表面の凹凸部分の体積を測定することにより求めることができる。このとき、計測面積は、より精度の高い結果を得るうえで、10000μm2以上とすることが望ましい。
In the present invention, the surface of the rolled material that has been subjected to surface polishing treatment has the following formula: surface roughness (μm) = volume of uneven portions on the surface of the measurement part (μm 3 ) / measurement area (μm 2 )
Is preferably less than 3 μm (hereinafter referred to as “surface roughness” in the present specification). In other words, the surface polishing treatment is preferably performed so that the surface roughness is less than 3 μm.
In addition, the said surface roughness can be calculated | required by measuring the volume of the uneven | corrugated | grooved part of a surface using the laser microscope which can measure the three-dimensional roughness information of the sample surface. At this time, the measurement area is desirably 10,000 μm 2 or more in order to obtain a more accurate result.
本発明の高純度アルミニウム材は、前記表面研磨処理が施された圧延材の表面が酸化皮膜で覆われたものであってもよい。この場合、酸化皮膜の厚みは、0.2〜2μmに制御することが、より優れた電気伝導性を発現させるうえで好ましい。酸化皮膜を形成する方法としては、特に制限されないが、例えば陽極酸化処理により形成すると、処理時間によって酸化皮膜の厚みを容易に制御できるので、好ましい。
前記陽極酸化処理にて酸化皮膜を形成する場合、例えば、圧延材を陽極に、黒鉛電極を陰極に用い、通常、0.01〜0.03A/cm2の電流密度で定電圧電解を行えばよい。陽極酸化処理に用いる電解液としては、例えば、硫酸水溶液、シュウ酸水溶液等が挙げられる。
The high-purity aluminum material of the present invention may be one in which the surface of the rolled material that has been subjected to the surface polishing treatment is covered with an oxide film. In this case, it is preferable to control the thickness of the oxide film to 0.2 to 2 μm in order to develop more excellent electrical conductivity. The method for forming the oxide film is not particularly limited, but it is preferable to form the oxide film by, for example, anodizing treatment because the thickness of the oxide film can be easily controlled by the treatment time.
In the case of forming an oxide film by the anodizing treatment, for example, using a rolled material as an anode and a graphite electrode as a cathode, a constant voltage electrolysis is usually performed at a current density of 0.01 to 0.03 A / cm 2. Good. Examples of the electrolytic solution used for the anodizing treatment include a sulfuric acid aqueous solution and an oxalic acid aqueous solution.
本発明の高純度アルミニウム材には、切削や圧延加工の際に生じることのある歪みを除去する目的で、焼鈍処理が施されていてもよい。焼鈍処理は、例えば400〜600℃で1時間以上保持することにより行うことができる。極低温において優れた電気伝導性を発揮させるうえでは、焼鈍処理の温度は450〜550℃とすることが好ましく、また、焼鈍処理は減圧雰囲気中で施されることが好ましい。なお、この焼鈍処理は、前記圧延材に表面研磨処理を施す前後どちらで行ってもよいが、極低温において優れた電気伝導性を発揮させるうえでは、焼鈍処理の後に表面研磨処理が施されていることが好ましい。 The high-purity aluminum material of the present invention may be annealed for the purpose of removing distortion that may occur during cutting or rolling. The annealing treatment can be performed by holding at 400 to 600 ° C. for 1 hour or more, for example. In order to exhibit excellent electrical conductivity at an extremely low temperature, the annealing treatment temperature is preferably 450 to 550 ° C., and the annealing treatment is preferably performed in a reduced-pressure atmosphere. In addition, this annealing treatment may be performed either before or after applying the surface polishing treatment to the rolled material, but in order to exhibit excellent electrical conductivity at an extremely low temperature, the surface polishing treatment is performed after the annealing treatment. Preferably it is.
以上のような本発明の高純度アルミニウム材は、形状に拘わらず極低温において低い電気抵抗率を発現しうるものである。具体的には、本発明の高純度アルミニウム材は、例えば、1.5mm以下の薄板や箔材といった形状としても、50K以下の極低温において低い電気抵抗率を発揮する。かかる高純度アルミニウム材は、超電導マグネット、極低温冷凍機、クライオポンプ等の部材として好適に用いられる。 The high-purity aluminum material of the present invention as described above can exhibit a low electrical resistivity at an extremely low temperature regardless of the shape. Specifically, the high-purity aluminum material of the present invention exhibits a low electrical resistivity at an extremely low temperature of 50 K or less, for example, in the form of a thin plate or foil material of 1.5 mm or less. Such a high-purity aluminum material is suitably used as a member such as a superconducting magnet, a cryogenic refrigerator, or a cryopump.
以下、実施例により本発明をより詳細に説明するが、本発明は、かかる実施例により限定されるものではない。
以下の実施例および比較例において、アルミニウム(高純度アルミニウム)中の各元素含有量、および表面粗さの測定は、以下の方法で行なった。
EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited by this Example.
In the following Examples and Comparative Examples, the content of each element in aluminum (high purity aluminum) and the measurement of the surface roughness were performed by the following methods.
<元素含有量>
アルミニウム(高純度アルミニウム)中の各元素含有量は、グロー放電質量分析法(サーモエレクトロン社製「VG9000」を使用)にて測定した。
<Element content>
The content of each element in aluminum (high purity aluminum) was measured by glow discharge mass spectrometry (using “VG9000” manufactured by Thermo Electron).
<表面粗さ>
表面粗さは、レーザー顕微鏡((株)キーエンス製「VK−9700」)を用いて、試料表面の三次元粗さ情報を、計測面積を280μm×200μm、1024×768ピクセルで、高さ方向情報を1μm毎に計測することにより、計測部表面の凹凸部分の体積を求め、下記式に基づき算出した。
表面粗さ(μm)=計測部表面の凹凸部分の体積(μm3)/計測面積(μm2)
<Surface roughness>
For the surface roughness, using a laser microscope ("VK-9700" manufactured by Keyence Corporation), the three-dimensional roughness information of the sample surface, the measurement area is 280 μm × 200 μm, 1024 × 768 pixels, height direction information Was measured every 1 μm to determine the volume of the uneven part on the surface of the measurement part, and calculated based on the following formula.
Surface roughness (μm) = Volume of uneven part on the surface of measurement part (μm 3 ) / Measurement area (μm 2 )
(実施例1)
純度99.92質量%の普通アルミニウムを三層電解法により精製して得られた純度99.999質量%のアルミニウム(Si=3質量ppm、Cu=2質量ppm、Mg=1質量ppm、Fe=2質量ppm、これら以外のその他の31元素<1ppm、不純物35元素合計<10質量ppm)を原料とし、これを一方向凝固法により精製して、純度99.9999質量%の高純度アルミニウムを得た。
Example 1
99.999 mass% aluminum obtained by refining ordinary aluminum with a purity of 99.92 mass% by a three-layer electrolytic method (Si = 3 mass ppm, Cu = 2 mass ppm, Mg = 1 mass ppm, Fe = 2 mass ppm, other 31 elements <1 ppm other than these, 35 impurities total <10 mass ppm) are used as raw materials and purified by a unidirectional solidification method to obtain high purity aluminum having a purity of 99.9999 mass%. It was.
詳しくは、黒鉛製ルツボ(内寸法:幅65mm×長さ400mm×高さ35mm)の中に1.8kgの原料アルミニウム(純度99.999質量%)を入れ、これを、炉体移動式管状炉の炉心管(石英製、内径100mm×長さ1000mm)の内部に収容し、1×10-2Paの減圧雰囲気にて炉体を700℃に温度制御して、原料アルミニウムを溶解させた後、炉体を30mm/時の速度で炉心管から引き抜くことにより端部から一方向に凝固させた。そして、長さ方向において凝固開始端より50mmの位置から凝固開始端より150mmの位置までを切り出し、幅65mm×長さ100mm×厚さ26mmの塊状の高純度アルミニウムを得た。 Specifically, 1.8 kg of raw material aluminum (purity 99.999 mass%) is placed in a graphite crucible (inner dimensions: width 65 mm × length 400 mm × height 35 mm), and this is used as a furnace body-movable tubular furnace The furnace core tube (made of quartz, inner diameter 100 mm × length 1000 mm) was stored in the furnace body at 700 ° C. in a reduced pressure atmosphere of 1 × 10 −2 Pa to dissolve the raw material aluminum, The furnace body was solidified in one direction from the end by being pulled out of the core tube at a speed of 30 mm / hour. Then, in the length direction, a portion from 50 mm from the solidification start end to 150 mm from the solidification start end was cut out to obtain massive high-purity aluminum having a width of 65 mm × length of 100 mm × thickness of 26 mm.
この高純度アルミニウム中の各元素含有量は、次の通りであった。すなわち、Si=0.37質量ppm、Cu=0.11質量ppm、Mg=0.12質量ppm;Fe=0.064質量ppm、Ti=0.035質量ppm、V=0.033質量ppm、Cr=0.04質量ppm、Zr=0.02質量ppm;前記35元素の合計含有量≦1質量ppm、である。 The content of each element in the high purity aluminum was as follows. That is, Si = 0.37 mass ppm, Cu = 0.11 mass ppm, Mg = 0.12 mass ppm; Fe = 0.064 mass ppm, Ti = 0.035 mass ppm, V = 0.033 mass ppm, Cr = 0.04 mass ppm, Zr = 0.02 mass ppm; the total content of the 35 elements ≦ 1 mass ppm.
次いで、上記で得られた高純度アルミニウム塊を、幅50mm×長さ50mm×厚さ20mmの大きさに切削加工し、これを室温下、幅約50mm×長さ約2000mm×厚さ0.5mmの大きさに圧延して、圧延板を得た。なお、圧延に際しては、厚さ20mmから厚さ8mmまでは1パス2mmとし、厚さ8mmから厚さ3mmまでは1パス1mmとし、厚さ3mmから厚さ0.5mmまでは1パス0.5mmとした。 Next, the high-purity aluminum lump obtained above was cut into a size of width 50 mm × length 50 mm × thickness 20 mm, and this was cut at room temperature about 50 mm wide × about 2000 mm long × 0.5 mm thick To obtain a rolled sheet. In rolling, one pass is 2 mm from 20 mm to 8 mm thick, one pass is 1 mm from 8 mm to 3 mm, and one pass is 0.5 mm from 3 mm to 0.5 mm. It was.
次に、得られた圧延板を、幅10mm×長さ150mmの大きさに3枚切り出し、それぞれ電解研磨法にて表面に表面研磨処理を施した。詳しくは、切り出した圧延板を陽極に、黒鉛電極を陰極に用い、電解研磨液として、過塩素酸:エタノール(体積比)=1:6の混合液(20℃)を用い、電圧20V、60秒間の条件で、定電圧電解を行った。表面研磨処理を施した各圧延板の表面粗さは1.4μmであった。 Next, three sheets of the obtained rolled sheet were cut into a size of width 10 mm × length 150 mm, and the surface was subjected to surface polishing treatment by electrolytic polishing. Specifically, the cut rolled plate is used as the anode, the graphite electrode is used as the cathode, and a mixed solution (20 ° C.) of perchloric acid: ethanol (volume ratio) = 1: 6 is used as the electropolishing liquid. Constant voltage electrolysis was performed under the conditions of seconds. The surface roughness of each rolled plate subjected to the surface polishing treatment was 1.4 μm.
その後、表面研磨処理した各圧延板を、それぞれ、(a)減圧度10-3Paの減圧雰囲気下で焼鈍する、(b)大気雰囲気下で焼鈍する、(c)純水中100℃で30分間煮沸するベーマイト処理を施した後、大気中で風乾し、その後、大気雰囲気下で焼鈍する、という3種類の処理に付し、本発明の高純度アルミニウム材(1−a)、(1−b)、(1−c)を得た。なお、各処理における焼鈍の条件は、500℃、3時間とした。 Thereafter, each rolled plate subjected to the surface polishing treatment is annealed in a reduced pressure atmosphere of (a) a degree of vacuum of 10 −3 Pa, (b) annealed in an air atmosphere, and (c) 30 ° C. at 100 ° C. in pure water. After performing the boehmite treatment which is boiled for a minute, it is air-dried in the air, and then subjected to three kinds of treatments, ie, annealing in the air atmosphere, and the high-purity aluminum material (1-a), (1- b) and (1-c) were obtained. The annealing conditions in each treatment were 500 ° C. and 3 hours.
得られた各高純度アルミニウム材を、4.2Kの液体ヘリウムまたは296Kの純水に浸漬して、それぞれ四端子法により電気抵抗を測定することにより、4.2Kにおける比抵抗値および296Kにおける比抵抗値を求めた。測定に際しては、電圧端子間距離は約100mmとし、測定電流は、4.2K(液体ヘリウム)の場合には3A、296K(純水)の場合には0.1Aとした。結果を表1に示す。 Each of the obtained high-purity aluminum materials was immersed in 4.2K liquid helium or 296K pure water, and the electrical resistance was measured by the four-terminal method, whereby the specific resistance value at 4.2K and the ratio at 296K were measured. The resistance value was determined. In the measurement, the distance between the voltage terminals was about 100 mm, and the measurement current was 3A for 4.2K (liquid helium) and 0.1A for 296K (pure water). The results are shown in Table 1.
(比較例1)
電解研磨法による表面研磨処理を施さないこと以外は実施例1と同様にして、高純度アルミニウム材を作製した。
すなわち、実施例1と同様にして得られた圧延板を、幅10mm×長さ150mmの大きさに3枚切り出し、電解研磨法による表面研磨処理を施すことなく、それぞれ、実施例1と同様の(a)、(b)および(c)の3種類の処理に付し、比較用の高純度アルミニウム材(C1−a)、(C1−b)、(C1−c)を得た。なお、表面研磨処理を施さない状態の各圧延板の表面粗さは4.1μmであった。
得られた高純度アルミニウム材について、実施例1と同様にして、4.2Kにおける比抵抗値および296Kにおける比抵抗値を求めた。結果を表1に示す。
(Comparative Example 1)
A high-purity aluminum material was produced in the same manner as in Example 1 except that the surface polishing treatment by the electrolytic polishing method was not performed.
That is, three rolled plates obtained in the same manner as in Example 1 were cut into a size of 10 mm wide × 150 mm long, and the same as in Example 1 without performing surface polishing treatment by electrolytic polishing. High-purity aluminum materials (C1-a), (C1-b), and (C1-c) for comparison were obtained by performing three types of treatments (a), (b), and (c). In addition, the surface roughness of each rolled sheet in a state where the surface polishing treatment was not performed was 4.1 μm.
About the obtained high purity aluminum material, it carried out similarly to Example 1, and calculated | required the specific resistance value in 4.2K, and the specific resistance value in 296K. The results are shown in Table 1.
(比較例2および3)
電解研磨法による表面研磨処理に代えて、粗面化処理を施したこと以外は実施例1と同様にして、高純度アルミニウム材を作製した。
すなわち、実施例1と同様にして得られた圧延板を、幅10mm×長さ150mmの大きさに3枚ずつ切り出し、比較例2では粗目エメリー紙(♯320)を用い、比較例3では細目エメリー紙(♯1200)を用い、湿式研磨にて表面に粗面化処理を施した。粗面化処理を施した各圧延板の表面粗さは、比較例2では4.3μm、比較例3では7.3μmであった。
その後、粗面化処理した各圧延板を、それぞれ、実施例1と同様の(a)、(b)および(c)の3種類の処理に付し、比較例2では比較用の高純度アルミニウム材(C2−a)、(C2−b)、(C2−c)を、比較例3では比較用の高純度アルミニウム材(C3−a)、(C3−b)、(C3−c)を得た。
得られた高純度アルミニウム材について、実施例1と同様にして、4.2Kにおける比抵抗値および296Kにおける比抵抗値を求めた。結果を表1に示す。
(Comparative Examples 2 and 3)
A high-purity aluminum material was produced in the same manner as in Example 1 except that a surface roughening treatment was performed instead of the surface polishing treatment by the electrolytic polishing method.
That is, the rolled plates obtained in the same manner as in Example 1 were cut into three pieces each having a width of 10 mm and a length of 150 mm. In Comparative Example 2, coarse emery paper (# 320) was used. Using emery paper (# 1200), the surface was roughened by wet polishing. The surface roughness of each rolled plate subjected to the roughening treatment was 4.3 μm in Comparative Example 2 and 7.3 μm in Comparative Example 3.
Thereafter, each of the roughened rolling plates was subjected to the same three types of treatments (a), (b) and (c) as in Example 1, and in Comparative Example 2, high-purity aluminum for comparison. In Comparative Example 3, the materials (C2-a), (C2-b), and (C2-c) were obtained, and comparative high-purity aluminum materials (C3-a), (C3-b), and (C3-c) were obtained. It was.
About the obtained high purity aluminum material, it carried out similarly to Example 1, and calculated | required the specific resistance value in 4.2K, and the specific resistance value in 296K. The results are shown in Table 1.
(実施例2)
実施例1と同様にして得られた圧延板を、幅10mm×長さ150mmの大きさに切り出し、減圧度10-2Paの減圧雰囲気下、600℃、3時間の条件で焼鈍処理を施した後、炉内で室温まで冷却し、次いで、電解研磨法にて表面に表面研磨処理を施して、本発明の高純度アルミニウム材(2)を得た。詳しくは、表面研磨処理は、焼鈍処理を施した圧延板を陽極に、黒鉛電極を陰極に用い、電解研磨液として、過塩素酸:エタノール(体積比)=1:6の混合液(20℃)を用い、電圧20V、60秒間の条件で、定電圧電解を行った。表面研磨処理を施した圧延板(すなわち、高純度アルミニウム材(2))の表面粗さは1.4μmであった。
(Example 2)
A rolled plate obtained in the same manner as in Example 1 was cut into a size of width 10 mm × length 150 mm and annealed at 600 ° C. for 3 hours in a reduced pressure atmosphere with a reduced pressure of 10 −2 Pa. Then, it cooled to room temperature in the furnace, and then surface-polished by the electrolytic polishing method, and the high purity aluminum material (2) of this invention was obtained. Specifically, the surface polishing treatment uses an annealed rolled plate as an anode, a graphite electrode as a cathode, and a perchloric acid: ethanol (volume ratio) = 1: 6 liquid mixture (20 ° C.) as an electrolytic polishing liquid. ), And constant voltage electrolysis was performed under the conditions of a voltage of 20 V and 60 seconds. The surface roughness of the rolled plate subjected to the surface polishing treatment (that is, the high-purity aluminum material (2)) was 1.4 μm.
得られた高純度アルミニウム材について、実施例1と同様にして、4.2Kにおける比抵抗値および296Kにおける比抵抗値を求め、さらに、下記式から残留抵抗値(RRR)を算出した。結果を表2に示す。
RRR=(296Kにおける比抵抗値)/(4.2Kにおける比抵抗値)
About the obtained high purity aluminum material, it carried out similarly to Example 1, calculated | required the specific resistance value in 4.2K, and the specific resistance value in 296K, and also computed the residual resistance value (RRR) from the following formula. The results are shown in Table 2.
RRR = (specific resistance value at 296K) / (specific resistance value at 4.2K)
(実施例3〜5)
実施例2で得られた高純度アルミニウム材(2)に、陽極酸化処理を実施例毎に処理時間を変えて施すことにより、表面に種々の厚みの酸化皮膜を備えた本発明の高純度アルミニウム材(3)、(4)、(5)を得た。すなわち、高純度アルミニウム材(2)を陽極に、黒鉛電極を陰極に用い、電解液として15%硫酸水溶液(20℃)を用い、電流密度0.013A/cm2の条件で、実施例3では1分間、実施例4では2分間、実施例5では20分間、定電圧電解を行った。得られた高純度アルミニウム材表面の酸化皮膜の厚さを、断面のSEM写真に基づき測定したところ、実施例3で得られた高純度アルミニウム材(3)は0.4μm、実施例4で得られた高純度アルミニウム材(4)は1μm、実施例5で得られた高純度アルミニウム材(5)は7μmであった。
得られた高純度アルミニウム材について、実施例1と同様にして、4.2Kにおける比抵抗値および296Kにおける比抵抗値を求め、さらに、実施例2と同様に残留抵抗値(RRR)を算出した。結果を表2に示す。
(Examples 3 to 5)
The high purity aluminum material (2) obtained in Example 2 is subjected to anodic oxidation treatment with varying treatment time for each Example, whereby the high purity aluminum of the present invention having oxide films with various thicknesses on the surface. Materials (3), (4) and (5) were obtained. That is, in Example 3, a high-purity aluminum material (2) was used as the anode, a graphite electrode was used as the cathode, a 15% sulfuric acid aqueous solution (20 ° C.) was used as the electrolyte, and the current density was 0.013 A / cm 2. Constant voltage electrolysis was performed for 1 minute, 2 minutes in Example 4, and 20 minutes in Example 5. When the thickness of the oxide film on the surface of the obtained high-purity aluminum material was measured based on the SEM photograph of the cross section, the high-purity aluminum material (3) obtained in Example 3 was 0.4 μm and obtained in Example 4. The obtained high purity aluminum material (4) was 1 μm, and the high purity aluminum material (5) obtained in Example 5 was 7 μm.
About the obtained high purity aluminum material, it carried out similarly to Example 1, calculated | required the specific resistance value in 4.2K, and the specific resistance value in 296K, and also calculated the residual resistance value (RRR) similarly to Example 2. . The results are shown in Table 2.
(実施例6〜9)
実施例1と同様にして得られた高純度アルミニウム塊を、幅50mm×長さ50mm×厚さ20mmの大きさに切削加工し、これを室温下、圧延して、実施例毎に大きさ(厚み)の異なる圧延板を得た。すなわち、実施例6では幅約50mm×長さ約500mm×厚さ2mmの大きさに圧延し、実施例7では幅約50mm×長さ約1000mm×厚さ1mmの大きさに圧延し、実施例8では幅約50mm×長さ約2000mm×厚さ0.5mmの大きさに圧延し、実施例9では幅約50mm×長さ約5000mm×厚さ0.2mmの大きさに圧延した。なお、圧延に際しては、厚さ20mmから厚さ8mmまでは1パス2mmとし、厚さ8mmから厚さ3mmまでは1パス1mmとし、厚さ3mmから厚さ0.5mmまでは1パス0.5mmとし、厚さ0.5mmから厚さ0.2mmまでは1パス0.1mmとした。
(Examples 6 to 9)
A high-purity aluminum lump obtained in the same manner as in Example 1 was cut into a size of 50 mm wide × 50 mm long × 20 mm thick, and this was rolled at room temperature. Rolled plates with different thicknesses were obtained. That is, in Example 6, rolled to a size of about 50 mm wide × about 500 mm long × 2 mm thick, and in Example 7, rolled to a size of about 50 mm wide × about 1000 mm long × 1 mm thick. No. 8 was rolled to a size of about 50 mm wide × about 2000 mm long × 0.5 mm thick, and Example 9 was rolled to a size of about 50 mm wide × about 5000 mm long × 0.2 mm thick. In rolling, one pass is 2 mm from 20 mm to 8 mm thick, one pass is 1 mm from 8 mm to 3 mm, and one pass is 0.5 mm from 3 mm to 0.5 mm. From a thickness of 0.5 mm to a thickness of 0.2 mm, one pass was 0.1 mm.
次に、各実施例とも、得られた圧延板を幅10mm×長さ150mmの大きさに2枚ずつ切り出した。そして、切り出した一方に、実施例1と同様に電解研磨法にて表面に表面研磨処理を施して、表面粗さを1.4μmとした後、大気雰囲気下、500℃、3時間の条件で焼鈍処理を施し、本発明の高純度アルミニウム材(6)、(7)、(8)および(9)を得た。 Next, in each example, the obtained rolled sheets were cut into two pieces each having a width of 10 mm and a length of 150 mm. Then, one of the cut outs was subjected to a surface polishing treatment by an electrolytic polishing method in the same manner as in Example 1 to set the surface roughness to 1.4 μm, and then in an air atmosphere at 500 ° C. for 3 hours. An annealing treatment was performed to obtain high-purity aluminum materials (6), (7), (8) and (9) of the present invention.
得られた高純度アルミニウム材について、極低温における表面研磨処理による電気伝導性の向上効果を評価した。
すなわち、上記で2枚ずつ切り出した圧延板の残りの一方に、表面研磨処理を施さず、表面粗さが4.1μmである状態で、上記実施例6〜9と同様の条件(大気雰囲気下、500℃、3時間)で焼鈍処理を施し、各実施例ごとに、ブランクとする表面研磨処理なしの高純度アルミニウム材(6’)、(7’)、(8’)および(9’)を得た。
本発明の高純度アルミニウム材(6)〜(9)と、上記で得た高純度アルミニウム材(6’)〜(9’)について、実施例1と同様にして4.2Kにおける比抵抗値を求め、各実施例ごとに、ブランク(表面研磨処理なし)の4.2Kでの比抵抗値をx、本発明の高純度アルミニウム材(表面研磨処理あり)の4.2Kでの比抵抗値をyとして、下記式から比抵抗値低下率を算出した。
比抵抗値低下率(%)=〔(x−y)/x〕×100
なお、参考として、各高純度アルミニウム材の296Kにおける比抵抗値も合わせて求めた。これらの結果を表3に示す。
About the obtained high purity aluminum material, the improvement effect of the electrical conductivity by the surface polishing process at cryogenic temperature was evaluated.
That is, the same conditions as in Examples 6 to 9 above (under atmospheric conditions) in the state where the remaining one of the rolled plates cut out two by two is not subjected to surface polishing treatment and the surface roughness is 4.1 μm. , 500 ° C., 3 hours) High purity aluminum materials (6 ′), (7 ′), (8 ′) and (9 ′) without surface polishing treatment to be blanks for each example. Got.
About the high-purity aluminum materials (6) to (9) of the present invention and the high-purity aluminum materials (6 ′) to (9 ′) obtained above, the specific resistance value at 4.2 K was obtained in the same manner as in Example 1. For each example, the specific resistance value at 4.2K of the blank (without surface polishing treatment) is x, and the specific resistance value at 4.2K of the high-purity aluminum material of the present invention (with surface polishing treatment) is obtained. The specific resistance value reduction rate was calculated from the following formula as y.
Specific resistance value decrease rate (%) = [(xy) / x] × 100
For reference, the specific resistance value at 296K of each high-purity aluminum material was also obtained. These results are shown in Table 3.
Claims (4)
前記圧延材の表面は下記式
表面粗さ(μm)=計測部表面の凹凸部分の体積(μm 3 )/計測面積(μm 2 )
で求められる表面粗さが3μm未満となっていることを特徴とする、50K以下の極低温で使用するための高純度アルミニウム材。 It consists of a rolled material of high-purity aluminum having a purity of 99.9999% by mass or more, and the surface of the rolled material is subjected to surface polishing treatment .
The surface of the rolled material is
Surface roughness (μm) = volume of uneven portion on the surface of the measurement part (μm 3 ) / measurement area (μm 2 )
A high-purity aluminum material for use at an extremely low temperature of 50K or less, characterized in that the surface roughness required by 1 is less than 3 μm .
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