JP5488139B2 - Dicing method and dicing apparatus - Google Patents

Description

  The present invention relates to a dicing method and a dicing apparatus. In particular, the present invention relates to a dicing method for dicing two dicing lines simultaneously with two dicing blades and a dicing apparatus for carrying out the dicing method.

  Conventionally, for example, the following Patent Documents 1 and 2 propose a dicing apparatus having two dicing blades mounted on a spindle. In such a dicing apparatus, two dicing scheduled lines can be diced simultaneously. For this reason, dicing can be performed with higher productivity than a dicing apparatus having only one dicing blade. Therefore, a dicing apparatus having two dicing blades has attracted much attention as a dicing apparatus that can reduce the manufacturing cost of electronic components.

  By the way, some of the objects to be diced to be diced have an undesired distortion. Accordingly, the dicing apparatus is required to be able to appropriately dice an object to be diced in which an undesired distortion has occurred.

  For example, Patent Document 3 below describes an example of a method that can suitably dice an object to be diced in which an undesired distortion has occurred. Specifically, in Patent Document 3, a ceramic sheet formed by firing a green sheet on which pattern electrodes are printed at a constant pitch is diced along an equal dividing line perpendicular to the pitch direction. How to do is described. In the method described in Patent Document 3, first, a normal distance and a rotation angle are obtained from the rotation center of one side of the ceramic plate in the pitch direction. A normal distance and a rotation angle from the rotation center of the side on the other end side of the ceramic plate are obtained. Next, the normal distance and the rotation angle from the rotation center of each cutting position of the ceramic plate are determined from the normal distance and the rotation angle of each of the one end side and the other end side. Then, the ceramic plate is diced on the basis of the normal distance and the rotation angle from the rotation center of each cut position of the obtained ceramic plate.

JP 2002-237474 A JP 2004-158822 A JP 2000-252234 A

  Certainly, the method described in Patent Document 3 is effective when dicing is performed for each dicing scheduled line. However, since the object to be diced in which an undesired distortion has occurred includes a plurality of non-parallel dicing lines, a dicing machine having two dicing blades is used to simultaneously convert the two dicing lines. When dicing, the method described in Patent Document 3 cannot be applied.

  The present invention has been made in view of such points, and an object thereof is a dicing method in which two dicing blades are simultaneously diced with two dicing blades, and a diced object to be distorted is also preferably used. A dicing method capable of dicing and a dicing apparatus for carrying out the dicing method are provided.

  The dicing method according to the present invention includes a first spindle on which a first dicing blade is mounted, and a second spindle on which a second dicing blade is mounted, which is disposed so as to face the first spindle. The present invention relates to a dicing method for simultaneously dicing an object to be diced by first and second dicing blades by simultaneously driving the spindle. The dicing method according to the present invention includes a step of detecting a first dicing schedule line of the object to be diced by the first dicing blade and a second dicing schedule line of the object to be diced by the second dicing blade; The step of detecting the magnitude of the angle formed by the first dicing line and the second dicing line, and the angle formed by the first spindle axis and the second spindle axis are: Adjusting the angle of at least one of the first and second spindles so as to coincide with the detected angle of the first and second dicing lines, and the axis of the first spindle In the state where the magnitude of the angle formed between the center and the axis of the second spindle matches the detected angle between the first and second planned dicing lines, A dicing step of dicing the object to be diced along the first and second dicing lines by moving the first and second spindles relative to the object to be diced while rotating the two spindles. I have.

  In the present invention, “adjusting the angle” includes not changing the angle.

  The dicing apparatus according to the present invention relates to a dicing apparatus for dicing an object to be diced along first and second dicing lines. A dicing apparatus according to the present invention includes a table on which an object to be diced is placed, a first spindle, a first dicing blade, a second spindle, a second dicing blade, a detection mechanism, and a control. Mechanism. The first dicing blade is attached to the first spindle. The second spindle is opposed to the first spindle in the first direction. The second dicing blade is mounted on the second spindle. The detection mechanism detects the first and second dicing scheduled lines of the dicing object placed on the table. The control mechanism causes the detection mechanism to detect the first and second dicing scheduled lines of the object to be diced placed on the table. The control mechanism detects, from the detected first and second dicing planned lines, the size of an angle formed by the first dicing planned line and the second dicing planned line. The control mechanism is configured such that the size of the angle formed by the axis of the first spindle and the axis of the second spindle matches the detected size of the angle formed by the first and second dicing scheduled lines. And adjusting the angle of at least one of the first and second spindles. The control mechanism matches the magnitude of the angle formed between the axis of the first spindle and the axis of the second spindle to the detected angle between the first and second dicing scheduled lines. In this state, the first and second spindles are moved relative to the table while rotating the first and second spindles, so that the object to be diced is moved along the first and second dicing lines. Dicing.

  In a specific aspect of the dicing apparatus according to the present invention, the control mechanism sets the table so that the first and second dicing blades are positioned on the first and second dicing scheduled lines before starting dicing. Rotate. According to this configuration, even if the object to be diced is arranged on the table at an arbitrary angle, dicing can be suitably performed. Accordingly, dicing of the object to be diced becomes easy.

  In another specific aspect of the dicing apparatus according to the present invention, before the dicing is started, the control mechanism is configured such that the first dicing blade parallel to the second direction perpendicular to the first direction is the first dicing schedule. After the table is rotated so as to be positioned on the line, the first and second dicing schedules in which the angle between the axis of the first spindle and the axis of the second spindle is detected are detected. The second dicing blade is positioned on the second dicing scheduled line by turning the second spindle so as to coincide with the size of the angle formed by the line. According to this configuration, it is not always necessary to provide a mechanism for adjusting the angle of the first spindle. Therefore, the configuration of the dicing apparatus can be simplified.

  In another specific aspect of the dicing apparatus according to the present invention, the control mechanism moves the table relative to the first and second dicing blades in the second direction while moving the second dicing blade. Is diced while being moved relative to the table in the first direction. According to this configuration, it is possible to reduce the load applied to the second dicing blade and the object to be diced.

In still another specific aspect of the dicing apparatus according to the present invention, the control mechanism relatively moves the table and the second dicing blade so that V ₂ = V ₁ · tan θ during dicing. Here, θ is the size of the angle formed by the axis of the first spindle and the axis of the second spindle. V ₁ is a relative moving speed in the second direction of the table with respect to the first and second dicing blades during dicing. V ₂ is the relative movement speed in a first direction relative to the second dicing blade of the table during dicing. According to this configuration, it is possible to more effectively reduce the load applied to the second dicing blade and the object to be diced.

  In still another specific aspect of the dicing apparatus according to the present invention, each of the first and second dicing blades is arranged in parallel with a second direction perpendicular to the first direction before the start of dicing. And the control mechanism rotates the table so that the angle of the first dicing line with respect to the second direction is equal to the angle of the second dicing line with respect to the second direction before starting the dicing. The angle between the axis of the first spindle and the axis of the second spindle coincides with the detected angle between the first and second dicing lines detected, and The first direction and the first direction are set so that the angle between the second direction and the axis of the first spindle is equal to the angle between the second direction and the axis of the second spindle. Spin of 2 The first and second dicing blade is positioned on the first and second dicing plan on the line by pivoting both Le. In this case, the angle formed by the first and second dicing blades and the moving direction of the object to be diced with respect to the first and second dicing blades becomes small. Moreover, the magnitude | size of the load concerning a 1st and 2nd dicing blade or a to-be-diced object becomes equal. For this reason, the load concerning a 1st and 2nd dicing blade or a to-be-diced object can be made small.

  In still another specific aspect of the dicing apparatus according to the present invention, the control mechanism moves the table in the second direction relative to the first and second dicing blades, while moving the table in the second direction. Each of the two dicing blades is diced while being moved relative to the table in the first direction. According to this configuration, it is possible to reduce the load on the first and second dicing blades and the object to be diced.

In still another specific aspect of the dicing apparatus according to the present invention, the control mechanism moves the table and the first and second dicing blades at the time of dicing, such that V ₂ = V ₃ = V ₁ · tan (θ / 2) to move relatively. Here, θ is the size of the angle formed by the axis of the first spindle and the axis of the second spindle. V ₁ is a relative moving speed in the second direction of the table with respect to the first and second dicing blades during dicing. V ₂ is the relative movement speed in a first direction relative to the second dicing blade of the table during dicing. V ₃ is the relative movement speed in the first direction for the first dicing blade of the table during dicing. According to this configuration, the load applied to the first and second dicing blades and the object to be diced can be more effectively reduced.

  In still another specific aspect of the dicing apparatus according to the present invention, the detection mechanism includes an imaging mechanism that images a dicing object placed on a table, and an image recognition mechanism that recognizes an image captured by the imaging mechanism. And have. A control mechanism detects the magnitude | size of the angle | corner which a 1st dicing plan line and a 2nd dicing plan line make based on the image of the to-be-diced object recognized by the image recognition mechanism.

  In the present invention, the magnitude of the angle formed between the axis of the first spindle and the axis of the second spindle is made to coincide with the detected angle between the first and second dicing scheduled lines. In this state, the first and second spindles are rotated relative to the object to be diced while rotating the first and second spindles. Dicing in line For this reason, according to this invention, the to-be-divided thing which distortion generate | occur | produced can also be diced suitably.

1 is a schematic plan view of a dicing apparatus according to a first embodiment. FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. 1. It is a flowchart for demonstrating the dicing method of the to-be-diced thing in 1st Embodiment. It is a schematic plan view of the principal part of the dicing apparatus for demonstrating the dicing process in 1st Embodiment. It is a flowchart for demonstrating the dicing method of the to-be-diced thing in the modification of 1st Embodiment. It is a schematic plan view of a dicing apparatus according to a second embodiment. It is a flowchart for demonstrating the dicing method of the to-be-diced thing in 2nd Embodiment.

  Hereinafter, preferred embodiments of the present invention will be described by taking the dicing apparatuses 1 and 2 shown in FIGS. 1 and 6 as examples. However, the dicing apparatuses 1 and 2 are merely examples. The dicing apparatus according to the present invention is not limited to the dicing apparatuses 1 and 2 at all. Further, the dicing method according to the present invention is not limited to the dicing method described in the following first and second embodiments.

(First embodiment)
(Configuration of dicing apparatus 1)
FIG. 1 is a schematic plan view of the dicing apparatus according to the first embodiment. FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG.

  A dicing apparatus 1 shown in FIG. 1 is an apparatus for cutting a dicing object 30 into a plurality of pieces by cutting along a plurality of dicing lines. The type of the object to be diced 30 is not particularly limited. The dicing apparatus 1 according to the present embodiment can perform dicing of any kind of the object to be diced 30. The dicing apparatus 1 can be used for dicing of a substrate such as a ceramic substrate, a CSP (Chip Size Package) substrate, and a QFN (Quad Flat Non-leaded) substrate.

  Moreover, the dicing apparatus 1 of this embodiment can be used suitably also for the dicing of the to-be-divided object 30 which distortion generate | occur | produced, as demonstrated below. Specifically, the dicing apparatus 1 can be particularly suitably used for dicing a ceramic substrate in which firing distortion has occurred, a CSP substrate in which distortion has occurred in a wiring substrate during resin sealing, a QFN substrate, or the like. However, the dicing apparatus 1 of the present embodiment can be suitably used not only for dicing the object to be diced 30 in which distortion has occurred, but also for dicing the object to be diced 30 in which distortion has not occurred.

  As shown in FIG. 1, the dicing apparatus 1 includes a disk-shaped first dicing blade 13 and a second dicing blade 15. Each of the first and second dicing blades 13 and 15 is provided in parallel with the z direction. Each of the first and second dicing blades 13 and 15 is rotatable about an axis parallel to the y direction. The types of the first and second dicing blades 13 and 15 can be appropriately selected according to the type of the object to be diced 30 to be diced.

  In the present embodiment, each of the first and second dicing blades 13 and 15 is disposed along the x direction when the dicing apparatus 1 is stopped. The first and second dicing blades 13 and 15 face each other in the y direction. The dicing apparatus 1 of this embodiment performs dicing of the object to be diced 30 simultaneously using the first and second dicing blades 13 and 15.

  The first dicing blade 13 is attached to the first spindle 12. On the other hand, the second dicing blade 15 is mounted on the second spindle 14. Each of the first and second spindles 12 and 14 is provided to extend along the y direction when the dicing apparatus 1 is stopped. The first and second spindles 12 and 14 face each other in the y direction.

  Each of the first and second spindles 12 and 14 is supported by first and second support mechanisms 17 and 18. The first and second support mechanisms 17 and 18 have a function of supporting the first and second spindles 12 and 14 and a function of rotating the first and second spindles 12 and 14, a y direction and a z direction. Each has a function of displacing. The second support mechanism 18 has a function of turning the second spindle 14 around the central axis A2 on the xy plane. However, in the present embodiment, the first support mechanism 17 does not have a function of turning the first spindle 12 on the xy plane. Therefore, the first and second spindles 12 and 14 can be displaced in the y direction and the z direction by the first and second support mechanisms 17 and 18, respectively. Further, the second spindle 14 can turn on the xy plane around the central axis A2.

  The dicing apparatus 1 is provided with a table 11 on which an object to be diced 30 is placed. The table 11 is supported by the stage 10 so as to be rotatable about a central axis parallel to the z direction. The stage 10 is supported by the moving mechanism 25 so as to be displaceable in the x direction.

  The stage 10 has a function of rotating the table 11 around a central axis parallel to the z direction on the xy plane. Further, the moving mechanism 25 has a function of displacing the stage 10 in both directions of the x direction. For this reason, the table 11 supported by the stage 10 can be displaced in the x direction and can be rotated around a central axis extending along the z direction. In the present embodiment, the moving mechanism 25 constitutes a part of the control mechanism 20 described later.

  The dicing apparatus 1 includes a detection mechanism 16. The detection mechanism 16 detects a plurality of dicing scheduled lines L of the object to be diced 30 placed on the table 11. Here, the “dicing schedule line” is a portion of the object to be diced 30 that is to be diced by the dicing apparatus 1. Usually, the “dicing planned line” is linear.

  The detection mechanism 16 is not particularly limited as long as the dicing scheduled line L can be detected. In the present embodiment, the detection mechanism 16 detects the dicing scheduled line L by recognizing the object to be diced 30 as an image. The detection mechanism 16 includes an imaging mechanism 16a that images the object to be diced 30 placed on the table 11, and an image recognition mechanism 16b that recognizes an image captured by the imaging mechanism 16a. The imaging mechanism 16a can be configured by, for example, a camera including an imaging element such as a charge coupled device (CCD) or a complementary metal-oxide semiconductor device (CMOS). The image recognition mechanism 16b can be configured by, for example, a calculation mechanism such as a CPU and a memory connected to the calculation mechanism.

  In the present embodiment, as shown in FIG. 2, the detection mechanism 16 is supported by a first support mechanism 17. However, the support mode of the detection mechanism 16 is not limited to this configuration.

  The detection mechanism 16, the stage 10, and the first and second support mechanisms 17 and 18 are connected to the control mechanism 20. The control mechanism 20 includes the moving mechanism 25 and the control device 21. The control device 21 is connected to the moving mechanism 25, the stage 10, the detection mechanism 16, and the first and second support mechanisms 17 and 18. The control device 21 controls driving of the moving mechanism 25, the stage 10, the detection mechanism 16, and the first and second support mechanisms 17 and 18. Specifically, the control device 21 causes the moving mechanism 25 to displace the stage 10 in the x direction. The control device 21 rotates the table 11 on the stage 10. The control device 21 causes the detection mechanism 16 to detect the dicing scheduled line L and causes the control device 21 to output the detection result. The control device 21 causes the first and second support mechanisms 17 and 18 to rotate the first and second dicing blades 13 and 15 and to displace the first and second spindles 12 and 14 in the y and z directions. The second spindle 14 is turned.

(Operation of Dicing Device 1 and Dicing Method of Dicing Object 30)
FIG. 3 is a flowchart for explaining the dicing method of the object to be diced in the first embodiment. FIG. 4 is a schematic plan view of the main part of the dicing apparatus for explaining the dicing process in the first embodiment.

  Next, operation | movement of the dicing apparatus 1 in this embodiment and the dicing method of the to-be-diced object 30 are demonstrated in detail, referring FIGS. 1-4.

  In the dicing apparatus 1 in the idling state, the table 11 is located below the imaging mechanism 16a. For this reason, the first and second dicing blades 13 and 15 are located on the x1 side in the x direction from the table 11. The first and second spindles 12 and 14 are provided such that the axes C1 and C2 are parallel to the y direction.

  First, as shown in FIG. 3, the object to be diced 30 is placed on the table 11 in step S <b> 1. The placement of the object to be diced 30 may be performed manually by an operator, or may be automatically performed using a placing device.

  Next, in step S2, a plurality of dicing scheduled lines L of the object to be diced 30 are detected. Specifically, the control device 21 causes the detection mechanism 16 to detect a plurality of dicing planned lines L of the object to be diced 30 placed on the table 11, and causes the control device 21 to detect the detected plurality of dicing planned lines L. Output. The plurality of dicing planned lines L include first and second dicing planned lines L1 and L2 which are diced by first and second dicing blades 13 and 15 to be performed later. Note that only the first and second dicing scheduled lines L1 and L2 may be detected as the plurality of dicing scheduled lines L.

  The detection method of the dicing scheduled line L is not particularly limited. For example, when the object to be diced 30 is rectangular, the dicing scheduled line L can be detected by recognizing two opposing sides of the object to be diced 30 as an image. For example, the dicing scheduled line L can be detected by recognizing an image of an alignment pattern formed in advance on the object to be diced 30. The alignment pattern may be formed in a dot shape, for example, or may be formed in a line shape.

  Next, in step S3, the angle size (angle θ) formed by the first dicing scheduled line L1 and the second dicing scheduled line L2 is detected. Specifically, in step S3, the control device 21 calculates the angle θ from the input information of the first and second dicing scheduled lines L1 and L2.

  Next, in step S4, the table 11 is rotated. Specifically, in step S4, as shown in FIG. 1, the control device 21 sets the first dicing blade 13 arranged in parallel to the x direction on the stage 10 before the dicing is started. The table 11 is rotated so as to be positioned on the planned dicing line L1. In step S <b> 4, the control device 21 causes the first support mechanism 17 to displace the first dicing blade 13 in the y direction as necessary with the rotation of the table 11.

  Next, in step S5, the second spindle 14 is turned. Specifically, in step S <b> 5, the control device 21 determines that the second support mechanism 18 has an angle between the axis C <b> 1 of the first spindle 12 and the axis C <b> 2 of the second spindle 14. The second spindle 14 is turned about the turning center axis A2 so that the calculated angle θ is obtained. As a result, the second dicing blade 15 is positioned on the second dicing scheduled line L2. Note that the control device 21 causes the second support mechanism 18 to displace the second dicing blade 15 in the y direction as necessary.

  As described above, in the present embodiment, in step S4 and step S5, the table 11 is rotated and the second spindle 14 is rotated, so that the first and second dicing blades 13, 15 is positioned on the first and second dicing scheduled lines L1 and L2.

  Next, dicing is performed in step S6 shown in FIG. Specifically, the control device 21 first moves the first and second dicing blades 13 and 15 to the first and second support mechanisms 17 and 18 to a position where the dicing object 30 can be diced. It is made to rotate while being lowered in the direction. Then, the control device 21 determines the angle formed between the axis C1 of the first spindle 12 and the axis C2 of the second spindle 14 to the first and second support mechanisms 17 and 18 by the angle θ. The first and second spindles 12 and 14 are moved relative to the table 11 while rotating the first and second spindles 12 and 14 in the state of being matched with each other. Is diced along the first and second dicing lines L1 and L2. Specifically, in the present embodiment, the control device 21 causes the moving mechanism 25 to move the stage 10 in the x direction while appropriately moving the second spindle 14 in the y direction to the second support mechanism 18. Thus, the first and second spindles 12 and 14 are moved relative to the table 11.

In step S6, the control device 21 synchronizes the movement of the second spindle 14 in the y direction and the movement of the stage 10 in the x direction in accordance with the angle θ. Specifically, as shown in FIG. 4, the control device 21 controls the moving mechanism 25 so that the table 11 moves relative to the first and second dicing blades 13 and 15 in the x direction. At the same time, dicing is performed while controlling the second support mechanism 18 so that the second dicing blade 15 moves relative to the table 11 toward the y2 side in the y direction. The controller 21 relatively moves the table 11 and the second dicing blade 15 so as to satisfy V ₂ = V ₁ · tan θ during dicing (V ₁ : _first of the table 11 during dicing). And a relative movement speed in the x direction with respect to the second dicing blades 13 and 15, V ₂ : a relative movement speed in the y direction with respect to the table of the second dicing blade 15 during dicing). Therefore, with this configuration, the load on the first and second dicing blades 13 and 15 and the object to be diced 30 can be reduced.

  As shown in FIG. 3, step S7 is performed following step S6. In step S7, the control device 21 determines whether or not all the dicing scheduled lines L have been diced. When the control device 21 determines that all the dicing scheduled lines L have been diced, the process ends. If the control device 21 determines that all the dicing scheduled lines L have not been diced, step S3 is performed again.

  In the present embodiment, the example in which all the dicing scheduled lines L are detected in step S2 has been described. However, the present invention is not limited to this configuration. For example, as shown in FIG. 5, in step S2, only the first and second dicing scheduled lines L1 and L2 that are diced at a time in step S6 may be detected. In this case, if it is determined in step S7 that all the dicing lines L have not been completed, the process returns to step S2, and the first and second dicing lines L1 and L2 to be diced next are determined. Detected.

  As described above, in the present embodiment, the first and second dicings detected as the angle between the axis C1 of the first spindle 12 and the axis C2 of the second spindle 14 are detected. Dicing is performed in a state where it matches the angle θ formed by the planned lines L1 and L2. For this reason, the dicing apparatus 1 according to the present embodiment can dicing the to-be-divided object 30 with distortion with high efficiency by the two dicing blades 13 and 15. Therefore, by using the dicing apparatus 1, electronic parts can be produced with high productivity.

  In the present embodiment, before starting dicing, the table 11 is rotated so that the first and second dicing blades 13 and 15 are positioned on the first and second dicing scheduled lines L1 and L2. For this reason, even if it is a case where the to-be-divided object 30 is arrange | positioned on the table 11 by arbitrary angles, it can dice suitably. Accordingly, dicing of the object to be diced 30 is facilitated.

  In the present embodiment, the first spindle 12 is not turned, but only the second spindle 14 is turned. For this reason, it is not necessary to provide the first support mechanism 17 with the function of turning the first spindle 12. Therefore, the configuration of the dicing apparatus 1 can be simplified.

  Hereinafter, other examples of preferred embodiments of the present invention will be described. In the following description, members having substantially the same functions as those of the first embodiment are referred to by the same reference numerals, and description thereof is omitted.

(Second Embodiment)
FIG. 6 is a schematic plan view of the dicing apparatus according to the second embodiment.

  The dicing apparatus 2 of the present embodiment shown in FIG. 6 is the dicing apparatus of the first embodiment except that the first support mechanism 17 is capable of turning the first spindle 12 about the central axis A1. 1 has substantially the same configuration.

  FIG. 7 is a flowchart for explaining a dicing method for an object to be diced in the second embodiment. As shown in FIG. 7, also in the present embodiment, steps S1 to S4 are performed as in the first embodiment. However, in the present embodiment, in step S4, the control device 21 causes the stage 10 and the first and second support mechanisms 17 and 18 to have the angle of the first dicing scheduled line L1 with respect to the y direction and the y direction. The table 11 is rotated so that the angle of the second scheduled dicing line L2 becomes equal.

  In this embodiment, step S15 is performed after step S4. In step S15, the first and second spindles 12 and 14 are turned. Specifically, in step S15, the control device 21 detects the first and first detected magnitudes of the angle formed by the axis C1 of the first spindle 12 and the axis C2 of the second spindle 14. 2, which coincides with the angle θ formed by the two dicing lines L 1 and L 2, and the angle formed between the y direction and the axis C 1 of the first spindle 12, and the y direction and the second spindle 14. Both the first and second spindles 12 and 14 are turned so that the angle formed by the axis C2 is equal. Moreover, the control apparatus 21 displaces the 1st and 2nd dicing blades 13 and 15 to ay direction by the 1st and 2nd support mechanisms 17 and 18 as needed. Accordingly, the first and second dicing blades 13 and 15 are positioned on the first and second dicing scheduled lines L1 and L2. Therefore, in this embodiment, each of the magnitude of the angle formed between the y direction and the axis C1 of the first spindle 12 and the magnitude of the angle formed between the y direction and the axis C2 of the second spindle 14 are θ / 2. For this reason, in this embodiment, compared with the case of the first embodiment, the first and second dicing blades 13 and 15 and the first and second dicing blades 13 and 15 of the object to be diced 30 are used. The angle formed by the moving direction (x direction) with respect to the is small. Moreover, the magnitude | size of the load concerning the 1st and 2nd dicing blade 13 and 15 and the to-be-diced object 30 becomes equal. For this reason, the load concerning the 1st and 2nd dicing blades 13 and 15 and the article 30 to be diced can be reduced.

And after step S15 is complete | finished, step S6, S7 is performed similarly to step S6, S7 demonstrated in the said 1st Embodiment. In the present embodiment, in the dicing process in step S6, the control device 21 causes the moving mechanism 25 to move the first and second dicing blades 13 and 15 to the stage 10 and the table 11 provided on the stage 10. The first and second dicing blades 13 and 15 are moved relative to the table 11 in the y direction while the first and second support mechanisms 17 and 18 are moved relative to each other in the x direction. Dicing is performed while moving. Here, in the present embodiment, the control device 21 changes the table 11 and the first and second dicing blades 13 and 15 to V ₂ = V ₃ = V ₁ · tan (θ / 2) when dicing. Move relatively so that For this reason, the load concerning the 1st and 2nd dicing blades 13 and 15 and the article 30 to be diced can be reduced. However, θ is the size of the angle formed by the axis C1 of the first spindle 12 and the axis C2 of the second spindle 14. V ₁ is a relative moving speed in the x direction with respect to the first and second dicing blades 13 and 15 of the table 11 during dicing. V ₂ is the relative moving velocity at the y2 side in the y direction with respect to the table 11 of the second dicing blade 15 during dicing. V ₃ is the relative moving velocity at the y1 side in the y direction with respect to the table 11 of the first dicing blade 13 during dicing.

DESCRIPTION OF SYMBOLS 1, 2 ... Dicing apparatus L ... Dicing plan line L1 ... 1st dicing plan line L2 ... 2nd dicing plan line 10 ... Stage 11 ... Table 12 ... 1st spindle 13 ... 1st dicing blade 14 ... 2nd Spindle 15 ... second dicing blade 16 ... detection mechanism 16a ... imaging mechanism 16b ... image recognition mechanism 17 ... first support mechanism 18 ... second support mechanism 20 ... control mechanism 21 ... control device 25 ... moving mechanism 30 ... Dicing object

Claims (10)

The first spindle on which the first dicing blade is mounted and the second spindle which is disposed so as to face the first spindle and on which the second dicing blade is mounted are driven simultaneously. A dicing method for simultaneously dicing the object to be diced with the first and second dicing blades,
Detecting a first dicing schedule line of the object to be diced by the first dicing blade and a second dicing schedule line of the object to be diced by the second dicing blade;
Detecting a size of an angle formed between the first dicing line and the second dicing line;
The magnitude of the angle formed by the axis of the first spindle and the axis of the second spindle is made to coincide with the magnitude of the angle formed by the detected first and second dicing lines. And adjusting the angle of at least one of the first and second spindles;
The magnitude of the angle formed by the axis of the first spindle and the axis of the second spindle is made to coincide with the magnitude of the angle formed by the detected first and second dicing lines. In this state, while rotating the first and second spindles, the first and second spindles are moved relative to the dicing object, thereby moving the dicing object to the first and second spindles. A dicing step of dicing on a second dicing line. A dicing apparatus for dicing an object to be diced along first and second dicing lines,
A table on which the object to be diced is placed;
A first spindle;
A first dicing blade mounted on the first spindle;
A second spindle facing the first spindle in a first direction;
A second dicing blade mounted on the second spindle;
A detection mechanism for detecting the first and second dicing scheduled lines of the object to be diced placed on the table;
A control mechanism,
The control mechanism is
The detection mechanism is configured to detect the first and second dicing planned lines of the object to be diced placed on the table, and from the detected first and second dicing planned lines, Detecting a size of an angle formed by one dicing planned line and the second dicing planned line;
The magnitude of the angle formed by the axis of the first spindle and the axis of the second spindle is made to coincide with the magnitude of the angle formed by the detected first and second dicing lines. Adjusting an angle of at least one of the first and second spindles;
The magnitude of the angle formed by the axis of the first spindle and the axis of the second spindle is made to coincide with the magnitude of the angle formed by the detected first and second dicing lines. In this state, the first and second spindles are moved relative to the table while rotating the first and second spindles, thereby moving the object to be diced into the first and second objects. A dicing machine that performs dicing on the planned dicing line.   3. The control mechanism according to claim 2, wherein the control mechanism rotates the table so that the first and second dicing blades are positioned on the first and second dicing lines before starting dicing. 4. Dicing equipment.   The control mechanism sets the table so that the first dicing blade parallel to the second direction perpendicular to the first direction is positioned on the first dicing line before starting dicing. After the rotation, the size of the angle formed between the axis of the first spindle and the axis of the second spindle is determined by the detected angle between the detected first and second dicing lines. The dicing apparatus according to claim 2 or 3, wherein the second dicing blade is positioned on the second scheduled dicing line by turning the second spindle so as to coincide with the size.   The control mechanism moves the table relative to the first and second dicing blades in the second direction while moving the second dicing blade relative to the table. The dicing apparatus according to claim 4, wherein dicing is performed while relatively moving in the direction of 1. The angle between the shaft center of the first spindle and the shaft center of the second spindle is θ, and the second and second dicing blades of the table at the time of dicing are the relative movement speed in the direction as V _1, the relative movement velocity in said first direction relative to the table of the second dicing blade during dicing when the V _2,
The dicing apparatus according to claim 5, wherein the control mechanism relatively moves the table and the second dicing blade so as to satisfy V ₂ = V ₁ · tan θ during dicing. Each of the first and second dicing blades is disposed in parallel with a second direction perpendicular to the first direction before the start of dicing,
The control mechanism may make the angle of the first dicing planned line with respect to the second direction equal to the angle of the second dicing planned line with respect to the second direction before starting dicing. While rotating the table, the size of the angle formed between the axis of the first spindle and the axis of the second spindle is determined by the detected first and second dicing scheduled lines. And the angle between the second direction and the axis of the first spindle, and the angle between the second direction and the axis of the second spindle. The first and second dicing blades are positioned on the first and second dicing lines by turning both the first and second spindles so that the sizes are equal. The dicing apparatus according to claim 2 or 3.   The control mechanism moves each of the first and second dicing blades to the table while moving the table in the second direction relative to the first and second dicing blades. The dicing apparatus according to claim 7, wherein dicing is performed while relatively moving in the first direction. The angle between the shaft center of the first spindle and the shaft center of the second spindle is θ, and the second and second dicing blades of the table at the time of dicing are the relative movement speed in the direction as V _1, the relative movement velocity in said first direction relative to the table of the second dicing blade during dicing and V _2, the of the first dicing blade during dicing the relative movement speed in the first direction relative to the table when the V _3,
The control mechanism relatively moves the table and the first and second dicing blades at the time of dicing so that V ₂ = V ₃ = V ₁ · tan (θ / 2). Item 9. The dicing apparatus according to Item 8. The detection mechanism includes an imaging mechanism that images the object to be diced placed on the table, and an image recognition mechanism that recognizes an image captured by the imaging mechanism,
The control mechanism detects a size of an angle formed by the first dicing line and the second dicing line based on an image of the object to be diced recognized by the image recognition mechanism. Item 10. The dicing apparatus according to any one of Items 2 to 9.

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