JP5531229B2 - Color filter correction method - Google Patents

Description

The present invention relates to a pattern correction method for correcting a defective portion of a pattern formed on a substrate, and more specifically, cures the entire surface of an ultraviolet curable correction ink applied to a portion where the defective portion has been removed by laser light. Further, the present invention relates to a pattern correction method that reduces the occurrence of ultraviolet irradiation marks in portions other than the defective portion.

During the manufacturing process of liquid crystal color filters, defects may occur in black filters and red, green, and blue pixel patterns that separate red, green, and blue filters due to transfer failures and transfer failures caused by foreign matter. In order to improve the product yield, it is necessary to correct the defect.
Therefore, conventionally, after irradiating the defective portion with laser light, removing the defective portion by laser, and applying the UV curable color filter correcting ink to the laser-removed portion, the same beam shape as the laser light is applied. A pattern correction method (Patent Document 1) in which the applied correction ink is irradiated with the ultraviolet light of the above-mentioned to cure a part of the correction ink, or the ultraviolet light beam shape is not formed into a specific shape. A pattern correction method (Patent Document 2) or the like is used for irradiating a wide range including the ink region to cure the entire correction ink.

Japanese Patent Laid-Open No. 06-109919 JP 2006-013343 A

However, since the ultraviolet curable color filter correcting ink shrinks when it is cured by irradiation with ultraviolet rays, the amount of the laser-removed portion of the ultraviolet-ray-extracted portion of the ultraviolet light is projected to the extent that it is expected. Fill and apply the cured resin.
For this reason, in the former pattern correction method of the prior art, since the color filter coloring ink is irradiated with ultraviolet rays having the same beam cross-sectional shape as that of the laser beam for removal, the portion not irradiated with the ultraviolet beam is cured. A cleaning process is required.
Further, in the pattern correction method according to the latter of the prior art, the overlapping portion is cured stably, but since the portion other than the portion where the coloring ink is applied is irradiated with ultraviolet rays, normal portions other than the defective portion are normal. There is a problem that a portion (FIG. 4) in which ultraviolet burn-out occurs is generated.

Therefore, in view of the problems of the prior art, the present invention prevents the normal portion from being burned by ultraviolet rays when the defective portion of the color filter is corrected by the ultraviolet curable correction ink, and the normal area around the defective portion and the correction. It is an object of the present invention to provide a method for correcting a defect of a color filter that can also stably cure overlapping portions of ink for printing (FIG. 5B).

According to a first aspect of the present invention, there is provided a color filter defect correcting method comprising: irradiating a defect portion of a colored layer of a color filter with a laser beam formed in a first quadrilateral shape in which a beam cross section includes the defect portion. After removing the portion, an ultraviolet curable correction ink is applied to the removed portion so that the portion protrudes , and the applied correction ink is irradiated with the first quadrilateral guide light. After confirming that the shape of the irradiated guide light is within the region of the applied correction ink, the second quadrilateral ultraviolet beam in which the contour of the applied correction ink is inscribed It is characterized by curing the correction ink by irradiating the ultraviolet rays.

With the above configuration, the present invention has the following effects.
According to the first aspect of the present invention, the ultraviolet irradiation region is the second quadrilateral that includes the first quadrilateral shape for laser removal, and the correction ink to which each side of the second quadrilateral is applied Therefore, the entire surface of the applied correction ink is cured, and ultraviolet burns in a normal portion where the correction ink is not applied can be reduced.
Furthermore, the bonding between the correction ink after curing and the color filter becomes good due to diffusion bonding or the like in the overlapping portion between the correction ink and the color filter around the laser removed.

It is a conceptual diagram for demonstrating the defect correction method which concerns on embodiment of this invention. It is a conceptual diagram for demonstrating an example of the defect correction apparatus for enforcing the said correction method. It is a conceptual diagram for demonstrating the aperture mechanism of the said defect correction apparatus. It is explanatory drawing of the defect correction method by the conventional method. It is a conceptual diagram which shows the state with which the ink for correction was filled in the part removed by the laser.

First, a color filter defect correcting method and a correcting apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.
FIG. 1 shows a color filter defect correcting method according to an embodiment of the present invention, in which a defect portion (a) (FIG. 1 (a)) of a corrected portion is matched with a first defect portion. After irradiating a rectangular laser beam (FIG. 1b), removing the portion (FIG. 1 (c)), supplying and applying correction ink over the removed portion (FIG. 1 (d)). ) Irradiating a second rectangular ultraviolet beam having a size that encloses the first square and inscribed the contour of the supplied and applied correction ink (FIG. 1 (e)). The correcting ink is cured (FIG. 1 (f)). As a result, in the present invention, the ultraviolet burned portion is limited to a narrow range as shown in FIG.
In this case, it is desirable to set the second quadrangle so that the ultraviolet burned portion is in the range of 1 to 5 μm or less in the portion closest to the contour of the correction ink.

FIG. 2 shows a color filter defect correcting apparatus according to an embodiment of the present invention. The color filter defect correcting apparatus 1 mounts a color filter (hereinafter simply referred to as “work”) W to be corrected. Then, a transfer table 13 for transferring in a predetermined direction by a moving means (not shown), and an objective lens 6 provided facing the workpiece W above the workpiece W, and an optical axis L of the objective lens 6 are arranged. A half mirror 8, an imaging lens 5, an aperture mechanism 4, a half mirror 7, and a laser irradiator 2 in which an open / close switch (not shown) is built are arranged in order on the same axis.

The ultraviolet irradiation unit 3 is arranged on the optical axis of the optical axis L1 branched from the optical axis L by the half mirror 7, and on the optical axis of the optical axis L2 branched from the optical axis L by the half mirror 8. A half mirror 9 and a CCD camera 11 as imaging means are arranged in this order, and an illumination light source 10 is arranged on the optical axis deflected from the optical axis L2 by the half mirror 9.
The ultraviolet irradiation unit 3 includes an ultraviolet light source 30A and a shutter 30B. The ultraviolet light source 30 and the shutter 30A are arranged on the optical axis L1 in this order toward the optical axis L on the optical axis L1.

Also, a dispenser nozzle 12 as an ink application means for applying correction ink is disposed in the vicinity of the objective lens 6, and the tip of the dispenser nozzle 12 is connected to the optical axis L and the workpiece by a dispenser nozzle driving means (not shown). It is possible to approach and separate from the intersection α of W.
The objective lens 6, the half mirror 8, the imaging lens 5, the aperture mechanism 4, the half mirror 7, the laser irradiator 2, the ultraviolet irradiation unit 3, the half mirror 9, the CCD camera 11, the illumination light source 10, and the dispenser nozzle 12 are The workpiece W can be integrally moved away from the workpiece W in the Z-axis direction.

As shown in FIG. 3, the aperture mechanism 4 has a pair of slit plates 4A1, 4A2, a pair of slit plates 4B1, 4B2, slit driving means 40A, 40B, and slit rotating means 41A, 41B. The slit driving means 40A and 40B and the slit rotating means 41A and 41B are electrically connected to the control device 14.

The slit plates 4A1 and 4A2 can be moved toward and away from each other (arrow D) by the slit driving means 40A on the same plane parallel to the optical axis L, and the optical axis L can be integrated by the slit rotating means 41A. It can be rotated around the center of rotation (arrow B).
The center of the aperture mechanism 4 in the optical axis direction coincides with the upper focal position of the imaging lens 5, and the laser light that has passed through the imaging lens 5 enters the objective lens 6 in a parallel light state, and the workpiece W A slit-shaped laser beam forms an image on the portion to be corrected (a).

The slit plates 4B1 and 4B2 can also be moved toward and away from each other (arrow D) by the slit driving means 40A on the same plane parallel to the optical axis L, and the optical axis L can be integrated by the slit rotating means 41B. The center of rotation is rotatable (arrow B).
The shape of the laser beam irradiated from the laser irradiation unit 2 to the workpiece W is adjusted by the slit shape formed by the slit plates 4A1, 4A2, 4B1, 4B2.
Then, the laser beam shaped into a predetermined beam shape is condensed at the intersection α through the imaging lens 5, the half mirror 8 and the objective lens 6.

The laser irradiator 2 includes a laser oscillator 20 that emits laser light in the ultraviolet region with wavelengths of 266 nm, 355 nm, and 532 nm, a laser shutter (not shown) that is attached to the laser oscillator 20 and that blocks the laser light, and the laser A guide light irradiator 21 capable of emitting white light coaxially with the optical axis of the light.
The guide light irradiator 21 includes a guide light source 21A, a shutter 21B that blocks guide light emitted from the guide light source 21A, a reflection mirror 21C that deflects the guide light in the direction of the optical axis L, and a reflection mirror 21C. It has a half mirror 21D for making the deflected guide light coaxial with the optical axis L.

The dispenser nozzle 12 is pre-filled with a paste-like correction ink composed of a pigment of a predetermined color, a dispersant, an ultraviolet polymerization initiator, and an ultraviolet curable resin, and a dispenser controller 17 connected to the dispenser nozzle 12 ( The correction ink discharge amount is controlled by an air compressor, a pressure control valve, an on-off valve, etc. (not shown). The dispenser controller 17 is connected to the control device 14.

The CCD camera 11 is connected to a display device 16, and an image captured by the CCD camera 11 is displayed on the display device 16.
And according to the image of the said defect part displayed on the indicator 16, an operator drives the slit drive means 40A, 40B and the slit rotation means 41A, 41B from the external input device 15, and thereby the slit opening part 40. Can be set to a range (first quadrilateral) for laser removal or an ultraviolet irradiation region (second quadrilateral).

Next, a color filter defect correction method according to an embodiment of the present invention using the color filter defect correction apparatus 1 will be described.
The workpiece W is placed on the transfer table 13, and a defective portion a as shown in FIG. 1A is set below the optical axis L of the objective lens 6 by a table moving means (not shown).
At this time, the illumination light source 10, the CCD camera 11, and the guide light source 21A are operated, and the shutter 21B, the shutter 30A, and the laser shutter are closed.

An image of the defective portion A is captured by the CCD camera 11 and displayed on the display 16 and then the opening 4E of the variable slit 4 is used by using the external input means 15 based on the image of the defective portion A displayed on the display 16. The shape is adjusted so as to be a first quadrangle that includes the defect portion a.
In this embodiment, the operator rotates the slit plates 4A1, 4A2 integrally while watching the defect image on the screen of the display to match the inclination of the defect A, and then sets the interval between the slit plates 4A1, 4A2. The slit plates 4B1 and 4B2 are then integrally rotated in accordance with the longitudinal direction of the defect A to obtain an angle orthogonal to the inclination of the slit plates 4A1 and 4A2, and then the interval between the slit plates 4B1 and 4B2. Are aligned in the width direction of the defect A, and then the opening 4E is formed in a first square (FIG. 1B).

Next, the shutter 30A is closed, the laser shutter is opened, and the laser light beam-shaped into the first square through the opening 4E is passed through the imaging lens 5, the half mirror 8 and the objective lens 6 to the defective portion a. Irradiation is performed, and as shown in FIG. 3B, a part of the pixels of the workpiece W within a predetermined range including the defective portion A is removed.

Thereafter, the laser shutter is closed, and then the dispenser moving device is operated using the external input means 15 so that the tip of the dispenser nozzle 12 containing the correction ink is removed by the laser light. Then, the dispenser controller 17 is controlled to supply the correction ink so as to protrude from the dispenser nozzle 12 by the laser beam (FIGS. 1 and 5).

This is because when the supplied correction ink is cured by irradiation with ultraviolet rays, the volume of the correction ink shrinks. Insufficient bonding at the boundary between the predetermined range removed by the laser beam and the normal pixel portion by providing a slight overlap in the color resist of the normal pixel portion in the predetermined range removed by the light It is also for preventing it.
Further, since the expected shrinkage amount varies depending on the properties of the correction ink to be used, it is determined based on the data of the thickness of the correction ink droplet to be used after UV curing, which has been measured in advance.

Thereafter, after the dispenser nozzle 12 is moved to a position where the tip of the dispenser nozzle 12 is not irradiated with the ultraviolet rays, the illumination light source 10 is turned off, the shutter 21B is opened, and the guide light is passed through the opening 4E of the aperture mechanism 4. The surface on which the correction ink is applied is irradiated, and an image in that state is picked up by the CCD camera 11 and displayed on the display 16.

Then, after confirming that the shape displayed on the display 16 by the guide light displayed on the display 16 is within the area of the applied correction ink (when it is not within the area) Apply the correction ink again so that the first square is within the region), and using the external input means 15, the distance between the pair of slits 4A1, 4A2 and 4B1, 4B2 of the aperture mechanism 4 and By adjusting the rotation posture, the shape of the opening 4E is adjusted to a second quadrangle having a size larger than the inscribed outline of the applied correction ink. (That is, the positions of the slits 4A1, 4A2, and 4B1, 4B2 are adjusted while viewing the image on the display 16 so that the contour of the applied correction ink is within the area of the guide light that has passed through the opening 4E. To do.)
In this case, the size of the second quadrangle is desirably set so that the portion closest to the contour of the correction ink is in the range of 1 to 5 μm or less.

Next, the shutter 30B of the ultraviolet light source 3 is opened, and the laser light beam-formed into the shape of the opening 4E (second square) of the aperture mechanism 4 is applied through the imaging lens 5 and the objective lens 6. After irradiating the correction ink portion and curing the region, the shutter 30B of the ultraviolet light source 3 is closed to complete the correction.
Furthermore, when there are a plurality of defective portions a in the work W, the defective portions a are moved directly below the objective lens 5 and are corrected in the series of steps described above, and there are no other portions that need to be corrected. If so, end the correction.

In this embodiment, the guide light is white light. However, the present invention is not limited to this, and light having a complementary color relationship with the correction ink may be selected.
In this embodiment, the ultraviolet irradiation unit 3 is used for curing the correction ink, but it goes without saying that the laser beam used for laser removal may be used at a lower output instead.

DESCRIPTION OF SYMBOLS 1 Color filter defect correction apparatus 2 Laser beam irradiation device 3 Ultraviolet irradiation unit 4 Aperture mechanism 5 Imaging lens 6 Objective lens 7 Half mirror 8 Half mirror 9 Half mirror 10 Illumination light source 11 CCD camera 12 Dispenser 13 Transport table 14 Control device 15 External input means 16 Display 17 Dispenser controller W Workpiece (color filter)
L Objective lens optical axis L1 Optical axis L2 branched from the optical axis L toward the ultraviolet irradiation unit Optical axis L2 branched from the optical axis L toward the CCD camera

Claims (1)

The defect portion of the colored layer of the color filter, after the beam cross-section to remove the defect by irradiating the first laser light formed into a quadrilateral shape enclosing the defect portion, the moiety to the removed portion UV-curable correction ink was applied so as to protrude , and the applied correction ink was irradiated with the first quadrilateral guide light, and the shape of the irradiated guide light was applied. After confirming that it is within the region of the correction ink, the correction ink is cured by irradiating the ultraviolet rays of the second quadrilateral ultraviolet beam in which the contour of the applied correction ink is inscribed . A color filter defect correcting method characterized by the above.