JP5595838B2 - Male screw management jig - Google Patents

Description

  The present invention relates to a male screw management jig for managing a removed male screw when performing operations such as maintenance, repair, and part replacement of a processing device such as a cutting device or a grinding device.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor devices. The wafer divided in this way is ground to a predetermined thickness by a grinding device before being cut along the street.

  A processing apparatus such as the above-described cutting apparatus or grinding apparatus is preferably configured so that the assembly accuracy can be easily adjusted. In view of such a requirement, a table unit that holds a workpiece, and a workpiece that is held by the table unit. A cutting apparatus configured to dispose a spindle unit and an alignment unit as cutting means for cutting on a substrate and dispose other accessory components on a pedestal to which the substrate is attached is disclosed in Patent Document 1 below.

  Processing devices such as a cutting device and a grinding device need to be regularly maintained, and to perform operations such as repair and replacement of parts. When carrying out these operations, it is necessary to remove the male screws such as fastening bolts to which each part is attached. After the removed male screw is accommodated in the accessory box, inspection adjustment work and parts replacement are performed, Assemble the parts using the male screw housed in the case.

JP-A-6-155288

  Thus, there are many types of male screws such as fastening bolts to which the respective parts are attached, and there is a problem that different male screws are used by mistake when reassembling the parts. In addition, there is a problem that the accessory box containing the male screw removed during the work falls and the male screw is scattered and lost.

  The present invention has been made in view of the above-mentioned facts, and its main technical problem is that the fastening bolts and the like removed when carrying out operations such as maintenance, repair, and parts replacement of processing devices such as cutting devices and grinding devices. An object of the present invention is to provide a male screw management jig capable of arranging and accommodating male screws.

In order to solve the main technical problem, according to the present invention, a male screw management jig for managing a male screw composed of a screwed portion and a head,
A radial slit for inserting a male screw threaded portion into the resin panel is formed, and a plurality of gripping means provided with locking claws are provided between the slits. The resin panel is gripped by the plurality of gripping means. There is a display margin that displays the mounting location of the male screw .
On the back side of the resin panel, an elastic member is provided for elastically holding the screwed portion of the male screw inserted into the gripping means.
A male screw management jig is provided.

The back surface of the resin panel box-like elastic member accommodating case having an opening is mounted so as to face the opening on the back surface of the resin panel, the elastic member is accommodated in the elastic member accommodating case. A magnet sheet is mounted on the outer surface of the bottom wall of the elastic member storage box.
The elastic member is attached to the back surface of the resin panel, and a magnet sheet is attached to the back surface of the elastic member.

The male screw management jig according to the present invention includes a plurality of gripping portions in which radial slits for inserting the screwed portions of the male screws are formed in the resin panel and locking claws are provided between the slits. The male screw removed from the device can be securely stored by inserting it into the gripping part. In addition, the resin panel is provided with a display margin portion for displaying the mounting location of the male screw gripped by the plurality of gripping portions, so that the location where the male screw is attached to the display margin portion is described. By displaying this, it is possible to prevent the wrong male screw from being used by mistake when reassembling the parts. Further, since an elastic member for elastically holding the screwed portion of the male screw inserted into the gripping means is disposed on the back side of the resin panel, it is inserted into the radial slit formed in the resin panel. Since the male screw engaged with the locking claw formed between the slits is elastically held by the elastically deformed elastic member, it does not wobble.

The perspective view of the external screw management jig comprised according to this invention. FIG. 2 is a perspective view of a cutting apparatus that performs operations such as maintenance, repair, and component replacement using the male screw management jig shown in FIG. 1. Sectional drawing which shows the state which inserted the male screw in the holding part of the resin panel which comprises the male screw management jig | tool shown in FIG. The front view which shows the state which inserted the several male screw in the several holding part of the resin panel which comprises the male screw management jig | tool shown in FIG. The perspective view which shows other embodiment of the external screw management jig comprised according to this invention.

  Hereinafter, a preferred embodiment of a male screw management jig according to the present invention will be described in more detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a male screw management jig constructed according to the present invention.
A male screw management jig 2 shown in FIG. 1 includes a resin panel 3, an elastic member housing case 4 attached to the back surface of the resin panel 3, an elastic member 5 housed in the elastic member housing case 4, It consists of a magnet sheet 6 attached to the elastic member housing case 4. The resin panel 3 is formed in a rectangular shape by a resin sheet having elasticity, such as a polyethylene terephthalate sheet, and is formed so as to penetrate from the front surface 3a to the back surface 3b to insert a threaded portion of a male screw such as a fastening bolt. A plurality of gripping means 31 in which slits 311 are formed are provided. The gripping means 31 in the illustrated embodiment includes three slits 311 that intersect each other, and a locking claw 312 is formed between the slits. In addition, a display margin 32 is provided on the surface 3a of the resin panel 3 to display the mounting location and type of male screws held by the plurality of holding means 31. The elastic member housing case 4 is formed in a box shape having a rectangular opening 41 with an appropriate resin, and a joining flange 42 is formed around the opening 41. The elastic member housing case 4 thus formed is provided with the opening 41 facing the back surface 3b of the resin panel 3, and the joining flange 42 is joined to the back surface 3b of the resin panel 3 with an appropriate adhesive. Yes. In addition, as a joining method of the elastic member accommodation case 4 and the resin panel 3, the resin fastener which mutually engages in each junction part may be provided, and you may join by a resin fastener. The elastic member 5 housed in the elastic member housing case 4 joined to the back surface 3b of the resin panel 3 in this way is made of an elastic body such as sponge, and is a male screw inserted into the gripping means 31 of the resin panel 3. The threaded portion is elastically held. The magnet sheet 6 is attached to the outer surface 43 of the bottom wall of the elastic member housing case 4 with an appropriate adhesive.

The male screw management jig 2 in the embodiment shown in FIG. 1 is configured as described above, and the operation thereof will be described below.
FIG. 2 shows a cutting apparatus that performs operations such as maintenance, repair, and part replacement using the male screw management jig 2 described above. A cutting device 10 shown in FIG. 2 includes a device housing 101 having a substantially rectangular parallelepiped shape. The apparatus housing 101 includes a chuck table 102 for holding a workpiece, a spindle unit 104 as a cutting means provided with a cutting blade 103 for cutting the workpiece held on the chuck table 102, An alignment unit 105 for imaging the surface of the workpiece held on the chuck table 102 and detecting a region to be cut by the cutting blade 103, and a display unit 106 for displaying an image captured by the alignment unit 105 Is arranged. The apparatus housing 101 has a cassette mounting table 107 for mounting a cassette for storing a workpiece, a cassette 108 mounted on the cassette mounting table 107 for storing a workpiece, and the cassette 108. The workpiece to be stored in the temporary placement table 109 is carried out, and the processed workpiece returned to the temporary placement table 109 is carried into the cassette 108 and the temporary placement table 109. The first conveying means 111 for conveying the workpiece to the chuck table 102, the cleaning means 112 for cleaning the workpiece cut on the chuck table 102, and the chuck table 102 being cut. A second transport unit 113 for transporting the workpiece to the cleaning unit 112 is provided.

  When carrying out maintenance, repair, replacement of parts, etc. of the cutting device 10 described above, the bottom wall of the elastic member housing case 4 of the male screw management jig 2 is placed on the front panel 101a of the device housing 101 as shown in FIG. The magnet sheet 6 mounted on the outer surface 42 is magnetically attracted. If the male screw management jig 2 is magnetically attracted to the front panel 101a of the apparatus housing 101 by the magnet sheet 6 as described above, operations such as maintenance, repair, and part replacement are performed. In these operations, male screws such as fastening bolts are removed in order to disassemble the constituent members constituting each unit constituting the cutting device 10. The removed male screw is temporarily stored in the male screw management jig 2 that is magnetically attracted to the front panel 101a of the apparatus housing 101. Hereinafter, an operation of accommodating the removed male screw in the male screw management jig 2 will be described with reference to FIG.

  As shown in FIG. 2, the removed male screw 11 includes a screwing portion 111 and a head portion 112. The threaded portion 111 of the male screw 11 is inserted from the surface 3a side (right side in FIG. 3) of the resin panel 3 into the gripping means 31 in which the radial slits 311 are formed. As a result, the locking claws 312 formed between the slits 311 constituting the gripping means 31 are elastically deformed to the downstream side in the insertion direction of the male screw 11 (left side in FIG. 3) and engage with the screwed portion 111. When the threaded portion 111 of the male screw 11 is thus inserted from the front surface 3a side (right side in FIG. 3) of the resin panel 3 into the gripping means 31 in which the radial slits 311 are formed, the back surface 3b side (see FIG. 3, the elastic member 5 made of an elastic body such as a sponge disposed on the left side is locally pressed and elastically deformed. As a result, the male screw 11 inserted into the radial slit 311 formed in the resin panel 3 and engaged with the locking claw 312 formed between the slits 311 is elastically held by the elastic member 5 that is elastically deformed. Therefore, it does not wobble.

  In this manner, the male screw 11 attached to each unit of the cutting apparatus 10 is removed, and the unit is attached to the resin panel 3 as shown in FIG. Then, a unit name or the like indicating the place where the male screw is mounted is entered in the display margin 32 provided on the surface of the resin panel 3 so as to be enclosed in units. Note that it is desirable that the writing tool for entering the unit name or the like in which the male screw is attached to the display margin 32 can be easily erased with alcohol or the like.

  Thus, by removing the male screw 11 attached to each unit of the cutting apparatus 10 and attaching it to the resin panel 3 in units, it is possible to use a different male screw by mistake when reassembling each component. Can be prevented.

Next, another embodiment of the male screw management jig constructed according to the present invention will be described with reference to FIG. In FIG. 5, the same members as those constituting the male screw management jig 2 shown in FIG.
The male screw management jig 20 in the embodiment shown in FIG. 5 includes a resin panel 3, an elastic member 5 attached to the back surface 3b of the resin panel 3, and a magnet sheet 6 attached to the back surface 5b of the elastic member 5. It is made up of. The resin panel 3 is formed in a rectangular shape by a resin sheet having elasticity, such as a polyethylene terephthalate sheet, similarly to the resin panel 3 in the male screw management jig 2 shown in FIG. 1, and is formed to penetrate from the front surface 3a to the back surface 3b. In addition, a plurality of gripping means 31 are provided in which radial slits 311 for inserting male threaded portions such as fastening bolts are formed. The display panel 32 is provided on the surface of the resin panel 3 to display the mounting location and type of male screws held by the plurality of holding means 31. The elastic member 5 is formed in a size corresponding to the resin panel 3 by an elastic body such as sponge, and the outer peripheral portion on the front surface 5a side is attached to the back surface 3b of the resin panel 3 with an appropriate adhesive. In this manner, the magnet sheet 6 is attached to the back surface 5b of the elastic member 5 attached to the back surface 3b of the resin panel 3 with an appropriate adhesive. The male screw management jig 20 configured as described above can accommodate male screws in the same manner as the male screw management jig 2 shown in FIG.

2: Male screw management jig 3: Resin panel 31: Gripping part 311: Slit 312: Locking claw 32: Display blank part 4: Elastic member housing case 5: Elastic member 6: Magnet sheet 10: Cutting device 101: Device housing 102: Chuck table 103: Cutting blade 104: Spindle unit 105: Alignment means

Claims (4)

A male screw management jig for managing a male screw composed of a screwed portion and a head,
A radial slit for inserting a male screw threaded portion into the resin panel is formed, and a plurality of gripping means provided with locking claws are provided between the slits. The resin panel is gripped by the plurality of gripping means. There is a display margin that displays the mounting location of the male screw .
On the back side of the resin panel, an elastic member is provided for elastically holding the screwed portion of the male screw inserted into the gripping means.
A male screw management jig characterized by that. A box-shaped elastic member housing case having an opening is mounted on the back surface of the resin panel so that the opening faces the back surface of the resin panel, and the elastic member is housed in the elastic member housing case. The male screw management jig according to claim 1 . The male screw management jig according to claim 2 , wherein a magnet sheet is attached to an outer surface of the bottom wall of the elastic member housing case. Elastic member is mounted on the back surface of the resin panel, magnet sheet to the back surface of the elastic member is attached, the male thread management tool according to claim 1.

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