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JP5605566B2 - Method for producing porous polyimide membrane - Google Patents
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JP5605566B2 - Method for producing porous polyimide membrane - Google Patents

Method for producing porous polyimide membrane Download PDF

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JP5605566B2
JP5605566B2 JP2010258211A JP2010258211A JP5605566B2 JP 5605566 B2 JP5605566 B2 JP 5605566B2 JP 2010258211 A JP2010258211 A JP 2010258211A JP 2010258211 A JP2010258211 A JP 2010258211A JP 5605566 B2 JP5605566 B2 JP 5605566B2
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聖志 金村
裕一 棟方
浩章 中尾
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Tokyo Metropolitan Public University Corp
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Description

本発明は、多孔質ポリイミド、特に三次元規則配列された連続微細孔を有する(three-dimensionally ordered macroporous,以下3DOM)ポリイミド膜に関する。これらの多孔質膜は、セパレーターやイオン交換膜などの電池隔膜材料、ディスプレイや光導波路などの光学材料、触媒の支持体に好適に利用することができる。   The present invention relates to a porous polyimide, particularly a polyimide film having three-dimensionally ordered macroporous (hereinafter 3DOM). These porous membranes can be suitably used for battery membrane materials such as separators and ion exchange membranes, optical materials such as displays and optical waveguides, and catalyst supports.

近年、リチウムイオン電池セパレーターや燃料電池電解質膜、低誘電率材料として多孔質ポリイミドの研究がなされている。例えば、ポリイミドと易分解性成分のブロック共重合体若しくはグラフト共重合体を加熱イミド化して多孔質化する方法やポリイミド膜を光学処理して連通孔膜とする技術が公知である。(特許文献1〜4参照)   In recent years, porous polyimide has been studied as a lithium ion battery separator, a fuel cell electrolyte membrane, and a low dielectric constant material. For example, a method in which a block copolymer or a graft copolymer of polyimide and an easily decomposable component is heated to imidize to make it porous, and a technique in which a polyimide film is optically processed to form a continuous pore film are known. (See Patent Documents 1 to 4)

特開2004-2865号公報Japanese Patent Laid-Open No. 2004-2865 特開2007-92078号公報JP 2007-92078 特開2004-171994号公報JP 2004-171994 特開2002-335949号公報JP 2002-335949 A

特許文献1〜3の膜は、必ずしも連通孔でない部分を生じたり、空孔率、孔径が変化したりして、応用分野や適用分野において物性値がバラツクなど、再現性等が問題である。また、特許文献4の膜は、膜厚や孔径が限定的で、且つ大面積の膜を作るのに特殊な装置を必要とし、高コストとなる。   The films of Patent Documents 1 to 3 have a problem of reproducibility, such as a part that is not necessarily a communicating hole, or a change in porosity and hole diameter, resulting in variations in physical property values in application fields and application fields. In addition, the film of Patent Document 4 has a limited film thickness and hole diameter, and requires a special device to produce a large-area film, resulting in high costs.

したがって、本発明の目的は、三次元規則配列された連続微細孔を有する3DOMポリイミド膜を、再現性良く、大面積で、且つ現行のポリイミドフィルム製造設備等を用いて安価に製造できる方法を提供することにある。   Therefore, an object of the present invention is to provide a method capable of producing a 3DOM polyimide film having continuous micropores arranged in a three-dimensional regular array with good reproducibility, a large area, and at low cost using the existing polyimide film production equipment. There is to do.

本発明は、ポリアミド酸若しくはポリイミド、シリカ粒子及び溶媒を混合してワニスを製造する、又はシリカ粒子が分散した溶媒中でポリアミド酸若しくはポリイミドを重合してワニスを製造するワニス製造工程と、
前記ワニス製造工程で製造されたワニスを基板に製膜後、イミド化を完結させて、ポリイミド−シリカ複合膜を製造する複合膜製造工程と、
前記複合膜製造工程で製造されたポリイミド−シリカ複合膜のシリカを除去するシリカ除去工程を有する多孔質ポリイミド膜の製造方法において、
前記シリカ粒子として真球率が1.0〜1.1、粒径分布指数(d25/d75)が1.5以下、平均直径が100〜2000nmのシリカ粒子を用い、かつ
前記ポリイミド−シリカ複合膜中におけるシリカ/ポリイミドの質量比を2〜6としたことを特徴とする多孔質ポリイミド膜の製造方法に係るものである。
好ましくは、前記多孔質ポリイミド膜は、空隙率が50%以上であり、平均直径が100〜2000nmである微細孔同士が接して、連通孔を形成し、該連通孔の直径が1000nm以下である。
The present invention is a varnish production process for producing a varnish by mixing polyamide acid or polyimide, silica particles and a solvent, or polymerizing polyamide acid or polyimide in a solvent in which silica particles are dispersed, and
A composite film production process for producing a polyimide-silica composite film by completing imidization after film formation of the varnish produced in the varnish production process on a substrate;
In the method for producing a porous polyimide film having a silica removal step of removing silica of the polyimide-silica composite membrane produced in the composite membrane production step,
As the silica particles, silica particles having a sphericity ratio of 1.0 to 1.1, a particle size distribution index (d 25 / d 75 ) of 1.5 or less, and an average diameter of 100 to 2000 nm are used, and the silica / silica in the polyimide-silica composite film The present invention relates to a method for producing a porous polyimide film, wherein the mass ratio of polyimide is 2 to 6.
Preferably, the porous polyimide film has a porosity of 50% or more, and micropores having an average diameter of 100 to 2000 nm are in contact with each other to form a communication hole, and the diameter of the communication hole is 1000 nm or less. .

本発明はまた、ポリアミド酸若しくはポリイミド、シリカ粒子及び溶媒を混合してワニスを製造する、又はシリカ粒子が分散した溶媒中でポリアミド酸若しくはポリイミドを重合してワニスを製造するワニス製造工程と、
前記ワニス製造工程で製造されたワニスを基板に製膜後、イミド化を完結させて、ポリイミド−シリカ複合膜を製造する複合膜製造工程と、
前記複合膜製造工程で製造されたポリイミド−シリカ複合膜のシリカを除去するシリカ除去工程を組み合わせ
前記シリカ粒子として真球率が1.0〜1.1、粒径分布指数(d 25 /d 75 )が1.5以下のシリカ粒子を用いることにより、
空隙率が50%以上であり、平均直径が100〜2000nmである微細孔同士が接して、連通孔を形成し、該連通孔の直径が1000nm以下である多孔質ポリイミド膜を得ることを特徴とする多孔質ポリイミド膜の製造方法に係るものである。
The present invention also provides a varnish production process for producing a varnish by mixing polyamic acid or polyimide, silica particles and a solvent, or polymerizing polyamic acid or polyimide in a solvent in which silica particles are dispersed, and
A composite film production process for producing a polyimide-silica composite film by completing imidization after film formation of the varnish produced in the varnish production process on a substrate;
Combined with the silica removal step of removing the silica of the polyimide-silica composite membrane produced in the composite membrane production step ,
The sphericity index as silica particles 1.0 to 1.1, particle size distribution index (d 25 / d 75) is the Rukoto with 1.5 following silica particles,
Micropores having a porosity of 50% or more and an average diameter of 100 to 2000 nm are in contact with each other to form a communication hole, and a porous polyimide film having a diameter of the communication hole of 1000 nm or less is obtained. The present invention relates to a method for producing a porous polyimide film.

本発明は、所定のシリカ粒子が均一に分散されたポリアミド酸若しくはポリイミドワニスを製膜し、シリカ-ポリイミド複合膜を取得した後、シリカ除去することで三次元規則配列された連続微細孔を有する3DOMポリイミド膜を再現性よく、大面積化で且つ、現行のポリイミドフィルム製造装置を用いて、安価に製造できるという利点がある。   The present invention has a continuous fine pores that are three-dimensionally arranged by removing silica after forming a polyamic acid or polyimide varnish in which predetermined silica particles are uniformly dispersed to obtain a silica-polyimide composite film. There are advantages that a 3DOM polyimide film can be manufactured with good reproducibility, a large area, and can be manufactured at low cost by using an existing polyimide film manufacturing apparatus.

微細孔および連通孔の直径を示す図である。It is a figure which shows the diameter of a micropore and a communicating hole. 実施例1で取得した3DOMポリイミド多孔質膜の図面代用写真である。2 is a drawing-substituting photograph of the 3DOM polyimide porous film obtained in Example 1. FIG. 比較例1で取得したポリイミド膜の図面代用写真である。6 is a drawing-substituting photograph of a polyimide film obtained in Comparative Example 1. FIG. 比較例2で取得したポリイミド膜の図面代用写真である。6 is a drawing-substituting photograph of a polyimide film obtained in Comparative Example 2. FIG.

本発明では、ワニス製造工程は、所定のシリカ粒子を予め分散した溶媒と前記溶媒に混合可能な溶媒中で重合したポリアミド酸溶液若しくはポリイミド溶液を任意の比率で混合するか、所定のシリカ粒子を予め分散した溶媒中でポリアミド酸若しくはポリイミドを重合することで得られる。シリカ粒子は好ましくはコロイダルシリカ、単分散球状シリカ粒子である。シリカ粒子は100〜2000nmの粒径(平均直径)のものを用いる。   In the present invention, the varnish production process is performed by mixing a solvent in which predetermined silica particles are dispersed in advance and a polyamic acid solution or a polyimide solution polymerized in a solvent that can be mixed with the solvent at an arbitrary ratio, It can be obtained by polymerizing polyamic acid or polyimide in a previously dispersed solvent. The silica particles are preferably colloidal silica or monodispersed spherical silica particles. Silica particles having a particle diameter (average diameter) of 100 to 2000 nm are used.

本発明で用いるシリカ粒子の真球率は1.0〜1.1である。この真球率は、粒子の最長径の平均値/粒子の最短径の平均値で定義する。また、本発明で用いるシリカ粒子の粒径分布指数は1.5以下である。粒径分布指数はd25/d75で定義し、d25、d75は、粒度分布の累積度数がそれぞれ25%、75%の粒子径の値である。これらの条件を備えたシリカ粒子は、ポリアミド酸中での分散性に優れ、製膜後の乾燥工程で細密充填化されることで三次元規則配列孔を有するポリイミド膜の製造を可能とする。以下、真球率と粒径分布指数を満足するシリカ粒子を単分散の球状シリカ粒子とも称す。なお、単分散の球状シリカ粒子は互いに凝集していないものが好ましい。   The sphericity of the silica particles used in the present invention is 1.0 to 1.1. This sphericity is defined as the average value of the longest diameter of particles / the average value of the shortest diameter of particles. Further, the particle size distribution index of the silica particles used in the present invention is 1.5 or less. The particle size distribution index is defined as d25 / d75, and d25 and d75 are values of the particle size when the cumulative frequency of the particle size distribution is 25% and 75%, respectively. Silica particles having these conditions are excellent in dispersibility in polyamic acid, and can be produced into a polyimide film having three-dimensional regular array holes by being closely packed in a drying step after film formation. Hereinafter, silica particles satisfying the true sphere ratio and the particle size distribution index are also referred to as monodispersed spherical silica particles. The monodispersed spherical silica particles are preferably not aggregated with each other.

ワニスは、シリカ/ポリイミドの比率が2〜6(質量比)の割合で混合でき、好ましくは3〜5である。シリカ/ポリイミドの質量比は、2未満の場合、連続孔を得ることが難しくなる傾向があり、6を超える場合、所望の膜の製造が困難になることが多い。   The varnish can be mixed at a ratio of silica / polyimide of 2 to 6 (mass ratio), preferably 3 to 5. When the mass ratio of silica / polyimide is less than 2, it tends to be difficult to obtain continuous pores, and when it exceeds 6, it is often difficult to produce a desired film.

また、ワニス粘度は25℃におけるブルックフィールド型粘度計での粘度が10〜3000ポイズに調整することができ、好ましくは50〜300ポイズである。固形分濃度は5〜50質量%で調整でき、好ましくは20〜40質量%である。固形分濃度の測定方法は、試料5gをアルミカップに秤量後、200℃×2時間の熱処理を加え、恒量後に、{(残渣の質量)/(ワニス質量)}×100で算出する。   The varnish viscosity can be adjusted to 10 to 3000 poises, preferably 50 to 300 poises, using a Brookfield viscometer at 25 ° C. Solid content concentration can be adjusted with 5-50 mass%, Preferably it is 20-40 mass%. The solid content concentration is measured by weighing 5 g of a sample in an aluminum cup, applying a heat treatment at 200 ° C. for 2 hours, and calculating a {(residue mass) / (varnish mass)} × 100 after constant weight.

これらの条件を満たすことで、シリカの充填状態を3次元的に規則正しくすることができる。得られた多孔質膜の孔が3次元的に規則正しくなるので、電解質などを充填しやすくなる。また、単分散の球状を用いることにより、シリカの充填状態が3次元的に規則正しくなる。   By satisfying these conditions, the packing state of silica can be regularly ordered in three dimensions. Since the pores of the obtained porous membrane become regular three-dimensionally, it becomes easy to fill the electrolyte. Further, by using a monodispersed spherical shape, the packing state of silica becomes regular three-dimensionally.

前記のシリカ粒子は、シリカ以外の物質として、アクリル樹脂やポリスチレンの球状微粒子、炭酸カルシウム等の無機塩の球状微粒子、アルギン酸カルシウム等の有機塩の球状微粒子、有機、無機材料をマイクロカプセル化した球状微粒子などを添加しても良い。   The silica particles include, as substances other than silica, spherical particles of acrylic resin and polystyrene, spherical fine particles of inorganic salts such as calcium carbonate, spherical fine particles of organic salts such as calcium alginate, and spherical particles obtained by microencapsulating organic and inorganic materials. Fine particles may be added.

複合膜製造工程は、剥離剤を塗布した基板上へ任意の割合で製膜し、常圧若しくは真空下で0〜50℃、好ましくは常圧10〜30℃で乾燥後、ポリアミド酸膜若しくはポリイミド膜を剥離させ、加熱若しくは化学的に後処理を行ない、イミド化を完結させてシリカ-ポリイミド複合膜を得ることができる。イミド化を完結させるための加熱の条件として、室温〜375℃までを3時間で昇温させた後、375℃で20分間保持させる方法や室温から50℃刻みで段階的に375℃まで昇温(各ステップ20分保持)し、最終的に375℃で20分保持させるなどの熱イミド化法を用いることができる。
また、化学的な後処理としては、製膜した膜を剥がした後にイミド化剤としての無水酢酸及びイソキノリンの混合溶媒に浸し、その後、室温〜375℃までを3時間で昇温させた後、375℃で20分間保持させる化学イミド化法を用いることができる。
The composite film production process forms a film on a substrate coated with a release agent at an arbitrary ratio, and after drying at 0 to 50 ° C., preferably 10 to 30 ° C. under normal pressure or vacuum, then a polyamic acid film or polyimide The film can be peeled off and heated or chemically post-treated to complete imidization to obtain a silica-polyimide composite film. As heating conditions for completing imidization, the temperature is raised from room temperature to 375 ° C in 3 hours, and then kept at 375 ° C for 20 minutes, or gradually raised from room temperature to 375 ° C in increments of 50 ° C. (Each step is held for 20 minutes), and a thermal imidation method such as finally holding at 375 ° C. for 20 minutes can be used.
Further, as a chemical post-treatment, after peeling off the formed film, it is immersed in a mixed solvent of acetic anhydride and isoquinoline as an imidizing agent, and then heated from room temperature to 375 ° C. in 3 hours, A chemical imidization method in which the temperature is maintained at 375 ° C for 20 minutes can be used.

出来あがったシリカ-ポリイミド複合膜の平均膜厚は5〜500μmで、好ましくは10〜100μmである。膜厚は、たとえば、(株)ニコン製のデジマイクロMH-15Mで測定することができる。   The resulting silica-polyimide composite film has an average film thickness of 5 to 500 μm, preferably 10 to 100 μm. The film thickness can be measured with, for example, Digimicro MH-15M manufactured by Nikon Corporation.

シリカ-ポリイミド複合膜を低濃度のフッ化水素水などによりシリカを溶解除去し、三次元規則配列された連続孔を有する3DOMポリイミド膜を再現性よく製造することができる。   The silica-polyimide composite film can be dissolved and removed with low-concentration hydrogen fluoride water or the like to produce a 3DOM polyimide film having continuous pores arranged three-dimensionally with good reproducibility.

単分散の球状シリカ粒子としては、(株)日本触媒製の直径100〜2000nmの粒子が好適である。このような範囲の場合、適用分野などで、例えば、電解質膜において、良好な性能を得られ易い。シリカ粒子の直径に従い、微細孔径、連通孔径が影響を受け、同様の直径に基づく性能の向上が期待できる。   As the monodispersed spherical silica particles, particles having a diameter of 100 to 2000 nm manufactured by Nippon Shokubai Co., Ltd. are suitable. In such a range, it is easy to obtain good performance in an application field, for example, in an electrolyte membrane. According to the diameter of the silica particles, the fine pore diameter and the communication pore diameter are affected, and an improvement in performance based on the same diameter can be expected.

これらの粒子は、ジメチルアセトアミドなど通常ポリイミド重合に使用する溶媒に安定に分散された状態にすることができる。   These particles can be stably dispersed in a solvent usually used for polyimide polymerization such as dimethylacetamide.

ワニス製造工程に使用するポリアミド酸(ポリアミック酸)若しくはポリイミド溶液は任意のテトラカルボン酸二無水物とジアミンから得られるものである。   The polyamic acid (polyamic acid) or polyimide solution used in the varnish production process is obtained from any tetracarboxylic dianhydride and diamine.

テトラカルボン酸二無水物としては、例えば、エチレンテトラカルボン酸二無水物、ブタンテトラカルボン酸二無水物、シクロペンタンテトラカルボン酸二無水物、シクロへキサンテトラカルボン酸二無水物、1,2,4,5-シクロへキサンテトラカルボン酸二無水物、1,2,3,4-シクロヘキサンテトラカルボン酸二無水物、ピロメリット酸二無水物、1,1-ビス(2,3-ジカルボキシフェニル)エタン二無水物、ビス(2,3-ジカルボキシフェニル)メタン二無水物、ビス(3,4-ジカルボキシフェニル)メタン二無水物、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2,6,6-ビフェニルテトラカルボン酸二無水物、2,2-ビス(3,4-ジカルボキシフェニル)プロパン二無水物、2,2-ビス(2,3-ジカルボキシフェニル)プロパン二無水物、2,2-ビス(3,4-ジカルボキシフェニル)-1,1,1,3,3,3-へキサフルオロプロパン二無水物、2,2-ビス(2,3-ジカルボキシフェニル)-1,1,1,3,3,3-ヘキサフルオロプロパン二無水物、ビス(3,4-ジカルボキシフェニル)スルホン二無水物、ビス(3,4-ジカルボキシフェニル)エーテル二無水物、ビス(2,3-ジカルボキシフェニル)エーテル二無水物、3,3’,4,4’-ベンゾフェノンテトラカルボン酸二無水物、2,2’,3,3’-ベンゾフェノンテトラカルボン酸二無水物、4,4-(p-フェニレンジオキシ)ジフタル酸二無水物、4,4-(m-フェニレンジオキシ)ジフタル酸二無水物、1,2,5,6-ナフタレンテトラカルボン二無水物、1,4,5,8-ナフタレンテトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、1,2,3,4-ベンゼンテトラカルボン酸二無水物、3,4,9,10-ペリレンテトラカルボン酸二無水物、2,3,6,7-アントラセンテトラカルボン酸二無水物、1,2,7,8-フェナントレンテトラカルボン酸二無水物、9,9-ビス無水フタル酸フルオレン等が挙げられる。これらのテトラカルボン酸二無水物は単独或いは二種以上混合して用いることができる。   Examples of the tetracarboxylic dianhydride include, for example, ethylene tetracarboxylic dianhydride, butanetetracarboxylic dianhydride, cyclopentanetetracarboxylic dianhydride, cyclohexanetetracarboxylic dianhydride, 1,2, 4,5-cyclohexanetetracarboxylic dianhydride, 1,2,3,4-cyclohexanetetracarboxylic dianhydride, pyromellitic dianhydride, 1,1-bis (2,3-dicarboxyphenyl) ) Ethane dianhydride, bis (2,3-dicarboxyphenyl) methane dianhydride, bis (3,4-dicarboxyphenyl) methane dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic acid Dianhydride, 2,2,6,6-biphenyltetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane dianhydride, 2,2-bis (2,3-di Carboxyphenyl) propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -1,1,1,3,3,3-Hexafluoropropane dianhydride, 2,2-bis (2,3-dicarboxyphenyl) -1,1,1,3,3,3-hexafluoro Propane dianhydride, bis (3,4-dicarboxyphenyl) sulfone dianhydride, bis (3,4-dicarboxyphenyl) ether dianhydride, bis (2,3-dicarboxyphenyl) ether dianhydride, 3,3 ', 4,4'-benzophenone tetracarboxylic dianhydride, 2,2', 3,3'-benzophenone tetracarboxylic dianhydride, 4,4- (p-phenylenedioxy) diphthalic acid Anhydride, 4,4- (m-phenylenedioxy) diphthalic dianhydride, 1,2,5,6-naphthalene tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride, 2 , 3,6,7-ant Sen tetracarboxylic dianhydride, 1,2,7,8-phenanthrene tetracarboxylic acid dianhydride, 9,9-bis phthalic anhydride fluorene, and the like. These tetracarboxylic dianhydrides can be used alone or in admixture of two or more.

ジアミンとしては、脂肪酸ジアミン、芳香族ジアミン等を混合して使用できる。   As diamine, fatty acid diamine, aromatic diamine, etc. can be mixed and used.

脂肪族ジアミンは、例えば、炭素数が2〜15程度のものがよく、具体的には、ペンタメチレンジアミン、へキサメチレンジアミン、へプタメチレンジアミン等が挙げられる。   The aliphatic diamine has, for example, about 2 to 15 carbon atoms, and specific examples include pentamethylenediamine, hexamethylenediamine, and heptamethylenediamine.

芳香族ジアミンとしては、フェニル基が1個或いは2〜10個程度が結合したジアミノ化合物を挙げることができる。具体的には、フェニレンジアミン及びその誘導体、ジアミノジフェニル化合物及びその誘導体、ジアミノトリフェニル化合物及びその誘導体、ジアミノナフタレン及びその誘導体、アミノフェニルアミノインダン及びその誘導体、ジアミノテトラフェニル化合物及びその誘導体、ジアミノヘキサフェニル化合物及びその誘導体、カルド型フルオレンジアミン誘導体である。   Examples of the aromatic diamine include diamino compounds in which one phenyl group or about 2 to 10 phenyl groups are bonded. Specifically, phenylenediamine and derivatives thereof, diaminodiphenyl compounds and derivatives thereof, diaminotriphenyl compounds and derivatives thereof, diaminonaphthalene and derivatives thereof, aminophenylaminoindane and derivatives thereof, diaminotetraphenyl compounds and derivatives thereof, diaminohexa Phenyl compounds and derivatives thereof, cardo-type fluorenediamine derivatives.

フェニレンジアミンはm-フェニレンジアミン、p-フェニレンジアミン等であり、フェニレンジアミン誘導体としては、メチル基、エチル基等のアルキル基が結合したジアミン、例えば、2,4-トリフェニレンジアミン等である。   Phenylenediamine is m-phenylenediamine, p-phenylenediamine, etc., and the phenylenediamine derivative is a diamine to which an alkyl group such as methyl group or ethyl group is bonded, such as 2,4-triphenylenediamine.

ジアミノジフェニル化合物は、2つのアミノフェニル基が他の基を介してフェニル基同士結合したものである。結合はエーテル結合、スルホニル結合、チオエーテル結合、アルキレン又はその誘導体基による結合、イミノ結合、アゾ結合、ホスフィンオキシド結合、アミド結合、ウレイレン結合等である。アルキレン結合は炭素数が1〜6程度のものであり、その誘導体基はアルキレン基の水素原子の1以上がハロゲン原子等で置換されたものである。   The diaminodiphenyl compound is a compound in which two aminophenyl groups are bonded to each other via another group. The bond is an ether bond, a sulfonyl bond, a thioether bond, a bond by alkylene or a derivative group thereof, an imino bond, an azo bond, a phosphine oxide bond, an amide bond, a ureylene bond, or the like. The alkylene bond has about 1 to 6 carbon atoms, and the derivative group has one or more hydrogen atoms of the alkylene group substituted with a halogen atom or the like.

ジアミノジフェニル化合物の例としては、3,3’-ジアミノジフェニルエーテル、3,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルエーテル、3,3’-ジアミノジエニルスルホン、3,4’-ジアミノジエニルスルホン、4,4’-ジアミノジエニルスルホン、3,3’-ジアミノジフェニルメタン、3,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルスルフィド、3,3’-ジアミノジエニルケトン、3,4’-ジアミノジフェニルケトン、2,2-ビス(p-アミノフェニル)プロパン、2,2’-ビス(p-アミノフェニル)へキサフルオロプロパン、4-メチル-2,4-ビス(p-アミノフェニル)-1-ペンテン、4-メチル-2,4-ビス(p-アミノフェニル)-2-ペンテン、イミノジアニリン、4-メチル-2,4-ビス(p-アミノフェニル)ペンタン、ビス(p-アミノフェニル)ホスフィンオキシド、4,4’-ジアミノアゾベンゼン、4,4’-ジアミノジフェニル尿素、4,4’-ジアミノジフェニルアミド等を挙げることができる。   Examples of diaminodiphenyl compounds include 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodienyl sulfone, 3,4'-diaminodienyl Sulfone, 4,4'-diaminodienylsulfone, 3,3'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl sulfide, 3,3'- Diaminodienyl ketone, 3,4'-diaminodiphenyl ketone, 2,2-bis (p-aminophenyl) propane, 2,2'-bis (p-aminophenyl) hexafluoropropane, 4-methyl-2, 4-bis (p-aminophenyl) -1-pentene, 4-methyl-2,4-bis (p-aminophenyl) -2-pentene, iminodianiline, 4-methyl-2,4-bis (p- Aminophenyl) pentane, bis (p-a Nofeniru) phosphine oxide, 4,4'-aminoazobenzene, 4,4'-diaminodiphenyl urea, may be mentioned 4,4'-diaminodiphenyl amide.

ジアミノトリフェニル化合物は、2つのアミノフェニル基と1つのフェニレン基が何れも他の基を介して結合したものであり、他の基は、ジアミノジフェニル化合物と同様のものが選ばれる。ジアミノトリフェニル化合物の例としては、1,3-ビス(m-アミノフェノキシ)ベンゼン、1,3-ビス(p-アミノフェノキシ)ベンゼン、1,4-ビス(p-アミノフェノキシ)ベンゼン等を挙げることができる。   In the diaminotriphenyl compound, two aminophenyl groups and one phenylene group are both bonded via other groups, and the other groups are the same as those of the diaminodiphenyl compound. Examples of diaminotriphenyl compounds include 1,3-bis (m-aminophenoxy) benzene, 1,3-bis (p-aminophenoxy) benzene, 1,4-bis (p-aminophenoxy) benzene, and the like. be able to.

ジアミノナフタレンの例としては、1,5-ジアミノナフタレン及び2,6-ジアミノナフタレンを挙げることができる。   Examples of diaminonaphthalene include 1,5-diaminonaphthalene and 2,6-diaminonaphthalene.

アミノフェニルアミノインダンの例としては、5又は6-アミノ-1-(p-アミノフェニル)-1,3,3-トリメチルインダンを挙げることができる。   Examples of aminophenylaminoindane include 5 or 6-amino-1- (p-aminophenyl) -1,3,3-trimethylindane.

ジアミノテトラフェニル化合物の例としては、4,4’-ビス(p-アミノフェノキシ)ビフェニル、2,2’-ビス[p-(p’-アミノフェノキシ)フェニル]プロパン及び2,2’-ビス[p-(p’-アミノフェノキシ)ビフェニル]プロパン、2,2’-ビス[p-(m-アミノフェノキシ)フェニル]ベンゾフェノン等を挙げることができる。   Examples of diaminotetraphenyl compounds include 4,4'-bis (p-aminophenoxy) biphenyl, 2,2'-bis [p- (p'-aminophenoxy) phenyl] propane and 2,2'-bis [ and p- (p′-aminophenoxy) biphenyl] propane, 2,2′-bis [p- (m-aminophenoxy) phenyl] benzophenone, and the like.

カルド型フルオレン誘導体は、9,9-ビスアニリンフルオレン等が挙げられる。   Examples of the cardo type fluorene derivative include 9,9-bisaniline fluorene.

なお、これらの芳香族ジアミンの水素原子がハロゲン原子、メチル基、メトキシ基、シアノ基、フェニル基などの群より選択される少なくとも1種の置換基により置換された化合物であってもよい。   A compound in which the hydrogen atom of these aromatic diamines is substituted with at least one substituent selected from the group such as a halogen atom, a methyl group, a methoxy group, a cyano group, and a phenyl group may be used.

本発明にかかるポリアミック酸およびポリイミド溶液を製造する手段に特に制限はなく、例えば、(1)有機溶媒中で酸、ジアミン成分を反応させる方法、(2)ポリアミック酸を化学イミド化若しくは加熱イミド化させ、有機溶媒に溶解させる方法などの公知手法を用いることができる。   There are no particular restrictions on the means for producing the polyamic acid and polyimide solution according to the present invention. For example, (1) a method of reacting an acid and a diamine component in an organic solvent, (2) chemical imidization or heating imidization of polyamic acid And a known method such as a method of dissolving in an organic solvent can be used.

この際に用いられる溶媒としては、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、N-メチル-2-ピロリドン等の非プロトン系極性溶媒、クレゾール類等のフェノール系溶媒、ジグライム等のグリコール系溶媒が挙げられる。これらの溶媒は単独あるいは2種以上混合して用いることができる。溶媒使用量に特に制限はないが、生成するポリイミドの含有量が5〜50質量%とするのが望ましい。   Solvents used here include aprotic polar solvents such as N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, phenolic solvents such as cresols, glycols such as diglyme And system solvents. These solvents can be used alone or in combination of two or more. Although there is no restriction | limiting in particular in the usage-amount of a solvent, It is desirable that content of the polyimide to produce | generate shall be 5-50 mass%.

重合温度は一般的には-10〜120℃、好ましくは5〜30℃である。
重合時間は使用する原料組成により異なるが、通常は3〜24Hr(時間)である。
The polymerization temperature is generally −10 to 120 ° C., preferably 5 to 30 ° C.
The polymerization time varies depending on the raw material composition to be used, but is usually 3 to 24 Hr (hour).

このような条件下で得られるポリイミド前駆体およびポリイミドの有機溶媒溶液の固有粘度は、好ましくは0.1〜3.0dl/g、より一層好ましくは0.2〜1.5dl/gの範囲である。   The intrinsic viscosity of the polyimide precursor and polyimide organic solvent solution obtained under such conditions is preferably in the range of 0.1 to 3.0 dl / g, and more preferably in the range of 0.2 to 1.5 dl / g.

これらのワニスは予めシリカ粒子が分散した溶媒と前記溶媒に混合可能な溶媒中で重合したポリアミド酸溶液若しくはポリイミド溶液を任意の比率で混合するか、単分散の球状シリカ粒子を予め分散した溶媒中でポリアミド酸溶液若しくはポリイミド溶液を重合することができ、好ましくは10〜3000ポイズで調整する。前記ワニス調整工程においてはまた、シリカ/ポリイミドの比率が2〜6(質量比)でよい。粘度が範囲外の場合、均一に製膜が難しく、シリカ/ポリイミドの比率が範囲外の場合、ひび割れたりして安定的にシリカ-ポリイミド複合膜を得難い。   These varnishes are prepared by mixing a solvent in which silica particles are dispersed in advance and a polyamic acid solution or a polyimide solution polymerized in a solvent that can be mixed with the solvent in an arbitrary ratio, or in a solvent in which monodispersed spherical silica particles are dispersed in advance. The polyamic acid solution or the polyimide solution can be polymerized, and is preferably adjusted to 10 to 3000 poise. In the varnish adjusting step, the silica / polyimide ratio may be 2 to 6 (mass ratio). When the viscosity is out of the range, it is difficult to form a film uniformly. When the ratio of silica / polyimide is out of the range, it is difficult to stably obtain a silica-polyimide composite film due to cracking.

好適例において、3DOMポリイミド膜は以下のようにして製造することができる。単分散の球状シリカ粒子を予め分散した溶媒とポリアミド酸溶液若しくはポリイミド溶液を任意の比率で混合するか、単分散の球状シリカ粒子を予め分散した溶媒中でポリアミド酸若しくはポリイミドを重合することでシリカ-ポリイミドの比率(質量比)が2〜6となる様にワニスを製造することができる。その後、本ワニスを最終膜厚が5〜500μmとなる様に任意の膜厚で基板に製膜させ、乾燥して基板から剥がし、加熱若しくは化学的に後処理を施すことで、イミド化を完結させ、シリカ-ポリイミド複合膜を作製することができる。最後に、複合膜中のシリカをフッ化水素水で溶出除去し、三次元規則配列された連続孔を有する3DOMポリイミドを得る。   In a preferred embodiment, the 3DOM polyimide film can be manufactured as follows. Silica by mixing a monodispersed spherical silica particle in advance with a polyamic acid solution or a polyimide solution in an arbitrary ratio, or polymerizing polyamic acid or polyimide in a solvent in which monodispersed spherical silica particles have been dispersed in advance. -A varnish can be manufactured so that the ratio (mass ratio) of a polyimide may be 2-6. Then, this varnish is formed on the substrate with an arbitrary film thickness so that the final film thickness is 5 to 500 μm, dried and peeled off from the substrate, and heated or chemically post-treated to complete imidization. Thus, a silica-polyimide composite film can be produced. Finally, the silica in the composite film is eluted and removed with hydrogen fluoride water to obtain 3DOM polyimide having continuous holes arranged in a three-dimensional order.

上述のようにして得られる膜状の3DOMポリイミド膜は、三次元状に規則的に配列した微細孔を有し、膜の空隙率が50%以上、好ましくは85%以下であり、微細孔の平均直径が100〜2000nmであり、膜の内部などにおいてポリイミド相と空間相が微細な連通孔を形成しており、その連通孔の直径が1000nm以下、好ましくは10nm以上である。   The film-like 3DOM polyimide film obtained as described above has fine pores regularly arranged in three dimensions, and the porosity of the membrane is 50% or more, preferably 85% or less. The average diameter is 100 to 2000 nm, and the polyimide phase and the spatial phase form fine communication holes in the membrane or the like, and the diameter of the communication holes is 1000 nm or less, preferably 10 nm or more.

また、3DOMポリイミド膜の好適例において、使用するポリイミドは、式(1)で示す繰り返し単位で示すポリアミド酸を熱または化学的に閉環反応によって取得したもの、若しくは式(2)で示す繰り返し単位で示すポリイミドを溶媒に溶解したものでよい。Arはアリール基を示す。

Figure 0005605566
Figure 0005605566
In a preferred example of the 3DOM polyimide film, the polyimide to be used is a polyamic acid represented by the repeating unit represented by the formula (1) obtained by thermal or chemical ring closure reaction, or a repeating unit represented by the formula (2). The polyimide shown may be dissolved in a solvent. Ar represents an aryl group.

Figure 0005605566
Figure 0005605566

3DOMポリイミド膜は、平均膜厚が10〜300μmの膜に作製することができる。好ましくは、3DOMポリイミド膜は、耐熱性においても少なくとも5%の質量減少が350℃以上である。   The 3DOM polyimide film can be formed into a film having an average film thickness of 10 to 300 μm. Preferably, the 3DOM polyimide film has a mass loss of at least 5% even in heat resistance of 350 ° C. or higher.

また、本製造法において、多面積の基板へ塗布することで、1辺が5cm以上の膜を得ることも可能であり、且つ、通常のポリイミドフィルム製造装置を用いて、横幅が5cm以上のロール状のフィルムを得ることもできる。   In this production method, it is also possible to obtain a film having a side of 5 cm or more by applying to a large area substrate, and using a normal polyimide film production apparatus, a roll having a width of 5 cm or more. Can also be obtained.

ポリイミド多孔質膜の物性は次の測定法によって求めた。
1)空隙率
Porosity[%]=100−(W/(A×L×d))×100
(式中、Wは膜の質量、Aは膜の見かけの面積、Lは膜厚、dはポリイミドの密度である。)
2)微細孔直径
図1に示すような微細孔P1、P2の直径D1、D2等をいう。多孔質フィルム表面の走査型電子顕微鏡(SEM)写真により、複数点の開孔部について径を測定し、その平均値を算出した。
3)連通孔直径
図1に示すような微細孔P1およびP2の連通孔Qの直径D3等をいう。多孔質フィルム断面の走査型電子顕微鏡写真により、複数点の開孔部について径を測定し、その平均値を算出した。
4)Td5%(5%質量減少温度)
(株)島津製作所製TGA-60を用いて測定温度R. T.(室温)〜800℃、昇温速度10℃/分、窒素雰囲気下で測定した。
The physical properties of the polyimide porous membrane were determined by the following measurement method.
1) Porosity
Porosity [%] = 100-(W / (A x L x d)) x 100
(Wherein, W is the mass of the film, A is the apparent area of the film, L is the film thickness, and d is the density of the polyimide.)
2) Micropore diameter The diameters D1 and D2 of the micropores P1 and P2 as shown in FIG. From the scanning electron microscope (SEM) photograph of the surface of the porous film, the diameters of the openings at a plurality of points were measured, and the average value was calculated.
3) Diameter of communication hole Refers to the diameter D3 of the communication hole Q of the fine holes P1 and P2 as shown in FIG. From the scanning electron micrograph of the cross section of the porous film, the diameter was measured for a plurality of apertures, and the average value was calculated.
4) Td 5% (5% mass loss temperature)
Measurement was performed under a nitrogen atmosphere using a TGA-60 manufactured by Shimadzu Corporation at a measurement temperature RT (room temperature) to 800 ° C., a temperature increase rate of 10 ° C./min.

ワニス(樹脂組成物)製造工程、複合膜製造工程、シリカ除去工程からなる多孔質ポリイミドの製造方法の一般的な説明については、特開平11-21369号公報、特表2002-544331号公報、特開2004-292537号公報などに記載されている。また、ポリイミド以外の樹脂の例が特開昭56-8442号公報などに記載され、そこでは、0.5〜5のシリカ/PVAの質量比が用いられている。   For a general description of a method for producing a porous polyimide comprising a varnish (resin composition) production process, a composite film production process, and a silica removal process, JP-A-11-21369, JP-T 2002-544331, JP It is described in Kaikai 2004-292537. Examples of resins other than polyimide are described in JP-A-56-8442, etc., where a silica / PVA mass ratio of 0.5 to 5 is used.

(株)日本触媒製の平均直径550nmの単分散の球状シリカ粒子(真球率:1.0、粒径分布指数:1.20)30質量部をジメチルアセトアミド30質量部に分散し、(A)溶液を60質量部作製した。同時にジメチルアセトアミド中でピロメリット酸二無水物(PMDA)とジアミノジフェニルエーテル(ODA)をモル比0.990で重合させたポリアミド酸溶液(B)液を作製した。(B)はB型粘度で1500P(ポイズ)、固形分濃度で18質量%であった。(A)溶液を60質量部、(B)溶液を41.67質量部混合し、シリカ/ポリイミドの比率が4/1になるように混合した。混合はTHINKY(株式会社シンキー)製CONDITIONING MIXER AR-500(コンディショニング・ミキサー・AR-500)を用い、撹拌1000rpm×5分、脱泡1800rpm×3分の処理で行なった。このワニスを、リン酸エステル系の剥離剤をスピンコートしたガラス板に250μmで製膜した。製膜はドクターブレードを用い自動製膜装置を用いて10cm×10cmの面積で製膜した。これを室温で5時間放置し、ガラス板から膜が自然に剥離するまで待ち、剥離後にメタノールで剥離剤を除去した後、SUS製の型枠に固定し、100℃→200℃→300℃→400℃と段階的に熱処理を施し、イミド化を完結させ、シリカ-ポリイミド複合膜を取得した。そのシリカ-ポリイミド複合膜を10質量%フッ化水素水に浸し、6時間かけてシリカを溶解除去した。除去後、念入りに水洗し、3DOMポリイミド膜を取得した。得られたポリイミド多孔質膜の断面SEM像を図2に示す。物性を表1に示す。   30 parts by mass of monodispersed spherical silica particles (true sphere ratio: 1.0, particle size distribution index: 1.20) with an average diameter of 550 nm manufactured by Nippon Shokubai Co., Ltd. are dispersed in 30 parts by mass of dimethylacetamide, A mass part was produced. At the same time, a polyamic acid solution (B) was prepared by polymerizing pyromellitic dianhydride (PMDA) and diaminodiphenyl ether (ODA) at a molar ratio of 0.990 in dimethylacetamide. (B) had a B-type viscosity of 1500 P (poise) and a solid content concentration of 18% by mass. 60 parts by mass of (A) solution and 41.67 parts by mass of (B) solution were mixed and mixed so that the ratio of silica / polyimide was 4/1. Mixing was performed using a CONDITIONING MIXER AR-500 (conditioning mixer, AR-500) manufactured by THINKY (Shinky Co., Ltd.), with stirring at 1000 rpm × 5 minutes and defoaming at 1800 rpm × 3 minutes. This varnish was formed at a thickness of 250 μm on a glass plate spin-coated with a phosphate ester release agent. Film formation was performed with a doctor blade using an automatic film forming apparatus in an area of 10 cm × 10 cm. Leave this at room temperature for 5 hours, wait until the film spontaneously peels off from the glass plate, remove the release agent with methanol after peeling, then fix it to the SUS mold, 100 ° C → 200 ° C → 300 ° C → Heat treatment was performed stepwise at 400 ° C. to complete imidization, and a silica-polyimide composite film was obtained. The silica-polyimide composite film was immersed in 10% by mass hydrogen fluoride water, and the silica was dissolved and removed over 6 hours. After removal, it was carefully washed with water to obtain a 3DOM polyimide film. A cross-sectional SEM image of the obtained polyimide porous membrane is shown in FIG. Table 1 shows the physical properties.

(株)日本触媒製の平均直径550nmの単分散の球状シリカ粒子(真球率:1.0、粒径分布指数:1.20)をジメチルアセトアミドに分散し、(A)溶液を作製後、本液中にピロメリット酸二無水物とジアミノジフェニルエーテルをモル比0.990で添加、混合した後、重合させ、シリカ/ポリイミドが4/1のワニスを作製した。本ワニスについて、実施例1の製膜以降と同じ方法を行ない、3DOMポリイミド膜を取得した。物性を表1に示す。   A monodispersed spherical silica particle (true sphere ratio: 1.0, particle size distribution index: 1.20) with an average diameter of 550 nm manufactured by Nippon Shokubai Co., Ltd. is dispersed in dimethylacetamide. (A) After preparing the solution, Pyromellitic dianhydride and diaminodiphenyl ether were added at a molar ratio of 0.990, mixed and then polymerized to prepare a varnish having a silica / polyimide ratio of 4/1. About this varnish, the same method as the film forming after Example 1 was performed, and a 3DOM polyimide film was obtained. Table 1 shows the physical properties.

ワニスの原料を3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(S-BPDA)とp-フェニレンジアミン(PDA)を用い、実施例1記載の方法で3DOMポリイミド膜を取得した。物性を表1に示す。   A 3DOM polyimide film was obtained by the method described in Example 1, using 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (S-BPDA) and p-phenylenediamine (PDA) as raw materials for the varnish. . Table 1 shows the physical properties.

使用する単分散の球状シリカ粒子を平均直径1500nm(真球率:1.0、粒径分布指数:1.20)に変更して、実施例1記載の方法で3DOMポリイミド膜を取得した。物性を表1に示す。   The monodispersed spherical silica particles used were changed to an average diameter of 1500 nm (true sphere ratio: 1.0, particle size distribution index: 1.20), and a 3DOM polyimide film was obtained by the method described in Example 1. Table 1 shows the physical properties.

[比較例1]
ピロメリット酸二無水物とジアミノジフェニルエーテルをモル比0.990で重合させたポリアミド酸をガラス板に製膜し、メタノールにより溶媒を抽出して多孔体とし、熱処理によりイミド化を完結させて、多孔質ポリイミドを取得した。得られたポリイミド多孔質膜の断面SEM像を図3に示す。物性を表1に示す。
[Comparative Example 1]
Polyamic acid obtained by polymerizing pyromellitic dianhydride and diaminodiphenyl ether at a molar ratio of 0.990 is formed on a glass plate, and the solvent is extracted with methanol to form a porous body. Acquired. A cross-sectional SEM image of the obtained polyimide porous membrane is shown in FIG. Table 1 shows the physical properties.

[比較例2]
平均直径:550nm、真球率:1.72、粒径分布指数:1.80のシリカを用いて、実施例1と同様に多孔質ポリイミド膜を取得した。SEM像を図4に示す。
[Comparative Example 2]
A porous polyimide film was obtained in the same manner as in Example 1 using silica having an average diameter of 550 nm, a sphericity ratio of 1.72, and a particle size distribution index of 1.80. A SEM image is shown in FIG.

Figure 0005605566
Figure 0005605566

図2、表1に示すように、実施例は、規則的な連続微細孔を有する3DOMポリイミド膜が得られ、セパレーターや電解質膜などにおいておおいに役立つ。比較例では、連続微細孔は得られたが、孔径のばらつきが大きく、セパレーターや電解質膜として使用するのに不十分であった。   As shown in FIG. 2 and Table 1, in the example, a 3DOM polyimide film having regular continuous fine pores is obtained, which is very useful in separators, electrolyte membranes, and the like. In the comparative example, continuous fine pores were obtained, but the pore size variation was large, which was insufficient for use as a separator or electrolyte membrane.

3DOMポリイミド膜は三次元規則配列した連続微細孔を有し、且つその空隙率が70%以上であるような多孔質膜を提供し、安定した物性が要求されるセパレーターや燃料電池電解質膜、低誘電率材料としての用途にも適用できる。   3DOM polyimide membrane provides a porous membrane with three-dimensional regular array of continuous micropores and a porosity of 70% or more, and separators and fuel cell electrolyte membranes that require stable physical properties. It can also be used as a dielectric material.

P1,P2 微細孔
Q 連通孔
D1,D2,D3 直径
P1, P2 Micro hole Q Communication hole D1, D2, D3 Diameter

Claims (3)

ポリアミド酸若しくはポリイミド、シリカ粒子及び溶媒を混合してワニスを製造する、又はシリカ粒子が分散した溶媒中でポリアミド酸若しくはポリイミドを重合してワニスを製造するワニス製造工程と、
前記ワニス製造工程で製造されたワニスを基板に製膜後、イミド化を完結させて、ポリイミド−シリカ複合膜を製造する複合膜製造工程と、
前記複合膜製造工程で製造されたポリイミド−シリカ複合膜のシリカを除去するシリカ除去工程を有する多孔質ポリイミド膜の製造方法において、
前記シリカ粒子として真球率が1.0〜1.1、粒径分布指数(d25/d75)が1.5以下、平均直径が100〜2000nmのシリカ粒子を用い、かつ
前記ポリイミド−シリカ複合膜中におけるシリカ/ポリイミドの質量比を2〜6としたことを特徴とする多孔質ポリイミド膜の製造方法。
A varnish production process for producing a varnish by mixing polyamic acid or polyimide, silica particles and a solvent, or polymerizing polyamic acid or polyimide in a solvent in which silica particles are dispersed, and
A composite film production process for producing a polyimide-silica composite film by completing imidization after film formation of the varnish produced in the varnish production process on a substrate;
In the method for producing a porous polyimide film having a silica removal step of removing silica of the polyimide-silica composite membrane produced in the composite membrane production step,
Silica particles having a sphericity ratio of 1.0 to 1.1, a particle size distribution index (d 25 / d 75 ) of 1.5 or less, and an average diameter of 100 to 2000 nm are used as the silica particles, and the polyimide-silica A method for producing a porous polyimide film, wherein the mass ratio of silica / polyimide in the composite film is 2-6.
前記多孔質ポリイミド膜は、空隙率が50%以上であり、平均直径が100〜2000nmである微細孔同士が接して、連通孔を形成し、該連通孔の直径が1000nm以下であることを特徴とする請求項1に記載の多孔質ポリイミド膜の製造方法。   The porous polyimide film has a porosity of 50% or more, micropores having an average diameter of 100 to 2000 nm are in contact with each other to form a communication hole, and the diameter of the communication hole is 1000 nm or less. The method for producing a porous polyimide film according to claim 1. ポリアミド酸若しくはポリイミド、シリカ粒子及び溶媒を混合してワニスを製造する、又はシリカ粒子が分散した溶媒中でポリアミド酸若しくはポリイミドを重合してワニスを製造するワニス製造工程と、
前記ワニス製造工程で製造されたワニスを基板に製膜後、イミド化を完結させて、ポリイミド−シリカ複合膜を製造する複合膜製造工程と、
前記複合膜製造工程で製造されたポリイミド−シリカ複合膜のシリカを除去するシリカ除去工程を組み合わせ
前記シリカ粒子として真球率が1.0〜1.1、粒径分布指数(d 25 /d 75 )が1.5以下のシリカ粒子を用いることにより、
空隙率が50%以上であり、平均直径が100〜2000nmである微細孔同士が接して、連通孔を形成し、該連通孔の直径が1000nm以下である多孔質ポリイミド膜を得ることを特徴とする多孔質ポリイミド膜の製造方法。
A varnish production process for producing a varnish by mixing polyamic acid or polyimide, silica particles and a solvent, or polymerizing polyamic acid or polyimide in a solvent in which silica particles are dispersed, and
A composite film production process for producing a polyimide-silica composite film by completing imidization after film formation of the varnish produced in the varnish production process on a substrate;
Combined with the silica removal step of removing the silica of the polyimide-silica composite membrane produced in the composite membrane production step ,
The sphericity index as silica particles 1.0 to 1.1, particle size distribution index (d 25 / d 75) is the Rukoto with 1.5 following silica particles,
Micropores having a porosity of 50% or more and an average diameter of 100 to 2000 nm are in contact with each other to form a communication hole, and a porous polyimide film having a diameter of the communication hole of 1000 nm or less is obtained. A method for producing a porous polyimide film.
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