JP5593054B2 - Surface treatment equipment - Google Patents

Description

  The present invention relates to a surface treatment apparatus, and is suitable for application to, for example, a surface treatment apparatus that performs surface treatment of an object to be processed by electric discharge. Here, the surface treatment includes improving wettability at the time of printing on a film or the like or improving adhesion at the time of applying an adhesive to a seal.

  2. Description of the Related Art Conventionally, surface treatment apparatuses that modify the surface of an object to be processed such as a film using a discharge phenomenon such as corona discharge or atmospheric plasma are known. This type of surface treatment apparatus generates corona discharge between a long discharge electrode held by an electrode holder and an earth roll, and causes the object to be treated such as a film to cross the discharge electrode on the earth roll. The surface of the object to be processed can be transported and modified by irradiation with corona discharge. Further, the surface treatment apparatus holds the discharge electrode on the long electrode side rail along the longitudinal direction of the discharge electrode, and the electrode side rail is slidably suspended on the electrode holder via the slide unit. There are some (see, for example, Patent Document 1).

  And this surface treatment apparatus irradiates corona discharge and modifies the surface of an object to be processed such as a film, thereby improving the wettability during the printing process and improving the printing durability. In addition, this surface treatment device irradiates the seal surface with corona discharge before applying the adhesive to the seal, thereby modifying the seal surface and improving the adhesion of the seal. Furthermore, in this surface treatment apparatus, when the film is subjected to surface treatment by running at high speed, even if the film laterally moves (meanders) in the left-right direction, the discharge electrode follows in accordance with the meandering of the film, A predetermined position can be reliably irradiated with corona discharge.

JP 2002-292272 A

  By the way, in such a surface treatment apparatus, it is necessary to supply a high-voltage current to the discharge electrode to generate a corona discharge or a plasma discharge. Although a coated conductor is used, there is a risk of electric shock even if such a coated conductor is used. Moreover, in such a surface treatment apparatus, when corona discharge or plasma discharge is performed, ozone is generated from the discharge electrode, and thus it is necessary to treat the ozone.

  Such surface treatment equipment handles high-voltage currents, and even minor faults or defective parts may cause serious damage. Since it is necessary to pay attention, it is desired that maintenance can be easily performed.

  Therefore, the present invention has been made in view of such a situation, and provides a surface treatment apparatus that can perform insulation of a conductor through which a high-voltage current flows, treatment of generated ozone, and easy maintenance. For the purpose.

In order to solve such a problem, in the present invention, the invention according to claim 1 is provided with a discharge electrode and a conductor connecting the discharge electrode and a power source, and the surface of the object to be processed is irradiated with the discharge by the discharge electrode. In the surface treatment apparatus for modifying the surface of the workpiece, a case provided with the discharge electrode is connected to one end, and a duct is provided with an exhaust part provided at the other end. The conductor is arranged at a distance from the inner wall, and the conductor can be divided in the extending direction.

  The invention according to claim 2 is characterized in that the duct has a cylindrical shape.

  According to a third aspect of the present invention, there is provided a sending means for sending the air in the case to the exhaust section.

  The invention according to claim 4 is characterized in that the case is movably provided and the duct is formed to be extendable.

  According to a fifth aspect of the present invention, the duct is a double pipe that can be expanded and contracted.

  The invention according to claim 6 is characterized in that the conductor can be expanded and contracted.

  The invention according to claim 7 is characterized by comprising ozone treatment means for treating ozone generated by the discharge.

  The invention according to claim 8 is characterized in that the ozone treatment means is provided on the downstream side of the exhaust portion of the duct.

  The invention according to claim 9 is characterized in that the discharge electrode generates a corona discharge, and the discharge electrode is covered with an insulator.

  In the invention according to claim 10, the duct includes at least one insulating mounting member therein, and the conductor is fixed by the insulating mounting member.

  In the invention according to claim 11, one end of the insulating mounting member is fixed to the outside of the duct, the other end is disposed inside the duct, and the other end is floated from the inner wall of the duct. It is characterized by having a configuration for cantilever support.

  According to claim 1 of the present invention, the duct and the conductor are arranged apart from each other in the duct, ozone generated by the discharge is discharged to the ozone treatment means through the duct, and the duct can be further divided. Since maintenance is easy and maintenance can be performed frequently, it is possible to prevent the conductor from causing abnormal discharge to the contamination that accumulates in the duct when ozone is discharged. Thus, it is possible to insulate a conductor through which a high-voltage current flows and to treat generated ozone, and to easily perform maintenance.

It is a schematic explanatory drawing of a surface treatment apparatus. It is the schematic of a discharge part. It is sectional drawing which shows the cross-sectional structure of the duct part by embodiment of this invention. It is sectional drawing in the A'-A position and B'-B position of FIG. 3 when a duct is divided | segmented and combined. It is sectional drawing in the C'-C position of FIG. 3 when a one side pipe | tube is divided | segmented and combined. It is a schematic explanatory drawing around an ozone treatment apparatus. It is sectional drawing of the duct which shows other embodiment of this invention. It is sectional drawing which shows the cross-sectional structure of the duct part by 2nd Embodiment. It is sectional drawing which shows the cross-sectional structure of the insulation attachment member by 2nd Embodiment.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

(1) First Embodiment (1-1) Overall Configuration of Corona Discharge Surface Treatment Apparatus As shown in FIG. 1, a corona discharge surface treatment apparatus 1 as a surface treatment apparatus includes a discharge unit 6 as a discharge electrode. A corona electrode 2 is provided, and the corona electrode 2 is disposed at a predetermined interval from the grounded earth roll R1. In the corona discharge surface treatment apparatus 1, a power supply device 4 is connected to the corona electrode 2 by a conductor 3, and an earth roll R <b> 1 is electrically connected to the power supply device 4.

  The corona discharge surface treatment apparatus 1 draws the film 5 from a roll R2 around which a film 5 as an object to be treated is wound, and passes the drawn film 5 between the earth roll R1 and the corona electrode 2. The film 5 is irradiated with corona discharge generated from the corona electrode 2 so that the film 5 can be modified.

  Here, the film 5 in this embodiment can illustrate what the surface is comprised by PP (polypropylene), PE (polyethylene), etc. The size of the film 5 is 40 μm thick, 380 mm wide and 1000 m wound.

  The corona discharge surface treatment apparatus 1 is installed in various packaging machines (not shown), for example, before the printing machine provided in the packaging machine prints characters representing the expiration date on the film 5. The planned print location can be modified by irradiating the print planned location of 5 with corona discharge. As a result, it is possible to improve the adherence of the ink to the printing scheduled portion modified thereby, and to perform printing with a printing machine with certainty.

  Here, as shown in FIG. 2, the discharge unit 6 includes a corona electrode 2 and a case 11 to which the corona electrode 2 is attached. The case 11 has a box shape having an upper surface, an opened lower surface, and four side surfaces 11a, 11b, 11a, and 11b.

  The case 11 has a predetermined length selected in accordance with the length of the earth roll R1, and the longitudinal direction is arranged along the longitudinal direction of the earth roll R1. The case 11 of the present embodiment is formed so that its length is shorter than the length of the earth roll R <b> 1 and slightly longer than the length of the corona electrode 2. The case 11 is formed in a rectangular parallelepiped shape whose width is slightly larger than the width of the earth roll R1 and whose pair of side surfaces 11a is longer than the other pair of side surfaces 11b. Further, the case 11 is provided with a duct mounting portion 16 for connecting to one end of the duct 21 on one side surface 11b.

  The case 11 is provided with a slide body 12 on an upper surface thereof, and a pair of upper and lower guide rods 13 and 13 are disposed substantially parallel to the earth roll R1 above the case 11. Insertion holes 13a and 13b are formed in the slide body 12, and guide rods 13 and 13 are inserted through the insertion holes 13a and 13b. Thus, the slide body 12 slides along the plurality of guide rods 13 and 13 so that the discharge part 6 can move in the longitudinal direction of the earth roll R1 while being substantially parallel to the earth roll R1. ing.

  Further, a female screw (not shown) penetrating to the insertion hole 13a is formed on the upper surface of the slide body 12, and a locking screw 14 can be inserted into this female screw.

  The locking screw 14 includes a male screw 14a and a screw driver 14b. When the screw driver 14b is rotated, the male screw 14a is screwed into the female screw, and the tip of the male screw 14a presses the guide rod 13. By doing so, the slide body 12 can be positioned with respect to the guide rod 13.

  Two corona electrodes 2 are provided on the opened lower surface of the case 11, and are arranged in parallel above the earth roll R1 so as to sandwich the central axis of the earth roll R1. Further, these corona electrodes 2 are provided so as to be covered with the upper surface of the case 11 and the side surfaces 11a and 11b, and the case 11 can prevent diffusion of ozone generated during corona discharge.

  Here, when the aluminum vapor deposition film which has an aluminum layer performs a local discharge directly with the electrode body 2a of the corona electrode 2, there exists a possibility that a hole may open in an aluminum layer. Accordingly, the corona electrode 2 is configured such that the outer periphery of the electrode body 2a is covered with an insulator 2b, and this insulator 2b functions as a dielectric, thereby suppressing local discharge from the electrode body 2a. . This prevents the aluminum layer from being damaged when the surface treatment of the aluminum vapor deposition film is performed.

  Moreover, the electrode body 2a is formed in a columnar shape, and discharge is radiated radially from the peripheral surface thereof, so that local discharge can be suppressed. The corona electrode 2 of the present embodiment uses a cylindrical electrode body 2a in which the length of the axial center of the electrode body 2a is 125 mm and the diameter is 16 mm.

  Further, one end of the duct 21 is attached to the case 11 by being attached to the duct attaching portion 16, and the conductor 3 can be arranged in the duct 21 so as to be separated from the inner wall by the insulating attaching members 27 a, 27 b, 27 c. It is configured as follows. The conductor 3 is connected to the corona electrode 2 in the discharge part 6, and a high voltage can be applied to the corona electrode 2. Thus, the corona electrode 2 can generate corona discharge when a high voltage is applied from the conductor 3.

Here, the duct 21 will be described in detail below with reference to FIG. The duct 21 is formed of, for example, a hard material having insulation properties such as transparent polycarbonate, and as shown in FIG. 3, the one side tube 22 and the other side tube 23 formed in a cylindrical shape having the same length. Ri Do from a have configurations divided in the direction in which the longitudinal or conductor 3 extends.

  Further, the duct 21 is formed such that the inner diameter of the other side tube 23 is slightly larger than the outer diameter of the one side tube 22, and the one side tube 22 is partially formed in the cylindrical hollow portion of the other side tube 23. It is comprised so that it can be loosely inserted. That is, the duct 21 has a double tube structure having an overlap margin composed of the one side tube 22 and the other side tube 23.

  The frame 29 as a base is provided with a duct fixing seat 30 so that one end of the other side tube 23 can be fitted into the insertion hole 30 a of the duct fixing seat 30. Further, the other end of the other side tube 23 is fitted into an insertion hole (not shown) provided in an ozone treatment device 31 (described later) provided with the power supply device 4, so that the frame 29 and the ozone treatment device 31 are connected to each other. It is comprised so that it can fix between.

  Actually, as shown in FIG. 3 and FIG. 4 (D) which shows a cross section at the position A′-A in FIG. 3, the other side pipe 23 has four screw holes on the peripheral side portion on one end side. It is formed at equal intervals in the circumferential direction, and is positioned so as to coincide with the four screw holes formed in the circumferential side portion and the four screw holes formed in the duct fixing seat 30, and these screw holes are screwed with screws S2. It is designed to be fastened.

  The one side tube 22 has eight screw holes formed at equal intervals in the circumferential direction on the circumferential side portion on one end side, two in parallel in the longitudinal direction. The one-side tube 22 is positioned so that one end is fitted to the duct attachment portion 16 and the eight screw holes on the peripheral side portion coincide with the eight screw holes formed in the duct attachment portion 16. Those screw holes can be screwed and fixed to one side surface 11 b of the case 11.

  The duct 21 is arranged so that the one-side tube 22 can move along the longitudinal direction of the other-side tube 23 with respect to the fixed other-side tube 23, and the one-side tube 22 moves to expand and contract. Can do.

  4A shows a cross-sectional view of the other side tube 23 at the position B′-B in FIG. 3, and FIG. 4C shows the state of the one side tube 22 at the position A′-A in FIG. 3. A cross-sectional view is shown. As shown in FIGS. 4A and 4C, the duct 21 is configured so that the one-side tube 22 and the other-side tube 23 can be divided into two vertically at the diameter position along the longitudinal direction. Yes.

  As shown in FIG. 4A, the first other-side half tube 23a has a semi-cylindrical shape, and flat contact surfaces 23c and 23d are formed on both sides along the longitudinal direction. Similarly to the first other half tube 23a, the second other half tube 23b has a semi-cylindrical shape, and flat contact surfaces 23e and 23f are formed on both sides along the longitudinal direction.

  The second other half pipe 23b is provided with an insulating mounting member 27c screwed to the inner surface on the other end side with a screw. A hole into which the other conductor 26 (described later) of the conductor 3 is inserted is formed in the insulating mounting member 27 c, and the other conductor 26 of the conductor 3 can be disposed at a position that is substantially at the center inside the duct 21. It is made like that.

  Here, FIG. 4B shows a cross-sectional view of the duct 21 at the position D′-D in FIG. 3. The other side tube 23 is in a state where the contact surfaces 23c and 23d of the first other side half tube 23a and the contact surfaces 23e and 23f of the second other side half tube 23b are in contact with each other, as shown in FIG. As shown in FIG. 2, the first other half tube 23a and the second other half tube 23b are fixed on the other side by the band Q including the insulating band body pieces Q1 and Q2 so as not to be displaced from each other. In practice, the band Q is disposed so as to sandwich the joint between the first other-side half tube 23a and the second other-side half tube 23b at the semicircular side surfaces of the band body pieces Q1, Q2. In this state, the band body pieces Q1 and Q2 are configured such that the female screws projecting at both ends are aligned with each other and the female screws can be screwed together with the screws S1 and S1.

  As shown in FIG. 4C, the first one-side half tube 22a has a semi-cylindrical shape, and flat contact surfaces 22c, 22d are formed on both sides along the longitudinal direction. Similarly to the first one-side half tube 22a, the second one-side half tube 22b has a semi-cylindrical shape, and flat contact surfaces 22e and 22f are formed on both sides along the longitudinal direction.

  The second one-side half tube 22b is provided with an insulating mounting member 27a screwed to the inner surface of the substantially central portion with a screw. A hole into which the conductor 3 is inserted is formed in the insulating mounting member 27a, and the conductor 3 can be disposed at a position that is substantially at the center inside the duct 21.

  The first one-side half tube 22 a and the second one-side half tube 22 b can be fixed by the annular ring 17. The circular ring 17 has an outer diameter that is substantially the same as the inner diameter of the one-side tube 22, screw holes are formed at equal intervals in the circumferential direction, and the contact surface 22 c of the first one-side half tube 22 a, Inserted into the inner surfaces of the other ends of the first one-side half tube 22a and the second one-side half tube 22b in a state where the contact surfaces 22e and 22f of the second one-side half tube 22b are in contact with each other. Then, the screw holes are matched, and the first one-side half tube 22a and the second one-side half tube 22b and the ring 17 are screwed together with screws.

  As a result, the first one-side half tube 22a and the second one-side half tube 22b are fixed by the annular ring 17, and the other end of the one-side tube 22 is loosely inserted into one end of the other-side tube 23. As shown in FIG. 4 (D), a double pipe structure of the duct 21 is formed.

  The one side tube 22 is provided with an insulating attachment member 27b on the inner surface on the other end side. Here, FIGS. 5A and 5B are cross-sectional views of the one-side tube 22 at the position C′-C in FIG. 3, and FIG. 5A is a state when the one-side tube 22 is divided. FIG. 5B shows a state when the first one-side half tube 22a and the second one-side half tube 22b are combined.

  As shown in FIG. 5A, the insulating attachment member 27b is screwed to the first one-side half tube 22a with screws and the second one-side half tube 22b to be screwed. The insulating mounting member piece 28b is configured to be divided into upper and lower parts.

  The insulating attachment member piece 28a is provided on the peripheral side surface of the first one-side half tube 22a, and its tip is formed in a convex shape and slightly protrudes. The insulating mounting member piece 28b is provided on the peripheral side surface of the second one-side half tube 22b so as to face the insulating mounting member piece 28a, and has a shape in which the tip is notched in a U-shape. It is formed so that the conductor 3 can be inserted into the notched portion.

  Thus, when the first one-side half tube 22a and the second one-side half tube 22b are combined, the insulating attachment member 27b is insulated from the notch portion of the insulation attachment member piece 28b as shown in FIG. The front end of the mounting member piece 28 a is fitted with the conductor 3 sandwiched therebetween, and the conductor 3 is arranged substantially at the center of the one-side tube 22.

  Here, the conductor 3 includes a one-side conductor 25 and another-side conductor 26 made of a conductive material. The one-side conductor 25 is formed in a circular tube shape, and has a configuration in which the other-side conductor 26 formed in a circular tube shape or a rod shape is slidably inserted into the hollow portion from the other end.

  The one-side conductor 25 is supported substantially at the center inside the one-side tube 22 by the insulating mounting member 27a and the insulating mounting member 27b. The other side conductor 26 is supported at substantially the center inside the other side tube 23 by inserting one end of the other side conductor 26 into the other end of the one side conductor 25 and being supported by the insulating mounting member 27c.

  The one-side conductor 25 is configured to move along the other-side conductor 26 in conjunction with the one-side tube 22 when the duct 21 expands and contracts. The lengths of the one-side conductor 25 and the other-side conductor 26 are selected so that the other-side conductor 26 does not come off from the one-side conductor 25 even when the duct 21 extends to the maximum.

  As shown in FIG. 6, an ozone treatment device 31 is connected to the discharge unit 6 on the downstream side of the exhaust unit 24 provided in the duct 21. The ozone treatment device 31 includes a power supply device 4 including an output unit 7 and a control unit 8 that controls the output unit 7, and the conductor 3 is connected to the output unit 7 of the power supply device 4.

  Further, the ozone treatment device 31 includes an exhaust path 32, and the exhaust part 24 of the duct 21 is connected to the exhaust path 32. In addition, the ozone treatment device 31 includes a flow rate detection means 33, a filter 34, an ozone catalyst 35 as an ozone treatment means, an exhaust fan 36 as a delivery means, and an ozone concentration detector 37 arranged in this order from the exhaust part 24 side. The exhaust fan 36 is driven and the air in the discharge part 6 is sucked into the duct 21, and this air can be exhausted outside the ozone treatment device 31 through the exhaust path 32.

  At this time, in the ozone treatment device 31, the flow rate detection means 33 detects the flow of air and confirms the operation of the exhaust fan 36. If the exhaust amount of air becomes smaller than a preset value, the corona discharge surface It is comprised so that the processing apparatus 1 can be stopped.

  In addition, the ozone treatment device 31 captures contaminants such as dust mixed in the exhaust gas by the filter 34 and sends the exhaust gas from which the contaminants have been removed to the ozone catalyst 35. The ozone catalyst 35 is clogged with the contaminants. Without being done, ozone contained in the exhaust gas can be decomposed. Note that the ozone catalyst 35 of the present embodiment uses manganese dioxide.

  The ozone treatment device 31 is configured to allow the ozone catalyst 35 to pass through, decompose ozone, and send the exhaust gas to an ozone concentration detector 37, which can measure the amount of ozone in the exhaust gas. . At this time, the ozone treatment device 31 releases the exhaust to the outside when the measured ozone amount is equal to or less than the reference value.

  The ozone concentration detector 37 monitors the amount of ozone in the air passing through the exhaust passage 32. When the amount of ozone exceeds a preset management concentration, a signal transmission means (not shown) is used. A detection signal is generated, and the detection signal is transmitted to the control unit 8.

  Further, when receiving the detection signal, the control unit 8 can cause the output unit 7 to stop power transmission to the conductor 3 and automatically stop the discharge from the corona electrode 2 according to the program.

Incidentally, the discharge unit 6 may be provided with a movement drive means 15, and in this case, the movement drive means 15 moves the discharge part 6 along the guide rods 13 and 13 according to the discharge position with respect to the film 5. Can be made.
(1-2) Operation and Effect Next, the operation of the corona discharge surface treatment apparatus 1 will be described below. In the corona discharge surface treatment apparatus 1, a high-voltage current is applied to the corona electrode 2 through the conductor 3 by the power supply device 4, a corona discharge is generated by the corona electrode 2, and the film 5 is irradiated with the corona discharge to modify the film 5. Quality.

  In addition, in this corona discharge surface treatment apparatus 1, the conductor 3 is housed in the duct 21, and the conductor 3 is isolated from the outside by the duct 21, so that insulation is ensured without coating the conductor 3. can do. Thus, in the corona discharge surface treatment apparatus 1, it is possible to prevent the occurrence of electric shock due to the operator touching the conductor 3 by mistake.

  Further, in the corona discharge surface treatment apparatus 1, the discharge unit 6 is provided on one end side of the duct 21, and the ozone treatment apparatus 31 provided on the other end side of the duct 21 is provided, and ozone generated by corona discharge or plasma discharge is converted into ozone. Ozone can be processed by the ozone catalyst 35 of the processing device 31, and the amount of ozone in the exhaust can be reduced.

  Further, in the corona discharge surface treatment apparatus 1, during the corona discharge, the exhaust fan 36 is driven to discharge the air in the discharge unit 6 to the ozone treatment apparatus 31 through the duct 21, and the corona electrode 2 and the conductor 3. The generated heat can be efficiently radiated to the outside.

  In addition to this, in the corona discharge surface treatment apparatus 1, since the conductor 3 is disposed inside the duct 21, the conventional corona discharge surface treatment apparatus in which the conductor 3 and the duct 21 are disposed at different locations, respectively. Can be downsized.

  In the corona discharge surface treatment apparatus 1, the conductor 3 and the duct 21 are configured to be able to expand and contract in conjunction with each other, and are arranged in parallel with an orthogonal direction orthogonal to the moving direction of the film 5 (the rotation direction of the earth roll R1). The discharged discharge part 6 can be moved and can be moved to the desired position of the film 5 by being moved by the discharge part 6.

  By the way, dusting powder is sprinkled on the surface of the film 5 on the surface of the film 5 to which the corona discharge is irradiated in this way in order to prevent charging between the films 5. For this reason, in the corona discharge surface treatment apparatus 1, when the film 5 passes through the earth roll R1, the dusting powder scattered is sucked into the duct 21 when the air of the discharge part 6 is sucked into the duct 21. There is a risk that. In this case, in the corona discharge surface treatment apparatus 1, when the dusting powder is deposited on the inner wall of the duct 21, the deposited dusting powder contains clay in the air and adheres to the duct 21. Since the moisture contained in the dusting powder made of clay becomes a conductor, abnormal discharge occurs from the conductor 3, the inner wall of the duct 21 is carbonized due to the abnormal discharge, and the carbonized inner wall portion is insulative. There is a risk that it will be difficult to ensure insulation.

  Therefore, in the corona discharge surface treatment apparatus 1 of the present invention, the dusting powder is formed in the duct 21 by the configuration in which the one side tube 22 and the other side tube 23 are divided into two vertically along the respective longitudinal directions. When deposited, the inside of the duct 21 can be easily cleaned by dividing the one side pipe 22 and the other side pipe 23 into two parts. Thus, in the corona discharge surface treatment apparatus 1, abnormal discharge from the conductor 3 inside the duct 21 can be prevented in advance, insulation of the conductor 3 can be ensured, and maintenance can be easily performed.

  Incidentally, in this embodiment, as a procedure for dividing the duct 21, first, after removing the band Q from the other side tube 23, the first other side half tube 23a is removed from the second other side half tube 23b. As a result, the inner wall of the second other half pipe 23b and the one side pipe 22 are exposed to the outside. As a result, the operator can easily clean the inner wall of the second other-side half tube 23b and the outer wall of the one-side tube 22. Subsequently, after removing the ring 17 screwed to the inner wall of the one side tube 22, the second one side tube 22a is removed from the second one side tube 22b by removing the first one side tube 22a. The inner wall of the side half tube 22b and the one side conductor 25 are exposed to the outside. Thus, the operator can easily clean the first one-side half tube 22a, the second one-side half tube 22b, the one-side conductor 25, and the like.

  As described above, in the corona discharge surface treatment apparatus 1, only a part of the parts can be removed as needed without removing all the ducts 21 from the frame 29 or the like at once. It can be easily cleaned. In addition, it is possible to remove all the parts constituting the duct 21, and in this case as well, the two-part structure allows easy cleaning of fine portions inside the duct 21 as compared with the integrally structured duct. Can do.

  In the corona discharge surface treatment apparatus 1, since the inside of the duct 21 has a negative pressure, when the air is discharged from the discharge part 6 by the exhaust fan 36, the first one-side half tube 22 a and the second one-side half Even if a gap is generated for some reason at the joint where the pipe 22b is abutted or the joint where the first other half pipe 23a and the second other half pipe 23b are abutted, it occurs in the duct 21. It is possible to prevent contaminants such as ozone from being scattered from the gap.

  At this time, in the corona discharge surface treatment apparatus 1, the external air is taken into the duct 21 through the gap formed at the joint of the duct 21, so that the discharge that passes through the duct 21 by the air taken from the outside. The air from the part 6 can be cooled.

  In addition to this, the corona discharge surface treatment apparatus 1 has a double tube structure in which an overlap margin is provided between the one side tube 22 and the other side tube 23 so that the one side tube 22 can be moved into the other side tube 23. Accordingly, the duct 21 can be expanded and contracted while using a pipe material made of a hard material without using a soft material for the one side pipe 22 and the other side pipe 23.

  Moreover, in the corona discharge surface treatment apparatus 1, by covering the electrode body 2a of the corona electrode 2 with the insulator 2b, local discharge is suppressed, and an aluminum vapor deposition film that is easily damaged by local discharge irradiation is applied. Even surface treatment can be performed.

  Further, in the case of this embodiment, the duct 21 is provided with insulating mounting members 27a, 27b, and 27c that support the conductor 3 with a predetermined interval inside, and the conductor 3 is connected to the inside by the insulating mounting members 27a, 27b, and 27c. By fixing with, the conductor 3 can be easily disassembled and cleaned while preventing the conductor 3 from floating.

(2) Second Embodiment FIG. 8 in which the same reference numerals are assigned to the parts corresponding to those in FIG. 3 shows the second embodiment, which is the second one. Instead of the insulating mounting member 27a provided in the side half tube 22b (FIG. 3), the difference is that an insulating mounting member 60 for supporting the conductor 3 at both ends of the one end 61a and the other end 61b is provided. . The insulating attachment member 60 has one end 61a screwed to the inner lower surface of the duct attachment portion 16 outside the duct 21 with a screw 62, and extends from the duct attachment portion 16 toward the distal end side of the one-side half-pipe 22z. The other end 61b is cantilevered so as to float from the inner wall of the one-side half tube 22z.

  As shown in FIG. 9, a first support portion 63 a protruding upward is formed at one end 61 a of the insulating mounting member 60, and one side conductor is placed in the through hole 64 drilled in the first support portion 63 a. 25 can be inserted. The other end 61b of the insulating mounting member 60 is formed with a second support part 63b that protrudes upward so as to face the first support part 63a, and the second support part 63b has a through hole. The one-side conductor 25 can be inserted into the hole 65. Thereby, the insulating mounting member 60 can support the one-side conductor 25 in parallel with the central axis at the position of the central axis of the one-side tube 22.

  In the above configuration, in the insulating mounting member 60, the one end 61a side is fixed to the duct mounting portion 16, and the other end 61b is cantilevered on the distal end side of the one-side half tube 22z, and both ends of the one end 61a and the other end 61b are supported. Thus, the one-side conductor 25 is supported. Thereby, in the insulating mounting member 60, the insulating mounting member 27a (FIG. 3) as in the first embodiment is not provided on the inner wall of the one-side half-pipe 22z, but one side is supported by the second support portion 63b at the other end 61b. The conductor 25 can be reliably supported in the one side tube 22.

  Further, in the insulating mounting member 60, the split disassembly of the duct 21 itself is facilitated by the amount that the insulating mounting member 27a (FIG. 3) as in the first embodiment is not provided on the inner wall of the one-side half tube 22z. Can be done. Further, in the insulating mounting member 60, the one-side conductor 25 is disposed so as to float at the other end 61b from the inner wall of the one-side half tube 22z, so that the entire inner wall of the one-side half tube 22z can be easily cleaned.

(3) Other Embodiments The present invention is not limited to the above-described embodiment, and various modifications can be made. The filter 34 is a heat treatment filter that heat-treats ozone, or an adsorption that adsorbs ozone. A filter may be used, and a hollow tube or a solid member may be used as the other conductor 26.

  Further, for example, in the above-described embodiment, the case where a double pipe using two circular pipes of the one side pipe 22 and the other side pipe 23 is described, but the present invention is not limited thereto, and the duct is used. It is only necessary that the structure 21 can be expanded and contracted. For example, a sheath tube using a plurality of other circular tubes such as a triple tube using three circular tubes, a quadruple tube using four circular tubes, and the like. It is good.

  Moreover, in embodiment mentioned above, although the case where the one side pipe | tube 22 and the other side pipe | tube 23 were divided into 2 along a longitudinal direction was described, this invention is not limited to this, For example, the one side pipe | tube 22 and You may divide the other side pipe | tube 23 into other plurality, such as 3 divisions or 4 divisions, along a longitudinal direction.

  In the above-described embodiment, the case where the shape of the duct 21 is a cylindrical shape has been described. However, the present invention is not limited thereto, and for example, the shape of the duct 21 may be a rectangular tube shape.

  In the above-described embodiment, for example, the contact surfaces 23c, 23d of the first other half tube 23a and the contact surfaces 23e, 23f of the second other half tube 23b are directly brought into contact with each other. However, the present invention is not limited to this. For example, as shown in FIG. 7, the contact surfaces 23c and 23d of the first other half tube 23a and the contact surfaces 23e of the second other half tube 23b 23f may be assembled with elastic bodies 41a and 41b interposed therebetween.

  Actually, the elastic bodies 41a and 41b are made of an elastic material having ozone resistance, and the cross section is formed in an H shape, and the first other half pipe 23a is abutted in the recess of the upper portion of the H shape in the elastic body 41a. The contact surface 23c is assembled by fitting the contact surface 23e of the second other-side half tube 23b into the recess of the H-shaped lower part of the elastic body 41a, and similarly, the recess of the upper part of the H-shaped of the elastic body 41b. Further, the contact surface 23d of the first other half tube 23a is assembled by fitting the contact surface 23f of the second other half tube 23b into the recess of the H-shaped lower portion of the elastic body 41b.

  Thereby, the clearance gap between the 1st other side half pipe 23a and the 2nd other side half pipe 23b may be eliminated, and the airtightness of the duct 21 may be improved.

  Further, in the above-described embodiment, the case where the corona electrode 2 configured by the pair of electrode bodies 2a and 2a is applied as the discharge electrode has been described. However, the present invention is not limited thereto, and one electrode body is provided. You may apply the corona electrode 2 comprised from 2a or 3 or more electrode bodies.

  Furthermore, in the above-described embodiment, when the amount of ozone passing through the exhaust passage 32 exceeds the control concentration, the signal generating unit generates a detection signal, and based on this detection signal, the control unit 8 outputs the output unit. 7, the power transmission to the conductor 3 is stopped and the discharge from the corona electrode 2 is automatically stopped. However, the present invention is not limited to this, and the amount of ozone passing through the exhaust path 32 exceeds the control concentration. In such a case, it is possible to notify the operator of the abnormality and notify the operator of the abnormality by emitting sound or light to the worker and stop the discharge from the corona electrode 2 by himself / herself. Further, the control unit 8 may perform both the stop of the discharge from the corona electrode 2 and the notification by the notification means when the amount of ozone passing through the exhaust passage 32 exceeds the management concentration.

  Furthermore, in the above-described embodiment, the case where the exhaust fan 36 serving as the sending means is provided on the ozone treatment device 31 side has been described. However, the present invention is not limited to this, and the point is that the ozone treatment device is basically from the discharge unit 6 side. As long as the air can be sent to the 31 side, various other sending means such as a blowing means may be provided on the discharge unit 6 side. In this case, the blowing means leads from the discharge unit 6 side to the exhaust unit 24 and the exhaust path 32. Air can be delivered.

1 Corona discharge surface treatment equipment (surface treatment equipment)
2 Corona electrode (discharge electrode)
2a Electrode body 2b Insulator 3 Conductor 4 Power supply (Power supply)
5 Film (object to be processed)
11 Case 21 Duct 24 Exhaust section 35 Ozone catalyst (ozone treatment means)
36 Exhaust fan (delivery means)

Claims (10)

In a surface treatment apparatus comprising a discharge electrode and a conductor connecting the discharge electrode and a power source, irradiating the surface of the object to be treated with a discharge by the discharge electrode, and modifying the surface of the object to be treated,
A case provided with the discharge electrode is connected to one end, and an exhaust part is provided with a duct provided at the other end.
The case is movably provided,
The duct surface spaced from the inner wall within the duct placing the conductors, have a dividable structure in the direction in which the conductor extends, characterized in <br/> that it is telescopically formed Processing equipment.   The surface treatment apparatus according to claim 1, wherein the duct has a cylindrical shape.   The surface treatment apparatus according to claim 1, further comprising a sending unit that sends the air in the case to the exhaust unit. Surface treatment apparatus according to claim 1 to 3, wherein the duct is a double pipe flexible here. Surface treatment apparatus of claim 1, wherein said conductor is retractable. Surface treatment apparatus according to any one of claims 1 to 5, characterized in that it comprises ozone processing means for processing the ozone generated by the discharge. The surface treatment apparatus according to claim 6, wherein the ozone treatment means is provided on the downstream side of the exhaust portion of the duct. The discharge electrode generates corona discharge, the discharge electrode surface treatment apparatus according to any one of claims 1 to 7, characterized in that it is covered by an insulator. It said duct is provided inside at least one insulating mounting member, a surface treatment apparatus according to any one of claims 1-8, characterized in that securing the conductor by the insulating mounting member . The insulating mounting member has a configuration in which one end is fixed to the outside of the duct and the other end is disposed inside the duct, and the other end is cantilevered so as to float from the inner wall of the duct. The surface treatment apparatus according to claim 9 .

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