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JP5590335B2 - Surface coated cutting tool with excellent chipping resistance and chipping resistance with excellent hard coating layer - Google Patents
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JP5590335B2 - Surface coated cutting tool with excellent chipping resistance and chipping resistance with excellent hard coating layer - Google Patents

Surface coated cutting tool with excellent chipping resistance and chipping resistance with excellent hard coating layer Download PDF

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JP5590335B2
JP5590335B2 JP2011052645A JP2011052645A JP5590335B2 JP 5590335 B2 JP5590335 B2 JP 5590335B2 JP 2011052645 A JP2011052645 A JP 2011052645A JP 2011052645 A JP2011052645 A JP 2011052645A JP 5590335 B2 JP5590335 B2 JP 5590335B2
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翔 龍岡
興平 冨田
晃 長田
惠滋 中村
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Mitsubishi Materials Corp
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Description

本発明は、高熱発生を伴うとともに、切れ刃に断続的・衝撃的負荷が作用する各種の鋼や鋳鉄の高速断続切削加工において、硬質被覆層がすぐれた耐チッピング性、耐欠損性を備えることにより、長期の使用にわたってすぐれた切削性能を発揮する表面被覆切削工具(以下、被覆工具という)に関するものである。   The present invention has high chipping resistance and chipping resistance with a hard coating layer in high-speed intermittent cutting of various steels and cast irons that are accompanied by high heat generation and intermittent and impact loads are applied to the cutting edge. Thus, the present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent cutting performance over a long period of use.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、いずれも化学蒸着形成された、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層および炭窒酸化物(以下、TiCNOで示す)層のうちの1層以上からなるTi化合物層、
(b)上部層が、化学蒸着形成された酸化アルミニウム(以下、Alで示す)層、
以上(a)および(b)で構成された硬質被覆層を形成してなる被覆工具が知られており、この被覆工具は、各種の鋼や鋳鉄などの切削加工に用いられていることが知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound layer composed of one or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) an aluminum oxide (hereinafter referred to as Al 2 O 3 ) layer in which the upper layer is formed by chemical vapor deposition;
A coated tool formed by forming a hard coating layer composed of (a) and (b) above is known, and this coated tool is known to be used for cutting various steels and cast irons. It has been.

ただ、前記被覆工具は、切れ刃に大きな負荷がかかる切削条件では、チッピング、欠損等を発生しやすく、工具寿命が短命であるという問題があるため、これを解消するために、従来からいくつかの提案がなされている。   However, the above-mentioned coated tool has a problem that chipping, chipping, etc. are likely to occur under cutting conditions in which a heavy load is applied to the cutting edge, and the tool life is short-lived. Proposals have been made.

例えば、特許文献1には、基体と接する第1層がTiN、第2層がTiCNからなる下部層において、第2層の膜厚を全膜厚に対して60%以上で、かつ、その粒子の水平方向の平均粒径が0.3〜1.2μmであり、垂直方向の平均粒径が水平方向の平均粒径の2.5倍以上とすることにより、被覆工具の耐剥離性、耐チッピング性、耐摩耗性を高めることが提案されている。   For example, in Patent Document 1, in the lower layer in which the first layer in contact with the substrate is TiN and the second layer is TiCN, the thickness of the second layer is 60% or more of the total thickness, and the particles The average particle size in the horizontal direction is 0.3 to 1.2 μm, and the average particle size in the vertical direction is at least 2.5 times the average particle size in the horizontal direction. It has been proposed to increase chipping and wear resistance.

また、特許文献2には、下部層のTi化合物層として、少なくとも、柱状晶のTiCN層を形成し、該TiCN層の上端から該TiCN層の厚さの1/5の距離の位置におけるTiCN柱状結晶粒の水平方向の平均粒径d1と、該TiCN層の下端から該TiCN層の厚さの2/5の距離の位置におけるTiCN柱状結晶粒の水平方向の平均粒径d2の比を1≦d1/d2≦1.3とし、さらに、d1=0.2〜1.5μmとすることにより、耐摩耗性、耐欠損性の両方に優れ、断続切削を含む長時間の切削加工における耐欠損性と耐摩耗性の改善を図ることが提案されている。   In Patent Document 2, at least a columnar TiCN layer is formed as a Ti compound layer as a lower layer, and the TiCN columnar shape is located at a distance of 1/5 of the thickness of the TiCN layer from the upper end of the TiCN layer. The ratio between the horizontal average grain size d1 of the crystal grains and the horizontal average grain size d2 of the TiCN columnar crystal grains at a position 2/5 of the thickness of the TiCN layer from the lower end of the TiCN layer is 1 ≦ By setting d1 / d2 ≦ 1.3 and d1 = 0.2 to 1.5 μm, both wear resistance and fracture resistance are excellent, and fracture resistance in long-time cutting including intermittent cutting is achieved. It has been proposed to improve wear resistance.

さらに、特許文献3には、硬質被覆層として、少なくともTiCN層とAl層を有する被覆工具において、該TiCN層は、下部TiCN層と上部TiCN層とからなり、下部TiCN層の膜厚t1は1μm≦t1≦10μm、上部TiCN層の膜厚t2は0.5μm≦t2≦5μmであって、かつ、1<t1/t2≦5の関係を満足し、さらに、上部TiCN層のTiCN粒子の平均結晶幅w2は0.2〜1.5μmであって、下部TiCN層のTiCN粒子の平均結晶幅w1はw2の0.7倍以下とすることによって、硬質被覆層の密着性を高め、層間剥離を防止し、断続切削加工等における耐欠損性、耐摩耗性の改善を図ることが提案されている。 Further, in Patent Document 3, in a coated tool having at least a TiCN layer and an Al 2 O 3 layer as a hard coating layer, the TiCN layer is composed of a lower TiCN layer and an upper TiCN layer, and the film thickness of the lower TiCN layer. t1 is 1 μm ≦ t1 ≦ 10 μm, the film thickness t2 of the upper TiCN layer is 0.5 μm ≦ t2 ≦ 5 μm, and satisfies the relationship of 1 <t1 / t2 ≦ 5. Further, TiCN particles of the upper TiCN layer The average crystal width w2 is 0.2 to 1.5 μm, and the average crystal width w1 of the TiCN particles of the lower TiCN layer is 0.7 times or less of w2, thereby improving the adhesion of the hard coating layer, It has been proposed to prevent delamination and improve fracture resistance and wear resistance in intermittent cutting and the like.

特開平10−15711号公報Japanese Patent Laid-Open No. 10-15711 特開平10−109206号公報JP-A-10-109206 特開2005−186221号公報JP 2005-186221 A

近年の切削加工における省力化および省エネ化の要求は強く、これに伴い、被覆工具は一段と過酷な条件下で使用されるようになってきているが、例えば、前記特許文献1〜3に示される被覆工具においても、高熱発生を伴うとともに、より一段と切れ刃に断続的・衝撃的負荷が作用する高速断続切削加工に用いられた場合には、下部層の耐機械的衝撃性、耐熱的衝撃性が十分ではないために、切削加工時の高負荷によって切れ刃にチッピング、欠損が発生しやすく、その結果、比較的短時間で使用寿命に至るのが現状である。   In recent years, there is a strong demand for energy saving and energy saving in cutting, and with this, the coated tool has come to be used under more severe conditions. Even when a coated tool is used for high-speed interrupted cutting that is accompanied by high heat generation and more intermittent and impact loads are applied to the cutting edge, the mechanical impact resistance and thermal shock resistance of the lower layer Therefore, chipping and chipping are likely to occur on the cutting edge due to a high load during cutting, and as a result, the service life is reached in a relatively short time.

そこで、本発明者らは、前述のような観点から、高熱発生を伴い、かつ、切れ刃に断続的・衝撃的負荷が作用する高速断続切削加工に用いられた場合でも、硬質被覆層がすぐれた衝撃吸収性を備え、その結果、長期の使用にわたってすぐれた耐チッピング性、耐欠損性を発揮する被覆工具について鋭意研究を行った結果、以下の知見を得たのである。   In view of the above, the inventors of the present invention have an excellent hard coating layer even when used in high-speed intermittent cutting with high heat generation and intermittent and impact loads acting on the cutting edge. As a result of earnest research on coated tools that have excellent shock absorption and, as a result, excellent chipping resistance and fracture resistance over a long period of use, the following knowledge has been obtained.

即ち、本発明者等は、被覆工具の硬質被覆層、特に、下部層を構成するTi化合物のうちのTiの炭窒化物(以下、TiCNで示す)層の空孔分布形態について検討を進めたところ、TiCN層からなる硬質被覆層の下部層内に形成された微小空孔を、TiCN層内に均一に形成させるのではなく、規則性をもって不均質に分散させることによって、TiCN層の高温強度と高温硬さの低下を招くことなく、機械的、熱的な耐衝撃性を向上させることができることを見出したのである。   That is, the present inventors proceeded with studies on the pore distribution form of the hard coating layer of the coated tool, particularly the Ti carbonitride (hereinafter referred to as TiCN) layer of the Ti compound constituting the lower layer. However, the high-temperature strength of the TiCN layer is not achieved by uniformly forming the microvoids formed in the lower layer of the hard coating layer made of the TiCN layer in the TiCN layer, but by dispersing it in a regular and inhomogeneous manner. It was found that the mechanical and thermal impact resistance can be improved without causing a decrease in hardness at high temperature.

そして、前記空孔分布形態を備えるTiCN層(以下、改質TiCN層という)は、例えば、以下の化学蒸着法によって成膜することができる。   And the TiCN layer (henceforth a modified TiCN layer) provided with the said void | hole distribution form can be formed into a film by the following chemical vapor deposition methods, for example.

例えば、工具基体表面に、下部層を構成するTi化合物層の一つとして、TiN層を蒸着形成した後、
(a)上記TiN層の上に、TiCl−CHCN−N−H系反応ガスを用いてTiCN層を蒸着形成し、
(b)上記(a)の成膜過程で、上記反応ガスの導入を停止すると同時に、SF系ガスを導入してSFエッチングを行い、
(c)次いで、上記(a)の工程と上記(b)の工程を繰り返し行ない、目標厚さのTiCN層を形成する。
For example, after depositing a TiN layer as one of the Ti compound layers constituting the lower layer on the tool base surface,
(A) A TiCN layer is deposited on the TiN layer using a TiCl 4 —CH 3 CN—N 2 —H 2 -based reactive gas,
(B) In the film forming process of (a), the introduction of the reactive gas is stopped, and at the same time, SF 6 -based gas is introduced to perform SF 6 etching,
(C) Next, the step (a) and the step (b) are repeated to form a TiCN layer having a target thickness.

上記(a)〜(c)によって、下部層を構成するTi化合物層の一つの層として改質TiCN層が形成されるが、該改質TiCN層について走査型電子顕微鏡で表面組織観察を行うと、孔径2〜30nmの微小空孔が形成され、しかも、該微小空孔密度は、層厚方向に沿って周期的に変化する空孔分布形態を有することが確認される。   According to the above (a) to (c), a modified TiCN layer is formed as one of the Ti compound layers constituting the lower layer. When the surface texture of the modified TiCN layer is observed with a scanning electron microscope, It is confirmed that micropores having a pore diameter of 2 to 30 nm are formed, and the micropore density has a pore distribution form that periodically changes along the layer thickness direction.

そして、硬質被覆層の下部層を構成するTi化合物層の少なくとも一つの層として、前記空孔分布形態を有する改質TiCN層を蒸着形成した本発明の被覆工具は、高熱発生を伴い、かつ、切れ刃に断続的・衝撃的負荷が作用する鋼や鋳鉄の高速断続切削加工に用いた場合でも、硬質被覆層が耐チッピング性、耐欠損性にすぐれ、長期の使用にわたってすぐれた耐摩耗性を発揮し得ることを見出したのである。   The coated tool of the present invention in which the modified TiCN layer having the pore distribution form is deposited as at least one of the Ti compound layers constituting the lower layer of the hard coating layer is accompanied by high heat generation, and Even when used for high-speed intermittent cutting of steel and cast iron where intermittent and impact loads are applied to the cutting edge, the hard coating layer has excellent chipping resistance and fracture resistance, and excellent wear resistance over a long period of use. It was found that it can be demonstrated.

本発明は、前記知見に基づいてなされたものであって、
「(1) 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層は、少なくともTiの炭窒化物層を含み、かつ、3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層は、1〜25μmの平均層厚を有する酸化アルミニウム層、
上記(a)、(b)からなる硬質被覆層を化学蒸着した表面被覆切削工具において、
上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層内部には、孔径2〜30nmの微小空孔が形成されており、上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層を、工具基体表面と平行に0.1μmの厚み幅領域に区分し、該厚み幅領域に存在する微小空孔密度を測定した場合に、
微小空孔密度が200〜500個/μmである厚み幅領域と、微小空孔密度が0〜20個/μmである厚み幅領域とが、下部層の層厚方向に沿って、交互に少なくとも複数領域形成されていることによって、下部層中の微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有することを特徴とする表面被覆切削工具。
(2) 上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層中の微小空孔密度が、周期0.5μm〜5μmで層厚方向に沿って周期的に変化する空孔分布形態を有することを特徴とする(1)に記載の表面被覆切削工具。」
に特徴を有するものである。
The present invention has been made based on the above findings,
“(1) On the surface of a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The lower layer includes a Ti compound layer including at least a Ti carbonitride layer and having a total average layer thickness of 3 to 20 μm,
(B) the upper layer is an aluminum oxide layer having an average layer thickness of 1 to 25 μm;
In the surface-coated cutting tool obtained by chemical vapor deposition of the hard coating layer comprising the above (a) and (b),
Inside the at least one Ti carbonitride layer constituting the lower layer (a), micropores having a pore diameter of 2 to 30 nm are formed, and at least one constituting the lower layer (a) When the Ti carbonitride layer of the layer is divided into a thickness width region of 0.1 μm parallel to the tool substrate surface, and the micropore density existing in the thickness width region is measured,
A thickness width region having a micropore density of 200 to 500 / μm 2 and a thickness width region having a micropore density of 0 to 20 / μm 2 are alternately arranged along the thickness direction of the lower layer. A surface-coated cutting tool characterized by having a pore distribution form in which the fine pore density in the lower layer changes periodically along the layer thickness direction by forming at least a plurality of regions.
(2) The vacancy density in the at least one Ti carbonitride layer constituting the lower layer of (a) is periodically changed along the layer thickness direction with a period of 0.5 μm to 5 μm. The surface-coated cutting tool according to (1), which has a hole distribution form. "
It has the characteristics.

本発明について、以下に詳細に説明する。
下部層のTi化合物層:
Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの1層または2層以上のTi化合物層からなる下部層は、通常の化学蒸着条件で形成することができ、それ自体が高温強度を有し、これの存在によって硬質被覆層が高温強度を具備するようになるほか、工具基体とAlからなる上部層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつことは既に良く知られているが、本発明の下部層を構成する少なくとも1層の改質TiCN層、すなわち、孔径2〜30nmの微小空孔が、改質TiCN層内で所定の分布形態で分散分布している下部層は、切れ刃が高温に曝され、しかも、機械的・熱的衝撃を受ける高速断続切削加工においても、すぐれた高温強度、高温硬さを備え、同時に、すぐれた耐チッピング性、耐欠損性を発揮する。その合計平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方、その合計平均層厚が20μmを越えると、チッピングを発生しやすくなることから、その合計平均層厚を3〜20μmと定めた。
上部層のAl層:
上部層を構成するAl層が、高温硬さと耐熱性を備えることは既に良く知られているが、その平均層厚が1μm未満では、長期の使用に亘っての耐摩耗性を確保することができず、一方、その平均層厚が25μmを越えるとAl結晶粒が粗大化し易くなり、その結果、高温硬さ、高温強度の低下に加え、高速断続切削加工時の耐チッピング性、耐欠損性が低下するようになることから、その平均層厚を1〜25μmと定めた。
下部層に含まれる改質TiCN層の成膜:
本発明の改質TiCN層は、通常の化学蒸着条件で成膜するTi化合物層からなる下部層の少なくとも一つの層として、成膜することができる。
例えば、通常の化学蒸着装置を用い、
反応ガス組成(容量%):
TiCl:4〜5%,
:30〜40%,
:残
反応雰囲気温度:850〜950℃、
反応雰囲気圧力:10〜30kPa、
の条件で所定膜厚のTiN層を蒸着形成した後、
(a)上記TiN層の表面に、
反応ガス組成(容量%):
TiCl:1〜3%,
CHCN:0.5〜1.5%,
:5〜15%,
:残
反応雰囲気温度:850〜930℃、
反応雰囲気圧力:5〜20kPa、
の条件で所定膜厚のTiCN層を蒸着形成し
(b)ついで、上記反応ガスの導入を停止し、その代わりに、5〜10容量%のガス組成となるようにSFガスを添加したHガスを導入し、このSFガスにより以下の条件、即ち、
反応ガス組成(容量%):
SF:5〜10%,
:残
反応雰囲気温度:800〜1050℃、
反応雰囲気圧力:4〜27kPa、
の条件で5〜30分間SFエッチングを行う。
(c)ついで、上記SF系ガスの導入を停止し、装置内に、上記(a)の反応ガスを導入し、上記(a)と同じ条件で、再度TiCN層を蒸着形成する。
The present invention will be described in detail below.
Lower Ti compound layer:
The lower layer composed of one or two or more Ti compound layers of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride layer is formed under normal chemical vapor deposition conditions. In addition to having high-temperature strength, the hard coating layer has high-temperature strength by itself, and it adheres firmly to both the tool base and the upper layer made of Al 2 O 3. Thus, it is already well known that the hard coating layer has an action that contributes to improving the adhesion to the tool substrate, but at least one modified TiCN layer constituting the lower layer of the present invention, that is, with a pore diameter of 2 to 2. The lower layer in which fine pores of 30 nm are dispersed and distributed in a predetermined distribution form in the modified TiCN layer has a cutting edge exposed to a high temperature, and in high-speed intermittent cutting that receives mechanical and thermal shock. Has excellent high-temperature strength, Comprising a temperature hardness, at the same time, excellent chipping resistance, exhibits chipping resistance. If the total average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exhibited. On the other hand, if the total average layer thickness exceeds 20 μm, chipping tends to occur. It was determined to be 3 to 20 μm.
Upper layer Al 2 O 3 layer:
Al 2 O 3 layer constituting the upper layer is already well known to have high temperature hardness and heat resistance, but if the average layer thickness is less than 1 μm, it will ensure wear resistance over a long period of use. On the other hand, if the average layer thickness exceeds 25 μm, the Al 2 O 3 crystal grains are likely to be coarsened. As a result, in addition to a decrease in high-temperature hardness and high-temperature strength, resistance to high-speed intermittent cutting is also improved. Since the chipping property and chipping resistance are lowered, the average layer thickness is set to 1 to 25 μm.
Deposition of modified TiCN layer contained in lower layer:
The modified TiCN layer of the present invention can be formed as at least one lower layer composed of a Ti compound layer formed under normal chemical vapor deposition conditions.
For example, using normal chemical vapor deposition equipment,
Reaction gas composition (volume%):
TiCl 4 : 4 to 5%,
N 2: 30~40%,
H 2 : residual reaction atmosphere temperature: 850 to 950 ° C.,
Reaction atmosphere pressure: 10-30 kPa,
After depositing a TiN layer having a predetermined thickness under the conditions of
(A) On the surface of the TiN layer,
Reaction gas composition (volume%):
TiCl 4 : 1-3%
CH 3 CN: 0.5~1.5%,
N 2: 5~15%,
H 2 : residual reaction atmosphere temperature: 850 to 930 ° C.,
Reaction atmosphere pressure: 5 to 20 kPa,
(B) Then, the introduction of the reaction gas was stopped, and instead, SF 6 gas was added so that the gas composition was 5 to 10% by volume. 2 gases are introduced, and this SF 6 gas causes the following conditions:
Reaction gas composition (volume%):
SF 6 : 5 to 10%,
H 2 : residual reaction atmosphere temperature: 800 to 1050 ° C.
Reaction atmosphere pressure: 4 to 27 kPa,
The SF 6 etching is performed for 5 to 30 minutes under the above conditions.
(C) Next, the introduction of the SF 6 -based gas is stopped, the reaction gas (a) is introduced into the apparatus, and a TiCN layer is formed again by vapor deposition under the same conditions as (a).

上記(b)と(c)を繰り返し行ない、最終的に目標層厚の改質TiCN層を蒸着形成する。   The above steps (b) and (c) are repeated, and finally a modified TiCN layer having a target layer thickness is formed by vapor deposition.

この後、下部層として必要とするTi化合物層の成膜を行い、目標層厚の下部層を形成し、この上に上部層であるAl層を目標膜厚となるように蒸着形成することによって、硬質被覆層を形成する。
下部層に含まれる改質TiCN層の空孔分布形態:
図1に、前記の化学蒸着条件で形成された本発明の下部層に含まれる改質TiCN層の空孔分布形態の概略模式図を示す。
Thereafter, a Ti compound layer required as a lower layer is formed to form a lower layer having a target layer thickness, and an Al 2 O 3 layer, which is an upper layer, is deposited on the upper layer by vapor deposition. By doing so, a hard coating layer is formed.
Pore distribution form of modified TiCN layer contained in lower layer:
FIG. 1 shows a schematic diagram of the pore distribution form of the modified TiCN layer included in the lower layer of the present invention formed under the above chemical vapor deposition conditions.

図1に示されるように、本発明の下部層に含まれる改質TiCN層では、孔径2〜30nmの微小空孔が高密度で存在する領域と、微小空孔密度の低い領域とが複数領域形成され、しかも、該複数の微小空孔高密度領域と微小空孔低密度領域とは、層厚方向に沿って周期的に微小空孔密度が変化する空孔分布形態を有している。   As shown in FIG. 1, in the modified TiCN layer included in the lower layer of the present invention, there are a plurality of regions each having a high density of pores having a pore diameter of 2 to 30 nm and a region having a low pore density. In addition, the plurality of high-density micro-hole regions and the low-density micro-hole regions have a hole distribution form in which the micro-hole density changes periodically along the layer thickness direction.

図2により、更に詳細に説明する。   This will be described in more detail with reference to FIG.

図2は、前記化学蒸着条件で形成された本発明の空孔分布形態を有する下部層に含まれる改質TiCN層における、層厚方向位置−微小空孔密度の相関を表す空孔分布形態図を示す。   FIG. 2 is a pore distribution pattern diagram showing the correlation between the position in the layer thickness direction and the minute hole density in the modified TiCN layer included in the lower layer having the hole distribution pattern of the present invention formed under the chemical vapor deposition conditions. Indicates.

この空孔分布形態図は、以下の方法で求めることができる。   This hole distribution pattern can be obtained by the following method.

まず、下部層を、工具基体表面と平行に0.1μmの厚み幅領域に夫々区分し(図3において、工具基体表面に平行に引かれた複数の平行線で仕切られた区画が、0.1μmの厚み幅領域に相当する。)、区分された各厚み幅領域に存在する孔径2〜30nmの微小空孔の数を長さ合計10μmにわたって測定し、走査型電子顕微鏡(倍率50000倍)を用いて測定し、該0.1μmの厚み幅領域に存在する微小空孔密度(個/μm)を求め、各厚み幅領域で求められた微小空孔密度を層厚方向に沿ってグラフ化することにより、図2として示される層厚方向の空孔分布形態図を作成する。 First, the lower layer is divided into thickness width regions of 0.1 μm parallel to the tool base surface (in FIG. 3, the sections partitioned by a plurality of parallel lines drawn parallel to the tool base surface are 0. This corresponds to a thickness width region of 1 μm.), The number of fine pores having a diameter of 2 to 30 nm existing in each divided thickness width region was measured over a total length of 10 μm, and a scanning electron microscope (magnification 50000 times) was measured. Measured to obtain the micropore density (pieces / μm 2 ) existing in the thickness region of 0.1 μm, and graph the micropore density obtained in each thickness region along the layer thickness direction. By doing so, the hole distribution form figure of the layer thickness direction shown as FIG. 2 is created.

そして、本発明の下部層に含まれる改質TiCN層の空孔分布形態によれば、該層厚方向空孔分布形態図において、微小空孔密度が極大値(200〜500個/μmの範囲内)となる厚み幅領域と、微小空孔密度が極小値(0〜20個/μmの範囲内)となる厚み幅領域とが、下部層の層厚方向に沿って、周期的かつ交互に少なくとも複数領域形成される。 Then, according to the pore distribution pattern of the modified TiCN layer included in the lower layer of the present invention, in the layer thickness direction pore distribution pattern, the micropore density is a maximum value (200 to 500 / μm 2 ). A thickness width region that is within the range) and a thickness width region in which the micropore density is a minimum value (within a range of 0 to 20 / μm 2 ) are periodically and along the layer thickness direction of the lower layer. At least a plurality of regions are alternately formed.

例えば、図2においては、微小空孔密度が極大値(200〜500μm個/μmの範囲内)を示す厚み幅領域が、層厚方向に3箇所形成され、また、微小空孔密度が極小値(0〜20個/μmの範囲内)を示す厚み幅領域が、層厚方向に3箇所形成されている。 For example, in FIG. 2, three thickness width regions in which the micropore density shows a maximum value (within 200 to 500 μm / μm 2 ) are formed in the layer thickness direction, and the micropore density is minimal. Three thickness width regions showing values (in the range of 0 to 20 pieces / μm 2 ) are formed in the layer thickness direction.

そして、この層厚方向の空孔分布形態図から、本発明の下部層に含まれる改質TiCN層では、改質TiCN層内部に形成された孔径2〜30nmの微小空孔の分布が、層厚方向に沿って周期的に変化する空孔分布形態が形成されていることがわかる。   And, from the pore distribution pattern in the layer thickness direction, in the modified TiCN layer included in the lower layer of the present invention, the distribution of minute pores having a pore diameter of 2 to 30 nm formed inside the modified TiCN layer is It can be seen that a hole distribution form periodically changing along the thickness direction is formed.

本発明で、微小空孔密度の極大値を200〜500個/μmの範囲内と定めたのは、微小空孔密度の極大値を200個/μm未満であると極小領域との差が小さくなりすぎて周期構造の有する特徴を十分に発揮しえなくなり、一方、500個/μmを超えると空隙率が高くなりすぎ、改質TiCN層の脆化とともに耐摩耗性の低下が生じるからである。 In the present invention, the maximum value of the micropore density is determined to be in the range of 200 to 500 / μm 2 because the maximum value of the micropore density is less than 200 / μm 2 and the difference from the minimum region. Becomes too small to fully exhibit the characteristics of the periodic structure. On the other hand, if it exceeds 500 / μm 2 , the porosity becomes too high, and the wear resistance decreases as the modified TiCN layer becomes brittle. Because.

また、微小空孔密度の極小値を0〜20個/μmの範囲内と定めたのは、耐衝撃性に加えて改質TiCN層全体としての高温強度、高温硬さを維持するためには、改質TiCN層内に微小空孔密度が20個/μm以下の領域が必要とされるからであり、微小空孔密度の極小値が20個/μmを超えるような場合には、耐衝撃性にはすぐれたとしても、改質TiCN層の靭性、耐摩耗性が低下するという理由による。 The minimum value of the micropore density is determined to be in the range of 0 to 20 / μm 2 in order to maintain the high-temperature strength and high-temperature hardness of the modified TiCN layer as a whole in addition to impact resistance. This is because a region having a micropore density of 20 holes / μm 2 or less is required in the modified TiCN layer. When the minimum value of the micropore density exceeds 20 holes / μm 2 , Even if the impact resistance is excellent, the toughness and wear resistance of the modified TiCN layer are lowered.

また、本発明で、微小空孔の孔径を2〜30nmと定めたのは、改質TiCN層中に形成される空孔の孔径が2nm未満では、衝撃緩和効果が期待できず、一方、孔径が30nmを超えると、改質TiCN層の靭性低下が大きくなるためであり、改質TiCN層の高温強度、高温硬さを維持しつつ、断続的・衝撃的負荷に対する衝撃緩和効果を保持するためには、改質TiCN層内部に形成される微小空孔の孔径は2〜30nmでなければならない。   In the present invention, the pore diameter of the fine pores is determined to be 2 to 30 nm. If the pore diameter of the pores formed in the modified TiCN layer is less than 2 nm, the impact relaxation effect cannot be expected. If the thickness exceeds 30 nm, the toughness of the modified TiCN layer will decrease significantly, and the impact relaxation effect against intermittent and impact loads will be maintained while maintaining the high temperature strength and hardness of the modified TiCN layer. For this, the pore size of the micropores formed inside the modified TiCN layer must be 2 to 30 nm.

また、前記微小空孔の分布形態における層厚方向の周期は、0.5μm〜5μmであることが望ましい。この周期が0.5μm未満であると改質TiCN層を含む下部層の靭性、耐摩耗性が低下傾向を示し、一方、前記周期が5μmを超えると断続的・衝撃的負荷に対する改質TiCN層の耐衝撃性が低下してくる。   Moreover, it is desirable that the period in the layer thickness direction in the distribution form of the minute holes is 0.5 μm to 5 μm. If this period is less than 0.5 μm, the toughness and wear resistance of the lower layer including the modified TiCN layer tend to decrease, while if the period exceeds 5 μm, the modified TiCN layer against intermittent and impact loads The impact resistance of the will decrease.

本発明では、硬質被覆層の下部層中の改質TiCN層の微小空孔密度が前記の極大値と極小値を示す厚み幅領域が周期的に交互に現出する空孔分布形態を備えていることから、高熱発生を伴い、かつ、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工においても、改質TiCN層が有する本来の高温硬さと耐熱性とを損なうことなく、すぐれた耐チッピング性、耐欠損性を発揮するようになる。   In the present invention, there is provided a pore distribution form in which the thickness width region in which the micropore density of the modified TiCN layer in the lower layer of the hard coating layer shows the above-mentioned maximum value and minimum value alternately appears periodically. Therefore, even in high-speed intermittent cutting with high heat generation and intermittent / impact high load acting on the cutting edge, without impairing the original high temperature hardness and heat resistance of the modified TiCN layer, Exhibits excellent chipping resistance and chipping resistance.

本発明の被覆工具は、硬質被覆層として、少なくとも1層の改質TiCN層を含んだTi化合物層からなる下部層とAl層からなる上部層を被覆形成し、かつ、下部層中の改質TiCN層の微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有していることにより、鋼や鋳鉄等の高熱発生を伴い、しかも、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工に用いた場合でも、耐チッピング性、耐欠損性にすぐれ、その結果、長期の使用にわたってすぐれた耐摩耗性を発揮し、被覆工具の長寿命化が達成されるものである。 In the coated tool of the present invention, as a hard coating layer, a lower layer made of a Ti compound layer including at least one modified TiCN layer and an upper layer made of an Al 2 O 3 layer are formed by coating, and in the lower layer The modified TiCN layer has a pore distribution pattern in which the micropore density changes periodically along the layer thickness direction, resulting in high heat generation of steel, cast iron, etc., and intermittently on the cutting edge. Even when used for high-speed interrupted cutting where high loads and impacts are applied, it has excellent chipping resistance and fracture resistance. As a result, it has excellent wear resistance over a long period of use and has a long tool life. Is achieved.

本発明の空孔分布形態を有する本発明被覆工具の下部層(改質TiCN層)の概略模式図を示す。The schematic diagram of the lower layer (modified TiCN layer) of the coating tool of the present invention having the pore distribution form of the present invention is shown. 本発明の空孔分布形態を有する下部層(改質TiCN層)についての層厚方向の微小空孔密度分布図を示す。FIG. 5 shows a micro-vacancy density distribution diagram in the layer thickness direction of a lower layer (modified TiCN layer) having a pore distribution form of the present invention. 本発明の下部層(改質TiCN層)を、工具基体表面に平行に引かれた複数の(仮想)平行線で、0.1μmの厚み幅領域に仕切り、区画した状態の模式図を示す。FIG. 2 is a schematic view showing a state in which the lower layer (modified TiCN layer) of the present invention is partitioned by a plurality of (virtual) parallel lines drawn parallel to the tool base surface into a 0.1 μm thick width region and partitioned.

つぎに、本発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120408に規定するインサート形状をもったWC基超硬合金製の工具基体A〜Eをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By performing the processing, tool bases A to E made of WC-based cemented carbide having an insert shape specified in ISO · CNMG120408 were manufactured.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120408のインサート形状をもったTiCN基サーメット製の工具基体a〜eを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to e made of TiCN-based cermet having an insert shape of standard / CNMG120408 were formed.

つぎに、これらの工具基体A〜Eおよび工具基体a〜eの表面に、通常の化学蒸着装置を用い、
硬質被覆層の下部層として、表3に示される条件かつ表5に示される目標層厚でTi化合物層を蒸着形成する。
Next, a normal chemical vapor deposition apparatus is used on the surfaces of these tool bases A to E and tool bases a to e,
As a lower layer of the hard coating layer, a Ti compound layer is formed by vapor deposition under the conditions shown in Table 3 and the target layer thickness shown in Table 5.

ただ、Ti化合物層を形成するにあたり、そのうちの少なくとも一つの層は、表4に示す条件で、改質TiCN層を蒸着形成する。   However, in forming the Ti compound layer, at least one of them is formed by vapor deposition of the modified TiCN layer under the conditions shown in Table 4.

改質TiCN層は、
(a)まず、表4に示す成膜条件でTiCN層を形成し、
(b)次いで、表4に示されるエッチング条件で、成膜したTiCN層を所定時間SFエッチングし、
(c)上記(a)、(b)を表6に示されるような所定膜厚の改質TiCN層が得られるまで繰り返し行なうことにより形成する。
所定膜厚の下部層を蒸着形成した後、硬質被覆層の上部層であるAl層を、表3に示される形成条件で表5に示される目標層厚で蒸着形成する。
The modified TiCN layer is
(A) First, a TiCN layer is formed under the film forming conditions shown in Table 4,
(B) Next, under the etching conditions shown in Table 4, the formed TiCN layer was subjected to SF 6 etching for a predetermined time,
(C) The above steps (a) and (b) are repeated until a modified TiCN layer having a predetermined thickness as shown in Table 6 is obtained.
After forming a lower layer having a predetermined thickness by vapor deposition, an Al 2 O 3 layer, which is an upper layer of the hard coating layer, is formed by vapor deposition with a target layer thickness shown in Table 5 under the formation conditions shown in Table 3.

上記蒸着によって、微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有する表6に示される改質TiCN層を含んだ表5に示される下部層、および、Al層からなる同じく表5に示される上部層とからなる硬質被覆層を蒸着形成することにより本発明被覆工具1〜15を製造した。 The lower layer shown in Table 5 including the modified TiCN layer shown in Table 6 having a pore distribution form in which the micropore density changes periodically along the layer thickness direction by the deposition, and Al 2 The coated tools 1 to 15 of the present invention were manufactured by vapor-depositing a hard coating layer consisting of an O 3 layer and the upper layer shown in Table 5 as well.

前記本発明被覆工具1〜15の下部層に含まれる改質TiCN層について、走査型電子顕微鏡(倍率50000倍)を用いて複数視野に渡って観察し、図1の概略模式図に示される空孔分布形態を観察した。   The modified TiCN layer contained in the lower layer of the inventive coated tools 1 to 15 is observed over a plurality of fields of view using a scanning electron microscope (magnification 50000 times), and is shown in the schematic diagram of FIG. The pore distribution morphology was observed.

また、同じく走査型電子顕微鏡(倍率50000倍)を用いて、前記本発明被覆工具1〜15の下部層に含まれる改質TiCN層について、図3に示されるように層厚方向に0.1μmの厚み幅領域に区分し、該厚み幅領域に存在する孔径2〜30nmの微小空孔の数を測定し、微小空孔密度(個/μm)を求め、横軸を微小空孔密度(個/μm)、縦軸を層厚方向深さとして、図2に示される空孔分布形態図を作成した。 Similarly, using a scanning electron microscope (magnification 50000 times), the modified TiCN layer contained in the lower layer of the inventive coated tool 1 to 15 is 0.1 μm in the layer thickness direction as shown in FIG. , And the number of micropores having a pore diameter of 2 to 30 nm existing in the thickness width region is measured to obtain the micropore density (pieces / μm 2 ). The horizontal axis represents the micropore density ( 2 / μm 2 ), and the vertical axis is the depth in the layer thickness direction, the pore distribution pattern shown in FIG. 2 was created.

図2において、微小空孔密度が200〜500個/μmの間に存在する場合の微小空孔密度の最大の値を極大値Dmaxとし、一方、微小空孔密度が0〜20個/μmの間に存在する場合の微小空孔密度の最小の値を極小値Dminとし、図2として作成した空孔分布形態図から、DmaxとDminを求め、さらに、層厚方向に沿って、周期的に現れるDmax間の距離を微小空孔密度が変化する周期Cとして求めた。 In FIG. 2, the maximum value of the micropore density when the micropore density is between 200 and 500 / μm 2 is the maximum value Dmax, while the micropore density is 0 to 20 / μm. 2 is defined as the minimum value Dmin, and Dmax and Dmin are obtained from the hole distribution pattern created as FIG. 2, and the period along the layer thickness direction is determined. The distance between Dmax that appears on the fly was determined as the period C at which the micropore density changes.

表6に、前記極大値Dmax、極小値Dmin及び周期Cの値を示す。   Table 6 shows values of the maximum value Dmax, the minimum value Dmin, and the period C.

また、比較の目的で、工具基体A〜Eおよび工具基体a〜eの表面に、表3に示される条件かつ表7に示される目標層厚で、硬質被覆層の下部層としてのTi化合物層および上部層としてのAl層を蒸着形成することにより、表7に示すTiCN層を有する比較被覆工具1〜10を作製した。(比較被覆工具1〜10では、改質TiCN層の形成を行っていない。)
また、表3に示される条件かつ表7に示される目標層厚で、硬質被覆層の下部層としてのTi化合物層および上部層としてのAl層を蒸着形成するとともに、下部層の一部に、表4に示される条件でTiCNの微小空孔密度が変化する改質TiCN層を形成することにより、表8に示される改質TiCN層を含んだ表7に示す下部層およびAl層からなる上部層を有する比較被覆工具11〜15を作製した。
For comparison purposes, a Ti compound layer as a lower layer of the hard coating layer on the surfaces of the tool bases A to E and the tool bases a to e under the conditions shown in Table 3 and the target layer thickness shown in Table 7 Comparative coating tools 1 to 10 having TiCN layers shown in Table 7 were prepared by vapor-depositing Al 2 O 3 layers as upper layers. (The comparative coated tools 1 to 10 do not form a modified TiCN layer.)
Further, the Ti compound layer as the lower layer of the hard coating layer and the Al 2 O 3 layer as the upper layer are formed by vapor deposition under the conditions shown in Table 3 and the target layer thickness shown in Table 7. By forming a modified TiCN layer in which the micropore density of TiCN changes under the conditions shown in Table 4, the lower layer shown in Table 7 including the modified TiCN layer shown in Table 8 and Al 2 Comparative coated tools 11-15 having an upper layer composed of an O 3 layer were produced.

比較被覆工具1〜10のTiCN層及び比較被覆工具11〜15の改質TiCN層について、走査型電子顕微鏡(倍率50000倍)を用いて、TiCN層の微小空孔密度を測定した。   About the TiCN layer of the comparative coating tool 1-10, and the modified TiCN layer of the comparative coating tool 11-15, the micropore density of the TiCN layer was measured using the scanning electron microscope (50000 times magnification).

比較被覆工具1〜10については、TiCN層の空孔密度は層厚方向に有意な差は認められず、孔径40〜100nmの空孔が、ほぼ0〜3個/μmの密度で層内に均一に分布していた。 For the comparative coated tools 1 to 10, there is no significant difference in the pore density of the TiCN layer in the layer thickness direction, and pores having a pore diameter of 40 to 100 nm are in the layer at a density of about 0 to 3 / μm 2 . Were evenly distributed.

表8には、比較被覆工具1〜10についての層厚方向全体にわたり均一に分布している微小空孔の空孔密度の値を示す。   Table 8 shows the value of the pore density of the fine pores uniformly distributed over the entire layer thickness direction for the comparative coated tools 1 to 10.

比較被覆工具11〜15については、本発明被覆工具1〜15の場合と同様に層厚方向にわたる空孔分布形態を求めた。   For the comparative coated tools 11 to 15, the pore distribution form in the layer thickness direction was obtained in the same manner as the coated tools 1 to 15 of the present invention.

表8に、比較被覆工具11〜15について求めた極大値Dmax、極小値Dmin及び周期Cの値を示す。   Table 8 shows values of the maximum value Dmax, the minimum value Dmin, and the period C obtained for the comparative coated tools 11 to 15.

また、本発明被覆工具1〜15及び比較被覆工具1〜15の各構成層の層厚を、走査型電子顕微鏡を用いて測定したところ、いずれも表5〜表8に示される目標層厚と実質的に同じ平均層厚を示した。   Moreover, when the layer thickness of each component layer of this invention coated tool 1-15 and comparative coated tool 1-15 was measured using the scanning electron microscope, all are the target layer thickness shown in Table 5-Table 8, and It showed substantially the same average layer thickness.

Figure 0005590335
Figure 0005590335

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Figure 0005590335
つぎに、前記本発明被覆工具1〜15及び比較被覆工具1〜15について、表9に示す条件で切削加工試験を実施し、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
Figure 0005590335
Next, a cutting test was carried out on the present invention coated tools 1 to 15 and comparative coated tools 1 to 15 under the conditions shown in Table 9, and the flank wear width of the cutting edge was measured in any cutting test.

表10に、この測定結果を示した。   Table 10 shows the measurement results.

Figure 0005590335
Figure 0005590335

Figure 0005590335
表5〜10に示される結果から、本発明の被覆工具は、硬質被覆層の下部層として、改質TiCN層内部に形成された微小空孔の微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有していることにより、鋼や鋳鉄等の高熱発生を伴い、しかも、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工に用いた場合でも、耐チッピング性、耐欠損性にすぐれ、その結果、長期の使用にわたってすぐれた耐摩耗性を発揮することが明らかである。
Figure 0005590335
From the results shown in Tables 5 to 10, in the coated tool of the present invention, as the lower layer of the hard coating layer, the micropore density of micropores formed inside the modified TiCN layer is periodic along the layer thickness direction. Even if it is used for high-speed intermittent cutting with high heat generation of steel, cast iron, etc., and intermittent / impact high loads acting on the cutting edge. It is clear that it has excellent chipping resistance and chipping resistance, and as a result, exhibits excellent wear resistance over a long period of use.

これに対して、下部層のTiCN層内の空孔分布がほぼ均一ある比較被覆工具1〜10については、高熱発生を伴い、しかも、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工に用いた場合、チッピング、欠損等の発生により短時間で寿命にいたることが明らかであり、また、本発明範囲外の微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有する比較被覆工具11〜15について本発明の被覆工具に比べて、耐摩耗性の点で劣ることは明らかである。   On the other hand, the comparative coated tools 1 to 10 in which the pore distribution in the TiCN layer of the lower layer is substantially uniform are accompanied by high heat generation, and the intermittent high-speed intermittent load is applied to the cutting edge. When used in cutting, it is clear that chipping, chipping, etc. will lead to a short life, and the void density outside the scope of the present invention periodically varies along the layer thickness direction. It is clear that the comparative coated tools 11 to 15 having the hole distribution form are inferior in wear resistance as compared with the coated tool of the present invention.

前述のように、本発明の被覆工具は、例えば、鋼や鋳鉄等の高熱発生を伴い、かつ、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工において、すぐれた耐チッピング性、耐欠損性を発揮し、使用寿命の延命化を可能とするものであるが、高速断続切削加工条件ばかりでなく、高速切削加工条件、高切込み,高送りの高速重切削加工条件等で使用することも勿論可能である。   As described above, the coated tool of the present invention has excellent chipping resistance in high-speed intermittent cutting with high heat generation such as steel and cast iron and intermittent and impact high load acting on the cutting edge. Demonstrate fracture resistance and extend the service life, but it is used not only for high-speed interrupted cutting conditions but also for high-speed cutting conditions, high cutting depths, high feeds, high-speed heavy cutting conditions, etc. Of course, it is also possible.

Claims (2)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層は、少なくともTiの炭窒化物層を含み、かつ、3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層は、1〜25μmの平均層厚を有する酸化アルミニウム層、
上記(a)、(b)からなる硬質被覆層を化学蒸着した表面被覆切削工具において、
上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層内部には、孔径2〜30nmの微小空孔が形成されており、上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層を、工具基体表面と平行に0.1μmの厚み幅領域に区分し、該厚み幅領域に存在する微小空孔密度を測定した場合に、
微小空孔密度が200〜500個/μmである厚み幅領域と、微小空孔密度が0〜20個/μmである厚み幅領域とが、下部層の層厚方向に沿って、交互に少なくとも複数領域形成されていることによって、下部層中の微小空孔密度が層厚方向に沿って周期的に変化する空孔分布形態を有することを特徴とする表面被覆切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer includes a Ti compound layer including at least a Ti carbonitride layer and having a total average layer thickness of 3 to 20 μm,
(B) the upper layer is an aluminum oxide layer having an average layer thickness of 1 to 25 μm;
In the surface-coated cutting tool obtained by chemical vapor deposition of the hard coating layer comprising the above (a) and (b),
Inside the at least one Ti carbonitride layer constituting the lower layer (a), micropores having a pore diameter of 2 to 30 nm are formed, and at least one constituting the lower layer (a) When the Ti carbonitride layer of the layer is divided into a thickness width region of 0.1 μm parallel to the tool substrate surface, and the micropore density existing in the thickness width region is measured,
A thickness width region having a micropore density of 200 to 500 / μm 2 and a thickness width region having a micropore density of 0 to 20 / μm 2 are alternately arranged along the thickness direction of the lower layer. A surface-coated cutting tool characterized by having a pore distribution form in which the fine pore density in the lower layer changes periodically along the layer thickness direction by forming at least a plurality of regions.
上記(a)の下部層を構成する少なくとも1層のTiの炭窒化物層中の微小空孔密度が、周期0.5μm〜5μmで層厚方向に沿って周期的に変化する空孔分布形態を有することを特徴とする請求項1に記載の表面被覆切削工具。   The pore distribution form in which the micropore density in at least one Ti carbonitride layer constituting the lower layer of (a) changes periodically along the layer thickness direction at a cycle of 0.5 μm to 5 μm The surface-coated cutting tool according to claim 1, comprising:
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