JP5486545B2 - Internal pressure fluctuation absorber and environmental test device - Google Patents

Description

  The present invention relates to an internal pressure fluctuation absorbing device and an environmental test device.

  Conventionally, as disclosed in Patent Document 1 below, an internal pressure fluctuation absorber that is an apparatus for absorbing pressure fluctuation in a closed space is known. Specifically, this type of internal pressure fluctuation absorber includes a bag, which is a pressure adjusting unit having a pressure adjusting space, and a duct for communicating a closed space such as a test chamber and a pressure adjusting space, A bag made of a deformable material expands and contracts to relieve pressure fluctuations in a closed space such as a test chamber. The bag is disposed inside the box and is attached in an airtight manner to a connection pipe fixed to the lower end of the box.

JP 2009-257958 A

  In the internal pressure fluctuation absorber disclosed in Patent Document 1, the bag is fixed such that the opening edge of the bag is covered with a connecting pipe fixed to the box. While a certain amount of volume is required to relieve pressure fluctuations in a closed space such as a test chamber, a small opening is formed to be attached to the connecting pipe, and the bag is tapered toward the opening. Therefore, in order to attach such a bag to the connecting pipe, it is necessary to design the shape of the bag exclusively. For this reason, the internal pressure fluctuation absorbing device has a problem that a consumable bag is expensive.

  Therefore, the present invention has been made in view of such a point, and the object of the present invention is to reduce the cost by making a member made of a deformable material out of the constituent members of the pressure adjusting portion into a simple shape. Is to plan.

In order to achieve the above object, the present invention provides an internal pressure fluctuation absorbing device that is used by being attached to an apparatus main body having a closed space in which pressure can fluctuate, and includes a pressure adjusting unit having a pressure adjusting space, A duct capable of connecting the apparatus main body and the pressure adjusting unit so as to communicate the closed space and the pressure adjusting space, and the pressure adjusting unit includes a cylindrical body made of a deformable material; A first lid portion that is provided with an attachment portion of the duct, and that covers an opening on one end side of the body portion; a second lid portion that closes an opening on the other end side of the body portion; and the first lid portion First fixing means for removably fixing the body part, and second fixing means for removably fixing the body part to the second lid part, the body part, the first is the pressure regulating space formed by the lid and the second lid, the barrel, the pressure The effective constriction to substantially expand and contract the adjustment space, the cross section in a direction perpendicular to the direction of extension of the cylinder is uniform cylindrical der Ru pressure fluctuation absorbing apparatus in a direction of extension of the cylinder.

  In the present invention, since the pressure fluctuation in the closed space is alleviated by the pressure adjusting unit, it is possible to make it difficult for outside air to enter the closed space. For this reason, it can suppress that the water | moisture content contained in external air dew condensation in the apparatus main body. For example, when the temperature in the closed space decreases and the internal pressure decreases, the air in the pressure adjustment space flows into the closed space, so that the decrease in the internal pressure is alleviated, so that outside air is sucked into the closed space. It becomes difficult to get. On the other hand, when the temperature in the closed space rises and the internal pressure rises, the air in the closed space flows into the pressure adjusting space, so that the pressure rise in the closed space is alleviated. Furthermore, in the present invention, in the pressure adjusting part, the body part made of a deformable material is formed in a simple shape such as a cylindrical shape, so that the body part can be produced at low cost. In other words, the pressure adjusting unit has a configuration in which the barrel portion, the first lid portion, and the second lid portion are configured to be separated from each other, and in addition, the first lid portion provided with the duct attachment portion is the barrel. Since it is configured to close the opening on one end side of the part, the shape of the body part does not need to be tapered, and the body part is simply cylindrical while maintaining the volume of the pressure adjusting space. Can be formed in any shape. Moreover, since the first lid portion and the second lid portion are detachably fixed to the trunk portion by the fixing means, the trunk portion can be easily replaced even if the trunk portion is damaged. . In other words, since the barrel made of a deformable material is a consumable item, it is possible to reduce the running cost of the internal pressure fluctuation absorber by making the consumable barrel part low-cost and replaceable. Become.

  Here, the first lid portion and the second lid portion may each include a bottom portion and a side portion formed on a peripheral portion of the bottom portion. In this case, the first fixing means is The first lid portion is fixed to the barrel portion in a state where one end portion of the barrel portion is arranged so as to overlap the side portion of the first lid portion from the outside, and the second fixing is performed. The means may be configured to fix the second lid portion to the trunk portion in a state where the other end portion of the trunk portion is arranged so as to overlap the side portion of the second lid portion from the outside. preferable.

  In this aspect, the end portion of the cylindrical body portion is overlapped from the outside with respect to the side portion of the lid portion, so that it is directly superimposed on the side portion of the lid portion without bending the opening edge portion of the body portion. be able to. Therefore, the trunk portion and the lid portion can be fixed to each other by an easy fixing method while maintaining airtightness.

  The first lid and the second lid may have an oval or oval shape in plan view. In this aspect, the pressure adjustment unit can be configured to be thinner than a configuration in which the first lid unit and the second lid unit have a circular shape in plan view. In addition, since there is no corner portion at the peripheral edge of the lid, it is possible to provide a structure that is easy to ensure airtightness while having a thin structure.

  You may provide the water | moisture-content removal means to remove the water | moisture content contained in the air which passes through the said duct. In this aspect, since the moisture of the air returning to the closed space through the duct is removed, even if moisture is contained in the air, the amount is small. For this reason, generation | occurrence | production of the dew condensation resulting from the pressure fluctuation in closed space can be suppressed.

  The moisture removing unit may include an adsorbing member that can be attached to and detached from the duct. In this aspect, even when the water removal capability by the water removal means is reduced, the water removal capability can be recovered by replacing the adsorption member. Moreover, since it is sufficient to replace only the adsorption member, the replacement work does not become complicated.

  The present invention has a test space that is a closed space surrounded by a predetermined wall, and an apparatus main body capable of applying a thermal load to a sample placed in the test space, and attached to the apparatus main body An internal pressure fluctuation absorbing device, wherein the pressure adjusting space of the internal pressure fluctuation absorbing device and the test space communicate with each other via the duct.

  In this environmental test apparatus, when the pressure in the test space fluctuates in the apparatus main body, air flows back and forth between the test space and the pressure adjustment space accordingly. This can mitigate pressure fluctuations in the test space.

  As described above, according to the present invention, a member made of a deformable material is formed in a simple shape among the constituent members of the pressure adjusting unit, so that the cost can be reduced.

It is a figure showing roughly the composition of the environmental testing device concerning the embodiment of the present invention. It is a figure for demonstrating the structure of the pressure adjustment part provided in the said environmental test apparatus. It is a figure for demonstrating the shape of the upper side cover part of the pressure adjustment part provided in the said environmental test apparatus. It is a figure for demonstrating the shape of the upper side cover part of the pressure adjustment part provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the shape of the upper side cover part of the pressure adjustment part provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the shape of the upper side cover part of the pressure adjustment part provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the structure of the upper side cover part of the pressure adjustment part provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the structure of the upper side cover part and fixing means of a pressure adjustment part which were provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the structure of the internal pressure fluctuation | variation absorption apparatus provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the structure of the internal pressure fluctuation | variation absorption apparatus provided in the environmental test apparatus which concerns on other embodiment. It is a figure for demonstrating the structure of the pressure adjustment part provided in the environmental test apparatus which concerns on a reference example . It is a figure for demonstrating the modification of the pressure adjustment part shown by FIG.

  Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings.

  FIG. 1 schematically shows a configuration of an environmental test apparatus 1 including an internal pressure fluctuation absorber according to an embodiment of the present invention. The environmental test apparatus 1 includes a test apparatus main body (apparatus main body) 2 capable of applying a thermal load to the sample W, and an internal pressure fluctuation absorber 3 attached to the test apparatus main body 2. The environmental test apparatus 1 according to the present embodiment is configured as a thermal shock test apparatus that alternately exposes the sample W to a low temperature and a high temperature to apply a thermal load to the sample W to test the thermal strength of the sample W. Examples of the sample W include a printed board on which a semiconductor chip is mounted.

  The environmental test apparatus 1 is not limited to a thermal shock test apparatus, and is a thermostatic chamber, a constant temperature and humidity chamber, or other environmental test apparatus that continuously exposes the sample W to an atmosphere of a predetermined condition and applies a thermal load to the sample. It may be configured. In this case, as will be described later, the test apparatus is not limited to a three-tank type test apparatus, and may be a one-tank type test apparatus provided with a test chamber and an air conditioning chamber.

  The test apparatus main body 2 is a three-tank type test tank, and a test chamber 5 in which a sample W to be tested is placed, and air is heated by a heating means (not shown) to bring hot air into the test chamber 5. It includes a high temperature chamber 7 for sending out and a low temperature chamber 9 for cooling the air with a refrigerator (not shown) and sending cold air to the test chamber 5. The test chamber 5 is provided with a test chamber door 6 for taking in and out the sample W. The high greenhouse 7 and the low temperature chamber 9 are air conditioning chambers that adjust the air temperature and humidity in the test chamber 5. The high temperature chamber 7 is provided with heating means (heaters), a humidifier, a blower, and the like. 9 is provided with a refrigerator, a blower, and the like.

  Each of the test chamber 5, the high temperature chamber 7, and the low temperature chamber 9 is a closed space surrounded by a heat insulating panel wall 11 having a heat insulating material (heat insulating layer) inside, and is thermally shielded from each other.

  The heat insulation panel wall 11 that partitions the high greenhouse 7 and the test chamber 5 includes a hot air supply port 13 for supplying hot air from the high temperature chamber 7 (air-conditioned space) to the test chamber 5 (test space TS), and a test. A hot air discharge port 14 for returning the high temperature air in the chamber 5 into the high temperature chamber 7 is formed. A hot air switching damper 17 is disposed at the hot air supply port 13 and the hot air discharge port 14. When the hot air supply port 13 and the hot air discharge port 14 are opened by the switching damper 17, the hot air flows into the test chamber 5 from the high temperature chamber 7 through the hot air supply port 13 and passes through the test chamber 5. It returns to the high temperature chamber 7 through the hot air outlet 14. That is, air circulates between the high temperature chamber 7 and the test chamber 5. Thereby, the inside of the test chamber 5 becomes a high temperature atmosphere. When the inside of the test chamber 5 is set to a high temperature atmosphere, the temperature in the test chamber 5 is set to 150 ° C., for example.

  The heat insulation panel wall 11 that partitions the low greenhouse 9 and the test chamber 5 includes a cold air supply port 15 for supplying cold air from the low temperature chamber 9 (air-conditioned space) to the test chamber 5 (test space TS), and a test. A cold air discharge port 16 for returning the low temperature air in the chamber 5 to the low temperature chamber 9 is formed. A cold air switching damper 19 is disposed at the cold air supply port 15 and the cold air discharge port 16. When the cold air supply port 15 and the cold air discharge port 16 are opened by the switching damper 19, the cold air flows into the test chamber 5 from the low temperature chamber 9 through the cold air supply port 15 and passes through the test chamber 5. It returns to the low temperature chamber 9 through the cold air discharge port 16. That is, air circulates between the low temperature chamber 9 and the test chamber 5. Thereby, the inside of the test chamber 5 becomes a low temperature atmosphere. When the inside of the test chamber 5 is set to a low temperature atmosphere, the temperature in the test chamber 5 is set to −60 ° C., for example. FIG. 1 shows the hot air switching damper 17 in the open state and the cold air switching damper 19 in the closed state.

  While the test apparatus 1 is in operation, the sample W in the test chamber is alternately exposed to a high temperature atmosphere and a low temperature atmosphere, and is subjected to a thermal load. Thereby, the thermal strength, thermal stress characteristics, durability, etc. of the sample W are tested. The number of cycles in the high temperature atmosphere and the low temperature atmosphere is arbitrary depending on the sample W.

  The internal pressure fluctuation absorber 3 includes a pressure adjustment unit 21 having a pressure adjustment space AS, and a duct 20 communicating with the test space TS and the pressure adjustment space AS. The pressure adjusting unit 21 includes a cylindrical body part 22, a lower lid part 23 as a first lid part that closes an opening on one end side of the body part 22, and a second part that closes an opening on the other end side of the body part 22. And an upper lid 24 as a lid. By opening the both end openings of the body portion 22 with the lid portions 23 and 24, respectively, a pressure adjusting space AS which is a closed space is formed. The trunk | drum 22, the lower side cover part 23, and the upper side cover part 24 are each created separately, and are assembled | attached after that.

  The lower lid portion 23 includes a lid portion main body 23a and a mounting portion 23e of the duct 20 provided in the lid portion main body 23a. The attachment portion 23e is constituted by a connection tube such as a metal tube, for example, and is provided so as to penetrate the lid portion main body 23a in the thickness direction. That is, the attachment portion 23e is provided on the bottom portion 23b of the lower lid portion 23 so as to communicate the pressure adjustment space AS and the outside. By attaching one end of the duct 20 to a portion of the attachment portion 23e that protrudes outward from the lid main body 23a, the pressure adjustment space AS and the inside of the duct 20 communicate with each other. Fixing of the duct 20 to the connecting pipe (mounting portion 23e) is made airtight by a fastening member such as a hose band, although not shown.

  The other end of the duct 20 is connected to a connection pipe 29 provided on the side wall of the test chamber 5. The connection pipe 29 is fitted into an opening that penetrates the heat insulating panel wall 11 that constitutes one side wall of the test chamber 5, and communicates the inside of the test chamber 5 (test space TS) with the outside. By attaching the duct 20 to the connection pipe 29, the inside of the test chamber 5 (test space TS) and the inside of the duct 20 communicate with each other.

  A flange portion 30 is provided at the inner end portion of the connection pipe 29, and the flange portion 30 is fixed to the inner surface of the heat insulating panel wall 11. Fixing of the duct 20 to the connecting pipe 29 is made airtight by a tightening member such as a hose band, although not shown.

  As shown in FIG. 2, the lid body 23a of the lower lid portion 23 includes a bottom portion 23b having a predetermined size and a side portion 23c formed at the peripheral edge of the bottom portion 23b. The side part 23c is formed integrally with the bottom part 23b. The bottom 23b is formed, for example, in an elliptical shape in plan view, and an attachment portion 23e is disposed at the center thereof. The side part 23c is provided so as to be bent from the bottom part 23b, and projects in a direction intersecting the bottom part 23b. The area in the side portion 23c is larger than the cross-sectional area of the mounting portion 23e of the duct 20. For this reason, it is not necessary to make the opening of the trunk | drum 22 small and it is not necessary to make the trunk | drum 22 into a tapered shape.

  The lid body 23a of the lower lid portion 23 is a hard material that is hardly deformed, such as metal, ABS resin, glass epoxy resin, or the like, even if it is deformed by a fastening member described later. When the lid main body 23a is made of, for example, sheet metal, the side portion 23c can be integrally formed on the peripheral edge of the bottom 23b by drawing or the like. In addition, the side portion 23c can be integrally formed by resin-molding the lid main body 23a.

  The upper lid portion 24 has the same configuration as the lower lid portion 23 except that the attachment portion 23e is not provided. That is, as shown in FIGS. 2 and 3, the upper lid portion 24 includes a bottom portion 24b having a predetermined size and a side portion 24c formed on the peripheral edge of the bottom portion 24b. The upper lid portion 24 is disposed in the opposite direction to the lower lid portion 23. That is, the lower lid portion 23 is disposed in a direction in which the side portion 23c protrudes upward from the bottom portion 23b, while the upper lid portion 24 of the upper lid portion 24 protrudes downward from the bottom portion 24b. It is arranged in the direction.

  The body portion 22 is made of a deformable material, and can be made of a thin material such as polyethylene, vinyl resin, or silicon. The body portion 22 is formed in a cylindrical shape, and the circumferential length of the openings at both ends thereof is a size corresponding to the outer circumferential length of the upper lid portion 24 and the lower lid portion 23. And both-end opening of the trunk | drum 22 can also be changed into an ellipse shape. For this reason, the lower opening edge portion can be overlapped with the side portion 23c of the lid body 23a of the lower lid portion 23 from the outside, and the upper opening edge portion can be overlapped with the side portion 24c of the upper lid portion 24. Can be overlaid from the outside. The body portion 22 may be formed into a cylindrical shape by rolling one sheet and fixing the edges to each other, or may be formed into a cylindrical shape.

  The upper lid portion 24 is supported by a support body (not shown), and the lower lid portion 23 is fixed to a support base (not shown). In other words, since the upper lid portion 24 cannot be supported by the body portion 22 itself, the upper lid portion 24 is supported by an external support body, such as being suspended from a support body outside the figure. Note that a box-shaped support may be provided, and the pressure adjusting unit 21 may be disposed therein.

  The pressure adjusting unit 21 includes a first fixing unit 33 for fixing the body 22 to the lower lid 23, and a second fixing unit 34 for fixing the body 22 to the upper lid 24. Have

  The first fixing means 33 is constituted by a band-shaped fastening member such as a flat steel band, and the lower lid portion 23 in which the lower end portion (one end portion, lower opening edge portion) of the body portion 22 is overlapped. The side portion 23c is attached from the outside. The tightening member has a threaded portion 33a for adjusting the circumference, and the tightening by the tightening member can be strengthened by turning the threaded portion 33a.

  The side portion 23c of the lower lid portion 23 is provided on the outer peripheral portion of the bottom portion 23b and has a predetermined width, and the body portion 22 can come into surface contact with the outer surface thereof. And the side part 23c of the lower side cover part 23 is a hard thing which cannot change easily, on the other hand, the trunk | drum 22 is a material which changes easily. For this reason, by adjusting the length of the tightening member, the body 22 can be tightened from the outside along the side 23c of the lower lid 23. Thereby, even if it is the structure which does not adhere | attach the trunk | drum 22 with respect to the lower side cover part 23, the airtightness between the trunk | drum 22 and the lower side cover part 23 is ensured.

  The second fixing means 34 is configured by a band-like tightening member similar to the first fixing means 33. That is, the 2nd fixing means 34 is comprised by band-shaped fastening members, such as a flat steel band which has the thread part 34a. And the 2nd fixing means 34 is mounted | worn from the outer side to the side part 24c of the upper side cover part 24 with which the upper end part (other end part, upper opening edge part) of the trunk | drum 22 was overlaid. The side part 24c of the upper lid part 24 is hard and hard to be deformed. On the other hand, the body part 22 is made of a material that is easily deformed. It can be tightened from the outside along the side portion 24 c of the lid portion 24. Thereby, even if it is the structure which does not adhere | attach the trunk | drum 22 with respect to the upper side cover part 24, the airtightness between the trunk | drum 22 and the upper side cover part 24 is ensured.

  The body portion 22 can be easily separated from the lower lid portion 23 and the upper lid portion 24 by loosening the tightening by the first fixing means 33 and the second fixing means 34. That is, the 1st fixing means 33 and the 2nd fixing means 34 can respectively fix the trunk | drum 22 with respect to the lower side cover part 23 or the upper side cover part 24 so that attachment or detachment is possible.

  The lower lid portion 23 and the upper lid portion 24 have shapes in which the bottom portions 23b and 24b are formed in an elliptical shape as described above, but are not limited thereto. The lower lid portion 23 and the upper lid portion 24 may have a shape in which the bottom portions 23b and 24b are formed in a circular shape, for example. As shown in FIGS. 4 to 6, the upper lid portion 24 (lower lid portion 23) may have a shape in which a bottom portion 24 b (23 b) is formed in an oval shape. The lid 24 (23) shown in FIG. 4 has a bottom 24b (having an outer peripheral portion including a pair of arc portions 37, 37 and a pair of connecting portions 38, 38 that connect the arc portions 37, 37 with gentle curves. 23b). The lid portion 24 (23) shown in FIG. 5 has a bottom portion 24b (23b) having an outer peripheral portion composed of a pair of arc portions 37, 37 and a pair of connecting portions 38, 38 connecting the arc portions 37, 37 with straight lines. It is the structure provided with. The lid portion 24 (23) shown in FIG. 6 has a bottom portion having an outer peripheral portion including a pair of arc portions 37, 37 and a pair of connecting portions 38, 38 that connect the arc portions 37, 37 with a straight line bent at the center. 24b (23b).

  Next, the operation of the internal pressure fluctuation absorber 3 attached to the test apparatus body 2 will be described.

  When performing a test to apply a thermal load to the sample W placed in the test chamber 5, when performing high temperature exposure, the hot air switching damper 17 is opened and the cold air switching damper 19 is closed. As a result, hot air from the high temperature chamber 7 is introduced into the test chamber 5, and high temperature air circulates between the test chamber 5 and the high temperature chamber 7, so that the inside of the test chamber 5 (test space TS) has a high temperature atmosphere. Become. At this time, as the temperature in the test chamber 5 becomes higher, the pressure in the test chamber 5 rises. Accordingly, the high-temperature air in the test chamber 5 passes through the duct 20 and adjusts the pressure of the pressure adjusting unit 21. Flows into the business space AS. As a result, the body portion 22 of the pressure adjusting portion 21 is deformed and the pressure adjusting space AS is expanded, and the internal pressure of the test chamber 5 is increased.

  On the other hand, when performing low temperature exposure, the hot air switching damper 17 is closed and the cold air switching damper 19 is opened. As a result, cold air from the low temperature chamber 9 is introduced into the test chamber 5, and low temperature air circulates between the test chamber 5 and the low temperature chamber 9, so that the inside of the test chamber 5 (test space TS) has a low temperature atmosphere. Become. At this time, as the temperature in the test chamber 5 becomes lower, the pressure in the test chamber 5 decreases, and accordingly, the outside air is sucked into the test chamber 5 through the gap and tries to enter. However, at this time, as the pressure in the test chamber 5 decreases, the air in the pressure adjusting unit 21 flows into the test chamber 5 through the duct 20, so that the pressure decrease in the test chamber 5 is suppressed and the outside air is reduced. Intrusion is suppressed.

  In this way, when the pressure in the test chamber 5 (test space TS) varies in the test apparatus body 2, air flows back and forth between the test space TS and the pressure adjustment space AS accordingly. Since pressure fluctuations in the test chamber 5 are alleviated by the pressure adjusting unit 21, it is difficult for outside air to enter the test chamber 5. For this reason, it can suppress that the water | moisture content contained in external air condenses. That is, when the temperature in the test chamber 5 decreases and the internal pressure decreases, the air in the pressure adjusting unit 21 flows into the test chamber 5. It becomes difficult to be sucked in. On the other hand, when the temperature in the test chamber 5 rises and the internal pressure rises, the air in the test chamber 5 flows into the pressure adjusting unit 21, so that the pressure rise in the test chamber 5 is alleviated.

  Moreover, in this embodiment, since the trunk | drum 22 which consists of a deformable material in the pressure adjustment part 21 is formed in the simple shape called a cylinder shape, the trunk | drum 22 can be produced cheaply. That is, the pressure adjusting part 21 has a configuration including a body part 22, a lower lid part 23, and an upper lid part 24 that are separated from each other, and has a larger bottom area than the mounting part 23 e of the duct 20. Since the opening on the one end side of the trunk portion 22 is closed by the lower lid portion 23, the trunk portion 22 can be formed in a simple shape such as a cylinder while maintaining the volume of the pressure adjustment space AS. . In addition, since the lower lid portion 23 and the upper lid portion 24 are detachably fixed to the barrel portion 22 by fixing means 33 and 34, the barrel portion can be easily damaged even if the barrel portion 22 is damaged. 22 can be exchanged. That is, since the barrel 22 made of a deformable material is a consumable item, the running cost of the internal pressure fluctuation absorber 3 can be reduced by configuring the barrel 22 as a consumable item at a low cost and making it replaceable. Is possible.

  Moreover, in this embodiment, since the edge part of the cylindrical trunk | drum 22 is piled up from the outer side with respect to the side parts 23c and 24c of the cover parts 23 and 24, it is not necessary to bend the opening edge part of the trunk | drum 22. Can also be superimposed on the side portions 23c and 24c of the lid portions 23 and 24 as they are. Therefore, it is possible to fix the body portion 22 and the lid portions 23 and 24 to each other by an easy fixing method while maintaining airtightness.

  In the present embodiment, since the lower lid portion 23 and the upper lid portion 24 have an elliptical shape in plan view, the pressure adjusting unit 21 is thinner than a configuration having a circular shape in plan view. Can be configured. In addition, since there are no corners at the peripheral portions of the lid portions 23 and 24, it is possible to achieve a configuration in which airtightness can be easily secured even though the configuration is thin.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the pressure adjusting unit 21 is configured such that the first lid portion is on the lower side and the second lid portion is on the upper side, but the present invention is not limited to this. For example, the pressure adjusting unit 21 may be configured in the opposite direction, that is, the first lid portion is on the upper side and the second lid portion is on the lower side. Or the structure which the 1st cover part and the 2nd cover part mutually oppose in the left-right direction may be sufficient as the pressure adjustment part 21. FIG. In this case, the body 22 has a shape that is long in the lateral direction, and both end openings are in the horizontal direction.

  In addition, as shown in FIG. 7, in the pressure adjusting unit 21, packing sheets 40 are interposed between the trunk portion 22 and the upper lid portion 24 and between the trunk portion 22 and the lower lid portion 23. May be. This packing sheet 40 fills the gap between the barrel portion 22 and the side portion 24c of the upper lid portion 24 and the gap between the barrel portion 22 and the side portion 23c of the lower lid portion 23 to improve airtightness. It is for improving. The packing sheet 40 is formed in a C shape in a plan view, and is attached to the outer surfaces of the side portions 23c and 24c of the lid portions 23 and 24. Since the packing sheet 40 can be easily deformed, the packing sheet 40 can be deformed according to the shape and size of the lid portions 23 and 24, and the side portions 23c and 24c are arranged so that the ends overlap each other as necessary. You can also. In this case, the packing sheet 40 is arrange | positioned over the perimeter of the side parts 23c and 24c. The packing sheet 40 is bonded to the lid portions 23 and 24, but is not bonded to the body portion 22.

  Although the first embodiment has been described with respect to the configuration in which the first fixing means 33 (second fixing means 34) is provided separately from the lower lid portion 23 (upper lid portion 24), the present invention is not limited to this. For example, as shown in FIG. 8, it is good also as a structure by which the 2nd fixing means 34 (1st fixing means 33) is integrally provided in the upper side cover part 24 (lower side cover part 23). That is, the second fixing means 34 (first fixing means 33) is integrally formed with the upper lid portion 24 (lower lid portion 23), or the second fixing means 34 (first fixing means 33) is the upper side. The structure which adhere | attaches and fixes to the cover part 24 (lower side cover part 23) may be sufficient. In this case, since the fixing means 33 and 34 are formed integrally with the lid portions 23 and 24, the number of components of the internal pressure fluctuation absorber can be reduced.

  The second fixing means 34 shown in FIG. 8 is configured by a plurality of annular protrusions 42 protruding outward from the side part 24 c of the upper lid part 24. The protrusion 42 is integrally formed when the upper lid portion 24 is formed. When the body portion 22 is put on the upper lid portion 24 provided with the annular protrusion 42, the body portion 22 is extended by the protrusion 42 and is in close contact with the protrusion 42. Therefore, the trunk portion 22 can be fixed to the upper lid portion 24 (lower lid portion 23) without separately providing fixing means. In this case, it is preferable that the opening edge portion of the trunk portion 22 is formed thicker than other portions.

  In addition, it is also possible to fix the trunk | drum 22 to the upper side cover part 24 (lower side cover part 23) in which the cyclic | annular protrusion 42 was formed using a band-shaped fastening member. That is, the body portion 22 is covered with the side portion 24c (23c) of the upper lid portion 24 (lower lid portion 23) on which the annular protrusion 42 is formed, and further, the body portion 22 with a band-shaped fastening member from the outside. Can also be fixed. In this case, the annular protrusion 42 and the band-shaped fastening member cooperate to constitute the fixing means 34 (33).

  As shown in FIG. 9, the internal pressure fluctuation absorber 3 may include a moisture removing unit 45 that removes moisture contained in the air passing through the duct 20. The moisture removing means 45 is disposed in the duct 20 and incorporates an adsorption member (not shown) that adsorbs moisture. With this configuration, moisture in the air returning to the test space through the duct 20 is removed, so even if moisture is contained in the air flowing into the duct 20, the amount can be reduced.

  This adsorption member may be detachable as shown in FIG. Specifically, the moisture removing means 45 has a casing 45a fixed to the duct 20 and a mounting portion 45b that can be attached to and detached from the casing 45a, and an adsorption member is disposed on the mounting portion 45b. Openings are formed in the side surfaces (left and right sides) of the mounting portion, and air in the duct 20 flows into the mounting portion 45b through the openings. An insertion hole for inserting the mounting portion 45 b is formed in the casing 45 a, and this insertion hole communicates with the duct 20. When the mounting portion 45 b is inserted into the insertion hole, the suction member in the mounting portion 45 b can come into contact with the air flowing in the duct 20. In this aspect, even when the water removal ability by the water removal means 45 is lowered, the water removal ability can be recovered by replacing the adsorption member. Moreover, since it is sufficient to replace only the adsorption member, the replacement work does not become complicated.

In the embodiment, the example in which the body portion 22 is formed in a cylindrical shape having both ends opened has been described . As a reference example, indicate to the body portion 22 in FIG. 11, that is formed at one end is closed tubular. The body portion 22 is formed by closing an opening at one end of a cylindrical member having both ends opened by fusion, adhesion, or the like.

  The lid 23 used in the pressure adjusting unit 21 may have the same structure as the lower lid 23 used in the pressure adjusting unit 21 of the above embodiment, but in FIG. An example in which the bottom 23b of the main part 23a is formed in a hollow box shape is shown. And the side part 23c is formed in the upper surface (one surface) of the bottom part 23b, and the attaching part 23e of the duct 20 is provided in the side surface of the bottom part 23b. The shape of the side portion 23c is the same as the shape described in the above embodiment. An opening is formed inside the side portion 23c on the upper surface of the bottom portion 23b, and the space in the bottom portion 23b passes through this opening and the inner space (pressure adjusting space AS) of the body portion 22 attached to the side portion 23c. Communicate. The hollow-structure lid main body 23a may be used to close the opening on one end side of the cylindrical body 22 having both ends opened as shown in FIG.

  In addition, the bottom portion 23b shown in FIG. 11 has a pair of opposing surfaces (upper surface and lower surface) formed in a box shape. Instead, the pair of surfaces (upper surface and lower surface) are circular, elliptical, oval, etc. It may be formed.

  The mounting portion 23e of the duct 20 is not limited to the configuration formed on the side surface of the bottom portion 23b, and may be formed on the surface on which the side portion 23c is provided, for example, as shown in FIG. Or the attaching part 23e may be provided in the surface (for example, lower surface) opposite to the surface (for example, upper surface) in which the side part 23c was provided.

  Moreover, you may use the cover part 23 shown in FIG. 11 or FIG. 12, and the cover part 23 demonstrated as another modification as the lower side cover part 23 (1st cover part) of the said embodiment.

DESCRIPTION OF SYMBOLS 1 Environmental test apparatus 2 Test apparatus main body 3 Internal pressure fluctuation absorption apparatus 5 Test chamber 20 Duct 21 Pressure adjustment part 22 Trunk part 23 Lower lid part 23a Lid part main body 23b Bottom part 23c Side part 23e Attachment part 24 Upper lid part 24b Bottom part 24c side Part 33 First fixing means 34 Second fixing means 40 Packing sheet 42 Projection 45 Moisture removal means

Claims (6)

An internal pressure fluctuation absorbing device used by being attached to an apparatus main body having a closed space in which pressure can fluctuate,
A pressure adjusting portion having a pressure adjusting space;
A duct capable of connecting the apparatus main body and the pressure adjusting unit so as to communicate the closed space and the pressure adjusting space;
The pressure adjusting unit is
A cylindrical body made of a deformable material;
A first lid portion provided with an attachment portion of the duct, and closing an opening on one end side of the trunk portion;
A second lid that closes the opening on the other end of the barrel;
First fixing means for detachably fixing the body portion to the first lid portion;
And a second fixing means for detachably fixing the body portion to the second lid portion, and the pressure adjusting space is formed by the body portion, the first lid portion, and the second lid portion. It is,
The barrel, in an effective constriction to substantially expand and contract the pressure regulating space, the cross section in a direction perpendicular to the direction of extension of the cylinder is uniformly cylindrical der Ru pressure fluctuations in the direction of extension of the cylinder Absorber. The first lid portion and the second lid portion each include a bottom portion and a side portion formed integrally with the bottom portion,
The first fixing means fixes the first lid portion to the barrel portion in a state where one end portion of the barrel portion is arranged so as to overlap the side portion of the first lid portion from the outside. And
The second fixing means is configured such that the second lid portion is disposed on the trunk portion with the other end portion of the trunk portion being superimposed on the side portion of the second lid portion from the outside. The internal pressure fluctuation absorber according to claim 1 to be fixed.   The internal pressure fluctuation absorber according to claim 1 or 2, wherein the first lid portion and the second lid portion have an elliptical shape or an oval shape in plan view.   The internal pressure fluctuation absorber according to any one of claims 1 to 3, further comprising a water removing unit that removes water contained in the air passing through the duct.   The internal pressure fluctuation absorbing device according to claim 4, wherein the moisture removing means has an adsorbing member that can be attached to and detached from the duct. A test space that is a closed space surrounded by a predetermined wall, and an apparatus main body capable of applying a thermal load to a sample placed in the test space;
The internal pressure fluctuation absorber according to any one of claims 1 to 5 attached to the device main body,
An environmental test apparatus in which the pressure adjustment space of the internal pressure fluctuation absorber and the test space communicate with each other through the duct.

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