JP5483574B2 - MEMS switch - Google Patents

Description

  The present invention relates to a MEMS switch.

  In recent years, small terminal devices capable of wireless communication, such as mobile phones, PDAs (Personal Digital Assistants), and PCs (Personal Computers), have various types including high-frequency regions of several GHz or more as broadband and globalization progress. Therefore, it is required to support a plurality of communication systems using various frequency bands. In general, in a small terminal device, correspondence to a plurality of communication methods is realized by switching an antenna or a transmission / reception circuit used for communication by a high-frequency switch. Considering the characteristics of a small terminal device, it is desirable that the high-frequency switch has low insertion loss and high isolation, is small and low in profile, can be driven at a low voltage, and has low power consumption. Therefore, MEMS (Micro Electro Mechanical System) switches are attracting attention as high-frequency switches suitable for switching such high-frequency signals of several GHz band or higher. This MEMS switch has a mechanically movable contact and can be expected to have low insertion loss and high isolation in a wide frequency band including a high frequency region (see Non-Patent Document 1). In particular, a MEMS switch driven by electrostatic attraction has a feature that power consumption is small.

  Such MEMS switches can be roughly divided into two systems. One is a system called a relay system. As shown in FIG. 8, the MEMS switch of this system has a first signal line 110 and a second signal fixed on a substrate 100 in an insulated state. A line 120 and a movable signal line 130 having conductivity and provided above the first signal line 110 and the second signal line 120 and supported so as to be movable toward the substrate 100 are provided. In this relay type MEMS switch, the movable signal line 130 is moved downward as shown in FIG. 9 from the state where the movable signal line 130 is separated from the first signal line 110 and the second signal line 120 as shown in FIG. By switching to the state where the first signal line 110 and the second signal line 120 are in contact with each other, the state is switched from the OFF state to the ON state.

  The other is a method referred to as a direct contact method, and a MEMS switch of this method is provided with a first signal line 210 fixed on the substrate 200 and a vertically extending from the substrate 200 as shown in FIG. And a second signal line 220 composed of a horizontally extending rod-shaped beam member 222 having one end supported by the support member 221 and a contact provided at the other end. Is. In this direct contact method, as shown in FIG. 11, by moving the contact point of the beam member 222 to the substrate 200 side by, for example, electrostatic attraction or piezoelectric effect, and bringing the contact point into contact with the first signal line 210, Switching from the OFF state to the ON state.

  A specific configuration for moving the beam member 222 in the direct contact method is shown in FIGS. In the direct contact method, the second signal line 220 is provided with a moving electrode portion 222a having a substantially rectangular shape in plan view extended in a direction along the plane direction of the substrate 200 at the center portion of the beam member 222. A control electrode 230 having an outer shape equivalent to that of the moving electrode portion 222a is provided on the substrate 200 facing the 222a. In such a direct contact method, a voltage is applied to the moving electrode unit 222a and the control electrode 230, whereby the moving electrode unit 222a is driven by electrostatic attraction generated by a potential difference between these electrodes.

G.M.Rebeiz and J.B.Muldavin, “RF MEMS switches and switch circuits”, IEEE Microwave Magazine, Vol.2, No.4, pp.59-71, Dec.2001.

  However, the above-described relay method and direct contact method have the following problems.

  As for the relay method, the first signal line 110 and the second signal line 120 are made conductive through at least two contact points, so that there is a high possibility that the loss increases compared to the direct contact method with one contact point. . For example, as shown in FIG. 14, when the movable signal line 130 comes into contact with the signal line with a slight inclination, it may not be conducted due to poor contact or the loss may increase.

  On the other hand, for the direct contact method, it is necessary to increase the area of the moving electrode part 222a in order to achieve driving at a low voltage required for a high-frequency switch, but if this area is increased, the moving electrode part 222a and the substrate 200 or The capacitance component formed between the other electrodes is increased. Then, as the signal to be transmitted becomes higher, the inflow of signals from the substrate 200 and other electrodes to the signal line and the outflow of signals from the signal line to the substrate 200 and other electrodes are likely to occur. A decrease in isolation in the conductive state and an increase in insertion loss in the conductive state occur.

  Thus, it has been difficult to achieve high isolation and low loss in the conventional MEMS switch.

  Accordingly, an object of the present invention is to provide a MEMS switch capable of realizing high isolation and low loss.

  In order to solve the problems as described above, a MEMS switch according to the present invention includes a substrate having at least an upper surface made of an insulating material, a first signal line provided on the substrate, and the first signal line. A second signal line provided on the substrate apart from the substrate and a moving unit that is displaced by an external signal, and a MEMS mechanism provided on the substrate apart from the first signal line and the second signal line; And an insulating connecting member for connecting a part of the second signal line and the moving part in a state of being insulated from each other, and the first signal line and the second signal line are formed by the displacement of the moving part. It is characterized by contacting.

In the MEMS switch, the second signal line includes a columnar support member suspended from the substrate, a flexible spring member having one end supported by the support portion and extending in the planar direction of the substrate, You may make it comprise from the other end of this spring member, and the contact member arrange | positioned facing the 1st signal wire | line in the direction perpendicular | vertical with respect to the plane of a board | substrate.
Here, the second signal line may be arranged so that only the contact member faces the first signal line in a direction perpendicular to the plane of the substrate.

  In the MEMS switch, each of the first signal line and the second signal line may have a substantially linear shape in plan view.

  The MEMS switch may further include a pair of ground electrodes provided at positions on the substrate that sandwich the first signal line and the second signal line.

In the MEMS switch, the first signal line and the second signal line are both provided on a straight line in plan view, and the moving unit is connected to the straight line connecting the first signal line and the second signal line. Two lines may be arranged symmetrically, and the insulating connecting member may connect the two moving parts and the second signal line.
Here, the contact point of the second signal line may be provided on the action line of the resultant force that causes the displacement of the moving unit.

  Further, in the MEMS switch, the MEMS mechanism has a columnar base member that is suspended from the substrate, and a flexibility that extends in a direction along the planar direction of the substrate with one end connected to the upper end of the base member. A spring member having a flat plate-like electrode to which the other end of the spring is connected, and a base member spaced apart from the base member, and in a direction perpendicular to the plane direction of the moving part and the substrate. You may make it comprise from the 2nd electrode which is arrange | positioned facing and displaces a moving part by the electrostatic attraction by a potential difference with a moving part.

  According to the present invention, since the first signal line and the contact member of the second signal line are in direct contact with each other, the contact failure between the first signal line and the second signal line is reduced. Loss can be realized. In addition, a MEMS mechanism having a moving part that is displaced by an external signal is provided, a part of the second signal line is connected to the moving part by an insulating connecting member, and the first signal line is displaced by displacing the moving part. Since the capacitance component formed between the second signal line and the other member is reduced by bringing the second signal line into contact with the second signal line, a signal flows from the other member to the second signal line. In addition, it is difficult for signals to flow out from the second signal line to other members, and high isolation and low loss can be realized.

FIG. 1 is a plan view schematically showing the configuration of a MEMS switch according to the present invention. FIG. 2 is a view showing a cut surface taken along the line II of FIG. FIG. 3 is a diagram showing a cut surface taken along line II-II in FIG. 4 is a cross-sectional view taken along the line II-II of FIG. 1 in a state where the first signal line 2 and the second signal line 3 are conductive. FIG. 5 is a plan view schematically showing a modification of the MEMS switch according to the present invention. FIG. 6 is a view showing a cut surface taken along line III-III in FIG. FIG. 7 is a view showing a cut surface taken along line IV-IV in FIG. FIG. 8 is a front view schematically showing a configuration example of a conventional MEMS switch. FIG. 9 is a front view showing a conductive state of the MEMS switch of FIG. FIG. 10 is a front view schematically showing another configuration example of the conventional MEMS switch. FIG. 11 is a front view showing a conductive state of the MEMS switch of FIG. FIG. 12 is a front view schematically showing another configuration example of the conventional MEMS switch. FIG. 13 is a plan view of FIG. FIG. 14 is a front view showing an operation example of the MEMS switch of FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<Configuration of MEMS switch>
As shown in FIGS. 1 to 3, the MEMS switch according to the present embodiment includes a substrate 1, a rod-shaped first signal line 2 provided on the substrate, and a distance from the first signal line 2. In addition, the second signal line 3 provided on the same straight line as the first signal line 2 is separated from the straight line connecting the first signal line 2 and the second signal line 3 on the substrate 1. A first moving mechanism 4 and a second moving mechanism 5 having symmetrical shapes provided symmetrically to each other, and a first moving electrode 43 which will be described later of the first moving mechanism 4 are provided below. The second control electrode 7 provided below the second movement electrode 53 described later of the second movement mechanism 5 is connected to the first movement mechanism 4 and the second movement mechanism 5. In addition, a bar-shaped insulating connecting member 8 connected to the second signal line 3 is provided. For convenience, the extending direction of the first signal line 2 is “X direction”, the direction perpendicular to the X direction in the plane of the substrate 1 is “Y direction”, and the direction perpendicular to the plane of the substrate 1 is “ It is called “Z direction”. In the X direction, the side from the first signal line 2 toward the second signal line 3 is a positive side. Similarly, in the Y direction, the side from the first moving mechanism 4 toward the second moving mechanism 5 is a positive side. Similarly, in the Z direction, the side away from the substrate 1 is the upper side or the upper side, and the side approaching the substrate 1 is the lower side or the lower side. Moreover, in FIG.2, FIG.3, description is abbreviate | omitted except a cut surface.

  The substrate 1 is, for example, a silicon substrate in which an insulating film such as a silicon oxide film is formed on the upper surface (hereinafter referred to as “upper surface”) of the substrate 1, an alumina substrate, a glass substrate, or the like. Consists of materials. As a result, the first signal line 2, the second signal line 3, the first moving mechanism 4 and the second moving mechanism 5 that are provided separately on the upper surface of the substrate 1 are insulated from each other. Become.

  The first signal line 2 is composed of a rod-shaped member that extends from one end disposed at a substantially central portion of the substrate 1 to the negative side in the X direction and has the other end positioned at the edge of the substrate 1. The edge of the first signal line 2 on the edge side of the substrate 1 is connected to an external circuit by a signal line (not shown), and exchanges between the first signal line 2 and the second signal line 3. The signal to be input is input or output through the signal line. Such a first signal line 2, a second signal line 3, a first moving mechanism 4, a second moving mechanism 5, a first control electrode 6, and a second control electrode 7 described below. Is made of a conductive material such as Au, Al, Cu, or Ni.

  The second signal line 3 includes a columnar support member 31 suspended from the substrate 1 and a rod-shaped beam having one end connected to the upper end of the support member 31 and extending from the one end to the negative side in the X direction. A member 32 and a contact member 33 provided at the other end of the beam member 32 located substantially above the central portion of the substrate 1 and projecting downward are integrally formed. Here, the one end of the first signal line 2 is located below the contact member 33. Note that the support member 31 is connected to an external circuit by a signal line (not shown), and a signal exchanged between the first signal line 2 and the second signal line 3 is input via the signal line. Is output.

  In the first signal line 2 and the second signal line 3, if one is the signal input side and the other is the signal output side, which one is the input side or output side can be freely set as appropriate. can do.

  The first moving mechanism 4 includes a columnar first base member 41 suspended from the substrate 1 and one end connected to the upper end of the first base member 41, and from one end to the positive side in the Y direction. An extending rod-shaped first spring member 42 and a plate-like first moving electrode 43 having a substantially rectangular shape in plan view connected to the other end of the first spring member 42 are provided. Is formed. Here, the width of the first spring member 42, that is, the length in the X direction is shorter than the width of the first moving electrode 43 so that the first spring member 42 can be elastically deformed at least in the Z direction. Is formed. In addition, the first moving electrode 43 is disposed so that the side thereof is along the X direction or the Y direction, and at the substantially central portion of the side along the X direction that is disposed opposite to the second moving mechanism 5. The other end of the first spring member 42 is connected and supported by the first spring member 42 so as to be movable in the Z direction. Further, the first moving electrode 43 is disposed to face the first control electrode 6. Further, the first base member 41 is electrically connected to a control device (not shown), and a drive voltage applied from the control device is supplied to the first moving electrode 43. Such a 1st moving mechanism 4 functions as a MEMS mechanism with the 1st control electrode 6, and the 1st moving electrode 43 functions as a moving part.

  The second moving mechanism 5 includes a columnar second base member 51 suspended from the substrate 1 and one end connected to the upper end of the second base member 51 to the negative side in the Y direction. An existing rod-shaped spring member 52 and a plate-like second moving electrode 53 having a substantially rectangular shape in plan view, to which the other end of the spring member 52 is connected, are integrally formed. Here, the width of the second spring member 52, that is, the length in the X direction is shorter than the width of the second moving electrode 53 so that the second spring member 52 can be elastically deformed at least in the Z direction. Is formed. In addition, the second moving electrode 53 is disposed so that the side thereof is along the X direction or the Y direction, and at the substantially central portion of the side along the X direction that is disposed to face the first moving mechanism 4. The other end of the second spring member 52 is connected, and is supported by the second spring member 52 so as to be movable in the Z direction. Further, the second moving electrode 53 is disposed to face the second control electrode 7. Further, the second base member 51 is electrically connected to a control device (not shown), and a drive voltage applied from the control device is supplied to the second moving electrode 53. Such a second moving mechanism 5 functions as a MEMS mechanism together with the second control electrode 7, and the second moving electrode 53 functions as a moving unit.

  The first control electrode 6 has the same outer shape as the first moving electrode 43 and is provided on the substrate 1 below the first moving electrode 43. The first control electrode 6 is electrically connected to a control device (not shown), and a drive voltage is supplied from the control device.

  The second control electrode 7 has the same outer shape as the second moving electrode 53, and is provided on the substrate 1 below the second moving electrode 53. The second control electrode 7 is electrically connected to a control device (not shown), and a drive voltage is supplied from the control device.

  The insulating connecting member 8 is composed of a rod-like member extending in the Y direction, one end connected to the upper surface of the first moving electrode 43 and the other end connected to the upper surface of the second moving electrode 53. The lower surface of the central portion of the insulating connecting member 8 is connected to the upper surface of the contact member 33 of the second signal line 3. Thereby, the insulating connection member 8 connects the second signal line 3, the first moving mechanism 4, and the second moving mechanism 5 while being insulated from each other. Such an insulating connecting member 8 is made of a rigid body made of an insulating material such as silicon oxide or silicon nitride.

  Such a MEMS switch can be manufactured by performing film formation or selective etching using a well-known micromachine manufacturing technique.

<Operation of MEMS switch>
Next, the operation of the MEMS switch according to this embodiment will be described.

  From a control device (not shown), the first moving electrode 43 of the first moving mechanism 4, the first control electrode 6 disposed opposite to the first moving electrode 43, and the second of the second moving mechanism 5 When a driving voltage is applied to each of the movable electrode 53 and the second control electrode 7 disposed opposite to the second movable electrode, the first voltage is generated by electrostatic attraction generated by a potential difference between the opposed electrodes. The moving electrode 43 is pulled toward the first control electrode 6 and the second moving electrode 53 is pulled toward the second control electrode 7. At this time, since the contact member 33 is mechanically connected to the first moving electrode 43 and the second moving electrode 53 by the insulating connecting member 8, the second signal line 3 has the first moving electrode 43 and As the second moving electrode 53 moves, the contact member 33 also moves together. The displacement amount in this movement includes the electrostatic attraction force, the beam member 32 of the second signal line 3, the first spring member 42 of the first moving mechanism 4, and the second spring member of the second moving mechanism 5. It changes by balance with the restoring force by elasticity with which 52 is provided. That is, the contact member 33 is displaced toward the substrate 1 provided with the first control electrode 6 and the second control electrode 7 so that the electrostatic attraction generated by the potential difference is equal to the restoring force generated by the displacement. In addition, the amount of displacement increases as the potential difference increases and the electrostatic attractive force increases. Therefore, when the potential difference becomes larger than a predetermined value, the lower end of the contact member 33 of the second signal line 3 comes into contact with the first signal line 2 as shown in FIG. As a result, the first signal line 2 and the second signal line 3 become conductive.

  When the potential difference is made smaller than the predetermined value from the state in which the contact member 33 of the second signal line 3 is in contact with the first signal line 2, the beam member 32 of the second signal line 3, These members move away from the substrate 1 by the restoring force of the first spring member 42 of the first moving mechanism 4 and the second spring member 52 of the second moving mechanism 5, and the contact member 33 moves away from the first signal line 2. Separate. As a result, the first signal line 2 and the second signal line 3 become non-conductive.

  As described above, according to the present embodiment, the first signal line 2 and the second signal line 3 are in direct contact with each other because the contact members 33 of the first signal line 2 and the second signal line 3 are in direct contact with each other. As a result, the number of contact failures between the two is reduced, and a reduction in loss can be realized. In the present embodiment, this can be realized without increasing the size and driving voltage of the MEMS switch.

  In addition, the first moving mechanism 4 and the second moving mechanism 5 are provided, and the first moving mechanism 4 and the second moving mechanism 5 and the contact member 33 are connected by the insulating connecting member 8, whereby the second moving mechanism 4 and the second moving mechanism 5 are connected. Since the capacitance component formed between the signal line 3 and the other member becomes small, the inflow of a signal from the other member to the second signal line 3 and the signal from the second signal line 3 to the other member. As a result, high isolation and low loss can be realized. In the present embodiment, this can be realized without increasing the size and driving voltage of the MEMS switch.

  For the contact member 33, the resultant electrostatic attraction generated between the first moving electrode 43 and the first control electrode 6 and between the second moving electrode 53 and the second control electrode 7. Since the force with which the contact member 33 is pressed against the first signal line 2 is increased, the contact area between the contact member 33 and the first signal line 2 can also be increased. Thereby, since the electrical resistance in the contact surface of the contact member 33 and the 1st signal wire | line 2 reduces, the reduction in loss of a MEMS switch is realizable. In the present embodiment, as described above, the first moving electrode 43 and the first control electrode 6 and the second moving electrode 53 and the second control electrode 7 are formed to have the same size. It is assumed that the resultant electrostatic attraction generated by these acts on the symmetry center of these electrodes. Therefore, in the present embodiment, the contact member 33 is formed at the center of symmetry. As a result, the loss of the MEMS switch can be reduced.

  Further, in the present embodiment, the contact member 33 that protrudes downward from the other end of the beam member 32 of the second signal line 3 is provided, and only the contact member 33 is opposed to the first signal line 2. Since the capacitance formed between the first signal line 2 and the second signal line 3 becomes small, high isolation of the MEMS switch can be realized.

  In addition, when a bent portion that is bent in the plane direction is provided in the signal line, reflection at the bent portion increases as the signal becomes higher in frequency, so that it is assumed that the insertion loss increases. Therefore, in the present embodiment, the first signal line 2 and the second signal line 3 are formed linearly in the planar direction. Thus, a reduction in loss can be realized.

  In addition, when the first signal line 2 or the second signal line 3 and the first control electrode 6 or the second control electrode 7 overlap in the plane direction of the substrate 1, the overlapping signal line and the control electrode have a capacitance. An electrode pair is formed. Then, since the capacitance formed by the first signal line 2 and the second signal line 3 increases, the signal leaking from the input-side signal line to the output-side signal line increases as the signal becomes higher in frequency, that is, MEMS. Switch isolation is reduced. Further, the signal flowing out from the output side signal line to the control electrode also increases. Therefore, in the present embodiment, the first signal line 2 or the second signal line 3 and the first control electrode 6 or the second control electrode 7 are not overlapped in the planar direction of the substrate 1. . Thereby, high isolation and low loss of the MEMS switch can be realized.

  Further, in the present embodiment, as shown in FIGS. 5 to 7, plates that are suspended from the upper surface of the substrate 1 on both the positive and negative sides in the Y direction of the first signal line 2 and the second signal line 3. The ground electrodes 10 and 11 may be provided. The ground electrodes 10 and 11 are spaced apart from the first signal line 2 and the second signal line 3 by a predetermined distance so as to sandwich the first signal line 2 and the second signal line 3 from the positive and negative sides in the Y direction. Arranged. Further, the height in the Z direction is equivalent to that of the first signal line 2, the first control electrode 6, and the second control electrode 7 as shown in FIG. 6 in the vicinity of the contact member 33. In a position away from the contact member 33. As shown in FIG. 7, it is equivalent to the first moving electrode 43 and the second moving electrode 53. By providing the ground electrodes 10 and 11 as described above, the dielectric loss in the substrate 1 is reduced as compared with the case where the ground electrodes 10 and 11 are not provided. As a result, the loss of the MEMS switch can be reduced. In FIG. 6 and FIG. 7, description is omitted except for the cut surface.

  In the present embodiment, the case where the first moving mechanism 4 and the second moving mechanism 5 are moved using the electrostatic attractive force as a driving force has been described as an example. However, the first moving mechanism 4 and the second moving mechanism are used. The driving force of the mechanism 5 is not limited to electrostatic attraction, and can be set freely as appropriate. For example, the first moving electrode 43 and the second moving electrode 53, or the first control electrode 6 and the second control electrode 7 are composed of piezoelectric elements, and the driving force generated when a voltage is applied to the piezoelectric elements. May be used.

  In the present embodiment, the case where the insulating connecting member 8 is connected to the upper surface of the contact member 33 of the second signal line 3 has been described as an example. However, if the contact member 33 is displaced, the second connection is performed. The portion connected to the signal line 3 is not limited to the upper surface of the contact member 33 and can be set freely as appropriate. For example, it may be connected to the upper surface of the beam member 32.

  In the present embodiment, the case where the contact member 33 is supported by the rod-shaped beam member 32 has been described as an example. However, if the contact member 33 is electrically connected to the support member 31, the contact member 33 is replaced with the contact member 33. The structure for supporting is not limited to a rod-shaped member such as the beam member 32, and for example, a linear member or the like can be set as appropriate.

  Further, in the present embodiment, the case where two moving parts of the first moving mechanism 4 and the second moving mechanism 5 are provided has been described as an example, but the number of moving parts is not limited to two. For example, the moving parts One or three or more may be provided. When only one moving unit is provided, for example, the second moving mechanism 5 is deleted in the present embodiment, and the second signal line 3 and the first moving mechanism 4 are connected by the insulating connecting member 8. What should I do? On the other hand, when three or more moving parts are provided, for example, the moving parts may be provided in parallel along the extending direction of the insulating connecting member 8.

  The present invention can be applied to various microstructures manufactured by MEMS technology or the like, such as a MEMS switch.

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 2 ... 1st signal line, 3 ... 2nd signal line, 4 ... 1st moving mechanism, 5 ... 2nd moving mechanism, 6 ... 1st control electrode, 7 ... 2nd control Electrode, 8 ... Insulating connecting member, 10, 11 ... Ground electrode, 31 ... Support member, 32 ... Beam member, 33 ... Contact member, 41 ... First base member, 42 ... First spring member, 43 ... First Moving electrode, 51... Second base member, 52... Second spring member, 53.

Claims (5)

A substrate having at least an upper surface made of an insulating material;
A first signal line provided on the substrate;
A second signal line provided on the substrate apart from the first signal line;
A pair of ground electrodes provided at positions sandwiching the first signal line and the second signal line on the substrate;
Provided spaced from the front Symbol said first signal line and the second signal line on a substrate, the MEMS mechanism comprising a moving part which is displaced by an external signal,
An insulating connecting member for connecting a part of the second signal line and the moving part in a state of being insulated from each other;
The second signal line is
A columnar support member suspended on the substrate;
A first spring member having one end supported by the support member and extending in a planar direction of the substrate;
A contact member provided at the other end of the first spring member and disposed opposite to the first signal line in a direction perpendicular to the plane of the substrate;
Consisting of
The MEMS mechanism is:
A columnar base member suspended on the substrate;
A flexible second spring member having one end at the upper end of the base member and the other end extending in a direction along the plane direction of the substrate connected to the moving unit;
The moving part comprising a plate-like electrode to which the other end of the second spring member is connected;
The substrate is provided on the substrate so as to be separated from the base member, and is disposed opposite to the moving unit in a direction perpendicular to the plane direction of the substrate, and the moving unit is displaced by electrostatic attraction due to a potential difference with the moving unit. A second electrode to be
Consisting of
In the vicinity of the contact member, the pair of ground electrodes, the first signal line, and the second electrode have the same height in a direction perpendicular to the plane of the substrate,
At a position away from the contact member in the direction in which the first spring member extends, the pair of ground electrodes and the moving portion have the same height in the perpendicular direction;
The MEMS switch according to claim 1, wherein the contact member of the second signal line comes into contact with the first signal line when the moving unit is displaced . 2. The MEMS switch according to claim 1, wherein only the contact member is disposed opposite to the first signal line in a direction perpendicular to the plane of the substrate . 3. The MEMS switch according to claim 1, wherein each of the first signal line and the second signal line has a substantially linear shape in a plan view . The first signal line and the second signal line are both provided on a straight line in plan view,
Two moving parts are arranged in line symmetry with respect to a straight line connecting the first signal line and the second signal line,
4. The MEMS switch according to claim 1 , wherein the insulating connecting member connects two moving parts and the second signal line . 5. 5. The MEMS switch according to claim 1 , wherein the contact member of the second signal line is provided on an action line of a resultant force that causes displacement of the moving portion . 6.

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