JP5488889B2 - Electrolytic processing apparatus, electrolytic processing method, and machine tool and assembly machine equipped with electrolytic processing apparatus - Google Patents

Description

The present invention relates to a technique for electrolytically processing the processing target by applying a voltage between the film-shaped electrolytic solution and the processing target while emitting the electrolytic solution to the rotating conductive processing target in a film shape. Specifically, the present invention relates to an electrolytic processing apparatus , an electrolytic processing method, a machine tool including the electrolytic processing apparatus , and an assembling machine that perform fine axisymmetric / non-axisymmetric processing without applying mechanical stress to the processing target.

  For example, in the technical fields of micro punch press, MEMS (Micro Electro Mechanical Systems), micromachining, and micromachining, fine (for example, several to several tens of microns diameter) metal wires are processed with high precision, There is a need for techniques for manufacturing fine tools.

  This kind of fine parts and fine tools can be manufactured by electrolytic processing, heat drawing and the like. For example, the inventor has already proposed a technique for manufacturing a microsaw wire which is one of the above-described fine tools (Patent Document 1). This technology is related to electrolytic processing. While a film electrolyte is brought into contact with the metal wire, a voltage is applied between the metal wire and the electrolyte solution ejection nozzle, and a plurality of notches (recesses) are formed in the metal wire. Forming.

JP 2009-148879 A US Pat. No. 2,741,594

  However, since the technique of Patent Document 1 does not assume that the object to be processed (metal wire) is axially rotated, an axially symmetric product (or a product that requires axial rotation for manufacturing even if non-axisymmetric) is used. It cannot be made. In particular, in each technical field such as MEMS and micromachining, high-precision fine parts and fine tools (for example, fine punches, fine screws, etc.) manufactured by shaft rotation are required. Then, these cannot be produced.

  Also known is a technique for injecting electrolyte into a shell (to be cut) and applying a voltage between the shell and the electrolyte outlet nozzle to cut the shell by electrolytic processing without causing mechanical or thermal stress. (Patent Document 2).

  However, in the technique of Patent Document 2, the electrolytic solution is injected linearly (the nozzle opening is circular). For this reason, when this technique is applied to, for example, the manufacture of fine parts and tools having a diameter on the order of 10 μm, the nozzle diameter needs to be sufficiently smaller than the object to be processed. In this case, the electrolytic solution makes point contact with the object to be processed, and in addition to poor processing efficiency, nozzle clogging is likely to occur because the nozzle diameter is too small. Therefore, it is impossible to apply the technique of Patent Document 2 to the manufacture of fine parts and fine tools.

  An object of the present invention is to perform high-precision and high-efficiency micromachining without applying mechanical stress or thermal stress to a machining target when the workpiece is rotated to produce a fine part or a fine tool. .

The gist of the electrolytic processing apparatus of the present invention is (1) to ( 3 ).
(1) Applying a voltage between the film-like electrolyte and the object to be processed while the electrolyte is made into a film and emitted toward a conductive object, the film-like electrolyte An electrolytic processing apparatus that performs electrolytic processing by electrolytic cutting or electrolytic plating on a linear portion that comes into contact with a processing target,
A nozzle having a slit-like outlet for emitting the electrolyte solution into a film;
An electrolyte supply source for supplying the electrolyte to the nozzle;
A power source for applying the voltage between the film electrolyte and the object to be processed;
Said processing object supports, the processing target in the film-like electrolyte, while the rotary shaft is brought into contact with a vertical or oblique to the film-like electrolyte, relative axis with respect to said film-shaped electrolyte A processing target support rotation jig to be rotated,
An electrolytic processing apparatus comprising:

(2) The electrolytic processing apparatus according to (1), further including a moving mechanism that moves the object to be processed relative to the film electrolyte in the axial direction of the shaft rotation. .

(3) The electrolytic processing apparatus according to (2), wherein the voltage is changed in accordance with a relative movement of the processing target.

The gist of the electrolytic processing method of the present invention is ( 4 ) to ( 6 ).
( 4 ) Applying a voltage between the film-like electrolyte and the object to be processed while the electrolyte is made into a film and emitted toward a conductive object, the film-like electrolyte becomes An electrolytic processing method for electrolytically processing a linear portion that contacts a processing target by electrolytic cutting or electrolytic plating ,
The processing object is rotated relative to the film-like electrolyte while the rotating shaft is in contact with the film-like electrolyte perpendicularly or obliquely to the film-like electrolyte. Electrolytic machining method.

( 5 ) The electrolytic processing method according to ( 4 ), wherein the object to be processed is moved relative to the film electrolyte in the axial direction of the shaft rotation.

( 6 ) The electrolytic processing method according to ( 5 ), wherein the processing voltage is changed according to a relative movement of the processing target.

The on-machine forming machine for fine tools of the present invention is summarized as ( 7 ) and ( 8 ).

( 7 ) A machine tool including the electrolytic processing apparatus according to any one of (1) to ( 3 ), wherein a processing target processed by the electrolytic processing apparatus is attached to the processing target support rotary jig. A machine tool characterized by being used as a fine tool and working a workpiece with the fine tool.
( 8 ) An assembling machine including the electrolytic processing apparatus according to any one of (1) to ( 3 ), wherein a processing target processed by the electrolytic processing apparatus is attached to the processing target support rotating jig. An assembling machine characterized by being used as a fine screw and assembling a fine structure with the fine screw.

  The workpiece is typically rotated at a constant speed, but may be rotated at a variable speed. For example, the object to be machined may be machined while the shaft rotation changes with a certain speed. Further, for example, the processing object may be processed by rotating the shaft alternately between stop and speed alternately.

  In the present invention, the relative axis rotation angle of the object to be processed with respect to the film electrolyte is arbitrary. For example, when the direction in which the film-like electrolyte solution is emitted is defined as the -z axis and the length direction of the nozzle opening is defined as the y axis, the axis of the axis rotation is the x direction as shown in FIG. As shown in FIG. 1B, it may be parallel to the xy plane (perpendicular to the z direction) and may face in directions other than the x direction and the y direction. Further, the axis of shaft rotation may face the y direction as shown in FIG.

  Moreover, the film width of the film-like electrolyte solution is set larger than the width of the object to be processed as shown in FIGS. 1A and 1B, but in the case shown in FIG. It can be set smaller than the width of the object to be processed. In addition, as shown in FIG. 2, the processing object can be processed using the side portion of the film-like electrolyte, but in this case, the film width of the film-like electrolyte is larger than the width of the object to be processed. Can also be set small.

  In the present invention, the cutting region can be narrowed or widened by reducing or increasing the thickness of the film electrolyte. In this invention, in order to adjust the thickness of a film-form electrolyte solution, the shape of a slit-shaped exit port can be adjusted. For example, the central part of the slit-shaped outlet can be narrowed so that the center of the film electrolyte is thin.

  In the present invention, a surface tension adjusting material (surface tension lowering promoting material) or a viscosity adjusting material (viscosity improving material) can be added to the electrolytic solution. For example, the shape of the film-like electrolytic solution after emission is It can be adjusted (held or deformed) according to the distance from the nozzle opening.

  In the present invention, the object to be processed may be configured to rotate about the axis, or the nozzle port may be rotated around the object to be processed.

  In the present invention, when electrolytic cutting is performed, a mask can be applied to a non-processed portion to be processed. The mask can be formed by electrolytic plating according to the present invention, or can be formed by other plating techniques, for example, a plating method using a photolithography technique (whether electrolytic plating or electroless plating is used).

  According to the present invention, a fine axisymmetric wire or a non-axisymmetric wire can be produced with high accuracy without applying mechanical stress (processing reaction force, residual stress, etc.) or thermal stress to the object to be processed.

It is explanatory drawing which shows the arrangement | positioning relationship between a process target and a film-form electrolyte solution in this invention, (A) is a figure which shows the case where a rotating shaft is perpendicular | vertical to a film-form electrolyte solution, (B) is a rotating shaft. The figure which shows the case where it is diagonal to a film-form electrolyte solution, (C) is explanatory drawing which shows the case where a rotating shaft is parallel to a film-form electrolyte solution. It is explanatory drawing which shows a mode that a process target is processed using the side part of a film-form electrolyte solution. It is explanatory drawing which shows one Embodiment of this invention. FIG. 4 is an enlarged explanatory view of a nozzle in the electrolytic processing apparatus shown in FIG. 3. It is a figure which shows the structural example of the electrolyte solution supply source in the electrolytic processing apparatus shown in FIG. In the electrolytic processing apparatus shown in FIG. 3, it is a figure which shows a mode that the film-form electrolyte solution is contacting the process target, (A) is the figure which made small wraparound of electrolyte solution, (B) is a figure of electrolyte solution It is the figure which enlarged the wraparound. It is explanatory drawing of the aspect of the nozzle outlet in the electrolytic processing apparatus shown in FIG. 3, (A) is a figure which shows the nozzle which narrowed the center part of the slit-shaped outlet, (B) was processed (cut). It is a figure which shows the processing target of a state. It is a figure which shows one Embodiment in the case of using the electrolytic processing apparatus shown in FIG. 3 as a cutting device, (A) is a side view which shows a processing state, (B) is a front sectional drawing. (A) is a graph which shows the relationship between the axial direction length and processing depth in embodiment of FIG. 8, (B) is a side view after a process of the process target in embodiment of FIG. 8A is a diagram showing the relationship between the axial length and the machining depth when the machining target is cut while changing the machining time at a constant supply current in the embodiment of FIG. 8, and FIG. It is a figure which shows the side view after a process. 8A is a diagram showing the relationship between the axial length and the machining depth when the machining target is cut with a constant machining time and a supply current changed in the embodiment of FIG. 8, and FIG. It is a figure which shows the side view after a process. It is a figure which shows other embodiment at the time of using the electrolytic processing apparatus shown in FIG. 3 as a cutting device, (A) is a side view which shows a processing state, (B) is a front sectional drawing. (A) is a graph which shows the relationship between the axial direction length and processing depth in embodiment of FIG. 12, (B) is a side view after a process of the process target in embodiment of FIG. It is a figure which shows the example of a process of the process target formed in the embodiment of FIG. It is a figure which shows the example which produces the axis | shaft from which a diameter changes according to the position of an axial direction using the electrolytic processing apparatus shown in FIG. 3, (A) is an output waveform (relationship between processing time and electric current). FIG. 3B is a side view after processing of the processing target. It is a figure which shows the example which produces a cone-shaped axis | shaft (tapered axis | shaft) using the electrolytic processing apparatus shown in FIG. 3, (A) is a graph which shows an output waveform (relationship between processing time and an electric current), It is a side view after a process of processing object to (B). It is a figure which shows embodiment which adjusts cutting shape by changing the angle of the film-form electrolyte solution with respect to the process target OB, (A) is a figure which shows the example which narrowed the area | region of the process part, (B) is a process part. It is a figure which shows the example which widened the area | region. It is a figure which shows embodiment in the case of using an electrolytic processing apparatus as a cutting device, and producing a screw, (A) is a side view which shows a processing state, (B) is front sectional drawing, (C) is also a plane FIG. It is a figure which shows other embodiment at the time of using an electrolytic processing apparatus as a cutting device, and producing a screw, (A) is a side view which shows a processing state, (B) is front sectional drawing similarly. It is a figure explaining the effect | action of embodiment of FIG. 19, (A) is a figure which shows a process target, (B) is a figure which shows the process target which gave the mask pattern, (C) forms a screw groove in a process target. The figure which shows a mode that it did, (D) is a figure which shows a mode that the mask pattern was removed. In this invention, it is a figure which shows embodiment which processes the end surface of a process target, (A) is a figure which shows the state (state in which the projection part remained in the center part) which cut off the process target, (B) is a film The figure which shows a mode that an end surface process is performed by moving a process target to an axial direction with respect to a shaped electrolyte, (C) is a figure which shows the process target by which the projection part was removed and the end surface was shape | molded flat. . It is a figure which shows one Embodiment in the case of using an electrolytic processing apparatus as a plating apparatus, (A) is a side view which shows a processing state, (B) is front sectional drawing. It is a figure which shows the nozzle which can be rotated by a predetermined angle centering on an axis | shaft. It is a figure which shows the aspect of the nozzle used for this invention, (A) is sectional drawing which shows embodiment of the nozzle which radiate-emits electrolyte solution, (B) is a perspective view similarly, (C) is the shape of a pipe | tube. It is a figure which shows a mode that the inner surface of the process target made is processed. It is explanatory drawing which shows one Embodiment of the on-machine molding machine of this invention.

  FIG. 3 is an explanatory view showing an embodiment of the present invention. In FIG. 3, the electrolytic processing apparatus 1 includes a nozzle 11, an electrolytic solution supply source 12, a power source 13, a processing target support rotating jig 14, a processing target moving mechanism 15, a control device 16, and an electrolytic solution tank 17. It has.

As shown in FIGS. 4A and 4B (enlarged explanatory view), the nozzle 11 includes a slit-shaped exit port 11 that emits the electrolyte LQ in a film shape.
If the electrolytic processing apparatus 1 performs only electrolytic cutting, usually, metal ions are not included in the electrolytic solution. Therefore, as shown in FIG. 4A, the nozzle 11 can be made of a conductive material such as metal, and the nozzle 11 can be directly energized. When the electrolytic processing apparatus 1 performs electrolytic plating, the nozzle 11 melts when made of copper or steel, but does not melt (consumes) when graphite or platinum is used.

When both electrolytic cutting and electrolytic plating are performed using an electrolytic solution LQ containing metal ions, a nozzle 11 having an electrode rod can be used as shown in FIG. 4B. The nozzle 11 is made of a non-conductive material (for example, plastic or ceramic). The electrode 11 is inserted into the nozzle 11 so as to reach the liquid reservoir CH. In FIG. 4B, the taken-in electrolytic solution LQ is accumulated in the liquid reservoir CH, and is emitted from the slit-like emission port 111 as a film-like electrolytic solution FLQ. Further, an electrode rod EP is inserted through the nozzle 11 so as to reach the liquid reservoir CH. In this case, when metal ions contained in the electrolytic solution LQ are formed on the electrode rod EP due to cutting, a voltage having a polarity opposite to that at the time of processing is applied to the electrode rod EP in a timely manner. By adding between the object OB, the electrode rod EP can be cleaned.
If graphite or a metal with a low ionization tendency (for example, platinum) is used, consumption of the electrode can be prevented or reduced.

In FIG. 4, for the convenience of explanation, the object to be processed OB is shown in a state where it is not subjected to electrolytic cutting or electrolytic plating. A well-known technique can be used for the production of the nozzle 11, and for example, as described in Patent Document 1, it can be produced by laminating thin plates.
The electrolytic solution supply source 12 circulates and supplies the electrolytic solution LQ stored in the electrolytic solution tank 17 to the nozzle 11. As shown in FIG. 5, the electrolytic solution supply source 12 generates an injection pressure of the electrolytic solution by the pump pressure P, and injects the electrolytic solution LQ from the nozzle 11. The power source 13 applies a machining voltage between the film-like electrolyte FLQ and the conductive workpiece OB.

  The processing target support rotary jig 14 supports the processing target OB and rotates the processing target OB around an axis L (orthogonal axis in FIG. 3) intersecting the surface of the film-like electrolyte FLQ. The processing target moving mechanism 15 can relatively move the processing target OB along the axis L with respect to the nozzle 11 (that is, with respect to the film electrolyte solution FLQ). The control device 16 can change the machining voltage and / or the feed rate. In the electrolytic solution tank 17, used electrolytic solution LQ is stored.

  In the electrolytic processing apparatus 1, a voltage is applied between the film-like electrolytic solution FLQ and the processing target OB while the electrolytic solution LQ is made into a film and emitted toward the processing target OB. Thereby, the linear part which the film-form electrolyte solution FLQ contacts the process target OB can be electrolytically processed.

  Since the machining amount is proportional to the amount of electricity (that is, the product of the current and the machining time), the cutting can be controlled by the amount of electricity regardless of the position of the nozzle and the workpiece OB. Therefore, hitting is unnecessary compared with lathe processing and the like, and a constant volume machining speed can be obtained by machining at a constant current.

  6A and 6B show a state in which the film-like electrolyte FLQ is in contact with the object to be processed OB. 6 (A) and 6 (B), for the convenience of explanation, the object OB to be processed is shown in a state where electrolytic cutting or electrolytic plating is not performed. The wraparound can be adjusted by adjusting the surface tension and viscosity of the electrolyte LQ. That is, the wraparound can be reduced by reducing the surface tension of the electrolyte LQ as shown in FIG. 6A, and the wraparound is increased by increasing the viscosity of the electrolyte LQ as shown in FIG. 6B. it can.

  In addition, as shown in FIGS. 7A and 7B, the processing state can be adjusted by narrowing the central portion of the slit-shaped exit port 111. Although not shown, the central portion of the slit-shaped exit port 111 can be widened, and the slit-shaped exit port 111 can be formed on a curve. Further, although the exit surface on which the slit exit port 111 is formed is a flat surface, it can be a secondary curved surface such as an arch-shaped curved surface.

  In the present invention, the electrolytic processing apparatus 1 can be used as a cutting apparatus or a plating apparatus.

  When the electrolytic processing apparatus 1 is used as a cutting apparatus (that is, when the processing is cutting), an embodiment is shown in a side view of FIG. 8A and a front sectional partial view of FIG. A cross-sectional view taken along the line aa in FIG.

8A and 8B, the size of the slit-shaped exit port 111 (see FIG. 4) is a rectangle of 200 × 40 μm, and the distance (gap length) between the slit-shaped exit port 111 and the processing target OB is 1. It was 5 mm. Further, a copper wire having a diameter of 300 μm was used as the processing object OB, and a 20 wt% solution of NaNO ₃ was used as the electrolyte LQ. Furthermore, the tank pressure (internal pressure of the electrolyte supply source 12) was set to 0.5 MPa.

  Then, the control device 16 is driven at a constant rotation speed N of the workpiece-supporting rotary jig 14 (N = 2,500 rpm), the supply current of the power supply 13 is constant (I = 50 mA), and the machining time (power supply drive time). Was set to 1 second to cut the workpiece OB. 8A and 8B, the processing target OB is not moved in the direction of the axis L. FIG. 9A shows the relationship between the axial length W and the machining depth D, and FIG. 9B shows a side view of the machined object OB after machining.

  FIG. 10 (A) shows a processing current (power source driving time) of 1 second, 2 seconds, 3 seconds, 4 seconds with a constant supply current (I = 50 mA) of the power source 13 in the embodiment of FIG. 8 (A). The relationship between the axial length W and the machining depth D when the machining target OB is cut as 5 seconds is shown. FIG. 10B shows a side view after processing of the processing target OB when the processing time is 5 seconds.

  FIG. 11 (A) is a processing target in the embodiment of FIG. 8 (A), in which the processing time (power supply driving time) is 5 seconds and the supply current I of the power supply 13 is 10 mA, 20 mA, 30 mA, 40 mA, 50 mA. The relationship between the axial length W and the machining depth D when OB is cut is shown. FIG. 11B shows a side view after processing of the processing target OB when the processing time is 50 mA. In the processing examples shown in FIGS. 10B and 11B, the processing conditions are the same (processing time 5 seconds, supply current 50 mA), so the post-processing shapes are the same.

  When the electrolytic processing apparatus 1 is used as a cutting apparatus (that is, when processing is cutting), a side view of FIG. 12 (A) and a front sectional partial view of FIG. 12 (B) (FIG. 12). This will be described with reference to a cross-sectional view taken along line aa in FIG.

  Also in this embodiment, the configuration of the size of the electrolytic processing apparatus slit-shaped exit port 111 (see FIG. 4), the distance (gap length) between the slit-shaped exit port 111 and the processing object OB, and the like are shown in FIGS. ) And the processing object OB to be used, the electrolytic solution LQ, and the tank pressure (internal pressure of the electrolytic solution supply source 12) are also described with reference to FIGS. 8A and 8B. It is the same as the form. In the example shown in FIGS. 8A and 8B, the machining target OB is not moved in the direction of the axis L. However, in this embodiment, the machining target OB can be moved in the direction of the axis L. .

  Then, the control device 16 is driven at a constant rotation speed N of the workpiece-supporting rotary jig 14 (N = 2,500 rpm), the supply current of the power supply 13 is constant (I = 50 mA), and the machining time (power supply drive time). Was set to 10 seconds, and the processing target OB was moved in the direction of the axis L at a speed of 2 seconds per second (v = 6 mm / min), thereby cutting the processing target OB. 12A and 12B, the surface of the workpiece OB before cutting is indicated by S1, and the surface after cutting is indicated by S2.

  FIG. 13A shows the relationship between the axial length W and the machining depth D, and FIG. 13B shows a side view of the machined object OB after machining. As can be seen from FIGS. 13A and 13B, a shaft having a uniform desired diameter could be produced according to the present invention. The surface roughness (Rz) of the processed surface was about 10 μm.

  FIG. 14 shows an example in which the shaft diameter of the workpiece OB (copper wire) is further narrowed. In this case, the diameter is reduced by changing the current value I and repeating the processing on the processing target OB. Here, an axis having a diameter of 60 μm was produced by performing repetitive machining three times at I = 50 mA, once at I = 25 mA, and twice at I = 10 mA. The total machining time in this case was 60 seconds.

  Next, an example in which a shaft whose diameter changes according to the position in the axial direction will be described. In this case, the current value I was changed from 0 to 50 mA in a sine wave shape, and the machining target was moved (feeded) in the same manner as the machining with a constant current, and the constriction machining was performed. FIG. 15A shows an output waveform (relationship between processing time T and current I), and FIG. 15B shows a side view after processing of the processing target OB. As shown in FIG. 15B, shafts having different shaft diameters at the axial positions could be formed. In FIG. 15A, the machining times are indicated by a, b, c, d, e, and in FIG. 15B, the positions in the machining target OB axis direction corresponding to the machining times are also represented by a, b, c, d and e.

  Next, an example of producing a conical shaft (tapered shaft) will be described. In this case, the current value I was changed from 0 to 50 mA with a ramp wave, and the machining object was moved (feeded) in the same manner as the machining with the constant current, and the taper machining was performed. FIG. 16A shows an output waveform (relationship between processing time T and current I), and FIG. 16B shows a side view after processing of the processing target OB. As shown in FIG. 16B, a tapered shaft could be formed.

  In the present invention, as shown in FIGS. 17A and 17B, the cutting shape can be adjusted by changing the angle of the film-like electrolyte FLQ with respect to the object OB to be processed. In FIG. 17A, by setting the angle of the film-like electrolyte FLQ to 90 ° with respect to the processing object OB, an uneven boundary (for example, a ridge formed by the boundary between the cutting region and the non-cutting region). ) Can be sharpened. In FIG. 17B, the angle of the film-like electrolyte FLQ with respect to the processing object OB is set to 90 °, thereby creating a boundary between the uneven portions of the processed portion (for example, the boundary between the cutting region and the non-cutting region). Can be made dull.

In the present invention, an electrolytic processing apparatus can be used as a cutting apparatus to produce a screw. 18A and 18B are diagrams showing an embodiment of manufacturing a screw, in which FIG. 18A is a side view showing a processed state, FIG. 18B is a front sectional view (a-a sectional view in FIG. 18A), C) is also a plan view. In the present embodiment, the angle of the film-like electrolyte FLQ is set obliquely with respect to the processing target OB, and the processing target OB is moved along the rotation axis L, so that the surface of the processing target OB is screwed. Can be cut.

  FIG. 19 is a view showing an embodiment in which a screw is produced using a mask pattern, (A) is a side view showing a processed state, and (B) is a front sectional view (a-a cross section in (A)). Figure). In the present embodiment, the screw groove G can be formed by forming the helical mask pattern S3 on the object to be processed OB.

  In this embodiment, the mask pattern S3 shown in FIG. 20B is applied to the object OB (copper wire) shown in FIG. 20A, and the cutting shown in FIGS. 19A and 19B is performed. . In this embodiment, the same control as that for producing a shaft having a uniform desired diameter is performed (see FIG. 13A). Thereby, the thread groove G can be formed in the object OB as shown in FIG. As shown in FIG. 20D, the mask pattern S3 can be removed.

  Next, an embodiment of end surface processing of the processing target OB will be described. First, as shown in FIG. 21A, a parting process was performed on the processing target OB. As shown in FIG. 21A, a protruding portion remains at the center of the object to be processed OB (copper wire). This is because the current density is higher at the center of the film-like electrolyte FLQ. Therefore, the end face cannot be flattened only by parting off.

  In this embodiment, after the cut-off, as shown in FIG. 21B, the end surface processing is performed by moving the processing target OB in the direction of the axis L with respect to the film electrolyte FLQ. As a result, it is possible to process only the protruding portion in contact with the film-like electrolyte FLQ.

  In this embodiment, it moved 100 μm in the direction of the copper wire axis at a moving speed of 0.2 mm / min. Thereby, as shown in FIG.21 (C), the copper wire from which the projection part of the end surface was removed was able to be produced. When the electrolytic processing apparatus 1 is used as a plating apparatus (that is, when the processing is plating), an embodiment is shown in a side view of FIG. 22 (A) and a front sectional partial view of FIG. 22 (B). A cross-sectional view taken along the line aa in FIG.

  22A and 22B, the size of the slit-shaped exit port 111 (see FIG. 4) is a rectangle of 200 × 40 μm, and the distance (gap length) between the slit-shaped exit port 111 and the processing target OB is 1. It was 5 mm. Further, a copper wire having a diameter of 300 μm was used as the object to be processed OB. A plating solution was used as the electrolytic solution LQ. Furthermore, the tank pressure (internal pressure of the electrolyte supply source 12) was set to 0.5 MPa.

  Then, the control device 16 is driven at a constant rotation speed N of the workpiece-supporting rotary jig 14 (N = 2,500 rpm), the supply current of the power supply 13 is constant (I = 50 mA), and the machining time (power supply drive time). Was set to 30 seconds, and the processing object OB was moved in the direction of the axis L at a speed of v (v = 6 mm / min) per second, thereby plating the processing object OB (in FIG. 22, the plating film is indicated by S4).

  In each of the above embodiments, the nozzle 11 is fixed and the workpiece OB is rotated. However, in the present invention, the nozzle 11 is rotated along the guide rail 110 as shown in FIG. ). 24A and 24B are diagrams showing an embodiment of the nozzle 11 that emits and emits the electrolytic solution LQ, and shows an embodiment in which a film-like electrolytic solution FLQ is formed. In the present embodiment, a rod I having a flange H is provided in the cylindrical body O.

  The high-pressure electrolyte LQ is supplied from the injection port IN, and the film-like electrolyte FLQ is emitted from the gap between the end face of the cylindrical body O and the head H (slit-like outlet 111). By using the nozzle 11 shown in FIGS. 24A and 24B, the inner surface of the processing target OB having a tube shape can be processed (cut in FIG. 24C).

  FIG. 25 shows an embodiment of the machine tool of the present invention. In FIG. 25, the machine tool 3 functions as the electric discharge machine 2 and includes the electrolytic processing apparatus 1. The machining target OB produced (machined) in the electrolytic machining apparatus 1 is used as a machining electrode (fine tool) A in the electric discharge machine 2 and used for machining the workpiece B.

  That is, since the machining target support rotary jig 14 in the electrolytic machining apparatus 1 is used as it is as an electrode holding jig for the machining electrode (fine tool) A in the electric discharge machining apparatus 2, a highly accurate electric discharge can be performed without causing a shift in the axis. Processing can be performed.

  In the above embodiment, the case where the processing machine is an electric discharge machine has been described. However, the processing machine may be an electrolytic processing machine that performs processing in an electrolytic bath, or may be an ultrasonic processing machine. Furthermore, a punching machine may be used.

  The machine tool of the present invention may be an assembly machine provided with an electrolytic processing apparatus. In this case, the processing object processed by the electrolytic processing apparatus 1 can be used as a fine screw while being attached to the processing object supporting rotary jig 14, and a fine structure can be assembled with the fine screw.

DESCRIPTION OF SYMBOLS 1 Electrolytic processing apparatus 2 Electric discharge machine 3 Machine tool 11 Nozzle 12 Electrolyte supply source 13 Power supply 14 Processing object support rotation jig 15 Processing object moving mechanism 16 Control apparatus 17 Electrolyte tank 111 Slit-shaped exit A A Processing electrode CH Liquid storage EP Electrode bar FLQ Film electrolyte LQ Electrolyte L Rotating shaft OB Object

Claims (8)

By applying a voltage between the film-like electrolyte and the object to be processed while the electrolyte is made into a film and emitted toward the object to be processed, the film-like electrolyte is applied to the object to be processed. An electrolytic processing apparatus for electrolytically processing a linear portion to be contacted by electrolytic cutting or electrolytic plating ,
A nozzle having a slit-like outlet for emitting the electrolyte solution into a film;
An electrolyte supply source for supplying the electrolyte to the nozzle;
A power source for applying the voltage between the film electrolyte and the object to be processed;
Said processing object supports, the processing target in the film-like electrolyte, while the rotary shaft is brought into contact with a vertical or oblique to the film-like electrolyte, relative axis with respect to said film-shaped electrolyte A processing target support rotation jig to be rotated,
An electrolytic processing apparatus comprising:   2. The electrolytic processing apparatus according to claim 1, further comprising a moving mechanism that moves the processing object relative to the film-like electrolyte in the axial direction of the shaft rotation.   The electrolytic processing apparatus according to claim 2, wherein the voltage is changed in accordance with a relative movement of the processing target. By applying a voltage between the film-like electrolyte and the object to be processed while the electrolyte is made into a film and emitted toward the object to be processed, the film-like electrolyte is applied to the object to be processed. An electrolytic processing method for electrolytically processing a linear portion to be contacted by electrolytic cutting or electrolytic plating ,
The processing object is rotated relative to the film-like electrolyte while the rotating shaft is in contact with the film-like electrolyte perpendicularly or obliquely to the film-like electrolyte. Electrolytic machining method. 5. The electrolytic processing method according to claim 4 , wherein the processing object is moved relative to the film-like electrolyte in the axial direction of the shaft rotation. The electrolytic machining method according to claim 5 , wherein the machining voltage is changed in accordance with a relative movement of the machining target. A machine tool comprising the electrolytic processing apparatus according to any one of claims 1 to 3 , wherein a processing target processed by the electrolytic processing apparatus is used as a fine tool while being attached to the processing target support rotary jig, A machine tool characterized by machining a workpiece with the fine tool. An assembly machine including the electrolytic processing apparatus according to any one of claims 1 to 3 , wherein a processing target processed by the electrolytic processing apparatus is used as a fine screw while being attached to the processing target support rotary jig, An assembling machine for assembling a fine structure with the fine screw.