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JP5550486B2 - Air liquefaction separation device and operation method thereof - Google Patents
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JP5550486B2 - Air liquefaction separation device and operation method thereof - Google Patents

Air liquefaction separation device and operation method thereof Download PDF

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JP5550486B2
JP5550486B2 JP2010182327A JP2010182327A JP5550486B2 JP 5550486 B2 JP5550486 B2 JP 5550486B2 JP 2010182327 A JP2010182327 A JP 2010182327A JP 2010182327 A JP2010182327 A JP 2010182327A JP 5550486 B2 JP5550486 B2 JP 5550486B2
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liquid oxygen
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xenon
krypton
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JP2012042079A (en
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健一 橋本
孝行 善方
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Nippon Sanso Holdings Corp
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04642Recovering noble gases from air
    • F25J3/04745Krypton and/or Xenon
    • F25J3/04751Producing pure krypton and/or xenon recovered from a crude krypton/xenon mixture
    • F25J3/04757Producing pure krypton and/or xenon recovered from a crude krypton/xenon mixture using a hybrid system, e.g. using adsorption, permeation or catalytic reaction
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04406Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system
    • F25J3/04412Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system in a classical double column flowsheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00Processes or apparatus using other separation and/or other processing means
    • F25J2205/60Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00Processes or apparatus using other separation and/or other processing means
    • F25J2205/82Processes or apparatus using other separation and/or other processing means using a reactor with combustion or catalytic reaction

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  • Chemical Kinetics & Catalysis (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Description

本発明は、空気液化分離装置及びその運転方法に関するものである。   The present invention relates to an air liquefaction separation apparatus and an operation method thereof.

精留分離法は、空気液化分離装置など多くの分野で用いられている。精留分離法では、原料流体を精留塔に導入し、原料流体を構成する各成分の沸点差を利用して分離する。ここで、各精留塔の底部(下部、塔底と称される場合もある)には、各精留塔内流体成分中の高沸点成分が液状で貯液されている。   The rectification separation method is used in many fields such as an air liquefaction separation apparatus. In the rectification separation method, a raw material fluid is introduced into a rectification column, and is separated using a difference in boiling points of components constituting the raw material fluid. Here, the high boiling point component in the fluid component in each rectification column is stored in liquid form at the bottom of each rectification column (also referred to as the lower part or the column bottom).

ところで、クリプトン及びキセノンは大気中の微量成分であり、大気中にそれぞれ、1.14ppm、0.087ppm含まれている。クリプトンは、ランプの封入ガス等に用いられている。一方、キセノンはキセノンランプ封入ガス、イオンエンジンの推進剤、二層断熱ガラス等に用いられている。   By the way, krypton and xenon are trace components in the atmosphere, and are contained in the atmosphere at 1.14 ppm and 0.087 ppm, respectively. Krypton is used as a gas sealed in a lamp. On the other hand, xenon is used in xenon lamp encapsulated gas, ion engine propellant, double heat insulating glass and the like.

クリプトン及びキセノンは、工業的には空気の低温蒸留によって分離される。つまり、空気分離を主目的とする複式精留塔で濃縮された後、所定の分離プロセスを経て分離、精製される。クリプトン及びキセノンの沸点は酸素よりも高いため、複式精留塔の低圧塔底部の液体酸素中に濃縮される。   Krypton and xenon are industrially separated by cryogenic distillation of air. That is, after being concentrated in a double rectification column mainly for air separation, it is separated and purified through a predetermined separation process. Since the boiling point of krypton and xenon is higher than that of oxygen, it is concentrated in the liquid oxygen at the bottom of the low pressure column of the double rectification column.

一方、原料空気に微量含まれる炭化水素の沸点は酸素よりも高いため、クリプトン及びキセノンと共に低圧塔底部の液体酸素中に濃縮される。従って、基本的にはクリプトン、キセノン及び炭化水素が濃縮された液体酸素を原料として、炭化水素が除去された後、クリプトン、キセノンが更に濃縮され、それぞれ分離精製されることとなる。   On the other hand, since the boiling point of the hydrocarbon contained in the raw material air is higher than that of oxygen, it is concentrated in the liquid oxygen at the bottom of the low-pressure column together with krypton and xenon. Therefore, basically, liquid oxygen in which krypton, xenon and hydrocarbons are concentrated is used as a raw material, and after removal of hydrocarbons, krypton and xenon are further concentrated and separated and purified.

ところで、液体酸素中から炭化水素を除去する方法としては、特許文献1が知られている。具体的に、この特許文献1には、炭化水素、クリプトン、キセノンを濃縮した液体酸素を原料としてクリプトン、キセノンを精製分離するプロセスが記載されている。このプロセスでは、図4に示すように、複式精留塔102以降の経路L101〜L102を流通する液体酸素中に含まれる炭化水素は触媒塔105で酸化され、その結果生じた水分、二酸化炭素は二塔式の吸着器106で吸着除去される。   By the way, Patent Document 1 is known as a method for removing hydrocarbons from liquid oxygen. Specifically, Patent Document 1 describes a process for purifying and separating krypton and xenon using liquid oxygen obtained by concentrating hydrocarbons, krypton and xenon as a raw material. In this process, as shown in FIG. 4, the hydrocarbons contained in the liquid oxygen flowing through the paths L101 to L102 after the double rectification column 102 are oxidized in the catalyst column 105, and the resulting moisture and carbon dioxide are Adsorption is removed by a two-column adsorber 106.

ここで、二筒式の吸着器106は、一般的な切り替え式吸着器であり、一定時間毎に各吸着筒を再生する必要がある。吸着筒の再生は、一般的には低圧で行われ、再生が終了した吸着筒は吸着運転に必要な圧力まで充圧されることになる(この工程を、「充圧工程」という)。   Here, the two-cylinder type adsorber 106 is a general switching type adsorber, and it is necessary to regenerate each adsorption cylinder every predetermined time. The regeneration of the adsorption cylinder is generally performed at a low pressure, and the adsorption cylinder that has been regenerated is charged to a pressure required for the adsorption operation (this process is referred to as a “charging process”).

しかしながら、上記充圧工程では、吸着工程にある吸着筒から導出された処理流体の一部が充圧用流体として用いられるので、下流の脱酸素塔107に導入される流体の流量が減少し、脱酸素塔の運転圧力が変動(低下)するという問題があった。   However, in the above-described charging step, a part of the processing fluid derived from the adsorption cylinder in the adsorption step is used as the charging fluid, so that the flow rate of the fluid introduced into the downstream deoxygenation tower 107 is reduced and the desorption is performed. There was a problem that the operating pressure of the oxygen tower fluctuated (decreased).

上記問題を解決するために、吸着器から下流の機器に導出される流体流量を一定とする方法として、特許文献2及び特許文献3が知られている。   In order to solve the above problem, Patent Document 2 and Patent Document 3 are known as methods for making the flow rate of fluid derived from the adsorber to a downstream device constant.

具体的に、特許文献2には、吸着器から空気分離装置に導入される原料空気の流量が一定となる様に原料空気圧縮機の吸入ガイドベーンを制御する方法が記載されている。
また、特許文献3には、吸着器の充圧工程において、実際に充圧される流量を測定し、その流量分だけ原料空気圧縮機の増量運転する方法が開示されている。
すなわち、特許文献2及び特許文献3に開示された方法は、無尽蔵に存在する空気を用いて原料空気圧縮機を増量運転することにより、吸着器の充圧に必要な流体を確保する方法である。
Specifically, Patent Document 2 describes a method of controlling the suction guide vanes of the raw air compressor so that the flow rate of the raw air introduced from the adsorber to the air separation device is constant.
Patent Document 3 discloses a method of measuring the flow rate actually charged in the charging step of the adsorber and increasing the amount of the raw material air compressor by that amount.
That is, the method disclosed in Patent Document 2 and Patent Document 3 is a method for securing a fluid necessary for charging the adsorber by increasing the amount of the raw material air compressor using inexhaustible air. .

しかしながら、複式精留塔の後工程に設置された吸着器の充圧用流体として、無尽蔵の大気を取り入れることは不適切であり、必要時に自由に充圧用流体を確保することが困難である。すなわち、対象としている吸着器の充圧工程で必要な充圧流体は、主成分が酸素であり、しかも希ガスであるクリプトン、キセノンが所定量濃縮されている流体である。したがって、キセノン等が濃縮された酸素流体であっても、組成の異なる流体を用いた場合、後工程の脱酸素塔に導入される流体組成が変動し、プロセス変動の一因となるという問題があった。   However, it is inappropriate to incorporate inexhaustible air as a charging fluid for the adsorber installed in the post-process of the double rectification column, and it is difficult to secure the charging fluid freely when necessary. That is, the pressurized fluid required in the charging process of the target adsorber is a fluid in which the main component is oxygen and a predetermined amount of krypton and xenon, which are rare gases, is concentrated. Therefore, even when an oxygen fluid in which xenon or the like is concentrated is used, when a fluid having a different composition is used, the fluid composition introduced into the deoxygenation tower in the subsequent step fluctuates, which causes a process variation. there were.

そこで、吸着器の充圧流体を確保するため、図4に示すように、吸着器106と脱酸素塔107との間に所定の容量のバッファータンク125を設置することにより、吸着器の充圧工程時のプロセス変動を低減することが可能であると考えられる。しかしながら、この様なバッファータンク125を吸着器106と脱酸素塔107との間に設置すると、このバッファータンク125内を対象の流体で置換する必要があるため、装置起動に更に長い時間が必要となるという問題があった。   Therefore, in order to secure a charging fluid for the adsorber, as shown in FIG. 4, a buffer tank 125 having a predetermined capacity is installed between the adsorber 106 and the deoxygenation tower 107, so that the charging pressure of the adsorber is increased. It is considered possible to reduce process variations during the process. However, if such a buffer tank 125 is installed between the adsorber 106 and the deoxygenation tower 107, it is necessary to replace the inside of the buffer tank 125 with the target fluid, so that it takes a longer time to start up the apparatus. There was a problem of becoming.

一方、クリプトン、キセノンの濃縮工程を安全に実施するための方法として、特許文献4が知られている。この特許文献4には、クリプトン、キセノンの濃縮工程における液体酸素とそれに含まれる炭化水素との反応を回避するために、この酸素自体を化学反応で他の成分に変えるプロセスが開示されている。すなわち、特許文献4に開示されたプロセスは、クリプトン、キセノン及び炭化水素を含む液体酸素にメタンを導入し、水素と一酸化炭素(合成ガス)とするものである。これにより、酸素と炭化水素との反応を抑制することができるため、爆発等の懸念がなく安全に上記濃縮工程を実施することができる。   On the other hand, Patent Document 4 is known as a method for safely carrying out the concentration step of krypton and xenon. This Patent Document 4 discloses a process for changing oxygen itself to other components by chemical reaction in order to avoid reaction between liquid oxygen and hydrocarbons contained in the krypton and xenon concentration step. That is, in the process disclosed in Patent Document 4, methane is introduced into liquid oxygen containing krypton, xenon, and hydrocarbon to form hydrogen and carbon monoxide (synthesis gas). Thereby, since the reaction between oxygen and hydrocarbons can be suppressed, there is no concern about explosion and the concentration step can be performed safely.

しかしながら、上記反応によって生じた水素、一酸化炭素、二酸化炭素、水蒸気等とクリプトン、キセノンとの深冷分離が新たに必要となるという問題があった。また、上記反応は、基本的には天然ガスの部分酸化技術であり、高温(例えば約340℃)のスチームが必要となるため、設備コストが大きく上昇するという問題があった。   However, there has been a problem that cryogenic separation of krypton and xenon from hydrogen, carbon monoxide, carbon dioxide, water vapor and the like generated by the above reaction is newly required. Moreover, the above reaction is basically a partial oxidation technique for natural gas, and requires steam at a high temperature (for example, about 340 ° C.), resulting in a problem that the equipment cost is greatly increased.

特開平07−139876号公報Japanese Patent Application Laid-Open No. 07-139876 特開平04−121577号公報Japanese Patent Laid-Open No. 04-121577 特許第3195982号公報Japanese Patent No. 3195982 特開2003−212524号公報Japanese Patent Laid-Open No. 2003-212524

本発明は、上記課題に鑑みてなされたものであり、複式精留塔の後工程にあるクリプトン及びキセノンの分離精製プロセスにおける吸着器の吸着筒の切り替えによる圧力変動等がなく、安全に運転が可能な空気液化分離装置の運転方法及び空気液化分離装置を提供することを目的としている。   The present invention has been made in view of the above problems, and there is no pressure fluctuation due to switching of the adsorption cylinder of the adsorber in the separation and purification process of krypton and xenon in the post-process of the double rectification column, and the operation is safe. An object of the present invention is to provide a method of operating an air liquefaction separation apparatus and an air liquefaction separation apparatus.

かかる課題を解決するため、本発明は以下の構成を備える。
請求項1に記載の発明は、複式精留塔の低圧塔底部からクリプトン及びキセノンが濃縮された液体酸素を抜き出し、それを原料としてクリプトン及びキセノンを低温精留で分離する空気液化分離装置の運転方法であって、
複式精留塔の二次側に設けられた圧送手段により、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、所定の流量で導出する圧送工程と、
前記圧送手段から導出された前記液体酸素を常温まで昇温した後に減圧手段に導入し、臨界圧力以下まで減圧する減圧工程と、
前記減圧手段から導出された臨界圧力以下の酸素ガスを触媒反応筒に導入し、当該液体酸素が含有する炭化水素類と酸素とを反応させて水及び二酸化炭素を生成する触媒反応工程と、
前記触媒反応筒から導出後の気体を、吸着、再生及び充圧を交互に行なう2以上の吸着筒を有する切替式の吸着器の少なくとも1つの吸着筒に導入し、前記気体中から水及び二酸化炭素を吸着除去する吸着工程と、
前記吸着器から導出後の気体を二分し、一方の気体を冷却した後にクリプトン及びキセノンを低温精留する後工程に導入するとともに、他方の気体を再生後の吸着筒に導入して当該吸着筒を充圧する充圧工程と、
クリプトン及びキセノンを低温精留する前記後工程に導入する前記一方の気体の流量又は圧力が一定となるように、前記流量又は前記圧力を、連続あるいは所定の間隔で測定し、当該流量又は当該圧力の測定値の変動量に応じて前記圧送手段から導出する前記液体酸素の流量を増加又は減少させて制御する工程と、を備えることを特徴とする空気液化分離装置の運転方法である。
In order to solve this problem, the present invention has the following configuration.
According to the first aspect of the present invention, the operation of the air liquefaction separation apparatus for extracting liquid oxygen enriched with krypton and xenon from the bottom of the low-pressure column of the double rectification column and separating krypton and xenon by low temperature rectification using the raw material as a raw material. A method,
A pumping step of compressing liquid oxygen enriched with krypton and xenon to a critical pressure or higher by a pumping means provided on the secondary side of the double rectification column, and deriving at a predetermined flow rate;
A pressure reducing step for raising the liquid oxygen derived from the pressure feeding means to room temperature and then introducing it into the pressure reducing means, and reducing the pressure to a critical pressure or lower;
A catalytic reaction step of introducing oxygen gas having a pressure equal to or lower than the critical pressure derived from the depressurization means into a catalytic reaction cylinder, and reacting hydrocarbons contained in the liquid oxygen with oxygen to generate water and carbon dioxide;
The gas derived from the catalyst reaction cylinder is introduced into at least one adsorption cylinder of a switching type adsorber having two or more adsorption cylinders that alternately perform adsorption, regeneration, and charging, and water and carbon dioxide are extracted from the gas. An adsorption process for adsorbing and removing carbon;
After the gas derived from the adsorber is divided into two, after cooling one gas, krypton and xenon are introduced into a post-process for low-temperature rectification, and the other gas is introduced into the regenerated adsorption cylinder and the adsorption cylinder A charging step for charging
The flow rate or the pressure is measured continuously or at predetermined intervals so that the flow rate or pressure of the one gas introduced into the post-process for rectifying krypton and xenon at a low temperature is constant. And a step of increasing or decreasing the flow rate of the liquid oxygen derived from the pumping means in accordance with the amount of fluctuation of the measured value of the air liquefaction separation apparatus.

請求項2に記載の発明は、前記触媒反応工程において、
前記圧送手段から導出された前記液体酸素を加熱手段に導入し、
前記加熱手段の一次側と二次側との差圧を連続あるいは所定の間隔で測定することを特徴とする請求項1記載の空気液化分離装置の運転方法である。
The invention according to claim 2 is characterized in that in the catalytic reaction step,
Introducing the liquid oxygen derived from the pumping means into the heating means;
2. The method of operating an air liquefaction separation apparatus according to claim 1, wherein the differential pressure between the primary side and the secondary side of the heating means is measured continuously or at a predetermined interval.

請求項3に記載の発明は、複式精留塔の低圧塔底部からクリプトン及びキセノンが濃縮された液体酸素を抜き出し、それを原料としてクリプトン及びキセノンを低温精留で分離する空気液化分離装置であって、
複式精留塔の二次側に設けられ、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、所定の流量で導出する圧送手段と、
前記圧送手段から導出された前記液体酸素を常温まで昇温する加熱手段と、
前記加熱手段の一次側と二次側との差圧を測定するための圧力測定手段と、
前記加熱手段から導出された超臨界状態の流体を臨界圧力以下まで降圧する減圧手段と、
前記減圧手段から導出された臨界圧力以下の酸素ガス中に含まれる炭化水素類と酸素とを反応させて水及び二酸化炭素を生成する触媒反応筒と、
吸着、再生及び充圧を交互に行なう2以上の吸着筒を有し、前記触媒反応筒から導出された気体中から水及び二酸化炭素を吸着除去する切替式の吸着器と、
前記吸着器の二次側に設けられ、当該吸着器から導出された流体の残部からクリプトン及びキセノンを分離する分離手段と、
前記分離手段に導入される前記流体の流量及び圧力の少なくとも一方を測定する測定手段と、
前記測定手段の流量及び圧力の少なくとも一方の測定値に基づいて、前記圧送手段からの前記液体酸素の流量を増加又は減少させて制御する制御手段と、を備えることを特徴とする空気液化分離装置である。
The invention described in claim 3 is an air liquefaction separation apparatus for extracting liquid oxygen enriched with krypton and xenon from the bottom of the low pressure column of the double rectification column, and separating krypton and xenon by low-temperature rectification using this as a raw material. And
A pumping means provided on the secondary side of the double rectification column, compressing liquid oxygen enriched with krypton and xenon to a critical pressure or more and deriving at a predetermined flow rate;
Heating means for raising the temperature of the liquid oxygen derived from the pressure feeding means to room temperature;
Pressure measuring means for measuring a differential pressure between the primary side and the secondary side of the heating means;
Pressure reducing means for reducing the pressure in the supercritical state derived from the heating means to a critical pressure or less;
A catalytic reaction cylinder for producing water and carbon dioxide by reacting hydrocarbons and oxygen contained in an oxygen gas having a critical pressure or less derived from the decompression means;
A switchable adsorber having two or more adsorption cylinders that alternately perform adsorption, regeneration, and charging, and that adsorbs and removes water and carbon dioxide from the gas derived from the catalyst reaction cylinder;
Separation means provided on the secondary side of the adsorber and separating krypton and xenon from the remainder of the fluid derived from the adsorber;
Measurement means for measuring at least one of the flow rate and pressure of the fluid introduced into the separation means;
An air liquefaction separation apparatus comprising: control means for controlling the flow rate of the liquid oxygen from the pressure feeding means to be increased or decreased based on at least one measurement value of the flow rate and pressure of the measurement means. It is.

本発明の空気液化分離装置の運転方法及び空気液化分離装置によれば、触媒反応筒から導出後の気体を切替式の吸着器に導入して水及び二酸化炭素を吸着除去した後、吸着器から導出後の気体を二分し、一方をクリプトン及びキセノンを低温精留する後工程に導入するとともに、他方を再生後の吸着筒に導入して吸着筒を充圧する構成となっている。すなわち、当該吸着器が複式精留塔の二次側に設けられており、充圧用の酸素ガス流体の成分が限定される場合であっても、一方の吸着筒によって水及び二酸化炭素が除去された気体を製造し、再生後の他方の吸着筒の充圧に用いることができる。
そして、後工程に導入する気体の流量又は圧力が一定となるように、流量又は圧力を連続あるいは所定の間隔で測定し、この測定値の変動量に応じて圧送手段から導出する液体酸素の流量を増加又は減少させて制御する制御手段を備える構成となっている。このように、吸着器から導出されて後工程となる分離手段に導入される流体の流量又は圧力を測定し、この測定値の変動量に応じて圧送手段から導出する液体酸素の流量を増加又は減少させて制御することにより、分離手段に導入される流体の流量又は圧力を一定に保つことができる。
したがって、吸着器と後工程を構成する分離手段との間にバッファータンク等を設けることなく、吸着器における吸着筒の切り替え時の流量変動及び圧力変動を抑制することができるため、空気液化分離装置の安定した運転が可能となる。
According to the operation method and the air liquefaction separation apparatus of the present invention, after the gas led out from the catalytic reaction cylinder is introduced into the switching type adsorber to adsorb and remove water and carbon dioxide, from the adsorber The gas after the derivation is divided into two, one is introduced into a post-process for low-temperature rectification of krypton and xenon, and the other is introduced into the regenerated adsorption cylinder to charge the adsorption cylinder. That is, even if the adsorber is provided on the secondary side of the double rectification column and the components of the oxygen gas fluid for charging are limited, water and carbon dioxide are removed by one adsorption cylinder. Can be used for charging the other adsorption cylinder after regeneration.
Then, the flow rate or pressure of the liquid oxygen introduced from the pumping means is measured continuously or at predetermined intervals so that the flow rate or pressure of the gas introduced into the subsequent process is constant. It is the structure provided with the control means which controls by increasing or decreasing. In this way, the flow rate or pressure of the fluid led out from the adsorber and introduced into the separation means, which is a subsequent process, is measured, and the flow rate of liquid oxygen derived from the pumping means is increased or decreased according to the amount of variation in the measured value. By controlling by decreasing, the flow rate or pressure of the fluid introduced into the separation means can be kept constant.
Accordingly, the air liquefaction separation device can suppress flow rate fluctuation and pressure fluctuation at the time of switching the adsorption cylinder in the adsorber without providing a buffer tank or the like between the adsorber and the separation means constituting the post-process. Stable operation becomes possible.

また、本発明の空気液化分離装置の運転方法及び空気液化分離装置によれば、複式精留塔の二次側に設けられた圧送手段により、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、この液体酸素を加熱手段によって常温まで昇温し、減圧手段によって臨界圧力以下まで減圧した後に触媒反応筒に導入する構成となっている。このように、圧送手段によって液体酸素を臨界圧力以上に昇圧することにより、加熱手段において酸素が超臨界状態の流体となるため、液体酸素の一部が気化して生じる気液界面の発生を抑制することができる。したがって、気液界面における液側での炭化水素の濃縮を低減することができるため、空気液化分離装置を安全に運転することができる。
そして、炭化水素を含む酸素は、常温まで加温された後は、気液平衡による炭化水素の濃縮を懸念する必要はなく、触媒反応、吸着或いは後工程の精留運転に適切な圧力まで減圧することができる。
Further, according to the operation method of the air liquefaction separation apparatus and the air liquefaction separation apparatus of the present invention, the liquid oxygen enriched with krypton and xenon is brought to a critical pressure or higher by the pumping means provided on the secondary side of the double rectification column. The liquid oxygen is heated to room temperature by a heating means, and reduced to below the critical pressure by a pressure reducing means, and then introduced into the catalyst reaction cylinder. In this way, by increasing the pressure of liquid oxygen above the critical pressure by the pumping means, oxygen becomes a supercritical fluid in the heating means, so that the generation of a gas-liquid interface caused by part of the liquid oxygen is suppressed. can do. Therefore, since the concentration of hydrocarbons on the liquid side at the gas-liquid interface can be reduced, the air liquefaction separation apparatus can be operated safely.
After the oxygen containing hydrocarbons is heated to room temperature, there is no need to worry about hydrocarbon concentration due to gas-liquid equilibrium, and the pressure is reduced to a pressure suitable for catalytic reaction, adsorption or rectifying operation in the subsequent process. can do.

さらに、空気液化分離装置に、加熱手段の一次側と二次側との差圧を測定するための圧力測定手段を設けた場合には、この間の圧力損失の変化を早期に発見することができる。これにより、内部の機器配管のパージ等の処置を早期に講じることが可能となり、空気液化分離装置をより安全に運転することができる。   Furthermore, when the air liquefaction separation apparatus is provided with a pressure measuring means for measuring the differential pressure between the primary side and the secondary side of the heating means, a change in pressure loss during this period can be detected early. . As a result, it is possible to take measures such as purging internal equipment piping at an early stage, and the air liquefaction separation apparatus can be operated more safely.

本発明を適用した一実施形態である空気液化分離装置の構成を示す系統図である。It is a systematic diagram which shows the structure of the air liquefaction separation apparatus which is one Embodiment to which this invention is applied. 本発明の効果を説明するための図であり、空気液化分離装置の運転中における各圧力計の測定値の変動を示す図である。It is a figure for demonstrating the effect of this invention, and is a figure which shows the fluctuation | variation of the measured value of each pressure gauge in the driving | operation of an air liquefaction separation apparatus. 本発明の効果を説明するための図であり、空気液化分離装置の運転中における液体酸素ポンプの回転数と流量計の測定値とを示す図である。It is a figure for demonstrating the effect of this invention, and is a figure which shows the rotation speed of a liquid oxygen pump in the driving | operation of an air liquefaction separation apparatus, and the measured value of a flowmeter. 従来の空気液化分離装置の構成を示す系統図である。It is a systematic diagram which shows the structure of the conventional air liquefaction separation apparatus.

以下、本発明を適用した一実施形態である空気液化分離装置の運転方法について、これに用いる空気液化分離装置とともに図面を用いて詳細に説明する。なお、以下の説明で用いる図面は、特徴をわかりやすくするために、便宜上特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。   Hereinafter, the operation method of the air liquefaction separation apparatus which is one embodiment to which the present invention is applied will be described in detail with reference to the drawings together with the air liquefaction separation apparatus used therefor. In addition, in the drawings used in the following description, in order to make the features easy to understand, there are cases where the portions that become the features are enlarged for the sake of convenience, and the dimensional ratios of the respective components are not always the same as the actual ones. Absent.

先ず、本発明を適用した一実施形態である空気液化分離装置の運転方法に用いる空気液化分離装置の構成について説明する。
本実施形態の空気液化分離装置は、複式精留塔の低圧塔底部からクリプトン及びキセノンが濃縮された液体酸素を抜き出し、それを原料としてクリプトン及びキセノンを低温精留で分離する装置である。より具体的には、クリプトン及びキセノンと共に濃縮された炭化水素をこの液体酸素から除去した後、クリプトン、キセノンを更に濃縮し、それぞれ分離精製するものである。
First, the structure of the air liquefaction separation apparatus used for the operating method of the air liquefaction separation apparatus which is one Embodiment to which this invention is applied is demonstrated.
The air liquefaction separation apparatus of this embodiment is an apparatus for extracting liquid oxygen enriched with krypton and xenon from the bottom of a low-pressure column of a double rectification column, and separating krypton and xenon by using low temperature rectification as a raw material. More specifically, hydrocarbons concentrated together with krypton and xenon are removed from the liquid oxygen, and then krypton and xenon are further concentrated and separated and purified.

図1に示すように、本実施形態の空気液化分離装置1は、複式精留塔2の二次側に順次設けられた、液体酸素ポンプ(圧送手段)3、酸素昇温器(加熱手段)4、減圧弁(減圧手段)13、触媒反応筒5、切替式の吸着器6、脱酸素塔(分離手段)7、を備えて概略構成されている。さらに、空気液化分離装置1は、酸素昇温器4の一次側と二次側との差圧を測定する差圧計(圧力測定手段)8と、濃縮塔7に導入される流体の流量を測定する流量計(測定手段)9と、液体酸素ポンプ3からの液体酸素の流量を制御するインバーター(制御手段)10と、を備えることを特徴としている。   As shown in FIG. 1, an air liquefaction separation apparatus 1 according to this embodiment includes a liquid oxygen pump (pressure feeding means) 3 and an oxygen heater (heating means) that are sequentially provided on the secondary side of a double rectification column 2. 4, a pressure reducing valve (pressure reducing means) 13, a catalytic reaction cylinder 5, a switching type adsorber 6, and a deoxygenation tower (separating means) 7 are schematically configured. Further, the air liquefaction separation apparatus 1 measures a differential pressure gauge (pressure measuring means) 8 that measures the differential pressure between the primary side and the secondary side of the oxygen heater 4 and the flow rate of the fluid introduced into the concentration tower 7. A flow meter (measuring means) 9 and an inverter (control means) 10 for controlling the flow rate of the liquid oxygen from the liquid oxygen pump 3.

複式精留塔2は、空気分離を主目的とするものであり、低圧塔2Aの底部の液体酸素中にはクリプトン及びキセノンとともに高沸点不純物である炭化水素類が濃縮される。また、低圧塔2Aの底部と液体酸素ポンプ3との間の経路L1には、バッファータンク11が設けられており、低圧塔2Aの底部から導出される液体酸素を一時的に貯留することができるようになっている。   The double rectification column 2 is mainly intended for air separation, and hydrocarbons, which are high-boiling impurities, are concentrated together with krypton and xenon in the liquid oxygen at the bottom of the low-pressure column 2A. A buffer tank 11 is provided in the path L1 between the bottom of the low pressure column 2A and the liquid oxygen pump 3, and liquid oxygen derived from the bottom of the low pressure column 2A can be temporarily stored. It is like that.

炭化水素類は、原料空気中に微量に含まれるものであれば特に限定されるものではない。このような炭化水素類としては、具体的には、メタン、エタン、プロパン等が挙げられる。   The hydrocarbons are not particularly limited as long as they are contained in a minute amount in the raw material air. Specific examples of such hydrocarbons include methane, ethane, and propane.

液体酸素ポンプ3は、複式精留塔2の二次側に設けられている。この液体酸素ポンプ3は、低圧塔2Aの底部から導入された液体酸素を臨界圧力である5.05MPa以上に圧縮した後に、所定の流量(設定流量)で液体酸素を導出する圧送手段である。なお、液体酸素ポンプ3としては、液体酸素を臨界圧力以上に圧縮し、所定の流量で導出することが可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。   The liquid oxygen pump 3 is provided on the secondary side of the double rectification column 2. This liquid oxygen pump 3 is a pumping means for deriving liquid oxygen at a predetermined flow rate (set flow rate) after compressing liquid oxygen introduced from the bottom of the low pressure column 2A to a critical pressure of 5.05 MPa or more. The liquid oxygen pump 3 is not particularly limited as long as it can compress liquid oxygen to a critical pressure or higher and can be derived at a predetermined flow rate, and a conventionally known one can be used. it can.

酸素昇温器4は、液体酸素ポンプ3の二次側に設けられている。この酸素昇温器4は、液体酸素ポンプ3からフィルター12を介して導入される、臨界圧力以上に圧縮された液体酸素を加熱して、常温まで昇温する加熱手段である。また、酸素昇温器4からは、常温まで昇温された気体(酸素流体)が導出される。なお、酸素昇温器4としては、液体酸素を常温まで昇温することが可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。   The oxygen heater 4 is provided on the secondary side of the liquid oxygen pump 3. The oxygen warming device 4 is a heating means that heats liquid oxygen, which is introduced from the liquid oxygen pump 3 through the filter 12 and is compressed to a critical pressure or higher, and raises the temperature to room temperature. A gas (oxygen fluid) that has been heated to room temperature is derived from the oxygen heater 4. The oxygen heater 4 is not particularly limited as long as it can raise the temperature of liquid oxygen to room temperature, and a conventionally known one can be used.

減圧弁(減圧手段)13は、酸素昇温器4によって常温まで昇温された超臨界状態の流体を臨界圧力以下まで減圧するために、酸素昇温器4と触媒反応筒5との間の経路L3に設けられている。この減圧弁13を設けることにより、炭化水素を含む酸素は、常温まで加温された後に、気液平衡による炭化水素の濃縮を懸念する必要がなく、触媒反応、吸着或いは後工程の精留運転に適切な圧力まで減圧することができる。なお、減圧弁13としては、超臨界状態の流体を臨界圧力以下まで減圧することが可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。   A pressure reducing valve (pressure reducing means) 13 is provided between the oxygen temperature increasing device 4 and the catalyst reaction cylinder 5 in order to reduce the pressure in the supercritical state heated to room temperature by the oxygen temperature increasing device 4 to a critical pressure or lower. It is provided in the path L3. By providing this pressure reducing valve 13, it is not necessary to worry about hydrocarbon concentration due to gas-liquid equilibrium after oxygen containing hydrocarbons has been heated to room temperature, and catalytic reaction, adsorption, or rectification operation in the post-process The pressure can be reduced to an appropriate pressure. The pressure reducing valve 13 is not particularly limited as long as it can depressurize a supercritical fluid to a critical pressure or lower, and a conventionally known one can be used.

また、酸素昇温器4と触媒反応筒5との間の経路L3には、減圧弁13の二次側に上記気体をさらに昇温するための熱交換器14及び加熱器15がこの順で設けられている。   Further, a heat exchanger 14 and a heater 15 for further raising the temperature of the gas to the secondary side of the pressure reducing valve 13 are arranged in this order in the path L3 between the oxygen heater 4 and the catalyst reaction cylinder 5. Is provided.

触媒反応筒5は、減圧弁13から導出された臨界圧力以下の酸素ガス中に含まれる炭化水素類と酸素とを反応させて、水及び二酸化炭素を生成させるために、酸素昇温器4の二次側に設けられている。この触媒反応筒5には、触媒が所定量充填されている。例えば、触媒は白金(Pt)又はパラジウム(Pd)のような貴金属触媒でも良い。これら金属触媒は、単独は勿論それぞれを組み合わせて積層充填して用いても良い。なお、触媒反応筒5としては、酸素昇温器4から導出された気体中に含まれる炭化水素類を酸化により水と二酸化炭とに分解させることが可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。また、触媒反応筒5から導出される気体中に含まれる炭化水素類の濃度は、検出限界以下(例えば、0.05ppm以下)であることが好ましい。   The catalytic reaction cylinder 5 is provided with an oxygen heater 4 for reacting hydrocarbons and oxygen contained in oxygen gas having a critical pressure or less derived from the pressure reducing valve 13 to generate water and carbon dioxide. It is provided on the secondary side. The catalyst reaction cylinder 5 is filled with a predetermined amount of catalyst. For example, the catalyst may be a noble metal catalyst such as platinum (Pt) or palladium (Pd). Of course, these metal catalysts may be used alone or in combination. The catalyst reaction cylinder 5 is not particularly limited as long as it can decompose hydrocarbons contained in the gas led out from the oxygen heater 4 into water and carbon dioxide by oxidation. Instead, conventionally known ones can be used. Further, the concentration of hydrocarbons contained in the gas derived from the catalytic reaction cylinder 5 is preferably not more than a detection limit (for example, not more than 0.05 ppm).

また、触媒反応筒5と吸着器6との間の経路L4には、触媒反応筒5によって炭化水素類が除去された酸素ガス冷却するための熱交換器14及び冷却器16、ドレンセパレーター17がこの順で設けられている。   A path L4 between the catalyst reaction cylinder 5 and the adsorber 6 includes a heat exchanger 14 and a cooler 16 for cooling oxygen gas from which hydrocarbons have been removed by the catalyst reaction cylinder 5 and a drain separator 17. They are provided in this order.

吸着器6は、上記触媒反応筒5から導出される気体中から、水及び二酸化炭素を吸着除去するためのものであり、触媒反応筒5の二次側に設けられている。この吸着器6は、吸着、再生及び充圧を交互に行なう2つの吸着筒6A,6Bを有する切替式の吸着器である。ここで、本実施形態の吸着器6では、上述したように2つの吸着筒を有した例であるが、これに限定されるものではなく、2以上の吸着筒を有し、これらを交互に吸着、再生及び充圧を行なうような構成としても良い。   The adsorber 6 is for adsorbing and removing water and carbon dioxide from the gas led out from the catalyst reaction cylinder 5, and is provided on the secondary side of the catalyst reaction cylinder 5. The adsorber 6 is a switchable adsorber having two adsorption cylinders 6A and 6B that alternately perform adsorption, regeneration, and charging. Here, the adsorber 6 of the present embodiment is an example having two adsorption cylinders as described above, but is not limited to this, and has two or more adsorption cylinders, which are alternately arranged. It is good also as a structure which performs adsorption | suction, reproduction | regeneration, and charging.

吸着筒6A,6Bは、同一の構成となっており、弁18〜21の開閉操作により、吸着筒6A及び吸着筒6B内に導入するガスの流れをそれぞれ切り替え可能に構成されている。また、吸着筒6A及び吸着筒6Bには、内部の圧力を測定するための圧力計22,23がそれぞれ設けられている。   The adsorption cylinders 6A and 6B have the same configuration, and are configured so that the flow of gas introduced into the adsorption cylinder 6A and the adsorption cylinder 6B can be switched by opening and closing the valves 18 to 21, respectively. The adsorption cylinder 6A and the adsorption cylinder 6B are provided with pressure gauges 22 and 23 for measuring the internal pressure, respectively.

吸着筒6A(6B)内には、上記触媒反応筒5から導出される気体の流入側(図1では、底部側)から流出側(図1では上部側)に向けて、水及び二酸化炭素を吸着除去するための吸着剤が単層で、あるいは積層されて充填されている。   In the adsorption cylinder 6A (6B), water and carbon dioxide are introduced from the inflow side (bottom side in FIG. 1) to the outflow side (upper side in FIG. 1) of the gas led out from the catalytic reaction cylinder 5. The adsorbent for adsorbing and removing is filled in a single layer or stacked.

ここで、上記触媒反応筒5から導出される気体中の、水を吸着するための水分吸着剤としては、特に限定されるものではないが、例えば、活性アルミナ、シリカゲル、合成ゼオライトのいずれか1つもしくは2以上を用いることができる。また、二酸化炭素を吸着するための吸着剤としては、特に限定されるものではないが、例えば、合成ゼオライトを用いることができる。   Here, the moisture adsorbent for adsorbing water in the gas derived from the catalyst reaction cylinder 5 is not particularly limited, and for example, any one of activated alumina, silica gel, and synthetic zeolite is used. Two or more can be used. The adsorbent for adsorbing carbon dioxide is not particularly limited, and for example, synthetic zeolite can be used.

脱酸素塔(分離手段)7は、上記吸着器6から導出された流体中からクリプトン及びキセノンを分離するための設備であり、吸着器6の二次側に設けられている。この脱酸素塔7には、塔底部にリボリラー7aが、塔頂部に凝縮器(コンデンサー)7bがそれぞれ設けられている。   The deoxygenation tower (separation means) 7 is equipment for separating krypton and xenon from the fluid led out from the adsorber 6, and is provided on the secondary side of the adsorber 6. The deoxygenation tower 7 is provided with a reboiler 7a at the bottom and a condenser (condenser) 7b at the top.

脱酸素塔7に導入された流体は精留され、この脱酸塔の塔底部には、クリプトン90〜95%、キセノン5〜10%及び酸素0.5ppm以下からなる液化ガス(流体)が分離される。そして、脱酸素塔7の塔底部から導出された流体が、この脱酸素塔7の二次側に設けられた図示略の分離塔の中段又は中下段に導入される。そして、この分離塔における精留により、塔頂部に純度99.99%以上のクリプトンが、塔底部に純度99.99%以上のキセノンが、それぞれ分離される。   The fluid introduced into the deoxygenation tower 7 is rectified, and a liquefied gas (fluid) consisting of 90 to 95% krypton, 5 to 10% xenon and 0.5 ppm or less oxygen is separated at the bottom of the deoxidation tower. Is done. Then, the fluid led out from the bottom of the deoxygenation tower 7 is introduced into the middle or middle and lower stages of a separation tower (not shown) provided on the secondary side of the deoxygenation tower 7. The rectification in the separation column separates krypton having a purity of 99.99% or more at the top of the column and xenon having a purity of 99.99% or more at the bottom.

なお、本実施形態では、図1に示すように、脱酸素塔7のみを分離手段とした例を示しているが、これに限定されるものではなく、上述した分離塔等の低温精留工程を構成する他の装置と組み合わせたものとしてもよい。   In addition, in this embodiment, as shown in FIG. 1, although the example which used only the deoxygenation tower 7 as the separation means is shown, it is not limited to this, The low-temperature rectification process such as the separation tower described above It is good also as what combined with the other apparatus which comprises.

差圧計(圧力測定手段)8は、酸素昇温器(加熱手段)4の一次側と二次側との差圧を測定するために、経路2と経路3とに亘って設けられている。具体的には、図1に示すように、一端側がフィルター12の一次側に、他端側が減圧弁13の上流側に、それぞれ接続されている。なお、差圧計8としては、酸素昇温器4の一次側と二次側との差圧の測定が可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。   A differential pressure gauge (pressure measuring means) 8 is provided across the path 2 and the path 3 in order to measure the differential pressure between the primary side and the secondary side of the oxygen heater (heating means) 4. Specifically, as shown in FIG. 1, one end side is connected to the primary side of the filter 12, and the other end side is connected to the upstream side of the pressure reducing valve 13. The differential pressure gauge 8 is not particularly limited as long as it can measure the differential pressure between the primary side and the secondary side of the oxygen heater 4, and a conventionally known one can be used. it can.

ここで、液体酸素ポンプ3と減圧弁13と間の運転圧力は、上述したように酸素の臨界圧力(5.05MPa)以上に設定されている。万一、高沸点成分である炭化水素類が機器や配管内に閉塞した場合には、液体酸素ポンプ3の運転圧力に比較すると、機器や配管の閉塞等によって生じる圧力損失(例えば、0.001MPa)は、相対的に小さいため、発見することが困難である。そこで、液体酸素ポンプ3〜減圧弁13間に差圧計8を設置することにより、この間の圧力損失の変化を早期に発見することができる。したがって、早期に機器や配管等の内部のパージが可能となり、プロセスの安全運転が可能となる。   Here, the operating pressure between the liquid oxygen pump 3 and the pressure reducing valve 13 is set to be equal to or higher than the critical pressure (5.05 MPa) of oxygen as described above. In the unlikely event that hydrocarbons, which are high-boiling components, are clogged in equipment or piping, the pressure loss (for example, 0.001 MPa) caused by equipment or piping clogging compared to the operating pressure of the liquid oxygen pump 3. ) Is relatively small and difficult to find. Therefore, by installing the differential pressure gauge 8 between the liquid oxygen pump 3 and the pressure reducing valve 13, a change in pressure loss during this period can be detected early. Therefore, it becomes possible to purge the inside of equipment, piping and the like at an early stage, and the process can be safely operated.

流量計(測定手段)9は、吸着器6から導出された後に脱酸素塔7に導入される流体の流量を測定するために、吸着器6と脱酸素塔7との間の流路L5に設けられている。なお、流量計9としては、脱酸素塔7に導入される流体の流量の測定が可能なものであれば特に限定されるものではなく、従来公知のものを使用することができる。   A flow meter (measuring means) 9 is provided in a flow path L5 between the adsorber 6 and the deoxygenation tower 7 in order to measure the flow rate of the fluid introduced from the adsorber 6 and introduced into the deoxygenation tower 7. Is provided. The flow meter 9 is not particularly limited as long as it can measure the flow rate of the fluid introduced into the deoxygenation tower 7, and a conventionally known one can be used.

なお、本実施形態では、図1に示すように、流量計9のみを測定手段とした例を示しているが、これに限定されるものではない。例えば、図1に示すように、流路L5に設けられた圧力計24は、吸着器6から導出された後に脱酸素塔7に導入される流体の圧力を測定するものであるが、流量計9に代えて測定手段としてもよい。また、流量計9と圧力計24とを両方設けて、これを測定手段として用いてもよい。   In the present embodiment, as shown in FIG. 1, an example in which only the flow meter 9 is used as the measuring means is shown, but the present invention is not limited to this. For example, as shown in FIG. 1, the pressure gauge 24 provided in the flow path L5 measures the pressure of the fluid introduced into the deoxygenation tower 7 after being led out from the adsorber 6, Instead of 9, measurement means may be used. Further, both the flow meter 9 and the pressure gauge 24 may be provided and used as measuring means.

インバーター(制御手段)10は、流量計9及び圧力計24の少なくとも一方の測定値に基づいて、液体酸素ポンプ3からの液体酸素の流量を増加又は減少させて制御するものである。また、インバーター10は、図1に示すように、液体酸素ポンプ3と、流量計9或いは圧力計24とが制御可能となるように接続されている。これにより、インバーター10は、流量計9或いは圧力計24の値が一定となるように、液体酸素ポンプ3の回転数を増加又は減少させて圧送する液体酸素の流量を制御する構成となっている。   The inverter (control means) 10 controls the flow rate of liquid oxygen from the liquid oxygen pump 3 by increasing or decreasing based on the measured value of at least one of the flow meter 9 and the pressure gauge 24. Further, as shown in FIG. 1, the inverter 10 is connected so that the liquid oxygen pump 3 and the flow meter 9 or the pressure gauge 24 can be controlled. Thus, the inverter 10 is configured to control the flow rate of the liquid oxygen to be pumped by increasing or decreasing the rotational speed of the liquid oxygen pump 3 so that the value of the flow meter 9 or the pressure gauge 24 becomes constant. .

次に、この空気液化分離装置1の運転方法(以下、単に「運転方法」という)について説明する。
本実施形態の運転方法は、複式精留塔2の二次側に設けられた液体酸素ポンプ(圧送手段)3により、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、所定の流量で導出する圧送工程と、液体酸素ポンプ3から導出された液体酸素を常温まで昇温した後に減圧手段に導入し、臨界圧力以下まで減圧する減圧工程と、前記減圧手段から導出された臨界圧力以下の酸素ガスを触媒反応筒5に導入し、液体酸素が含有する炭化水素類と酸素とを反応させて水及び二酸化炭素を生成する触媒反応工程と、触媒反応筒5から導出後の気体を、吸着、再生及び充圧を交互に行なう吸着筒6A,6Bを有する吸着器6の少なくとも1つの吸着筒6A(あるいは6B)に導入し、気体中から水及び二酸化炭素を吸着除去する吸着工程と、吸着器6から導出後の気体を二分し、一方の気体を冷却した後にクリプトン及びキセノンを低温精留する後工程に導入するとともに、他方の気体を再生後の吸着筒6B(あるいは6A)に導入して当該吸着筒を充圧する充圧工程と、クリプトン及びキセノンを低温精留する後工程に導入する一方の気体の流量及び圧力の少なくとも一方が一定となるように、流量及び圧力の少なくとも一方を、連続あるいは所定の間隔で測定し、流量及び圧力の少なくとも一方の測定値の変動量に応じて液体酸素ポンプ3から導出する液体酸素の流量を増加又は減少させて制御する工程と、を備えて概略構成されている。
Next, an operation method (hereinafter simply referred to as “operation method”) of the air liquefaction separation apparatus 1 will be described.
The operation method of the present embodiment compresses liquid oxygen enriched with krypton and xenon to a critical pressure or higher by a liquid oxygen pump (pressure feeding means) 3 provided on the secondary side of the double rectification column 2, A pressure-feeding step derived from the flow rate, a pressure-reducing step in which the liquid oxygen derived from the liquid oxygen pump 3 is heated to room temperature and then introduced into the pressure-reducing means, and the pressure is reduced to a critical pressure or less, and a critical pressure derived from the pressure-reducing means The following oxygen gas is introduced into the catalytic reaction cylinder 5, a catalytic reaction step for producing water and carbon dioxide by reacting hydrocarbons contained in liquid oxygen with oxygen, and a gas derived from the catalytic reaction cylinder 5 An adsorption step for introducing and adsorbing and removing water and carbon dioxide from the gas into at least one adsorption cylinder 6A (or 6B) of an adsorber 6 having adsorption cylinders 6A and 6B that alternately perform adsorption, regeneration and charging. The gas derived from the adsorber 6 is divided into two, and after cooling one gas, the krypton and xenon are introduced into a post-process for low-temperature rectification, and the other gas is introduced into the regenerated adsorption cylinder 6B (or 6A). Then, at least one of the flow rate and the pressure is set so that at least one of the flow rate and the pressure of one of the gases introduced into the charging step for charging the adsorption cylinder and the subsequent step for low-temperature rectification of krypton and xenon is constant. A step of measuring continuously or at predetermined intervals and controlling the flow rate of liquid oxygen derived from the liquid oxygen pump 3 to be increased or decreased in accordance with a variation amount of at least one of the flow rate and pressure. It is roughly structured.

具体的には、先ず、原料空気中に微量含まれるクリプトン、キセノン及び炭化水素は、複式精留塔2の低圧塔2A底部の液体酸素中に濃縮される。この液体酸素の一部は、経路L1を構成する配管及びバッファータンク11を経由して、液体酸素ポンプ3に導入され、酸素の臨界圧力(=5.05MPa)以上に圧縮されて所定量で導出される(圧送工程)。そして、液体酸素ポンプ3から導出された液体酸素は、酸素昇温器4に導入されて昇温される。   Specifically, first, krypton, xenon and hydrocarbons contained in trace amounts in the raw air are concentrated in the liquid oxygen at the bottom of the low pressure column 2A of the double rectification column 2. Part of this liquid oxygen is introduced into the liquid oxygen pump 3 via the pipes constituting the path L1 and the buffer tank 11, and is compressed to a pressure equal to or higher than the critical pressure of oxygen (= 5.05 MPa) and derived in a predetermined amount. (Pumping process). Then, the liquid oxygen led out from the liquid oxygen pump 3 is introduced into the oxygen temperature riser 4 to be heated.

ここで、上述したように、液体酸素を液体酸素ポンプ3によって臨界圧力である5.05MPa以上まで昇圧する理由は、複式精留塔2によって液体酸素中に濃縮された炭化水素類の析出を回避するためである。   Here, as described above, the reason why the liquid oxygen is increased to the critical pressure of 5.05 MPa or more by the liquid oxygen pump 3 is that the precipitation of hydrocarbons concentrated in the liquid oxygen by the double rectification column 2 is avoided. It is to do.

一般的に、臨界圧力よりも低い圧力の液体酸素が熱(Q)を受けて気化すると、必ず気液界面が生じることとなる。ここで、液体酸素側に含まれる炭化水素の濃度を(C)とすると、気化した酸素ガス中の炭化水素の濃度も(C)となる。しかし、気液界面では、炭化水素の気液平衡関係が生じる。つまり、気液界面近傍では、液体酸素中の炭化水素濃度(Cs)は酸素ガス中の炭化水素濃度(C)と気液平衡関係にあり、液体酸素中濃度(C)よりも大きくなる。しかも、この気液界面付近の液体酸素中の炭化水素濃度(Cs)が液体酸素中の炭化水素の溶解度を超えると、炭化水素が析出してしまう。   In general, when liquid oxygen having a pressure lower than the critical pressure is vaporized by receiving heat (Q), a gas-liquid interface is always generated. Here, when the concentration of the hydrocarbon contained in the liquid oxygen side is (C), the concentration of the hydrocarbon in the vaporized oxygen gas is also (C). However, hydrocarbon vapor-liquid equilibrium occurs at the gas-liquid interface. That is, in the vicinity of the gas-liquid interface, the hydrocarbon concentration (Cs) in the liquid oxygen is in a gas-liquid equilibrium relationship with the hydrocarbon concentration (C) in the oxygen gas, and is larger than the liquid oxygen concentration (C). Moreover, if the hydrocarbon concentration (Cs) in the liquid oxygen near the gas-liquid interface exceeds the solubility of the hydrocarbon in the liquid oxygen, the hydrocarbon will precipitate.

そこで、本実施形態の運転方法によれば、液体酸素を液体酸素ポンプ3によって臨界圧力である5.05MPa以上まで昇圧し、この臨界圧力以上に昇圧した状態で酸素昇温器4によって加熱する構成となっている。このため、酸素流体が常温の酸素になる過程において気液界面が生じることが無く、機器や配管での炭化水素の析出を抑制することができる。   Therefore, according to the operation method of the present embodiment, the liquid oxygen is boosted to a critical pressure of 5.05 MPa or more by the liquid oxygen pump 3 and heated by the oxygen temperature riser 4 in a state of being boosted to the critical pressure or more. It has become. For this reason, a gas-liquid interface does not occur in the process in which the oxygen fluid becomes room temperature oxygen, and precipitation of hydrocarbons in equipment and piping can be suppressed.

また、液体酸素ポンプ3から導出された液体酸素を酸素昇温器4に導入する際、差圧計8を用いて酸素昇温器4の一次側と二次側との差圧を連続あるいは所定の間隔で測定することが好ましい。これにより、液体酸素ポンプ3と減圧弁13と間において高沸点成分である炭化水素類による機器や配管の閉塞等によって生じた場合であっても、この間の圧力損失の変化を早期に発見することができる。したがって、早期に機器や配管等の内部のパージが可能となり、プロセスの安全運転が可能となる。   Further, when liquid oxygen derived from the liquid oxygen pump 3 is introduced into the oxygen heater 4, the differential pressure between the primary side and the secondary side of the oxygen heater 4 is continuously or predetermined using a differential pressure gauge 8. It is preferable to measure at intervals. Thereby, even when the liquid oxygen pump 3 and the pressure reducing valve 13 are caused by blockage of equipment or piping due to hydrocarbons which are high-boiling components, the change in pressure loss during this period should be detected early. Can do. Therefore, it becomes possible to purge the inside of equipment, piping and the like at an early stage, and the process can be safely operated.

次に、酸素昇温器4によって常温まで昇温された超臨界状態の流体は、減圧弁13によって臨界圧力以下まで減圧された後、熱交換器14及び加熱器15で再び昇温された後に触媒反応筒5に導入される。この触媒反応筒5では、酸素ガス中の炭化水素が酸化されて、水分及び二酸化炭素が生成される。すなわち、酸素ガス中から炭化水素類を除去される(触媒反応工程)。   Next, after the supercritical fluid heated to room temperature by the oxygen heater 4 is depressurized to a critical pressure or less by the pressure reducing valve 13 and then heated again by the heat exchanger 14 and the heater 15. It is introduced into the catalytic reaction cylinder 5. In the catalytic reaction cylinder 5, hydrocarbons in the oxygen gas are oxidized to generate moisture and carbon dioxide. That is, hydrocarbons are removed from the oxygen gas (catalytic reaction step).

次に、触媒反応筒5から導出される気体、すなわち、炭化水素が除去された酸素ガスは、熱交換器14、冷却器16で冷却された後、吸着器6に導入される。以下、本実施形態では、吸着筒6Aが吸着工程であり、吸着筒6Bが再生工程である場合を例にして説明する。   Next, the gas derived from the catalytic reaction cylinder 5, that is, the oxygen gas from which hydrocarbons have been removed, is cooled by the heat exchanger 14 and the cooler 16 and then introduced into the adsorber 6. Hereinafter, in this embodiment, the case where the adsorption cylinder 6A is the adsorption process and the adsorption cylinder 6B is the regeneration process will be described as an example.

(吸着工程)
吸着筒6Aでは、触媒反応筒5から導出された酸素ガス中の水分、二酸化炭素が吸着除去される。具体的には触媒反応筒5から導出された酸素ガスが吸着筒6A内に導入されて、この吸着筒6A内に充填された吸着剤層によって水分及び二酸化炭素が吸着されて除去される。精製された酸素ガスは、吸着筒6Aから経路L5に導出された後、クリプトン、キセノンを分離精製する後工程の設備(脱酸素塔7)に導入される。
(Adsorption process)
In the adsorption cylinder 6A, moisture and carbon dioxide in the oxygen gas led out from the catalyst reaction cylinder 5 are adsorbed and removed. Specifically, oxygen gas led out from the catalytic reaction cylinder 5 is introduced into the adsorption cylinder 6A, and moisture and carbon dioxide are adsorbed and removed by the adsorbent layer filled in the adsorption cylinder 6A. The purified oxygen gas is led out to the path L5 from the adsorption cylinder 6A, and then introduced into a post-process facility (deoxygenation tower 7) for separating and purifying krypton and xenon.

(再生工程)
一方の吸着筒6Aにおいて吸着工程が行なわれている間、他方の吸着筒6Bでは再生工程が行なわれている。ここで、吸着筒6Bの再生が終了すると、吸着工程に備えて吸着筒6Bの内部は充圧される(充圧工程)。具体的には、弁21を開とすることにより、吸着筒6Aで精製された酸素ガスの一部を経路L5から吸着筒6B内に導入する。これにより、吸着筒6Aで精製された酸素ガスの一部を上記吸着筒6Bの充圧ガスとして用いることができる。
(Regeneration process)
While the adsorption process is performed in one adsorption cylinder 6A, the regeneration process is performed in the other adsorption cylinder 6B. Here, when the regeneration of the adsorption cylinder 6B is completed, the inside of the adsorption cylinder 6B is charged in preparation for the adsorption process (charging process). Specifically, by opening the valve 21, a part of the oxygen gas purified by the adsorption cylinder 6A is introduced into the adsorption cylinder 6B from the path L5. Thereby, a part of oxygen gas refine | purified with 6 C of adsorption cylinders can be used as a charging gas of the said adsorption cylinder 6B.

ところで、従来の空気液化分離装置の運転方法では、複式精留塔の後工程に設置された吸着器の充圧用流体として、経路L5に流通する流体とは組成の異なる流体を用いていたため、後工程の脱酸素塔等に導入される流体組成が変動してプロセス変動の一因となるという問題があった。   By the way, in the conventional operation method of the air liquefaction separation apparatus, a fluid having a composition different from that of the fluid flowing through the path L5 is used as the charging fluid for the adsorber installed in the post-process of the double rectification column. There has been a problem that the fluid composition introduced into the deoxygenation tower of the process fluctuates and contributes to the process fluctuation.

これに対して、本実施形態の運転方法によれば、再生工程における再生終了後の吸着筒6Bの充圧用酸素ガスとして、吸着筒6Aの吸着工程によって製造した酸素ガスを用いる構成となっている。このため、経路L5に流通する所定の組成(酸素、クリプトン、キセノンを有し、炭化水素、水分、二酸化炭素を含まない)に限定される流体を空気液化分離装置1自身(吸着工程にある吸着筒)で製造することが可能となり、外部から供給することを要しない。したがって、後工程の脱酸素塔7に導入される流体組成が変動することがなく、プロセス変動を抑制して安定運転が可能となる。   On the other hand, according to the operation method of the present embodiment, the oxygen gas produced by the adsorption process of the adsorption cylinder 6A is used as the charging oxygen gas of the adsorption cylinder 6B after the regeneration in the regeneration process. . For this reason, a fluid limited to a predetermined composition (having oxygen, krypton, and xenon and not including hydrocarbons, moisture, and carbon dioxide) flowing through the path L5 is used as the air liquefaction separation apparatus 1 itself (adsorption in the adsorption process). Tube), and it is not necessary to supply from the outside. Accordingly, the composition of the fluid introduced into the post-stage deoxygenation tower 7 does not fluctuate, and process operation is suppressed and stable operation is possible.

そして、本実施形態の運転方法は、再生工程における再生終了後の吸着筒6Bの充圧用の酸素ガスとして、吸着工程における吸着筒6Aによって製造された酸素ガスの一部を用いる場合であっても、この吸着器6から後工程の脱酸素塔7に導入する酸素ガスの流量が一定となる様に、液体酸素ポンプ3から導出する液体酸素の流量を制御することを特徴としている。   And the operation method of this embodiment is a case where a part of oxygen gas manufactured by the adsorption cylinder 6A in the adsorption process is used as the oxygen gas for charging the adsorption cylinder 6B after the regeneration in the regeneration process. The flow rate of the liquid oxygen led out from the liquid oxygen pump 3 is controlled so that the flow rate of the oxygen gas introduced from the adsorber 6 into the deoxygenation tower 7 in the subsequent process is constant.

具体的には、吸着器6から脱酸素塔7に導入する酸素ガス流量又は圧力を、経路L5に設けられた流量計9及び圧力計24の一方又は両方によって連続あるいは所定の間隔で測定する。そして、この流量又は圧力の測定値の、少なくとも一方の変動量を、インバーター10に制御信号として送信する。この制御信号を受けたインバーター10は、経路L5に流通する流体の流量又は圧力の測定値の変動量に応じて、液体酸素ポンプ3の回転数を増加又は減少するように制御する。   Specifically, the flow rate or pressure of oxygen gas introduced from the adsorber 6 to the deoxygenation tower 7 is measured continuously or at predetermined intervals by one or both of the flow meter 9 and the pressure gauge 24 provided in the path L5. Then, at least one fluctuation amount of the measured value of the flow rate or pressure is transmitted to the inverter 10 as a control signal. The inverter 10 that has received this control signal controls the rotational speed of the liquid oxygen pump 3 to increase or decrease according to the amount of change in the measured value of the flow rate or pressure of the fluid flowing through the path L5.

このように、液体酸素ポンプ3の制御を採用することによって、液体酸素ポンプ3から導出される液体酸素の流量が増加又は減少されて、吸着器6の後段に設けられた脱酸素塔7に導入される酸素ガス流量が一定となる。したがって、後工程である脱酸素塔7の運転圧力が変動することなく、一定運転とすることができる(制御する工程)。   As described above, by adopting the control of the liquid oxygen pump 3, the flow rate of the liquid oxygen led out from the liquid oxygen pump 3 is increased or decreased, and introduced into the deoxygenation tower 7 provided at the rear stage of the adsorber 6. The flow rate of oxygen gas is constant. Accordingly, the operation pressure of the deoxygenation tower 7 which is a subsequent process does not fluctuate, and a constant operation can be performed (control process).

最後に、後工程である脱酸素塔7に導入された流体は精留され、この脱酸素塔7の塔底部には、クリプトン90〜95%、キセノン5〜10%及び酸素0.5ppm以下からなる液化ガス(流体)分離される。そして、脱酸素塔7の塔底部から導出された流体は、この脱酸素塔7の二次側に設けられた図示略の分離塔において精留され、純度99.99%以上のクリプトンと、純度99.99%以上のキセノンとにそれぞれ分離される。   Finally, the fluid introduced into the deoxygenation tower 7 as a post-process is rectified, and at the bottom of the deoxygenation tower 7, krypton is 90 to 95%, xenon is 5 to 10%, and oxygen is 0.5 ppm or less. The resulting liquefied gas (fluid) is separated. The fluid led out from the bottom of the deoxygenation tower 7 is rectified in a separation tower (not shown) provided on the secondary side of the deoxygenation tower 7 to obtain a krypton having a purity of 99.99% or more, Separated into 99.99% or more of xenon.

以上説明したように、本実施形態の空気液化分離装置1及びその運転方法によれば、触媒反応筒5から導出後の気体を切替式の吸着器6に導入して水及び二酸化炭素を吸着除去した後、吸着器6から導出後の気体を二分し、一方を脱酸素塔7に導入するとともに、他方を再生後の吸着筒6Bに導入して吸着筒を充圧する構成となっている。すなわち、当該吸着器6が複式精留塔2の二次側に設けられており、充圧用の酸素ガス流体の成分が限定される場合であっても、一方の吸着筒6Aによって水及び二酸化炭素が除去された気体を製造し、再生後の他方の吸着筒6Bの充圧に用いることができる。   As described above, according to the air liquefaction separation apparatus 1 and its operating method of the present embodiment, the gas derived from the catalytic reaction cylinder 5 is introduced into the switchable adsorber 6 to adsorb and remove water and carbon dioxide. After that, the gas derived from the adsorber 6 is divided into two, one is introduced into the deoxygenation tower 7, and the other is introduced into the regenerated adsorption cylinder 6B to charge the adsorption cylinder. That is, even if the adsorber 6 is provided on the secondary side of the double rectification column 2 and the components of the oxygen gas fluid for charging are limited, water and carbon dioxide are absorbed by one adsorption cylinder 6A. Can be used to charge the other adsorption cylinder 6B after regeneration.

また、本実施形態の空気液化分離装置1及びその運転方法によれば、吸着器6と脱酸素塔7との間の経路L5に設けられた流量計9及び圧力計24の少なくとも一方によって脱酸素塔7に導入される気体の流量又は圧力を連続あるいは所定の間隔で測定し、この測定値の変動量に応じて液体酸素ポンプ3の回転数をインバーター10により制御する構成となっている。これにより、液体酸素ポンプ3から導出する液体酸素の流量を増加又は減少させ、脱酸素塔7に導入する気体の流量又は圧力が一定となるように制御することができる。したがって、吸着器6と脱酸素塔7との間に新たなバッファータンク等を設けることなく、吸着器6における吸着筒6A,6Bの切り替え時の流量変動及び圧力変動を抑制することができるため、空気液化分離装置1の安定した運転が可能となる。   Further, according to the air liquefaction separation apparatus 1 and the operation method thereof of the present embodiment, deoxidation is performed by at least one of the flow meter 9 and the pressure gauge 24 provided in the path L5 between the adsorber 6 and the deoxygenation tower 7. The flow rate or pressure of the gas introduced into the tower 7 is measured continuously or at predetermined intervals, and the rotation speed of the liquid oxygen pump 3 is controlled by the inverter 10 according to the fluctuation amount of the measured value. Thereby, the flow rate of the liquid oxygen led out from the liquid oxygen pump 3 can be increased or decreased, and the flow rate or pressure of the gas introduced into the deoxygenation tower 7 can be controlled to be constant. Therefore, it is possible to suppress flow rate fluctuations and pressure fluctuations when switching the adsorption cylinders 6A and 6B in the adsorber 6 without providing a new buffer tank or the like between the adsorber 6 and the deoxygenation tower 7. The air liquefaction separation apparatus 1 can be stably operated.

また、本実施形態の空気液化分離装置1及びその運転方法によれば、複式精留塔2の二次側に設けられた液体酸素ポンプ3により、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、この液体酸素を酸素昇温器4によって常温まで昇温した後に減圧弁13で臨界圧力以下まで減圧し、この臨界圧力以下の酸素ガスを触媒反応筒5に導入する構成となっている。このように、液体酸素ポンプ3によって液体酸素を臨界圧力以上に昇圧することにより、酸素昇温器4において酸素が超臨界状態の流体となるため、液体酸素の一部が気化して生じる気液界面の発生を抑制することができる。したがって、気液界面における液側での炭化水素の濃縮を低減することができるため、空気液化分離装置を安全に運転することができる。そして、炭化水素を含む酸素は、常温まで加温された後は、気液平衡による炭化水素の濃縮を懸念する必要はなく、触媒反応、吸着或いは後工程の精留運転に適切な圧力まで減圧することができる。   Further, according to the air liquefaction separation apparatus 1 and its operating method of the present embodiment, the liquid oxygen pump 3 provided on the secondary side of the double rectifying column 2 is used to convert liquid oxygen enriched with krypton and xenon to a critical pressure. The liquid oxygen is heated up to room temperature with the oxygen heater 4 and then reduced to below the critical pressure with the pressure reducing valve 13, and oxygen gas below this critical pressure is introduced into the catalyst reaction cylinder 5. ing. In this way, by raising the liquid oxygen to a critical pressure or higher by the liquid oxygen pump 3, oxygen becomes a fluid in a supercritical state in the oxygen heater 4, and thus the gas-liquid produced by vaporization of a part of the liquid oxygen Generation of an interface can be suppressed. Therefore, since the concentration of hydrocarbons on the liquid side at the gas-liquid interface can be reduced, the air liquefaction separation apparatus can be operated safely. After the oxygen containing hydrocarbons is heated to room temperature, there is no need to worry about hydrocarbon concentration due to gas-liquid equilibrium, and the pressure is reduced to a pressure suitable for catalytic reaction, adsorption or rectifying operation in the subsequent process. can do.

さらに、本実施形態の空気液化分離装置1に、酸素昇温器4の一次側と二次側との差圧を測定するための差圧計8を設けた場合には、この間の圧力損失の変化を早期に発見することができる。これにより、内部の機器や配管のパージ等の処置を早期に講じることが可能となり、空気液化分離装置1をより安全に運転することができる。   Furthermore, when the differential pressure gauge 8 for measuring the differential pressure between the primary side and the secondary side of the oxygen heater 4 is provided in the air liquefaction separation apparatus 1 of the present embodiment, the change in pressure loss during this time Can be discovered early. As a result, it is possible to take measures such as purging internal equipment and piping at an early stage, and the air liquefaction separation apparatus 1 can be operated more safely.

なお、本発明は、上記実施形態のものに必ずしも限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。例えば、上記実施形態の空気液化分離装置1では、吸着器6と脱酸素塔7との間に流量計9あるいは圧力計24を設け、これらの測定値からインバーター10に信号を送付する構成となっているが、必ずしもこの構成に限定されるものではない。たとえば、吸着筒6Bを充圧する際に開とする弁21に流量計を設け、この弁21を流れる充圧流体の流量を測定して、その分の流量を増量する様に液体酸素ポンプ3の回転数を制御しても目的を達成することが可能である。   In addition, this invention is not necessarily limited to the thing of the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention. For example, in the air liquefaction separation apparatus 1 of the above-described embodiment, a flow meter 9 or a pressure gauge 24 is provided between the adsorber 6 and the deoxygenation tower 7 and a signal is sent to the inverter 10 from these measured values. However, it is not necessarily limited to this configuration. For example, a flow meter is provided in the valve 21 that is opened when the adsorption cylinder 6B is charged, the flow rate of the pressurized fluid flowing through the valve 21 is measured, and the flow rate of the liquid oxygen pump 3 is increased so as to increase the corresponding flow rate. The object can be achieved even by controlling the rotation speed.

また、低圧塔2Aから採取する液体酸素の流量を一定とし、吸着器充圧時の液体酸素ポンプ3の増量運転分をバッファータンク11内に貯液することにより、吸着器6の充圧工程における低圧塔2Aへの影響を低減することができる。   Further, in the charging process of the adsorber 6, the flow rate of the liquid oxygen collected from the low pressure column 2A is made constant, and the increased operation amount of the liquid oxygen pump 3 when the adsorber is charged is stored in the buffer tank 11. The influence on the low pressure column 2A can be reduced.

以下、具体例を示す。
(実施例)
図1に示す空気液化分離装置1を用いて、クリプトン及びキセノンを低温精留で分離する運転を実施した。図2は、空気液化分離装置1の圧力計22,23,24の、運転中における測定値を示している。また、図3は、空気液化分離装置1の液体酸素ポンプ3の、運転中における回転数と、流量計9の測定値とを示している。
なお、空気液化分離装置1の運転において、図2及び図3の横軸における運転時間0分では、吸着筒6Aは吸着工程、吸着筒6Bは再生工程であった。
Specific examples are shown below.
(Example)
An operation of separating krypton and xenon by low temperature rectification was performed using the air liquefaction separation apparatus 1 shown in FIG. FIG. 2 shows measured values during operation of the pressure gauges 22, 23, 24 of the air liquefaction separation apparatus 1. FIG. 3 shows the number of rotations during operation of the liquid oxygen pump 3 of the air liquefaction separation apparatus 1 and the measured value of the flow meter 9.
In the operation of the air liquefaction separation apparatus 1, the adsorption cylinder 6A was an adsorption process and the adsorption cylinder 6B was a regeneration process at an operation time of 0 minutes on the horizontal axis of FIGS.

図2及び図3に示すように、運転時間0分の際に再生工程にあった吸着筒6Bは、時間A〜B間で充圧工程となる。そして、図2及び図3中に示す時間Bにおいて、吸着筒6Bは充圧工程が完了し、その後、吸着工程となる。
この吸着筒6Bの充圧工程において、液体酸素ポンプ3は、図3に示すように、回転数制御(回転数の増加)によって増量運転となり、吸着筒6Bの充圧に必要な流体を供給した。この結果、図2及び図3に示すように、後工程に導入される酸素流体の圧力(圧力計24の値)及び酸素流体の流量(流量計9の値)はほぼ一定とすることができた。このように、空気液化分離装置1の安定運転が可能となることを確認することができた。
As shown in FIG. 2 and FIG. 3, the adsorption cylinder 6 </ b> B that was in the regeneration process when the operation time was 0 minutes becomes a charging process between time A and time B. Then, at time B shown in FIGS. 2 and 3, the adsorption cylinder 6 </ b> B has completed the charging process, and then becomes the adsorption process.
In the charging step of the adsorption cylinder 6B, as shown in FIG. 3, the liquid oxygen pump 3 is in an increase operation by the rotation speed control (increase in the rotation speed), and supplies the fluid necessary for charging the adsorption cylinder 6B. . As a result, as shown in FIG. 2 and FIG. 3, the pressure of the oxygen fluid (pressure gauge 24 value) and the flow rate of the oxygen fluid (flow meter 9 value) introduced into the subsequent process can be made substantially constant. It was. Thus, it was confirmed that the stable operation of the air liquefaction separation apparatus 1 was possible.

1・・・空気液化分離装置
2・・・複式精留塔
2A・・・低圧塔
3・・・液体酸素ポンプ(圧送手段)
4・・・酸素昇温器(加熱手段)
5・・・触媒反応筒
6・・・吸着器
6A,6B・・・吸着筒
7・・・脱酸素塔(分離手段)
8・・・差圧計(圧力測定手段)
9・・・流量計(測定手段)
10・・・インバーター(制御手段)
11・・・バッファータンク
12・・・フィルター
13・・・減圧弁
14・・・熱交換器
15・・・加熱器
16・・・冷却器
17・・・ドレンセパレーター
18〜21・・・弁
22,23,24・・・圧力計
L1〜L5・・・流路
DESCRIPTION OF SYMBOLS 1 ... Air liquefaction separation apparatus 2 ... Duplex rectification tower 2A ... Low pressure tower 3 ... Liquid oxygen pump (pressure feeding means)
4 ... Oxygen heater (heating means)
5 ... catalyst reaction cylinder 6 ... adsorber 6A, 6B ... adsorption cylinder 7 ... deoxygenation tower (separation means)
8 ... Differential pressure gauge (pressure measuring means)
9 ... Flow meter (measuring means)
10 ... Inverter (control means)
DESCRIPTION OF SYMBOLS 11 ... Buffer tank 12 ... Filter 13 ... Pressure reducing valve 14 ... Heat exchanger 15 ... Heater 16 ... Cooler 17 ... Drain separators 18-21 ... Valve 22 , 23, 24 ... pressure gauges L1-L5 ... flow path

Claims (3)

複式精留塔の低圧塔底部からクリプトン及びキセノンが濃縮された液体酸素を抜き出し、それを原料としてクリプトン及びキセノンを低温精留で分離する空気液化分離装置の運転方法であって、
複式精留塔の二次側に設けられた圧送手段により、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、所定の流量で導出する圧送工程と、
前記圧送手段から導出された前記液体酸素を常温まで昇温した後に減圧手段に導入し、臨界圧力以下まで減圧する減圧工程と、
前記減圧手段から導出された臨界圧力以下の酸素ガスを触媒反応筒に導入し、当該液体酸素が含有する炭化水素類と酸素とを反応させて水及び二酸化炭素を生成する触媒反応工程と、
前記触媒反応筒から導出後の気体を、吸着、再生及び充圧を交互に行なう2以上の吸着筒を有する切替式の吸着器の少なくとも1つの吸着筒に導入し、前記気体中から水及び二酸化炭素を吸着除去する吸着工程と、
前記吸着器から導出後の気体を二分し、一方の気体を冷却した後にクリプトン及びキセノンを低温精留する後工程に導入するとともに、他方の気体を再生後の吸着筒に導入して当該吸着筒を充圧する充圧工程と、
クリプトン及びキセノンを低温精留する前記後工程に導入する前記一方の気体の流量又は圧力が一定となるように、前記流量又は前記圧力を、連続あるいは所定の間隔で測定し、当該流量又は当該圧力の測定値の変動量に応じて前記圧送手段から導出する前記液体酸素の流量を増加又は減少させて制御する工程と、を備えることを特徴とする空気液化分離装置の運転方法。
An operation method of an air liquefaction separation apparatus for extracting liquid oxygen enriched with krypton and xenon from the bottom of a low-pressure column of a double rectification column, and separating krypton and xenon by low-temperature rectification using it as a raw material,
A pumping step of compressing liquid oxygen enriched with krypton and xenon to a critical pressure or higher by a pumping means provided on the secondary side of the double rectification column, and deriving at a predetermined flow rate;
A pressure reducing step for raising the liquid oxygen derived from the pressure feeding means to room temperature and then introducing it into the pressure reducing means, and reducing the pressure to a critical pressure or lower;
A catalytic reaction step of introducing oxygen gas having a pressure equal to or lower than the critical pressure derived from the depressurization means into a catalytic reaction cylinder, and reacting hydrocarbons contained in the liquid oxygen with oxygen to generate water and carbon dioxide;
The gas derived from the catalyst reaction cylinder is introduced into at least one adsorption cylinder of a switching type adsorber having two or more adsorption cylinders that alternately perform adsorption, regeneration, and charging, and water and carbon dioxide are extracted from the gas. An adsorption process for adsorbing and removing carbon;
After the gas derived from the adsorber is divided into two, after cooling one gas, krypton and xenon are introduced into a post-process for low-temperature rectification, and the other gas is introduced into the regenerated adsorption cylinder and the adsorption cylinder A charging step for charging
The flow rate or the pressure is measured continuously or at predetermined intervals so that the flow rate or pressure of the one gas introduced into the post-process for rectifying krypton and xenon at a low temperature is constant. And a step of controlling by increasing or decreasing the flow rate of the liquid oxygen derived from the pumping means in accordance with the fluctuation amount of the measured value of the air liquefaction separation apparatus.
前記触媒反応工程において、
前記圧送手段から導出された前記液体酸素を加熱手段に導入し、
前記加熱手段の一次側と二次側との差圧を連続あるいは所定の間隔で測定することを特徴とする請求項1記載の空気液化分離装置の運転方法。
In the catalytic reaction step,
Introducing the liquid oxygen derived from the pumping means into the heating means;
2. A method for operating an air liquefaction separation apparatus according to claim 1, wherein the differential pressure between the primary side and the secondary side of the heating means is measured continuously or at predetermined intervals.
複式精留塔の低圧塔底部からクリプトン及びキセノンが濃縮された液体酸素を抜き出し、それを原料としてクリプトン及びキセノンを低温精留で分離する空気液化分離装置であって、
複式精留塔の二次側に設けられ、クリプトン及びキセノンが濃縮された液体酸素を臨界圧力以上に圧縮し、所定の流量で導出する圧送手段と、
前記圧送手段から導出された前記液体酸素を常温まで昇温する加熱手段と、
前記加熱手段の一次側と二次側との差圧を測定するための圧力測定手段と、
前記加熱手段から導出された超臨界状態の流体を臨界圧力以下まで降圧する減圧手段と、
前記減圧手段から導出された臨界圧力以下の酸素ガス中に含まれる炭化水素類と酸素とを反応させて水及び二酸化炭素を生成する触媒反応筒と、
吸着、再生及び充圧を交互に行なう2以上の吸着筒を有し、前記触媒反応筒から導出された気体中から水及び二酸化炭素を吸着除去する切替式の吸着器と、
前記吸着器の二次側に設けられ、当該吸着器から導出された流体の残部からクリプトン及びキセノンを分離する分離手段と、
前記分離手段に導入される前記流体の流量及び圧力の少なくとも一方を測定する測定手段と、
前記測定手段の流量及び圧力の少なくとも一方の測定値に基づいて、前記圧送手段からの前記液体酸素の流量を増加又は減少させて制御する制御手段と、を備えることを特徴とする空気液化分離装置。
An air liquefaction separation apparatus for extracting liquid oxygen enriched with krypton and xenon from the bottom of a low-pressure column of a double rectification column, and separating krypton and xenon by low-temperature rectification using it as a raw material,
A pumping means provided on the secondary side of the double rectification column, compressing liquid oxygen enriched with krypton and xenon to a critical pressure or more and deriving at a predetermined flow rate;
Heating means for raising the temperature of the liquid oxygen derived from the pressure feeding means to room temperature;
Pressure measuring means for measuring a differential pressure between the primary side and the secondary side of the heating means;
Pressure reducing means for reducing the pressure in the supercritical state derived from the heating means to a critical pressure or less;
A catalytic reaction cylinder for producing water and carbon dioxide by reacting hydrocarbons and oxygen contained in an oxygen gas having a critical pressure or less derived from the decompression means;
A switchable adsorber having two or more adsorption cylinders that alternately perform adsorption, regeneration, and charging, and that adsorbs and removes water and carbon dioxide from the gas derived from the catalyst reaction cylinder;
Separation means provided on the secondary side of the adsorber and separating krypton and xenon from the remainder of the fluid derived from the adsorber;
Measurement means for measuring at least one of the flow rate and pressure of the fluid introduced into the separation means;
An air liquefaction separation apparatus comprising: control means for controlling the flow rate of the liquid oxygen from the pressure feeding means to be increased or decreased based on at least one measurement value of the flow rate and pressure of the measurement means. .
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CN103968641B (en) * 2014-05-19 2019-04-02 上海启元空分技术发展股份有限公司 A kind of method for controlling gas flow rate of krypton xenon rectifying tower entering tower

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